Method and device for manufacturing nanopores in membranes and device for generating superimposed electric fields

Abstract

The present application relates to a method and device for manufacturing nanopores in a membrane and a device for generating a superimposed electric field. The method comprises the following steps: arranging a membrane composed of a dielectric material in a container, wherein the container is filled with a fluid containing ions, and the membrane separates the fluid into two parts; applying an electric potential to a first electrode and a second electrode (30) on both sides of the membrane, wherein the first electrode comprises at least two conductive arms, wherein the electric field formed between at least one conductive arm and the second electrode is superimposed with the electric field formed between at least another conductive arm and the second electrode to form an electric field superposition region with enhanced electric field, and a preset area of ​​the membrane is located in the electric field superposition region; monitoring the leakage current passing through the membrane; and removing the electric potential passing through the membrane when a sudden increase in the leakage current is detected. The present application has the effect of improving the accuracy of manufacturing nanopores.

Description

Technical Field

[0001] The present application relates to a method and device for manufacturing nanopores in a membrane and a device for generating a superimposed electric field. Background Art

[0002] The development of nanotechnology and the rise of the ability to detect single molecules have promoted extraordinary progress in modern science and medicine. The core of the single-molecule measurement method is to confine a single analyte in space and time during the detection process. Ideally, the scale of the detector should be comparable to the size of the analyte to achieve single-molecule sensitivity. Therefore, single-molecule detection technology based on solid-state nanopore structures has developed rapidly. Using nanopores comparable to the scale of the detection molecule to control and sense the analyte can better understand its molecular behavior and interactions.

[0003] At present, nanopores are usually embedded in dielectric membranes. The dielectric membrane is arranged in the fluid, and the dielectric membrane separates the fluid. Then, an electric potential is applied across the dielectric membrane. The electric potential is used to accelerate the charged ions in the fluid. Due to some defects in the dielectric membrane, the charged ions will quantum tunnel into these defects. These charged ions tunneling into the defects will generate leakage current and cause more defects in the dielectric membrane. When the defects accumulate to a certain amount, the dielectric membrane will be permanently damaged and broken down. At this time, the leakage current will suddenly increase to form nanoscale holes in the dielectric membrane.

[0004] With respect to the above-mentioned related technologies, the inventors found that when an electric potential is applied across the dielectric membrane, the locations where charged ions generate new defects in the dielectric membrane are random, making it difficult to accurately generate nanopores. Summary of the invention

[0005] In order to improve the accuracy of manufacturing nanopores, the present application provides a method and device for manufacturing nanopores in a membrane, and a device for generating a superimposed electric field.

[0006] In a first aspect, the present application provides a method for manufacturing nanopores in a membrane, which adopts the following technical solution:

[0007] A method for making nanopores in a membrane, comprising the steps of:

[0008] Arranging a membrane composed of a dielectric material in a container, wherein the container is filled with a fluid containing ions, and the membrane separates the fluid into two parts;

[0009] Applying electric potential to the first electrode and the second electrode on both sides of the membrane, wherein the first electrode includes at least two conductive arms, wherein the electric field formed between at least one of the conductive arms and the second electrode is superimposed with the electric field formed between at least another of the conductive arms and the second electrode to form an electric field superposition region with enhanced electric field, and the predetermined area of ​​the membrane is located in the electric field superposition region;

[0010] monitoring a leakage current across the membrane;

[0011] Upon detecting a sudden increase in the leakage current, the potential across the membrane is removed.

[0012] By adopting the above technical solution, an electric potential is applied to the first electrode and the second electrode, and the electric potential forms an electric field superposition zone with enhanced electric field, and the preset area of ​​the membrane is located on the electric field superposition zone. The probability of quantum tunneling and new defects occurring in the preset area is much higher than that in other areas. Therefore, the membrane at the preset area position is more easily broken down, so that the position where the nanopore is formed can be localized, thereby improving the accuracy of manufacturing nanopores.

[0013] Preferably, it also includes:

[0014] The electric potential is an alternating electric potential so as to alternately form the electric field superposition region on both sides of the film.

[0015] By adopting the above technical solution, superimposed electric fields are sequentially formed on both sides of the membrane, which facilitates the formation of new defects in the preset areas on both sides of the membrane.

[0016] Preferably, the electric field superposition region is in a pointed shape.

[0017] By adopting the above technical solution, the superimposed electric field is in a sharp angle shape and can form a point in the preset area, further improving the accuracy of nanopore manufacturing.

[0018] Preferably, upon detecting a sudden increase in the leakage current, removing the potential across the membrane comprises:

[0019] monitoring a rate of change of the leakage current;

[0020] The rate of change is compared to a rate threshold and the potential across the membrane is removed when the rate of change is greater than the rate threshold.

[0021] Preferably, upon detecting a sudden increase in the leakage current, removing the potential across the membrane comprises:

[0022] monitoring a current value of the leakage current;

[0023] The current value is compared to a current threshold and when the current value is greater than the current threshold, the potential across the membrane is removed.

[0024] By adopting the above technical solution, it is convenient to detect the state of sudden increase of leakage current.

[0025] Preferably, the method further comprises adjusting the magnitude of the applied potential to adjust the time for manufacturing the nanopore.

[0026] Preferably, the method further comprises adjusting the ion concentration in the fluid to adjust the time for manufacturing the nanopore.

[0027] By adopting the above technical solution, the time for manufacturing nanopores can be adjusted according to actual needs, which is highly practical.

[0028] In a second aspect, the present application provides a device for generating a superimposed electric field, which adopts the following technical solution:

[0029] A device for generating a superimposed electric field, comprising:

[0030] power supply;

[0031] A conductor, the conductor includes a first electrode and a second electrode, the first electrode and the second electrode are respectively connected to the positive and negative electrodes of the power supply, the first electrode includes a body and at least two conductive arms arranged on the body, the second electrode is cylindrical, the second electrode is located at the axial position of the body, at least two of the conductive arms are located on the same side of the body, and at least two of the conductive arms are evenly arranged around the second electrode, and there is a distance between the end of the second electrode and the end of the conductive arm.

[0032] By adopting the above technical solution, the generated electric field can be gathered at the end of the second electrode to form a sharp-angled superimposed electric field.

[0033] Preferably, the first electrode is in the shape of a hollow cylinder, one end of the cylinder serves as the body, and the side wall of the cylinder serves as the conductive arm.

[0034] Preferably, the first electrode is cylindrical, and the ratio of the outer diameter of the second electrode to the diameter of the second electrode (30) is ( ):1.

[0035] Preferably, the distance between the end of the second electrode and the end of the conductive arm along the axial direction of the second electrode is 3 cm. 10cm.

[0036] By adopting the above technical solution, a superimposed electric field with a sharp angle shape with a better shape can be formed.

[0037] In a third aspect, the present application provides a device for manufacturing nanopores in a membrane, using the following technical solution:

[0038] An apparatus for making nanopores in a membrane, comprising:

[0039] A container, wherein a channel is provided in the container, wherein the channel is used to arrange a membrane composed of a dielectric material, wherein the container is filled with a fluid containing ions, and the membrane separates the fluid into two parts;

[0040] power supply;

[0041] A conductor is disposed on the container and facing the membrane and is electrically connected to the power source, wherein the conductor comprises a first electrode and a second electrode on both sides of the membrane, wherein the first electrode comprises at least two conductive arms for applying electric potential to the first electrode and the second electrode, and an electric field formed between at least one conductive arm and the second electrode is superimposed with an electric field formed between at least another conductive arm and the second electrode to form an electric field superposition region with enhanced electric field, and a preset region of the membrane is located in the electric field superposition region;

[0042] a current sensor for monitoring leakage current through the membrane;

[0043] A controller is connected to the current sensor and the power supply, and is used to remove the potential across the membrane when the leakage current suddenly increases.

[0044] By adopting the above technical solution, an electric potential is applied to the first electrode and the second electrode, and the electric potential forms an electric field superposition zone with enhanced electric field, and the preset area of ​​the membrane is located on the electric field superposition zone. The probability of quantum tunneling and new defects in the preset area is much higher than that in other areas. Therefore, the membrane at the preset area is more likely to be broken down. When the membrane is broken down, the current sensor detects a sudden increase in leakage current, and the controller removes the electric potential passing through the membrane by controlling the power supply to complete the manufacture of a single-hole nanopore. Among them, the position where the nanopore is formed can be localized, thereby improving the accuracy of manufacturing the nanopore.

[0045] Preferably, the first electrode also includes a body, the second electrode is cylindrical, the second electrode is located at the axial position of the body, the second electrode is fixedly connected to the side wall of the container, one end of the second electrode is placed in the fluid, at least two of the conductive arms are arranged on the same side of the body, and at least two of the conductive arms are evenly spaced around the second electrode.

[0046] Preferably, the distance between the second electrode and the membrane is 1* m 1∗ m.

[0047] Preferably, a distance between an end of the second electrode and an end of the conductive arm along the axial direction of the second electrode is 3 cm to 10 cm.

[0048] Preferably, the first electrode is in the shape of a hollow cylinder, one end of the cylinder serves as the body, and the side wall of the cylinder serves as the conductive arm.

[0049] Preferably, the second electrode is cylindrical, and the ratio of the outer diameter of the first electrode to the diameter of the second electrode is ( ):1.

[0050] By adopting the above technical solution, the generated electric field can be gathered to the end of the second electrode to form a sharp-angled superimposed electric field. The area where the sharp-angled superimposed electric field acts on the preset area is a point, which can further improve the accuracy of manufacturing nanopores.

[0051] Preferably, there are two power sources and two groups of conductors, the two groups of conductors are electrically connected to the two power sources respectively, and the two groups of conductors are centrally symmetrically arranged; the controller is connected to the two power sources and is used to control the two power sources to work alternately to form two alternating potentials.

[0052] By adopting the above technical solution, the power supply is controlled to work alternately, and superimposed potentials are formed on both sides of the membrane in sequence, so as to facilitate the formation of new defects in the preset areas on both sides of the membrane.

[0053] In summary, the present application includes the following beneficial technical effects: by setting up an electric field superposition zone with enhanced electric field, the probability of quantum tunneling and new defects occurring in a preset area is much higher than that in other areas, so that the location of nanopore formation can be localized, thereby improving the accuracy of nanopore manufacturing. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] Figure 1 It is a structural schematic diagram of a device for generating a superimposed electric field in Example 1 of the present application;

[0055] Figure 2 It is a structural schematic diagram of a device for generating a superimposed electric field in Example 2 of the present application;

[0056] Figure 3 It is a structural schematic diagram of a device for generating a superimposed electric field in Example 3 of the present application;

[0057] Figure 4 is a schematic structural diagram of a device for manufacturing nanopores in a membrane in Example 4 of the present application;

[0058] Figure 5 is a schematic structural diagram of a device for manufacturing nanopores in a membrane in Example 5 of the present application;

[0059] Figure 6 is a schematic structural diagram of a device for manufacturing nanopores in a membrane in Example 6 of the present application;

[0060] Figure 7 is a schematic structural diagram of a device for making nanopores in a membrane in Example 7 of the present application;

[0061] Figure 8 It is a schematic flow chart of a method for producing nanopores in a membrane in Example 8 of the present application.

[0062] Explanation of the reference numerals: 10, power supply; 20, first electrode; 21, main body; 22, conductive arm; 30, second electrode; 40, container; 41, first cavity; 42, second cavity; 43, channel; 44, connecting plate; 50, current sensor; 60, controller. DETAILED DESCRIPTION

[0063] In order to make the purpose, technical solutions and advantages of this application more clear, the following Figure 1-8 It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0064] Example 1

[0065] Reference Figure 1 An embodiment of the present application discloses a device for generating a superimposed electric field, the generating device comprising a power supply 10 and a conductor, wherein the conductor comprises a first electrode 20 and a second electrode 30. In the present embodiment, the first electrode 20 is connected to the positive electrode of the power supply 10, and the second electrode 30 is connected to the negative electrode of the power supply 10; in other embodiments, the first electrode 20 may also be connected to the negative electrode of the power supply 10, and the second electrode 30 is connected to the positive electrode of the power supply 10.

[0066] In this embodiment, the first electrode 20 includes a ring-shaped body 21 and two conductive arms 22 arranged on the body 21. The two conductive arms 22 are located on the same side of the body 21, and the two conductive arms 22 are symmetrically arranged. The two conductive arms 22 are perpendicular to the plane where the body 21 is located, so that the first electrode 20 is axially symmetrical. In other embodiments, the two conductive arms 22 may not be perpendicular to the plane where the body 21 is located.

[0067] In this embodiment, the second electrode 30 is in the shape of an elongated cylinder; in other embodiments, the second electrode 30 may also be in the shape of a prism. The second electrode 30 is located at the axis of the first electrode 20, and there is a distance between the end of the second electrode 30 and the end of the conductive arm 22.

[0068] The principle of Example 1 is as follows: when the power supply 10 is turned on, an electric field is formed between each conductive arm 22 and the second electrode 30, and the two electric fields converge from the ends of the two conductive arms 22 to the ends of the second electrode 30 to form a pointed electric field. The two electric fields are superimposed at the end position of the second electrode 30. Since the vector directions of the two electric fields at the end position of the second electrode 30 are consistent, an electric field superposition area with enhanced electric field is formed at the end of the second electrode 30.

[0069] When the first electrode 20 is connected to the negative electrode of the power source 10 and the second electrode 30 is connected to the positive electrode of the power source 10, the electric field between the two conductive arms 22 and the second electrode 30 is dispersed from the end of the second electrode 30 toward the end of the two conductive arms 22, forming a pointed electric field, and the two electric fields are superimposed at the end of the second electrode 30. Similarly, since the vector directions of the two electric fields at the end of the second electrode 30 are consistent, an electric field superposition region with enhanced electric field is formed at the end of the second electrode 30.

[0070] Example 2

[0071] Reference Figure 2 The difference between this embodiment and Embodiment 1 is that the body 21 of the first electrode 20 is square.

[0072] Example 3

[0073] Reference Figure 3 The difference between this embodiment and embodiment 1 is that the first electrode 20 is in the shape of a hollow cylinder, the end of the cylinder away from the second electrode 30 serves as the body 21, and the side wall of the cylinder serves as the conductive arm 22.

[0074] Optionally, the ratio of the outer diameter of the first electrode 20 to the diameter of the second electrode 30 is ( ): 1, wherein the diameter of the second electrode 30 is at the micrometer level or even the nanometer level.

[0075] Optionally, the distance between the end of the second electrode 30 and the end of the conductive arm 22 is 3 cm to 10 cm, and the distance is the distance along the axial direction of the second electrode 30 .

[0076] The principle of Example 3 is as follows: when the power supply 10 is turned on, multiple electric fields are formed between the end of the cylinder and the second electrode 30. The multiple electric fields converge from the end of the cylinder to the end of the second electrode 30 to form a pointed electric field. The multiple electric fields are superimposed at the end of the second electrode 30. Since the vector directions of the multiple electric fields at the end of the second electrode 30 are consistent, an electric field superposition area with enhanced electric field is formed at the end of the second electrode 30.

[0077] Example 4

[0078] Reference Figure 4The present application discloses an apparatus for making nanopores in a membrane, comprising a container 40, a power source 10, a conductor, a current sensor 50, and a controller 60, wherein the container 40 is made of an insulating material. In this embodiment, a first cavity 41 and a second cavity 42 are provided in the container 40, and the first cavity 41 and the second cavity 42 are connected through a channel 43.

[0079] Optionally, a connecting plate 44 is provided in the container 40, and the connecting plate 44 is fixed between the first cavity 41 and the second cavity 42, and a channel 43 is provided on the connecting plate 44, and the channel 43 is used to arrange a membrane composed of a dielectric material. In actual use, when the first cavity 41 and the second cavity 42 are filled with a fluid containing ions, the membrane separates the fluid into two parts. The fluids in the first cavity 41 and the second cavity 42 can be the same or different.

[0080] In this embodiment, the film may be composed of silicon nitride; in other embodiments, the film may also be composed of oxides and nitrides, and the film may also be composed of multiple layers of materials including dielectric materials and / or conductive materials.

[0081] The current sensor 50 is used to monitor the leakage current passing through the membrane. In this embodiment, the current sensor 50 can be an ammeter with a picoampere response, which is connected to the first cavity 41 and the second cavity 42 through a pair of electrodes. In other embodiments, the current sensor 50 can also be composed of a current amplification circuit and a data acquisition circuit.

[0082] The controller 60 is connected to the current sensor 50 and the power supply 10, and is used to remove the potential across the membrane when the leakage current suddenly increases. In this embodiment, the controller 60 can be a computer.

[0083] The conductor is disposed on the container 40 and faces the membrane. In the present embodiment, the conductor includes a first electrode 20 and a second electrode 30 , which are respectively located on both sides of the membrane, wherein the first electrode 20 is connected to the positive pole of the power source 10 .

[0084] The first electrode 20 includes a ring-shaped body 21 and two conductive arms 22 arranged on the body 21. The two conductive arms 22 are located on the same side of the body 21, and the two conductive arms 22 are symmetrically arranged. The two conductive arms 22 are perpendicular to the plane where the body 21 is located, and the two conductive arms 22 are vertically fixedly connected to the side wall of the container 40.

[0085] The second electrode 30 is connected to the negative electrode of the power source 10 . The second electrode 30 is in the shape of a source column. The second electrode 30 is located at the axis of the first electrode 20 , and one end of the second electrode 30 is placed in the fluid.

[0086] The principle of Example 4 is as follows: the membrane is packaged on the channel 43 of the connecting plate 44, and then the first cavity 41 and the second cavity 42 are filled with a fluid containing ions, and the fluid covers the membrane. The controller 60 and the power supply 10 are turned on, wherein the electric potential applied by the first electrode 20 and the second electrode 30 passes through the membrane, and the electric field between the two conductive arms 22 and the second electrode 30 is dispersed from the end of the second electrode 30 toward the end of the two conductive arms 22, forming a pointed electric field, and the two electric fields are superimposed at the end position of the second electrode 30. Since the vector directions of the two electric fields at the end position of the second electrode 30 are consistent, an electric field superposition area with enhanced electric field is formed at the end of the second electrode 30, and the electric field superposition area is located in a preset area of ​​the membrane.

[0087] The charged ions in the fluid move toward the preset area of ​​the membrane. Due to some defects in the membrane, the charged ions will quantum tunnel into these defects. These charged ions tunneling into the defects will generate leakage current. The current sensor 50 monitors the leakage current passing through the membrane. At the same time, the charged ions cause more defects in the membrane. When the defects accumulate to a certain amount, the membrane will be permanently damaged and punctured, forming nanoscale holes in the membrane. At this time, the current sensor 50 detects a sudden increase in the leakage current, and the controller 60 controls the power supply 10 to turn off to remove the potential passing through the membrane.

[0088] Among them, the preset area of ​​the membrane is located in the electric field superposition zone. The probability of quantum tunneling and new defects occurring in the preset area is much higher than that in other areas. Therefore, the membrane at the preset area is more easily broken down, so that the location of nanopore formation can be localized, thereby improving the accuracy of nanopore manufacturing.

[0089] Example 5

[0090] Reference Figure 5 The difference between this embodiment and embodiment 4 is that the first electrode 20 is in the shape of a hollow cylinder. In this case, the end of the cylinder away from the second electrode 30 serves as the body 21, and the side wall of the cylinder serves as the conductive arm 22.

[0091] Optionally, the ratio of the outer diameter of the first electrode 20 to the diameter of the second electrode 30 is ( ): 1. The diameter of the second electrode 30 is in the micrometer level or even nanometer level, wherein the distance between the end of the second electrode 30 and the end of the conductive arm 22 is 3 cm 10cm, and the distance between the second electrode 30 and the membrane is 1∗ m 1∗ m.

[0092] The principle of Example 5 is as follows: when the power supply 10 is turned on, multiple electric fields are formed between the end of the cylinder and the second electrode 30. The multiple electric fields converge from the end of the cylinder to the end of the second electrode 30 to form a pointed electric field. The multiple electric fields are superimposed at the end of the second electrode 30. Since the vector directions of the multiple electric fields at the end of the second electrode 30 are consistent, an electric field superposition area with enhanced electric field is formed at the end of the second electrode 30.

[0093] Example 6

[0094] Reference Figure 6 The difference between this embodiment and embodiment 5 is that there are two groups of conductors, there are two power sources 10, the two groups of conductors are electrically connected to the two power sources 10 respectively, and the two groups of conductors are centrally symmetrically arranged, and the controller 60 is connected to the two power sources 10.

[0095] The principle of Example 6 is: the controller 60 controls the two power sources 10 to work alternately to form two alternating potentials, so as to alternately form electric field superposition areas on both sides of the membrane, thereby improving the efficiency of manufacturing nanopores.

[0096] Example 7

[0097] Reference Figure 7 The difference between this embodiment and the embodiment 5 is that there are two groups of conductors, which are centrally symmetrically arranged, wherein the first electrode 20 of one group of conductors is connected to the positive electrode of the power source 10 through the switch tube S1, and the second electrode 30 of the group of conductors is connected to the negative electrode of the power source 10 through the switch tube S2. The first electrode 20 of the other group of conductors is connected to the negative electrode of the power source 10 through the switch tube S3, and the second electrode 30 of the group of conductors is connected to the positive electrode of the power source 10 through the switch tube S4, wherein the control ends of the switches S1 to S4 are all connected to the controller 60.

[0098] The principle of Example 7 is: turn on the power supply 10, and in the first cycle, the controller 60 controls the switch tubes S1 and S2 to be turned on, and controls the switch tubes S3 and S4 to be turned off; in the second cycle, the controller 60 controls the switch tubes S1 and S2 to be turned off, and controls the switch tubes S3 and S4 to be turned on. By controlling the switch tubes to be alternately turned on and off, two alternating potentials are formed, so as to alternately form electric field superposition zones on both sides of the membrane, thereby improving the efficiency of manufacturing nanopores.

[0099] Example 8

[0100] Reference Figure 8 This embodiment discloses a method for making nanopores in a membrane, comprising the following steps:

[0101] S10: placing a membrane composed of a dielectric material in a container 40, wherein the container 40 is filled with a fluid containing ions, and the membrane separates the fluid into two parts.

[0102] S20: applying electric potential to the first electrode 20 and the second electrode 30 on both sides of the membrane, wherein the first electrode 20 includes at least two conductive arms 22, wherein the electric field formed between at least one of the conductive arms 22 and the second electrode 30 is superimposed with the electric field formed between at least another of the conductive arms 22 and the second electrode 30 to form an electric field superposition zone with enhanced electric field, and the preset area of ​​the membrane is located in the electric field superposition zone.

[0103] S30: Monitoring the leakage current across the membrane.

[0104] S40: Upon detecting a sudden increase in the leakage current, removing the potential across the membrane.

[0105] In this embodiment, the membrane is packaged on the channel 43 of the connecting plate 44, and then the fluid containing ions is filled in the first cavity 41 and the second cavity 42. Due to the barrier effect of the membrane, the fluid is separated into two parts. The controller 60 and the power supply 10 are turned on. At this time, the electric potential applied by the conductor passes through the membrane and forms a pointed electric field, wherein the electric field is superimposed at the end position of the second electrode 30 to form an electric field superposition area with enhanced electric field, and the electric field superposition area is located in a preset area of ​​the membrane.

[0106] The charged ions in the fluid move toward the preset area of ​​the membrane. Due to some defects in the membrane, the charged ions will quantum tunnel into these defects. These charged ions tunneling into the defects will generate leakage current. The current sensor 50 monitors the leakage current passing through the membrane. The charged ions cause more defects in the membrane. When the defects accumulate to a certain amount, the membrane will be permanently damaged and punctured, that is, nano-scale holes will be formed on the membrane. At this time, the current sensor 50 detects a sudden increase in the leakage current and sends the current information to the controller 60. The controller 60 controls the power supply 10 to turn off to remove the potential passing through the membrane.

[0107] In some embodiments, the electric field superposition zone is pointed, and by setting two groups of conductors and two power supplies 10, the controller 60 controls the two power supplies 10 to work alternately, so that the two potentials passing through the membrane are two alternating potentials, so as to alternately form electric field superposition zones on both sides of the membrane.

[0108] In some embodiments, upon detecting a sudden increase in the leakage current, removing the potential across the membrane comprises:

[0109] S401: Monitor the current value of the leakage current.

[0110] S402: Compare the current value with a current threshold, and when the current value is greater than the current threshold, remove the potential across the membrane.

[0111] or;

[0112] S403: Monitor the change rate of the leakage current.

[0113] S404: Compare the change rate with a rate threshold, and when the change rate is greater than the rate threshold, remove the potential across the membrane.

[0114] In some embodiments, it also includes:

[0115] S50: adjusting the magnitude of the applied potential to adjust the time for manufacturing the nanopore.

[0116] and / or;

[0117] S60: adjusting the ion concentration in the fluid to adjust the time for making the nanopore.

[0118] The principle of Example 9 is: an electric potential is applied to the first electrode 20 and the second electrode 30, and the electric potential forms an electric field superposition zone with enhanced electric field, and a preset area of ​​the membrane is located on the electric field superposition zone. The probability of quantum tunneling and new defects occurring in the preset area is much higher than that in other areas. Therefore, the membrane at the preset area position is more easily broken down, so that the position where the nanopore is formed can be localized, thereby improving the accuracy of manufacturing the nanopore.

[0119] Those skilled in the art can clearly understand that for the convenience and simplicity of description, only the division of the above-mentioned functional units and modules is used as an example. In actual applications, the above-mentioned functions can be distributed and completed by different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above.

Claims

1. A device for generating a superimposed electric field, characterized in that: include: Power supply (10); A conductor, the conductor comprising a first electrode (20) and a second electrode (30), the first electrode (20) and the second electrode (30) being connected to the positive and negative electrodes of the power source (10) respectively, the first electrode (20) comprising a body (21) and at least two conductive arms (22) arranged on the body (21), the second electrode (30) being in a columnar shape, the second electrode (30) being located at an axial position of the body (21), at least two conductive arms (22) being located on the same side of the body (21), and at least two conductive arms (22) being evenly spaced around the second electrode (30), and a distance being provided between the end of the second electrode (30) and the end of the conductive arm (22).

2. The device according to claim 1, characterized in that The first electrode (20) is in the shape of a hollow cylinder, one end of the cylinder serves as the body (21), and the side wall of the cylinder serves as the conductive arm (22).

3. The device according to claim 2, characterized in that The second electrode (30) is cylindrical, and the ratio of the outer diameter of the first electrode (20) to the diameter of the second electrode (30) is (10 4 ~10 5 ):

1.

4. The device according to claim 2, characterized in that The distance between the end of the second electrode (30) and the end of the conductive arm (22) along the axial direction of the second electrode (30) is 3 cm to 10 cm.

5. A method for producing nanopores in a membrane, characterized in that In the method for manufacturing a nanopore in a membrane, the superimposed electric field generating device according to any one of claims 1 to 4 is used to generate a superimposed electric field. The method for manufacturing a nanopore in a membrane comprises the following steps: Arranging a membrane composed of a dielectric material in a container (40), wherein the container (40) is filled with a fluid containing ions, and the membrane separates the fluid into two parts; Applying electric potential to a first electrode (20) and a second electrode (30) on both sides of the membrane, wherein the first electrode (20) includes at least two conductive arms (22), wherein an electric field formed between at least one of the conductive arms (22) and the second electrode (30) is superimposed with an electric field formed between at least another of the conductive arms (22) and the second electrode (30) to form an electric field superposition region with enhanced electric field, and a preset region of the membrane is located in the electric field superposition region; monitoring a leakage current across the membrane; Upon detecting a sudden increase in the leakage current, the potential across the membrane is removed.

6. The method according to claim 5, characterized in that Also includes: The electric potential is an alternating electric potential so as to alternately form the electric field superposition region on both sides of the film.

7. The method according to claim 5, characterized in that The electric field superposition region is in a pointed shape.

8. The method according to claim 5, characterized in that The removing the electric potential across the membrane upon detecting a sudden increase in the leakage current comprises: monitoring a rate of change of the leakage current; The rate of change is compared to a rate threshold and the potential across the membrane is removed when the rate of change is greater than the rate threshold.

9. The method according to claim 5, characterized in that The removing the electric potential across the membrane upon detecting a sudden increase in the leakage current comprises: monitoring a current value of the leakage current; The current value is compared to a current threshold and when the current value is greater than the current threshold, the potential across the membrane is removed.

10. The method according to claim 5, characterized in that The method also includes adjusting the magnitude of the applied potential to adjust the time for making the nanopore.

11. The method according to claim 5, characterized in that It also involves adjusting the ion concentration in the fluid to adjust the time it takes to make the nanopore.

12. A device for making nanopores in a membrane, characterized in that The device for manufacturing a nanopore in a membrane uses a device for generating a superimposed electric field as described in any one of claims 1 to 4 to generate a superimposed electric field, and the device for manufacturing a nanopore in a membrane comprises: A container (40), wherein a channel (43) is provided in the container (40), wherein the channel (43) is used to arrange a membrane composed of a dielectric material, wherein the container (40) is filled with a fluid containing ions, and the membrane separates the fluid into two parts; Power supply (10); A conductor is disposed on the container (40) and facing the membrane, and is electrically connected to the power source (10), wherein the conductor comprises a first electrode (20) and a second electrode (30) on both sides of the membrane, wherein the first electrode (20) comprises at least two conductive arms (22) for applying an electric potential to the first electrode (20) and the second electrode (30), wherein an electric field formed between at least one conductive arm (22) and the second electrode (30) is superimposed with an electric field formed between at least another conductive arm (22) and the second electrode (30) to form an electric field superposition region with enhanced electric field, and a preset region of the membrane is located in the electric field superposition region; a current sensor (50) for monitoring leakage current through the membrane; A controller (60) is connected to the current sensor (50) and the power supply (10) and is used to remove the potential across the membrane when the leakage current suddenly increases.

13. The device according to claim 12, characterized in that The first electrode (20) further comprises a body (21), the second electrode (30) is cylindrical, the second electrode (30) is located at the axial position of the body (21), the second electrode (30) is fixedly connected to the side wall of the container (40), one end of the second electrode (30) is placed in the fluid, at least two of the conductive arms (22) are arranged on the same side of the body (21), and at least two of the conductive arms (22) are evenly spaced around the second electrode (30).

14. The device according to claim 13, characterized in that The distance between the second electrode (30) and the membrane is 1*10 -9 m~1*10 -5 m.

15. The device according to claim 14, characterized in that The distance between the end of the second electrode (30) and the end of the conductive arm (22) along the axial direction of the second electrode (30) is 3 cm to 10 cm.

16. The device according to claim 13, characterized in that The first electrode (20) is in the shape of a hollow cylinder, one end of the cylinder serves as the body (21), and the side wall of the cylinder serves as the conductive arm (22).

17. The device according to claim 16, characterized in that The second electrode (30) is cylindrical, and the ratio of the outer diameter of the first electrode (20) to the diameter of the second electrode (30) is (10 4 ~10 5 ):

1.

18. The device according to claim 13, characterized in that There are two power sources (10), and there are two groups of conductors. The two groups of conductors are electrically connected to the two power sources (10) respectively, and the two groups of conductors are centrally symmetrically arranged; the controller (60) is connected to the two power sources (10) and is used to control the two power sources (10) to work alternately to form two alternating potentials.

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