A filtration exhaust integration system and control system thereof

Abstract

This invention discloses an integrated filtration and exhaust system, comprising an intake unit, a filtration unit, an exhaust unit, and a gas storage unit connected in sequence. The exhaust unit includes a gas module, a mass spectrometry detection module, and a vacuum pump unit. The intake unit is connected to the gas storage unit sequentially via the mass spectrometry detection module and the gas module. The gas module includes a flow control module and a gas sampling module connected in sequence. The flow control module is connected to the gas sampling module and the vacuum pump unit via a valve group module. In this invention, by using multiple control valves with multiple switching channels, these channels are integrated within the valve stems of the control valves, reducing the space occupied by the original multiple control valves and connecting pipelines. Different combinations of switching channels can be achieved according to the valve position logic between the valve groups, reducing the installation size of the gas module and saving installation space.

Description

Technical Field

[0001] This invention relates to the field of exhaust gas treatment equipment technology, and more specifically to an integrated filtration exhaust system and its control system. Background Technology

[0002] The gas handling system can filter, exhaust, extract, measure and control gas flow rate and exhaust pressure, and detect gas composition.

[0003] Existing patent publication number WO2005113950A2 discloses a wall-flow particulate trap system that regenerates through a reverse pressure drop on the porous wall of multiple tubular channels by filtering exhaust gas, with the pressure drop and duration sufficient to discharge collected soot and ash. The system includes a particulate collector having an inlet and an outlet; a mode valve assembly offset from the inlet of the particulate collector; a remotely driven safety valve offset from the outlet of at least one particulate collector; a pipe rotor located between the particulate collector and the mode valve assembly, the pipe rotor having a first end and a second end, the second end of the pipe rotor being in operative communication with the mode valve assembly, and the first end of the pipe rotor being in fluid communication with the inlet of the particulate collector; and a rotor driver operatively connected to said pipe rotor.

[0004] Gas processing systems have numerous applications in the field of natural gas processing. Existing gas processing systems have many control points and complex channels. The designed highly integrated gas processing system has a complex structure and large size, consisting of a wide variety of components, including a gas input module for gas supply, a gas detection module for synchronous real-time detection of gas composition, a gas sampling module for sampling at different pressures, a vacuum module for creating a vacuum environment within the pipeline, and various instruments for monitoring reaction conditions such as pressure and gas flow rate.

[0005] Valves are crucial components in highly integrated gas transmission systems. Currently, most valves in China are manual mechanical valves, while intelligent control valves are still in their infancy and operate on a single-line control model. Highly integrated gas transmission systems, however, require sophisticated, reliable, and user-friendly bus-based control, necessitating the use of modular valves. Modular gas systems developed by Fujikin Group and FITOK in Japan are primarily used in gas control equipment within the semiconductor industry. These systems employ surface-mount components compliant with SEMI standards and feature modular designs, reducing equipment size while simplifying installation and maintenance. However, designing highly integrated gas transmission systems requires achieving high flow rates, which existing equipment cannot meet. Therefore, this paper proposes developing an intelligent modular valve to achieve multifunctionality, high flow rates, rapid connectivity, and intelligent control in highly integrated gas transmission systems.

[0006] Currently, the integrated piping of the entire filtration and exhaust system is complex, with numerous exposed valve assemblies and connecting pipes, occupying a large space and failing to meet integration requirements. Therefore, there are two pressing technical problems to be solved in the field of filtration and exhaust systems: first, designing and developing new valves with multi-way functions and the ability to perform centralized bus control; and second, achieving miniaturization of components and integrated design of the overall structure in the filtration and exhaust system.

[0007] When the entire filtration and exhaust system is integrated, the connecting pipelines are complex, and the number of exposed valve groups and connecting pipelines is large, which occupies a lot of space and cannot meet the integration requirements. Summary of the Invention

[0008] The technical problem to be solved by this invention is how to achieve system miniaturization, reduce installation size, and save installation space.

[0009] This invention solves the above-mentioned technical problems through the following technical means: an integrated filtration and exhaust system, comprising an intake unit, a filtration unit, an exhaust unit, and a gas storage unit connected in sequence. The exhaust unit includes a gas module, a mass spectrometry detection module, and a vacuum pump group. The intake unit is connected to the gas storage unit in sequence through the mass spectrometry detection module and the gas module. The gas module includes a flow control module and a gas sampling module connected in sequence. The flow control module is connected to the gas sampling module and the vacuum pump group through a valve group module. The valve group includes a control valve with multiple switching channels, all of which are located inside the valve stem of the control valve and share a common interface at their input ends. The input ports of the gas sampling module and the vacuum pump group are respectively connected to the switching channels of the control valve.

[0010] By setting up multiple control valves with multiple switching channels, the multiple switching channels are integrated into the valve stem of the control valve, reducing the space occupied by the original multiple control valves and connecting pipelines. Different combinations of switching channels can be realized according to the valve position logic between valve groups, reducing the installation size of the gas module and saving installation space.

[0011] As a preferred technical solution, the flow control module includes a flow controller, which has an input adapter and an output adapter. The input adapter and the output adapter of the flow controller are respectively connected to adjacent control valves through sealing connectors. The flow controller is fixedly mounted on the sealing connector, and the ends of the flow controller connected to the sealing connector and the control valves are all planar seals.

[0012] As a preferred technical solution, the sealing connector is an L-shaped adapter plate. Two L-shaped adapter plates are both installed at the bottom of the flow controller and are symmetrically distributed about the axis of the flow controller. The L-shaped adapter plate includes a vertical section and a horizontal section. The end of the vertical section facing the flow controller is sealed and fixed to the adapter of the flow controller, and the end of the vertical section away from the flow controller is sealed and fixed to the control valve. The flow controller is provided in two sets and is arranged side by side.

[0013] By setting up two sets of flow controllers, one is in use and the other is on standby, which improves the stability of system operation. By setting planar seals on both ends of the sealing connector, the sealing reliability is improved. At the same time, the use of sealing connectors instead of the original threaded seals reduces the overall size and improves the consistency with the appearance of the assembled module.

[0014] As a preferred technical solution, the valve stem of the control valve has multiple openings circumferentially distributed in a spiral pattern along the circumferential direction of the valve stem. The valve stem is connected to the drive motor of the valve assembly, and the drive motor drives the valve stem to rotate around its axis to open and close the corresponding switching channel.

[0015] As a preferred technical solution, the filter unit includes a filter unit housing and a multi-stage filter. The multi-stage filter is fixedly installed inside the filter unit housing, and its input end and output end are respectively connected to the output end of the intake unit and the output end of the exhaust unit. The multi-stage filter includes multiple secondary filters connected in series. The secondary filter includes a housing, a support plate, a pressure ring, and a filter element. An annular support plate is fixed to the inner wall of the housing. A through hole is opened at the center line of the annular support plate. The filter element is embedded in the through hole and is connected and fastened by the pressure ring. The input port and the filter unit are both equipped with pressure sensors.

[0016] As a preferred technical solution, the filter element includes a first filter element, a second filter element, and a plurality of third filter elements distributed sequentially along the circumference of the multi-stage filter. The first filter element is a coarse sponge, the second filter element is a fine sponge and polypropylene, and the inner wall of the secondary filter has an installation groove. One end of the third filter element connected to the secondary filter extends into the installation groove and is bonded and fixed thereto. The end of the third filter element connected to the secondary filter is serrated, and the end face of the installation groove connected to it has a mating protrusion adapted to it.

[0017] By setting the end of the third filter element connected to the secondary filter to be serrated and extending into the mounting groove, and setting a mating protrusion to cooperate with the serrated connection part of the third filter element, the contact area between the third filter element and the secondary filter is increased, and the connection strength of the third filter element is improved. By bonding and fixing the third filter element to the secondary filter, it is possible to prevent polluted gas from leaking from the edge. By setting wire mesh pressure rings at both ends of the third filter element, it is possible to prevent excessive gas impact force from causing excessive deformation of the filter element and damaging the sealing structure.

[0018] As a preferred technical solution, the exhaust unit further includes an online monitoring module, which includes a detection branch, a gas detector, and a component detection buffer tank. Both ends of the detection branch are connected to the main pipeline of the exhaust unit, and a control valve is provided at the end of the detection branch connected to the main pipeline. The detection branch is equipped with a component detection buffer tank and a gas detector adapted to the detection gas.

[0019] A control system for an integrated filtration and exhaust system includes the following steps:

[0020] Step 1: Based on the pneumatic control principle of the filtration exhaust system, determine the electrical structure and perform modular control design; Step 2: Determine the hardware system selection and bus communication method for the filtration exhaust system; Step 3: Design the key process programs of the control system and determine the automation process algorithm for the filtration exhaust system.

[0021] Step 1 specifically includes:

[0022] Step 11: Allocate exhaust system control units; Large-capacity high-pressure gas filtration exhaust systems are complex in function, have strong process order, and have many electrical devices. In order to achieve both centralized management and decentralized control, and at the same time realize data sharing, the exhaust system is divided into two independent control units: one is the control unit for the filtration unit, which only contains the filtration module, and the other is the control unit for the exhaust unit, which mainly includes the gas module, gas sampling module, and online detection module.

[0023] Step 12: Set up the filter control unit; The filter control unit mainly includes the part from the high-pressure gas inlet pipeline to the final outlet of the high-efficiency filter. It consists of a gas source, multi-stage filters, electrically controlled valves, pressure sensors, temperature and humidity sensors, cooling fans, cooling units, etc. It uses multiple electrically controlled valves in cooperation. Through sensor feedback signals, the PLC outputs working status and alarm information to control the solenoid valves to realize the cylinder action of the electrically controlled valves and the on / off action of the air cooler unit, thus completing the filtration and cooling process;

[0024] Step 13: Set up the exhaust control unit; The exhaust control unit mainly includes processes such as sampling, component detection and exhaust of filtered gas. It consists of electric control valves, pressure sensors, temperature and humidity sensors, gas detectors, vacuum pump cooling units, mass flow meters, pressure reducing valves, sampling bottles, etc. It also uses multiple electric valves in cooperation. Through sensor feedback signals, the PLC outputs working status and alarm information to control the solenoid valves to realize the cylinder action of the electric control valves and the switching action of the vacuum pump unit to complete the corresponding process.

[0025] Step 2 specifically includes:

[0026] Step 21: Build the control system hardware; The control system consists of a PLC controller, a host computer, and various module unit substations. It adopts RS485 bus communication to complete the acquisition of various signals in the system, control of various devices, status monitoring, logical operation and judgment of automatic processes, and fault diagnosis and early warning of the system.

[0027] Step 22: Build a signal acquisition module. The signal acquisition module mainly measures the pressure of key nodes in the pipeline distribution as a judgment indicator for the entire system's filtration and exhaust operation process. It uses temperature and humidity sensors to measure the temperature and humidity inside the pipeline, which facilitates the opening and closing of the cooling module to cool the filtration module. It also collects signals from the mass flow meter and the solenoid valve to provide real-time gas flow rate feedback and status output of the intelligent electric valve.

[0028] Step 23: Build the information processing module; using a PLC and RS485 bus communication, control the opening and closing of each electric valve, calculate and judge through the designed automatic operation process to realize the system's logical functions, output commands for the corresponding processes, and realize real-time data exchange with the PLC; display key data such as pressure, temperature, and humidity in the pipeline in real time to realize the status monitoring of the pipeline; realize functions such as historical data recording, data processing and analysis;

[0029] Step 24: Build the action execution module; through transmitted signal commands, various electric valves, cooling units, vacuum pump units, etc. cooperate with each other to realize the corresponding processes of the system;

[0030] Step 25: Set up the fault alarm module; the fault alarm module will provide alarm lights to indicate the fault and provide preliminary handling measures to prompt on-site operators to handle it in a timely manner; in order to improve system safety, the system is designed with safety interlocking procedures, which will prevent logically conflicting operations or misoperations from being executed, and a confirmation procedure will be set for high-risk operations.

[0031] Step 26: Build an automatic control system.

[0032] As a preferred technical solution, step 3 specifically includes:

[0033] Step 31: One-click filtration and exhaust program design; The filtration and exhaust system requires a large number of electrically operated valves to be controlled, and these valves must meet the logical requirements of the opening and closing sequence for various operating procedures. The possibility of human error is relatively high. Therefore, a one-click filtration and exhaust program needs to be designed to achieve automatic discharge of large-capacity, high-pressure gas. Both the filtration and exhaust units use Haiwell AH16S0R PLCs. Different Modbus communication protocol addresses need to be set for different signals to facilitate the mutual transmission of temperature, pressure, humidity, valve status, and results between the filtration and exhaust units, enabling automatic logic calculations in the program. The one-click filtration and exhaust logic flowchart is shown in the figure.

[0034] The filter units are sequentially labeled according to the process order, i-th (i = 1, 2, ... i-th) max ) valves, i max This is the last valve in this unit; the exhaust unit is sequentially labeled according to the process sequence, with the j-th valve (j = 1, 2…j) marked. max ) valves, j max This is the last valve in this unit.

[0035] Step 32: After clicking the "Start One-Click Exhaust Filtering" button, design the automatic exhaust filtering algorithm.

[0036] Step 33: Establish a one-click sampling program. During high-pressure gas release, gas samples are extracted at a specific pressure for component analysis. Before sampling, the sampling pipeline needs to be cleaned to reduce the impact of particulate matter precipitation in the gas during the initial depressurization phase on the sample gas. There are two cleaning processes: direct power depressurization cleaning and N2 cleaning. When using a power pump for depressurization cleaning, the pressure in the depressurization pipeline needs to be reduced to negative pressure, and the valve at the front end of the sampling pipeline needs to be closed. Simultaneously, starting and stopping the pump requires high pressure control before and after the pipeline, as well as strict on- and off-line control. Starting the pump requires ensuring that the pressure at the rear end of the pipeline is below atmospheric pressure and that the rear end is open; otherwise, the pump will burn out. When using N2 cleaning, only the sampling pipeline needs to be cleaned; therefore, the valves at both the front and rear ends of the sampling pipeline need to be closed. After the initial preparation is complete, when sampling the gas, the front end of the sampling pipeline needs to be opened, and the rear end closed to ensure gas flows into the sampling bottle. The sampling process places high demands on the intelligent valves and the power pump's status, which is subject to frequent changes. Therefore, an automated sampling algorithm is designed to reduce the risk of human error.

[0037] As a preferred technical solution, step 32 specifically includes:

[0038] Step 321: Output the command to open the i-th (=1) valve to the actuator of the electric valve. When the i-th valve is fully open, feed back its opening and closing result.

[0039] Step 322: Automatically control the opening of the (i+1)th valve until the i-th valve... max The valves are fully opened, completing the one-button filtration of the exhaust front section and transmitting a one-button filtration of the exhaust front section completion signal to the exhaust unit;

[0040] Step 323: The exhaust unit opens the j-th valve sequentially according to the process requirements. When the j-th valve... max Each valve is fully open, outputting a feedback signal.

[0041] Step 324: Automatically set the gas flow rate to f_set1, and simultaneously output a signal indicating completion of one-click filtration and exhaust to the host computer, and feed the signal back to the filtration unit;

[0042] Step 325: After the filtered exhaust has run for 30 minutes, set the gas flow rate to f_set2 and continue depressurizing.

[0043] The advantages of this invention are:

[0044] (1) In this invention, by setting multiple control valves with multiple switching channels, multiple switching channels are integrated into the valve stem of the control valve, which reduces the space occupied by the original multiple control valves and connecting pipelines. Different switching channels can be combined according to the valve position logic between valve groups, which reduces the installation size of the gas module and saves installation space.

[0045] (2) In this invention, by setting up two sets of flow controllers, one is used and one is on standby, which improves the stability of system operation. By setting planar seals on both ends of the sealing connector, the sealing reliability is improved. At the same time, the sealing connector is used to replace the original threaded seal, which reduces the overall size and improves the consistency with the appearance after the module is assembled.

[0046] (3) In this invention, by setting the end of the third filter element connected to the secondary filter to be serrated and extending into the mounting groove, and by setting a mating protrusion to cooperate with the serrated connection part of the third filter element, the contact area between the third filter element and the secondary filter is increased, and the connection strength of the third filter element is improved. By bonding and fixing the third filter element to the secondary filter, the leakage of polluted gas from the edge can be prevented. By setting steel wire mesh pressure rings at both ends of the third filter element, the excessive gas impact force can be prevented from causing excessive deformation of the filter element and damaging the sealing structure. Attached Figure Description

[0047] Figure 1 This is a schematic diagram of the overall system provided in an embodiment of the present invention;

[0048] Figure 2 This is a schematic diagram of the internal structure of the gas module housing provided in an embodiment of the present invention;

[0049] Figure 3This is a schematic diagram of the first valve group structure provided in an embodiment of the present invention;

[0050] Figure 4 This is a schematic diagram of the cross-sectional structure of the first sleeve provided in an embodiment of the present invention;

[0051] Figure 5 This is a schematic diagram of the second valve group structure provided in an embodiment of the present invention;

[0052] Figure 6 This is a schematic diagram of the cross-sectional structure of the valve stem of the second valve group provided in an embodiment of the present invention;

[0053] Figure 7 This is a schematic diagram of the cross-sectional structure of the second sleeve provided in an embodiment of the present invention;

[0054] Figure 8 This is a schematic diagram of the fifth valve group structure provided in an embodiment of the present invention;

[0055] Figure 9 This is a schematic diagram of the cross-sectional structure of the fifth sleeve provided in an embodiment of the present invention;

[0056] Figure 10 A schematic diagram of the fifth valve stem structure provided in an embodiment of the present invention;

[0057] Figure 11 This is a schematic diagram of the airway plate structure provided in an embodiment of the present invention;

[0058] Figure 12 This is a schematic diagram of the internal structure of the exhaust unit provided in an embodiment of the present invention;

[0059] Figure 13 A schematic diagram of the flow controller structure provided in an embodiment of the present invention;

[0060] Figure 14 This is a schematic diagram of the L-shaped adapter plate structure provided in an embodiment of the present invention;

[0061] Figure 15 This is a schematic diagram of the filter unit structure provided in an embodiment of the present invention;

[0062] Figure 16 This is a schematic diagram of the internal structure of the filter unit provided in an embodiment of the present invention;

[0063] Figure 17 This is a schematic diagram of the cross-sectional structure of a multi-stage filter provided in an embodiment of the present invention;

[0064] Figure 18 This is a schematic diagram of the fourth airway structure provided in an embodiment of the present invention;

[0065] Figure 19 This is a schematic diagram of the basic valve assembly structure provided in an embodiment of the present invention;

[0066] Figure 20 This is a schematic diagram of the basic valve group working mode structure provided in an embodiment of the present invention;

[0067] Figure 21 This is a schematic diagram of the valve stem cross-section structure provided in an embodiment of the present invention;

[0068] Figure 22 This is a schematic diagram of the outlet structure of the basic valve assembly provided in an embodiment of the present invention;

[0069] Figure 23 A schematic diagram of filter stress experimental data provided in an embodiment of the present invention;

[0070] Figure 24 This is a schematic diagram of the experimental data of the outer cylinder stress provided in an embodiment of the present invention;

[0071] Figure 25 This is a schematic diagram of the effective filtration area structure of the filter element provided in an embodiment of the present invention;

[0072] Figure 26 This is a schematic diagram of the pressure drop position curve provided in an embodiment of the present invention;

[0073] Figure 27 A schematic diagram of the filtration efficiency curve provided in an embodiment of the present invention;

[0074] Figure 28 This is a schematic diagram of the pressure drop experimental structure provided in an embodiment of the present invention;

[0075] Figure 29 This is a schematic diagram of the filter pressure drop testing platform provided in an embodiment of the present invention;

[0076] Icon labels:

[0077] 1. Filter unit; 11. Filter unit housing; 12. Multi-stage filter; 121. Secondary filter; 1211. Mounting groove; 1212. Docking protrusion; 122. Support plate; 1221. Through hole; 123. Pressure ring; 13. Filter element; 131. First filter element; 132. Second filter element; 133. Third filter element; 2. Exhaust unit; 21. Gas module; 210. Gas module housing; 22. Mass spectrometry detection module; 221. Flow control module; 2211. Flow controller; 2212. L-shaped adapter plate; 222. Gas sampling module; 223. Online detection module; 2231. Detection branch; 2232. Gas detector; 2233. Component detection buffer tank; 23. Vacuum pump set; 24. Main control module; 25, Valve group module; 2501, First valve group; 2501, First valve group; 25011, First valve group housing; 25012, First valve stem; 25013, First stem sleeve; 25014, First through hole; 25015, First connecting channel; 25016, Second connecting channel; 2502, Second valve group; 25021, Second valve group housing; 25022, Second valve stem; 25023, Second stem sleeve; 250231, First through hole; 250232, Second through hole; 250233, Third through hole; 250234, Fourth through hole; 25024, First input channel; 25025, First output channel; 25026, Second output channel; 25027, Third... Output channel; 25028, First annular chamber; 2503, Third valve group; 2504, Fourth valve group; 2505, Fifth valve group; 25051, Fifth valve group housing; 25052, Fifth valve stem; 25053, Fifth stem sleeve; 25054, Second annular chamber; 250531, Fifth through hole; 250532, Sixth through hole; 250533, Seventh through hole; 2506, Sixth valve group; 2507, Seventh valve group; 2508, Reference valve group; 25081, External mounting base; 250811, First air outlet; 250812, Second air outlet; 250813, Third air outlet; 250814, First air inlet; 25082, Inner sealing bushing; 250821, Guide... 25083. Air vent; 25084. Bearing upper sealing cover; 25085. Rotary switching spindle; 250846. First air outlet; 250847. Second air outlet; 250888. Bearing; 250888. Snap ring; 250889. Lower sealing cover; 251. Control valve; 2511. Valve stem; 2512. Opening; 252. Drive motor; 253. Air duct plate; 2531. Air duct; 25311. First air duct; 25312. Second air duct; 25313. Third air duct; 25314. Fourth air duct; 25315. Fifth air duct; 26. Exhaust unit housing; 3. Air storage tank; 4. Nitrogen tank; 5. Pressure sensor; 61. Air purification module; 62. Pollutant injection port; 63. Upstream sampling port;64. Differential pressure sampling port; 65. Filter to be tested; 66. First downstream sampling port; 67. Second downstream sampling port; 68. Optional piping; 69. Nozzle box. Detailed Implementation

[0078] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0079] See Figure 1 , Figure 10 An integrated filtration and exhaust system includes an intake unit, a filter unit 1, an exhaust unit 2, and a gas storage unit connected in sequence. In this embodiment, the gas storage unit is a gas storage tank 3. The exhaust unit 2 includes a gas module 21, a mass spectrometry detection module 22, a vacuum pump group 23, a main control module 24, a valve group module 25, and an exhaust unit housing 26. The gas module 21, mass spectrometry detection module 22, vacuum pump group 23, and main control module 24 are all fixedly connected inside the exhaust unit housing 26. In this embodiment, the four-position three-way valve is the second valve group 2502. The vacuum pump group 23 is fixed inside the exhaust unit housing. At the bottom of body 26, mass spectrometry detection module 22 is located at the top of vacuum pump group 23. The gas inlet unit is connected to gas storage tank 3 in sequence through mass spectrometry detection module 22 and gas module 21. Gas module 21 has two branch passages, namely a high-pressure exhaust direct discharge passage and a negative pressure exhaust passage through vacuum pump. When the gas pressure in the pipeline is high, exhaust is performed through the direct discharge passage. After the first discharge, the pressure in the cavity drops to normal pressure, and then the vacuum pump draws gas from the cavity to reach a negative pressure state (about 20 kPa) for vacuum power exhaust. In case of problems, there is a backup manual valve passage to ensure the exhaust function is realized.

[0080] The gas module 21 includes an interconnected flow control module 221, a gas sampling module 222, multiple rotary multi-way valves, multiple single-way valves, and a main flow channel. The multiple rotary multi-way valves, multiple single-way valves, the flow control module 221, and the gas sampling module 222 are respectively connected upstream and downstream of the main flow channel. The gas sampling module 222 is located at the top of the vacuum pump assembly 23. The flow control module 221 is connected to the gas sampling module 222 and the vacuum pump assembly 23 through different valve assemblies within the valve assembly module 25. The valve assembly module 25 includes multiple switching channels. The control valve 251 has multiple switching channels located within its stem 2511, and all inputs share a common interface. The input ports of the gas sampling module 222 and the vacuum pump group 23 are respectively connected to the switching channels of the control valve 251. The rotary multi-way valve includes a rotor, a stator, and a drive unit. The rotor is rotatably located within the rotary multi-way valve and is connected to the output of the drive unit. The stator is fixed within the rotary multi-way valve and rotates in cooperation with the rotor. The stator has an input port and multiple output ports, which respectively form multiple switching channels.

[0081] It should be noted that the exhaust unit housing 26 is equipped with a nitrogen flushing port, which is connected to an external nitrogen tank 4, enabling flushing of the entire pipeline.

[0082] The design method for rotary multi-way valves or single-way valves in integrated gas modules includes the following steps:

[0083] It should be noted that this embodiment uses a rotary multi-way valve as an example;

[0084] S1: Design the structure of a cylindrical rotary multi-way valve and determine its working mode;

[0085] S2: Design the orifice and stem of the cylindrical rotary multi-way valve according to functional and sealing requirements;

[0086] S3: Analyze the flow resistance characteristics of the cylindrical rotary multi-way valve based on dynamic software to determine the position of the through hole;

[0087] S4: Calculate the leakage rate of the cylindrical rotary multi-way valve to ensure high sealing performance;

[0088] S5: Design an integrated gas handling module system based on a cylindrical rotary multi-way valve, and conduct experimental tests to ensure that the integrated gas module system meets functional requirements.

[0089] Step S1 includes the following steps:

[0090] S11: Determine the main structural components of the cylindrical high-sealing rotary valve; see reference Figure 19Taking the reference valve assembly 2508 as an example, the upper left end of the cylindrical high-sealing rotary valve is the gas input port, and the lower end is designed with three gas outlets (i.e., output ports) and corresponding sealing structures. The reference valve assembly 2508 includes an outer mounting base 25081, an inner sealing bushing 25082, a bearing upper sealing cover 25083, a rotary switching spindle 25084, a bearing 25085, a snap ring 25086, and a lower sealing cover 25087. Among them, the outer mounting base 25081 has a gas input channel and a gas output channel, and the rotary switching spindle 25084 passes through the bearing 5. The bearing 5 is rotatably connected in the outer mounting base 25081 and sealed and fixed by the upper sealing cover 25083 and the lower sealing cover 25087. The bottom of the rotary switching spindle 25084 is provided with a snap ring 25086. An inner sealing bushing 25082 is fixedly connected in the outer mounting base 25081. The inner sealing bushing 25082 is located outside the rotary switching spindle 25084. The rotary switching spindle 25084 has a sealed cavity structure inside, and it is always connected to the gas input channel through an input port. The rotary switching spindle 25084 has an output through hole in the circumference.

[0091] S12: Determine the sealing method of the cylindrical rotary multi-way valve. The sealing method adopts the ball valve sealing method. The static seal adopts the clearance fit. The upper sealing cover 25083 and the lower sealing cover 25087 of the bearing are interference-fitted with the outer mounting base 25081. The dynamic seal adopts the ball valve sealing method to achieve airtight sealing. The inner sealing bushing 25082 is made of polytetrafluoroethylene, which has self-lubricating properties. The dynamic seal adopts the clearance fit.

[0092] S13: Determine the operating mode of the cylindrical rotary multi-way valve; taking the second valve group 2502 in the second type of valve group, i.e., the four-position three-way valve structure, as an example, refer to... Figure 20 The outer mounting base 25081 has three air outlets and one air inlet, designated as first air outlet 250811, second air outlet 250812, third air outlet 250813, and first air inlet 250814, respectively. The rotary switching spindle 25084, i.e., the valve stem, has first air outlet 250841 and second air outlet 250842, and the inner sealing bushing 25082, i.e., the rod sleeve, has an air guide hole 250821. The corresponding working mold... There are 4 operating modes: Operating Mode 1: First air outlet 250811 is open, second air outlet 250812 and third air outlet 250813 are closed; Operating Mode 2: Second air outlet 250812 is open, first air outlet 250811 and third air outlet 250813 are closed; Operating Mode 3: Third air outlet 250813 is open, first air outlet 250811 and second air outlet 250812 are closed; Operating Mode 4: All channels are closed.

[0093] S2: Design the orifice and stem of the cylindrical rotary multi-way valve according to functional and sealing requirements;

[0094] Step S2 includes the following steps:

[0095] Step 21: Determine the included angle between adjacent air outlets. Rotate the switching spindle 25084 with center O and outer diameter D. The diameter of the internal air passage of the valve stem is d. Design air outlets at different angles relative to center O at different heights of the valve stem. The diameter of the air outlet is r. To facilitate the control of the rotation switching angle between different channels, the angle between adjacent air outlets is determined to be 90°.

[0096] Step 22: Establish a critical cutoff state model. When the first vent 250841 and the air guide hole 250821 are completely opposite, gas flows out from the first vent 250841. At this time, the left and right boundaries of the first vent 250841 and the air guide hole 250821 are a1 and b1, the left and right boundaries of the second vent 250842 are a2 and b2, and the angle between the vent boundary and the center O is θ, with a size of arcsin(r / d).

[0097] See Figure 21 During the switching process, the critical cutoff state is when the first vent 250841 is just closed, and the second vent 250842 is about to form a gap with the air guide hole, and gas will flow out from the second vent 250842. Establish a geometric model of the critical cutoff state. Rotate the valve stem counterclockwise. The left boundary a1' of the first vent 250841 intersects the right boundary b1 of the air guide hole on a line. The right boundary b2' of the second vent 250842 intersects the left boundary a1 of the air guide hole on a line. At this time, the first vent 250841 and the air guide hole, and the second vent 250842 and the air guide hole are both in a linear closed state. The angle between the vent boundary and the center O is the critical cutoff angle β. The calculated critical cutoff angle β is π / 8.

[0098] To ensure the dynamic shut-off of the valve, the first vent 250841 and the second vent 250842 cannot be open simultaneously, i.e., θ≤β, resulting in: θ=arcsin(r / d)≤β=π / 8, r / d≤sin(π / 8)

[0099] The flow conductance formula for air at 20℃ in a long pipe with a circular cross-section (L>20φ) is:

[0100]

[0101] In the formula: C20℃ is the conductance of the long pipe to air at 20℃, m3 / s; φ is the minimum diameter of the pipe, m; L is the length of the pipe, m; The average pressure in the pipeline is expressed in Pa. p1 and p2 are the gas pressures at both ends of the pipe, in Pa.

[0102] As can be seen from the definition of flow rate, the pipeline flow rate is...

[0103] Q = C 20℃ ×Δp (3)

[0104] In the formula, Q is the gas mass flow rate, Pa·m3 / s; ΔP is the pressure difference between the two ends of the pipeline, Pa; substituting equation (3) into equation (2) yields

[0105]

[0106]

[0107] The pressure difference across the pipeline is 150 kPa, i.e., ΔP is 150 kPa. The pressure at the end of the pipeline, p2, is atmospheric pressure, and the pressure at the front end of the pipeline, p1, is 251 kPa. Substituting the known parameters into formula (5), and taking the value of Q as the minimum acceptable flow rate of 160 SLM, the minimum inner diameter of the pipeline, φ, is calculated to be 5.26 mm.

[0108] Therefore, for ease of processing, the inlet and outlet diameters r of the multi-way valve are designed to be 6mm, and the valve stem inner diameter must meet Formula 1, with a minimum valve stem inner diameter of 16mm.

[0109] S3: Analyze the flow resistance characteristics of the cylindrical rotary multi-way valve based on dynamic software to determine the location of the through-hole; step S3 includes the following steps:

[0110] S31, Establish the valve pipeline flow resistance model. When fluid passes through the valve, its fluid resistance loss is represented by the fluid pressure drop ΔP before and after the valve, as shown in equation (6).

[0111]

[0112] In the formula: ΔP is the pressure difference, Pa; v is m / s; ρ is the density, and the gas density is set to 1.225 kg / m³; therefore, the flow resistance coefficient is:

[0113]

[0114] S32, based on dynamic software analysis of the flow resistance characteristics of the cylindrical rotary multi-way valve, determines the location of the through-hole. To ensure low gas resistance, the influence of the entire space volume of the equipment also needs to be considered during actual processing. Under the condition of meeting dimensional constraints, the outlet can be designed to be far from the inlet to minimize the resistance loss of each flow channel.

[0115] S4: Calculate the leakage rate of the cylindrical rotary multi-way valve to ensure high sealing performance; S4 includes the following steps:

[0116] S41: Identify the leakage path of the cylindrical valve. For a single cylindrical valve, there are two main ways for gas to leak: one is leakage caused by a loose connection between the sealing hole and the through hole, or between the valve core and the inner sealing bushing; the other is leakage caused by a loose connection between the cylindrical curved surface of the sealing port and the through hole and the inner sealing bushing.

[0117] See Figure 22 For a four-position three-way valve, when the second outlet 250812 is open and the first outlet 250811 and the third outlet 250813 are closed, there are two leakage paths for the third outlet 250813. One is path l1 (marked as L1 in the figure) between the third outlet 250813 and the second outlet 250812, and the other is path l2 (marked as L2 in the figure) with a cylindrical cross-section of 1 / 4 of the circumference between the third outlet 250813 and the second outlet 250812.

[0118] S42: Establish a model for calculating the leakage rate of a cylindrical valve. Based on the leakage rate calculation formula...

[0119]

[0120] In the formula, Ql is the leakage rate, Pa·m 3 / s; l is the path length between the through hole and the sealing hole, in meters; η is the aerodynamic viscosity, 1.81 × 10⁻⁶. -5 Pa·s; p1 is the high-pressure port pressure, which is atmospheric pressure during leak detection, p1=101325Pa; p2 is the low-pressure port pressure, which is a vacuum state during leak detection, so p2=0Pa; The average pressure; r f The value representing the size of the leakage gap is to be determined. With the second outlet 250812 open and the first outlet 250811 and the third outlet 250813 closed, the total leakage for the third outlet 250813 is the sum of the leakage along the two paths.

[0121]

[0122] In the formula

[0123] S43: Determine the minimum leakage gap; as the preferred technical solution, the valve leakage rate should be at most 9 × 10⁻⁶. -10 Pa·m 3 / s, l1 is 36mm, l2=π / 4·dmm, calculated to obtain l 总 If the gap is 9.3mm, then the leakage gap r f Solution:

[0124]

[0125] S5: Design an integrated gas handling module system based on a cylindrical rotary multi-way valve, and conduct experimental tests to ensure that the integrated gas module system meets functional requirements.

[0126] S51: Determine the overall structural design scheme of the gas processing module system. The main channel includes a gas duct plate 253. A sealed cavity structure is opened inside the gas duct plate 253. A first gas duct 25311, a second gas duct 25312, a third gas duct 25313, a fourth gas duct and a fifth gas duct are opened on the gas duct plate 253 through the cavity.

[0127] S52; Determine the required structural design schemes for different types of valve groups: Type I valve group is a cylindrical rotary single-way valve including valve group 2501, valve group 2503, and valve group 2504; Type II valve group is a cylindrical rotary four-position three-way valve including valve group 2502 and valve group 2507; Type III valve group is a cylindrical rotary three-position two-way valve including valve group 2505; Type IV valve group is a cylindrical rotary two-position two-way valve including valve group 2506.

[0128] S53: Determine the sealing structure design of the flow controller, that is, the sealing structure between the flow controller 221 and the fifth valve group 2505 and the seventh valve group 2507 is connected by an L-shaped adapter plate 2212.

[0129] See Figure 1 , Figure 2 The valve group module 25 is fixedly connected inside the gas module 21. The gas module 21 includes a gas module housing 210. The valve group module 25 includes seven control valves 251, drive motors 252, and gas duct plates 253, hereinafter referred to as the first valve group 2501, the second valve group 2502, the third valve group 2503, the fourth valve group 2504, the fifth valve group 2505, the sixth valve group 2506, and the seventh valve group 2507. Each control valve 251 is connected to a corresponding drive motor 252, and the drive motors 252 are all electrically connected to the main control module 24. They are divided into four types of valve groups, the first being... The Class I valve group is a cylindrical rotary single-way valve, including the first valve group 2501, the third valve group 2503, and the fourth valve group 2504, wherein the first valve group 2501, the third valve group 2503, and the fourth valve group 2504 have the same structure. The Class II valve group is a cylindrical rotary four-position three-way valve, including the second valve group 2502 and the seventh valve group 2507, wherein the second valve group 2502 and the seventh valve group 2507 have the same structure. The Class III valve group is a cylindrical rotary three-position two-way valve, including the fifth valve group 2505. The Class IV valve group is a cylindrical rotary two-position two-way valve, including the sixth valve group 2506.

[0130] The top of the gas module housing 210, from left to right, is connected to the first valve group 2501, the gas duct plate 253, and the second valve group 2502. The bottom of the gas module housing 210, from left to right, is fixedly connected to the fourth valve group 2504, the gas duct plate 253, the fifth valve group 2505, the flow control module 221, the sixth valve group 2506, and the seventh valve group 2507. (See reference...) Figure 11 The main airway includes an airway plate 253, which has five airways 2531, hereinafter referred to as the first airway 25311, the second airway 25312, the third airway 25313, the fourth airway 25314, and the fifth airway 25315. The first airway 25311 is connected to the output end of the first valve group 2501, and the input end of the first valve group 2501 is connected to an external input pipeline. The airway plate 253 is connected to the input end of the second valve group 2502 through the fourth airway 25314. A third valve group 2503 is also provided between the first valve group 2501 and the fourth valve group 2504. Plate 253 is connected to the input end of the third valve group 2503 through the second air passage 25312. The air passage plate 253 is connected to the pressure sensor 7. The air passage plate 253 is connected to the input end of the fourth valve group 2504 through the third air passage 25313. The output end of the fourth valve group 2504 is connected to another external pipeline. The air passage plate 253 is connected to the input end of the fifth valve group 2505 through the fifth air passage 25315. The output end of the fifth valve group 2505 is connected to the input end of the flow control module 221. The output end of the flow control module 221 is connected to the seventh valve group 2507 through the sixth valve group 2506.

[0131] See Figures 3-10 Each control valve 251 is equipped with a corresponding drive motor 252. The drive motor 252 is connected to the valve stem 2511 of the control valve 251. The valve stem 2511 has multiple openings 2512 around its circumference, and the multiple openings 2512 are spirally distributed around the valve stem 2511. The valve stem 2511 is connected to the drive motor 252 of the valve group module 25. The drive motor 252 drives the valve stem 2511 to rotate around its axis to open and close the corresponding switching channel.

[0132] See Figure 3 , Figure 4The first valve assembly 2501 is a single-way valve, performing only opening and closing functions. The first valve assembly 2501 includes a first valve assembly housing 25011, a first valve stem 25012, a first stem sleeve 25013, a first through hole 25014, a first connecting channel 25015, and a second connecting channel 25016. A coaxial but discontinuous first connecting channel 25015 and second connecting channel 25016 are formed at the center of the first valve assembly housing 25011. Two first through holes 25014 are formed on the first valve stem 25011, creating a passageway through the valve stem 2511. The first stem sleeve 25013 is fixedly connected inside the first valve assembly housing 25011 and is connected to the first valve... The rod 25012 rotates and engages. The left and right ends of the first rod sleeve 25013 are respectively provided with through holes that are adapted to the cross-sectional ports of the first connecting channel 25015 and the second connecting channel 25016. When the two first through holes 25014 are aligned with the cross-sectional ports of the first connecting channel 25015 and the second connecting channel 25016 and the two through holes on the first rod sleeve 25013, the first connecting channel 25015 and the second connecting channel 25016 are connected. When the two first through holes 25014 have no overlapping area with the two through holes, the first connecting channel 25015 and the second connecting channel 25016 are cut off by the first valve rod 25012, and the first valve group 2501 is in the closed state.

[0133] See Figure 5 , Figure 6 , Figure 7The second valve assembly 2502 is a four-position three-way valve. The second valve assembly 2502 includes a second valve assembly housing 25021, a second valve stem 25022, a second stem sleeve 25023, four second through holes 25024, a first input channel 25025, a first output channel 25026, a second output channel 25027, and a third output channel 25028. The second valve stem 25022 and the second stem sleeve 25023 are clearance-fitted. The first input channel 25025 is connected to the second connecting channel 25016 via a first air passage 25311. The first output channel 25026, the second output channel 25027, and the third output channel 25028 are respectively connected to the three input ports of the gas sampling module 222. The second valve stem 25022 is rotatably connected inside the second valve assembly housing 25021, and the second rod sleeve 25023 is fixedly connected inside the second valve assembly housing 25021 and rotatably engages with the second valve stem 25022. The second rod sleeve 25023 is provided with a first through hole 250231, a second through hole 250232, a third through hole 250233, and a fourth through hole 250234. The first through hole 250231 is aligned with the right end of the first input channel 25024, and the second through hole 250232, the third through hole 250233, and the fourth through hole 250234 are aligned with the first output channel 25026, the second output channel 25027, and the third output channel 25028, respectively.

[0134] The four second through holes 25024 are designated as holes A, B, C, and D, respectively, and are arranged in a spiral pattern. Holes A and D are located on the same side of the second valve stem 25022, while hole B is located on the opposite side. The valve position logic is as follows: when hole B is connected to the first output channel 25026 through the second through hole 250232, sampling of the first gas sampling bottle can be achieved; when hole C is connected to the second output channel 25027 through the third through hole 250233, sampling can be achieved. It can realize sampling of the second gas sampling bottle. When hole D is connected to the third output channel 25028 through the fourth through hole 250234, it can realize sampling of the third gas sampling bottle. When holes B, C and D are not connected to the second through hole 250232, the third through hole 250233 and the fourth through hole 250234, the first output channel 25026, the second output channel 25027 and the third output channel 25028 are all in a non-conductive state.

[0135] See Figure 6 The second sleeve 25023 has a first annular chamber 25029. The A hole is connected to the first annular chamber 25029, so that gas can enter the first annular chamber 25029 through the A hole. The gas enters the inner cavity of the second valve stem 25022 through the first input channel 25025, the first through hole 250231, the first annular chamber 25029, and the A hole in sequence, so that the A hole is always in the conductive state.

[0136] The second valve group 2502 and the seventh valve group 2507 have the same structure. The difference between the second valve group 2502 and the seventh valve group 2507 is that the input and output ends are connected to different devices. The three output ends of the seventh valve group 2507 are connected to the two input ends of the vacuum pump group 23 and the gas storage tank 3, respectively. The input end of the third valve group 2503 is connected to the output end of the sixth valve group 2506.

[0137] See Figure 8 , Figure 9 , Figure 10 The fifth valve assembly 2505 is a three-position two-way valve. The fifth valve assembly 2505 includes a fifth valve assembly housing 25051, a fifth valve stem 25052, and a fifth stem sleeve 25053. The fifth stem sleeve 25053 has a fifth through hole 250531, a sixth through hole 250532, and a seventh through hole 250533. The fifth stem sleeve 25053 is fixedly connected inside the fifth valve assembly housing 25051, and the fifth valve stem 25052 is rotatably connected inside it. The sixth through hole 250532 and the seventh through hole 250533 are located on the same side, and the fifth through hole 250531 is located on the other side. The fifth valve stem 25052 has three openings 2512, hereinafter referred to as holes E, F, and G, where E and F are... The holes are located on the same side, with the G hole located on the other side of the fifth valve stem 25052. The F hole and the fifth through hole 250531 are both input ports. The E hole and the G hole are respectively connected to the input ports of the two flow controllers 2211. A second annular chamber 25054 is provided on the fifth rod sleeve 25053. The second annular chamber 25054 and the E hole are always in communication. Gas enters the second annular chamber 25054 from the fifth through hole 250531 and enters the inner cavity of the fifth valve stem 25052 from the E hole. When the E hole is aligned with the sixth through hole 250532, the gas is discharged from the sixth through hole 250532. When the G hole is aligned with the seventh through hole 250533, the gas is discharged from the seventh through hole 250533.

[0138] Referring to the figure, the sixth valve assembly 2506 is a two-position, two-way valve. The sixth valve assembly 2506 includes a sixth valve assembly housing 25061, a sixth valve stem 25062, and a sixth stem sleeve 25063. The sixth valve stem 25062 is rotatably connected inside the housing of the sixth valve assembly 25061. The sixth stem sleeve 25063 is fixedly connected inside the housing of the sixth valve assembly 25061 and rotatably engages with the sixth valve stem 25062. The sixth valve stem 25062 has three third through holes 25064, hereinafter referred to as holes H, I, and J, respectively. The sixth stem sleeve has an eighth through hole 250631. The ninth through hole 250632 and the tenth through hole 25633, the third input channel, the fourth input channel, and the fourth output channel are connected to the other end of the mass flow meter, respectively. The fourth output channel is connected to the input channel of the seventh valve group 2507. The diameters of the three third through holes 25064 on the sixth valve stem 25062 are adapted to the cross sections of the third input channel, the fourth input channel, and the fourth output channel, respectively. The through holes on the sixth valve stem 25062 that are adapted to the third input channel and the through holes that are adapted to the fourth output channel all establish annular gas chambers.

[0139] See Figure 13 , Figure 14 The flow control module 221 includes two mass flow controllers 2211 and an L-shaped adapter plate 2212. The two mass flow controllers 2211 are arranged side by side. Each mass flow controller 2211 has two L-shaped adapter plates 2212 fixedly connected to its bottom and symmetrically distributed about the axis of the flow controller. The L-shaped adapter plates 2212 are fixedly connected to the inner wall of the gas module housing 210. The L-shaped adapter plate 2212 includes a vertical section and a horizontal section. The end of its vertical section facing the flow controller 2211 is sealed and fixed to the adapter of the flow controller 2211 by a rubber ring. The end of its vertical section away from the flow controller 2211 is sealed and fixed to the fifth valve group 2505 and the sixth valve group 2506 by rubber rings respectively.

[0140] See Figure 1The exhaust unit 2 also includes an online detection module 223, which includes a detection branch 2231, a gas detector 2232, and a component detection buffer tank 2233. Both ends of the detection branch 2231 are connected to the main pipeline of the exhaust unit 2, and a control valve is provided at the end of the detection branch 2231 connected to the main pipeline. The detection branch 2231 is equipped with a component detection buffer tank 2233 and a gas detector 2232 adapted to the detection gas. In this embodiment, three gas detectors 2232 are used as examples, namely a CO detector, an H2 detector, and an SF6 detector. It should be noted that during detection, the pressure reducing valve is first adjusted to a slightly positive pressure, and then the downstream pressure is controlled by the S-9 manual valve to create a slightly positive pressure operating environment for the detector. The optimal detection flow rate for CO and SF6 is 100mL-150mL / min. The buffer tank is designed with a volume of 1L, which theoretically can support at least 3 sampling analyses. The filtered gas is extracted into a sampling bottle for subsequent detection of some special component gases.

[0141] See Figure 15 , Figure 16 , Figure 17 The filter unit 1 includes a filter unit housing 11 and two multi-stage filters 12. The multi-stage filters 12 filter the discharged high-temperature and high-pressure gas containing dust particles and impurities. To meet the filtration efficiency, the gas flow rate needs to be controlled by a mass flow meter. In addition, when the high-temperature and high-pressure gas is discharged to a low pressure of about 30 kPa, the gas will contain water vapor. A condensation and dehydration module needs to be designed so that after the high-temperature and high-humidity gas passes through the heat exchanger of the condensation and dehydration module, the gas temperature is reduced to room temperature or lower by the cooling water in the heat exchanger, and the condensate is precipitated. A dedicated closed cavity is set up to store the condensate. After the particulate composition of the gas at the downstream end of the filter meets the requirements, it enters the subsequent unit.

[0142] Two multi-stage filters 12 are fixedly installed inside the filter unit housing 11. The input and output ends of the multi-stage filters 12 are connected to the output ends of the intake unit and the exhaust unit 2, respectively. Control valves are installed at the input and output ends of the multi-stage filters 12. Control valves are also installed on the connecting pipes between the output ends of the intake unit and the exhaust unit 2. The two multi-stage filters 12 are symmetrically distributed inside the filter unit housing 11, one in use and one on standby. The input end of the multi-stage filters 12 is connected to the output end of the intake unit, and the output end of the multi-stage filters 12 is connected to the input end of the mass spectrometry detection module 22. Pressure sensors are installed at both the input and output ends of the filter unit housing 11. The pressure sensors are electrically connected to the main control module 24 to detect the operating status of the multi-stage filters 12. If the pressure difference across the multi-stage filters 12 is too large, a new filter needs to be replaced. When replacing the filter, simply close the control valve. In addition, a detachable door is designed on the filter unit housing 11 to facilitate the replacement of the multi-stage filters 12.

[0143] See Figure 17 The multi-stage filter 12 includes multiple secondary filters 121 connected in series. From left to right, the secondary filters 121 consist of a first-stage filter, a second-stage filter, and five third-stage filters. Each secondary filter 121 includes a housing, a support plate 122, and a pressure ring 123. The secondary filters 121 employ the same structure, facilitating filter modification, and the overall weight is less than 1.8 kg. An annular support plate 122 is fixed to the inner wall of the secondary filter 121. A through hole 1221 is opened at the center line of the annular support plate 122. The filter element 13 is embedded in the through hole 1221 and connected and secured by the pressure ring 123. The pressure ring 123 is a wire mesh pressure plate, which prevents excessive gas impact from causing excessive deformation of the filter element 13 and damaging the sealing structure. 13 includes a first filter element 131, a second filter element 132, and a plurality of third filter elements 133 arranged sequentially along the axial direction of the multi-stage filter 12. In this embodiment, five third filter elements 133 are used as an example. The first filter element 131 is a coarse sponge, the second filter element 132 is a fine sponge and polypropylene, and the third filter element 133 is made of H14 grade high-efficiency filter element (high-efficiency glass fiber filter paper). The inner wall of the secondary filter 121 is provided with an installation groove 1211. One end of the third filter element 133 connected to the secondary filter 121 extends into the installation groove 1211 and is bonded and fixed thereto. The end of the third filter element 133 connected to the secondary filter 121 is serrated. The end face of the installation groove 1211 connected to it is provided with a mating protrusion 1212 that is adapted to it.

[0144] By setting one end of the third filter element 133 connected to the secondary filter 121 to be serrated and extending into the mounting groove 1211, and setting the mating protrusion 1212 to cooperate with the serrated connecting part of the third filter element 133, the contact area between the third filter element 133 and the secondary filter 121 is increased, and the connection strength of the third filter element 133 is improved. By bonding and fixing the third filter element 133 to the secondary filter 121 and injecting glue at their connection, the leakage of polluted gas from the edge can be prevented. It should be noted that the installation structure of the first filter element 131, the second filter element 132 and the third filter element 133 is the same, but not limited to this.

[0145] Adjacent secondary filters 121 are connected by flanges and fixed by welding. Since the secondary filters 121 are small in size, in order to prevent the high temperature generated during welding from burning the sealant and causing smoke pollution to the filter, a water cooling device is used to cool the weld point during welding. At the same time, the welding is carried out intermittently, one cycle at a time, and high temperature resistant sealant is used to avoid local overheating that could burn the sealant and filter element 13.

[0146] Usage: The gas to be filtered enters the multi-stage filter 12 from the filter unit housing 11 for filtration. The filtered gas enters the exhaust unit 2, is first detected by the mass spectrometry detection module 22, and then flows into the flow controller 2211. Under the suction of the vacuum pump group 23, it enters the gas storage tank 3.

[0147] One method for designing a multi-stage filter based on kinetic analysis includes the following steps:

[0148] S1: Obtain the structural parameters of the multi-stage filter, and based on the dynamic analysis, obtain the correlation between each structural parameter and the filter efficiency and pressure drop, and determine the optimal structural parameters;

[0149] S1 includes the following steps:

[0150] S11: Based on the filter's pressure capacity P (1.6MPa) and the design requirement of the filter's internal pipe diameter D (124mm), determine the calculated pipe wall thickness. The formula for calculating the pipe wall thickness is as follows:

[0151]

[0152] In the formula, S C Calculate the filter wall thickness in mm; P is the design pressure, 1.6 MPa; D is the filter inner diameter, 124 mm; [δ] t The allowable stress at the design temperature (-12℃) is 137 MPa; φ is the welding coefficient, taken as 1; C is the corrosion allowance, taken as 1 mm. Substituting these values ​​into the formula, the calculated filter wall thickness is 1.73 mm. Taking a safety factor of 1.5, the actual filter wall thickness S is... n If we take 3mm, then the outer diameter φ of the filter is 130mm;

[0153] S12: Based on the pipe wall thickness and other relevant parameters, perform 3D modeling and dynamic analysis to verify the strength of the filter design. The allowable stress [δ] of the 304 stainless steel used in the filter. t The pressure is 137 MPa. Kinetic analysis shows that under an internal pressure of 1.6 MPa on the outer cylinder, the maximum stress is 82.5 MPa, which is less than the material's yield strength. Figure 23 , Figure 24 As shown;

[0154] S13: Determine the filter element area based on the filter pipe area. Given a filter cylinder diameter of 124mm and the need for glue fixation, the filter element's outer diameter is designed to be 110mm. To avoid increasing airflow resistance, the effective cross-sectional area of ​​the filter element should be maximized, resulting in a folded structure. Due to the relatively small filter dimensions, the filter paper fold thickness cannot be too thick. Based on current filter element manufacturing processes, the minimum fold thickness is 25mm; therefore, the fold depth is designed to be 25mm, resulting in 21 layers folded across a width of 110mm.

[0155] Because the filter element is folded and cut into a circle, its actual unfolded shape is an ellipse, with a major axis of 560mm and a minor axis of 110mm. Figure 25 As shown in the diagram. During the packaging process, the filter element may be adhered to the surrounding area with glue. Experimental results show that, excluding the glued areas, the actual effective filtration area of ​​the filter element is as shown in the shaded region, with a major diameter a of 525 mm and a minor diameter b of 100 mm. The effective filtration area A of the filter... DN The calculation is as follows:

[0156]

[0157] S14: Select filter element material. Considering filtration efficiency while also taking into account indicators such as resistance and moisture resistance, through research on the technical specifications of existing filter element materials and actual testing, H14 grade high-efficiency glass fiber filter paper was selected. This filter paper has a filtration efficiency of over 99.9% for dust particles smaller than 0.5 microns, and a resistance of less than 10 kPa within the working pressure range.

[0158] S15: Calculate the filter element performance. The formula for calculating the filter's gas throughput is:

[0159] Q = A DN V

[0160] In the formula: Q is the gas processing capacity, m 3 / h; V is the gas flow velocity in and out of the pipeline, m / s. According to the technical design specifications, the maximum flow rate q can reach 160 SLM, then the maximum V is Therefore, the maximum processing capacity Q of the filter is: Q = 0.041 * 0.34 = 0.014 m³ 3 / s=840L / min.

[0161] The pressure difference between the outlet pressure and the inlet pressure is called pressure drop, and the calculation formula is as follows:

[0162]

[0163] In the formula: h is the pressure drop in MPa, ξ is the local resistance coefficient, and V is the flow velocity in and out of the pipe in m / s; the local resistance coefficient ξ is usually taken as 24, and the flow velocity is taken as the normal flow velocity of 0.06 m / s, then the pressure loss is 0.0044 MPa, which meets the technical requirements.

[0164] S16: Determine the filter interlayer thickness and number of stages based on the kinetic analysis results. Following technical specifications, the total filter length remains constant at 480mm. By changing the number of stages and the air interlayer thickness, kinetic simulation analysis is used to analyze the relationship between pressure drop and air interlayer thickness. The results show that as the air interlayer thickness increases, the pressure drop gradually decreases. Essentially, the number of filter elements decreases, thus reducing the pressure drop. Figure 27 As shown. On the other hand, as the number of filter layers decreases, the filtration efficiency will decrease. Considering both pressure drop and filtration efficiency, the filter's overall performance is optimal when the air gap thickness is 25mm and the filter stage is 7 stages. Figure 28 As shown.

[0165] S2 includes the following steps:

[0166] S2: Processing and assembling the multi-layer filter according to the obtained structural parameters, welding the connections between each stage of the filter to ensure a sealing effect; S2 includes the following steps:

[0167] S21: Processing the filter; Based on the analysis results of S1, a 7-stage filter is more effective, and a 7-stage filter is processed; The filter module mainly consists of each stage of the filter sub-unit, VCR connector and electric valve, and each stage of the filter is welded together.

[0168] S22: Assembly of filters; the overall structure of the filter has 7 stages. The first two stages are made of polypropylene and black sponge plus polypropylene. The last five stages all use H14 high-efficiency filter paper. The experimental filter uses flange connection for each stage for easy disassembly. The final filter is constructed by welding each stage to ensure airtightness.

[0169] S3: Based on the compact multi-layer filter obtained from the machining and assembly, conduct filtration efficiency and pressure drop tests to determine whether the designed filter meets the technical specifications. S3 includes the following steps:

[0170] S31: Filter pressure drop test, specific procedure as follows Figure 28 As shown, it specifically includes:

[0171] S311: Set up a filter pressure drop test platform. The platform consists of a needle valve, differential pressure gauge, flow meter, nitrogen source, test filter, and several pipelines, such as... Figure 28 As shown; specifically including:

[0172] S3111: Connect the nitrogen source output to the needle valve, connect the needle valve to the flow meter input, and connect the flow meter output to the filter input.

[0173] S3112: Place the two ends of the differential pressure gauge at the input and output ends of the filter, and use an ammeter to measure the differential pressure gauge signal.

[0174] S312: Open the gas source needle valve and flow meter to make the gas pressure at the filter inlet reach P. i (0.2MPa≤P i ≤1.6MPa).

[0175] The S313 uses an ammeter to test the differential pressure gauge signal, converts it into a corresponding pressure value, and obtains the filter pressure drop.

[0176] S314: Increase the gas source output flow rate so that the gas pressure at the filter input reaches P. i =P i +0.2MPa, return to S313.

[0177] S315: Repeat S313-S314 until 8 sets of data are obtained, and calculate the voltage drop ΔP for the 8 sets. i .

[0178] S316: Determine the pressure drop ΔP for each filter group. i To determine if the requirements are met, if the pressure drop of the filter is between 3-5 kPa under different input gas pressures, then the requirements are met; otherwise, they are not met, and a full process inspection or redesign is required.

[0179] S32: Filter efficiency test, specifically including:

[0180] S321: Construct a filter efficiency testing platform; the filtration efficiency testing platform consists of an aerosol generator, a fan and collection device, air pressure piping, and a filter, such as... Figure 28 As shown.

[0181] S3211: Connect the blower to the aerosol generator. The blower's airflow can ensure that the flow rate of the 110mm gas pipeline can reach 160L / min. The particle size of the aerosol generator is above 0.3μm, and the initial particle concentration can reach 105 particles / L to 106 particles / L.

[0182] S3212: Connect the test duct to the gas inlet of the filter. The test duct is as follows: Figure 29As shown, the test air duct includes an air purification module 61, a pollutant injection port 62, an upstream sampling port 63, a differential pressure sampling port 64, a filter to be tested 65, a first downstream sampling port 66, a second downstream sampling port 67, an optional pipe 68, and a nozzle box 69, which are arranged sequentially on the test air duct. The test air duct pipe is made of stainless steel. The first downstream sampling port 66 is used for particulate matter and microbial sampling, the second downstream sampling port 67 is used for gaseous pollutant sampling, and the optional pipe 68 is used for gaseous pollutant testing.

[0183] S322: Start the fan and adjust the air volume to the rated air volume of the air filter under test;

[0184] S323: Turn on the aerosol generator, and ensure that the aerosol concentration is such that the number of particles sampled each time during downstream concentration testing is not less than 100.

[0185] S324: Use a particle counter for testing; after the aerosol has stabilized, test with a particle counter at the upstream and downstream sampling points of the filter under test. After the values ​​stabilize, measure 5 times each on the downwind side and then the upwind side, and take the average of the 5 measurements to calculate the particulate matter filtration efficiency. The formula for calculating the filtration efficiency is:

[0186]

[0187] In the formula, n1 is the average number of particles obtained from 5 tests at the downstream sampling point of the filter, and n2 is the average number of particles obtained from 5 tests at the upstream sampling point of the filter.

[0188] S325: Evaluate the filter filtration efficiency. When the HEPA filter filtration efficiency test result is 99.999%, it meets the technical requirements. Otherwise, it does not meet the requirements, and a full process inspection or redesign is required.

[0189] A control system for an integrated filtration and exhaust system includes the following steps:

[0190] Step 1: Based on the pneumatic control principle of the filtration exhaust system, determine the electrical structure and perform modular control design; Step 2: Determine the hardware system selection and bus communication method for the filtration exhaust system; Step 3: Design the key process programs of the control system and determine the automation process algorithm for the filtration exhaust system.

[0191] Step 1 specifically includes:

[0192] Step 11: Allocate exhaust system control units; The large-capacity high-pressure gas filtration exhaust system has complex functions, strong process order, and many electrical devices. In order to achieve both centralized management and decentralized control, and at the same time realize data sharing, the exhaust system is divided into two independent control units: one is the control unit of filter unit 1, which only contains the filter module, and the other is the control unit of exhaust unit 2, which mainly includes gas module 21, gas sampling module 222, and online detection module 223.

[0193] Step 12: Set up the filter control unit; The filter control unit mainly includes the part from the high-pressure gas inlet pipeline to the final flow out of the high-efficiency filter. It consists of a gas source (inlet unit), multi-stage filter 12, electric control valves, pressure sensor 5, temperature and humidity sensor, cooling fan, cooling unit, etc. It uses multiple electric control valves in cooperation. Through sensor feedback signals, the PLC outputs working status and alarm information to control the solenoid valves to realize the cylinder action of the electric control valves and the on / off action of the cooling unit, thus completing the filtration and cooling process;

[0194] Step 13: Set up the exhaust control unit; The exhaust control unit mainly includes processes such as sampling, component detection and exhaust of filtered gas. It consists of electric control valves, pressure sensor 5, temperature and humidity sensor, gas detector 2232, vacuum pump cooling unit, mass flow meter, pressure reducing valve, sampling bottle, etc. It also uses multiple electric valves in cooperation. Through sensor feedback signals, the working status and alarm information are output by PLC to control the solenoid valve to realize the cylinder action of the electric control valve and the switching action of the vacuum pump unit to complete the corresponding process.

[0195] Step 2 specifically includes:

[0196] Step 21: Build the control system hardware; The control system consists of a PLC controller, a host computer, and various module unit substations. It adopts RS485 bus communication to complete the acquisition of various signals in the system, control of various devices, status monitoring, logical operation and judgment of automatic processes, and fault diagnosis and early warning of the system.

[0197] Step 22: Build a signal acquisition module. The signal acquisition module mainly measures the pressure of key nodes in the pipeline distribution as a judgment indicator for the entire system's filtration and exhaust operation process. It uses temperature and humidity sensors to measure the temperature and humidity inside the pipeline, which facilitates the opening and closing of the cooling module to cool the filtration module. It also collects signals from the mass flow meter and the solenoid valve to provide real-time gas flow rate feedback and status output of the intelligent electric valve.

[0198] Step 23: Build the information processing module; using a PLC and RS485 bus communication, control the opening and closing of each electric valve, calculate and judge through the designed automatic operation process to realize the system's logical functions, output commands for the corresponding processes, and realize real-time data exchange with the PLC; display key data such as pressure, temperature, and humidity in the pipeline in real time to realize the status monitoring of the pipeline; realize functions such as historical data recording, data processing and analysis;

[0199] Step 24: Build the action execution module; through transmitted signal commands, various electric valves, cooling units, vacuum pump units, etc. cooperate with each other to realize the corresponding processes of the system;

[0200] Step 25: Set up the fault alarm module; the fault alarm module will provide alarm lights to indicate the fault and provide preliminary handling measures to prompt on-site operators to handle it in a timely manner; in order to improve system safety, the system is designed with safety interlocking procedures, which will prevent logically conflicting operations or misoperations from being executed, and a confirmation procedure will be set for high-risk operations.

[0201] Step 26: Build an automatic control system; The automatic control system has the following characteristics: (1) It can be centrally managed and also needs to be decentralized, while realizing data sharing; (2) It has strong compatibility, openness and scalability, while ensuring stability, reliability and security; (3) The human-computer interaction interface design needs to be intuitive, convenient, easy to operate, use and modify.

[0202] Step 3 specifically includes:

[0203] Step 31: One-click filtration and exhaust program design; The filtration and exhaust system requires a large number of electrically operated valves that need to be controlled for opening and closing, and these valves must meet the logical requirements of the opening and closing sequence applicable to various operating procedures. The possibility of human error is relatively high. Therefore, a one-click filtration and exhaust program needs to be designed to achieve automatic discharge of large-capacity, high-pressure gas. Both the filtration unit 1 and the exhaust unit 2 use Haiwell AH16S0R PLCs. Different Modbus communication protocol addresses need to be set for different signals to facilitate the mutual transmission of temperature, pressure, humidity, valve status, and results between the filtration and exhaust units, enabling automatic logic calculations in the program. One-click filtration and exhaust logic flow;

[0204] The filter units are sequentially labeled according to the process order, i-th (i = 1, 2, ... i-th) max ) valves, i max This is the last valve in this unit; the exhaust unit is sequentially labeled according to the process sequence, with the j-th valve (j = 1, 2…j) marked. max ) valves, j max This is the last valve in this unit.

[0205] Step 32: After clicking the "Start One-Click Exhaust Filtering" button, design the automatic exhaust filtering algorithm.

[0206] In any of the above technical solutions, step 32 further includes:

[0207] Step 321: Output the command to open the i-th (=1) valve to the actuator of the electric valve. When the i-th valve is fully open, feed back its opening and closing result.

[0208] Step 322: Automatically control the opening of the (i+1)th valve until the i-th valve... max The valves are fully opened, completing the one-button filtration of the exhaust front section and transmitting a one-button filtration of the exhaust front section completion signal to the exhaust unit;

[0209] Step 323: The exhaust unit opens the j-th valve sequentially according to the process requirements. When the j-th valve... max Each valve is fully open, outputting a feedback signal.

[0210] Step 324: Automatically set the gas flow rate to f_set1, and simultaneously output a signal indicating completion of one-click filtration and exhaust to the host computer, and feed the signal back to the filtration unit;

[0211] Step 325: After the filtered exhaust has run for 30 minutes, set the gas flow rate to f_set2 and continue depressurizing.

[0212] Step 33: Establish a one-click sampling program. During high-pressure gas release, gas samples are extracted at a specific pressure for component analysis. Before sampling, the sampling pipeline needs to be cleaned to reduce the impact of particulate matter precipitation in the gas during the initial depressurization phase on the sample gas. There are two cleaning processes: direct power depressurization cleaning and N2 cleaning. When using a power pump for depressurization cleaning, the pressure in the depressurization pipeline needs to be reduced to negative pressure, and the valve at the front end of the sampling pipeline needs to be closed. Simultaneously, starting and stopping the pump requires high pressure control before and after the pipeline, as well as strict on- and off-line control. Starting the pump requires ensuring that the pressure at the rear end of the pipeline is below atmospheric pressure and that the rear end is open; otherwise, the pump will burn out. When using N2 cleaning, only the sampling pipeline needs to be cleaned; therefore, the valves at both the front and rear ends of the sampling pipeline need to be closed. After the initial preparation is complete, when sampling the gas, the front end of the sampling pipeline needs to be opened, and the rear end closed to ensure gas flows into the sampling bottle. The sampling process places high demands on the intelligent valves and the power pump's status, which is subject to frequent changes. Therefore, an automated sampling algorithm is designed to reduce the risk of human error.

[0213] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An integrated filtration and exhaust system, characterized in that, The system comprises an intake unit, a filter unit, an exhaust unit, and a gas storage unit connected in sequence. The exhaust unit includes a gas module, a mass spectrometry detection module, and a vacuum pump unit. The intake unit is connected to the gas storage unit in sequence via the mass spectrometry detection module and the gas module. The gas module includes a flow control module and a gas sampling module connected in series. The flow control module is connected to the gas sampling module and the vacuum pump unit via a valve group module. The valve group module includes a control valve with multiple switching channels, all located within the valve stem of the control valve, and all switching channels share a common input interface. The input ports of the gas sampling module and the vacuum pump unit are respectively connected to the corresponding switching channels of the control valve. The valve stem of the control valve has multiple openings circumferentially distributed spirally along the circumference of the valve stem. The valve stem is driven by a drive motor of the valve group, which drives the valve stem to rotate around its axis to open and close the corresponding switching channels.

2. The integrated filtration and exhaust system according to claim 1, characterized in that, The flow control module includes a flow controller, which has an input adapter and an output adapter. The input adapter and the output adapter of the flow controller are respectively connected to adjacent control valves through sealing connectors. The flow controller is fixed on the sealing connector, and the ends of the flow controller connected to the sealing connector and the control valve are all planar seals.

3. The integrated filtration and exhaust system according to claim 2, characterized in that, The sealing connector is an L-shaped adapter plate. Two L-shaped adapter plates are installed on the bottom of the flow controller and are symmetrically distributed about the axis of the flow controller. The L-shaped adapter plate includes a vertical section and a horizontal section. The end of the vertical section facing the flow controller is sealed and fixed to the adapter of the flow controller, and the end of the vertical section away from the flow controller is sealed and fixed to the control valve. There are two sets of flow controllers, which are arranged side by side.

4. The integrated filtration and exhaust system according to claim 1, characterized in that, The filtration unit includes a filtration unit housing and a multi-stage filter. The multi-stage filter is fixedly installed inside the filtration unit housing, and its input and output ends are respectively connected to the output end of the intake unit and the input end of the exhaust unit. The multi-stage filter includes multiple secondary filters connected in series. The secondary filter includes a housing, a support plate, a pressure ring, and a filter element. An annular support plate is fixed to the inner wall of the housing. A through hole is opened at the center line of the annular support plate. The filter element is embedded in the through hole and is connected and fastened by the pressure ring. Pressure sensors are provided at both the input and output ends of the filtration unit housing.

5. The integrated filtration and exhaust system according to claim 4, characterized in that, The filter element includes a first filter element, a second filter element, and multiple third filter elements distributed sequentially along the axial direction of the multi-stage filter. The first filter element is made of coarse sponge, and the second filter element is made of fine sponge and polypropylene. The inner wall of the secondary filter has an installation groove. One end of the third filter element connected to the secondary filter extends into the installation groove and is bonded and fixed to the installation groove. The end of the third filter element connected to the secondary filter is serrated. The end face of the installation groove connected to the third filter element has a mating protrusion adapted to the serrated end face.

6. The integrated filtration and exhaust system according to claim 1, characterized in that, The exhaust unit also includes an online monitoring module, which includes a detection branch, a gas detector, and a component detection buffer tank. Both ends of the detection branch are connected to the main pipeline of the exhaust unit, and a control valve is provided at the end of the detection branch connected to the main pipeline. The detection branch is equipped with a component detection buffer tank and a gas detector adapted to the detection gas.

7. A control system for the integrated filtration and exhaust system as described in claim 4, characterized in that, Includes the following steps: Step 1: Based on the pneumatic control principle of the filtration exhaust system, determine the electrical structure and perform modular control design; Step 2: Determine the hardware system selection and bus communication method for the filtration exhaust system; Step 3: Design the key process programs of the control system and determine the automation process algorithm for the filtration exhaust system. Step 1 specifically includes: Step 11: Allocate exhaust system control units; Large-capacity high-pressure gas filtration exhaust systems are complex in function, have strong process order, and many electrical devices. In order to achieve both centralized management and decentralized control, and at the same time realize data sharing, the exhaust system is divided into two independent control units: one is the control unit for the filtration unit, which only contains the filtration module, and the other is the control unit for the exhaust unit, which includes the gas module, gas sampling module, and online detection module. Step 12: Set up the filter control unit; The filter control unit includes the part from the high-pressure gas inlet pipeline to the final outlet of the high-efficiency filter. It consists of a gas source, multi-stage filters, electrically controlled valves, pressure sensors, temperature and humidity sensors, cooling fans, and cooling units. Multiple electrically controlled valves work together. Through sensor feedback signals, the PLC outputs working status and alarm information to control the solenoid valves to realize the cylinder action of the electrically controlled valves and the on / off action of the cooling units, thus completing the filtration and cooling process. Step 13: Set up the exhaust control unit; The exhaust control unit includes the process of sampling, component detection and exhaust discharge of filtered gas. It consists of electric control valves, pressure sensors, temperature and humidity sensors, gas detectors, vacuum pump cooling units, mass flow meters, pressure reducing valves and sampling bottles. It also uses multiple electric valves in cooperation. Through sensor feedback signals, the PLC outputs working status and alarm information to control the solenoid valves to realize the cylinder action of the electric control valves and the switching action of the vacuum pump unit to complete the corresponding process. Step 2 specifically includes: Step 21: Build the control system hardware; The control system consists of a PLC controller, a host computer, and various module unit substations. It adopts RS485 bus communication to complete the acquisition of various signals in the system, control of various devices, status monitoring, logical operation and judgment of automatic processes, and fault diagnosis and early warning of the system. Step 22: Build a signal acquisition module; the signal acquisition module measures the pressure of key nodes in the pipeline distribution as a judgment indicator for the entire system's filtration and exhaust operation process; using temperature and humidity sensors, the temperature and humidity inside the pipeline are measured to facilitate the opening and closing of the cooling module to cool the filtration module; the mass flow meter signal and the solenoid valve switch signal are collected to provide real-time gas flow rate feedback and status output of the intelligent electric valve. Step 23: Build the information processing module; using a PLC and RS485 bus communication, control the opening and closing of each electric valve, calculate and judge through the designed automatic operation process to realize the system's logical functions, output commands for the corresponding processes, and realize real-time data exchange with the PLC; display key data such as pressure, temperature and humidity in the pipeline in real time to realize the status monitoring of the pipeline; realize the functions of historical data recording, data processing and analysis. Step 24: Build the action execution module; through the transmitted signal commands, the electric valves, cooling units, and vacuum pump units cooperate with each other to realize the corresponding processes of the system; Step 25: Set up the fault alarm module; the fault alarm module will provide alarm lights to indicate the fault and provide preliminary handling measures to prompt on-site operators to handle it in a timely manner; in order to improve the system safety, the system is designed with safety interlocking procedures, and operations with logical conflicts or misoperations cannot be executed. For high-risk operations, a confirmation procedure is set. Step 26: Build an automatic control system.

8. The control system of the integrated filtration and exhaust system according to claim 7, characterized in that, Step 3 specifically includes: Step 31: Design of one-click filtration and exhaust program; Design a one-click filtration and exhaust program to realize the automatic discharge of large-capacity high-pressure gas; The filtration unit and the exhaust unit each use a Haiwell AH16S0R PLC. Different Modbus communication protocol addresses need to be set to enable the mutual transmission of temperature, pressure, humidity, valve status and results between the filtration unit and the exhaust unit, which facilitates the automatic logic operation of the program. The filter units are sequentially labeled according to the process order, i-th (i=1,2…i) max ) valves, i max This is the last valve in this unit; the exhaust unit is sequentially labeled according to the process order, with the j-th valve (j=1,2…j) marked sequentially. max ) valves, j max This is the last valve in this unit; Step 32: After clicking the "Start One-Click Exhaust Filtering" button, design the automatic exhaust filtering algorithm. Step 33: Establish a one-click sampling program. During the high-pressure gas release process, gas samples are extracted at a specific pressure for component analysis. Before sampling, the sampling pipeline needs to be cleaned to reduce the impact of particulate matter precipitation in the gas during the initial depressurization phase on the sample gas. There are two cleaning processes: direct power depressurization cleaning and N2 cleaning. When using a power pump for depressurization cleaning, the pressure in the depressurization pipeline needs to be reduced to negative pressure, and the valve at the front end of the sampling pipeline needs to be closed. At the same time, starting and stopping the pump has high requirements for the pressure before and after the pipeline and the on / off conditions. When starting the pump, it is necessary to ensure that the pressure at the rear end of the pipeline is lower than atmospheric pressure and that the rear end must be open. When using N2 cleaning, only the sampling pipeline needs to be cleaned, and the valves at the front and rear ends of the sampling pipeline need to be closed. After the preliminary preparation is completed, when gas sampling is performed, the front end of the sampling pipeline is opened and the rear end of the sampling pipeline is closed to ensure that the gas flows into the sampling bottle. Design an automated algorithm for the sampling process to reduce the risk of human error.

9. The control system of the integrated filtration and exhaust system according to claim 8, characterized in that, Step 32 specifically includes: Step 321: Output the command to open the i-th valve to the actuator of the electric valve. When the i-th valve is fully open, feed back its opening and closing result. Step 322: Automatically control the opening of the (i+1)th valve until the i-th valve... max The valves are fully opened, completing the one-button filtration of the exhaust front section and transmitting a one-button filtration of the exhaust front section completion signal to the exhaust unit; Step 323: The exhaust unit opens the j-th valve sequentially according to the process requirements. When the j-th valve... max Each valve is fully open, outputting a feedback signal. Step 324: Automatically set the gas flow rate to f_set1, and simultaneously output a signal indicating completion of one-click filtration and exhaust to the host computer, and feed the signal back to the filtration unit; Step 325: After the filtered exhaust has run for 30 minutes, set the gas flow rate to f_set2 and continue depressurizing.

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