A gas purity detection device
The detection of light stripe information generated by gas ionization in the quartz tube is solved, and the problem of low safety of existing gas sensors in high-purity combustible gas environments is achieved, and high-safe gas purity detection is achieved.
Patent Information
- Application Number
- CN202310619134.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-05-29
- Publication Date
- 2025-08-01
- Estimated Expiration
- 2043-05-29
AI Technical Summary
The existing gas sensors are not safe in high-purity combustible gas detection environment. The gas to be tested is in direct contact with the ion current receiving electrode, which poses a safety hazard.
A quartz tube is used as the gas container to be tested, and an electromagnetic emission module and an electromagnetic receiving module are used to form a static electrode. The light stripe information is generated by the ionization of the gas in the quartz tube for detection. The electrical part is completely isolated from the gas. The light collector collects the light stripe information to judge the gas purity.
It realizes high-safe gas purity detection, which is suitable for high-purity combustible gas environments, avoids direct contact between the electrical parts and gas, and improves the safety and reliability of the detection.
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Figure CN116577404B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of gas detection, and more specifically, to a gas purity detection device. Background Art
[0002] A gas sensor is a converter that converts the volume fraction of a certain gas into a corresponding electrical signal. It mainly includes several types such as semiconductor gas sensors, solid electrolyte gas sensors, catalytic combustion gas sensors, electrochemical gas sensors, and optical gas sensors.
[0003] Among them, a photoionization detector is a test instrument that uses ultraviolet light to ionize gas molecules and then detects the change in gas concentration by detecting the weak current generated during the process. Usually, the gas to be measured is inhaled into the ionization chamber. After being ionized by the ultraviolet lamp, the gas to be measured forms ions. Under the action of the plate voltage, the ions move directionally to form a weak current. Under the condition that the external conditions (ionization chamber structure, ultraviolet lamp intensity) are fixed, the magnitude of the current has a linear relationship with the gas concentration.
[0004] For example, in the Chinese utility model patent with the publication number CN214408791U, a photoionization sensor for detecting gas concentration is disclosed. It sets a gas flow area and an information processing area on the sensor main body; sets at least two ultraviolet light windows on the ultraviolet lamp module, places the ultraviolet lamp module in the gas flow area, and the ultraviolet light windows are used to emit ultraviolet light after the ultraviolet lamp module generates an ultraviolet light source; installs at least two pairs of ion current receiving electrodes in the gas flow area; installs at least two amplifier circuits in the information processing area, and the resistance values in each amplifier circuit are different. The ion current receiving electrode pairs are connected to the amplifier circuits; the output module is set in the information processing area, and the output module is connected to the amplifier circuits. It can increase the total reliable detection range of the photoionization sensor and ensure the detection accuracy on the basis of expanding the measurement range of the photoionization sensor.
[0005] However, the gas to be measured in this detector needs to be in direct contact with the ion current receiving electrode. In the detection environment of some high-purity combustible gases, this detection mode is not reliable and the safety is not high enough. Summary of the Invention
[0006] The present invention provides a gas purity detection device that uses quartz to isolate the gas to be measured from the electrode, and at the same time uses the fireproof and flame-retardant properties of quartz and its conductivity characteristics under high electric fields to form static electrodes at both ends of the gas to be measured to ionize the gas to be measured, and uses the characteristic that the gas to be measured generates optical stripe information when ionized to detect the purity of the gas to be measured, thereby achieving complete isolation between the electrical detection part and the gas to be measured part and ensuring higher safety.
[0007] The present invention is achieved through the following technical solutions:
[0008] A gas purity detection device, comprising:
[0009] A sealed housing, in which a partition board is arranged to divide it into a first sealed cavity and a second sealed cavity, and a transmission channel is arranged on the partition board to communicate the first sealed cavity and the second sealed cavity;
[0010] A quartz tube located in the first sealed cavity. From the perspective of the extension direction of the transmission channel, the contour shadow of the quartz tube overlaps with the contour shadow of the transmission channel, and the quartz tube is used to accommodate the gas to be detected;
[0011] Oscillators, two of the oscillators are respectively connected to the quartz tube and arranged at intervals, and the oscillators are configured with electromagnetic receiving modules;
[0012] A transmission plate located in the second sealed cavity, and the transmission plate covers the transmission channel; [[ID=???]]
[0013] A light collector located in the second sealed cavity, and the light collector is arranged opposite to the transmission channel;
[0014] An electromagnetic emission module located in the second sealed cavity, and the electromagnetic emission module is adapted to the electromagnetic receiving module.
[0015] In some embodiments, a concentrator is arranged in the first sealed cavity opposite to the transmission channel.
[0016] In some embodiments, the reflection surface length of the concentrator is greater than or equal to the distance between the two oscillators.
[0017] In some embodiments, the reflection surface length of the concentrator is equal to the distance between the two oscillators.
[0018] In some embodiments, the oscillator is connected to the quartz tube by coating a conductive layer on the outer surface of the quartz tube and sintering a quartz protection layer.
[0019] In some embodiments, a fastening package formed by sintering is arranged between the transmission plate and the partition board, wherein the transmission plate is also sintered with the partition board.
[0020] In some embodiments, the electromagnetic emission module includes a high-voltage emission module and a high-frequency emission module, and the high-voltage emission module and the high-frequency emission module are respectively arranged on the fastening package and on both sides of the transmission plate to correspond to the positions of the two oscillators.
[0021] In some embodiments, the conductive layer is a metal powder layer or a metal slurry.
[0022] In some embodiments, an optical conduction channel is disposed between the light collector and the transmissive plate, wherein a black coating is provided on the inner wall of the optical conduction channel.
[0023] In some embodiments, quartz sealing chucks are respectively disposed at two ends of the quartz tube, and the quartz sealing chucks are used to connect an intake pipe or an exhaust pipe.
[0024] Compared with the prior art, the present invention has the following advantages and beneficial effects:
[0025] A gas purity detection device provided by the present invention, through the interaction of an electromagnetic emission module and an electromagnetic reception module, an oscillator can spontaneously receive electromagnetic energy to generate electric energy, and then convert it into a high-voltage high-frequency voltage to form a high-intensity electric field between the two oscillators. At this time, the resistivity of the quartz tube decreases and the conductivity of the quartz tube increases, that is, two static electrodes can be formed on the part of the quartz tube corresponding to the oscillator. At this time, the gas to be measured located between the two static electrodes in the quartz tube can be ionized to generate optical stripe information. The optical stripes are carried by the transmissive plate after passing through the transmissive channel, and then the light collector collects the optical stripes and can simultaneously obtain the light intensity information of the optical stripes. According to the light intensity, the purity corresponding to the gas to be measured can be judged; during the detection process, the oscillator does not come into direct contact with the gas to be measured, but the two are completely isolated by the quartz tube, and the quartz tube has good fire and high temperature resistance characteristics, and the detection safety environment is better. At the same time, for the purity detection of the gas to be measured, instead of detecting the weak current generated by it, the detection is carried out through the optical stripe information generated by it. The gas to be measured does not come into contact with external components during the whole detection process, and the safety is greatly improved, and it can be applied to the detection environment of high-purity combustible gases. Description of the Drawings
[0026] In order to more clearly illustrate the technical solutions of the exemplary embodiments of the present invention, the drawings required to be used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.
[0027] Figure 1 It is a schematic structural diagram of the gas purity detection device provided by the embodiment of the present invention.
[0028] Marks in the drawings and corresponding component names:
[0029] 1 - Second sealed cavity, 2 - First sealed cavity, 3 - Partition board, 4 - Quartz tube, 5 - Oscillator, 6 - Transmission plate, 7 - Light collector, 8 - Power supply, 9 - Focusing device, 10 - Fastening package, 11 - Light conduction channel, 12 - Quartz sealing socket, 13 - Transmission channel, 14 - High-voltage emission module, 15 - High-frequency emission module. Detailed implementation manners
[0030] To make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below in conjunction with embodiments and the accompanying drawings. The illustrative embodiments and descriptions thereof of the present invention are only used to explain the present invention and are not intended to limit the present invention.
[0031] In the following description, a large number of specific details are set forth in order to provide a thorough understanding of the present invention. However, it is obvious to those of ordinary skill in the art that the present invention does not have to employ these specific details. In other embodiments, well-known structures, circuits, materials or methods are not specifically described in order to avoid obscuring the present invention.
[0032] Throughout the specification, references to "one embodiment", "an embodiment", "one example" or "an example" mean that a particular feature, structure or characteristic described in connection with the embodiment or example is included in at least one embodiment of the present invention. Thus, the phrases "one embodiment", "an embodiment", "one example" or "an example" appearing throughout the specification do not necessarily all refer to the same embodiment or example. In addition, the specific features, structures or characteristics may be combined in any suitable combination and / or sub-combination in one or more embodiments or examples. In addition, those of ordinary skill in the art should understand that the drawings provided herein are for illustrative purposes only and are not necessarily drawn to scale. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.
[0033] In the description of the present invention, the orientation or positional relationship indicated by terms such as "front", "rear", "left", "right", "upper", "lower", "vertical", "horizontal", "high", "low", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the protection scope of the present invention.
[0034] As Figure 1As shown in the figure, an embodiment of the present invention provides a gas purity detection device, which includes a sealed housing, a quartz tube 4, an oscillator 5, a transmission plate 6, a light collector 7, and an electromagnetic emission module. An isolation plate 3 is arranged in the sealed housing to divide it into a first sealed cavity 2 and a second sealed cavity 1. A transmission channel 13 is arranged on the isolation plate 3 to communicate the first sealed cavity 2 and the second sealed cavity 1. The quartz tube 4 is located inside the first sealed cavity 2. From the perspective of the extending direction of the transmission channel 13, the contour shadow of the quartz tube 4 overlaps with the contour shadow of the transmission channel 13. The quartz tube 4 is used to contain the gas to be detected. Two oscillators 5 are respectively connected to the quartz tube 4 and arranged at intervals. An electromagnetic receiving module is configured on the oscillator 5. The transmission plate 6 is located inside the second sealed cavity 1, and the transmission plate 6 covers the transmission channel 13. The light collector 7 is located inside the second sealed cavity 1, and the light collector 7 is arranged opposite to the transmission channel 13. The electromagnetic emission module is located inside the second sealed cavity 1, and the electromagnetic emission module is adapted to the electromagnetic receiving module to perform the transmission and reception of electromagnetic waves. Among them, a power supply 8 can be configured in the second sealed cavity 1 to supply power to the electromagnetic emission module.
[0035] During operation, the two oscillators 5 can convert the received electromagnetic wave energy into high-frequency and high-voltage electrical energy, so that a high-intensity electric field is formed between the two oscillators 5. At this time, the resistivity of the quartz tube 4 decreases, and electrical conduction is formed between the oscillator 5 and the quartz tube 4. The parts of the quartz tube 4 corresponding to the two oscillators 5 are equivalent to forming two static electrodes. A breakdown voltage can be formed between the two static electrodes to ionize the gas in the quartz tube 4. The gas releases energy in the ionized state to form light stripes. The light stripes pass through the quartz tube 4 and reach the transmission plate 6 after passing through the transmission channel 13. The light stripe information on the transmission plate 6 is collected by the light collector 7 for subsequent processing.
[0036] In a possible implementation manner, the light collector 7 can be configured as a photoelectric sensor. The photoelectric sensor is used to detect the light intensity information of the light stripes. The higher the purity of the gas, the greater the light intensity of the light stripes formed by ionization. When there are too many impurities in the gas, the light intensity of the light stripes is smaller. Therefore, the gas purity can be characterized by detecting the light intensity of the light stripes. Specifically, various gases with different purities can be tested in advance, the light stripe intensities generated by various gases with different purities are recorded, and then the corresponding relationship between the light stripe intensity and the gas purity is found. Finally, the gas purity can be obtained by directly detecting the light intensity of the on-site light stripes. Optionally, a display screen can be configured for the photoelectric sensor to display and record the light intensity data and the converted purity data for the staff to observe intuitively.
[0037] In the gas purity detection device provided by the embodiment of the present application, when the gas is ionized, the electrical detection part does not come into direct contact with the gas, but detects the light stripes generated by it, so that the electrical part and the part of the gas to be measured are completely isolated, with a high safety factor and being suitable for on-site detection environments.
[0038] In the embodiment of the present application, a quartz tube 4 is used as the container for the gas to be measured. It has high transparency and, under the condition of constant temperature, the resistivity of the quartz tube 4 can be changed by controlling the electric field. For example, when a high-intensity electric field is generated between two oscillators 5, the resistivity of the quartz tube 4 becomes smaller, and at this time, a high-frequency electric field can be formed inside the quartz tube 4, and the gas can be ionized; when a low-intensity electric field or no electric field is generated between the two oscillators 5, the resistivity of the quartz tube 4 becomes larger, and at this time, a low-frequency electric field or even no electric field may be formed inside the quartz tube 4, and the gas is not affected. Therefore, when detection is required, the gas can be stopped, that is, the gas stays in the quartz tube 4; when detection is not required, the quartz tube 4 can be used as a gas transmission channel. At this time, even if there may be a phenomenon of leakage / free charge on the oscillator 5, due to the high resistivity of the quartz tube 4, the gas inside the quartz tube 4 is not affected. That is, the quartz tube 4 adopted in the embodiment of the present application can not only play a role during the test, but also be used as a transmission channel when not testing without the need to remove the electrical detection part, with high practicability and convenience. Of course, the ionized gas in the quartz tube 4 can be separated through a subsequent shunt channel, that is, the ionized gas is separated from the normally transmitted gas, which can be achieved by a common shunt valve and will not be elaborated here.
[0039] In the embodiment of the present application, a wireless transmission method is adopted between the oscillator 5 and the power supply 8, and the electrical detection parts in the first sealed chamber 2 and the second sealed chamber 1 are completely separated. Even if a failure occurs in the electrical detection part in the second sealed chamber 1, such as a wire catching fire, it will not affect the electrical part in the first sealed chamber 2, that is, the environment where the gas to be measured is located is safer and is suitable for the purity detection of high-purity combustible gas.
[0040] In specific implementation, the sealed housing can be set as an explosion-proof housing, such as an alloy steel housing, a stainless steel housing, a cast aluminum alloy housing, etc. In this embodiment, it can be preferably set as a stainless steel housing to reduce the influence on the structural strength / explosion-proof effect caused by rust. Of course, the partition plate 3 in the sealed housing can also be set as a stainless steel plate; the partition plate 3 can divide the sealed housing into a second sealed cavity 1 with a larger volume and a first sealed cavity 2 with a smaller volume. Among them, the first sealed cavity 2 can be used to set the object to be measured, and the second sealed cavity 1 can be used to set the detection element / detection component; the transmission channel 13 on the partition plate 3 can be set as a circle. Both ends of the quartz tube 4 can be led out of the first sealed cavity 2 through air pipes, and the air pipes are sealed with the sealed housing. From the perspective of the length direction of the transmission channel 13, the axis of the quartz tube 4 can be perpendicular to the axis of the transmission channel 13 and intersect.
[0041] In some embodiments, a concentrator 9 can be arranged in the first sealed cavity 2 to focus the light stripes generated by gas ionization so that the light stripe information on the transmission plate 6 is clearer. Specifically, the concentrator 9 can be fixedly installed on the sealed housing, and the center of the reflecting surface of the concentrator 9 is located on the axis of the transmission channel 13, that is, the reflecting surface of the concentrator 9 is arranged facing the transmission channel 13.
[0042] In order to fully focus the light stripes generated by gas ionization between the oscillators 5, in some embodiments, the length of the reflecting surface of the concentrator 9 is greater than or equal to the distance between the two oscillators 5. Specifically, the reflecting surface of the concentrator 9 is usually constructed as an ellipse, and the length of the reflecting surface of the concentrator 9 is the length of the long axis of the reflecting surface, that is, the long axis of the reflecting surface of the concentrator 9 is arranged parallel to the axis of the quartz tube 4; among them, the distance between the two oscillators 5 is the distance between the two electrical connection points formed by the oscillator 5 and the quartz tube 4. Of course, if the emitting surface of the concentrator 9 is too long, it may focus some unnecessary light and thus affect the measurement result. Therefore, the preferred setting method is that the length of the reflecting surface of the concentrator 9 is equal to the distance between the two oscillators 5.
[0043] In some embodiments, the oscillator 5 can be connected to the quartz tube 4 by coating a conductive layer on the outer surface of the quartz tube 4 and sintering a quartz protective layer. Among them, the conductive layer can be set as metal powder or metal slurry, and the conductive layer can be coated around the quartz tube 4, and then a layer of quartz is sintered outside the conductive layer to form a quartz protective layer, so as to ensure that the conductive layer is in a sealed environment and prevent the conductive layer from contacting the external space.
[0044] In some embodiments, the transmissive plate 6 can be set as a quartz plate. The quartz plate has high transparency, is fireproof and heat-resistant, and can ensure good safety on the premise of providing a good transmission effect. Specifically, welding can be used between the quartz plate and the isolation plate 3, and a fastening package 10 can also be connected between the side wall of the quartz plate and the isolation plate 3. Among them, the fastening package 10 is sintered with the quartz plate and the isolation plate 3 respectively, so that a good sealing performance can be ensured between the quartz plate and the isolation plate 3, thereby achieving the effect of fire and explosion prevention and ensuring the use safety.
[0045] In some embodiments, the electromagnetic emission module includes a high-voltage emission module 14 and a high-frequency emission module 15. The high-voltage emission module 14 and the high-frequency emission module 15 can be respectively arranged on the fastening package 10 and on both sides of the transmissive plate 6 to correspond to the positions of the two oscillators 5.
[0046] In some embodiments, an optical conduction channel 11 can be arranged between the light collector 7 and the transmissive plate 6. The optical conduction channel 11 can be set as a fireproof pipe body, and a black coating can be arranged on the inner wall of the optical conduction channel 11 to avoid its reflection of light, so that the light stripe information received by the light collector 7 is more accurate, thereby ensuring the accuracy of the measurement result.
[0047] In some embodiments, quartz sealing seat holders 12 can be respectively arranged at both ends of the quartz tube 4, and a connecting portion for connecting the intake pipe and the exhaust pipe is arranged on the quartz sealing seat holders 12. Through the arrangement of the quartz sealing seat holders 12, the connection part between the intake pipe or the exhaust pipe and the quartz tube 4 can have good sealing performance and fire and heat resistance, thereby improving the use safety.
[0048] The specific embodiments described above further elaborate on the purpose, technical solutions, and beneficial effects of the present invention. It should be understood that the above description is only the specific embodiments of the present invention and is not used to limit the protection scope of the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.
Claims
1. A gas purity detection device, characterized in that Comprising: A sealed housing, within which a partition plate (3) is provided to divide it into a first sealed chamber (2) and a second sealed chamber (1), and a transmission channel (13) is provided on the partition plate (3) to communicate the first sealed chamber (2) and the second sealed chamber (1); A quartz tube (4) located within the first sealed chamber (2). From the perspective of the extending direction of the transmission channel (13), the contour shadow of the quartz tube (4) overlaps with the contour shadow of the transmission channel (13), and the quartz tube (4) is used to accommodate the gas to be measured; Oscillators (5), two of the oscillators (5) are respectively connected to the quartz tube (4) and arranged at intervals. The oscillators (5) are configured with electromagnetic receiving modules. Among them, the oscillators (5) are connected to the quartz tube (4) by coating a conductive layer on the outer surface of the quartz tube (4) and sintering a quartz protective layer; A transmission plate (6) located within the second sealed chamber (1), and the transmission plate (6) covers the transmission channel (13); An optical collector (7) located within the second sealed chamber (1), and the optical collector (7) is arranged opposite to the transmission channel (13); An electromagnetic emission module located within the second sealed chamber (1), and the electromagnetic emission module is adapted to the electromagnetic receiving module.
2. A gas purity detection device, characterized in that, Comprising: A sealed housing, within which a partition plate (3) is provided to divide it into a first sealed chamber (2) and a second sealed chamber (1), and a transmission channel (13) is provided on the partition plate (3) to communicate the first sealed chamber (2) and the second sealed chamber (1); A quartz tube (4) located within the first sealed chamber (2). From the perspective of the extending direction of the transmission channel (13), the contour shadow of the quartz tube (4) overlaps with the contour shadow of the transmission channel (13), and the quartz tube (4) is used to accommodate the gas to be measured; Oscillators (5), two of the oscillators (5) are respectively connected to the quartz tube (4) and arranged at intervals, and the oscillators (5) are configured with electromagnetic receiving modules; A transmission plate (6) located within the second sealed chamber (1), and the transmission plate (6) covers the transmission channel (13); An optical collector (7) located within the second sealed chamber (1), and the optical collector (7) is arranged opposite to the transmission channel (13); An electromagnetic emission module located within the second sealed chamber (1), the electromagnetic emission module includes a high-voltage emission module (14) and a high-frequency emission module (15). The high-voltage emission module (14) and the high-frequency emission module (15) are respectively located on both sides of the transmission plate (6) corresponding to the positions of the two oscillators (5), and the electromagnetic emission module is adapted to the electromagnetic receiving module.
3. The gas purity detection device according to claim 1 or 2, characterized in that, A concentrator (9) is provided within the first sealed chamber (2) and is arranged opposite to the transmission channel (13).
4. The gas purity detection device according to claim 3, wherein, The reflection surface length of the concentrator (9) is greater than or equal to the distance between the two oscillators (5).
5. The gas purity detection device according to claim 4, wherein, The reflection surface length of the concentrator (9) is equal to the distance between the two oscillators (5).
6. The gas purity detection device according to claim 2, wherein A fastening package (10) formed by sintering is provided between the transmission plate (6) and the isolation plate (3), wherein the transmission plate (6) is also sintered with the isolation plate (3).
7. The gas purity detection device according to claim 6, characterized in that, The high-voltage emission module (14) and the high-frequency emission module (15) are respectively arranged on the fastening package (10).
8. The gas purity detection device according to claim 1, wherein, The conductive layer is a metal powder layer or a metal slurry.
9. The gas purity detection device according to claim 1 or 2, characterized in that, An optical conduction channel (11) is configured between the light collector (7) and the transmission plate (6), wherein a black coating is provided on the inner wall of the optical conduction channel (11).
10. The gas purity detection device according to claim 1 or 2, characterized in that, Quartz sealing seat holders (12) are respectively arranged at two ends of the quartz tube (4), and the quartz sealing seat holders (12) are used for connecting an intake pipe or an exhaust pipe.
Citation Information
Patent Citations
Photoionization sensor for detecting gas concentration
CN214408791U
Online micro-nitrogen detector based on plasma atomic emission spectrum method
CN102507534A
Plasma treatment system
CN102820197A