Panel storage container
By providing a convex protective member between the cover body of the panel storage container and the container body, the wear problem when the cover is inclined is solved, and the durability and dust-proof effect of the equipment are improved.
Patent Information
- Application Number
- CN202180083606.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Priority Date
- 2021-02-19
- Filing Date
- 2021-09-14
- Publication Date
- 2025-08-22
- Estimated Expiration
- 2041-09-14
AI Technical Summary
During the opening and closing of the panel storage container, the contact between the cover body and the container body may cause damage, especially when the cover body is inclined, which may easily cause wear.
A convex protective member is provided between the contact surfaces of the cover body and the container body to reduce the direct contact area and to install the protective member detachably to replace the damaged part.
It effectively reduces wear between the cover body and the container body, reduces dust entry, and improves the service life and reliability of the panel storage container.
Smart Images

Figure CN116601087B_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to a panel storage container. Background Art
[0002] In the manufacturing process of panels such as liquid crystal panel glass substrates, a panel storage container that accommodates multiple panels is used when transferring rectangular panels from a manufacturing apparatus to another manufacturing apparatus or for temporary storage. For example, Patent Document 1 describes a panel storage container comprising: a container body for accommodating the panels; and a lid that flexibly covers an opening provided in the container body.
[0003] Patent Document 1: International Publication No. 2019 / 138982 Summary of the Invention
[0004] When the lid is opened or closed, the peripheral edge of the lid may come into contact with the opening edge of the container body that defines the opening, which may damage at least one of the lid and the container body.
[0005] The present disclosure describes a panel storage container that can suppress damage.
[0006] A panel storage container according to one aspect of the present disclosure includes: a container body having a flange defining an opening and for storing a plurality of panels; a cover body for blocking the opening; and a convex protective member arranged between the outer peripheral surface of the cover body and the inner peripheral surface of the flange, which face each other when the cover body blocks the opening.
[0007] In the panel storage container, a convex protective member is provided between the outer peripheral surface of the cover and the inner peripheral surface of the flange, which face each other when the cover blocks the opening. When the cover is mounted on the flange or removed from the flange, the outer peripheral surface of the cover may sometimes approach the inner peripheral surface of the flange due to the tilt of the cover, etc. In this case, the outer peripheral surface of the cover may contact the protective member before contacting the inner peripheral surface of the flange. Therefore, the possibility of the outer peripheral surface of the cover contacting the inner peripheral surface of the flange can be reduced. Furthermore, since the protective member is convex, the contact area between the outer peripheral surface of the cover and the protective member is smaller than the contact area when the outer peripheral surface of the cover contacts the inner peripheral surface of the flange. As a result, damage to the panel storage container can be suppressed.
[0008] The protective member can be provided on the inner circumference of the flange, or it can protrude from the inner circumference of the flange toward the outer circumference of the lid when the lid is blocking the opening. Because the protective member protrudes from the inner circumference of the flange toward the outer circumference of the lid, even when the outer circumference of the lid approaches the inner circumference of the flange, the likelihood of the outer circumference of the lid contacting the protective member before contacting the inner circumference of the flange is increased. This further reduces damage to the panel storage container.
[0009] The protective member may also be detachably provided on the flange. In this case, the protective member can be replaced. For example, if the protective member is damaged, the panel storage container can be prevented from being damaged by replacing the protective member with a new one.
[0010] The protective member may also be provided on the outer circumference of the lid, projecting from the outer circumference of the lid toward the inner circumference of the flange when the lid is blocking the opening. Because the protective member projects from the outer circumference of the lid toward the inner circumference of the flange, even when the outer circumference of the lid approaches the inner circumference of the flange, the likelihood of the outer circumference of the lid contacting the protective member is increased before the outer circumference of the lid contacts the inner circumference of the flange. This further reduces damage to the panel storage container.
[0011] The protective member may also be detachably provided on the cover. In this case, the protective member can be replaced. For example, if the protective member is damaged, the panel storage container can be prevented from being damaged by replacing the protective member with a new one.
[0012] The flange may also be a rectangular frame. The protective member may also include a first protective member and a second protective member. The first protective member and the second protective member may also be provided between the inner circumferential surface at both ends of the frame portion forming one side of the frame and the outer circumferential surface of the cover body. For example, when the cover body is tilted, there is a high possibility that the outer circumferential surface of the cover body approaches the inner circumferential surface at both ends of the frame portion. According to the above structure, even if the outer circumferential surface of the cover body approaches the inner circumferential surface of either end, the outer circumferential surface of the cover body may contact the first protective member or the second protective member before contacting the inner circumferential surface of the flange. Therefore, damage to the panel storage container can be further suppressed.
[0013] The cover may include a cover body including an outer peripheral surface. The cover body may also be made of a metal material. The flange may also be made of a resin material. In this case, if the outer peripheral surface of the cover contacts the inner peripheral surface of the flange, dust may be generated and mixed into the panel storage container. According to the panel storage container, the possibility of the outer peripheral surface of the cover contacting the inner peripheral surface of the flange is reduced, thereby suppressing the generation of dust.
[0014] According to the present disclosure, damage can be suppressed. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 This is an exploded perspective view of a panel storage container according to one embodiment.
[0016] Figure 2 for Figure 1 A three-dimensional view of the back of the panel storage container.
[0017] Figure 3 for Figure 1 An exploded perspective view of a portion of the container body.
[0018] Figure 4 A diagram for explaining the installation of the flange.
[0019] Figure 5 A diagram for explaining a cover member.
[0020] Figure 6 for Figure 1 A partial enlarged view of the panel storage container.
[0021] Figure 7 For the Figure 6 A cross-sectional view taken along line VII-VII.
[0022] Figure 8 for Figure 1 Bottom view of the panel storage container.
[0023] Figure 9 for Figure 1 An exploded perspective view of a portion of the container body.
[0024] Figure 10 A cross-sectional view of the periphery of the air supply and exhaust mechanism.
[0025] Figure 11 For the Figure 2 Cross-sectional view along line XI-XI.
[0026] Figure 12 For the Figure 11 A cross-sectional view taken along line XII-XII. DETAILED DESCRIPTION
[0027] In the following, we refer to the Figure 1 The embodiments of the present disclosure are described in detail in the following aspects. Furthermore, in the description of the accompanying drawings, the same elements are marked with the same figure marks, and repeated descriptions are omitted. In each figure, an XYZ coordinate system is shown. The Y-axis direction is a direction that intersects (here is orthogonal to) the X-axis direction and the Z-axis direction. The Z-axis direction is a direction that intersects (here is orthogonal to) the X-axis direction and the Y-axis direction. As an example, the X-axis direction is the left-right direction (width direction), the Y-axis direction is the front-back direction (depth direction), and the Z-axis direction is the up-down direction (height direction). For the convenience of explanation, the terms "front", "back", "up", "down", "left", and "right" are used, but are not limited to these directions.
[0028] Reference Figure 1 and Figure 2 , a panel storage container according to one embodiment is described. Figure 1 This is an exploded perspective view of a panel storage container according to one embodiment. Figure 2 for Figure 1 A three-dimensional view of the back of the panel storage container. Figure 1 and Figure 2 The panel storage container 1 shown is a container for storing multiple panels. The panel storage container 1 is, for example, based on the Semiconductor Equipment and Materials International (SEMI) standard. Examples of panels include glass substrates for liquid crystal panels and panels equipped with electronic components. The panel has a rectangular shape. Examples of panel sizes include 510 mm × 515 mm and 600 mm × 600 mm. The number of panels that can be stored in the panel storage container 1 is arbitrarily specified, for example, it can be 6 or 12 panels.
[0029] Panel storage container 1 is used, for example, in a manufacturing device for electronic components. Electronic components are manufactured through the following processes: mounting multiple electronic components on a large carrier panel, such as a glass plate or stainless steel plate; sealing these electronic components with epoxy resin or other materials; peeling the sealed electronic components from the carrier panel in panel form; and individually cutting the panel-shaped electronic components. Panel storage container 1 is used to transfer panels between these processes.
[0030] The panel storage container 1 includes a container body 2 and a lid 3 .
[0031] The container body 2 is a rectangular parallelepiped container with an open front surface. In other words, the container body 2 is a front open box type container with an opening 2a provided on the front surface. The container body 2 accommodates a plurality of panels. Panels are placed in and removed from the container body 2 through the opening 2a. The detailed structure of the container body 2 will be described later.
[0032] The lid 3 is a member for closing the opening 2a of the container body 2. The lid 3 is sealed with a sealing member 34 such as a gasket (see Figure 7 ) blocks the opening 2a of the container body 2 airtightly. The cover body 3 is detachably mounted on the flange 25 that defines the opening 2a. The cover body 3 includes a cover body 31 and a locking mechanism 32. The cover body 31 is the main body portion of the cover body 3. The cover body 31 is a rectangular plate material that includes an outer peripheral surface 3a of the cover body 3. The outer peripheral surface 3a is a surface along the periphery of the cover body 3 (cover body 31). The specific gravity of the constituent material of the cover body 31 is greater than the specific gravity of the constituent material of the flange 25, for example, it is 1.5 or more. The cover body 31 is made of, for example, a metal material. Examples of metal materials include aluminum and magnesium alloys. A keyhole 33 is provided on the front surface of the cover body 31. A key, not shown, is inserted into the keyhole 33.
[0033] The locking mechanism 32 locks or unlocks the lid 3 by operating a key inserted into the keyhole 33. The locking mechanism 32 includes a latch (not shown). With the lid 3 attached to the flange 25, the latch is engaged with the latch hole 25h provided in the flange 25 by operating the key, thereby locking the lid 3. With the lid 3 locked, the latch is removed from the latch hole 25h by operating the key, thereby unlocking the lid 3.
[0034] The container body 2 and lid 3 can also be constructed by combining multiple parts molded from metal or resin materials. Examples of the resin contained in the resin molding material include thermoplastic resins. Examples of thermoplastic resins include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, acrylic resins such as polymethyl methacrylate, and acrylonitrile butadiene styrene copolymer. Alloys of the aforementioned materials can be used as the resin contained in the resin molding material.
[0035] Conductive materials and various antistatic agents may also be added to these resins. Conductive materials may be composed of, for example, carbon fibers, carbon powder, carbon nanotubes, or conductive polymers. Antistatic agents such as anionic, cationic, and nonionic antistatic agents may be used. Ultraviolet light absorbers such as benzotriazole, salicylate, cyanoacrylate, oxalic acid anilide, and hindered amine may also be added. Glass fibers or carbon fibers may also be optionally added to increase rigidity.
[0036] Then, further reference Figures 3 to 5 The container body 2 will be described in detail. Figure 3 for Figure 1 An exploded perspective view of a portion of the container body. Figure 4 A diagram for explaining the installation of the flange. Figure 5 : is a diagram for explaining the cover member. Figures 3 to 5 As shown, the container body 2 includes a top plate 21, a bottom plate 22, a pair of side walls 23, a back wall 24, a flange 25, a frame 26, a base portion 27, a pair of rail members 28, connecting plates 41 to 47, side plates 48, a pair of cover members C1, a pair of cover members C2 and a pair of cover members C3.
[0037] The top plate 21, the bottom plate 22, the side walls 23, and the back wall 24 are generally rectangular plates. The top plate 21 and the bottom plate 22 face each other in the vertical direction and are arranged generally in parallel. The pair of side walls 23 face each other in the left-right direction and are arranged generally in parallel. The side wall 23 on the left side connects the left end of the top plate 21 with the left end of the bottom plate 22. The side wall 23 on the right side connects the right end of the top plate 21 with the right end of the bottom plate 22. The back wall 24 connects the rear end of the top plate 21 with the rear end of the bottom plate 22, and also connects the rear ends of the pair of side walls 23. The storage space 20 is defined by the top plate 21, the pair of side walls 23, the bottom plate 22, and the back wall 24.
[0038] The top plate 21, bottom plate 22, and sidewalls 23 are made of, for example, a metal material. Examples of metal materials include aluminum and stainless steel. The back wall 24 is made of, for example, a transparent resin material that allows the storage space 20 to be viewed from outside the container body 2. A portion of the back wall 24 may also be made of a transparent resin material. Examples of transparent resin materials include acrylic resin, polycarbonate, vinyl chloride resin, and cycloolefin polymer.
[0039] The top plate 21 has a front end 21a, a rear end 21b, and a pair of side ends 21c. The front end 21a is the portion along the front edge of the top plate 21. The rear end 21b is the portion along the rear edge of the top plate 21. The pair of side ends 21c are the portions along the left and right side edges of the top plate 21. The front end 21a and the pair of side ends 21c are provided with a plurality of insertion holes for inserting screws.
[0040] The base plate 22 has a front end 22a, a rear end 22b, and a pair of side ends 22c. The front end 22a is the portion along the front edge of the base plate 22. The rear end 22b is the portion along the rear edge of the base plate 22. The pair of side ends 22c are the portions along the left and right side edges of the base plate 22. A plurality of insertion holes for inserting screws are provided in the rear end 22b and the pair of side ends 22c. The base plate 22 is provided with a plurality of (four in this embodiment) through holes 22h that penetrate the base plate 22 in the vertical direction. The air supply and exhaust mechanism 55 described later is embedded in the through hole 22h.
[0041] Each side wall 23 has a shape in which its front end and upper and lower ends are folded back toward the outside of the container body 2. The side wall 23 includes a main body portion 23a, an upper end portion 23b, a lower end portion 23c, and a front end portion 23d. The main body portion 23a has a rectangular shape. The main body portion 23a includes a rear end portion 23e. The rear end portion 23e is located along the rear end edge of the main body portion 23a. The upper end portion 23b extends along the upper end edge of the main body portion 23a and extends vertically from the main body portion 23a toward the outside of the container body 2 in the left-right direction. The lower end portion 23c extends along the lower end edge of the main body portion 23a and extends vertically from the main body portion 23a toward the outside of the container body 2 in the left-right direction. The front end portion 23d extends along the front end edge of the main body portion 23a and extends vertically from the main body portion 23a toward the outside of the container body 2 in the left-right direction. A plurality of insertion holes for inserting screws are provided in the upper end portion 23b, the lower end portion 23c, the front end portion 23d, and the rear end portion 23e. The main body 23a is provided with a plurality of insertion holes for inserting screws. The insertion holes of the main body 23a are used to attach a support body 65 described later.
[0042] The back wall 24 has an upper end 24a, a lower end 24b, and a pair of side ends 24c. The upper end 24a is the portion along the upper edge of the back wall 24. The lower end 24b is the portion along the lower edge of the back wall 24. The pair of side ends 24c are the portions along the left and right side edges of the back wall 24. The lower end 24b is provided with a plurality of insertion holes for inserting screws.
[0043] The flange 25 is a rectangular frame, extending across the front end of the top plate 21, the front end of the bottom plate 22, and the front ends of the pair of side walls 23. The flange 25 defines the opening 2a. A step is provided on the inner circumference of the flange 25 in the front-to-back direction, with the inner circumference of the front end of the flange 25 being longer than that of the rear end. The lid 3 rests on the step via a sealing member 34, thereby blocking the opening 2a. At this point, the front portion of the flange 25, located further forward of the step, surrounds the lid 3. In other words, the outer circumference 3a of the lid 3 faces the inner circumference 25s of the front portion of the flange 25, extending across the entire circumference. The flange 25 is formed, for example, of the resin material described above. The flange 25 comprises an upper frame member 25a, a lower frame member 25b, and a pair of side frame members 25c. The upper frame member 25a, the lower frame member 25b, and the side frame members 25c each form a frame portion on one side of the frame.
[0044] The upper frame member 25a and the lower frame member 25b are members extending in the left-right direction. They are spaced apart from each other in the vertical direction and arranged approximately parallel to each other. A pair of side frame members 25c are members extending in the vertical direction. They are spaced apart from each other in the left-right direction and arranged approximately parallel to each other. The left end of the upper frame member 25a is connected to the left end of the lower frame member 25b by the left side frame member 25c, and the right end of the upper frame member 25a is connected to the right end of the lower frame member 25b by the right side frame member 25c. Two upper locking holes 25h are respectively provided in the upper frame member 25a and the lower frame member 25b, spaced apart from each other in the left-right direction. The upper locking hole 25h of the upper frame member 25a and the upper locking hole 25h of the lower frame member 25b are located at positions facing each other in the vertical direction.
[0045] The frame 26 is used to fix the top plate 21, the bottom plate 22, the pair of side walls 23, and the back wall 24. The frame 26 is made of, for example, a metal material. Examples of metal materials include aluminum and stainless steel. The frame 26 is disposed on the front surface of the back wall 24. The frame 26 includes an upper frame member 26a, a lower frame member 26b, a pair of side frame members 26c, a support 26d, and a pair of support members 26e. The upper frame member 26a and the lower frame member 26b are columnar members extending in the left-right direction. The upper frame member 26a and the lower frame member 26b are spaced apart from each other in the vertical direction and are arranged approximately parallel to each other.
[0046] A pair of side frame members 26c are columnar members extending in the vertical direction. The pair of side frame members 26c are spaced apart from each other in the horizontal direction and arranged approximately parallel to each other. The left ends of the upper frame member 26a and the lower frame member 26b are fixed to the left side frame member 26c via screws. The right ends of the upper frame member 26a and the lower frame member 26b are fixed to the right side frame member 26c via screws. In other words, the left end of the upper frame member 26a is connected to the left end of the lower frame member 26b by the left side frame member 26c, and the right end of the upper frame member 26a is connected to the right end of the lower frame member 26b by the right side frame member 26c.
[0047] The support 26d and the pair of support 26e are columnar members extending in the vertical direction. One support 26e, support 26d, and the other support 26e are arranged in sequence in the horizontal direction and are arranged approximately parallel to each other. The upper ends of the support 26d and the pair of support 26e are fixed to the upper frame member 26a via screws. The lower ends of the support 26d and the pair of support 26e are fixed to the lower frame member 26b via screws. The support 26d is positioned at the center of the frame 26 in the horizontal direction, while the pair of support 26e is positioned near the ends of the frame 26 in the horizontal direction. The support 26d is provided with multiple recesses for mounting the shaft 61a, described later. These recesses are recessed from the front surface of the support 26d toward the rear. The support 26e is provided with multiple recesses for mounting the shaft 62a, described later, toward the rear. These recesses are recessed from the front surface of the support 26e toward the rear.
[0048] The pedestal 27 is a portion that serves as the base of the container body 2. The pedestal 27 is made of, for example, a metal material. Examples of metal materials include aluminum and stainless steel. The pedestal 27 is provided on the lower surface of the base plate 22. The pedestal 27 includes a support member 27a, a support member 27b, a pair of support members 27c, and a plurality of (three in this embodiment) support members 27d. The support members 27a and 27b are columnar members extending in the left-right direction. The support members 27a and 27b are spaced apart from each other in the front-to-back direction and are arranged substantially in parallel.
[0049] The pair of support members 27c are L-shaped members extending in the front-to-back direction. The pair of support members 27c are spaced apart from each other in the left-to-right direction and arranged approximately parallel to each other. Each support member 27c includes a first portion 27e and a second portion 27f. The first portion 27e is a plate-shaped portion extending along the bottom plate 22 (XY plane) and extending in the front-to-back direction. The second portion 27f extends in the front-to-back direction along the inner edge of the first portion 27e in the left-to-right direction and is vertically arranged downward from this edge. The first portion 27e and the second portion 27f are L-shaped.
[0050] The left ends of support members 27a and 27b are fixed to the second portion 27f of left support member 27c via screws. The right ends of support members 27a and 27b are fixed to the second portion 27f of right support member 27c via screws. In other words, the left end of support member 27a and the left end of support member 27b are connected by left support member 27c, and the right end of support member 27a and the right end of support member 27b are connected by right support member 27c.
[0051] The plurality of support members 27d are columnar members extending in the left-right direction. The plurality of support members 27d are arranged in a front-to-back direction and are disposed substantially parallel to one another. The left end of each support member 27d is fixed to the left support member 27c via a screw. The right end of each support member 27d is fixed to the right support member 27c via a screw.
[0052] A pair of track members 28 is a portion for carrying the container body 2. The pair of track members 28 is placed on the conveyor, for example, when the panel storage container 1 is transported by the conveyor. Each track member 28 is a plate-shaped member extending in the front-to-back direction. The track member 28 is made of, for example, the resin material described above. Each track member 28 is arranged under the support member 27c and is connected to the support member 27c by a connecting member 49. The connecting member 49 is a member having an external thread at the lower end and an internal thread (screw hole) at the upper end. The support member 27c and the track member 28 are connected to each other to form a U-shape with the outer sides open in the left and right directions.
[0053] Connecting plates 41 through 47 are members used to connect the top plate 21, bottom plate 22, side wall 23, back wall 24, and flange 25. Connecting plates 41 through 47 are elongated, plate-like members. They are made of, for example, a metal material. Examples of metal materials include aluminum and stainless steel. Connecting plates 41 through 44 and 47 are provided with insertion holes for screws. Connecting plates 45 and 46 are also provided with screw holes.
[0054] The side plate 48 is a member for mounting the support body 65 described later. The side plate 48 is a plate-shaped member extending in the up-down direction. The side plate 48 is made of, for example, a metal material. Examples of metal materials include aluminum and stainless steel. The side plate 48 is provided on the outer surface of the main body 23a of the side wall 23. In this embodiment, two side plates 48 are provided on each side wall 23. The two side plates 48 are arranged in the front-to-back direction and are arranged approximately parallel to each other. One side plate 48 is provided near the center of the side wall 23 in the front-to-back direction, and the other side plate 48 is provided near the front end of the side wall 23 in the front-to-back direction. The upper end of each side plate 48 is fixed to the upper end 23b by a screw. The lower end of each side plate 48 is fixed to the lower end 23c by a screw. Each side plate 48 is provided with an insertion hole for inserting the screw.
[0055] Cover members C1 to C3 are used to prevent particles from entering storage space 20. Cover members C1 to C3 are made of, for example, the resin material described above. A pair of cover members C1 is provided at the corner formed by top plate 21, side walls 23, and flange 25. A pair of cover members C2 is provided at the corner formed by top plate 21, side walls 23, and back wall 24. A pair of cover members C3 is provided at the corner formed by bottom plate 22, side walls 23, and back wall 24.
[0056] Next, a method of connecting the components of the container body 2 will be described.
[0057] The back wall 24 is superimposed on the frame body 26, with the rear surface of the lower frame material 26b contacting the inner surface of the lower end portion 24b of the back wall 24 in the front-to-back direction. Furthermore, the connecting plate 41 is superimposed on the outer surface of the lower end portion 24b. In other words, the lower end portion 24b is clamped between the connecting plate 41 and the lower frame material 26b. In this state, a screw is inserted through the insertion hole of the connecting plate 41 and the insertion hole of the lower end portion 24b, and the screw is screwed into the screw hole of the lower frame material 26b. Thus, the lower end portion 24b is clamped by the connecting plate 41 and the lower frame material 26b, securing the back wall 24 to the frame body 26.
[0058] The rear end 21b of the top plate 21 is placed on the upper surface of the upper frame member 26a, and the upper end 24a of the back wall 24 is placed on the rear surface of the upper frame member 26a. A connecting plate 42 is provided to cover the rear end 21b and the upper end 24a. The connecting plate 42 has a shape that follows the outer shape of the upper frame member 26a. Specifically, the connecting plate 42 includes a portion covering the rear end 21b, a portion covering the upper end 24a, and a connecting portion connecting these portions. A screw is screwed into a screw hole provided in the upper frame member 26a through a through-hole provided in the connecting portion of the connecting plate 42. Thus, the rear end 21b and the upper end 24a are clamped by the connecting plate 42 and the upper frame member 26a, thereby fixing the top plate 21 and the back wall 24 to the frame body 26. As a result, the top plate 21 and the back wall 24 are connected.
[0059] The rear end 23e of the side wall 23 is placed on the side of the side frame member 26c, and the side end 24c of the back wall 24 is placed on the rear surface of the side frame member 26c. A connecting plate 43 is installed to cover the rear end 23e and the side end 24c. The connecting plate 43 has a shape that follows the outer shape of the side frame member 26c. Specifically, the connecting plate 43 includes a portion covering the rear end 23e, a portion covering the side end 24c, and a connecting portion connecting these portions. Screws are screwed into screw holes provided in the side frame member 26c through insertion holes provided in the connecting portion of the connecting plate 43. Furthermore, screws are inserted through the insertion holes provided in the portion of the connecting plate 43 covering the rear end 23e and the insertion hole provided in the rear end 23e, and then screwed into screw holes provided in the side of the side frame member 26c. Thus, the rear end portion 23e and the side end portion 24c are clamped by the connecting plate 43 and the side frame member 26c, and the side wall 23 and the back wall 24 are fixed to the frame body 26. As a result, the side wall 23 and the back wall 24 are connected.
[0060] The side end 21c of the top plate 21 is placed on the upper surface of the upper end 23b of the side wall 23, with the connecting plate 44 overlapping the upper surface of the side end 21c. Two connecting plates 45 extending in the front-to-back direction are provided on the lower surface of the upper end 23b, spaced apart from each other in the front-to-back direction. In other words, the side end 21c and the upper end 23b are vertically overlapped, and the side end 21c and the upper end 23b are vertically clamped by the connecting plates 44 and 45. In this state, screws are inserted through the insertion holes of the connecting plates 44, the insertion holes of the side end 21c, and the insertion holes of the upper end 23b in that order, and then screwed into the screw holes of the connecting plates 45. Thus, the side end 21c and the upper end 23b are clamped by the connecting plates 44 and 45, and the top plate 21 is connected to the side wall 23.
[0061] The rear end of the upper frame member 25a of the flange 25 is placed on the upper surface of the front end 21a of the top plate 21, and the connecting plate 46 is aligned with the lower surface of the front end 21a. In other words, the front end 21a is vertically clamped between the upper frame member 25a and the connecting plate 46. In this state, screws are inserted through the insertion holes of the upper frame member 25a and the front end 21a, and then screwed into the screw holes of the connecting plate 46. Thus, the front end 21a is clamped between the upper frame member 25a and the connecting plate 46, and the top plate 21 and flange 25 are connected.
[0062] The rear surface of the side frame member 25c of the flange 25 is aligned with the front surface of the front end portion 23d of the side wall 23, and the connecting plate 47 is aligned with the rear surface of the front end portion 23d. In other words, the front end portion 23d is clamped in the front-to-back direction by the side frame member 25c and the connecting plate 47. In this state, screws are inserted through the insertion holes of the connecting plate 47 and the insertion holes of the front end portion 23d, and then screwed into the screw holes of the side frame member 25c. Thus, the front end portion 23d is clamped by the side frame member 25c and the connecting plate 47, and the side wall 23 and flange 25 are connected.
[0063] The rear end portion 22b is overlapped with the lower frame material 26b so that the lower surface of the lower frame material 26b of the frame body 26 and the upper surface of the rear end portion 22b of the base plate 22 are in contact in the vertical direction. Furthermore, the support member 27b of the pedestal portion 27 is overlapped with the lower surface of the rear end portion 22b. In other words, the rear end portion 22b is clamped between the lower frame material 26b and the support member 27b. In this state, a screw is inserted through the insertion hole of the lower frame material 26b and the insertion hole of the rear end portion 22b, and the screw is screwed into the screw hole of the support member 27b. Thus, the rear end portion 22b is clamped by the lower frame material 26b and the support member 27b, and the base plate 22 is fixed to the frame body 26 and the pedestal portion 27.
[0064] The external threads of the connecting member 49 are screwed into the screw holes provided in the track member 28. The support member 27c is then positioned on the track member 28 so that the screw holes of the connecting member 49 overlap with the insertion holes provided in the first portion 27e of the support member 27c. The side end 22c of the base plate 22 is placed on the upper surface of the support member 27c. The lower end 23c of the side wall 23 is aligned with the side end 22c so that the upper surface of the side end 22c vertically contacts the lower surface of the lower end 23c. In this state, screws are inserted through the insertion holes of the lower end 23c, the insertion holes of the side end 22c, and the insertion holes of the first portion 27e, and are then screwed into the screw holes of the connecting member 49. Thus, the side end 22c is clamped between the lower end 23c and the support member 27c, and the base plate 22 and the side wall 23 are fixed to the base portion 27. As a result, the bottom plate 22 and the side wall 23 are connected, and the base portion 27 and the rail member 28 are connected.
[0065] Furthermore, the left-right length of the rear end portion of the upper frame member 25a is shorter than the left-right length of the front end portion 21a and the connecting plate 46. Therefore, the left-right ends of the front end portion 21a are not covered by the rear end portion of the upper frame member 25a. The cover member C1 is placed on both left-right ends of the front end portion 21a. In other words, the left-right ends of the front end portion 21a are clamped between the cover member C1 and the connecting plate 46. In this state, screws are inserted through the insertion holes of the cover member C1 and the insertion holes of the front end portion 21a, and the screws are screwed into the screw holes of the connecting plate 46. Thus, the cover member C1 is attached.
[0066] Connecting plates 44 and 45 do not extend to the rear ends of side end 21c and upper end 23b. Cover member C2 is installed so that the rear ends of side end 21c and upper end 23b are clamped. In this state, screws are inserted through the insertion holes provided in the upper portion of cover member C2, the insertion holes in side end 21c, and the insertion holes in upper end 23b, and then screwed into the screw holes provided in the lower portion of cover member C2. Cover member C2 is thus installed.
[0067] The connecting plate 41 is shorter in the left-right direction than the lower end portion 24b. Therefore, both ends of the lower end portion 24b are not covered by the connecting plate 41. The cover member C3 is attached so as to sandwich the rear end of the lower end portion 23c and the rear end of the first portion 27e, and also to sandwich both ends of the lower end portion 24b in the left-right direction. Furthermore, the cover member C3 is attached using screws.
[0068] The base plate 22 and support member 27c extend further forward than the side wall 23. That is, the front end of the side end 22c is not covered by the lower end 23c. The front end of the side end 22c is clamped between the side frame material 25c of the flange 25 and the front end of the first portion 27e. In this state, screws are inserted through the insertion holes of the first portion 27e and the insertion holes of the side end 22c, and the screws are screwed into the screw holes provided on the lower surface of the side frame material 25c. Thus, the base plate 22 and flange 25 are fixed to the base portion 27, and the base plate 22 and flange 25 are connected. Furthermore, the front end 22a of the base plate 22 is inserted into the groove provided on the rear surface of the lower frame material 25b of the flange 25.
[0069] Next, refer to Figure 6 and Figure 7 The relationship between the flange 25 and the cover 3 will be described. Figure 6 for Figure 1 A partial enlarged view of the panel storage container. Figure 7 For the Figure 6 The cross-sectional view of line VII-VII. Figure 6 and Figure 7 As shown, the container body 2 further includes a plurality of protection members 29 .
[0070] The protective member 29 is a convex member used to protect the flange 25. The protective member 29 is made of, for example, the resin material described above. The material of the protective member 29 may be the same as or different from that of the flange 25. The protective member 29 is disposed between the outer peripheral surface 3a of the cover 3 and the inner peripheral surface 25s of the flange 25, which face each other when the cover 3 blocks the opening 2a. In this embodiment, the protective member 29 is disposed on the inner peripheral surface 25s of the flange 25, projecting from the inner peripheral surface 25s toward the outer peripheral surface 3a when the cover 3 blocks the opening 2a. More specifically, the protective member 29 is disposed on the inner peripheral surface 25s of the side frame member 25c and projects toward the outer peripheral surface 3a of the side end portion of the cover 3. Two protective members 29 (a first protective member and a second protective member) are disposed on each side frame member 25c, one on each inner peripheral surface 25s at the upper and lower ends of the side frame member 25c.
[0071] The protective member 29 is detachably mounted on the flange 25. The protective member 29 includes a receiving portion 29a and a shaft portion 29b. The receiving portion 29a is a portion that protrudes from the inner circumferential surface 25s of the flange 25 toward the outer circumferential surface 3a. The receiving portion 29a is, for example, in the shape of a circular plate. The receiving portion 29a includes a contact surface 29c that faces the outer circumferential surface 3a. The contact surface 29c is a surface that the cover 3 can contact. The area of the contact surface 29c is smaller than the area of the inner circumferential surface 25s of the side frame material 25c. The contact surface 29c is designed to be spaced apart from the outer circumferential surface 3a. The distance D between the contact surface 29c and the outer circumferential surface 3a is designed to be approximately 0.5 mm.
[0072] The shaft portion 29b is used to attach the protective member 29 to the flange 25. The shaft portion 29b is located on the surface of the receiving portion 29a opposite the abutment surface 29c and extends in the direction opposite to the abutment surface 29c. The shaft portion 29b engages with a mounting hole 25t provided on the inner circumferential surface 25s of the side frame member 25c. For example, the protective member 29 can be attached to the flange 25 (side frame member 25c) by pressing the shaft portion 29b into the mounting hole 25t. Alternatively, the protective member 29 can be attached to the flange 25 (side frame member 25c) by joining the shaft portion 29b to the mounting hole 25t using a bonding material. Alternatively, the shaft portion 29b may be externally threaded, and the mounting hole 25t may be internally threaded. In this case, the protective member 29 is attached to the flange 25 (side frame member 25c) by screwing the shaft portion 29b into the mounting hole 25t. The protection member 29 may be attached to the flange 25 (side frame member 25 c ) by fixing the shaft portion 29 b to the attachment hole 25 t using a snap-fit.
[0073] Then, refer to Figures 8 to 10 , the components arranged at the bottom of the container body 2 are described. Figure 8 for Figure 1 Bottom view of the panel storage container. Figure 9 for Figure 1 An exploded perspective view of a portion of the container body. Figure 10 It is a cross-sectional view of the periphery of the air supply and exhaust mechanism. Figure 8 and Figure 9 In the figure, for the convenience of explanation, the screws used to mount the base substrate 51 and the like on the pedestal 27 are omitted. Figure 8 and Figure 9 As shown, the container body 2 further includes a base substrate 51 , a mounting plate 52 , a mounting plate 53 , a positioning member 54 , an air supply and exhaust mechanism 55 and a block material 56 .
[0074] The base substrate 51 is a substrate for mounting the positioning member 54, the air supply and exhaust mechanism 55, and the block material 56. The base substrate 51 is a rectangular plate. The base substrate 51 is arranged below the base portion 27 and is fixed to the support member 27a and the support member 27d by screws. The base substrate 51 is arranged across the support member 27a and the three support members 27d and does not extend to the rear end portion 22b. In other words, the base substrate 51 is arranged near the front end portion 22a of the bottom plate 22. The front end portion 51a of the base substrate 51 is located below the lower frame material 25b of the flange 25. An insertion hole for inserting a screw is provided on the front end portion 51a. A screw is inserted into the insertion hole of the front end portion 51a and screwed into the screw hole of the lower frame material 25b.
[0075] The base substrate 51 is provided with a through hole 51g for mounting the positioning member 54 and a through hole 51h for mounting the air supply and exhaust mechanism 55. In the present embodiment, three through holes 51g and four through holes 51h are provided. The three through holes 51g are arranged radially from the center of the base substrate 51. Two through holes 51g are provided near the ends in the left and right directions of the front portion of the base substrate 51, and one through hole 51g is provided near the center in the left and right directions of the rear portion of the base substrate 51. The four through holes 51h are provided near the four corners of the base substrate 51. A through hole for mounting a radio frequency identification (RF-ID) tag is further provided at the rear end portion of the base substrate 51.
[0076] The mounting plates 52 and 53 are components for mounting the positioning member 54 on the base substrate 51. The mounting plates 52 and 53 are plate-shaped components. The mounting plates 52 and 53 are made of, for example, the resin material described above. The mounting plate 52 is provided on the lower surface of the front portion of the base substrate 51. Two through holes 52g are provided on the mounting plate 52 for exposing the positioning member 54. A through hole for fixing the panel storage container 1 is further provided between the two through holes 52g of the mounting plate 52. The mounting plate 53 is provided on the lower surface of the rear portion of the base substrate 51. A through hole 53g is provided on the mounting plate 53 for exposing the positioning member 54.
[0077] The positioning member 54 is a member for positioning the panel storage container 1 (container body 2) by an external device such as a conveying device or a processing device. The positioning member 54 is made of, for example, a metal material. Examples of metal materials include aluminum and stainless steel. The positioning member 54 is a V-shaped plate. The positioning member 54 is fitted into the through hole 51g in a manner recessed toward the bottom plate 22 (upward). The V-shaped groove is defined by the V-face of the positioning member 54. The V-face is subjected to a wear-resistant surface treatment. In this embodiment, the container body 2 includes three positioning members 54.
[0078] Two positioning members 54 are fitted into two through-holes 51g provided in the front portion of the base substrate 51. The mounting plate 52 is mounted on the lower surface of the base substrate 51 so that the V-shaped surfaces of the positioning members 54 are exposed through the through-holes 52g. The two ends of the positioning members 54 are sandwiched between the base substrate 51 and the mounting plate 52. Similarly, one positioning member 54 is fitted into a through-hole 51g provided in the rear portion of the base substrate 51. The mounting plate 53 is mounted on the lower surface of the base substrate 51 so that the V-shaped surfaces of the positioning members 54 are exposed through the through-hole 53g. The two ends of the positioning members 54 are sandwiched between the base substrate 51 and the mounting plate 53.
[0079] The panel storage container 1 is positioned by a pin attached to an external device contacting the V-shaped surfaces of each positioning member 54. Specifically, the V-shaped surfaces guide the pin into the V-shaped groove. Because the panel storage container 1 includes three positioning members 54, it is supported at three points. This allows for highly precise positioning of the panel storage container 1. The number and arrangement of the positioning members 54 can be varied as appropriate.
[0080] Furthermore, the positioning member 54 is spaced away from the lower surface of the bottom plate 22. This prevents the force applied to the V-shaped surface of the positioning member 54 by the pin of the external device from being transmitted to the base substrate 51 and then to the bottom plate 22. Consequently, deformation of the bottom plate 22 is suppressed.
[0081] The supply and exhaust mechanism 55 is a mechanism for supplying gas into the storage space 20 and exhausting gas from the storage space 20 to maintain the cleanliness and low humidity of the interior of the panel storage container 1 (the storage space 20). As an example of the gas supplied to the storage space 20, an inert gas can be cited. In the present embodiment, the container body 2 includes four supply and exhaust mechanisms 55. Each supply and exhaust mechanism 55 is arranged between the bottom plate 22 and the base substrate 51. Each supply and exhaust mechanism 55 supplies gas to the storage space 20 or exhausts gas from the storage space 20 via the through hole 22h provided in the bottom plate 22 and the through hole 51h provided in the base substrate 51. In the present embodiment, the two supply and exhaust mechanisms 55 provided in the front exhaust gas from the storage space 20, and the two supply and exhaust mechanisms 55 provided in the rear supply gas to the storage space 20. Furthermore, the number, configuration and function of the supply and exhaust mechanisms 55 can be changed arbitrarily.
[0082] like Figure 10 As shown, the air supply and exhaust mechanism 55 includes a filter 55a, a spacer 55b and a sealing member 55c. The filter 55a is a member that allows gas to pass through. The spacer 55b is a member for holding the filter 55a. The spacer 55b is a tubular (cylindrical) member open at both ends, and the filter 55a is accommodated in the internal space of the spacer 55b. A step is provided on the inner circumferential surface of the spacer 55b, and the inner diameter of the upper end of the spacer 55b is smaller than the inner diameter of the lower end. The spacer 55b is provided between the bottom plate 22 and the base substrate 51 in such a manner that the through hole 22h and the through hole 51h are connected to the internal space of the spacer 55b.
[0083] Filter 55a includes a filter body 55d and a cover 55e. Filter body 55d has an annular claw 55f at its upper end, and a threaded groove is provided on the outer circumference of its lower end. Cover 55e covers the lower end and outer circumference of filter body 55d. Cover 55e has an annular claw 55g on its outer circumference, and a threaded groove is provided on its inner circumference.
[0084] The installation method of the air supply and exhaust mechanism 55 is described below. The lower end of the spacer 55b is fixed to the base substrate 51 by a screw, and the upper end of the spacer 55b is pressed against the lower surface of the bottom plate 22 via a sealing member 55c such as an O-ring. In this state, the filter body 55d is inserted into the internal space of the spacer 55b through the through-hole 22h. At this time, the claw 55f is locked by the peripheral portion that defines the through-hole 22h. Subsequently, the cover 55e is inserted into the internal space of the spacer 55b through the through-hole 51h, and the outer peripheral surface of the filter body 55d is screwed to the inner peripheral surface of the cover 55e, so that the filter body 55d and the cover 55e are integrated. At this time, the claw 55g is locked to the step on the inner peripheral surface of the spacer 55b. In other words, the bottom plate 22 and the spacer 55b are clamped by the claw 55f and the claw 55g. Furthermore, by further screwing the outer peripheral surface of the filter body 55d and the inner peripheral surface of the cover 55e together, the bottom plate 22 and the spacer 55b are brought into close contact and fixed in an airtight manner.
[0085] The block material 56 is a component for suppressing the deformation of the panel storage container 1 (container body 2). The block material 56 is made of, for example, the resin material described above. The block material 56 is arranged on the lower surface of the base substrate 51. The block material 56 is arranged further back than the center of the front-to-back direction of the base substrate 51. More specifically, the block material 56 is arranged further back than the center of the front-to-back direction of the two positioning members 54 arranged in the front and the one positioning member 54 arranged in the rear. In this embodiment, the container body 2 includes two block materials 56. The two block materials 56 are respectively arranged at the corners formed by the rear end edge and the side end edge of the base substrate 51.
[0086] Then, refer to Figure 11 and Figure 12 The configuration within the accommodation space 20 will be described. Figure 11 For the Figure 2 Cross-sectional view along line XI-XI. Figure 12 For the Figure 11 The cross-sectional view of the XII-XII line. Figure 11 As shown, the container body 2 further includes a panel support portion 60. The panel support portion 60 is a portion for supporting the panel. The panel support portion 60 includes a plurality of support portions 61, a plurality of support portions 62, a plurality of stoppers 63, and a plurality of stoppers 64.
[0087] The number of support portions 61, support portions 62, stoppers 63, and stoppers 64 varies depending on the number of panels that can be stored in the panel storage container 1. In this embodiment, the panel support portion 60 includes one support portion 61, two support portions 62, two stoppers 63, and two stoppers 64 for each panel. In other words, one support portion 61, two support portions 62, two stoppers 63, and two stoppers 64 form a storage layer that accommodates one panel.
[0088] The support portion 61 is used to support the central portion of the panel in the left-right direction. The support portion 61 includes a shaft 61a and a plurality of elastic members 61b. The shaft 61a is a columnar (e.g., cylindrical) member extending in the front-to-back direction. The rear end of the shaft 61a is inserted into the recess of the support column 26d and is fixed to the support column 26d by a screw. The shaft 61a is made of, for example, a material with high bending rigidity. Examples of materials for the shaft 61a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic.
[0089] The elastic body 61b is an annular (e.g., circular) member provided on the outer peripheral surface of the shaft 61a. The elastic body 61b is provided to suppress the sliding of the panel and improve the positioning accuracy of the panel. From the perspective of preventing the sliding of the panel, the elastic body 61b may also have a higher friction force than the shaft 61a. From the perspective of preventing damage to the panel, the elastic body 61b may also have a higher elasticity (cushioning) than the shaft 61a. The elastic body 61b is made of, for example, a rubber material. Examples of rubber materials include ethylene propylene diene rubber (EPDM), silicone rubber, and fluororubber. The elastic body 61b is, for example, an O-ring. A plurality of elastic bodies 61b are arranged at a certain interval in the extension direction of the shaft 61a. From the perspective of improving positioning accuracy, the interval between two adjacent elastic bodies 61b may also be in the range of 50 mm to 100 mm.
[0090] The support portion 62 is a portion for supporting both end portions of the panel in the left and right directions. The support portion 62 includes a shaft 62a, a plurality of elastic bodies 62b, and a plurality of support bodies 65. The shaft 62a is a columnar (e.g., cylindrical) member extending in the front-to-back direction. The rear end of the shaft 62a is embedded in the recess of the support 26e and is fixed to the support 26e by a screw. The shaft 62a is made of, for example, a material with high bending rigidity. Examples of the constituent materials of the shaft 62a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic. The length of the shaft 62a in the front-to-back direction is slightly longer than the length of the panel in the front-to-back direction, and is longer than the length of the shaft 61a in the front-to-back direction.
[0091] Elastic body 62b is an annular (e.g., circular) member disposed on the outer circumference of shaft 62a. Elastic body 62b is provided to prevent panel slippage and improve panel positioning accuracy. The materials and arrangement of elastic body 62b are identical to those of elastic body 61b, so a detailed description thereof will be omitted.
[0092] The support body 65 is a member for supporting the shaft 62a. Figure 12As shown, the support body 65 includes a receiving portion 65a and a mounting portion 65b. The receiving portion 65a is the portion on which the left-right ends of the panel are placed. The receiving portion 65a has a generally rectangular parallelepiped shape extending in the left-right direction. The left-right ends of the panel are placed on the upper surface of the receiving portion 65a. The front end of the receiving portion 65a is provided with an insertion hole 65c for inserting the shaft 62a. The insertion hole 65c extends through the receiving portion 65a in the front-to-back direction.
[0093] The mounting portion 65b is a portion for mounting the support body 65 on the side plate 48. The mounting portion 65b is provided at the base end of the carrier portion 65a. The mounting portion 65b protrudes further upward than the upper surface of the carrier portion 65a, and has an inclined surface 65d that tilts downward from the base end of the support body 65 toward the front end. The mounting portion 65b is provided with a screw hole extending in the left-right direction from the end face of the mounting portion 65b. When the mounting portion 65b is pressed against the inner surface of the side wall 23 (main body 23a), a screw is inserted into the insertion hole of the side plate 48 and the insertion hole of the main body 23a, and the screw is screwed into the screw hole of the mounting portion 65b. Thus, when the side wall 23 (main body 23a) is clamped by the support body 65 and the side plate 48, the support body 65 is fixed to the side plate 48.
[0094] The stopper 63 is a member for preventing the panel from flying out and for determining the position of the front end of the panel. The stopper 63 is made of, for example, the resin material described above. The stopper 63 is provided at the front end of the shaft 62a. For example, the stopper 63 is mounted on the shaft 62a by inserting the front end of the shaft 62a into a mounting hole provided in the stopper 63. The stopper 63 has a circular plate-shaped retaining piece 63a having an outer diameter larger than that of the elastic body 62b. The retaining piece 63a has an inclined surface that tilts rearward as it moves from the outer peripheral surface toward the center.
[0095] The stopper 64 is a member for determining the position of the rear end of the panel. The stopper 64 is made of, for example, the resin material described above. The stopper 64 is disposed at the rear end of the shaft 62a. The stopper 64 has a block-like shape. The stopper 64 is provided with an insertion hole for inserting the shaft 62a in the front-to-back direction. When the shaft 62a is inserted into the insertion hole of the stopper 64, the rear surface of the stopper 64 abuts against the front surface of the support 26e, and the stopper 64 is fixed to the support 26e by a screw. The stopper 64 has an inclined surface 64a that tilts forward as it moves downward from the upper surface.
[0096] The position where the panel is placed is defined by the stoppers 63, 64, and the supports 65. Specifically, the panel's placement position in the front-to-back direction is defined by the stoppers 63 and 64, while the panel's placement position in the left-to-right direction is defined by the four supports 65 located on the left and right sides. For example, a panel is moved into the storage space 20 by a robot and placed on any storage layer. During this process, the panel's position may shift slightly due to errors or other factors. For example, even if the front end of the panel rests on the inclined surface of the retaining tab 63a of the stopper 63, the panel's own weight will guide it along this inclined surface to the placement position. Similarly, even if the rear end of the panel rests on the inclined surface 64a of the stopper 64, the panel's own weight will guide it along this inclined surface to the placement position. Similarly, even if the side end of the panel rests on the inclined surface 65d of the supports 65, the panel's own weight will guide it along this inclined surface to the placement position.
[0097] In the panel storage container 1 described above, a protruding protective member 29 is provided between the outer peripheral surface 3a of the lid 3 and the inner peripheral surface 25s of the flange 25, which face each other when the lid 3 blocks the opening 2a. Specifically, the protective member 29 is provided on the inner peripheral surface 25s of the flange 25 and protrudes from the inner peripheral surface 25s toward the outer peripheral surface 3a when the lid 3 blocks the opening 2a. When the lid 3 is attached to or removed from the flange 25, the outer peripheral surface 3a of the lid 3 may approach the inner peripheral surface 25s of the flange 25 due to tilting of the lid 3, for example. In such cases, the outer peripheral surface 3a of the lid 3 may contact the protective member 29 before contacting the inner peripheral surface 25s of the flange 25. This reduces the likelihood that the outer peripheral surface 3a of the lid 3 will contact the inner peripheral surface 25s of the flange 25. Furthermore, since the protective member 29 is convex, the contact area between the outer peripheral surface 3a of the lid 3 and the protective member 29 is smaller than the contact area between the outer peripheral surface 3a of the lid 3 and the inner peripheral surface 25s of the flange 25. As a result, damage to the panel storage container 1 can be suppressed.
[0098] Since the protective member 29 is detachably mounted on the flange 25, the protective member 29 can be replaced. For example, if the protective member 29 is damaged, the damage to the protective member 29 can be repaired by replacing the protective member 29 with a new one. This prevents damage to the panel storage container 1.
[0099] For example, when the lid 3 is tilted, the outer surface 3a of the lid 3 is likely to approach the inner surfaces 25s at both ends of the side frame member 25c. To address this, protective members 29 are provided on the inner surfaces 25s at both ends (the upper and lower ends) of the side frame member 25c. With this structure, even if the outer surface 3a of the lid 3 approaches the inner surface 25s at the upper end or the inner surface 25s at the lower end of the side frame member 25c, the outer surface 3a of the lid 3 will contact the protective members 29 before contacting the inner surface 25s of the flange 25. This further reduces damage to the panel storage container 1.
[0100] The lid body 31 is made of a metal material, and the flange 25 is made of a resin material. Therefore, if the outer peripheral surface 3a of the lid body 3 contacts the inner peripheral surface 25s of the flange 25, dust may be generated and mixed into the panel storage container 1. According to the panel storage container 1, the possibility of the outer peripheral surface 3a of the lid body 3 contacting the inner peripheral surface 25s of the flange 25 is reduced, thereby suppressing the generation of dust.
[0101] For example, if the side end 21c and the upper end 23b are connected by screws without the use of the connecting plates 44 and 45, there is a possibility that the side end 21c and the upper end 23b may not be sufficiently in close contact in the area where the screws are not provided. In contrast, in the panel storage container 1, the side end 21c and the upper end 23b are clamped by the connecting plates 44 and 45, and the top plate 21 and the side wall 23 are connected. In this configuration, by clamping the side end 21c and the upper end 23b by the connecting plates 44 and 45, the close contact between the side end 21c and the upper end 23b can be improved. As a result, the airtightness of the storage space 20 can be improved.
[0102] The side panels 48 are held between the upper end portion 23b and the lower end portion 23c. This allows the vertical position of the side panels 48 to be aligned with high precision, thereby improving the vertical positional accuracy of the support body 65. Furthermore, the lower end portion 23c is fixed to the support member 27c of the pedestal 27, which is connected to the support members 27a, 27b, and 27d. Therefore, when a panel is placed on the support body 65, the entire pedestal 27 can bear the weight of the panel. As a result, the panel can be stably supported.
[0103] By providing the cover members C1 to C3 at the corners of the container body 2 , the gaps between the members can be closed, thereby reducing the possibility of particles intruding into the storage space 20 through these gaps.
[0104] The positioning member 54 is made of a metal material, and the V-surface is subjected to a wear-resistant surface treatment. Therefore, compared with the case where the positioning member 54 is made of a resin material, the strength can be improved. Therefore, even when the weight of the panel storage container 1 is large, the deformation of the positioning member 54 can be suppressed. As a result, the position of the panel storage container 1 can be stabilized, and the positioning accuracy of the panel storage container 1 can be improved. Furthermore, the V-surface of the positioning member 54 is exposed from the through-holes 52g and 53g of the mounting plates 52 and 53. The mounting plates 52 and 53 are made of a resin material, so even if the pin is placed on the periphery that defines the through-holes 52g and 53g, the pin can slide easily. Therefore, the pin can be guided by the V-surface and guided to the V-shaped groove.
[0105] The panel storage container 1 is supported by abutting the front end of a pin of an external device, such as a conveying device or processing device, against the V-shaped surface of the positioning member 54. The panel storage container 1 has two positioning members 54 at the front and one positioning member 54 at the rear. Therefore, when the panel storage container 1 is supported, the rear portion of the panel storage container 1 tends to drop further downward than the front portion. At this time, the block material 56 abuts against the external device, thereby suppressing tilting of the panel storage container 1. As a result, deformation of the panel storage container 1 can be suppressed.
[0106] Furthermore, the panel storage container of the present disclosure is not limited to the above-described embodiment.
[0107] In the above-described embodiment, a screw is used as an example of a fixing member, but other fixing members may be used instead of the screw.
[0108] In the above embodiment, the flange 25 is formed by connecting the upper frame member 25a, the lower frame member 25b, and the pair of side frame members 25c. However, the flange 25 may be an integrally molded product.
[0109] In the above embodiment, the protective members 29 are provided on the pair of side frame members 25c. However, they may be provided on at least one of the upper frame member 25a, the lower frame member 25b, and the pair of side frame members 25c that constitute the flange 25. For example, the protective members 29 may be provided on the upper frame member 25a and the lower frame member 25b instead of the pair of side frame members 25c. Alternatively, the protective members 29 may be provided on each of the upper frame member 25a, the lower frame member 25b, and the pair of side frame members 25c. The number and location of the protective members 29 on each frame member can be arbitrarily set.
[0110] In the above embodiment, the protection member 29 is detachably mounted on the flange 25, but may be fixed to the flange 25. In the above embodiment, the protection member 29 and the flange 25 are separate components, but the protection member 29 and the flange 25 may be integrally mounted.
[0111] The protective member 29 can also be provided on the outer peripheral surface 3a of the lid 3 as a separate component from the lid 3. Alternatively, the protective member 29 can be integrally formed with the lid 3. In these cases, when the lid 3 blocks the opening 2a, the protective member 29 protrudes from the outer peripheral surface 3a toward the inner peripheral surface 25s. Therefore, even when the outer peripheral surface 3a of the lid 3 approaches the inner peripheral surface 25s of the flange 25, the likelihood of the outer peripheral surface 3a of the lid 3 contacting the protective member 29 increases before contacting the inner peripheral surface 25s of the flange 25. This further reduces damage to the panel storage container 1.
[0112] Furthermore, the protective member 29 may be detachably mounted on the lid 3. For example, if the protective member 29 is damaged, the damage to the protective member 29 can be repaired by replacing the protective member 29 with a new one. This prevents damage to the panel storage container 1.
[0113] The connection method of each component of the container body 2 may also be different from the above embodiment. In the above embodiment, the container body 2 is composed of a plurality of parts, but it may also be an integrally molded product. The panel support portion 60 may also have a structure different from the above embodiment.
[0114] Description of Reference Numerals
[0115] 1 Panel storage container 2 Container body 2a opening
[0116] 3 Cover 3a Outer circumference 25 Flange
[0117] 25a Upper frame material (frame) 25b Lower frame material (frame) 25c Side frame material (frame)
[0118] 25s Inner circumferential surface 29 Protective member (first protective member, second protective member)
[0119] 31 Cover body
Claims
1. A panel storage container, comprising: a container body having a flange defining an opening for receiving the plurality of panels; a cover body, used for blocking the opening; as well as A convex protective member is provided on the inner peripheral surface of the flange. The protective component comprises: a disc-shaped receiving portion having an abutting surface facing the outer peripheral surface of the cover body when the cover body blocks the opening, and arranged on the inner peripheral surface of the flange; and The shaft portion is provided on the surface of the receiving portion on the side opposite to the abutting surface, extends in the direction opposite to the abutting surface and is fitted into the mounting hole provided on the inner peripheral surface of the flange. The receiving portion protrudes from the inner peripheral surface of the flange toward the outer peripheral surface of the cover when the cover closes the opening.
2. The panel storage container according to claim 1, wherein: The protection member is detachably provided on the flange.
3. A panel storage container, comprising: a container body having a flange defining an opening for receiving the plurality of panels; a cover body, used for blocking the opening; as well as A convex protective member is provided on the outer peripheral surface of the cover body. The protective component comprises: a disc-shaped receiving portion having an abutting surface facing the inner peripheral surface of the flange when the cover body blocks the opening, and arranged on the outer peripheral surface of the cover body; and The shaft portion is provided on the surface of the receiving portion on the side opposite to the abutting surface, extends in the direction opposite to the abutting surface and is fitted into the mounting hole provided on the outer peripheral surface of the cover body. The receiving portion protrudes from the outer peripheral surface of the cover toward the inner peripheral surface of the flange in a state where the cover closes the opening.
4. The panel storage container according to claim 3, wherein: The protection member is detachably provided on the cover.
5. The panel storage container according to any one of claims 1 to 4, wherein: The flange is a rectangular frame. The protective member includes a first protective member and a second protective member, The first protection member and the second protection member are provided between the inner peripheral surface and the outer peripheral surface at both ends of a frame portion forming one side of the frame body.
6. The panel storage container according to any one of claims 1 to 4, wherein: The cover body includes a cover body including the outer peripheral surface, The cover body is made of metal material. The flange is made of resin material.
7. The panel storage container according to claim 5, wherein: The cover body includes a cover body including the outer peripheral surface, The cover body is made of metal material. The flange is made of resin material.
Citation Information
Patent Citations
Panel storage container
WO2019138982A1
Thin plate storing container
JP2004186293A
Door guide for a wafer container
US20020005369A1