Micro-nano element for realizing dynamic light field regulation and preparation method thereof
By fabricating transparent electrodes and PMN-PT thin films on a quartz glass substrate and employing nanoimprinting and etching processes, dynamic light field modulation was achieved, solving the problems of complex fabrication of micro-nano components and low refractive index of liquid crystals, thereby improving production efficiency and application potential.
CN116750710BActive Publication Date: 2026-06-12XIAN TECH UNIV
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- XIAN TECH UNIV
- Filing Date
- 2023-06-08
- Publication Date
- 2026-06-12
AI Technical Summary
Technical Problem
Existing micro-nano components have complex fabrication processes, low processing efficiency, and are difficult to mass-produce industrially. Furthermore, liquid crystals have low refractive index, which limits their applications.
Method used
A transparent electrode was fabricated on a quartz glass substrate using nanoimprint etching, and a PMN-PT thin film was then processed on it to form a functional micro/nano structure. The electro-optic effect of PMN-PT was then used to achieve dynamic optical field modulation.
Benefits of technology
It simplifies the processing steps, improves manufacturing efficiency, reduces costs, facilitates mass production, and provides a higher refractive index and broader application prospects.
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Smart Images
Figure CN116750710B_ABST
Abstract
The application relates to the technical field of micro-nano elements and light field regulation, and particularly relates to a micro-nano element for realizing dynamic light field regulation and a preparation method thereof. The preparation comprises the following steps: preparing a master template and a transfer template; processing a layer of transparent electrode on a quartz glass substrate to prepare two electrode plates; processing a PMN-PT film on the transparent electrode layer of the prepared electrode plate; processing the PMN-PT film layer into a functional micro-nano structure; covering another electrode plate above the functional micro-nano structure, and the quartz glass substrate is located on the outer side; the two layers of transparent electrodes are a bottom electrode and a top electrode, wires are connected between the two, and a dynamic light field regulation micro-nano element is obtained. The application has the advantages of simplified steps, flexible processing mode and reduced cost. The application has the advantages of high manufacturing efficiency and easy realization of batch production. The application provides a new idea for dynamic tuning of the light field of a high-refractive-index material metasurface, and can be widely applied to multiple fields such as nanometer sensing, micro-nano object manipulation and capture.
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