Heating device

Abstract

The heating device has a heating plate, a fixing plate, and a heater. The heating plate has a heating surface and a recess formed on a back surface opposite to the heating surface. The fixing plate is disposed separately from the heating plate and has a fixing hole at a position corresponding to the recess. The heater has a cylindrical heater main body and a fixing member. The heater main body passes through the fixing hole, with a front end inserted into the recess and a terminal for power supply provided at a base end. The fixing member is formed in a cylindrical shape surrounding an outer circumferential surface of the heater main body, and is fixed to the fixing hole with a gap between the heater main body and an inner wall of the fixing hole.

Description

Technical Field

[0001] Embodiments of this disclosure relate to a heating device. Background Technology

[0002] Patent document 1 discloses a heating device in which a heater is inserted and fixed in a hole formed on the side of a mold.

[0003] Prior art literature

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2017-154409 Summary of the Invention

[0006] One embodiment of the heating device includes a heating plate, a fixing plate, and a heater. The heating plate has a heating surface and a recess formed on its back side opposite to the heating surface. The fixing plate is disposed separately from the heating plate and has a fixing hole at a position corresponding to the recess. The heater has a cylindrical heater body and a fixing member. The heater body passes through the fixing hole, its front end is inserted into the recess, and a terminal for power supply is provided at its base end. The fixing member is formed as a cylinder surrounding the outer peripheral surface of the heater body, fixing the heater body to the fixing hole with a gap between it and the inner wall of the fixing hole. Attached Figure Description

[0007] Figure 1 This is a side view of the heating device according to the embodiment.

[0008] Figure 2 This is a top view of the heating device according to the embodiment.

[0009] Figure 3 yes Figure 2 A cross-sectional view at line III-III.

[0010] Figure 4 yes Figure 2 A cross-sectional view at line IV-IV.

[0011] Figure 5 This is a cross-sectional view of the heating device of Embodiment 1, a variation of the embodiment.

[0012] Figure 6 This is a cross-sectional view of the heating device in Embodiment 2.

[0013] Figure 7 This is a cross-sectional view of the heating device in variation 3 of the embodiment.

[0014] Figure 8 This is a cross-sectional view of the heating device in variation 4 of the embodiment.

[0015] Figure 9This is a side view of the heating device in variation 5 of the embodiment.

[0016] Figure 10 This is a cross-sectional view of the heating device in variation 5 of the embodiment. Detailed Implementation

[0017] Hereinafter, embodiments of the heating device disclosed in this application will be described with reference to the accompanying drawings. It should be noted that this disclosure is not limited to the embodiments shown below. Furthermore, the drawings are schematic, and it should be noted that the dimensional relationships and ratios of the elements may sometimes differ from reality. Moreover, the drawings may sometimes include portions with different dimensional relationships and ratios.

[0018] Furthermore, in the embodiments shown below, expressions such as "constant," "orthogonal," "perpendicular," or "parallel" are sometimes used, but these expressions do not need to be strictly "constant," "orthogonal," "perpendicular," or "parallel." That is, the above expressions allow for deviations, such as manufacturing precision, setting precision, etc.

[0019] <Implementation Method>

[0020] Figure 1 This is a side view of the heating device 100 according to the embodiment. Figure 2 This is a top view of the heating device 100 according to the embodiment. In the following description, the surface of the heating device 100 on the side of the object to be heated when it comes into contact with the object to be heated is called the "upper surface", and the surface on the side opposite to the object to be heated is called the "lower surface". However, the heating device 100 may also be used in reverse, or in any orientation.

[0021] Figure 1 The heating device 100 shown has a heating plate 110, a fixing plate 120, a plurality of heaters 130, and a support plate 150.

[0022] The heating plate 110 is, for example, a plate-shaped metal member, having an upper surface 110a that can contact the object to be heated. That is, the upper surface 110a of the heating plate 110 serves as the heating surface for heating the object. The upper surface 110a is used, for example, to heat a mold, which is one example of an object to be heated. On the lower surface 110b of the heating plate 110, opposite to the heating surface, are formed a plurality of recesses 113 for inserting a plurality of heaters 130 (see reference). Figure 3 ).

[0023] Multiple heaters 130 are inserted into multiple recesses 113, thereby being configured to be perpendicular to the upper surface 110a of the heating plate 110, which serves as the heating surface. By configuring the multiple heaters 130 to be perpendicular to the heating surface of the heating plate 110, deviations in the distance between the multiple heaters 130 and the heating surface can be suppressed, thereby improving the in-plane heat uniformity of the heating surface.

[0024] Multiple recesses 113, into which multiple heaters 130 are inserted, are formed at an uneven density on the lower surface 110b of the heating plate 110, opposite to the heating surface. Figure 2 In the diagram, the upper surface 110a of the heating plate 110, which serves as the heating surface, is shown to be rectangular, and the locations where multiple recesses 113 are formed are shown. Specifically, recesses 113 are sparsely formed at the center of the lower surface 110b, and densely formed at the periphery of the lower surface 110b. In other words, the multiple recesses 113 are formed such that the density of the recesses 113 is lower closer to the center of the lower surface 110b and higher closer to the periphery. By adjusting the density of the multiple recesses 113 on the lower surface 110b of the heating plate 110, opposite to the heating surface, the density of the multiple heaters 130 inserted into the multiple recesses 113 can be adjusted. As a result, the in-plane heat uniformity of the upper surface 110a of the heating plate 110, which serves as the heating surface, can be further improved. That is, compared to the central portion, the peripheral portions of the upper surface 110a and lower surface 110b of the heating plate 110 are more easily depleted by the surrounding atmosphere. Therefore, the temperature at the peripheral portions of the upper surface 110a and lower surface 110b of the heating plate 110 may be lower than that at the central portion. In this case, by increasing the density of the recess 113 at the peripheral portion of the lower surface 110b, the density of the heater 130 can also be increased, thus relatively increasing the heat generation at the peripheral portion of the upper surface 110a. As a result, since the heat generation lost to the surrounding atmosphere is compensated, the heat uniformity can be further improved.

[0025] It should be noted that the configuration of the recess 113 is not limited to... Figure 2 The configuration shown. For example, if a hot spot with a higher temperature than other areas is generated on the upper surface 110a of the heating plate 110, which serves as the heating surface, multiple recesses 113 can be formed in such a way that the density of the recesses 113 in the area corresponding to the hot spot on the lower surface 110b is reduced.

[0026] The fixing plate 120 is, for example, a plate-shaped metal member, and is disposed separately from the heating plate 110. A plurality of heaters 130, each inserted into a plurality of recesses 113, are fixed to the fixing plate 120. The method of fixing the heaters 130 relative to the fixing plate 120 will be described later.

[0027] The support plate 150 is fixed to the fixing plate 120 by a plurality of columnar members 151 when it is away from the fixing plate 120. By positioning the support plate 150 away from the fixing plate 120, space can be ensured between the support plate 150 and the fixing plate 120 for arranging the terminals 133, 134 (described later) in each heater 130. It should be noted that the support plate 150 and the plurality of columnar members 151 may be omitted if necessary.

[0028] Figure 3 yes Figure 2 A cross-sectional view at line III-III. Figure 4 yes Figure 2 A sectional view at line IV-IV. It should be noted that... Figure 3 and Figure 4 The diagram of the support plate 150 and multiple columnar members 151 is omitted.

[0029] like Figure 3 and Figure 4 As shown, the heating device 100 is configured such that a plurality of heaters 130 are fixed to the fixing plate 120 and are respectively inserted into a plurality of recesses 113 of the heating plate 110.

[0030] The heating plate 110 has a first plate member 111 and a second plate member 112.

[0031] The first plate member 111 is a plate-shaped member having an upper surface 110a of a heating plate 110 that serves as a heating surface. The first plate member 111 is joined to the second plate member 112 by a joining member 114, such as a bolt. That is, the lower surface 111a of the first plate member 111, which is opposite to the upper surface 110a, is the joining surface that joins with the second plate member 112.

[0032] The second plate member 112 is a plate-shaped member having an upper surface 112a that serves as a mating surface that engages with the mating surface of the first plate member 111, and a lower surface 110b located on the opposite side of the upper surface 112a. A plurality of through holes 112b are formed in the lower surface 110b, and the lower surface 111a of the first plate member 111 is exposed through each of the plurality of through holes 112b.

[0033] Each of the plurality of recesses 113 is formed by each of the plurality of through holes 112b and the lower surface 111a of the first plate member 111 exposed from each of the plurality of through holes 112b. That is, the inner wall surface of each through hole 112b forms the inner side surface of each recess 113, and the lower surface 111a of the first plate member 111 forms the bottom surface of each recess 113.

[0034] With a gap formed between the fixing plate 120 and the heating plate 110, the fixing plate 120 is connected to the heating plate 110 by a connecting structure 121 such as bolts, thereby being disposed separately from the heating plate 110. By dispersing the fixing plate 120 from the heating plate 110, the heating of the plurality of heaters 130 relative to the fixing portion of the fixing plate 120 (e.g., the fixing hole 120a described later) can be suppressed. On the other hand, the heat taken away from the heating plate 110 by the fixing plate 120 is reduced, thus promoting the heating of the heating plate 110.

[0035] The fixing plate 120 has multiple fixing holes 120a at positions corresponding to the multiple recesses 113. Multiple heaters 130 are respectively inserted and fixed in the multiple fixing holes 120a. Hereinafter, for ease of explanation, the multiple recesses 113, the multiple fixing holes 120a and the multiple heaters 130 will be referred to as "recesses 113", "fixing holes 120a" and "heaters 130" respectively, unless otherwise specified.

[0036] The heater 130 has a heater body 131 and a fixing component 132.

[0037] The heater body 131 is, for example, a cylindrical component. The heater body 131 passes through the fixing hole 120a, and its front end 131a is inserted into the recess 113. The base end 131b of the heater body 131 protrudes further away from the upper surface 110a of the heating plate 110, which serves as the heating surface, compared to the lower surface of the fixing plate 120. Power supply terminals 133 and 134 for supplying electricity to the heater body 131 are provided at the base end 131b. By providing terminals 133 and 134 at the base end 131b, which protrudes further away from the upper surface 110a of the heating plate 110, the terminals 133 and 134 can be moved away from the heating surface, thus suppressing heat transfer to the terminals 133 and 134.

[0038] The heater body 131 is a ceramic heater having a ceramic body and a heating resistor located inside the ceramic body. By making the heater body 131 a ceramic heater, sintering between the metal heating plate 110 and the heater body 131 can be suppressed. The length of the heater body 131, i.e., the length of the ceramic body, can be, for example, about 1 mm to 200 mm. In addition, the outer dimensions of the ceramic body can be, for example, about 0.5 mm to 100 mm. The shape of the heater body 131, i.e., the shape of the ceramic body, is not limited to a cylindrical shape, but can also be, for example, an elliptical cylinder or a prism shape. The material of the ceramic body is, for example, an insulating ceramic. As the material of the ceramic body, oxide ceramics, nitride ceramics, or carbide ceramics can be used, for example. The heating resistor is a component that heats up by the flow of current. The heating resistor can, for example, include a high-resistance conductor containing tungsten, molybdenum, etc. Regarding the dimensions of the heating resistor, for example, the width can be 0.1 mm to 5 mm, the thickness can be 0.05 mm to 0.3 mm, and the overall length can be 1 mm to 500 mm. In addition, the heating resistor can also be, for example, a conductive ceramic containing tungsten carbide. In this case, the difference in thermal expansion between the ceramic body and the heating resistor can be reduced. This reduces the thermal stress between the ceramic body and the heating resistor. Consequently, the durability of the heater body 131 can be improved.

[0039] The fixing member 132 is formed as a cylinder surrounding the outer peripheral surface of the heater body 131. The fixing member 132 fixes the heater body 131 to the fixing hole 120a with a gap between the heater body 131 and the inner wall of the fixing hole 120a. Specifically, an internal thread is formed on a portion of the inner wall of the fixing hole 120a located on the side opposite to the heating plate 110. On the other hand, the fixing member 132 has an external thread 132a on a portion of its outer peripheral surface. When the heater body 131 passes through the fixing hole 120a, the fixing member 132 engages the external thread 132a with the internal thread of the fixing hole 120a, thereby fixing the heater body 131 to the fixing hole 120a with a gap between the heater body 131 and the inner wall of the fixing hole 120a.

[0040] In this manner, the heater body 131 is fixed to the fixing hole 120a with a gap between it and the inner wall of the fixing hole 120a, thereby making it difficult for the fixing plate 120 to receive heat from the heater body 131. Therefore, since the temperature rise of the fixing plate 120 is suppressed, the heat radiated from the fixing plate 120 toward the base end 131b of the heater body 131, where the power supply terminals 133 and 134 are provided, is also suppressed. Therefore, according to the embodiment of the heating device 100, the deterioration of the power supply terminals 133 and 134 in the heater 130 can be reduced.

[0041] When the heater body 131 is fixed to the fixing hole 120a with a gap, the distance between the inner wall of the fixing hole 120a and the portion of the heater body 131 opposite to the inner wall of the fixing hole 120a is larger than the distance between the inner sidewall of the recess 113 and the portion of the heater body 131 opposite to the inner sidewall of the recess 113. By positioning the heater body 131 close to the inner sidewall of the recess 113 and away from the inner wall of the fixing hole 120a, heat transfer to the heating plate 110 can be promoted, and heat transfer to the fixing plate 120 can be suppressed. Therefore, according to the embodiment of the heating device 100, the heating performance of the heating plate 110 can be maintained, and the deterioration of the power supply terminals 133 and 134 in the heater 130 can be further reduced.

[0042] The diameter of the fixing hole 120a is larger than the diameter of the recess 113. The temperature of the recess 113 is prone to rise due to the heating of the heater body 131. Therefore, if the diameter of the fixing hole 120a located at the position corresponding to the recess 113 is increased, the heating of the fixing plate 120 that accompanies the temperature rise of the recess 113 can be suppressed.

[0043] Furthermore, a spacer 140 is disposed between the heating plate 110 and the fixed plate 120. The spacer 140 is cylindrical and is through which the connecting structural member 121 passes. By providing the spacer 140 between the heating plate 110 and the fixed plate 120, the separation between the heating plate 110 and the fixed plate 120 can be maintained, and the temperature rise of the fixed plate 120 accompanying the heat transfer from the heating plate 110 can be continuously suppressed.

[0044] The material of the spacer 140 is preferably a heat-resistant ceramic. For example, oxide ceramics, nitride ceramics, or carbide ceramics can be used as the material for the spacer 140. This reduces the thermal expansion and contraction of the spacer 140, thereby reducing the consumption of the spacer 140.

[0045] <Variation Example 1>

[0046] Next, refer to Figures 5-10 Various variations of the embodiments will be described. It should be noted that in the following description, the same reference numerals are used to refer to the same structures as in the embodiments described above, and detailed descriptions are omitted.

[0047] Figure 5 This is a cross-sectional view of the heating device 100 of the modified embodiment 1. Figure 5 The heating device 100 shown is Figures 1-4 The main difference in the heating device 100 shown is that a cooling passage for the cooling medium is provided inside the fixed plate. Specifically, as... Figure 5As shown, the fixing plate 120 has an internal flow path 160 for the flow of cooling medium, serving as a cooling passage. By providing the flow path 160 for the flow of cooling medium inside the fixing plate 120 to cool the fixing plate 120, the heat radiated from the fixing plate 120 toward the base end 131b of the heater body 131, on which the power supply terminals 133 and 134 are provided, can be further suppressed. Therefore, according to the heating device 100 of this modified example, the deterioration of the power supply terminals 133 and 134 in the heater 130 can be further reduced.

[0048] The flow path 160 is along the upper surface 120b of the fixed plate 120 opposite to the heating plate 110 (e.g., towards). Figure 5 The upper surface 120b extends in the direction of the depth side. Since the upper surface 120b is more susceptible to heat radiated from the heating plate 110 than other parts, the cooling efficiency of the fixed plate 120 can be improved by extending the flow path 160 in the direction along the upper surface 120b.

[0049] The flow path 160 is located between adjacent fixing holes 120a among a plurality of fixing holes 120a. The fixing holes 120a are more likely to receive heat radiated from the heater body 131 than other parts, so by placing the flow path 160 between adjacent fixing holes 120a, the cooling efficiency of the fixing plate 120 can be improved.

[0050] Cooling medium flowing in flow path 160 can be, for example, cooling water. Alternatively, cooling gas such as air can be used instead of cooling water.

[0051] <Variation Example 2>

[0052] Figure 6 This is a cross-sectional view of the heating device 100 of the modified embodiment 2. Figure 6 The structure of the cooling passage in the heating device 100 shown, which is located inside the fixed plate, is similar to... Figure 5 The heating device 100 shown is different. Specifically, as... Figure 6 As shown, the fixing plate 120 has a pipe 170 inside for the flow of cooling medium as a cooling passage. By providing the pipe 170 inside the fixing plate 120 for the flow of cooling medium to cool the fixing plate 120, the heat radiated from the fixing plate 120 toward the base end 131b of the heater body 131 where the power supply terminals 133 and 134 are provided can be further suppressed. Therefore, according to the heating device 100 of this modified example, the deterioration of the power supply terminals 133 and 134 in the heater 130 can be further reduced.

[0053] Piping 170 is positioned along the upper surface 120b of the fixed plate 120 opposite the heating plate 110 (e.g., towards...). Figure 6It extends in the direction of the depth side. Since the upper surface 120b is more susceptible to heat radiated from the heating plate 110 than other parts, the cooling efficiency of the fixed plate 120 can be improved by extending the piping 170 in the direction along the upper surface 120b.

[0054] Piping 170 is located between adjacent fixing holes 120a among a plurality of fixing holes 120a. The fixing holes 120a are more likely to receive heat radiated from the heater body 131 than other parts, so by placing piping 170 between adjacent fixing holes 120a, the cooling efficiency of the fixing plate 120 can be improved.

[0055] Cooling water can be used as the cooling medium flowing in piping 170. Alternatively, cooling gas such as air can be used instead of cooling water.

[0056] <Variation Example 3>

[0057] Figure 7 This is a cross-sectional view of the heating device 100 of the modified embodiment 3. Figure 7 The structure of the fixing plate and the piping arrangement of the heating device 100 shown are similar to those of the heating device 100. Figure 6 The heating device 100 shown is different. Specifically, as... Figure 7 As shown, the fixing plate 120 is divided into two components: a cover member 123 located on the side of the heating plate 110 and a base member 122 located on the opposite side of the heating plate 110, and is configured such that the cover member 123 is joined to the base member 122. The mating surface between the base member 122 and the cover member 123 has a direction along the upper surface 120b (e.g., towards...). Figure 7 A groove 122a extends in the direction of the depth side. A pipe 170 is disposed in the groove 122a extending in the direction along the upper surface 120b. The upper surface 120b receives heat radiated from the heating plate 110 more readily than other parts, so by providing the pipe 170 in the groove 122a extending in the direction along the upper surface 120b, the cooling efficiency of the fixing plate 120 can be improved. In addition, by detaching the cover member 123 from the base member 122 to open the groove 122a upward, the pipe 170 can be easily removed from the groove 122a, thus improving the maintainability of the heating device 100.

[0058] <Variation Example 4>

[0059] Figure 8 This is a cross-sectional view of the heating device 100 of the modified embodiment 4. Figure 8 The shape of the fixing hole of the heating device 100 shown is similar to Figures 1-4 The heating device 100 shown is different. Specifically, as... Figure 8As shown, the fixing hole 120a is formed by a first hole portion 120a-1 located opposite the recess 113 and a second hole portion 120a-2 continuous with the first hole portion 120a-1 and with a smaller diameter than the first hole portion 120a-1. The distance between the inner wall of the first hole portion 120a-1 and the portion of the heater body 131 opposite the inner wall of the first hole portion 120a-1 is larger than the distance between the inner wall of the second hole portion 120a-2 and the portion of the heater body 131 opposite the inner wall of the second hole portion 120a-2. Since the temperature of the recess 113 easily rises due to the heating of the heater body 131, increasing the diameter of the first hole portion 120a-1 located opposite the recess 113 can suppress the heating of the fixing plate 120 that accompanies the temperature rise of the recess 113. Furthermore, by positioning the heater body 131 close to the inner wall of the second hole 120a-2, it is possible to ensure the area for fixing the heater body 131 to the fixing hole 120a (e.g., the area where the internal thread is formed corresponding to the external thread 132a of the fixing member 132).

[0060] <Variation Example 5>

[0061] Figure 9 This is a side view of the heating device 100 of the modified embodiment 5. Figure 10 This is a cross-sectional view of the heating device 100 of the modified embodiment 5. Figure 9 and Figure 10 The heating device 100 shown basically has the same characteristics as Figures 1-4 The heating device 100 shown has the same structure. However, Figure 9 and Figure 10 The heating device 100 shown is Figures 1-4 The difference in the heating device 100 shown is that the heating plate 110 is not divided into two components: a first plate component 111 and a second plate component 112. Specifically, as... Figure 9 and Figure 10 As shown, the portions of the heating plate 110 corresponding to the first plate member 111 and the second plate member 112 are integrally formed from metal plate-shaped members. As a result, the manufacturing process of the heating device 100 according to Modified Example 5 can be simplified.

[0062] As described above, the heating device of the embodiment (e.g., heating device 100) includes a heating plate (e.g., heating plate 110), a fixing plate (e.g., fixing plate 120), and a heater (e.g., heater 130). The heating plate has a heating surface (e.g., upper surface 110a) and a recess (e.g., recess 113) formed on the back side (e.g., lower surface 110b) opposite to the heating surface. The fixing plate is disposed separately from the heating plate and has a fixing hole (e.g., fixing hole 120a) at a position corresponding to the recess. The heater has a columnar heater body (e.g., heater body 131) and a fixing member (e.g., fixing member 132). The heater body passes through the fixing hole, its front end (e.g., front end 131a) is inserted into the recess, and a power supply terminal (e.g., terminal 133, 134) is provided at its base end (e.g., base end 131b). The fixing member is formed as a cylinder surrounding the outer peripheral surface of the heater body and fixes the heater body to the fixing hole with a gap between it and the inner wall of the fixing hole. Therefore, the heating device according to the embodiment can reduce the deterioration of the power supply terminals in the heater.

[0063] Alternatively, in the heating device of the embodiment, the distance between the inner wall of the fixing hole and the portion of the heater body opposite to the inner wall of the fixing hole may be larger than the distance between the inner sidewall of the recess and the portion of the heater body opposite to the inner sidewall of the recess. Therefore, the heating device according to the embodiment can maintain the heating performance of the heating plate and reduce the deterioration of the power supply terminals in the heater.

[0064] Alternatively, in the heating device of the embodiment, the diameter of the fixing hole may be larger than the diameter of the recess. Therefore, the heating device according to the embodiment can suppress the heating of the fixing plate that accompanies the temperature rise of the recess.

[0065] Alternatively, in the heating device of the embodiment, the fixing hole may be formed by a first hole (e.g., first hole 120a-1) located opposite the recess, and a second hole (e.g., second hole 120a-2) continuous with the first hole and with a smaller diameter than the first hole. Alternatively, the distance between the inner wall of the first hole and the portion of the heater body opposite the inner wall of the first hole may be larger than the distance between the inner wall of the second hole and the portion of the heater body opposite the inner wall of the second hole. Therefore, the heating device according to the embodiment can suppress the heating of the fixing plate that accompanies the temperature rise of the recess, and can ensure the area used to fix the heater body to the fixing hole.

[0066] Furthermore, the heating device of the embodiment may also include a spacer member (e.g., spacer member 140) disposed between the heating plate and the fixed plate. Thus, the heating device according to the embodiment can continuously suppress the temperature rise of the fixed plate that accompanies heat transfer from the heating plate.

[0067] Alternatively, in the heating device of the embodiment, the spacer member may be made of ceramic. Therefore, the heating device according to the embodiment can reduce the consumption of the spacer member.

[0068] Alternatively, in the heating device of the embodiment, the fixing plate may have a cooling passage (e.g., flow path 160 or piping 170) inside for the cooling medium to pass through. Therefore, the heating device according to the embodiment can further reduce the deterioration of the power supply terminals in the heater.

[0069] Alternatively, in the heating device of the embodiment, the cooling passage may extend along the surface of the fixed plate opposite to the heating plate (e.g., the upper surface 120b). Therefore, the heating device according to the embodiment can improve the cooling efficiency of the fixed plate.

[0070] Alternatively, in the heating device of the embodiment, the heating plate may have multiple recesses. The fixing plate may also have multiple fixing holes at positions corresponding to the multiple recesses. Furthermore, the cooling passage may be located between adjacent fixing holes. Therefore, the heating device according to the embodiment can improve the cooling efficiency of the fixing plate.

[0071] Those skilled in the art can readily derive further effects and variations. Therefore, the invention is not limited to the specific, detailed, and representative embodiments shown and described above. Thus, various modifications can be made without departing from the spirit or scope of the general invention as defined by the appended claims and their equivalents.

[0072] Explanation of reference numerals in the attached figures:

[0073] 100... Heating device;

[0074] 110... Heating plate;

[0075] 110a...top surface;

[0076] 110b...lower surface;

[0077] 111...First plate component;

[0078] 111a...lower surface;

[0079] 112...Second plate component;

[0080] 112a... Upper surface;

[0081] 112b...through hole;

[0082] 113...concave;

[0083] 120...fixed plate;

[0084] 120a...fixing hole;

[0085] 120a–1...First hole section;

[0086] 120a–2...Second hole section;

[0087] 120b...top surface;

[0088] 130... heater;

[0089] 131...Heater body;

[0090] 131a...Frontend;

[0091] 131b...base terminal;

[0092] 132...fixed components;

[0093] 132a...external thread;

[0094] 133, 134... terminals;

[0095] 140... Spacing member.

Claims

1. A heating device, wherein, The heating device has: A heating plate having a heating surface and a recess formed on the back side opposite to the heating surface; A fixing plate, which is separately disposed from the heating plate, has a fixing hole at a position corresponding to the recess; and A heater having a columnar heater body and a fixing member, the columnar heater body passing through the fixing hole, the front end being inserted into the recess, and a power supply terminal being provided at the base end; the fixing member being formed as a cylinder surrounding the outer peripheral surface of the heater body, fixing the heater body and the inner wall of the fixing hole at a distance from each other in the fixing hole.

2. The heating device according to claim 1, wherein, The distance between the inner wall of the fixing hole and the portion of the heater body opposite the inner wall of the fixing hole is greater than the distance between the inner wall of the recess and the portion of the heater body opposite the inner wall of the recess.

3. The heating device according to claim 1, wherein, The diameter of the fixing hole is larger than the diameter of the recess.

4. The heating device according to any one of claims 1 to 3, wherein, The fixing hole is formed by a first hole located opposite the recess and a second hole continuous with the first hole and having a smaller diameter than the first hole. The distance between the inner wall of the first hole and the portion of the heater body opposite the inner wall of the first hole is greater than the distance between the inner wall of the second hole and the portion of the heater body opposite the inner wall of the second hole.

5. The heating device according to any one of claims 1 to 3, wherein, The heating device also has a spacer member disposed between the heating plate and the fixed plate.

6. The heating device according to claim 5, wherein, The spacer member is made of ceramic.

7. The heating device according to any one of claims 1 to 3, wherein, The fixing plate has a cooling passage inside for the cooling medium to pass through.

8. The heating device according to claim 7, wherein, The cooling passage extends along the surface of the fixed plate opposite the heating plate.

9. The heating device according to claim 7, wherein, The heating plate has a plurality of the aforementioned recesses. The fixing plate has a plurality of fixing holes at positions corresponding to the plurality of recesses. The cooling passage is located between adjacent fixing holes.

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