A delivery apparatus, filter canister replacement method, and film forming system

Abstract

The application discloses a conveying device, a filter tank replacement method and a film forming system, and relates to the technical field of semiconductor manufacturing, which is used for reducing the exhaust cost by using a sealing joint and shortening the filter tank replacement time. The conveying device comprises a first controllable flow guide pipe, a second controllable flow guide pipe and a sealing sleeve arranged on the first controllable flow guide pipe and the second controllable flow guide pipe; the sealing joint has a conducting state and a closing state. The first controllable flow guide pipe and the second controllable flow guide pipe are used for being conducted in the conducting state and being closed in the closing state. The first controllable flow guide pipe and the second controllable flow guide pipe have a first gap in the conducting state. The sealing sleeve is used for sealing the first gap in the conducting state. The conveying device provided by the application is used in a film forming system.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a conveying device, a filter can replacement method, and a film forming system. Background Technology

[0002] In the semiconductor manufacturing field, film deposition systems are often used to deposit films on various substrate surfaces to form the desired thin film on the substrate surface, and then plasma equipment is used to perform various etching or cleaning on the thin film.

[0003] Taking a vapor phase film formation system as an example, an existing vapor phase film formation system includes a process chamber and a conveying device connected to the process chamber. The process chamber is used to hold the substrate, and the conveying device is used to deliver the chemical solution used as a reaction raw material into the process chamber. A filter tank is provided between the interface between the conveying device and the process chamber to filter out impurities contained in the chemical solution, so that the purity of the chemical substance entering the process chamber is relatively high, thereby reducing the impact of impurities on the film formation quality.

[0004] During filter replacement, some waste liquid is generated inside the filter tank, which needs to be discharged through a conveying pipeline. However, due to the susceptibility to leakage in the conveying pipeline, a vacuum pump and scrubber are required to assist in discharging the waste liquid from the filter tank. This not only increases the cost of waste liquid discharge but also prolongs the filter tank replacement time. Summary of the Invention

[0005] The purpose of this invention is to provide a conveying device, a filter tank replacement method, and a film forming system, so as to reduce the cost of waste liquid discharge and shorten the filter tank replacement time by utilizing the conveying device.

[0006] To achieve the above objectives, the present invention provides a conveying device. This conveying device is characterized in that it is used to convey chemical agents into a process chamber, and the conveying device includes: a conveying pipe and a first sealing joint; the conveying pipe includes a first conveying pipe and a second conveying pipe, and the first sealing joint includes a first controllable guide pipe, a second controllable guide pipe, and a sealing sleeve sleeved on the first controllable guide pipe and the second controllable guide pipe; the first controllable guide pipe is connected to the first conveying pipe, and the second controllable guide pipe is connected to the second conveying pipe;

[0007] The first sealing joint has a conducting state and a closed state. Both the first controllable flow guide tube and the second controllable flow guide tube are used to conduct in the conducting state and to close in the closed state. The first controllable flow guide tube and the second controllable flow guide tube have a first gap in the conducting state. The sealing sleeve is used to seal the first gap in the conducting state.

[0008] Compared with the prior art, in the conveying device provided by the present invention, the first controllable guide pipe in the first sealing joint is connected to the first conveying pipe, and the second controllable guide pipe is connected to the second conveying pipe. A sealing sleeve is fitted on the first and second controllable guide pipes, and the sealing sleeve can seal the first gap in the first and second controllable guide pipes when they are in the conducting state. At this time, the first and second conveying pipes connected by the first sealing joint can form a conveying pipeline for conveying chemical liquid to the process chamber. When it is necessary to discharge the waste liquid in the filter tank through the conveying pipeline, the first sealing joint is controlled to be in the conducting state, and there will be no problem of liquid leakage from the first sealing joint. It can be seen that when the conveying device provided by the present invention is applied to the conveying pipeline, on the one hand, there is no need for a vacuum pump and a scrubber to cooperate, and the conveying pipeline can discharge the waste liquid in the filter tank, thereby reducing the discharge cost. On the other hand, the residual liquid in the conveying pipeline does not need to be treated by a vacuum pump and a scrubber, thereby shortening the filter tank replacement time.

[0009] The present invention also provides a filter tank replacement method, using a conveying device having a conveying pipe and a first sealing joint. The filter tank contains liquid. The filter tank replacement method includes:

[0010] With the first sealing joint in a conductive state, the liquid in the filter tank is discharged through the delivery pipeline;

[0011] Replace the filter canister in the closed state at the first sealing joint.

[0012] Compared with the prior art, the beneficial effects of the filter tank replacement method provided by the present invention are the same as the beneficial effects of the sealing joint described in the above technical solution, and will not be repeated here.

[0013] The present invention also provides a film-forming system. The film-forming system includes a process chamber and the conveying device described in the above technical solution, wherein the conveying device includes a conveying pipe that communicates with the process chamber.

[0014] Compared with the prior art, the beneficial effects of the film-forming system provided by the present invention are the same as those of the sealing joint proposed in the above-mentioned technical solutions, and will not be repeated here. Attached Figure Description

[0015] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this invention, illustrate exemplary embodiments of the invention and are used to explain the invention, but do not constitute an undue limitation of the invention. In the drawings:

[0016] Figure 1 This is a structural block diagram of a film-forming system in the prior art;

[0017] Figure 2 This is a schematic diagram of the conveying equipment in the prior art;

[0018] Figure 3 This is a schematic diagram of the structure of the sealing joint in the prior art;

[0019] Figure 4 This is a schematic diagram of the structure of the conveying equipment provided in an embodiment of the present invention;

[0020] Figure 5 This is a schematic diagram of a structure of the first sealing joint in the closed state according to an embodiment of the present invention;

[0021] Figure 6 This is a schematic diagram of the structure of the first sealing joint in the embodiment of the present invention in the conductive state;

[0022] Figure 7 This is a schematic diagram of another structure of the first sealing joint in the embodiment of the present invention in the closed state;

[0023] Figure 8 This is a schematic diagram of another structure of the first sealing joint in the embodiment of the present invention in the conductive state;

[0024] Figure 9 The automatic control principle in the embodiments of the present invention Figure 1 ;

[0025] Figure 10 The automatic control principle in the embodiments of the present invention Figure 2 ;

[0026] Figure 11 This is a flowchart of the filter tank replacement method in an embodiment of the present invention.

[0027] Figure label:

[0028] Delivery pipe 100A; First delivery pipe PG1; Second delivery pipe PG2; First sealing joint M1; Second sealing joint M2; First discharge valve PF1; Second discharge valve PF2; Liquid injection pipe 100B; First liquid injection valve ZF1; Second liquid injection valve ZF2; Filter tank 300; Vacuum pump 400; Gas scrubber 500; Sealing sleeve B3; Sleeve b31; Fitting sleeve b32; First controllable guide pipe B1; First pipe b10; First elastic switch assembly b11; First elastic element b111 First sealing component b112; top column b113; first annular limiting platform b114; second annular limiting platform b115; second controllable guide pipe B2; second pipe b20; second elastic switch assembly b21; second elastic component b211; second sealing component b212; third annular limiting platform b213; fourth annular limiting platform 214; second gap X2; limiting sleeve b12; flow regulating valve LF; guide groove DC; protrusion TQ; annular groove C; chemical liquid sensor S1; leakage sensor S2. Detailed Implementation

[0029] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0030] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified. "Several" means one or more, unless otherwise explicitly specified.

[0032] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0033] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0034] In prior art, the film deposition system can be any of the common film deposition systems, such as chemical vapor deposition systems and physical vapor-chemical deposition systems. Figure 1 An example is a structural block diagram of a film-forming system in the prior art. For example... Figure 1 As shown, the film-forming system mainly includes a chemical solution delivery device 100 and a process chamber 200. The chemical solution delivery device 100 is connected to the process chamber 200 and is used to deliver the chemical solution for film formation into the process chamber 200.

[0035] like Figure 1 As shown, depending on the film-forming system, the chemical solution delivery device 100 can deliver different chemical solutions into the process chamber. For example, for a chemical vapor deposition system, the delivery device can introduce chemical solutions such as tetraethyl orthosilicate (TEOS), triethyl phosphate (TEPO), triethylene glycol butyl ether (TEB), and tetramethylsilane (TMS) into the process chamber.

[0036] like Figure 1 As shown, in order to ensure the quality of film formation, the chemical solution fed into the process chamber 200 needs to be filtered through a filter tank before being fed into the process chamber 200 to form a film.

[0037] Figure 2 An example is a schematic diagram of a conveying device in prior art. For example... Figure 2 As shown, the conveying equipment has a conveying pipe 100A, which includes a first conveying pipe PG1 and a second conveying pipe PG2, through which... Figure 3 The sealing joint shown is a common vacuum coupling radial seal (VCR) joint, which can be used for... Figure 3 The sealing joint M is shown.

[0038] like Figure 3 As shown, the sealing joint M includes a first guide tube A1, a second guide tube A2, and a sealing sleeve A3 fitted onto the first guide tube A1 and the second guide tube A2. The first guide tube A1 is connected to the first delivery tube PG1, and the second guide tube A2 is connected to the second delivery tube PG2. The sealing joint has a conducting state and a closed state. Both the first guide tube A1 and the second guide tube A2 are used to conduct in the conducting state and to close in the closed state. When the sealing joint M is in the conducting state, the second guide tube A2 and the sealing sleeve A3 are in the unlocked state, resulting in a relatively large gap between the first guide tube A1 and the second guide tube A2 (defined as the first gap X1). At this time, there is a gap between the first guide tube A1 and the sealing sleeve A3 (defined as the second gap X2). When the sealing joint is in the closed state, the second guide tube A2 and the sealing sleeve A3 are in the locked state, and the first gap X1 and the second gap X2 are relatively small.

[0039] like Figure 2 and Figure 3As shown, to ensure the filtration effect of filter canister 300 on the chemical solution, it needs to be replaced regularly. However, during filter canister 300 replacement, the chemical solution condenses, resulting in the generation of waste liquid inside the filter canister 300. Therefore, during filter canister 300 replacement, the waste liquid needs to be discharged through a conveying pipe. When the waste liquid is discharged from the filter canister using a gas conveying pipe, the waste liquid is prone to leaking from the sealing joint through the second gap X2. To prevent the waste liquid from leaking out from the second gap X2, such as... Figure 2 As shown, a vacuum pump 400 and a gas scrubber 500 need to be connected to the second delivery pipe PG2. Under the strong negative pressure provided by the vacuum pump 400, the waste liquid in the delivery pipe is sucked out by the vacuum pump 400 and treated by the gas scrubber 500, thereby reducing the possibility of leakage in the delivery pipe 100A. However, adding the vacuum pump 400 and the gas scrubber 500 increases the cost of discharging waste liquid. Furthermore, during the waste liquid discharge process, the vacuum pump 400 and the gas scrubber 500 need to repeatedly perform vacuuming and waste liquid treatment, resulting in a longer replacement time for the filter tank 300.

[0040] To address the aforementioned problems, embodiments of the present invention also provide a film-forming apparatus, which includes a process chamber and a conveying device communicating with the process chamber. The conveying device can deliver a chemical solution to the process chamber. This chemical solution can be a gas such as tetraethyl orthosilicate (TEOS), triethyl phosphate (TEPO), triethylene glycol butyl ether (TEB), or tetramethylsilane (TMS).

[0041] Figure 4 A schematic diagram of the conveying device provided in an embodiment of the present invention is shown. Figure 4 The conveying equipment shown is used to deliver chemical solutions into the process chamber. For example... Figure 4 As shown, the conveying equipment includes: a conveying pipe 100A and a first sealing joint M1. The conveying pipe 100A includes a first conveying pipe PG1 and a second conveying pipe PG2, and the first sealing joint M1 can connect the first conveying pipe PG1 and the second conveying pipe PG2 together. Figure 4 As shown, the first delivery pipe PG1 has a first discharge valve PF1 to regulate the waste liquid discharge flow rate within the first delivery pipe PG1. Similarly, the second delivery pipe PG2 has a second discharge valve PF2 to regulate the waste liquid discharge flow rate within the second delivery pipe PG2.

[0042] like Figure 4As shown, since the chemical solution needs to be filtered by the filter tank 300 before being sent into the process chamber when the conveying equipment delivers it, the conveying equipment needs to be connected to the filter tank 300. Furthermore, the conveying pipe 100A also needs to be connected to the filter tank 300 during the discharge of waste liquid from the filter tank 300. Therefore, the aforementioned conveying pipe 100A also includes a third conveying pipe PG3 connected in parallel to the outlet of the first sealing joint M1. It is understood that the shapes of the first conveying pipe PG1, the second conveying pipe PG2, and the third conveying pipe PG3 can vary; they can be straight, curved, or even zigzag.

[0043] like Figure 4 As shown, the third delivery pipe PG3 is used to communicate with the process chamber. In this case, the delivery device can not only be used to discharge waste liquid in the filter tank 300, but also, as part of the delivery device, to deliver the chemical solution filtered by the filter tank 300 to the process chamber 200.

[0044] like Figure 4 As shown, to prevent waste liquid from entering the process chamber during waste liquid discharge, the aforementioned conveying equipment also includes a gas valve SQ located at the outlet of the first sealing joint M1. This gas valve SQ is installed on the third conveying pipe PG3. During waste liquid discharge, the gas valve SQ is in the closed state, thereby preventing waste liquid from entering the process chamber 200.

[0045] To facilitate the discharge of waste liquid, such as Figure 4 As shown, the aforementioned conveying equipment also includes a liquid injection pipe 100B and a second sealing joint M2. The structure of the second sealing joint M2 can be the same as that of the first sealing joint M1, or it can be different. The liquid injection pipe 100B includes a first liquid injection pipe ZG1 and a second liquid injection pipe ZG2. The second sealing joint M2 can connect the first liquid injection pipe ZG1 and the second liquid injection pipe ZG2 together. It should be understood that the first liquid injection pipe ZG1 has a first liquid injection valve SQZF1 for regulating the waste liquid discharge flow rate within the first liquid injection pipe ZG1. At this time, the first liquid injection valve ZF1 is located at the inlet of the second sealing joint M2. Similarly, the second liquid injection pipe ZG2 has a second liquid injection valve ZF2 for regulating the waste liquid discharge flow rate within the second liquid injection pipe ZG2. At this time, the second liquid injection valve ZF2 is located at the outlet of the second sealing joint M2.

[0046] like Figure 4 As shown, the aforementioned injection pipeline 100B also includes a third injection pipe ZG3 and a flow regulating valve LF installed on the third injection pipe ZG3. The third injection pipe ZG3 is used to connect the first injection pipe ZG1 to the second delivery pipe PG2. When the delivery equipment is used to discharge waste liquid from the filter tank 300, the flow regulating valve LF can be used to regulate the injection of gas into the second delivery pipeline 100A.

[0047] like Figure 4 As shown, when the gas flow rate entering the second delivery pipe PG2 through the third injection pipe ZG3 is small, and the gas flow rate entering the filter tank 300 through the second injection pipe ZG2 is large, the internal pressure of the second delivery pipe PG2 is less than the internal pressure of the filter tank 300. At this time, the waste liquid in the filter tank 300 can be discharged through the first delivery pipe PG1 and the second delivery pipe PG2. When the gas flow rate entering the second delivery pipe PG2 through the third injection pipe ZG3 is large, and the gas flow rate entering the filter tank 300 through the second injection pipe ZG2 is small, the internal pressure of the second delivery pipe PG2 is greater than the internal pressure of the filter tank 300. At this time, the waste liquid that has entered the second delivery pipe PG2 can flow back into the filter tank 300, thereby backflushing the first sealing joint M1 and the delivery pipe 100A, thus reducing the amount of waste liquid remaining in the delivery pipe 100A and the first sealing joint M1.

[0048] Figure 5 and Figure 6 The diagram illustrates a structure of the first sealing joint in an embodiment of the present invention in a closed state and a conductive state. Figure 7 and Figure 8 This example illustrates another structure of the first sealing joint in an embodiment of the present invention, showing its closed and open states. (See attached diagram.) Figures 5-8 As shown, the first sealing joint M1 also includes a first controllable flow guide tube B1, a second controllable flow guide tube B2, and a sealing sleeve B3. The first sealing joint M1 has a conducting and a closed state, and the first controllable flow guide tube B1 and the second controllable backflow tube B2 can automatically switch between the conducting and closed states.

[0049] Chemical liquid sensor S1 Chemical liquid sensor S1 second sealing joint as follows Figure 5 and Figure 7 As shown, the first controllable flow guide tube B1 and the second controllable flow guide tube B2 have a first gap when in the conducting state (which can be regarded as...). Figure 3 The first gap (X1) is located in the first part of the filter tank 300, and the width direction of the first gap is substantially the same as the fluid flow direction. The sealing sleeve B3 is used to seal the first gap in the conductive state. At this time, the first sealing joint connects to the conveying pipe 100A formed by the first conveying pipe PG1 and the second conveying pipe PG2. When the waste liquid in the filter tank 300 is discharged through the conveying pipe 100A, it can be ensured that the waste liquid will not leak from the first sealing joint and can be discharged directly from the outlet of the conveying pipe 100A. It can be seen that when the first sealing joint in the embodiment of the present invention is applied to the conveying pipe 100A, on the one hand, the waste liquid in the filter tank 300 can be discharged through the conveying pipe 100A without the need for the vacuum pump 400 and the gas scrubber 500, thereby reducing the discharge cost. On the other hand, the residual liquid in the conveying pipe 100A does not need to be used for... Figure 5The vacuum pump 400 and gas scrubber 500 shown are used for processing, thereby shortening the replacement time of the filter canister 300.

[0050] like Figure 6 and Figure 8 As shown, the sealing sleeve B3 and the first controllable flow guide tube B1 form a second gap. The width direction of the second gap can be considered to be the same as the radial direction of the first controllable backflow tube B1. The second controllable flow guide tube B2 and the sealing sleeve B3 can be locked in the conductive state. At this time, the sealing sleeve B3 and the second gap X2 are relatively small, which can further reduce the risk of waste liquid leaking out through the second gap of the first sealing joint. Figure 5 and Figure 7 As shown, the second controllable guide pipe B2 and the sealing sleeve B3 can be in the unlocked state when closed. At this time, the second gap is relatively large, but since the conveying pipe 100A has stopped discharging waste liquid, there is no waste liquid in the first sealing joint. Therefore, there is no possibility of leakage in the first sealing joint.

[0051] In some embodiments, such as Figures 5-8 As shown, the wall of the second controllable flow guide tube B2 extends into the second gap. The depth direction of the second gap is the same as the axial direction of the sealing sleeve B3. Based on the extent to which the wall of the second controllable flow guide tube B2 extends into the gap, the second gap can be divided into a conducting zone and a closing zone. At this point, the conducting zone and the closing zone are distributed along the direction of increasing depth of the second gap.

[0052] like Figure 5 and Figure 7 As shown, when the end of the second controllable flow guide tube B2 that extends into the second gap is in the closed state, it is in the closed area. Only a small portion of the wall of the second controllable flow guide tube B2 extends into the second gap, making the first gap and the second gap relatively large. At this time, the second controllable flow guide tube B2 and the sealing sleeve B3 are in the unlocked state when closed. Therefore, it can be seen that when the first sealing joint is in the closed state, the first gap and the second gap are relatively large, but because there is no waste liquid flowing through the first sealing joint at this time, no waste liquid leakage will occur.

[0053] like Figure 6 and Figure 8 As shown, when the end of the second controllable flow guide tube B2 extending into the second gap is in the conductive state, a large portion of the wall of the second controllable flow guide tube B2 extends into the second gap, making the first gap and the second gap relatively small. At this time, the second controllable flow guide tube B2 and the sealing sleeve B3 are in a locked state while in the conductive state. Therefore, when the first sealing joint is in the conductive state, the first gap and the second gap are relatively small, which can further reduce the possibility of leakage of waste liquid flowing within the first sealing joint.

[0054] In some embodiments, such as Figures 5-8 As shown, given that during the unlocking and locking processes of the second controllable flow guide tube B2 and the sealing sleeve B3, the second controllable flow guide tube B2 can easily exert a certain force on the sealing sleeve B3 and the first controllable flow guide tube B1, thereby affecting the sealing performance of the sealing sleeve B3 and the flow guiding function of the first controllable flow guide tube B1. Therefore, the outer wall of the first controllable flow guide tube B1 has a limiting sleeve b12 for locking within the sealing sleeve B3. When the first controllable flow guide tube B1 is subjected to a certain downward force, the sealing sleeve B3 can provide some resistance to the limiting sleeve b12, allowing the first controllable flow guide tube B1 to remain in its original position under the downward force and not to detach from the sealing sleeve B3. Therefore, the cooperation between the sealing sleeve B3 and the limiting sleeve b12 can prevent the first controllable flow guide tube B1 from shifting under force, thereby reducing the first gap X1 and further reducing the possibility of leakage.

[0055] For example, such as Figures 5-8 As shown, the sealing sleeve B3 includes a sleeve b31 and a fitting sleeve b32 for nesting on the first controllable flow guide tube B1. The fitting sleeve b32 is located at one end of the sleeve b31. The difference between the inner diameter of the sleeve b31 and the outer diameter of the first controllable flow guide tube B1 is greater than or equal to the wall thickness of the second controllable flow guide tube B2. In this case, the wall of the second controllable flow guide tube B2 can extend into the second gap X2. However, if the difference between the inner diameter of the sleeve b31 and the outer diameter of the first controllable flow guide tube B1 is less than the inner diameter of the second controllable flow guide tube B2, then after the wall of the second controllable flow guide tube B2 extends into the second gap X2, there is still a spare area in the second controllable flow guide tube B2 for waste liquid to pass through. It should be understood that the inner diameter of the fitting sleeve b32 can be smaller or larger than the inner diameter of the sleeve b31, as long as the fitting sleeve b32 can be fitted onto the first controllable flow guide tube B1.

[0056] When the first controllable guide tube B1 is subjected to a certain downward force, the fitting sleeve b32 can provide some resistance to the limiting sleeve, so that the first controllable guide tube B1 can remain in its original position under the downward force and will not come out of the sleeve b31. Therefore, the fitting sleeve b32 and the limiting sleeve can prevent the first controllable guide tube B1 from displacing under force, thereby reducing the first gap and further reducing the possibility of leakage.

[0057] In some embodiments, such as Figure 4 and Figure 9As shown, to achieve automated control, the aforementioned conveying equipment also includes a controller CPU. The controller CPU can be electrically connected to the flow regulating valve LF. In this case, the flow regulating valve LF can be a common solenoid valve or other controllable valve. The controller CPU can be used to control the opening degree of the flow regulating valve LF, switching between backwashing and forward flushing of the first sealing joint M1. To coordinate the switching process between backwashing and forward flushing, a chemical liquid sensor S1 can be added. The chemical liquid sensor S1 can be used to obtain the chemical liquid concentration in the first sealing joint M1 or the conveying pipeline 100A, allowing the controller CPU to know the chemical liquid concentration in the conveying pipe at any time. When the chemical liquid concentration exceeds a certain range, the valve opening of the flow regulating valve LF can be adjusted to indirectly control the pressure difference between the conveying pipeline 100A and the filter tank 300, thereby using waste liquid to backwash or alternately backwash or forward flush the first sealing joint M1 and the conveying pipeline 100A.

[0058] like Figure 4 and Figure 10 As shown, the aforementioned conveying equipment may further include a leakage sensor S2 connected to the controller CPU for detecting whether the first sealing structure leaks. The controller CPU is also used to at least close the conveying pipeline 100A in the event of leakage from the first sealing joint M1. It should be understood that closing the conveying pipeline 100A may be achieved by closing the first discharge valve PF1 and / or the second discharge valve PF2, or by closing the first sealing joint M1, thereby achieving the purpose of closing the conveying pipeline 100A and preventing leakage.

[0059] Of course, the liquid injection pipe 100B can also be closed to prevent liquid in the filter tank 300 from entering the delivery pipe 100A, thereby preventing leakage. It should be understood that this can be achieved by closing the first liquid injection valve ZF1 and / or the second liquid injection valve ZF2 to prevent liquid in the filter tank 300 from entering the delivery pipe 100A, thus preventing leakage.

[0060] To achieve automated control, such as Figure 2 and Figure 3 As shown, both the first sealing joint M1 and the second sealing joint M2 have an on state and a closed state. The aforementioned emission controller CPU is used to control the first sealing joint M1 and / or the second sealing joint M2 to be in the on state or the open state.

[0061] In some embodiments, such as Figures 5-8As shown, the aforementioned conveying equipment may further include a drive device. This drive device can be used to drive the first controllable guide tube B1 and the second controllable guide tube B2 to move relative to each other, causing the first controllable guide tube B1 and the second controllable guide tube B2 to switch between an on and off state. To achieve automated switching, this drive device (not shown in the figure) can be electrically connected to the controller CPU described above. The controller CPU can control the drive device to switch between the on and off states.

[0062] For example, such as Figures 5-8 As shown, the sealing sleeve B3 can be detachably fitted together with the second controllable guide tube B2. The method of fitting them together can be selected according to the actual situation.

[0063] like Figure 5 and Figure 6 As shown, when the sealing sleeve B3 and the second controllable flow guide tube B2 are connected by threads, the inner wall of the sealing sleeve B3 has an internal thread, and the outer wall of the second controllable flow guide tube B2 has an external thread that matches the internal thread. Figure 5 As shown, when the internal and external threads are unlocked, the first and second gaps increase, and the first sealing joint is in the closed state. Figure 6 As shown, when the internal and external threads are tightened, the first and second gaps become smaller, and the first sealing joint is in a conductive state, thereby further improving the sealing effect of the first sealing joint. Therefore, the switching between the conductive and closed states of the first sealing joint can be achieved by controlling whether the internal and external threads are tightened.

[0064] In this scenario, the aforementioned drive device may include a micro motor controlled by a controller. Under the controller's control, the micro motor can unlock or lock the internal and external threads. For example, the micro motor can be directly or indirectly connected to the controller via a shaft connection. Figure 5 and Figure 6 The example involves a second controllable guide tube or sealing sleeve B3, which allows the rotational torque output by the micro motor to control the sealing sleeve B3 to unlock or lock in the second controllable guide tube B2.

[0065] Of course, the tightness of the internal and external threads can also be controlled based on the likelihood of waste liquid leakage. For example, when the likelihood of waste liquid leakage is low, the tightness of the internal and external threads can be kept low. When the likelihood of waste liquid leakage is high, the tightness of the internal and external threads can be kept high. In addition, to reduce wear, the tightness of the internal and external threads can be kept moderate to prevent thread wear caused by over-tightening, which could lead to a decrease in the sealing effect of the sealing sleeve or even failure.

[0066] like Figure 7 and Figure 8As shown, when the sealing sleeve B3 can be fitted together with the second controllable flow guide tube B2 in a snap-fit ​​manner, a guide groove DC is formed on the inner sidewall of the sealing sleeve B3, and a protrusion TQ matching the guide groove DC is formed on the outer sidewall of the second controllable flow guide tube B2. For example, if the guide groove DC is a long groove extending along the direction of increasing depth of the second gap, then the protrusion TQ is a strip-shaped protrusion extending along the direction of increasing depth of the second gap.

[0067] like Figure 7 and Figure 8 As shown, when the protrusion TQ is pulled out of the second gap under the guidance of the guide groove DC (in the opposite direction to its insertion into the second gap), the second gap widens, and the protrusion TQ unlocks from the second guide groove DC. At this time, as... Figure 9 As shown, the first sealing joint is in the closed state. Figure 7 and Figure 8 As shown, when the protrusion, guided by the guide groove, extends into the second gap, the second gap gradually narrows until the protrusion can no longer extend into the second gap, and the protrusion locks into the second guide groove. Figure 8 As shown, the first sealing joint is in the conducting state at this time, thereby further improving the sealing effect of the first sealing joint. Therefore, it can be seen that the first sealing joint can be controlled to switch between the conducting and closed states by controlling the movement direction of the protrusion TQ in the guide groove DC.

[0068] In this case, the aforementioned driving device may include a micro motor controlled by a controller and a rotary-linear motion conversion mechanism connected to the micro motor. Under the control of the controller, the micro motor can cooperate with a rotary-linear motion conversion mechanism such as a lead screw and nut mechanism and a linear guide to control the movement direction of the protrusion in the guide groove, thereby switching the first sealing joint between an on and off state.

[0069] In some embodiments, given the face-to-face contact, the risk of leakage can be effectively reduced, such as... Figures 5-8 As shown, the inner wall of the second controllable flow guide tube B2 is in surface contact with the inner wall of the first controllable flow guide tube B1. This ensures sufficient contact between the second controllable flow guide tube B2 and the first controllable flow guide tube B1, thereby increasing the sealing performance of the first sealing joint and further reducing leakage. It should be understood that the first controllable flow guide tube B1 and the second controllable flow guide tube B2 can be of various types, as long as they can guarantee the aforementioned functions in both the on and off states.

[0070] For example, such as Figures 5-8 As shown, the first controllable flow guide tube B1 includes a first pipe b10 and a first elastic switch assembly b11 disposed within the first pipe b10. The second controllable flow guide tube B2 includes a second pipe b20 and a second elastic switch assembly b21 disposed within the second pipe b20.

[0071] like Figures 5-8 As shown, if the inner wall of the second controllable guide tube B2 is in surface-to-surface contact with the inner wall of the first controllable guide tube B1, and the outer wall of the first controllable guide tube B1 and the inner wall of the second controllable guide tube B2 are smooth, the first controllable guide tube B1 and the second controllable guide tube B2 can achieve surface-to-surface contact.

[0072] like Figure 5 and Figure 6 As shown, if the sealing sleeve B3 and the second controllable flow guide tube B2 are detachably fitted together using the threaded connection method described above, the outer wall of the second pipe b20 has an external thread, which matches the internal thread of the sealing sleeve B3, thereby realizing the function of locking and unlocking the sealing sleeve B3 and the second controllable flow guide tube B2.

[0073] like Figure 7 and Figure 8 As shown, if the sealing sleeve B3 and the second controllable flow guide tube B2 are detachably sleeved together using the snap-fit ​​connection method described above, the outer side wall of the second pipe b20 has a protrusion TQ, which can match the guide groove DC formed on the inner side wall of the sealing sleeve B3, thereby realizing the function of locking and unlocking the sealing sleeve B3 and the second controllable flow guide tube B2.

[0074] like Figures 5-8 As shown, during the process of the first sealing joint switching from the closed state to the open state, the first gap between the first pipe b10 and the second pipe b20 becomes smaller and smaller, which in turn reduces the distance between the first elastic switch assembly b11 and the second elastic switch assembly b21. At this time, the first elastic switch assembly b11 gradually squeezes the second elastic switch assembly b21. While being squeezed by the first elastic switch assembly b11, the second elastic switch assembly b21 provides a reaction force to the first elastic switch assembly b11, causing the first elastic switch assembly b11 to gradually open the second pipe b20 under the reaction force provided by the second elastic switch assembly b21.

[0075] like Figures 5-8 As shown, during the process of the first sealing joint switching from the conducting state to the closed state, the first gap between the first pipe b10 and the second pipe b20 gradually increases, and the distance between the first elastic switch assembly b11 and the second elastic switch assembly b21 also increases. During this process, the first elastic switch assembly b11 gradually compresses the second elastic switch assembly b21, causing the second elastic assembly to slowly open the second pipe b20. While being compressed by the first elastic switch assembly b11, the second elastic switch assembly b21 also provides a reaction force to the first elastic switch assembly b11, causing the first elastic switch assembly b11 to gradually open the second pipe b20 under the reaction force provided by the second elastic switch assembly b21.

[0076] As can be seen from the above, such as Figures 5-8 As shown, the first elastic switch assembly b11 controls the first pipe b10 to be in a closed state when it is in a closed state, and controls the first pipe b10 to be in an open state when it is pressed by the second elastic switch assembly b21 when it is in a conducting state. The second elastic switch assembly b21 controls the second pipe b20 to be in a closed state when it is in a closed state, and controls the second pipe b20 to be in an open state when it is pressed by the first elastic switch assembly b11 when it is in a conducting state.

[0077] To clearly describe the switching process between the first and second flexible switch components in the closed and open states, the following will combine... Figures 5-8 For example.

[0078] like Figures 5-8 As shown, the aforementioned first elastic switch assembly b11 includes a first elastic element b111, a first sealing element b112, and a top post b113, all located within the first conduit b10. The first sealing element b112 is located between the first elastic element b111 and the top post b113, and the top post b113 is located between the first sealing element b112 and the opening of the first conduit b10. The first end of the first elastic element b111 is located in the first conduit b10, and the surface of the first sealing element b112 facing away from the top post b113 is located at the second end of the first elastic element b111. The shape of the first sealing element b112 can vary. For example, it can be a circular, square, or irregularly shaped plate-shaped sealing element. The first elastic element b111 can be an elastic element such as a spring. In practical applications, there are many variations, which will not be listed here.

[0079] like Figures 5-8 As shown, the aforementioned second elastic switch assembly b21 includes a second elastic element b211 and a second sealing element b212, both located within the second pipe b20. The second sealing element b212 is located between the second elastic element b211 and the opening of the second pipe b20. The first end of the second elastic element b211 is located within the second pipe b20, and the second sealing element b212 is located at the second end of the second elastic element b211. The shape of the second sealing element b212 can vary. For example, it can be a spherical, ellipsoidal, or irregularly shaped block. The second elastic element b211 can be an elastic element such as a spring. In practical applications, there are many variations, which will not be listed here.

[0080] When the first sealing joint is in the closed state, such as Figure 5 and Figure 7As shown, the first gap X1 between the first pipe b10 and the second pipe b20 is at its maximum. At this time, the first elastic member b111 lifts the first sealing member b112 and seals the opening of the first pipe b10, thus closing the first pipe b10. The second elastic member b211 lifts the second sealing member b212 and seals the opening of the second pipe b20, thus closing the second pipe b20.

[0081] During the process of the first sealing joint switching from the closed state to the open state, such as Figures 5-8 As shown, the first gap between the first pipe b10 and the second pipe b20 gradually narrows, causing the top post b113 and the second sealing member b212 to gradually press against each other. During this process, the top post b113 transmits the compressive force (the compressive force applied by the second sealing member b212) to the first elastic member b111 through the first sealing member b112, causing the first elastic member b111 to be gradually compressed. During this process, the first sealing member b112 moves inward into the first pipe b10, thereby opening the opening of the first pipe b10. Correspondingly, the second sealing member b212 transmits the compressive force (the compressive force applied by the top post b113) to the second elastic member b211, causing the second elastic member b211 to be gradually compressed. During this process, the second sealing member b212 moves inward into the second pipe b20, thereby opening the opening of the second pipe b20.

[0082] like Figures 5-8 As shown, during the process of the first sealing joint switching from the conducting state to the closed state, the first gap between the first pipe b10 and the second pipe b20 gradually increases, causing the mutual compression between the top column b113 and the second sealing member b212 to gradually decrease, eventually transitioning to a state where there is no mutual compression. During this process, the compressive force on the top column b113 (the compressive force applied by the second sealing member b212) decreases, therefore, the compressive force transmitted from the top column b113 to the first elastic member b111 through the first sealing member b112 also decreases. Consequently, the first elastic member b111 gradually elongates and pushes the first sealing member b112 towards the pipe opening of the first pipe b10 until the first sealing member b112 seals the pipe opening of the first pipe b10. Correspondingly, the compressive force (the compressive force applied by the top column b113) on the second sealing member b212 decreases, which reduces the compressive force transmitted from the second sealing member b212 to the second elastic member b211. Therefore, the second elastic member b211 gradually elongates and pushes the second sealing member b212 toward the opening of the second pipe b20 until the second sealing member b212 seals the opening of the second pipe b20.

[0083] As can be seen from the above, such as Figures 5-8As shown, the first sealing element b112 is used to seal the opening of the first pipe b10 in the closed state, and in the open state, it is subjected to the compressive force of the second sealing element b212 transmitted by the top column b113, thus controlling the opening of the second pipe b20 to be in the open state. The second sealing element b212 is used to seal the opening of the second pipe b20 in the closed state, and in the open state, it is subjected to the compressive force of the top column b113, thus controlling the opening of the second pipe b20 to be in the open state.

[0084] like Figures 5-8 As shown, to facilitate the fixing of the first elastic element b111 within the first pipe b10, the aforementioned first elastic switch assembly b11 further includes a first annular limiting platform b114. The first annular limiting platform b114 is disposed on the inner wall of the first pipe b10. The first end of the first elastic element b111 is disposed on the first annular limiting platform b114. In this case, the first annular limiting platform b114 not only provides a relatively stable support structure for the first elastic element b111 within the first pipe b10, but also provides a flow channel for the waste liquid in the first pipe b10 within the area enclosed by the first annular limiting platform b114, ensuring the normal operation of the first pipe b10 in the conductive state.

[0085] like Figures 5-8 As shown, the first resilient switch assembly b11 may further include a second annular limiting stage b115 forming the opening of the first conduit b10. Here, the opening of the first conduit b10 refers to the area enclosed by the second annular limiting stage b115.

[0086] like Figures 5-8 As shown, when the maximum cross-sectional area of ​​the first sealing element b112 in the radial direction of the second annular limiting platform b115 is greater than the inner diameter area of ​​the second annular limiting platform b115, the first sealing element b112 can completely seal the area enclosed by the second annular limiting platform b115 in the closed state. When the minimum cross-sectional area of ​​the first sealing element b112 in the radial direction of the first pipe b10 is less than the inner diameter of the first pipe b10, although the first sealing element b112 occupies a part of the area of ​​the first pipe b10 in the conducting state, there is a certain space between the first sealing element b112 and the inner wall of the first pipe b10, which allows waste liquid to pass through. Therefore, the first sealing element b112 can ensure that the first controllable guide pipe B1 is normally closed in the closed state, while ensuring that waste liquid can pass normally through the first pipe b10 in the conducting state.

[0087] like Figures 5-8 As shown, the minimum cross-sectional area of ​​the top column b113 in the radial direction of the second annular limiting platform b115 can be smaller than the inner diameter area of ​​the second annular limiting platform b115. In this case, regardless of whether the top column b113 extends out of the second annular limiting platform b115 into the first pipe b10, it will not block the first pipe b10, thereby ensuring that the first pipe b10 flows normally with waste liquid in the conductive state.

[0088] like Figures 5-8 As shown, to facilitate the fixing of the second elastic element b211 within the second pipe b20, the aforementioned second elastic switch assembly b21 may further include a third annular limiting platform b213. The third annular limiting platform b213 is disposed on the inner wall of the second pipe b20. The first end of the second elastic element b211 is disposed on the third annular limiting platform b213. In this case, the third annular limiting platform b213 not only provides a relatively stable support structure for the second elastic element b211 within the second pipe b20, but also provides a flow channel for the waste liquid in the second pipe b20 within the area enclosed by the second annular limiting platform b215, ensuring the normal operation of the second pipe b20 in the conductive state.

[0089] like Figures 5-8 As shown, the second resilient switch assembly b21 may further include a fourth annular limiting platform 214 forming the opening of the second pipe b20. Here, the opening of the second pipe b20 refers to the area enclosed by the third annular limiting platform b213. When the maximum cross-sectional area of ​​the second sealing member b212 in the radial direction of the fourth annular limiting platform 214 is greater than the inner diameter area of ​​the fourth annular limiting platform 214, the second sealing member b212 can completely close the area enclosed by the third annular limiting platform b213 in the closed state. When the minimum cross-sectional area of ​​the second sealing member b212 along the radial direction of the second pipe b20 is less than the inner diameter of the second pipe, although the second sealing member b212 occupies a portion of the area of ​​the second pipe b20 in the conducting state, there is a certain space between the second sealing member b212 and the inner wall of the second pipe b20, allowing waste liquid to pass through. Therefore, the second sealing component b212 can ensure that the second controllable guide pipe B2 is closed normally in the closed state, while ensuring that the waste liquid can pass through the second pipe b20 normally in the open state.

[0090] like Figures 5-8 As shown, when the second sealing element b212 is too large, the area between the second sealing element b212 and the inner wall of the second pipe b20 is relatively small, resulting in a relatively high pressure exerted by the waste liquid on the second pipe b20 when it passes through this area. Therefore, when the length of the second sealing element b212 in the radial direction (the width of the second sealing element b212) of the second pipe b20 varies along the axial direction of the second pipe b20, an annular groove C is formed on the inner wall of the second pipe b20. The inner diameter of the annular groove C varies along the axial direction of the second pipe b20. Furthermore, the inner diameters of the second sealing element b212 and the annular groove exhibit the same trend in the radial length variation of the second pipe b20. That is, when the width of the second sealing element b212 is relatively large, the inner diameter of the annular groove is relatively large. In this case, the annular groove can buffer the squeezing pressure of the waste liquid on the second pipe b20 when it passes through this area, increasing the service life of the second pipe b20.

[0091] For example: Figures 5-8 As shown, when the second sealing element b212 is a spherical sealing element, the inner wall of the annular groove is an arc-shaped groove. The streamlined inner wall of the arc-shaped groove can have a good guiding effect on the waste liquid, thereby further reducing the impact of the waste liquid on the inner wall of the second pipe b20 and improving the service life of the second pipe b20.

[0092] like Figures 5-8 As shown, the aforementioned first controllable guide tube B1 may further include a first sealing element such as a sealing ring. The first sealing element is disposed on the surface of the first elastic switch assembly b11 near the opening of the first pipe b10. For example, when the first elastic switch assembly b11 includes a first elastic element b111, a first sealing element b112, a top post b113, and a second annular limiting platform b115 forming the opening of the first pipe b10, the first sealing element is disposed on the surface of the first sealing element b112 that contacts the second annular limiting platform b115. When the first sealing element b112 blocks the area enclosed by the second annular limiting platform b115, even if there is a gap between the first sealing element b112 and the second annular limiting platform b115, the first sealing element can seal the gap, thereby further improving the sealing performance of the first sealing joint.

[0093] Of course, such as Figures 5-8 As shown, the first controllable flow guide tube B1 also includes a second sealing element for sealing the first gap X1. The second sealing element can be a sealing ring or the like. The second sealing element is disposed on the surface of the opening of the first pipe b10 away from the first sealing element b112, so as to further improve the sealing performance of the first sealing joint and reduce the possibility of leakage.

[0094] To improve sealing performance, such as Figures 5-8 As shown, the second controllable guide tube B2 also includes a third sealing element, which can be a sealing ring or the like. The third sealing element is disposed on the surface of the second elastic switch assembly b21 near the opening of the second pipe b20. For example, when the second elastic switch assembly b21 includes a second elastic element b211, a second sealing element b212, and a fourth annular limiting platform b214 forming the opening of the second pipe b20, the third sealing element is disposed on the surface of the second sealing element b212 that contacts the fourth annular limiting platform b214. When the second sealing element b212 blocks the area enclosed by the fourth annular limiting platform b214, even if there is a gap between the second sealing element b212 and the fourth annular limiting platform b214, the third sealing element can seal the gap, thereby further improving the sealing performance of the first sealing joint.

[0095] This invention also provides a filter canister replacement method. This filter canister replacement method utilizes the aforementioned conveying equipment. The conveying equipment has a conveying pipe and a first sealing joint. The filter canister 300 contains a liquid such as waste liquid; this liquid is not limited to waste liquid, but can also be ordinary water, chemical reagents, or other liquids. Figure 4 and Figure 11 As shown, the filter replacement method includes:

[0096] Step 100: With the first sealing joint M1 in the conductive state, the liquid in the filter tank 300 is discharged through the conveying pipe 100A.

[0097] Step 200: Replace filter tank 300 with the first sealing joint M1 in the closed state. To facilitate liquid discharge, with the first sealing joint M1 in the open state, the liquid discharged from filter tank 300 via delivery pipe 100A includes:

[0098] like Figure 4 As shown, with the first sealing joint M1 and the second sealing joint M2 in a conductive state, the injection pipe 100B injects gas into the filter tank 300. Under the action of the gas in the filter tank 300, the delivery pipe 100A discharges the liquid from the filter tank 300.

[0099] In practical applications, such as Figure 4 and Figure 9 As shown, the controller CPU can control the opening of the flow regulating valve LF to be equal to 0, so that when the liquid injection pipeline 100B injects gas into the filter tank 300, the pressure in the filter tank 300 is relatively higher than the pressure in the delivery pipeline 100A. This causes the liquid in the filter tank 300 to be squeezed into the delivery pipeline 100A under higher gas pressure and discharged from the delivery pipeline 100A.

[0100] like Figure 4 and Figure 11 As shown, before replacing the filter canister 300 with the first sealing joint M1 in the closed state, the first sealing joint M1 and the second sealing joint M2 are in the conductive state. The above-mentioned filter canister replacement method also includes...

[0101] Step 100-1: When the internal pressure of the delivery pipeline 100A is less than the internal pressure of the filter tank 300, the first sealing joint M1 and / or the delivery pipeline 100A are positively flushed with liquid. It should be understood that steps 110, 120 and 100-1 can be performed simultaneously or at different times.

[0102] Step 100-2: When the internal pressure of the delivery pipeline 100A is greater than the internal pressure of the filter tank 300, reverse cleaning is performed on the first sealing joint M1 and / or the delivery pipeline 100A using liquid. It should be understood that steps 110, 120, and 100-2 can be performed simultaneously or at different times. Either step 100-1 or step 100-2 may be performed.

[0103] In practical applications, such as Figure 4 and Figure 10As shown, the chemical concentration in the first sealing joint M1 and the delivery pipe 100A can be detected using a chemical solution sensor S1. When the chemical concentration is less than a certain threshold, such as (mass concentration less than 10%), the controller CPU controls the flow regulating valve LF to decrease its opening, making the flow rate of gas injected into the filter tank 300 through the injection pipe 100B greater than the flow rate of liquid injected into the second delivery pipe PG2. At this time, during the discharge of waste liquid from the delivery pipe 100A, the first sealing joint M1 is positively flushed with the liquid. When the chemical concentration is greater than a certain threshold, such as (mass concentration less than 15%), the controller CPU controls the flow regulating valve LF to increase its opening, making the flow rate of gas injected into the filter tank 300 through the injection pipe 100B less than the flow rate of liquid injected into the second delivery pipe PG2. At this time, during the discharge of waste liquid from the delivery pipe 100A, the first sealing joint M1 is reversely flushed with the liquid.

[0104] like Figure 4 , Figure 10 and Figure 11 As shown, after replacing the filter canister 300 in the closed state at the first sealing joint M1, the filter canister replacement method further includes:

[0105] Step 300: If the first sealing joint M1 leaks, close the delivery pipe 100A to reduce the possibility of air and liquid leakage. Alternatively, the injection pipe 100B can be closed, or both the injection pipe 100B and the delivery pipe 100A can be closed simultaneously for double-safety shut-off. In practical applications, the controller CPU can acquire the signal detected by the leakage sensor S2. When this signal indicates leakage, the controller CPU closes the delivery pipe 100A and / or the injection pipe 100B based on this signal. It should be understood that there are various ways to close the delivery pipe 100A and / or the injection pipe 100B. It could be closing the corresponding drain valve on the delivery pipe 100A, the first sealing joint M1, or closing the injection valve on the injection pipe 100B or the second sealing joint M2.

[0106] As can be seen from the above, the filter canister replacement method provided by this invention can complete the filter canister replacement in a maximum of three steps—forward rinsing, reverse rinsing, and filter canister replacement—while ensuring no leakage of waste liquid. Furthermore, it allows for further testing of the first sealing joint for leakage after filter canister replacement to ensure the normal operation of the conveying equipment. The entire filter canister replacement process is reduced from 3 hours to less than 1 hour, significantly improving replacement efficiency. Moreover, the replacement process eliminates the need for a vacuum pump and gas scrubber, thereby reducing replacement costs.

[0107] In the description of the above embodiments, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0108] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A conveying device, characterized in that, The conveying device is used to deliver chemical liquid into a process chamber. It includes a conveying pipeline and a first sealing joint. The conveying pipeline includes a first conveying pipe and a second conveying pipe. The first sealing joint includes a first controllable guide pipe, a second controllable guide pipe, and a sealing sleeve fitted onto the first and second controllable guide pipes. The first controllable guide pipe is connected to the first conveying pipe, and the second controllable guide pipe is connected to the second conveying pipe. The first controllable guide pipe includes a first pipe and a first elastic switch assembly disposed within the first pipe. The second controllable guide pipe includes a second pipe and a second elastic switch assembly disposed within the second pipe. The first elastic switch assembly includes a first elastic element, a first sealing element, and a top post disposed on the first sealing element, all located within the first pipe. The second elastic switch assembly includes a second elastic element and a second sealing element, both located within the second pipe. The first sealing joint has a conducting state and a closed state. Both the first controllable flow guide tube and the second controllable flow guide tube are used to conduct in the conducting state and to close in the closed state. The first controllable flow guide tube and the second controllable flow guide tube have a first gap in the conducting state. The sealing sleeve is used to seal the first gap in the conducting state. The delivery pipe is connected to the filter tank, which contains liquid. When the first sealing joint is in a conductive state, the delivery pipe discharges the liquid from the filter tank; when the first sealing joint is in a closed state, the filter tank is replaced. The second controllable guide tube and the sealing sleeve are locked in the conducting state; the second controllable guide tube and the sealing sleeve are unlocked in the closed state; a second gap is formed between the sealing sleeve and the first controllable guide tube, and the wall of the second controllable guide tube extends into the second gap; the second gap includes a conducting area and a closing area distributed along the depth increasing direction of the second gap, and the depth direction of the second gap is the same as the axial direction of the sealing sleeve; one end of the wall of the second controllable guide tube extending into the second gap is in the conducting area in the conducting state and in the closing area in the closed state.

2. The conveying device according to claim 1, characterized in that, The sealing sleeve is used to detachably fit with the second controllable flow guide tube; and / or, The inner wall of the second controllable guide tube is in surface contact with the inner wall of the first controllable guide tube.

3. The conveying device according to claim 2, characterized in that, The outer wall of the first controllable guide tube has a limiting sleeve that engages within the sealing sleeve; wherein, The sealing sleeve includes a sleeve and a fitting sleeve disposed at one end of the sleeve. The fitting sleeve is nested on the first controllable guide tube, and the limiting sleeve is located inside the sleeve. The difference between the inner diameter of the sleeve and the outer diameter of the first controllable guide tube is greater than or equal to the wall thickness of the second controllable guide tube, and less than the inner diameter of the second controllable guide tube.

4. The conveying device according to claim 3, characterized in that, The first elastic switch assembly is used to control the first pipe to be in the closed state when it is in the closed state, and to control the first pipe to be in the open state when it is squeezed by the second elastic switch assembly when it is in the open state; the second elastic switch assembly is used to control the second pipe to be in the closed state when it is in the closed state, and to control the second pipe to be in the open state when it is squeezed by the first elastic switch assembly when it is in the open state.

5. The conveying device according to claim 1, characterized in that, The first sealing member is located between the second elastic member and the top post, and the top post is located between the first sealing member and the opening of the first pipe; the first end of the first elastic member is disposed in the first pipe, and the surface of the first sealing member facing away from the top post is disposed at the second end of the first elastic member; the second sealing member is located between the second elastic member and the opening of the second pipe, the first end of the second elastic member is disposed in the second pipe, and the second sealing member is disposed at the second end of the second elastic member; The first sealing member is used to seal the opening of the first pipe in the closed state, and in the open state, it is subjected to the squeezing force of the second sealing member transmitted by the top column to control the opening of the second pipe to be in the open state; The second sealing member is used to seal the opening of the second pipe in the closed state, and is subjected to the squeezing force of the top column in the open state to control the opening of the second pipe to be in the open state.

6. The conveying device according to claim 5, characterized in that, The first resilient switch assembly further includes a first annular limiting platform, which is disposed on the inner wall of the first pipe, and the first end of the first resilient element is disposed on the first annular limiting platform; and / or, The first resilient switch assembly further includes a second annular limiting platform forming the opening of the first pipe; the minimum cross-sectional area of ​​the first sealing member along the radial direction of the first pipe is smaller than the inner diameter of the first pipe; the maximum cross-sectional area of ​​the first sealing member in the radial direction of the second annular limiting platform is larger than the inner diameter area of ​​the second annular limiting platform; the minimum cross-sectional area of ​​the top post in the radial direction of the second annular limiting platform is smaller than the inner diameter area of ​​the second annular limiting platform; and / or, The second resilient switch assembly further includes a third annular limiting platform, which is disposed on the inner wall of the second pipe, and the first end of the second resilient element is disposed on the third annular limiting platform; and / or, The second resilient switch assembly further includes a fourth annular limiting platform forming the opening of the second pipe, wherein the minimum cross-sectional area of ​​the second sealing member along the radial direction of the second pipe is smaller than the inner diameter of the second pipe, and the maximum cross-sectional area of ​​the second sealing member in the radial direction of the fourth annular limiting platform is larger than the inner diameter area of ​​the fourth annular limiting platform; and / or, The length of the second sealing element in the radial direction of the second pipe varies along the axial direction of the second pipe, and an annular groove is formed on the inner wall of the second pipe; the inner diameter of the annular groove varies along the axial direction of the second pipe.

7. The conveying device according to claim 3, characterized in that, The sealing joint also includes a driving device, which is used to drive the first controllable guide tube and the second controllable guide tube to move relative to each other, so that the first controllable guide tube and the second controllable guide tube switch between the on state and the off state.

8. The conveying device according to claim 2, characterized in that, The conveying device further includes a liquid injection pipe and a second sealing joint; the liquid injection pipe includes a first liquid injection pipe and a second liquid injection pipe, and the second sealing joint connects the first liquid injection pipe and the second liquid injection pipe together, and the second sealing joint has the same structure as the first sealing joint.

9. The conveying device according to claim 8, characterized in that, The injection pipeline further includes a third injection pipe and a flow regulating valve disposed on the third injection pipe, wherein the third injection pipe connects the first injection pipe and the second delivery pipe; wherein... The conveying equipment also includes a controller electrically connected to the flow regulating valve, which is used to control the opening degree of the flow regulating valve and to perform reverse flushing or forward flushing on the first sealing joint.

10. The conveying device according to claim 9, characterized in that, The conveying device further includes a controller, which is used to control the first sealing joint to be in a conductive or closed state; wherein... The conveying device also includes a leakage sensor connected to the controller signal, used to detect whether the first sealing joint is leaking; The controller is also used to close at least the injection pipe and the delivery pipe in the event of leakage from the first sealing joint.

11. A method for replacing a filter canister, characterized in that, The application uses a conveying device with a conveying pipeline and a first sealing joint, wherein the filter tank contains liquid; the filter tank replacement method includes: With the first sealing joint in a conductive state, the liquid in the filter tank is discharged through the delivery pipeline; Replace the filter canister at the first sealing joint in the closed state.

12. The filter canister replacement method according to claim 11, characterized in that, The conveying equipment further includes a liquid injection pipe and a second sealing joint, wherein the first sealing joint is in a conductive state, and the liquid discharged from the filter tank by the conveying pipe includes: With the first and second sealing joints in a conductive state, the injection pipe injects chemical solution into the filter tank; Under the action of the chemical solution inside the filter tank, the liquid inside the filter tank is discharged through the delivery pipe.

13. The filter canister replacement method according to claim 12, characterized in that, Before replacing the filter canister in the closed state at the first sealing joint, the filter canister replacement method further includes having the first and second sealing joints in a conductive state. When the internal pressure of the delivery pipeline is less than the internal pressure of the filter tank, the liquid is used to perform a positive flushing of the first sealing joint and / or the delivery pipeline; When the internal pressure of the delivery pipeline is greater than the internal pressure of the filter tank, the liquid is used to perform reverse cleaning on the first sealing joint and / or the delivery pipeline.

14. The filter canister replacement method according to any one of claims 11 to 13, characterized in that, After replacing the filter canister in the closed state at the first sealing joint, the filter canister replacement method further includes: If the first sealing joint leaks, shut off the delivery pipeline.

15. A film-forming system, characterized in that, It includes a process chamber and a conveying device as described in any one of claims 1 to 10, wherein the conveying device includes a conveying pipe that is connected to the process chamber.

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