TiSiN-based multinary nitride coating and method for producing the same

Abstract

The application discloses a TiSiN-based multinary nitride coating and a preparation method thereof. The TiSiN-based multinary nitride coating is a Ti 1‑a‑b‑c Si a X b Y c N coating, X is Ce and / or La, Y is one or more elements selected from W, Re, Os and Ta, 0.05<=a<=0.20, 0.01<=b<=0.03 and 0.01<=c<=0.06. The preparation method comprises the following steps: pretreating a cutter substrate, and preparing a Ti 1‑a‑b‑c Si a X b Y c N coating on the pretreated cutter substrate by using a TiSiXY metal target. The coating has high hardness, high wear resistance and excellent high-temperature oxidation resistance, can effectively reduce coating stress, has simple preparation method and low production cost, and can be widely applied to protective coating materials with wear resistance and corrosion resistance.

Description

Technical Field

[0001] This invention belongs to the field of wear-resistant protective coating technology, and relates to a TiSiN-based multi-component nitride coating and its preparation method, specifically involving a Ti 1-a-b-c Si a X b Y c Multi-component nitride coatings and their preparation methods. Background Technology

[0002] Surface coatings are widely used in fields such as biology, machinery, chemical engineering, electronics, and optics, greatly extending the service life of traditional materials and broadening their application range. TiSiN coatings, with their high hardness and red hardness, are widely used in wear-resistant protective coatings. The Si element in the Ti-Si-N system exists in two forms: one is that Si substitutes for Ti in TiN to form a substitution solid solution, but the solubility is limited; the other is that Si reacts with N to form α-SiN. x to form a-SiN x Nanocrystalline composite structures encapsulating nanocrystalline (nc)TiN. Both forms can effectively improve the mechanical properties and thermal stability of the coating. However, the TiSiN coating has the following disadvantages that limit its application: (1) Although the addition of Si improves the oxidation resistance of the coating to a certain extent, the oxidation resistance of the TiSiN coating is still relatively low; (2) The stress of the TiSiN coating is relatively large; (3) There are many macroscopic defects of "droplets" in the TiSiN coating prepared by cathodic arc evaporation.

[0003] Reference [Wen Hu, Jianwei Du, Zheren Liu, et al. Structure, mechanical and thermal properties of TiSiWN coatings, Coatings 2013, 12, 119] shows that adding W to TiSiN coatings can reduce droplet defects in the coating and improve the coating's oxidation resistance, but the addition of W further increases the stress of the coating. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to overcome the shortcomings of the prior art and provide a TiSiN-based multi-component nitride coating that can effectively reduce coating stress and has excellent hardness, high-temperature oxidation resistance and wear resistance, as well as a method for preparing the same.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution.

[0006] A TiSiN-based multi-component nitride coating, wherein the TiSiN-based multi-component nitride coating is Ti 1-a-b-c Sia X b Y c N coating, X is Ce and / or La, Y is one or more elements selected from W, Re, Os and Ta, 0.05≤a≤0.20, 0.01≤b≤0.03, 0.01≤c≤0.06.

[0007] In the above-mentioned TiSiN-based multi-component nitride coating, preferably, 0.08 ≤ a ≤ 0.15.

[0008] In the above-mentioned TiSiN-based multi-component nitride coating, preferably, 0.01≤b≤0.02.

[0009] In the above-mentioned TiSiN-based multi-component nitride coating, preferably, 0.02≤c≤0.04.

[0010] In the above-mentioned TiSiN-based multi-component nitride coating, preferably, the Ti atoms in the Y-substituted nitride exist in the coating in a solid solution form.

[0011] In the above-mentioned TiSiN-based multi-component nitride coating, preferably, when X is Ce and La, the atomic fraction of Ce is u1 and the atomic fraction of La is u2, then 0.005≤u1≤0.015 and 0.005≤u2≤0.015.

[0012] Preferably, the target material used to prepare the TiSiN-based multi-component nitride coating is a TiSiXY metal target.

[0013] As a general technical concept, the present invention also provides a method for preparing the above-mentioned TiSiN-based multi-component nitride coating, comprising the following steps:

[0014] (1) Pre-treat the tool substrate;

[0015] (2) TiSiXY metal target material is used to prepare Ti on the pretreated tool substrate. 1-a-b-c Si a X b Y c N coating.

[0016] In the above-mentioned method for preparing TiSiN-based multi-component nitride coatings, preferably, in step (2), the preparation method is physical vapor deposition.

[0017] In the above-mentioned method for preparing TiSiN-based multi-component nitride coatings, preferably, in step (2), the physical vapor deposition method is the cathodic arc evaporation method.

[0018] In the TiSiN-based multi-component nitride coating of the present invention, when Y is multiple elements among Re, Os and Ta, the sum of the atomic fractions of the multiple elements is c, where 0.01≤c≤0.06.

[0019] The Ti of the present invention 1-a-b-c Si a X b Y c For the N-coating, the Si content is controlled at 0.05 ≤ a ≤ 0.20, preferably 0.08 ≤ a ≤ 0.15. This applies regardless of whether Si is in solid solution or amorphous SiN. x The principle remains the same: excessively low Si content offers limited improvement in coating hardness and oxidation resistance, while high Si content, although enhancing oxidation resistance, actually reduces hardness. Therefore, coatings achieving better overall performance are those with Si content controlled within the range of 0.05 ≤ a ≤ 0.20.

[0020] The Ti of the present invention 1-a-b-c Si a X b Y c The N coating has an X content controlled at 0.01 ≤ b ≤ 0.03, preferably 0.01 ≤ b ≤ 0.02. When using physical vapor deposition (PVD) for coating, the coating components are deposited on the substrate in the form of ions or atoms. For example, in preparing a TiSiN coating, the particles deposited on the substrate are atoms or ions of Ti, Si, and N. When the deposited particles are in an atomic state, their surface diffusion ability is limited, leading to more defects in the coating and increasing its stress. In TiSiN coatings, Si is difficult to ionize during deposition and is mostly deposited in an atomic state. Its limited surface diffusion ability results in more microscopic defects in the coating, thus increasing its stress. Therefore, TiSiN coatings have high stress. This invention adds Ce, La, or Ce+La to the target material. Ce and La are easily ionized elements, releasing a large number of secondary electrons while in an ionic state during deposition, promoting the ionization of Si and reducing coating defects, thereby lowering the coating stress. Adding small amounts of Ce and La to TiSiN coatings can improve their oxidation resistance. Ce and La have a good affinity for oxygen and preferentially react with oxygen at the grain boundaries during oxidation to form oxides, creating barriers that inhibit element diffusion and thus improve the coating's oxidation resistance. However, when the content of Ce and La is high, the reaction between Ce and La and oxygen becomes more intense, which can actually reduce the coating's oxidation resistance. Furthermore, adding X elements in a mixed form of Ce and La can more effectively improve the coating's oxidation resistance.

[0021] The Ti of the present invention 1-a-b-c Si a X b Yc In the N coating, preferably, X consists of two elements, Ce and La, with the content (u) of each element being 0.005 ≤ u ≤ 0.015. When the X elements Ce and La are added in a mixed form, the antioxidant properties of the coating are more effectively improved.

[0022] The Ti of the present invention 1-a-b-c Si a X b Y c For the N-coating, the Y content is controlled to be 0.01≤c≤0.06, preferably 0.02≤c≤0.04. When appropriate amounts of one or more elements from W, Re, Os, and Ta are added to the TiSiN coating, W, Re, Os, and Ta replace Ti atoms in TiN and exist in the coating in solid solution form, which can improve the coating's hardness and oxidation resistance. However, when the Y content exceeds its solid solubility in TiN, some Y exists as a metal in the coating, which actually reduces the coating's hardness. In particular, when the deposition method is cathodic arc evaporation deposition, the uneven evaporation of the target material can lead to a large number of macroscopic "droplet" defects in the coating. However, when high-melting-point elements such as W, Re, Os, and Ta are added to the target material (the melting points of W, Re, Os, and Ta are 3410℃, 3180℃, 3054℃, and 2996℃, respectively), these high-melting-point elements are uniformly dispersed in the TiSiXY metal target material, reducing uneven evaporation of the target material and thus effectively reducing surface defects in the coating.

[0023] The Ti of the present invention 1-a-b-c Si a X b Y c In the N coating, preferably, Y is one or more elements selected from Re, Os, and Ta. Because W has low solid solubility in the TiSiN coating, when the W content reaches 0.04%, a small amount of W already exists in the coating as a metallic element.

[0024] In the preparation method of the present invention, the physical vapor deposition method (such as the cathode arc evaporation method) used is a conventional technology, and the deposition parameters involved can be obtained by adjusting conventional parameters according to the product design requirements of the present invention.

[0025] Compared with the prior art, the advantages of the present invention are as follows:

[0026] 1. The TiSiN-based multi-component nitride coating (TiSiN-based multi-component nitride coating of the present invention) 1-a-b-c Si a X b Y cIn the TiSiN coating, a small amount of easily ionized X element (X = Ce or La or Ce + La) is added. During the deposition process, it is in an ionic state and releases a large number of secondary electrons, which promotes the ionization of Si element and reduces coating defects, thereby reducing coating stress. In addition, a small amount of Ce and / or La element can improve the oxidation resistance of the coating.

[0027] The TiSiN-based multi-component nitride coating of the present invention improves the hardness and oxidation resistance of the coating by adding a high-melting-point element Y (Y can be one or more elements such as W, Re, Os, and Ta) to the TiSiN coating. When the coating is prepared by cathodic arc evaporation, the high-melting-point element is uniformly distributed in the target material, which reduces the uneven evaporation of the target material, thereby effectively reducing the surface defects of the coating.

[0028] 2. The preparation method of the TiSiN-based multi-component nitride coating of the present invention has the characteristics of simple process, low equipment requirements and low production cost. The coated cutting tools prepared by the present invention can effectively improve the comprehensive performance of TiSiN coating and can be widely used in wear-resistant and corrosion-resistant protective coating materials. Attached Figure Description

[0029] Figure 1 Ti in Embodiment 1 of the present invention 0.82 Si 0.12 Ce 0.02 Re 0.04 N coating and contrast coating Ti 0.88 Si 0.12 Surface topography of N, where a is Ti 0.82 Si 0.12 Ce 0.02 Re 0.04 Surface morphology of N coating, b is Ti coating 0.88 Si 0.12 Surface morphology diagram of N coating.

[0030] Figure 2 Ti in Embodiment 1 of the present invention 0.82 Si 0.12 Ce 0.02 Re 0.04 N coating (a) and Ti 0.88 Si 0.12 Image of the fracture surface of the N coating (b) after oxidation at 700℃ for 10 h. Detailed Implementation

[0031] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention. All materials and instruments used in the following embodiments are commercially available.

[0032] Example 1

[0033] A TiSiN-based multi-component nitride coating of the present invention, wherein the TiSiN-based multi-component nitride coating is Ti 1-a-b- c Si a X b Y c N coating, Ti 1-a-b-c Si a X b Y c The N coating is specifically Ti. 0.82 Si 0.12 Ce 0.02 Re 0.04 In the N-coating, Y replaces Ti atoms in the nitride and exists in the coating in a solid solution form.

[0034] A method for preparing a TiSiN-based multi-component nitride coating according to the present invention involves preparing the coating on alumina (for measuring hardness, oxidation resistance, and surface morphology) and stainless steel sheet (for measuring stress) substrates using a cathodic arc evaporation method. The target material is a TiSiCeRe target, and the prepared coating composition is Ti. 0.82 Si 0.12 Ce 0.02 Re 0.04 N.

[0035] Comparative coating 1 is a commercially available Ti coating prepared under the same process conditions. 0.88 Si 0.12 N. Figure 1 a represents the prepared Ti 0.82 Si 0.12 Ce 0.02 Re 0.04 Surface morphology of N coating Figure 1 b is Ti 0.88 Si 0.12 The surface morphology of the N coating. As can be seen from the figure, the Ti... 0.82 Si 0.12 Ce 0.02 Re 0.04 The surface "droplet" macroscopic defects of the N coating are significantly less than those of the Ti coating. 0.88 Si 0.12 N coating. Figure 2 a and Figure 2 b is Ti 0.82 Si 0.12 Ce 0.02 Re 0.04 N and Ti 0.88 Si 0.12 The oxidation fracture morphology of the N coating after oxidation at 700℃ for 10 hours can be seen from the figure. 0.82 Si 0.12 Ce0.02 Re 0.04 N and Ti 0.88 Si 0.12 The thicknesses of the N-coated oxide layers are 240 nm and 620 nm, respectively. As shown in Table 1, compared to the contrasting Ti... 0.88 Si 0.12 With the N coating, the hardness, surface "droplet" macroscopic defects, stress, and oxidation resistance of Example 1 are all improved.

[0036] Comparison coating 2 is Ti 0.86 Si 0.12 W 0.02 N coating (control test), as shown in Table 1, the Ti coating in Example 1... 0.82 Si 0.12 Ce 0.02 Re 0.04 The hardness and coating stress of coating N are significantly better than those of coating 2 in comparison.

[0037] Table 1 Performance of the coating prepared in Example 1 and the comparative coating

[0038] Hardness (GPa) Coating stress (GPa) Example 1 41.2 -7.13 Comparison Coating 1 38.9 -9.79 Contrast Coating 2 40.3 -10.96

[0039] Example 2

[0040] A TiSiN-based multi-component nitride coating of the present invention, wherein the TiSiN-based multi-component nitride coating is Ti 1-a-b- c Si a X b Y c N coating, Ti 1-a-b-c Si a X b Y c The N coating is specifically Ti. 0.82 Si 0.12 Ce 0.01 La 0.01 Re 0.04 In the N-coating, Y replaces Ti atoms in the nitride and exists in the coating in a solid solution form.

[0041] A method for preparing a TiSiN-based multi-component nitride coating according to the present invention involves preparing the coating on alumina (for hardness, oxidation resistance, and surface morphology testing) and stainless steel sheet (for stress testing) substrates using a cathodic arc evaporation method. The target material is a TiSiCeLaRe target, and the prepared coating composition is Ti. 0.82 Si 0.12 Ce 0.01 La 0.01 Re 0.04 N.

[0042] Comparative coating 1 is a commercially available Ti coating prepared under the same process conditions. 0.88 Si 0.12 N, compared to coating 2, is Ti. 0.86 Si 0.12 W 0.02 N coating. As shown in Table 2, compared to the contrasting Ti coating... 0.88 Si 0.12 N coating and Ti 0.86 Si 0.12 W 0.02 In Example 2, the hardness and stress of the N-coating were improved. Compared to Example 1, only the X element was changed from Ce to a mixture of Ce and La, resulting in increased coating hardness and reduced stress.

[0043] Table 2. Preparation of coating and comparison of Ti in Example 2. 0.88 Si 0.12 Performance table of N coating

[0044] Hardness (GPa) Coating stress (GPa) Example 2 42.5 -5.91 Comparison Coating 1 38.9 -9.79 Contrast Coating 2 40.3 -10.96

[0045] Example 3

[0046] A TiSiN-based multi-component nitride coating of the present invention, wherein the TiSiN-based multi-component nitride coating is Ti 1-a-b- c Si a X b Y c N coating, Ti 1-a-b-c Si a X b Y c The N coating is specifically Ti. 0.82 Si 0.12 Ce 0.01 La 0.01 W 0.02 Re 0.02 In the N-coating, Y replaces Ti atoms in the nitride and exists in the coating in a solid solution form.

[0047] A method for preparing a TiSiN-based multi-component nitride coating according to the present invention involves preparing the coating on alumina (for hardness, oxidation resistance, and surface morphology testing) and stainless steel sheet (for stress testing) substrates using a cathodic arc evaporation method. The target material is a TiSiCeLaWRe target, and the prepared coating composition is Ti. 0.82 Si 0.12 Ce 0.01 La 0.01 W 0.02 Re 0.02 N.

[0048] Comparative coating 1 is a commercially available Ti coating prepared under the same process conditions. 0.88Si 0.12 N, compared to coating 2, is Ti. 0.86 Si 0.12 W 0.02 As shown in Table 3, the N coating, compared to the Ti coating, 0.88 Si 0.12 N coating and Ti 0.86 Si 0.12 W 0.02 In Example 3, the N-coating showed improved hardness and stress. Compared to Example 2, only the Y element was changed from Re to a mixture of Re and W elements, resulting in increased coating hardness but a slight increase in stress.

[0049] Table 3. Preparation of coating and comparison of Ti in Example 3. 0.88 Si 0.12 Hardness and surface roughness of N coating

[0050] Hardness (GPa) Coating stress (GPa) Example 3 43.1 -6.28 Comparison Coating 1 38.9 -9.79 Contrast Coating 2 40.3 -10.96

[0051] Example 4

[0052] A TiSiN-based multi-component nitride coating of the present invention, wherein the TiSiN-based multi-component nitride coating is Ti 1-a-b- c Si a X b Y c N coating, Ti 1-a-b-c Si a X b Y c The N coating is specifically Ti. 0.81 Si 0.15 La 0.01 W 0.03 N and Y atoms in the nitride are present in the coating in a solid solution form.

[0053] A method for preparing a TiSiN-based multi-component nitride coating according to the present invention involves preparing the coating on alumina (for hardness, oxidation resistance, and surface morphology testing) and stainless steel sheet (for stress testing) substrates using a cathodic arc evaporation method. The target material is a TiSiLaW target, and the prepared coating composition is Ti. 0.81 Si 0.15 La 0.01 W 0.03 N.

[0054] Comparative coating 1 is a commercially available Ti coating prepared under the same process conditions. 0.88 Si 0.12 N. Comparison coating 2 is Ti 0.86 Si 0.12 W 0.02 As shown in Table 4, the N coating, compared to the Ti coating,0.88 Si 0.12 N coating and Ti 0.86 Si 0.12 W 0.02 With the N coating, both hardness and stress are improved in Example 4.

[0055] Table 4. Preparation of coating and comparison Ti in Example 4 0.88 Si 0.12 Hardness and surface roughness of N coating

[0056] Hardness (GPa) Coating stress (GPa) Example 4 42.7 -7.28 Comparison Coating 1 38.9 -9.79 Contrast Coating 2 40.3 -10.96

[0057] Example 5

[0058] A TiSiN-based multi-component nitride coating of the present invention, wherein the TiSiN-based multi-component nitride coating is Ti 1-a-b- c Si a X b Y c N coating, Ti 1-a-b-c Si a X b Y c The N coating is specifically Ti. 0.83 Si 0.08 Ce 0.03 Ta 0.06 In the N-coating, Y replaces Ti atoms in the nitride and exists in the coating in a solid solution form.

[0059] A method for preparing a TiSiN-based multi-component nitride coating according to the present invention involves preparing the coating on alumina (for hardness, oxidation resistance, and surface morphology testing) and stainless steel sheet (for stress testing) substrates using a cathodic arc evaporation method. The target material is a TiSiCeTa target, and the prepared coating composition is Ti. 0.83 Si 0.08 Ce 0.03 Ta 0.06 N.

[0060] Comparative coating 1 is a commercially available Ti coating prepared under the same process conditions. 0.88 Si 0.12 N. Comparison coating 2 is Ti 0.86 Si 0.12 W 0.02 As shown in Table 5, the N coating, compared to the Ti coating, 0.88 Si 0.12 N coating and Ti 0.86 Si 0.12 W 0.02 With the N coating, the hardness and stress of this Example 5 are improved.

[0061] Table 5. Preparation of coating and comparative Ti in Example 5. 0.88 Si 0.12 Hardness and surface roughness of N coating

[0062] Hardness (GPa) Coating stress (GPa) Example 5 43.5 -6.31 Comparison Coating 1 38.9 -9.79 Contrast Coating 2 40.3 -10.96

[0063] Example 6

[0064] A TiSiN-based multi-component nitride coating of the present invention, wherein the TiSiN-based multi-component nitride coating is Ti 1-a-b- c Si a X b Y c N coating, Ti 1-a-b-c Si a X b Y c The N coating is specifically Ti. 0.76 Si 0.20 La 0.03 Os 0.01 In the N-coating, Y replaces Ti atoms in the nitride and exists in the coating in a solid solution form.

[0065] A method for preparing a TiSiN-based multi-component nitride coating according to the present invention involves preparing the coating on alumina (for hardness, oxidation resistance, and surface morphology testing) and stainless steel sheet (for stress testing) substrates using a cathodic arc evaporation method. The target material is a TiSiLaOs target, and the prepared coating composition is Ti. 0.76 Si 0.20 La 0.03 Os 0.01 N.

[0066] Comparative coating 1 is a commercially available Ti coating prepared under the same process conditions. 0.88 Si 0.12 N, compared to coating 2, is Ti. 0.86 Si 0.12 W 0.02 As shown in Table 6, the N coating, compared to the Ti coating, 0.88 Si 0.12 N coating and Ti 0.86 Si 0.12 W 0.02 With the N coating, the hardness and stress of this Example 6 are improved.

[0067] Table 6 Performance of the coating prepared in Example 6 and the comparative coating

[0068] Hardness (GPa) Coating stress (GPa) Example 6 40.3 -6.85 Comparison Coating 1 38.9 -9.79 Contrast Coating 2 40.3 -10.96

[0069] Example 7

[0070] A TiSiN-based multi-component nitride coating of the present invention, wherein the TiSiN-based multi-component nitride coating is Ti 1-a-b- c Si a X b Y c N coating, Ti 1-a-b-c Si a X b Y c The N coating is specifically Ti. 0.82 Si 0.15 Ce 0.01 La 0.01 Os 0.01 In the N-coating, Y replaces Ti atoms in the nitride and exists in the coating in a solid solution form.

[0071] A method for preparing a TiSiN-based multi-component nitride coating according to the present invention involves preparing the coating on alumina (for hardness, oxidation resistance, and surface morphology testing) and stainless steel sheet (for stress testing) substrates using a cathodic arc evaporation method. The target material is a TiSiCeLaOs target, and the prepared coating composition is Ti. 0.82 Si 0.15 Ce 0.01 La 0.01 Os 0.01 N.

[0072] Comparative coating 1 is a commercially available Ti coating prepared under the same process conditions. 0.88 Si 0.12 N, compared to coating 2, is Ti. 0.86 Si 0.12 W 0.02 As shown in Table 7, the N coating, compared to the Ti coating, 0.88 Si 0.12 N coating and Ti 0.86 Si 0.12 W 0.02 With the N coating, the hardness and stress of this Example 7 are improved.

[0073] Table 7 Performance of the coating prepared in Example 7 and the comparative coating

[0074] Hardness (GPa) Coating stress (GPa) Example 7 41.9 -6.74 Comparison Coating 1 38.9 -9.79 Contrast Coating 2 40.3 -10.96

[0075] Example 8

[0076] A TiSiN-based multi-component nitride coating of the present invention, wherein the TiSiN-based multi-component nitride coating is Ti 1-a-b- c Si a X b Y c N coating, Ti 1-a-b-c Si aX b Y c The N coating is specifically Ti. 0.82 Si 0.10 Ce 0.01 La 0.01 Re 0.01 Os 0.01 Ta 0.04 In the N-coating, Y replaces Ti atoms in the nitride and exists in the coating in a solid solution form.

[0077] A method for preparing a TiSiN-based multi-component nitride coating according to the present invention involves preparing the coating on alumina (hardness, oxidation resistance, and surface morphology testing) and stainless steel sheet (stress testing) substrates using a cathodic arc evaporation method. The target material is TiSiCeLaReOsTa, and the prepared coating composition is Ti. 0.82 Si 0.10 Ce 0.01 La 0.01 Re 0.01 Os 0.01 Ta 0.04 N.

[0078] Comparative coating 1 is a commercially available Ti coating prepared under the same process conditions. 0.88 Si 0.12 N, compared to coating 2, is Ti. 0.86 Si 0.12 W 0.02 As shown in Table 8, the N coating, compared to the Ti coating, 0.88 Si 0.12 N coating and Ti 0.86 Si 0.12 W 0.02 With the N coating, the hardness and stress of this Example 8 are improved.

[0079] Table 8. Preparation of coating and comparison Ti in Example 8 0.88 Si 0.12 Hardness and surface roughness of N coating

[0080] Hardness (GPa) Coating stress (GPa) Example 8 44.2 -6.92 Comparison Coating 1 38.9 -9.79 Contrast Coating 2 40.3 -10.96

[0081] Example 9

[0082] A TiSiN-based multi-component nitride coating of the present invention, wherein the TiSiN-based multi-component nitride coating is Ti 1-a-b- c Si a X b Y c N coating, Ti 1-a-b-c Si a X b Y c The N coating is specifically Ti.0.83 Si 0.10 Ce 0.01 Re 0.02 Ta 0.04 In the N-coating, Y replaces Ti atoms in the nitride and exists in the coating in a solid solution form.

[0083] A method for preparing a TiSiN-based multi-component nitride coating according to the present invention involves preparing the coating on alumina (for hardness, oxidation resistance, and surface morphology testing) and stainless steel sheet (for stress testing) substrates using a cathodic arc evaporation method. The target material is a TiSiCeReTa target, and the prepared coating composition is Ti. 0.83 Si 0.10 Ce 0.01 Re 0.02 Ta 0.04 N.

[0084] Comparative coating 1 is a commercially available Ti coating prepared under the same process conditions. 0.88 Si 0.12 N, compared to coating 2, is Ti. 0.86 Si 0.12 W 0.02 As shown in Table 9, the N coating, compared to the Ti coating, 0.88 Si 0.12 N coating and Ti 0.86 Si 0.12 W 0.02 With the N coating, the hardness and stress of this Example 9 are both improved.

[0085] Table 9 Performance of the coating prepared in Example 9 and the comparative coating

[0086] Hardness (GPa) Coating stress (GPa) Example 9 41.8 -6.58 Comparison Coating 1 38.9 -9.79 Contrast Coating 2 40.3 -10.96

[0087] Example 10

[0088] A TiSiN-based multi-component nitride coating of the present invention, wherein the TiSiN-based multi-component nitride coating is Ti 1-a-b- c Si a X b Y c N coating, Ti 1-a-b-c Si a X b Y c The N coating is specifically Ti. 0.84 Si 0.08 Ce 0.02 Re 0.01 Os 0.01 Ta 0.04 In the N-coating, Y replaces Ti atoms in the nitride and exists in the coating in a solid solution form.

[0089] A method for preparing a TiSiN-based multi-component nitride coating according to the present invention involves preparing the coating on alumina (for hardness, oxidation resistance, and surface morphology testing) and stainless steel sheet (for stress testing) substrates using a cathodic arc evaporation method. The target material is a TiSiCeReOsTa target, and the prepared coating composition is Ti. 0.84 Si 0.08 Ce 0.02 Re 0.01 Os 0.01 Ta 0.04 N.

[0090] Comparative coating 1 is a commercially available Ti coating prepared under the same process conditions. 0.88 Si 0.12 N, compared to coating 2, is Ti. 0.86 Si 0.12 W 0.02 N coating. As shown in Table 10, compared to the contrasting Ti coating... 0.88 Si 0.12 N coating and Ti 0.86 Si 0.12 W 0.02 With the N coating, the hardness and stress of Example 10 are improved.

[0091] Table 10 Performance of the coating prepared in Example 10 and the comparative coating

[0092] Hardness (GPa) Coating stress (GPa) Example 11 42.8 -6.05 Comparison Coating 1 38.9 -9.79 <![CDATA[Compare Ti 0.86 Si 0.12 W 0.02 N]]> 40.3 -10.96

[0093] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make many possible variations and modifications to the technical solutions of the present invention using the methods and techniques disclosed above, or modify them into equivalent embodiments with equivalent changes, without departing from the spirit and technical essence of the present invention. Therefore, any simple modifications, equivalent substitutions, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solutions of the present invention shall still fall within the protection scope of the technical solutions of the present invention.

Claims

1. A TiSiN-based multi-component nitride coating, characterized in that, The TiSiN-based multi-component nitride coating is Ti 1-a-b- c Si a X b Y c For the N coating, X is Ce and La, and Y is one or more elements selected from Re, Os, and Ta, with 0.05≤a≤0.20, 0.01≤b≤0.03, and 0.01≤c≤0.

06. The atomic fraction of Ce is u1, and the atomic fraction of La is u2, so 0.005≤u1≤0.015 and 0.005≤u2≤0.

015.

2. The TiSiN-based multi-component nitride coating according to claim 1, characterized in that, 0.08≤a≤0.15。 3. The TiSiN-based multi-component nitride coating according to claim 1, characterized in that, 0.01≤b≤0.02。 4. The TiSiN-based multi-component nitride coating according to claim 1, characterized in that, 0.02≤c≤0.04。 5. The TiSiN-based multi-component nitride coating according to any one of claims 1 to 4, characterized in that, Y-substituted Ti atoms in the nitride exist in the coating in a solid solution form.

6. The TiSiN-based multi-component nitride coating according to any one of claims 1 to 4, characterized in that, The target material used to prepare the TiSiN-based multi-component nitride coating is a TiSiXY metal target.

7. A method for preparing a TiSiN-based multi-component nitride coating as described in any one of claims 1 to 6, characterized in that, Includes the following steps: (1) Pre-treat the tool substrate; (2) TiSiXY metal target material is used to prepare Ti on the pretreated tool substrate. 1-a-b-c Si a X b Y c N coating.

8. The method for preparing a TiSiN-based multi-component nitride coating according to claim 7, characterized in that, In step (2), the preparation method is physical vapor deposition.

9. The method for preparing a TiSiN-based multi-component nitride coating according to claim 8, characterized in that, In step (2), the physical vapor deposition method is the cathode arc evaporation method.

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