Gas distribution system for graphite furnace
By designing the gas distribution system of the graphite furnace and adopting active gas distribution piston and intake and exhaust control components, the problem of uneven gas pressure in the graphite furnace is solved, the precise control of nitrogen amount is achieved, and the consistency of product quality and the improvement of sintering efficiency are ensured.
Patent Information
- Application Number
- CN202311537969.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-01-19
- Publication Date
- 2025-10-21
- Estimated Expiration
- 2042-01-19
AI Technical Summary
In the prior art, the air intake and exhaust ducts of the graphite furnace are inconveniently connected to multiple graphite boxes, resulting in air pressure imbalance and difficulty in accurately controlling the amount of nitrogen, which affects the quality of the sintered products.
A gas distribution system for a graphite furnace was designed, including an air intake fan, an exhaust fan, and two reaction units. The gas distribution system has a gas distribution power unit and a linked gas distribution unit. An active gas distribution piston and an intake and exhaust control component are used to ensure uniform gas supply to each reaction unit. The active gas distribution piston and the intake and exhaust control component are used to control the opening and closing of the gas distribution inlet and outlet, thereby achieving precise control of the nitrogen amount.
The nitrogen supply volume of each reaction device is uniform and consistent, which ensures the stability and consistency of product quality and improves the sintering efficiency.
Smart Images
Figure CN117387368B_ABST
Abstract
Description
[0001] This application is a divisional application of the patent application entitled "Graphite furnace for preparing aluminum nitride powder with precise control of nitrogen supply". The application date of the original application is 2022-1-19, and the application number is 202210060870.2. Technical Field
[0002] The invention relates to the technical field of aluminum nitride preparation, in particular to a gas distribution system of a graphite furnace. Background Art
[0003] The reaction sintering furnace is a vacuum resistance furnace that uses graphite as a heating element. It is a sintering furnace for processing aluminum nitride powder. A large graphite box is used to place the workpiece to be sintered. The graphite box is then evacuated and heated to sinter the workpiece. In the prior art, in order to improve temperature uniformity, multiple small graphite boxes are usually set up to improve temperature uniformity. The air intake and exhaust pipes need to be connected to the multiple graphite boxes, which is inconvenient to connect. Moreover, when the air intake and exhaust pipes are working, the air pressure inside each graphite box is unbalanced, and the amount of nitrogen introduced is difficult to control accurately, affecting the quality of the sintered product. Summary of the Invention
[0004] In order to overcome the technical defects of the prior art, the present invention provides a gas distribution system for a graphite furnace, which ensures the same gas supply volume to each reaction device and the same product quality.
[0005] The technical solution adopted by the present invention is:
[0006] The gas distribution system of the graphite furnace includes an air intake fan, an exhaust fan and two reaction devices. The gas distribution system has a gas distribution power part and two linked gas distribution devices. Each of the gas distribution devices includes a gas distribution inlet and a gas distribution outlet. Each of the gas distribution inlets is connected to the air intake fan, and each of the gas distribution outlets is connected to the corresponding reaction device. Each of the reaction devices is connected to the exhaust fan. Each of the gas distribution devices includes a gas distribution box, an active gas distribution piston and an intake and exhaust control component. The gas distribution box has a pressure chamber. The gas distribution power part pushes the active gas distribution pistons on the two adjacent gas distribution devices to slide along the pressure chamber. The intake and exhaust control component includes an intake and exhaust control rod and an intake and exhaust control gear. The intake and exhaust control rod is located in the pressure chamber and the intake and exhaust The air control rod slides along the air distribution air inlet and the air distribution outlet, and the intake and exhaust control gear is transmission-connected with the active air distribution piston, and the intake and exhaust control gear is provided with a lifting thread connected to the threaded pair of the intake and exhaust control rod, and the active air distribution piston is provided with an active air distribution rack meshing with the intake and exhaust control gear, and the intake and exhaust control gear is provided with a limit baffle matched with the active air distribution rack, and the limit baffle limits the axial movement of the intake and exhaust control gear, and the active air distribution piston slides along the air pressure chamber to maximize the volume of the air pressure chamber. The intake and exhaust control rod opens the air distribution air inlet and seals the air distribution outlet, and when the active air distribution piston slides along the air pressure chamber to gradually reduce the volume of the air pressure chamber from the maximum, the intake and exhaust control rod seals the air distribution inlet and opens the air distribution outlet.
[0007] Preferably, a plurality of fillers are provided in the compressed air cavity.
[0008] Preferably, the gas distribution device further comprises a passive gas distribution piston, which slides along the air compression chamber, and is provided with a passive gas distribution rack meshing with the intake and exhaust control gear.
[0009] Preferably, the pneumatic power component is a double-acting cylinder, and the two output ends of the pneumatic power component respectively extend into the compressed air cavity of the corresponding pneumatic box body and are transmission-connected with the corresponding active pneumatic piston.
[0010] Preferably, the intake and exhaust control rod includes a rod body and an intake support rod group, an intake sealing plug, an outlet sealing plug and an outlet support rod group arranged in sequence on the rod body. The intake support rod group slides along the air distribution inlet, and the outlet support rod group slides along the air distribution outlet. The distance between the farthest ends of the intake sealing plug and the outlet sealing plug is greater than the inner diameter of the compressed air chamber.
[0011] Preferably, the air inlet support rod group and the air outlet support rod group each have three support rods distributed at equal angles.
[0012] Preferably, the gas distribution box body is composed of a gas distribution cylinder body and sealing covers for sealing both ends of the gas distribution cylinder body.
[0013] The beneficial effects of the present invention are:
[0014] The gas distribution system has a gas distribution power part and two linked gas distribution devices. Each gas distribution device includes a gas distribution inlet and a gas distribution outlet. Each gas distribution inlet is connected to an air intake fan. The air intake fan blows nitrogen into each gas distribution inlet. Each gas distribution outlet is connected to a corresponding reaction device. The nitrogen blown by the air intake fan enters the corresponding reaction device through the gas distribution outlet. Each reaction device is connected to an exhaust fan to extract the reaction products.
[0015] Each valve distribution device includes a valve distribution box, an active valve distribution piston and an intake and exhaust control assembly. The valve distribution box has a compression chamber. The valve distribution power component pushes the active valve distribution pistons on the two adjacent valve distribution devices to slide along the compression chamber, thereby changing the volume in the compression chamber. The intake and exhaust control assembly is used to control the connection and closing of the valve distribution inlet and valve distribution outlet. The intake and exhaust control assembly is connected to the active valve distribution piston through a transmission, that is, the movement of the active valve distribution piston will drive the movement of the intake and exhaust control assembly.
[0016] When the air compression chamber is intaked, the air intake and exhaust control component opens the air distribution inlet and closes the air distribution outlet synchronously, the air distribution power component drives the active air distribution piston to slide along the air compression chamber to increase the volume of the air compression chamber, and the air intake fan sends nitrogen into the air compression chamber. When the air compression chamber is discharged, the air intake and exhaust control component closes the air distribution inlet and opens the air distribution outlet synchronously, the air distribution power component drives the active air distribution piston to slide along the air compression chamber to reduce the volume of the air compression chamber, and the air intake fan pumps the nitrogen from the air compression chamber out of the air distribution outlet and then into each reaction device.
[0017] The movement of the active valve timing piston drives the intake and exhaust control component, and the intake and exhaust control component controls the opening and closing states of the valve timing inlet and the valve timing outlet as follows: the intake and exhaust control component includes an intake and exhaust control rod and an intake and exhaust control gear. The intake and exhaust control rod is located in the compressed air chamber and the intake and exhaust control rod slides along the valve timing inlet and the valve timing outlet. The intake and exhaust control gear is transmission-connected to the active valve timing piston. The intake and exhaust control gear is provided with a lifting thread connected to the threaded pair of the intake and exhaust control rod. The active valve timing piston is provided with an active valve timing rack meshing with the intake and exhaust control gear. The intake and exhaust control gear is provided with a limit baffle cooperating with the active valve timing rack. The limit baffle limits the axial movement of the intake and exhaust control gear. When the piston moves, the active gas distribution rack drives the intake and exhaust control gear to rotate, and the intake and exhaust control gear and the lifting thread on the intake and exhaust control gear rotate to drive the intake and exhaust control rod to rise and fall. It is worth noting that the gas distribution inlet and gas distribution outlet are provided with long grooves to limit the rotation of the intake and exhaust control rods. The active gas distribution piston slides along the air pressure chamber to make the volume of the air pressure chamber maximum, and the intake and exhaust control rod opens the gas distribution inlet and seals the gas distribution outlet. In the process of the active gas distribution piston sliding along the air pressure chamber to gradually reduce the volume of the air pressure chamber from the maximum, the intake and exhaust control rod seals the gas distribution inlet and opens the gas distribution outlet. The volume of each air pressure chamber is the same, so that the air supply of each air pressure chamber remains equal, ensuring the same air supply for each reaction device and the same product quality. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 This is a schematic diagram of the installation position of the present invention.
[0019] Figure 2 Schematic diagram of the overall structure of the gas distribution system.
[0020] Figure 3 Schematic diagram of the gas distribution device structure.
[0021] Figure 4 Schematic diagram of the active valve rack and intake and exhaust control gear structure.
[0022] Figure 5 Schematic diagram of the intake and exhaust control rod structure.
[0023] Description of reference numerals:
[0024] 1. Intake fan;
[0025] 2. Exhaust fan;
[0026] 3. Gas distribution system; 31. Gas distribution device; 311. Gas distribution inlet; 312. Gas distribution outlet; 313. Gas distribution box; 3131. Gas distribution cylinder; 3132. Sealing cover; 314. Active gas distribution piston; 3141. Active gas distribution rack; 315. Intake and exhaust control assembly; 3151. Intake and exhaust control rod; 31511. Rod body; 31512. Intake support rod assembly; 31513. Intake sealing plug; 31514. Outlet sealing plug; 31515. Outlet support rod assembly; 3152. Intake and exhaust control gear; 31521. Limit baffle; 32. Gas distribution power unit; 33. Compressed air chamber;
[0027] 4. Graphite material box;
[0028] 5. Filling;
[0029] 6. Passive valve piston. DETAILED DESCRIPTION
[0030] The present invention will be further described below in conjunction with the accompanying drawings:
[0031] like Figure 1-5 As shown, this embodiment provides a gas distribution system for a graphite furnace, which includes an air intake fan 1, an exhaust fan 2 and two reaction devices. The gas distribution system 3 has a gas distribution power part 32 and two linked gas distribution devices 31. Each gas distribution device 31 includes a gas distribution inlet 311 and a gas distribution outlet 312. Each gas distribution inlet 311 is connected to the air intake fan 1. The air intake fan 1 blows nitrogen into each gas distribution inlet 311. Each gas distribution outlet 312 is connected to the corresponding reaction device. The nitrogen blown by the air intake fan 1 enters the corresponding reaction device through the gas distribution outlet 312. Each reaction device is connected to the exhaust fan 2, and the reaction product is extracted.
[0032] Each gas distribution device 31 includes a gas distribution box 313, an active gas distribution piston 314 and an intake and exhaust control component 315. The gas distribution box 313 has a compressed air chamber 33. The gas distribution power component 32 pushes the active gas distribution pistons 314 on the two adjacent gas distribution devices 31 to slide along the compressed air chamber 33. The gas distribution power component 32 is a double-acting cylinder. The two output ends of the gas distribution power component 32 respectively extend into the compressed air chamber 33 of the corresponding gas distribution box 313 and are transmission connected to the corresponding active gas distribution piston 314, thereby changing the volume in the compressed air chamber 33. The intake and exhaust control component 315 is used to control the connection and closing of the gas distribution inlet 311 and the gas distribution outlet 312. The intake and exhaust control component 315 is transmission connected to the active gas distribution piston 314, that is, the movement of the active gas distribution piston 314 will drive the intake and exhaust control component 315 to move.
[0033] When the air pressure chamber 33 is intaked, the air intake and exhaust control component 315 opens the air distribution inlet 311 and closes the air distribution outlet 312 synchronously, and the air distribution power component 32 drives the active air distribution piston 314 to slide along the air pressure chamber 33 to thereby increase the volume of the air pressure chamber 33, and the air intake fan 1 delivers nitrogen into the air pressure chamber 33. When the air pressure chamber 33 is exhausting, the air intake and exhaust control component 315 closes the air distribution inlet 311 and opens the air distribution outlet 312 synchronously, and the air distribution power component 32 drives the active air distribution piston 314 to slide along the air pressure chamber 33 to thereby reduce the volume of the air pressure chamber 33, and the air intake fan 1 pumps nitrogen from the air pressure chamber 33 out of the air distribution outlet 312 and then into each reaction device.
[0034] The movement of the active gas distribution piston 314 drives the intake and exhaust control component 315, and the intake and exhaust control component 315 controls the opening and closing of the gas distribution inlet 311 and the gas distribution outlet 312. The method is as follows: the intake and exhaust control component 315 includes an intake and exhaust control rod 3151 and an intake and exhaust control gear 3152. The intake and exhaust control rod 3151 is located in the air pressure chamber 33 and the intake and exhaust control rod 3151 slides along the gas distribution inlet 311 and the gas distribution outlet 312. 3152 is connected to the active valve timing piston 314 in transmission, the intake and exhaust control gear 3152 is provided with a lifting thread connected to the intake and exhaust control rod 3151 thread pair, the active valve timing piston 314 is provided with an active valve timing rack 3141 meshing with the intake and exhaust control gear 3152, the intake and exhaust control gear 3152 is provided with a limit baffle 31521 cooperating with the active valve timing rack 3141, the limit baffle 31521 limits the axial movement of the intake and exhaust control gear 3152, the main When the active gas distribution piston 314 moves, the active gas distribution rack 3141 drives the intake and exhaust control gear 3152 to rotate, and the intake and exhaust control gear 3152 and the lifting screw on the intake and exhaust control gear 3152 rotate to drive the intake and exhaust control rod 3151 to rise and fall. It is worth noting that a long groove (not shown in the figure) is provided on the gas distribution inlet 311 and the gas distribution outlet 312 to limit the rotation of the intake and exhaust control rod 3151. The active gas distribution piston 314 slides along the pressure chamber 33 to make the pressure chamber 33 contain When the volume is at its maximum, the air intake and exhaust control rod 3151 opens the air distribution inlet 311 and seals the air distribution outlet 312. In the process of the active air distribution piston 314 sliding along the compressed air chamber 33 to gradually reduce the volume of the compressed air chamber 33 from the maximum, the air intake and exhaust control rod 3151 seals the air distribution inlet 311 and opens the air distribution outlet 312. The volumes of the compressed air chambers 33 are the same, so that the air supply volume of each compressed air chamber 33 remains equal, ensuring the same air supply volume for each reaction device and the same product quality.
[0035] In order to increase the reaction speed, the reaction device is provided with a plurality of graphite boxes 4, and the plurality of graphite boxes 4 are connected in series through connecting pipes to form a row. The air inlet of each row of graphite boxes 4 is connected to the air distribution outlet 312 of the corresponding air distribution device 31, and the exhaust port of each row of graphite boxes 4 is connected to the exhaust fan 2. Each graphite box can be loaded with reaction raw materials, thereby increasing the reaction speed.
[0036] The gas distribution device 31 also includes a passive gas distribution piston 6. The gas distribution box 313 is composed of a gas distribution cylinder body 3131 and sealing covers 3132 that seal the two ends of the gas distribution cylinder body 3131. The sealing covers 3132 are provided to facilitate the installation of the passive gas distribution piston 6 and the active gas distribution piston 314. The passive gas distribution piston 6 slides along the compressed air chamber 33. The passive gas distribution piston 6 is provided with a passive gas distribution rack that meshes with the intake and exhaust control gear 3152. A number of fillers 5 are provided in the area of the compressed air chamber 33 that the active gas distribution piston 314 cannot reach. Since the passive gas distribution rack and the active gas distribution rack 3141 have a certain length, they prevent the passive gas distribution piston 6 and the active gas distribution piston 314 from approaching each other. When the passive gas distribution piston 6 and the active gas distribution piston 314 approach each other to the closest position, the filler 5 can ensure that the gas in the compressed air chamber 33 is exhausted, thereby ensuring accurate exhaust volume.
[0037] The air intake and exhaust control rod 3151 includes a rod body 31511 and an air intake support rod group 31512, an air intake sealing plug 31513, an air outlet sealing plug 31514 and an air outlet support rod group 31515 arranged in sequence on the rod body 31511. The air intake support rod group 31512 slides along the long groove in the air distribution inlet 311 to prevent axial rotation, and the air outlet support rod group 31515 slides along the air distribution outlet 312. The air intake support rod group 31512 and the air outlet support rod group 31515 each have three support rods distributed at equal angles to ensure the overall stability of the rod body 31511. The distance between the farthest ends of the air intake sealing plug 31513 and the air outlet sealing plug 31514 is greater than the inner diameter of the compressed air chamber 33, so as to avoid the air distribution inlet 311 and the air distribution outlet 312 being connected at the same time to cause inaccurate air supply.
[0038] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which shall fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.
Claims
1. The gas distribution system of the graphite furnace includes an air intake fan, an exhaust fan and two reaction devices, characterized in that: The air distribution system has an air distribution power part and two linked air distribution devices, each of the air distribution devices includes an air distribution inlet and an air distribution outlet, each of the air distribution inlets is connected to the air intake fan, each of the air distribution outlets is connected to the corresponding reaction device, each of the reaction devices is connected to the exhaust fan, each of the air distribution devices includes an air distribution box, an active air distribution piston and an intake and exhaust control component, the air distribution box has an air pressure cavity, the air distribution power part pushes the active air distribution pistons on the two adjacent air distribution devices to slide along the air pressure cavity, the intake and exhaust control component includes an intake and exhaust control rod and an intake and exhaust The control gear, the intake and exhaust control rod is located in the pressure chamber and the intake and exhaust control rod slides along the air distribution inlet and outlet, the intake and exhaust control gear is transmission-connected with the active air distribution piston, the intake and exhaust control gear is provided with a lifting thread connected with the threaded pair of the intake and exhaust control rod, the active air distribution piston is provided with an active air distribution rack meshing with the intake and exhaust control gear, the intake and exhaust control gear is provided with a limit baffle matched with the active air distribution rack, the limit baffle limits the axial movement of the intake and exhaust control gear, the active air distribution piston slides along the pressure chamber so that the pressure chamber volume is maximized when the intake and exhaust control gear is provided with a lifting thread connected with the threaded pair of the intake and exhaust control rod, the active air distribution piston is provided with an active air distribution rack meshing with the intake and exhaust control gear, the intake and exhaust control gear is provided with a limit baffle matched with the active air distribution rack, the limit baffle limits the axial movement of the intake and exhaust control gear, and ... The exhaust control rod opens the air distribution inlet and seals the air distribution outlet. The active air distribution piston slides along the air pressure chamber to gradually reduce the volume of the air pressure chamber from the maximum. The air intake and exhaust control rod seals the air distribution inlet and opens the air distribution outlet. The volume of each air pressure chamber is the same, so that the air supply volume of each air pressure chamber remains equal, ensuring the same air supply volume for each reaction device and the same product quality. The air intake and exhaust control rod includes a rod body and an air intake support rod group, an air intake sealing plug, an air outlet sealing plug and an air outlet support rod group arranged in sequence on the rod body. The air intake support rod group slides along the air distribution inlet. The air outlet support rod group slides along the air distribution outlet, and the distance between the farthest end of the air intake sealing plug and the air outlet sealing plug is greater than the inner diameter of the air pressure chamber. The air intake support rod group and the air outlet support rod group each have three support rods distributed at equal angles. The air distribution device also includes a passive air distribution piston, which slides along the air pressure chamber. The passive air distribution piston is provided with a passive air distribution rack that meshes with the intake and exhaust control gear. The air distribution power component is a double-acting cylinder, and the two output ends of the air distribution power component respectively extend into the air pressure chamber of the corresponding air distribution box body and are transmission-connected to the corresponding active air distribution piston.
2. The gas distribution system of the graphite furnace according to claim 1, characterized in that: A plurality of fillers are arranged in the air compression cavity.
3. The gas distribution system of the graphite furnace according to claim 1, characterized in that: The gas distribution box body is composed of a gas distribution cylinder body and sealing covers for sealing the two ends of the gas distribution cylinder body.
Citation Information
Patent Citations
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