An air cylinder pressure-holding leak detection device and a pressure-holding leak detection method

Abstract

The present invention relates to a gas cylinder pressure-holding leak detection device and a pressure-holding leak detection method; it includes a vacuum chamber body, and a pressure-holding pipeline is arranged inside the vacuum chamber body; the vacuum chamber body is provided with a vacuum pumping device, a vacuum chamber detection unit and a helium filling pipeline part; the pressure-holding pipeline is provided with a plurality of gas cylinder connectors and a pipeline pressure sensor, and a pressure-holding pipeline detection unit is arranged outside the vacuum chamber body, and the pressure-holding pipeline is also connected to a non-helium inert gas filling pipeline part; the vacuum chamber detection unit includes a chamber body pressure sensor and an oxygen content analyzer; the pressure-holding pipeline detection unit includes a pipeline vacuum pumping device and a gas detection part; by means of pressure and / or gas component detection and analysis, it can avoid the phenomenon of gas pollution caused by the rust of the gas cylinder, and at the same time can reduce the operation difficulty of the detection personnel, reduce the risk of misjudgment, and has the characteristics of high detection accuracy and the ability to detect the airtightness of the gas cylinder.

Description

Technical Field

[0001] The present invention relates to the technical field of gas cylinder detection, in particular to a gas cylinder pressure-maintaining leak testing device and a pressure-maintaining leak testing method. Background Art

[0002] Existing gas cylinder leak testing mainly relies on manual testing using leak testing liquid. This leak testing method is relatively traditional and has the following defects: 1. When using leak testing liquid for leak testing, the effect is more obvious when the gas cylinder has a large leak, but it cannot detect when there is a slight leak. This situation causes the problem of large-scale leakage of product gas in the gas cylinder during long-distance transportation after filling. Not only does it cause huge property losses to the gas cylinder user, but it also causes environmental pollution when the gas in the cylinder is a prohibited gas. 2. When a large number of gas cylinders need to be tested, the price of leak testing liquid is relatively expensive, and the leak testing liquid itself has the risk of rusting and gas contamination of the gas cylinder. The above situation leads to high testing costs, shortening the service life of the gas cylinder and causing the product gas to substandard. In particular, when the gas cylinder is filled with electronic grade or high purity gas, the product in the gas cylinder may be contaminated and cannot be used. 3. The leak testing process requires professional expertise from the leak testing personnel, especially in the leak test judgment, which is affected by multiple factors such as personnel skills and environment, resulting in inconsistent results and large errors. Summary of the Invention

[0003] The object of the present invention is to provide a gas cylinder pressure-maintaining leak testing device and a pressure-maintaining leak testing method to solve the problems raised in the above-mentioned background technology.

[0004] To achieve the above object, the present invention provides the following technical solutions:

[0005] A gas cylinder pressure-maintaining leak testing device comprises a vacuum chamber body, wherein a pressure-maintaining pipe is provided in the vacuum chamber body; the vacuum chamber body is provided with a vacuum pumping device, a vacuum chamber detection unit and a helium filling pipeline portion; the pressure-maintaining pipeline is provided with a plurality of gas cylinder joints and a pipeline pressure sensor, and a pressure-maintaining pipeline detection unit is provided on the outside of the vacuum chamber body, and the pressure-maintaining pipeline is also connected to the non-helium inert gas filling pipeline portion; the vacuum chamber detection unit comprises a chamber pressure sensor for detecting the internal pressure of the vacuum chamber body, and an oxygen content meter for detecting the oxygen content in the vacuum chamber body; the pressure-maintaining pipeline detection unit comprises at least a pipeline vacuum pumping device for vacuuming the pressure-maintaining pipeline, and a gas detection portion for detecting whether other gases have leaked into the pressure-maintaining pipeline.

[0006] Advantages of the present invention: The present invention utilizes the vacuum chamber body equipped with a pressure-holding pipeline as a container, and the pressure-holding pipeline as another container. The gas cylinder and the pressure-holding pipeline are placed inside the vacuum chamber body. Through pressure detection and / or gas component detection and analysis, the leakage situation and airtightness of the gas cylinder are detected. It should be noted that the leakage situation of the gas cylinder in the present invention refers to a large-scale leakage caused by the damage of the bottle valve, and the airtightness of the gas cylinder mainly refers to a micro-leakage. Through research, it is found that the micro-leakage mainly comes from the thread of the bottle valve. Further, the present invention can achieve batch detection of gas cylinders by setting a plurality of gas cylinder connectors, so as to improve the detection efficiency and reduce the detection cost. By means of pressure and / or gas component detection and analysis, the phenomenon of gas pollution caused by the rust of the gas cylinder can be avoided, and at the same time, the operation difficulty of the detection personnel can be reduced, and the misjudgment risk can be reduced. It has the characteristics of high detection accuracy and the ability to detect the airtightness of gas cylinders.

[0007] Preferably, the helium filling pipeline part includes a helium gas cylinder or a helium gas pipeline network. The helium gas cylinder or the helium gas pipeline network is connected to the vacuum chamber body through a pipeline, and a first pneumatic valve and a helium gas pressure sensor are provided on the pipeline.

[0008] Preferably, the non-helium inert gas filling pipeline part includes an inert gas cylinder or an inert gas pipeline network. The inert gas cylinder or the inert gas pipeline network is connected to the pressure-holding pipeline through a pipeline, and a second pneumatic valve and an inert gas pressure sensor are provided on the pipeline.

[0009] Preferably, the vacuum chamber body is provided with a chamber door with an electric control lock, and the vacuum chamber body is provided with a ventilation pipeline with a ventilation motor.

[0010] Preferably, the pressure-holding pipeline is connected to a pipeline vacuuming device through a vacuuming pipeline. A first three-way joint, a second three-way joint, a vacuum gauge for detecting the vacuum degree in the vacuuming pipeline, and a third pneumatic valve are sequentially provided on the vacuuming pipeline. The gas detection part includes a pump suction type alarm instrument connected to the third end of the first three-way joint and a helium mass spectrometer leak detector connected to the third end of the second three-way joint.

[0011] Preferably, a fourth pneumatic valve is provided between the third end of the first three-way joint and the pump suction type alarm instrument; a fifth pneumatic valve is provided between the third end of the second three-way joint and the helium mass spectrometer leak detector.

[0012] The present invention further includes a PLC control system. The signal input ends of the PLC control system are respectively connected to a pipeline pressure sensor, a pipeline temperature sensor, a chamber pressure sensor, an oxygen content meter, a helium pressure sensor, an inert gas pressure sensor, a vacuum gauge, a pump suction type alarm instrument, and a helium mass spectrometer leak detector. The signal output ends of the PLC control system are respectively connected to a first pneumatic valve, a second pneumatic valve, a third pneumatic valve, a fourth pneumatic valve, a fifth pneumatic valve, a vacuum pumping device, a vacuum gauge, and a pipeline vacuum pumping device. A pipeline temperature sensor is further arranged on the pressure maintaining pipeline.

[0013] A pressure maintaining and leak detection method for a gas cylinder pressure maintaining and leak detection device, the pressure maintaining and leak detection method including: a positive pressure airtightness test for the bottle valve interface, a negative pressure airtightness test for the bottle valve interface, an alarm instrument detection test, and a helium mass spectrometer leak detector detection test. The positive pressure airtightness test for the bottle valve interface is used to detect whether the gas in the pressure maintaining pipeline leaks to the inside of the vacuum chamber through the bottle valve and whether the gas in the gas cylinder enters the pressure maintaining pipeline. The negative pressure airtightness test for the bottle valve interface is used to detect whether there is gas in the gas cylinder or the vacuum chamber entering the pressure maintaining pipeline through the bottle valve interface. The alarm instrument detection test is used to detect whether there is gas in the gas cylinder entering the pressure maintaining pipeline through the bottle valve interface. The helium mass spectrometer leak detector detection test is used to detect whether the gas in the vacuum chamber leaks to the pressure maintaining pipeline through the bottle valve.

[0014] The beneficial effects of the present invention are as follows: The above methods in the present invention can be used crosswise to improve the accuracy of the pressure maintaining and leak detection of the gas cylinder. The above four methods can be all used or at least one of them can be selected for use. Specifically, the positive pressure airtightness test for the bottle valve interface in the present invention is used to detect whether the bottle valve leaks and the airtightness situation. The negative pressure airtightness test for the bottle valve interface is used to detect whether the bottle valve leaks and the airtightness situation. The alarm instrument detection test is mainly used to detect whether the bottle valve leaks. The helium mass spectrometer leak detector detection test is mainly used to detect the airtightness of the bottle valve. The present invention can perform batch operations to detect the gas cylinders. When there is no problem in a batch, the whole batch can be judged as qualified. When there is a problem in a batch, the batch can be split and detected separately to determine the specific bottle valve with problems. The above method can effectively improve the detection efficiency and at the same time ensure the detection accuracy.

[0015] Preferably, the positive pressure airtightness test for the bottle valve interface, the negative pressure airtightness test for the bottle valve interface, the alarm instrument detection test, and the helium mass spectrometer leak detector detection test respectively include the following steps:

[0016] The positive pressure airtightness test for the bottle valve interface includes the following steps:

[0017] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint in the pressure maintaining pipeline.

[0018] Step 2: Fill the pressure-holding pipeline with test gas so that the gas pressure in the pressure-holding pipeline is greater than the pressure in the vacuum chamber body and less than the pressure in the gas cylinder; the bottle valve of the gas cylinder is in the closed state;

[0019] Step 3: Detect whether the gas pressure in the pressure-holding pipeline fluctuates through the pipeline pressure sensor. When the pipeline pressure sensor detects a decrease in the gas pressure in the pressure-holding pipeline, it proves that the gas in the pressure-holding pipeline leaks into the vacuum chamber body through the bottle valve, that is, the airtightness of the bottle valve is poor; when the pipeline pressure sensor detects an increase in the gas pressure in the pressure-holding pipeline, it proves that the gas in the gas cylinder enters the pressure-holding pipeline, that is, there is a leakage in the bottle valve; when the pipeline pressure sensor detects that the gas in the pressure-holding pipeline does not change, it proves that the airtightness of the bottle valve is good and there will be no leakage phenomenon;

[0020] Step 4: After the above detection, recover the test gas in the pressure-holding pipeline or evacuate it using the pipeline vacuum device;

[0021] The negative pressure airtightness test of the bottle valve interface includes the following steps:

[0022] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint in the pressure-holding pipeline;

[0023] Step 2: Open the second pneumatic valve, and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network enters the pressure-holding pipeline for gas replacement. After replacement, close the second pneumatic valve and relieve the pressure. Finally, use the pipeline vacuum device to evacuate the pressure-holding pipeline, and determine the vacuum degree in the pressure-holding pipeline through the vacuum gauge;

[0024] Step 3: The bottle valve of the gas cylinder is in the closed state, the pressure in the gas cylinder is greater than the pressure in the vacuum chamber body, and the pressure in the vacuum chamber body is greater than the pressure in the pressure-holding pipeline; the bottle valve of the gas cylinder is in the closed state;

[0025] Step 4: Detect whether the gas pressure in the pressure-holding pipeline rises through the pipeline pressure sensor. When the pipeline pressure sensor detects an increase in the gas pressure in the pressure-holding pipeline, it proves that the gas in the vacuum chamber body or the gas cylinder enters the pressure-holding pipeline, that is, there is a leakage or poor airtightness in the bottle valve;

[0026] When the pipeline pressure sensor detects that the gas pressure in the pressure-holding pipeline remains unchanged, the airtightness of the bottle valve is good and there will be no leakage phenomenon;

[0027] The alarm instrument detection test includes the following steps:

[0028] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint in the pressure-holding pipeline;

[0029] Step 2: Open the second pneumatic valve, and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network enters the pressure-holding pipeline for gas replacement. After replacement, close the second pneumatic valve and relieve the pressure to make the pressure in the pressure-holding pipeline consistent with the pressure in the vacuum chamber body.

[0030] Step 3: The bottle valve of the gas cylinder is in the closed state, and the pressure inside the gas cylinder is greater than the pressure in the vacuum chamber body.

[0031] Step 4: The PLC control system controls the fourth pneumatic valve to open and starts the pump suction type alarm instrument; the gas in the gas cylinder in Step 1 is the same as the gas detected by the pump suction type alarm instrument.

[0032] Step 5: When the pump suction type alarm instrument detects the gas in the pressure-holding pipeline, if the detected gas in the pressure-holding pipeline contains the components of the gas in the gas cylinder, it indicates that there is a leakage in the bottle valve.

[0033] If the detected gas in the pressure-holding pipeline does not contain the components of the gas in the gas cylinder, it indicates that there is no leakage in the bottle valve.

[0034] The helium mass spectrometer leak detection test includes the following steps:

[0035] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint in the pressure-holding pipeline.

[0036] Step 2: Start the vacuum pumping device to evacuate the vacuum chamber body. When the preset vacuum value is reached, close the vacuum pumping device and open the first pneumatic valve to allow the helium gas in the helium gas cylinder or helium gas pipeline network to enter the vacuum chamber body.

[0037] Step 3: The bottle valve of the gas cylinder is in the closed state, the pressure in the vacuum chamber body is greater than the pressure in the pressure-holding pipeline, and the pressure in the vacuum chamber body is less than the pressure inside the gas cylinder.

[0038] Step 4: The PLC control system controls the fifth pneumatic valve to open and starts the helium mass spectrometer leak detector.

[0039] Step 5: When the helium mass spectrometer leak detector detects the gas in the pressure-holding pipeline, if the detected gas in the pressure-holding pipeline contains helium gas components, it indicates that there is a poor airtightness in the bottle valve.

[0040] If the detected gas in the pressure-holding pipeline does not contain helium gas components, it indicates that the airtightness of the bottle valve is good.

[0041] Preferably, after the test, when personnel need to enter, turn on the ventilation motor, and the oxygen content meter continuously detects the oxygen content in the vacuum chamber body. When the oxygen content reaches the standard for human entry, the chamber door with an electric control lock is opened.

[0042] A gas cylinder pressure-holding leak detection device and a pressure-holding leak detection method made according to the above scheme. In the present invention, the vacuum chamber body equipped with a pressure-holding pipeline is used as a container, and the pressure-holding pipeline is used as another container. The gas cylinder is connected to the pressure-holding pipeline and both the gas cylinder and the pressure-holding pipeline are placed inside the vacuum chamber body. Through pressure detection and / or gas component detection and analysis, the leakage situation and airtightness of the gas cylinder are detected. It should be noted that the leakage situation of the gas cylinder in the present invention refers to a large amount of leakage caused by the damage of the cylinder valve, and the airtightness of the gas cylinder mainly refers to a small amount of leakage. Through research, it is found that the small amount of leakage mainly comes from the thread of the cylinder valve. Further, according to the above settings, the present invention sets positive pressure airtightness test for the cylinder valve interface, negative pressure airtightness test for the cylinder valve interface, alarm instrument detection test and helium mass spectrometer leak detection test. Through the above tests, the accuracy of detection can be effectively improved without using leak detection liquid, and the purchase cost of leak detection liquid can be reduced, the phenomenon of gas pollution caused by rusting of the gas cylinder can be avoided, at the same time, the operation difficulty of the detection personnel can be reduced, the risk of misjudgment can be reduced, and it has the characteristics of high detection accuracy and the ability to detect the airtightness of the gas cylinder. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 It is a schematic structural diagram of the present invention.

[0044] Figure 2 It is a block diagram of the control principle of the present invention.

[0045] In the figure: 1. Vacuum chamber body; 2. Pressure-holding pipeline; 3. Vacuum pumping device; 4. Gas cylinder connector; 5. Pipeline pressure sensor; 6. Pipeline temperature sensor; 7. Chamber body pressure sensor; 8. Oxygen content meter; 9. Pipeline vacuum pumping device; 10. Helium gas cylinder or helium gas pipeline network; 11. First pneumatic valve; 12. Helium gas pressure sensor; 13. Inert gas cylinder or inert gas pipeline network; 14. Second pneumatic valve; 15. Inert gas pressure sensor; 16. Electric control lock; 17. Ventilation motor; 18. First three-way; 19. Second three-way; 20. Vacuum gauge; 21. Third pneumatic valve; 22. Pump suction type alarm instrument; 23. Helium mass spectrometer leak detector; 24. Fourth pneumatic valve; 25. Fifth pneumatic valve; 26. PLC control system. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0046] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention.

[0047] See Figure 1-2, the present invention relates to a gas cylinder pressure-holding leak detection device and a pressure-holding leak detection method. The device includes a vacuum chamber body 1, and a pressure-holding pipeline 2 is arranged inside the vacuum chamber body 1; the vacuum chamber body 1 is provided with a vacuum pumping device 3, a vacuum chamber detection unit, and a helium filling pipeline part; the pressure-holding pipeline 2 is provided with a plurality of gas cylinder connectors 4 and a pipeline pressure sensor 5, and a pressure-holding pipeline detection unit is arranged outside the vacuum chamber body 1. The pressure-holding pipeline 2 is also connected to a non-helium inert gas filling pipeline part; the vacuum chamber detection unit includes a chamber pressure sensor 7 for detecting the internal pressure of the vacuum chamber body 1, and an oxygen content analyzer 8 for detecting the oxygen content inside the vacuum chamber body 1; the pressure-holding pipeline detection unit at least includes a pipeline vacuum pumping device 9 for evacuating the pressure-holding pipeline 2, and a gas detection part for detecting whether other gases leak into the pressure-holding pipeline 2. The present invention is applicable to the detection of gas cylinders, specifically applicable to the detection of the leakage condition and airtightness of gas cylinders. The leakage of gas cylinders refers to a large amount of leakage caused by damage to the cylinder valve. The airtightness of gas cylinders mainly refers to micro-leakage; especially applicable to the detection of electronic-grade or high-purity product gas cylinders. The present invention utilizes the characteristics that the gas cylinder is connected to the pressure-holding pipeline 2, and both the gas cylinder and the pressure-holding pipeline 2 are in the vacuum chamber body 1. Taking the pressure-holding pipeline 2 and the vacuum chamber body 1 as different cavities, and cooperating with pressure and / or gas component analysis, the leakage condition and airtightness of the gas cylinder are detected to achieve the purpose of improving the detection accuracy; the present invention does not need to use leakage liquid, which can save costs, prevent and avoid the phenomenon of gas cylinder corrosion and gas pollution, and at the same time can reduce the operation difficulty of detection personnel and reduce the risk of misjudgment; especially can detect the airtightness problem of the cylinder valve, and can ensure that there will be no large amount of leakage of product gas during long-distance transportation, so as to improve customer satisfaction. It should be noted that the airtightness problem of gas cylinders cannot be effectively detected by the method of leak detection liquid (the leakage amount of leak detection liquid is small, and it is in an exudation state during actual detection, which is not easy to be found and observed); however, when the airtightness is poor, during the storage and transportation or storage of gas cylinders, the product gas in the gas cylinder will have long-term continuous leakage, causing huge property losses to the gas cylinder user unit, and at the same time it is also easy to cause the gas supplier to pay compensation due to leakage during transportation, which has been plaguing gas production enterprises. It should be noted that the present invention is also provided with a pipeline temperature sensor 6 capable of detecting the temperature inside the pressure-holding pipeline 2, and later the influence of gas temperature on gas pressure can be eliminated by conversion.

[0048] Further, the helium filling pipeline part includes a helium gas cylinder or a helium gas pipeline network 10. The helium gas cylinder or the helium gas pipeline network 10 is connected to the vacuum chamber body 1 through a pipeline, and a first pneumatic valve 11 and a helium gas pressure sensor 12 are arranged on the pipeline. Through the above setting, the helium gas in the helium gas cylinder or the helium gas pipeline network 10 can enter the vacuum chamber body 1 for the purpose of subsequent detection.

[0049] Further, the non-helium inert gas filling pipeline section includes an inert gas cylinder or an inert gas pipeline network 13. The inert gas cylinder or the inert gas pipeline network 13 is connected to the pressure maintaining pipeline 2 through a pipeline, and a second pneumatic valve 14 and an inert gas pressure sensor 15 are provided on the pipeline. Through the above settings, non-helium inert gas can enter the pressure maintaining pipeline 2, which is convenient for later detection and can distinguish it from the helium gas in the vacuum chamber body 1; the non-helium inert gas can include neon, argon, krypton, xenon, etc.

[0050] Further, the vacuum chamber body 1 is provided with a chamber door with an electric control lock 16, and the vacuum chamber body 1 is provided with a ventilation pipeline with a ventilation motor 17. The electric control lock 16 in the present invention can be matched with the ventilation motor 17, that is, when personnel enter the vacuum chamber body 1, the ventilation motor 17 is first started. When the vacuum chamber body 1 is the same as the external air, the electric control lock 16 is opened to ensure the safety of the on-site personnel.

[0051] Further, the pressure maintaining pipeline 2 is connected to a pipeline vacuuming device 9 through a vacuuming pipeline. A first three-way joint 18, a second three-way joint 19, a vacuum gauge 20 for detecting the vacuum degree in the vacuuming pipeline, and a third pneumatic valve 21 are sequentially provided on the vacuuming pipeline; the gas detection section includes a pump suction type alarm instrument 22 connected to the third end of the first three-way joint 18 and a helium mass spectrometer leak detector 23 connected to the third end of the second three-way joint 19. Through the above settings, vacuuming treatment of the pressure maintaining pipeline 2 and detection of the gas in the pressure maintaining pipeline can be realized; the gas detector in the pump suction type alarm instrument 22 is the same as the product gas in the gas cylinder: for example, when the product gas in the gas cylinder is carbon monoxide, the pump suction type alarm instrument 22 is a CO gas detector.

[0052] Further, a fourth pneumatic valve 24 is provided between the third end of the first three-way joint 18 and the pump suction type alarm instrument 22; a fifth pneumatic valve 25 is provided between the third end of the second three-way joint 19 and the helium mass spectrometer leak detector 23.

[0053] The present invention also includes a PLC control system 26. The signal input terminals of the PLC control system 26 are respectively connected to a pipeline pressure sensor 5, a pipeline temperature sensor 6, a chamber body pressure sensor 7, an oxygen content meter 8, a helium gas pressure sensor 12, an inert gas pressure sensor 15, a vacuum gauge 20, a pump suction type alarm instrument 22, and a helium mass spectrometer leak detector 23; the signal output terminals of the PLC control system 26 are respectively connected to a first pneumatic valve 11, a second pneumatic valve 14, a third pneumatic valve 21, a fourth pneumatic valve 24, a fifth pneumatic valve 25, a vacuuming device 3, a vacuum gauge 20, and a pipeline vacuuming device 9; a pipeline temperature sensor 6 is also provided on the pressure maintaining pipeline 2.

[0054] A pressure-holding leak detection method for a gas cylinder pressure-holding leak detection device, the pressure-holding leak detection method comprising: a positive-pressure airtightness test of the bottle valve interface, a negative-pressure airtightness test of the bottle valve interface, an alarm instrument detection test, and a helium mass spectrometer leak detection test; the positive-pressure airtightness test of the bottle valve interface is used to detect whether the gas in the pressure-holding pipeline 2 leaks into the vacuum chamber body 1 through the bottle valve and whether the gas in the gas cylinder enters the pressure-holding pipeline 2; the negative-pressure airtightness test of the bottle valve interface is used to detect whether there is gas in the gas cylinder or the vacuum chamber body 1 entering the pressure-holding pipeline 2 through the bottle valve interface; the alarm instrument detection test is used to detect whether there is gas in the gas cylinder entering the pressure-holding pipeline 2 through the bottle valve interface; the helium mass spectrometer leak detection test is used to detect whether the gas in the vacuum chamber body 1 leaks into the pressure-holding pipeline 2 through the bottle valve. In the present invention, the above methods can be used crosswise to improve the accuracy of the pressure-holding leak detection of the gas cylinder. The above four methods can be used all together, or at least one of them can be selected for use; specifically, the positive-pressure airtightness test of the bottle valve interface described in the present invention is used to detect whether the bottle valve leaks and the airtightness condition, and the negative-pressure airtightness test of the bottle valve interface is used to detect whether the bottle valve leaks and the airtightness condition (the detection method of the negative-pressure airtightness test of the bottle valve interface is the same as that of the positive-pressure airtightness test of the bottle valve interface). The alarm instrument detection test is mainly used to detect whether the bottle valve leaks, and the helium mass spectrometer leak detection test is mainly used to detect the airtightness of the bottle valve; the present invention can perform batch operations to detect the gas cylinders. When there is no problem in a batch, it can be determined that the whole batch is qualified; when there is a problem in a batch, the batch can be split and detected separately to determine the specific bottle valve with problems. The above method can effectively improve the detection efficiency and at the same time ensure the detection accuracy.

[0055] Further, the positive-pressure airtightness test of the bottle valve interface, the negative-pressure airtightness test of the bottle valve interface, the alarm instrument detection test, and the helium mass spectrometer leak detection test respectively include the following steps:

[0056] The positive-pressure airtightness test of the bottle valve interface includes the following steps:

[0057] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0058] Step 2: Fill the test gas into the pressure-holding pipeline 2 so that the gas pressure in the pressure-holding pipeline 2 is greater than the pressure in the vacuum chamber body 1 and less than the pressure in the gas cylinder; the bottle valve of the gas cylinder is in a closed state;

[0059] Step 3: Detect whether there is a fluctuation in the gas pressure in the pressure-holding pipeline 2 through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects a decrease in the gas pressure in the pressure-holding pipeline 2, it proves that the gas in the pressure-holding pipeline 2 leaks into the vacuum chamber body 1 through the bottle valve, that is, the airtightness of the bottle valve is poor; when the pipeline pressure sensor 5 detects an increase in the gas pressure in the pressure-holding pipeline 2, it proves that the gas in the gas cylinder enters the pressure-holding pipeline 2, that is, there is a leakage in the bottle valve; when the pipeline pressure sensor 5 detects that the gas in the pressure-holding pipeline 2 does not change, it proves that the airtightness of the bottle valve is good and there will be no leakage phenomenon;

[0060] Step 4: After the above detection, recover the test gas in the pressure-holding pipeline 2, or use the pipeline vacuuming device 9 to evacuate the air;

[0061] The negative pressure airtightness test of the bottle valve interface includes the following steps:

[0062] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0063] Step 2: Open the second pneumatic valve 14, and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network 13 enters the pressure-holding pipeline 2 for gas replacement. After replacement, close the second pneumatic valve 14 and relieve the pressure. Finally, use the pipeline vacuuming device 9 to evacuate the pressure-holding pipeline 2, and determine the vacuum degree in the pressure-holding pipeline 2 through the vacuum gauge 20;

[0064] Step 3: The bottle valve of the gas cylinder is in the closed state, the pressure in the gas cylinder is greater than the pressure in the vacuum chamber body 1, and the pressure in the vacuum chamber body 1 is greater than the pressure in the pressure-holding pipeline 2; the bottle valve of the gas cylinder is in the closed state;

[0065] Step 4: Detect whether the gas pressure in the pressure-holding pipeline 2 rises through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects an increase in the gas pressure in the pressure-holding pipeline 2, it proves that the gas in the vacuum chamber body 1 or the gas cylinder enters the pressure-holding pipeline 2, that is, there is a leakage or poor airtightness in the bottle valve;

[0066] When the pipeline pressure sensor 5 detects that the gas pressure in the pressure-holding pipeline 2 remains unchanged, the airtightness of the bottle valve is good and there will be no leakage phenomenon;

[0067] The alarm instrument detection test includes the following steps:

[0068] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0069] Step 2: Open the second pneumatic valve 14, and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network 13 enters the pressure-holding pipeline 2 for gas replacement. After replacement, close the second pneumatic valve 14 and relieve the pressure to make the pressure in the pressure-holding pipeline 2 consistent with the pressure in the vacuum chamber body 1;

[0070] Step 3: The bottle valve of the gas cylinder is in the closed state, and the pressure in the gas cylinder is greater than the pressure in the vacuum chamber body 1;

[0071] Step 4: The PLC control system 26 controls the fourth pneumatic valve 24 to open and starts the pump-suction type alarm instrument 22; the gas in the gas cylinder in Step 1 is the same as the gas detected by the pump-suction type alarm instrument 22;

[0072] When the pump-suction type alarm instrument 22 detects the gas in the pressure-holding pipeline 2 and detects that the gas in the pressure-holding pipeline 2 contains the components of the gas in the gas cylinder, it indicates that there is a leakage in the bottle valve;

[0073] When the gas detected in the pressure-holding pipeline 2 does not contain the components of the gas in the gas cylinder, it indicates that there is no leakage in the bottle valve;

[0074] The helium mass spectrometer leak detection test includes the following steps:

[0075] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0076] Step 2: Start the vacuum pumping device 3 to evacuate the vacuum chamber body 1. When the preset vacuum value is reached, close the vacuum pumping device 3 and open the first pneumatic valve 11 to allow the helium gas in the helium gas cylinder or helium gas pipeline network 10 to enter the vacuum chamber body 1;

[0077] Step 3: The bottle valve of the gas cylinder is in the closed state, the pressure in the vacuum chamber body 1 is greater than the pressure in the pressure-holding pipeline 2, and the pressure in the vacuum chamber body 1 is less than the pressure in the gas cylinder;

[0078] Step 4: The PLC control system 26 controls the fifth pneumatic valve 25 to open and starts the helium mass spectrometer leak detector 23;

[0079] When the helium mass spectrometer leak detector 23 detects the gas in the pressure-holding pipeline 2 and detects that the gas in the pressure-holding pipeline 2 contains helium gas components, it indicates that there is a poor airtightness in the bottle valve;

[0080] When the gas detected in the pressure-holding pipeline 2 does not contain helium gas components, it indicates that the airtightness of the bottle valve is good.

[0081] When specifically using the present invention, the positive pressure airtightness test or the negative pressure airtightness test of the bottle valve interface can be used alone, or the positive pressure airtightness test or the negative pressure airtightness test of the bottle valve interface can be used in combination for cross-verification, or the negative pressure airtightness test of the bottle valve interface can be combined with the alarm instrument detection test, or the negative pressure airtightness test of the bottle valve interface can be combined with the helium mass spectrometer leak detection test; or the positive pressure airtightness test of the bottle valve interface can be combined with the alarm instrument detection test, or the positive pressure airtightness test of the bottle valve interface can be combined with the alarm instrument detection test and the helium mass spectrometer leak detection test. It should be noted that: for different products in the gas cylinder, the standards for leakage and airtightness are different; usually, 1.0×10 -7 mbar·I / s is used as the dividing line. When the leakage rate is greater than 1.0×10 -7 mbar·I / s, it is leakage; when the leakage rate is equal to or less than 1.0×10 - 7 mbar·I / s, the airtightness is poor; especially when using the negative pressure airtightness test of the bottle valve interface, when unqualified conditions occur, the alarm instrument detection test and / or the helium mass spectrometer leak detection test can be used in combination to determine the specific leakage situation or airtightness problem of the bottle valve; when the bottle valve leaks, repair or replacement can be selected. If there is an airtightness problem, maintenance can be carried out on its thread to prevent the gas cylinder from leaking product gas and entering the market.

[0082] Further, after the test is completed and personnel need to enter, the ventilation motor 17 is turned on, and the oxygen content meter 8 continuously detects the oxygen content in the vacuum chamber body 1. When the oxygen content reaches the human entry standard, the chamber door with the electric control lock 16 is opened. To ensure the safety of the personnel entering the vacuum chamber body 1, before the personnel enter the vacuum chamber body 1, first turn on the ventilation motor 17. When the ventilation motor 17 is turned on, the oxygen content meter 8 continuously detects the oxygen content in the vacuum chamber body 1. When the oxygen content meets the human entry standard, the electric control lock 16 is opened, and the personnel enter the vacuum chamber body 1 through the chamber door for operation.

[0083] To more clearly explain the present invention, it will be further described below in conjunction with specific embodiments. The specific embodiments are as follows:

[0084] Embodiment 1

[0085] A gas cylinder pressure-holding leak detection device includes a vacuum chamber body 1, and a pressure-holding pipeline 2 is arranged inside the vacuum chamber body 1; the vacuum chamber body 1 is provided with a vacuum pumping device 3, a vacuum chamber detection unit, and a helium filling pipeline part; the pressure-holding pipeline 2 is provided with a plurality of gas cylinder connectors 4 and a pipeline pressure sensor 5, and a pressure-holding pipeline detection unit is arranged outside the vacuum chamber body 1. The pressure-holding pipeline 2 is also connected to a non-helium inert gas filling pipeline part; the vacuum chamber detection unit includes a chamber pressure sensor 7 for detecting the internal pressure of the vacuum chamber body 1, and an oxygen content analyzer 8 for detecting the oxygen content inside the vacuum chamber body 1; the pressure-holding pipeline detection unit at least includes a pipeline vacuum pumping device 9 for evacuating the pressure-holding pipeline 2, and a gas detection part for detecting whether other gases leak into the pressure-holding pipeline 2. The helium filling pipeline part includes a helium gas cylinder or a helium gas pipeline network 10, and the helium gas cylinder or the helium gas pipeline network 10 is connected to the vacuum chamber body 1 through a pipeline. A first pneumatic valve 11 and a helium gas pressure sensor 12 are arranged on the pipeline. The non-helium inert gas filling pipeline part includes an inert gas cylinder or an inert gas pipeline network 13, and the inert gas cylinder or the inert gas pipeline network 13 is connected to the pressure-holding pipeline 2 through a pipeline. A second pneumatic valve 14 and an inert gas pressure sensor 15 are arranged on the pipeline. The vacuum chamber body 1 is provided with a chamber door with an electric control lock 16, and the vacuum chamber body 1 is provided with a ventilation pipeline with a ventilation motor 17. The pressure-holding pipeline 2 is connected to the pipeline vacuum pumping device 9 through a vacuum pumping pipeline. A first three-way joint 18, a second three-way joint 19, a vacuum gauge 20 for detecting the vacuum degree in the vacuum pumping pipeline, and a third pneumatic valve 21 are arranged in sequence on the vacuum pumping pipeline; the gas detection part includes a pump suction type alarm instrument 22 connected to the third end of the first three-way joint 18, and a helium mass spectrometer leak detector 23 connected to the third end of the second three-way joint 19. A fourth pneumatic valve 24 is arranged between the third end of the first three-way joint 18 and the pump suction type alarm instrument 22; a fifth pneumatic valve 25 is arranged between the third end of the second three-way joint 19 and the helium mass spectrometer leak detector 23. It also includes a PLC control system 26. The signal input ends of the PLC control system 26 are respectively connected to the pipeline pressure sensor 5, the pipeline temperature sensor 6, the chamber pressure sensor 7, the oxygen content analyzer 8, the helium gas pressure sensor 12, the inert gas pressure sensor 15, the vacuum gauge 20, the pump suction type alarm instrument 22, and the helium mass spectrometer leak detector 23; the signal output ends of the PLC control system 26 are respectively connected to the first pneumatic valve 11, the second pneumatic valve 14, the third pneumatic valve 21, the fourth pneumatic valve 24, the fifth pneumatic valve 25, the vacuum pumping device 3, the vacuum gauge 20, and the pipeline vacuum pumping device 9; a pipeline temperature sensor 6 is also arranged on the pressure-holding pipeline 2.

[0086] A pressure-holding leak detection method for a gas cylinder pressure-holding leak detection device. This pressure-holding leak detection method is a positive pressure airtightness test for the bottle valve interface, and includes the following steps:

[0087] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder connector 4 in the pressure-holding pipeline 2;

[0088] Step 2: Fill the pressure-holding pipeline 2 with test gas so that the gas pressure in the pressure-holding pipeline 2 is greater than the pressure in the vacuum chamber body 1 and less than the pressure in the gas cylinder; the bottle valve of the gas cylinder is in a closed state.

[0089] Step 3: Detect whether the gas pressure in the pressure-holding pipeline 2 fluctuates through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects that the gas pressure in the pressure-holding pipeline 2 drops, it proves that the gas in the pressure-holding pipeline 2 leaks into the vacuum chamber body 1 through the bottle valve, that is, the airtightness of the bottle valve is poor; at this time, check and maintain the poor airtightness of the bottle valve.

[0090] Step 4: After the above detection, recover the test gas in the pressure-holding pipeline 2 or evacuate it by using the pipeline vacuum device 9.

[0091] Embodiment 2

[0092] A gas cylinder pressure-holding leak detection device has the same structure as that in Embodiment 1;

[0093] A pressure-holding leak detection method for a gas cylinder pressure-holding leak detection device. This pressure-holding leak detection method is a positive pressure airtightness test for the bottle valve interface, including the following steps:

[0094] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0095] Step 2: Fill the pressure-holding pipeline 2 with test gas so that the gas pressure in the pressure-holding pipeline 2 is greater than the pressure in the vacuum chamber body 1 and less than the pressure in the gas cylinder; the bottle valve of the gas cylinder is in a closed state.

[0096] Step 3: Detect whether the gas pressure in the pressure-holding pipeline 2 fluctuates through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects that the gas pressure in the pressure-holding pipeline 2 rises, it proves that the gas in the gas cylinder enters the pressure-holding pipeline 2, that is, there is a leakage situation in the bottle valve; at this time, check, maintain or replace the problem of leakage in the bottle valve.

[0097] Step 4: After the above detection, recover the test gas in the pressure-holding pipeline 2 or evacuate it by using the pipeline vacuum device 9.

[0098] Embodiment 3

[0099] A gas cylinder pressure-holding leak detection device has the same structure as that in Embodiment 1;

[0100] A pressure-holding leak detection method for a gas cylinder pressure-holding leak detection device. This pressure-holding leak detection method is a positive pressure airtightness test for the bottle valve interface, including the following steps:

[0101] Step 1: Connect the cylinder valve of the gas cylinder to the filling row of the cylinder joint 4 in the pressure-holding pipeline 2;

[0102] Step 2: Fill the test gas into the pressure-holding pipeline 2 so that the gas pressure in the pressure-holding pipeline 2 is greater than the pressure in the vacuum chamber body 1 and less than the pressure in the gas cylinder at the same time; the cylinder valve of the gas cylinder is in a closed state;

[0103] Step 3: Detect whether the gas pressure in the pressure-holding pipeline 2 fluctuates through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects that the gas in the pressure-holding pipeline 2 does not change, it proves that the airtightness of the cylinder valve is good and there will be no leakage phenomenon;

[0104] Step 4: After the above detection, recover the test gas in the pressure-holding pipeline 2 or perform vacuum pumping using the pipeline vacuum pumping device 9.

[0105] Example 4

[0106] A gas cylinder pressure-holding leak detection device has the same structure as that in Example 1;

[0107] A pressure-holding leak detection method for a gas cylinder pressure-holding leak detection device, the pressure-holding leak detection method includes: positive pressure airtightness test of the cylinder valve interface, negative pressure airtightness test of the cylinder valve interface;

[0108] The positive pressure airtightness test of the cylinder valve interface includes the following steps:

[0109] Step 1: Connect the cylinder valve of the gas cylinder to the filling row of the cylinder joint 4 in the pressure-holding pipeline 2;

[0110] Step 2: Fill the test gas into the pressure-holding pipeline 2 so that the gas pressure in the pressure-holding pipeline 2 is greater than the pressure in the vacuum chamber body 1 and less than the pressure in the gas cylinder at the same time; the cylinder valve of the gas cylinder is in a closed state;

[0111] Step 3: Detect whether the gas pressure in the pressure-holding pipeline 2 fluctuates through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects that the gas in the pressure-holding pipeline 2 does not change, it proves that the airtightness of the cylinder valve is good and there will be no leakage phenomenon;

[0112] Step 4: After the above detection, recover the test gas in the pressure-holding pipeline 2 or perform vacuum pumping using the pipeline vacuum pumping device 9;

[0113] The negative pressure airtightness test of the cylinder valve interface includes the following steps:

[0114] Step 1: Connect the cylinder valve of the gas cylinder to the filling row of the cylinder joint 4 in the pressure-holding pipeline 2;

[0115] Step 2: Open the second pneumatic valve 14, and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network 13 enters the pressure-holding pipeline 2 for gas replacement. After replacement, close the second pneumatic valve 14 and relieve the pressure. Finally, use the pipeline vacuum pump 9 to evacuate the pressure-holding pipeline 2, and determine the vacuum degree inside the pressure-holding pipeline 2 through the vacuum gauge 20;

[0116] Step 3: The bottle valve of the gas cylinder is in the closed state. The pressure inside the gas cylinder is greater than the pressure in the vacuum chamber body 1, and the pressure in the vacuum chamber body 1 is greater than the pressure inside the pressure-holding pipeline 2; the bottle valve of the gas cylinder is in the closed state;

[0117] Step 4: Use the pipeline pressure sensor 5 to detect whether the gas pressure inside the pressure-holding pipeline 2 rises. When the pipeline pressure sensor 5 detects that the gas pressure inside the pressure-holding pipeline 2 remains unchanged, the airtightness of the bottle valve is good and there will be no leakage phenomenon.

[0118] Through the above cross-verification, it is proved that the airtightness of the bottle valve is good and there will be no leakage phenomenon.

[0119] Example 5

[0120] A gas cylinder pressure-holding leak detection device has the same structure as that in Example 1;

[0121] A pressure-holding leak detection method for a gas cylinder pressure-holding leak detection device, the pressure-holding leak detection method includes: positive pressure airtightness test of the bottle valve interface, negative pressure airtightness test of the bottle valve interface, and alarm instrument detection test;

[0122] The positive pressure airtightness test of the bottle valve interface includes the following steps:

[0123] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0124] Step 2: Fill the test gas into the pressure-holding pipeline 2 so that the gas pressure inside the pressure-holding pipeline 2 is greater than the pressure in the vacuum chamber body 1 and less than the pressure inside the gas cylinder at the same time; the bottle valve of the gas cylinder is in the closed state;

[0125] Step 3: Use the pipeline pressure sensor 5 to detect whether the gas pressure inside the pressure-holding pipeline 2 fluctuates. When the pipeline pressure sensor 5 detects that the gas pressure inside the pressure-holding pipeline 2 rises, it proves that the gas inside the gas cylinder enters the pressure-holding pipeline 2, that is, there is a leakage situation in the bottle valve;

[0126] Step 4: After the above detection, recover the test gas inside the pressure-holding pipeline 2, or use the pipeline vacuum pump 9 to evacuate it;

[0127] The negative pressure airtightness test of the bottle valve interface includes the following steps:

[0128] Step 1: Connect the cylinder valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0129] Step 2: Open the second pneumatic valve 14, and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network 13 enters the pressure-holding pipeline 2 for gas replacement. After replacement, close the second pneumatic valve 14 and relieve the pressure. Finally, use the pipeline vacuum pumping device 9 to vacuum the pressure-holding pipeline 2, and determine the vacuum degree in the pressure-holding pipeline 2 through the vacuum gauge 20;

[0130] Step 3: The cylinder valve of the gas cylinder is in the closed state. The pressure in the gas cylinder is greater than the pressure in the vacuum chamber body 1, and the pressure in the vacuum chamber body 1 is greater than the pressure in the pressure-holding pipeline 2; the cylinder valve of the gas cylinder is in the closed state;

[0131] Step 4: Detect whether the gas pressure in the pressure-holding pipeline 2 rises through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects that the gas pressure in the pressure-holding pipeline 2 rises, it proves that the gas in the vacuum chamber body 1 or the gas cylinder enters the pressure-holding pipeline 2, that is, there is a leakage or poor airtightness of the cylinder valve;

[0132] The alarm instrument detection test includes the following steps:

[0133] Step 1: Connect the cylinder valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0134] Step 2: Open the second pneumatic valve 14, and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network 13 enters the pressure-holding pipeline 2 for gas replacement. After replacement, close the second pneumatic valve 14 and relieve the pressure to make the pressure in the pressure-holding pipeline 2 consistent with the pressure in the vacuum chamber body 1;

[0135] Step 3: The cylinder valve of the gas cylinder is in the closed state, and the pressure in the gas cylinder is greater than the pressure in the vacuum chamber body 1;

[0136] Step 4: The PLC control system 26 controls the fourth pneumatic valve 24 to open and starts the pump-suction type alarm instrument 22; the gas in the gas cylinder in Step 1 is the same as the gas detected by the pump-suction type alarm instrument 22;

[0137] Step 5: When the pump-suction type alarm instrument 22 detects the gas in the pressure-holding pipeline 2 and detects that the gas in the pressure-holding pipeline 2 contains the components of the gas in the gas cylinder, it indicates that there is a leakage in the cylinder valve.

[0138] Through the above cross-verification, it is proved that there is a leakage in the cylinder valve, so inspection, maintenance or replacement is required.

[0139] Example 6

[0140] A gas cylinder pressure-holding leak detection device has the same structure as that in Example 1;

[0141] A pressure-holding leak detection method for a gas cylinder pressure-holding leak detection device. The pressure-holding leak detection method includes: the positive pressure airtightness test of the bottle valve interface, the negative pressure airtightness test of the bottle valve interface, and the helium mass spectrometer leak detection test, which respectively include the following steps:

[0142] The positive pressure airtightness test of the bottle valve interface includes the following steps:

[0143] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0144] Step 2: Fill the test gas into the pressure-holding pipeline 2 so that the gas pressure in the pressure-holding pipeline 2 is greater than the pressure in the vacuum chamber body 1 and less than the pressure in the gas cylinder at the same time; the bottle valve of the gas cylinder is in the closed state;

[0145] Step 3: Detect whether the gas pressure in the pressure-holding pipeline 2 fluctuates through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects that the gas pressure in the pressure-holding pipeline 2 drops, it proves that the gas in the pressure-holding pipeline 2 leaks to the vacuum chamber body 1 through the bottle valve, that is, the airtightness of the bottle valve is poor;

[0146] Step 4: After the above detection, recover the test gas in the pressure-holding pipeline 2, or use the pipeline vacuum device 9 to evacuate it;

[0147] The negative pressure airtightness test of the bottle valve interface includes the following steps:

[0148] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0149] Step 2: Open the second pneumatic valve 14, and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network 13 enters the pressure-holding pipeline 2 for gas replacement. After replacement, close the second pneumatic valve 14 and relieve the pressure. Finally, use the pipeline vacuum device 9 to evacuate the pressure-holding pipeline 2, and determine the vacuum degree in the pressure-holding pipeline 2 through the vacuum gauge 20;

[0150] Step 3: The bottle valve of the gas cylinder is in the closed state, the pressure in the gas cylinder is greater than the pressure in the vacuum chamber body 1, and the pressure in the vacuum chamber body 1 is greater than the pressure in the pressure-holding pipeline 2; the bottle valve of the gas cylinder is in the closed state;

[0151] Step 4: Detect whether the gas pressure in the pressure-holding pipeline 2 rises through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects that the gas pressure in the pressure-holding pipeline 2 rises, it proves that the gas in the vacuum chamber body 1 or the gas cylinder enters the pressure-holding pipeline 2, that is, there is a leakage or poor airtightness of the bottle valve;

[0152] The helium mass spectrometer leak detection test includes the following steps:

[0153] Step 1: Connect the cylinder valve of the gas cylinder to the filling row of the gas cylinder connector 4 in the pressure-holding pipeline 2;

[0154] Step 2: Start the vacuum pumping device 3 to evacuate the vacuum chamber body 1. When the preset vacuum value is reached, turn off the vacuum pumping device 3 and open the first pneumatic valve 11 to allow helium gas in the helium gas cylinder or helium gas pipeline network 10 to enter the vacuum chamber body 1;

[0155] Step 3: The cylinder valve is in a closed state. The pressure in the vacuum chamber body 1 is greater than the pressure in the pressure-holding pipeline 2, and the pressure in the vacuum chamber body 1 is less than the pressure inside the gas cylinder;

[0156] Step 4: The PLC control system 26 controls the fifth pneumatic valve 25 to open and starts the helium mass spectrometer leak detector 23;

[0157] Step 5: When the helium mass spectrometer leak detector 23 detects the gas in the pressure-holding pipeline 2 and detects that the gas in the pressure-holding pipeline 2 contains helium components, it indicates that there is a problem with the airtightness of the cylinder valve.

[0158] After the test, when personnel need to enter, turn on the ventilation motor 17. The oxygen content meter 8 continuously detects the oxygen content in the vacuum chamber body 1. When the oxygen content reaches the standard for human entry, the chamber door with the electric control lock 16 is opened.

[0159] Through the above cross-verification, it is proved that there is a leakage problem with the cylinder valve. Therefore, inspection, maintenance or replacement is required.

[0160] Embodiment 7

[0161] A pressure-holding leak detection device for gas cylinders has the same structure as that in Embodiment 1;

[0162] A pressure-holding leak detection method for a pressure-holding leak detection device for gas cylinders, the pressure-holding leak detection method includes a negative pressure airtightness test for the cylinder valve interface and an alarm detector test;

[0163] The negative pressure airtightness test for the cylinder valve interface includes the following steps:

[0164] Step 1: Connect the cylinder valve of the gas cylinder to the filling row of the gas cylinder connector 4 in the pressure-holding pipeline 2;

[0165] Step 2: Open the second pneumatic valve 14, and non-helium inert gas in the inert gas cylinder or inert gas pipeline network 13 enters the pressure-holding pipeline 2 for gas replacement. After replacement, close the second pneumatic valve 14 and relieve the pressure. Finally, use the pipeline vacuum pumping device 9 to evacuate the pressure-holding pipeline 2, and determine the vacuum degree inside the pressure-holding pipeline 2 through the vacuum gauge 20;

[0166] Step 3: The bottle valve of the gas cylinder is in the closed state, the pressure inside the gas cylinder is greater than the pressure in the vacuum chamber body 1, and the pressure in the vacuum chamber body 1 is greater than the pressure in the pressure maintaining pipeline 2; the bottle valve of the gas cylinder is in the closed state;

[0167] Step 4: Detect whether the gas pressure in the pressure maintaining pipeline 2 rises through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects that the gas pressure in the pressure maintaining pipeline 2 rises, it proves that the gas in the vacuum chamber body 1 or the gas cylinder enters the pressure maintaining pipeline 2, that is, there is a leakage or poor airtightness of the bottle valve;

[0168] The alarm instrument detection test includes the following steps:

[0169] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure maintaining pipeline 2;

[0170] Step 2: Open the second pneumatic valve 14, and the non-helium inert gas in the inert gas cylinder or the inert gas pipeline network 13 enters the pressure maintaining pipeline 2 for gas replacement. After replacement, close the second pneumatic valve 14 and relieve the pressure to make the pressure in the pressure maintaining pipeline 2 consistent with the pressure in the vacuum chamber body 1;

[0171] Step 3: The bottle valve of the gas cylinder is in the closed state, and the pressure inside the gas cylinder is greater than the pressure in the vacuum chamber body 1;

[0172] Step 4: The PLC control system 26 controls the fourth pneumatic valve 24 to open and starts the pump suction type alarm instrument 22; the gas in the gas cylinder in Step 1 is the same as the gas detected by the pump suction type alarm instrument 22;

[0173] Step 5: When the pump suction type alarm instrument 22 detects the gas in the pressure maintaining pipeline 2, if the gas detected in the pressure maintaining pipeline 2 does not contain the components of the gas in the gas cylinder, it indicates that there is no leakage in the bottle valve.

[0174] Through the above cross-verification, it is proved that there is no leakage in the bottle valve, but there is a defect of poor airtightness. Therefore, it is necessary to check and maintain the bottle valve.

[0175] Example 8

[0176] A gas cylinder pressure maintaining leak detection device has the same structure as that in Example 1;

[0177] A pressure maintaining leak detection method for a gas cylinder pressure maintaining leak detection device, the pressure maintaining leak detection method includes: negative pressure airtightness test of the bottle valve interface, alarm instrument detection test, and helium mass spectrometer leak detection test;

[0178] The negative pressure airtightness test of the bottle valve interface includes the following steps:

[0179] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure maintaining pipeline 2;

[0180] Step 2: Open the second pneumatic valve 14, and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network 13 enters the pressure-holding pipeline 2 for gas replacement. After replacement, close the second pneumatic valve 14 and relieve the pressure. Finally, use the pipeline vacuum pump 9 to evacuate the pressure-holding pipeline 2, and determine the vacuum degree inside the pressure-holding pipeline 2 through the vacuum gauge 20;

[0181] Step 3: The bottle valve of the gas cylinder is in the closed state. The pressure inside the gas cylinder is greater than the pressure inside the vacuum chamber body 1, and the pressure inside the vacuum chamber body 1 is greater than the pressure inside the pressure-holding pipeline 2; the bottle valve of the gas cylinder is in the closed state;

[0182] Step 4: Detect whether the gas pressure inside the pressure-holding pipeline 2 rises through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects that the gas pressure inside the pressure-holding pipeline 2 rises, it proves that the gas in the vacuum chamber body 1 or the gas cylinder enters the pressure-holding pipeline 2, that is, there is a leakage or poor airtightness of the bottle valve;

[0183] The detection test of the alarm instrument includes the following steps:

[0184] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0185] Step 2: Open the second pneumatic valve 14, and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network 13 enters the pressure-holding pipeline 2 for gas replacement. After replacement, close the second pneumatic valve 14 and relieve the pressure to make the pressure in the pressure-holding pipeline 2 consistent with the pressure in the vacuum chamber body 1;

[0186] Step 3: The bottle valve of the gas cylinder is in the closed state, and the pressure inside the gas cylinder is greater than the pressure inside the vacuum chamber body 1;

[0187] Step 4: The PLC control system 26 controls the fourth pneumatic valve 24 to open and starts the pump-suction type alarm instrument 22; the gas inside the gas cylinder in Step 1 is the same as the gas detected by the pump-suction type alarm instrument 22;

[0188] Step 5: When the pump-suction type alarm instrument 22 detects the gas in the pressure-holding pipeline 2 and detects that the gas in the pressure-holding pipeline 2 contains the components of the gas in the gas cylinder, it indicates that there is a leakage in the bottle valve;

[0189] The detection test of the helium mass spectrometer leak detector includes the following steps:

[0190] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0191] Step 2: Start the vacuum pumping device 3 to pump the vacuum chamber body 1. When the preset vacuum value is reached, close the vacuum pumping device 3 and open the first pneumatic valve 11 to allow the helium gas in the helium gas cylinder or helium gas pipeline network 10 to enter the vacuum chamber body 1;

[0192] Step 3: The bottle valve of the gas cylinder is in the closed state. The pressure in the vacuum chamber body 1 is greater than the pressure in the pressure maintaining pipeline 2, and the pressure in the vacuum chamber body 1 is less than the pressure inside the gas cylinder;

[0193] Step 4: The PLC control system 26 controls the fifth pneumatic valve 25 to open and starts the helium mass spectrometer leak detector 23;

[0194] Step 5: When the helium mass spectrometer leak detector 23 detects the gas in the pressure maintaining pipeline 2 and finds that the gas in the pressure maintaining pipeline 2 does not contain helium components, it indicates that the airtightness of the bottle valve is good.

[0195] After the test, when personnel need to enter, turn on the ventilation motor 17. The oxygen content meter 8 continuously detects the oxygen content in the vacuum chamber body 1. When the oxygen content reaches the standard for human entry, the chamber door with the electric control lock 16 is opened.

[0196] Through the above cross-verification, it is proved that there is a leakage situation in the bottle valve and there is no defect of poor airtightness. Therefore, it is necessary to check, maintain or replace the bottle valve.

[0197] Example 9

[0198] A pressure maintaining leak detection device for a gas cylinder has the same structure as that in Example 1;

[0199] A pressure maintaining leak detection method for a pressure maintaining leak detection device for a gas cylinder, the pressure maintaining leak detection method includes: negative pressure airtightness test of the bottle valve interface, alarm instrument detection test and helium mass spectrometer leak detector detection test;

[0200] The negative pressure airtightness test of the bottle valve interface includes the following steps:

[0201] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure maintaining pipeline 2;

[0202] Step 2: Open the second pneumatic valve 14 to allow the non-helium inert gas in the inert gas cylinder or inert gas pipeline network 13 to enter the pressure maintaining pipeline 2 for gas replacement. After replacement, close the second pneumatic valve 14 and relieve the pressure. Finally, use the pipeline vacuum pumping device 9 to pump the pressure maintaining pipeline 2 and determine the vacuum degree in the pressure maintaining pipeline 2 through the vacuum gauge 20;

[0203] Step 3: The bottle valve of the gas cylinder is in the closed state. The pressure inside the gas cylinder is greater than the pressure in the vacuum chamber body 1, and the pressure in the vacuum chamber body 1 is greater than the pressure in the pressure maintaining pipeline 2; The bottle valve of the gas cylinder is in the closed state;

[0204] Step 4: Detect whether the gas pressure in the pressure-holding pipeline 2 rises through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects that the gas pressure in the pressure-holding pipeline 2 remains unchanged, the airtightness of the bottle valve is good and there will be no leakage phenomenon.

[0205] The detection test of the alarm instrument includes the following steps:

[0206] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2.

[0207] Step 2: Open the second pneumatic valve 14, and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network 13 enters the pressure-holding pipeline 2 for gas replacement. After replacement, close the second pneumatic valve 14 and relieve the pressure to make the pressure in the pressure-holding pipeline 2 consistent with the pressure in the vacuum chamber body 1.

[0208] Step 3: The bottle valve of the gas cylinder is in the closed state, and the pressure in the gas cylinder is greater than the pressure in the vacuum chamber body 1.

[0209] Step 4: The PLC control system 26 controls the fourth pneumatic valve 24 to open and starts the pump-suction type alarm instrument 22; the gas in the gas cylinder in Step 1 is the same as the gas detected by the pump-suction type alarm instrument 22.

[0210] Step 5: When the pump-suction type alarm instrument 22 detects the gas in the pressure-holding pipeline 2 and detects that the gas in the pressure-holding pipeline 2 does not contain the components of the gas in the gas cylinder, it indicates that there is no leakage in the bottle valve.

[0211] The detection test of the helium mass spectrometer leak detector includes the following steps:

[0212] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2.

[0213] Step 2: Start the vacuum pumping device 3 to evacuate the vacuum chamber body 1. When the preset vacuum value is reached, close the vacuum pumping device 3 and open the first pneumatic valve 11 to make the helium gas in the helium gas cylinder or helium gas pipeline network 10 enter the vacuum chamber body 1.

[0214] Step 3: The bottle valve of the gas cylinder is in the closed state, the pressure in the vacuum chamber body 1 is greater than the pressure in the pressure-holding pipeline 2, and the pressure in the vacuum chamber body 1 is less than the pressure in the gas cylinder.

[0215] Step 4: The PLC control system 26 controls the fifth pneumatic valve 25 to open and starts the helium mass spectrometer leak detector 23.

[0216] Step 5: When the helium mass spectrometer leak detector 23 detects the gas in the pressure-holding pipeline 2 and detects that the gas in the pressure-holding pipeline 2 does not contain helium gas components, it indicates that the airtightness of the bottle valve is good.

[0217] After the test ends and personnel need to enter, turn on the ventilation motor 17. The oxygen content meter 8 detects the oxygen content in the vacuum chamber body 1 in real time. When the oxygen content reaches the standard for human entry, the chamber door with the electric control lock 16 is opened.

[0218] Through the above cross-verification, it is proved that there is no leakage in the bottle valve and the airtightness is good.

[0219] Example 10

[0220] A gas cylinder pressure-holding leak detection device has the same structure as that in Example 1;

[0221] A pressure-holding leak detection method for a gas cylinder pressure-holding leak detection device, the pressure-holding leak detection method includes: the positive pressure airtightness test of the bottle valve interface and the helium mass spectrometer leak detection test respectively include the following steps:

[0222] The positive pressure airtightness test of the bottle valve interface includes the following steps:

[0223] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0224] Step 2: Fill the test gas into the pressure-holding pipeline 2 so that the gas pressure in the pressure-holding pipeline 2 is greater than the pressure in the vacuum chamber body 1 and less than the pressure in the gas cylinder; the bottle valve of the gas cylinder is in a closed state;

[0225] Step 3: Detect whether the gas pressure in the pressure-holding pipeline 2 fluctuates through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects that the gas pressure in the pressure-holding pipeline 2 drops, it proves that the gas in the pressure-holding pipeline 2 leaks to the vacuum chamber body 1 through the bottle valve, that is, the airtightness of the bottle valve is poor;

[0226] Step 4: After the above detection is completed, recover the test gas in the pressure-holding pipeline 2, or use the pipeline vacuum device 9 to evacuate it;

[0227] The helium mass spectrometer leak detection test includes the following steps:

[0228] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0229] Step 2: Start the vacuum device 3 to evacuate the vacuum chamber body 1. When the preset vacuum value is reached, turn off the vacuum device 3 and open the first pneumatic valve 11 to make the helium in the helium gas cylinder or the helium gas pipeline network 10 enter the vacuum chamber body 1;

[0230] Step 3: The bottle valve of the gas cylinder is in a closed state, the pressure in the vacuum chamber body 1 is greater than the pressure in the pressure-holding pipeline 2, and the pressure in the vacuum chamber body 1 is less than the pressure in the gas cylinder;

[0231] Step 4: The PLC control system 26 controls the fifth pneumatic valve 25 to open and starts the helium mass spectrometer leak detector 23.

[0232] Step 5: When the helium mass spectrometer leak detector 23 detects the gas in the pressure-holding pipeline 2 and finds that the gas in the pressure-holding pipeline 2 contains helium component, it indicates that the bottle valve has a poor airtightness.

[0233] After the test, when personnel need to enter, turn on the ventilation motor 17. The oxygen content meter 8 continuously detects the oxygen content in the vacuum chamber body 1. When the oxygen content reaches the standard for human entry, the chamber door with the electric control lock 16 is opened.

[0234] Through the above cross-verification, it is proved that the bottle valve has no leakage, but has a defect of poor airtightness. Therefore, the bottle valve needs to be inspected and maintained.

[0235] The present invention is also applicable to the detection of gas cylinders in large-scale batches. If there is no problem with the batch of gas cylinders during batch detection, then the whole batch is okay; if there is a problem with this batch, then the batch is split. After splitting, the gas cylinders without problems are removed, and the remaining gas cylinders are split again to achieve the purpose of improving the detection efficiency. The present invention analyzes through pressure and / or gas components to obtain problems of gas cylinder leakage or airtightness. It does not require empirical judgment to avoid misjudgment, and at the same time can improve the detection accuracy. Compared with the prior art, it can reduce the purchase cost of leak detection liquid, avoid the phenomenon of gas pollution caused by rust on the gas cylinders, and at the same time can reduce the operation difficulty of the detection personnel, reduce the risk of misjudgment, and has the characteristics of high detection accuracy and the ability to detect the airtightness of gas cylinders.

[0236] Test Example 1

[0237] The present invention adopts a positive pressure airtightness test for the bottle valve interface, including the following steps:

[0238] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2.

[0239] Step 2: Fill the test gas into the pressure-holding pipeline 2 so that the gas pressure in the pressure-holding pipeline 2 is greater than the pressure in the vacuum chamber body 1 and less than the pressure in the gas cylinder; the bottle valve of the gas cylinder is in the closed state; the volume of the gas cylinder is 40L, the pressure is 13.52 MPA, and the filled product gas is electronic-grade carbon dioxide; the pressure in the pressure-holding pipeline 2 is 7.5 MPA, and the vacuum chamber pressure is the atmospheric pressure.

[0240] Step 3: Detect whether the gas pressure in the pressure-holding pipeline 2 fluctuates through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects that the gas pressure in the pressure-holding pipeline 2 has dropped by 1 KPA, it proves that the gas in the pressure-holding pipeline 2 leaks into the vacuum chamber body 1 through the bottle valve, that is, the airtightness of the bottle valve is poor;

[0241] Step 4: After the above detection, recover the test gas in the pressure-holding pipeline 2, or use the pipeline vacuum device 9 to evacuate it;

[0242] Through the above method, it can be proved that there is a problem with the airtightness of the bottle valve of the gas cylinder; when detected by the conventional leak liquid method, no leakage or seepage is found, so it is determined that the bottle valve of the gas cylinder is qualified.

[0243] Test Example 2

[0244] The present invention adopts a negative pressure airtightness test for the bottle valve interface, including the following steps:

[0245] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0246] Step 2: Open the second pneumatic valve 14, and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network 13 enters the pressure-holding pipeline 2 for gas replacement. After replacement, close the second pneumatic valve 14 and relieve the pressure. Finally, use the pipeline vacuum device 9 to evacuate the pressure-holding pipeline 2, and determine the vacuum degree in the pressure-holding pipeline 2 through the vacuum gauge 20;

[0247] Step 3: The bottle valve of the gas cylinder is in the closed state, the pressure in the gas cylinder is greater than the pressure in the vacuum chamber body 1, and the pressure in the vacuum chamber body 1 is greater than the pressure in the pressure-holding pipeline 2; the bottle valve of the gas cylinder is in the closed state; the volume of the gas cylinder is 40L, the pressure is 13.52 MPA, and the filled product gas is electronic grade carbon monoxide; the vacuum pressure in the pressure-holding pipeline 2 is -90 kPa, and the vacuum chamber pressure is atmospheric pressure;

[0248] Step 4: Detect whether the gas pressure in the pressure-holding pipeline 2 rises through the pipeline pressure sensor 5. When the pipeline pressure sensor 5 detects that the gas pressure in the pressure-holding pipeline 2 has risen by 5 kPa, it proves that the gas in the vacuum chamber body 1 or the gas cylinder enters the pressure-holding pipeline 2, that is, there is a leakage or poor airtightness of the bottle valve;

[0249] Furthermore, an alarm instrument detection test is adopted, including the following steps:

[0250] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0251] Step 2: Open the second pneumatic valve 14, and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network 13 enters the pressure-holding pipeline 2 for gas replacement. After replacement, close the second pneumatic valve 14 and relieve the pressure to make the pressure in the pressure-holding pipeline 2 consistent with the pressure in the vacuum chamber body 1; the pressures of both the pressure-holding pipeline 2 and the vacuum chamber body 1 are atmospheric pressure;

[0252] Step 3: The bottle valve of the gas cylinder is in the closed state, and the pressure inside the gas cylinder is greater than the pressure in the vacuum chamber body 1;

[0253] Step 4: The PLC control system 26 controls the fourth pneumatic valve 24 to open and starts the pump-suction type alarm instrument 22; the pump-suction type alarm instrument 22 is a CO gas detector;

[0254] Step 5: When the pump-suction type alarm instrument 22 detects the gas in the pressure-holding pipeline 2 and detects that the gas in the pressure-holding pipeline 2 does not contain the components of the gas in the gas cylinder, it indicates that there is no leakage in the bottle valve;

[0255] Furthermore, the helium mass spectrometer leak detection test is adopted, including the following steps:

[0256] Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint 4 in the pressure-holding pipeline 2;

[0257] Step 2: Start the vacuum pumping device 3 to vacuum the vacuum chamber body 1. When the preset vacuum value is reached, close the vacuum pumping device 3 and open the first pneumatic valve 11 to make the helium gas in the helium gas cylinder or helium gas pipeline network 10 enter the vacuum chamber body 1, and the pressure of the pressure-holding pipeline 2 is atmospheric pressure;

[0258] Step 3: The bottle valve of the gas cylinder is in the closed state, the pressure in the vacuum chamber body 1 is greater than the pressure in the pressure-holding pipeline 2, and the pressure in the vacuum chamber body 1 is less than the pressure inside the gas cylinder;

[0259] Step 4: The PLC control system 26 controls the fifth pneumatic valve 25 to open and starts the helium mass spectrometer leak detector 23;

[0260] Step 5: When the helium mass spectrometer leak detector 23 detects the gas in the pressure-holding pipeline 2, it detects that the gas in the pressure-holding pipeline 2 contains helium gas components, and the detection concentration is 1.0×10 -7 mbar·I / s, indicating that there is a problem with the airtightness of the bottle valve.

[0261] Through the above method, it can be proved that there is a problem with the airtightness of the bottle valve of the gas cylinder; when detected by the conventional leakage liquid method, no leakage or seepage is found, so it is determined that the bottle valve of the gas cylinder is qualified.

[0262] Through the above two test examples, it can be proved that the detection method of the present invention can detect the leakage problem and airtightness of gas cylinders without using leakage liquid. Especially in detecting the airtightness of gas cylinders, its accuracy rate is higher than that of the prior art.

[0263] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A gas cylinder pressure-holding leak detection device, comprising a vacuum chamber body (1), characterized in that: A pressure-holding pipeline (2) is provided inside the vacuum chamber body (1). The vacuum chamber body (1) is provided with a vacuum pumping device (3), a vacuum chamber detection unit, and a helium filling pipeline section. The pressure-holding pipeline (2) is provided with a number of gas cylinder connectors (4) and a pipeline pressure sensor (5). An external pressure-holding pipeline detection unit is provided on the vacuum chamber body (1). The pressure-holding pipeline (2) is also connected to a non-helium inert gas filling pipeline section. The vacuum chamber detection unit includes a chamber body pressure sensor (7) for detecting the internal pressure of the vacuum chamber body (1), and an oxygen content meter (8) for detecting the oxygen content inside the vacuum chamber body (1). The pressure-holding pipeline detection unit at least includes a pipeline vacuum pumping device (9) for evacuating the pressure-holding pipeline (2), and a gas detection section for detecting whether other gases leak into the pressure-holding pipeline (2). The helium filling pipeline section includes a helium gas cylinder or a helium gas pipeline network (10). The helium gas cylinder or the helium gas pipeline network (10) is connected to the vacuum chamber body (1) through a pipeline. A first pneumatic valve (11) and a helium gas pressure sensor (12) are provided on this pipeline. The non-helium inert gas filling pipeline section includes an inert gas cylinder or an inert gas pipeline network (13). The inert gas cylinder or the inert gas pipeline network (13) is connected to the pressure-holding pipeline (2) through a pipeline. A second pneumatic valve (14) and an inert gas pressure sensor (15) are provided on this pipeline. The pressure-holding pipeline (2) is connected to the pipeline vacuum pumping device (9) through a vacuum pumping pipeline. A first three-way joint (18), a second three-way joint (19), a vacuum gauge (20) for detecting the vacuum degree in the vacuum pumping pipeline, and a third pneumatic valve (21) are sequentially provided on the vacuum pumping pipeline. The gas detection section includes a pump-suction type alarm instrument (22) connected to the third end of the first three-way joint (18), and a helium mass spectrometer leak detector (23) connected to the third end of the second three-way joint (19).

2. The pressure-holding leak detection device for gas cylinders according to claim 1, wherein: The vacuum chamber body (1) is provided with a chamber door with an electric control lock (16), and a ventilation pipeline with a ventilation motor (17) is provided on the vacuum chamber body (1).

3. The gas cylinder pressure-holding leak detection device according to claim 2, wherein: A fourth pneumatic valve (24) is provided between the third end of the first three-way joint (18) and the pump-suction type alarm instrument (22); a fifth pneumatic valve (25) is provided between the third end of the second three-way joint (19) and the helium mass spectrometer leak detector (23).

4. The pressure-holding leak detection device for gas cylinders according to claim 3, characterized in that: It also includes a PLC control system (26). The signal input ends of the PLC control system (26) are respectively connected to the pipeline pressure sensor (5), the pipeline temperature sensor (6), the chamber body pressure sensor (7), the oxygen content meter (8), the helium gas pressure sensor (12), the inert gas pressure sensor (15), the vacuum gauge (20), the pump-suction type alarm instrument (22), and the helium mass spectrometer leak detector (23); the signal output ends of the PLC control system (26) are respectively connected to the first pneumatic valve (11), the second pneumatic valve (14), the third pneumatic valve (21), the fourth pneumatic valve (24), the fifth pneumatic valve (25), the vacuum pumping device (3), the vacuum gauge (20), and the pipeline vacuum pumping device (9); a pipeline temperature sensor (6) is also provided on the pressure-holding pipeline (2).

5. A pressure-holding leak detection method for a gas cylinder pressure-holding leak detection device as described in claim 4, characterized in that: The pressure-holding leak detection method includes: positive-pressure airtightness test of the bottle valve interface, negative-pressure airtightness test of the bottle valve interface, alarm instrument detection test, and helium mass spectrometer leak detection test; The positive-pressure airtightness test of the bottle valve interface is used to detect whether the gas in the pressure-holding pipeline (2) leaks into the vacuum chamber body (1) through the bottle valve and whether the gas in the gas cylinder enters the pressure-holding pipeline (2); The negative-pressure airtightness test of the bottle valve interface is used to detect whether there is gas in the gas cylinder or the vacuum chamber body (1) entering the pressure-holding pipeline (2) through the bottle valve interface; The alarm instrument detection test is used to detect whether there is gas in the gas cylinder entering the pressure-holding pipeline (2) through the bottle valve interface; The helium mass spectrometer leak detection test is used to detect whether the gas in the vacuum chamber body (1) leaks into the pressure-holding pipeline (2) through the bottle valve.

6. The pressure-holding leak detection method of the pressure-holding leak detection device for gas cylinders according to claim 5, characterized in that: The positive-pressure airtightness test of the bottle valve interface, negative-pressure airtightness test of the bottle valve interface, alarm instrument detection test, and helium mass spectrometer leak detection test respectively include the following steps: The positive-pressure airtightness test of the bottle valve interface includes the following steps: Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint (4) in the pressure-holding pipeline (2); Step 2: Fill the test gas into the pressure-holding pipeline (2) so that the gas pressure in the pressure-holding pipeline (2) is greater than the pressure in the vacuum chamber body (1) and less than the pressure in the gas cylinder; the bottle valve of the gas cylinder is in the closed state; Step 3: Detect whether the gas pressure in the pressure-holding pipeline (2) fluctuates through the pipeline pressure sensor (5). When the pipeline pressure sensor (5) detects that the gas pressure in the pressure-holding pipeline (2) drops, it proves that the gas in the pressure-holding pipeline (2) leaks into the vacuum chamber body (1) through the bottle valve, that is, the airtightness of the bottle valve is poor; when the pipeline pressure sensor (5) detects that the gas pressure in the pressure-holding pipeline (2) rises, it proves that the gas in the gas cylinder enters the pressure-holding pipeline (2), that is, there is a leakage situation in the bottle valve; when the pipeline pressure sensor (5) detects that the gas in the pressure-holding pipeline (2) does not change, it proves that the airtightness of the bottle valve is good and there will be no leakage phenomenon; Step 4: After the above detection is completed, recycle the test gas in the pressure-holding pipeline (2) or use the pipeline vacuum device (9) to evacuate; The negative-pressure airtightness test of the bottle valve interface includes the following steps: Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint (4) in the pressure-holding pipeline (2); Step 2: Open the second pneumatic valve (14), and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network (13) enters the pressure-holding pipeline (2) for gas replacement. After replacement, close the second pneumatic valve (14) and relieve the pressure. Finally, use the pipeline vacuum device (9) to evacuate the pressure-holding pipeline (2) and determine the vacuum degree in the pressure-holding pipeline (2) through the vacuum gauge (20); Step 3: The bottle valve of the gas cylinder is in the closed state, the pressure in the gas cylinder is greater than the pressure in the vacuum chamber body (1), and the pressure in the vacuum chamber body (1) is greater than the pressure in the pressure-holding pipeline (2); the bottle valve of the gas cylinder is in the closed state; Step 4: Detect whether the gas pressure in the pressure-holding pipeline (2) rises through the pipeline pressure sensor (5). When the pipeline pressure sensor (5) detects that the gas pressure in the pressure-holding pipeline (2) rises, it proves that the gas in the vacuum chamber body (1) or the gas cylinder enters the pressure-holding pipeline (2), that is, there is a leakage or poor airtightness of the bottle valve; When the pipeline pressure sensor (5) detects that the gas pressure in the pressure-holding pipeline (2) remains unchanged, the airtightness of the bottle valve is good and there is no leakage phenomenon; The alarm instrument detection test includes the following steps: Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint (4) in the pressure-holding pipeline (2); Step 2: Open the second pneumatic valve (14), and the non-helium inert gas in the inert gas cylinder or inert gas pipeline network (13) enters the pressure-holding pipeline (2) for gas replacement. After replacement, close the second pneumatic valve (14) and relieve the pressure to make the pressure in the pressure-holding pipeline (2) consistent with the pressure in the vacuum chamber body (1); Step 3: The bottle valve of the gas cylinder is in the closed state, and the pressure in the gas cylinder is greater than the pressure in the vacuum chamber body (1); Step 4: The PLC control system (26) controls the fourth pneumatic valve (24) to open and starts the pump-suction type alarm instrument (22); the gas in the gas cylinder in Step 1 is the same as the gas detected by the pump-suction type alarm instrument (22); Step 5: When the pump-suction type alarm instrument (22) detects the gas in the pressure-holding pipeline (2), if the gas detected in the pressure-holding pipeline (2) contains the components of the gas in the gas cylinder, it indicates that there is a leakage in the bottle valve; If the gas detected in the pressure-holding pipeline (2) does not contain the components of the gas in the gas cylinder, it indicates that there is no leakage in the bottle valve; The helium mass spectrometer leak detection test includes the following steps: Step 1: Connect the bottle valve of the gas cylinder to the filling row of the gas cylinder joint (4) in the pressure-holding pipeline (2); Step 2: Start the vacuum pumping device (3) to pump the vacuum chamber body (1). When the preset vacuum value is reached, close the vacuum pumping device (3) and open the first pneumatic valve (11) to make the helium in the helium gas cylinder or helium gas pipeline network (10) enter the vacuum chamber body (1); Step 3: The bottle valve of the gas cylinder is in the closed state, the pressure in the vacuum chamber body (1) is greater than the pressure in the pressure-holding pipeline (2), and the pressure in the vacuum chamber body (1) is less than the pressure in the gas cylinder; Step 4: The PLC control system (26) controls the fifth pneumatic valve (25) to open and starts the helium mass spectrometer leak detector (23); Step 5: When the helium mass spectrometer leak detector (23) detects the gas in the pressure-holding pipeline (2), if the gas detected in the pressure-holding pipeline (2) contains helium components, it indicates that there is a poor airtightness in the bottle valve; If the gas detected in the pressure-holding pipeline (2) does not contain helium components, it indicates that the airtightness of the bottle valve is good.

7. The pressure-holding leak detection method of the pressure-holding leak detection device for gas cylinders according to claim 6, characterized in that: After the test is completed, when personnel need to enter, turn on the ventilation motor (17), and the oxygen content meter (8) detects the oxygen content in the vacuum chamber body (1) in real time. When the oxygen content reaches the human entry standard, the chamber door with an electric control lock (16) is opened.

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