An ultraviolet glue-based quasi-monolithic compact interferometer and a method for building the same

By using ultraviolet bonding technology and a self-made adjustment bracket, the problem of insufficient structural strength and stability of interferometers in existing technologies has been solved, and a high-precision quasi-monolithic interferometer has been built, which has the advantages of high stability and low cost.

CN116753835BActive Publication Date: 2026-05-01HUAZHONG UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HUAZHONG UNIV OF SCI & TECH
Filing Date
2023-06-16
Publication Date
2026-05-01

AI Technical Summary

Technical Problem

Existing technologies struggle to build high-precision quasi-monolithic interferometers while maintaining structural strength and overall stability, and also present challenges due to high technical difficulty and cost.

Method used

The optical components are connected to the substrate using ultraviolet bonding technology. Combined with a self-made six-dimensional optical adjustment frame and adjustment bracket, the depolarizing beam splitter and 45-degree reflector are fixed by ultraviolet adhesive curing, realizing adjustment and fixation of six degrees of freedom.

Benefits of technology

The thermal stability and mechanical strength of the interferometer were improved, while the requirements for machining accuracy and positioning indicators were reduced, thus enabling the construction of a high-precision interferometer.

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Abstract

The application discloses a kind of based on ultraviolet gluing quasi-monolithic compact interferometer and its building method, it is related to optical element and high-precision laser ranging field, including: the collimator of optical fiber in Mach-Zehnder interferometer and glass mounting seat ultraviolet gluing connection constitute the bottom flat integrated collimator, and integrated collimator and the target position ultraviolet gluing connection of glass base in Mach-Zehnder interferometer;It also includes: for adjusting the position of depolarization beamsplitter and 45 degree mirror in Mach-Zehnder interferometer adjusting support;Adjusting support includes support device for supporting adjusting part, adjusting part includes: six-dimensional optical adjusting frame, it includes: upper layer board;Lower layer board, between upper layer board and lower layer board by multiple screw nails of circumferential surrounding screw connection;Rotary ring is arranged at the bottom of lower layer board;Metal cylindrical connecting rod is fixedly arranged at the bottom of rotary ring.The application can build high stability high-precision quasi-monolithic compact interferometer.
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Description

A Quasi-Monolithic Compact Interferometer Based on Ultraviolet Adhesion Bonding and Its Construction Method Technical Field

[0001] This invention relates to the fields of optical component assembly and high-precision laser ranging, and particularly to a quasi-monolithic compact interferometer based on ultraviolet bonding and its assembly method. Background Technology

[0002] High-precision compact interferometers are in great demand in various precision measurement fields, such as gravitational wave detection, inertial sensing, and vibration measurement. These tasks all require the interferometer's sensitivity to reach the sub-nanometer or even picometer level below 1 Hz, which requires the interferometer's optomechanical structure to be extremely stable.

[0003] In the existing technology, traditional interferometers are often constructed using metal frames, typically made of aluminum alloy, stainless steel, or Invar alloy.

[0004] Their coefficients of thermal expansion are approximately 2.3 × 10⁻⁶. -5 / K,1.5×10 -5 / K,1.6×10 -6 / K. Furthermore, the frame uses screws, springs, and other locking devices to adjust and fix the position of the optical elements. This structure has poor mechanical stiffness (Young's modulus) and thermal stability, a problem also present in the PDH (Pound Drever-Hall) frequency stabilization of FP cavities. To pursue higher precision and stability, interferometers often employ a quasi-monolithic design, where the optical elements and substrate are bonded together as a single unit. The following two methods aim to achieve a quasi-monolithic design:

[0005] Method 1: Optical elements are attached to the substrate using van der Waals forces. This requires highly polished contact surfaces of the optical elements and the substrate. The main drawback of this technique is the low structural strength and low overall stability, which makes it unsuitable for fields such as industrial metrology and space science.

[0006] Method 2: Silicon-based bonding, which has been successfully applied to the optical platform of the femtometer-precision laser interferometry mission (LISAPathfinder). Its basic principle is to use a chemical reaction to break and reconnect the Si-O bonds between the optical element and the substrate, thereby achieving very high mechanical stiffness and thermal stability. However, this method has the disadvantage of a very short chemical reaction time, leaving only tens of seconds for adjusting the position and orientation of the optical element. Therefore, it is technically challenging, has a high scrap rate, and is costly. Furthermore, this method requires highly polished surfaces on both the optical element and the substrate.

[0007] In summary, due to the different connection methods described above, it is impossible to achieve both good structural strength and overall stability while considering technical difficulty and cost during the construction of an interferometer. Summary of the Invention

[0008] This invention provides a quasi-monolithic compact interferometer based on ultraviolet bonding and its construction method, which can solve the problem in the prior art that it is impossible to build an interferometer with good stability and high precision while considering the technical difficulty.

[0009] This invention provides a quasi-monolithic compact interferometer based on ultraviolet bonding, comprising: an integrated collimator with a flat bottom surface formed by ultraviolet bonding of an optical fiber collimator and a glass mounting base in the Mach-Zehnder interferometer, and the integrated collimator and the target position of the glass substrate in the Mach-Zehnder interferometer are ultraviolet bonded together; further comprising: an adjustment bracket for adjusting the position of the depolarizing beam splitter and the 45-degree reflector in the Mach-Zehnder interferometer; the adjustment bracket includes a support device for supporting the adjustment part, the adjustment part including: a six-dimensional optical adjustment frame, comprising: an upper plate; a lower plate, the upper plate and the lower plate being screwed together by a plurality of circumferentially arranged screws, and the distance between the upper plate and the lower plate at different positions can be adjusted by turning the screws; a rotating ring disposed at the bottom of the lower plate; and a metal cylindrical connecting rod fixedly disposed at the bottom of the rotating ring for connecting the depolarizing beam splitter or the 45-degree reflector by bonding.

[0010] Furthermore, the metal cylindrical connecting rod is fixed to the bottom of the rotating ring by a rubber inner nut at the top.

[0011] Furthermore, the support device includes: a mechanical component base; a connecting rod bracket, which is vertically disposed on the top of the mechanical component base and whose bottom is fixedly connected to the top of the mechanical component base; a column-type connecting rod, which is vertically disposed on the top of the connecting rod bracket and whose bottom is fixedly connected to the top of the connecting rod bracket; an L-shaped metal adapter frame, which is disposed on the top of the column-type connecting rod and whose horizontal end bottom is fixedly connected to the top of the column-type connecting rod; and a metal extension connecting rod, which is horizontally disposed on the outer side wall of the other vertical end of the L-shaped metal adapter frame and whose one end is fixedly connected to the L-shaped metal adapter frame.

[0012] Further, the Mach-Zehnder interferometer includes: a glass substrate; a glass mounting base, the bottom of which is fixedly connected to the top of the glass substrate; an optical fiber collimator, which is disposed in the central part of the glass mounting base and fixedly connected to the glass mounting base; a plurality of depolarization beam splitters, which are arranged directly in front of the front end of the optical fiber collimator, with an acute angle between the plurality of depolarization beam splitters and the optical fiber collimator, and the bottom of the plurality of depolarization beam splitters being fixedly connected to the top of the glass substrate; a plurality of 45-degree mirrors, which are arranged parallel to the plurality of depolarization beam splitters, and the mirror surface of the 45-degree mirror near the optical fiber collimator is parallel to the mirror surface of the plurality of depolarization beam splitters, and the extended line of the mirror surface of another 45-degree mirror intersects the extended lines of the mirror surfaces of the plurality of depolarization beam splitters; and a plurality of single-quadrant photodetectors, which are disposed near the outside of the plurality of depolarization beam splitters and form a 90-degree angle with the farthest depolarization beam splitter.

[0013] Furthermore, the plurality of depolarizing beam splitters and the plurality of 45-degree reflectors are bonded to the glass substrate using ultraviolet adhesive bonding.

[0014] Furthermore, the construction method includes the following steps: UV-curing the fiber collimator in the Mach-Zehnder interferometer into the glass mounting base to obtain an integrated collimator with a flat bottom surface; fixing the integrated collimator to the target position on the glass substrate using a positioning plate and UV adhesive; fixing multiple depolarizing beam splitters and multiple 45-degree reflectors to the adjustment section of the adjustment bracket; adjusting the position and orientation of the depolarizing beam splitters and 45-degree reflectors using the adjustment bracket; and then curing the adjusted depolarizing beam splitters and 45-degree reflectors to their corresponding positions in the Mach-Zehnder interferometer using UV adhesive.

[0015] Further, the method includes the following steps: monitoring the interference signal using multiple single-quadrant photodetectors; adjusting the position and orientation of multiple depolarized beam splitters and multiple 45-degree mirrors used for beam combining by the interference contrast of the interference signal; and when the contrast of the interference signal reaches its maximum, gluing and fixing the depolarized beam splitters and 45-degree mirrors with ultraviolet glue to build a quasi-monolithic compact interferometer.

[0016] This invention provides a quasi-monolithically compact interferometer based on ultraviolet bonding and its construction method. Compared with the prior art, its advantages are as follows:

[0017] The six-dimensional optical adjustment bracket has five screws and a rotating ring fixed at specific positions. Adjustment of the screws and ring allows for six degrees of freedom (DOF) adjustment. In use, the depolarizing beam splitter and 45-degree reflector are fixed at the center of the bracket. Rotating the L-shaped metal adapter and metal extension rod of the adjustment support device and tightening the screws induces three translational and three rotational movements, thus adjusting the six DDFs (attitude and position) of the depolarizing beam splitter and 45-degree reflector. Using this self-made adjustment bracket for interferometer construction reduces the precision requirements and initial positioning specifications by increasing the adjustability of the depolarizing beam splitter and 45-degree reflector. During the interferometer construction process, the self-made adjustment bracket requires UV bonding to fix the depolarizing beam splitter and 45-degree reflector to the glass substrate. UV bonding, controlled by UV light, is easier to operate and offers high thermal stability and mechanical strength. Attached Figure Description

[0018] Figure 1 is a front view of the adjustment bracket in a quasi-monolithic compact interferometer based on ultraviolet bonding and its construction method provided in an embodiment of the present invention;

[0019] Figure 2 is a top view of the Mach-Zehnder interferometer in a quasi-monolithically compact interferometer based on ultraviolet bonding and its construction method provided in an embodiment of the present invention.

[0020] Figure label:

[0021] 1-Mechanical base, 2-Connector bracket, 3-Column connector, 4-L-type metal adapter frame, 5-Metal extension connector, 6-Six-dimensional optical adjustment frame, 7-Metal cylindrical connector, 8-Glass mounting base, 9-Fiber optic collimator, 10-Depolarizing beam splitter, 11-45-degree reflector, 12-Single quadrant photodetector, 13-Glass substrate. Detailed Implementation

[0022] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0023] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0025] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0026] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0027] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0028] Referring to Figures 1 and 2, this embodiment of the invention provides a quasi-monolithic compact interferometer based on ultraviolet bonding and its assembly method. The quasi-monolithic compact interferometer based on ultraviolet bonding and its assembly method include: First, ultraviolet bonding of the fiber collimator 9 from the Mach-Zehnder interferometer to the glass mounting base 8 to obtain an integrated collimator with a flat bottom surface. Next, the integrated collimator is fixed to the target position on the glass substrate 13 using a positioning plate and ultraviolet adhesive. Finally, multiple depolarization beam splitters 10 and multiple 45-degree reflectors 11 are fixed on the adjustment part of the adjustment bracket. Then, the positions and orientations of the depolarization beam splitters 10 and multiple 45-degree reflectors 11 are initially adjusted, and then cured with ultraviolet glue. The interference signal is monitored by a single-quadrant photodetector, and the interference contrast of the interference signal is observed to finely adjust the positions and orientations of the multiple depolarization beam splitters 10 and multiple 45-degree reflectors 11 used for beam combining. When the contrast of the interference signal reaches the maximum, it is glued and fixed with ultraviolet glue, and a quasi-monolithic compact interferometer can be built.

[0029] Furthermore, the adjustment bracket also includes: a mechanical component base 1. A connecting rod bracket 2 is vertically mounted on top of the mechanical component base 1, and its bottom is fixedly connected to the top of the mechanical component base 1. A column-type connecting rod 3 is vertically mounted on top of the connecting rod bracket 2, and its bottom is fixedly connected to the top of the connecting rod bracket 2. An L-shaped metal adapter 4 is mounted on top of the column-type connecting rod 3, and its horizontal end bottom is fixedly connected to the top of the column-type connecting rod 3. A metal extension connecting rod 5 is horizontally mounted on the outer wall of the other vertical end of the L-shaped metal adapter 4, and one end is fixedly connected to the L-shaped metal adapter 4. A six-dimensional optical adjustment bracket 6 is horizontally mounted on the other end of the metal extension connecting rod 5, and one side wall is fixedly connected to one side wall of the metal extension connecting rod 5. A metal cylindrical connecting rod 7 is located at the bottom center of the rotating ring in the six-dimensional optical adjustment bracket 6. The working principle of the self-made six-dimensional optical adjustment frame 6 is as follows: During the construction of the interferometer, multiple depolarizing beam splitters 10 and multiple 45-degree reflectors 11 are fixed on the self-made adjustment frame. This allows for fine adjustment of the position and orientation of the multiple depolarizing beam splitters 10 and multiple 45-degree reflectors 11. During the construction process, the interference signal is observed, and the multiple depolarizing beam splitters 10 and multiple 45-degree reflectors 11 are finely adjusted to achieve the optimal interference signal. The six-dimensional optical adjustment frame 6 has five screws and a rotating ring fixed at specific positions. By rotating the L-shaped metal adapter frame 4 and the metal extension rod 5 of the adjustment support device and turning the screws, it can perform three translational and three rotational movements, thus achieving adjustment of six degrees of freedom.

[0030] Furthermore, the metal cylindrical connecting rod 7 is fixed to the bottom center of the rotating ring in the six-dimensional optical adjustment frame 6 by a rubber inner nut. Below the metal cylindrical connecting rod 7, multiple depolarizing beam splitters 10 and multiple 45-degree reflectors 11 will be fixed respectively using ultraviolet glue.

[0031] Furthermore, the Mach-Zehnder interferometer also includes: a glass mounting base 8, an optical fiber collimator 9, a depolarizing beam splitter 10, a 45-degree reflector 11, a single-quadrant photodetector 12, and a glass substrate 13. The working principle of the Mach-Zehnder interferometer is as follows: a 1064nm laser is split into two propagating paths with inconsistent optical path lengths, thus forming an interference signal with a difference in arm lengths. This interference signal can be used to measure laser frequency noise and temperature fluctuations. The optical fiber collimator 9 uses polarization-maintaining fiber for its pigtail, and the beam splitter and beam splitter prism are depolarizing beam splitters 10. The optical components are bonded to the glass mounting base 8 using UV adhesive.

[0032] The fiber collimator 9 uses polarization-maintaining fiber for its pigtail, and the beam splitter and beam splitter prism are depolarization-reducing beam splitters 10. The optical components are bonded to the glass mounting base 8 using UV adhesive.

[0033] A specific example is as follows:

[0034] This method includes optical path design, positioning and pointing adjustment schemes for multiple depolarization beam splitters 10 and multiple 45-degree reflectors 11, and ultraviolet bonding process. The optical path design includes the fabrication of an integrated collimator to provide a structurally and pointingly stable laser source. Positioning the multiple depolarization beam splitters 10 and multiple 45-degree reflectors 11 requires drawing precise position diagrams of the components used in the interferometer and fabricating positioning plates for subsequent assembly. Pointing adjustment of the multiple depolarization beam splitters 10 and multiple 45-degree reflectors 11 utilizes a self-made adjustment bracket to precisely adjust the attitude and pointing of the optical components. The ultraviolet bonding process is used to fix the assembled multiple depolarization beam splitters 10 and multiple 45-degree reflectors 11, maintaining the entire interferometer in optimal interference state and increasing the robustness and overall integrity of the device.

[0035] The quasi-monolithic compact ultraviolet (UV) bonding technology presented in this invention, combined with optimized optical path design, enables the interferometer to exhibit excellent common-mode suppression capability against environmental noise. The constructed quasi-monolithic interferometer possesses advantages such as high stability and high precision, and can be widely applied in fields such as gravitational wave detection, inertial sensing, vibration meters, and seismometers.

[0036] First, the fixed position is adjusted by the movable mechanical component base 1 and the connecting rod bracket 2 in the self-made adjustment bracket shown in Figure 1. The relative positions of the movable column connecting rod 3, the L-shaped metal adapter 4, and the metal extension connecting rod 5 are used to adjust the up-down and back-down position of the six-dimensional optical adjustment frame 6. Finally, each depolarizing beam splitter 10 and the 45-degree reflector 11 are fixed to the metal cylindrical connecting rod 7 with a small amount of UV glue to adjust the attitude of multiple depolarizing beam splitters 10 and multiple 45-degree reflectors 11 with three translational and two rotational degrees of freedom, which can achieve sub-millimeter and sub-radial level positioning adjustment.

[0037] Secondly, Figure 2 shows a schematic diagram of a Mach-Zehnder interferometer, which contains multiple optical elements. The last element responsible for interference beam combining (usually a beam splitter), such as the depolarizing beam splitter 10 and the depolarizing beam splitter mirror, is particularly critical in its positioning and pointing. This directly affects the interference contrast and requires extremely high positioning and pointing accuracy, while other optical elements have relatively lower requirements. Therefore, in the construction of our optical platform, non-critical optical elements are adjusted using a small-aperture aperture, primarily to ensure that all laser beams are in the same plane. The interference contrast is observed using a single-quadrant detector 12 as feedback to adjust the final interference beam.

[0038] Finally, the key technology is UV bonding. Compared to optical contact bonding and silicon-based bonding, UV bonding is more convenient and suitable for applications where high mechanical rigidity is not required. First, using a self-made adjustment bracket, the target optical element is positioned and oriented correctly with a significant gap between it and the glass substrate. Next, a special adhesive stick is used to evenly apply (note the amount) UV adhesive to the glass substrate. Then, the target optical element is lowered to adhere to the upper surface of the glass substrate while maintaining its orientation and position. Finally, the optical element is irradiated with a UV lamp until the adhesive cures. This process is repeated until all optical elements are bonded in their designed positions with the appropriate orientation.

[0039] Using the above technology, a classic quasi-monolithic compact interferometer was fabricated: a Mach-Zehnder interferometer with unequal arm lengths, which can be used for noise monitoring (including laser frequency noise, temperature fluctuations, etc.). Traditional Mach-Zehnder interferometers have arms of equal length. To achieve unequal arm interference, our Mach-Zehnder interferometer device made a slight modification to the optical path design, as shown in Figure 2. The laser is injected from the left and split into two paths. The upper, shorter optical path propagates directly, while the lower, longer optical path is reflected twice by two mirrors 11 and interferes with the laser in the upper path. Finally, the interference signal is read out in a balanced manner by a pair of single-quadrant photodetectors 12. According to the optical path design in Figure 2, the unequal arm length is approximately 100 mm. The glass substrate and optical elements are made of fused silica, with a coefficient of thermal expansion of approximately 0.5 × 10⁻⁶. -6 The quasi-monolithic compact Mach-Zehnder interferometer fabricated by / K has an overall size of 100mm × 100mm × 30mm and achieves an interference contrast of over 80%.

[0040] The working principle of the heterodyne interferometer probe is as follows: two 1064nm laser beams have a frequency difference of 10KHz. One beam is used as a reference beam and is incident on a reference mirror, while the other beam is used as a measurement beam and is incident on a target mirror to monitor the motion of the target object. Finally, the two beams interfere to form two interference signals, and the motion information of the target object can be measured using these two interference signals.

[0041] This invention proposes a quasi-monolithically compact interferometer based on ultraviolet bonding and its construction method. It can build a Mach-Zender null interferometer with large unequal arm lengths for noise monitoring (including laser frequency noise, temperature fluctuations, etc.) and a heterodyne interferometer probe with picometer-level and nanoradian-level displacement measurement. In the future, it can be applied to various precision measurement fields, such as gravitational wave detection, inertial sensing, and vibration measurement.

[0042] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A quasi-monolithically compact interferometer based on ultraviolet bonding, comprising: The Mach-Zehnder interferometer is characterized in that: the fiber collimator (9) and the glass mounting base (8) in the Mach-Zehnder interferometer are ultraviolet bonded together to form an integrated collimator with a flat bottom surface, and the integrated collimator and the target position of the glass substrate (13) in the Mach-Zehnder interferometer are ultraviolet bonded together; it also includes: an adjustment bracket for adjusting the position of the depolarizing beam splitter (10) and the 45-degree reflector (11) in the Mach-Zehnder interferometer; the adjustment bracket includes a support device for supporting the adjustment part, and the adjustment part includes: a six-dimensional optical adjustment frame (6). The instrument includes: an upper plate; a lower plate, wherein the upper plate and the lower plate are connected by a plurality of screws arranged circumferentially, and the spacing between the upper plate and the lower plate at different positions can be adjusted by turning the screws; a rotating ring, which is located at the bottom of the lower plate; a metal cylindrical connecting rod (7), which is fixedly located at the bottom of the rotating ring, for connecting the depolarizing beam splitter (10) or the 45-degree reflector (11) by adhesive bonding; the Mach-Zehnder interferometer includes: a glass substrate (13); a glass mounting base (8), the bottom of which is fixedly connected to the top of the glass substrate (13). A fiber optic collimator (9) is located in the center of the glass mounting base (8) and is fixedly connected to the glass mounting base (8); a plurality of depolarizing beam splitters (10) are arranged directly in front of the front end of the fiber optic collimator (9), with an acute angle between the plurality of depolarizing beam splitters (10) and the fiber optic collimator (9), and the bottom of the plurality of depolarizing beam splitters (10) is fixedly connected to the top of the glass substrate (13); a plurality of 45-degree reflectors (11) are arranged parallel to the plurality of depolarizing beam splitters (10) and close to the fiber optic collimator (9). The mirror surface of the 45-degree reflector (11) is parallel to the mirror surface of the plurality of depolarizing beam splitters (10), and the extended line of the mirror surface of another 45-degree reflector (11) intersects the extended lines of the mirror surfaces of the plurality of depolarizing beam splitters (10); a plurality of single-quadrant photodetectors (12) are disposed near the outside of the plurality of depolarizing beam splitters (10) and form a 90-degree angle with the farthest depolarizing beam splitter (10); the plurality of depolarizing beam splitters (10) and the plurality of 45-degree reflectors (11) are connected to the glass substrate (13) by ultraviolet adhesive bonding.

2. The quasi-monolithic compact interferometer based on ultraviolet bonding as described in claim 1, characterized in that, The metal cylindrical connecting rod (7) is fixed to the bottom of the rotating ring by the rubber inner nut at the top.

3. The quasi-monolithic compact interferometer based on ultraviolet bonding as described in claim 1, characterized in that, The support device includes: a mechanical component base (1); a connecting rod bracket (2), which is vertically disposed on the top of the mechanical component base (1) and its bottom is fixedly connected to the top of the mechanical component base (1); a column connecting rod (3), which is vertically disposed on the top of the connecting rod bracket (2) and its bottom is fixedly connected to the top of the connecting rod bracket (2); an L-shaped metal adapter frame (4), which is disposed on the top of the column connecting rod (3) and its horizontal end bottom is fixedly connected to the top of the column connecting rod (3); and a metal extension connecting rod (5), which is horizontally disposed on the outer wall of the other vertical end of the L-shaped metal adapter frame (4) and one end is fixedly connected to the L-shaped metal adapter frame (4).

4. A method for constructing a quasi-monolithic compact interferometer based on ultraviolet bonding as described in any one of claims 1 to 3, characterized in that, Includes the following steps: The fiber collimator (9) in the Mach-Zehnder interferometer is bonded to the glass mounting base (8) with UV adhesive to obtain an integrated collimator with a flat bottom surface; the integrated collimator is fixed to the target position on the glass substrate (13) by the positioning plate and UV adhesive; multiple depolarizing beam splitters (10) and multiple 45-degree mirrors (11) are fixed on the adjustment part of the adjustment bracket respectively, the position and orientation of the depolarizing beam splitter (10) and the 45-degree mirror (11) are adjusted by the adjustment bracket, and the adjusted depolarizing beam splitter (10) and the 45-degree mirror (11) are cured in the corresponding position in the Mach-Zehnder interferometer with UV adhesive.

5. The method for constructing a quasi-monolithic compact interferometer based on ultraviolet bonding as described in claim 4, characterized in that, Includes the following steps: Multiple single-quadrant photodetectors (12) are used to monitor the shape interference signal; the position and orientation of multiple depolarized beam splitters (10) and multiple 45-degree mirrors (11) used for beam combining are adjusted by the interference contrast of the interference signal; when the contrast of the interference signal reaches the maximum, the depolarized beam splitters (10) and 45-degree mirrors (11) are glued and fixed with ultraviolet glue to build a quasi-monolithic compact interferometer.