Carrier transport system, magnetic stabilization unit, carrier and method for contactless transport of carrier

Abstract

Describes a carrier transportation system (100) for non - contact transportation of a carrier (10) along an orbital assembly. The carrier transportation system includes: a passive magnet arrangement (120) configured to generate a carrier levitation force (F L ) that cancels the gravity of the carrier; and an actively controlled two - way magnetic stabilization unit (140) configured to selectively apply a magnetic stabilization force (F S ) to the carrier (10) in both an upward direction and a downward direction to hold the carrier (10) at a predetermined vertical position within a carrier transportation space (102). Further describes a two - way magnetic stabilization unit (140) for a carrier transportation system and a carrier (10) configured for non - contact transportation with a carrier transportation system.

Description

Technical Field

[0001] Embodiments of the present disclosure relate to apparatus and methods for transporting carriers, particularly carriers for carrying large area substrates, using magnetic levitation systems. More specifically, embodiments of the present disclosure relate to apparatus and methods for contactless transport of vertically oriented carriers in substrate processing equipment (e.g., in vacuum deposition systems). In particular, embodiments of the present disclosure relate to carrier transport systems, magnetic stabilization units, carriers, and methods for contactless transport of carriers. Background Art

[0002] Techniques for depositing layers on substrates include, for example, sputtering deposition, physical vapor deposition (PVD), chemical vapor deposition (CVD), and thermal evaporation. The coated substrate can be used in several applications and in several technical fields. For example, the coated substrate can be used in the field of display devices. Display devices can be used in the manufacture of television screens, computer display screens, mobile phones, other handheld devices, etc. to display information. Typically, displays are produced by coating substrates with stacks of layers of different materials.

[0003] The substrate is typically coated in a vacuum deposition system and other substrate processing equipment having multiple deposition sources. The substrate is typically transported along a track assembly through the vacuum deposition system, for example, from a first deposition module to a second deposition module and / or to other substrate processing equipment. The substrate can be transported through the vacuum system in a substantially vertical orientation.

[0004] The substrate is typically carried by a carrier (i.e., a carrying device for carrying the substrate). The carrier is typically transported through the vacuum deposition system using a carrier transport system (e.g., a magnetic levitation system in which the weight of the carrier is at least partially held by magnetic forces). The magnetic levitation system can be configured to transport the carrier carrying the substrate along a track assembly that extends in a transport direction and defines a transport path for the carrier.

[0005] It is challenging to transport the carrier accurately and smoothly through the vacuum system, especially when the carrier is oriented vertically during transportation. The carrier can be supported and / or moved by rollers. However, particle generation caused by friction of the moving parts may lead to degradation of the manufacturing process. Transporting the carrier with a magnetic levitation system can reduce particle generation because the mechanical contact between the moving parts is reduced. For example, the magnetic levitation system can include a magnetic levitation unit that generates a carrier levitation force, i.e., a magnetic force acting on the carrier in a vertical direction to maintain the weight of the carrier.

[0006] The magnetic levitation unit of the magnetic levitation system may be actively controlled. In other words, the upward levitation force generated by the magnetic levitation unit may be actively controlled based on the measured gap width to continuously ensure a predetermined distance between the carrier and the actively controlled magnetic levitation unit. However, actively controlled magnetic levitation units are typically expensive and complex, and considerable effort may be required to provide adequate cooling for the large electromagnets used to generate the large magnetic levitation force. Furthermore, thermally induced expansion or contraction of the carrier during processing may make reliable position control of the carrier challenging.

[0007] In view of the above, it would be beneficial to provide an improved carrier transport system for suspending and transporting carriers and an improved method for contactless transport of carriers in a vacuum system that overcomes at least some of the problems of the prior art. In particular, it would be beneficial to provide a carrier transport system that allows contactless carrier transport with reduced effort and improved reliability. Summary of the invention

[0008] In view of the above, a carrier transport system for contactless transport of a carrier along a track assembly in a vacuum chamber, a magnetic stabilization unit for a carrier transport system, a carrier for transport by a carrier transport system and a method for contactless transport of a carrier are provided according to the independent claims. Further aspects, advantages and features are apparent from the dependent claims, the description and the drawings.

[0009] According to one aspect, a carrier transport system for non-contact transport of a carrier along a track assembly in a transport direction is provided. The carrier transport system comprises: a passive magnet arrangement for generating a carrier suspension force that counteracts the weight of the carrier; an actively controlled bidirectional magnetic stabilization unit configured to selectively apply a magnetic stabilization force to the carrier in an upward direction and a downward direction to maintain the carrier at a predetermined vertical position in a carrier transport space.

[0010] In some embodiments, the magnetic stabilization unit is arranged at a first ordinate, and the first permanent magnetic suspension unit of the passive magnet arrangement is arranged at a second ordinate different from the first ordinate, for example, at a distance of 1 m or more from the first ordinate.

[0011] According to one aspect, a magnetic stabilization unit for a carrier transport system is provided, in particular for a carrier transport system as described herein. The magnetic stabilization unit comprises: at least one electromagnet for acting on a first magnetic unit of a carrier arranged in a guide space between two poles of the at least one electromagnet; a set of permanent magnets for generating magnetic fields with opposite directions in an upper region and a lower region of the guide space; a gap sensor; and a controller configured to control the at least one electromagnet based on a signal of the gap sensor. The magnetic stabilization unit is actively controlled and configured to selectively apply a magnetic stabilization force to the carrier in an upward direction and a downward direction to keep the carrier at a predetermined vertical position in the carrier transport space.

[0012] According to one aspect, a carrier for transport by a carrier transport system, in particular by any of the carrier transport systems described herein, is described. The carrier comprises: a holding section for carrying an object to be transported at the carrier in a substantially vertical orientation; a first magnetic unit, which protrudes laterally from the carrier at a first longitudinal coordinate and is configured to magnetically interact with an actively controlled bidirectional magnetic stabilization unit; and a second magnetic unit, which is arranged at the carrier at a second longitudinal coordinate and is configured to magnetically interact with a first permanent magnetic levitation unit generating a carrier levitation force. The object to be transported may be, for example, a substrate or a mask.

[0013] The carrier may optionally further include any one of the following items: a third magnetic unit, which is arranged at the carrier at a third longitudinal coordinate and is configured to interact with a drive unit, which is configured to move the carrier along the track assembly in the transport direction; and a fourth magnetic unit, which is arranged at the carrier at a fourth longitudinal coordinate and is configured to magnetically interact with the second permanent magnetic suspension unit that generates a carrier suspension force.

[0014] According to one aspect, a vacuum deposition system for depositing a material on a substrate in a vacuum chamber is provided. The vacuum deposition system comprises: a vacuum chamber; a carrier transport system according to any of the embodiments described herein; and a deposition source, the deposition source being arranged in the vacuum chamber. Optionally, the carrier according to any of the embodiments described herein may also be part of the vacuum deposition system.

[0015] According to one aspect, a method for contactless transport of a carrier is provided. The method comprises: generating a carrier suspension force to counteract the weight of the carrier with a passive magnetic arrangement, the passive magnetic arrangement may include a first permanent magnetic suspension unit arranged at a second longitudinal coordinate; stabilizing the carrier at a predetermined vertical position in a carrier transport space by selectively applying a magnetic stabilizing force to the carrier in an upward direction and a downward direction with an actively controlled bidirectional magnetic stabilizing unit arranged at the first longitudinal coordinate; and moving the carrier in a transport direction with a driving unit arranged at a third longitudinal coordinate.

[0016] Embodiments also relate to apparatus for performing the disclosed methods and include apparatus portions for performing each described method aspect. These method aspects may be performed by means of hardware components, computers programmed by appropriate software, any combination of the two, or in any other manner. In addition, embodiments according to the present disclosure also relate to methods for operating the described apparatus and methods for manufacturing the apparatus and devices described herein. Methods for operating the described apparatus include method aspects for performing each function of the apparatus. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order that the above-recited features of the present disclosure may be understood in detail, a more particular description of the present disclosure briefly summarized above may be obtained by reference to the embodiments. The accompanying drawings relate to embodiments of the present disclosure and are described below:

[0018] Figure 1 shows a schematic cross-sectional view of a carrier transport system and a carrier according to embodiments described herein;

[0019] Figure 2 shows a schematic side view of a carrier transport system and a carrier according to embodiments described herein;

[0020] Figure 3 shows a schematic perspective view of a magnetic stabilization unit according to embodiments described herein;

[0021] Figure 4 Show Figure 3 Top view of the magnetic stabilization unit;

[0022] Figure 5A The first control state (I) is shown. Figure 3 A side view of a magnetic stabilization unit;

[0023] Figure 5B The second control state (II) is shown. Figure 3 a side view of a magnetic stabilization unit; and

[0024] Figure 6A flow chart of a method for contactless transport of a support in a transport direction according to embodiments described herein is shown. DETAILED DESCRIPTION

[0025] Reference will now be made in detail to various embodiments of the present disclosure, one or more examples of which are shown in the figures. In the following description of the figures, the same reference numerals refer to the same components. Only the differences relative to the individual embodiments are described. Each example is provided in a manner to explain the present disclosure and is not intended to be a limitation of the present disclosure. In addition, the features illustrated or described as parts of an embodiment may be used on other embodiments or in combination with other embodiments to produce yet other embodiments. The specification is intended to include such modifications and variations.

[0026] The carrier transport system is configured to transport the carrier in a vacuum environment, in particular in a vacuum chamber or in a vacuum system comprising a plurality of vacuum chambers arranged adjacent to each other. The carrier transport system may provide one, two or more transport paths, and may move or convey the carrier along one or more transport paths in a transport direction (T) along a track assembly.

[0027] The carrier transport system described herein can be part of a vacuum processing system, in particular a vacuum deposition system configured to deposit material on a substrate carried by a carrier. The carrier transport system can be configured to move the carrier along a track array for a distance of 5m or more or 10m or more.

[0028] As used herein, "transport direction T" is a direction along which a carrier can be transported by a carrier transport system. A track assembly 105 extending along the transport direction T may be provided, and the carrier transport system 100 may transport the carrier along the track assembly 105. The transport direction T is typically a horizontal direction or a substantially horizontal direction (horizontal direction + / - 10°). As used herein, "vertical direction V" corresponds to the direction of gravity, i.e., the gravity of the carrier is downward in the vertical direction. In order to counteract the gravity of the carrier so that the carrier can be kept in a floating state in a non-contact manner, the magnetic levitation unit is configured to apply a carrier levitation force F upward in the vertical direction V to the carrier. L As used herein, the “lateral direction L” is a direction that is lateral to the transport direction T and lateral to the vertical direction V. The lateral direction L is typically a substantially horizontal direction that is perpendicular to the transport direction T.

[0029] In some embodiments, the carrier may have a substantially vertical orientation during transport. In other words, the orientation of the carrier and the orientation of the substrate carried by the carrier may be substantially vertical (vertical + / - 10°) during transport. The substrate may be a large area substrate, in particular a large area glass substrate, such as for display manufacturing. In some embodiments, the substrate may be a semiconductor substrate, such as a wafer, and the vacuum system may be a semiconductor processing system.

[0030] The “carrier transport space 102” may be understood as a space in which a carrier is held contactlessly by the carrier transport system 100 and through which the carrier is transported contactlessly by the carrier transport system. The magnet of the carrier transport system may exert a magnetic force on the carrier, which holds the carrier contactlessly in the carrier transport space 102, i.e., the carrier does not escape from the carrier transport space 102.

[0031] Figure 1 1 is a schematic cross-sectional view of a carrier transport system 100 for contactlessly transporting a carrier 10 along a track assembly in a transport direction T as described herein. The carrier 10 may carry a substrate 11 at a holding section of the carrier 10 , for example, having a surface area of ​​1 m 2 Or a large area substrate of larger size. Alternatively, the carrier may carry another object to be transported, such as a mask, at the holding section. The holding section may include a holding mechanism, such as a mechanical, electrostatic or magnetic chuck device for holding the object in the holding section. Specifically, during the carrier transport, the angle between the vertical direction V and the main surface of the substrate or other object may be 10° or less.

[0032] The carrier transport system 100 comprises a passive magnet arrangement 120 for generating a carrier suspension force F that counteracts the gravity of the carrier 10. L , so that the carrier can remain in a floating state relative to the track assembly 105 in the carrier transport space 102. A "passive" magnet arrangement can be understood as including passive magnets for generating carrier levitation forces that are not actively controlled. For example, the passive magnet arrangement 120 may include a magnet for generating a carrier levitation force F L A "passive magnet arrangement" is thus distinguished from an "actively controlled magnet arrangement", which generates a magnetic field that varies depending on input parameters such as the width of the gap between the carrier and the track assembly.

[0033] In some embodiments, the carrier suspension force F Lis an attractive magnetic force exerted on the carrier 10, which pulls the carrier upward toward the passive magnet arrangement 120. Specifically, the passive magnet arrangement 120 includes a suspension magnet, such as a permanent magnet, which is configured to exert an attractive force on the carrier to pull the carrier upward. For example, the suspension magnet of the passive magnet arrangement can be arranged above the carrier transport space 102, such as to pull the carrier upward toward the suspension magnet, such as Figure 1 As schematically depicted in .

[0034] In some embodiments, the passive magnet arrangement 120 may also stabilize the carrier in the lateral direction L. In other words, the magnetic force exerted by the passive magnet arrangement on the carrier may prevent the carrier from accidentally leaving the carrier transport space 102 in the lateral direction L. Figure 1 In the embodiment shown, the carrier is magnetically attracted by the passive magnet arrangement 120 and therefore does not try to escape laterally. Other types of passive magnet arrangements 120 are possible. Optionally, a magnetic stabilization unit for stabilizing the carrier in the lateral direction L can be additionally provided, which can be active or passive.

[0035] The carrier transport system 100 further includes an actively controlled magnetic stabilization unit 140 configured to apply a magnetic stabilization force F to the carrier 10 in an upward direction and a downward direction. s , to keep the carrier 10 at a predetermined vertical position in the carrier transport space 102. Since the magnetic stabilization unit can apply a stabilization force pointing upward and a stabilization force pointing downward to the carrier, the magnetic stabilization unit is also referred to as "bidirectional" herein. Specifically, if the current carrier position is determined to be too low, the magnetic stabilization unit 140 can generate a magnetic stabilization force acting in an upward direction and pull the carrier upward, and if the current carrier position is determined to be too high, the magnetic stabilization unit 140 can generate a magnetic stabilization force acting in a downward direction and pull the carrier downward, so as to maintain the predetermined vertical positioning of the carrier.

[0036] According to Earnshaw's theorem, the carrier cannot be maintained in a floating state in a non-contact manner only by a passive magnetic unit that generates a constant magnetic field. For example, without active control applied by a magnetic stabilization unit or other stabilizing force, the carrier will move toward and collide with a passive suspension unit that applies an attractive force to the carrier from above, or the carrier will laterally escape from a passive suspension unit that applies a repulsive force to the carrier from below. According to the embodiments described herein, since the actively controlled magnetic stabilization unit ensures a predetermined distance between the carrier and the passive magnet arrangement, the carrier can be sustainably maintained in a non-contact manner in the carrier transport space. In other words, due to the magnetic stabilization force applied to the carrier by the magnetic stabilization unit 140, the carrier can be stabilized at a predetermined vertical distance from the passive magnet arrangement.

[0037] The carrier transport system described herein is beneficial compared to other magnetic levitation systems for the following reasons:

[0038] The carrier suspension force F is generated by the passive magnet arrangement L Other magnetic levitation systems use mechanical elements, such as rollers or spacer elements, which at least temporarily contact the carrier to ensure that the carrier can remain in a predetermined position and does not crash into or escape from the passive magnet arrangement. However, rollers or spacer elements in contact with the moving carrier generate small particles due to friction, which may negatively affect the deposition quality on the substrate carried by the carrier. Due to the magnetic stabilization force applied by the actively controlled magnetic stabilization unit, the carrier transport system described herein can transport the carrier completely contactlessly, i.e. without contact stabilization elements.

[0039] Other magnetic levitation systems rely on actively controlled suspension magnets to apply magnetic levitation forces to the carrier. Such suspension magnets need to generate strong magnetic forces in order to offset the gravity of the carrier. This means that large coils and complex cooling systems are typically provided for actively controlled suspension magnets. In addition, actively controlled suspension magnets typically control the intensity of the carrier suspension force based on a distance signal measured by a gap sensor, which measures the vertical gap between the carrier and the suspension magnet, with the purpose of keeping the gap width constant. However, it may be challenging to keep the gap width (which is typically as small as a few millimeters or less) constant, such as when the carrier thermally expands or contracts. For example, the height of a vertically oriented carrier may increase significantly during thermal treatment, which may cause the gap width to decrease, and therefore cause problems in the active control of the suspension unit and / or problems associated with maintaining a constant gap width of a linear motor.

[0040] In contrast, in the carrier transport system described herein, the magnetic levitation unit is a passive unit, which is arranged separately and at a vertical distance from the actively controlled magnetic stabilization unit. Therefore, a relatively small magnetic stabilization force generated by the magnetic stabilization unit is sufficient, which can fluctuate around a zero force value, because the (considerable) carrier levitation force is passively generated by the passive magnet arrangement arranged at different positions. Therefore, a small and compact actively controlled magnetic stabilization unit can be provided, and the cooling effort can be reduced. Furthermore, the magnetic stabilization unit can be placed at a position spaced apart from the magnetic levitation unit, for example, at a position where thermally induced carrier deformations do not play a role or do not negatively affect the control of the magnetic stabilization force and / or the driving force.

[0041] Other magnetic levitation systems rely on multiple active stabilization units that are arranged at different locations around the carrier transport space and are configured to generate stabilization forces in different directions. Such magnetic levitation systems are complex and expensive, and it is challenging to coordinate multiple active stabilization units. In contrast, the magnetic stabilization unit 140 of the carrier transport system 100 described herein is bidirectional, i.e., capable of generating stabilization forces pointing upward and downward and is arranged at a first longitudinal coordinate. Therefore, two or more stabilization units arranged at different longitudinal coordinates (such as above and below the carrier) may not be required. Therefore, the control of carrier positioning is simplified, and a more reliable and smoother contactless carrier transport can be obtained.

[0042] In some embodiments, the passive magnet arrangement 120 includes a first permanent magnetic suspension unit 121, which is arranged at a second ordinate V2 different from the first ordinate V1 where the magnetic stabilization unit 140 is arranged. The first permanent magnetic suspension unit 121 may include a permanent magnet configured to apply an upward carrier suspension force to the carrier 10, and the carrier 10 may include a magnetic counterpart unit (referred to herein as the second magnetic unit 15) attracted by the first permanent magnetic suspension unit 121, such as a ferromagnetic track or permanent magnet fixed at the carrier. Alternatively or additionally, the passive magnet arrangement may include one or more coils or ferromagnets attracted by the permanent magnet disposed at the carrier.

[0043] The first permanent magnetic suspension unit 121 may be arranged above the carrier transport space 102 and may be configured to magnetically interact with the second magnetic unit 15 which may be arranged at the head portion of the carrier. Specifically, the second longitudinal coordinate V2 where the first permanent magnetic suspension unit 121 is arranged may be arranged above the first longitudinal coordinate V1 where the magnetic stabilization unit 140 is arranged. Specifically, the first permanent magnetic suspension unit 121 may be configured to magnetically interact with the second magnetic unit 15 arranged at the head portion of the carrier, and the magnetic stabilization unit 140 may be configured to magnetically interact with the first magnetic unit 14 arranged at the bottom portion of the carrier. In some embodiments, the first magnetic unit 14 of the carrier may be a ferromagnetic element, such as a ferromagnetic track, which may be arranged on one side of the carrier and may protrude from the carrier to the magnetic stabilization unit.

[0044] In some embodiments, the distance D1 between the first ordinate V1 and the second ordinate V2 may be 1 m or more, particularly 2 m or more, more particularly 3 m or more or even 4 m or more. For example, in a carrier transport system configured to transport vertically oriented carriers, the passive magnet arrangement 120 may be disposed at the top rail 106 of the track assembly 105, and the magnetic stabilization unit 140 may be disposed at the bottom rail of the track assembly 105. Accurate control of the vertical carrier positioning relative to the bottom rail where the magnetic stabilization unit 140 is disposed may be sufficient, while less accurate carrier positioning relative to the top rail (where only the passive magnetic unit may be disposed) may be acceptable. Therefore, thermally induced carrier deformations that may cause vertical movement of the head portion of the carrier do not negatively affect the control of the magnetic stabilization force, and do not impair carrier transport by the linear motor.

[0045] The head portion of the vertically oriented carrier may be understood as the portion of the carrier interacting with the top rail 106 above the substrate holding section, and the bottom portion may be understood as the portion of the carrier interacting with the bottom rail below the substrate holding section. The distance between the head portion and the bottom portion of the carrier may be 1 m or more, in particular 2 m or more, more particularly 3 m or more or even 4 m or more. In some embodiments, the first permanent magnetic suspension unit 121 may be configured to magnetically interact with the head portion of the carrier, and the magnetic stabilization unit 140 may be configured to magnetically interact with the bottom portion of the carrier. Specifically, the first permanent magnetic suspension unit 121 may be arranged at the top rail 106 of the track assembly, in particular above the carrier transport space 102, and the magnetic stabilization unit 140 may be arranged at the bottom rail of the track assembly. It may be sufficient to accurately monitor and maintain the positioning of the carrier relative to the bottom rail, which may be provided with the magnetic stabilization unit 140 and the drive unit 150.

[0046] In some embodiments that may be combined with other embodiments described herein, the passive magnet arrangement 120 further comprises a second permanent magnetic suspension unit 122 arranged at a fourth longitudinal coordinate V4. The first permanent magnetic suspension unit 121 may be configured to offset a first portion of the weight of the carrier, and the second permanent magnetic suspension unit 122 may be configured to offset a second portion of the weight of the carrier.

[0047] Similar to the first permanent magnetic suspension unit 121, the second permanent magnetic suspension unit 122 may also include a permanent magnet or an electromagnet for applying an upward passive magnetic suspension force F to the carrier. L .exist Figure 1, the north pole of the permanent magnetic suspension unit is shown in shaded form, while the south pole is shown in color. Since the south pole of the second permanent magnetic suspension unit 122 points to and faces the north pole of the magnetic corresponding unit (hereinafter referred to as the fourth magnetic unit 17) of the carrier arranged below the second permanent magnetic suspension unit 122, an upward suspension force is applied to the carrier. The fourth magnetic unit 17 of the carrier may be a ferromagnetic unit or a permanent magnet. In other embodiments, the orientation, arrangement or shape of the permanent magnetic suspension unit may be different, as long as an upward suspension force is applied to the carrier.

[0048] In some embodiments, the first portion of the weight of the carrier offset by the first permanent magnetic suspension unit 121 may be 20% or more of the total weight, particularly about 30% or more, and more particularly 40% or more. The second portion of the weight of the carrier offset by the second permanent magnetic suspension unit 122 may be 50% or more of the total weight, particularly about 80% or more, and more particularly 90% or more.

[0049] The carrier levitation force F is generated by providing two or more magnetic levitation units at two or more different longitudinal coordinates (optionally with an offset in the lateral direction L) L corresponding parts, a smoother and more stable carrier transportation can be obtained. For example, the first permanent magnetic suspension unit 121 can be arranged at the top rail 106 of the track assembly and can be configured to magnetically interact with the head part of the carrier, and the second permanent magnetic suspension unit 122 can be arranged at the bottom rail of the track assembly and configured to magnetically interact with the bottom part of the carrier. The distance between the second ordinate V2 and the fourth ordinate V4 can be 1m or more, in particular 2m or more, more particularly 3m or more or 4m or more. The distance between the first ordinate V1 and the fourth ordinate V4 can be 30cm or less.

[0050] The second permanent magnetic suspension unit 122 and the magnetic stabilization unit 140 may be disposed at the bottom rail of the track assembly 105. For example, the second permanent magnetic suspension unit 122 may be disposed below the magnetic stabilization unit 140 at the bottom rail and configured to magnetically interact with the fourth magnetic unit 17 disposed at the carrier.

[0051] The sum of the first part and the second part can be 100% or more, in particular 120% or more, more particularly about 130% or more of the weight of the carrier. In other words, the combination of the first permanent magnetic suspension unit and the second permanent magnetic suspension unit can bear the entire weight of the carrier (or can generate a greater force).

[0052] The reason why the carrier suspension force corresponds to more than 100% of the carrier weight may be that there is at least one force component acting on the carrier during the carrier transport that is directed further downwards. For example, a linear motor arranged below the carrier can typically exert a transport force F on the carrier not only in the transport direction T but also in the transport direction T. T, and an additional downward force component F can be applied C , which force component may correspond to 20% or more of the weight of the carrier. The passive magnet arrangement 120 may also counteract the latter force component pulling the carrier downwards.

[0053] In some embodiments, (i) the carrier suspension force F of the passive magnet arrangement 120 L , (ii) the gravity of the carrier and (iii) the downward force component F applied by the drive unit 150 to the carrier C The sum of the magnetic stabilization forces F applied by the magnetic stabilization unit 140 to the carrier is substantially zero during carrier transport if the carrier is exactly arranged at a predetermined position in the carrier transport space 102. s For example, the magnetic stabilization force F applied by the magnetic stabilization unit 140 to the carrier is S The magnetic stabilizing unit 140 may continuously fluctuate around zero force (e.g., the applied stabilizing force integrated over time may be substantially zero). The magnetic stabilizing force may be provided only to stabilize and maintain the carrier in a predetermined vertical position in which the above forces (i), (ii), (iii) (and / or other optional forces acting on the carrier) add up to substantially zero. Since the magnetic stabilizing unit 140 does not apply a large magnetic force to the carrier, the magnetic stabilizing unit can be kept small and compact, and the cooling workload of the corresponding coil can be reduced.

[0054] The carrier levitation force F generated by the passive magnet arrangement 120 L The active magnetic stabilization unit may correspond to 100% or more, in particular 120% or more, and more particularly 130% or more of the weight of the carrier. Accordingly, the entire carrier suspension force may be passively generated (e.g., by the first permanent magnetic suspension unit and / or the second permanent magnetic suspension unit), and the actively controlled magnetic stabilization unit may only be provided to prevent the carrier from escaping from a predetermined position relative to the track assembly in the carrier transport space 102.

[0055] In some embodiments that can be combined with other embodiments described herein, the carrier transport system 100 further comprises a drive unit 150, in particular a linear motor, for moving the carrier along the track assembly 105 in the transport direction T. The drive unit 150 can be arranged at the third longitudinal coordinate V3, in particular below the magnetic counterpart of the carrier, referred to herein as the third magnetic unit 16. Specifically, the drive unit 150 can be arranged below the carrier transport space 102 and can be configured to magnetically interact with the bottom portion of the carrier, in particular with the third magnetic unit 16 arranged at the bottom portion of the carrier.

[0056] In some embodiments, the distance D2 between the first ordinate V1 at which the magnetic stabilizing unit 140 is arranged and the third ordinate V3 at which the drive unit 150 is arranged may be 30 cm or less, in particular 20 cm or less or even 10 cm or less. In particular, the magnetic stabilizing unit 140 and the drive unit 150 may be arranged at a close vertical distance to each other, for example, both at the bottom rail of the track assembly. The drive unit 150, which may be a linear motor, may rely on an accurate and small gap width of the third magnetic unit 16 relative to the carrier. Therefore, if the magnetic stabilizing unit 140, which ensures a predetermined vertical carrier positioning, is arranged in close proximity to the drive unit 150, the gap width may be accurately maintained even if the carrier is subjected to thermally induced deformation.

[0057] Specifically, if the carrier is to expand, the head portion of the carrier may move upward toward the top rail of the track assembly, but the bottom portion of the carrier, where the first magnetic unit 14 and the third magnetic unit 16 are arranged, may maintain a predetermined vertical position. Therefore, it is beneficial to arrange the magnetic stabilization unit near the drive unit. Problems associated with a large distance between the linear motor and the actively controlled suspension unit may be avoided by arranging the actively controlled magnetic stabilization unit 140 near the drive unit 150, while the passive magnet arrangement may be arranged at a different location, such as at the top rail 106. An actively controlled suspension unit is not required at the top rail.

[0058] According to some embodiments, the magnetic stabilizing unit 140 is arranged laterally on one side of the carrier transport space 102. In particular, the magnetic stabilizing unit 140 may be arranged laterally on only one side of the carrier, rather than on two opposite sides. By arranging the magnetic stabilizing unit 140 on one side of the carrier and being able to bidirectionally control and stabilize the position of the carrier, the control may be simplified, and there may be no need to coordinate several controllers of active units responsible for the stability of the carrier in different directions.

[0059] The magnetic stabilizing unit 140 may define a guide space 148 for the first magnetic unit 14, the first magnetic unit protruding laterally from the carrier into the guide space 148. The first magnetic unit 14 may be a ferromagnetic element, such as a ferromagnetic track, which protrudes laterally from the side surface of the carrier toward the magnetic stabilizing unit, in particular, into the guide space 148 defined by the magnetic stabilizing unit 140. For example, the magnetic stabilizing unit 140 may be a coil having a magnetic core, the shape of which is set so that the magnetic core partially surrounds the guide space 148, in particular at three sides of the guide space. Two magnetic poles of the coil may point to the guide space 148 from opposite sides, respectively, so that when the first magnetic unit 14 is arranged in the guide space 148, both magnetic poles point to the first magnetic unit 14.

[0060] When the magnetic field of the magnetic stabilizing unit extends through the guiding space 148 , the guiding space 148 may allow a reliable guiding of the first magnetic unit 14 of a carrier moving in the guiding space in the transport direction T. Furthermore, the guiding space enables the magnetic stabilizing unit to exert a stabilizing force on the first magnetic element 14 in two opposite vertical directions.

[0061] In some embodiments that may be combined with other embodiments described herein, the magnetic stabilization unit 140 includes at least one electromagnet 141 arranged in a guide space 148 for acting on the first magnetic unit 14, a gap sensor 146, and a controller 145 configured to control the at least one electromagnet 141 based on a signal of the gap sensor 146. The gap sensor 146 can be configured to measure the vertical positioning of the carrier, for example, by measuring the gap width between the carrier and the magnetic stabilization unit (or another fixed component of the track assembly) and send the measured position value to the controller. The controller can be configured to control the magnetic stabilization unit to apply a stabilization force pointing upward to the carrier (for example, if the carrier position is too low) or a stabilization force pointing downward to the carrier (for example, if the carrier position is too high). Thus, a bidirectional magnetic stabilization unit is provided.

[0062] In some embodiments, the magnetic stabilization unit 140 may have a permanent magnetic bias. Figure 3 , Figure 4 , Figure 5A and Figure 5B Details of a specific example of a bidirectional magnetic stabilization unit are described.

[0063] Figure 2 A schematic side view of a carrier transport system 100 for contactlessly holding a carrier 10 according to an embodiment described herein is shown. The carrier transport system 100 and the carrier 10 may have Figure 1 Some or all of the features of the illustrated embodiments may be referred to in the above description and will not be described in detail here.

[0064] The carrier 10 is configured to be transported by a carrier transport system 100 as described herein. The carrier 10 comprises a holding section for carrying an object, such as a substrate 11 to be processed, in particular in a substantially vertical orientation. The portion of the carrier above the holding section is also referred to herein as a head portion, and the portion of the carrier below the holding section is also referred to herein as a bottom portion. The carrier 10 further comprises a first magnetic unit 14, which protrudes laterally from the carrier at a first longitudinal coordinate and is configured to magnetically interact with an actively controlled bidirectional magnetic stabilization unit 140 as described herein. The first magnetic unit 14 may be a ferromagnetic element, such as a metal rail, which extends along a transport direction T on one side of the carrier and protrudes from the carrier in a lateral direction L. The first magnetic unit 14 may be arranged at a bottom portion of the carrier, i.e., below the substrate holding section.

[0065] The magnetic stabilization unit 140 is Figure 2 The magnetic stabilizing unit 140 is actually arranged so that the guide space 148 defined between its magnetic poles is open toward the carrier, so that the first magnetic unit 14 can protrude laterally into the guide space 148, as shown in FIG. Figure 1 As shown. Several magnetic stabilizing units 140 may be arranged at the first longitudinal coordinate V1, for example at predetermined intervals, along the transport direction T, so that the first magnetic unit 14 of the carrier, which is also arranged at the first longitudinal coordinate V1, always protrudes into at least one magnetic stabilizing unit during the movement along the track assembly, in particular always protrudes into at least two magnetic stabilizing units during the movement along the track assembly. Advantageously, the first magnetic unit 14 of the carrier protrudes into two magnetic stabilizing units at the same time, so that the vertical position of the carrier and the pitch of the carrier (i.e., the rotational position of the carrier relative to the lateral direction L) can be stabilized. Therefore, during transportation along the transport direction, the carrier can be stabilized vertically at multiple positions along the track assembly.

[0066] The carrier 10 further includes a second magnetic unit 15, which is arranged at the carrier at a second longitudinal coordinate and is configured to apply a carrier suspension force F to the second magnetic unit 15. L The passive magnet arrangement 120 of the carrier, in particular, magnetically interacts with the first permanent magnetic suspension unit 121 described herein. The second magnetic unit 15 may include a permanent magnetic track or a ferromagnetic track, such as a metal track. The second magnetic unit 15 may be arranged at the head portion of the carrier, for example, 1 m or more above the first magnetic unit 14. In particular, the second magnetic unit 15 may be arranged at the top surface of the carrier.

[0067] In some embodiments, the carrier 10 further includes a third magnetic unit 16, which is arranged at the carrier at a third longitudinal coordinate and is configured to interact with a drive unit 150, which is configured to move the carrier along the track assembly in the transport direction T. The third magnetic unit 16 may include a plurality of permanent magnets arranged at the bottom surface of the carrier. Specifically, the third magnetic unit 16 may be a moving part of a linear motor, which can be driven by the linear motor to move. The third magnetic unit 16 may be arranged at the bottom portion of the carrier, in particular at the bottom surface of the carrier. The vertical distance between the first magnetic unit 14 and the third magnetic unit 16 may be 30 cm or less. During the transport of the carrier, the gap width between the drive unit 150 and the third magnetic component 16 of the carrier may be 5 mm or less, in particular 3 mm or less.

[0068] According to some embodiments, the driving unit 150 may include a linear motor configured to apply magnetic force to the carrier to non-contactly move the carrier along the track assembly in the transport direction T. The driving unit 150 may include, for example, a plurality of linear motors disposed at the track assembly along the transport direction T at predetermined intervals.

[0069] The linear motor of the drive unit 150 may be configured to couple with the third magnetic unit 16 of the carrier to provide a driving force in the transport direction T. The drive unit generating the driving force in the transport direction T is contactless and thus does not generate particles during transport. In some embodiments, the drive unit 150 may include a synchronous linear motor. In other embodiments, the drive unit 150 may include an asynchronous linear motor.

[0070] In some embodiments, the carrier 10 further includes a fourth magnetic unit 17, which is arranged at the carrier at a fourth longitudinal coordinate and configured to generate the carrier suspension force F L The fourth magnetic unit 17 may include a permanent magnetic track or a ferromagnetic track, such as a metal track. The fourth magnetic unit 17 may be disposed at the bottom portion of the carrier, for example, 1 m or more below the second magnetic unit 15. In some embodiments, the fourth magnetic unit 17 is arranged at the bottom portion of the carrier between the first magnetic unit 14 and the third magnetic unit 16.

[0071] In some embodiments, the second magnetic unit 15 is arranged at the head portion of the carrier above the holding section, and the first magnetic unit 14, the third magnetic unit 16 and / or the fourth magnetic unit 17 are arranged at the bottom portion of the carrier below the holding section during transport of the carrier. In particular, the first magnetic unit, the third magnetic unit and the fourth magnetic unit may be arranged at the bottom portion.

[0072] Figure 2 The depicted carrier is particularly suitable for transport with the carrier transport system 100 described herein. Due to the above-described arrangement of the magnetic unit, smooth and reliable contactless carrier transport is possible even if the carrier expands or contracts in the vertical direction during thermal treatment.

[0073] In the following, reference will be made to Figure 3 , Figure 4 , Figure 5A and Figure 5B The magnetic stabilization unit 140 of the carrier transport system according to an embodiment of the present disclosure is described in further detail. Figure 3 A schematic perspective view of a magnetic stabilizing unit 140 is shown. Figure 4 A top view of the magnetic stabilizing unit 140 is shown. Figure 5A 1 shows a side view of the magnetic stabilizing unit 140 in a first control state (I), and Figure 5B A side view of the magnetic stabilizing unit 140 is shown in a second control state (II).

[0074] The magnetic stabilizing unit 140 is actively controlled and can apply a magnetic stabilizing force F in the upward direction and the downward direction to the first magnetic unit 14. sThe first magnetic unit 14 may be a ferromagnetic carrier track of a carrier, which is arranged in a guide space 148 provided by the magnetic stabilizing unit 140. The magnetic stabilizing unit 140 includes a magnetic stabilizing force F for applying to the first magnetic unit 14. s at least one electromagnet 141 (particularly a coil), a gap sensor and a controller ( Figure 1 The gap sensor may measure a vertical gap width between the carrier and a fixed component of the track assembly, for example, between the at least one electromagnet 141 and the first magnetic unit 14.

[0075] At least one electromagnet 141 may include a first magnetic pole 181 and a second magnetic pole 182 stacked and arranged facing each other, and a guide space 148 for the first magnetic unit 14 of the carrier is provided between the first magnetic pole 181 and the second magnetic pole 182. For example, at least one electromagnet 141 may include a coil having a core that is bent so that the first magnetic pole 181 and the second magnetic pole 182 provided at the ends of the core face each other, thereby defining the guide space 148 therebetween.

[0076] The magnetic stabilization unit 140 may further include a permanent magnetic bias provided by at least one set of permanent magnets 175 , as explained in further detail below.

[0077] In some embodiments, the magnetic stabilization unit 140 can be in a first control state (I) (eg Figure 5A as shown) and the second control state (II) (as shown Figure 5B In the first control state, the magnetic stabilizing force F S In the second control state, the magnetic stabilizing force F is applied to the carrier in the upward direction. S The force is applied to the carrier in a downward direction. The switching can be performed by reversing the magnetic polarity of the first pole and the second pole of the at least one electromagnet 141 (for example, by reversing the direction of the current flowing through the coil). In addition, by controlling the current flowing through the coil via a controller, the absolute value of the force can be changed. Therefore, the direction and absolute value of the magnetic stabilizing force can be appropriately set to keep the carrier in a predetermined vertical position.

[0078] In some embodiments that can be combined with other embodiments described herein, at least one electromagnet 141 includes a first electromagnet 171, a second electromagnet 172, and optionally a third electromagnet 173 (and optionally further electromagnets) arranged side by side in the transport direction and respectively partially surrounding the guide space 148. The second electromagnet 172 is arranged near the first electromagnet 171 in the transport direction T, and optionally between the first electromagnet 171 and the third electromagnet 173. In order to apply a magnetic stabilizing force F to the carrier s, the controller controls these electromagnets so that the first electromagnet 171 (and the optional third electromagnet 173, i.e., the outer electromagnet) is oppositely polarized relative to the second electromagnet (i.e., the central electromagnet). Therefore, the magnetic field lines generated by the first electromagnet 171 (and the optional third electromagnet 173) extending through the guide space 148 have opposite directions to the magnetic field lines 192 generated by the second electromagnet 172 extending through the guide space 148, as shown in FIG. Figure 5A and Figure 5B If the at least one electromagnet 141 comprises more than three electromagnets arranged side by side in the transport direction, two adjacent electromagnets are respectively oppositely polarized, thereby forming a linear array of alternatingly polarized electromagnets.

[0079] In particular, Figure 5A In the schematically depicted first control state (I), the magnetic field lines 192 generated by the second electromagnet 172 extend in a downward direction through the guide space 148, and the magnetic field lines generated by the first electromagnet 171 (and optionally the third electromagnet 173) extend in an upward direction through the guide space 148. Figure 5B In the schematically depicted second control state (II), the magnetic field lines 192 generated by the second electromagnet 172 extend in an upward direction through the guide space 148, and the magnetic field lines generated by the first electromagnet 171 (and optionally the third electromagnet 173) extend in a downward direction through the guide space 148. Figure 5A The "symmetrical" arrangement of three or more electromagnets with opposite polarizations in an alternating arrangement as shown can reduce undesirable force components applied by the magnetic stabilization unit to the carrier. Specifically, a stabilization force pointing accurately in an upward direction or a downward direction (e.g., in a vertical direction V or a direction enclosing an angle of 10° or less relative to the vertical direction V) can be provided.

[0080] In some embodiments that can be combined with other embodiments described herein, the magnetic stabilization unit 140 includes a permanent magnetic bias. In particular, the magnetic stabilization unit 140 includes a set of permanent magnets 175 that generate a magnetic field in the guide space 148 that is superimposed on the magnetic field generated by the at least one electromagnet 141.

[0081] The magnetic field lines 191 of the magnetic field generated by the set of permanent magnets 175 may have opposite directions in at least one upper region 178 and at least one lower region 179 of the guide space 148. For example, the first two permanent magnets with the same magnetic poles pointing to each other may be arranged above the guide space 148, and the second two permanent magnets with the same magnetic poles pointing to each other may be arranged on the other side of the guide space below the first two permanent magnets. This arrangement of the permanent magnets generates magnetic field lines 191 with opposite directions in the upper and lower regions of the guide space, such as Figure 5A and Figure 5BAs schematically depicted. Alternatively, the set of permanent magnets 175 may include a pair of permanent magnets arranged above and below the guide space, such as to generate oppositely directed magnetic field lines 191 in the upper and lower regions of the guide space. For example, a first permanent magnet may be disposed above the guide space between the first electromagnet and the second electromagnet, and a second permanent magnet may be disposed below the guide space between the first electromagnet and the second electromagnet.

[0082] In some embodiments, the set of permanent magnets 175 may be arranged between the first electromagnet and the second electromagnet, and optionally between the second electromagnet and the third electromagnet. Specifically, a first pair of permanent magnets may be arranged between the first electromagnet and the second electromagnet above and below the guide space 148, and an optional second pair of permanent magnets may be arranged between the second electromagnet and the third electromagnet above and below the guide space 148. This arrangement of permanent magnets generates oppositely directed magnetic field lines 191 in the upper region and the corresponding lower region between the magnetic poles of the first electromagnet, the second electromagnet, and the third electromagnet, as shown in FIG. Figure 5A and Figure 5B As schematically depicted in .

[0083] exist Figure 5A In the first control state (I) schematically depicted in FIG. 1 , the set of permanent magnets 175 generates magnetic field lines 191, which have substantially the same direction in the upper region 178 of the guide space as the magnetic field lines 192 generated by the first and second electromagnets (and optionally the third electromagnet). Accordingly, in the upper region 178 of the guide space (see FIG. Figure 5A The upward magnetic force in the three upper regions 178 (circled for illustration purposes in FIG. 1 ) acts on the first magnetic unit 14. In addition, the magnetic field lines 191 generated by the group of permanent magnets 175 have a substantially opposite direction to the magnetic field lines 192 generated by the first and second electromagnets (and the optional third electromagnet) in the lower region of the guide space. Therefore, in the lower region of the guide space, no net magnetic force or only a small net magnetic force acts on the first magnetic unit 14 (see FIG. 1 ). Figure 5A ). Therefore, the carrier in Figure 5A Pulled upwards.

[0084] exist Figure 5B In the second control state (II) schematically depicted in FIG. 1 , the magnetic field lines 191 generated by the set of permanent magnets 175 have substantially the same direction as the magnetic field lines 192 generated by the first and second electromagnets (and optionally the third electromagnet) in the lower region 179 of the guide space. Accordingly, in the lower region 179 of the guide space (see FIG. Figure 5BThe magnetic force pointing downward in the three lower regions 179 (circled for illustration purposes in FIG. 1 ) acts on the first magnetic unit 14. In addition, the magnetic field lines 191 generated by the group of permanent magnets 175 have a substantially opposite direction to the magnetic field lines 192 generated by the first and second electromagnets (and the optional third electromagnet) in the upper region of the guide space. Therefore, in the upper region of the guide space, no net magnetic force or only a small net magnetic force acts on the first magnetic unit 14 (see FIG. Figure 5B ). Thus, the carrier is pulled downwards.

[0085] Thus, a bidirectional magnetic stabilization unit is provided, which can switch between an upward force and a downward force applied to the carrier by reversing the magnetic poles of at least one electromagnet 141, in particular by reversing the magnetic poles of each of the first electromagnet, the second electromagnet and the optional third (or more) electromagnet. Furthermore, the stabilization force can be controlled by controlling the current flowing through the at least one electromagnet 141, in particular through the first electromagnet, the second electromagnet and the optional third electromagnet. One or more stabilization units arranged at a longitudinal coordinate with predetermined intervals therebetween along the transport direction T and having a common controller or a corresponding number of controllers are sufficient to stabilize the carrier bidirectionally in the vertical direction. Thus, a simple and reliable arrangement is provided according to the embodiments described herein.

[0086] The first electromagnet, the second electromagnet and optionally the third electromagnet may be controlled via the same control circuit and connected to the same controller. In particular, the same current (or a current varying in a corresponding manner) may flow through the first coil, the second coil and the third coil in alternating directions during transport of the carrier, such as Figure 4 As schematically depicted in , the magnetic field of the second electromagnet is opposite to the magnetic fields of the first electromagnet and the third electromagnet.

[0087] The magnetic stabilizing unit may be configured to generate a maximum magnetic stabilizing force of + / - 400N or less, in particular + / - 300N or less, more in particular about + / - 200N.

[0088] Figure 6 is a block diagram showing a method for non-contact transport of a carrier, for example, through a vacuum chamber of a vacuum deposition system, along a track assembly in a transport direction T. The transport method can be implemented using the carrier transport system described herein, which carries the carrier described herein in a non-contact manner, so that reference can be made to the above description and no further description is given here.

[0089] In block 610, a carrier levitation force is generated with a passive magnet arrangement to counteract the weight of the carrier. The passive magnet arrangement may include a first permanent magnetic levitation unit 121 arranged at a second ordinate V2 and an optional second permanent magnetic levitation unit 122 arranged at a fourth ordinate V4.

[0090] In block 620, a predetermined vertical positioning of the carrier in the carrier transport space is stabilized by applying a magnetic stabilizing force to the carrier. The magnetic stabilizing force is applied to the carrier by an actively controlled bidirectional magnetic stabilizing unit 140, which is capable of applying a magnetic stabilizing force to the carrier in an upward direction and in a downward direction, as described herein. In a first control state (I), an upwardly directed magnetic stabilizing force is applied to the carrier, for example if it is detected that the carrier position is too low and / or the carrier is sinking downward. In a second control state (II), a downwardly directed magnetic stabilizing force is applied to the carrier, for example if it is detected that the carrier position is too high and / or the carrier is rising upward. The position of the carrier can be controlled in a closed-loop control.

[0091] In block 630, a drive unit arranged at a third ordinate V3, in particular a drive unit, exerts a magnetic transport force F on the carrier. T The linear motor moves the carrier in the transport direction T along the track assembly.

[0092] Levitation of frame 610, stabilization of frame 620, and movement of frame 630 may occur simultaneously, enabling smooth and stable contactless carrier transport in a vacuum system with a compact magnetic levitation system that includes active controls that are not negatively affected by thermally induced carrier deformation.

[0093] In some embodiments that may be combined with other embodiments, the carrier is oriented substantially vertically during transportation. The distance between the first ordinate V1 and the second ordinate V2 may be greater than the distance between the first ordinate V1 and the third ordinate V3. Therefore, by the control of the magnetic stabilization unit, the gap width between the linear motor 150 and the third magnetic unit 16 may be accurately maintained (e.g., maintaining a gap width of 3 mm or less), even if the head portion of the carrier may be "extended away" from the bottom portion due to thermal deformation.

[0094] During carrier suspension and transport, (i) the carrier suspension force F exerted by the passive magnet arrangement L , (ii) the weight of the carrier and (iii) the vertical force component F applied by the drive unit to the carrier C sums up to substantially zero during carrier transport, so that the average magnetic stabilizing force F exerted by the magnetic stabilizing unit 140 on the carrier is s is also essentially zero, since the stabilizing force fluctuates around zero net force. This allows the magnetic stabilizing unit to be compact and relatively small.

[0095] In some embodiments, the carrier and the substrate carried by the carrier are oriented substantially vertically. The substrate may be a substrate having a surface area of ​​1 m 2 , especially 3m 2The carrier may have a vertical dimension of 1 m or more, in particular 2 m or more.

[0096] The first permanent magnetic suspension unit 121 may magnetically interact with the head portion of the carrier, the magnetic stabilization unit 140 may magnetically interact with the bottom portion of the carrier, and the driving unit 150 may interact with the bottom portion of the carrier.

[0097] While the foregoing is directed to embodiments, other and further embodiments may be envisaged without departing from the basic scope, and the scope is to be determined by the claims that follow.

Claims

1. A carrier transport system (100) for non-contact transport of a carrier (10) along a track assembly (105), comprising: A passive magnet arrangement (120) for generating a carrier suspension force (F L );as well as An actively controlled bidirectional magnetic stabilization unit (140) is arranged at a first longitudinal coordinate (V1) and is configured to selectively apply a magnetic stabilization force (F) to a first magnetic unit (14) of the carrier (10) in an upward direction and a downward direction. S ) to maintain the carrier (10) in a predetermined vertical position in the carrier transport space (102), The magnetic stabilization unit (140) comprises at least one electromagnet (141), the at least one electromagnet being used to act on the first magnetic unit (14), and the first magnetic unit (14) protruding laterally from the carrier (10) and arranged in a guide space (148) between two magnetic poles of the at least one electromagnet (141).

2. The carrier transport system of claim 1 , wherein the passive magnet arrangement ( 120 ) comprises a first permanent magnetic suspension unit ( 121 ), the first permanent magnetic suspension unit being arranged at a second longitudinal coordinate ( V2 ), and a distance ( D1 ) between the first longitudinal coordinate ( V1 ) and the second longitudinal coordinate ( V2 ) being 1 m or greater.

3. The carrier transport system of claim 2, wherein the passive magnet arrangement (120) further comprises a second permanent magnetic suspension unit (122), the second permanent magnetic suspension unit being arranged at a fourth longitudinal coordinate (V4), the first permanent magnetic suspension unit (121) being configured to offset a first portion of the weight of the carrier, and the second permanent magnetic suspension unit (122) being configured to offset a second portion of the weight of the carrier.

4. The carrier transport system of claim 1, wherein the carrier levitation force (F L ) corresponds to 100% or more of the gravity of the carrier (10).

5. The carrier transport system of claim 1, further comprising a drive unit (150) for moving the carrier along the track assembly (105) in a transport direction (T), wherein the drive unit (150) is arranged at a third longitudinal coordinate (V3).

6. The carrier transport system of claim 5, wherein a distance (D2) between the first longitudinal coordinate (V1) and the third longitudinal coordinate (V3) is 30 cm or less.

7. The carrier transport system according to any one of claims 1 to 6, wherein the magnetic stabilization unit (140) is arranged laterally on one side of the carrier transport space (102).

8. The carrier transport system according to any one of claims 1 to 6, wherein the magnetic stabilization unit (140) further comprises: Gap Sensor (146); as well as A controller (145) is configured to control the at least one electromagnet (141) based on a signal of the gap sensor (146).

9. The carrier transport system according to claim 8, wherein the magnetic stabilization unit (140) further comprises a set of permanent magnets (175) which generate magnetic field lines having opposite directions in the upper and lower regions of the guide space (148).

10. The carrier transport system of claim 8, wherein the at least one electromagnet (141) includes a first magnetic pole (181) and a second magnetic pole (182) stacked on each other and arranged facing each other, and the guide space (148) is provided between the first magnetic pole and the second magnetic pole.

11. The carrier transport system of claim 8, wherein the magnetic stabilization unit (140) can apply the magnetic stabilization force (F) to the carrier (10) in the upward direction by reversing the polarity of the at least one electromagnet (141). S ) and applying the magnetic stabilizing force (F) to the carrier (10) in the downward direction. S ) to switch between the second control state (II).

12. The carrier transport system of claim 8, wherein the at least one electromagnet (141) comprises a first electromagnet (171) and a second electromagnet (172) arranged side by side in the transport direction (T), wherein the second electromagnet (172) is polarized oppositely to the first electromagnet (171), such that - in a first control state (I), the magnetic field lines generated by the second electromagnet (172) extend through the guide space (148) in a downward direction and the magnetic field lines generated by the first electromagnet (171) extend through the guide space (148) in an upward direction, and In a second control state (II), the magnetic field lines generated by the second electromagnet (172) extend through the guide space (148) in an upward direction and the magnetic field lines generated by the first electromagnet (171) extend through the guide space (148) in a downward direction.

13. The carrier transport system of claim 12, further comprising a set of permanent magnets (175) arranged between the first electromagnet and the second electromagnet such that - in one of the first control state and the second control state, the set of permanent magnets generates magnetic field lines (191) which, in an upper region (178) of the guide space, have substantially the same direction as the magnetic field lines (192) generated by the first and second electromagnets and have substantially the opposite direction in a lower region (179) of the guide space, thereby generating a magnetic stabilizing force (F) in the upward direction S ),and - in the other of the first control state and the second control state, the set of permanent magnets generates magnetic field lines (191) which, in the lower region (179) of the guide space, have substantially the same direction as the magnetic field lines (192) generated by the first and second electromagnets and have substantially the opposite direction in the upper region (178) of the guide space, thereby generating a magnetic stabilizing force (F) in the downward direction S ).

14. A magnetic stabilization unit (140) for a carrier transport system, comprising: at least one electromagnet (141), the at least one electromagnet being used to act on a first magnetic unit (14) of the carrier, the first magnetic unit protruding laterally from the carrier and arranged in a guide space (148) between two magnetic poles of the at least one electromagnet; a group of permanent magnets (175), the group of permanent magnets generating magnetic fields having opposite directions in an upper region (178) and a lower region (179) of the guide space; Gap Sensor (146); as well as a controller (145) configured to control the at least one electromagnet based on a signal from the gap sensor, The magnetic stabilization unit is actively controlled and configured to selectively apply a magnetic stabilization force (F) to the carrier (10) in an upward direction and a downward direction. S ) to keep the carrier (10) at a predetermined vertical position.

15. A carrier (10) for transport by a carrier transport system (100), comprising: a holding section for holding an object to be transported at the carrier in a substantially vertical orientation; A first magnetic unit (14) protrudes laterally from the carrier at a first longitudinal coordinate and is configured to selectively be exerted with a magnetic stabilizing force (F) in an upward direction and a downward direction by magnetically interacting with an actively controlled bidirectional magnetic stabilizing unit (140) S ) to hold the carrier (10) in a predetermined vertical position in the carrier transport space (102), wherein the first magnetic unit (14) is configured to be arranged in a guide space (148) between two magnetic poles of at least one electromagnet of the magnetic stabilizing unit (140); as well as A second magnetic unit (15) is arranged on the carrier at a second longitudinal coordinate and is configured to magnetically interact with the first permanent magnetic suspension unit (121) to generate a carrier suspension force (F L ).

16. The vector of claim 15, further comprising at least one of the following: a third magnetic unit (16) arranged at the carrier at a third longitudinal coordinate and configured to interact with a drive unit (150) configured to move the carrier along the track assembly in a transport direction (T); and A fourth magnetic unit (17), the fourth magnetic unit being arranged on the carrier at a fourth longitudinal coordinate and configured to magnetically interact with the second permanent magnetic suspension unit (122), thereby generating a carrier suspension force (F L ).

17. The carrier according to claim 16, wherein the second magnetic unit (15) is arranged at a head portion of the carrier above the holding section, and at least one or more of the first magnetic unit (14), the third magnetic unit (16) and the fourth magnetic unit (17) are arranged at a bottom portion of the carrier below the holding section during transport of the carrier.

18. A method for non-contact transport of a carrier, comprising: A passive magnet arrangement is used to generate a carrier suspension force (F) that counteracts the weight of the carrier. L ); By selectively applying a magnetic stabilizing force (F) to the first magnetic unit (14) of the carrier in an upward direction and a downward direction using an actively controlled bidirectional magnetic stabilizing unit (140) arranged at a first longitudinal coordinate (V1), S ) to stabilize a predetermined vertical positioning of the carrier in a carrier transport space, wherein the first magnetic unit (14) protrudes laterally from the carrier and is arranged in a guide space (148) between two magnetic poles of at least one electromagnet of the magnetic stabilizing unit (140); as well as The carrier is moved in a transport direction by a drive unit arranged at a third longitudinal coordinate ( V3 ).

19. The method of claim 18, wherein (i) the carrier levitation force (F L ), (ii) the weight of the carrier and (iii) the vertical force component (F) applied by the drive unit to the carrier C ) add up to substantially zero during carrier transport, and the average magnetic stabilizing force applied by the magnetic stabilizing unit (140) to the carrier is substantially zero.

20. The method of claim 18 or 19, wherein the carrier is oriented substantially vertically and has a vertical dimension of 1 m or more, the first permanent magnetic levitation unit (121) of the passive magnet arrangement magnetically interacts with a head portion of the carrier, the magnetic stabilization unit (140) magnetically interacts with a bottom portion of the carrier, and the drive unit (150) interacts with the bottom portion of the carrier.

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