Configuration file generation method and device, semiconductor process equipment and general control device

Abstract

The application discloses a configuration file generation method and device, a semiconductor process equipment and a general control device. In the configuration file generation process, the target equipment upper and lower computer parameters are automatically acquired through a data acquisition interface, and the configuration file is generated based on the acquired parameters. In the configuration file generation process, manual access to the storage addresses of the upper computer parameters and the lower computer parameters is not required to check each parameter, the problem that manual query of the configuration parameters may cause omission or a long required time is solved, and the purpose of reducing the time and labor cost required by the configuration file generation method is achieved. In addition, a factory end user can obtain the configuration parameters in the configuration file through the method, comprehensively understands the configuration information of the upper computer and the lower computer of the target equipment, and performs parameter subscription and other configuration operations on the configuration parameters according to the obtained configuration information, so that the process of the factory end user in the configuration of the configuration parameters is simplified.

Description

Technical Field

[0001] This specification relates to the field of equipment manufacturing technology, and more specifically, to a method, apparatus, semiconductor process equipment, central control device, computing device, and computer-readable storage medium for generating configuration files. Background Technology

[0002] Before equipment is delivered for use, corresponding configuration files can be set for it to reduce the deployment difficulty and simplify the deployment process for users. This is especially important for medium and large-sized equipment, which has numerous configuration parameters.

[0003] However, the current method for generating device configuration files takes a long time. Summary of the Invention

[0004] To address the aforementioned technical problems, this specification provides a method, apparatus, semiconductor process equipment, and overall control device for generating configuration files, thereby reducing the time required for the configuration file generation method.

[0005] To achieve the above technical objectives, the embodiments of this specification provide the following technical solutions:

[0006] Firstly, embodiments of this specification provide a method for generating a configuration file. This method is used to generate a configuration file for a target device, the target device including a host computer and a slave computer. The method for generating the configuration file includes:

[0007] In response to the generation command, configuration parameters are obtained through the data acquisition interface. The configuration parameters include host computer parameters and slave computer parameters. The host computer parameters are used to describe the configuration information of the host computer, and the slave computer parameters are used to describe the configuration information of the slave computer.

[0008] Based on the configuration parameters, a configuration file is generated.

[0009] In some implementations, the generation instruction includes a first generation instruction carrying type information of configuration parameters, and the step of obtaining the configuration parameters through a data acquisition interface in response to the generation instruction includes:

[0010] In response to the first generation instruction, the configuration parameters corresponding to the type information of the configuration parameters are obtained through the data acquisition interface.

[0011] In some implementations, the generation instruction includes a second generation instruction carrying a generation method, the generation method including an initial generation method for a configuration file, and the step of obtaining configuration parameters through a data acquisition interface includes: obtaining configuration parameters corresponding to the generation method through the data acquisition interface; the step of generating a configuration file based on the configuration parameters includes:

[0012] If the second generation instruction indicates that the generation method is the initial generation method of the configuration file, the configuration file is generated according to the obtained configuration parameters.

[0013] In some implementations, generating the configuration file based on the acquired configuration parameters includes:

[0014] In response to a parameter selection instruction, the configuration file is generated according to the configuration parameters corresponding to the parameter selection instruction;

[0015] The parameter selection instruction corresponds to at least one of the configuration parameters.

[0016] In some implementations, the generation method also includes a configuration file update generation method;

[0017] If the second generation instruction indicates that the generation method is the update generation method of the configuration file;

[0018] The process of obtaining the configuration parameters corresponding to the generation method includes:

[0019] Obtain the current configuration parameters from the host computer and the slave computer;

[0020] The process of generating a configuration file based on the configuration parameters includes:

[0021] Parse the configuration file to be updated carried by the second generation instruction to obtain the configuration parameters to be updated;

[0022] Based on the current configuration parameters and the configuration parameters to be updated, an updated configuration file is generated.

[0023] In some implementations, generating the updated configuration file based on the current configuration parameters and the configuration parameters to be updated includes:

[0024] In response to the parameter selection command, the updated configuration file is generated based on the configuration parameters to be updated and the distinguishing configuration parameters corresponding to the parameter selection command;

[0025] The distinguishing configuration parameters include those that exist in the current configuration parameters but do not exist in the configuration parameters to be updated; the parameter selection instruction corresponds to at least one of the distinguishing configuration parameters.

[0026] In some implementations, before generating the configuration file based on the configuration parameters, the process further includes:

[0027] The host computer parameters and the slave computer parameters are displayed in groups on the display page.

[0028] In some implementations, the method for generating the configuration file further includes:

[0029] Assign an identity identifier to the configuration parameter. The identity identifier includes a location identifier and a parameter identifier. The location identifier is used to characterize the storage location of the configuration parameter in the target device, and the parameter identifier is used to distinguish multiple configuration parameters stored in the same storage location.

[0030] In some implementations, obtaining configuration parameters through a data acquisition interface includes:

[0031] A communication connection is established between the data acquisition interface and the control system of the host computer; the control system of the host computer is used to control the operation of the slave computer.

[0032] Based on the established communication connection and the pre-configured first parameter position, the host computer parameters are obtained from the host computer; the first parameter position is used to describe the storage location of the host computer parameters in the host computer.

[0033] The system sends a read command and a pre-configured second parameter position to the control system of the host computer, and receives the lower-level parameters returned by the control system of the host computer. The read command is used to instruct the control system of the host computer to obtain the lower-level parameters from the lower-level machine according to the second parameter position, and return them to the requester of the read command; the second parameter position is used to describe the storage location of the lower-level parameters in the lower-level machine.

[0034] Secondly, embodiments of this specification provide a configuration file generation apparatus for generating a configuration file for a target device, the target device including a host computer and a slave computer, and the configuration file generation apparatus for the target device including:

[0035] A data acquisition interface is used to acquire configuration parameters in response to a generation command. The configuration parameters include host computer parameters and slave computer parameters. The host computer parameters are used to describe the configuration information of the host computer, and the slave computer parameters are used to describe the configuration information of the slave computer.

[0036] The file generation module is used to generate a configuration file based on the configuration parameters.

[0037] In some implementations, the generation instruction includes a first generation instruction carrying type information of configuration parameters, and the data acquisition interface is specifically used for:

[0038] In response to the first generation instruction, configuration parameters corresponding to the type information of the configuration parameters are obtained.

[0039] In some implementations, the generation instruction includes a second generation instruction carrying a generation method, the generation method including an initial generation method for a configuration file, and the data acquisition interface for obtaining configuration parameters is specifically used to: obtain configuration parameters corresponding to the generation method; the file generation module is specifically used to:

[0040] If the second generation instruction indicates that the generation method is the initial generation method of the configuration file, the configuration file is generated according to the obtained configuration parameters.

[0041] In some implementations, the file generation module generates the configuration file based on the acquired configuration parameters, specifically by: generating the configuration file according to the configuration parameters corresponding to the parameter selection instruction in response to the parameter selection instruction;

[0042] The parameter selection instruction corresponds to at least one of the configuration parameters.

[0043] In some implementations, the generation method also includes a configuration file update generation method;

[0044] If the second generation instruction indicates that the generation method is the update generation method of the configuration file;

[0045] The data acquisition interface obtains the configuration parameters corresponding to the generation method, specifically for obtaining the current configuration parameters from the host computer and the slave computer;

[0046] The file generation module is specifically used for:

[0047] Parse the configuration file to be updated carried by the second generation instruction to obtain the configuration parameters to be updated;

[0048] Based on the current configuration parameters and the configuration parameters to be updated, an updated configuration file is generated.

[0049] In some implementations, the file generation module generates an updated configuration file based on the current configuration parameters and the configuration parameters to be updated, specifically for:

[0050] In response to the parameter selection command, the updated configuration file is generated based on the configuration parameters to be updated and the distinguishing configuration parameters corresponding to the parameter selection command;

[0051] The distinguishing configuration parameters include those that exist in the current configuration parameters but do not exist in the configuration parameters to be updated; the parameter selection instruction corresponds to at least one of the distinguishing configuration parameters.

[0052] In some implementations, the file generation module is also used to group and display the host computer parameters and the slave computer parameters on the display page.

[0053] In some implementations, the file generation module is further configured to assign an identity identifier to the configuration parameter, the identity identifier including a location identifier and a parameter identifier, the location identifier being used to characterize the storage location of the configuration parameter in the target device, and the parameter identifier being used to distinguish multiple configuration parameters stored in the same storage location.

[0054] In some implementations, the data acquisition interface is specifically used for: establishing a communication connection with the control system of the host computer; the control system of the host computer is used to control the operation of the slave computer;

[0055] Based on the established communication connection and the pre-configured first parameter position, the host computer parameters are obtained from the host computer; the first parameter position is used to describe the storage location of the host computer parameters in the host computer.

[0056] The system sends a read command and a pre-configured second parameter position to the control system of the host computer, and receives the lower-level parameters returned by the control system of the host computer. The read command is used to instruct the control system of the host computer to obtain the lower-level parameters from the lower-level machine according to the second parameter position, and return them to the requester of the read command; the second parameter position is used to describe the storage location of the lower-level parameters in the lower-level machine.

[0057] Thirdly, embodiments of this specification provide a semiconductor process apparatus, including: a host computer and a slave computer connected to the host computer;

[0058] The host computer includes a control system and a configuration file generation device, and the control system is used to control the operation of the slave computer;

[0059] The configuration file generation apparatus is used to execute the configuration file generation method described in any of the preceding claims to generate the configuration file for the semiconductor process equipment.

[0060] Fourthly, this specification provides a central control device, comprising:

[0061] The sending module is used to send a first service instruction to the semiconductor process equipment as described above;

[0062] A receiving module is configured to receive configuration parameters in a configuration file returned by the semiconductor process equipment in response to the first service instruction; the first service instruction is configured to instruct the semiconductor process equipment to return the configuration parameters in the configuration file.

[0063] In some embodiments, the sending module is further configured to send a second service instruction to the semiconductor process equipment; the receiving module is further configured to receive data corresponding to the subscribed configuration parameters returned by the semiconductor process equipment in response to the second service instruction; the second service instruction is configured to instruct the semiconductor process equipment to return data corresponding to the subscribed configuration parameters.

[0064] Fifthly, embodiments of this specification provide a computing device, including: a processor and a memory;

[0065] The memory is connected to the processor and is used to store computer programs;

[0066] The processor is configured to implement the configuration file generation method as described in any of the preceding claims by running a computer program stored in the memory.

[0067] Sixthly, embodiments of this specification provide a storage medium storing a computer program that, when executed by a processor, implements the configuration file generation method as described in any of the preceding claims.

[0068] In a seventh aspect, one embodiment of this specification provides a computer program product or computer program including computer instructions stored in a computer-readable storage medium; a processor of the computer device reads the computer instructions from the computer-readable storage medium, and when the processor executes the computer instructions, it implements the steps of the above-described configuration file generation method.

[0069] As can be seen from the above technical solutions, the embodiments of this specification provide a method, apparatus, semiconductor process equipment, and central control device for generating configuration files. The configuration file generation method automatically acquires the host computer and slave computer parameters of the target device through a data acquisition interface during the configuration file generation process. Based on the acquired configuration parameters, a configuration file is generated. This eliminates the need for manual access to the storage addresses of the host computer and slave computer parameters to retrieve each parameter, solving the problems of potential omissions or excessive time required for manual parameter lookup. This reduces the time and labor costs associated with the configuration file generation method. Furthermore, the configuration parameters acquired by the configuration file generation method include both slave and host computer parameters, allowing factory users to comprehensively understand the configuration information of the host and slave computers of the target device based on the configuration file. They can then perform parameter subscriptions and other configuration operations based on the obtained configuration information, simplifying the configuration process for factory users. Attached Figure Description

[0070] To more clearly illustrate the technical solutions in the embodiments or prior art of this specification, the drawings used in the description of the embodiments or prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this specification. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0071] Figure 1 As a production scenario;

[0072] Figure 2 This specification provides a feasible application scenario for a configuration file generation method as one embodiment of the present invention.

[0073] Figure 3 The system architecture to which a method for generating a configuration file, provided as one embodiment of this specification, may be applied;

[0074] Figure 4 A system architecture that may be applied to a configuration file generation method provided as another embodiment of this specification;

[0075] Figure 5 A flowchart illustrating a method for generating a configuration file according to one embodiment of this specification;

[0076] Figure 6 One method for generating a selection instruction is provided as one embodiment of this specification;

[0077] Figure 7 Another method for generating selection instructions is provided for another embodiment of this specification;

[0078] Figure 8 A schematic diagram illustrating a grouped display of configuration parameters as one embodiment of this specification;

[0079] Figure 9 A schematic diagram of an identification device provided for one embodiment of this specification;

[0080] Figure 10 A signaling flowchart for obtaining configuration parameters is provided as one embodiment of this specification;

[0081] Figure 11 A flowchart illustrating the process of generating a configuration file according to a specific embodiment of this specification;

[0082] Figure 12 A flowchart illustrating the generation process of a configuration file, provided for another specific embodiment of this specification;

[0083] Figure 13 A schematic diagram of a configuration file generation apparatus provided for one embodiment of this specification;

[0084] Figure 14 This is a schematic diagram of an electronic device provided for one embodiment of this specification. Detailed Implementation

[0085] Unless otherwise defined, the technical or scientific terms used in the embodiments of this specification shall have the ordinary meaning understood by one of ordinary skill in the art to which this specification pertains. The terms "first," "second," and similar terms used in the embodiments of this specification do not indicate any order, quantity, or importance, but are merely used to avoid confusion of constituent elements.

[0086] Unless the context otherwise requires, throughout this specification, "a plurality of" means "at least two," and "including" is interpreted as open-ended or encompassing, that is, "including, but not limited to." In the description of this specification, terms such as "one embodiment," "some embodiments," "exemplary embodiment," "example," "specific example," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example of this specification. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example.

[0087] The technical solutions in the embodiments of this specification will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this specification, and not all embodiments. Based on the embodiments in this specification, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this specification.

[0088] Overview

[0089] As described in the background section, some devices are configured with corresponding configuration files before being delivered to users. These configuration files specify the device's operating parameters and settings to ensure that users can correctly perform its functions according to the configuration files. For example, a device's configuration file may include hardware configuration parameters, software configuration parameters, communication protocol parameters, alarm parameters, parameter variables, and other related configurations. The use of configuration files can simplify the configuration of device parameters for factory users, improve production efficiency and quality, and ensure that the device can work correctly in different environments and applications.

[0090] Especially in application scenarios that require multiple devices to work together, the correct configuration of a single device is the key to the collaborative operation of multiple devices, and the configuration files of each device can help users to achieve the correct configuration of the devices.

[0091] For example, in Figure 1 In the production scenario shown, multiple devices (e.g.) Figure 1 Equipment 1, Equipment 2, Equipment 3, etc., work collaboratively under the control of the central control device 4 to complete the automated production of a certain product. Before each piece of equipment enters the production state, the product manufacturer needs to deploy according to the configuration parameters of each piece of equipment to complete the initialization of each piece of equipment and enable the equipment to work together.

[0092] Configuring equipment involves a massive workload. Relying on product manufacturers to research and acquire the configuration parameters of each device on the production line is particularly challenging for semiconductor production lines. These lines are characterized by a large number of devices and complex configuration parameters, making it difficult and cumbersome for manufacturers to acquire and study individual parameters before deployment. Therefore, pre-configured equipment configuration files that integrate configuration parameters allow manufacturers to easily obtain the necessary parameters by simply reading the configuration file. This simplifies parameter acquisition and improves configuration efficiency.

[0093] In some production scenarios, it is still necessary to refer to Figure 1 When a new device is connected to the production line, the central control device 4 can obtain the configuration parameters in the configuration file of the new device and subscribe to some or all of the parameters in the obtained configuration parameters, so that the new device can report the corresponding data of the subscribed configuration parameters during the generation process.

[0094] To integrate configuration files across devices and simplify configuration for factory users (such as the product manufacturers mentioned above), it's essential that devices store configuration files before shipping. Currently, configuration file generation relies on software engineers collecting all device configuration parameters, organizing them into a configuration file, and storing it in the device. This method heavily depends on the software engineer's familiarity with the device's hardware and software architecture, demanding high levels of expertise. Furthermore, the large number of configuration parameters on some devices makes manually generating configuration files difficult and time-consuming for software engineers.

[0095] To simplify the configuration file generation method and reduce the manpower and time costs involved, the inventors discovered that during configuration file generation, the host computer and slave computer parameters of the target device can be automatically obtained through a data acquisition interface. Based on these acquired configuration parameters, the configuration file is generated. This eliminates the need for manual access to the storage addresses of the host and slave computer parameters, thus resolving the potential for oversights or excessive time required for manual parameter lookup. This significantly reduces the time and manpower costs associated with configuration file generation. Furthermore, the configuration parameters obtained by this method include both slave and host computer parameters, allowing factory users (e.g., product manufacturers) to comprehensively understand the host and slave computer configuration information of the target device and perform parameter subscriptions and other configuration operations based on this information, simplifying the configuration process for factory users.

[0096] Based on the above concept, the method for generating configuration files provided in the embodiments of this specification will be described exemplarily below.

[0097] Scenario Examples and System Architecture

[0098] refer to Figure 2 , Figure 2 This paper illustrates a feasible application scenario for a configuration file generation method. In this scenario, device 10 needs to have a configuration file internally configured before leaving the factory. After the configuration file is configured, device 10 is delivered to the user. The user then deploys and uses device 10 according to the configuration file.

[0099] Figure 3 and Figure 4 The system architecture to which the configuration file generation method might be applied is illustrated. Figure 3 After device 10 is prepared, the device administrator (e.g., the software engineer mentioned above) executes the configuration file generation method through computing device 20, that is, performs the configuration file generation operation. This causes computing device 20 to respond to the generation command corresponding to the generation operation, performing operations such as obtaining configuration parameters (which may include configuration parameters from the host computer 11 and the slave computer 12) and generating the configuration file. Finally, the configuration file is stored in device 10 (e.g., in the host computer 11 of device 10). Figure 3 In the system architecture shown, the computing device 20 that executes the configuration file generation method can be a separately configured device other than device 10.

[0100] refer to Figure 4 , Figure 4 This illustrates another system architecture where a different configuration file generation method may be applied. In this application scenario, after device 10 is fabricated, the configuration file generation method is performed using software programs (e.g., Figure 4 The configuration file generation device is configured inside the host computer 11 in a way that allows the operator to generate and store the configuration file in the device 10 through the configuration file generation device in the host computer 11 and its data interaction with the control system.

[0101] Exemplary methods

[0102] This specification provides a method for generating a configuration file, such as... Figure 5 As shown, the configuration file generation method is used to generate a configuration file for a target device, the target device including a host computer and a slave computer, and the configuration file generation method includes:

[0103] S501: In response to the generation command, configuration parameters are obtained through the data acquisition interface. The configuration parameters include host computer parameters and slave computer parameters. The host computer parameters are used to describe the configuration information of the host computer, and the slave computer parameters are used to describe the configuration information of the slave computer.

[0104] The generation instruction can be an electrical signal instruction generated by the administrator of the target device. The generation operation can be a trigger operation by the administrator on one or more buttons, or a trigger operation by the administrator on one or more elements on the display page (such as data entry for text boxes and clicking on virtual buttons). This specification does not limit this.

[0105] The host computer can manage the slave computers. For example, in some cases, the host computer can control the slave computers to perform their operations. Taking an etching machine as an example, the etching machine can include a transmission module and multiple process modules. Each process module is called a slave computer. The host computer of the etching machine can manage the transmission module and multiple process modules, and control the process modules to execute specific etching functions. In some implementations, host computer parameters can be stored in the host computer and slave computer parameters can be stored in the slave computer. This allows for the identification of host computer parameters and slave computer parameters based on their source when obtaining configuration parameters. As mentioned earlier, configuration parameters can include the target device's hardware configuration parameters, software configuration parameters, communication protocol parameters, alarm parameters, parameter variables, and other related configurations.

[0106] The data acquisition interface can be a communication interface. In some embodiments, the data acquisition interface can also have data format definition and configuration parameter location storage functions. In some embodiments, the data acquisition interface may include a communication module and a data format definition module. The communication module is used to establish a communication connection with a host computer. In some embodiments, the communication module can be a standard communication library, which can be a component encapsulated based on a communication protocol (the communication information can be, for example, TCP / IP protocol (Transmission Control Protocol / Internet Protocol)). This component can provide a communication interface between one application process and another. The data format definition module can be responsible for the data format exchanged between the configuration file generation device and the host computer, as well as the storage location of the configuration parameters in the target device. In some embodiments, the data format definition module can be a pre-packaged specific software module or software library.

[0107] S502: Generate a configuration file based on the configuration parameters.

[0108] After obtaining the above configuration parameters, a configuration file can be generated based on these parameters. The format of the generated configuration file may vary depending on the target device. For example, for semiconductor devices, the configuration file format needs to meet the SEMI standard (Semiconductor Standard). For instance, the configuration file can be in XML (Extensible Markup Language) format or a database file format.

[0109] To facilitate the management of configuration files with different types of configuration parameters, corresponding configuration files can be generated for different types of configuration parameters. This makes the types of configuration parameters stored in the configuration files more consistent and facilitates user management of each configuration file. Specifically, in some embodiments, the generation instruction may include a first generation instruction carrying type information of the configuration parameters. The step of obtaining the configuration parameters through the data acquisition interface in response to the generation instruction includes:

[0110] In response to the first generation instruction, the configuration parameters corresponding to the type information of the configuration parameters are obtained through the data acquisition interface.

[0111] In this embodiment, the first generation instruction may carry the type information of the configuration parameters. For example, in some target devices, there may be configuration parameters with type information of alarm parameters and parameter variables. The number of alarm parameters and parameter variables is huge. If they are integrated into a configuration file, there may be problems such as the configuration file being too large and the parameters being inconvenient to find. Therefore, the first generation instruction can carry the type information of the configuration parameters (e.g., alarm parameters). By responding to the first generation instruction, the configuration parameters with type information of alarm parameters can be obtained, thereby realizing the generation of a configuration file including alarm parameters.

[0112] In addition to specifying the type information of the configuration parameters in the configuration file, the generation method of the configuration file can also be specified. For example, in one embodiment of this specification, the generation instruction includes a second generation instruction carrying a generation method, the generation method including the initial generation method of the configuration file, and the step of obtaining the configuration parameters through the data acquisition interface includes: obtaining the configuration parameters corresponding to the generation method through the data acquisition interface; the step of generating the configuration file based on the configuration parameters includes:

[0113] If the second generation instruction indicates that the generation method is the initial generation method of the configuration file, the configuration file is generated according to the obtained configuration parameters.

[0114] In this embodiment, for the initial generation of a configuration file, device administrators can select a generation method. This selection can be made by pressing the corresponding button or by checking the corresponding options on the display page. When the initial generation method is a configuration file, a configuration file that meets the requirements can be directly generated based on the obtained configuration parameters during the configuration file generation process.

[0115] During the initial configuration file generation process, the selection of configuration parameters can be supported. Specifically, in one embodiment, generating the configuration file based on the obtained configuration parameters includes:

[0116] In response to a parameter selection instruction, the configuration file is generated according to the configuration parameters corresponding to the parameter selection instruction;

[0117] The parameter selection instruction corresponds to at least one of the configuration parameters.

[0118] In some cases, the obtained configuration parameters may not all need to be written to the configuration file. To reduce the number of unnecessary configuration parameters in the configuration file, thereby reducing its complexity and storage space, this implementation provides a parameter selection feature. Specifically, for example, refer to... Figure 6 , Figure 6 The displayed page shows the obtained configuration parameters (e.g.) Figure 6 The configuration parameters (configuration parameters 1, 2, and 3) may not need to be written to the configuration file. In this case, the administrator can select the configuration parameters displayed on the display page. After the selection is completed, click the confirmation button to generate the parameter selection instructions corresponding to configuration parameters 1 and 2, and respond to the parameter selection instructions to generate the configuration files corresponding to configuration parameters 1 and 2.

[0119] In this way, the configuration parameters to be written to the configuration file can be filtered before the configuration file is generated, avoiding too many or too complicated parameters in the configuration file, and also helping to reduce the storage space required for the configuration file.

[0120] As mentioned above, in some embodiments, the method for generating the configuration file can be determined by... Figure 4 The host computer execution shown in the figure, in other embodiments, the method for generating the configuration file can be performed by... Figure 3 The computing device 20 shown is used for execution.

[0121] In addition to the initial generation of the configuration file, some implementations also support the generation of updated configuration files to meet the update requirements of older configuration files. Specifically, the generation method also includes the generation of updated configuration files.

[0122] If the second generation instruction indicates that the generation method is the update generation method of the configuration file;

[0123] The process of obtaining the configuration parameters corresponding to the generation method includes:

[0124] Obtain the current configuration parameters from the host computer and the slave computer;

[0125] The process of generating a configuration file based on the configuration parameters includes:

[0126] Parse the configuration file to be updated carried by the second generation instruction to obtain the configuration parameters to be updated;

[0127] Based on the current configuration parameters and the configuration parameters to be updated, an updated configuration file is generated.

[0128] In this embodiment, when there is an old configuration file (i.e., the configuration file to be updated), the updated configuration file can be generated by parsing the configuration file to be updated, obtaining the configuration parameters to be updated, and the latest obtained current configuration parameters. This can meet the update requirements of the configuration file when the configuration of a target device that has been put into production is updated, thus expanding the applicability of the configuration file generation method.

[0129] In some implementations, selection of configuration parameters is supported. Specifically, generating an updated configuration file based on the current configuration parameters and the configuration parameters to be updated includes:

[0130] In response to the parameter selection command, the updated configuration file is generated based on the configuration parameters to be updated and the distinguishing configuration parameters corresponding to the parameter selection command;

[0131] The distinguishing configuration parameters include those that exist in the current configuration parameters but do not exist in the configuration parameters to be updated; the parameter selection instruction corresponds to at least one of the distinguishing configuration parameters.

[0132] In some cases, the obtained configuration parameters may not all need to be written to the configuration file. To reduce the number of unnecessary configuration parameters in the configuration file, thereby reducing its complexity and storage space, this implementation provides a parameter selection feature. Specifically, for example, refer to... Figure 7 , Figure 7 The displayed page shows the configuration parameters to be updated (e.g.) Figure 7 The configuration parameters A and B shown), and the current configuration parameters (e.g.) Figure 7 The configuration parameters shown are A, B, C, and D, as well as the distinguishing configuration parameters (e.g., ...). Figure 7 The configuration parameters C and D shown above allow for the selection of specific configuration parameters to be written to the configuration file (e.g., ...). Figure 7 In the settings, configuration parameter C was selected, so when you click... Figure 7After clicking the confirmation button, a parameter selection command corresponding to configuration parameter C will be generated. Responding to this command, the configuration parameter C corresponding to the command, along with the configuration parameters to be updated, will generate an updated configuration file. Accordingly, during the generation of the updated configuration file, selecting distinct configuration parameters can prevent the configuration file from having too many or too complex parameters, and also helps reduce the storage space required for the configuration file.

[0133] Regarding the method of generating selection instructions, Figure 6 and Figure 7 Some exemplary methods have been shown. Of course, in other embodiments, the configuration parameters corresponding to the selection command can also be determined in other ways, and this specification does not limit this.

[0134] In some implementations, to clarify the source of parameters for the management personnel of the target equipment, reference is made. Figure 8 Before generating the configuration file based on the configuration parameters, the process further includes:

[0135] The host computer parameters and the slave computer parameters are displayed in groups on the display page.

[0136] The display page can be Figure 3 The computing device 20 or Figure 4 The host computer 11 provides a human-computer interaction interface. Grouping and displaying host computer parameters and slave computer parameters on the display page allows administrators of the target device to clearly understand the source of the parameters, facilitating the selection and management of configuration parameters. Furthermore, in some embodiments, when grouping and displaying configuration parameters, the hierarchical relationships of the configuration parameters can be grouped to make the hierarchical relationships of each configuration parameter clearer.

[0137] For example, in Figure 8 In this system, configuration parameters a1, a2, and a3 are displayed in the host computer parameter column, while configuration parameters b1, b11, b12, b2, and b3 are displayed in the slave computer parameter column. At the same time, configuration parameters b11 and b12 are displayed as sub-parameters of configuration parameter b1, which facilitates the management of each configuration parameter by administrators.

[0138] To facilitate rapid fault location, in some implementations, the method for generating the configuration file further includes:

[0139] Assign an identity identifier to the configuration parameter. The identity identifier includes a location identifier and a parameter identifier. The location identifier is used to characterize the storage location of the configuration parameter in the target device, and the parameter identifier is used to distinguish multiple configuration parameters stored in the same storage location.

[0140] By identifying the location of configuration parameters, their storage location within the target device can be quickly determined. This storage location typically indicates the specific device module to which the configuration parameter belongs. Furthermore, the parameter identifier of the configuration parameter can pinpoint the specific type of problem occurring within that device module.

[0141] Parameter identifiers are parameters that are included with the configuration parameters during generation. These identifiers distinguish configuration parameters stored in the same storage location. For example, configuration parameters stored on the host computer include configuration parameters 1, 2, and 3. These three configuration parameters each carry different parameter identifiers to differentiate them from other configuration parameters.

[0142] Specifically, refer to Figure 9 , Figure 9 The identifier for the configuration parameter is 01010001. The first four digits represent the location of the configuration parameter, and the last four digits represent its parameter identifier. The first and last two digits of the location identifier can describe the storage location of the configuration parameter at different granularities. For example, the first two digits can describe the larger-granularity device to which the configuration parameter belongs, while the last two digits can describe the specific module within that larger-granularity device. Taking an etching machine as an example, the etching machine can consist of a transmission module, multiple process modules for etching processes, and a cluster device management module for overall scheduling and control. The first two digits of the location identifier (which can be called the device ID) can describe which larger module the configuration parameter belongs to. For example, 00 indicates the configuration parameter belongs to the cluster device management module, 90 indicates the configuration parameter belongs to the transmission module, and 01 to 04 indicate which specific process module the configuration parameter belongs to (assuming the etching machine has four process modules). Furthermore, the last two digits of the location identifier (which can be called the module ID) can describe which sub-module under the aforementioned major module the configuration parameter belongs to. For example, for the process module, functionally it can be divided into gas path module, lower electrode module, upper electrode module, temperature control module, vacuum module, etc. The last two digits of the location identifier can describe the specific sub-module to which the configuration parameter belongs. For example, 01 indicates that the configuration parameter belongs to the gas path module. The parameter identifier (which can be called the parameter ID) can describe the characteristic information of the specific configuration parameter. For example, for the gas path module of the process module of an etching machine, 0001 can represent the range of the first gas path.

[0143] If a new process module is added to the etching equipment mentioned above, a new device ID of 05 can be added sequentially according to the existing equipment IDs of the process equipment as the device ID of the new process module.

[0144] In this embodiment, a method for generating a unique ID (i.e., the identity identifier of the configuration parameter) for reported parameters in the factory configuration file is proposed. This method assigns different meanings to different fields of the identity identifier by grouping the parameter sources in the system. When the target device generates a problem reporting parameter, the source of the problem can be quickly located by the different meanings of each field of the identity identifier, thereby improving the efficiency of problem location.

[0145] In some implementations, with Figure 4 Taking the system architecture shown as an example, refer to Figure 10 The process of obtaining configuration parameters through the data acquisition interface includes:

[0146] A communication connection is established between the data acquisition interface and the control system of the host computer; the control system of the host computer is used to control the operation of the slave computer.

[0147] Based on the established communication connection and the pre-configured first parameter position, the host computer parameters are obtained from the host computer; the first parameter position is used to describe the storage location of the host computer parameters in the host computer.

[0148] The system sends a read command and a pre-configured second parameter position to the control system of the host computer, and receives the lower-level parameters returned by the control system of the host computer. The read command instructs the control system of the host computer to retrieve the lower-level parameters from the lower-level machine according to the second parameter position, and return them to the requester of the read command; the second parameter position describes the storage location of the lower-level parameters in the lower-level machine.

[0149] In this embodiment, the configuration file generation method can be configured as a software program (e.g., a configuration file generation device) within the hardware architecture of the host computer. This configuration file generation device can execute the configuration file generation method based on the hardware structure of the host computer, eliminating the need for additional hardware configuration and reducing the cost of executing the method. Furthermore, by having the host computer respond to read commands to obtain lower-level machine parameters and return them to the configuration file generation device, the method of obtaining lower-level machine parameters is simplified. This eliminates the need for the configuration file generation device to establish a communication connection with each host computer, reducing the probability of errors during the communication connection establishment process.

[0150] In some implementations, the positions of the first parameter and the second parameter can be pre-configured in the data acquisition interface.

[0151] Furthermore, in some embodiments, before establishing a communication connection with the control system of the host computer through the data acquisition interface, the configuration file execution method may further include: confirming whether the connection between the host computer and the slave computer is normal, and only establishing a communication connection with the host computer when the connection between the host computer and the slave computer is normal, thereby ensuring the smooth execution of the configuration file generation method.

[0152] The following describes, by way of specific implementation, a feasible execution process of the configuration file generation method provided in this specification.

[0153] In one feasible implementation, taking the generation instruction as including a first generation instruction and a second generation instruction, wherein the first generation instruction carries configuration parameter type information as alarm parameters, and the second generation instruction carries the generation method as the initial generation method of the configuration file, as an example, refer to... Figure 11 The process of generating this configuration file may include:

[0154] S11: Establish a communication connection with the host computer through the data acquisition interface;

[0155] S12: Determine whether the host computer and the slave computer of the device are successfully connected. If successful, proceed to step S13. If unsuccessful, proceed to step S19: Exit and save the exception log. The exception log can record the daily occurrence time and exception type, such as the failure of the host computer to connect with the slave computer.

[0156] S13: The user selects alarm parameters as the type of configuration parameter;

[0157] S14: The user selects the initial generation method for the configuration file;

[0158] S15: Obtain the corresponding alarm parameters from the host computer and the slave computer. These alarm parameters may include parameter identifier, alarm name, alarm description and recovery measures, etc.

[0159] S16: Group and display alarm parameters on the display page according to their source, and assign them location identifiers according to their source; an identity identifier for the alarm parameter can be generated based on the parameter identifier and location identifier; for example, refer to... Figure 8Assuming configuration parameters a1, a2, and a3 originate from the host computer, and configuration parameters b1, b11, b12, b2, and b3 originate from the slave computer, they will be grouped and displayed on the page according to their origin. Furthermore, configuration parameters a1, a2, and a3 from the host computer can be assigned a position identifier 0100, indicating that they originate from the host computer. Configuration parameters b1, b11, b12, b2, and b3 from the slave computer can be assigned a position identifier 020x, where x = 1, 2, 3, 4, and 5. The first two digits of the position identifier, 02, indicate that the configuration parameter originates from the slave computer, and the last two digits, 0x, indicate the specific module from which the configuration parameter originates (e.g., 0201 represents the air circuit module from the slave computer, 0202 represents the temperature control module, etc.).

[0160] In the process of generating identity identifiers, taking configuration parameters a1, a2, and a3 as an example, assuming that the parameter identifiers carried by configuration parameters a1, a2, and a3 are 0001, 0002, and 0003 respectively, the identity identifiers generated for these three configuration parameters can be: 01000001, 01000002, and 01000003.

[0161] S17: The administrator of the target device can delete or modify the alarm parameters displayed in groups on the display page. After editing, click "Confirm Selection" to generate parameter selection instructions.

[0162] Still with Figure 8 Taking the page shown as an example, after the alarm parameters are displayed in groups, the administrator of the target device can delete or modify the configuration parameters a1, a2, a3, b1, b11, b12, b2, and b3 displayed in the groups, and select the required configuration parameters. For example, if the administrator of the target device deletes configuration parameters a3, b12, b2, and b3, and changes configuration parameter a1 to a4, then the configuration parameters corresponding to the parameter selection command include a2, a4, b1, and b11.

[0163] S18: In response to the change parameter selection instruction, organize the alarm parameters according to the tree structure of configuration file type node - parameter node - parameter attribute node to generate an XML format configuration file.

[0164] Taking the example above, assuming the configuration parameters corresponding to the parameter selection instruction include a2, a4, b1, and b11, the information in the tree structure of the generated configuration file can include the following: configuration file type node - alarm parameter configuration file; parameter node - configuration parameters a2, a4, b1, and b11; parameter attribute node - the attributes of configuration parameters a2, a4, b1, and b11 (such as the parameter name).

[0165] In another embodiment, taking the generation instruction as including a first generation instruction and a second generation instruction, where the first generation instruction carries configuration parameter type information as parameter variables, and the second generation instruction carries a generation method for updating the configuration file, as an example, refer to... Figure 12 The process of generating this configuration file may include:

[0166] S21: After confirming that the connection between the host computer and the slave computer of the target device is normal, establish a communication connection with the control system of the host computer through the data acquisition interface;

[0167] S22: Parse the configuration file to be updated carried by the second generation command to obtain the configuration parameters to be updated; group and display the configuration parameters to be updated on the display page;

[0168] S23: Based on the established communication connection and the pre-configured first parameter position, obtain the host computer parameters from the host computer;

[0169] S24: Send the read command and the pre-configured second parameter position to the control system of the host computer, and receive the lower-level parameters returned by the control system of the host computer;

[0170] S25: Use the acquired host computer parameters and slave computer parameters as the current configuration parameters, and display the current configuration parameters in groups on the display page;

[0171] S26: By comparing the current configuration parameters and the configuration parameters to be updated, determine the distinguishable configuration parameters, and display the distinguishable configuration parameters in groups on the display page; at the same time, assign location identifiers to the distinguishable configuration parameters according to their source; and generate the identity identifier of the parameter based on the parameter identifier and location identifier of the configuration parameter.

[0172] S27: The administrator of the target device can delete or modify the differentiated configuration parameters displayed in groups on the display page. After editing, click "Confirm Selection" to generate parameter selection instructions.

[0173] S28: In response to the parameter selection instruction, organize the configuration parameters to be updated and the different configuration parameters corresponding to the parameter selection instruction according to the tree structure of configuration file type node-parameter node-parameter attribute node to generate an XML format configuration file.

[0174] Exemplary device

[0175] One embodiment of this specification also provides a configuration file generation apparatus, such as... Figure 13 As shown, the configuration file generation device is used to generate a configuration file for a target device, the target device including a host computer and a slave computer, and the configuration file generation device for the target device includes:

[0176] The data acquisition interface 1101 is used to acquire configuration parameters in response to the generation command. The configuration parameters include host computer parameters and slave computer parameters. The host computer parameters are used to describe the configuration information of the host computer, and the slave computer parameters are used to describe the configuration information of the slave computer.

[0177] The file generation module 1102 is used to generate a configuration file based on the configuration parameters.

[0178] In some embodiments, the data acquisition interface 1101 may include a communication module and a data format definition module. The communication module is used to establish a communication connection with a host computer. In some embodiments, the communication module may be a standard communication library, which may be a component encapsulated based on a communication protocol (e.g., TCP / IP (Transmission Control Protocol / Internet Protocol)). This component can provide a communication interface between one application process and another. The data format definition module may be responsible for the data format exchanged between the configuration file generation device and the host computer, as well as storing the locations of the first and second parameters mentioned above. In some embodiments, the data format definition module may be a pre-packaged specific software module or software library.

[0179] The file generation module 1102 may include a parameter grouping module, a parameter comparison module, a user interaction module, and a configuration generation module. The parameter grouping module is used to group the configuration parameters obtained by the data acquisition interface 1101 according to their source.

[0180] The parameter comparison module is used to compare the configuration parameters to be updated with the current configuration parameters when the update generation method is a configuration file, in order to obtain the distinguishing configuration parameters.

[0181] The user interaction module provides a display page for interaction with administrators;

[0182] The configuration generation module is used to generate the final configuration file.

[0183] The configuration file generation apparatus provided in this embodiment belongs to the same concept as the configuration file generation method provided in the above embodiments of this application. It can execute the configuration file generation method provided in any of the above embodiments of this application and has the corresponding functional modules and beneficial effects of executing the configuration file generation method. Technical details not described in detail in this embodiment can be found in the specific processing content of the configuration file generation method provided in the above embodiments of this application, and will not be repeated here.

[0184] Exemplary devices and generation systems

[0185] In one embodiment of this specification, a semiconductor process apparatus is also provided, comprising: a host computer and a slave computer connected to the host computer;

[0186] The host computer includes a control system and a configuration file generation device, and the control system is used to control the operation of the slave computer;

[0187] The configuration file generation apparatus is used to execute the configuration file generation method described in any of the preceding claims to generate the configuration file for the semiconductor process equipment.

[0188] In one embodiment of this specification, a central control device is also provided, the central control device comprising:

[0189] A sending module is configured to send a first service instruction to the semiconductor process equipment as described in any of the above embodiments;

[0190] A receiving module is configured to receive configuration parameters in a configuration file returned by the semiconductor process equipment in response to the first service instruction; the first service instruction is configured to instruct the semiconductor process equipment to return the configuration parameters in the configuration file.

[0191] The first service instruction may include a message conforming to the Semiconductor Standard (Semi), which may include information such as a check bit and a data field, wherein the data field may be used to describe the specific instruction content of the first service instruction.

[0192] Factory-side users can generate the first service command through the human-machine interface provided by the central control device and send it to the semiconductor process equipment. When the host computer of the semiconductor process equipment receives the first service command, it can parse the configuration parameters stored in the host computer and return the parsed configuration parameters to the central control device. After receiving the configuration parameters, the central control device can display them through the aforementioned human-machine interface.

[0193] In some embodiments, the sending module is further configured to send a second service instruction to the semiconductor process equipment; the receiving module is further configured to receive data corresponding to the subscribed configuration parameters returned by the semiconductor process equipment in response to the second service instruction; the second service instruction is configured to instruct the semiconductor process equipment to return data corresponding to the subscribed configuration parameters.

[0194] Similarly, the second service instruction can be generated and sent in the same way as the first service instruction. After the central control device receives the configuration parameters returned by the semiconductor process equipment, it can select the desired configuration parameters to subscribe to through methods such as checking boxes on the human-machine interface, and generate the second service instruction. After receiving the second service instruction, the semiconductor process equipment will report the data corresponding to the subscribed configuration parameters to the central control device during operation, allowing factory users to monitor the operation of the semiconductor process equipment through the returned data.

[0195] Exemplary electronic devices

[0196] Another embodiment of this specification also provides an electronic device, see [link to documentation]. Figure 14 As shown, an exemplary embodiment of this specification also provides an electronic device, including: a memory and a processor, the memory storing a computer program, the processor executing the computer program to perform steps in the configuration file generation method according to various embodiments of this specification described above.

[0197] The internal structure of the electronic device can be as follows: Figure 14 As shown, the electronic device includes a processor, memory, network interface, and input device connected via a system bus. The processor provides computing and control capabilities. The memory includes a non-volatile storage medium and internal memory. The non-volatile storage medium stores an operating system and computer programs. The internal memory provides an environment for the operation of the operating system and computer programs in the non-volatile storage medium. The network interface is used to communicate with external terminals via a network connection. When the computer program is executed by the processor, it follows the steps in the configuration file generation method according to various embodiments of this specification described in the above embodiments.

[0198] The processor may include the main processor, as well as baseband chips, modems, etc.

[0199] The memory stores a program that executes the technical solution of this invention, and may also store an operating system and other critical business functions. Specifically, the program may include program code, which includes computer operation instructions. More specifically, the memory may include read-only memory (ROM), other types of static storage devices capable of storing static information and instructions, random access memory (RAM), other types of dynamic storage devices capable of storing information and instructions, disk storage, flash memory, etc.

[0200] The processor can be a general-purpose processor, such as a general-purpose central processing unit (CPU), a microprocessor, etc., or an application-specific integrated circuit (ASIC), or one or more integrated circuits used to control the execution of the program of the present invention. It can also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), an off-the-shelf programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components.

[0201] Input devices may include devices that receive data and information input by the user, such as keyboards, mice, cameras, scanners, light pens, voice input devices, touch screens, pedometers, or gravity sensors.

[0202] Output devices may include devices that allow information to be output to the user, such as displays, printers, speakers, etc.

[0203] The communication interface may include any transceiver-like device for communicating with other devices or communication networks, such as Ethernet, Radio Access Network (RAN), Wireless Local Area Network (WLAN), etc.

[0204] The processor executes programs stored in memory and calls other devices, which can be used to implement the various steps of any of the configuration file generation methods provided in the above embodiments of this specification.

[0205] The electronic device may also include a display component and a voice component. The display component may be a liquid crystal display screen or an e-ink display screen. The input device of the electronic device may be a touch layer covering the display component, or a button, trackball or touchpad set on the casing of the electronic device, or an external keyboard, touchpad or mouse, etc.

[0206] Those skilled in the art will understand that Figure 14 The structures shown are merely block diagrams of a portion of the structure related to the scheme described in this specification, and do not constitute a limitation on the electronic devices to which the scheme described in this specification is applied. Specific electronic devices may include more or fewer components than those shown in the figures, or may combine certain components, or may have different component arrangements.

[0207] Exemplary computer program products and storage media

[0208] In addition to the methods and devices described above, the configuration file generation method provided in the embodiments of this specification can also be a computer program product, which includes computer program instructions that, when executed by a processor, cause the processor to perform the steps in the configuration file generation method according to various embodiments of this specification as described in the "Exemplary Methods" section above.

[0209] The computer program product described herein can be written in any combination of one or more programming languages ​​to perform the operations of the embodiments described herein. These programming languages ​​include object-oriented programming languages ​​such as Java and C++, as well as conventional procedural programming languages ​​such as C or similar languages. The program code can be executed entirely on the user's computing device, partially on the user's computing device, as a standalone software package, partially on the user's computing device and partially on a remote computing device, or entirely on a remote computing device or server.

[0210] Furthermore, embodiments of this specification also provide a computer-readable storage medium having a computer program stored thereon, the computer program being executed by a processor of the steps in the configuration file generation method according to various embodiments of this specification as described in the "Exemplary Methods" section above.

[0211] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the methods described above. Any references to memory, storage, databases, or other media used in the embodiments provided in this specification can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), dual data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link DRAM (SLDRAM), RAMbus direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and RAMbus dynamic RAM (RDRAM), etc.

[0212] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0213] The embodiments described above are merely illustrative of several implementation methods outlined in this specification. While the descriptions are specific and detailed, they should not be construed as limiting the scope of the solutions provided in this specification. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this specification, and these all fall within the scope of protection of this specification. Therefore, the scope of protection for this patent should be determined by the appended claims.

Claims

1. A method for generating a configuration file, characterized in that, The configuration file generation method is used to generate a configuration file for a target device, the target device including a host computer and a slave computer, and the configuration file generation method includes: In response to the generation command, configuration parameters are obtained through a data acquisition interface. The configuration parameters include host computer parameters and slave computer parameters. The host computer parameters are used to describe the configuration information of the host computer, and the slave computer parameters are used to describe the configuration information of the slave computer. The data acquisition interface includes a communication module, which is used to establish a communication connection with the host computer. Based on the configuration parameters, a configuration file is generated; The process of obtaining configuration parameters through the data acquisition interface includes: A communication connection is established between the data acquisition interface and the control system of the host computer; the control system of the host computer is used to control the operation of the slave computer. Based on the established communication connection and the pre-configured first parameter position, the host computer parameters are obtained from the host computer; the first parameter position is used to describe the storage location of the host computer parameters in the host computer. The system sends a read command and a pre-configured second parameter position to the control system of the host computer, and receives the lower-level parameters returned by the control system of the host computer. The read command is used to instruct the control system of the host computer to obtain the lower-level parameters from the lower-level machine according to the second parameter position, and return them to the requester of the read command. The second parameter position is used to describe the storage location of the lower-level parameters in the lower-level machine.

2. The method according to claim 1, characterized in that, The generation instruction includes a first generation instruction carrying type information of configuration parameters, and the step of obtaining the configuration parameters through the data acquisition interface in response to the generation instruction includes: In response to the first generation instruction, the configuration parameters corresponding to the type information of the configuration parameters are obtained through the data acquisition interface.

3. The method according to claim 1, characterized in that, The generation instruction includes a second generation instruction carrying a generation method, the generation method including the initial generation method of the configuration file, and the step of obtaining configuration parameters through the data acquisition interface includes: obtaining configuration parameters corresponding to the generation method through the data acquisition interface; The process of generating a configuration file based on the configuration parameters includes: If the second generation instruction indicates that the generation method is the initial generation method of the configuration file, the configuration file is generated according to the obtained configuration parameters.

4. The method according to claim 3, characterized in that, The step of generating the configuration file based on the obtained configuration parameters includes: In response to a parameter selection instruction, the configuration file is generated according to the configuration parameters corresponding to the parameter selection instruction; The parameter selection instruction corresponds to at least one of the configuration parameters.

5. The method according to claim 3, characterized in that, The generation method also includes a method for updating and generating configuration files; If the second generation instruction indicates that the generation method is the update generation method of the configuration file; The process of obtaining the configuration parameters corresponding to the generation method includes: Obtain the current configuration parameters from the host computer and the slave computer; The process of generating a configuration file based on the configuration parameters includes: Parse the configuration file to be updated carried by the second generation instruction to obtain the configuration parameters to be updated; Based on the current configuration parameters and the configuration parameters to be updated, an updated configuration file is generated.

6. The method according to claim 5, characterized in that, The process of generating the updated configuration file based on the current configuration parameters and the configuration parameters to be updated includes: In response to the parameter selection command, the updated configuration file is generated based on the configuration parameters to be updated and the distinguishing configuration parameters corresponding to the parameter selection command; The distinguishing configuration parameters include those that exist in the current configuration parameters but do not exist in the configuration parameters to be updated; the parameter selection instruction corresponds to at least one of the distinguishing configuration parameters.

7. The method according to any one of claims 1 to 6, characterized in that, Before generating the configuration file based on the configuration parameters, the process also includes: The host computer parameters and the slave computer parameters are displayed in groups on the display page.

8. The method according to any one of claims 1 to 6, characterized in that, Also includes: Assign an identity identifier to the configuration parameter. The identity identifier includes a location identifier and a parameter identifier. The location identifier is used to characterize the storage location of the configuration parameter in the target device, and the parameter identifier is used to distinguish multiple configuration parameters stored in the same storage location.

9. A configuration file generation apparatus, characterized in that, The configuration file generation device is used to generate a configuration file for a target device, the target device including a host computer and a slave computer, and the configuration file generation device for the target device includes: A data acquisition interface is used to acquire configuration parameters in response to a generation command. The configuration parameters include host computer parameters and slave computer parameters. The host computer parameters are used to describe the configuration information of the host computer, and the slave computer parameters are used to describe the configuration information of the slave computer. The data acquisition interface includes a communication module, which is used to establish a communication connection with the host computer. The file generation module is used to generate a configuration file based on the configuration parameters; The process by which the data acquisition interface obtains configuration parameters specifically includes: A communication connection is established between the data acquisition interface and the control system of the host computer; the control system of the host computer is used to control the operation of the slave computer. Based on the established communication connection and the pre-configured first parameter position, the host computer parameters are obtained from the host computer; the first parameter position is used to describe the storage location of the host computer parameters in the host computer. The system sends a read command and a pre-configured second parameter position to the control system of the host computer, and receives the lower-level parameters returned by the control system of the host computer. The read command is used to instruct the control system of the host computer to obtain the lower-level parameters from the lower-level machine according to the second parameter position, and return them to the requester of the read command. The second parameter position is used to describe the storage location of the lower-level parameters in the lower-level machine.

10. A semiconductor process apparatus, characterized in that, Includes: a host computer and a slave computer connected to the host computer; The host computer includes a control system and a configuration file generation device, and the control system is used to control the operation of the slave computer; The configuration file generation apparatus is used to execute the configuration file generation method according to any one of claims 1 to 8 to generate the configuration file of the semiconductor process equipment.

11. A central control device, characterized in that, include: The sending module is configured to send a first service instruction to the semiconductor process equipment as described in claim 10; A receiving module is configured to receive configuration parameters in a configuration file returned by the semiconductor process equipment in response to the first service instruction; the first service instruction is configured to instruct the semiconductor process equipment to return the configuration parameters in the configuration file.

12. The central control device according to claim 11, characterized in that, The sending module is further configured to send a second service instruction to the semiconductor process equipment; the receiving module is further configured to receive data corresponding to the subscribed configuration parameters returned by the semiconductor process equipment in response to the second service instruction; the second service instruction is configured to instruct the semiconductor process equipment to return data corresponding to the subscribed configuration parameters.

13. A computing device, characterized in that, include: Processor and memory; The memory is connected to the processor and is used to store computer programs; The processor is configured to implement the configuration file generation method as described in any one of claims 1 to 8 by running a computer program stored in the memory.

14. A storage medium, characterized in that, The storage medium stores a computer program, which, when executed by a processor, implements the configuration file generation method as described in any one of claims 1 to 8.

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