System for managing full-automatic left-in and right-out feeding production of inline photolithography machine based on semiconductor MES system

Abstract

The application provides a system for managing full-automatic left-in and right-out feeding production of an inline photolithography machine based on a semiconductor MES system, and has the characteristics that the system comprises an automatic interface module, a material management module, a carrying module, a device management module and a real-time dispatching module; based on the system, the next process can be prepared seamlessly, the process circulation speed is improved, and the production efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing, and more specifically, to a system for managing fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system. Background Technology

[0002] During the photolithography process in the production of 12-inch semiconductor wafers, it is typically necessary to... In turn The process involves coating, exposure, and development. Coating and development are performed in the coating and developing machine (Track), while exposure is performed in the lithography machine (Scanner). The factory connects the coating and developing machine and the lithography machine via an interface module (IFB) to form an inline lithography machine for integrated lithography processes. Wafers are loaded into front-opening wafer cassettes (FOUPs) and fed and received through the loading port (LP) of the coating and developing machine. After being fed into the FOUP, the wafer remains on the LP until the process is completed and the wafer is removed. This method reduces the maximum processing capacity of the equipment and also reduces the turnover efficiency of the FOUPs.

[0003] For example, in the current 12-inch wafer manufacturing process, during the photolithography process, to achieve clean track lithography, an inline scanner in the IFB is used to integrate the coating, exposure, and development processes. After the FOUP (Front-Installed Panel) is fed in, it remains on the LP (Laminator Plate) awaiting reception. The incoming material undergoes coating, exposure, and development processes sequentially, and after each process, it is received by the same FOUP. During this process, the FOUP remains on the LP and cannot be used for other purposes, reducing the turnover efficiency of the FOUP.

[0004] Furthermore, track lithography machines typically have four pallets (LPs), allowing simultaneous feeding from four FOUPs, totaling 100 wafers. In contrast, inline lithography machines can process more than 100 wafers simultaneously for certain processes (such as memory chip fabrication). When all four FOUPs occupy an LP, the equipment operates in intermittent processing mode, meaning it must wait for one FOUP on an LP to finish feeding before processing continues (e.g., during coating processes). This means the equipment's processing capacity is not fully utilized, failing to maximize the overall equipment efficiency (OEE) of the expensive production equipment and reducing production efficiency and capacity. Summary of the Invention

[0005] This invention aims to overcome the aforementioned shortcomings by providing a fully automated left-in-right-out (LIRO) material feeding method for inline lithography integrated processes, based on a Manufacturing Execution System (MES). Material is fed onto a designated platen (LP), and once feeding is complete, the FOUP (Form-In-Pack) immediately leaves the LP; then, material is received on the designated LP. LIRO improves the turnover efficiency of the FOUP and maximizes the production capacity of the equipment. It also effectively prevents misoperation, thereby improving yield and production efficiency.

[0006] After the invention is used, the lithography process in a cleanroom for 12-inch semiconductor manufacturing can achieve a "lights-out" effect, eliminating the need for operators in the cleanroom.

[0007] The present invention provides a fully automated left-in, right-out feeding production system for an inline lithography machine based on a semiconductor MES system, characterized in that it includes an automation interface module, a material management module, a handling module, an equipment management module, and a real-time dispatching module;

[0008] Among them, the aforementioned automated interface module connects to the inline lithography machine and the semiconductor MES system, and exchanges information between the inline lithography machine and the semiconductor MES system;

[0009] The modules have the function of information exchange and communication;

[0010] The aforementioned material management module records the quantity of materials to be processed and project requirements, counts the quantity of materials fed into and discharged from the inline lithography machine, and tracks the flow / processing progress of materials.

[0011] The aforementioned material handling module includes a FOUP for material handling and performs feeding or discharging operations according to instructions.

[0012] The aforementioned equipment management module tracks the occupancy status of the inline lithography machine and the progress of material processing.

[0013] The aforementioned real-time task dispatch module includes a task model construction submodule and a task dispatch submodule;

[0014] The above task model construction sub-module creates real-time dispatch tasks based on information from the material management module, handling module, and equipment management module.

[0015] The aforementioned real-time dispatching tasks include instructing the specified FOUP to arrive at the loading port of the specified inline lithography machine at a specified time to perform a specified quantity of material unloading or feeding operations, and instructing the inline lithography machine to perform operation preparations for specified items.

[0016] The aforementioned dispatching submodule issues operation instructions to the corresponding equipment based on real-time dispatching tasks.

[0017] Furthermore, the system provided by this invention, which manages the fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system, is characterized by:

[0018] It also includes binding and unbinding modules;

[0019] When a FOUP contains materials or when a FOUP contains materials, the aforementioned binding and unbinding modules bind each material to the current FOUP one by one.

[0020] When the FOUP unloads materials, the binding and unbinding modules described above will unbind the materials from the current FOUP one by one.

[0021] Furthermore, the system provided by this invention, which manages the fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system, is characterized by:

[0022] The aforementioned equipment management module also includes a progress notification submodule;

[0023] When the material handling project within the inline lithography machine is nearing completion, the aforementioned progress notification submodule reports the progress to the real-time dispatch module.

[0024] Furthermore, the system provided by this invention, which manages the fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system, is characterized by:

[0025] When the real-time dispatch module receives a progress report that the material processing is about to be completed, it creates a dispatch task for the FOUP that matches the material.

[0026] Furthermore, the system provided by this invention, which manages the fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system, is characterized by:

[0027] When the real-time dispatch module receives a progress report that the material processing is about to be completed, it checks the availability of the FOUP that matches the material.

[0028] When there is a target FOUP whose target time status is idle, a dispatch task is created for that FOUP;

[0029] If there is no target FOUP with an idle status at the target time, find the nearest idle target FOUP and create a work assignment for that FOUP.

[0030] Furthermore, the system provided by this invention, which manages the fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system, is characterized by:

[0031] The aforementioned progress notification submodule sends a material requirement request to the real-time dispatch module when the inline lithography machine is in an idle or partially idle state.

[0032] Upon receiving a material demand request, the aforementioned real-time dispatch module creates a new dispatch task or adjusts the order of dispatch tasks that have already been created but have not yet progressed.

[0033] Furthermore, the system provided by this invention, which manages the fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system, is characterized by:

[0034] It also includes a verification module;

[0035] The aforementioned verification module monitors the system's operation in real time and reports errors when they occur.

[0036] Furthermore, the system provided by this invention, which manages the fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system, is characterized by:

[0037] The aforementioned material handling module also includes a FOUP material counting submodule;

[0038] When performing a discharge / feed operation, the aforementioned FOUP material counting submodule counts the materials being discharged / fed.

[0039] The aforementioned equipment management module also includes an equipment material counting submodule;

[0040] When performing a discharge / feed operation, the material counting submodule of the above-mentioned equipment counts the materials being discharged / fed.

[0041] Furthermore, the system provided by this invention, which manages the fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system, is characterized by:

[0042] The aforementioned verification module checks whether the quantity of materials in the work assignment is consistent with the counting result of the FOUP material counting submodule, and reports an error when they are inconsistent.

[0043] The aforementioned verification module also checks whether the quantity of materials in the work assignment is consistent with the counting result of the equipment material counting submodule, and reports an error when they are inconsistent.

[0044] When an error occurs, stop the process on the current, related, or all devices.

[0045] Furthermore, the system provided by this invention, which manages the fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system, is characterized by:

[0046] The aforementioned verification module also checks whether the sum of the quantity of materials to be processed, the quantity of materials that have been prepared for feeding into the equipment but have not yet been dispatched, and the quantity of materials currently ready for feeding exceeds the capacity of the inline lithography machine. If it does, an error is reported. Description of the Drawings

[0047] Figure 1 . Schematic diagram of the inline integrated lithography equipment in MES;

[0048] Figure 2 . Normal scenario of feeding production with left-in and right-out;

[0049] Figure 3 . Abnormal scenario of feeding production with left-in and right-out;

[0050] Figure 4 . Equipment status model and events;

[0051] Among them, IDLE (Waiting To Process) - idle (waiting for processing), RUN (Processing) - running (being processed), PM (Maintenance) - maintenance (machine being maintained), QUAL (Setup Recipe) - preset (configuring process recipe), TrackIn (Ready To Process) - inbound (ready for processing), TrackOut (Processed) - outbound (processing completed), SourceState -> TargetState - initial state switching to target state, State&LotType - state and permitted lot types, PM (NPW) - maintenance (non-product lot), QUAL (NPW) - preset (non-product lot), IDLE (ANY) - idle (any type of lot), RUN (ANY) - running (any type of lot);

[0052] Figure 5 . Port status model and events;

[0053] Among them, Event - event, RTD>M - real-time dispatching and handling, Detent Locked - locking detent, DetentReleased - releasing detent, State - state, ReadyToLoad - ready to load, ReadyToProcess - ready to process, ReadyToUnload - ready to unload, empty state - instantaneous state (equipment quickly switches to ready to load), Signal - signal, LoadRequest - request to load, LoadComplete - load completed, UnloadRequest - request to unload, UnloadComplete - unload completed;

[0054] Figure 6 . Reticle status model and events;

[0055] Among them, Reticle Bank is the photomask warehouse, Library is the built-in photomask warehouse, State is the built-in exposure window of the machine, Transport is the transport, Reticle is the photomask, Reticle LoadPort is the photomask loading port, ReticlePod is the photomask transport box, AssignPod is the photomask attached to the transport box, DeassignPod is the photomask unattached to the transport box, Attach is the photomask attached to the machine, Detach is the photomask unattached to the machine, MoveIn is the exposure window moved in, MoveOut is the exposure window removed, IDLE is idle, KITTING is ready, RUN is running, LotPrepare and TrackIn verify that the photomasks used in the batch have been attached to the processing equipment;

[0056] Figure 7 .IndexerOut signal processing flowchart;

[0057] Figure 8 .IndexerIn signal processing flowchart;

[0058] Figure 9 .LoadTargetCarrier signal processing flowchart;

[0059] Figure 10 .CheckTargetCarrier signal processing flowchart;

[0060] Figure 11 .IlsHold signal processing flowchart;

[0061] Figure 12 .IlsAbort signal processing flowchart. Detailed Implementation

[0062] This invention is capable of various modifications and embodiments, and therefore specific embodiments are illustrated and described in the accompanying drawings. However, this is not intended to limit the invention to specific implementations, but should be understood to include all modifications, equivalents, and even substitutions that fall within the spirit and scope of this invention.

[0063] This embodiment provides a left-in, right-out feeding production method. When performing the left-in, right-out feeding production method, the MES system constructs a data model of the actual configuration of the inline integrated lithography machine to perform signal processing, status change, material inspection, real-time dispatching and other controls.

[0064] During the production process, the status of equipment, loading port, and photolithography plate changes constantly due to signals generated by related events. The MES system needs to record this data in real time to automate material feeding and receiving. Therefore, the MES system proposed in this embodiment implements a left-in, right-out production method.

[0065] Establish a data model for an integrated lithography device;

[0066] Establish a state model for the integrated lithography equipment;

[0067] Establish a loading port status model;

[0068] Establish a photomask state model;

[0069] Create a table to record real-time data of data entering from the left and exiting from the right;

[0070] Update real-time data based on the signals generated by the event;

[0071] The real-time dispatch system dispatches tasks based on real-time data.

[0072] Regarding this system, the specific hardware layout in this embodiment is as follows: Figure 1 As shown.

[0073] Among them, Coater is the coating / coating equipment chamber, Exposure is the exposure equipment chamber, and Developer is the developing equipment chamber. These together constitute the process part of the entire lithography machine. Internal transmission system is the transmission system between the equipment chambers.

[0074] FOUP Transfer Robot Arm is a front-opening wafer transfer robot arm.

[0075] The Pod Port is a loading port for loading and transmitting photolithography cassettes. It includes four loading ports on the P1-P4-Track machine: In - dedicated to feeding materials, and Out - dedicated to receiving materials.

[0076] This forms the process direction of being near on the left and exiting on the right.

[0077] Specifically:

[0078] The system provided in this embodiment includes an automation interface module, a material management module, a handling module, an equipment management module, and a real-time dispatching module;

[0079] This automated interface module connects to the inline lithography machine and the semiconductor MES system, exchanging information between the two systems to enable the transmission of process data and the issuance of process commands.

[0080] Each module (not limited to the automation interface module, material management module, handling module, equipment management module, and real-time dispatch module; here, "module" actually refers to various working or status modules involved in the process) has the function of information exchange and communication, realizing the real-time updating and interoperability of various data.

[0081] This material management module records the quantity of materials to be processed and project requirements. For example, the quantity of materials waiting to be processed by the lithography machine, which is input from the front end of the equipment or transmitted from the upper-level interface it interfaces with, as well as the processing items for each material. Generally, the materials are processed in batches, so the quantity here will include the quantity of each batch and the total quantity of each batch, etc., to clarify the material handling volume and requirements. In addition, this module also contains the model information of each material, which facilitates matching the corresponding FOUP and TRACK equipment during the dispatching process.

[0082] This material management module also counts the amount of material fed into and out of the inline lithography machine, including the material status in various states, such as the amount of material fed into and out of the lithography machine in the waiting sequence, and the amount of material fed into and out of the lithography machine in progress.

[0083] The material management module also tracks the flow / processing of materials, that is, the processing progress of the material in the current equipment. Generally, this information is relayed from the equipment management module.

[0084] This material handling module includes a FOUP for handling materials and performs feeding or discharging operations according to instructions. Considering the differences in material models, the FOUP needs to be operated according to the corresponding model. Therefore, the FOUP needs to provide its model information, address information and other parameters so that the material handling module can monitor the operation of the FOUP in real time.

[0085] The equipment management module tracks the occupancy status of the inline lithography machine and the progress of material processing. Specifically, the equipment management module needs to know in real time whether the lithography machine is idle, as well as information on the batch, quantity, and progress of the processed materials.

[0086] This real-time task dispatching module includes a task model building submodule and a task dispatching submodule. Its main function is to create tasks and send dispatching instructions to target devices. In addition, it is also necessary to monitor the progress and idle status of online devices in real time.

[0087] The task model construction sub-module creates real-time dispatch tasks based on information from the material management module, handling module, and equipment management module.

[0088] Specifically, for example: based on the vacancy status of the FOUP, load the corresponding type of material and wait for work assignment;

[0089] Depending on the working status of the lithography machine, the corresponding FOUP is left idle to wait for materials to be loaded and removed from the equipment.

[0090] Based on the quantity of materials and the loading capacity of the FOUP, one or more FOUPs are assigned to collect the materials and instruct them to proceed to the designated equipment loading end.

[0091] This real-time dispatching task includes instructing the specified FOUP to arrive at the loading port of the specified inline lithography machine at a specified time to perform a specified quantity of material unloading or feeding operations, and instructing the inline lithography machine to perform operation preparations for a specified item.

[0092] This dispatching submodule issues operation instructions to the corresponding devices based on real-time dispatching tasks.

[0093] Based on the above system, the following scenarios may occur in this embodiment:

[0094] Scenario 1: Normal production scenario with left-in, right-out material feeding

[0095] like Figure 2 As shown, the process during normal operation is as follows:

[0096] S1. Create a task based on the material information. The task includes the material quantity, POUF number, loading port, etc.

[0097] S2. Instruct the POUF to arrive at the loading inlet and begin taking material from the feeding POUF into the equipment;

[0098] S3. After each piece is fed, the system will unbind the material from the POUF.

[0099] S4. After the last piece of material has been placed, return a message;

[0100] S5. Remove the POUF from the feed;

[0101] S6. Repeat S2-S5 until all materials in the current batch included in the task have been delivered;

[0102] S7. The equipment still processes the materials;

[0103] S8. When the processing is about to be completed (the time difference can be manually controlled, such as 5 minutes before completion), report the event to the system;

[0104] S9. Instruction POUF to reach the loading outlet;

[0105] S10. The material is loaded piece by piece from the equipment into the docking POUF;

[0106] S11. For each piece of material discharged, the backend binds the material to the POUF;

[0107] S12. After the first piece of material is discharged, return a message;

[0108] S13. Remove the POUF from the discharge port.

[0109] Scenario 2: Abnormal Production Process with Left-In, Right-Out Feeding

[0110] During the operation of this system, alarms are triggered for any abnormal situations that may occur.

[0111] Specifically, this is achieved through a verification module, which monitors the system's operation in real time and reports errors when they occur.

[0112] (1) The handling module also includes a FOUP material counting submodule;

[0113] When performing a discharge / feed operation, the FOUP material counting submodule counts the materials being discharged / fed.

[0114] The equipment management module also includes an equipment material counting submodule;

[0115] When performing a discharge / feed operation, the material counting submodule of the equipment counts the materials being discharged / fed.

[0116] The verification module checks whether the material quantity in the work assignment is consistent with the counting result of the FOUP material counting submodule. If they are inconsistent, an error is reported.

[0117] The verification module also checks whether the quantity of materials in the work assignment is consistent with the counting result of the equipment material counting submodule, and reports an error when they are inconsistent.

[0118] When an error occurs, stop the process on the current, related, or all devices.

[0119] (2) This verification module also checks whether the sum of the quantity of materials to be processed, the quantity of materials that have been prepared for feeding but not yet dispatched to the equipment, and the quantity of materials currently prepared for feeding exceeds the capacity of the inline lithography machine. If it exceeds the capacity, an error is reported.

[0120] (3) This verification module also checks the correspondence between the loading / unloading port of the lithography machine and the POUF. When it is inconsistent with the information in the real-time dispatch task, an error is reported.

[0121] When the above error occurs, such as Figure 3 The process is stopped, and the error is displayed on the device front end. After verification by maintenance personnel, the error is manually removed.

[0122] Regarding the several models involved in this embodiment:

[0123] (1) In this embodiment, the establishment of the data model is shown in the following table:

[0124]

[0125] Among them, Port - loading port, Chamber - equipment chamber, SubEquipment - inline sub-equipment, Parameter - equipment parameters.

[0126] Port Type: PL - Feed In, PU - Discharge Out, PB - Feed & Discharge Inlet

[0127] Parameter:

[0128] BufferCapacity - The internal buffer capacity of the device;

[0129] TriggerLoadTargetCarrierType - Method by which the device triggers the LoadTargetCarrier signal

[0130] ①ByLot - Triggered according to the batch in the FOUP, triggered once for each batch;

[0131] ②ByCarrier - Triggered according to the feeding FOUP, triggered once for each FOUP;

[0132] RemainLotProcessType - Batch processing method in the device when an abnormal event occurs.

[0133] ①Local - The device is switched to Offline and manually removed by a maintenance engineer;

[0134] ②Remote - Automatic chip loading into the device disaster recovery FOUP, with IndexerIn and other signals;

[0135] MES controls material feeding and discharging, process parameters, and equipment status through Track devices.

[0136] (2) State model and events maintained by MES

[0137] A. Equipment state model and events, such as Figure 4 As shown, this is used to verify that the material type being fed is consistent with the material permitted by the current status of the machine equipment during LotPrepare and TrackIn processes.

[0138] The specific process is as follows:

[0139] ① The equipment is currently idle (IDLE) as no batches have entered the station and all batches that have entered the station have exited the station.

[0140] ② When a batch of equipment arrives at the station and the equipment is idle, the TrackIn event triggers a switch from IDLE to RUN.

[0141] ③ When a batch that has entered the equipment exits the equipment and no other batch has entered the equipment, the TrackOut event triggers the equipment state switch to RUN->IDLE;

[0142] ④ When the equipment operation time reaches the maintenance time specified in the maintenance cycle, the machine maintenance system (PMS) sends an equipment status switching event to the MES, and the MES performs the status switching IDLE&RUN->PM;

[0143] ⑤ After machine maintenance, the equipment maintenance engineer manually switches the status from PM to IDEL & RUN in the MES system;

[0144] ⑥ If formula verification and optimization are required after machine maintenance, the equipment engineer shall manually switch the status from PM to QUAL in the MES.

[0145] ⑦ When the factory needs to perform formula verification and optimization, the equipment engineer can manually switch the state in MES from IDLE & RUN to QUAL.

[0146] ⑧ After the formula validation is completed, the equipment engineer should manually switch the status in MES from QUAL to IDLE & RUN.

[0147] Correspondence between equipment status and incoming batch type:

[0148] IDLE & RUN - Batch of any type can be entered;

[0149] PM - Non-working batch (NPW: generally refers to test strips / side protection strips / monitoring strips)

[0150] QUAL - Non-working batch (NPW: generally refers to test pieces / side protection pieces / monitoring pieces)

[0151] B. Port state model and events, such as Figure 5 As shown, RTD monitors the Port signals and status to dispatch work in real time. Material feeding / receiving dispatch is based on the LoadRequest signal and ReadyToLoad status, and work step flow is based on the UnloadRequest signal and ReadyToUnload status.

[0152] The specific process is as follows:

[0153] ①When there is no carrier on the loading port and the machine capacity allows, a LoadRequest command is sent to the MES, and the MES executes the loading port state switch -> ReadyToLoad;

[0154] ② Real-time dispatch (RTD) and reach the loading port via transport vehicle (GTM). When the loading port is locked (Detent), a LoadComplete command is sent to MES. MES performs the loading port state switch ReadyToLoad->ReadyToProcess.

[0155] ③ After the batch processing in the vehicle is completed, the equipment releases the jammer and sends an UnloadRequest command to the MES. The MES then performs a loading port state switch from ReadyToProcess to ReadyToUnload.

[0156] ④ Real-time dispatch (RTD) and leave the loading port via a transport vehicle (GTM), moving towards the loading port as the ejector pin pops up.

[0157] MES issues the UnloadComplete command, and MES performs a load port state switch to ReadyToUnload->.

[0158] C. Reticle state model and events, such as Figure 6 As shown

[0159] The specific process is as follows:

[0160] ① The photomask is placed in a dedicated photomask warehouse room and is in an idle state (IDLE);

[0161] ②After the user takes out the photolithography plate from the dedicated photolithography plate warehouse and puts it into the photolithography plate transmission box, the MES manually triggers the AssignPod signal, and the MES performs the binding action between the photolithography plate and the photolithography plate transmission box.

[0162] ③ After the photomask transport box is loaded and the photomask transport (GTM) arrives at the loading port of the photomask transport box of the photolithography (Scanner) machine, the robotic arm takes out the photomask from the photomask transport box and transports it to the built-in warehouse of the photolithography machine. The photolithography machine sends a DeassignPod signal to the MES, and the MES performs the action of unbinding the photomask from the photomask transport box. The photolithography machine continues to send an Attach signal to the MES, and the MES performs the action of binding the photomask to the photolithography machine and switches the photomask state from IDLE to KITTING.

[0163] ④ During batch processing, the machine moves the photomask from the built-in warehouse to the photomask window and sends a MoveIn signal to the MES. The MES then performs the photomask state switch KITTING->RUN.

[0164] ⑤ After exposure, the machine moves the photomask from the photolithography window to the built-in warehouse and sends a MoveOut signal to the MES. The MES then switches the photomask state to RUN->KITTING.

[0165] ⑥ The user operates the lithography machine UI to exit the lithography plate. The robotic arm moves the lithography plate from the built-in warehouse to the lithography plate transfer box on the loading port and sends Detach and AssignPod signals to MES in sequence. MES executes the Detach signal to switch the lithography plate state KITTING->IDLE and executes the AssignPod signal to bind the lithography plate to the lithography plate transfer box.

[0166] ⑦ After the photolithography plate transmission box is moved to the dedicated room, the user manually takes out the photolithography plate and manually triggers the DeassignPod signal in the MES. The MES then releases the binding relationship between the photolithography plate and the photolithography plate transmission box.

[0167] (3) LIRO control data

[0168] In LIRO feeding mode, the integrated equipment uses a first-in, first-out (FIFO) order for material discharge. The MES records feeding information and discharge order for dispatching and equipment capacity control.

[0169] Dispatch and release FOUP(WIP_ILS_PROCESS_DATA)

[0170] ID EquipmentID SourceFOUP LotID SeqNo Tirggers SourceUnload TargetFOUP ControlID 101 RPTIM01 PMR5068 - N - 102 - - Lot.001 - - - 101

[0171] ID - Unique data identifier, auto-incrementing; EquipmentId - Track device ID; SourceFOUP - Feed FOUPID; LotID - Batch being fed; SeqNo - Discharge sequence number; Triggers - Number of LoadTargetCarrier signals triggered by the device (SeqNo is generated according to ByLot method); SourceUnload - Whether the feed FOUP has been unloaded from the In Port; TargetFOUP - FOUP ID of the material being discharged; ControlID - Dispatch control ID to which the feed batch belongs; '-' - No value; 'empty' - Signal triggered update;

[0172] life cycle:

[0173] LotInfoDownload - Create;

[0174] UnloadRequest(In Port)-Update(SourceUnload: N->Y);

[0175] LoadTargetCarrier(ByLot)-Update

[0176] ① Triggers increment by 1;

[0177] ② When the number of Triggers is the same as the number of batches in the feeding process, SeqNo is the maximum SeqNo+1 for the same equipment;

[0178] LoadTargetCarrier(ByCarrier) - Update (SeqNo is the maximum SeqNo for the same device + 1);

[0179] LoadRequest(0ut) - Update (TargetFOUP-RTD dispatch FOUP ID / OP specify FOUP ID);

[0180] TrackOut (ByLot) - Delete

[0181] ① Data corresponding to the batch;

[0182] ②FOUP control data when there is no batch data;

[0183] TrackOut (ByCarrier) - Deletes FOUP & batch data;

[0184] UnloadRequest(Out Port) - Deletes FOUP & batch data if they exist;

[0185] Use cases:

[0186] 1. FOUP basis for work assignment and material receiving;

[0187] 2. IlsAbort handling method;

[0188] 3. Equipment buffer capacity control calculation data;

[0189] • Device Buffer Control (WIP_INDEXER_DATA)

[0190] ID WaferID Position ControlID 705 Lot.001.01 1 102 706 Lot.001.02 2 102

[0191] √ID - A unique identifier for data, auto-incrementing;

[0192] √WaferID - Wafer Number;

[0193] √Position - The slot number in the FOUP for material feeding;

[0194] √ControlID - Batch control ID for material feeding;

[0195] life cycle:

[0196] IndexerOut - Create;

[0197] IndexerIn - Delete;

[0198] Use cases:

[0199] 1. Used for equipment buffer capacity control, calculated and controlled during material preparation:

[0200] 2. The number of IndexerData entries in the batch associated with the ControlID of the device;

[0201] 3. The number of wafers for batches where equipment preparation for feeding has been completed but work has not yet been dispatched;

[0202] 4. The number of wafers in the current batch to be fed;

[0203] 5. Failure occurs when the sum of the first three quantities exceeds the value specified in the device parameter BufferCapacity;

[0204] (4) LIRO control signals

[0205] IndexerOut - The robotic arm moves the wafer from the feed FOUP (SourceFOUP) into the internal buffer of the equipment;

[0206] EQUIPMENTID Device ID PORTID Port ID DURABLEID SourceFOUP COMPONENTID Wafer Number POSITION Slot number in SourceFOUP

[0207] IndexerIn - The robotic arm moves the wafer from the internal buffer of the equipment into the receiving FOUP (TargetFOUP);

[0208] EQUIPMENTID Device ID PORTID Port ID DURABLEID TargetFOUP COMPONENTID Wafer Number POSITION Slot number in TargetFOUP

[0209] IlsAbort - Interrupts the processing of all batches / specific batches in the FOUP;

[0210] EQUIPMENTID Device ID DURABLEID SourceFOUP LOTID Specify batch ID; if none exists, use all batches in the FOUP.

[0211] IlsHold - Pauses feeding all batches / specific batches in the FOUP;

[0212] LOTLIST Specify a batch list; if none is specified, use all batches in the FOUP. CARRIERID SourceFOUP

[0213] LoadTargetCarrier - The device sends a signal that the feeding process is almost complete (device parameter: specifies which wafer is triggered when it reaches which chamber).

[0214] EQUIPMENTID Track Device ID DURABLEID SourceFOUP

[0215] CheckTargetCarrier - Verifies whether the FOUP is the TargetFOUP of the specified SourceFOUP;

[0216] DURABLEID SourceFOUP EQUIPMENTID Device ID TARGETDURABLEID TargetFOUP

[0217] General signals:

[0218] LotPrepare - Material preparation;

[0219] LotInfoDownload-MES sends material feeding job information to the equipment;

[0220] TrackIn - Entering the station;

[0221] EQUIPMENTID Track Device ID LOTLIST Batch list LOT Data Node LOTID Batch number EQUIPMENTRECIPE Processing technology formula EQUIPMENTMASK Processing photolithography encoding COMPONENTLIST Wafer List COMPONENT Data Node LOTID Batch COMPONENTID Wafer Encoding POSITION Slot number in the FOUP feeding system

[0222] LotPrOceSsStart - Batch processing begins;

[0223] LotProcessEnd - Batch processing ends;

[0224] TrackOut - Processing complete, proceed to the next step;

[0225] EQUIPMENTID Track Device ID LOTLIST Batch list LOT Data Node LOTID Batch number DURABLEID FOUP receiving materials COMPONENTLIST Wafer List COMPONENT Data Node LOTID Batch COMPONENTID Wafer Encoding POSITION Slot number in the receiving FOUP

[0226] (5) Signal processing flow

[0227] •IndexerOut, such as Figure 7 As shown

[0228] The robotic arm picks up wafers from the FOUP and places them into the equipment buffer. A signal is sent for each wafer. The signal processing flow is as follows:

[0229] ① Based on the same device number (EQUIPMENTID - signal data), the source carrier number (DURABLEID - signal data) is the same.

[0230] Similarly, if ControlID is empty, query MES data and sort it in descending order by time;

[0231] ② If no data is found, exit without performing any action;

[0232] ③ If data is found, retrieve the first record and its unique primary key ID;

[0233] ④ Query the MES to obtain the batch number of the wafer based on the wafer number (COMPONENTID - signal data);

[0234] ⑤ Use ControlID = ID (③) and LotID = batch number (④) as the query criteria.

[0235] MES(WIP_ILS_PROCESS_DATA);

[0236] ⑥ Obtain the ID of the record in the query result;

[0237] ⑦ Assign ControlID = ID(⑥), WaferID = (COMPONENTID - number of signals)

[0238] According to the data), Position = (POSITION - signal data) and save it to MES (WIP_INDEXER_DATA);

[0239] ⑧ Count the number of records in MES (WIP_INDEXER_DATA) with the same ControlID (⑥ID);

[0240] ⑨ Determine whether the statistical count and the number of wafers in the corresponding batch are equal;

[0241] ⑩ If they are equal, the batch and vehicle binding is released;

[0242] (11) Regardless of whether they are equal, the wafer and carrier binding is released.

[0243] 12. Exit;

[0244] •IndexerIn, such as Figure 8 As shown, the robotic arm picks up wafers from the equipment buffer and places them into the receiving FOUP. A signal is sent for each wafer. The signal processing flow is as follows:

[0245] ① Query MES (WIP_INDEXER_DATA) based on wafer number (COMPONENTID - signal data) and sort by ID in descending order.

[0246] Sort;

[0247] ② Exit if the query result is empty;

[0248] ③ If the query result is not empty, retrieve the first record and obtain its ControlID;

[0249] ④ Count the number of records in MES (WIP_INDEXER_DATA) with the same ControlID (③);

[0250] ⑤ Compare the number of wafers in the statistics (④) and the batch (COMPONENT-signal data, query MES to obtain the batch).

[0251] (Query MES), if they are equal, then the first wafer of the batch is extracted;

[0252] ⑥ If it is the first wafer extracted, then perform batch binding (COMPONENT - signal data, query MES to get the batch) and target carrier (DURABLEID - signal data);

[0253] ⑦ Regardless of whether it is the first wafer extracted, the wafer (COMPONENTID - signal data) and target carrier are executed.

[0254] Binding of (DURABLEID - signal data);

[0255] ⑧ Delete the record (③) from MES (WIP_INDEXER_DATA);

[0256] 9. Exit;

[0257] •LoadTargetCarrier, such as Figure 9 As shown, the equipment sends a signal when the material feeding is almost complete. The signal processing flow is as follows:

[0258] ① Query the corresponding output data from the MES based on the signal;

[0259] ② Obtain the signal triggering method of the corresponding device from the MES;

[0260] ③ Triggered by batch (ByLot):

[0261] A. Increment the number of times the discharge data is triggered (if empty, then set to 1);

[0262] B. Count the number of batches that belong to the material output data;

[0263] C. Compare the batch data quantity and the number of triggers; they are equal.

[0264] D. If they are not equal, return;

[0265] ④ Triggered by FOUP (ByCarrier) based on material feeding;

[0266] ⑤ Obtain the current maximum output sequence number (SeqNo) of the equipment from the MES;

[0267] ⑥ Calculate the new discharge sequence number (SeqNo). If the discharge sequence number is empty, it is 1; otherwise, the discharge sequence number is incremented by 1.

[0268] ⑦ Update the output data SeqNo to the calculated SeqNo;

[0269] More specifically:

[0270] ① Based on the conditions that the device number (EQUIPMENTID - signal data) is the same, the source vehicle number (DURABLEID - signal data) is the same, and the ControlID is empty, query the MES (WIP_ILS_PROCESS_DATA) data and sort it in descending order by time;

[0271] ② Exit if the query result is empty;

[0272] ③ If the query result is not empty, retrieve the first record of the query result;

[0273] ④ Query the MES based on the device number (EQUIPMENTID - signal data) to obtain the parameters of the signal processing method of the device;

[0274] ⑤ If the signal processing method is batch processing (ByLot), then update the record (③).

[0275] Triggers = Triggers + 1 (Triggers has a value) or Triggers = 1 (Triggers has no value);

[0276] ⑥ Count the number of records in MES (WIP_ILS_PROCESS_DATA) that have the same ControlID as ③;

[0277] ⑦ Compare whether Triggers(⑤) and the statistic(⑥) are equal. If they are equal, it is the trigger for the last batch; otherwise, it is not.

[0278] ⑧ If it is not the last batch to be triggered, then exit;

[0279] ⑨ If it is the last batch that was triggered, then continue executing ⑩⑾⑿⒀⒂;

[0280] ⑩ Based on the same device number (EQUIPMENTID - signal data), an empty ControlID, and a non-empty SeqNo, use these as conditions to query the MES.

[0281] (WIP_ILS_PROCESS_DATA) data and sorted in descending order by SeqNo;

[0282] (11) If the query result is empty, then the current SeqNo = 1;

[0283] 12. If the query result is not empty, take the first record, and the current SeqNo = the SeqNo value of the first record + 1;

[0284] 13. Update record (③) so that its SeqNo = the current SeqNo;

[0285] 14. If the signal processing method is by carrier, then execute 10, 11, 12, and 13.

[0286] 12. Exit;

[0287] • Check Target Carrier, such as Figure 10 As shown, when RTD>M dispatch FOUP arrives at the loading port and is locked by the clamp, a signal is sent. The signal processing flow is as follows:

[0288] ① Based on the conditions that the device number (EQUIPMENTID - signal data) is the same, the source vehicle number (DURABLEID - signal data) is the same, the ControlID is empty, and the SeqNo is not empty, query the MES (WIP_ILS_PROCESS_DATA) data and sort it in descending order by ID;

[0289] ② If the query result is empty, exit and return the result indicating that the check failed;

[0290] ③ If the query result is not empty, take the first record and its TargetFOUP;

[0291] ④ If the TargetFOUP of the first record is empty, exit and return the result of the check failure;

[0292] ⑤ If the TargetFOUP of the first record is not empty, compare the TargetFOUP in the record with the TARGETDURABLEID in the signal;

[0293] ⑥ If the comparison results are equal, exit and return a successful check result;

[0294] ⑦ If the comparison results are not equal, exit and return to the check failure result;

[0295] •IlsHold, such as Figure 11 As shown, a signal is triggered when an abnormality occurs during equipment processing. The signal processing flow is as follows:

[0296] ① Obtain the batch list from the signal;

[0297] ②If the batch list is not empty, add the batches in the batch list to the paused batch list;

[0298] ③ If the batch list is empty, obtain the source vehicle number (CARRIERID) from the signal;

[0299] ④ If the source vehicle in the signal does not exist, exit and return a failure message;

[0300] ⑤ If the source vehicle in the signal exists, query the MES (WIP_ILS_PROCESS_DATA) data based on the same source vehicle number (DURABLEID - signal data) and an empty ControlID, and sort the data in descending order by ID.

[0301] ⑥ If the query result is empty, exit and return a failure message;

[0302] ⑦ If the query result is not empty, take the first record and use the record ID as the ControlID to query MES(WIP_ILS_PROCESS_DATA);

[0303] ⑧ Extract the batch (LotID) from the query results and add it to the paused batch list;

[0304] ⑨ Perform a pause (Hold) action on all batches in the paused batch list;

[0305] ⑩ Exit and return a success message;

[0306] ·IlsAbort, such as Figure 12 As shown, when an abnormality occurs during equipment processing, a signal is triggered after the IlsHold signal completes. The signal processing flow is as follows:

[0307] ① Obtain the list of batches to be processed from the MES based on the signals;

[0308] ② Obtain the device parameter RemainLotProcessType from MES;

[0309] ③ Iteratively process the batch list;

[0310] ④ No wafers were present in the equipment in this batch:

[0311] A. The FOUP feeds material at the feeding port - executes an abort operation;

[0312] B. The receiving FOUP performs the TrackOut action at the receiving port;

[0313] ⑤ A portion of the wafers from the batch are in the equipment:

[0314] A. Perform a split action:

[0315] B. Wafers in the equipment are used as parent lots;

[0316] C. Wafers in the FOUP (Feeding / Receiving Unit) are considered as sublots;

[0317] D. Unbind the master batch and the feeding / receiving FOUP;

[0318] E. With the device parameter RemainLotProcessType set to Local, batch discharge data and buffer data are retrieved and added to the pending list;

[0319] F. Both the parent batch and the child batch perform an abort operation.

[0320] ⑥ Iterative processing complete;

[0321] ⑦ Clear the pending list data;

[0322] More specifically:

[0323] ① Based on the conditions that the device number (EQUIPMENTID - signal data) is the same, the source vehicle number (DURABLEID - signal data) is the same, and the ControlID is empty, query the MES (WIP_ILS_PROCESS_DATA) data and sort it in descending order by ID;

[0324] ②If the query result is empty, exit and return a failure message;

[0325] ③ If the query result is not empty, take the first record and record the SourceUnload value of the first record and query MES (WIP_ILS_PROCESS_DATA) based on the ID of the first record as the ControlID;

[0326] ④ Obtain the handling method for abnormal batches of equipment based on the equipment number (EQUIPMENTID - signal data);

[0327] ⑤ Determine if the batch (LOTID) in the signal exists. If it exists, add the batch to the list of batches to be processed.

[0328] ⑥ If it does not exist, add the batch (LotID) from the query result based on the same ControlID in ③ to the list of batches to be processed;

[0329] ⑦ Perform the following processing on each batch in the batch list to be processed;

[0330] ⑧ Obtain the number of wafers in the batch and the amount of buffer control data (WIP_INDEXER_DATA) in the batch;

[0331] ⑨ If the amount of buffer control data (WIP_INDEXER_DATA) in a batch is 0, check whether the source vehicle has been unloaded from the InPort (③SourceUnload). If not (③SourceUnload=N), perform an abort action for the batch. If it has (③SourceUnload=Y), perform an outbound action for the batch and continue to ⑦ to process the next batch.

[0332] ⑩ If the quantity of buffer control data (WIP_INDEXER_DATA) in the batch is not 0, it is compared with the quantity of wafers in the batch;

[0333] 11. If the comparison results are not equal, the batch is split. The wafers in the batch's buffer control data are used as the wafers held by the parent batch, and the remaining wafers in the original batch are used as the wafers held by the child batch. The parent batch is unbound according to the InPort Unload (③SourceUnload) flag. When SourceUnload = Y, the parent batch is unbound from the target vehicle. When SourceUnload = N, the parent batch is unbound from the source vehicle.

[0334] ⑿ If the comparison result is equal (⑩);

[0335] 13. Determine whether the processing method (RemainLotProcessType) of the abnormal batch is Local (manual processing). If so, add the real-time data (WIP_ILS_PROCESS_DATA) to which the batch belongs to the real-time data list to be deleted, and add the buffer control data (WIP_INDEXER_DATA) to which the batch belongs to the buffer control data list to be deleted.

[0336] 14. Perform an abort action on the batches (parent batch and child batch);

[0337] 12 Return to step 7 to process the next batch;

[0338] ⒃ After all batches in the batch list to be processed have been processed, delete the real-time data from the real-time data list to be deleted from the MES, and delete the buffer control data from the buffer control data list to be deleted from the MES.

[0339] 14. Exit and return a success message;

[0340] The function and effect of this embodiment:

[0341] By using the internal buffer device of the inline lithography integrated equipment, the LIRO feeding production method is employed:

[0342] 1. MES models the LP to distinguish between the feeding port (In LP) and the receiving port (Out LP), thereby enabling the execution of different dispatch strategies and providing configurability to adapt to production line conditions;

[0343] 2. The FOUP is fed into the In LP. The front-opening wafer transfer box is used to transfer the wafer to the internal buffer device. At the same time, the MES unbinds the batch / wafer from the FOUP. After completion, the FOUP is unlocked on the In LP and leaves the machine. The FOUP can then be freely dispatched to other machines, which improves the efficiency of FOUP utilization and solves the problem that the original feeding method required waiting for the receiving machine and occupied the LP, preventing new feeding.

[0344] 3. As long as there is incoming material in the internal buffer equipment, the equipment can continuously perform integrated photolithography process, improving equipment utilization efficiency and thus increasing production capacity;

[0345] 4. When the material receiving process of the same FOUP is about to end (equipment parameters), send a material receiving signal to MES to prevent misoperation and delayed material receiving, improve the real-time dispatching and thus improve production efficiency.

[0346] 5. FOUPs with the same material type and slot number (SlotMap) for dispatch and output are received at Out LP. FTRA picks up wafers from the internal buffer device and puts them into the FOUP. At the same time, MES binds the batch / wafer to the FOUP, thus seamlessly preparing for the next process, improving process flow speed and thus increasing production efficiency.

[0347] While the foregoing has focused on embodiments, these are merely illustrative and do not limit the invention. Those skilled in the art will understand that various modifications and applications not illustrated above can be made without departing from the essential characteristics of these embodiments. For example, the constituent elements specifically shown in the embodiments can be implemented through modifications. Furthermore, various differences related to such modifications and applications should be interpreted as being included within the scope of the invention as defined in the appended claims.

Claims

1. A system for managing fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system, characterized in that: It includes an automation interface module, a material management module, a handling module, an equipment management module, and a real-time dispatching module; The automation interface module connects to the inline lithography machine and the semiconductor MES system, and exchanges information between the inline lithography machine and the semiconductor MES system. The modules have the function of information exchange and communication; The material management module records the quantity of materials to be processed and project requirements, counts the quantity of materials fed and discharged from the inline lithography machine, and tracks the flow / processing progress of materials. The material handling module includes a FOUP for material handling and performs feeding or discharging operations according to instructions. The equipment management module tracks the occupancy status of the inline lithography machine and the progress of material processing. The real-time dispatch module includes a task model construction submodule and a dispatch submodule; The task model construction submodule creates real-time dispatch tasks based on information from the material management module, handling module, and equipment management module. The real-time dispatching task includes instructing the specified FOUP to arrive at the loading / unloading port of the specified inline lithography machine at a specified time to perform a specified quantity of material unloading or feeding operations, and instructing the inline lithography machine to perform operation preparation for a specified project. The dispatching submodule issues operation instructions to the corresponding devices based on real-time dispatching tasks; It also includes binding and unbinding modules; When the FOUP is loaded with materials or when the FOUP is loaded with materials, the binding and unbinding module binds each material to the current FOUP one by one; When the FOUP unloads materials, the binding and unbinding module unbinds the materials one by one from the current FOUP.

2. The system for fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system as described in claim 1, characterized in that: The equipment management module also includes a progress notification submodule; When the material handling project within the inline lithography machine is about to be completed, the progress notification submodule reports the progress to the real-time dispatch module.

3. The system for fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system as described in claim 2, characterized in that: When the real-time dispatch module receives a progress report that the material processing is about to be completed, it creates a dispatch task for the FOUP that matches the material.

4. The system for fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system as described in claim 2, characterized in that: When the real-time dispatch module receives a progress report that the material processing is about to be completed, it checks the availability of the FOUP that matches the material. When there is a target FOUP whose target time status is idle, a dispatch task is created for that FOUP; If there is no target FOUP with an idle status at the target time, find the nearest idle target FOUP and create a dispatch task for that FOUP; and / or The progress notification submodule sends a material requirement request to the real-time dispatch module when the inline lithography machine is in an idle or partially idle state. Upon receiving a material demand request, the real-time dispatch module creates a new dispatch task or adjusts the order of dispatch tasks that have already been created but have not yet progressed.

5. The system for fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system as described in claim 1, characterized in that: It also includes a verification module; The verification module monitors the system's operation in real time and reports errors when they occur.

6. The system for fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system as described in claim 5, characterized in that: The material handling module also includes a FOUP material counting submodule; When performing a discharge / feed operation, the FOUP material counting submodule counts the materials being discharged / fed. The equipment management module also includes an equipment material counting submodule; When performing a discharge / feed operation, the equipment's material counting submodule counts the materials being discharged / fed.

7. The system for fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system as described in claim 6, characterized in that: The verification module checks whether the quantity of materials in the work assignment is consistent with the counting result of the FOUP material counting submodule, and reports an error when they are inconsistent. The verification module also checks whether the quantity of materials in the work assignment is consistent with the counting result of the equipment material counting submodule, and reports an error when they are inconsistent. When an error occurs, stop the process on the current, related, or all devices.

8. The system for fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system as described in claim 5, characterized in that: The verification module also checks whether the sum of the quantity of materials to be processed, the quantity of materials that have been prepared for feeding into the equipment but have not yet been dispatched, and the quantity of materials currently ready for feeding exceeds the capacity of the inline lithography machine. If it does, an error is reported.

9. The system for fully automated left-in, right-out feeding production of an inline lithography machine based on a semiconductor MES system as described in claim 5, characterized in that: The verification module also checks the correspondence between the lithography machine's loading / unloading port and FOUP. If the information is inconsistent with the information in the real-time dispatch task, an error is reported.

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