Online film thickness testing device and online film thickness testing method

Abstract

An online film thickness testing device and method are provided. The online film thickness testing device is installed on a deposition chamber for vapor phase transport deposition. The deposition chamber is provided with a first window and a second window. The online film thickness testing device includes a fixed frame, a height measuring device, a film thickness meter, and a motion device. The fixed frame is installed on the deposition chamber. The height measuring device is fixedly installed on the fixed frame and has a first probe head aligned with the first window. The film thickness meter has a second probe head aligned with the second window and has a built-in standard distance measuring device. The motion device is installed on the fixed frame and connected to the film thickness meter so that when the deposition point on the substrate reaches directly below the second probe head after deposition is completed, the second probe head is also at a height of the standard distance from the point directly below the second probe head, thereby allowing the second probe head to measure the film thickness.

Description

Technical Field

[0001] This disclosure relates to the field of thin-film solar energy, and more specifically to an online film thickness testing device and an online film thickness testing method. Background Technology

[0002] There are currently two methods used in production lines for testing the film thickness of the coating on the substrate of thin-film solar cells.

[0003] One approach is to use offline testing, which involves transferring the substrate from the production line to a separate testing station and fixing it in place. The test probe is then moved to measure the film thickness. This method provides high accuracy, but because it is removed from the production line, it is not timely.

[0004] Another method is online testing, which integrates the film thickness meter into the deposition chamber. The probe of the film thickness meter is fixed and emits light downward along its own vertical axis and receives the light reflected vertically along the axis from the coating on the substrate to measure the film thickness. The film thickness meter has a built-in standard distance measuring device, and the film thickness can only be effectively measured when the distance between the probe and the coating on the substrate is the standard distance measuring device.

[0005] However, in the thin-film solar cell fabrication process, VTD (Vapor transport Deposition) is the core coating equipment. However, due to the high heating source and film formation temperature, such as 700°C or above for CdTe coating, 400°C for PSCs coating, and 200°C for CIGS coating, this will cause thermal deformation of the substrate, which in turn will cause the coating on the thermally deformed substrate to also deform.

[0006] In addition, the coating material supplied by the source will volatilize and diffuse to various parts of the deposition chamber after being heated. During continuous production, there is a gap between adjacent substrates transported by the drive rollers, which causes the drive rollers in the deposition chamber to gradually deposit coating material. According to actual production experience, the diameter of the drive rollers will increase after the coating material has completely volatilized.

[0007] Because the probe of the film thickness meter is fixed, during vapor phase transport deposition, whether it is the thermal deformation of the substrate or the increase in the diameter of the drive roller due to the deposition of coating material, it will affect the distance between the probe and the coating on the substrate. When the distance between the probe and the coating on the substrate is not the standard distance, the spectrum obtained by the film thickness meter through the emitted light and the received reflected light from the probe will deviate. This deviation will reduce the accuracy of the film thickness obtained by constructing the coating through the spectrum, or even make it impossible to obtain the film thickness. Summary of the Invention

[0008] In view of the problems existing in the background art, one object of this disclosure is to provide an online film thickness testing device and an online film thickness testing method, which can improve the accuracy of film thickness measurement on substrates for online testing of film thickness on substrates in vapor phase transport deposition.

[0009] Therefore, an online film thickness testing device is provided, which is used to install on a deposition chamber for vapor transport deposition. Multiple drive rollers aligned in the height direction and spaced apart in the length direction are installed inside the deposition chamber. The deposition chamber has an inlet and an outlet at both ends in the length direction. The deposition chamber is heated to maintain the deposition temperature required for vapor transport deposition. The interior of the deposition chamber is connected to a feed source supplying carrier gas and vapor for the coating material. The interior of the deposition chamber is also connected to a vacuum device that maintains the vacuum level inside the deposition chamber in a circulating manner. The multiple drive rollers carry multiple substrates entering from the inlet and transport the substrates at intervals in the length direction towards the outlet. At the deposition position between the outlet and the inlet, vapor for the coating material transported by the carrier gas is introduced into the deposition chamber to deposit a coating on the corresponding substrate at that position. The top wall of the deposition chamber has a first window and a second window downstream of the deposition position. The online film thickness testing device includes a mounting frame, a height measuring device, a film thickness meter, and a motion device. The mounting frame is installed on the top wall of the deposition chamber and located between the first and second windows. A height measuring device is fixedly mounted on a frame. The device has a first probe aligned with a first window in the height direction. This device measures the height of the deposition point on the substrate after deposition. A film thickness tester has a second probe aligned with a second window in the height direction. The second probe emits light vertically downwards along a second axis and receives light reflected vertically along the second axis. The second axis of the second probe and the first axis of the first probe are in the same plane formed by the height and length directions and are parallel to each other. The film thickness tester measures the film thickness at the deposition point on the substrate after deposition. The tester has a built-in standard distance measuring device. A motion device is mounted on the frame and connected to the film thickness tester. This device controls the film thickness tester's vertical movement in the height direction so that when the deposition point on the substrate reaches the second probe directly below it via the corresponding transmission rollers, the second probe is also at a height of the standard distance from the point directly below the second probe, allowing the second probe to measure the film thickness.

[0010] An online film thickness testing method employs the aforementioned online film thickness testing device. The online film thickness testing device is installed on a deposition chamber for vapor transport deposition. Multiple drive rollers aligned in the height direction and spaced apart in the length direction are installed inside the deposition chamber. The deposition chamber has an inlet and an outlet at both ends in the length direction. The deposition chamber is heated to maintain the deposition temperature required for vapor transport deposition. The inside of the deposition chamber is connected to a feed source that supplies carrier gas and vapor for coating material. The inside of the deposition chamber is connected to a vacuum pump that maintains the vacuum level inside the deposition chamber in a flow manner. The multiple drive rollers are used to carry multiple substrates entering from the inlet and transport the multiple substrates to the outlet at intervals in the length direction. At the deposition position between the outlet and the inlet, vapor of coating material transported by carrier gas is introduced into the deposition chamber to deposit coating on the corresponding substrate at that position. The top wall of the deposition chamber has a first window and a second window downstream of the deposition position.

[0011] The beneficial effects of this disclosure are as follows.

[0012] In the online film thickness testing apparatus and method disclosed herein, a height measuring device measures the height of the deposition point on the substrate after deposition. Based on the built-in standard distance measuring device of the film thickness tester, the deviation in the height direction between the height of the deposition point on the substrate after deposition measured by the first probe of the height measuring device and the built-in standard distance measuring device of the film thickness tester can be determined. Then, by comparing the position of the second probe relative to the first probe before movement with this deviation, it can be determined whether the motion device drives the film thickness tester to move up and down in the height direction. By controlling the vertical movement of the film thickness tester in the height direction by the motion device, the second probe is positioned at a height of the standard distance from the point directly below the second probe when the deposition point on the substrate reaches the point directly below the second probe as it is transported by the corresponding transmission roller. Furthermore, the second probe measures the film thickness, enabling online testing of the film thickness on the substrate during vapor phase transport deposition (i.e., testing in the deposition chamber). This allows the film thickness measurement by the second probe to be performed at a height at a standard distance from the point directly below the second probe. This avoids the influence of substrate thermal deformation or increased diameter of the transmission roller due to the deposition of coating material on the distance between the probe and the coating on the substrate when the probe of the film thickness tester is fixed. This ensures that the spectrum obtained by the second probe of the film thickness tester emitting light vertically downward along the second axis and receiving light vertically reflected along the second axis from the point directly below the second probe will not deviate, thus guaranteeing the accuracy of the film thickness obtained by constructing the spectrum and achieving effective measurement of the film thickness. Attached Figure Description

[0013] Figure 1This is a schematic diagram of the online film thickness testing device according to the present disclosure.

[0014] Figure 2 This is an illustrative diagram used to explain one type of movement of the second probe of the film thickness tester, which is used to determine the length and height positions of the deposition sites on the substrate.

[0015] Figure 3 This diagram illustrates the height of the substrate after deposition, measured by the first probe of the height measuring device, the standard distance measurement built into the film thickness tester, the position of the second probe relative to the first probe before movement, and the various actions of the second probe of the film thickness tester. The dashed empty arrows represent the direction of movement of the second probe, and the text "Still" means that the second probe does not need to move.

[0016] Figure 4 This is an explanatory diagram used to illustrate the location of the defined site on the substrate.

[0017] Figure 5 This is a schematic diagram of multiple online film thickness testing devices arranged on a deposition chamber, where the online film thickness testing devices are only shown schematically as blocks.

[0018] The reference numerals in the attached figures are explained as follows:

[0019] X-length direction 45 slider

[0020] 46 fixed blocks in the Y-width direction

[0021] 200 sedimentation chambers in the Z-height direction

[0022] 100 Online Film Thickness Testing Device 200a Top Wall

[0023] 1. Fixed frame W1 First window

[0024] 2. Altimeter W2 Second Window

[0025] 21 First probe head 200b front wall

[0026] 211 First axis 200c left wall

[0027] 3. Film thickness tester DP deposition location

[0028] 31 Second probe head 300 transmission roller

[0029] 311 Second Axis 400 Entrance

[0030] 4. Motion device 500 outlet

[0031] 41 motor 600 board

[0032] 42 coupling at point P

[0033] 43 screw 600a base plate head edge

[0034] 44 guide rail 600b substrate side edge

[0035] 600c substrate corner Detailed Implementation

[0036] The accompanying drawings illustrate embodiments of this disclosure, and it will be understood that the disclosed embodiments are merely examples of this disclosure, which can be implemented in various forms. Therefore, the specific details disclosed herein should not be construed as limiting, but are intended only as the basis for the claims and as an illustrative basis to teach those skilled in the art how to implement this disclosure in various ways.

[0037] [Online Film Thickness Testing Device]

[0038] Reference Figures 1 to 3 The online film thickness testing device 100 according to this disclosure is used to be installed on the deposition chamber 200 of gas phase transport deposition.

[0039] Multiple drive rollers 300, aligned in the height direction Z and spaced apart in the length direction X, are installed inside the deposition chamber 200. The deposition chamber 200 has an inlet 400 and an outlet 500 at both ends in the length direction X. The deposition chamber 200 is heated to maintain the deposition temperature required for vapor transport deposition. The deposition chamber 200 is internally connected to a feed source (not shown) that supplies carrier gas and vapor for the coating material. The deposition chamber 200 is internally connected to a vacuum pump (not shown) that maintains the vacuum level inside the deposition chamber 200 in a flow-through manner. Multiple drive rollers 300 are used to carry multiple substrates 600 entering from the inlet 400 and transport the multiple substrates 600 to the outlet 500 at intervals in the length direction X. At the deposition position DP between the outlet 500 and the inlet 400, the vapor of the coating material transported by the carrier gas is introduced into the deposition chamber 200 to deposit coating on the corresponding substrate 600 that has reached the position. The top wall 200a of the deposition chamber 200 is provided with a first window W1 and a second window W2 downstream of the deposition position DP.

[0040] The online film thickness testing device 100 includes a fixed frame 1, a height measuring device 2, a film thickness tester 3, and a motion device 4.

[0041] The mounting bracket 1 is installed on the top wall 200a of the sedimentation chamber 200 and is located between the first window W1 and the second window W2.

[0042] The height measuring device 2 is fixedly installed on the mounting frame 1. The height measuring device 2 has a first probe 21, which is aligned with the first window W1 in the height direction Z. The height measuring device 2 is used to measure the height Zp of the point P of the film on the substrate 600 after deposition.

[0043] The film thickness tester 3 has a second probe head 31, which is aligned with the second window W2 in the height direction Z. The second probe head 31 emits light vertically downward along the second axis 311 and receives light reflected vertically along the second axis 311. The second axis 311 of the second probe head 31 and the first axis 211 of the first probe head 21 are in the plane formed by the height direction Z and the length direction X and are parallel to each other. The film thickness tester 3 is used to measure the film thickness at point P of the film deposited on the substrate 600 after deposition. The film thickness tester 3 has a built-in standard distance measuring device Zb.

[0044] The motion device 4 is mounted on the fixed frame 1 and connected to the film thickness tester 3 to control the film thickness tester 3 to move vertically up and down in the height direction Z so that when the deposition point P of the substrate 600 reaches directly below the second probe 31 as it is transmitted by the corresponding transmission roller 300, the second probe 31 is also at a height of the standard measurement distance Zb from the point P directly below the second probe 31, and then the second probe 31 performs film thickness measurement.

[0045] During operation,

[0046] The motion device 4 is communicatively connected to the height measuring device 2, the film thickness tester 3, and multiple transmission rollers 300. The motion device 4 receives the height Zp of the deposition point P on the substrate 600 after deposition, measured by the height measuring device 2; the built-in standard distance measuring device Zb of the film thickness tester 3; and the speed at which the multiple transmission rollers 300 transport the substrate 600 along the length direction X.

[0047] Based on the distance ΔX along the length direction X between the first axis 211 of the first probe 21 and the second axis 311 of the second probe 31, the speed at which the multiple transmission rollers 300 transport the substrate 600 along the length direction X, and the time point t0 at which the height measuring device 2 measures the deposition point P of the substrate 600 after deposition, the motion device 4 determines the time Δt required for the deposition point P of the substrate 600 to reach directly below the second probe 31 as the corresponding transmission rollers 300 are transported.

[0048] Based on the relationship between the pre-motion position Z0 of the second probe 31 relative to the first probe 21 and the standard distance measurement Zb, it is determined whether the motion device 4 drives the film thickness tester 3 to move up and down in the height direction Z.

[0049] If the second probe 31 is positioned at the standard distance Zb relative to the first probe 21 before movement at the pre-movement position Z0, then the motion device 4 does not need to drive the film thickness tester 3 to move up and down in the height direction Z. The second probe 31 only needs to wait for the time Δt so that when the deposition point P of the substrate 600 reaches directly below the second probe 31 after deposition, the second probe 31 can measure the film thickness at that point P.

[0050] If the second probe 31 is not at the standard distance Zb at its pre-motion position Z0 relative to the first probe 21, the motion device 4 determines that it needs to drive the film thickness tester 3 to move up and down in the height direction Z so that the second probe 31 moves from its pre-motion position Z0 relative to the first probe 21 to the height of the standard distance Zb within the time Δt. Thus, after deposition, the film coating point P on the substrate 600 moves up and down in the height direction Z along with the second probe 31 as the corresponding transmission roller 300 is transmitted. When the film coating point P on the substrate 600 reaches directly below the second probe 31 after deposition, the second probe 31 of the film thickness tester 3 driven by the motion device 4 also reaches the height of the standard distance Zb. At this time, the second probe 31 measures the film thickness at the point P.

[0051] In the online film thickness testing apparatus 100 of this disclosure, since the online film thickness testing apparatus 100 is installed on the top wall 200a of the deposition chamber 200, the timeliness of feedback of the film thickness of the vapor-transported deposited film can be improved. Because the online film thickness testing apparatus 100 is adjacent to the deposition position DP of the vapor-transported deposit, the film thickness measurement is performed immediately after the substrate 600 is deposited, further improving the timeliness of feedback of the film thickness of the vapor-transported deposited film. Especially in cases where the drive roller 300 in the deposition chamber 200 does not stop transporting the substrate 600, the substrate 600 undergoes thermal deformation, and the diameter of the drive roller 300 increases due to the deposition of the film material, determining the film thickness on the substrate 600 immediately after deposition in the deposition chamber 200 in real time will further enhance the timeliness of feedback of the film thickness of the vapor-transported deposited film.

[0052] In the online film thickness testing device 100 disclosed herein, the height Zp of the deposition point P on the substrate 600 after deposition is measured by the height measuring device 2. Based on the built-in standard distance measuring Zb of the film thickness tester 3, the deviation in the height direction Z between the height Zp of the deposition point P on the substrate 600 after deposition, measured by the first probe 21 of the height measuring device 2, and the built-in standard distance measuring Zb of the film thickness tester 3 can be determined. Then, by comparing the position Z0 of the second probe 31 relative to the first probe 21 before movement with this deviation, it can be determined whether the motion device 4 drives the film thickness tester 3 to move up and down in the height direction Z. By controlling the vertical up and down movement of the film thickness tester 3 in the height direction Z by the motion device 4, when the deposition point P on the substrate 600 reaches directly below the second probe 31 as transmitted by the corresponding transmission roller 300, the second probe 31 is also at a distance from the point P directly below the second probe 31. The standard distance Zb is used to measure the film thickness of the coating by the second probe 31, thus realizing online testing of the film thickness on the substrate 600 during vapor deposition (i.e., testing at the deposition chamber 200). This ensures that the film thickness measurement by the second probe 31 is performed at a height of Zb from the point P directly below the second probe 31. This avoids the influence of substrate thermal deformation or increased diameter of the transmission roller due to the deposition of coating material on the distance between the probe and the coating on the substrate when the probe of the film thickness tester is fixed. This ensures that the spectrum of the light emitted vertically downward along the second axis 311 by the second probe 31 and the light reflected vertically along the second axis 311 from the point P directly below the second probe 31 will not deviate, thus guaranteeing the accuracy of the film thickness obtained by constructing the spectrum and realizing effective measurement of the film thickness.

[0053] In the online film thickness testing device 100 disclosed herein, when the film thickness tester 3 measures the film thickness at multiple points P along the same straight line in the length direction X (because the position of the second axis 311 of the second probe 31 of the film thickness tester 3 is fixed and the attitude of the substrate 600 in the width direction Y is usually fixed during the transport of the substrate 600 by the transmission roller 300), the distribution of film thickness along the same straight line can serve as an indirect basis for the combined influence of the thermal deformation of the substrate 600 along the same straight line and the increase in diameter of the transmission roller 300 due to the deposition of the coating material, thus providing a basis for subsequent deposition temperature control and anti-deposition, cleaning, or other treatments of the transmission roller 300.

[0054] In one example, the first probe 21 of the height measuring device 2 is a specular reflective distance sensor. For example, the first probe 21 of the height measuring device 2 is a Keyence LK-G152 sensor.

[0055] In one example, the second probe 31 of the film thickness meter 3 is a sensor that emits and reflects laser light coaxially in the height direction Z. For example, the second probe 31 is a FILMETRICS film thickness measuring instrument.

[0056] In one example, the motion device 4 is connected to the film thickness tester 3 using a lead screw, nut, and slider transmission. Using a lead screw, nut, and slider transmission improves the displacement accuracy of the motion device 4 in driving the measuring point positioning device 2 and the film thickness tester 3 in the vertical Z-direction.

[0057] like Figure 1 and Figure 2 As shown, in one example, the motion device 4 includes a motor 41, a coupling 42, a lead screw 43, a guide rail 44, a slider 45, and a fixing block 46. The motor 41 is mounted on a fixed frame 1. The coupling 42 connects the motor 41 and the lead screw 43 so that the motor 41 drives the lead screw 43 to rotate. The lead screw 43 extends vertically downwards along the height direction Z. The guide rail 44 is mounted on the fixed frame 1 and is located on both sides of the lead screw 43 along the width direction Y. The slider 45 is slidably engaged with the guide rail 44 and connected to the lead screw 43 via a nut (not shown) so that the rotation of the lead screw 43 is converted into vertical up-and-down translation of the slider 45 along the guide rail 44. The fixing block 46 is fixed to the slider 45 and fixedly connected to the film thickness tester 3.

[0058] In one example, refer to Figure 1 and Figure 4 The inner surface of the left wall 200c at the entrance 400 of the deposition chamber 200 is used as a position reference point in the length direction X. Based on the distance X1 between the inner surface of the left wall 200c and the first axis 211 of the first probe head 21, and the speed at which the multiple transmission rollers 300 transport the substrate 600 along the length direction X, the first time when the substrate edge 600a enters from the inner surface of the left wall 200c and reaches the first axis 211 of the first probe head 21 can be determined. Further, based on the speed at which the multiple transmission rollers 300 transport the substrate 600 along the length direction X and the second time point at which the coating point P on the substrate 600 is measured after deposition by the height measuring device 2, the position Xp of point P on the substrate 600 relative to the substrate edge 600a can be determined by the time difference determined by the first time point and the second time point and the speed at which the multiple transmission rollers 300 transport the substrate 600 along the length direction X. Using the inner surface of the front wall 200b of the deposition chamber 200 as a position reference point in the width direction Y, and based on the distance Y1 between the first axis 211 of the first probe 21 and the inner surface of the front wall 200b, and the distance Y2 between the substrate 600 and the inner surface of the front wall 200b, the position Yp of point P on the substrate 600 relative to the side edge 600b of the substrate 600 can be determined. In other words, the position Yp of point P on the substrate 600 relative to the side edge 600b of the substrate 600 is determined by the distance Y1 between the first axis 211 of the first probe 21 and the inner surface of the front wall 200b. Figure 4 The corner point 600c of the substrate at the lower right is taken as the origin of the local coordinates of the substrate 600.

[0059] like Figure 5 As shown, there are multiple online film thickness testing devices 100, which are arranged at intervals along the width direction Y between the first window W1 and the second window W2. As mentioned above, each online film thickness testing device 100 measures the film thickness distribution at multiple points P located on the same straight line extending along the length direction X, while the multiple online film thickness testing devices 100 measure the film thickness distribution at points P located on multiple straight lines distributed along the Y direction. This enables film thickness measurement of the entire area on a single substrate 600, and further allows for real-time online analysis of the overall film thickness uniformity, as well as real-time analysis of the combined effects of the aforementioned thermal deformation of the substrate 600 and the increase in diameter of the transmission roller 300 due to the deposition of the coating material.

[0060] like Figure 5 As shown, both the first window W1 and the second window W2 are single windows that extend along the width direction Y.

[0061] In the VTD, the deposition chamber 200 can be heated from the outside. The carrier gas can be nitrogen, neon, argon, or krypton. The coating material can be, but is not limited to, CdTe, CIGS, or PSCs. The substrate 600 can be glass, and more specifically, tempered glass. In one example, the drive rollers 300 within the deposition chamber 200 are all heated rollers. In one example, a vacuum device (not shown) is connected to the interior of the deposition chamber 200 via the outlet 500.

[0062] [Online Film Thickness Testing Method]

[0063] The online film thickness testing device 100 is installed on the deposition chamber 200 of the gas phase transport deposition.

[0064] Multiple drive rollers 300, aligned in the height direction Z and spaced apart in the length direction X, are installed inside the deposition chamber 200. The deposition chamber 200 has an inlet 400 and an outlet 500 at both ends in the length direction X. The deposition chamber 200 is heated to maintain the deposition temperature required for vapor transport deposition. The deposition chamber 200 is connected to a feed source (not shown) that supplies carrier gas and vapor for the coating material. The deposition chamber 200 is also connected to a vacuum pump (not shown) that maintains the vacuum level inside the deposition chamber 200 in a flow-through manner. Multiple drive rollers 300 are used to carry multiple substrates 600 entering from the inlet 400 and transport the multiple substrates 600 to the outlet 500 at intervals in the length direction X. At the deposition position DP between the outlet 500 and the inlet 400, the vapor of the coating material transported by the carrier gas is introduced into the deposition chamber 200 to deposit coating on the corresponding substrate 600 that has reached the position. The top wall 200a of the deposition chamber 200 is provided with a first window W1 and a second window W2 downstream of the deposition position DP.

[0065] The various features, effects, and operation of the online film thickness testing device 100 are described above and will not be repeated here. The effects of the online film thickness testing method according to this disclosure using the online film thickness testing device 100 are also described above and will not be repeated here.

[0066] Several exemplary embodiments have been described in detail above, but this document is not intended to limit itself to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined to form several other combinations, which are not shown for simplicity.

Claims

1. An online film thickness testing device, characterized in that, An online film thickness testing device (100) is used to be installed on the deposition chamber (200) of a vapor phase transport deposition; Multiple drive rollers (300) aligned in the height direction (Z) and spaced apart in the length direction (X) are installed inside the deposition chamber (200). The deposition chamber (200) has an inlet (400) and an outlet (500) at both ends in the length direction (X). The deposition chamber (200) is heated to maintain the deposition temperature required for vapor transport deposition. The inside of the deposition chamber (200) is connected to a feed source that supplies carrier gas and vapor for the coating material. The inside of the deposition chamber (200) is connected to a vacuum pump that maintains the vacuum level inside the deposition chamber (200) in a circulating manner. The drive roller (300) is used to carry multiple substrates (600) entering from the inlet (400) and transport the multiple substrates (600) to the outlet (500) at intervals in the longitudinal direction (X). At the deposition position (DP) between the outlet (500) and the inlet (400), the vapor of the coating material transported by the carrier gas is introduced into the deposition chamber (200) to deposit coating on the corresponding substrate (600) that has arrived at the position. The top wall (200a) of the deposition chamber (200) is provided with a first window (W1) and a second window (W2) downstream of the deposition position (DP). The online film thickness testing device (100) includes a fixed frame (1), a height measuring device (2), a film thickness tester (3), and a motion device (4). The mounting bracket (1) is installed on the top wall (200a) of the sedimentation chamber (200) and located between the first window (W1) and the second window (W2). The height measuring device (2) is fixedly installed on the fixed frame (1). The height measuring device (2) has a first probe (21). The first probe (21) is aligned with the first window (W1) in the height direction (Z). The height measuring device (2) is used to measure the height (Zp) of the coating point (P) on the substrate (600) after deposition. The film thickness tester (3) has a second probe (31). The second probe (31) is aligned with the second window (W2) in the height direction (Z). The second probe (31) emits light vertically downward along the second axis (311) and receives light reflected vertically along the second axis (311). The second axis (311) of the second probe (31) and the first axis (211) of the first probe (21) are in the plane formed by the height direction (Z) and the length direction (X) and are parallel to each other. The film thickness tester (3) is used to measure the film thickness at the point (P) of the film coating on the substrate (600) after deposition. The film thickness tester (3) has a built-in standard distance measuring device (Zb). The motion device (4) is mounted on the fixed frame (1) and connected to the film thickness tester (3) to control the film thickness tester (3) to move vertically up and down in the height direction (Z) so that when the point (P) of the film on the substrate (600) after deposition is completed reaches the second probe head (31) directly below it with the transmission of the corresponding transmission roller (300), the second probe head (31) is also at a height of standard distance (Zb) from the point (P) directly below the second probe head (31), and then the second probe head (31) performs film thickness measurement.

2. The online film thickness testing device according to claim 1, characterized in that, The first probe (21) of the height measuring device (2) is a mirror-reflective distance measuring sensor.

3. The online film thickness testing device according to claim 2, characterized in that, The first probe (21) of the height measuring device (2) is a Keyence LK-G152 sensor.

4. The online film thickness testing device according to claim 1, characterized in that, The second probe (31) of the film thickness tester (3) is a sensor that emits and reflects lasers coaxially in the height direction (Z).

5. The online film thickness testing device according to claim 4, characterized in that, The second probe (31) is a FILMETRICS film thickness measuring instrument.

6. The online film thickness testing device according to claim 1, characterized in that, The motion device (4) is connected to the film thickness tester (3) by a screw-nut-slider transmission.

7. The online film thickness testing device according to claim 1, characterized in that, There are multiple online film thickness testing devices (100), which are arranged at intervals along the width direction (Y) between the first window (W1) and the second window (W2).

8. The online film thickness testing device according to claim 1, characterized in that, The first window (W1) and the second window (W2) are both single windows that extend along the width direction (Y).

9. The online film thickness testing device according to claim 1, characterized in that, The inner surface of the front wall (200b) of the sedimentation chamber (200) serves as a position reference point in the width direction (Y); The inner surface of the left wall (200c) at the entrance (400) of the sedimentation chamber (200) serves as a position reference point in the length direction (X).

10. An online film thickness testing method, characterized in that, The online film thickness testing device (100) according to any one of claims 1-9 is used. An online film thickness testing device (100) is installed on the deposition chamber (200) of the vapor phase transport deposition; Multiple drive rollers (300) aligned in the height direction (Z) and spaced apart in the length direction (X) are installed inside the deposition chamber (200). The deposition chamber (200) has an inlet (400) and an outlet (500) at both ends in the length direction (X). The deposition chamber (200) is heated to maintain the deposition temperature required for vapor transport deposition. The inside of the deposition chamber (200) is connected to a feed source that supplies carrier gas and vapor for the coating material. The inside of the deposition chamber (200) is connected to a vacuum pump that maintains the vacuum level inside the deposition chamber (200) in a circulating manner. The drive roller (300) is used to carry multiple substrates (600) entering from the inlet (400) and transport the multiple substrates (600) to the outlet (500) at intervals in the length direction (X). At the deposition position (DP) between the outlet (500) and the inlet (400), the vapor of the coating material transported by the carrier gas is introduced into the deposition chamber (200) to deposit coating on the corresponding substrate (600) that has arrived at the position. The top wall (200a) of the deposition chamber (200) is provided with a first window (W1) and a second window (W2) downstream of the deposition position (DP).

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