A small deformation sensor based on optical induction transparency effect and its control method

Abstract

The present invention proposes a small deformation sensor based on optically induced transparency effect and a control method thereof, comprising a light source, a straight waveguide, a waveguide coupling region, a first ring waveguide, a deformation plate, a second ring waveguide, a spectrometer, and a processing system; the present invention comprises two ring waveguides capable of generating an optical resonance effect, the two ring waveguides being coupled to each other to generate an optically induced transparency effect. When the object being measured is deformed, the light amplitude transmission coefficient when the two ring waveguides are coupled to each other will change, thereby changing the maximum transmittance of the transmission peak generated by the optically induced transparency effect; the present invention can measure deformation in a direction parallel to the short side of the deformation plate, and has the advantages of small size, high sensitivity, good resistance to electromagnetic interference, good corrosion resistance, and a high degree of integration.

Description

Technical Field

[0001] The present invention belongs to the field of optical sensing technology, and in particular, relates to a small deformation sensor based on optical sensing transparency effect and a control method thereof. Background Art

[0002] A deformation sensor is a sensor used to measure the deformation of an object. It is the most commonly used sensor in industrial production practice and is widely used in aviation, aerospace, steel, petroleum, coal, transportation, measurement, machinery manufacturing and other fields. It is also commonly used in people's lives, such as construction materials, railway transportation, electronic weighing, thrust deformation testing, reservoir bearing condition monitoring, etc.

[0003] Currently, the most widely used deformation sensor is the resistive deformation sensor, a resistive sensor that uses a resistor deformation plate as the conversion element. The resistor deformation plate is the most commonly used sensitive element, capable of converting the deformation of a mechanical component into a change in resistance. A resistive deformation sensor consists of an elastic sensitive element, a resistor deformation plate, a compensating resistor, and a housing. It can be designed in a variety of structural forms based on specific measurement requirements. When the elastic sensitive element deforms, the attached resistor deformation plate also deforms, which then converts the deformation into a change in resistance. The advantages of resistive deformation sensors include a wide measurement range, simple structure, good frequency response characteristics, and a wide variety of varieties. However, their disadvantages are also very obvious: the sensor has a slow response speed and poor linearity; the resistance value of the resistor deformation piece caused by deformation usually changes little, resulting in a weak output signal; the resistance value of the resistor deformation piece is relatively demanding. If the resistance value is too small, the required drive current is too large. At the same time, the heat generated by the deformation piece causes the temperature itself to be too high, which has a great impact on the environment and also causes a large change in the resistance value of the deformation piece. The output zero point drift is obvious, and the zero adjustment circuit is too complicated. The resistance value is too large, the impedance is too high, and the ability to resist external electromagnetic interference is poor. In short, the current deformation sensors have the disadvantages of large size, high noise, susceptibility to electromagnetic interference, poor corrosion resistance, and low degree of integration.

[0004] Optical waveguide devices have the advantages of small size, light weight, and flexible and diverse optical property design. Currently, optical waveguides are increasingly used in the field of sensing, and the huge advantages of optical waveguide sensors are gradually becoming apparent, such as high sensitivity, resistance to electromagnetic interference, and minimal impact on the measured environment. In addition, optical waveguide sensors are suitable for operating in harsh environments. In the fields of biology, chemistry, and various engineering industries, they can be used in complex environments with strong electromagnetic radiation, strong nuclear radiation, and strong corrosiveness. In particular, the high degree of integration of optical waveguide sensors can greatly meet the needs of modern society and the development of various industries. Summary of the Invention

[0005] In response to the above problems, the present invention proposes a small deformation sensor based on optically induced transparency effect and a control method thereof. The deformation of the measured object is obtained by the maximum transmittance of the transmission peak generated by the optically induced transparency effect. It has the advantages of small size, high sensitivity, good resistance to electromagnetic interference, corrosion resistance, and high degree of integration.

[0006] The present invention is achieved through the following technical solutions:

[0007] A small deformation sensor based on optical sensing transparency effect:

[0008] The deformation sensor includes a light source 1, a straight waveguide 2, a waveguide coupling region 3, a first ring waveguide 4, a deformation plate 5, a second ring waveguide 6, a spectrometer 7 and a processing system 8;

[0009] The light output end of the light source 1 is connected to the light input end of the straight waveguide 2, and the straight waveguide 2 and the first ring waveguide 4 are optically coupled at the waveguide coupling region 3;

[0010] A portion of the first ring waveguide 4 is fixed on the surface of the deformable plate 5, and a portion of the second ring waveguide 6 is fixed on the surface of the deformable plate 5; the first ring waveguide 4 and the second ring waveguide 6 are optically coupled on the surface of the deformable plate 5;

[0011] The optical output end of the straight waveguide 2 is connected to the optical input end of the spectrometer 7 , the electrical output end of the spectrometer 7 is connected to the electrical input end of the processing system 8 , and the electrical output end of the processing system 8 outputs the sensor output signal.

[0012] Furthermore, the deformable sheet 5 is a rectangular sheet-like object, the x-axis and the y-axis form a two-dimensional rectangular coordinate system, the intersection of the x-axis and the y-axis is the geometric center of the deformable sheet 5, the long side of the deformable sheet 5 is parallel to the x-axis, and the short side of the deformable sheet 5 is parallel to the y-axis;

[0013] The first annular waveguide 4 is fixed on the surface of the deformable plate 5 and is in an arc shape. The intersection of this arc waveguide and the y-axis is a, and the tangent of the arc waveguide passing through point a is parallel to the x-axis.

[0014] The second annular waveguide 6 is fixed on the surface of the deformable plate 5 and is in an arc shape. The intersection of this arc waveguide and the y-axis is b, and the tangent of the arc waveguide passing through point b is parallel to the x-axis.

[0015] The radius of the first ring waveguide 4 is between 200 μm and 300 μm;

[0016] The radius of the second ring waveguide 6 is between 200 μm and 300 μm.

[0017] Furthermore, the amplitude transmission coefficients of light transmitted through the first ring waveguide 4 and the second ring waveguide 6 are both close to 0.7;

[0018] In the waveguide coupling region 3, the straight waveguide 2 and the first ring waveguide 4 are optically coupled at the waveguide coupling region 3. At the waveguide coupling region 3, the amplitude transmission coefficient of light inside the straight waveguide 2 and the amplitude transmission coefficient of light inside the first ring waveguide 4 are both 0.28.

[0019] The first ring waveguide 4 and the second ring waveguide 6, when the first ring waveguide 4 and the second ring waveguide 6 are optically coupled on the surface of the deformable plate 5, the amplitude transmission coefficient of the light inside the first ring waveguide 4 is the same as the amplitude transmission coefficient of the light inside the second ring waveguide 6;

[0020] The power of the output light of the light source 1 is constant, and the line width of the light is at least 800 times the frequency interval of adjacent resonant frequencies of the first ring waveguide 4 and at least 800 times the frequency interval of adjacent resonant frequencies of the second ring waveguide 6 .

[0021] Furthermore, when measuring the deformation of the object being measured, the deformation sheet 5 needs to be fixed on the object.

[0022] When the object under test becomes longer in a direction parallel to the short side of the deformable plate 5, the mutual coupling distance between the first ring waveguide 4 and the second ring waveguide 6 on the surface of the deformable plate 5 increases, the amplitude transmission coefficient of light inside the first ring waveguide 4 and the amplitude transmission coefficient of light inside the second ring waveguide 6 increase, and the maximum transmittance of the transmission peak generated by the optically induced transparency effect decreases.

[0023] Furthermore, when the object under test becomes shorter in a direction parallel to the short side of the deformable plate 5, the mutual coupling distance between the first ring waveguide 4 and the second ring waveguide 6 on the surface of the deformable plate 5 decreases, the amplitude transmission coefficient of light inside the first ring waveguide 4 and the amplitude transmission coefficient of light inside the second ring waveguide 6 decrease, and the maximum transmittance of the transmission peak generated by the optically induced transparency effect increases.

[0024] Furthermore, the processing system 8 includes an acquisition circuit 8-1, an analysis circuit 8-2 and an output circuit 8-3;

[0025] The electrical input terminal of the acquisition circuit 8 - 1 is the electrical input terminal of the processing system 8 , and the electrical output terminal of the output circuit 8 - 3 is the electrical output terminal of the processing system 8 ;

[0026] The electrical output end of the spectrometer 7 is connected to the electrical input end of the acquisition circuit 8-1, the electrical output end of the acquisition circuit 8-1 is connected to the electrical input end of the analysis circuit 8-2, the electrical output end of the analysis circuit 8-2 is connected to the electrical input end of the output circuit 8-3, and the electrical output end of the output circuit 8-3 outputs the sensor output signal.

[0027] A control method for a small deformation sensor based on optical induction transparency effect:

[0028] The control method specifically includes the following steps:

[0029] Step 1: The output light of the light source 1 is transmitted to the waveguide coupling region 3 through the straight waveguide 2. Since the straight waveguide 2 and the first ring waveguide 4 are optically coupled in the waveguide coupling region 3;

[0030] Step 2: Light enters the first ring waveguide 4, and the light is transmitted in the first ring waveguide 4 and resonates in the first ring waveguide 4.

[0031] A portion of the first ring waveguide 4 is fixed on the surface of the deformable plate 5, and a portion of the second ring waveguide 6 is fixed on the surface of the deformable plate 5, and the first ring waveguide 4 and the second ring waveguide 6 are optically coupled on the surface of the deformable plate 5;

[0032] Step 3: Light enters the second ring waveguide 6 from the first ring waveguide 4. The light is transmitted in the second ring waveguide 6 and resonates in the second ring waveguide 6.

[0033] The first ring waveguide 4 and the second ring waveguide 6 are optically coupled on the surface of the deformable plate 5. Light enters the first ring waveguide 4 from the second ring waveguide 6. The light is mutually coupled between the first ring waveguide 4 and the second ring waveguide 6, and an optically induced transparency effect is generated.

[0034] In step 4, after the optically induced transparency effect is generated, the light is output from the straight waveguide 2 and enters the spectrometer 7. The spectrometer 7 collects the spectrum, converts the spectrum into a spectral voltage signal, and sends the spectral voltage signal to the processing system 8. The processing system 8 collects and analyzes the voltage signal and finally outputs the sensor output signal.

[0035] Furthermore, the spectrometer 7 sends the transmission spectrum voltage signal to the acquisition circuit 8-1, and the acquisition circuit 8-1 collects the transmission spectrum voltage signal and sends the transmission spectrum voltage signal to the analysis circuit 8-2;

[0036] The analysis circuit 8-2 obtains a transmission peak generated by a symmetrical optically induced transparency effect in the transmission spectrum voltage signal and obtains the maximum transmittance of this transmission peak. The analysis circuit 8-2 uses this transmittance to determine the deformation of the object being measured.

[0037] The analysis circuit 8-2 sends the deformation information of the object to be measured to the output circuit 8-3, and the output circuit 8-3 outputs the sensor output signal, which contains the deformation information of the object to be measured.

[0038] An electronic device includes a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of the above method when executing the computer program.

[0039] A computer-readable storage medium is used to store computer instructions, which implement the steps of the above method when executed by a processor.

[0040] Beneficial effects of the present invention

[0041] When the present invention measures the deformation of the object being measured, the deformable plate 5 needs to be fixed on the object. At the same time, based on the distribution of the first annular waveguide 4 and the second annular waveguide 6 on the deformable plate 5, the present invention can measure the deformation in the direction parallel to the short side of the deformable plate 5.

[0042] The present invention obtains the deformation of the measured object from the maximum transmittance of the transmission peak generated by the optically induced transparency effect. The present invention comprises two ring waveguides capable of generating an optical resonance effect. The two ring waveguides are coupled to each other to generate the optically induced transparency effect. When the measured object is deformed, the light amplitude transmission coefficient of the two ring waveguides when coupled to each other changes, thereby changing the maximum transmittance of the transmission peak generated by the optically induced transparency effect.

[0043] The invention has the advantages of small size, high sensitivity, good resistance to electromagnetic interference and corrosion, and high degree of integration. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 Schematic diagram of the overall structure of the present invention; wherein the light source 1, straight waveguide 2, waveguide coupling region 3, first ring waveguide 4, deformable plate 5, second ring waveguide 6, spectrometer 7, processing system 8;

[0045] Figure 2 Schematic diagram of the distribution of the waveguide on the deformable plate 5 of the present invention;

[0046] Figure 3 The optically induced transparency effect transmission spectrum of the light output from the light output end of the straight waveguide 2 when the amplitude transmission coefficient of the light inside the first ring waveguide 4 and the amplitude transmission coefficient of the light inside the second ring waveguide 6 are both 0.35;

[0047] Figure 4 The optically induced transparency effect transmission spectrum of the light output end of the straight waveguide 2 when the amplitude transmission coefficient of the light inside the first ring waveguide 4 and the amplitude transmission coefficient of the light inside the second ring waveguide 6 are both r, and r is 0.35, 0.30, and 0.40 respectively;

[0048] Figure 5 Schematic diagram of the circuit structure of the processing system 8 of the present invention. DETAILED DESCRIPTION

[0049] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0050] Combine Figures 1 to 5 .

[0051] A small deformation sensor based on optical sensing transparency effect:

[0052] The deformation sensor includes a light source 1, a straight waveguide 2, a waveguide coupling region 3, a first ring waveguide 4, a deformation plate 5, a second ring waveguide 6, a spectrometer 7 and a processing system 8;

[0053] The light output end of the light source 1 is connected to the light input end of the straight waveguide 2, and the straight waveguide 2 and the first ring waveguide 4 are optically coupled at the waveguide coupling region 3;

[0054] A portion of the first ring waveguide 4 is fixed on the surface of the deformable plate 5, and a portion of the second ring waveguide 6 is fixed on the surface of the deformable plate 5; the first ring waveguide 4 and the second ring waveguide 6 are optically coupled on the surface of the deformable plate 5;

[0055] The optical output end of the straight waveguide 2 is connected to the optical input end of the spectrometer 7 , the electrical output end of the spectrometer 7 is connected to the electrical input end of the processing system 8 , and the electrical output end of the processing system 8 outputs the sensor output signal.

[0056] The deformable sheet 5 is a rectangular sheet-like object. The x-axis and the y-axis form a two-dimensional rectangular coordinate system. The intersection of the x-axis and the y-axis is the geometric center of the deformable sheet 5. The long side of the deformable sheet 5 is parallel to the x-axis, and the short side of the deformable sheet 5 is parallel to the y-axis.

[0057] The first annular waveguide 4 is fixed on the surface of the deformable plate 5 and is in an arc shape. The intersection of this arc waveguide and the y-axis is a, and the tangent of the arc waveguide passing through point a is parallel to the x-axis.

[0058] The second annular waveguide 6 is fixed on the surface of the deformable plate 5 and is in an arc shape. The intersection of this arc waveguide and the y-axis is b, and the tangent of the arc waveguide passing through point b is parallel to the x-axis.

[0059] The radius of the first ring waveguide 4 is between 200 μm and 300 μm;

[0060] The radius of the second ring waveguide 6 is between 200 μm and 300 μm.

[0061] The first ring waveguide 4 has a waveguide loss, so that the amplitude transmission coefficient of light transmitted in the first ring waveguide 4 is close to 0.7.

[0062] The second ring waveguide 6 has a waveguide loss, so that the amplitude transmission coefficient of light transmitted in the second ring waveguide 6 is close to 0.7.

[0063] In the waveguide coupling region 3, the straight waveguide 2 and the first ring waveguide 4 are optically coupled at the waveguide coupling region 3. At the waveguide coupling region 3, the amplitude transmission coefficient of light inside the straight waveguide 2 and the amplitude transmission coefficient of light inside the first ring waveguide 4 are both 0.28.

[0064] The first ring waveguide 4 and the second ring waveguide 6, when the first ring waveguide 4 and the second ring waveguide 6 are optically coupled on the surface of the deformable plate 5, the amplitude transmission coefficient of the light inside the first ring waveguide 4 is the same as the amplitude transmission coefficient of the light inside the second ring waveguide 6;

[0065] The power of the output light of the light source 1 is constant, and the line width of the light is at least 800 times the frequency interval of adjacent resonant frequencies of the first ring waveguide 4 and at least 800 times the frequency interval of adjacent resonant frequencies of the second ring waveguide 6 .

[0066] When light enters the first ring waveguide 4, there are certain frequencies of light that satisfy the phase of one cycle of transmission in the first ring waveguide 4 is an integer multiple of 2π. Light of these frequencies can resonate in the first ring waveguide 4. These frequencies are called the "resonance frequencies" of the first ring waveguide 4.

[0067] When light enters the second ring waveguide 6, there are certain frequencies of light that satisfy the phase of one cycle of transmission in the second ring waveguide 6 is an integer multiple of 2π. Light of these frequencies can resonate in the second ring waveguide 6. These frequencies of light are called the "resonance frequencies" of the second ring waveguide 6.

[0068] Since the amplitude transmission coefficient of light in the first ring waveguide 4 and the amplitude transmission coefficient of light in the second ring waveguide 6 are the same when the first ring waveguide 4 and the second ring waveguide 6 are optically coupled on the surface of the deformable plate 5, when light is mutually coupled between the first ring waveguide 4 and the second ring waveguide 6, the transmission of light in the first ring waveguide 4 and the transmission of light in the second ring waveguide 6 are symmetrical. When a resonant frequency of the first ring waveguide 4 is the same as a resonant frequency of the second ring waveguide 6, an optically induced transparency effect is generated at this resonant frequency.

[0069] Since the radius of the first annular waveguide 4 is between 200 μm and 300 μm, and the radius of the second annular waveguide 6 is between 200 μm and 300 μm, the first annular waveguide 4 and the second annular waveguide 6 have relatively small sizes, and at the same time, excessive waveguide loss caused by the first annular waveguide 4 and the second annular waveguide 6 being too small is avoided.

[0070] Due to the waveguide loss of the first ring waveguide 4, the amplitude transmission coefficient of light propagating one cycle in the first ring waveguide 4 is close to 0.7. Due to the waveguide loss of the second ring waveguide 6, the amplitude transmission coefficient of light propagating one cycle in the second ring waveguide 6 is close to 0.7. In the waveguide coupling region 3, the amplitude transmission coefficients of light in the straight waveguide 2 and the amplitude transmission coefficients of light in the first ring waveguide 4 are both 0.28. Therefore, the transmission peak generated by the optically induced transparency effect has a large contrast.

[0071] When the radius of the first ring waveguide 4 is 21 μm, the radius of the second ring waveguide 6 is 29 μm, the amplitude transmission coefficient of light transmitted in the first ring waveguide 4 for one cycle is 0.69, and the amplitude transmission coefficient of light transmitted in the second ring waveguide 6 for one cycle is 0.71. At the waveguide coupling region 3, the amplitude transmission coefficient of light inside the straight waveguide 2 and the amplitude transmission coefficient of light inside the first ring waveguide 4 are both 0.28. On the surface of the deformable plate 5, the amplitude transmission coefficient of light inside the first ring waveguide 4 and the amplitude transmission coefficient of light inside the second ring waveguide 6 are both 0.35. The optically induced transparency effect transmission spectrum is as follows: Figure 3 As shown by the black solid line, Figure 3 The horizontal coordinate of the black dotted vertical line corresponds to the common resonant frequency w of the first ring waveguide 4 and the second ring waveguide 6. Due to the optically induced transparency effect, a transmission peak is generated at the resonant frequency w, and the straight line parallel to the vertical axis and about the resonant frequency w is Figure 3 The black dashed-dot vertical lines in are symmetrical, and the optically induced transparency effect transmission spectrum is non-periodic;

[0072] When the radius of the first ring waveguide 4 is 21 μm, the radius of the second ring waveguide 6 is 29 μm, the amplitude transmission coefficient of light transmitted in the first ring waveguide 4 for one cycle is 0.69, and the amplitude transmission coefficient of light transmitted in the second ring waveguide 6 for one cycle is 0.71. In the waveguide coupling region 3, the amplitude transmission coefficient of light in the straight waveguide 2 and the amplitude transmission coefficient of light in the first ring waveguide 4 are both 0.28. On the surface of the deformable plate 5, the amplitude transmission coefficient of light in the first ring waveguide 4 and the amplitude transmission coefficient of light in the second ring waveguide 6 are both r, and r is 0.35, 0.30, and 0.40, respectively. The optically induced transparency effect transmission spectrum is as follows: Figure 4As shown: when r = 0.35, the transmission spectrum is shown by the black solid line; when r = 0.30, the transmission spectrum is shown by the red dotted line; when r = 0.40, the transmission spectrum is shown by the blue dotted-dotted line.

[0073] Figure 4 The horizontal axis of the black dotted vertical line corresponds to the resonant frequency w. When the amplitude transmission coefficient of light in the first ring waveguide 4 and the amplitude transmission coefficient r of light in the second ring waveguide 6 decrease, the maximum transmittance of the transmission peak generated by the optically induced transparency effect increases. When the amplitude transmission coefficient of light in the first ring waveguide 4 and the amplitude transmission coefficient r of light in the second ring waveguide 6 increase, the maximum transmittance of the transmission peak generated by the optically induced transparency effect decreases.

[0074] Since the radius of the first ring waveguide 4 is between 200 μm and 300 μm, and the radius of the second ring waveguide 6 is between 200 μm and 300 μm, the radius of the first ring waveguide 4 is greater than 200 μm, and the radius of the second ring waveguide 6 is greater than 200 μm. Since the power of the output light of the light source 1 is constant, the line width of the light is at least 800 times the frequency interval between adjacent resonant frequencies of the first ring waveguide 4 and at least 800 times the frequency interval between adjacent resonant frequencies of the second ring waveguide 6. Therefore, an optically induced transparency effect transmission spectrum can be obtained.

[0075] When the present invention measures the deformation of the object being measured, the deformation sheet 5 needs to be fixed on the object;

[0076] Since the deformable sheet 5 is a rectangular sheet-like object, the x-axis and the y-axis constitute a two-dimensional rectangular coordinate system, the intersection of the x-axis and the y-axis is the geometric center of the deformable sheet 5, the long side of the deformable sheet 5 is parallel to the x-axis, and the short side of the deformable sheet 5 is parallel to the y-axis. The first annular waveguide 4 is a waveguide fixed on the surface of the deformable sheet 5 in the shape of an arc. The intersection of this arc-shaped waveguide and the y-axis is a, and the tangent of the arc-shaped waveguide passing through point a is parallel to the x-axis. The second annular waveguide 6 is a waveguide fixed on the surface of the deformable sheet 5 in the shape of an arc. The intersection of this arc-shaped waveguide and the y-axis is b, and the tangent of the arc-shaped waveguide passing through point b is parallel to the x-axis. Therefore, based on the distribution of the first annular waveguide 4 and the second annular waveguide 6 on the deformable sheet 5, the present invention can measure the deformation in the direction parallel to the short side of the deformable sheet 5;

[0077] When the object being measured is deformed in a direction parallel to the short side of the deformable sheet 5, the following two situations will occur:

[0078] (1) When the object to be measured becomes longer in a direction parallel to the short side of the deformable plate 5, since the long side of the deformable plate 5 is parallel to the x-axis and the short side of the deformable plate 5 is parallel to the y-axis, the first annular waveguide 4 is fixed on the surface of the deformable plate 5 and the waveguide is in an arc shape. The intersection of this arc waveguide and the y-axis is a, and the tangent of the arc waveguide passing through point a is parallel to the x-axis. The second annular waveguide 6 is fixed on the surface of the deformable plate 5 and the waveguide is in an arc shape. The intersection of this arc waveguide and the y-axis is b, and the tangent of the arc waveguide passing through point b is parallel to the x-axis. Therefore, on the surface of the deformable plate 5, the mutual coupling distance between the first annular waveguide 4 and the second annular waveguide 6 increases, the amplitude coupling coefficient of light between the first annular waveguide 4 and the second annular waveguide 6 decreases, and the amplitude transmission coefficient of light inside the first annular waveguide 4 and the amplitude transmission coefficient of light inside the second annular waveguide 6 increase. In this way, Figure 4 As shown in the optically induced transparency effect transmission spectrum, when the amplitude transmission coefficient of light inside the first ring waveguide 4 and the amplitude transmission coefficient of light inside the second ring waveguide 6 increase, the maximum transmittance of the transmission peak generated by the optically induced transparency effect decreases;

[0079] (2) When the object to be measured becomes shorter in a direction parallel to the short side of the deformable plate 5, since the long side of the deformable plate 5 is parallel to the x-axis and the short side of the deformable plate 5 is parallel to the y-axis, the first annular waveguide 4 is fixed on the surface of the deformable plate 5 and is in an arc shape. The intersection of this arc waveguide and the y-axis is a, and the tangent of the arc waveguide passing through point a is parallel to the x-axis. The second annular waveguide 6 is fixed on the surface of the deformable plate 5 and is in an arc shape. The intersection of this arc waveguide and the y-axis is b, and the tangent of the arc waveguide passing through point b is parallel to the x-axis. Therefore, on the surface of the deformable plate 5, the mutual coupling distance between the first annular waveguide 4 and the second annular waveguide 6 is reduced, the amplitude coupling coefficient of light between the first annular waveguide 4 and the second annular waveguide 6 is increased, and the amplitude transmission coefficient of light inside the first annular waveguide 4 and the amplitude transmission coefficient of light inside the second annular waveguide 6 are reduced. In this way, Figure 4 As shown in the optically induced transparency effect transmission spectrum, when the amplitude transmission coefficient of light inside the first ring waveguide 4 and the amplitude transmission coefficient of light inside the second ring waveguide 6 decrease, the maximum transmittance of the transmission peak generated by the optically induced transparency effect increases;

[0080] In this way, the deformation of the object being measured can be obtained from the maximum transmittance of the transmission peak generated by the optically induced transparency effect;

[0081] The processing system 8 includes an acquisition circuit 8-1, an analysis circuit 8-2 and an output circuit 8-3;

[0082] The electrical input terminal of the acquisition circuit 8 - 1 is the electrical input terminal of the processing system 8 , and the electrical output terminal of the output circuit 8 - 3 is the electrical output terminal of the processing system 8 ;

[0083] The electrical output end of the spectrometer 7 is connected to the electrical input end of the acquisition circuit 8-1, the electrical output end of the acquisition circuit 8-1 is connected to the electrical input end of the analysis circuit 8-2, the electrical output end of the analysis circuit 8-2 is connected to the electrical input end of the output circuit 8-3, and the electrical output end of the output circuit 8-3 outputs the sensor output signal.

[0084] A control method for a small deformation sensor based on optical induction transparency effect:

[0085] The control method specifically includes the following steps:

[0086] Step 1: The output light of the light source 1 is transmitted to the waveguide coupling region 3 through the straight waveguide 2. Since the straight waveguide 2 and the first ring waveguide 4 are optically coupled in the waveguide coupling region 3;

[0087] Step 2: Light enters the first ring waveguide 4, and the light is transmitted in the first ring waveguide 4 and resonates in the first ring waveguide 4.

[0088] A portion of the first ring waveguide 4 is fixed on the surface of the deformable plate 5, and a portion of the second ring waveguide 6 is fixed on the surface of the deformable plate 5, and the first ring waveguide 4 and the second ring waveguide 6 are optically coupled on the surface of the deformable plate 5;

[0089] Step 3: Light enters the second ring waveguide 6 from the first ring waveguide 4. The light is transmitted in the second ring waveguide 6 and resonates in the second ring waveguide 6.

[0090] The first ring waveguide 4 and the second ring waveguide 6 are optically coupled on the surface of the deformable plate 5. Light enters the first ring waveguide 4 from the second ring waveguide 6. The light is mutually coupled between the first ring waveguide 4 and the second ring waveguide 6, and an optically induced transparency effect is generated.

[0091] In step 4, after the optically induced transparency effect is generated, the light is output from the straight waveguide 2 and enters the spectrometer 7. The spectrometer 7 collects the spectrum, converts the spectrum into a spectral voltage signal, and sends the spectral voltage signal to the processing system 8. The processing system 8 collects and analyzes the voltage signal and finally outputs the sensor output signal.

[0092] The spectrometer 7 sends the transmission spectrum voltage signal to the acquisition circuit 8-1, and the acquisition circuit 8-1 collects the transmission spectrum voltage signal and sends the transmission spectrum voltage signal to the analysis circuit 8-2;

[0093] Since the transmission spectrum voltage signal is non-periodic, the analysis circuit 8-2 obtains a transmission peak generated by a symmetrical optically induced transparency effect in the transmission spectrum voltage signal and obtains the maximum transmittance of this transmission peak. The analysis circuit 8-2 uses this transmittance to derive the deformation of the object being measured.

[0094] The analysis circuit 8-2 sends the deformation information of the object to be measured to the output circuit 8-3, and the output circuit 8-3 outputs the sensor output signal, which contains the deformation information of the object to be measured.

[0095] An electronic device includes a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of the above method when executing the computer program.

[0096] A computer-readable storage medium is used to store computer instructions, which implement the steps of the above method when executed by a processor.

[0097] The memory in the embodiments of the present application can be volatile memory or non-volatile memory, or can include both volatile and non-volatile memory. Among them, the non-volatile memory can be read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), or flash memory. The volatile memory can be random access memory (RAM), which is used as an external cache. By way of example and not limitation, many forms of RAM are available, such as static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDR SDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchronous link dynamic random access memory (SLDRAM), and direct memory bus random access memory (DRRAM). It should be noted that memory of the methods described herein is intended to comprise, but not be limited to, these and any other suitable types of memory.

[0098] In the above embodiments, all or part of the embodiments can be implemented by software, hardware, firmware, or any combination thereof. When implemented using software, all or part of the embodiments can be implemented in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer instructions are loaded and executed on a computer, the processes or functions described in the embodiments of the present application are generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center via a wired method such as a coaxial cable, optical fiber, digital subscriber line (DSL), or wireless such as infrared, wireless, or microwave. The computer-readable storage medium can be any available medium that can be accessed by a computer or a data storage device such as a server or data center that includes one or more available media. The available medium may be a magnetic medium such as a floppy disk, a hard disk, a magnetic tape, an optical medium such as a high-density digital video disc (DVD), or a semiconductor medium such as a solid state disc (SSD).

[0099] During implementation, each step of the above method can be completed by an integrated logic circuit of the hardware in the processor or by instructions in the form of software. The steps of the method disclosed in conjunction with the embodiments of the present application can be directly embodied as being executed by a hardware processor, or can be executed by a combination of hardware and software modules in the processor. The software module can be located in a storage medium mature in the art such as a random access memory, a flash memory, a read-only memory, a programmable read-only memory or an electrically erasable programmable memory, a register, etc. The storage medium is located in the memory, and the processor reads the information in the memory and completes the steps of the above method in conjunction with its hardware. To avoid repetition, it will not be described in detail here.

[0100] It should be noted that the processor in the embodiments of the present application can be an integrated circuit chip with signal processing capabilities. During implementation, each step of the above-described method embodiment can be completed by hardware integrated logic circuits in the processor or by software instructions. The above-described processor can be a general-purpose processor, a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic device, discrete gate or transistor logic device, or discrete hardware components. The various methods, steps, and logic block diagrams disclosed in the embodiments of the present application can be implemented or executed. The general-purpose processor can be a microprocessor or any conventional processor. The steps of the methods disclosed in the embodiments of the present application can be directly implemented and executed by a hardware decoding processor, or by a combination of hardware and software modules in the decoding processor. The software module can be located in a storage medium well-known in the art, such as random access memory, flash memory, read-only memory, programmable read-only memory, electrically erasable programmable memory, registers, etc. The storage medium is located in the memory, and the processor reads the information in the memory and, in conjunction with its hardware, completes the steps of the above-described method.

[0101] The above is a detailed introduction to a small deformation sensor based on optical sensing transparency effect and its control method proposed in the present invention, and the principles and implementation methods of the present invention are explained. The description of the above embodiments is only used to help understand the method of the present invention and its core idea; at the same time, for general technical personnel in this field, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A small deformation sensor based on optical induction transparency effect, characterized by: The deformation sensor comprises a light source (1), a straight waveguide (2), a waveguide coupling region (3), a first ring waveguide (4), a deformation plate (5), a second ring waveguide (6), a spectrometer (7) and a processing system (8); The light output end of the light source (1) is connected to the light input end of the straight waveguide (2), and the straight waveguide (2) and the first ring waveguide (4) are optically coupled at the waveguide coupling region (3); A portion of the first annular waveguide (4) is fixed on the surface of the deformable plate (5), and a portion of the second annular waveguide (6) is fixed on the surface of the deformable plate (5); the first annular waveguide (4) and the second annular waveguide (6) are optically coupled on the surface of the deformable plate (5); The optical output end of the straight waveguide (2) is connected to the optical input end of the spectrometer (7), the electrical output end of the spectrometer (7) is connected to the electrical input end of the processing system (8), and the electrical output end of the processing system (8) outputs the sensor output signal.

2. The deformation sensor according to claim 1, characterized in that: The deformable sheet (5) is a rectangular sheet-like object, wherein the x-axis and the y-axis form a two-dimensional rectangular coordinate system, the intersection of the x-axis and the y-axis is the geometric center of the deformable sheet (5), the long side of the deformable sheet (5) is parallel to the x-axis, and the short side of the deformable sheet (5) is parallel to the y-axis; The first annular waveguide (4) is fixed on the surface of the deformable plate (5) and is in an arc shape. The intersection point of this arc waveguide and the y-axis is a, and the tangent line of the arc waveguide passing through point a is parallel to the x-axis. The second annular waveguide (6) is fixed on the surface of the deformable plate (5) and is in an arc shape. The intersection of this arc waveguide and the y-axis is b, and the tangent of the arc waveguide passing through point b is parallel to the x-axis. The radius of the first annular waveguide (4) is between 200 μm and 300 μm; The radius of the second ring waveguide (6) is between 200 μm and 300 μm.

3. The deformation sensor according to claim 2, characterized in that: The amplitude transmission coefficients of light transmitted through the first ring waveguide (4) and the second ring waveguide (6) are both close to 0.7; In the waveguide coupling region (3), the straight waveguide (2) and the first ring waveguide (4) are optically coupled at the waveguide coupling region (3). At the waveguide coupling region (3), the amplitude transmission coefficient of light inside the straight waveguide (2) and the amplitude transmission coefficient of light inside the first ring waveguide (4) are both 0.

28. The first annular waveguide (4) and the second annular waveguide (6) are optically coupled on the surface of the deformable plate (5), and the amplitude transmission coefficient of light inside the first annular waveguide (4) and the amplitude transmission coefficient of light inside the second annular waveguide (6) are the same; The power of the output light of the light source (1) is constant, and the line width of the light is at least 800 times the frequency interval of adjacent resonant frequencies of the first annular waveguide (4) and at least 800 times the frequency interval of adjacent resonant frequencies of the second annular waveguide (6).

4. The deformation sensor according to claim 3, characterized in that: When measuring the deformation of the object being measured, the deformation sheet (5) needs to be fixed on the object. When the object to be measured becomes longer in a direction parallel to the short side of the deformable plate (5), the mutual coupling distance between the first annular waveguide (4) and the second annular waveguide (6) on the surface of the deformable plate (5) increases, the amplitude transmission coefficient of light inside the first annular waveguide (4) and the amplitude transmission coefficient of light inside the second annular waveguide (6) increase, and the maximum transmittance of the transmission peak generated by the optically induced transparency effect decreases.

5. The deformation sensor according to claim 4, characterized in that: When the object to be measured becomes shorter in a direction parallel to the short side of the deformable plate (5), the mutual coupling distance between the first annular waveguide (4) and the second annular waveguide (6) on the surface of the deformable plate (5) decreases, the amplitude transmission coefficient of light inside the first annular waveguide (4) and the amplitude transmission coefficient of light inside the second annular waveguide (6) decrease, and the maximum transmittance of the transmission peak generated by the optically induced transparency effect increases.

6. The deformation sensor according to claim 5, characterized in that: The processing system (8) includes an acquisition circuit (8-1), an analysis circuit (8-2) and an output circuit (8-3); The electrical input end of the acquisition circuit (8-1) is the electrical input end of the processing system (8), and the electrical output end of the output circuit (8-3) is the electrical output end of the processing system (8); The electrical output end of the spectrometer (7) is connected to the electrical input end of the acquisition circuit (8-1), the electrical output end of the acquisition circuit (8-1) is connected to the electrical input end of the analysis circuit (8-2), the electrical output end of the analysis circuit (8-2) is connected to the electrical input end of the output circuit (8-3), and the electrical output end of the output circuit (8-3) outputs the sensor output signal.

7. A control method for a small deformation sensor based on optical induction transparency effect, characterized by: The control method specifically includes the following steps: Step 1: The output light of the light source (1) is transmitted to the waveguide coupling region (3) through the straight waveguide (2). The straight waveguide (2) and the first ring waveguide (4) are optically coupled at the waveguide coupling region (3); Step 2: Light enters the first ring waveguide (4), the light is transmitted in the first ring waveguide (4), and resonance occurs in the first ring waveguide (4). A portion of the first annular waveguide (4) is fixed on the surface of the deformable plate (5), a portion of the second annular waveguide (6) is fixed on the surface of the deformable plate (5), and the first annular waveguide (4) and the second annular waveguide (6) are optically coupled on the surface of the deformable plate (5); Step 3: Light enters the second ring waveguide (6) from the first ring waveguide (4), and the light is transmitted in the second ring waveguide (6) and resonates in the second ring waveguide (6). The first annular waveguide (4) and the second annular waveguide (6) are optically coupled on the surface of the deformable plate (5); light enters the first annular waveguide (4) from the second annular waveguide (6); the light is mutually coupled between the first annular waveguide (4) and the second annular waveguide (6), and an optically induced transparency effect is generated; In step 4, after the optically induced transparency effect is generated, the light is output from the straight waveguide (2) and enters the spectrometer (7). The spectrometer (7) collects the spectrum and then converts the spectrum into a spectral voltage signal. The spectral voltage signal is sent to the processing system (8). The processing system (8) collects and analyzes the voltage signal and finally outputs the sensor output signal.

8. The control method according to claim 7, characterized in that: The spectrometer (7) sends the transmission spectrum voltage signal to the collection circuit (8-1), and the collection circuit (8-1) collects the transmission spectrum voltage signal and sends the transmission spectrum voltage signal to the analysis circuit (8-2); The analytical circuit (8-2) obtains a transmission peak generated by a symmetrical optically induced transparency effect in the transmission spectrum voltage signal and obtains the maximum transmittance of the transmission peak. The analytical circuit (8-2) obtains the deformation of the measured object from the transmittance. The analytical circuit (8-2) sends the deformation information of the measured object to the output circuit (8-3), and the output circuit (8-3) outputs a sensor output signal. The sensor output signal includes the deformation information of the measured object in a direction parallel to the short side of the deformation plate (5).

9. An electronic device comprising a memory and a processor, wherein the memory stores a computer program, wherein: When the processor executes the computer program, the steps of the method according to any one of claims 7 to 8 are implemented.

10. A computer-readable storage medium for storing computer instructions, characterized in that: When the computer instructions are executed by a processor, the steps of the method according to any one of claims 7 to 8 are implemented.

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