A dual-mass sensitive accelerometer based on modal localization effect

Abstract

The present invention discloses a dual-mass sensitive acceleration sensor based on modal localization effect, comprising: a first mass block and a second mass block, which will cause displacement of the first mass block and the second mass block when external acceleration changes; two ends of a first tuning fork beam are respectively fixed to the first micro-lever and the second micro-lever through a first fixed end; the first micro-lever and the second micro-lever are connected to two sides of one side of the first mass block; the other side of the first mass block is connected to the first hinged end and the second hinged end through a first support beam; the first tuning fork beam adjusts the driving force through a first fixed excitation electrode; the second tuning fork beam adjusts the driving force through a second fixed excitation electrode; the first tuning fork beam detects amplitude and frequency through a first detection electrode; the second tuning fork beam detects amplitude and frequency through a second detection electrode. The present invention has the advantages of high sensitivity and strong robustness.

Description

Technical Field

[0001] The present invention relates to the technical field of micro-electromechanical systems, and in particular to a dual-mass sensitive acceleration sensor based on modal localization effect, belonging to the field of sensors. Background Art

[0002] Accelerometers have the advantages of high sensitivity, low power consumption, high detection accuracy, and fast response. Compared with macro-scale devices, using micro-resonators as core detection elements has the advantages of high sensitivity, high resolution, and a large dynamic range.

[0003] There are many types of MEMS accelerometers, among which the most representative is the micromechanical resonant accelerometer. Highly sensitive resonant accelerometers have wide demand and application potential in the fields of automotive safety, consumer electronics, aerospace, intelligent equipment, etc., and continue to play an important role in the development of emerging technologies such as unmanned driving and intelligent manufacturing. The resonant accelerometer completes sensitivity detection based on the frequency shift caused by the change in the axial force of the detection resonator caused by the inertial force of the sensitive mass block. In order to further improve the sensitivity of the sensor to meet the needs of high-precision fields, researchers usually use topology optimization methods to optimize the structure of the accelerometer, and reduce the size of the sensor to improve sensitivity.

[0004] Professor Yang Bo's team from Southeast University designed a biaxial decoupled resonant micro-accelerometer in ("A new silicon biaxial decoupled resonant micro-accelerometer", (Microsystem Technologies, 2014, 21(1): 109-115)). The structure consists of four identical tuning fork resonators, four pairs of decoupling beams, four lever mechanisms and a mass block. The four pairs of decoupling beams are used to decouple the two sensitive directions. The experimental results show that the accelerometer has good performance, with a lateral sensitivity of 52.57Hz / g on the x-axis and 51.64Hz / g on the y-axis. The x-axis bias stability is 0.294mg and the y-axis is 0.278mg. The dynamic range exceeds 10g, proving that the designed biaxial resonant micro-accelerometer has good decoupling performance and stability.

[0005] In 2015, Professor Xie Jin's team at Zhejiang University developed a dual-axis dual-stage lever resonant accelerometer ("Duplex mode tilt measurements based on a MEMS biaxial resonant accelerometer", (Sensors and Actuators A: Physical, 2019, 296: 222-234.)), which achieved a high sensitivity (275Hz / g) through a dual-stage lever mechanism and a low cross-sensitivity (less than 3.4%) through a decoupling beam. In addition, the device was also tested for dual-axis tilt angles, and the test results showed that within a 45-degree linear range, it had an angular sensitivity of 4.5Hz / deg, making it an earlier dual-axis resonant inclinometer.

[0006] In summary, for traditional frequency-shift output resonant accelerometers, under the constraints of existing detection principles and processing technology, it is difficult to significantly improve the sensitivity of traditional resonant accelerometers, which has become a key technical problem restricting the application of micromechanical resonant accelerometers. Therefore, it is necessary to find a method to solve these problems from a mechanism perspective. Summary of the invention

[0007] In order to solve the technical problems that the traditional resonant accelerometer is difficult to improve in sensitivity under frequency shift output and has poor robustness to the external environment, the present invention provides a dual-mass sensitive accelerometer based on the modal localization effect. The accelerometer mainly uses a resonator composed of two tuning fork beams of equal length, and the two tuning fork beams are coupled by electrostatics, and the coupling strength can be adjusted in real time. Under the existing processing conditions, the sensitivity of the accelerometer can be greatly improved without any optimization of the structure. Therefore, it can be widely used in various aspects. The technical solution adopted by the present invention is as follows:

[0008] A dual-mass sensitive acceleration sensor based on modal localization effect, comprising: a first mass block and a second mass block, when external acceleration changes, the first mass block and the second mass block will be displaced;

[0009] The displacement generated by the movement of the first mass block will cause the amplitude-frequency change of the first resonator;

[0010] The displacement generated by the movement of the second mass block will cause the amplitude-frequency change of the second resonator;

[0011] The first resonator and the second resonator are located between the first mass block and the first mass block;

[0012] The first resonator is located on an upper portion of the second resonator;

[0013] The first resonator is formed by the first tuning fork beam, and the second resonator is formed by the second tuning fork beam;

[0014] The lengths of the first tuning fork beam and the second tuning fork beam are variable and equal;

[0015] The first tuning fork beam is placed above the second tuning fork beam;

[0016] The two ends of the first tuning fork beam are respectively fixed to the first micro-lever and the second micro-lever through the first fixed end; the first micro-lever and the second micro-lever are connected to the two sides of one side of the first mass block; the other side of the first mass block is connected to the first hinged end and the second hinged end through the first support beam;

[0017] The two ends of the second tuning fork beam are respectively fixed to the third micro-lever and the fourth micro-lever through the second fixed end; the third micro-lever and the fourth micro-lever are connected to the two sides of one side of the second mass block; one side of the second mass block is connected to the third hinged end through the third support beam, and one side of the second mass block 2 is connected to the fourth hinged end through the fourth support beam;

[0018] Wherein, the first tuning fork beam and the second tuning fork beam are electrostatically coupled, and the coupling power supply outputs a coupling voltage which is loaded on a second fixed end connected to the second tuning fork beam, so as to adjust the electrostatic coupling strength between the first tuning fork beam and the second tuning fork beam;

[0019] The first tuning fork beam adjusts the driving force through a first fixed excitation electrode; the second tuning fork beam adjusts the driving force through a second fixed excitation electrode;

[0020] The first tuning fork beam detects the amplitude and frequency through the first detection electrode;

[0021] The second tuning fork beam detects the amplitude and frequency respectively through the second detection electrode.

[0022] Further, the width of the second tuning fork beam is equal to the width of the first tuning fork beam.

[0023] Further, the length of the first fixed excitation electrode is equal to the length of the second fixed excitation electrode, and the width of the first fixed excitation electrode is equal to the width of the second fixed excitation electrode.

[0024] Further, the length of the first detection electrode is equal to the length of the second detection electrode, and the width of the first detection electrode is equal to the width of the second detection electrode.

[0025] Further, the length of the first fixed excitation electrode is equal to the tuning fork length of the first tuning fork beam, and the width of the first fixed excitation electrode is equal to the width of the first tuning fork beam;

[0026] The length of the second fixed excitation electrode is equal to the length of the second tuning fork beam, and the width of the second fixed excitation electrode is equal to the width of the second tuning fork beam.

[0027] Further, the gap between the first fixed excitation electrode and the first tuning fork beam is equal to the gap between the second fixed excitation electrode and the second tuning fork beam, which is equal to the distance between the second tuning fork beam and the first tuning fork beam.

[0028] Compared with the prior art, the present invention has the following advantages:

[0029] 1. The structure of the present invention has two mass blocks, which are respectively connected to the resonator by a micro-lever structure, which greatly amplifies the axial force of the inertial force of the sensitive mass block on the resonator;

[0030] 2. The present invention has the characteristic of easy adjustment of coupling strength, and the coupling strength between the clamped beams can be changed only by voltage adjustment;

[0031] 3. The feasibility of the proposed structure is verified by an implementation example, and the sensitivity output using amplitude ratio is increased by 611 times compared with the frequency shift type.

[0032] In summary, the present invention provides a dual-mass sensitive acceleration sensor based on the modal localization effect, which realizes online adjustment of sensor sensitivity, detection range and resolution by adjusting the coupling voltage to change the electrostatic coupling strength. The first tuning fork beam and the second tuning fork beam are driven by the first fixed excitation electrode and the second fixed excitation electrode respectively. When the two sensitive mass blocks move under the action of external acceleration, the axial forces of the two resonators are changed respectively through the micro-lever, thereby causing the modal localization effect between the resonators and causing the amplitude to change drastically. The magnitude of the acceleration can be obtained by calculating the amplitude ratio of the two resonators. Compared with the traditional frequency-shift output method, the amplitude ratio output has a better ability to resist interference from the external environment, better robustness and higher sensitivity. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0034] Figure 1 Schematic diagram of the structure of a dual-mass sensitive acceleration sensor based on modal localization effect in an embodiment of the present invention;

[0035] Figure 2 This is an amplitude-frequency characteristic diagram in a balanced state in an embodiment of the present invention;

[0036] Figure 3 is a graph showing the change of amplitude-frequency characteristics under different acceleration disturbances in an embodiment of the present invention;

[0037] Figure 4 (a) is an output diagram of the sensitivity in the out-of-phase mode with the relative amplitude ratio when the bias voltage is 30 V, the AC voltage is 0.05 V, and the coupling voltage is 50 V in the embodiment of the present invention;

[0038] (b) is an output diagram of the sensitivity in the in-phase mode with the relative amplitude ratio when the bias voltage is 30 V, the AC voltage is 0.05 V, and the coupling voltage is 50 V in the embodiment of the present invention;

[0039] Figure 5 (a) is an output diagram with relative frequency as sensitivity in an out-of-phase mode when the bias voltage is 30 V, the AC voltage is 0.05 V, and the coupling voltage is 50 V in an embodiment of the present invention;

[0040] (b) is an output diagram with relative frequency as sensitivity in the in-phase mode when the bias voltage is 30 V, the AC voltage is 0.05 V, and the coupling voltage is 50 V in the embodiment of the present invention;

[0041] In the figure: 1-1, the first hinged end, 1-2, the second hinged end, 1-3, the third hinged end, 1-4, the fourth hinged end, 2-1, the first mass block, 2-2, the second mass block, 3-1, the first fixed end, 3-2, the second fixed end, 4-1, the first fixed excitation electrode, 4-2, the second fixed excitation electrode, 5-1, the first tuning fork beam, 5-2, the second tuning fork beam, 6-1, the first micro-lever fixed support end, 6-2, the second micro-lever fixed support end, 6-3, the third micro-lever fixed support end, 6-4, the fourth micro-lever fixed support end, 7-1, the first micro-lever, 7-2, the second micro-lever, 7-3, the third micro-lever, 7-4, the fourth micro-lever, 8-1, the first support beam, 8-2, the second support beam, 8-3, the third support beam, 8-4, the fourth support beam. DETAILED DESCRIPTION

[0042] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0043] The inventors have found that by introducing the modal localization phenomenon into the research of acceleration sensors and adopting a new sensitive mechanism that uses eigenvalues ​​or amplitude ratios as output metrics, the sensitivity of the sensor can be greatly improved, and very high sensitivity can be obtained without the need for configuration optimization and the use of levers. In a nearly symmetrical weakly coupled system with a modal localization effect, when the sensor is subjected to a small disturbance (mass, stiffness, external force, etc.), the system symmetry will be destroyed, resulting in a sharp change in the characteristic state and amplitude ratio. Based on this phenomenon, an acceleration sensor with ultra-high sensitivity is designed.

[0044] like Figure 1 As shown, the present invention provides a structural schematic diagram of a dual-mass sensitive acceleration sensor based on modal localization effect, comprising: a first mass block 2-1 and a second mass block 2-2 that are symmetrically arranged;

[0045] When the external acceleration changes, the first mass block 2-1 and the second mass block 2-2 will be displaced;

[0046] The displacement generated by the movement of the first mass block 2-1 will cause the amplitude-frequency change of the first resonator;

[0047] The displacement generated by the movement of the second mass block 2-2 will cause the amplitude-frequency change of the second resonator;

[0048] The first resonator and the second resonator are located between the first mass block 2-1 and the first mass block 2-2;

[0049] The first resonator is located on an upper portion of the second resonator;

[0050] The first resonator is composed of the first tuning fork beam 5-1; the first resonator is used to detect the amplitude-frequency change caused by the movement of the first mass block 2-1;

[0051] The second resonator is formed by the second tuning fork beam 5-2; the second resonator is used to detect the amplitude-frequency change caused by the movement of the second mass block 2-2;

[0052] The lengths of the first tuning fork beam 5 - 1 and the second tuning fork beam 5 - 2 are variable and equal;

[0053] The first tuning fork beam 5 - 1 is placed above the second tuning fork beam 5 - 2;

[0054] One end of the first tuning fork beam 5-1 passes through the first fixed end 1-6, and the other end of the first tuning fork beam 5-1 is fixed by the first micro-lever 7-1 and the second micro-lever 7-2;

[0055] The first micro-lever 7-1 is fixed by the first micro-lever fixed end 6-1;

[0056] The second micro-lever 7-2 is fixed by the second micro-lever fixed end 6-2;

[0057] The first micro-lever 7-1 and the second micro-lever 7-2 are connected to two sides of one end of the first mass block 2-1;

[0058] The first mass block 2-1 and the second mass block 2-2 are used to sense changes in external acceleration and have the same size, structure and material;

[0059] The other end of the first mass block 2-1 is connected to the first hinged end 1-1 and the first hinged end 1-2 through a first support beam 8-1;

[0060] One end of the second tuning fork beam 5-2 passes through the second fixed end 1-5;

[0061] The other end of the second tuning fork beam 5-2 is fixed by the third micro-lever 7-3 and the fourth micro-lever 7-4;

[0062] The third micro-lever 7-3 and the fourth micro-lever 7-4 are connected to both sides of one side of the second mass block 2-2; one side of the second mass block 2-2 is connected to the third hinged end 1-3 through the third support beam 8-3, and one side of the second mass block 2-2 is connected to the fourth hinged end 1-4 through the fourth support beam 8-4;

[0063] The third micro-lever 7-3 is fixed by the third micro-lever fixed end 6-3;

[0064] The fourth micro-lever 7-4 is fixed by the second micro-lever fixed end 6-4;

[0065] The first tuning fork beam 5-1 and the second tuning fork beam 5-2 are electrostatically coupled, and the coupling power supply outputs a coupling voltage which is loaded on the second fixed end 3-2 connected to the second tuning fork beam 5-2, so as to adjust the electrostatic coupling strength between the first tuning fork beam 5-1 and the second tuning fork beam 5-2;

[0066] The first tuning fork beam 5 - 1 adjusts the driving force through the first fixed excitation electrode 4 - 1 ; the second tuning fork beam 5 - 2 adjusts the driving force through the second fixed excitation electrode 4 - 2 .

[0067] The first tuning fork beam 5-1 detects the amplitude and frequency through the first detection electrode 3-1;

[0068] The second tuning fork beam 5-2 detects the amplitude and frequency respectively through the second detection electrode 3-2;

[0069] The length of the first fixed excitation electrode 4 - 1 is equal to the length of the second fixed excitation electrode 4 - 2 , and the width of the first fixed excitation electrode 4 - 1 is equal to the width of the second fixed excitation electrode 4 - 2 .

[0070] The length of the first detection electrode 3 - 1 is equal to the length of the second detection electrode 3 - 2 , and the width of the first detection electrode 3 - 1 is equal to the width of the second detection electrode 3 - 2 .

[0071] The length of the first fixed excitation electrode 4-1 is equal to the tuning fork length of the first tuning fork beam 5-1, and the width of the first fixed excitation electrode 4-1 is equal to the width of the first tuning fork beam 5-1;

[0072] The length of the second fixed excitation electrode 4 - 2 is equal to the length of the second tuning fork beam 5 - 2 , and the width of the second fixed excitation electrode 4 - 2 is equal to the width of the second tuning fork beam 5 - 2 .

[0073] The gap between the first fixed excitation electrode 4 - 1 and the first tuning fork beam 5 - 1 is equal to the gap between the second fixed excitation electrode 4 - 2 and the second tuning fork beam 5 - 2 , which is equal to the distance between the second tuning fork beam 5 - 2 and the first tuning fork beam 5 - 1 .

[0074] The present invention provides a dual-mass sensitive acceleration sensor based on modal localization effect, which realizes online adjustment of sensor sensitivity, detection range and resolution by adjusting coupling voltage to change electrostatic coupling strength. The first tuning fork beam 5-1 and the second tuning fork beam 5-2 are driven by the first fixed excitation electrode 4-1 and the second fixed excitation electrode 4-2 respectively. When the first mass block 2-1 and the second mass block 2-2 move under the action of external acceleration, the axial forces of the two resonators are changed by the micro-levers 7-1, 7-2, 7-3 and 7-4 on both sides, so that the amplitude changes, and the magnitude of acceleration can be obtained by calculating the amplitude ratio of the two resonators. Compared with the traditional frequency-shift output mode, the amplitude ratio output has better ability to resist interference from the external environment, better robustness and higher sensitivity.

[0075] A dual-mass sensitive acceleration sensor based on modal localization effect provided by the present invention is described below with a specific example.

[0076] like Figure 1 The schematic diagram of the structure of a dual-mass sensitive acceleration sensor based on the modal localization effect in an embodiment of the present invention is shown, which consists of two masses connected at the hinged ends by support beams, one side of which is connected to the resonator by a micro-lever structure. When under the action of external acceleration, the mass blocks will move to change the axial stress of the resonator, break the resonator in a balanced state, and cause energy localization. The magnitude of the external acceleration is calculated by measuring the amplitude ratio of the two resonators.

[0077] Compared with the traditional mechanical coupling structure, the electrostatic coupling adopted in the present invention can adjust the coupling strength in real time and easily achieve low coupling stiffness. Figure 2 It is shown as an amplitude-frequency characteristic diagram of the acceleration sensor of the present invention when it is in a balanced state according to the dimensions in the structural parameter table 1 of the present invention in an embodiment of the present invention, wherein the abscissa is the frequency (kHz) and the ordinate is the amplitude (μm).

[0078] Table 1

[0079]

[0080] By applying a coupling voltage V on the second tuning fork beam (5-2) c =50V, when there is no external acceleration disturbance, first select the AC current in the driving voltage source to be V ac =50mV, and then continuously adjust the DC voltage V in the driving voltage source dc Make the system in equilibrium, where V dc =30V, such as Figure 2 shown.

[0081] Figure 3 The amplitude-frequency characteristic curves of the two tuning fork beams in the embodiment of the present invention are shown in FIG. 1 when an external 1g acceleration disturbance is applied. Figure 3 (a) It can be found that the amplitude of the tuning fork beam 4-1 increases with the increase of acceleration, while Figure 3 The amplitude changes of the tuning fork beam 4-2 in the two modes shown in (b) are almost synchronous, because the tuning fork beam 4-1 is excited by alternating current.

[0082] Figure 4 is the sensitivity condition when the relative amplitude ratio change is used as the sensitivity output in the embodiment of the present invention, wherein Figure 4 (a) is the relative amplitude ratio sensitivity output in the out-of-phase mode, Figure 4(b) is the relative amplitude ratio sensitivity output in the in-phase mode, which is obtained by simulation in the range of 0-1g. The sensitivities are 5.5% / g and 5.1% / g respectively when the relative amplitude ratio is used as the sensitivity output.

[0083] Figure 5 is the sensitivity condition when the relative frequency change is used as the sensitivity output in the embodiment of the present invention, wherein Figure 5 (a) is the relative frequency sensitivity output under the out-of-phase mode, Figure 5 (b) is the relative frequency shift sensitivity output in the in-phase mode, obtained by simulation in the 0-1g range and compared with Figure 4 The results were compared and it was found that the sensitivity output using relative amplitude ratio can be increased by 611 times compared with the relative frequency change, which greatly improves the sensitivity output.

[0084] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0085] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, the numerical expressions and numerical values ​​do not limit the scope of the present invention. At the same time, it should be clear that, for ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. The technology, methods and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, methods and equipment should be regarded as part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0086] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention: the directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0087] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below their position devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0088] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0089] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A dual-mass sensitive acceleration sensor based on modal localization effect, characterized in that: include: A first mass block (2-1) and a second mass block (2-2), wherein the first mass block (2-1) and the second mass block (2-2) are symmetrically arranged, and when external acceleration changes, the first mass block (2-1) and the second mass block (2-2) will be displaced; The displacement generated by the movement of the first mass block (2-1) will cause the amplitude-frequency change of the first resonator; The displacement generated by the movement of the second mass block (2-2) will cause the amplitude-frequency change of the second resonator; The first resonator and the second resonator are located between the first mass block (2-1) and the second mass block (2-2); The first resonator is located on an upper portion of the second resonator; The first resonator is composed of a first tuning fork beam (5-1), and the second resonator is composed of a second tuning fork beam (5-2); The lengths of the first tuning fork beam (5-1) and the second tuning fork beam (5-2) are variable and equal; The first tuning fork beam (5-1) is placed above the second tuning fork beam (5-2); The two ends of the first tuning fork beam (5-1) are respectively fixed to the first micro-lever (7-1) and the second micro-lever (7-2) through the first fixed end (1-6); the first micro-lever (7-1) and the second micro-lever (7-2) are connected to two sides of one side of the first mass block (2-1); One side of the first mass block (2-1) is connected to the first hinged end (1-1) via a first support beam (8-1); The other side of the first mass block (2-1) is connected to the second hinged end (1-2) via a second support beam (8-2); Two ends of the second tuning fork beam (5-2) are respectively fixed to the third micro-lever (7-3) and the fourth micro-lever (7-4) through the second fixed end (3-2); the third micro-lever (7-3) and the fourth micro-lever (7-4) are connected to two sides of one side of the second mass block (2-2); one side of the second mass block (2-2) is connected to the third hinged end (1-3) through the third support beam (8-3), and one side of the second mass block (2-2) is connected to the fourth hinged end (1-4) through the fourth support beam (8-4); The first tuning fork beam (5-1) and the second tuning fork beam (5-2) are coupled via electrostatic coupling, and a coupling power supply outputs a coupling voltage which is loaded on a second fixed end (3-2) connected to the second tuning fork beam (5-2), so as to adjust the electrostatic coupling strength between the first tuning fork beam (5-1) and the second tuning fork beam (5-2); The first tuning fork beam (5-1) adjusts the driving force through a first fixed excitation electrode (4-1); the second tuning fork beam (5-2) adjusts the driving force through a second fixed excitation electrode (4-2); The first tuning fork beam (5-1) detects amplitude and frequency through a first detection electrode; The second tuning fork beam (5-2) detects the amplitude and frequency respectively through the second detection electrode.

2. The dual-mass sensitive acceleration sensor based on modal localization effect according to claim 1, characterized in that: The width of the second tuning fork beam (5-2) is equal to the width of the first tuning fork beam (5-1).

3. The dual-mass sensitive acceleration sensor based on modal localization effect according to claim 1, characterized in that: The length of the first fixed excitation electrode (4-1) is equal to the length of the second fixed excitation electrode (4-2), and the width of the first fixed excitation electrode (4-1) is equal to the width of the second fixed excitation electrode (4-2).

4. The dual-mass sensitive acceleration sensor based on modal localization effect according to claim 1, characterized in that: The length of the first detection electrode is equal to the length of the second detection electrode, and the width of the first detection electrode is equal to the width of the second detection electrode.

5. The dual-mass sensitive acceleration sensor based on modal localization effect according to claim 1, characterized in that: The length of the first fixed excitation electrode (4-1) is equal to the tuning fork length of the first tuning fork beam (5-1), and the width of the first fixed excitation electrode (4-1) is equal to the width of the first tuning fork beam (5-1); The length of the second fixed excitation electrode (4-2) is equal to the length of the second tuning fork beam (5-2), and the width of the second fixed excitation electrode (4-2) is equal to the width of the second tuning fork beam (5-2).

6. The dual-mass sensitive acceleration sensor based on modal localization effect according to claim 1, characterized in that: The gap between the first fixed excitation electrode (4-1) and the first tuning fork beam (5-1) is equal to the gap between the second fixed excitation electrode (4-2) and the second tuning fork beam (5-2), and equal to the distance between the second tuning fork beam (5-2) and the first tuning fork beam (5-1).

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