Flexible substrate material cleaning apparatus

Abstract

The application discloses a flexible substrate material cleaning equipment, which comprises a rolling brush device, a first spraying device, a first air cutting and drying device, a first isolation chamber, a laser cleaning device, a second isolation chamber, a second spraying device, a DI spraying device, a second air cutting and drying device and a light cleaning device which are sequentially arranged, the laser cleaning device is located in a laser cleaning chamber, the laser cleaning chamber is located between the first isolation chamber and the second isolation chamber, and the laser cleaning chamber is isolated from the external environment by the first isolation chamber and the second isolation chamber. The flexible substrate material cleaning equipment has the advantages that laser cleaning is added, the cleaning effect on the particles, organic matters and lipids which are strongly adhered to the surface of the flexible substrate material is achieved, the flexible substrate material cleaning equipment belongs to a non-contact type, the great difference between impurities and the flexible substrate material is utilized, the surface of the flexible substrate material is not easily damaged, and the cleaning effect of the flexible substrate material is improved.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of semiconductor, and particularly relates to a flexible substrate material cleaning equipment. BACKGROUND

[0002] The existing equipment mainly adopts the methods of rolling brush and spraying to clean the flexible substrate such as plastic material and stainless steel material. In view of the influence of chemical agent residues on the process product, chemical cleaning agent is not used in the whole cleaning process, which leads to insufficient cleanliness of the substrate after cleaning, such as grease and organic matter.

[0003] The existing cleaning process of the flexible substrate material is in turn loading, rolling brush, ordinary spraying, DI spraying and final drying. It can be analyzed from the design of each function section that the existing equipment mainly cleans the residues attached to the surface of the incoming substrate, but the existing equipment cannot remove the strong adhesion impurities and residual grease.

[0004] In summary, the existing technology has the following defects:

[0005] 1. The existing cleaning equipment does not use chemical cleaning agent, and there is grease residue after cleaning;

[0006] 2. The existing cleaning equipment cannot clean the impurities with strong adhesion on the surface of the substrate;

[0007] 3. The existing cleaning equipment cannot clean the fine gap on the substrate. SUMMARY

[0008] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application provides a flexible substrate material cleaning equipment, which aims to improve the cleaning effect.

[0009] In order to achieve the above purpose, the technical scheme adopted by the present application is as follows: the flexible substrate material cleaning equipment comprises a rolling brush device, a first spraying device, a first air cutting and drying device, a first isolation chamber, a laser cleaning device, a second isolation chamber, a second spraying device, a DI (ultra-pure water) spraying device, a second air cutting and drying device and a light cleaning device which are arranged in sequence. The laser cleaning device is located in a laser cleaning chamber, and the laser cleaning chamber is located between the first isolation chamber and the second isolation chamber. The first isolation chamber and the second isolation chamber isolate the laser cleaning chamber from the external environment.

[0010] The rolling brush device comprises an upper rolling brush, a lower rolling brush located below the upper rolling brush, a first upper spraying pipe and a first lower spraying pipe located below the first upper spraying pipe. The first spraying device comprises a second upper spraying pipe and a second lower spraying pipe located below the second upper spraying pipe. The rotation direction of the upper rolling brush and the lower rolling brush is opposite to the running direction of the flexible substrate material.

[0011] The second spraying device comprises a spray gun, a roller wheel below the spray gun, and a high-pressure pump connected with the spray gun, the number of the spray gun is equal to that of the roller wheel, the included angle between the spray gun and the flexible substrate material is 90°, and the center line of the spray gun passes through the highest point at which the outer circular surface of the roller wheel is tangent to the flexible substrate material.

[0012] The high-pressure pump is a plunger pump, and the water pressure of the high-pressure pump is greater than 100 kg / cm 2 .

[0013] The DI spraying device comprises a third upper spraying pipe and a third lower spraying pipe below the third upper spraying pipe, the included angle between the nozzle direction of the third upper spraying pipe and the third lower spraying pipe and the running direction of the flexible substrate material is 0-30°, and the pressure of the third upper spraying pipe and the third lower spraying pipe is equal.

[0014] The first air knife drying device comprises a first upper air knife and a first lower air knife below the first upper air knife, the first upper air knife and the first lower air knife are both provided in plurality, and the first upper air knife and the first lower air knife are located between the second roller wheel and the third roller wheel.

[0015] The distance between the first upper air knife and the first lower air knife and the flexible substrate material is 0.5-5 mm, the first upper air knife and the first lower air knife located at the first position form a first group of air knives, the first upper air knife and the first lower air knife located at the second position form a second group of air knives,..., the first upper air knife and the first lower air knife located at the Nth position form an Nth group of air knives, N is greater than and equal to 2, the included angle between the first group of air knives to the (N-1)th group of air knives and the running direction of the flexible substrate material is 45-75°, and the included angle between the Nth group of air knives and the running direction of the flexible substrate material is 90°.

[0016] The second air knife drying device comprises a second upper air knife and a second lower air knife below the second upper air knife, and the second upper air knife and the second lower air knife are both provided in plurality.

[0017] The distance between the second upper air knife and the second lower air knife and the flexible substrate material is 0.5-5 mm, the second upper air knife and the second lower air knife located at the second position form a second group of air knives, the second upper air knife and the second lower air knife located at the second position form a second group of air knives,..., the second upper air knife and the second lower air knife located at the Nth position form an Nth group of air knives, N is greater than and equal to 2, the included angle between the second group of air knives to the (N-1)th group of air knives and the running direction of the flexible substrate material is 45-75°, and the included angle between the Nth group of air knives and the running direction of the flexible substrate material is 90°.

[0018] The laser cleaning device comprises a laser head and a laser through an optical fiber connected with the laser head, and the distance between the laser head and the flexible substrate material is 0-500 mm.

[0019] The flexible substrate material cleaning equipment of the present application adds laser cleaning, and has cleaning effect on particles, organic matters and lipids strongly adhered to the surface of the flexible substrate material, belongs to non-contact type, and is not easy to damage the surface of the flexible substrate material due to the great difference between the impurities and the flexible substrate material, and improves the cleaning effect of the flexible substrate material. BRIEF DESCRIPTION OF DRAWINGS

[0020] The present specification includes the following drawings, and the shown contents are respectively:

[0021] Figure 1 is the working flow chart of the flexible substrate material cleaning equipment of the present application;

[0022] Figure 2 is the structural schematic diagram of the flexible substrate material cleaning equipment of the present application;

[0023] Figure 3 is the relationship diagram of the third spraying water tank;

[0024] Figure 4 is the structural schematic diagram of the feeding / discharging roller;

[0025] Figure 5 is the structural schematic diagram of the second spraying device;

[0026] Figure 6 is the air knife and substrate cutting schematic diagram;

[0027] Figure 7 is the flexible substrate material cleaning equipment of the present application before and after use, and the substrate surface residue schematic diagram;

[0028] The marks in the figure are:

[0029] 1, loading platform; 2, rolling brush device; 3, first spraying device; 4, first air cutting and drying device; 5, first isolation chamber; 6, laser cleaning device; 7, second isolation chamber; 8, second spraying device; 9, DI spraying device; 10, second air cutting and drying device; 11, light cleaning device; 12, discharging platform; 13, first roller; 21, upper rolling brush; 22, first upper spraying pipe; 23, lower rolling brush; 24, first lower spraying pipe; 31, second upper spraying pipe; 32, second lower spraying pipe; 33, pipe; 34, water pump; 35, first water tank; 36, pipe; 37, pipe; 41, second roller; 42, first upper air knife; 43, first lower air knife; 44, third roller; 45, first pressure gauge; 46, second pressure gauge; 47, pipe; 48, compressed air source; 51, fourth roller; 52, pump group; 53, pipe; 61, laser head; 62, optical fiber; 63, laser; 71, dust collector; 72, fifth roller; 81, sixth roller; 82, spray gun; 83, water supply pipe; 84, third pressure gauge; 85, high-pressure pump; 86, second water tank; 87, return water pipe; 91, third upper spraying pipe; 92, third lower spraying pipe; 93, water supply pipe; 94, fourth pressure gauge; 95, return water pipe; 96, third water tank; 101, second upper air knife; 102, second lower air knife; 103, pipe; 104, fifth pressure gauge; 105, sixth pressure gauge; 107, compressed air source; 108, pipe; 110, light source; 111, controller; 400, tension sensor; 500, line; 600, controller. DETAILED DESCRIPTION

[0030] The specific embodiments of the present application will be further described in the following with reference to the drawings, and by describing the embodiments, in order to help the persons skilled in the art to have a more complete, accurate and in-depth understanding of the concept and technical solution of the present application, and to help them to implement the present application.

[0031] It should be noted that in the following embodiments, the "first", "second", "third", "fourth", "fifth" and "sixth" do not represent an absolute division relationship in structure and / or function, nor represent the execution order, but only for the convenience of description.

[0032] As Figure 1 and Figure 2As shown, the present application provides a flexible substrate material cleaning equipment, which comprises a feeding table 1, a rolling brush device 2, a first spraying device 3, a first air-drying device 4, a first isolation chamber 5, a laser cleaning device 116, a second isolation chamber 7, a second spraying device 8, a DI (ultra-pure water) spraying device, a second air-drying device 10, a light cleaning device 11 and a discharging table 12 arranged in sequence. The laser cleaning device 116 is located in a laser cleaning chamber, and the laser cleaning chamber is located between the first isolation chamber 5 and the second isolation chamber 7. The first isolation chamber 5 and the second isolation chamber 7 isolate the laser cleaning chamber from the external environment.

[0033] Specifically, the flexible substrate material cleaning equipment of the present application can eliminate the shortcomings of the prior art in cleaning the attachments, organic matters and fine gaps on the surface of the substrate, and solve the influence of the residues on the surface of the substrate material on the film structure. The design is simple in structure and easy to operate, and is particularly suitable for cleaning modern high-precision products.

[0034] As shown in Figure 2 The feeding table 1 is a device for providing continuous incoming materials to be cleaned. The feeding table 1 comprises a first roller 13, a rotating discharging structure, a sensor for testing the position of the flexible substrate material and a correction device. The rotating discharging structure comprises a servo motor and a rotating device. The sensor adopts one or more of infrared, photoelectric and ultrasonic sensors. The correction device is used to mechanically adjust the current substrate position according to the position of the sensor, and mainly comprises a slide rail and a lead screw. The first roller 13 is used to control the tension of the flexible substrate material placed on the surface thereof. The axis of the first roller 13 is a horizontal line, and the first roller 13 is located below the flexible substrate material.

[0035] As shown in Figure 2 The rolling brush device 2 is arranged in the first chamber, and a first roller is located outside the first chamber. The rolling brush device 2 is used to brush the surface of the flexible substrate material. The rolling brush device 2 comprises an upper rolling brush 21, a lower rolling brush 12 located below the upper rolling brush 21, a first upper spraying pipe 22 and a first lower spraying pipe 24 located below the first upper spraying pipe 22. The rotating directions of the upper rolling brush 21 and the lower rolling brush 12 are opposite to the advancing direction of the flexible substrate material. The flexible substrate material passes between the upper rolling brush 21 and the lower rolling brush 12. The upper rolling brush 21 and the lower rolling brush 12 are used to clean the surface of the flexible substrate material with soft bristles. The hardness and size of the bristles are determined according to the current cleaning material.

[0036] As shown in Figure 2As shown, a plurality of upper rolling brushes 21 are arranged in sequence along the direction of movement of the flexible substrate material, and a plurality of lower rolling brushes 12 are arranged in sequence along the direction of movement of the flexible substrate material. The number of upper rolling brushes 21 is equal to the number of lower rolling brushes 12, and each lower rolling brush 12 is located below one upper rolling brush 21. A first upper spraying pipe 22 is located between two adjacent upper rolling brushes 21, and a first lower spraying pipe 24 is located between two adjacent lower rolling brushes 12. The upper rolling brushes 21 and the first upper spraying pipe 22 are located above the flexible substrate material, and the lower rolling brushes 12 and the first lower spraying pipe 24 are located below the flexible substrate material. The first upper spraying pipe 22 and the first lower spraying pipe 24 are used to spray water to the surface of the flexible substrate material after brushing, so as to wash the flexible substrate material.

[0037] Preferably, the rotating direction of the upper rolling brushes 21 is opposite to the rotating direction of the lower rolling brushes 12, and the rotating direction of the upper rolling brushes 21 and the lower rolling brushes 12 is opposite to the direction of movement of the flexible substrate material, so as to increase the mechanical brushing effect and achieve better cleaning effect. Figure 2 As shown, the movement power of the flexible substrate material is provided by the outside world. The upper rolling brushes 21 rotate in the clockwise direction, and the lower rolling brushes 12 rotate in the counterclockwise direction. The direction of movement of the flexible substrate material is from left to right along the horizontal direction. The direction of movement of the flexible substrate material is opposite to the direction of movement of the flexible substrate material driven by the upper rolling brushes 21 and the lower rolling brushes 12.

[0038] As preferred, the contact distance between the bristles of the upper and lower rolling brushes 21 and 12 and the flexible substrate material is about -0.5mm (the bristles are compressed), i.e. the difference between the diameter of the upper rolling brush 21 in the non-working state and the distance between the upper rolling brush 21 in the working state and the flexible substrate material is about 0.5mm, and the difference between the diameter of the lower rolling brush 12 in the non-working state and the distance between the lower rolling brush 12 in the working state and the flexible substrate material is also about 0.5mm. The bristles of the upper and lower rolling brushes 21 and 12 in the working state are in contact with the flexible substrate material, and the bristles of the upper and lower rolling brushes 21 and 12 in the non-working state are not in contact with the flexible substrate material. Too much contact between the rolling brushes and the flexible substrate material can damage the surface layer of the flexible substrate material, e.g. too much contact can scratch the flexible substrate material, and too little contact area can result in the cleaning not covering the entire area of the flexible substrate material. The contact area between the rolling brushes and the flexible substrate material can be adjusted in two ways, the first way is to adjust the position of the rolling brushes, and the second way is to adjust the position of the first and second rollers 13 and 41. The rolling brushes need to work under the action of spraying to avoid damage to the substrate or burning of the bristles in the absence of water. The first upper and lower spraying pipes 22 and 24 are connected to the pipe 33, and the backwater in the first chamber enters the first water tank 35 through the pipe 36. The first upper and lower spraying pipes 22 and 24 use ordinary pressure, and the pressure of the first upper spraying pipe 22 is about equal to the pressure of the first lower spraying pipe 24, and the pressure of the first upper and lower spraying pipes 22 and 24 ranges from 1-10kg / cm 2 .

[0039] As shown in Figure 2 , the first spraying device 3 is arranged in the second chamber, the first chamber and the second chamber are arranged adjacent to each other, the first spraying device 3 includes the second upper spraying pipe 31 and the second lower spraying pipe 32 below the second upper spraying pipe 31, the flexible substrate material entering the second chamber passes between the second upper spraying pipe 31 and the second lower spraying pipe 32, and the second upper spraying pipe 31 and the second lower spraying pipe 32 are used to spray water to the surface of the flexible substrate material to clean the flexible substrate material after the rolling brushes. The second upper spraying pipe 31 and the second lower spraying pipe 32 are both provided with a plurality of pipes, and the number of the second upper spraying pipe 31 and the second lower spraying pipe 32 is the same. All the second upper spraying pipes 31 and the second lower spraying pipes 32 are arranged in sequence along the direction of movement of the flexible substrate material, and each second lower spraying pipe 32 is located below one second upper spraying pipe 31.

[0040] As preferred, as shown in Figure 2As shown, the rolling brush device 2 and the first spraying device 3 adopt the same water supply pipeline and have the same pressure. That is, the first upper spraying pipe 22, the second upper spraying pipe 31 and the first lower spraying pipe 24, the second lower spraying pipe 32 have the same pressure. The first upper spraying pipe 22, the second upper spraying pipe 31 and the first lower spraying pipe 24, the second lower spraying pipe 32 are connected with the pipeline 33, the pipeline 33 is connected with the same water pump 3434, the water pump 3434 is connected with the first water tank 3535, the water in the first water tank 3535 is pressurized by the water pump 3434 and then supplied to the first upper spraying pipe 2222, the first lower spraying pipe 2424, the second upper spraying pipe 3131, the second lower spraying pipe 3232 through the pipeline 33, and the backwater in the second chamber enters the first water tank 35 through the pipeline 37.

[0041] As shown in Figure 2 The first air knife drying device 4 is arranged in the third chamber, the second chamber is located between the first chamber and the third chamber, the first air knife drying device 4 is used for sending hot air to the surface of the flexible substrate material, so as to achieve the purpose of drying the flexible substrate material, the first air knife drying device 4 comprises a first upper air knife 42 and a first lower air knife 43 located below the first upper air knife 42, the first upper air knife 42 and the first lower air knife 43 are both arranged in plurality and have the same number, all the first upper air knives 42 and the first lower air knives 43 are sequentially arranged along the running direction of the flexible substrate material, each first lower air knife 43 is located below one first upper air knife 42, the first upper air knife 42 and the first lower air knife 43 are located between the second roller 41 and the third roller 44, the second roller 41 and the third roller 44 are located in the third chamber, the second roller 41 and the third roller 44 are located below the flexible substrate material and are used for providing support and tension to the flexible substrate material, reducing the vibration in the movement of the flexible substrate material, avoiding the influence of the vibration on the drying effect and scratching the substrate. The height of the second roller 41 is less than the height of the third roller 44.

[0042] As shown in Figure 2 The first upper air knife 42 and the first lower air knife 43 are arranged on the front surface and the back surface of the flexible substrate material and are used in conjunction to obtain better effect. In the third chamber, the first upper air knife 42 and the first lower air knife 43 arranged at the first position form a first group of air knives, the first upper air knife 42 and the first lower air knife 43 arranged at the second position form a second group of air knives, …, the first upper air knife 42 and the first lower air knife 43 arranged at the Nth position form an Nth group of air knives, N is greater than and equal to 2, the second roller 41, the first position, the second position, …, the Nth position and the third roller 44 are sequentially arranged along the running direction of the flexible substrate material.

[0043] As preferred, as shown in Figure 6As shown, the angle between the first group of air knives to the N-1 group of air knives and the running direction of the flexible substrate material is 45-75°, and the angle between the N group of air knives and the running direction of the flexible substrate material is 90°. The blowing air knives in the running direction of the flexible substrate material, the first and second groups of air knives need to be used at a large angle to cut most of the water on the flexible substrate material, and to obtain better drainage effect, it is designed to be at a certain angle with the running direction of the flexible substrate material. As the air knife is at a 90° angle with the running direction, the water cutting effect is poor. In addition, the first upper air knife 42 and the first lower air knife 43 are completely symmetrical. The first group of air knives to the N-1 group of air knives mainly cut off most of the water on the surface of the flexible substrate material, and the N group of air knives is used to dry the surface of the flexible substrate material. In order to ensure the drying effect, the compressed air needs to be additionally heated, and the temperature is 0-80℃.

[0044] As preferred, the distance between the first upper air knife 42 and the first lower air knife 43 and the flexible substrate material is 0.5-5mm, which can be adjusted according to the air volume (CDA pressure). The blowing water effect of the air knife is not the larger the better, because too large air volume will cause water droplets to splash, and the flexible substrate material after blowing dry will have micro water droplets deposited, which will reduce the drying effect. But too small air volume will also affect the blowing water effect, so the air volume parameter is obtained by actual effect debugging.

[0045] As shown in Figure 2 The first upper air knife 42 is connected with the pipeline 47, and the pipeline 47 is provided with a first pressure gauge 45 for detecting pressure. The first lower air knife 43 is connected with the pipeline 47, and the pipeline 47 is provided with a second pressure gauge 460 for detecting pressure. The pipeline 47 is connected with the first heater, the first heater is connected with the compressed air source, the first heater is arranged between the pipeline 47 and the compressed air source, the first heater heats the compressed air provided by the compressed air source, and the pipeline 47 transmits the hot air after heating to the first upper air knife 42 and the first lower air knife 43 for blowing. The first heater can heat the air to achieve better effect, and the temperature of the air after heating by the first heater is 0-80℃.

[0046] As shown in Figure 2 The flexible substrate material coming out of the third chamber enters the first isolation chamber 5, and the fourth roller 51 is arranged in the first isolation chamber 5, which supports the flexible substrate material, and the height of the fourth roller 51 is less than that of the third roller 44.

[0047] As shown in Figure 2As shown, the laser cleaning device 116 is arranged in the fourth chamber, and the first isolation chamber 5 is arranged between the third chamber and the fourth chamber. The flexible substrate material from the first isolation chamber 5 enters the fourth chamber, and the laser cleaning device 116 performs laser treatment on the flexible substrate material. The laser cleaning device 116 includes a laser head 61 and a laser 63 connected to the laser head 61 through an optical fiber 62. The laser 63 is arranged outside the fourth chamber, and the laser head 61 is arranged inside the fourth chamber. The optical fiber 62 transmits the laser of a specific wavelength range generated by the laser 63 to the laser head 61, so as to realize impurity removal treatment on the surface of the flexible substrate material.

[0048] Further, the laser type of the laser cleaning device 116 can be one or more of Nd:YAG laser, carbon dioxide laser and excimer laser. Preferably, in the embodiment, the laser of the laser cleaning device 116 is selected from Nd:YAG laser.

[0049] Further, the distance between the laser head 61 and the flexible substrate material is determined according to the power of the designed laser and the substrate material. The distance between the laser head 61 and the flexible substrate material is set to 0-500 mm. A larger distance requires higher power, and a smaller distance requires higher laser head technology and the laser head is more affected by working dust.

[0050] Further, an inert gas is used as a protective gas in laser working, that is, the fourth chamber is filled with an inert gas to avoid oxidation of the metal flexible substrate material in the laser cleaning.

[0051] As shown, Figure 2 The flexible substrate material from the fourth chamber enters the second isolation chamber 7, and the fifth roller 72 is arranged in the second isolation chamber 7. The fifth roller 72 supports the flexible substrate material, and the height of the fifth roller 72 is the same as that of the fourth roller 51. The fourth chamber is arranged between the first isolation chamber 5 and the second isolation chamber 7, and the first isolation chamber 5 and the second isolation chamber 7 isolate the fourth chamber from the external environment to reduce the influence of the external environment air on the laser cleaning.

[0052] As shown, Figure 2 The second isolation chamber 7 is also provided with a dust collector 71. The dust collector 71 is used to adsorb the dust remaining on the surface of the flexible substrate material after laser treatment, so as to avoid the dust adhering to the fifth roller 72 and too much dust flowing into the downstream chamber. The dust collector 71 is connected to the pump set 52 through the pipeline 53. The first isolation chamber 5 and the second isolation chamber 7 are connected to the pipeline 53, and the pipeline 53 makes the first isolation chamber 5 and the second isolation chamber 7 in a communication state.

[0053] Further, the pump group 52 includes two or more groups of pumps, one group of pumps is connected to the first isolation chamber 5 and the second isolation chamber 7 through the pipe 53, and is used to pump out the air inside the first isolation chamber 5 and the second isolation chamber 7, so as to protect the flexible substrate material from oxidation during the laser cleaning process by pumping out the air inside the first isolation chamber 5 and the second isolation chamber 7 and then injecting inert gas. Another group of pumps is connected to the dust collector 71 through the pipe 53, and is used to suck dust.

[0054] As shown in Figure 2 , the second spraying device 8 is arranged in the fifth chamber, and the flexible substrate material coming out of the second isolation chamber 7 enters the fifth chamber and is cleaned by the second spraying device 8. The second spraying device 8 includes spray guns 82, sixth rollers 81 below the spray guns 82, and high-pressure pumps 85 connected to the spray guns 82. The number of the spray guns 82 is the same as that of the sixth rollers 81, and each sixth roller 81 is below one spray gun 82. The sixth rollers 81 are one or M groups, where M is greater than 1. All the sixth rollers 81 are at the same height, and the height of the sixth rollers 81 is greater than that of the fifth rollers 72. All the sixth rollers 81 are arranged in sequence along the direction of movement of the flexible substrate material.

[0055] As shown in Figure 2 and Figure 5 , the number of the spray guns 82 is the same as that of the sixth rollers 81. The spray guns 82 are arranged directly above the sixth rollers 81, and the perpendicular line of the spray guns 82 intersects the highest point of the sixth rollers 81. Preferably, the angle between the spray guns 82 and the flexible substrate material is 90°, the flexible substrate material is tangent to the highest point of the outer circular surface of the sixth rollers 81, and the center line of the spray guns 82 passes through the highest point of the outer circular surface of the sixth rollers 81 which is tangent to the flexible substrate material. This design is to avoid the high-pressure water gun from being broken by the high-pressure water during the cleaning of the substrate due to excessive local stress. In order to ensure the cleaning effect, the high-pressure spraying uses the high-pressure pump 85 to ensure the water pressure. The high-pressure pump 85 is a plunger pump, and the water pressure of the high-pressure pump 85 is greater than 100 kg / cm 2 .

[0056] As shown in Figure 2 , the high-pressure pump 85 is connected to the second water tank 86 and the spray guns 82 to supply the water pressure required by the high-pressure spray guns 82. The third pressure gauge 84 is arranged on the pipe 83 connecting the high-pressure pump 85 and the spray guns 82, and monitors the water pressure in the pipe 83. The water return pipe is arranged at the bottom of the fifth chamber and is connected to the water tank.

[0057] As shown in Figure 2As shown, the DI spraying device 9 is arranged in the sixth chamber, and the flexible substrate material coming out of the fifth chamber enters the sixth chamber and is cleaned by the DI spraying device 9. The DI spraying device 9 comprises a third upper spraying pipe 91 and a third lower spraying pipe 92 arranged below the third upper spraying pipe 91, and the included angle between the nozzle direction of the third upper spraying pipe 91 and the third lower spraying pipe 92 and the running direction of the flexible substrate material is 0-30°, the third upper spraying pipe 91 and the third lower spraying pipe 92 have equal pressure, and the same water supply pipe 93 is adopted.

[0058] As shown in the figure, Figure 2 Further, the third upper spraying pipe 91 and the third lower spraying pipe 92 are arranged on the front side and the back side of the flexible substrate material respectively, and the spraying mode is preferably fan-shaped spraying. The fourth pressure gauge 94 is used to monitor the water supply pressure of the third upper spraying pipe 91 and the third lower spraying pipe 92, and the water pressure in the third upper spraying pipe 91 and the third lower spraying pipe 92 is set to 1-10 kg / cm 2 .

[0059] As shown in the figure, Figure 2 Further, the backwater pipe 95 is used to recycle the residual water after spraying, and the backwater pipe 95 is used to connect the sixth chamber and the third water tank 96, and the backwater pipe 95 is arranged at the bottom of the sixth chamber, preferably at the lowest point.

[0060] Further, the DI water sprayed by the third upper spraying pipe 91 and the third lower spraying pipe 92 is supplied by the factory equipment, and the resistivity is required to be greater than 18 mega ohm / cm 2 .

[0061] Further, the third water tank 96 realizes the collection of residual water after spraying, and this part of water is used for spraying at the upstream end, i.e. the first water tank 35 and the second water tank 86, to realize the saving of cost. As shown in the figure, Figure 3 The third water tank 96 is connected with the second water tank 86, the second water tank 86 is connected with the first water tank 35,

[0062] The DI water is sprayed through the third upper spraying pipe 91 and the third lower spraying pipe 92, and then flows into the third water tank 96 through the backwater pipe 93 connected with the sixth cavity for storage. When the liquid level in the third water tank 96 reaches a set value, the liquid in the third water tank 96 "overflows" into the second water tank 86 upstream. When the liquid level in the second water tank 86 reaches a set value, the liquid in the second water tank 86 also "overflows" into the first water tank 35 upstream. The purity of the water quality in the three groups of water tanks is set as follows: the purity of the water quality in the first water tank 35 < the purity of the water quality in the second water tank 86 < the purity of the water quality in the third water tank 96. The influencing factors are that 70-80% of the residual powder and impurities in the incoming material will be cleaned by the rolling brush, and then the water quality condition of the first water tank 35 is the worst. Therefore, the water outlet of the first water tank 35 needs to be provided with a filter to filter the water quality, and the filter element of the filter is 10-50um. The second spraying device 8 is used to clean the residual material on the surface of the flexible substrate material after laser treatment, and the number is small and the water quality is deviated. A filter of 1-10um can be added to the external pipeline.

[0063] As shown in Figure 2 The second air knife drying device 10 is arranged in the seventh cavity, and the flexible substrate material coming out of the sixth cavity enters the seventh cavity. The second air knife drying device 10 is used to send hot air to the surface of the flexible substrate material, so as to achieve the purpose of drying the flexible substrate material. The second air knife drying device 10 includes a second upper air knife 101 and a second lower air knife 102 located below the second upper air knife 101. The second upper air knife 101 and the second lower air knife 102 are both provided with a plurality of air knives, and the number of the second upper air knife 101 and the second lower air knife 102 is the same. All the second upper air knives 101 and the second lower air knives 102 are arranged in sequence along the direction of movement of the flexible substrate material, and each second lower air knife 102 is located below one second upper air knife 101.

[0064] As shown in Figure 2 The second upper air knife 101 and the second lower air knife 102 are arranged on the front surface and the back surface of the flexible substrate material, and are used in conjunction to obtain better effect. In the seventh cavity, the second upper air knife 101 and the second lower air knife 102 arranged at the first position form a first group of air knives, the second upper air knife 101 and the second lower air knife 102 arranged at the second position form a second group of air knives, and so on. The second upper air knife 101 and the second lower air knife 102 arranged at the Nth position form an Nth group of air knives, where N is greater than or equal to 2. The second roller 41, the first position, the second position,..., the Nth position and the third roller 44 are arranged in sequence along the direction of movement of the flexible substrate material.

[0065] As a preferred embodiment,Figure 6 As shown, in the seventh chamber, the angle between the first group of air knives to the (N-1)th group of air knives and the direction of travel of the flexible substrate material is 45-75°, and the angle between the Nth group of air knives and the direction of travel of the flexible substrate material is 90°. Furthermore, the positions of the second upper air knife 101 and the second lower air knife 102 are completely symmetrical. The main function of the first group of air knives to the (N-1)th group of air knives is to cut away most of the water on the surface of the flexible substrate material. The Nth group of air knives is used to dry the surface of the flexible substrate material. To ensure the drying effect, the compressed air needs to be additionally heated to a temperature of 0-80℃.

[0066] Preferably, the distance between the second upper air knife 101 and the second lower air knife 102 and the flexible substrate material is 0.5-5 mm, and the distance between the air knife and the substrate can be adjusted according to the air volume (CDA pressure).

[0067] like Figure 2 As shown, the second upper air knife 101 is connected to pipe 103, and a fifth pressure gauge 104 for pressure detection is installed on pipe 103. Pipe 103 is also connected to the second heater. The second lower air knife 102 is connected to pipe, and a sixth pressure gauge 105 for pressure detection is installed on pipe. Pipe is also connected to the second heater. The second heater is connected to a compressed air source and heats the compressed air supplied by the compressed air source. The pipe then transmits the heated air to the second upper air knife 101 and the second lower air knife 102 for purging. The second heater can heat the air to achieve better results; the temperature of the air heated by the second heater is 0-80℃.

[0068] like Figure 2 As shown, the optical cleaning device 11 is located in the eighth chamber. Flexible substrate material exiting the seventh chamber enters the eighth chamber. The optical cleaning device 11 is used to irradiate the flexible substrate material with ultraviolet light to remove residual organic matter from its surface, achieving the effect of decontamination and impurity removal. The optical cleaning device 11 includes a light source 110 and a controller 111. The light source 110 is connected to the controller 111. The light source 110 is located in the eighth chamber and is used to emit ultraviolet light. The controller 111 is used to control the output conditions of the light source.

[0069] Preferably, the light source 110 is a high-power low-pressure mercury lamp, and the number of light sources 110 is one or more sets, the number of which is determined according to the material properties and area of ​​the substrate.

[0070] like Figure 6As shown in the figure, the water on the flexible substrate material is cut by the air knife, and the compressed air enters the upper and lower air knives and is blown out at high speed in the form of a thin air sheet with a thickness of only 0.01-1mm. Through the principle of the Coanda effect and the special geometry of the air knife, the thin air curtain can reach 30-40 times the ambient air, and a thin high-strength air curtain is formed. In addition, in order to ensure the effect of the air knife, the air knife and the substrate have an angle requirement of 0-90°, and the principle is that the first group to the N-1 group mainly cut off most of the water, and the N group of air knives is responsible for drying the surface of the substrate. In order to ensure the drying effect, the design includes additional heating of the compressed air, with a temperature of 0-80℃.

[0071] The first air knife drying device is arranged between the two cleaning processes. The surface of the flexible substrate material cleaned by the first spraying device 3 has water, and the surface of the flexible substrate material cannot have water when entering the laser cleaning device 116. Therefore, the first air knife drying device is needed to dry the surface of the flexible substrate material. Water is a medium, and any means must pass through the surface layer of water to act on the flexible substrate material. Therefore, a second air knife drying device is also needed to dry the surface of the flexible substrate material.

[0072] As shown in Figure 2 and Figure 4 , the cleaning device is provided with a first roller 13, a second roller 41, a third roller 44, a fourth roller 51, a fifth roller 72, a sixth roller 81, and a seventh roller. The seventh roller is located outside the eighth chamber, and the height of the seventh roller is the same as the height of the sixth roller 81. The first roller 13 and the seventh roller are also provided with a tension sensor 400, which is connected to the controller 600 through a line 500. After the controller 600 is corrected, real-time tension data can be obtained. The second roller 41, the third roller 44, the fourth roller 51, the fifth roller 72, and the sixth roller 81 do not have a tension testing function.

[0073] In this embodiment, the first roller 13, the second roller 41, the third roller 44, the fourth roller 51, the fifth roller 72, the sixth roller 81, and the seventh roller are made of polymeric material or stainless steel material.

[0074] Figure 7 As shown in the figure, the flexible substrate material surface has residual impurities. The surface of the flexible substrate material cleaned by the existing device always has dark residues, and the surface of the flexible substrate material cleaned by the cleaning device of the present application cannot be seen.

[0075] The flexible substrate material cleaning device with the above structure has the following cleaning process for the flexible substrate material:

[0076] P1, first install the flexible substrate material to the loading platform 1, connect with the reserved flexible substrate material in the first chamber or pass the whole flexible substrate material through the cleaning equipment, finally achieve the flexible substrate material through all the chambers and corresponding functional structures between the loading platform 1 and the discharging platform 12;

[0077] P2, start the equipment, increase the tension of the flexible substrate material to more than 100ibs, then start all the functions, including transmission, roller brush, spraying, mass flow controller (flow greater than 200sccm), laser 63, pump group, high-pressure spraying, air knife drying, pressure mercury lamp supply;

[0078] P3, when the flexible substrate material runs into the first chamber, first perform the roller brush device 2 to clean the front and back of the flexible substrate material, after completing the roller brush cleaning, run into the second chamber to perform ordinary spraying cleaning, after passing through the two chambers, the surface of the flexible substrate material has been cleaned by 70-80% of the residual powder, impurities and organic matter.

[0079] P4, after completing the P3 process, the flexible substrate material passes through the third chamber to perform the cutting and air drying effect of the multiple groups of air knives above and below the flexible substrate material, after completing the air drying of the flexible substrate material, run into the first isolation chamber 5, the fourth chamber and the second isolation chamber 7, the first isolation chamber 5 and the second isolation chamber 7 isolate the flexible substrate material entering and leaving the fourth chamber from the external environment, prevent the flexible substrate material from being oxidized for a short time after laser cleaning, complete the adsorption treatment of the residual powder on the surface of the flexible substrate material in the second isolation chamber 7;

[0080] P5, after completing the process P4, the flexible substrate material flows into the fifth chamber to perform high-pressure spraying, and then flows into the sixth chamber to perform DI pure water spraying;

[0081] P6, after completing the DI pure water spraying of the flexible substrate material, the flexible substrate material flows into the seventh chamber to perform the air knife drying effect, and then injects the flexible substrate material into the eighth chamber to perform the photosensitization reaction of ultraviolet light, remove the organic matter on the surface of the flexible substrate material, mainly lipids and glue.

[0082] P7, after completing the cleaning of the above six paragraphs, the cleanliness and surface specification of the flexible substrate material have exceeded the level that can be achieved by general cleaning equipment. Finally, recycle in the discharging platform 12.

[0083] The flexible substrate material cleaning equipment with the above structure has the following advantages:

[0084] 1. Set the laser cleaning, which has cleaning effect on particles, organic matter and lipids with strong adhesion on the surface of the substrate, belongs to the non-contact type, and because of the large difference between the impurities and the substrate material, the reasonable wavelength laser cleaning will not damage the surface of the substrate.

[0085] 2. The fine gap on the substrate surface can be solved by high pressure spraying, which makes up the disadvantages of conventional ultrasonic cleaning which needs chemical cleaning agent.

[0086] 3. A plurality of high-function low-pressure mercury lamps are used as ultraviolet light sources to irradiate the substrate material, destroy the structure of the residual organic matter on the substrate surface, and finally form gas discharge, thereby realizing non-contact and high-precision cleaning.

[0087] In the description of the present application, it should be noted that the terms "upper", "lower" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0088] In the description of the present application, it should be noted that unless otherwise specified and limited, the terms "mounting", "communication", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection; it can be direct communication, or indirect communication through intermediate medium, or communication between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances. In addition, in the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0089] The above is only the preferred embodiment of the present application, and is not intended to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the principles of the present application shall be included in the protection scope of the present application.

[0090] The present application has been described above with reference to the drawings. Obviously, the specific implementation of the present application is not limited by the above manner. Any non-essential improvement made by using the method concept and technical solution of the present application; or without improvement, the above concept and technical solution of the present application are directly applied to other occasions, which are all within the protection scope of the present application.

Claims

1. A flexible substrate material cleaning apparatus, characterized by: The laser cleaning device is arranged in the fourth chamber, the first isolation chamber is located between the third chamber and the fourth chamber, the fourth roller is arranged in the first isolation chamber, the flexible substrate material from the first isolation chamber enters the fourth chamber, and the laser cleaning device performs laser treatment on the flexible substrate material; the laser cleaning device comprises a laser head and a laser device connected with the laser head through an optical fiber, the laser device is located outside the fourth chamber, the laser head is located inside the fourth chamber, the optical fiber transmits laser of a specific wavelength range generated by the laser device to the laser head, and impurity removal treatment is performed on the surface of the flexible substrate material; The flexible substrate material from the fourth chamber enters the second isolation chamber, the fifth roller is arranged in the second isolation chamber, the fifth roller supports the flexible substrate material, and the height of the fifth roller is the same as that of the fourth roller; the fourth chamber is arranged between the first isolation chamber and the second isolation chamber, the first isolation chamber and the second isolation chamber isolate the fourth chamber from the external environment, and the influence of external environment air on laser cleaning is reduced; the dust collector is also arranged in the second isolation chamber, the dust collector is used for adsorbing residual dust on the surface of the flexible substrate material after laser treatment, and the dust is prevented from adhering to the fifth roller and excessive dust from flowing into the downstream chamber; the dust collector is connected with the pump group through the pipeline, the first isolation chamber and the second isolation chamber are connected with the pipeline, and the pipeline makes the first isolation chamber and the second isolation chamber in a communication state; The second spraying device is arranged in the fifth chamber, the flexible substrate material from the second isolation chamber enters the fifth chamber, and the second spraying device is used for cleaning the flexible substrate material; the second spraying device comprises a spray gun, a sixth roller located below the spray gun, and a high-pressure pump connected with the spray gun, the number of the spray gun is the same as that of the sixth roller, each sixth roller is located below one spray gun, the sixth rollers are one group or M groups, M is greater than 1, all the sixth rollers are at the same height, the height of the sixth roller is greater than that of the fifth roller, and all the sixth rollers are arranged in sequence along the running direction of the flexible substrate material; the position of the spray gun is arranged directly above the sixth roller, and the vertical line of the spray gun intersects with the highest point of the outer circular surface of the sixth roller; The angle between the spray gun and the flexible substrate material is 90°, the flexible substrate material is tangent to the highest point of the outer circular surface of the sixth roller, and the center line of the spray gun passes through the highest point of the outer circular surface of the sixth roller tangent to the flexible substrate material; ​ The DI spraying device is arranged in the sixth chamber, and the flexible substrate material from the fifth chamber enters the sixth chamber and is cleaned by the DI spraying device; the DI spraying device comprises a third upper spraying pipe and a third lower spraying pipe below the third upper spraying pipe, an included angle between a nozzle direction of the third upper spraying pipe and the third lower spraying pipe and a running direction of the flexible substrate material is 0-30°, the third upper spraying pipe and the third lower spraying pipe have equal pressure, and a same water supply pipe is adopted; The second air cutting and drying device is arranged in the seventh chamber, and the flexible substrate material from the sixth chamber enters the seventh chamber, the second air cutting and drying device is used for sending hot air to the surface of the flexible substrate material, so that the flexible substrate material is dried, the second air cutting and drying device comprises a second upper air knife and a second lower air knife below the second upper air knife, a plurality of the second upper air knives and the second lower air knives are arranged, and the number of the second upper air knives is the same as that of the second lower air knives, all the second upper air knives and the second lower air knives are sequentially arranged along the running direction of the flexible substrate material, and each second lower air knife is below one second upper air knife; The light cleaning device is arranged in the eighth chamber, and the flexible substrate material from the seventh chamber enters the eighth chamber, the light cleaning device is used for irradiating the flexible substrate material by using ultraviolet rays, removing residual organic matters on the surface of the flexible substrate material, and achieving the effect of removing dirt and impurities; the light cleaning device comprises a light source and a controller, the light source is connected with the controller, the light source is arranged in the eighth chamber, the light source is used for emitting ultraviolet rays, and the controller is used for controlling the output condition of the light source.

2. The flexible substrate material cleaning apparatus of claim 1, wherein: The first spraying device comprises a second upper spraying pipe and a second lower spraying pipe below the second upper spraying pipe, and the rotating directions of the upper roll brush and the lower roll brush are opposite to the running direction of the flexible substrate material.

3. The flexible substrate material cleaning apparatus of claim 1, wherein: The high-pressure pump is a plunger pump, and the water pressure of the high-pressure pump is greater than 100 kg / cm 2 .

4. The flexible substrate material cleaning apparatus of claim 1, wherein: The first air cutting and drying device comprises a first upper air knife and a first lower air knife below the first upper air knife, a plurality of the first upper air knives and the first lower air knives are arranged, and the first upper air knife and the first lower air knife are located between the second roller and the third roller.

5. The flexible substrate material cleaning apparatus of claim 4, wherein: The distance between the first upper air knife, the first lower air knife and the flexible substrate material is 0.5-5mm, the first upper air knife and the first lower air knife arranged at the first position form a first group of air knives, the first upper air knife and the first lower air knife arranged at the Nth position form an Nth group of air knives, N is greater than or equal to 2, an included angle between the first group of air knives to the (N-1)th group of air knives and the running direction of the flexible substrate material is 45-75°, and an included angle between the Nth group of air knives and the running direction of the flexible substrate material is 90°.

6. The flexible substrate material cleaning apparatus according to any one of claims 1 to 4, characterized by: The distance between the second upper air knife and the second lower air knife and the flexible substrate material is 0.5-5mm, the second upper air knife and the second lower air knife arranged at the first position form a first group of air knives, the second upper air knife and the second lower air knife arranged at the Nth position form an Nth group of air knives, N is greater than and equal to 2, the angle between the Nth group of air knives and the running direction of the flexible substrate material is 90°.

7. The flexible substrate material cleaning apparatus according to any one of claims 1 to 4, characterized by: The distance between the laser head and the flexible substrate material is 0-500mm.

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