Collimating device and packaging method

Abstract

The application provides a collimating device and a preparation method. The collimating device comprises a first substrate, a second substrate and a sealing material. The first substrate has a first sealing surface. The second substrate has a second sealing surface. The sealing material is arranged on the first sealing surface and / or the second sealing surface. The sealing material is solidified to form a borate glass sealing layer so that the first sealing surface and the second sealing surface are sealed by the sealing material. The sealing material comprises silica, alkali metal oxide, alkaline earth metal oxide, carbonate and water. The sealing material is in a fluid state before solidification.

Description

Technical Field

[0001] This invention generally relates to the field of atomic clocks, and more specifically to a collimation device and its packaging method. Background Technology

[0002] With advancements in theory and technology, atomic vapor can now be precisely manipulated for various scientific research and industrial production applications, such as microchips, space atomic clocks, precision measurement, and quantum information and simulation. In its natural state, atomic vapor follows a Boltzmann distribution, resulting in chaotic and unpredictable motion that is difficult to control and apply. The efficient and stable generation of various collimated atomic beams using atomic beam collimation devices is fundamental to these applications; therefore, there is a huge market demand for the development of atomic beam collimation devices.

[0003] Traditional atomic beam collimators are fabricated using bonding processes (such as anodic bonding, hot-press bonding, eutectic bonding, or high-temperature diffusion bonding). This method has the following drawbacks:

[0004] 1. Limited bonding scenarios and picky about sealing materials (e.g., requiring acid and alkali resistance, high stability, and non-reaction with active atoms; high transmittance in the ultraviolet and infrared bands, such as quartz and sapphire; and sufficiently stable sealing surfaces free of organic materials), limiting adaptability; 2. Common bonding processes have high requirements for the pre-processing of the bonding surfaces, making it difficult to control the final bonding yield and reducing operability; 3. Relatively high process difficulty and high requirements for the operating environment; 4. High cost; 5. Some bonding processes require oxygen isolation treatment to prevent oxidation during bonding, further increasing process complexity; 6. Other bonding processes require the appropriate use of flux during bonding, posing a potential risk of contamination.

[0005] In addition, the above-mentioned traditional bonding process has the following problems in the application scenario of this atomic beam device: low bonding yield and high cost for large-area materials to be bonded; low bonding strength; 3. strict material selection, and cannot effectively bond materials with excellent ultraviolet and infrared transmittance such as quartz and sapphire.

[0006] In view of this, a new collimation device and packaging method are needed to overcome the above problems. Summary of the Invention

[0007] To address the aforementioned technical problems, the present invention provides a collimation device, comprising: a first substrate having a first sealing surface; a second substrate having a second sealing surface; and a sealing material disposed on the first sealing surface and / or the second sealing surface, wherein the sealing material is cured to form a borate glass sealing layer such that the first sealing surface and the second sealing surface are sealed by the sealing material; wherein the sealing material comprises silicon dioxide, alkali metal oxide, alkaline earth metal oxide, carbonate, and water, and the sealing material is in a fluid state before curing.

[0008] In one embodiment, the sealing material contains silica, alkali metal oxides, alkaline earth metal oxides, and carbonates forming a mixed powder. The mixed powder is used to form a borate glass sealing layer. The weight percentages of each component in the mixed powder are as follows: Al2O3: 20-45 parts by weight, MgO: 0-8 parts by weight, CaO: 0-3 parts by weight, Na2CO3: 1-10 parts by weight, K2O: 0-10 parts by weight, and B2O3: 1-10 parts by weight.

[0009] In one embodiment, the weight parts of MgO, CaO and K2O in the mixed powder are all greater than 0.

[0010] In one embodiment, the method further includes: adding anhydrous ethanol to the mixed powder, grinding the mixed powder once, wherein the molar ratio of the mixed powder to the anhydrous ethanol is 1:1; and drying the mixed powder after the first grinding treatment, mixing it with deionized distilled water at a weight ratio of 1:1, adding a dispersant, and then grinding it a second time to obtain the sealing material.

[0011] In one embodiment, the dispersant is sodium stearate and polyethylene glycol.

[0012] In one embodiment, the curing temperature of the sealing material is 200-800°C.

[0013] In one embodiment, a microgroove pattern is etched on at least one of the first substrate and the second substrate, and after the first sealing surface and the second sealing surface are sealed, the microgroove pattern serves as the collimation channel of the collimation device.

[0014] The present invention also provides a method for packaging a collimation device, the packaging method comprising:

[0015] A first substrate and a sealing material are provided, and the sealing material is coated on a first sealing surface of the first substrate;

[0016] A second substrate is provided, and the second sealing surface of the second substrate is covered over the first sealing surface coated with the sealing material to form a temporary bond;

[0017] The temporary bond is placed in a high-temperature furnace, and the furnace temperature is controlled at 200-800℃ to cure the sealing material to form a borate glass sealing layer, thereby sealing the first sealing surface and the second sealing surface through the sealing material to form the collimation device.

[0018] The sealing material includes silica, alkali metal oxides, alkaline earth metal oxides, carbonates, and water, and is in a fluid state before curing.

[0019] In one embodiment, the process further includes preparing the sealing material, the preparation of the sealing material comprising:

[0020] Weigh out SiO2: 10-60 parts by weight, Al2O3: 20-45 parts by weight, MgO: 0-8 parts by weight, CaO: 0-3 parts by weight, Na2CO3: 1-10 parts by weight, K2O: 0-10 parts by weight, and B2O3: 1-10 parts by weight according to the weight percentage, and mix them to form a mixed powder. Add anhydrous ethanol to the mixed powder according to the molar ratio of the mixed powder to anhydrous ethanol of 1:1, and grind the mixed powder in a ball mill. After the mixed powder is processed by the ball mill, filter out the anhydrous ethanol, dry it, mix it with deionized distilled water at a weight ratio of 1:1, add a dispersant, and grind it again in a ball mill to obtain the sealing material.

[0021] In one embodiment, the method further includes: polishing the first sealing surface, applying the sealing material to the polished first sealing surface; polishing the second sealing surface, and combining the polished second sealing surface with the first sealing surface coated with the sealing material.

[0022] In one embodiment, the method further includes: etching the first substrate to form a first microgroove pattern, wherein the first microgroove pattern and the first sealing surface are located on the same side of the thickness direction of the first substrate; and / or

[0023] The second substrate is etched to form a second microgroove pattern, the second microgroove pattern and the second sealing surface are located on the same side of the thickness direction of the second substrate; wherein, after the first sealing surface and the second sealing surface are sealed by the sealing material, the first microgroove pattern and / or the second microgroove pattern serve as the collimation channel of the collimation device.

[0024] Compared with the prior art, the collimation device and packaging method provided by the present invention involves coating a fluid-containing sealing material onto a first substrate and / or a second substrate, and curing the sealing material at a high temperature to form a borate glass sealing layer to seal the first sealing surface of the first substrate and the second sealing surface of the second substrate; wherein the sealing material is a suspension comprising silicon dioxide, alkali metal oxide, alkaline earth metal oxide, carbonate and water.

[0025] The above-mentioned collimation device and packaging method have the following advantages: simple preparation of sealing material; strong sealing strength after high temperature curing; good airtightness of the sealing surface due to the borate glass sealing layer; and simple packaging process. Attached Figure Description

[0026] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0027] Figure 1 This is a cross-sectional schematic diagram of a collimation device provided in one embodiment of the present invention;

[0028] Figure 2 This is a top view of a first substrate provided in one embodiment of the present invention;

[0029] Figure 3 According to one embodiment of the present invention Figure 2 The encapsulation method in the diagram illustrates the tensile testing of the encapsulated sample. Detailed Implementation

[0030] To provide a further understanding of the purpose, structure, features, and functions of the present invention, detailed descriptions are provided below with reference to specific embodiments.

[0031] In the description of this invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0032] like Figure 1As shown, the present invention provides a collimation device 10, which includes a first substrate 11, a second substrate 12, and a borate glass sealing layer 13 formed of an encapsulation material. The first substrate 11 has a first sealing surface 111, and the second substrate 12 has a second sealing surface 121. The sealing material is coated on at least one of the first sealing surface 111 and the second sealing surface 121. After curing at high temperature (200-800°C), the sealing material process forms the borate glass sealing layer 13. Preferably, the sealing material is a suspension including silicon dioxide, alkali metal oxide, alkaline earth metal oxide, carbonate, and water.

[0033] In one embodiment, the collimation device 10 is an atomic beam collimation device 10 used to collimate an atomic beam.

[0034] In one embodiment, the sealing material contains silica, alkali metal oxides, alkaline earth metal oxides, and carbonates forming a mixed powder. The mixed powder is used to form a borate glass sealing layer. The weight percentages of each component in the mixed powder are: SiO2: 10-60 parts by weight, Al2O3: 20-45 parts by weight, Na2CO3: 1-10 parts by weight, and B2O3: 1-10 parts by weight. Further, the mixed powder also includes: MgO: 0-8 parts by weight, CaO: 0-3 parts by weight, and K2O: 0-10 parts by weight, wherein the weight percentages of MgO, CaO, and K2O are all greater than 0.

[0035] In one embodiment, anhydrous ethanol is added to the above-mentioned mixed powder, and the mixed powder is ground once, wherein the molar ratio of the mixed powder to anhydrous ethanol is 1:1; and after the mixed powder after the first grinding is dried, it is mixed with deionized distilled water at a weight ratio of 1:1, and a dispersant is added, followed by a second grinding process to obtain the sealing material.

[0036] Among them, deionized distilled water refers to high-purity water after two purification steps of deionization and distillation. The two purification steps of deionization and distillation are mainly used to filter out sodium ions in the water to prevent sodium ions from corroding the quartz glass when the substrate is quartz glass.

[0037] In one embodiment, the dispersant is sodium stearate and polyethylene glycol, used to uniformly disperse the mixed powder in deionized distilled water.

[0038] In one embodiment, the curing temperature of the sealing material prepared above is 200-1100℃, preferably 200-800℃.

[0039] It is understandable that the mixed powders in the above-prepared sealing material all use inorganic materials. Therefore, compared with the existing method in the field of atomic clocks that uses organic materials to seal semiconductor substrates to prepare collimators, the above-prepared sealing material effectively solves the problem of material pickiness during substrate encapsulation, allowing for a wider range of substrate material choices, especially suitable for sealing glass materials. The borate glass sealing layer formed by the curing of the sealing material can avoid situations where it is unsuitable under strong acid, strong alkali, or ultraviolet light conditions. In addition, the physicochemical properties of the borate glass sealing layer formed by the curing of the sealing material are stable and do not react with atoms passing through the atomic beam collimator, thus not causing any additional impact on the performance of the atomic beam collimator.

[0040] It should be noted that the sealing material described above in this invention can also be applied to the packaging of larger-sized microfluidic chips, MEMS vacuum systems, etc.

[0041] Reference Figure 1 and Figure 2 A microgroove pattern 112 is etched on the first sealing surface 111 of the first substrate 11. After the first sealing surface 111 and the second sealing surface 121 are sealed by sealing material, the microgroove pattern 112 is located between the first substrate 11 and the second substrate 12, which serves as the collimation channel of the atomic beam collimation device 10.

[0042] In this embodiment, the microgroove pattern consists of several parallel and spaced strip grooves that extend along one side of the first sealing surface to the opposite side.

[0043] It is understood that, in other embodiments of the present invention, the microgroove pattern may also be etched on the second sealing surface of the second substrate, or the microgroove pattern may include a first microgroove pattern formed by etching the first sealing surface, and a second microgroove pattern formed by etching the second sealing surface. The first microgroove pattern and the second microgroove pattern may coincide in the thickness direction of the first substrate and the second substrate, or may be misaligned with each other.

[0044] The present invention also provides a method for packaging a collimation device, the packaging method comprising:

[0045] A first substrate and a sealing material are provided, and the sealing material is coated on the first sealing surface of the first substrate;

[0046] A second substrate is provided, and the second sealing surface of the second substrate is covered over the first sealing surface coated with sealing material to form a temporary bond;

[0047] The temporary assembly is placed in a high-temperature furnace, and the furnace temperature is controlled at 200-800℃. The sealing material is cured to form a borate glass sealing layer, and the first sealing surface and the second sealing surface are sealed by the sealing material to form a collimation device.

[0048] The sealing material includes silica, alkali metal oxides, alkaline earth metal oxides, carbonates, and water, and is in a fluid state before curing.

[0049] In one embodiment, the preparation of the sealing material includes: weighing SiO2: 10-60 parts by weight, Al2O3: 20-45 parts by weight, MgO: 0-8 parts by weight, CaO: 0-3 parts by weight, Na2CO3: 1-10 parts by weight, K2O: 0-10 parts by weight, and B2O3: 1-10 parts by weight according to weight percentage, and mixing them to form a mixed powder;

[0050] Anhydrous ethanol is added to the mixed powder at a molar ratio of 1:1, and the mixed powder is then ground in a ball mill; and...

[0051] The mixed powder after being processed by a ball mill is filtered to remove anhydrous ethanol, dried, and then mixed with deionized distilled water at a weight ratio of 1:1. After adding a dispersant, it is ground again in a ball mill to obtain the sealing material.

[0052] In one embodiment, before encapsulating the first substrate and the second substrate, the process further includes: polishing the first sealing surface, applying the sealing material to the polished first sealing surface; polishing the second sealing surface, and combining the polished second sealing surface with the first sealing surface coated with the sealing material.

[0053] In one embodiment, prior to encapsulation of the first substrate and the second substrate, the method further includes: etching the first substrate to form a first microgroove pattern, wherein the first microgroove pattern and the first sealing surface are located on the same side of the thickness direction of the first substrate; and / or: etching the second substrate to form a second microgroove pattern, wherein the second microgroove pattern and the second sealing surface are located on the same side of the thickness direction of the second substrate; wherein, after the first sealing surface and the second sealing surface are sealed with sealing material, the first microgroove pattern and / or the second microgroove pattern serve as a collimation channel for the collimation device.

[0054] Example 1: Preparation of sealing material

[0055] Sealing material sample 1:

[0056] Weigh out the following by weight percentage: SiO2: 20 parts by weight, Al2O3: 30 parts by weight, MgO: 2 parts by weight, CaO: 1 part by weight, Na2CO3: 3 parts by weight, K2O: 3 parts by weight, B2O3: 4 parts by weight, and mix them to form a mixed powder.

[0057] Anhydrous ethanol is added to the mixed powder at a molar ratio of 1:1, and the mixed powder is then ground in a ball mill; and...

[0058] The mixed powder after being processed by a ball mill is filtered to remove anhydrous ethanol, dried, and then mixed with deionized distilled water at a weight ratio of 1:1. After adding a dispersant, it is ground again in a ball mill to obtain the sealing material.

[0059] Sealing material sample 2:

[0060] Weigh out the following by weight percentage: SiO2: 40 parts by weight, Al2O3: 40 parts by weight, MgO: 5 parts by weight, CaO: 2 parts by weight, Na2CO3: 6 parts by weight, K2O: 6 parts by weight, B2O3: 7 parts by weight, and mix them to form a mixed powder.

[0061] Anhydrous ethanol is added to the mixed powder at a molar ratio of 1:1, and the mixed powder is then ground in a ball mill; and...

[0062] The mixed powder after being processed by a ball mill is filtered to remove anhydrous ethanol, dried, and then mixed with deionized distilled water at a weight ratio of 1:1. After adding a dispersant, it is ground again in a ball mill to obtain the sealing material.

[0063] Sealing material sample 3:

[0064] Weigh out the following by weight percentage: SiO2: 60 parts by weight, Al2O3: 45 parts by weight, MgO: 8 parts by weight, CaO: 3 parts by weight, Na2CO3: 10 parts by weight, K2O: 10 parts by weight, B2O3: 10 parts by weight, and mix them to form a mixed powder.

[0065] Anhydrous ethanol is added to the mixed powder at a molar ratio of 1:1, and the mixed powder is then ground in a ball mill; and...

[0066] The mixed powder after being processed by a ball mill is filtered to remove anhydrous ethanol, dried, and then mixed with deionized distilled water at a weight ratio of 1:1. After adding a dispersant, it is ground again in a ball mill to obtain the sealing material.

[0067] It should be noted that in the preparation of the above-mentioned sealing material samples 1, 2, and 3, the weight parts of MgO, CaO, and K2O are all greater than 0; however, it is understood that those skilled in the art can selectively remove at least one of MgO, CaO, and K2O from each sample as needed, and can also obtain sealing materials with similar or nearly identical properties.

[0068] Example 2: Fabrication of an atomic beam collimation device

[0069] Preparation of Sample 1:

[0070] A first substrate and a second substrate after polishing are provided; a sealing material sample 1 is coated on the first sealing surface after polishing the first substrate; the second sealing surface of the second substrate after polishing is superimposed on the first sealing surface to form a temporary bond; the temporary bond is placed in a high-temperature furnace, the furnace temperature is set to 200℃, and it is cured for 5 hours to obtain an atomic beam collimation device.

[0071] Preparation of Sample 2:

[0072] A first substrate and a second substrate after polishing are provided; a sealing material sample 2 is coated on the first sealing surface after polishing the first substrate; the second sealing surface of the second substrate after polishing is superimposed on the first sealing surface to form a temporary bond; the temporary bond is placed in a high-temperature furnace, the furnace temperature is set to 500℃, and it is cured for 7 hours to obtain an atomic beam collimation device.

[0073] Preparation of Sample 3:

[0074] A first substrate and a second substrate after polishing are provided; a sealing material sample 3 is coated on the first sealing surface after polishing the first substrate; the second sealing surface of the second substrate after polishing is superimposed on the first sealing surface to form a temporary bond; the temporary bond is placed in a high-temperature furnace, the furnace temperature is set to 800℃, and it is cured for 9 hours to obtain an atomic beam collimation device.

[0075] After conducting a 108-hour thermal cycling test on the atomic beam collimator, a tensile test was also performed. Figure 3 As shown, the ultimate tensile forces of samples 1, 2, and 3 are 98.87 N, 109.76 N, and 180.20 N, respectively. The experimental bonding area is 4 mm × 4 mm, and the pressure per unit area can reach more than 6 MPa.

[0076] In summary, the atomic beam collimation device and packaging method provided by the present invention involves coating a fluid-containing sealing material onto a first substrate and / or a second substrate, and curing the sealing material at a high temperature to form a borate glass sealing layer to seal the first sealing surface of the first substrate and the second sealing surface of the second substrate; wherein the sealing material is a suspension comprising silicon dioxide, alkali metal oxides, alkaline earth metal oxides, carbonates and water.

[0077] The above-mentioned atomic beam collimation device and packaging method have the following advantages: simple preparation of sealing materials; strong sealing strength after high-temperature curing; good airtightness of the sealing surface due to the borate glass sealing layer; and simple packaging process.

[0078] The present invention has been described by the above-described embodiments; however, these embodiments are merely examples for implementing the present invention. Furthermore, the technical features involved in the different embodiments of the present invention described above can be combined with each other as long as they do not conflict with each other. It must be pointed out that the disclosed embodiments do not limit the scope of the present invention. On the contrary, any modifications and refinements made without departing from the spirit and scope of the present invention are within the scope of patent protection of the present invention.

Claims

1. A collimation device for atomic beam collimation, characterized in that, The collimation device includes: A first substrate, the first substrate having a first sealing surface; A second substrate, the second substrate having a second sealing surface; and A sealing material is disposed on the first sealing surface and / or the second sealing surface, and the sealing material is cured to form a borate glass sealing layer so that the first sealing surface and the second sealing surface are sealed by the sealing material; The sealing material includes silica, alkali metal oxides, alkaline earth metal oxides, carbonates, and water, and the sealing material is in a fluid state before curing. The sealing material comprises silica, alkali metal oxides, alkaline earth metal oxides, and carbonates forming a mixed powder. The mixed powder contains 10-60 parts by weight of SiO2, 20-45 parts by weight of Al2O3, 0-8 parts by weight of MgO, 0-3 parts by weight of CaO, 1-10 parts by weight of Na2CO3, 0-10 parts by weight of K2O, and 1-10 parts by weight of B2O3. The mixed powder is used to form a borate glass sealing layer. All components in the mixed powder are inorganic materials.

2. The collimation device according to claim 1, characterized in that, The weight parts of MgO, CaO and K2O in the mixed powder are all greater than 0.

3. The collimation device according to claim 1 or 2, characterized in that, Also includes: Anhydrous ethanol is added to the mixed powder, and the mixed powder is ground once. The molar ratio of the mixed powder to the anhydrous ethanol is 1:

1. as well as After the mixed powder is dried following the first grinding process, it is mixed with deionized distilled water at a weight ratio of 1:1, and a dispersant is added. Then, it is subjected to a second grinding process to obtain the sealing material.

4. The collimation device according to claim 3, characterized in that, The dispersant is sodium stearate and polyethylene glycol.

5. The collimation device according to claim 4, characterized in that, The curing temperature of the sealing material is 200-800℃.

6. The collimation device according to claim 1, characterized in that, A microgroove pattern is etched on at least one of the first substrate and the second substrate. After the first sealing surface and the second sealing surface are sealed, the microgroove pattern serves as the collimation channel of the collimation device.

7. A method for packaging a collimating device, the collimating device being used for atomic beam collimation, characterized in that, The encapsulation method includes: A first substrate and a sealing material are provided, and the sealing material is coated on a first sealing surface of the first substrate; A second substrate is provided, and the second sealing surface of the second substrate is covered over the first sealing surface coated with the sealing material to form a temporary bond; The temporary bond is placed in a high-temperature furnace, and the furnace temperature is controlled at 200-800℃ to cure the sealing material to form a borate glass sealing layer, thereby sealing the first sealing surface and the second sealing surface through the sealing material to form the collimation device. The sealing material includes silica, alkali metal oxides, alkaline earth metal oxides, carbonates, and water, and the sealing material is in a fluid state before curing. The preparation of the sealing material includes: weighing SiO2: 10-60 parts by weight, Al2O3: 20-45 parts by weight, MgO: 0-8 parts by weight, CaO: 0-3 parts by weight, Na2CO3: 1-10 parts by weight, K2O: 0-10 parts by weight, and B2O3: 1-10 parts by weight according to the weight percentage, and mixing them to form a mixed powder; all components in the mixed powder are inorganic materials.

8. The packaging method according to claim 7, characterized in that, The preparation of the sealing material also includes, Anhydrous ethanol is added to the mixed powder at a molar ratio of 1:1, and the mixed powder is then ground in a ball mill. as well as The mixed powder, after being processed by a ball mill, is filtered to remove the anhydrous ethanol, dried, and then mixed with deionized distilled water at a weight ratio of 1:

1. A dispersant is added, and the mixture is ground again in a ball mill to obtain the sealing material.

9. The packaging method according to claim 8, characterized in that, Also includes: Polish the first sealing surface, and then apply the sealing material to the polished first sealing surface; The second sealing surface is polished, and the polished second sealing surface is then combined with the first sealing surface coated with the sealing material.

10. The packaging method according to claim 8, characterized in that, Also includes: The first substrate is etched to form a first microgroove pattern, and the first microgroove pattern and the first sealing surface are located on the same side of the thickness direction of the first substrate; and / or The second substrate is etched to form a second microgroove pattern, and the second microgroove pattern and the second sealing surface are located on the same side of the thickness direction of the second substrate; Wherein, after the first sealing surface and the second sealing surface are sealed by the sealing material, the first microgroove pattern and / or the second microgroove pattern serve as the collimation channel of the collimation device.

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