Exposure apparatus

Abstract

The present disclosure provides an exposure device, comprising: a light-transmitting substrate; a ring-shaped frame arranged on one side of the light-transmitting substrate, a space surrounded by the ring-shaped frame forming a containing cavity with the light-transmitting substrate; a mask plate capable of being adsorbed on the side of the ring-shaped frame away from the light-transmitting substrate when the containing cavity is in a negative pressure state; a receiving mechanism and a traction mechanism arranged in the containing cavity; the traction mechanism being capable of moving away from or approaching the receiving mechanism in a direction parallel to the light-transmitting substrate; a flexible light-shielding film, one side of the flexible light-shielding film being connected with the receiving mechanism, and the opposite side of the flexible light-shielding film being connected with the traction mechanism; wherein the receiving mechanism is capable of folding or winding the flexible light-shielding film when the traction mechanism approaches the receiving mechanism, and at least part of the flexible light-shielding film is capable of unfolding when the traction mechanism moves away from the receiving mechanism. The present disclosure can shield light during the exposure process.

Description

Technical Field

[0001] This disclosure relates to the field of display technology, and more particularly to an exposure apparatus. Background Technology

[0002] With the rapid development of display technology, various types of display devices have gradually entered the market. However, some display devices currently have defects in their manufacturing processes. Summary of the Invention

[0003] The purpose of this disclosure is to provide an exposure device.

[0004] This disclosure provides an exposure apparatus, including:

[0005] Transparent substrate;

[0006] An annular frame is disposed on one side of the light-transmitting substrate, and the space enclosed by the annular frame and the light-transmitting substrate form a receiving cavity; when the receiving cavity is under negative pressure, a mask template can be adsorbed onto the side of the annular frame facing away from the light-transmitting substrate.

[0007] A storage mechanism and a traction mechanism are disposed within the receiving cavity; in a direction parallel to the light-transmitting substrate, the traction mechanism can move away from or towards the storage mechanism;

[0008] A flexible light-blocking film, one side of which is connected to the storage mechanism, and the opposite side of which is connected to the traction mechanism;

[0009] Specifically, when the traction mechanism approaches the storage mechanism, the storage mechanism can fold or roll the flexible light-blocking film; when the traction mechanism moves away from the storage mechanism, at least a portion of the flexible light-blocking film can unfold.

[0010] In some embodiments, the storage mechanism includes:

[0011] A winding shaft is rotatably disposed on the annular frame, and the flexible light-shielding film is wound around the winding shaft. The extension direction of the winding shaft is parallel to the light-transmitting substrate.

[0012] In some embodiments, the number of the storage mechanism, the traction mechanism, and the flexible light-shielding film is multiple; one storage mechanism includes one winding shaft, and multiple winding shafts correspond to multiple traction mechanisms; multiple winding shafts correspond to multiple flexible light-shielding films; multiple traction mechanisms correspond to multiple flexible light-shielding films;

[0013] The plurality of winding shafts includes at least a first winding shaft and a second winding shaft; the first winding shaft and the second winding shaft extend along a first direction, which is parallel to the light-transmitting substrate; in a second direction, the first winding shaft and the second winding shaft are located on opposite sides of the receiving cavity, which is perpendicular to the first direction and parallel to the light-transmitting substrate.

[0014] In the second direction, the two traction mechanisms corresponding to the first winding shaft and the second winding shaft are located between the first winding shaft and the second winding shaft.

[0015] In some embodiments, the exposure apparatus includes a track assembly, the track assembly including a first track assembly, the first track assembly including a track extending along the second direction;

[0016] The two traction mechanisms corresponding to the first winding shaft and the second winding shaft are in sliding engagement with the track of the first track assembly.

[0017] In some embodiments, the number of the storage mechanism, the traction mechanism, and the flexible light-shielding film is four, and the plurality of winding shafts further includes a third winding shaft and a fourth winding shaft, the third winding shaft and the fourth winding shaft extending along the second direction; in the first direction, the third winding shaft and the fourth winding shaft are located on opposite sides of the receiving cavity;

[0018] In the first direction, the two traction mechanisms corresponding to the third winding shaft and the fourth winding shaft are located between the third winding shaft and the fourth winding shaft.

[0019] In some embodiments, the exposure apparatus includes a track assembly, which includes a first track assembly and a second track assembly. The first track assembly includes a track extending along a second direction, and the second track assembly includes a track extending along the first direction. The second track assembly is located on the side of the first track assembly away from the light-transmitting substrate.

[0020] The two traction mechanisms corresponding to the first winding shaft and the second winding shaft are in sliding engagement with the track of the first track assembly;

[0021] The two traction mechanisms corresponding to the third and fourth winding shafts slide in cooperation with the track of the second track assembly.

[0022] In some embodiments, the first track assembly includes two tracks, which are distributed on opposite sides of the receiving cavity in the first direction; and / or

[0023] The second track assembly includes two tracks, which are distributed on opposite sides of the accommodating cavity in the second direction.

[0024] In some embodiments, an clearance space is provided on the inner side of the annular frame, the clearance space forming part of the accommodating cavity, and the winding shaft is disposed within the clearance space.

[0025] In some embodiments, the exposure apparatus includes a track assembly comprising one or more tracks extending in a direction perpendicular to the extension direction of the winding shaft and parallel to the light-transmitting substrate; the traction mechanism is slidably engaged with the tracks.

[0026] In some embodiments, an clearance space is provided on the inner side of the annular frame, the clearance space forming part of the accommodating cavity, and the track is disposed within the clearance space.

[0027] The exposure apparatus disclosed herein allows at least a portion of the flexible light-shielding film to unfold when the traction mechanism moves away from the storage mechanism, thereby providing light shielding during the exposure process. When the traction mechanism moves closer to the storage mechanism, the storage mechanism can fold or roll up the flexible light-shielding film. Therefore, the posture of the flexible light-shielding film can be adjusted for easy storage, avoiding the flexible light-shielding film occupying too much space in the receiving cavity. In other words, the space of the receiving cavity does not need to be too large, thus avoiding affecting the negative pressure state of the receiving cavity and preventing the photomask from detaching from the annular frame. Attached Figure Description

[0028] Figure 1 and Figure 2 This is a schematic diagram of an exposure device used in related technologies for exposure.

[0029] Figure 3 This is a schematic diagram of the exposure apparatus according to an embodiment of the present disclosure.

[0030] Figure 4 yes Figure 3 A schematic diagram of the AA cross-section in the structure shown.

[0031] Figure 5 yes Figure 3 A schematic diagram of the BB cross-section in the structure shown.

[0032] Figure 6 This is a schematic diagram of the flexible light-shielding film, the winding shaft, and the track assembly according to an embodiment of this disclosure.

[0033] Explanation of reference numerals in the attached drawings: 1. Transparent substrate; 2. Annular frame; 3. Mask; 4. Winding shaft; 401. First winding shaft; 402. Second winding shaft; 403. Third winding shaft; 404. Fourth winding shaft; 5. First track assembly; 6. Flexible light-shielding film; 7. Receiving cavity; 8. Clearance space; 9. Second track assembly; 10. Track; 11. First light-shielding assembly; 12. Second light-shielding assembly; 13. Substrate to be exposed; 100. Transparent area; 200. Exposed area; 300. Light-shielding area. Detailed Implementation

[0034] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this disclosure. Rather, they are merely examples of apparatuses consistent with some aspects of this disclosure as detailed in the appended claims.

[0035] The terminology used in this disclosure is for the purpose of describing particular embodiments only and is not intended to limit the disclosure. Unless otherwise defined, the technical or scientific terms used in this disclosure should be understood in their ordinary sense by one of ordinary skill in the art to which this disclosure pertains. The terms “first,” “second,” and similar words used in this disclosure and the claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, “an” or “a” and similar words do not indicate a quantity limitation, but rather indicate the presence of at least one. “A plurality” or “several” indicates two or more. The terms “comprising” or “including” and similar words mean that the element or object preceding “comprising” or “including” covers the element or object listed following “comprising” or “including” and its equivalents, and does not exclude other elements or objects. The terms “connected” or “linked” and similar words are not limited to physical or mechanical connections and can include electrical connections, whether direct or indirect. The singular forms “a,” “the,” and “the” used in this disclosure and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used herein refers to and includes any or all possible combinations of one or more associated listed items.

[0036] In related technologies, such as Figure 1 and Figure 2As shown, the proximity exposure device includes a first light-shielding assembly 11 (Border shutter) and a second light-shielding assembly 12 (Area shutter), both of which have rigid light-shielding films. During exposure, the light-shielding films in the first and second light-shielding assemblies 11 and 12 can be moved to control the exposed area 200 (see...). Figure 2 The light passes through the mask 3 below and can illuminate the negative photoresist film on the substrate 13 to be exposed, thereby creating the desired pattern on the substrate 13. The first light-shielding component 11 and the second light-shielding component 12 are both located above the light-transmitting substrate 1. The distance between the second light-shielding component 12 and the substrate 13 to be exposed exceeds 450mm. Due to the edge diffraction effect of light, a blurred exposure area exists on the substrate 13 corresponding to the edge of the second light-shielding component 12 (located between the light-shielding area 300 and the light-exposed area 200). The light energy in this area is dispersed, resulting in insufficient exposure of edge pixels. This is especially problematic for products requiring masking, easily causing uneven peripheral support. To solve this problem, reducing the distance between the first light-shielding component 11 and the second light-shielding component 12 and the mask 3 is an effective method. For example, the first light-shielding component 11 and the second light-shielding component 12 can be positioned between the light-transmitting substrate 1 and the mask 3. An annular frame 2 is provided between the light-transmitting substrate 1 and the mask 3. By evacuating the space enclosed by the light-transmitting substrate 1, the mask 3, and the annular frame 2, the mask 3 can be adsorbed onto the annular frame 2. If the first light-shielding component 11 and the second light-shielding component 12 are placed between the light-transmitting substrate 1 and the mask 3, since the first light-shielding component 11 and the second light-shielding component 12 are rigid structures and need to move during the exposure process, the space enclosed by the light-transmitting substrate 1, the mask 3, and the annular frame 2 is large, making it difficult to maintain the vacuum level in this space. Consequently, the mask 3 cannot be adsorbed, affecting the exposure process.

[0037] This disclosure provides an exposure apparatus that can cooperate with a photomask 3. For example... Figure 3 , Figure 4 as well as Figure 5 As shown, the exposure apparatus may include a light-transmitting substrate 1, an annular frame 2, a storage mechanism, a traction mechanism, and a flexible light-shielding film 6, wherein:

[0038] The annular frame 2 is disposed on one side of the light-transmitting substrate 1. The space enclosed by the annular frame 2 and the light-transmitting substrate 1 form a receiving cavity 7; when the receiving cavity 7 is under negative pressure, the aforementioned mask template 3 can be adsorbed onto the side of the annular frame 2 facing away from the light-transmitting substrate 1. The storage mechanism and the traction mechanism are both disposed within the receiving cavity 7. In a direction parallel to the light-transmitting substrate 1, the traction mechanism can move away from or towards the storage mechanism. One side of the flexible light-shielding film 6 is connected to the storage mechanism, and the opposite side of the flexible light-shielding film 6 is connected to the traction mechanism. When the traction mechanism is close to the storage mechanism, the storage mechanism can fold or roll the flexible light-shielding film 6; when the traction mechanism is away from the storage mechanism, at least a portion of the flexible light-shielding film 6 can be unfolded.

[0039] In the exposure apparatus of this disclosure, at least a portion of the flexible light-shielding film 6 can be unfolded when the traction mechanism moves away from the storage mechanism, thereby providing light shielding during the exposure process; when the traction mechanism moves closer to the storage mechanism, the storage mechanism can fold or roll the flexible light-shielding film 6. Therefore, the posture of the flexible light-shielding film 6 can be adjusted for easy storage, avoiding the flexible light-shielding film 6 occupying too much space in the receiving cavity 7. That is, the space of the receiving cavity 7 does not need to be too large, avoiding affecting the negative pressure state of the receiving cavity 7, and preventing the mask 3 from detaching from the annular frame 2.

[0040] The following is a detailed description of the various parts of the exposure apparatus according to the present disclosure:

[0041] like Figure 4 As shown, the aforementioned photomask 3 can be a fine metal photomask, but this disclosure does not impose any special limitations on it. The photomask 3 may have multiple grids. When the photomask 3 is used to fabricate subpixels of a display substrate, one grid may correspond to one subpixel of the display substrate, but this disclosure does not impose any special limitations on it.

[0042] like Figure 4 As shown, the light-transmitting substrate 1 can be a light-transmitting substrate, such as a glass plate, but this disclosure does not impose any special limitations on it. The light-transmitting substrate 1 can also be a rigid substrate.

[0043] like Figure 4As shown, the annular frame 2 is disposed on one side of the light-transmitting substrate 1 in the thickness direction. The annular frame 2 includes an inner ring and an outer ring, that is, the annular frame 2 can enclose a space. The light-transmitting substrate 1 can cover the inner ring of the annular frame 2 so that the space enclosed by the annular frame 2 and the light-transmitting substrate 1 form a receiving cavity 7. The annular frame 2 can be sealed on one side of the light-transmitting substrate 1. The aforementioned photomask 3 can be disposed on the side of the annular frame 2 facing away from the light-transmitting substrate 1 and block the inner ring of the annular frame 2. The annular frame 2 can be provided with a through hole communicating with the receiving cavity 7 and the external environment. The exposure apparatus of this disclosure can also include a vacuum pump, which can be disposed outside the receiving cavity 7 and connected to the aforementioned through hole to extract gas from the receiving cavity 7, so that the vacuum cavity is in a negative pressure state, thereby allowing the photomask 3 to be adsorbed onto the annular frame 2.

[0044] Furthermore, the thickness of the aforementioned annular frame 2 can be greater than the thickness of the light-transmitting substrate 1, but this disclosure is not limited thereto. The thickness of the annular frame 2 refers to its dimension in the thickness direction of the light-transmitting substrate 1. The annular frame 2 can be rectangular, and the rectangular frame can include a first frame segment, a third frame segment, a second frame segment, and a fourth frame segment connected sequentially. The first frame segment is opposite to the second frame segment, and the third frame segment is opposite to the fourth frame segment. In other embodiments of this disclosure, the annular frame 2 can be circular, triangular, trapezoidal, square, etc. An clearance space 8 can also be provided on the inner side of the annular frame 2, forming part of the space of the receiving cavity 7. The clearance space 8 is formed by a recess in the inner surface of the annular frame 2. The first frame segment, the second frame segment, the third frame segment, and the fourth frame segment can all be provided with clearance spaces 8.

[0045] The storage mechanism is located within the receiving cavity 7 and is used to store the aforementioned flexible light-blocking film 6. This storage mechanism can be located within the aforementioned clearance space 8. For example, Figure 4 As shown, the storage mechanism may include a winding shaft 4. The winding shaft 4 is rotatably disposed on the annular frame 2, and can be disposed within the clearance space 8 of the annular frame 2. The exposure apparatus of this disclosure may include a drive mechanism, such as a motor, for driving the rotation of the winding shaft 4. The winding shaft 4 can rotate clockwise or counterclockwise. The extending direction of the winding shaft 4 may be parallel to the light-transmitting substrate 1. One side of the flexible light-shielding film 6 may be connected to the winding shaft 4. During the rotation of the winding shaft 4, the flexible light-shielding film 6 can be wound around the winding shaft 4, and of course, can also be released from the winding shaft 4. Furthermore, the cross-section of the winding shaft 4 may be circular, elliptical, rectangular, square, triangular, trapezoidal, etc.

[0046] There are multiple storage mechanisms and multiple flexible light-blocking films 6, with each flexible light-blocking film 6 connected to a corresponding storage mechanism. Each storage mechanism may include a winding shaft 4; therefore, multiple storage mechanisms include multiple winding shafts 4. Figure 3 and Figure 5 As shown, the plurality of winding shafts 4 include at least a first winding shaft 401 and a second winding shaft 402, the first winding shaft 401 and the second winding shaft 402 being along a first direction ( Figure 3 Extending in the X direction, the first direction is parallel to the light-transmitting substrate 1; in the second direction ( Figure 3 In the Y direction (as shown in the image), the first winding shaft 401 and the second winding shaft 402 are located on opposite sides of the receiving cavity 7, with the second direction perpendicular to the first direction and parallel to the light-transmitting substrate 1. The cross-sectional shape of the first winding shaft 401 can be the same as that of the second winding shaft 402, and the cross-sectional area of ​​the first winding shaft 401 can be the same as that of the second winding shaft 402. The axis of the first winding shaft 401 and the axis of the second winding shaft 402 can be located on a first predetermined plane, and the first predetermined plane can be parallel to the light-transmitting substrate 1. Furthermore, the first winding shaft 401 can be disposed within the clearance space 8 within the first frame segment, and the second winding shaft 402 can be disposed within the clearance space 8 within the second frame segment.

[0047] Taking an example where both the storage mechanism and the flexible light-blocking film 6 consist of four parts, excluding the first winding shaft 401 and the second winding shaft 402, as follows: Figure 3 and Figure 4 As shown, the four winding shafts 4 may further include a third winding shaft 403 and a fourth winding shaft 404. The third winding shaft 403 and the fourth winding shaft 404 extend along the second direction; in the first direction, the third winding shaft 403 and the fourth winding shaft 404 are located on opposite sides of the receiving cavity 7. The cross-sectional shape of the third winding shaft 403 may be the same as the cross-sectional shape of the fourth winding shaft 404, the cross-sectional area of ​​the third winding shaft 403 may be the same as the cross-sectional area of ​​the fourth winding shaft 404, and the axis of the third winding shaft 403 may lie on a second predetermined plane, and the second predetermined plane may be parallel to the light-transmitting substrate 1. Furthermore, the third winding shaft 403 may be disposed within the clearance space 8 within the aforementioned third frame segment, and the fourth winding shaft 404 may be disposed within the clearance space 8 within the aforementioned fourth frame segment. In other embodiments of this disclosure, in the thickness direction of the light-transmitting substrate 1, the third winding shaft 403 and the fourth winding shaft 404 may be disposed on opposite sides of the first winding shaft 401, that is, the first winding shaft 401 is located between the third winding shaft 403 and the fourth winding shaft 404.

[0048] The traction mechanism is located within the receiving cavity 7. In a direction parallel to the light-transmitting substrate 1, the traction mechanism can be located away from or near the receiving mechanism. One side of the flexible light-shielding film 6 is connected to the receiving mechanism, and the opposite side of the flexible light-shielding film 6 is connected to the traction mechanism. When the traction mechanism is near the receiving mechanism, the receiving mechanism can fold or roll the flexible light-shielding film 6; when the traction mechanism is away from the receiving mechanism, at least a portion of the flexible light-shielding film 6 can be unfolded. The number of traction mechanisms can also be multiple, with multiple winding shafts 4 corresponding to multiple traction mechanisms, and multiple traction mechanisms corresponding to multiple flexible light-shielding films 6. In the second direction, the two traction mechanisms corresponding to the first winding shaft 401 and the second winding shaft 402 can be located between the first winding shaft 401 and the second winding shaft 402. In the first direction, the two traction mechanisms corresponding to the third winding shaft 403 and the fourth winding shaft 404 are located between the third winding shaft 403 and the fourth winding shaft 404. Furthermore, the traction mechanism can be located within the clearance space 8 of the annular frame 2.

[0049] like Figure 6 As shown, the exposure apparatus of this disclosure may further include one or more track assemblies (first track assembly 5, second track assembly 9). The track assembly may include one track 10, or multiple tracks 10, such as two tracks 10. The extending direction of the track 10 may be perpendicular to the extending direction of the winding shaft 4, and the extending direction of the track 10 may be parallel to the light-transmitting substrate 1; the traction mechanism is slidably engaged with the track 10. The track 10 may be disposed within the clearance space 8 of the annular frame 2.

[0050] The aforementioned track assembly may include a first track assembly 5. The first track assembly 5 may include components along a second direction ( Figure 6 The track 10 extends in the Y direction. The two traction mechanisms corresponding to the first winding shaft 401 and the second winding shaft 402 are in sliding cooperation with the track 10 of the first track assembly 5. That is to say, the two traction mechanisms corresponding to the first winding shaft 401 and the second winding shaft 402 share the first track assembly 5.

[0051] The aforementioned track assembly may further include a second track assembly 9. This second track assembly 9 may include components along the first direction ( Figure 6 The second track assembly 9 can be located on the side of the first track assembly 5 away from the light-transmitting substrate 1, extending along the X direction. Two traction mechanisms corresponding to the third winding shaft 403 and the fourth winding shaft 404 slide in cooperation with the track 10 of the second track assembly 9; that is, the two traction mechanisms corresponding to the third winding shaft 403 and the fourth winding shaft 404 share the second track assembly 9.

[0052] The first track assembly 5 may include two tracks 10, which are distributed on opposite sides of the receiving cavity 7 in a first direction. Specifically, one track 10 may be located within the clearance space 8 of the third frame segment, and the other track 10 may be located within the clearance space 8 of the fourth frame segment. The second track assembly 9 may also include two tracks 10, which are distributed on opposite sides of the receiving cavity 7 in a second direction. Specifically, one track 10 may be located within the clearance space 8 of the first frame segment, and the other track 10 may be located within the clearance space 8 of the second frame segment. Figure 6 The flexible light-blocking film 6 in the middle can form a light-transmitting area 100.

[0053] The above are merely preferred embodiments of this disclosure and are not intended to limit this disclosure in any way. Although this disclosure has been disclosed above with reference to preferred embodiments, it is not intended to limit this disclosure. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the technical solution of this disclosure. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this disclosure without departing from the content of the technical solution of this disclosure shall still fall within the scope of the technical solution of this disclosure.

Claims

1. An exposure apparatus, characterized in that, include: Transparent substrate; An annular frame is disposed on one side of the light-transmitting substrate, and the space enclosed by the annular frame and the light-transmitting substrate form a receiving cavity; when the receiving cavity is under negative pressure, a mask template can be adsorbed onto the side of the annular frame facing away from the light-transmitting substrate. A storage mechanism and a traction mechanism are disposed within the receiving cavity; in a direction parallel to the light-transmitting substrate, the traction mechanism can move away from or towards the storage mechanism; A flexible light-blocking film, one side of which is connected to the storage mechanism, and the opposite side of which is connected to the traction mechanism; Specifically, when the traction mechanism approaches the storage mechanism, the storage mechanism can fold or roll the flexible light-blocking film; when the traction mechanism moves away from the storage mechanism, at least a portion of the flexible light-blocking film can unfold.

2. The exposure apparatus according to claim 1, characterized in that, The storage mechanism includes: A winding shaft is rotatably disposed on the annular frame, and the flexible light-shielding film is wound around the winding shaft. The extension direction of the winding shaft is parallel to the light-transmitting substrate.

3. The exposure apparatus according to claim 2, characterized in that, The number of the storage mechanism, the traction mechanism, and the flexible light-shielding film is multiple; each storage mechanism includes one winding shaft, and multiple winding shafts correspond to multiple traction mechanisms; multiple winding shafts correspond to multiple flexible light-shielding films; multiple traction mechanisms correspond to multiple flexible light-shielding films; The plurality of winding shafts includes at least a first winding shaft and a second winding shaft; the first winding shaft and the second winding shaft extend along a first direction, the first direction being parallel to the light-transmitting substrate; In the second direction, the first winding shaft and the second winding shaft are located on opposite sides of the accommodating cavity, the second direction is perpendicular to the first direction and parallel to the light-transmitting substrate; In the second direction, the two traction mechanisms corresponding to the first winding shaft and the second winding shaft are located between the first winding shaft and the second winding shaft.

4. The exposure apparatus according to claim 3, characterized in that, The exposure apparatus includes a track assembly, the track assembly including a first track assembly, the first track assembly including a track extending along the second direction; The two traction mechanisms corresponding to the first winding shaft and the second winding shaft are in sliding engagement with the track of the first track assembly.

5. The exposure apparatus according to claim 3, characterized in that, The number of the storage mechanism, the traction mechanism, and the flexible light-shielding film is four. The plurality of winding shafts also include a third winding shaft and a fourth winding shaft, which extend along the second direction. In the first direction, the third winding shaft and the fourth winding shaft are located on opposite sides of the accommodating cavity. In the first direction, the two traction mechanisms corresponding to the third winding shaft and the fourth winding shaft are located between the third winding shaft and the fourth winding shaft.

6. The exposure apparatus according to claim 5, characterized in that, The exposure apparatus includes a track assembly, which includes a first track assembly and a second track assembly. The first track assembly includes a track extending along a second direction, and the second track assembly includes a track extending along the first direction. The second track assembly is located on the side of the first track assembly away from the light-transmitting substrate; The two traction mechanisms corresponding to the first winding shaft and the second winding shaft are in sliding engagement with the track of the first track assembly; The two traction mechanisms corresponding to the third and fourth winding shafts slide in cooperation with the track of the second track assembly.

7. The exposure apparatus according to claim 6, characterized in that, The first track assembly includes two tracks, which are distributed on opposite sides of the receiving cavity in the first direction; and / or The second track assembly includes two tracks, which are distributed on opposite sides of the accommodating cavity in the second direction.

8. The exposure apparatus according to claim 2, characterized in that, The inner side of the annular frame is provided with a clearance space, which constitutes part of the space of the accommodating cavity, and the winding shaft is located within the clearance space.

9. The exposure apparatus according to claim 2, characterized in that, The exposure apparatus includes a track assembly comprising one or more tracks, the track extending in a direction perpendicular to the extending direction of the winding shaft and parallel to the light-transmitting substrate; the traction mechanism is slidably engaged with the track.

10. The exposure apparatus according to claim 9, characterized in that, The inner side of the annular frame is provided with a clearance space, which constitutes part of the space of the accommodating cavity, and the track is located within the clearance space.

Images