Air floating guide rail control method, module, electronic equipment and storage medium

Abstract

This invention discloses a control method, module, electronic device, and storage medium for an air-bearing guide rail. The control method includes the following steps: controlling the throttling orifice to supply gas via an air source, controlling the air-bearing block to slide along the guide rail, and during the sliding process, controlling the camera to capture N target images of a first surface, wherein any two target images do not correspond to the same area of ​​the first surface, and the union of the areas of the first surface corresponding to the N target images constitutes the first surface, and the surface of the guide rail facing the air-bearing block is the first surface; N is a natural number, and N≥2; based on the N target images, controlling the gas pressure supplied by the throttling orifice via the air source. In summary, by controlling the gas pressure of the airflow supplied by the air source, wear-free movement between the air-bearing block and the guide rail is achieved.

Description

Technical Field

[0001] This invention relates to the field of air-bearing guide rail technology, and in particular to a control method, module, electronic device and storage medium for air-bearing guide rails. Background Technology

[0002] Air-bearing guides are precision mechanical components developed based on gas lubrication technology. A typical air-bearing guide consists of a guide rail, air-bearing blocks mounted on the guide rail, and an air source. The airflow provided by the air source creates an air cushion between the air-bearing blocks and the guide rail, resulting in wear-free movement between them. The uniform air film thickness facilitates high precision; the low viscosity of air prevents creep; and air-bearing guides offer good thermal stability and are environmentally friendly. Based on these advantages, air-bearing guides are widely used in measuring machines (Z and Y axes), space simulation, experimental measurement devices, semiconductor equipment, PCB equipment, lithography machines, combined XYZ stages, and micro-motion stages.

[0003] Understandably, it is necessary to control the air pressure supplied by the air source to ensure that the movement between the air float and the guide rail is wear-free. Summary of the Invention

[0004] In view of this, the main objective of the present invention is to provide a control method, module, electronic device and storage medium for an air-bearing guide rail.

[0005] To achieve the above objectives, the technical solution of the present invention is implemented as follows: a control method for an air-bearing guide rail, the air-bearing guide rail comprising: a guide rail, an air-bearing block disposed on the guide rail, and an air source, wherein the air-bearing block is provided with a camera and multiple throttling orifices on a second surface facing the guide rail, the air source is used to supply air to the throttling orifices, and the air-bearing block is capable of sliding along the guide rail; comprising the following steps: controlling the throttling orifices to supply gas through the air source, controlling the air-bearing block to slide along the guide rail, and during the sliding process, controlling the camera to capture N target images of a first surface, wherein any two target images do not correspond to the same area of ​​the first surface, and the union of the areas of the first surface corresponding to the N target images constitutes the first surface, the surface of the guide rail facing the air-bearing block is the first surface; N is a natural number, and N≥2; based on the N target images, controlling the air pressure of the gas supplied by the throttling orifices through the air source.

[0006] As an improvement to this embodiment of the invention, the step of controlling the gas pressure provided by the throttle orifice based on N target images specifically includes: obtaining a target distance value D1 between the first and second surfaces; obtaining a distance D2 between the first and second surfaces based on N target images, and obtaining the difference between D1 and D2; obtaining contour data of the first surface based on N target images; processing the difference and contour data using a preset algorithm, and controlling the gas pressure provided by the throttle orifice based on the processing result.

[0007] As an improvement to this embodiment of the invention, the step of processing the difference and contour data using a preset algorithm specifically includes: processing the difference and contour data using a PID algorithm.

[0008] As an improvement to this embodiment of the invention, the step of obtaining the contour data of the first surface based on N target images specifically includes: performing noise removal, contrast enhancement, and smoothing processing on all N target images; extracting the contour information of a preset region from all N target images; and matching the N target images to obtain the contour data of the first surface.

[0009] As an improvement of this invention, the step of extracting the contour information of a preset region from N target images specifically includes: using an edge detection algorithm or a corner detection algorithm to extract the contour information of a preset region from N target images.

[0010] As an improvement to this embodiment of the invention, obtaining the distance D2 between the first and second surfaces based on N target images specifically includes: preprocessing all N target images; performing feature extraction processing on each target image, wherein the features include at least: the contour, shape, color, and texture of the first surface; identifying the first surface from the target images; tracing the first surface from the N target images; and obtaining the distance D2 between the first and second surfaces.

[0011] As an improvement to this embodiment of the invention, the preprocessing of the N target images specifically includes: denoising, filtering, grayscale conversion, and enhancement processing of the N target images.

[0012] This invention also provides a control device for an air-bearing guide rail. The air-bearing guide rail includes: a guide rail, an air-bearing block disposed on the guide rail, and an air source. The air-bearing block has a camera and multiple throttling orifices disposed on its second surface facing the guide rail. The air source is used to supply air to the throttling orifices. The air-bearing block can slide along the guide rail. The device includes the following modules:

[0013] An information acquisition module is used to control the gas supply through the throttling orifice via the gas source, control the air float to slide along the guide rail, and during the sliding process, control the camera to capture N target images of the first surface. No two target images correspond to the same area of ​​the first surface, and the union of the areas of the first surface corresponding to the N target images is the first surface. The surface of the guide rail facing the air float is the first surface; N is a natural number, and N≥2; a processing module is used to control the gas pressure supplied by the throttling orifice via the gas source based on the N target images.

[0014] This invention also provides an electronic device, including: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor, the instructions being executed by the at least one processor to enable the at least one processor to perform the control method as described above.

[0015] This invention also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, implements the control method described above.

[0016] The control method, module, electronic device, and storage medium for an air-bearing guide rail provided in this invention have the following advantages: This invention discloses a control method, module, electronic device, and storage medium for an air-bearing guide rail. The control method includes the following steps: Gas is supplied through a throttling orifice controlled by an air source to control the air-bearing block to slide along the guide rail. During the sliding process, a camera is controlled to capture N target images of a first surface. No two target images correspond to the same area of ​​the first surface, and the union of the areas of the first surface corresponding to the N target images constitutes the first surface. The surface of the guide rail facing the air-bearing block is the first surface; N is a natural number, and N≥2; Based on the N target images, the gas pressure supplied by the throttling orifice is controlled by the air source. In summary, by controlling the gas pressure of the airflow supplied by the air source, wear-free movement between the air-bearing block and the guide rail is achieved. Attached Figure Description

[0017] Figure 1 and Figure 2 This is a schematic diagram of the air-bearing guide rail in the embodiment;

[0018] Figure 3 This is a flowchart illustrating the control method for the air-bearing guide rail in the embodiment.

[0019] Figure 4 This is a schematic diagram of the control method for the air-bearing guide rail in the embodiment. Detailed Implementation

[0020] The present invention will now be described in detail with reference to the embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and any structural, methodological, or functional modifications made by those skilled in the art based on these embodiments are included within the scope of protection of the present invention.

[0021] The following description and accompanying drawings fully illustrate specific embodiments described herein to enable those skilled in the art to practice them. Some embodiments may include or substitute parts and features of other embodiments. The scope of the embodiments herein encompasses the entire scope of the claims and all available equivalents thereof. Throughout this document, the terms “first,” “second,” etc., are used only to distinguish one element from another without requiring or implying any actual relationship or order between the elements. Indeed, a first element can also be referred to as a second element, and vice versa. Furthermore, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a structure, apparatus, or device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a structure, apparatus, or device. Without further limitation, an element defined by the phrase “comprising one…” does not exclude the presence of other identical elements in the structure, apparatus, or device that includes said element. The various embodiments described herein are presented in a progressive manner, with each embodiment focusing on its differences from other embodiments; similar or identical parts between embodiments can be referred to interchangeably.

[0022] The terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer" used in this document to indicate orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings. They are used solely for the convenience of describing the document and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. In the description herein, unless otherwise specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to mechanical or electrical connections, or internal connections between two elements; they can be direct connections or indirect connections through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms according to the specific circumstances.

[0023] Embodiment 1 of the present invention provides a control method for an air-bearing guide rail, such as... Figure 1 and Figure 2As shown, the air flotation guide rail includes: a guide rail 1, an air flotation block 2 disposed on the guide rail 1, and an air source 3. The air flotation block 2 is provided with a camera 4 and multiple throttling orifices on its second surface facing the guide rail 1. The air source 3 is used to provide air to the throttling orifices. The air flotation block 2 can slide along the guide rail 1.

[0024] like Figure 2 As shown, the second surface of the air flotation block 2 is provided with a groove, and the guide rail 1 extends into the groove. The extension direction of the groove is the same as the extension direction of the guide rail 1, and the two inner sides of the groove slide against the two outer sides of the guide rail 1, thereby improving the stability between the air flotation block 2 and the guide rail 1. Similarly, a groove is also provided on the first surface, and the extension direction of the groove is the same as the extension direction of the guide rail 1. The throttling orifice can be on the bottom surface of the groove.

[0025] In practical use, the load can be installed on the air flotation block 2.

[0026] Here, as Figure 1 and Figure 2 As shown, the throttling orifice can be a through hole, with the first port of the through hole located on the second surface and the second port located on other surfaces. A triplet can be provided between the gas source 3 and the second port. The gas source 3, the triplet, and the second port can be connected by a gas pipe 31. A pressure regulator 32 is provided in the triplet, and the gas pressure of the gas in the throttling orifice can be adjusted by the pressure regulator 32.

[0027] like Figure 2 As shown, it includes the following steps:

[0028] Step 201: The gas source 3 controls the throttle orifice to supply gas, controls the air flotation block 2 to slide along the guide rail 1, and during the sliding process, controls the camera 4 to capture N target images of the first surface. Any two target images do not correspond to the same area of ​​the first surface, and the union of the areas of the first surface corresponding to the N target images is the first surface. The surface of the guide rail 1 facing the air flotation block 2 is the first surface.

[0029] Here, the air-floating block 2 is controlled to slide along the guide rail 1, and N target images of the first surface are acquired by the camera 4. Therefore, the regions of the first surface corresponding to different target images are different, but the intersection between the regions of the first surface corresponding to different target images can be non-empty, that is, the regions of the first surface corresponding to different target images have the same part of the region.

[0030] Step 202: Based on N target images, control the gas pressure of the gas supplied by the throttle orifice through the gas source 3.

[0031] Here, based on N target images, the distance between the first and second surfaces and the contour data of the first surface can be obtained, thereby enabling control of the outlet air pressure of the throttling orifice, maintaining the thickness of the air cushion between the air float and the guide rail, and ensuring wear-free movement between the air float and the guide rail.

[0032] In this embodiment, controlling the gas pressure of the gas supplied by the throttle orifice based on N target images specifically includes:

[0033] Obtain the target distance D1 between the first and second surfaces; based on N target images, obtain the distance D2 between the first and second surfaces, and obtain the difference between D1 and D2; based on N target images, obtain the contour data of the first surface; process the difference and contour data using a preset algorithm, and control the gas pressure provided by the throttling orifice based on the processing result.

[0034] Figure 4 The simulation data for an air-bearing slider can be continuously parameterized to calculate the air film thickness bearing capacity curve under various precise air supply pressure conditions. A large database is established, and the real-time air film thickness value and the recommended air film thickness value under this bearing capacity are read from the database. The optimal air supply pressure value is then read from the database, and the air supply pressure is precisely adjusted by a CNC pressure regulating valve to keep the air film thickness at the recommended optimal working air film thickness state at all times, thereby obtaining the distance to the target value D1.

[0035] Here, based on the parameters of the air flotation block 2 (e.g., the area of ​​the second surface, the weight of the air flotation block 2, etc.) and the weight of the load, simulation calculations can be performed in advance to determine the relationship curve between the air film gap (the distance D2 between the first and second surfaces) and the load-bearing capacity. For example, Figure 4 A specific relationship curve is shown. In the inventor's actual experiments, the air film gap is generally selected as 8-12 μm, and preferably, the distance from the target value D1 is 10 μm.

[0036] In addition, Hall effect sensors or photoelectric sensors can be used to detect the contour data (i.e., the deformation of the first surface) of guide rail 1. When the guide rail deforms, the sensor can detect the contour data.

[0037] In this embodiment, the process of processing the difference and contour data using a preset algorithm specifically includes: processing the difference and contour data using a PID (Proportion Integration Differentiation) algorithm.

[0038] In this embodiment, obtaining the contour data of the first surface based on N target images specifically includes: performing noise removal, contrast enhancement, and smoothing processing on all N target images; extracting contour information of preset regions from all N target images; and matching the N target images to obtain the contour data of the first surface.

[0039] In this embodiment, extracting the contour information of a preset region from all N target images specifically includes: using an edge detection algorithm or a corner detection algorithm to extract the contour information of a preset region from all N target images.

[0040] In this embodiment, obtaining the distance D2 between the first and second surfaces based on N target images specifically includes:

[0041] Preprocess all N target images;

[0042] For each target image, feature extraction is performed, and the features include at least: the contour, shape, color, and texture of the first surface;

[0043] Identify the first surface from the target image;

[0044] The first surface is traced from N target images;

[0045] Obtain the distance D2 between the first and second surfaces.

[0046] In this embodiment, the preprocessing of all N target images specifically includes: denoising, filtering, grayscale conversion, and enhancement processing of all N target images.

[0047] Understandably, preprocessing helps to better extract target objects from the target image.

[0048] Embodiment 2 of the present invention provides a control device for an air-bearing guide rail. The air-bearing guide rail includes: a guide rail 1, an air-bearing block 2 disposed on the guide rail 1, and an air source 3. The air-bearing block 2 is provided with a camera 4 and multiple throttling orifices on its second surface facing the guide rail 1. The air source 3 is used to supply air to the throttling orifices. The air-bearing block 2 can slide along the guide rail 1. It includes the following modules:

[0049] The information acquisition module is used to control the throttling orifice to supply gas through the gas source 3, control the air flotation block 2 to slide along the guide rail 1, and during the sliding process, control the camera 4 to capture N target images of the first surface. Any two target images do not correspond to the same area of ​​the first surface, and the union of the areas of the first surface corresponding to the N target images is the first surface. The surface of the guide rail 1 facing the air flotation block 2 is the first surface; N is a natural number, and N≥2;

[0050] The processing module is used to control the gas pressure of the gas supplied by the throttle orifice through the gas source 3 based on N target images.

[0051] Embodiment 2 of the present invention provides an electronic device, comprising:

[0052] At least one processor; and,

[0053] A memory communicatively connected to the at least one processor; wherein,

[0054] The memory stores instructions that can be executed by the at least one processor to enable the at least one processor to perform the control method as described in Embodiment 1.

[0055] Embodiment 3 of the present invention provides a computer-readable storage medium storing a computer program, which, when executed by a processor, implements the control method in Embodiment 1.

[0056] It should be noted that although the steps are described in a specific order above, it does not mean that the steps must be executed in the above specific order. In fact, some of these steps can be executed concurrently, or even in a different order, as long as the required function can be achieved.

[0057] This invention can be a system, method, and / or computer program product. A computer program product may include a readable storage medium having computer-readable program instructions loaded thereon for causing a processor to implement various aspects of the invention.

[0058] A readable storage medium can be a tangible device that holds and stores instructions for use by an instruction execution device. Readable storage media can include, for example, but not limited to, electrical storage devices, magnetic storage devices, optical storage devices, electromagnetic storage devices, semiconductor storage devices, or any suitable combination thereof. More specific examples (a non-exhaustive list) of readable storage media include: portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), static random access memory (SRAM), portable compact disc read-only memory (CD-ROM), digital multifunction disc (DVD), memory sticks, floppy disks, mechanical encoding devices, such as punch cards or recessed protrusions storing instructions thereon, and any suitable combination thereof.

[0059] The various embodiments of the present invention have been described above. These descriptions are exemplary and not exhaustive, nor are they limited to the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen to best explain the principles, practical application, or technical improvements to the embodiments in the market, or to enable others skilled in the art to understand the embodiments disclosed herein.

Claims

1. A method of controlling an air floating guide rail, the air floating guide rail comprising: A guide rail (1), an air floating block (2) arranged on the guide rail (1), and an air source (3), the air floating block (2) is provided with a camera (4) and a plurality of throttle holes towards the second surface of the guide rail (1), the air source (3) is used for providing air to the throttle hole, and the air floating block (2) can slide along the guide rail (1); characterized by the following steps: Control the throttle hole to provide gas through the air source (3), control the air floating block (2) to slide along the guide rail (1), and control the camera (4) to shoot N target images of the first surface during sliding, any two target images do not correspond to the same area of the first surface, and the union of the areas of the first surface corresponding to the N target images is the first surface, the surface of the guide rail (1) towards the air floating block (2) is the first surface; N is a natural number, and N≥2; Obtain a distance target value D1 between the first and second surfaces; based on the N target images, obtain a distance D2 between the first and second surfaces, obtain a difference value between D1 and D2; perform noise removal, contrast enhancement and smoothing processing on the N target images; extract contour information of a preset area from the N target images; match the N target images to obtain contour data of the first surface; process the difference value and the contour data using a preset algorithm, and control the gas pressure of the gas provided by the throttle hole based on the processing result.

2. The control method according to claim 1, characterized by, The processing of the difference value and the contour data using a preset algorithm specifically includes: Processing the difference value and the contour data using a PID algorithm.

3. The control method according to claim 1, characterized by, The extraction of contour information of a preset area from the N target images specifically includes: Using an edge detection algorithm or a corner detection algorithm to extract contour information of a preset area from the N target images.

4. The control method according to claim 1, characterized by, The obtaining of the distance D2 between the first and second surfaces based on the N target images specifically includes: Preprocessing the N target images; Performing feature extraction processing on each target image, the features at least including: the contour, shape, color and texture of the first surface; Identifying the first surface from the target image; tracking the first surface from the N target images; Obtaining the distance D2 between the first and second surfaces.

5. The control method according to claim 4, characterized by The preprocessing of the N target images specifically includes: Performing denoising processing, filtering processing, grayscale processing and enhancement processing on the N target images.

6. An air bearing guideway control apparatus, the air bearing guideway comprising: A guide rail (1), an air floating block (2) arranged on the guide rail (1), and an air source (3), the air floating block (2) is provided with a camera (4) and a plurality of throttle holes towards the second surface of the guide rail (1), the air source (3) is used for providing air to the throttle hole, and the air floating block (2) can slide along the guide rail (1); characterized by the following steps: The information acquisition module is configured to control the throttle hole to provide gas through the gas source (3), control the air float block (2) to slide along the guide rail (1), and control the camera (4) to capture N target images of the first surface during the sliding process. Any two target images do not correspond to the same area of the first surface, and the union of the areas of the first surface corresponding to the N target images is the first surface. The surface of the guide rail (1) facing the air float block (2) is the first surface. N is a natural number, and N≥2. The processing module is configured to obtain a distance target value D1 between the first surface and the second surface, obtain a distance D2 between the first surface and the second surface based on the N target images, obtain a difference value between D1 and D2, perform noise removal, contrast enhancement and smoothing processing on the N target images, extract contour information of a preset area from the N target images, match the N target images to obtain contour data of the first surface, and process the difference value and the contour data by using a preset algorithm and control the gas pressure of the gas provided by the throttle hole based on a processing result.

7. An electronic device, comprising: The control method comprises the following steps: at least one processor; and a memory connected in communication with the at least one processor; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor to enable the at least one processor to perform the control method according to any one of claims 1 to 5.

8. A computer readable storage medium storing a computer program, characterized in that, The computer program is executed by the processor to implement the control method according to any one of claims 1 to 5.

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