Self-powered micro-hair-like sensor

Abstract

The application discloses a self-powered micro hair-like sensor, which comprises a hair structure, a mechanical structure layer and a substrate; the hair structure is bonded with the mechanical structure layer through a micro assembly process; the mechanical structure layer is provided with a moving platform, a constraint unit and a bridge amplification unit obtained through an etching process; the mechanical structure layer is bonded with the substrate as one of friction layers; the substrate is another friction layer; the moving platform is connected to the root of the hair structure; the moving platform is in a rectangular shape, one set of opposite sides of the rectangular shape are connected with corresponding constraint units respectively, and the other set of opposite sides are connected with corresponding bridge amplification units respectively; and the two bridge amplification units are connected through the corresponding constraint units. The self-powered micro hair-like sensor realizes self-power supply and sensing detection functions based on the frictional volt effect, realizes high-sensitivity detection of physical quantities such as flow rate and acceleration, and effectively improves the portability and power consumption ratio of equipment.

Description

Technical Field

[0001] This invention relates to the field of micro-nano sensor technology, and more specifically to a self-powered miniature hair-like sensor. Background Technology

[0002] Based on the sensing mechanism of animal hair, effective sensing of physical information such as flow rate and vibration can be achieved. Hair-inspired sensors are combined with MEMS technology, but they still face certain limitations. These limitations may include material selection, manufacturing process, etc., which result in limited miniaturization capabilities of the sensors in practical applications.

[0003] Existing hair-like sensors require external power, which increases the size and weight of the device. For wearable devices or locations where power supply is difficult, external power is not only inconvenient to use, but also limits the application range and portability of the sensor.

[0004] While existing hair-like sensors offer advantages such as high sensitivity and a wide measurement range, they still have certain limitations. In some applications, even higher sensitivity or a wider measurement range may be required, and existing sensors cannot meet these requirements.

[0005] Furthermore, existing hair-like sensors have shortcomings in self-powered capabilities. Self-powered hair-like sensors should be able to generate their own power from environmental energy sources, thus achieving self-powered operation. However, current research in this area is relatively limited, and existing technologies cannot fully utilize environmental energy for self-powered operation.

[0006] In summary, existing hair-like sensors suffer from drawbacks such as the need for external power supply, limitations in miniaturization capabilities, limitations in sensitivity and measurement range, and insufficient self-driving capability. Summary of the Invention

[0007] In view of this, the present invention provides a self-powered miniature hair-like sensor, which at least partially solves the above-mentioned technical problems, so as to realize a more efficient, portable and self-driven hair-like sensor, which helps to achieve high-sensitivity detection of physical quantities such as flow rate and acceleration.

[0008] To achieve the above objectives, the present invention adopts the following technical solution:

[0009] A self-powered miniature hair-like sensor includes: a hair structure, a mechanical structure layer, and a substrate;

[0010] The hair structure is bonded to the mechanical structure layer through a micro-assembly process;

[0011] The mechanical structure layer is provided with a moving platform, a constraint unit and a bridge amplification unit obtained by etching process. The mechanical structure layer is bonded to the substrate as one of the friction layers; the substrate is another friction layer.

[0012] The moving platform is connected to the root of the hair structure; the moving platform is rectangular, with one set of opposite sides of the rectangle connected to corresponding constraint units, and the other set of opposite sides connected to corresponding bridge amplification units; and the two bridge amplification units are connected through corresponding constraint units.

[0013] Furthermore, the center of the mechanical structure layer is located on the moving platform.

[0014] Furthermore, the constraint unit applies constraints to the moving platform along the X-axis direction.

[0015] Furthermore, the bridge amplification unit is composed of a first-stage amplification mechanism and a second-stage amplification mechanism connected in series; the first-stage amplification mechanism and the second-stage amplification mechanism are each composed of several flexible beams connected together.

[0016] Furthermore, both the input and output ends of the first-stage amplification mechanism are equipped with constraint units.

[0017] Furthermore, the output end of the second-stage amplification mechanism rubs against the substrate.

[0018] Furthermore, the mechanical structure layer is made of silicon semiconductor material.

[0019] Furthermore, a thin metal film is sputtered on the back of the mechanical structure layer as an electrode.

[0020] Furthermore, the substrate is selected from semiconductor materials with different Fermi levels or an insulating material is sputtered onto the surface of the semiconductor material.

[0021] Furthermore, a metal thin film is sputtered on the back side of the substrate as an electrode.

[0022] As can be seen from the above technical solution, compared with the prior art, the present invention discloses a self-powered miniature hair-like sensor, comprising: a hair structure, a mechanical structure layer, and a substrate; wherein, the hair structure is bonded to the mechanical structure layer through a micro-assembly process; the mechanical structure layer is provided with a moving platform, constraint units, and bridge amplification units obtained by an etching process, and the mechanical structure layer is bonded to the substrate as one of the friction layers; the substrate serves as another friction layer; the moving platform is connected to the root of the hair structure; the moving platform is rectangular, with one set of opposite sides of the rectangle connected to corresponding constraint units, and another set of opposite sides connected to corresponding bridge amplification units; and the two bridge amplification units are connected through corresponding constraint units. This self-powered miniature hair-like sensor achieves self-powering and sensing detection functions based on the triboelectric effect, realizing high-sensitivity detection of physical quantities such as flow velocity and acceleration, effectively improving the portability and power consumption ratio of the device. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the structure of the self-powered miniature hair-like sensor provided by the present invention;

[0025] Figure 2 This is a schematic diagram of the mechanical structure layer provided by the present invention;

[0026] Figure 3 This is a schematic diagram of the preparation process provided by the present invention;

[0027] Figure label:

[0028] 1: Hair structure;

[0029] 2: Mechanical structure layer; 201: Moving platform; 202: Output end; 203: Second-stage amplification mechanism; 204: First-stage amplification mechanism; 205: Constraint unit;

[0030] 3: Base. Detailed Implementation

[0031] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] Reference Figure 1 As shown in the figure, an embodiment of the present invention discloses a self-powered miniature hair-like sensor, comprising a hair structure 1, a mechanical structure layer 2, and a substrate 3 connected in sequence. The hair structure 1 has a high aspect ratio and is bonded to the mechanical structure layer 2 through a micro-assembly process to form a stable structure.

[0033] Reference Figure 2 As shown, the mechanical structure layer 2 includes a moving platform 201, which is connected to the root of the hair structure 1, and is constrained along the X-axis by a constraint unit 205. This structure ensures the stability and reliability of the sensor.

[0034] The mechanical structure layer 2 also includes an amplification unit, comprising a first amplification mechanism 204 and a second amplification mechanism 203 connected in series. This amplification unit design increases the sensor's sensitivity, enabling high-precision detection of minute vibrations or changes in flow velocity.

[0035] Mechanical structure layer 2 is made of silicon semiconductor material, with a conductive metal layer sputtered on top as an electrode. Substrate 3 is made of a material with different electron affinity to mechanical structure layer 2, with a conductive metal layer sputtered on the bottom as an electrode. This structure allows the sensor to be self-powered through its own structure and material properties, eliminating the need for external power supply. Mechanical structure layer 2 uses silicon wafer etching to obtain the mechanical units, which are bonded to the substrate as one of the friction layers; the substrate serves as another friction layer. The substrate has different electron affinity to the mechanical structure layer. The substrate and mechanical structure layer are bonded together, and some structures generate contact friction and sliding friction.

[0036] The self-powered miniature hair-like sensor of this invention can be used for highly sensitive detection of physical quantities such as flow rate and vibration. Its miniaturization and self-driving characteristics make it suitable for wearable devices or locations where power supply is difficult. At the same time, the portability and high sensitivity of this sensor provide new possibilities for the development of portable devices.

[0037] Example:

[0038] In this embodiment, the hair structure 1, the mechanical structure layer 2, and the substrate 3 are made of polymer material, silicon wafer, and glass material, respectively. Micro-assembly technology is used to bond the hair structure 1 to the mechanical structure layer 2 to form a stable structure. The amplification unit includes a first amplification mechanism 204 and a second amplification mechanism 203 manufactured through micro-nano fabrication; these amplification mechanisms enhance the sensitivity of the sensor.

[0039] Among them, reference Figure 3 The diagram shows the process flow for fabricating the self-powered miniature hair-like sensor of this embodiment, which includes the following steps:

[0040] a. Ordinary silicon wafers are used for the mechanical structure layer;

[0041] b. After cleaning, apply photoresist to one of its surfaces;

[0042] Then, the pattern on the mask is exposed and developed to obtain the pattern to be etched on the surface of the silicon wafer;

[0043] f. Use plasma etching to etch the mechanical structure layer, then remove the photoresist to complete the fabrication of the mechanical structure layer.

[0044] Following the fabrication process of the mechanical structure layer, the substrate is fabricated. The mechanical structure layer is then electrostatically bonded to the substrate. Finally, the structure layer is released, completing the entire sensor fabrication process.

[0045] After the mechanical structure layer is fabricated through an etching process, a thin metal film is sputtered onto the back side as an electrode.

[0046] The substrate can be a semiconductor material with different Fermi levels (e.g., a P-type silicon mechanical layer in contact with an N-type silicon substrate), or an insulating material (e.g., SiO2) can be sputtered onto the surface of the semiconductor material, which can help improve the current output of the sensor. A metal thin film is sputtered on the back of the substrate as an electrode.

[0047] The working process of the sensor in this embodiment of the invention is as follows:

[0048] When external fluid or vibrations act on the surface of the hair structure 1, it causes the hair structure 1 to oscillate. The root of the hair structure 1 generates a certain torque, which acts on the moving platform 201 of the mechanical structure layer 2. The moving platform 201 moves along the X-axis. The effective force is amplified by the bridge amplifier unit and then acts on the output end of the second-stage amplifier mechanism 203. The output end can generate friction with the substrate 3, producing direct current. By adjusting the area of ​​the output end, the friction between the mechanical structure layer 2 and the substrate 3 can be adjusted, changing the magnitude of the output signal. Additionally, the moving platform 201 also generates friction with the substrate 3, and the oscillation of the hair structure 1 causes the moving platform 201 to exert pressure on the substrate 3, effectively increasing the magnitude of the output current. By detecting the change in direct current, the amplitude of the external physical information can be obtained.

[0049] The self-powered miniature hair-like sensor of the present invention has the following advantages:

[0050] Miniaturization: The sensor has a compact structure and small size, making it easy to integrate into various devices.

[0051] Self-powered: The sensor achieves self-driving through its own structure and material properties, without the need for external power supply.

[0052] High sensitivity: The design of the amplification unit enables high-precision detection of minute vibrations or changes in flow velocity.

[0053] Portability: Suitable for wearable devices and locations where power supply is difficult, providing new possibilities for the development of portable devices.

[0054] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to the method section.

[0055] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A self-powered miniature hair-like sensor, characterized in that, include: Hair structure, mechanical structure layer and base; The hair structure is bonded to the mechanical structure layer through a micro-assembly process; The mechanical structure layer is provided with a moving platform, a constraint unit and a bridge amplification unit obtained by etching process. The mechanical structure layer is bonded to the substrate as one of the friction layers; the substrate is another friction layer. The moving platform is connected to the root of the hair structure; the moving platform is rectangular, with one set of opposite sides of the rectangle connected to corresponding constraint units, and the other set of opposite sides connected to corresponding bridge amplification units; and the two bridge amplification units are connected through corresponding constraint units. The bridge-type amplification unit is composed of a first-stage amplification mechanism and a second-stage amplification mechanism connected in series; the first-stage amplification mechanism and the second-stage amplification mechanism are each connected by a number of flexible beams; The output of the second-stage amplification mechanism generates direct current through friction with the substrate; The mechanical structure layer is made of silicon semiconductor material. The substrate is selected from semiconductor materials with different Fermi levels or an insulating material is sputtered onto the surface of the semiconductor material. The self-powered miniature hair-like sensor achieves self-powering and sensing detection functions based on the tribovolt effect.

2. The self-powered miniature hair-like sensor according to claim 1, characterized in that, The center of the mechanical structure layer is located on the moving platform.

3. The self-powered miniature hair-like sensor according to claim 2, characterized in that, The constraint unit applies constraints to the moving platform along the X-axis.

4. The self-powered miniature hair-like sensor according to claim 1, characterized in that, The first-stage amplification mechanism has constraint units at both its input and output ends.

5. The self-powered miniature hair-like sensor according to claim 1, characterized in that, The mechanical structure layer has a metal thin film sputtered on its back as an electrode.

6. The self-powered miniature hair-like sensor according to claim 1, characterized in that, A thin metal film is sputtered on the back of the substrate as an electrode.

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