An accuracy research device for a precision motion platform

Abstract

The present invention provides an accuracy research device for a precision motion platform, which includes a precision motion platform, and also includes a rough reading scale for platform position, a worm and worm gear structure, and a dividing plate. The rough reading scale for platform position is used to achieve a rough reading of the displacement of the tabletop with an accuracy of 0.05 mm. Both ends of the worm are rotatably connected to two support plates respectively, and the worm gear is fixedly connected to one end of the lead screw of the ball screw by a shaft. The dividing plate is fixedly connected coaxially with one end of the worm, and a pointer for cooperating with the dividing plate to indicate the scale on the dividing plate is provided at the upper end of one of the support plates, which is used to indicate the fine reading of the micron-level displacement of the tabletop. The present invention cleverly combines the advantages of a vernier caliper, a micrometer, and a worm and worm gear structure, improves the reading accuracy of the precision linear platform to the micron level, and utilizes the characteristic of the high transmission ratio of the worm and worm gear structure to achieve the subdivision of the lead screw movement, providing a guarantee for the micron-level reading.

Description

Technical Field

[0001] The invention belongs to the technical field of precision motion platforms, and in particular relates to a device for studying the accuracy of the relationship between the rotation of a lead screw and the movement of a tabletop of a precision motion platform. Background Art

[0002] Precision linear platforms have the characteristics of small size, high quality and high precision. They are widely used in high-end manufacturing fields such as aerospace, chip manufacturing, ultra-precision machining, high-energy beam control, laser machining, etc. In the use of precision linear platforms, the most important thing is the motion accuracy of the precision motion platform. Ensuring the motion accuracy of the precision linear platform can improve the machining accuracy. In the architecture of the precision linear platform, the ball screw is a key component of transmission conversion. The actual movement of the screw has a direct impact on the output of the motion distance of the precision linear platform, which is related to the accuracy of the precision linear platform. Therefore, the transmission research of the screw is of great significance.

[0003] In the screw transmission structure of the existing precision linear platform, the motor outputs the motion, drives the ball screw to rotate through the coupling, and converts the rotational motion into linear motion at the ball screw nut. However, since the precision linear platform usually has a small movement distance, the components have elastic deformation and installation errors, which will cause the screw to lose during the motion transmission process, which has a great impact on the accuracy of the precision linear platform. At present, there is a lack of effective measurement devices for measuring the actual movement of the screw in micro-strokes, which has become an important problem that needs to be solved in the process of precision linear platform accuracy research. Summary of the invention

[0004] The purpose of the present invention is to overcome the problems existing in the above-mentioned prior art and to provide a precision research device for a precision motion platform, which is used for precision research on the relationship between the rotation of the lead screw of the precision motion platform and the movement of the table.

[0005] The technical solution of the present invention is: a precision research device for a precision motion platform, comprising a precision motion platform, the precision motion platform comprising a base, a ball screw is arranged on the base, a screw nut of the ball screw is fixedly connected to the table through a nut seat, and further comprising:

[0006] The platform position rough reading scale includes: a base scale, which is arranged along the movement direction of the table and is arranged on the side wall of the base; a table scale, which is arranged on the side wall of the table and is used to cooperate with the base scale to achieve a rough displacement reading of the table with an accuracy of 0.05mm;

[0007] A worm, one end of which is rotatably connected to the first support plate, and the other end of which is rotatably connected to the second support plate, wherein the first support plate and the second support plate are respectively fixed to the base;

[0008] A turbine, which is engaged with the worm, and the turbine is fixedly connected to one end of the lead screw of the ball screw by a shaft;

[0009] An indexing plate, which is fixedly connected coaxially with one end of the worm. A pointer for cooperating with the indexing plate to indicate the scale on the indexing plate is provided at the upper end of the second support plate. The fine reading of the micron-level displacement of the tabletop is read by the indication of the indexing scale on the indexing plate by the pointer.

[0010] The above-mentioned precision motion platform further includes:

[0011] A bearing seat, which is fixed to one end of the base. A first flange bearing is provided in the bearing seat; the first flange bearing includes an inner ring provided at its center and a flange provided at its outer periphery;

[0012] A motor seat, which is fixedly connected to the first support plate and the second support plate respectively through a connecting column;

[0013] A motor, which is fixed on the motor seat. One end of the lead screw is fixedly connected to the output shaft of the motor through a coupling. The lead screw passes through the inner ring of the first flange bearing and is fixed to the turbine by a locking nut, wherein the locking nut is threadedly connected to the lead screw for fixation;

[0014] A ball structure for reducing friction is provided inside the lead screw nut and the lead screw, and the nut seat is slidably connected to the base.

[0015] The above-mentioned first support plate and the second support plate are both fixed to the base through the threaded holes opened on the end face of the base. The bearing seat is installed at one end of the end face of the base; a groove penetrating through the two end faces of the base is opened in the middle of the base; the upper surface of the base above the groove is a flat structure. Slide rails are respectively fixed on the upper surfaces of the base on both sides of the groove. The bearing seat is also fixed on the upper surfaces of the base on both sides of the groove, and the installation connection surface of the bearing seat and the installation connection surface of the slide rail are fixed on the same plane of the upper surface of the base; the total scale length of the base scale is 8 mm, and the scale accuracy is 1 mm; the total scale length of the tabletop scale is 19 mm, and the scale interval is 0.95 mm. The nut seat is slidably connected to the base through a slider and a slide rail, wherein the nut seat is fixedly connected to the slider, and the slider is slidably connected to the slide rail.

[0016] Guide rail limiting structures are provided on both sides of the above-mentioned second groove to ensure parallel installation of the two slide rails. A ball screw limiting structure is provided at the bottom of the second groove to prevent the lead screw nut from exceeding the maximum stroke and causing irreversible damage to the ball screw, the slider and the slide rail.

[0017] The above-mentioned first support plate and second support plate have the same structure and are symmetrically arranged on both sides of the base; the bottom of the first support plate and the bottom of the second support plate are both provided with a first through hole and a second through hole, and both the first through hole and the second through hole are used for fixedly connecting with the base; threaded holes for fixedly connecting with the connecting column are arranged at the middle positions of the first support plate and the second support plate; through holes are arranged at the upper ends of the first support plate and the second support plate for rotatably connecting the worm; a threaded hole is arranged at the top of the second support plate for the installation and fixation of the pointer.

[0018] The above-mentioned pointer includes a square end and an indicating end. A through hole is arranged in the middle of the square end for the installation and fixation of the pointer. The indicating end is a cylindrical rod body with a diameter of 1 mm and a length of 8 - 10 mm for indicating the scale on the graduated disc.

[0019] A through hole is arranged at the center position of the above-mentioned turbine for the lead screw to pass through; a first annular protrusion with a height of 1 mm and a thickness of 1 mm is arranged at the edge of the through hole at the center of the turbine for pressing the inner ring of the first flange bearing; 20 turbine teeth are arranged circumferentially on the turbine, and the turbine meshes with the worm through the turbine teeth.

[0020] The above-mentioned worm is a single - head worm, and the middle part of the worm body is provided with teeth; both ends of the worm are provided with a smooth shaft structure and are rotatably connected to the corresponding support plate through a second flange bearing; one smooth shaft structure end of the worm is set as a completely smooth shaft end for installing the graduated disc, and at the other smooth shaft structure end of the worm, a thread is arranged near the teeth for thread - connecting with an adjusting nut, and by tightening the adjusting nut, the inner ring of the second flange bearing is pressed.

[0021] A graduated disc through hole is arranged at the center position of the above - mentioned graduated disc for the completely smooth shaft end of the worm to pass through; a second annular protrusion with a height of 1 mm and a thickness of 1 mm is arranged at one side edge of the graduated disc through hole for pressing the inner ring of the second flange bearing; graduated disc scales are arranged circumferentially on the graduated disc, dividing the circumference of the graduated disc into 50 equal parts, and cooperating with the transmission ratio of the worm and gear 1:20, accurately subdividing the rotation of the lead screw to the micron reading.

[0022] The adjusting nut is provided with an adjusting nut screw hole at its center for the corresponding worm optical axis end to pass through and be threadedly connected to the thread provided on the optical axis end; a third annular protrusion with a height of 1 mm and a thickness of 1 mm is provided on one side edge of the adjusting nut screw hole for pressing the inner ring of the corresponding second flange bearing; an internal thread of the adjusting nut is provided in the adjusting nut screw hole for being threadedly connected to the said thread, and by adjusting the position of the adjusting nut on the said thread during installation, the pressing of the support plate corresponding to the second flange bearing of the worm is achieved; the motor is fixed to the motor base by bolts; a circular hole structure is provided at the center of the bearing seat for installing the first flange bearing; light holes are provided on both sides of the bearing seat for being fixedly connected to the base by bolts; the two slider guides are located between the tabletop and the base and are fixed to the base by bolts.

[0023] Advantages of the present invention: The present invention provides a precision research device for the precision of a precision motion platform, having the following technical advantages:

[0024] 1. The device cleverly combines the advantages of vernier calipers, micrometers, and worm gears, improving the reading accuracy of the precision linear platform to the micron level. In the device, the scales on the sides of the tabletop and the base form a 20-division vernier caliper with a reading accuracy of 50 microns; using the worm gear through the micrometer principle, the circumference of the dial is divided into 50 equal parts, and moving one scale represents moving 1 micron. When reading, first read the 20-division vernier caliper formed by the tabletop and the base to obtain the position reading at the 0.05 mm level, and then read the scale on the dial, that is, the 0 - 50 micron scale, and the sum of the two is the real-time scale.

[0025] 2. The device adopts a worm gear structure and utilizes its high transmission ratio characteristic to achieve the subdivision of the lead screw movement, providing a guarantee for micron-level reading. The worm is connected and fixed to the lead screw to amplify the lead screw movement. The rotation angle of the worm is 20 times that of the lead screw. Since the precision linear platform moves 1 mm when the lead screw rotates one week, the precision linear platform moves 50 microns when the worm rotates one week. The lead screw is divided into 50 parts by the dial fixed to the worm, that is, one scale represents 1 micron, realizing the subdivision of the 50-micron accuracy of the 20-division vernier caliper formed by the tabletop and the base. The reading at this time is the micron number.

[0026] 3. In addition, the device sets the bearing seat connection surface and the guide rail connection surface on the same plane to ensure that there is no parallelism error between the bearing seat connection surface and the guide rail connection surface, ensuring that their flatness errors are the same, while reducing the variation range of dimensional tolerances and reducing the precision error sources. Description of the Drawings

[0027] Figure 1 It is a schematic structural diagram of the precision research device for the precision of the precision motion platform of the present invention.

[0028] Figure 2 This is a schematic structural diagram of the precision research device for the precision motion platform of the present invention.

[0029] Figure 3 This is a schematic structural diagram of the flange bearing of the present invention.

[0030] Figure 4 This is a schematic structural diagram of the base of the present invention.

[0031] Figure 5 This is a schematic structural diagram of the tabletop of the present invention.

[0032] Figure 6 This is a schematic structural diagram of the pointer of the present invention.

[0033] Figure 7 This is a schematic structural diagram of the bearing block of the present invention.

[0034] Figure 8 This is a schematic structural diagram of the two support plates of the present invention.

[0035] Figure 9 This is a schematic structural diagram of the turbine of the present invention.

[0036] Figure 10 This is a schematic structural diagram of the worm of the present invention.

[0037] Figure 11 This is a schematic structural diagram of the indexing plate of the present invention.

[0038] Figure 12 This is a schematic structural diagram of the adjusting nut of the present invention.

[0039] Figure 13 This is a schematic structural diagram of the ball screw of the present invention. Specific Embodiments

[0040] Next, with reference to the accompanying drawings, a specific embodiment of the present invention will be described in detail. However, it should be understood that the protection scope of the present invention is not limited by the specific embodiments.

[0041] See Figures 1-13 , this embodiment provides a precision research device for a precision motion platform, which is used for the precision research of the relationship between the rotation of the lead screw and the movement of the tabletop of the precision motion platform.

[0042] The precision research device for the precision motion platform of the present invention includes a precision motion platform, which includes a base 12. A ball screw 10 is provided on the base 12. The screw nut 101 of the ball screw 10 is fixedly connected to the table 8 through a nut seat 11. The precision research device for the precision motion platform also includes components such as a rough reading scale for the platform position, a worm 3, a turbine 16, and a dividing disk 19. Among them, the rough reading scale for the platform position includes a base scale 123 and a table scale 81. The base scale 123 is arranged along the moving direction of the table 8 and is provided on the side wall of the base 12. The table scale 81 is provided on the side wall of the table 8 and is used to cooperate with the base scale 123 to achieve a rough reading of the displacement of the table 8 with an accuracy of 0.05 mm. One end of the worm 3 is rotatably connected to the first support plate 6a, and the other end is rotatably connected to the second support plate 6b. The first support plate 6a and the second support plate 6b are respectively fixed on the base 12. The turbine 16 cooperates with the worm 3, and the turbine 16 is fixedly connected to one end of the screw 102 of the ball screw 10 by a shaft. The dividing disk 19 is fixedly connected coaxially with one end of the worm 3. A pointer 15 for cooperating with the dividing disk 19 to indicate the scale on the dividing disk 19 is provided at the upper end of the second support plate 6b. The fine reading of the micron-level displacement of the table 8 is read through the indication of the dividing scale on the dividing disk 19 by the pointer 15. Specifically, on the basis of the 0.05 mm accuracy of the rough reading scale for the platform position, further, the dividing scale on the dividing disk 19 and the transmission ratio of the worm and gear are used to divide the screw rotation amount into 1000 parts, so that the reading accuracy reaches 1 micron, and the reading range is set to 0 - 50 microns. The position reading of the 0.05 micron accuracy level is read according to the scale between the table and the base, and then the micron-level displacement indication is read at the dividing disk position. Each grid represents 1 micron, and the sum of the two is the final position indication of the table 8.

[0043] Further, the precision motion platform further includes a bearing seat 7, a motor seat 2, and a motor 1. The bearing seat 7 is fixed at one end of the base 12, and a first flange bearing 5 is provided in the bearing seat 7. The first flange bearing 5 includes an inner ring 51 provided at its center and a flange 52 provided at its outer periphery. The motor seat 2 is fixedly connected to the first support plate 6a and the second support plate 6b respectively through a connecting column 14. The motor 1 is fixed on the motor seat 2. One end of the screw 102 is fixedly connected to the output shaft of the motor 1 through a coupling 18. The screw 102 passes through the inner ring of the first flange bearing 5 and is fixed to the turbine 16 through a locking nut 17. The locking nut 17 is threadedly connected to the screw 102 for fixation. A ball structure for reducing friction is provided inside the screw nut 101 and the screw 102. The nut seat 11 is slidably connected to the base 12.

[0044] Furthermore, both the first support plate 6a and the second support plate 6b are fixed to the base 12 through threaded holes formed in the end face 121 of the base 12, and the bearing housing 7 is installed at one end of the end face 121 of the base 12; a groove penetrating through the two end faces 121 of the base 12 is formed in the middle of the base 12 to ensure that the bearing housing 7 has sufficient installation space; the upper surface of the base 12 above the groove is of a flat structure, and a slide rail 9 is fixed to the upper surface of the base 12 on both sides of the groove respectively. The bearing housing 7 is also fixed to the upper surface of the base 12 on both sides of the groove, and the installation connection surfaces of the bearing housing 7 and the slide rail 9 are fixed on the same plane of the upper surface of the base 12, so as to ensure that there is no parallelism error between the connection surface of the bearing housing and the connection surface of the slide rail, ensure that their flatness errors are the same, reduce the variation range of dimensional tolerances at the same time, and reduce the accuracy error sources; the total scale length of the base scale 123 is 8 mm, and the scale accuracy is 1 mm; the total scale length of the table scale 81 is 19 mm, and the scale interval is 0.95 mm, which is used to cooperate with the base scale 123 to realize the position accuracy subdivision function. Combined with the subdivision of the worm and worm gear and the dividing disk, the moving distance of the precision motion platform can be read at the micron level. A row of threaded holes is arranged on both sides of the upper surface of the base 12 respectively for fixedly installing the guide rail slider 9; the groove includes a first groove 122 located at one end of the base 12 for cooperating with the installation of the bearing housing 7 and a second groove 125 for accommodating the nut seat 11; the nut seat 11 is slidably connected to the base 12 through a slider and a slide rail 9, wherein the nut seat 11 is fixedly connected to the slider, and the slider is slidably connected to the slide rail 9.

[0045] Furthermore, guide rail limiting structures are arranged on both sides of the second groove 125 to ensure that the two slide rails 9 are installed in parallel, and a ball screw limiting structure 124 is arranged at the bottom of the second groove 125 to prevent the lead screw nut 101 from exceeding the maximum stroke and causing irreversible damage to the ball screw 10 and the slider and the slide rail 9.

[0046] Furthermore, the first support plate 6a and the second support plate 6b have the same structure and are symmetrically arranged on both sides of the base 12; first through holes 61 and second through holes 62 are arranged at the bottoms of the first support plate 6a and the second support plate 6b respectively, and the first through holes 61 and the second through holes 62 are both used for fixedly connecting with the base 12; threaded holes for fixedly connecting with the connecting column 14 are arranged at the middle positions of the first support plate 6a and the second support plate 6b respectively; through holes 63 are arranged at the upper ends of the first support plate 6a and the second support plate 6b respectively for rotatably connecting the worm 3; a threaded hole 64 is arranged at the top of the second support plate 6b for fixedly installing the pointer 15.

[0047] Further, the pointer 15 includes a square end 151 and an indicating end 152. A through hole is provided in the middle of the square end 151 for the installation and fixation of the pointer 15. The indicating end 152 is a cylindrical rod with a diameter of 1 mm and a length of 8 - 10 mm, which is used to indicate the scale on the graduated disk 19.

[0048] Further, a through hole is provided at the central position 162 of the turbine 16 for the lead screw 102 to pass through; a first annular protrusion 161 with a height of 1 mm and a thickness of 1 mm is provided at the edge of the central through hole of the turbine 16 for pressing the inner ring of the first flange bearing 5; 20 turbine teeth are provided circumferentially on the turbine 16, and the turbine 16 meshes with the worm 3 through the turbine teeth.

[0049] Further, the worm 3 is a single - head worm, and the middle part of the worm body 31 of the worm 3 is provided with teeth; both ends of the worm 3 are provided with a smooth - shaft structure and are rotatably connected to the corresponding support plates through the second flange bearings 20; one smooth - shaft structure end of the worm 3 is set as a completely smooth - shaft end 32 for installing the graduated disk 19, and at the other smooth - shaft structure end of the worm 3, a thread 33 is provided near the tooth position for threaded connection with the adjusting nut 4. By tightening the adjusting nut 4, the inner ring of the second flange bearing 20 is pressed to ensure the stability of the worm 3 during rotation.

[0050] Further, a graduated - disk through hole 191 is provided at the central position of the graduated disk 19 for the completely smooth - shaft end 32 of the worm 3 to pass through; a second annular protrusion 192 with a height of 1 mm and a thickness of 1 mm is provided at one - side edge of the graduated - disk through hole 191 for pressing the inner ring of the second flange bearing 20 to ensure that the graduated disk 19 and the worm 3 rotate simultaneously; graduated - disk scales 193 are provided circumferentially on the graduated disk 19, and the circumference of the graduated disk 19 is equally divided into 50 grids, which is matched with the transmission ratio of the worm and worm gear of 1:20 to accurately subdivide the rotation of the lead screw 102 to the micron reading.

[0051] Furthermore, a regulating nut screw hole 41 is provided at the center of the regulating nut 4 for the corresponding worm optical axis end to pass through and be threadedly connected to the thread 33 provided on the optical axis end; a third annular protrusion 42 with a height of 1 mm and a thickness of 1 mm is provided on one side edge of the regulating nut screw hole 41 for pressing the inner ring of the corresponding second flange bearing 20 to ensure the stable installation of the worm 3; a regulating nut internal thread 43 is provided in the regulating nut screw hole 41 for being threadedly connected to the thread 33. By adjusting the position of the regulating nut 4 on the thread 33 during installation, the pressing of the support plate corresponding to the second flange bearing 20 of the worm 3 is achieved; the motor 1 is fixed to the motor base 2 by bolts; a circular hole structure 72 is provided at the center of the bearing block 7 for installing the first flange bearing 5; light holes 71 are provided on both sides of the bearing block 7 for being fixedly connected to the base 12 by bolts; the two slide rails 9 are located between the table 8 and the base 12 and are fixed to the base 12 by bolts to ensure that the slider can move smoothly and the movement direction does not change.

[0052] When the present invention is in use, the lead screw shaft is driven by a stepping motor. The lead screw shaft converts the rotational motion into translational motion at the position of the ball screw, and the reading at the 0.1 mm level is determined by the scale between the table and the base; the movement of the lead screw simultaneously drives the rotation of the worm. The rotational movement amount is amplified 20 times through the worm and worm gear structure, and the movement can be subdivided by a dividing disk with 50 divisions placed on the worm to achieve precise micron-level position reading. At the same time, in cooperation with the laser interferometer for real-time measurement of the movement distance of the precision linear platform and the encoder for measurement of the movement of the stepping motor, the influence of the ball screw on the precision of the precision linear platform during the transmission process can be realized. The present invention reduces the influence of the flatness error and parallelism error caused by machining errors on the lead screw pose by setting the connection planes of the bearing block and the slide rails with the base on the same plane, and cleverly combines the principles of the vernier caliper and the micrometer and the characteristics of the high transmission ratio of the worm and worm gear, realizing the research on the influence of the lead screw on the precision during the movement transmission process in the precision motion platform.

[0053] The above-disclosed are only several specific embodiments of the present invention. However, the embodiments of the present invention are not limited thereto, and any changes that can be thought of by those skilled in the art should fall within the protection scope of the present invention.

Claims

1. A precision research device for the precision of a precision motion platform, comprising a precision motion platform, the precision motion platform including a base (12), a ball screw (10) is provided on the base (12), and a lead screw nut (101) of the ball screw (10) is fixedly connected to a tabletop (8) through a nut seat (11), characterized in that, Further included are: Coarse reading scale for platform position, including: base scale (123) arranged along the movement direction of the tabletop (8) and provided on the side wall of the base (12); tabletop scale (81) provided on the side wall of the tabletop (8) for cooperating with the base scale (123) to achieve a coarse reading of the 0.05 mm displacement of the tabletop (8). Worm (3) with one end rotatably connected to the first support plate (6a) and the other end rotatably connected to the second support plate (6b), and the first support plate (6a) and the second support plate (6b) are respectively fixed on the base (12). Turbo (16) cooperating with the worm (3), and the turbo (16) is fixedly axially connected to one end of the lead screw (102) of the ball screw (10). Index plate (19) fixedly connected coaxially with one end of the worm (3), and a pointer (15) for cooperating with the index plate (19) to indicate the scale on the index plate (19) is provided at the upper end of the second support plate (6b). The fine reading of the micron-level displacement of the tabletop (8) is read through the indication of the graduation scale on the index plate (19) by the pointer (15). The precision motion platform further includes: Bearing seat (7) fixed at one end of the base (12), and a first flange bearing (5) is provided inside the bearing seat (7); the first flange bearing (5) includes an inner ring (51) provided at its center and a flange (52) provided at its outer periphery. Motor seat (2) fixedly connected to the first support plate (6a) and the second support plate (6b) respectively through a connecting column (14). Motor (1) fixed on the motor seat (2), one end of the lead screw (102) is fixedly connected to the output shaft of the motor (1) through a coupling (18), the lead screw (102) passes through the inner ring of the first flange bearing (5) and is fixed to the turbo (16) through a locking nut (17), wherein the locking nut (17) is threadedly connected to the lead screw (102) for fixation. A ball structure for reducing friction is provided inside the lead screw nut (101) and the lead screw (102), and the nut seat (11) is slidably connected to the base (12).

2. The precision research device for a precision motion platform according to claim 1, characterized in that The first support plate (6a) and the second support plate (6b) are both fixed to the base (12) through threaded holes opened on the end face (121) of the base (12). The bearing block (7) is installed at one end of the end face (121) of the base (12). A groove penetrating through the two end faces (121) of the base (12) is formed in the middle of the base (12). The upper surface of the base (12) above the groove is a planar structure. Slide block guides (9) are respectively fixed on the upper surfaces of the base (12) on both sides of the groove. The bearing block (7) is also fixed on the upper surfaces of the base (12) on both sides of the groove, and the installation connection surface of the bearing block (7) and the installation connection surface of the slide block guide (9) are fixed on the same plane of the upper surface of the base (12). The total scale length of the base scale (123) is 8 mm, and the scale accuracy is 1 mm. The total scale length of the table scale (81) is 19 mm, and the scale interval is 0.95 mm. The nut seat (11) is slidably connected to the base (12) through a slide block and the slide block guide (9), wherein the nut seat (11) is fixedly connected to the slide block, and the slide block is slidably connected to the slide block guide (9).

3. The precision research device for a precision motion platform according to claim 2, characterized in that, The groove includes a first groove (122) located at one end of the base (12) for fitting and installing the bearing block (7) and a second groove (125) for accommodating the nut seat (11). Guide rail limiting structures are arranged on both sides of the second groove (125) to ensure parallel installation of the two slide block guides (9). A ball screw limiting structure (124) is arranged at the bottom of the second groove (125) to prevent the lead screw nut (101) from exceeding the maximum stroke and causing irreversible damage to the ball screw (10), the slide block, and the slide block guide (9).

4. The precision research device for a precision motion platform according to claim 3, characterized in that, The first support plate (6a) and the second support plate (6b) have the same structure and are symmetrically arranged on both sides of the base (12). First through holes (61) and second through holes (62) are arranged at the bottoms of the first support plate (6a) and the second support plate (6b). The first through holes (61) and the second through holes (62) are both used for fixedly connecting with the base (12). Threaded holes for fixedly connecting with the connecting column (14) are arranged at the middle positions of the first support plate (6a) and the second support plate (6b). Through holes (63) are arranged at the upper ends of the first support plate (6a) and the second support plate (6b) for rotatably connecting the worm (3). A threaded hole (64) is arranged at the top of the second support plate (6b) for installing and fixing the pointer (15).

5. The precision research device for a precision motion platform according to claim 4, characterized in that, The pointer (15) includes a square end (151) and an indicating end (152). A through hole is arranged in the middle of the square end (151) for installing and fixing the pointer (15). The indicating end (152) is a cylindrical rod with a diameter of 1 mm and a length of 8 - 10 mm for indicating the scale on the graduated disk (19).

6. The precision research device for a precision motion platform as described in claim 5, characterized in that, A through hole is provided at the central position (162) of the turbine (16) for the lead screw (102) to pass through; a first annular protrusion (161) with a height of 1 mm and a thickness of 1 mm is provided at the edge of the central through hole of the turbine (16) for pressing the inner ring of the first flange bearing (5); 20 turbine teeth are provided circumferentially on the turbine (16), and the turbine (16) meshes with the worm (3) through the turbine teeth.

7. The precision research device for a precision motion platform according to claim 6, characterized in that The worm (3) is a single-start worm, and the middle rod body (31) of the worm (3) is provided with teeth; both ends of the worm (3) are provided with a smooth shaft structure and are rotatably connected to the corresponding support plates through the second flange bearings (20); one smooth shaft structure end of the worm (3) is provided as a completely smooth shaft end (32) for installing the indexing disc (19), and at the other smooth shaft structure end of the worm (3), a thread (33) is provided near the teeth for threaded connection with the adjusting nut (4), and by tightening the adjusting nut (4), the inner ring of the second flange bearing (20) is pressed.

8. The precision research device for a precision motion platform according to claim 7, characterized in that, A through hole (191) of the indexing disc is provided at the central position of the indexing disc (19) for the completely smooth shaft end (32) of the worm (3) to pass through; a second annular protrusion (192) with a height of 1 mm and a thickness of 1 mm is provided at one side edge of the through hole (191) of the indexing disc for pressing the inner ring of the second flange bearing (20); indexing disc scales (193) are provided circumferentially on the indexing disc (19), dividing the circumference of the indexing disc (19) into 50 equal parts, and cooperating with the transmission ratio of 1:20 of the worm and worm gear to accurately subdivide the rotation of the lead screw (102) to a micrometer reading.

9. The precision research device for a precision motion platform according to claim 7, characterized in that, An adjusting nut screw hole (41) is provided at the center of the adjusting nut (4) for the corresponding worm smooth shaft end to pass through and be threadedly connected to the thread (33) provided on the smooth shaft end; a third annular protrusion (42) with a height of 1 mm and a thickness of 1 mm is provided at one side edge of the adjusting nut screw hole (41) for pressing the inner ring of the corresponding second flange bearing (20); an internal thread (43) of the adjusting nut is provided in the adjusting nut screw hole (41) for threaded connection with the thread (33), and by adjusting the position of the adjusting nut (4) on the thread (33) during installation, the pressing of the support plate corresponding to the second flange bearing (20) of the worm (3) is realized; the motor (1) is fixed to the motor base (2) by bolts; a circular hole structure (72) is provided at the center of the bearing seat (7) for installing the first flange bearing (5); light holes (71) are provided on both sides of the bearing seat (7) for fixed connection with the base (12) by bolts; the two slider guides (9) are located between the tabletop (8) and the base (12) and are fixed to the base (12) by bolts.

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