Intelligent long-life silicon wafer conveyor device

Abstract

The present invention discloses an intelligent long-life conveying device for silicon wafers. Regarding the field of silicon wafer conveying technology, the conveying device includes a conveying platform and a frame, the conveying platform is arranged at the upper end of the frame, a motor is arranged in the frame, a conveyor belt is arranged between the conveying platform and the frame, the conveyor belt is respectively connected to the conveying platform and the motor, the conveying device also includes a connecting ring, the conveyor belt is sleeved on the connecting ring, the connecting ring is sleeved on the motor, a connecting mechanism is arranged between the motor and the connecting ring, a matching connecting mechanism is arranged on the inner wall of the connecting ring, the connecting mechanism is slidably connected to the motor, and the connecting mechanism can lock the connecting ring. Compared with the prior art, the intelligent long-life conveying device for silicon wafers according to the present invention has the following advantages: the motor can run for a long time without stopping, the connecting ring is connected to or detached from the connecting ring through the connecting mechanism, and the connecting mechanism drives the connecting ring to rotate, thereby avoiding the situation where frequent starting and stopping causes damage to the motor, and increasing the service life of the motor.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon wafer conveying, in particular to an intelligent long-life silicon wafer conveying device. Background Art

[0002] With the continuous increase in energy demand and the continuous improvement of environmental awareness, solar photovoltaic power generation has become a hot topic of global concern.

[0003] Silicon wafers are the primary raw material for manufacturing solar photovoltaic modules. Before assembling solar photovoltaic modules, the wafers undergo cleaning, drying, texturing, and coating. Typically, these processes occur on an assembly line before the wafers are assembled and assembled.

[0004] An assembly line typically consists of multiple conveyors, each used to transport wafers. These conveyors are used to differentiate operations. For example, before a conveyor is delivered to the coating process, the wafers on the conveyor must be positioned. During this time, the conveyor stops. Once the wafers are positioned, the conveyor resumes operation and continues transporting the wafers. This means that the conveyor before the coating process needs to be frequently started and stopped.

[0005] Frequent starts and stops of the conveyor put a strain on the transformer. When the transformer capacity cannot meet the power required by the current load, continued use will result in overload operation, causing excessive temperatures. Over time, the transformer oil insulation layer will age and the enameled wire will be damaged by heat. The instantaneous current of the motor starting is 6-8 times the rated current. Frequent starts will cause the motor windings to heat up, and the heat accumulation can easily cause the insulation layer to burn off, the motor to short-circuit and burn out. It may even cause motor damage, affecting the normal operation of the assembly line, affecting production, and causing unnecessary economic losses to the manufacturer. Summary of the Invention

[0006] The purpose of the present invention is to provide an intelligent long-life conveying device for silicon wafers, whose motor can run for a long time without stopping, and is connected to or disconnected from the connecting ring through a connecting mechanism, and the connecting mechanism drives the connecting ring to rotate, thereby avoiding damage to the motor caused by frequent starting and stopping, and increasing the service life of the motor; the belt adjustment mechanism can keep the belt in a taut state for a long time, increase the service life of the belt, reduce the number of belt maintenance, and thus reduce maintenance costs; the belt cleaning mechanism can clean the surface of the belt, thereby avoiding dust contamination of the silicon wafers and affecting the quality of the finished product, and can also reduce the number of belt cleanings, reduce maintenance costs, and to a certain extent, increase the efficiency of silicon wafer production.

[0007] To achieve the above objectives, the present invention provides an intelligent long-life silicon wafer conveying device, comprising a conveying platform and a frame, wherein the conveying platform is disposed at the upper end of the frame, a motor is disposed within the frame, a conveyor belt is disposed between the conveying platform and the frame, the conveyor belt connecting the conveying platform and the motor respectively, and the conveying device further comprising:

[0008] The connecting ring is provided with the conveyor belt being sleeved on the connecting ring, and the connecting ring is sleeved on the motor. A connecting mechanism is provided between the motor and the connecting ring, and a matching connecting mechanism is provided on the inner wall of the connecting ring. The connecting mechanism is slidably connected to the motor, and the connecting mechanism can lock the connecting ring. The connecting mechanism can also connect the connecting ring and the motor.

[0009] In one or more embodiments, the motor includes a rotating rod and a motor body, the motor body rotates with the rotating rod, a plurality of sliding grooves are provided on the rotating rod, and the connecting mechanism is slidably connected in the sliding grooves.

[0010] In one or more embodiments, the connecting mechanism includes an electromagnetic block, a connecting rod and a first wireless module, the connecting rod is located between the electromagnetic block and the first wireless module, a first power line is arranged between the first wireless module and the electromagnetic block, and a second wireless module matching the first wireless module is arranged in the rack.

[0011] In one or more embodiments, a current converter is provided on the first power line, and a magnetic block matching the connection mechanism is provided on the bottom wall of the slide slot.

[0012] In one or more embodiments, a battery matching the second wireless module is disposed in the rack, and a second power line is disposed between the battery and the motor.

[0013] In one or more embodiments, a belt adjusting mechanism matching the conveyor belt is installed on the frame.

[0014] In one or more embodiments, the belt adjustment mechanism includes a sleeve, a first piston rod and a second piston rod, the first piston rod is slidably connected in the sleeve, a pressure detection device is provided between the first piston rod and the second piston rod, and the second piston rod is rotatably connected to a rotating roller at one end away from the pressure detection device.

[0015] In one or more embodiments, a belt cleaning mechanism is further provided on a side of the frame close to the belt adjusting mechanism. The belt cleaning mechanism includes an air pump and a rubber ring. A first connecting pipe is provided between the air pump and the rubber ring.

[0016] In one or more embodiments, a plurality of branch pipes are provided on the first connecting pipe.

[0017] In one or more embodiments, a second connecting pipe is provided between the air pump and the belt adjustment mechanism, an air intake pipe matching the second connecting pipe is opened on the sleeve, and a solenoid valve is provided on one side close to the air intake pipe.

[0018] Compared with the prior art, the intelligent long-life silicon wafer conveying device according to the present invention has the following advantages:

[0019] 1) The motor can run for a long time without stopping. The connecting ring is connected or disconnected through the connecting mechanism, and the connecting mechanism drives the connecting ring to rotate, thereby avoiding damage to the motor caused by frequent start and stop, and increasing the service life of the motor;

[0020] 2) The belt adjustment mechanism can keep the belt in a tight state for a long time, thereby increasing the service life of the belt and reducing the number of belt maintenance, thereby reducing maintenance costs;

[0021] 3) The belt cleaning mechanism can clean the surface of the belt, thereby preventing dust from contaminating the silicon wafers and affecting the quality of the finished product. It can also reduce the number of belt cleanings, reduce maintenance costs, and to a certain extent increase the efficiency of silicon wafer production. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 3 is a schematic structural diagram of a silicon wafer intelligent long-life conveying device according to one embodiment of the present invention.

[0023] Figure 2 4 is a front view of an intelligent long-life silicon wafer conveying device according to one embodiment of the present invention.

[0024] Figure 3 1 is a first state diagram of a silicon wafer intelligent long-life conveying device according to one embodiment of the present invention.

[0025] Figure 4 A half-section of a silicon wafer intelligent long-life conveying device according to an embodiment of the present invention Figure 1 .

[0026] Figure 5 yes Figure 4 Schematic diagram of the structure at point A in the middle.

[0027] Figure 6 yes Figure 4 Schematic diagram of the structure at point B in the middle.

[0028] Figure 7 A half-section of a silicon wafer intelligent long-life conveying device according to an embodiment of the present invention Figure 2 .

[0029] Figure 8 2 is a schematic structural diagram of a connecting mechanism according to an embodiment of the present invention.

[0030] Figure 9 FIG. 1 is a half-sectional view of a connection mechanism according to an embodiment of the present invention.

[0031] Figure 10 FIG. 1 is a half-sectional view of a belt adjustment mechanism according to an embodiment of the present invention.

[0032] Description of main reference numerals:

[0033] 1-transfer platform, 2-frame, 3-rotating rod, 301-slide, 302-magnetic block, 4-conveyor belt, 5-connecting ring, 501-magnetic part, 6-belt adjustment mechanism, 601-sleeve, 6011-intake pipe, 602-first piston rod, 603-pressure detection equipment, 604-rotating roller, 605-second piston rod, 7-air pump, 8-first connecting pipe, 801-branch pipe, 9-second connecting pipe, 10-rubber ring, 11-connecting mechanism, 1101-electromagnetic block, 1102-connecting rod, 1103-first wireless module, 12-current converter, 13-first power cord, 14-motor body, 15-second power cord, 16-battery, 17-third power cord, 18-second wireless module, 19-solenoid valve. DETAILED DESCRIPTION

[0034] The specific embodiments of the present invention are described in detail below with reference to the accompanying drawings, but it should be understood that the protection scope of the present invention is not limited by the specific embodiments.

[0035] Unless expressly stated otherwise, throughout the specification and claims, the term "comprise" or variations such as "include" or "comprising", etc., will be understood to include the stated elements or components but not to exclude other elements or other components.

[0036] Ginseng Figures 1 to 10 As shown, an intelligent long-life silicon wafer conveying device according to one embodiment of the present invention includes a conveying platform 1 and a rack 2. The conveying platform 1 is used to convey silicon wafers. A plurality of electronic components matching the conveying platform 1 are arranged in the rack 2. The electronic components in the rack 2 are used to drive the conveying platform 1.

[0037] Ginseng Figure 1 As shown, the transfer platform 1 is mounted on the upper end of the rack 2. The transfer platform 1 and the rack 2 are fixedly connected. The transfer platform 1 and the rack 2 can also be fixed by bolts or integrally formed. Good stability is required between the transfer platform 1 and the rack 2 to avoid unstable fixation between the transfer platform 1 and the rack 2. This prevents the transfer platform 1 from shaking during use, causing displacement of the silicon wafers, and further derailment or damage to the silicon wafers.

[0038] Ginseng Figures 1 to 7As shown, a motor is installed in the frame 2, and a conveyor belt 4 is installed between the conveyor platform 1 and the frame 2. The conveyor belt 4 connects the conveyor platform 1 and the motor. That is, the motor can drive the conveyor belt 4 to rotate. During the rotation of the conveyor belt 4, the silicon wafer located at the upper end of the conveyor platform 1 can be transported.

[0039] Ginseng Figures 1 to 7 As shown, the conveying device also includes a connecting ring 5, onto which the conveyor belt 4 is sleeved, and the connecting ring 5 is sleeved on the motor. That is, when the motor rotates, it rotates with the connecting ring 5, which in turn rotates with the conveyor belt 4. Furthermore, the connecting ring 5 is rotatably connected to the frame 2, and the position of the connecting ring 5 matches that of the motor.

[0040] Ginseng Figure 5 As shown, a connecting mechanism 11 is provided between the motor and one of the connecting rings 5. This connecting mechanism 11 can lock the connecting ring 5 and also connect the connecting ring 5 to the motor. When the connecting mechanism 11 is connected to the motor, the motor rotates, causing the connecting ring 5 to rotate with it. When the connecting mechanism 11 locks the connecting ring 5, the connecting mechanism 11 and the connecting ring 5 disengage, locking the connecting ring 5 due to the principle of repulsion between magnets of the same polarity.

[0041] Specifically, Figures 8 and 9 As shown, the connecting mechanism 11 includes an electromagnetic block 1101, a connecting rod 1102, and a first wireless module 1103. The connecting rod 1102 is located between the electromagnetic block 1101 and the first wireless module 1103. A first power line 13 is provided between the first wireless module 1103 and the electromagnetic block 1101. A second wireless module 18 is provided within the frame 2 to match the first wireless module 1103. The first wireless module 1103 and the second wireless module 18 do not affect the normal operation of the motor. That is, the first wireless module 1103 can wirelessly receive power, which is transmitted to the electromagnetic block 1101 via the first power line 13. When the electromagnetic block 1101 is energized, it generates magnetic poles. A magnetic member 501 is provided on the inner wall of the connecting ring 5 to match the electromagnetic block 1101. The electromagnetic block 1101 and the magnetic member 501 cooperate with each other.

[0042] Furthermore, Figure 9 As shown, a current converter 12 is disposed within the connecting rod 1102. The current converter 12 can change the current, thereby changing the polarity generated by the electromagnetic block 1101, thereby causing the electromagnetic block 1101 to attract or repel the magnetic member 501. When the electromagnetic block 1101 and the magnetic member 501 are attracted to each other, the connecting mechanism 11 and the connecting ring 5 are connected; otherwise, the connecting mechanism 11 and the connecting ring 5 are disconnected.

[0043] Ginseng Figure 5As shown, it is slidably connected to the motor, facilitating the separation and adsorption of the connecting mechanism 11 and the magnetic member 501. It includes a rotating rod 3 and a motor body 14, which rotates the rotating rod 3. The rotating rod 3 is provided with multiple sliding grooves 301, and the connecting mechanism 11 is slidably connected within the sliding grooves 301.

[0044] Specifically, when the connecting mechanism 11 and the magnetic member 501 are attracted to each other, one end of the connecting mechanism 11 is attracted to the magnetic member 501, and the end of the connecting mechanism 11 away from the magnetic member 501 is engaged in the sliding groove 301. The rotating rod 3 rotates and rotates the connecting mechanism 11, which in turn rotates the magnetic member 501, that is, the connecting mechanism 11 can rotate the connecting ring 5. Conversely, the connecting mechanism 11 and the magnetic member 501 repel each other, and the connecting mechanism 11 is separated from the connecting ring 5. The connecting mechanism 11 will not affect the connecting ring 5 during its rotation.

[0045] Ginseng Figure 5 As shown, a magnetic block 302 matching the connecting mechanism 11 is provided on the bottom wall of the chute 301. The connecting mechanism 11 and the chute 301 can attract each other. When the connecting mechanism 11 and the magnetic part 501 repel each other, the connecting mechanism 11 contacts the chute 301 and then attracts each other. The chute 301 can reduce the situation where the connecting mechanism 11 is thrown out of contact with the magnetic part 501 due to centrifugal force. That is, the chute 301 can attract the connecting mechanism 11, and the repulsive force generated by the magnetic part 501 and the connecting mechanism 11 can fix the connecting mechanism 11 twice, so that when the connecting mechanism 11 and the magnetic part 501 are not in contact, even if there is centrifugal force, the connecting mechanism 11 and the magnetic part 501 will not come into contact.

[0046] Preferably, an anti-slip pad can be provided between the connecting mechanism 11 and the magnetic member 501. The anti-slip pad can prevent the connecting mechanism 11 and the magnetic member 501 from slipping when in contact due to excessive centrifugal force, thereby preventing the connecting mechanism 11 from rotating with the connecting ring 5 in the first place.

[0047] Ginseng Figure 7 As shown, a second wireless module 18 is installed within the chassis 2, matching the first wireless module 1103. The second wireless module 18 can provide power to the first wireless module 1103. A battery 16 is installed within the chassis 2, matching the second wireless module 18. A second power line 15 is provided between the battery 16 and the motor. This second power line 15 transmits power between the motor and the battery 16. The power is then stored in the battery 16 and supplied to the second wireless module 18.

[0048] A third power line 17 is provided between the battery 16 and the second wireless module 18, that is, the battery 16 and the second wireless module 18 are connected by wire. Of course, the battery 16 and the second wireless module 18 can also power the second wireless module 18 in a wireless power supply manner.

[0049] Among them, a time relay is set in the current converter 12. Generally, the current converter 12 performs current conversion through the time relay. After the current conversion, the electromagnetic block 1101 can produce different magnetic poles. The time relay matches the time required for the silicon wafer process.

[0050] Ginseng Figures 1 to 7 As shown, a belt adjustment mechanism 6 is mounted on the frame 2 to match the conveyor belt 4. After a period of use, the conveyor belt 4 tends to become longer, thus affecting the normal operation of the conveyor device. The belt adjustment mechanism 6 can keep the conveyor belt 4 taut for a longer period of time, making it easier for the conveyor device to transport silicon wafers.

[0051] Ginseng Figure 2 Combine Figure 10 As shown, the belt adjustment mechanism 6 is fixedly connected to the first mounting plate, which is fixed to one side of the frame 2. The belt adjustment mechanism 6 includes a sleeve 601, a first piston rod 602, and a second piston rod 605. The first piston rod 602 is slidably connected within the sleeve 601. A pressure detection device 603 is provided between the first piston rod 602 and the second piston rod 605. The end of the second piston rod 605 away from the pressure detection device 603 is rotatably connected to a rotating roller 604.

[0052] Specifically, the rotating roller 604 contacts the conveyor belt 4, and the pressure detection device 603 is used to detect the pressure applied by the conveyor belt 4 to the rotating roller 604. In other words, as the pressure detected by the pressure detection device 603 decreases, it can be determined that the conveyor belt 4 is becoming looser. The belt adjustment mechanism 6 pushes the conveyor belt 4 outward to keep the conveyor belt 4 in its initial tight state, thereby reducing the need for maintenance on the conveyor belt 4 and extending the service life of the conveyor device.

[0053] Ginseng Figure 10As shown, an air inlet pipe 6011 is provided on the sleeve 601, and the air inlet pipe 6011 is used to fill the sleeve 601 with gas. A solenoid valve 19 is provided on one side near the air inlet pipe 6011, and the gas in the sleeve 601 can be released through the solenoid valve 19. Since the gas in the sleeve 601 is all high-pressure gas, when the solenoid valve 19 is opened, the first piston rod 602 generates a force near one end of the solenoid valve 19, squeezing out the high-pressure gas in the sleeve 601. At the same time, the rebound force generated by the conveyor belt 4 also helps the belt adjustment mechanism 6 to expel the gas in the sleeve 601 more quickly. In other words, the belt adjustment mechanism 6 can keep the conveyor belt 4 in its original state, reducing the situation where the loose conveyor belt 4 affects the normal transportation of silicon wafers.

[0054] Ginseng Figure 2~Figure 3 As shown, a belt cleaning mechanism is also provided on one side of the frame 2 close to the belt adjustment mechanism 6. The belt cleaning mechanism is used to clean the surface of the conveyor belt 4. During the use of the conveyor belt 4, dust and other impurities are easily attached to the surface. If dust adheres to the surface of the conveyor belt 4 and then adheres to the surface of the silicon wafer, it will affect the production of the silicon wafer. The silicon wafer is easily contaminated by dust during the production process, thereby affecting the yield of the silicon wafer.

[0055] Ginseng Figures 2 to 6 As shown, the belt cleaning mechanism includes an air pump 7 and a rubber ring 10. The rubber ring 10 contacts the outer surface of the conveyor belt 4, that is, the rubber ring 10 contacts the surface of the conveyor belt 4 that contacts the silicon wafer. When the conveyor belt 4 passes through the rubber ring 10, the rubber ring 10 and the air pump 7 cooperate to clean the surface of the conveyor belt 4.

[0056] Specifically, a first connecting tube 8 is provided between the air pump 7 and the rubber ring 10, connecting the air pump 7 and the rubber ring 10. Specifically, the rubber ring 10 has multiple through-holes located on the side of the rubber ring 10 close to the conveyor belt 4. The first connecting tube 8 is provided with multiple branch tubes 801 that match the through-holes. The branch tubes 801, the first connecting tube 8, and the air pump 7 work together to clean dust and other impurities from the surface of the conveyor belt 4, thereby reducing the impact of dust on silicon wafer quality.

[0057] In the initial state, the connecting mechanism 11 and the magnetic member 501 are separated, and the connecting mechanism 11 is driven by the motor to continuously rotate.

[0058] When the conveyor belt is operating, the motor drives the connecting ring 5 through the connecting mechanism 11, which in turn rotates the conveyor belt 4, thereby achieving the function of conveying silicon wafers. Specifically, when the time relay reaches the time, the current converter 12 changes the current, causing the electromagnetic block 1101 to produce a different magnetic pole than the magnetic member 501, forcing the electromagnetic block 1101 and the magnetic member 501 to attract each other. Once the connecting mechanism 11 and the magnetic member 501 are attracted to each other, the connecting mechanism 11 can also rotate with the magnetic member 501 during the process of rotation.

[0059] When the conveyor belt needs to stop, after the time relay reaches its limit, the current converter 12 changes the current, causing the magnetic poles generated by the electromagnetic block 1101 to align with the magnetic poles of the magnetic element 501, and the connecting mechanism 11 moves toward the end away from the connecting ring 5. The connecting ring 5 and the connecting mechanism 11 lose connection, and the connecting mechanism 11 will not rotate with the connecting ring 5 during rotation. At the same time, the connecting mechanism 11 and the connecting ring 5 repel each other, and the repulsive force can lock the connecting ring 5, that is, lock the conveyor belt 4, and prevent the conveyor belt 4 from rotating.

[0060] The motor generates electrical energy for storage in the battery 16 , and the electrical energy in the battery 16 is then supplied to the second wireless module 18 for use.

[0061] It is worth noting that the cooling capacity of the conveying device should be enhanced, which can also increase the service life of the motor, that is, the service life of the conveying device can be increased.

[0062] The foregoing descriptions of specific exemplary embodiments of the present invention are for purposes of illustration and description. These descriptions are not intended to limit the invention to the precise forms disclosed, and it is apparent that many variations and modifications are possible in light of the foregoing teachings. The exemplary embodiments have been selected and described for the purpose of explaining the specific principles of the invention and their practical application, thereby enabling those skilled in the art to realize and utilize a variety of exemplary embodiments of the invention and various options and modifications. The scope of the invention is intended to be defined by the claims and their equivalents.

Claims

1. An intelligent long-life silicon wafer conveying device, comprising a conveying platform and a frame, wherein the conveying platform is arranged at the upper end of the frame, a motor is arranged in the frame, a conveyor belt is arranged between the conveying platform and the frame, and the conveyor belt is respectively connected to the conveying platform and the motor, characterized in that: The conveying device further comprises: A connecting ring, the conveyor belt is sleeved on the connecting ring, the connecting ring is sleeved on the motor, and a connecting mechanism is provided between the motor and the connecting ring, the connecting mechanism including an electromagnetic block and a connecting rod; The inner wall of the connecting ring is provided with a magnetic member matching the connecting mechanism; A current converter is provided inside the connecting rod, which can change the current, thereby changing the electrode generated by the electromagnetic block, and then the electromagnetic block can be used to attract or repel the magnetic part; The connecting mechanism is slidably connected to the motor, and the connecting mechanism can lock the connecting ring. The connecting mechanism can also connect the connecting ring and the motor; In the initial state, the connecting mechanism and the magnetic part are separated, and the connecting mechanism is continuously rotated by the motor; When the conveyor belt is working, the motor drives the connecting ring to rotate through the connecting mechanism, and the connecting ring then drives the conveyor belt to rotate, thereby achieving the function of conveying silicon wafers; When the time relay reaches the time, the current converter changes the current, causing the electromagnetic block to produce a different magnetic pole from the magnetic part, forcing the electromagnetic block and the magnetic part to attract each other. When the connecting mechanism and the magnetic part are attracted to each other, the connecting mechanism can rotate with the magnetic part during the rotation process; When the conveyor belt needs to stop working, after the time relay reaches the time, the current converter will change the current so that the magnetic poles generated by the electromagnetic block are the same as the magnetic poles of the magnetic part, and the connecting mechanism will move to the end away from the connecting ring; the connecting ring and the connecting mechanism lose connection, and the connecting mechanism will not rotate with the connecting ring during the rotation process. At the same time, the connecting mechanism and the connecting ring repel each other, and the repulsive force can lock the connecting ring, that is, lock the conveyor belt, making it difficult for the conveyor belt to rotate.

2. The intelligent long-life silicon wafer conveying device according to claim 1, characterized in that: The motor comprises a rotating rod and a motor body. The motor body rotates with the rotating rod. A plurality of sliding grooves are provided on the rotating rod. The connecting mechanism is slidably connected in the sliding grooves.

3. The intelligent long-life silicon wafer conveying device according to claim 2, characterized in that: The connecting mechanism also includes a first wireless module. The connecting rod is located between the electromagnetic block and the first wireless module. A first power line is provided between the first wireless module and the electromagnetic block. A second wireless module matching the first wireless module is provided in the rack.

4. The intelligent long-life silicon wafer conveying device according to claim 3, characterized in that: A current converter is provided on the first power line, and a magnetic block matching the connection mechanism is provided on the bottom wall of the slide slot.

5. The intelligent long-life silicon wafer conveying device according to claim 3 or 4, characterized in that: A battery matching the second wireless module is arranged in the frame, and a second power line is arranged between the battery and the motor.

6. The intelligent long-life silicon wafer conveying device according to claim 1, characterized in that: A belt adjusting mechanism matching the conveyor belt is installed on the frame.

7. The intelligent long-life silicon wafer conveying device according to claim 6, characterized in that: The belt adjustment mechanism includes a sleeve, a first piston rod and a second piston rod. The first piston rod is slidably connected in the sleeve. A pressure detection device is provided between the first piston rod and the second piston rod. The second piston rod is rotatably connected to a rotating roller at one end away from the pressure detection device.

8. The intelligent long-life silicon wafer conveying device according to claim 7, characterized in that: A belt cleaning mechanism is further provided on one side of the frame close to the belt adjusting mechanism. The belt cleaning mechanism comprises an air pump and a rubber ring. A first connecting pipe is provided between the air pump and the rubber ring.

9. The intelligent long-life silicon wafer conveying device according to claim 8, characterized in that: The first connecting pipe is provided with a plurality of branch pipes.

10. The intelligent long-life silicon wafer conveying device according to claim 9, characterized in that: A second connecting pipe is provided between the air pump and the belt adjusting mechanism, an air intake pipe matching the second connecting pipe is provided on the sleeve, and a solenoid valve is provided on one side close to the air intake pipe.

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