Purification table rack, purification table and production line

Abstract

This invention relates to the field of solar cell manufacturing, and provides a cleanroom frame, a cleanroom, and a production line. The cleanroom frame includes: a frame structure; a first support base and a second support base, both disposed inside the frame structure and respectively connected to both sides of the frame structure, with a gap between the first and second support bases; and buffer seats on both the upper and lower sides of the first support base; a support assembly, movably connected to the first of the first and second support bases and capable of switching between a retracted state and a working state. In the retracted state, the support assembly moves to the top of the first of the first and second support bases; in the working state, the support assembly moves and is positioned between the second and first support bases. The support assembly is integrated into the frame structure and can switch between working and retracted states without the need for handling, thus simplifying operation. Furthermore, the support assembly does not occupy space within the factory.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of solar cell production, in particular to a purification table rack, a purification table and a production line. BACKGROUND

[0002] With the consumption of global non-renewable energy, the demand for the use of renewable energy such as solar energy and wind energy is rapidly increasing. Photovoltaic power generation, as the main renewable energy, has developed rapidly in recent years. Tube PECVD is one of the important equipment for manufacturing solar cells, which mainly includes three structures of purification table, furnace body cabinet and gas source cabinet.

[0003] Among them, the purification table is a device for realizing the graphite boat into and out of the furnace tube, cooling and transportation. In order to improve the production capacity, the purification table is usually provided with multiple buffer positions, so the height of the rack is high. When maintaining, installing or maintaining the buffer position with high position, or installing or replacing the quartz tube, furnace door mechanism and furnace flange of the furnace body corresponding to the buffer position, a special maintenance table is often needed. During operation, the maintenance table is moved into the rack for the operator to stand and step on. After installation or maintenance is completed, the maintenance table is moved out of the rack. The weight of the maintenance table is large, which is not convenient to carry, resulting in low efficiency of maintenance or installation, and the storage of the maintenance table occupies the space in the factory building. SUMMARY

[0004] The present application provides a purification table rack, a purification table and a production line to solve or improve the defects in the prior art that the maintenance table is moved in and out of the purification table rack, which is not convenient to operate and easily affects the efficiency of maintenance or installation, to realize the effect of improving the convenience of maintenance or installation, and thus improving the efficiency of maintenance or installation.

[0005] The present application provides a purification table rack, comprising:

[0006] a frame structure;

[0007] a first support seat and a second support seat, both of which are arranged inside the frame structure and are connected to both sides of the frame structure, respectively, and the first support seat and the second support seat have a spacing therebetween, and the upper and lower sides of the first support seat are both used to set a buffer seat;

[0008] a support assembly, which is movably connected with a first one of the first support seat and the second support seat and can be switched between a storage state and a working state. In the storage state, the support assembly moves to the top of the first support seat or the second support seat connected with the support piece. In the working state, the support assembly moves and is arranged between the second support seat and the first support seat.

[0009] According to the present application, a support assembly is provided, which comprises a first pedal assembly and a second pedal assembly, the first pedal assembly is connected with the first support base or the second support base, and the second pedal assembly is movably connected with the first pedal assembly;

[0010] In the storage state of the support assembly, the second pedal assembly is stored in the first pedal assembly, in the working state of the support assembly, the second pedal assembly is unfolded relative to the first pedal assembly, and the first pedal assembly and the second pedal assembly are both arranged between the first support base and the second support base.

[0011] According to the present application, a support assembly is provided, which comprises a first pedal assembly and a second pedal assembly, the first pedal assembly is connected with the first support base or the second support base, and the second pedal assembly is movably connected with the first pedal assembly;

[0012] Alternatively, the second pedal assembly is movably connected with the first pedal assembly, so that the second pedal assembly can be telescoped relative to the first pedal assembly.

[0013] According to the present application, a support assembly is provided, which comprises a first pedal assembly and a second pedal assembly, the first pedal assembly is connected with the first support base or the second support base, and the second pedal assembly is movably connected with the first pedal assembly;

[0014] According to the present application, a support assembly is provided, which comprises a first pedal assembly and a second pedal assembly, the first pedal assembly is connected with the first support base or the second support base, and the second pedal assembly is movably connected with the first pedal assembly;

[0015] Alternatively, the second pedal assembly is movably connected with the first pedal assembly, so that the second pedal assembly can be telescoped relative to the first pedal assembly.

[0016] According to the present application, a support assembly is provided, which comprises a first pedal assembly and a second pedal assembly, the first pedal assembly is connected with the first support base or the second support base, and the second pedal assembly is movably connected with the first pedal assembly;

[0017] In the working state of the support assembly, the support assembly is detachably connected with the second one of the first support base and the second support base through the fastener.

[0018] According to the present application, a support assembly is provided, which comprises a first pedal assembly and a second pedal assembly, the first pedal assembly is connected with the first support base or the second support base, and the second pedal assembly is movably connected with the first pedal assembly;

[0019] According to the purification platform provided by the present application, the frame structure further comprises a ladder, the ladder is arranged inside the frame structure, and the ladder is arranged below the first support base or the second support base, and the first support base or the second support base is provided with a passage corresponding to the ladder for the operator to pass through.

[0020] The present application further provides a purification platform comprising a buffer base, a boat pushing mechanism and the purification platform frame as described above, and the buffer base and the boat pushing mechanism are connected with the frame structure.

[0021] According to the purification platform provided by the present application, the purification platform further comprises a sliding platform, the boat pushing mechanism comprises a three-axis moving module and a boat supporting structure, the boat supporting structure is used for supporting a graphite boat, the three-axis moving module is connected with the boat supporting structure and is used for driving the boat supporting structure to be docked with any one of the sliding platform, the furnace pipe and the buffer base, and the three-axis moving module is arranged between the first support base and the second support base.

[0022] Alternatively, the purification platform further comprises a sliding platform and a mechanical hand, the number of the boat pushing mechanisms is the same as the number of the buffer bases and one-to-one correspondence exists between the boat pushing mechanisms and the buffer bases, the mechanical hand is used for transferring the graphite boat between the boat pushing mechanisms, the sliding platform and the buffer bases, the boat pushing mechanism is used for placing the graphite boat in the furnace pipe or taking the graphite boat out of the furnace pipe, the mechanical hand is arranged between the first support base and the second support base, and the buffer base and the boat pushing mechanism are arranged on the side of the first support base and the second support base respectively.

[0023] The present application further provides a production line comprising the purification platform as described above.

[0024] The purification platform frame provided by the present application can install the buffer base, the moving module and the boat pushing mechanism and other components through the frame structure. Through the first support base, the second support base and the support assembly, when it is necessary to repair or install the related components, the support assembly can be switched to the working state, at this time, the support assembly is erected between the first support base and the second support base, that is, the first support base, the second support base and the support assembly form a platform on which the operator can stand. After the repair or installation is completed, the support assembly is switched to the storage state, that is, the support assembly is stored on the first support base or the second support base, at this time, the first support base and the second support base have a spacing therebetween, so that the moving module can run between the first support base and the second support base, avoiding the interference of the support assembly, the first support base and the second support base on the moving module.

[0025] Thus, the purification bench rack provided by the present application can form a platform for the operator to stand on by switching the state of the support assembly when maintenance or installation is needed, and can form an avoiding space between the first support seat and the second support seat by switching the state of the support assembly after the maintenance or installation is completed. Compared with the prior art, the support assembly is integrated on the frame structure in the purification bench rack provided by the present application, and thus the operation is more convenient and the support assembly does not need to occupy the space in the factory.

[0026] The purification bench and the production line provided by the present application simultaneously have all the advantages of the purification bench rack provided by the present application. BRIEF DESCRIPTION OF DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0028] Figure 1 is a structural schematic view of the purification bench rack provided by some embodiments of the present application;

[0029] Figure 2 is a structural schematic view of the purification bench rack provided by some embodiments of the present application; Figure 1 is a structural schematic view of the support assembly of the purification bench rack shown in the figure switching to the working state;

[0030] Figure 3 is a process state schematic view of one support assembly of the purification bench rack provided by some embodiments of the present application switching from the storage state to the working state;

[0031] Figure 4 is a structural schematic view of the purification bench rack provided by some embodiments of the present application; Figure 3 is a structural schematic view of one support assembly in the view switching to the working state;

[0032] Figure 5 is a structural schematic view of the purification bench rack provided by some embodiments of the present application; Figure 4 is a structural schematic view of all the support assemblies in the view switching to the working state;

[0033] Figure 6 is a structural schematic view of the support assembly provided by some embodiments of the present application;

[0034] Figure 7is a structural schematic diagram of a purification table provided by some embodiments of the present application, which has a boat pushing mechanism;

[0035] Figure 8 is a structural schematic diagram of a purification table provided by some embodiments of the present application, which has the same number of boat pushing mechanisms as the number of buffer seats;

[0036] Figure 9 is a structural schematic diagram of a ladder provided by some embodiments of the present application.

[0037] Reference signs:

[0038] 1, frame structure; 101, first frame; 102, second frame; 2, support assembly; 201, first pedal assembly; 202, second pedal assembly; 203, planar frame; 204, support plate; 3, first support seat; 4, second support seat; 5, buffer seat; 6, ladder; 7, cover plate; 8, mechanical hand; 9, boat pushing mechanism; 10, fastener; 11, limiting piece. DETAILED DESCRIPTION

[0039] To make the objectives, technical solutions and advantages of the present application clearer, the technical solutions in the present application will be described clearly and completely below in conjunction with the drawings in the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0040] The purification table rack provided by the embodiments of the present application will be described below in conjunction with Figures 1 to 9

[0041] Specifically, the purification table rack comprises a frame structure 1, a first support seat 3, a second support seat 4 and a support assembly 2.

[0042] The frame structure 1 can be a skeleton structure formed by connecting profiles by welding or threaded connections. Alternatively, the frame structure 1 is a rectangular frame.

[0043] The first support seat 3 and the second support seat 4 are both arranged inside the frame structure 1, and the first support seat 3 and the second support seat 4 are respectively connected to the two sides of the frame structure 1. The first support seat 3 and the second support seat 4 have a spacing therebetween to enable the movement module to run between the first support seat 3 and the second support seat 4. The upper and lower sides of the first support seat 3 are both used to arrange buffer seats 5. Alternatively, at least one of the first support seat 3 and the second support seat 4 comprises a support frame and a plate body, wherein the support frame is welded or connected by a threaded connection with the frame structure 1, and the plate body is welded or connected by a threaded connection with the frame structure 1. ​

[0044] The support assembly 2 is movably connected with one of the first support seat 3 and the second support seat 4, and the support assembly 2 can be switched between a storage state and a working state. In the storage state, the support assembly 2 is moved to the top of the first support seat 3 or the second support seat 4 connected with the support assembly 2, that is, the support assembly 2 is arranged on the top of one of the first support seat 3 and the second support seat 4 connected with the support assembly 2. In the working state, the support assembly 2 is moved and arranged between the second support seat 4 and the first support seat 3, that is, the support assembly 2 is moved from one of the first support seat 3 and the second support seat 4 to the other, until the two ends of the support assembly 2 are arranged on the first support seat 3 and the second support seat 4 respectively.

[0045] The frame structure 1 can be provided with the buffer seat 5, the moving module and the boat pushing mechanism 9 and the like. When the related components need to be repaired or installed, the support assembly 2 can be switched to the working state, and at this time, the support assembly 2 is arranged between the first support seat 3 and the second support seat 4, that is, the first support seat 3, the second support seat 4 and the support assembly 2 form a platform on which an operator can stand. After the repair or installation is completed, the support assembly 2 is switched to the storage state, that is, the support assembly 2 is stored on the first support seat 3 or the second support seat 4, and at this time, the first support seat 3 and the second support seat 4 have a spacing therebetween, so that the moving module can move between the first support seat 3 and the second support seat 4, avoiding the interference of the support assembly 2, the first support seat 3 and the second support seat 4 with the moving module.

[0046] In this way, when the repair or installation is needed, the state of the support assembly 2 is only needed to be switched, so that the support assembly 2, the first support seat 3 and the second support seat 4 form a platform on which an operator can stand. After the repair or installation is completed, the state of the support assembly 2 is switched, so that the support assembly 2 is stored on the top of the first support seat 3 or the second support seat 4, and the first support seat 3 and the second support seat 4 form a spacing therebetween. Compared with the prior art in which a repair table needs to be moved in and out, in the frame structure 1 provided by the present application, the support assembly 2 is integrated on the frame structure 1, and does not need to be moved, so that the operation is more convenient, and the support assembly 2 does not need to occupy the space in the factory.

[0047] Reference Figures 3-5 As shown in some embodiments provided by the present application, the support assembly 2 comprises a first pedal assembly 201 and a second pedal assembly 202. The first pedal assembly 201 is connected with the first support seat 3 or the second support seat 4, and the second pedal assembly 202 is movably connected with the first pedal assembly 201.

[0048] When the support assembly 2 is in the storage state, the second pedal assembly 202 is stored in the first pedal assembly 201. When the support assembly 2 is in the working state, the second pedal assembly 202 is unfolded relative to the first pedal assembly 201, and the first pedal assembly 201 and the second pedal assembly 202 are both arranged between the first support seat 3 and the second support seat 4, that is, the two ends of the first pedal assembly 201 are arranged on the first support seat 3 and the second support seat 4 respectively, and the two ends of the second pedal assembly 202 are arranged on the first support seat 3 and the second support seat 4 respectively.

[0049] In this way, when the support assembly 2 is in the storage state, the second pedal assembly 202 is stored in the first pedal assembly, so that the area of the whole support assembly 2 is smaller, thereby reducing the installation area of the support assembly 2 in the frame structure 1. At the same time, when the support assembly 2 is in the working state, the second pedal assembly 202 can be unfolded relative to the first pedal assembly 201, thereby providing a larger support area for the operator, so that the operator has a larger activity space to facilitate the installation and maintenance work of the operator.

[0050] Optionally, as shown in Figures 3-5 The plurality of support assemblies 2 can be arranged on the first support seat 3 or the second support seat 4, or can be arranged on the first support seat 3 and the second support seat 4 respectively.

[0051] In this way, when all the support assemblies 2 are in the working state, most of the gap between the first support seat 3 and the second support seat 4 can be closed, thereby providing a larger support area for the operator, so that the operator has a larger activity space to facilitate the installation and maintenance work of the operator.

[0052] Referring to Figures 3-6 In some embodiments provided by the present application, the second pedal assembly 202 is rotationally connected with the first pedal assembly 201, and the second pedal assembly 202 can be folded on the top of the first pedal assembly 201 or unfolded on one side of the first pedal assembly 201. In this way, the connection structure between the first pedal assembly 201 and the second pedal assembly 202 is relatively simple, and the production difficulty is relatively low.

[0053] In the specific use process, the support assembly 2 is arranged between the first support seat 3 and the second support seat 4, and then the second pedal assembly 202 is unfolded relative to the first pedal assembly 201. The second pedal assembly 202 is unfolded after the support assembly 2 is moved to between the first support seat 3 and the second support seat 4, which can avoid interference between the second pedal assembly 202 and other components.

[0054] Optionally, the first pedal assembly 201 and the second pedal assembly 202 are connected through at least two hinges.

[0055] Referring to Figure 6 As shown in some embodiments provided by the present application, at least one of the first pedal assembly 201 and the second pedal assembly 202 comprises a planar frame 203 and a support plate 204. The planar frame 203 is connected with the support plate 204, and the planar frame 203 is supported on the bottom of the support plate 204, and the support plate 204 is used to support the operator. In this way, the first pedal assembly 201 and the second pedal assembly 202 have simple structures.

[0056] Referring to Figure 6 Further, as shown, the planar frame 203 is an aluminum profile frame, and the support assembly 2 further comprises a bolt and a T-shaped nut. The T-shaped nut is arranged in a sliding groove on the surface of the aluminum profile frame, and the bolt passes through the support plate 204 and is threadedly connected with the T-shaped nut in the sliding groove, so as to connect the support plate 204 with the planar frame 203. Similarly, the hinges between the first pedal assembly 201 and the second pedal assembly 202 can also be connected with the first pedal assembly 201 and the second pedal assembly 202 through the connection form of the T-shaped nut cooperating with the bolt.

[0057] Of course, the first pedal assembly 201 and the second pedal assembly 202 are not limited to the rotary connection. For example, in other embodiments provided by the present application, the first pedal assembly 201 and the second pedal assembly 202 can also be connected in a sliding manner, so that the second pedal assembly 202 can be telescoped relative to the first pedal assembly 201. For example, a sliding rail is arranged on the first pedal assembly 201, and the second pedal assembly 202 is slidingly matched with the sliding rail. Optionally, a sliding block is arranged inside the first pedal assembly 201, so that the second pedal assembly 202 can be retracted into the inside of the first pedal assembly 201 for storage, thereby reducing the occupied space of the second pedal assembly 202 after being stored in the first pedal assembly 201.

[0058] In some embodiments provided by the present application, the support assembly 2 is rotatably connected with the first support seat 3 or the second support seat 4. For example, the support assembly 2 is rotatably connected with the first support seat 3 or the second support seat 4 through a rotating shaft or a bolt, etc. In this way, the connection structure between the support assembly 2 and the first support seat 3 or the second support seat 4 is relatively simple, thereby being able to reduce the production and processing difficulty.

[0059] Referring to Figures 3-5 Further, as shown, the rotating axis of the support assembly 2 extends along the vertical direction of the frame structure 1, that is, the support assembly 2 can be horizontally rotated. In this way, when the support assembly 2 is switched, it will not be interfered and hindered by the components located above the first support seat 3 or the second support seat 4.

[0060] Of course, the support assembly 2 is not limited to being rotationally connected with the first support base 3 or the second support base 4. For example, in other embodiments provided by the present application, the support assembly 2 is slidingly connected with one of the first support base 3 and the second support base 4, and the support assembly 2 is capable of sliding towards the other one of the first support base 3 and the second support base 4. For example, taking the case where the support assembly 2 is slidingly connected with the first support base 3 as an example, specifically, a guide rail is arranged on the first support base 3, and the support assembly 2 is slidingly connected with the guide rail on the first support base 3.

[0061] In some embodiments provided by the present application, the purification bench rack further comprises a fastener 10. When the support assembly 2 is in the working state, the support assembly 2 is detachably connected with the second one of the first support base 3 and the second support base 4 through the fastener 10. For example, taking the case where the support assembly 2 is movably connected with the first support base 3 as an example, specifically, when the support assembly 2 is in the working state, the support assembly 2 is detachably connected with the second support base 4 through the fastener 10.

[0062] In this way, movement or rotation of the support assembly 2 in the working state can be avoided, so that the support assembly 2 can be kept stable, thereby providing stable support for the operator. It should be noted that for the support assembly 2 with the first pedal assembly 201 and the second pedal assembly 202, when the support assembly 2 is in the working state, the second pedal assembly 202 is connected with the first support base 3 or the second support base 4 through the fastener 10, so that movement of the second pedal assembly 202 relative to the first pedal assembly 201 can be prevented, and movement of the support assembly 2 relative to the first support base 3 or the second support base 4 can also be prevented.

[0063] Further, when the support assembly 2 is in the storage state, the support assembly 2 is detachably connected with the first one of the first support base 3 and the second support base 4 through the fastener 10. For example, taking the case where the support assembly 2 is movably connected with the first support base 3 as an example, specifically, when the support assembly 2 is in the storage state, the support assembly 2 is detachably connected with the first support base 3 through the fastener 10. In this way, the problem that the support assembly 2 collides with the moving module due to movement or rotation caused by vibration and the like can be avoided.

[0064] Optionally, the fastener 10 can be a positioning pin or a threaded connecting piece.

[0065] Reference Figure 9 As shown in the drawings, the purification bench rack further comprises a limiting piece 11. Each support assembly 2 corresponds to two limiting pieces 11, and the two limiting pieces 11 abut against the side walls of the support assembly 2 in the storage state and the working state, respectively, so as to position the support assembly 2.

[0066] Reference Figure 3As shown, taking the support assembly 2 connected with the first support base 3 as an example, specifically, the limiting piece 11 for abutting against the support assembly 2 in the storage state is arranged on the first support base 3, and the limiting piece 11 for abutting against the support assembly 2 in the working state is arranged on the second support base 4. In the process of switching the support assembly 2 to the working state, the support assembly 2 rotates or slides until abutting against the limiting piece 11 arranged on the second support base 4, which indicates that the support assembly 2 is moved to the position, at this time, the second pedal assembly 202 of the support assembly 2 can be unfolded, and the second pedal assembly 202 is connected with the second support base 4 by the fastener 10. In the process of switching the support assembly 2 to the storage state, the fastener 10 between the second pedal assembly 202 and the second support base 4 is disassembled first, then the second pedal assembly 202 is stored in the first pedal assembly 201, and then the support assembly 2 is reversely rotated or slid until abutting against the limiting piece 11 arranged on the first support base 3, which indicates that the support assembly 2 returns to the position, at this time, the support assembly 2 can be connected with the second support base 4 by the fastener 10.

[0067] Optionally, the limiting piece 11 is arranged as a positioning pin or a bolt.

[0068] In some embodiments provided by the present application, the frame structure 1 comprises a first frame 101 and a second frame 102 arranged in a stack from top to bottom. The first frame 101 and the second frame 102 are detachably connected. The first support base 3 and the second support base 4 are connected with the first frame 101 or the second frame 102. By arranging the frame structure 1 as the first frame 101 and the second frame 102 arranged in a stack and detachably connected, the frame structure 1 can be divided into two parts for transportation during transportation, thereby reducing the transportation difficulty, and the frame structure 1 can be divided into two parts for production during the production process, thereby reducing the production and processing difficulty.

[0069] Optionally, the first frame 101 and the second frame 102 are connected by a threaded connecting piece.

[0070] In some embodiments provided by the present application, the purification bench rack further comprises a ladder 6. The ladder 6 is arranged inside the frame structure 1, and the ladder 6 is arranged below the first support base 3 or the second support base 4. The first support base 3 or the second support base 4 is provided with a passage for the operator to pass through at a position corresponding to the ladder 6.

[0071] In this way, the operator can climb the ladder 6 to get on the first support base 3 or the second support base 4 without the aid of external ladders and other tools.

[0072] Further, the purification platform frame further comprises a cover plate 7, which is arranged at the passage corresponding to the ladder 6 in a foldable manner to open and close the passage. In this way, after the operator climbs onto the first support seat 3 or the second support seat 4, the operator can use the cover plate 7 to close the passage to avoid the operator stepping on the empty passage.

[0073] The embodiment of the present application also provides a purification platform.

[0074] Specifically, the purification platform comprises the buffer seat 5, the boat pushing mechanism 9, and the purification platform frame as described above, and the buffer seat 5 and the boat pushing mechanism 9 are connected with the frame structure 1. For example, the buffer seat 5 is provided as five or six, all the buffer seats 5 are arranged inside the frame structure 1 along the height direction of the frame structure 1, and all the buffer seats 5 are connected to the side of the frame structure 1 where the first support seat 3 is installed. The first support seat 3 is provided with the buffer seat 5 on both the upper and lower sides. The boat pushing mechanism 9 can place the graphite boat in the furnace tube or take out the graphite boat in the furnace tube.

[0075] It should be noted that the purification platform comprises the purification platform frame and all the advantages of the purification platform frame, which will not be described here.

[0076] Further, the number of the buffer seats 5 above the first support seat 3 is at least two. Among the buffer seats 5 above the first support seat 3, the bottommost buffer seat 5 is arranged on the first support seat 3, so that the structure of the purification platform frame in the height direction is more compact.

[0077] Reference Figure 7 As shown in the figure, the purification platform further comprises a sliding platform. The boat pushing mechanism 9 comprises a three-axis moving module and a boat supporting structure, the boat supporting structure is used to support the graphite boat, the three-axis moving module is connected with the boat supporting structure and is used to drive the boat supporting structure to be connected with any one of the sliding platform, the furnace tube, and the buffer seat 5. The three-axis moving module is arranged between the first support seat 3 and the second support seat 4.

[0078] The specific working process comprises the following steps. The incoming graphite boat is arranged on the sliding platform, the three-axis moving module drives the boat supporting structure to be connected with the sliding platform, and the graphite boat on the sliding platform is taken off. Then the three-axis moving module drives the boat supporting structure to be connected with the furnace tube, and the graphite boat is sent into the furnace tube. After a preset time, the three-axis moving module drives the boat supporting structure to be connected with the furnace tube, and the graphite boat in the furnace tube is taken out. Then the three-axis moving module drives the boat supporting structure to be connected with the buffer seat 5, and the graphite boat is placed on the buffer seat 5 for cooling. After a preset time, the three-axis moving module drives the boat supporting structure to transfer the graphite boat on the buffer seat 5 to the sliding platform, and the graphite boat is sent out by the sliding platform.

[0079] Of course, the purification table is not limited to the above form, for example, in other embodiments provided by the present application, the purification table also includes a sliding table and a mechanical hand 8. The number of push boat mechanisms 9 is the same as the number of buffer seats 5 and one-to-one correspondence. The mechanical hand 8 is used to transfer the graphite boat between the push boat mechanism 9, the sliding table and the buffer seat 5, and the push boat mechanism 9 is used to place the graphite boat in the furnace tube or take it out. The mechanical hand 8 is arranged between the first support seat 3 and the second support seat 4. The buffer seat 5 and the push boat mechanism 9 are arranged on the side of the first support seat 3 and the second support seat 4 respectively, for example, the buffer seat 5 is arranged on the side of the first support seat 3, and the push boat mechanism 9 is arranged on the side of the second support seat 4.

[0080] Optionally, the push boat mechanism 9 includes a boat supporting structure and a moving module, the boat supporting structure is used to support the graphite boat, and the moving module is used to drive the boat supporting structure to move.

[0081] The specific working process includes: the graphite boat is arranged on the sliding table, the mechanical hand 8 transfers the graphite boat on the sliding table to the boat supporting structure of the push boat mechanism 9, and the moving module drives the boat supporting structure to push the graphite boat into the corresponding furnace tube. After a predetermined time, the moving module drives the boat supporting structure to take out the graphite boat from the furnace tube. The mechanical hand 8 transfers the graphite boat on the boat supporting structure to the buffer seat 5. After a predetermined time, the mechanical hand 8 transfers the graphite boat on the buffer seat 5 to the sliding table, and the graphite boat is sent out by the sliding table.

[0082] In the embodiment of the present application, a production line is also provided.

[0083] Specifically, the production line is used for producing solar cells. The production line includes a purification table. It should be noted that the production line includes the purification table and also includes all the advantages of the purification table described above, which will not be repeated here.

[0084] Finally, it should be pointed out that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A cleanroom bench rack, characterized in that, include: Frame structure (1); The first support base (3) and the second support base (4) are both located inside the frame structure (1) and are respectively connected to the two sides of the frame structure (1). There is a gap between the first support base (3) and the second support base (4). The upper and lower sides of the first support base (3) are used to set the buffer base (5). The support component (2) is movably connected to one of the first support base (3) and the second support base (4) and can switch between a storage state and a working state. In the storage state, the support component (2) moves to the top of the first support base (3) or the second support base (4) connected to the support component (2). In the working state, the support component (2) moves and is positioned between the second support base (4) and the first support base (3). The support assembly (2) includes a first pedal assembly (201) and a second pedal assembly (202). The second pedal assembly (202) is rotatably connected to the first pedal assembly (201), and the second pedal assembly (202) can be flipped and folded on top of the first pedal assembly (201) or flipped open on one side of the first pedal assembly (201). Alternatively, the second pedal assembly (202) is slidably connected to the first pedal assembly (201) so that the second pedal assembly (202) can extend and retract relative to the first pedal assembly (201); It also includes a ladder (6), which is located inside the frame structure (1) and is located below the first support (3) or the second support (4). The first support (3) or the second support (4) has a passage for operators to pass through at the position corresponding to the ladder (6). It also includes a cover plate (7), which is closable and disposed at the passage corresponding to the ladder (6) to open and close the passage.

2. The cleanroom bench frame according to claim 1, characterized in that, The first pedal assembly (201) is connected to the first support base (3) or the second support base (4), and the second pedal assembly (202) is movably connected to the first pedal assembly (201); When the support assembly (2) is in the retracted state, the second pedal assembly (202) is retracted into the first pedal assembly (201). When the support assembly (2) is in the working state, the second pedal assembly (202) is unfolded relative to the first pedal assembly (201), and both the first pedal assembly (201) and the second pedal assembly (202) are mounted between the first support base (3) and the second support base (4).

3. The cleanroom bench frame according to any one of claims 1-2, characterized in that, The support component (2) is rotatably connected to the first support base (3) or the second support base (4); Alternatively, the support component (2) may slide in cooperation with one of the first support base (3) and the second support base (4), and the support component (2) may slide toward the other of the first support base (3) and the second support base (4).

4. The cleanroom bench frame according to any one of claims 1-2, characterized in that, It also includes a fastener (10) in the working state of the support assembly (2), which is detachably connected to the second of the first support base (3) and the second support base (4) via the fastener (10).

5. The cleanroom bench frame according to any one of claims 1-2, characterized in that, The frame structure (1) includes a first frame (101) and a second frame (102) stacked on top of each other. The first frame (101) and the second frame (102) are detachably connected. The first support base (3) and the second support base (4) are both connected to the first frame (101) or the second frame (102).

6. A purification table, characterized in that, It includes a buffer seat (5), a boat pushing mechanism (9), and a clean bench frame as described in any one of claims 1-5, wherein the buffer seat (5) and the boat pushing mechanism (9) are both connected to the frame structure (1).

7. The cleanroom bench according to claim 6, characterized in that, The purification table also includes a sliding table, and the boat pushing mechanism (9) includes a three-axis moving module and a boat supporting structure. The boat supporting structure is used to support the graphite boat. The three-axis moving module is connected to the boat supporting structure and is used to drive the boat supporting structure to dock with any one of the sliding table, furnace tube and buffer seat (5). The three-axis moving module is set between the first support seat (3) and the second support seat (4). Alternatively, the purification table may also include a sliding table and a robotic arm (8). The number of the boat-pushing mechanisms (9) is the same as the number of the buffer seats (5) and they correspond one-to-one. The robotic arm (8) is used to transfer the graphite boat between the boat-pushing mechanisms (9), the sliding table and the buffer seats (5). The boat-pushing mechanisms (9) are used to place the graphite boat on or remove it from the furnace tube. The robotic arm (8) is located between the first support seat (3) and the second support seat (4). The buffer seats (5) and the boat-pushing mechanisms (9) are respectively located on the sides of the first support seat (3) and the second support seat (4).

8. A production line, characterized in that, Includes the clean bench as described in claim 6 or 7.

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