A kind of slice library unlocking mechanism labyrinth plate assembly tool

Abstract

The application discloses a kind of slice library unlocking mechanism labyrinth plate assembly tool, comprising: tool, main frame and labyrinth plate, the both sides of main frame are respectively equipped with guide rail sliding block, guide rail sliding block other side is equipped with tool, the tool is fixed with labyrinth plate by pin near one side of main frame, unlocking key is installed on the upper surface of labyrinth plate, unlocking key other end is inserted into the hole of tool, it is fixed between guide rail sliding block and tool by fixed tool screw, the upper surface of labyrinth plate is fixed by fixed flexible connecting piece screw respectively flexible connecting piece one and flexible connecting piece two, flexible connecting piece three, flexible connecting piece four are installed.The assembly tool is assembled by the present application, the pin of fixed tool and labyrinth plate is removed, the parallelism of labyrinth plate and tool can be guaranteed, the device can also quickly determine the locking position of belt, greatly save time cost, manual installation belt fixing piece and flexible connecting piece locking belt can only be single, single step, make labyrinth plate and tool parallel.

Description

Technical Field

[0001] This invention relates to the field of chip library assembly tooling technology, specifically a chip library unlocking mechanism maze plate assembly tooling. Background Technology

[0002] Wafer libraries are used in photolithography and other semiconductor equipment. As a wafer storage module, the wafer library must be parallel to the robot arm, the unlocking mechanism must be reliable, and the wafer must be undamaged during the unlocking process and the robot's wafer retrieval process. As a supplier, it is necessary to assemble quickly, but existing assembly methods can only measure and assemble step by step.

[0003] During the use of the disc library, the unlocking key caused stress damage to the disc box door. Analysis revealed that the maze plate with the key was not parallel to the tooling mounted on the guide rail during assembly. Due to the tilt, the unlocking key did not extend sufficiently, resulting in stress damage to the disc box door. Therefore, a new maze plate assembly tooling for the disc library unlocking mechanism is urgently needed to solve the above technical problem. Summary of the Invention

[0004] The purpose of this invention is to provide a maze plate assembly fixture for a chip library unlocking mechanism to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A maze plate assembly fixture for a chip library unlocking mechanism includes: the fixture, a main frame, and a maze plate;

[0007] Guide rail sliders are installed on both sides of the main frame, and tooling is installed on the other side of the guide rail sliders;

[0008] The fixture is fixed to the maze plate by pins on the side near the main frame. Unlocking keys are installed on both sides of the upper surface of the maze plate, and the other end of the unlocking key is inserted into the hole of the fixture.

[0009] As a further aspect of the present invention, the guide rail slider is fixed to the tooling by a tooling screw.

[0010] As a further aspect of the present invention: flexible connector one and flexible connector two are respectively fixedly installed on both sides of the upper surface of the maze board by fixing flexible connector screws.

[0011] As a further aspect of the present invention: flexible connector three and flexible connector four are respectively fixedly installed on both sides of the upper surface of the maze board by fixing flexible connector screws, and flexible connector three and flexible connector four are located on the opposite sides of flexible connector one and flexible connector two.

[0012] As a further embodiment of the present invention: the belt is secured to the belt fixing member by a screw in the middle of the first flexible connector, the belt is secured to the belt fixing member by a screw in the middle of the second flexible connector, the belt is secured to the belt fixing member by a screw in the middle of the third flexible connector, and the belt is secured to the belt fixing member by a screw in the middle of the fourth flexible connector, and the number of belt fixing members is four.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] 1. This device can make the labyrinth plate parallel to the tooling mounted on the guide rail slider, thus solving the problem of stress damaging the unlocking key's disc box;

[0015] 2. The maze board can be assembled quickly by fixing it in place;

[0016] 3. This device is simple, quick, and convenient to operate, and ensures installation accuracy;

[0017] After assembly using this assembly fixture, the pins connecting the fixing fixture and the labyrinth plate can be removed, ensuring that the labyrinth plate is parallel to the fixture. This device can also quickly determine the locking position of the belt, greatly saving time and reducing manual labor. Manual labor can only install the belt fixing parts and flexible connectors one by one and step by step to lock the belt and make the labyrinth plate parallel to the fixture. Attached Figure Description

[0018] Figure 1 Rear view of the assembly fixture for the maze plate of the film library unlocking mechanism.

[0019] Figure 2 Front view of the assembly fixture for the maze plate of the film library unlocking mechanism.

[0020] Figure 3 Front view of the maze plate installation in the maze plate assembly fixture for the film library unlocking mechanism.

[0021] Figure 4 A side view of the maze plate installation in the maze plate assembly fixture for the chip library unlocking mechanism.

[0022] In the diagram: 1-Tooling, 2-Guide rail slider, 3-Main frame, 4-Fixing tooling screw, 5-Pin, 6-Unlocking key, 7-Maze plate, 8-Flexible connector one, 9-Flexible connector two, 10-Flexible connector three, 11-Flexible connector four, 12-Fixing flexible connector screw, 13-Screw, 14-Belt fastener, 15-Belt. Detailed Implementation

[0023] Various exemplary embodiments, features, and aspects of this application will now be described in detail with reference to the accompanying drawings. The same reference numerals in the drawings denote elements that have the same or similar functions. Although various aspects of the embodiments are shown in the drawings, they are not necessarily drawn to scale unless specifically indicated otherwise.

[0024] The term “exemplary” as used herein means “serving as an example, embodiment, or illustration.” Any embodiment illustrated herein as “exemplary” is not necessarily to be construed as superior to or better than other embodiments.

[0025] Furthermore, to better illustrate this application, numerous specific details are provided in the following detailed embodiments. Those skilled in the art should understand that this application can be implemented even without certain specific details. In some instances, methods, means, and elements well-known to those skilled in the art have not been described in detail in order to highlight the main points of this application.

[0026] Example 1

[0027] Please see Figure 1-4 A maze plate assembly fixture for a chip library unlocking mechanism includes: fixture 1, main frame 3, and maze plate 7.

[0028] Specifically, guide rail sliders 2 are installed on both sides of the main frame 3, and tooling 1 is installed on the other side of the guide rail sliders 2. Tooling 1 is fixed to the maze plate 7 by pins 5 on the side near the main frame 3. Unlocking keys 6 are installed on both sides of the upper surface of the maze plate 7, and the other end of the unlocking key 6 is inserted into the hole of tooling 1.

[0029] Preferably, the guide rail slider 2 is fixed to the tooling 1 by a fixing tooling screw 4.

[0030] It should be specifically explained that: the installed maze plate 7 is kept parallel to the fixture 1 by the fixture 1, the intersection position of the maze plate 7 is fixed by the fixture 1, and the flexible connecting piece that drives the maze plate 7 to move back and forth by the pulley is fixed on the maze plate 7. Finally, the belt fixing piece 14 is locked to the flexible connecting piece by the screw 13, and the belt 15 achieves the purpose of keeping the surface of the maze plate 7 parallel to the fixture 1 during the movement.

[0031] Preferably, flexible connector 1 8 and flexible connector 2 9 are fixedly installed on both sides of the upper surface of the maze plate 7 by means of flexible connector screws 12.

[0032] Preferably, flexible connector three 10 and flexible connector four 11 are fixedly installed on both sides of the upper surface of the maze plate 7 by means of flexible connector screws 12, and the flexible connector three 10 and flexible connector four 11 are located on the opposite sides of flexible connector one 8 and flexible connector two 9.

[0033] Preferably, the flexible connector 1 8 uses screws 13 to secure the belt 15 to the belt fixing member 14, the flexible connector 2 9 uses screws 13 to secure the belt 15 to the belt fixing member 14, the flexible connector 3 10 uses screws 13 to secure the belt 15 to the belt fixing member 14, and the flexible connector 4 11 uses screws 13 to secure the belt 15 to the belt fixing member 14. The number of belt fixing members 14 is four.

[0034] It should be specifically explained that: the maze plate 7 is inserted into the main frame 3 from the side with fixture 1. The maze plate 7 is secured to the flexible connector using the fixing screw 12 (not fixed). Fixture 1 is then fixed to the guide rail slider 2 using the fixing screw 4. The fixing screw 12 is removed, and the unlocking key 6 and pin 5 installed on the maze plate 7 are inserted into the corresponding holes in fixture 1. The maze plate 7 is then fixed to fixture 1 using the fixing screw 4. Finally, the flexible connector 8 is secured using the fixing screw 12. Flexible connector 2 9, flexible connector 3 10, and flexible connector 4 11 are fixed on the maze plate 7. Then, the belt 15 is placed between the belt fixing member 14 and the flexible connector 1 8 and locked in place by screw 13. Then, the belt 15 is placed between the belt fixing member 14 and the flexible connector 2 9 and the belt fixing member 3 10 and the flexible connector 4 11 and locked in place by screw 13.

[0035] It should be noted that this device can make the maze plate 7 parallel to the tooling 1 mounted on the guide rail slider 2, thus solving the problem of stress damage to the unlocking key 6. The maze plate 7 can be quickly assembled by fixing it. The device is simple, fast and convenient to operate, and ensures installation accuracy.

[0036] Furthermore, after assembly using this assembly fixture, the pins connecting the fixing fixture 1 and the maze plate 7 can be removed, ensuring that the maze plate 7 is parallel to the fixture 1. This device can also quickly determine the locking position of the belt 15, greatly saving time and reducing manual labor. Manual labor can only install the belt fixing component 14 and the flexible connector to lock the belt 15 individually and step by step, so that the maze plate 7 is parallel to the fixture 1.

[0037] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within the present invention.

[0038] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A method for assembling a maze plate for a chip library unlocking mechanism, characterized in that, include: The fixture (1), main frame (3), and maze plate (7) are arranged together. The maze plate (7) is placed into the main frame (3) from the side where the fixture (1) is to be installed. The maze plate (7) is non-fixed to the flexible connectors (8), (9), (10), and (11) using the fixing screws (12). Guide rail sliders (2) are installed on both sides of the main frame (3). The fixture (1) is fixed to the guide rail sliders (2) by the fixing screws (4). 2) Remove the screws (12) securing the flexible connectors, insert the unlocking key (6) and pin (5) mounted on the maze plate (7) into the corresponding holes of the fixture (1), fix the side of the fixture (1) closest to the main frame (3) to the maze plate (7) using the pin (5), and then fix the flexible connector one (8), flexible connector two (9), flexible connector three (10), and flexible connector four (11) to the maze plate (7) using the screws (12) securing the flexible connectors. Flexible connector 1 (8) and flexible connector 2 (9) are fixedly installed on both sides of one end of the upper surface of the maze board (7) by fixing flexible connector screws (12), and flexible connector 3 (10) and flexible connector 4 (11) are fixedly installed on both sides of the other end of the upper surface of the maze board (7) by fixing flexible connector screws (12). Flexible connector 3 (10) and flexible connector 4 (11) are located on the opposite sides of flexible connector 1 (8) and flexible connector 2 (9); then put belt 1 Secure the belt between belt fastener 1 and flexible connector 1 (8) with screws (13), secure belt 2 between belt fastener 2 and flexible connector 2 (9) with screws (13), secure belt 3 between belt fastener 3 and flexible connector 3 (10) with screws (13), secure belt 4 between belt fastener 4 and flexible connector 4 (11) with screws (13); finally, remove the pins (5) connecting the fixing fixture (1) and the labyrinth plate (7).

Images