An adsorption-type laser drilling platform
By designing an internal and external gas path separation structure for the adsorption-type laser drilling platform, the problems of recast layer and taper difference were solved, achieving efficient cleaning of molten material, improving the quality and efficiency of through holes in laser processing, and making it suitable for processing a variety of materials.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- MAXONE SEMICON CO LTD
- Filing Date
- 2023-03-21
- Publication Date
- 2026-04-17
AI Technical Summary
Existing laser drilling platforms are prone to problems such as recasting layers and taper differences when drilling materials, and the accumulation of material debris affects the quality of the through hole exit, resulting in low processing efficiency.
An adsorption-type laser drilling platform is adopted. By designing an independent groove and adsorption hole structure between the first and second plates, an internal and external gas path separation is formed. The molten material is cleaned by vacuum adsorption and gas channel system, ensuring the material is suspended and fixed.
It improves the cleanliness and taper of laser-processed through holes, avoids the formation of recast layers, increases processing efficiency, and is compatible with the processing needs of different materials.
Smart Images

Figure CN116638209B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to an adsorption-type laser drilling platform, belonging to the field of laser processing technology. Background Technology
[0002] Currently, laser drilling platforms are planar adsorption platforms with negative pressure adsorption holes. During laser drilling, green ceramic is etched and vaporized by the laser, and heat accumulates inside the hole. This heat can only be expelled by upward sputtering from the laser incident surface. A large amount of green ceramic debris and molten PET falls inside the hole and onto the green ceramic surface, which cannot be removed, affecting subsequent processes. Plasma hinders further laser etching of the material, resulting in a smaller hole diameter and poorer taper at the hole exit. Furthermore, some etched material debris accumulates at the hole exit, forming a recast layer under the thermal influence of the laser, affecting the quality of the hole exit.
[0003] The industry often addresses this problem by reducing the power of the laser to reduce the thermal impact, but this also leads to low processing efficiency. Summary of the Invention
[0004] To address the shortcomings of existing technologies, the present invention aims to provide an adsorption-type laser drilling platform that solves the problems of recasting layers and large tapers that occur when planar adsorption platforms drill holes in materials.
[0005] To achieve the above objectives, the present invention adopts the following technical solution:
[0006] An adsorption-type laser drilling platform includes a first plate and a second plate;
[0007] The first plate has a first groove on its front side, and a structural beam that divides the first groove into multiple independent grooves is provided on the bottom surface of the first groove. The top surface of the structural beam is provided with a first adsorption hole, and the front side of the first plate is also provided with a second adsorption hole. The top surface of the structural beam is flush with the front side of the first plate.
[0008] The second plate has a second groove on its front side, and an extension extending inward around the bottom of the second groove. The first plate is located on the extension of the second groove, and the front side of the first plate is flush with the front side of the second plate.
[0009] Furthermore, the front side of the aforementioned second plate is provided with a third adsorption hole.
[0010] Furthermore, the aforementioned extension is provided with a through hole, and the edge of the back side of the first plate is provided with a threaded hole that matches the through hole.
[0011] Furthermore, the aforementioned second plate has multiple air supply holes on its side and an air passage inside, with the air supply holes connected to the third adsorption hole through the air passage.
[0012] Furthermore, both the first and second adsorption pores mentioned above are through pores.
[0013] Furthermore, a cavity is formed between the aforementioned first plate and the second groove, and the second plate is provided with cavity vents, which are connected to the first adsorption pore and the second adsorption pore through the cavity.
[0014] Furthermore, the aforementioned first plate is provided with a first positioning hole at its diagonal, and the extension is provided with a second positioning hole that matches the first positioning hole.
[0015] Furthermore, there are gaps between the structural beams surrounding each individual groove, and the structural beams are not connected end to end.
[0016] The beneficial effects achieved by this invention are as follows:
[0017] 1. The first groove can keep the material processing area in a suspended state, avoiding the formation of a recast layer at the exit and dirt on the incident surface, thus improving the cleanliness and taper of the laser-processed through hole.
[0018] 2. Adsorption holes are designed around the first groove, and the structural beam and each adsorption surface are flush to ensure the flatness of the material during processing.
[0019] 3. Since the molten material is cleaned up in time, there is no need to reduce the laser power, and using higher laser power further improves the efficiency of laser processing.
[0020] 4. The separate internal and external structure design can accommodate the needs of different processed products.
[0021] 5. The independent grooves formed by the structural beams can be customized in size and shape to meet the processing requirements of different materials. Attached Figure Description
[0022] Figure 1 This is a top view of the entire assembly of the present invention;
[0023] Figure 2 This is a partial axial side view of the first groove of the present invention;
[0024] Figure 3 This is a rear view of the first flat panel of the present invention;
[0025] Figure 4 This is an axonometric view of the second flat plate of the present invention;
[0026] Figure 5 This is the front view of the second flat panel of the present invention;
[0027] Figure 6 This is a cross-sectional view of the cavity vent of the present invention;
[0028] Figure 7 This is a cross-sectional view of the entire assembly of the present invention.
[0029] The meanings of the reference numerals in the figure are as follows: 1-First flat plate; 2-Second flat plate; 11-First groove; 12-First adsorption hole; 13-First positioning hole; 14-Structural beam; 15-Second adsorption hole; 16-Cavity; 17-Threaded hole; 21-Second groove; 22-Extension; 23-Third adsorption hole; 24-Cavity vent; 25-Second positioning hole; 26-Through hole; 27-Air supply hole; 28-Air passage. Implementation
[0030] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.
[0031] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the meaning of the above terms in this invention according to the specific circumstances.
[0032] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0033] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.
[0034] This embodiment discloses an adsorption-type laser drilling platform, such as... Figure 1As shown, it includes a first plate 1 and a second plate 2. The outer contour shape of the first plate 1 and the second plate 2 can be square or other irregular shapes, which are not limited here.
[0035] like Figure 2 and Figure 3 As shown, the front of the first plate 1 is determined by the pattern requiring laser drilling. A portion of the front of the first plate 1 is removed to form a recessed first groove 11. The shape of the first groove 11 is determined by the pattern requiring laser drilling. There are multiple first grooves 11 on the front of the first plate 1. The bottom surface of the first groove 11 is also provided with multiple structural beams 14. The structural beams 14 divide the first groove 11 into multiple arrayed independent grooves. Each independent groove is composed of several structural beams 14, and the top surface of the structural beams 14 is flush with the front of the first plate 1. The structural beams 14 that form the independent grooves have gaps between them, that is, the independent grooves are not closed structures. The top surface of the structural beams 14 is also provided with a first adsorption hole 12, and the front of the first plate 1 is also provided with a second adsorption hole 15. The material placed on the front of the first plate 1 is adsorbed and fixed through the first adsorption hole 12 and the second adsorption hole 15.
[0036] Combination Figure 4 and Figure 5 The second plate 2 has a stepped internal structure. A portion of the second plate 2 is removed from its front to form a second groove 21. The bottom surface of the second groove 21 has inwardly extending portions 22 around its perimeter, which do not obstruct the first suction hole 12 and the second suction hole 15 provided on the first plate 1. When the first plate 1 is installed, it is positioned on the extension portion 22 of the second groove 21, and the inner dimensions of the second groove 21 match the outer dimensions of the first plate 1. After installation, the front surface of the first plate 1 is flush with the front surface of the second plate 2.
[0037] The second plate 2 is also provided with a third adsorption hole 23 around the front side, which is used to adsorb the non-patterned part of the laser drilling material. The third adsorption hole 23 can be distributed in a certain regularity or randomly, and there is no restriction here. The side wall of the second plate 2 is also provided with multiple air supply holes 27, and the upper part of the second plate 2 is also provided with an air channel 28. The air supply hole 27 is connected to the third adsorption hole 23 through the air channel 28 to form an external air path. When in use, only one air supply hole 27 is kept and the other air supply holes 27 are blocked as backups. Figure 6 As shown, a cavity 16 is formed between the first plate 1 and the second groove 21. The lower half of the second plate 2 is also provided with a through cavity air hole 24. The cavity air hole 24 is connected to the first adsorption hole 12 and the second adsorption hole 15 through the cavity 16 to form an internal air passage.
[0038] Figure 1As shown, after the first plate 1 and the second plate 2 are installed together, the first plate 1 is located on the extension 22. The first plate 1 and the second plate 2 are fixed together by bolts. Figure 4 It can be seen that the extension 22 is provided with a through hole 26. Figure 3 As shown, the back of the first plate 1 has a threaded hole 17, and a bolt passes through the through hole 26 from the back of the second plate 2 and is locked in the threaded hole 17. After locking, as shown... Figure 7 As shown, a cavity 16 is formed between the back of the first plate 1 and the extension 22. Air is supplied through the cavity vents 24 to achieve the adsorption effect. The internal and external air paths are separated, achieving strong external adsorption (no drilling required) to fix the material. The negative pressure of the first plate 1 is adjustable to ensure the flatness of the material. The internal air path uses an adjustable flow adapter to control the flow rate. Independent control of the internal and external air paths includes independent control of the vacuum source's on / off state and independent control of the vacuum adsorption strength, facilitating flexible adjustment of the vacuum adsorption force of the first adsorption vent 12, the second adsorption vent 15, and the third adsorption vent 23.
[0039] The first plate 1 is also provided with a first positioning hole 13 at the opposite corner, and the second plate 2 is also provided with a second positioning hole 25 at the opposite corner of the extension 22 in the second groove 21, which is adapted to the first positioning hole 13. By inserting the positioning pin, misalignment will not occur during the assembly process.
[0040] The first groove 11 allows the material processing area to be suspended. During laser drilling, the generated green ceramic debris and molten PET can be directly sucked into the first groove 11 of the adsorption-type laser drilling platform, ensuring the cleanliness of the laser incident surface and preventing material accumulation at the exit point to form a recast layer, thus improving the cleanliness and taper of the laser-processed through-hole. Furthermore, this adsorption-type laser drilling platform structure can also increase the laser power during processing, thereby improving processing efficiency. Since the first adsorption holes 12 are provided on the structural beams 14 around the first groove 11, the material can be fixed, thereby preventing the flexible material from sinking and ensuring the flatness of the material during processing.
[0041] Through the application of this embodiment, compared with the prior art, the adsorption-type laser drilling platform provided by this embodiment of the invention has the following advantages:
[0042] The first groove can keep the material processing area suspended, avoiding the formation of a recast layer at the exit and dirt on the incident surface, thus improving the cleanliness and taper of the laser-processed through hole;
[0043] The first groove is designed with adsorption holes around its perimeter, and the structural beams and each adsorption surface are flush to ensure the flatness of the material during processing.
[0044] Because the molten material is cleaned up in time, there is no need to reduce the laser power, and using a higher laser power further improves the efficiency of laser processing; the separate design of the internal and external structures can accommodate the needs of different processed products;
[0045] The independent grooves formed by the structural beams can be customized in size and shape to meet the processing requirements of different materials.
[0046] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.
Claims
1. An adsorption-type laser drilling platform, characterized in that, Including the first plate and the second plate; The first plate (1) has a first groove (11) on its front side. The bottom surface of the first groove (11) is provided with a structural beam (14) that divides the first groove (11) into multiple independent grooves. The top surface of the structural beam (14) is provided with a first adsorption hole (12). The front surface of the first plate (1) is also provided with a second adsorption hole (15). The top surface of the structural beam (14) is flush with the front surface of the first plate (1). The second plate (2) has a second groove (21) on its front side, and an extension (22) extending inward around the bottom surface of the second groove (21). The first plate (1) is located on the extension (22) of the second groove (21), and the front side of the first plate (1) is flush with the front side of the second plate (2). The front side of the second plate (2) is provided with a third adsorption hole (23); The second plate (2) has multiple air supply holes (27) on its side and an air passage (28) inside. The air supply holes (27) are connected to the third adsorption hole (23) through the air passage (28). A cavity (16) is formed between the first plate (1) and the second groove (21). The second plate (2) is provided with cavity air holes (24). The cavity air holes (24) are connected to the first adsorption hole (12) and the second adsorption hole (15) through the cavity (16). The second plate (2) is also provided with multiple air supply holes (27) on its side wall, and the upper part of the second plate (2) is also provided with an air passage (28). The air supply holes (27) are connected to the third adsorption hole (23) through the air passage (28) to form an external air passage. A cavity (16) is formed between the first plate (1) and the second groove (21). The lower half of the second plate (2) is also provided with a through cavity air hole (24). The cavity air hole (24) is connected to the first adsorption hole (12) and the second adsorption hole (15) through the cavity (16) to form an internal air passage. The internal and external gas paths are independently controlled. The external gas path provides a strong adsorption force for the laser drilling material, while the internal gas path controls the flow rate through an adjustable flow adapter.
2. The adsorption-type laser drilling platform according to claim 1, characterized in that, The extension (22) is provided with a through hole (26), and the edge of the back side of the first plate (1) is provided with a threaded hole (17) that matches the through hole (26).
3. The adsorption-type laser drilling platform according to claim 1, characterized in that, Both the first adsorption pore (12) and the second adsorption pore (15) are through holes.
4. The adsorption-type laser drilling platform according to claim 1, characterized in that, The first plate (1) is also provided with a first positioning hole (13) at the opposite corner, and the extension (22) is provided with a second positioning hole (25) that is adapted to the first positioning hole (13).
5. The adsorption-type laser drilling platform according to claim 1, characterized in that, There are gaps between the structural beams (14) around each of the independent grooves, and the structural beams (14) are not connected end to end.
Citation Information
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