Temperature compensation method and device in equal diameter process

Abstract

A temperature compensation method in the process of equalizing diameters includes: obtaining temperature data in the process of equalizing diameters of at least two furnaces from a database; wherein the temperature data is composed of several groups of crystal lengths and their corresponding temperature values ​​in the process of equalizing diameters; for each furnace temperature data, calculating the temperature compensation parameters corresponding to each temperature value in the temperature data; using the temperature compensation parameters of each furnace to calculate the temperature compensation setting parameters corresponding to each predetermined crystal length; importing the temperature compensation setting parameters into the system of the single crystal furnace to achieve temperature compensation for the single crystal in the process of equalizing diameters. This solution uses more data and has a larger data coverage, so that the obtained temperature compensation data is more reliable and more beneficial to the normal growth of the crystal. Moreover, after calculating the temperature compensation setting parameters, they can be directly imported into the system of the single crystal furnace without manual processing, which can save a lot of time and manpower.

Description

Technical Field

[0001] The invention relates to the technical field of single crystal silicon growth, and in particular to a temperature compensation method and device in a diameter equalization process. Background Art

[0002] Single crystal growth usually goes through the processes of material processing-seedling-shoulder turning-equalizing-finishing, among which the equalizing process is used to grow single crystals of target diameter. This part of the single crystal will undergo subsequent processing and eventually be made into power devices, while the shoulder and tail will be cut off, so equalizing is the most important part of single crystal growth. The most important thing in the equalizing process is to control the diameter of the crystal rod and maintain the properties of the single crystal. In order to control the diameter of the crystal rod and maintain the normal growth of the single crystal, the PID automatic control system of the single crystal furnace adopts hierarchical control. ADC1 transmits the diameter deviation signal to the pulling speed control system to achieve pulling speed regulation, and ADC2 feeds the pulling speed deviation signal back to the temperature control system to achieve temperature regulation.

[0003] In order to meet the process conditions of single crystal pulling in practice, it is also necessary to set the system temperature compensation in the sub-parameters, that is, the diameter of the crystal rod is controlled and the normal growth of the single crystal is maintained through the combined action of diameter, ADC1, ADC2 and system temperature compensation. Among them, the diameter, ADC1 and ADC2 of the above parameters are automatically controlled, but the temperature compensation parameters currently need to be manually set according to the crystal pulling process conditions, that is, each furnace refers to the data of the previous furnace, so there is a problem of poor temperature compensation accuracy due to the small amount of data and small coverage, and the temperature data conversion, temperature compensation fitting, etc. all require manual processing, which consumes a lot of time and manpower. Summary of the invention

[0004] In view of this, in order to address the above shortcomings, it is necessary to propose a temperature compensation method and device in the equal diameter process to improve the accuracy of temperature compensation and save time and manpower.

[0005] A temperature compensation method in a diameter equalization process, comprising:

[0006] Acquire temperature data of at least two furnaces in the process of equalizing diameter from a database; wherein the temperature data is composed of several groups of crystal lengths and their corresponding temperature values ​​in the process of equalizing diameter;

[0007] For each furnace temperature data, calculate the temperature compensation parameters corresponding to each temperature value in the temperature data;

[0008] Calculate the compensation temperature setting parameters corresponding to each predetermined crystal length using the compensation temperature parameters of each furnace;

[0009] The temperature compensation setting parameters are imported into the system of the single crystal furnace to realize temperature compensation for the single crystal during the equal diameter process.

[0010] Preferably, the temperature compensation parameters corresponding to each temperature value in the calculated temperature data include:

[0011] The starting temperature in the equal diameter process in each furnace is determined as the reference temperature;

[0012] For each temperature value in the temperature data, the difference between the temperature value and the reference temperature is determined as the temperature compensation parameter corresponding to the temperature value.

[0013] Preferably, among the temperature data obtained from the database, at least three sets of temperature data are collected on each predetermined crystal length, and the number of sets of temperature data collected by each furnace on the same predetermined crystal length is the same; wherein the integer part of the crystal length in the at least three sets of temperature data is the same as the corresponding predetermined crystal length, and the decimal part of the crystal length in the at least three sets of temperature data increases successively.

[0014] Preferably, the method of calculating the compensation temperature setting parameters corresponding to each predetermined crystal length using the compensation temperature parameters of each furnace includes:

[0015] For each set of temperature data on each predetermined crystal length, calculating the average value of the temperature data corresponding to the set of temperature data of each furnace to obtain a first temperature average value;

[0016] For each predetermined crystal length, calculating the average of the first temperature average values ​​corresponding to each group of temperature data on the predetermined crystal length, to obtain a second temperature average value corresponding to the predetermined crystal length;

[0017] For each predetermined crystal length, the difference between the second temperature average value corresponding to the predetermined crystal length and the second temperature average value corresponding to the adjacent previous predetermined crystal length is determined as the compensation temperature setting parameter corresponding to the predetermined crystal length; wherein, of any two adjacent predetermined crystal lengths, the latter predetermined crystal length is greater than the previous predetermined crystal length.

[0018] Preferably, the step of importing the temperature compensation setting parameters into the system of the single crystal furnace comprises: importing the temperature compensation setting parameters into a preset template and then transferring them into the system of the single crystal furnace.

[0019] Preferably, the method further comprises: after each crystal pulling is completed, the temperature data obtained from the current furnace is used as new data to calculate the compensation temperature setting parameters for the next furnace together with the original data for determining the compensation temperature setting parameters.

[0020] A temperature compensation device in a diameter equalization process, comprising:

[0021] A temperature data acquisition module is configured to acquire temperature data of at least two furnaces during the equal diameter process from a database; wherein the temperature data is composed of a plurality of groups of crystal lengths and their corresponding temperature values ​​during the equal diameter process;

[0022] A first calculation module is configured to calculate the temperature compensation parameter corresponding to each temperature value in the temperature data for each furnace temperature data acquired by the temperature data acquisition module;

[0023] A second calculation module is configured to calculate the compensation temperature setting parameters corresponding to each predetermined crystal length using the compensation temperature parameters of each furnace obtained by the first calculation module;

[0024] The import module is configured to import the temperature compensation setting parameters obtained by the second calculation module into the control device of the single crystal furnace to achieve temperature compensation for the single crystal during the equal diameter process.

[0025] Preferably, the first calculation module is configured to perform the following operations:

[0026] The starting temperature in the equal diameter process in each furnace is determined as the reference temperature;

[0027] For each temperature value in the temperature data, the difference between the temperature value and the reference temperature is determined as the temperature compensation parameter corresponding to the temperature value.

[0028] Preferably, among the temperature data acquired by the temperature data acquisition module from the database, at least three groups of temperature data are collected on each predetermined crystal length, and the number of groups of temperature data collected by each furnace on the same predetermined crystal length is the same; wherein the integer part of the crystal length in the at least three groups of temperature data is the same as the corresponding predetermined crystal length, and the decimal part of the crystal length in the at least three groups of temperature data increases successively.

[0029] Preferably, the second calculation module is configured to perform the following operations:

[0030] For each set of temperature data on each predetermined crystal length, calculating the average value of the temperature data corresponding to the set of temperature data of each furnace to obtain a first temperature average value;

[0031] For each predetermined crystal length, calculating the average of the first temperature average values ​​corresponding to each group of temperature data on the predetermined crystal length, to obtain a second temperature average value corresponding to the predetermined crystal length;

[0032] For each predetermined crystal length, the difference between the second temperature average value corresponding to the predetermined crystal length and the second temperature average value corresponding to the adjacent previous predetermined crystal length is determined as the compensation temperature setting parameter corresponding to the predetermined crystal length; wherein, of any two adjacent predetermined crystal lengths, the latter predetermined crystal length is greater than the previous predetermined crystal length.

[0033] It can be seen from the above technical solution that the temperature compensation solution in the equal diameter process provided by the embodiment of the present invention is calculated based on the temperature data generated in the historical crystal pulling process of multiple furnaces. The amount of data is large and the data coverage is also large, so the obtained temperature compensation data is more reliable and more beneficial to the normal growth of the crystal. In addition, after calculating the temperature compensation setting parameters, they can be directly imported into the system of the single crystal furnace without manual processing, thereby saving a lot of time and manpower. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 A flow chart of a temperature compensation method in a diameter equalization process provided in an embodiment;

[0035] Figure 2 A schematic diagram of a temperature compensation device in a diameter equalization process provided in an embodiment. DETAILED DESCRIPTION

[0036] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0037] See also Figure 1 The embodiment of the present invention provides a temperature compensation method in a diameter equalization process, which may include the following steps:

[0038] Step 101: Acquire temperature data of at least two furnaces in the process of equalizing diameter from a database; wherein the temperature data is composed of several groups of crystal lengths and their corresponding temperature values ​​in the process of equalizing diameter;

[0039] Step 102: for each furnace temperature data, calculate the temperature compensation parameter corresponding to each temperature value in the temperature data;

[0040] Step 103: Calculate the compensation temperature setting parameters corresponding to each predetermined crystal length using the compensation temperature parameters of each furnace;

[0041] Step 104: Import the temperature compensation setting parameters into the system of the single crystal furnace to achieve temperature compensation for the single crystal during the equal diameter process.

[0042] In this embodiment, when temperature compensation is performed during the equal diameter process, the temperature data of multiple furnaces in the equal diameter process is first obtained from the database, and then the temperature compensation setting parameters corresponding to each predetermined crystal length are calculated based on the data of the multiple furnaces, and then the obtained temperature compensation setting parameters are imported into the single crystal furnace system to achieve temperature compensation of the single crystal during the equal diameter process. This solution calculates the temperature compensation setting parameters based on a larger amount of data and a larger data coverage, so the obtained temperature compensation setting parameters are more reliable and more beneficial to the crystal diameter and maintaining the normal growth of the single crystal. In addition, this solution does not require manual processing of temperature compensation, so it can also save a lot of time and manpower.

[0043] The temperature data acquired in step 101 should consist of several groups of crystal lengths and their corresponding temperature values ​​in the equal diameter process, for example, as shown in Table 1.

[0044] Table 1

[0045] Crystal length / mm Temperature / ℃ 0 1434.1 10 1434.1 20 1433.7 30 1433.7 50 1433.7 100 1433.4 150 1433.5 ... ...

[0046] It is easy to understand that Table 1 only shows a type of temperature data that only includes integer crystal lengths. When actually acquired, it will include temperature data of various crystal lengths, that is, each crystal length with an integer value within the growth length range of the crystal, and multiple crystal lengths with decimal values.

[0047] In one embodiment, when calculating each temperature value in the temperature data in step 102, the starting temperature in the equal diameter process in each furnace can be first determined as the reference temperature, and then for each temperature value in the temperature data, the difference between the temperature value and the reference temperature is determined as the compensation temperature parameter corresponding to the temperature value. In this way, by calculating the difference between each temperature value and the reference temperature, the deviation of the temperature value corresponding to each crystal length relative to the reference temperature can be obtained, so that the compensation temperature parameter corresponding to each temperature value can be accurately obtained. For example, as shown in Table 2, the starting temperature is 1434.1°C, which is used as the reference temperature, and the difference between the subsequent temperature and the reference temperature is used as the compensation temperature parameter corresponding to the temperature value.

[0048] Table 2

[0049] Crystal length / mm Temperature / ℃ Compensation temperature parameters / ℃ 0 1434.1 0 10 1434.1 0 20 1433.7 -0.4 30 1433.7 -0.4 50 1433.7 -0.4 100 1433.4 -0.7 150 1433.5 -0.6 ... ... ...

[0050] In one embodiment, among the temperature data obtained from the database, at least three groups of temperature data are collected on each predetermined crystal length, and the number of groups of temperature data collected by each furnace on the same predetermined crystal length is the same; wherein the integer part of the crystal length in the at least three groups of temperature data is the same as the corresponding predetermined crystal length, and the decimal part of the crystal length in the at least three groups of temperature data increases successively.

[0051] When calculating the compensation temperature setting parameters corresponding to each predetermined crystal length using the compensation temperature parameters of each furnace in step 103, the following process can be used:

[0052] For each set of temperature data on each predetermined crystal length, calculating the average value of the temperature data corresponding to the set of temperature data of each furnace to obtain a first temperature average value;

[0053] For each predetermined crystal length, calculating the average of the first temperature average values ​​corresponding to each group of temperature data on the predetermined crystal length, to obtain a second temperature average value corresponding to the predetermined crystal length;

[0054] For each predetermined crystal length, the difference between the second temperature average value corresponding to the predetermined crystal length and the second temperature average value corresponding to the adjacent previous predetermined crystal length is determined as the compensation temperature setting parameter corresponding to the predetermined crystal length; wherein, of any two adjacent predetermined crystal lengths, the latter predetermined crystal length is greater than the previous predetermined crystal length.

[0055] Table 3

[0056]

[0057]

[0058] Referring to Table 3, three sets of data are collected for each predetermined crystal length using temperature data from three furnaces for illustration. The predetermined crystal length should be a crystal length with an integer value, and the integer part of at least three sets of data collected should be the same as the predetermined crystal length, while the decimal part is different. That is, when collecting data, data is collected three times at each predetermined crystal length. As shown in Table 3, data from three furnaces are obtained, where data is collected three times for each furnace at a predetermined crystal length. For example, in furnace 1, the temperature compensation parameters corresponding to the three crystal lengths of 10mm, 10.3mm, and 10.8mm are collected at a predetermined crystal length of 10mm.

[0059] Table 4

[0060] Predetermined crystal length / mm Second temperature average value / ℃ Compensation temperature setting parameters / ℃ 10 -3.3 -3.3 20 -8.2 -4.9 30 -12.0 -3.8 50 -15.9 -3.9 100 -18.9 -3.0 150 -19.9 -1.0 ... ... ...

[0061] In combination with Table 3 and Table 4, when calculating the compensation temperature setting parameters in step 103, the first temperature average value is first calculated, that is, the average value of the compensation temperature parameters of the three furnaces is calculated. For example, in the first row of data in Table 3, the average value of the compensation temperature parameters of the three furnaces -3.4, -3.1, and -2.9 is calculated to obtain the first temperature average value -3.1. It should be noted that due to the parameter requirements of the single crystal furnace control system, only one decimal place is retained here, and the same reason is applied below, and no further description is given.

[0062] After obtaining the first temperature average value corresponding to each group of temperature data, the average value of the first temperature average values ​​of each group on each predetermined crystal length is calculated to obtain the second temperature average value. As shown in Table 3, the first temperature average values ​​corresponding to the predetermined crystal length of 20 mm are -8.0, -8.2, and -8.3, respectively. The average values ​​of the three are calculated to obtain the second temperature average value corresponding to the predetermined crystal length of 20 mm, which is -8.2.

[0063] Since each of the previously obtained temperature compensation parameters is obtained relative to the difference of the reference temperature, the temperature compensation parameter is a cumulative value. Therefore, when calculating the temperature compensation setting parameter corresponding to each predetermined crystal length, it is necessary to calculate the difference between the latter item and the previous item to obtain the temperature compensation setting parameter corresponding to the predetermined crystal length. As shown in Table 4, the temperature compensation setting parameter corresponding to the predetermined crystal length of 30 mm is obtained by -12.0-(-8.2)=-3.8°C.

[0064] In one embodiment, after obtaining the temperature compensation setting parameters, in step 104, the temperature compensation setting parameters can be specifically imported into a pre-set template and then transmitted to the system of the single crystal furnace. The template is a template that can be accepted by the system of the single crystal furnace. In this way, there is no need to manually input the parameters into the system, which not only saves time and manpower, but also reduces the losses caused by manual erroneous data input.

[0065] In one embodiment, after each crystal pulling is completed, the temperature data obtained in the current furnace can be considered as new data, and the temperature compensation setting parameters of the next furnace can be calculated together with the original data for determining the temperature compensation setting parameters. For example, the temperature compensation parameters of the temperature data obtained in the current furnace are calculated, and then the temperature compensation parameters and the first temperature average value are averaged again to obtain the first temperature average value of the new furnace, and then the second temperature average value and the temperature compensation setting parameters of the new furnace are calculated. This repetition will continuously optimize the temperature compensation setting parameters, thereby ensuring the normal growth of the crystal rod diameter and the single crystal.

[0066] See also Figure 2 The embodiment of the present invention further provides a temperature compensation device in a diameter equalization process, comprising:

[0067] The temperature data acquisition module 201 is configured to acquire temperature data of at least two furnaces in the process of equalizing diameter from a database; wherein the temperature data is composed of a plurality of groups of crystal lengths and their corresponding temperature values ​​in the process of equalizing diameter;

[0068] The first calculation module 202 is configured to calculate the temperature compensation parameter corresponding to each temperature value in the temperature data for each furnace temperature data acquired by the temperature data acquisition module 201;

[0069] The second calculation module 203 is configured to calculate the compensation temperature setting parameters corresponding to each predetermined crystal length using the compensation temperature parameters of each furnace obtained by the first calculation module 202;

[0070] The import module 204 is configured to import the temperature compensation setting parameters obtained by the second calculation module 203 into the control device of the single crystal furnace to achieve temperature compensation for the single crystal during the equal diameter process.

[0071] In one embodiment, the first computing module 202 is configured to perform the following operations:

[0072] The starting temperature in the equal diameter process in each furnace is determined as the reference temperature;

[0073] For each temperature value in the temperature data, the difference between the temperature value and the reference temperature is determined as the temperature compensation parameter corresponding to the temperature value.

[0074] In one embodiment, among the temperature data acquired from the database by the temperature data acquisition module 201, at least three groups of temperature data are collected on each predetermined crystal length, and the number of groups of temperature data collected by each furnace on the same predetermined crystal length is the same; wherein the integer part of the crystal length in the at least three groups of temperature data is the same as the corresponding predetermined crystal length, and the decimal part of the crystal length in the at least three groups of temperature data increases successively.

[0075] In one embodiment, the second calculation module 203 is configured to perform the following operations:

[0076] For each set of temperature data on each predetermined crystal length, calculating the average value of the temperature data corresponding to the set of temperature data of each furnace to obtain a first temperature average value;

[0077] For each predetermined crystal length, calculating the average of the first temperature average values ​​corresponding to each group of temperature data on the predetermined crystal length, to obtain a second temperature average value corresponding to the predetermined crystal length;

[0078] For each predetermined crystal length, the difference between the second temperature average value corresponding to the predetermined crystal length and the second temperature average value corresponding to the adjacent previous predetermined crystal length is determined as the compensation temperature setting parameter corresponding to the predetermined crystal length; wherein, of any two adjacent predetermined crystal lengths, the latter predetermined crystal length is greater than the previous predetermined crystal length.

[0079] In one embodiment, the import module 204 is configured to import the temperature compensation setting parameters into a preset template and then transmit them into the system of the single crystal furnace.

[0080] In one embodiment, it also includes a parameter updating module, which is configured to use the temperature data obtained from the current furnace as new data after each crystal pulling is completed, and calculate the temperature compensation setting parameters for the next furnace together with the original data for determining the temperature compensation setting parameters.

[0081] The information interaction, execution process, etc. between the units in the above-mentioned device are based on the same concept as the method embodiments of this specification. For specific contents, please refer to the description in the method embodiments of this specification and will not be repeated here.

[0082] The modules or units in the device of the embodiment of the present invention may be combined, divided or deleted according to actual needs.

[0083] What is disclosed above is only a preferred embodiment of the present invention, which certainly cannot be used to limit the scope of rights of the present invention. A person skilled in the art can understand that all or part of the processes of the above embodiments and equivalent changes made according to the claims of the present invention still fall within the scope of the invention.

Claims

1. A temperature compensation method in a diameter equalization process, characterized in that: include: Acquire temperature data of at least two furnaces in the process of equalizing diameter from a database; wherein the temperature data is composed of several groups of crystal lengths and their corresponding temperature values ​​in the process of equalizing diameter; For each furnace temperature data, calculate the temperature compensation parameters corresponding to each temperature value in the temperature data; Calculate the compensation temperature setting parameters corresponding to each predetermined crystal length using the compensation temperature parameters of each furnace; Import the temperature compensation setting parameters into the system of the single crystal furnace to achieve temperature compensation for the single crystal during the equal diameter process; The temperature compensation parameters corresponding to each temperature value in the calculated temperature data include: The starting temperature in the equal diameter process in each furnace is determined as the reference temperature; For each temperature value in the temperature data, the difference between the temperature value and the reference temperature is determined as the temperature compensation parameter corresponding to the temperature value; Among the temperature data acquired from the database, at least three groups of temperature data are collected on each predetermined crystal length, and the number of groups of temperature data collected on the same predetermined crystal length in each furnace is the same; wherein the integer part of the crystal length in the at least three groups of temperature data is the same as the corresponding predetermined crystal length, and the decimal part of the crystal length in the at least three groups of temperature data increases sequentially; The method of calculating the compensation temperature setting parameters corresponding to each predetermined crystal length by using the compensation temperature parameters of each furnace includes: For each set of temperature data on each predetermined crystal length, calculating the average value of the temperature data corresponding to the set of temperature data of each furnace to obtain a first temperature average value; For each predetermined crystal length, calculating the average of the first temperature average values ​​corresponding to each group of temperature data on the predetermined crystal length, to obtain a second temperature average value corresponding to the predetermined crystal length; For each predetermined crystal length, the difference between the second temperature average value corresponding to the predetermined crystal length and the second temperature average value corresponding to the adjacent previous predetermined crystal length is determined as the compensation temperature setting parameter corresponding to the predetermined crystal length; wherein, of any two adjacent predetermined crystal lengths, the latter predetermined crystal length is greater than the previous predetermined crystal length.

2. The temperature compensation method in the equal diameter process according to claim 1, characterized in that: The method of importing the temperature compensation setting parameters into the system of the single crystal furnace comprises: importing the temperature compensation setting parameters into a preset template and then transmitting them into the system of the single crystal furnace.

3. The temperature compensation method in the process of equalizing diameters according to any one of claims 1 to 2, characterized in that: The method further includes: after each crystal pulling is completed, the temperature data obtained in the current furnace is used as new data, and the temperature compensation setting parameters of the next furnace are calculated together with the original data for determining the temperature compensation setting parameters.

4. A temperature compensation device in a diameter equalization process, characterized in that: include: A temperature data acquisition module is configured to acquire temperature data of at least two furnaces during the equal diameter process from a database; wherein the temperature data is composed of a plurality of groups of crystal lengths and their corresponding temperature values ​​during the equal diameter process; A first calculation module is configured to calculate the temperature compensation parameter corresponding to each temperature value in the temperature data for each furnace temperature data acquired by the temperature data acquisition module; A second calculation module is configured to calculate the compensation temperature setting parameters corresponding to each predetermined crystal length using the compensation temperature parameters of each furnace obtained by the first calculation module; An import module configured to import the temperature compensation setting parameters obtained by the second calculation module into a control device of the single crystal furnace to achieve temperature compensation for the single crystal during the equal diameter process; The first computing module is configured to perform the following operations: The starting temperature in the equal diameter process in each furnace is determined as the reference temperature; For each temperature value in the temperature data, the difference between the temperature value and the reference temperature is determined as the temperature compensation parameter corresponding to the temperature value; Among the temperature data acquired by the temperature data acquisition module from the database, at least three groups of temperature data are collected on each predetermined crystal length, and the number of groups of temperature data collected by each furnace on the same predetermined crystal length is the same; wherein the integer part of the crystal length in the at least three groups of temperature data is the same as the corresponding predetermined crystal length, and the decimal part of the crystal length in the at least three groups of temperature data increases sequentially; The second computing module is configured to perform the following operations: For each set of temperature data on each predetermined crystal length, calculating the average value of the temperature data corresponding to the set of temperature data of each furnace to obtain a first temperature average value; For each predetermined crystal length, calculating the average of the first temperature average values ​​corresponding to each group of temperature data on the predetermined crystal length, to obtain a second temperature average value corresponding to the predetermined crystal length; For each predetermined crystal length, the difference between the second temperature average value corresponding to the predetermined crystal length and the second temperature average value corresponding to the adjacent previous predetermined crystal length is determined as the compensation temperature setting parameter corresponding to the predetermined crystal length; wherein, of any two adjacent predetermined crystal lengths, the latter predetermined crystal length is greater than the previous predetermined crystal length.

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