Winding coating machine for simultaneous double-sided coating

Abstract

The present application relates to a winding type coating machine for simultaneous double-sided coating, belonging to the technical field of coating machines. The winding type coating machine for simultaneous double-sided coating includes a vacuum chamber, an unwinding roller, and a winding roller. The unwinding roller and the winding roller are both rotatably arranged in the vacuum chamber. A first main roller and a second main roller are rotatably arranged in the vacuum chamber. The first main roller and the second main roller are arranged oppositely. The substrate film located between the unwinding roller and the winding roller is sequentially slidably lapped on the first main roller and the second main roller. A transition roller group is arranged in the vacuum chamber. The substrate film located between the first main roller and the second main roller is slidably lapped on the transition roller group. The transition roller group is used to make the side of the substrate film facing away from the first main roller adhere to the second main roller when the substrate film moves from the first main roller to the second main roller. Target seat groups are distributed below both the first main roller and the second main roller. The target seat groups are arranged in the vacuum chamber. The present application has the effect of ensuring production capacity to a certain extent.

Description

Technical Field

[0001] This application relates to the technical field of coating machines, especially the winding coating machine for simultaneous double-sided coating. Background Art

[0002] A winding coating machine refers to a device that prepares one or more layers of thin films on the surface of a coiled substrate material in a vacuum chamber by methods such as thermal evaporation or magnetron sputtering. The working principle of a magnetron sputtering winding coating machine is mainly that electrons are accelerated by an electric field and fly towards the substrate thin film. During this process, they collide with the sputtering gas argon, ionizing a large number of argon ions and electrons. During the process of electrons flying towards the substrate thin film, they continuously collide with argon atoms. The argon ions are accelerated by the electric field and bombard the target, sputtering a large number of target atoms. The neutral target atoms (or molecules) are deposited on the surface of the substrate thin film to form a film.

[0003] In the related art, a magnetron sputtering winding coating machine mainly includes a vacuum chamber. Inside the vacuum chamber, a unwind roll, a main roll, a wind-up roll, and multiple intermediate rolls are rotatably arranged. The substrate thin film is wound around the unwind roll, then slides and laps onto the intermediate rolls and the main roll in sequence, and finally is wound around the wind-up roll for winding. The unwind roll, the main roll, the wind-up roll, and the multiple intermediate rolls can all be driven to rotate by motors. Inside the vacuum chamber, there is a target seat located below the main roll, and a target is installed on the target seat. When in use, the motors are started, the unwind roll unwinds the substrate thin film to be coated. The substrate thin film is conveyed by the intermediate rolls and reaches the main roll. The working procedure of the target is started, so that the target atoms are deposited on the surface of the substrate thin film to form a film. Then the substrate thin film is conveyed to the wind-up roll for winding.

[0004] In view of the above related art, the target seat can only coat one side of the substrate thin film at a time. When it is actually required to coat one or more layers on both sides of the substrate thin film, the vacuum chamber needs to be opened, and the substrate needs to be re-oriented to coat the other side of the substrate, resulting in low productivity. Summary of the Invention

[0005] To help ensure productivity, this application provides a winding coating machine for simultaneous double-sided coating.

[0006] The winding coating machine for simultaneous double-sided coating provided by this application adopts the following technical solutions:

[0007] The winding coating machine for coating both sides simultaneously includes a vacuum chamber, an unwinding roller, and a winding roller. The unwinding roller and the winding roller are both rotatably arranged in the vacuum chamber. A first main roller and a second main roller are rotatably arranged in the vacuum chamber. The first main roller and the second main roller are arranged opposite to each other. The substrate film located between the unwinding roller and the winding roller is sequentially slidably lapped on the first main roller and the second main roller. A transition roller group is arranged in the vacuum chamber. The substrate film located between the first main roller and the second main roller is slidably lapped on the transition roller group. The transition roller group is used to make the side of the substrate film facing away from the first main roller fit on the second main roller when the substrate film moves from the first main roller to the second main roller. Target seat groups are distributed below both the first main roller and the second main roller. The target seat groups are arranged in the vacuum chamber and are used to install targets for magnetron sputtering on the substrate film.

[0008] Preferably, an installation plate is arranged in the vacuum chamber. The installation plate corresponds to the target seat groups one by one. Each target seat group includes a plurality of target seats rotatably arranged on the corresponding installation plate. The rotation axis of the target seat is parallel to the rotation axes of the first main roller and the second main roller. The longitudinal section of the target seat is polygonal. Different sides of the target seat are used to install different targets. A rotation component is arranged on the installation plate for driving the corresponding plurality of target seats to rotate synchronously or be fixed.

[0009] Preferably, a rotating shaft is arranged on the target seat. The rotating shaft rotates on the corresponding installation plate. The rotation component includes a rotating rod, a belt pulley, a belt, and a driving source. The rotating rod is rotatably arranged on the installation plate. The rotation axis of the rotating rod is parallel to the rotation axis of the target seat on the corresponding installation plate. The belt pulleys are respectively sleeved on the rotating rod and the rotating shaft on the installation plate. The belt is wound around a plurality of belt pulleys. The plurality of belt pulleys are connected by belt transmission. The driving source is used to drive the rotating rod to rotate.

[0010] Preferably, the driving source includes a worm rotatably arranged on the installation plate, a worm gear sleeved on the rotating rod, and a motor arranged on the installation plate. The worm meshes with the worm gear on the corresponding installation plate. The motor is used to drive the worm to rotate.

[0011] Preferably, the installation plate is slidably arranged in the vacuum chamber. The sliding direction of the installation plate is perpendicular to the rotation axis of the first main roller. An adjusting component is arranged in the vacuum chamber for adjusting the installation plate to drive the target seat to slide in a direction close to or away from the substrate film.

[0012] Preferably, the adjusting assembly includes a first gear rotatably arranged on the mounting plate, a rack arranged in the vacuum chamber, and a pushing member arranged in the vacuum chamber. The rotation axis of the first gear is parallel to the rotation axis of the worm. The first gear is an incomplete gear and is coaxially connected to the output shaft of the motor. The length direction of the rack is parallel to the sliding direction of the mounting plate. A connecting rod is coaxially connected to the worm, and a second gear is sleeved on the connecting rod. The first gear is located between the rack and the second gear. The first gear is used to mesh with the rack, the second gear is used to mesh with the first gear, and the pushing member is used to push the mounting plate to slide towards the direction close to the base film. When the first gear meshes with the rack, the first gear disengages from the second gear.

[0013] Preferably, the pushing member includes a spring for pushing the mounting plate to slide towards the direction close to the base film. One end of the spring is arranged on the inner wall of the vacuum chamber, and the other end is arranged on the mounting plate.

[0014] Preferably, a sliding rod is arranged on the side of the mounting plate away from the base film. The sliding rod slides in the vacuum chamber, and a friction block is arranged on the sliding rod. A friction strip for relatively sliding with the friction block is arranged in the vacuum chamber. The friction force between the friction block and the friction strip is less than the thrust of the spring.

[0015] Preferably, the first main roller and the second main roller are located between the unwinding roller and the winding roller. The transition roller group includes a plurality of first transition rollers rotatably arranged in the vacuum chamber. The first transition rollers are located above the first main roller and the second main roller. The base film between the first main roller and the second main roller slides and overlaps above the first transition rollers.

[0016] Preferably, the unwinding roller and the winding roller are located on the same side of the first main roller and the second main roller. The transition roller group includes a second transition roller, a third transition roller, and a plurality of fourth transition rollers. The second transition roller, the third transition roller, and the plurality of fourth transition rollers are all rotatably arranged in the vacuum chamber. The second transition roller, the third transition roller, and the plurality of fourth transition rollers are all located above the first main roller and the second main roller. The fourth transition roller is located above the winding roller or the unwinding roller. The base film between the first main roller and the second main roller sequentially slides and overlaps on the second transition roller, the fourth transition roller, and the third transition roller.

[0017] In summary, the present application includes the following beneficial technical effects:

[0018] The unwinding roller rotates to unwind the base film, and the winding roller rotates to wind the base film. When the base film passes through the first main roller, the target material on the target seat group below the first main roller performs magnetron sputtering on the base film, realizing coating on one side of the base film. The base film between the first main roller and the second main roller is reversed by the transition roller group, so that the side of the base film away from the first main roller fits with the second main roller, so that the side that was not coated before is coated under the action of the target material on the target seat group below the second main roller, thus realizing double-sided simultaneous coating without the need for staff to open the vacuum chamber to reverse the base film, which helps to ensure production capacity. Description of the Drawings

[0019] Figure 1 It is a cross-sectional view of the overall structure of Embodiment 1 of the present application.

[0020] Figure 2 It is a cross-sectional view of the overall structure of another depth of Embodiment 1 of the present application, mainly used to show the structure of the rotating assembly.

[0021] Figure 3 It is Figure 2 An enlarged view of part A in

[0022] Figure 4 It is Figure 2 An enlarged view of part B in

[0023] Figure 5 It is a cross-sectional view of the overall structure of Embodiment 2 of the present application.

[0024] Description of the reference numerals: 1, vacuum chamber; 2, unwinding roller; 3, winding roller; 4, first main roller; 5, second main roller; 6, mounting plate; 7, target seat; 8, rotating assembly; 81, rotating rod; 82, pulley; 83, belt; 84, drive source; 841, worm; 842, worm gear; 843, motor; 9, rotating shaft; 10, first gear; 11, rack; 12, connecting rod; 13, second gear; 14, spring; 15, sliding rod; 16, friction block; 17, friction strip; 18, first transition roller; 19, second transition roller; 20, third transition roller; 21, fourth transition roller; 22, driving roller; 23, sliding cylinder; 24, baffle; 25, support plate; 26, chute. Detailed Description of the Embodiments

[0025] The following will Figures 1-5 further describe the present application in detail with reference to the attached

[0026] Embodiment 1:

[0027] The embodiment of the present application discloses a winding type coating machine for double-sided simultaneous coating. Refer to Figure 1, The winding type coating machine with double-sided simultaneous coating includes a vacuum chamber 1, an unwinding roller 2 and a winding roller 3. The longitudinal section of the vacuum chamber 1 is an octagon. In other embodiments, the vacuum chamber 1 can also be other polygonal cavities. The unwinding roller 2 and the winding roller 3 are both rotatably arranged in the vacuum chamber 1. The unwinding roller 2 is located above the winding roller 3. The unwinding roller 2 and the winding roller 3 can be driven by a driving motor, which belongs to the prior art and will not be elaborated here.

[0028] Refer to Figure 1 , A first main roller 4 and a second main roller 5 are rotatably arranged in the vacuum chamber 1. The first main roller 4 and the second main roller 5 are symmetrically arranged. The first main roller 4 and the second main roller 5 are arranged horizontally from left to right in sequence. The rotation axes of the first main roller 4 and the second main roller 5 are parallel to the rotation axes of the unwinding roller 2 and the winding roller 3. The first main roller 4 and the second main roller 5 are located between the unwinding roller 2 and the winding roller 3. The unwinding roller 2 is located above the first main roller 4. The winding roller 3 is located below the first main roller 4 and the second main roller 5 and between the first main roller 4 and the second main roller 5. The unwinding roller 2 is located on the side of the winding roller 3 close to the first main roller 4. The substrate film located between the unwinding roller 2 and the winding roller 3 slides and laps on the lower sides of the first main roller 4 and the second main roller 5 in sequence.

[0029] Refer to Figure 1 , A transition roller group is arranged in the vacuum chamber 1. The substrate film located between the first main roller 4 and the second main roller 5 slides and laps on the transition roller group. The transition roller group is used to make the side of the substrate film facing away from the first main roller 4 fit on the second main roller 5 when the substrate film moves from the first main roller 4 to the second main roller 5; The transition roller group includes a plurality of first transition rollers 18 rotatably arranged in the vacuum chamber 1. The first transition rollers 18 are located above the first main roller 4 and the second main roller 5 and below the unwinding roller 2. In this embodiment, two first transition rollers 18 are provided. One of the first transition rollers 18 is located on the side of the first main roller 4 close to the second main roller 5, and the other first transition roller 18 is located above the second main roller 5. The substrate film located between the first main roller 4 and the second main roller 5 slides and laps on the upper sides of the two first transition rollers 18. A transmission roller 22 is rotatably arranged in the vacuum chamber 1. The transmission roller 22 is located on the side of the second main roller 5 close to the first main roller 4. The winding roller 3 is located below the transmission roller 22 and on the side of the transmission roller 22 away from the second main roller 5. The substrate film located between the winding roller 3 and the second main roller 5 slides and laps on the upper side of the transmission roller 22.

[0030] Refer to Figure 1 and Figure 2, below both the first main roller 4 and the second main roller 5, there is a distribution of target seat groups. Each target seat group includes multiple target seats 7. The target seats 7 are installed in the vacuum chamber 1. The target seats 7 are used to install target materials for magnetron sputtering on the substrate film. Starting the program on the target material to perform magnetron sputtering on the substrate film belongs to the prior art and will not be elaborated here. In this embodiment, the target material on the target seat 7 below the first main roller 4 is a silver target material, and the target material on the target seat 7 below the second main roller 5 is an ITO target material.

[0031] During operation, the unwinding roller 2 rotates to unwind the substrate film, and the winding roller 3 rotates to wind the substrate film. When the substrate film passes through the lower side of the first main roller 4, the target material on the target seat 7 below the first main roller 4 starts the program to perform magnetron sputtering on the substrate film, thereby achieving coating on one side. And the side of the substrate film away from the first main roller 4 is reversed after passing through the two first transition rollers 18 and then adheres to the second main roller 5, so that the side that was not coated before is coated under the action of the target material below the second main roller 5, thus realizing double-sided simultaneous coating. There is no need for the staff to open the vacuum chamber 1 to separately reverse the substrate film, which can ensure the production capacity to a certain extent.

[0032] Refer to Figure 1 and Figure 2 , in the vacuum chamber 1, a mounting plate 6 is slidably arranged. The mounting plate 6 corresponds to the target seat group one by one. The mounting plate 6 is an arc-shaped plate. The mounting plate 6 is located below the first main roller 4 and the second main roller 5. The mounting plate 6 on the side close to the first main roller 4 is used to be concentric with the first main roller 4, and the mounting plate 6 on the side close to the second main roller 5 is used to be concentric with the second main roller 5. The mounting plate 6 slides in the vertical direction, and the sliding direction of the mounting plate 6 is perpendicular to the rotation axis of the first main roller 4. The bottom wall of the mounting plate 6 is fixed with two sliding rods 15 which are arranged oppositely. On the bottom wall of the vacuum chamber 1, sliding cylinders 23 are fixed. The sliding cylinders 23 correspond to the sliding rods 15 one by one. The sliding rods 15 slidably penetrate through the corresponding sliding cylinders 23, which helps to guide the sliding of the mounting plate 6.

[0033] Refer to Figure 1 and Figure 2The target holders 7 of the target holder group are all coaxially fixed with a rotating shaft 9. Baffles 24 are fixed on opposite sides of the mounting plate 6. The rotating shaft 9 is rotatably installed on the baffles 24 of the corresponding mounting plate 6. The rotation axis of the target holder 7 is parallel to the rotation axis of the first main roller 4 and the second main roller 5. The multiple target holders 7 are arranged in sequence along the circumference of the corresponding mounting plate 6. In this embodiment, there are three target holders 7 in the target holder group. In other embodiments, the number of target holders 7 can be set as needed. The longitudinal cross-section of the target holder 7 is polygonal. In this embodiment, the longitudinal cross-section of the target holder 7 is hexagonal. Different sides of the target holder 7 are used to mount different target materials. The mounting plate 6 is provided with a rotating assembly 8 for driving the corresponding multiple target holders 7 to rotate or fix synchronously. The vacuum chamber 1 is provided with an adjustment assembly for adjusting the mounting plate 6 to drive the target holder 7 to slide toward or away from the substrate film.

[0034] When it is necessary to plate other materials on the surface of the substrate film, the mounting plate 6 is adjusted by the adjustment component to drive the multiple target seats 7 to slide a certain distance in the direction away from the substrate film, and then the multiple target seats 7 on the mounting plate 6 are driven to rotate by the rotating component 8. At this time, the target seat 7 rotates the required target material to correspond to the substrate film and fixes it, which helps to prevent the substrate film from being easily scratched when the target seat 7 rotates; then the mounting plate 6 is adjusted by the adjustment component to drive the multiple target seats 7 to slide a certain distance in the direction close to the substrate film, so that the required target material is close to the substrate film, and then the program on the corresponding target material is started, so that multiple layers of different materials can be plated on the substrate film, and the coating effect is good. There is no need to open the vacuum chamber 1 to replace the target material, which helps to ensure production capacity.

[0035] Reference Figure 2 and Figure 3 In order to facilitate the synchronous rotation or fixation of multiple target seats 7 on the baffle 24, the rotating assembly 8 includes a rotating rod 81, a pulley 82, a belt 83 and a driving source 84. The rotating rod 81 is rotatably arranged on the outer wall of the baffle 24 on one side. The rotation axis of the rotating rod 81 is parallel to the rotation axis of the target seat 7 on the corresponding baffle 24. The rotating rod 81 is located above the rotating shaft 9 on the corresponding baffle 24. The pulleys 82 are respectively fixedly mounted on the rotating rod 81 and the rotating shaft 9 on the baffle 24. The connecting line of the four pulleys 82 forms a parallelogram. The belt 83 is wound around the pulley 82. The multiple pulleys 82 are connected by the belt 83 for transmission. The driving source 84 is used to drive the rotating rod 81 to rotate.

[0036] Reference Figure 2 and Figure 3, to facilitate the rotation of the rotating rod 81, an L-shaped support plate 25 is fixed on the baffle 24. The support plate 25 is located on the side of the baffle 24 away from the winding roller 3. The driving source 84 includes a worm 841, a worm gear 842, and a motor 843. The worm gear 842 is fixedly sleeved on the rotating rod 81. The worm gear 842 is located on the side of the belt pulley 82 away from the baffle 24. The worm 841 is rotatably arranged on the baffle 24. The rotation axis of the worm 841 is arranged horizontally. The rotation axis of the worm 841 is perpendicular to the rotation axis of the target seat 7 (refer to Figure 1 ). The worm 841 meshes with the worm gear 842 on the corresponding baffle 24. The motor 843 is fixedly installed on the support plate 25. The motor 843 is a reduction motor. The motor 843 is used to drive the worm 841 to rotate.

[0037] When it is necessary to drive the rotation of the target seat 7 on the baffle 24, start the motor 843. The motor 843 drives the worm 841 to rotate. The worm 841 drives the worm gear 842 to rotate, so that the worm gear 842 drives the rotating rod 81 to rotate. Through the transmission between the belt pulley 82 and the belt 83, the plurality of rotating shafts 9 drive the target seat 7 to rotate, so that the target material required on the target seat 7 can be rotated to a position close to the base film, which helps to deposit films of different materials on the base film. There is no need to open the vacuum chamber 1 to replace the target material, which helps to ensure the production capacity.

[0038] Refer to Figure 2 and Figure 3 , to facilitate the adjustment of the installation plate 6 to slide in a direction close to or away from the base film, the adjustment assembly includes a first gear 10, a rack 11, and a pushing member. The first gear 10 is rotatably arranged on the baffle 24. The rotation axis of the first gear 10 is parallel to the rotation axis of the worm 841. The first gear 10 is an incomplete gear. The first gear 10 is coaxially fixed to the output shaft of the motor 843. The rack 11 corresponds to the first gear 10 one by one. The rack 11 is fixedly connected to the inner wall of the vacuum chamber 1. The length direction of the rack 11 is parallel to the sliding direction of the installation plate 6. A connecting rod 12 is coaxially fixed on the worm 841. The connecting rod 12 is located on the side of the worm 841 away from the winding roller 3. A second gear 13 is fixedly sleeved on the connecting rod 12. The first gear 10 is located between the corresponding rack 11 and the second gear 13. The first gear 10 is used to mesh with the rack 11. The second gear 13 is used to mesh with the first gear 10. When the first gear 10 meshes with the rack 11, the first gear 10 is disengaged from the second gear 13. The motor 843 drives the worm 841 to rotate through the transmission of the first gear 10 and the second gear 13.

[0039] Refer to Figure 2 and Figure 4, the pusher is arranged inside the vacuum chamber 1. The pusher is used to push the mounting plate 6 to slide towards the direction close to the substrate film. The pusher includes a spring 14 for pushing the mounting plate 6 to slide towards the direction close to the substrate film. The spring 14 is located inside the sliding cylinder 23, below the sliding rod 15. The extending direction of the spring 14 is parallel to the sliding direction of the mounting plate 6. One end of the spring 14 is fixedly arranged on the bottom wall of the vacuum chamber 1, and the other end is fixedly arranged on the bottom wall of the sliding rod 15.

[0040] Refer to Figure 2 and Figure 4 , friction blocks 16 are fixedly arranged on the opposite sides of the sliding rod 15. Sliding grooves 26 for slidingly cooperating with the friction blocks 16 are formed on the opposite inner walls of the sliding cylinder 23. Friction strips 17 for sliding relative to the friction blocks 16 are adhered to the inner walls of the sliding grooves 26. The frictional force between the friction blocks 16 and the friction strips 17 is less than the thrust of the spring 14. The friction blocks 16 and the friction strips 17 can be rubber blocks, abrasive blocks, etc.

[0041] When the target is in the film coating state, the first gear 10 is disengaged from both the rack 11 and the second gear 13. When it is necessary to drive the rotation of the plurality of target seats 7 on the baffle 24, the motor 843 is started. The motor 843 drives the teeth on the first gear 10 to rotate towards the direction close to the rack 11, so that the first gear 10 gradually meshes with the rack 11. At this time, the first gear 10 will roll along the rack 11 towards the direction away from the substrate film, so that the first gear 10 drives the mounting plate 6 and the target seat 7 to move away from the substrate film, causing the target seat 7 to be away from the substrate film and the spring 14 to be compressed. Then the first gear 10 disengages from the rack 11 and gradually meshes with the second gear 13, driving the second gear 13 and the connecting rod 12 to rotate. The connecting rod 12 drives the worm 841 to rotate. The worm 841 drives the worm wheel 842 and the rotating rod 81 to rotate. Through the transmission of the belt pulley 82 and the belt 83, the rotating shaft 9 drives the target seat 7 to rotate in the same direction. Since the first gear 10 is disengaged from the rack 11, under the frictional force of the friction blocks 16 and the friction strips 17, the spring 14 slowly pushes the sliding rod 15 to drive the mounting plate 6 to move towards the direction close to the substrate film, which helps to prevent the target seat 7 from scratching the substrate during rotation. Thus, it helps to rotate the required target to be close to the substrate film correspondingly, enabling the replacement of the target without opening the vacuum chamber 1 for replacement, which helps to ensure production capacity.

[0042] The implementation principle of the embodiment of the present application is as follows: During operation, the unwinding roller 2 rotates to unwind the substrate film, and the winding roller 3 rotates to wind the substrate film. When the substrate film passes through the first main roller 4, the target material on the target seat 7 below the first main roller 4 performs magnetron sputtering on the substrate film, thereby achieving coating on one side. Then, the side of the substrate film away from the first main roller 4 is reversed after passing through the two first transition rollers 18 and adheres to the second main roller 5, enabling coating on the other side under the action of the target material below the second main roller 5, thus achieving double-sided simultaneous coating without opening the vacuum chamber 1 to separately reverse the substrate film, which can ensure the production capacity to a certain extent.

[0043] When it is necessary to coat multiple layers of different materials on the substrate film, the motor 843 is started. The motor 843 drives the teeth on the first gear 10 to rotate towards the direction close to the rack 11, causing the first gear 10 to gradually engage with the rack 11. The first gear 10 rolls along the rack 11 towards the direction away from the substrate film, driving the mounting plate 6 and the target seat 7 to move away from the substrate film, so that the target seat 7 is far from the substrate film. Then, the first gear 10 disengages from the rack 11 and gradually engages with the second gear 13. The first gear 10 drives the second gear 13 and the connecting rod 12 to rotate. The connecting rod 12 drives the worm 841 to rotate. The worm 841 drives the worm gear 842 and the rotating rod 81 to rotate. Through the transmission of the belt pulley 82 and the belt 83, it is realized that the rotating shaft 9 drives the target seat 7 to rotate in the same direction. Since the mounting plate 6 is in a state away from the substrate film, it is not easy to scratch the substrate when the target seat 7 rotates, which helps to rotate the required target material to the position corresponding to the substrate film. Then, the spring 14 pushes the sliding rod 15 to restore the target seat 7 on the mounting plate 6 to the state of approaching the substrate film. The program on the corresponding target material is started, and the winding roller 3 and the unwinding roller 2 are rotated in the reverse direction to realize coating different materials on the substrate film without opening the vacuum chamber 1 for replacement, which helps to further ensure the production capacity.

[0044] Embodiment 2:

[0045] Refer to Figure 5 In this embodiment, the unwinding roller 2 and the winding roller 3 are located on the same side of the first main roller 4 and the second main roller 5. In this embodiment, both the unwinding roller 2 and the winding roller 3 are located above the first main roller 4 and the second main roller 5.

[0046] Refer to Figure 5, the transition roller group includes a second transition roller 19, a third transition roller 20 and a plurality of fourth transition rollers 21. The second transition roller 19, the third transition roller 20 and the plurality of fourth transition rollers 21 are all rotatably arranged in the vacuum chamber 1. The second transition roller 19, the third transition roller 20 and the plurality of fourth transition rollers 21 are all located above the first main roller 4 and the second main roller 5. The second transition roller 19 is located on one side of the first main roller 4 close to the second main roller 5. The fourth transition roller 21 is located above the winding roller 3 or the unwinding roller 2. In this embodiment, the unwinding roller 2 and the winding roller 3 are arranged horizontally from left to right in sequence. The fourth transition roller 21 is located above the winding roller 3. There are two relatively arranged fourth transition rollers 21. The winding roller 3 is located between the two fourth transition rollers 21; the winding roller 3 is located above the driving roller 22. The third transition roller 20 is located on one side of the winding roller 3 away from the unwinding roller 2; the substrate film located between the first main roller 4 and the second main roller 5 is sequentially slidably lapped on the second transition roller 19, the two fourth transition rollers 21 and the third transition roller 20.

[0047] The implementation principle of the embodiment of the present application is as follows: during operation, the unwinding roller 2 rotates to unwind the substrate film, and the winding roller 3 rotates to wind the substrate film. When the substrate film passes through the first main roller 4, the target on the target seat 7 below the first main roller 4 starts the program to perform magnetron sputtering on the substrate film, realizing coating on one side of the substrate. Then, the side of the substrate film away from the first main roller 4 is attached to the second main roller 5 after being reversed by the second transition roller 19, the fourth transition roller 21 and the third transition roller 20, so that the side that was not coated before is coated on the other side under the action of the target below the second main roller 5, thereby realizing double-sided simultaneous coating. There is no need to open the vacuum chamber 1 to separately reverse the substrate film, which can ensure the production capacity to a certain extent.

[0048] The above are all the preferred embodiments of the present application, and the protection scope of the present application is not limited thereby. Therefore, all equivalent changes made according to the structure, shape and principle of the present application should be covered within the protection scope of the present application.

Claims

1. A winding coating machine for simultaneous double-sided coating, comprising a vacuum chamber (1), an unwinding roller (2) and a winding roller (3), wherein the unwinding roller (2) and the winding roller (3) are both rotatably arranged in the vacuum chamber (1), and is characterized in that: A first main roller (4) and a second main roller (5) are rotatably arranged in the vacuum chamber (1). The first main roller (4) and the second main roller (5) are arranged opposite to each other. The substrate film located between the unwinding roller (2) and the winding roller (3) slides and overlaps on the first main roller (4) and the second main roller (5) in sequence. A transition roller group is arranged in the vacuum chamber (1). The substrate film located between the first main roller (4) and the second main roller (5) slides and overlaps on the transition roller group. The transition roller group is used to make the side of the substrate film facing away from the first main roller (4) fit on the second main roller (5) when the substrate film moves from the first main roller (4) to the second main roller (5). A target base group is distributed below the first main roller (4) and the second main roller (5). The target base group The invention is arranged in a vacuum chamber (1), wherein the target seat group is used for mounting target materials to perform magnetron sputtering on a substrate film, wherein a mounting plate (6) is arranged in the vacuum chamber (1), wherein the mounting plate (6) corresponds to the target seat group one by one, wherein the target seat group comprises a plurality of target seats (7) rotatably mounted on the corresponding mounting plate (6), wherein the rotation axis of the target seat (7) is parallel to the rotation axis of the first main roller (4) and the second main roller (5), wherein the longitudinal section of the target seat (7) is polygonal, and different sides of the target seat (7) are used for mounting different target materials, wherein a rotating assembly (8) for driving the corresponding plurality of target seats (7) to rotate or fix synchronously is arranged on the mounting plate (6), wherein the rotating assembly (8) comprises a rotating rod (81), a pulley (82), a belt (83) and A driving source (84), the driving source (84) comprising a worm (841) rotatably arranged on a mounting plate (6), a worm wheel (842) sleeved on a rotating rod (81), and a motor (843) arranged on the mounting plate (6); the mounting plate (6) is slidably arranged in a vacuum chamber (1); the sliding direction of the mounting plate (6) is perpendicular to the rotation axis of the first main roller (4); an adjusting component for adjusting the mounting plate (6) to drive the target seat (7) to slide toward or away from the substrate film is provided in the vacuum chamber (1); the adjusting component comprises a first gear (10) rotatably arranged on the mounting plate (6), a rack (11) arranged in the vacuum chamber (1), and a pushing member arranged in the vacuum chamber (1); the first gear The rotation axis of the wheel (10) is parallel to the rotation axis of the worm (841), the first gear (10) is an incomplete gear, the first gear (10) is coaxially connected to the output shaft of the motor (843), the length direction of the rack (11) is parallel to the sliding direction of the mounting plate (6), the worm (841) is coaxially connected to a connecting rod (12), the connecting rod (12) is sleeved with a second gear (13), the first gear (10) is located between the rack (11) and the second gear (13), the first gear (10) is used to mesh with the rack (11), the second gear (13) is used to mesh with the first gear (10), and the pushing member is used to push the mounting plate (6) to slide toward the direction close to the substrate film.When the first gear (10) is engaged with the rack (11), the first gear (10) is disengaged from the second gear (13). A rotating shaft (9) is provided on the target seat (7), and the rotating shaft (9) rotates on the corresponding mounting plate (6). The rotating rod (81) is rotatably provided on the mounting plate (6). The rotating axis of the rotating rod (81) is parallel to the rotating axis of the target seat (7) on the corresponding mounting plate (6). The pulleys (82) are respectively mounted on the rotating rod (81) and the rotating shaft (9) on the mounting plate (6). The belt (83) is wound around a plurality of pulleys (82). The plurality of pulleys (82) are connected by the belt (83). The driving source (84) is used to drive the rotating rod (81) to rotate. The worm (841) is engaged with the worm wheel (842) on the corresponding mounting plate (6). The motor (843) is used to drive the worm (841) to rotate.

2. The roll coater for double-sided simultaneous coating according to claim 1, wherein: The pushing member includes a spring (14) for pushing the mounting plate (6) to slide towards the direction close to the base film. One end of the spring (14) is arranged on the inner wall of the vacuum chamber (1), and the other end is arranged on the mounting plate (6).

3. The winding coating machine for double-sided simultaneous coating according to claim 2, characterized in that: A slide bar (15) is arranged on the side of the mounting plate (6) away from the base film. The slide bar (15) slides in the vacuum chamber (1). A friction block (16) is arranged on the slide bar (15). A friction strip (17) for sliding relative to the friction block (16) is arranged in the vacuum chamber (1). The frictional force between the friction block (16) and the friction strip (17) is less than the thrust of the spring (14).

4. The roll-to-roll coating machine for simultaneous double-sided coating according to claim 1, wherein: The first main roller (4) and the second main roller (5) are located between the unwinding roller (2) and the winding roller (3). The transition roller group includes a plurality of first transition rollers (18) rotating in the vacuum chamber (1). The first transition rollers (18) are located above the first main roller (4) and the second main roller (5). The base film between the first main roller (4) and the second main roller (5) slides and laps over the first transition rollers (18).

5. The roll coater for double-sided simultaneous coating according to claim 1, characterized in that: The unwinding roller (2) and the winding roller (3) are located on the same side of the first main roller (4) and the second main roller (5). The transition roller group includes a second transition roller (19), a third transition roller (20) and a plurality of fourth transition rollers (21). The second transition roller (19), the third transition roller (20) and the plurality of fourth transition rollers (21) are all rotatably arranged in the vacuum chamber (1). The second transition roller (19), the third transition roller (20) and the plurality of fourth transition rollers (21) are all located above the first main roller (4) and the second main roller (5). The fourth transition roller (21) is located above the winding roller (3) or the unwinding roller (2). The base film between the first main roller (4) and the second main roller (5) sequentially slides and laps over the second transition roller (19), the fourth transition roller (21) and the third transition roller (20).

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