A novel carbon nanotube alpha-Fe2O3 grinding wheel and a manufacturing method thereof

By using carbon nanotube α-Fe2O3 grinding wheels in ELID grinding technology, the problems of scratches on the surface of workpieces with nanoscale surface precision and low polishing efficiency have been solved, achieving efficient nanoscale polishing and low-cost processing.

CN116810672BActive Publication Date: 2025-11-25HENAN POLYTECHNIC UNIV
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Patent Information

Application Number
CN202310536839.6
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-05-12
Publication Date
2025-11-25
Estimated Expiration
2043-05-12

AI Technical Summary

Technical Problem

Existing ELID grinding technology suffers from micron-level scratches on the surface of workpieces with nanometer-level surface precision, leading to processing difficulties and increased production costs, and the polishing efficiency of α-Fe2O3 grinding wheels is low.

Method used

A carbon nanotube α-Fe2O3 grinding wheel is used. By adding carbon nanotubes and iron-based binders to an SLM 3D printer, a vertically ordered and densely arranged composite polishing unit is formed. The high hardness of the carbon nanotubes and the grinding heat generate nano-sized α-Fe2O3 particles, thereby improving the polishing performance.

Benefits of technology

It achieves scratch-free workpiece surfaces with nanometer-level surface shape accuracy, improves polishing efficiency and material removal rate, and reduces production costs.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application belongs to the technical field of novel abrasive tool manufacturing, and discloses a novel carbon nanotube alpha-Fe2O3 grinding wheel and a manufacturing method thereof. After carbon nanotubes are dispersed in deionized water and iron-based binder powder is added, heating and ball milling are performed to obtain uniform powder of the carbon nanotubes and the iron-based binder. An SLM3D printer is improved by adding a powder laying mechanism and a pill mold. The powder is placed in the improved SLM3D printer to prepare carbon nanotube iron-based binder pills, and an aluminum alloy turning is used to prepare a grinding wheel base. The carbon nanotube iron-based binder pills are inlaid on the grinding wheel base to prepare the novel carbon nanotube alpha-Fe2O3 grinding wheel. The application adds an appropriate amount of carbon nanotubes to form a new formula in the grinding wheel, and uses the SLA3D printing technology and a vertical arrangement method to manufacture the novel carbon nanotube alpha-Fe2O3 grinding wheel. The grinding wheel does not contain abrasive grains, and an oxide film is generated on the surface of the grinding wheel during ELID dressing, thereby improving the polishing performance of the grinding wheel.
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Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of novel abrasive tool manufacturing, and particularly relates to a novel carbon nanotube alpha-Fe2O3 grinding wheel and a manufacturing method thereof. BACKGROUND

[0002] Currently, ELID grinding technology is used to solve the ultra-precision grinding of difficult-to-machine materials, and is widely used in the fields of aerospace, precision optics, automobiles, machine tools, electronic products, radars, and missiles. In these fields, some products such as optical mirrors, silicon wafers for chip manufacturing, radar antenna covers, and missile windows require nanometer-level surface shape accuracy. Such accuracy cannot be achieved by ordinary machining, so many manufacturers choose ultra-precision polishing methods to achieve the desired surface shape accuracy. However, ultra-precision polishing is extremely low in efficiency, resulting in a significant increase in production costs. Therefore, there is an urgent need for an ultra-precision machining technology that meets the requirements of nanometer-level surface shape accuracy and is economical and efficient. ELID grinding technology is an online electrolytic dressing method for ultra-fine grain iron-based diamond grinding wheels proposed by Dr. Osamu Moriwaki in the 1980s. This technology solves the problem of clogging of ultra-fine grain pores and cannot be used for actual grinding, and achieves nanometer-level grinding surface shape accuracy. Therefore, since its proposal, it has been widely researched and introduced in Europe, Asia, and China. ELID grinding technology combines the advantages of nanometer-level surface shape accuracy and economic efficiency, and is therefore favored by many manufacturers for solving the problem of ultra-precision grinding of nanometer-level products.

[0003] However, subsequent research has found that the workpiece surface with nanometer-level surface shape accuracy often has some deep (micron-level) scratches. Analysis shows that these scratches are due to the shedding of some passivated abrasive grains during ELID dressing, which enter the electrolyte and are sprayed onto the surface of the grinding wheel and the workpiece, and then participate in the ELID grinding process. The extrusion and sliding of passivated abrasive grains on the ultra-precision grinding surface cause deep scratches on the workpiece surface that has already reached nanometer-level surface shape accuracy. For ordinary micron-precision workpieces, micron-level scratches can be ignored, but for nanometer-level surface shape accuracy, micron-level scratches are equivalent to 1000 times the nanometer-level surface shape accuracy, which is equivalent to a deep trench on a flat road that any car cannot cross, thus causing great difficulties for subsequent processing and application.

[0004] To solve this problem, some researchers have proposed a technical solution of filtering the passivated abrasive particles in the electrolyte with a filter screen. After trial, the scratch problem of the surface with nanoscale surface form accuracy has been improved to some extent, but it has not been completely avoided, and there are still some shallow scratches. Because the filter screen cannot be too fine, otherwise it will affect the flow of electrolyte, so this problem has not been completely solved. Therefore, although the scratch is shallower by using the filter screen to filter the passivated abrasive particles, the scratch problem has not been completely solved, and there are still some scratches on the surface of the workpiece with nanoscale surface form accuracy. Therefore, this method only partially solves the scratch problem, and there is still no good way to solve some shallow scratches. The α-iron-based abrasive-free polishing grinding wheel itself does not contain abrasive particles, so it better solves the problem of passivated abrasive particles scratching the surface of the workpiece with nanoscale surface form accuracy. Moreover, the oxide film generates nanoscale α-Fe2O3 particles during polishing, and the α-Fe2O3 particles are excellent abrasives, so the workpiece surface can be super-precision polished. However, the material removal rate is low, and the polishing efficiency is low.

[0005] The applicant has proposed a new type of abrasive-free grinding wheel, i.e. α-iron-based abrasive-free polishing grinding wheel (application number 201310288325.X). The grinding wheel does not contain abrasive particles, so it does not have to worry about the problem of passivated abrasive particles scratching the surface of the workpiece with nanoscale surface form accuracy; the grinding wheel only contains α-iron, copper, additives, etc., and the oxide film formed during electrolysis is rich in α-Fe2O3 components, so it can polish the grinding surface to further improve the ELID grinding precision. After trial, the α-iron-based abrasive-free polishing grinding wheel itself does not contain abrasive particles, and it will not produce passivated abrasive particles, so it better solves the problem of passivated abrasive particles scratching the surface of the workpiece with nanoscale surface form accuracy. However, due to the low content of α-Fe2O3, the polishing efficiency is low, so a large amount of machining allowance needs to be removed by super-precision ELID grinding, and then the α-iron-based abrasive-free polishing grinding wheel is used to further improve the surface form accuracy.

[0006] The surface of the existing ELID ground workpiece with nanoscale surface form accuracy often has some deep (micron level) scratches. Analysis shows that these scratches are caused by the fact that some passivated abrasive particles fall off during ELID dressing, enter the electrolyte, are sprayed onto the surface of the grinding wheel and the workpiece with the electrolyte, and then participate in the ELID grinding process. The extrusion and sliding of the passivated abrasive particles on the super-precision grinding surface cause the workpiece surface that has reached nanoscale surface form accuracy to have deep scratches. For ordinary micron-precision workpieces, micron-level scratches can be ignored, but for nanoscale surface form accuracy, micron-level scratches are equivalent to 1000 times of nanoscale surface form accuracy, which is equivalent to a deep trench on a flat road that any vehicle cannot cross, and will cause problems in subsequent processing and application.

[0007] Through the above analysis, the problems and defects of the prior art are:

[0008] (1) Because the traditional ultra-precision polishing efficiency is extremely low, the production cost is greatly increased.

[0009] (2) The workpiece surface with nanometer level surface shape precision of the existing ELID grinding often has deep micron level scratches, thus causing great problems for subsequent processing and application.

[0010] (3) In the existing method of filtering the passivated abrasive particles in electrolyte by using a filter screen, the scratches on the surface with nanometer level surface shape precision are still not completely solved because the filter screen cannot be too thin.

[0011] (4) The content of α-Fe2O3 in the existing α-iron-based abrasive-free polishing wheel is low, resulting in low polishing efficiency. SUMMARY

[0012] In view of the problems existing in the prior art, the application provides a novel carbon nanotube α-Fe2O3 grinding wheel and a manufacturing method thereof.

[0013] The application is implemented in the following manner: a manufacturing method of a novel carbon nanotube α-Fe2O3 grinding wheel, which comprises the following steps: dispersing carbon nanotubes in deionized water, adding iron-based binder powder, heating, and ball milling to obtain uniform powder of the carbon nanotubes and the iron-based binder; improving an SLM 3D printer by adding a powder laying mechanism and a pill mold; placing the powder in the improved SLM 3D printer to prepare carbon nanotube iron-based binder pills, and using aluminum alloy turning to prepare a grinding wheel base; embedding the carbon nanotube iron-based binder pills on the grinding wheel base to prepare the novel carbon nanotube α-Fe2O3 grinding wheel.

[0014] Further, the manufacturing method of the novel carbon nanotube α-Fe2O3 grinding wheel comprises the following steps:

[0015] Step one: dispersing carbon nanotubes in deionized water, adding iron-based binder powder, oscillating and dispersing, heating, and uniformly ball milling in a ball mill to prepare powder in which the carbon nanotubes and the iron-based binder are uniformly mixed;

[0016] Step two: improving the SLM 3D printer by self-making a powder laying mechanism and a pill mold, laying powder in the improved SLM 3D printer, and laser scanning and heating to solidify to prepare carbon nanotube iron-based binder pills;

[0017] Step three: using aluminum alloy turning to prepare a grinding wheel base; combining every two half-cylinder pills and embedding the carbon nanotube iron-based binder pills on the grinding wheel base to prepare the novel carbon nanotube α-Fe2O3 grinding wheel.

[0018] Further, the length of the carbon nanotube in step one is 1-10 nm, and the adding ratio is 0.3%-0.5%.

[0019] Further, the heating temperature in step one is 50-80 DEG C.

[0020] Further, the nozzle of the powder laying mechanism in step two is a flat nozzle, the outlet width is 0.1 mm, the length is the same as the diameter of the pill, and the spraying thickness is 0.1 mm each time.

[0021] Further, the shape of the pill mold in step two is square, and the inner shape is a semi-cylindrical shape, the cylinder is horizontal, and is placed on the SLM 3D printer workbench.

[0022] Further, the carbon nanotube iron-based binder pill in step two is a semi-cylindrical pill.

[0023] Further, the carbon nanotube in the cylinder inside the pill mold in step two is arranged along the axial direction of the cylinder, and the arrangement mode of the carbon nanotube is vertical ordered dense arrangement.

[0024] Further, in step three, the carbon nanotube and the alpha-Fe2O3 in the ELID oxide film which are vertically arranged and densely arranged on the surface of the workpiece form a composite polishing unit.

[0025] Another object of the present application is to provide a new type of carbon nanotube alpha-Fe2O3 grinding wheel prepared by the preparation method of the new type of carbon nanotube alpha-Fe2O3 grinding wheel.

[0026] In combination with the above technical solutions and the technical problems solved, the technical solutions of the present application have the following advantages and positive effects:

[0027] First, for the problem that the passive abrasive particles fall off from the surface of the iron-based grinding wheel during ELID dressing, causing scratches on the surface of the workpiece during ultra-precision grinding, the present application proposes a carbon nanotube alpha-Fe2O3 grinding wheel, which does not contain abrasive particles, so there is no worry about abrasive scratches on the surface of ultra-precision grinding, and an oxide film is generated on the surface of the grinding wheel during ELID dressing, which will generate nano-sized alpha-Fe2O3 particles under the influence of grinding heat, and the alpha-Fe2O3 particles are excellent polishing agents, so the ELID grinding wheel without abrasive particles can be used for ultra-precision polishing of the surface of the workpiece. However, simply relying on grinding heat to convert the oxide film into alpha-Fe2O3 particles only exists in the high-temperature area around the abrasive particles, so the content of alpha-Fe2O3 particles is low. Since the hardness of carbon nanotube is equivalent to that of diamond, the nano-sized carbon nanotube has nano-level polishing performance, in order to improve the polishing performance of the oxide film, the present application adds an appropriate amount of carbon nanotube to the grinding wheel, which effectively improves the polishing performance of the original grinding wheel.

[0028] Secondly, the application proposes a method of adding carbon nanotubes in the original grinding wheel formula to form a new formula and make a new carbon nanotube α-Fe2O3 grinding wheel, which improves the polishing ability of the original grinding wheel. In the application, the carbon nanotubes are micron-level in length of 1-10 nanometers, and the adding ratio is 0.3%-0.5%; the vertically ordered and densely arranged carbon nanotubes and α-Fe2O3 in the ELID oxide film form a composite polishing unit. Since the carbon nanotube is a one-dimensional material at the nanometer level, it has very high hardness and elastic modulus, and its hardness is comparable to that of diamond, so it has material removal ability. Because of the nanometer scale, the removal amount is very small, in the nanometer level. In order to fully utilize the polishing performance of the carbon nanotube, the carbon nanotube needs to be vertically ordered and densely arranged, so the SLA 3D printing technology and the vertical arrangement method are used to make the new carbon nanotube α-Fe2O3 grinding wheel. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the technical solutions of the embodiments of the application, the drawings needed in the embodiments of the application will be briefly introduced as follows. Obviously, the drawings described below are only some embodiments of the application, and other drawings can also be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0030] Figure 1 is a flow chart of the manufacturing method of the new carbon nanotube α-Fe2O3 grinding wheel provided by the embodiments of the application;

[0031] Figure 2 is a schematic diagram of the powder laying mechanism of the improved SLM 3D printer provided by the embodiments of the application;

[0032] Figure 3 is a schematic diagram of the pellet mold of the improved SLM 3D printer provided by the embodiments of the application;

[0033] Figure 4 is a schematic diagram of the printing principle of the semi-cylindrical pellet provided by the embodiments of the application;

[0034] Figure 5 is a schematic diagram of the carbon nanotube iron-based binder pellet structure provided by the embodiments of the application;

[0035] Figure 6 is a schematic diagram of the grinding wheel base made of aluminum alloy turning provided by the embodiments of the application;

[0036] Figure 7 is a schematic diagram of the structure of the new carbon nanotube α-Fe2O3 grinding wheel provided by the embodiments of the application;

[0037] Figure 8 is a schematic diagram of the ELID sharpening principle provided by the embodiments of the application;

[0038] Figure 9 is a schematic diagram of vertical arrangement of carbon nanotubes provided by an embodiment of the present application;

[0039] Figure 10 is a schematic diagram of removal of massive cluster carbon nanotubes provided by an embodiment of the present application;

[0040] Figure 11 is a gradient distribution diagram of oxide film around carbon nanotube point heat source provided by an embodiment of the present application;

[0041] Figure 12 is an electrolysis schematic diagram of carbon nanotubes inlaid in oxide film provided by an embodiment of the present application;

[0042] In the figure: 1, workbench; 2, adapter frame; 3, powder laying nozzle; 4, laser head; 5, powder laying track; 6, base body; 7, semi-cylindrical pellet; 8, flux; 9, flange mounting hole; 10, main shaft; 11, carbon nanotube grinding wheel; 12, flange; 13, fixing nut; 14, carbon brush; 15, cathode terminal post; 16, cathode; 17, nozzle; 18, electrode insulation support; 19, ELID power supply; 20, grinding wheel assembly; 21, pellet; 22, oxide film; 23, carbon nanotube; 24, test piece; 25, FE(OH)3; 26, γ-Fe2O3; 27, α-Fe2O3; 28, protruding carbon nanotube; 29, non-electrolyzed part of pellet; 30, carbon nanotube inlaid in pellet. DETAILED DESCRIPTION

[0043] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and do not limit the present application.

[0044] In order to solve the problem that the passive particles on the surface of the iron-based grinding wheel fall off during ELID dressing and scratch the surface of the workpiece during ultra-precision grinding, a carbon nanotube alpha-Fe2O3 grinding wheel is provided, which does not contain abrasive grains, so the abrasive grains will not scratch the surface of the workpiece during ultra-precision grinding. Meanwhile, the oxide film generated on the surface of the grinding wheel during ELID dressing will generate nano alpha-Fe2O3 particles under the influence of grinding heat. The alpha-Fe2O3 particles are excellent polishing agents, so the ELID grinding wheel without abrasive grains can be used to polish the surface of the workpiece. However, the oxide film is converted into alpha-Fe2O3 particles only in the high-temperature area around the abrasive grains by relying on the grinding heat, so the content of the alpha-Fe2O3 particles is low. The nano carbon nanotubes have nano polishing performance due to the hardness of the carbon nanotubes being equivalent to that of diamond. In order to improve the polishing performance of the oxide film, a proper amount of carbon nanotubes is added to effectively improve the polishing performance of the original grinding wheel.

[0045] In order to solve the problem that the passive particles on the surface of the iron-based grinding wheel fall off during ELID dressing and scratch the surface of the workpiece during ultra-precision grinding, a carbon nanotube alpha-Fe2O3 grinding wheel is provided, which does not contain abrasive grains, so the abrasive grains will not scratch the surface of the workpiece during ultra-precision grinding. Meanwhile, the oxide film generated on the surface of the grinding wheel during ELID dressing will generate nano alpha-Fe2O3 particles under the influence of grinding heat. The alpha-Fe2O3 particles are excellent polishing agents, so the ELID grinding wheel without abrasive grains can be used to polish the surface of the workpiece. However, the oxide film is converted into alpha-Fe2O3 particles only in the high-temperature area around the abrasive grains by relying on the grinding heat, so the content of the alpha-Fe2O3 particles is low. The nano carbon nanotubes have nano polishing performance due to the hardness of the carbon nanotubes being equivalent to that of diamond. In order to improve the polishing performance of the oxide film, a proper amount of carbon nanotubes is added to effectively improve the polishing performance of the original grinding wheel.

[0046] As shown in Figure 1 The manufacturing method of the novel carbon nanotube alpha-Fe2O3 grinding wheel provided by the embodiment of the present application comprises the following steps:

[0047] In step S101, the carbon nanotubes are dispersed in deionized water, and then the iron-based binder powder is added, heated, and ball milled to obtain a uniform powder of the carbon nanotubes and the iron-based binder.

[0048] In step S102, the SLM 3D printer is improved by adding a powder laying mechanism and a pellet mold. The powder is placed in the improved SLM 3D printer to obtain the carbon nanotube iron-based binder pellets.

[0049] In step S103, the aluminum alloy turning is used to obtain the grinding wheel base. The carbon nanotube iron-based binder pellets are embedded on the grinding wheel base to obtain the novel carbon nanotube alpha-Fe2O3 grinding wheel.

[0050] As a preferred embodiment, the manufacturing method of the novel carbon nanotube alpha-Fe2O3 grinding wheel provided by the embodiment of the present application specifically comprises the following steps:

[0051] In step S101, the carbon nanotubes are dispersed in deionized water, and then the iron-based binder powder is added, heated, and ball milled to obtain a uniform powder of the carbon nanotubes and the iron-based binder.

[0052] The carbon nanotube iron-based binder pellets are prepared by powder laying, laser scanning and heating curing in the SLM 3D printer, the carbon nanotube iron-based binder pellets are small, and the carbon nanotube needs to be arranged vertically, therefore, the original powder laying mechanism of the SLM 3D printer is not suitable, and a powder laying mechanism and a pellet mold need to be self-made on the original SLM 3D printer, the powder laying mechanism is as shown in Figure 2 , the nozzle is a flat nozzle, the outlet width is 0.1 mm, the length is equivalent to the diameter of the pellet, and the spraying thickness is about 0.1 mm each time, because the outlet of the nozzle is constrained, the powder is in a compressed state, and under the action of stress, the carbon nanotube of each layer is arranged horizontally. The pellet mold is as shown in Figure 3 , in order to facilitate installation, the shape is square, the inner shape is a semicylindrical shape, and the semicylindrical shape is placed horizontally (the cylinder is horizontal) on the workbench of the SLM 3D printer, so that one semicylindrical pellet is printed each time, and the carbon nanotube in the semicylindrical pellet is arranged along the axial direction of the cylinder, the printing principle is as shown in Figure 4 , and the prepared carbon nanotube iron-based binder pellets are as shown in Figure 5 . The grinding wheel base (see Figure 6 ) is made of aluminum alloy turning. Every two semicylindrical pellets are combined together, the carbon nanotube iron-based binder pellets are inlaid on the grinding wheel base, and the carbon nanotube grinding wheel is made, at this time, the arrangement direction of the carbon nanotube in the pellets on the grinding wheel base becomes the vertical workpiece surface direction (see FIG. 7).

[0053] The overall dynamic balance experiment provided by the embodiment of the application comprises:

[0054] The carbon nanotube grinding wheel is installed on the ELID machine tool to perform ELID dressing, the ELID dressing principle is as shown in Figure 8 , the carbon nanotube grinding wheel is connected to the positive electrode of the power supply, the dressing electrode is connected to the negative electrode of the power supply, the electrolyte is poured between the carbon nanotube grinding wheel and the dressing electrode, the power supply is turned on, and the carbon nanotube grinding wheel is subjected to ELID dressing. The dressing parameters are that the grinding wheel speed is 1500 r / min, the power supply voltage is 60 V, the current is 50 A, the pulse width is 25 mu s, the pulse peak width is 25 mu s, and the duty cycle is 50%. After 30 minutes of dressing, the pellet surface generates an oxide film rich in carbon nanotubes, and the material removal capacity of the carbon nanotube is utilized to achieve the effect of increasing the material removal rate of the oxide film.

[0055] The vertical arrangement of the carbon nanotube is as shown in Figure 9 , the overall structure of the oxide film is like a broom, the carbon nanotubes in the oxide film are vertically and orderly densely arranged, and each carbon nanotube is a micro cutter, which performs micro cutting on the ELID grinding workpiece surface. Because the carbon nanotube is 1~10 nm, the cutting track is only nanoscale. The removal amount of a single carbon nanotube is extremely weak, but the cooperative removal capacity of a large number of cluster carbon nanotubes is considerable, and the removal principle is as shown in Figure 10As shown. Furthermore, under the influence of grinding heat generated during carbon nanotube cutting, point-like heat sources are formed around the carbon nanotubes, with the carbon nanotubes as the core. These heat sources exhibit a gradient distribution centered on the carbon nanotubes, with the highest heat at the center and decreasing heat with distance from the carbon nanotubes. Therefore, a gradient distribution of the oxide film is formed around the point-like heat sources of the carbon nanotubes. Near the center of the carbon nanotubes, the heat is higher, and the oxide film undergoes a more complete conversion to α-Fe₂O₃, with α-Fe₂O₃ being the main component. Further away from the carbon nanotubes, the heat is lower, and the oxide film composition decreases sequentially to γ-Fe₂O₃, Fe(OH)₃, etc. Figure 11 As shown. Therefore, a composite removal unit of carbon nanotubes + α-Fe2O3 is formed in the oxide film, thus forming a carbon nanotube α-Fe2O3 grinding wheel. The carbon nanotube α-Fe2O3 grinding wheel has densely arranged composite removal units of carbon nanotubes + α-Fe2O3 in the oxide film on its surface. The high-speed rotation of the carbon nanotube α-Fe2O3 grinding wheel drives these composite removal units to perform sliding, plowing, and cutting on the workpiece surface, inevitably forming a composite removal process of carbon nanotube cutting and α-Fe2O3 polishing. This not only improves removal efficiency but also, because the removal amounts of both are at the nanometer level, the obtained surface accuracy should also be at the nanometer level. Carbon nanotubes are excellent conductors; therefore, the carbon nanotubes embedded in the oxide film are like current channels, passing through the insulating oxide film to reach the substrate. This improves the electrolytic ability of the grinding wheel and increases the oxide film renewal speed. Therefore, there is no need to worry about the slow oxide film electrolytic generation rate failing to meet polishing requirements. Figure 12 As shown.

[0056] Example 1: Silicon Wafer Polishing. Traditional polishing requires CeO2 and α-Fe2O3 powders on a polishing machine. Because the passivated CeO2 and α-Fe2O3 powders cannot automatically renew themselves, they often create micron-level scratches on the nanometer-precision silicon wafer surface. Subsequent CMP polishing struggles to remove these micron-level scratches, resulting in low silicon wafer yield and high cost. The technical solution proposed in this invention will effectively solve the silicon wafer scratch problem, improve product yield, and reduce product cost.

[0057] Example 2: Lens Polishing. Lenses and other optical components are widely used in laser light transmission, camera imaging, telescopes, and other fields, requiring surface precision at the nanometer level. Traditional polishing techniques require ultra-precision polishing using CeO2 and α-Fe2O3 powders on a polishing machine. Because CeO2 and α-Fe2O3 powders cannot automatically renew themselves after passivation, micron-level scratches are created on the ultra-precision machined lens surface, leading to product defects. The technical solution proposed in this invention will effectively solve the lens scratch problem.

[0058] The above merely illustrates the specific embodiments of the present application, but the protection scope of the present application is not limited thereto, and any modification, equivalent replacement and improvement within the technical range disclosed by the present application and within the spirit and principle of the present application should be covered within the protection scope of the present application.

Claims

1. A method for manufacturing a carbon nanotube α-Fe203 grinding wheel, characterized by, The manufacturing method of the carbon nanotube alpha-Fe2O3 grinding wheel comprises the following steps: dispersing carbon nanotubes in deionized water, adding iron-based binder powder, oscillating and dispersing, heating, and uniformly ball milling in a ball mill to obtain a uniform powder of carbon nanotubes and iron-based binder; improving an SLM3D printer by adding a powder laying mechanism and a pellet mold; placing the powder in the improved SLM3D printer to obtain carbon nanotube iron-based binder pellets, and using aluminum alloy turning to obtain a grinding wheel base; embedding the carbon nanotube iron-based binder pellets on the grinding wheel base to obtain the carbon nanotube alpha-Fe2O3 grinding wheel. The manufacturing method of the carbon nanotube alpha-Fe2O3 grinding wheel comprises the following steps: In step one, carbon nanotubes are dispersed in deionized water, iron-based binder powder is added, oscillation and dispersion are performed, heating is performed, and uniform ball milling is performed in a ball mill to obtain a uniform powder of carbon nanotubes and iron-based binder. In step two, a powder laying mechanism and a pellet mold are self-made and improved on an SLM3D printer, powder is laid, laser scanning is performed, and carbon nanotube iron-based binder pellets are obtained. In step three, an aluminum alloy turning is used to obtain a grinding wheel base, two half-cylinder pellets are combined, and the carbon nanotube iron-based binder pellets are embedded on the grinding wheel base to obtain the carbon nanotube alpha-Fe2O3 grinding wheel. In step two, the carbon nanotubes inside the cylinder of the pellet mold are arranged along the axial direction of the cylinder, and the arrangement mode of the carbon nanotubes is vertical, ordered, and densely arranged. In step three, the carbon nanotubes arranged vertically to the working surface and in an ordered and dense arrangement, and alpha-Fe2O3 in the ELID oxide film form a composite polishing unit.

2. The method for manufacturing a carbon nanotube α-Fe2O3 grinding wheel as described in claim 1, characterized in that, In step one, the length of the carbon nanotubes is 1-10 nm, and the addition ratio is 0.3%-0.5%.

3. The method for manufacturing the carbon nanotube α-Fe2O3 grinding wheel as described in claim 1, characterized in that, In step one, the heating temperature is 50-80°C.

4. The method for manufacturing a carbon nanotube α-Fe2O3 grinding wheel as described in claim 1, characterized in that, In step two, the nozzle of the powder laying mechanism is a flat nozzle, the outlet width is 0.1 mm, the length is the same as the diameter of the pellet, and the spraying thickness is 0.1 mm each time.

5. The method for manufacturing a carbon nanotube α-Fe2O3 grinding wheel as described in claim 1, characterized in that, In step two, the pellet mold is square in shape and semicircular in inner shape, the cylinder is horizontal, and the pellet mold is placed horizontally on the working table of the SLM3D printer.

6. The method for manufacturing a carbon nanotube α-Fe₂O₃ grinding wheel as described in claim 1, characterized in that, In step two, the carbon nanotube iron-based binder pellets are semicircular pellets.

7. The method for manufacturing a carbon nanotube α-Fe2O3 grinding wheel as described in claim 1, characterized in that, In step two, the carbon nanotubes inside the cylinder of the pellet mold are arranged along the axial direction of the cylinder, and the arrangement mode of the carbon nanotubes is vertical, ordered, and densely arranged.

8. The method for manufacturing a carbon nanotube α-Fe2O3 grinding wheel as described in claim 1, characterized in that, In step three, the carbon nanotubes arranged vertically to the working surface and in an ordered and dense arrangement, and alpha-Fe2O3 in the ELID oxide film form a composite polishing unit.

9. A carbon nanotube alpha-Fe2O3 grinding wheel manufactured by the manufacturing method of the carbon nanotube alpha-Fe2O3 grinding wheel according to any one of claims 1-8.

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