A spherical microlens eccentricity measuring jig and a measuring method

Abstract

The application relates to a spherical microlens eccentricity measuring jig and a measuring method, which comprises a Z-axis fine adjustment turntable, a jig bearing plate and a plurality of positioning pins are arranged on the turntable table surface of the Z-axis fine adjustment turntable, and the jig bearing plate side is close to the positioning pins; three standard balls distributed at different positions are arranged on the jig bearing plate, a lens fixing plate used for fixing a lens is detachably connected to the jig bearing plate through screws; and a horizontal adjusting mechanism and a lifting mechanism are arranged below the Z-axis fine adjustment turntable. The spherical microlens eccentricity measuring jig is reasonable in design, convenient to use, simple to operate, high in practicability, capable of realizing rapid positioning and high in efficiency; the Z-axis fine adjustment turntable, the horizontal adjusting mechanism and the lifting mechanism are convenient for axial leveling, horizontal adjustment and height adjustment; meanwhile, the application can realize rapid measurement of the surface deviation of the spherical microlens, and the measurement precision is high.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of lens jig, in particular to a spherical microlens eccentricity measuring jig and a measuring method. BACKGROUND

[0002] With the application of spherical microlens in the field of national defense, medicine and industry, the accurate measuring method of the structural parameters of the spherical microlens is of great significance to the increasing use demand. Among the structural parameters of the spherical microlens, the center deviation size between the two spherical surfaces (hereinafter referred to as: inter-surface eccentricity) corresponding to the two surfaces (hereinafter referred to as: S1 surface / S2 surface) has a great influence on the use effect, so the accurate evaluation of the inter-surface eccentricity becomes particularly important. At present, there is a lack of a jig for measuring the eccentricity of the lens on the market in order to adjust the angle, level and height of the lens. Figure 1 SUMMARY

[0003] Therefore, the purpose of the present application is to provide a spherical microlens eccentricity measuring jig which is convenient to use and has strong practicability. The present application also provides a spherical microlens eccentricity measuring method which can realize fast measurement of the inter-surface eccentricity and has high measurement accuracy.

[0004] The present application adopts the following scheme: a spherical microlens eccentricity measuring jig, comprising a Z-axis fine adjustment turntable, a jig support plate and a plurality of positioning pins are arranged on the turntable table of the Z-axis fine adjustment turntable, and the side of the jig support plate is attached to the positioning pins; three standard balls are arranged at different positions on the jig support plate, and a lens fixing plate for fixing the lens is detachably connected to the jig support plate through screws; and a horizontal adjustment mechanism and a lifting mechanism are arranged below the Z-axis fine adjustment turntable.

[0005] Further, the positioning pins are L-shaped and vertically attached to the two side surfaces of the jig support plate; the standard balls penetrate the upper and lower side surfaces of the jig support plate, a first through groove is formed in the middle of the jig support plate, a second through groove is formed in the middle of the lens fixing plate, and the three standard balls are arranged in an isosceles right triangle.

[0006] Further, the horizontal adjustment mechanism comprises a horizontal adjustment plate and a support plate located below the horizontal adjustment plate, a plurality of support balls and two adjustable legs are arranged at three corners of the horizontal adjustment plate and the support plate, and a plurality of tension springs are connected between the horizontal adjustment plate and the support plate.

[0007] Further, the adjustable leg comprises an adjusting screw and an adjusting knob fixedly connected to the adjusting screw, the lower part of the adjusting screw is threadedly connected to a threaded hole in the support plate, and the upper end of the adjusting screw abuts against the bottom surface of the horizontal adjustment plate; and the tension springs are arranged in the triangular area surrounded by the two adjustable legs and the support balls. ​

[0008] Further, the lifting mechanism adopts a manual fine adjustment lifting table, the support plate side is connected with a connecting plate extending downward to the side surface of the fixed cylinder seat, a vertical long hole is formed in the connecting plate, and a locking bolt threaded connected to the side of the manual fine adjustment lifting table is arranged in the vertical long hole.

[0009] Another technical solution of the application is a spherical microlens eccentricity measuring method, which adopts the spherical microlens eccentricity measuring jig as described above, and includes the following steps:

[0010] (1) The reference plane of the lens to be measured is fixed on the lens fixing plate by using glue, the lens fixing plate is fixed on the jig support plate by using a screw, and then the jig support plate is placed on the rotary table surface of the Z-axis fine adjustment rotary table and abuts against the positioning pin;

[0011] (2) The measuring needle contacts multiple points on the lens plane, the inclination condition is confirmed by the Z value, and the horizontal adjustment mechanism is adjusted when the inclination is large;

[0012] (3) The measuring needle contacts the lens spherical surface, the center coordinates of two single spherical surfaces are defined, and the lens axis is adjusted to be consistent with the device axis by rotating adjustment of the Z-axis fine adjustment rotary table;

[0013] (4) The surface type of the spherical surface on the lens S1 plane is measured, and the corresponding point cloud data is saved;

[0014] (5) The surface type of the three standard spheres is measured, and the corresponding point cloud data is saved;

[0015] (6) The jig support plate is turned over, the surface type of the spherical surface on the lens S2 plane corresponding to the S1 plane is measured, and the corresponding point cloud data is saved;

[0016] (7) The surface type of the three standard spheres is measured, and the corresponding point cloud data is saved;

[0017] (8) The ball center position is fitted out through the point cloud data of the standard spheres; the coordinate system is established: taking the ball center A as the X and Y axis origin, the straight line formed by the ball center A and the ball center B as the X axis, the straight line formed by the ball center A and the ball center C as the Y axis, and the plane formed by the ball center A, the ball center B and the ball center C as the reference plane;

[0018] (9) The spherical center projection of the spherical surface on the S1 plane to the reference plane formed by the three standard spheres obtains the coordinates (X1, Y1), the spherical center projection of the spherical surface on the S2 plane corresponding to the S1 plane to the reference plane formed by the three standard spheres obtains the coordinates (X2, Y2), and the calculation formula of the surface eccentricity between the S1 plane and the S2 plane is:

[0019] .

[0020] Compared with the prior art, the spherical microlens eccentricity measuring jig has the advantages that the design is reasonable, the use is convenient, the operation is simple, the practicality is strong, the fast positioning can be realized, the efficiency is high, the axial leveling, the horizontal adjustment and the height adjustment can be conveniently realized through the Z-axis fine adjustment rotating table, the horizontal adjustment mechanism and the lifting mechanism, the fast measurement of the spherical microlens surface deviation can be realized, and the measurement precision is high.

[0021] In order to make the purpose, technical scheme and advantages of the present application more clear, specific examples and related drawings will be used to further describe the present application. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a central deviation schematic diagram of the present application;

[0023] Figure 2 is an embodiment perspective view of the present application;

[0024] Figure 3 is a top view of an embodiment of the present application;

[0025] Figure 4 is a horizontal adjustment mechanism structure schematic diagram of an embodiment of the present application;

[0026] Figure 5 is a front surface schematic diagram of a jig support plate of an embodiment of the present application;

[0027] Figure 6 is a back surface schematic diagram of a jig support plate of an embodiment of the present application;

[0028] Figure 7 is a lens perspective view of an embodiment of the present application;

[0029] Figure 8 is a schematic diagram of step (3) of the measuring method of an embodiment of the present application;

[0030] Figure 9 is a schematic diagram of step (8) of the measuring method of an embodiment of the present application;

[0031] Figure 10 is a schematic diagram of step (9) of the measuring method of an embodiment of the present application;

[0032] Explanation of reference numerals in the drawings: 100 - base plate, 200 - Z-axis fine adjustment rotating table, 210 - positioning pin, 300 - jig support plate, 310 - standard ball, 320 - lens fixing plate, 321 - second through groove, 330 - first through groove, 400 - horizontal adjustment mechanism, 410 - horizontal adjustment plate, 420 - support plate, 430 - support ball, 440 - adjustable supporting leg, 441 - adjusting screw rod, 442 - adjusting screw rod, 450 - tension spring, 500 - manual fine adjustment lifting table, 510 - connecting plate, 520 - locking bolt, 600 - lens. Detailed Implementation

[0033] It should be noted that the following detailed descriptions are exemplary and intended to provide further explanation of this application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0034] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0035] like Figures 2-7 As shown, a spherical microlens eccentricity measuring fixture includes a Z-axis fine-tuning turntable 200. The turntable surface is provided with a fixture support plate 300 and several positioning pins 210. The positioning pins 210 are fixed in pin holes on the turntable surface. The fixture support plate is placed on the turntable surface, with its side resting against the positioning pins. Three standard balls 310 are distributed at different positions on the fixture support plate, specifically at three corners of the plate. A lens fixing plate 320 for fixing the lens is detachably connected to the fixture support plate by screws. A horizontal adjustment mechanism 400 and a lifting mechanism are provided below the Z-axis fine-tuning turntable. The reference plane of the lens to be measured is fixed to the lens fixing plate with glue. Different lens fixing blocks can be replaced for different lenses. The fixture support plate directly rests against the positioning pins, achieving rapid positioning and high efficiency. Furthermore, the Z-axis fine-tuning turntable, horizontal adjustment mechanism, and lifting mechanism facilitate axial leveling, horizontal adjustment, and height adjustment, making it convenient to use, simple to operate, and highly practical.

[0036] The eccentricity measuring fixture for the spherical microlens is mounted on a high-precision surface profilometer (such as the Panasonic UA3P series three-dimensional topography measuring instrument). The high-precision surface profilometer uses the probe to measure the point group data of the surface profile of the spherical microlens on surfaces S1 and S2, as well as the surface profile of the three standard spheres. Then, the inter-surface deviation values ​​of surfaces S1 and S2 are calculated through data analysis.

[0037] In this embodiment, the positioning pins are distributed in an L-shape and abut against the two sides perpendicular to the fixture support plate; the standard ball passes through the upper and lower sides of the fixture support plate, the fixture support plate has a first through groove 330 in the middle, and the lens fixing plate has a second through groove 321 in the middle. The first and second through grooves are provided to expose the bottom surface of the lens, so that the fixture support plate can be flipped to meet the requirement of measuring both sides of the lens. The three standard balls are distributed in an isosceles right triangle.

[0038] In the embodiment, the horizontal adjustment mechanism 400 comprises a horizontal adjustment plate 410 and a support plate 420 below the horizontal adjustment plate, and a support ball 430 and two adjustable supporting legs 440 are arranged at three corners of the horizontal adjustment plate and the support plate, and a plurality of tension springs 450 are connected between the horizontal adjustment plate and the support plate, the tension springs pull the horizontal adjustment plate downward, three points determine a plane, and the support ball 430 and the two adjustable supporting legs 440 form three-point support, and the horizontal degree can be adjusted by the two adjustable supporting legs 440.

[0039] In the embodiment, the adjustable supporting leg comprises an adjusting screw 441 and an adjusting knob 442 fixedly connected to the adjusting screw, the lower part of the adjusting screw is screwed into a threaded hole in the support plate, and the upper end abuts against the bottom surface of the horizontal adjustment plate; and the tension springs are distributed in the triangular area surrounded by the two adjustable supporting legs and the support ball.

[0040] In the embodiment, the lifting mechanism adopts a manual fine adjustment lifting table 500, the side part of the support plate is connected with a connecting plate 510 extending downward to the side surface of a fixed cylinder seat, a vertical long hole is formed in the connecting plate, and a locking bolt 520 screwed to the side part of the manual fine adjustment lifting table is arranged in the vertical long hole; the manual fine adjustment lifting table is a prior art, the height can be finely adjusted by an adjusting knob on the side part, and the locking bolt 520 ensures that the manual fine adjustment lifting table can be locked more firmly after the height is adjusted.

[0041] A spherical microlens eccentricity measuring method adopts the spherical microlens eccentricity measuring jig, and high-precision surface profilometry (Panasonic UA3P series three-dimensional stereo topography measuring instrument) is used for measurement, the spherical microlens eccentricity measuring jig is installed on the stage of the high-precision surface profilometry, the upper side of the lens is defined as an S1 surface, the lower side is defined as an S2 surface, the centers of the three standard spheres are respectively a sphere center A, a sphere center B and a sphere center C, and the sphere center A is located at the right angle of the isosceles right triangle formed by the three.

[0042] The method comprises the following steps:

[0043] (1) The reference plane of the lens to be measured is fixed on the lens fixing plate with glue, the lens fixing plate is fixed on the jig support plate by screws, and then the jig support plate is placed on the stage of the Z-axis fine adjustment turntable and abuts against the positioning pin.

[0044] (2) The measuring needle contacts multiple points on the lens plane, the inclination condition is confirmed by the Z value, and the horizontal adjustment mechanism is adjusted when the inclination is large; the purpose of inclination adjustment is to avoid the interference between the measuring needle and the product in the measurement process when the lens inclination is too large, and the inclination can not be adjusted without interference.

[0045] (3) The probe contacts the lens spherical surface, and the coordinates of the centers of the two single spherical surfaces are defined. The lens axis is adjusted to be consistent with the device axis by rotating the Z-axis fine adjustment turntable (there is a small error, and the purpose of axial adjustment is to avoid the lens single spherical surface being too small to be identified by the naked eye. When the position can be clearly identified, it can be measured by coordinate positioning, and it can not be adjusted), as shown in Figure 8

[0046] (4) Measure the surface type of the spherical surface on the lens S1 surface (multiple can be measured at a time, such as: sphere 1 / 2 / 3 / 4), and save the corresponding point cloud data;

[0047] (5) Measure the surface type of the three standard spheres, and save the corresponding point cloud data;

[0048] (6) Flip the jig support plate, measure the surface type of the spherical surface on the lens S2 surface corresponding to the S1 surface, and save the corresponding point cloud data;

[0049] (7) Measure the surface type of the three standard spheres, and save the corresponding point cloud data;

[0050] (8) The center of the sphere is fitted through the point cloud data of the standard sphere. The coordinate system is established: the center of the sphere A is the origin of the X and Y axes, the straight line formed by the center of the sphere A and the center of the sphere B is the X axis, and the straight line formed by the center of the sphere A and the center of the sphere C is the Y axis, which limits the rotational freedom degree; the plane formed by the center of the sphere A, the center of the sphere B, and the center of the sphere C is the reference plane, which limits the spatial rotational freedom degree; since the center point of the standard sphere is unique, whether measured from the S1 surface or the S2 surface, the coordinate system established by the standard sphere is the same, as shown in Figure 9

[0051] (9) The center of the sphere on the S1 surface (take sphere 1 as an example) is projected onto the reference plane formed by the three standard spheres, and the coordinates (X1, Y1) are obtained. The center of the sphere corresponding to the S1 surface on the S2 surface (also sphere 1) is projected onto the reference plane formed by the three standard spheres, and the coordinates (X2, Y2) are obtained, as shown in Figure 10

[0052] .

[0053] ​​​The basic principle of the measurement method is that the center point of the standard sphere has uniqueness, no matter which direction is measured, the center coordinates of the standard sphere calculated are the same, then the position relationship between the standard sphere and the measured object is established, the track of the lens sphere is detected through the probe needle, and then the center position is fitted through the algorithm compensation according to the point group data detected, so that the center deviation between the two spherical surfaces is accurately obtained, the rapid measurement of the center deviation between the spherical micro-lens surfaces and the accurate judgment of the eccentricity condition can be realized, the measurement efficiency is high, the measurement precision is high, accurate data can be provided for the lens mold type repair, and the use effect of the spherical micro-lens is ensured.

[0054] Any technical solution disclosed in the present application above, if it discloses a numerical range, the disclosed numerical range is a preferred numerical range, and any person skilled in the art should understand that the preferred numerical range is only one of the many implementable values with more obvious technical effects or representative values. Because there are too many values, it is impossible to enumerate them, so the present application discloses part of the values to illustrate the technical solutions of the present application, and the above-mentioned values should not constitute a limitation on the protection scope of the present application.

[0055] If the present application discloses or involves mutually fixed connecting parts or structural parts, except for another statement, the fixed connection can be understood as: detachable fixed connection (for example, connected by using bolts or screws), and can also be understood as: non-detachable fixed connection (for example, riveting, welding), of course, the mutual fixed connection can also be replaced by an integral structure (for example, manufactured by using casting process integral forming) (except for obviously cannot use integral forming process).

[0056] In addition, the terms used to represent the position relationship or shape in any technical solution disclosed in the present application above, except for another statement, its meaning includes the approximate, similar or close state or shape.

[0057] Any component provided by the present application can be assembled from a plurality of individual components, or can be a single component manufactured by integral forming process.

[0058] The above is only a preferred embodiment of the present application, and is not a limitation on other forms of the present application, and any person skilled in the art can modify or change the above disclosed technical content into equivalent embodiments with equivalent changes. However, any simple modification, equivalent change and modification made according to the technical essence of the present application to the above embodiments without departing from the technical solution content of the present application still belongs to the protection scope of the present application technical solution.

Claims

1. A method for measuring the decentration of a spherical microlens using a spherical microlens decentration measuring jig, characterized by: The spherical microlens eccentricity measuring jig comprises a Z-axis fine adjustment turntable, a jig support plate and a plurality of positioning pins on the turntable table surface of the Z-axis fine adjustment turntable, the jig support plate side abutting against the positioning pins, three standard balls distributed at different positions on the jig support plate, a lens fixing plate for fixing the lens being detachably connected to the jig support plate through screws, a horizontal adjustment mechanism and a lifting mechanism below the Z-axis fine adjustment turntable, the positioning pins being L-shaped and abutting against the two vertical sides of the jig support plate, the standard balls penetrating through the upper and lower sides of the jig support plate, a first through groove being formed in the middle of the jig support plate, a second through groove being formed in the middle of the lens fixing plate, the three standard balls being distributed in an isosceles right triangle, and a measuring method comprising the following steps: (1) fixing the reference plane of the lens to be measured on the lens fixing plate with glue, connecting and fixing the lens fixing plate on the jig support plate with screws, and then placing the jig support plate on the turntable table surface of the Z-axis fine adjustment turntable and abutting against the positioning pins; (2) contacting the lens plane with a plurality of measuring needles, confirming the inclination condition through the Z value, and adjusting through the horizontal adjustment mechanism when the inclination is large; (3) contacting the lens spherical surface with the measuring needles, defining the center coordinates of the two single spherical surfaces, and adjusting the lens axial direction to be consistent with the equipment axial direction through the Z-axis fine adjustment turntable; (4) measuring the surface type of the spherical surface on the lens S1 surface and saving the corresponding point cloud data; (5) measuring the surface type of the three standard balls and saving the corresponding point cloud data; (6) turning over the jig support plate, measuring the surface type of the spherical surface on the lens S2 surface corresponding to the S1 surface, and saving the corresponding point cloud data; (7) measuring the surface type of the three standard balls and saving the corresponding point cloud data; (8) fitting the ball center positions through the point cloud data of the standard balls, establishing the coordinate system: taking the ball center A as the X and Y axis origin, the straight line formed by the ball center A and the ball center B as the X axis, the straight line formed by the ball center A and the ball center C as the Y axis, and the plane formed by the ball center A, the ball center B and the ball center C as the reference plane; (9) projecting the spherical center of the spherical surface on the S1 surface onto the reference plane formed by the three standard balls to obtain the coordinates (X1, Y1), projecting the spherical center of the spherical surface on the S2 surface corresponding to the S1 surface onto the reference plane formed by the three standard balls to obtain the coordinates (X2, Y2), and the calculation formula of the surface eccentricity between the S1 surface and the S2 surface being: 。 2. The method of claim 1, wherein: The horizontal adjustment mechanism comprises a horizontal adjustment plate and a support plate below the horizontal adjustment plate, a plurality of support balls and two adjustable legs being distributed at three corners of the horizontal adjustment plate and the support plate, and a plurality of tension springs being connected between the horizontal adjustment plate and the support plate.

3. The method of claim 2, wherein: The adjustable leg comprises an adjusting screw and an adjusting knob fixedly connected to the adjusting screw, the lower part of the adjusting screw being threadedly connected to the threaded hole in the support plate and the upper end abutting against the bottom surface of the horizontal adjustment plate, and the tension springs being distributed in the triangular area formed by the two adjustable legs and the support balls.

4. The method of claim 2, wherein: The lifting mechanism adopts a manual fine adjustment lifting table, the side part of the support plate is connected with a connecting plate extending downward to the side surface of the fixed cylinder base, a vertical long hole is formed in the connecting plate, and a locking bolt threadedly connected to the side part of the manual fine adjustment lifting table is arranged in the vertical long hole.

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