Segmented integrated vacuum pumping system

Abstract

This invention relates to a segmented integrated vacuum system, comprising integrated vacuum piping, integrated vacuum units, and integrated vacuum workstations. The integrated vacuum piping includes at least two types of vacuum piping selected from low-vacuum, medium-vacuum, and high-vacuum pipes. The integrated vacuum units include at least two types of vacuum units corresponding to the integrated vacuum piping. The low-vacuum pipes are connected to multiple low-vacuum pumps and are connected to the workpiece evacuation interface via low-vacuum switching valves. The medium-vacuum pipes are connected to multiple medium-vacuum pumps and are connected to the workpiece evacuation interface via medium-vacuum switching valves. The high-vacuum pipes are connected to multiple high-vacuum pumps and are connected to the workpiece evacuation interface via high-vacuum switching valves. This invention improves equipment utilization and production efficiency while reducing energy consumption and operating costs.

Description

Technical Field

[0001] This invention relates to the field of vacuum technology, and in particular to a segmented integrated vacuum system. Background Technology

[0002] Currently, vacuuming operations are carried out by decentralized and independent vacuuming units to perform vacuuming operations on one workpiece or a group of workpieces. The characteristics of this operation mode are: the vacuum units operate independently and there is no connection between the vacuum units; therefore, there are the following defects: (1) When a component of the unit fails, the production of the unit is interrupted, or the unit needs to be repaired and debugged, or other backup units need to be hoisted and replaced; (2) When long-term vacuuming is required, the unit needs to run for a long time, which is not conducive to equipment maintenance; (3) This decentralized operation has a large human factor, is prone to misjudgment and omission, has a high labor intensity, and cannot handle temporary emergency accidents such as water outages and power outages in a unified and automatic manner; (4) The vacuuming operation with decentralized equipment has low efficiency, high equipment occupancy rate, high overall energy consumption, and also results in high costs for equipment, materials, energy, management and operation. Summary of the Invention

[0003] The purpose of this invention is to overcome the above-mentioned shortcomings and provide a segmented integrated vacuum system that automates vacuuming operations, improves equipment utilization and production efficiency, and reduces energy consumption and operating costs.

[0004] The objective of this invention is achieved as follows:

[0005] A segmented integrated vacuum system includes integrated vacuum pipelines, integrated vacuum units, and integrated vacuum stations. The integrated vacuum pipelines include at least two types of vacuum pipelines among a plurality of low-vacuum pipelines, medium-vacuum pipelines, and high-vacuum pipelines. The integrated vacuum units include at least two types of vacuum units among a plurality of low-vacuum units, medium-vacuum units, and high-vacuum units corresponding to the integrated vacuum pipelines.

[0006] The low-vacuum pipeline connects to multiple low-vacuum pumps and is connected to the workpiece evacuation port via a low-vacuum switching valve; the medium-vacuum pipeline connects to multiple medium-vacuum pumps and is connected to the workpiece evacuation port via a medium-vacuum switching valve; the high-vacuum pipeline connects to multiple high-vacuum pumps and is connected to the workpiece evacuation port via a high-vacuum switching valve.

[0007] The low vacuum pipeline is connected to the high vacuum pipeline via a first bypass valve, the low vacuum pipeline is connected to the medium vacuum pipeline via a second bypass valve, and the medium vacuum pipeline is connected to the high vacuum pipeline via a third bypass valve.

[0008] The low vacuum unit includes multiple low vacuum pumps, and the inlet pipe of the low vacuum pump is equipped with a second vacuum gauge; the medium vacuum unit includes multiple medium vacuum pumps, and the inlet pipe of the medium vacuum pump is equipped with a third vacuum gauge; the high vacuum unit includes multiple high vacuum pumps, and the inlet pipe of the high vacuum pump is equipped with a fourth vacuum gauge; the exhaust port of the low vacuum pump is connected to an exhaust pipe.

[0009] The vacuuming station integration includes multiple vacuuming stations, which are evenly arranged on the vacuuming pipeline according to the size of the workpiece. Each vacuuming station is connected to the workpiece through a workpiece vacuuming interface, which is connected in parallel to the high vacuum pipeline through a high vacuum switching valve, in parallel to the medium vacuum pipeline through a medium vacuum switching valve, and in parallel to the low vacuum pipeline through a low vacuum switching valve. A first vacuum gauge is connected in parallel between the workpiece vacuuming interface and the high vacuum switching valve, the medium vacuum switching valve, and the low vacuum switching valve.

[0010] Furthermore, multiple coarse pumping valves are evenly spaced on the low vacuum pipeline, and the coarse pumping valves are connected to the low vacuum pump.

[0011] Furthermore, multiple medium vacuum control valves are evenly spaced on the medium vacuum pipeline, and the medium vacuum control valves are connected to the medium vacuum pump.

[0012] Furthermore, multiple high-vacuum control valves are evenly spaced on the high-vacuum pipeline, and the high-vacuum control valves are connected to the high-vacuum pump.

[0013] Furthermore, the medium vacuum unit also includes a medium vacuum pump backing pump, the exhaust port of the medium vacuum pump is connected to the inlet of the medium vacuum pump backing pump, and the exhaust port of the medium vacuum pump backing pump is connected to an exhaust pipe.

[0014] Furthermore, the high vacuum unit also includes a high vacuum pump backing pump, the exhaust port of the high vacuum pump is connected to the inlet of the high vacuum pump backing pump, and the exhaust port of the high vacuum pump backing pump is connected to an exhaust pipe.

[0015] Furthermore, the hot nitrogen purging device includes a heater, a nitrogen purging pipe, a nitrogen storage tank, and a nitrogen thermal controller. The heater is installed on the workpiece, the nitrogen purging pipe is connected to the workpiece evacuation port through a nitrogen purging valve, and the nitrogen purging pipe is connected to the nitrogen storage tank through the nitrogen thermal controller.

[0016] Furthermore, the control system includes a vacuum process bus, a vacuum control bus, a unit control bus, and a control console. The control console is connected to a nitrogen replacement valve, a high vacuum switching valve, a medium vacuum switching valve, and a low vacuum switching valve via the vacuum process bus. The control console is connected to a roughing valve, a medium vacuum control valve, and a high vacuum control valve via the vacuum control bus. The control console is connected to a low vacuum pump, a medium vacuum pump, a medium vacuum pump backing pump, a high vacuum pump, and a high vacuum pump backing pump via the unit control bus.

[0017] Furthermore, the control console controls the opening and closing of each vacuum pump, control valve, maintaining pump, displacement valve, and switching valve. It also measures and records the temperature and vacuum data and real-time curves of the process through the heater and the first vacuum gauge, identifies the stage transitions of the process, statistically calculates and reports the process results of the workpiece, judges abnormal situations and alarms and provides handling suggestions.

[0018] Furthermore, the vacuum unit is installed in a noise-reducing machine room with sound insulation and noise reduction functions.

[0019] Compared with the prior art, the beneficial effects of the present invention are:

[0020] The segmented integrated vacuum system of this invention consists of an integrated vacuum pipeline, an integrated vacuum unit, an integrated vacuum station, and a hot nitrogen replacement device, forming an automated vacuum production line. The process control system is composed of a control console connected to the integrated vacuum unit and the integrated vacuum station via a control bus. The control system identifies the process node of each workpiece by comparing dynamic data of each workpiece being vacuumed, analyzes and calculates the degree of compliance of the workpiece's process, determines the process flow progress, and issues alarm prompts for non-compliance with process indicators, thereby achieving optimal automatic coordination between equipment operations.

[0021] The vacuum system of this invention achieves optimal coordination between vacuum units. The control bus and the vacuum station are integrated to form a process analysis and control subsystem, which can automatically process the vacuuming process of the workpiece and record the process of each workpiece. Through big data statistics and analysis of the process, it can automatically determine the online quality qualification level of the workpiece and provide alarms for abnormal workpiece handling and characteristic data result reports, thus completing unmanned automatic vacuuming operation.

[0022] This invention employs a data identification and analysis-based process control method to automate vacuuming operations. Computer identification, judgment, and operation replace manual labor, reducing human error, improving equipment utilization and production efficiency, and lowering energy consumption and operating costs. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the segmented integrated vacuum system of the present invention.

[0024] in:

[0025] Workpiece 1, Heater 2, First Vacuum Gauge 3, Nitrogen Replacement Pipe 4, High Vacuum Pipeline 5, Medium Vacuum Pipeline 6, Low Vacuum Pipeline 7, Exhaust Pipe 8, Noise Reduction Room 9, Second Vacuum Gauge 10, Third Vacuum Gauge 11, Fourth Vacuum Gauge 12, Nitrogen Replacement Valve 13, Workpiece Evacuation Interface 14, High Vacuum Switching Valve 15, Medium Vacuum Switching Valve 16, Low Vacuum Switching Valve 17, First Bypass Valve 18, Second Bypass Valve 19, Evacuation Station 20, Third Bypass Valve 21, Low Vacuum Pump 22, Coarse Evacuation Valve 23, Medium Vacuum Pump 24, Medium Vacuum Control Valve 25, Medium Vacuum Pump Backing Pump 26, High Vacuum Pump 27, High Vacuum Control Valve 28, High Vacuum Pump Backing Pump 29, Nitrogen Storage Tank 30, Nitrogen Thermal Controller 31, Evacuation Process Bus 32, Evacuation Control Bus 33, Unit Control Bus 34, Control Console 35. Implementation

[0026] To better understand the technical solution of the present invention, a detailed description will be provided below in conjunction with relevant illustrations. It should be understood that the specific embodiments described below are not intended to limit the specific implementation of the technical solution of the present invention, but are merely possible implementations of the technical solution of the present invention. It should be noted that the descriptions of the positional relationships of the components herein, such as component A being located above component B, are based on the relative positions of the components in the illustrations and are not intended to limit the actual positional relationships of the components. Example 1

[0027] See Figure 1 , Figure 1 A schematic diagram of the segmented integrated vacuum system of the present invention is shown. As shown in the figure, a segmented integrated vacuum system includes integrated vacuum pipelines, integrated vacuum units, integrated vacuum workstations, a hot nitrogen purging device, and a control system. The integrated vacuum pipelines include a low vacuum pipeline 7, a medium vacuum pipeline 6, and a high vacuum pipeline 5. The integrated vacuum units include several low vacuum units, medium vacuum units, and high vacuum units.

[0028] Multiple coarse extraction valves 23 are evenly spaced on the low vacuum pipeline 7. The coarse extraction valves 23 are connected to the low vacuum pump 22. The low vacuum pump 22 can pump the low vacuum pipeline 7 to a low vacuum of less than 1000 Pa. The low vacuum pipeline 7 is connected to the workpiece evacuation port 14 through the low vacuum switching valve 17. The workpiece evacuation port 14 is connected to the workpiece 1. By opening the workpiece evacuation port 14 and through the low vacuum switching valve 17, the workpiece 1 can be evacuated from the atmosphere to a low vacuum.

[0029] Multiple medium vacuum control valves 25 are evenly spaced on the medium vacuum pipeline 6. The medium vacuum control valves 25 are connected to the medium vacuum pump 24. The medium vacuum pump 24 can evacuate the medium vacuum pipeline 6 to a medium vacuum of about 1 Pa. The medium vacuum pipeline 6 is connected to the workpiece evacuation port 14 through the medium vacuum switching valve 16. The workpiece evacuation port 14 is connected to the workpiece 1. By opening the workpiece evacuation port 14 and using the medium vacuum switching valve 16, the workpiece 1 can be evacuated from a low vacuum to a medium vacuum of about 1 Pa.

[0030] Multiple high-vacuum control valves 28 are evenly spaced on the high-vacuum pipeline 5, and are connected to a high-vacuum pump 27 via the high-vacuum control valves 28. The high-vacuum pump 27 can pump the high-vacuum pipeline 5 to 10... -2 A high vacuum of Pa or higher; the high vacuum pipeline 5 is connected to the workpiece evacuation port 14 via a high vacuum switching valve 15. The workpiece evacuation port 14 is connected to the workpiece 1. By opening the workpiece evacuation port 14 and using the high vacuum switching valve 15, the workpiece 1 can be evacuated from a medium vacuum to a 10 Pa vacuum. -2 High vacuum above Pa;

[0031] The low vacuum pipeline 7 is connected to the high vacuum pipeline 5 through the first bypass valve 18, and the low vacuum pipeline 7 is connected to the medium vacuum pipeline 6 through the second bypass valve 19, providing start-up vacuum conditions for the high vacuum pipeline 5 and the medium vacuum pipeline 6; the medium vacuum pipeline 6 is connected to the high vacuum pipeline 5 through the third bypass valve 21, providing start-up vacuum conditions for the high vacuum pipeline 5.

[0032] The low vacuum pipe 7 can be made of stainless steel pipe with a diameter of Ø30~Ø200mm, the medium vacuum pipe 6 can be made of stainless steel pipe with a diameter of Ø50~Ø200mm, and the high vacuum pipe 5 can be made of stainless steel pipe with a diameter of Ø150~Ø200mm.

[0033] The low vacuum unit includes multiple low vacuum pumps 22. The inlet of each low vacuum pump 22 is connected to a low vacuum pipeline 7 via a coarse extraction valve 23, providing a low vacuum of less than 1000 Pa to the low vacuum pipeline 7. A second vacuum gauge 10 is installed on the inlet pipeline of each low vacuum pump 22 to monitor the working vacuum level of the low vacuum pump. The exhaust port of each low vacuum pump 22 is connected to an exhaust pipe 8 to discharge waste gas from the workplace. The number of low vacuum pumps 22 can be determined based on the length of the low vacuum pipeline 7 and the gas load of the largest production batch, plus redundancy calculations.

[0034] The medium vacuum unit includes multiple medium vacuum pumps 24 and a medium vacuum pump pre-maintenance pump 26. The inlet of the multiple medium vacuum pumps 24 is connected to the medium vacuum pipeline 6 through a medium vacuum control valve 25, providing a medium vacuum of approximately 1 Pa to the medium vacuum pipeline 6. A third vacuum gauge 11 is installed on the inlet pipeline of each medium vacuum pump 24 to monitor the working vacuum level of the medium vacuum pump. The exhaust port of each medium vacuum pump 24 is connected to the inlet of the medium vacuum pump pre-maintenance pump 26, and the exhaust port of the medium vacuum pump pre-maintenance pump 26 is connected to an exhaust pipe 8 to discharge waste gas from the workplace. The number of medium vacuum units can be determined based on the length of the medium vacuum pipeline 6 and the gas load of the largest production batch, plus redundancy calculations.

[0035] The high vacuum unit includes multiple high vacuum pumps 27 and a high vacuum pump backing pump 29. The inlet ends of the multiple high vacuum pumps 27 are connected to the high vacuum pipeline 5 through a high vacuum control valve 28, providing approximately 10 liters of gas to the high vacuum pipeline 5. -2 A high vacuum of Pa or higher; the high vacuum pump 27 is equipped with a fourth vacuum gauge 12 on its inlet pipe for monitoring the working vacuum level of the high vacuum pump; the exhaust port of the high vacuum pump 27 is connected to the inlet of the high vacuum pump pre-maintenance pump 29, and the exhaust port of the high vacuum pump pre-maintenance pump 29 is connected to the exhaust pipe 8 to discharge waste gas from the workplace; the number of high vacuum units can be determined based on the length of the high vacuum pipeline 5 and the gas load of the largest production batch plus redundancy calculations;

[0036] The vacuum units can be uniformly installed in a noise reduction machine room 9 with sound insulation and noise reduction functions;

[0037] The vacuum unit can be equipped with a vacuum pump of appropriate purpose and specification according to the vacuum performance requirements of the workpiece being pumped. The vacuum unit does not need to be equipped with a main pump or a backing pump, but only a backing pump is required, which can save the power of the backing pump and help reduce energy consumption.

[0038] The vacuuming station integration includes multiple vacuuming stations 20, which are evenly arranged on the vacuuming pipeline according to the size of the workpiece 1. The workpiece 1 is connected to the vacuuming station 20 through the workpiece vacuuming interface 14. The workpiece vacuuming interface 14 is connected in parallel to the high vacuum pipeline 5 through the high vacuum switching valve 15, in parallel to the medium vacuum pipeline 6 through the medium vacuum switching valve 16, and in parallel to the low vacuum pipeline 7 through the low vacuum switching valve 17. A first vacuum gauge 3 is connected in parallel between the workpiece vacuuming interface 14 and the high vacuum switching valve 15, the medium vacuum switching valve 16, and the low vacuum switching valve 17. The workpiece 1 is evacuated to a vacuum level of 1000 Pa through the low vacuum switching valve 17, and to a vacuum level of approximately 1 Pa through the medium vacuum switching valve 16. After a set number of replacement cycles, the workpiece 1 is evacuated to a vacuum level below 10 Pa through the high vacuum switching valve 15. -2 A vacuum degree of Pa or higher.

[0039] The hot nitrogen replacement device includes a heater 2, a nitrogen replacement pipe 4, a nitrogen storage tank 30, and a nitrogen thermal controller 31. The heater 2 is installed on the workpiece 1. The nitrogen replacement pipe 4 is connected to the workpiece evacuation port 14 through a nitrogen replacement valve 13. The nitrogen replacement pipe 4 is connected to the nitrogen storage tank 30 through the nitrogen thermal controller 31. The nitrogen storage tank 30 provides pure nitrogen to the workpiece 1 through the nitrogen replacement pipe 4. The nitrogen thermal controller 31 heats the pure nitrogen to the required temperature. The heater 2 provides the workpiece 1 with the heating temperature required for evacuation.

[0040] The workpiece evacuation interface 14 is connected in parallel to the nitrogen replacement pipe 4 through the nitrogen replacement valve 13. The nitrogen replacement valve 13 is used to replace the workpiece 1 with nitrogen, and the replacement nitrogen is discharged from the workpiece 1 through the low vacuum switching valve 17. During the entire nitrogen replacement and evacuation process, the heater 2 heats, keeps, and stops heating the workpiece 1. The first vacuum gauge 3 monitors the vacuum level of the workpiece 1 throughout the process, providing control parameters for each stage of the conversion.

[0041] The control system includes a vacuum process bus 32, a vacuum control bus 33, a unit control bus 34, and a control console 35. The coarse vacuum valve 23, the medium vacuum control valve 25, and the high vacuum control valve 28 are connected to the control console 35 via the vacuum control bus 33. The low vacuum pump 22, the medium vacuum pump 24, the medium vacuum pump pre-maintenance pump 26, the high vacuum pump 27, and the high vacuum pump pre-maintenance pump 29 are connected to the control console 35 via the unit control bus 34. The nitrogen replacement valve 13, the high vacuum switching valve 15, the medium vacuum switching valve 16, and the low vacuum switching valve 17 are connected to the control console 35 via the vacuum process bus 32. The control console 35 controls the opening and closing of each vacuum pump, control valve, maintenance pump, replacement valve, and switching valve. It also measures and records the temperature and vacuum data and real-time curves of the process through the heater 2 and the first vacuum gauge 3, identifies the stage transitions of the process, statistically calculates and reports the process results of workpiece 1, judges abnormal situations, and provides alarms and handling suggestions.

[0042] The above-mentioned process method for a segmented integrated vacuum system includes the following:

[0043] S1. Operation and maintenance of vacuum pumps and units

[0044] The segmented integrated vacuum system is controlled by the console 35 according to the operating program. In the initial state, all vacuum valves are closed and all equipment power is disconnected.

[0045] After the system starts up, the control console 35 controls all devices to connect to the power supply, turns on the low vacuum pump 22, and then opens the coarse pump valve 23, the first bypass valve 18 and the second bypass valve 19; after a few minutes, the second vacuum gauge 10 is opened, and the control console 35 monitors the second vacuum gauge 10. After the vacuum value is less than 1000Pa, the medium vacuum pump pre-maintenance pump 26 and the high vacuum pump pre-maintenance pump 29 are started, and the third vacuum gauge 11 and the fourth vacuum gauge 12 are monitored. After the vacuum value is less than 1000Pa, the medium vacuum pump 24 is started, and the first bypass valve 18 and the second bypass valve 19 are closed at the same time.

[0046] After the vacuum values ​​of the third vacuum gauge 11 and the fourth vacuum gauge 12 are less than 10Pa, the high vacuum pump 27 is started and the third bypass valve 21 is closed at the same time. The control console 35 can adjust the vacuum pumps to increase, decrease, rotate, abnormally stop or normally stop according to the preset settings and the pumping load of each vacuum section.

[0047] The total pumping load can be determined by statistical calculation of the characteristic parameters contained in the connected evacuation station 20 and the workpiece number. The pumping load of each vacuum range can be determined by statistical calculation of the number of vacuum switching valves opened in each range and the characteristic parameters contained in the workpiece number.

[0048] When all low vacuum switching valves 17 are closed, the low vacuum pump 22 is shut down, and the roughing valve 23 where the low vacuum pump 22 is located is also closed. When all medium vacuum switching valves 16 are closed, the medium vacuum pump 24 and the medium vacuum pump pre-maintaining pump 26 are shut down, and the medium vacuum pump 24 is located in the medium vacuum switching valve 16. When all high vacuum switching valves 15 are closed, the control console 35 determines whether the high vacuum pump 27 and the high vacuum pump pre-maintaining pump 29 are in the holding, standby, or shutdown state based on whether there is a workpiece connected at the online workstation.

[0049] S2. Implementation of workpiece heating and replacement process

[0050] After the workpiece to be purged is connected to the purging station, the workpiece number is entered in the corresponding station number dialog box, and the workpiece purging interface 14 is opened. At this time, the control console 35 determines the workpiece heating temperature and nitrogen purging times according to the process database corresponding to the workpiece number.

[0051] After the control console 35 opens the low vacuum switching valve 17 to evacuate the workpiece 1 to a low vacuum via the control bus, it closes the low vacuum switching valve 17. It then opens the nitrogen replacement valve 13. When nitrogen flows, the nitrogen thermal controller 31 starts heating, adjusting the heating power according to the flow rate. After the nitrogen pressure is balanced, it closes the nitrogen replacement valve 13, starts the heater 2, and after a set holding time, it opens the low vacuum switching valve 17 to evacuate the workpiece 1 to a low vacuum. When the vacuum level of the first vacuum gauge 3 is less than 1000 Pa, it closes the low vacuum switching valve 17 and opens the medium vacuum switching valve 16. When the vacuum level of the first vacuum gauge 3 is less than 10 Pa, it closes the medium vacuum switching valve 16 and performs a second nitrogen replacement cycle. The number of replacement-evacuation cycles and the vacuum level reached each time are preset by the control console. After the set number of cycles, the vacuuming process begins.

[0052] S3. Implementation of the vacuuming process for the workpiece

[0053] The control console 35 sets the vacuum value of the workpiece according to the process database corresponding to the workpiece number 1. The control console 35 starts the heater 2 through the control bus and sets the heating temperature. After the set temperature is reached, the low vacuum switching valve 17 is opened to evacuate the workpiece 1 to a low vacuum.

[0054] When the vacuum value of the first vacuum gauge 3 is less than 1000 Pa, close the low vacuum switching valve 17 and open the medium vacuum switching valve 16; when the vacuum value of the first vacuum gauge 3 is close to 1 Pa, close the medium vacuum switching valve 16 and open the high vacuum switching valve 15 to enter the high vacuum evacuation stage; when the first vacuum gauge 3 reaches the set vacuum level, the control console 35 issues a prompt and generates a workpiece evacuation result report, and the workpiece is in the process of being taken offline; after the operator closes the workpiece evacuation interface 14, the high vacuum switching valve 15 is closed, and workpiece 1 is taken offline.

[0055] S4. Analysis and Implementation of Workpiece Vacuuming Process Control and Abnormal Handling

[0056] After workpiece 1 is connected to the workpiece evacuation interface 14, the control console 35 first starts low-vacuum evacuation. When workpiece 1 has a large leak or is not connected, the control console 35 closes the vacuum switching valve and prompts for reinstallation. After workpiece 1 is installed normally, the control console 35 records the temperature data of heater 2 and the dynamic vacuum data of the first vacuum gauge 3 in real time, and generates curves of vacuum degree and temperature corresponding to time. When the change of the vacuum degree curve exceeds the average change range of this type of workpiece 1, the control console 35 can perform dynamic and static analysis. The dynamic analysis calculates the vacuum degree that should be achieved based on the actual pumping speed of the workpiece evacuation interface 14 and compares it with the actual vacuum degree to estimate the leakage and venting rate.

[0057] Static analysis involves closing the vacuum switching valve that is currently in operation and estimating the leakage rate component and the venting rate component based on the vacuum degree change curve of the first vacuum gauge 3. When a certain data exceeds the specified index, the control panel 35 displays the analysis results for the corresponding workpiece number and provides processing suggestions.

[0058] When the vacuum degree curve is within the average variation range, the control console 35 will proceed according to the normal process flow. After the specified vacuum degree is reached, it will automatically perform dynamic vacuum degree analysis and calculation and static vacuum degree change curve analysis and calculation, and give the calculated values ​​of leakage rate, venting rate and leakage-venting rate.

[0059] When abnormal situations such as water outages or power outages occur, the control console 35 will initiate the predetermined abnormal handling procedure and issue an alarm prompt. Example 2

[0060] The segmented integrated vacuum system of this embodiment 2 differs from that of embodiment 1 in that:

[0061] When workpiece 1 requires a higher vacuum range, the vacuum pipeline integration can add a stainless steel pipe with a specification of Ø150~Ø200mm as an ultra-high vacuum pipeline, and add a corresponding ultra-high vacuum unit connected to the ultra-high vacuum pipeline through an ultra-high vacuum control valve.

[0062] When the workpiece 1 requires a higher vacuum range, an ultra-high vacuum switching valve can be added in parallel to the workpiece 1 via the workpiece evacuation interface 14, and then connected in parallel to the ultra-high vacuum pipeline through the ultra-high vacuum switching valve.

[0063] The vacuum piping system includes low-vacuum, medium-vacuum, and high-vacuum piping. Recommended values ​​are given for the diameter of each piping, but it is not limited to these recommended values. It is also not limited to low, medium, and high-vacuum piping. The vacuum piping system can be expanded or merged according to the working range of the vacuum unit and the actual vacuum requirements of the workpiece, such as expanding to ultra-high vacuum piping or merging low and medium vacuum piping.

[0064] Figure 1 The distribution of low-vacuum, medium-vacuum, and high-vacuum pipes given are general planar distributions, but are not limited to one type of distribution. The vacuum pipes can be arranged according to the size, volume, and shape of the workpiece being vacuumed. They can be single-vertical planar distributions or multi-vertical planar distributions; they can also be extended to three-dimensional single-vertical or multi-vertical distributions in the vertical space.

[0065] The vacuum unit includes a low vacuum pump, a medium vacuum unit, and a high vacuum unit. There are no restrictions on the number and specifications of the low vacuum pump and the vacuum unit. Although the practice of using a pre-stage holding pump instead of a backing pump in the vacuum unit combination is given, it is not limited to this combination. Any vacuum unit or vacuum pump currently available can be used according to the vacuum environment requirements of the workpiece.

[0066] The vacuum gauge in the vacuuming station is selected according to the pressure range of the workpiece vacuuming process. It can be a full-range gauge, a multi-range gauge, or a multi-range discrete vacuum gauge.

[0067] The vacuum station includes a combination of low, medium, and high vacuum switching valves and a displacement switching valve. The vacuum station can add or remove vacuum switching valves of different ranges according to the vacuum requirements of the workpiece, or not select a displacement switching valve.

[0068] The above are merely specific application examples of the present invention and do not constitute any limitation on the scope of protection of the present invention. All technical solutions formed by equivalent transformations or substitutions fall within the scope of protection of the present invention.

Claims

1. A segmented integrated vacuum system, characterized in that: It includes vacuum pipeline integration, vacuum unit integration, vacuum station integration, hot nitrogen replacement device and control system. The vacuum pipeline integration includes at least two types of vacuum pipelines among several low vacuum pipelines (7), medium vacuum pipelines (6) and high vacuum pipelines (5). The vacuum unit integration includes at least two types of vacuum units among several low vacuum units, medium vacuum units and high vacuum units corresponding to the vacuum pipeline integration. The low vacuum pipeline (7) is connected to multiple low vacuum pumps (22), and the low vacuum pipeline (7) is connected to the workpiece evacuation port (14) through a low vacuum switching valve (17); the medium vacuum pipeline (6) is connected to multiple medium vacuum pumps (24), and the medium vacuum pipeline (6) is connected to the workpiece evacuation port (14) through a medium vacuum switching valve (16); the high vacuum pipeline (5) is connected to multiple high vacuum pumps (27), and the high vacuum pipeline (5) is connected to the workpiece evacuation port (14) through a high vacuum switching valve (15). The low vacuum pipeline (7) is connected to the high vacuum pipeline (5) through the first bypass valve (18), the low vacuum pipeline (7) is connected to the medium vacuum pipeline (6) through the second bypass valve (19), and the medium vacuum pipeline (6) is connected to the high vacuum pipeline (5) through the third bypass valve (21). The low vacuum unit includes multiple low vacuum pumps (22), and the inlet pipe of the low vacuum pump (22) is equipped with a second vacuum gauge (10). The medium vacuum unit includes multiple medium vacuum pumps (24), and the inlet pipe of the medium vacuum pump (24) is equipped with a third vacuum gauge (11). The high vacuum unit includes multiple high vacuum pumps (27), and the inlet pipe of the high vacuum pump (27) is equipped with a fourth vacuum gauge (12). The exhaust port of the low vacuum pump (22) is connected to the exhaust pipe (8). The vacuum station integration includes multiple vacuum stations (20). The vacuum stations (20) are evenly arranged on the vacuum pipeline according to the size of the workpiece (1). The vacuum stations (20) are connected to the workpiece (1) through the workpiece vacuum interface (14). The workpiece vacuum interface (14) is connected in parallel to the high vacuum pipeline (5) through the high vacuum switching valve (15), in parallel to the medium vacuum pipeline (6) through the medium vacuum switching valve (16), and in parallel to the low vacuum pipeline (7) through the low vacuum switching valve (17). A first vacuum gauge (3) is connected in parallel between the workpiece vacuum interface (14) and the high vacuum switching valve (15), the medium vacuum switching valve (16), and the low vacuum switching valve (17).

2. The segmented integrated vacuum system according to claim 1, characterized in that: Multiple coarse extraction valves (23) are evenly spaced on the low vacuum pipeline (7), and are connected to the low vacuum pump (22) through the coarse extraction valves (23).

3. The segmented integrated vacuum system according to claim 1, characterized in that: Multiple medium vacuum control valves (25) are evenly spaced on the medium vacuum pipeline (6), and are connected to the medium vacuum pump (24) through the medium vacuum control valves (25).

4. The segmented integrated vacuum system according to claim 1, characterized in that: Multiple high vacuum control valves (28) are evenly spaced on the high vacuum pipeline (5), and are connected to the high vacuum pump (27) through the high vacuum control valves (28).

5. The segmented integrated vacuum system according to claim 1, characterized in that: The medium vacuum unit also includes a medium vacuum pump forestage maintenance pump (26), the exhaust port of the medium vacuum pump (24) is connected to the inlet of the medium vacuum pump forestage maintenance pump (26), and the exhaust port of the medium vacuum pump forestage maintenance pump (26) is connected to the exhaust pipe (8).

6. The segmented integrated vacuum system according to claim 1, characterized in that: The high vacuum unit also includes a high vacuum pump fore-stage maintenance pump (29), the exhaust port of the high vacuum pump (27) is connected to the inlet of the high vacuum pump fore-stage maintenance pump (29), and the exhaust port of the high vacuum pump fore-stage maintenance pump (29) is connected to the exhaust pipe (8).

7. The segmented integrated vacuum system according to claim 1, characterized in that: The hot nitrogen replacement device includes a heater (2), a nitrogen replacement pipe (4), a nitrogen storage tank (30), and a nitrogen thermal controller (31). The heater (2) is installed on the workpiece (1). The nitrogen replacement pipe (4) is connected to the workpiece evacuation port (14) through a nitrogen replacement valve (13). The nitrogen replacement pipe (4) is connected to the nitrogen storage tank (30) through the nitrogen thermal controller (31).

8. The segmented integrated vacuum system according to claim 1, characterized in that: The control system includes a vacuum process bus (32), a vacuum control bus (33), a unit control bus (34), and a control console (35). The control console (35) is connected to a nitrogen replacement valve (13), a high vacuum switching valve (15), a medium vacuum switching valve (16), and a low vacuum switching valve (17) via the vacuum process bus (32). The control console (35) is connected to a roughing valve (23), a medium vacuum control valve (25), and a high vacuum control valve (28) via the vacuum control bus (33). The control console (35) is connected to a low vacuum pump (22), a medium vacuum pump (24), a medium vacuum pump fore-stage holding pump (26), a high vacuum pump (27), and a high vacuum pump fore-stage holding pump (29) via the unit control bus (34).

9. A segmented integrated vacuum system according to claim 8, characterized in that: The control console (35) controls the opening and closing of each vacuum pump, control valve, maintenance pump, displacement valve, and switching valve. It also measures and records the temperature, vacuum data and real-time curves of the process through the heater (2) and the first vacuum gauge (3), identifies the stage transitions of the process, calculates and reports the process results of the workpiece (1), judges abnormal situations and alarms and provides handling suggestions.

10. A segmented integrated vacuum system according to claim 1, characterized in that: The vacuum unit is installed in a noise reduction room (9) with sound insulation and noise reduction functions.

Images