Self-focusing lens array and method for manufacturing the same

Abstract

This invention discloses a self-focusing lens array and its fabrication method, relating to the field of optical element technology. The fabrication method of the self-focusing lens array includes providing a substrate; etching the substrate using photolithography to form a template with multiple through-holes arranged in a tangential manner, with adjacent through-holes tangentially connected; injecting molten glass substrate into the through-holes, completely filling the through-holes; cooling and solidifying the glass substrate, then demolding it from the through-holes to form a glass array; and gradient-forming the refractive index of each glass column in the glass array to form the self-focusing lens array. The self-focusing lens array and its fabrication method provided by this invention can improve the uniformity of the geometric dimensions of each self-focusing lens in a small-size self-focusing lens array, thereby improving the processing yield and accuracy of small-size self-focusing lens arrays.

Description

Technical Field

[0001] This application relates to the field of optical element technology, and more specifically, to a self-focusing lens array and its fabrication method. Background Technology

[0002] Self-focusing lenses, also known as gradient refractive index lenses, are cylindrical optical lenses whose refractive index distribution gradually changes radially. With the miniaturization, weight reduction, and integration of optical components, optical elements have evolved from discrete components to array components. Microlens arrays are a type of integrated optical device. Among them, self-focusing lens arrays, in addition to possessing the collimation, focusing, and imaging functions of ordinary lenses, also have advantages such as simple structure, short conjugate imaging distance, good image quality, high dynamic resolution, small size, and light weight. Therefore, they have important applications in devices such as fax machines, copiers, electronic whiteboards, and document scanning systems.

[0003] With the further development of miniaturization, the feature size of each self-focusing lens in the self-focusing lens array is constantly decreasing. According to industry standards, the radial dimensional error of the self-focusing lens needs to be controlled within 10%. That is, when the diameter of the self-focusing lens is reduced to 100 micrometers, the uniformity of the thickness of the self-focusing lens rod needs to be controlled within ±10 micrometers. However, the existing traditional wire drawing process has encountered technical bottlenecks when the geometric size of the self-focusing lens is less than 125 micrometers, such as the inability to guarantee the uniformity of geometric size and the difficulty in meeting the uniformity of composition. Summary of the Invention

[0004] The purpose of this application is to provide a self-focusing lens array and its fabrication method, which can improve the uniformity of the geometric dimensions of each self-focusing lens in the self-focusing lens array under small size, thereby improving the processing yield and processing accuracy of the self-focusing lens array.

[0005] One embodiment of this application provides a method for fabricating a self-focusing lens array, including providing a substrate; etching the substrate using a photolithography process to form a template with multiple through holes arranged in a row, wherein two adjacent through holes are tangentially connected; injecting molten glass substrate into the through holes, wherein the glass substrate completely fills the through holes; cooling and solidifying the glass substrate and then demolding it from the through holes to form a glass array; and gradient-changing the refractive index of each glass column in the glass array to form a self-focusing lens array.

[0006] As one feasible approach, etching a substrate using photolithography to form a template with multiple through-holes arranged in a row, wherein two adjacent through-holes are tangentially connected, includes: coating a substrate surface with photoresist; covering the photoresist with a mask and irradiating the photoresist with a laser to form a mask pattern; removing the uncured photoresist to expose the substrate surface; etching the substrate from the exposed substrate surface to form through-holes; and removing the cured photoresist to form the template.

[0007] As an implementable method, the refractive index gradient of each glass column in the glass array to form a self-focusing lens array includes: depositing an exchange salt layer on the surface of each glass column in the glass array; and using a thermal diffusion process to allow the glass array to stand at a first preset temperature for a first preset time, so that thermal diffusion occurs between the exchange salt layer and the glass column, thereby achieving the gradient of the glass array.

[0008] As an implementable method, the refractive index gradient of each glass column in the glass array to form a self-focusing lens array includes: heating an exchange furnace containing bath salts to a second preset temperature; placing the glass array in the exchange furnace at the second preset temperature; heating to a third preset temperature at a preset rate and holding for a second preset time to allow ion exchange between each glass column in the glass array and the bath salts, thereby achieving the gradient of the glass array; and removing the gradient-graded glass array.

[0009] As one feasible method, injecting molten glass substrate into a through hole, wherein the glass substrate completely fills the through hole, includes: heating the glass substrate to 700-900°C to reach a molten state; placing a template on a baffle plate, the surface of which is perpendicular to the through hole and blocks one end of the through hole; and injecting the molten glass substrate into the through hole from the other end of the through hole, wherein the injected glass substrate is flush with the surface of the end of the through hole.

[0010] As one feasible approach, the components in the glass substrate are as follows by weight percentage: silicon dioxide 60%-65%; lithium oxide 7%-13%; boron oxide 4%-8%; titanium dioxide 2%-3%; sodium oxide 9%-18%; and zinc oxide 4%-5%.

[0011] As an feasible approach, before forming a self-focusing lens array by gradientting the refractive index of each glass column in the glass array, the fabrication method of the self-focusing lens array further includes: polishing and grinding the two end faces of each glass column in the glass array so that the surface roughness of the glass column is less than 0.5 μm; cleaning the polished glass array; and drying the cleaned glass array.

[0012] As an feasible approach, after providing the substrate, the fabrication method of the self-focusing lens array further includes: cleaning the substrate multiple times with a solvent, wherein the polarity of the solvent used for multiple cleanings increases sequentially according to the cleaning order.

[0013] As an feasible method, the fabrication method of the self-focusing lens array further includes preheating the template to 100-200°C before the glass substrate completely fills the through hole by injecting molten glass substrate into the through hole.

[0014] Another embodiment of this application provides a self-focusing lens array, which is prepared by the above-described method for preparing a self-focusing lens array. It includes a plurality of self-focusing lenses arranged radially, with adjacent self-focusing lenses tangentially connected, and the diameter of the self-focusing lenses is less than 100 μm.

[0015] The beneficial effects of the embodiments of this application include:

[0016] The present invention provides a method for fabricating a self-focusing lens array, comprising: providing a substrate; etching the substrate using photolithography to form a template having multiple through holes arranged in a series, the through holes being mutually tangent; since photolithography is a micro-nano level processing technology, it can fabricate micron-level through holes; injecting molten glass substrate into the through holes, the glass substrate completely filling the through holes; cooling and solidifying the glass substrate and then demolding it from the through holes to form a glass array; wherein, the glass pillars in the glass array match the shape of the through holes, so that the diameter of the glass pillars is also at the micron level, thus making the glass pillars small in size, and since the shape of the glass pillars matches the through holes, the geometric dimensions of the glass pillars are relatively uniform; finally, the refractive index of each glass pillar in the glass array is gradientd to form a self-focusing lens array, making the geometric dimensions of each self-focusing lens in the self-focusing lens array uniform, thereby improving the processing yield and processing accuracy of the self-focusing lens array. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 One of the flowcharts for a method of fabricating a self-focusing lens array provided in this application embodiment;

[0019] Figure 2 A second flowchart illustrating a method for fabricating a self-focusing lens array, provided as an embodiment of this application;

[0020] Figure 3 The third flowchart illustrates a method for fabricating a self-focusing lens array, as provided in this application embodiment.

[0021] Figure 4 The fourth flowchart illustrates a method for fabricating a self-focusing lens array, as provided in this application embodiment.

[0022] Figure 5 A schematic diagram of the structure of a substrate provided in an embodiment of this application;

[0023] Figure 6 A schematic diagram of the structure of a template provided in an embodiment of this application;

[0024] Figure 7 This is a schematic diagram of a self-focusing lens array provided in an embodiment of this application.

[0025] Icons: 100 - Self-focusing lens array; 101 - Self-focusing lens; 110 - Substrate; 120 - Template; 121 - Through hole. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0028] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0029] Furthermore, the terms "first," "second," and "third" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0030] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms “set up,” “connected,” and “linked” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection; those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0031] With the miniaturization and arraying of optical components, the existing wire drawing process can no longer meet the requirements for the fabrication of self-focusing lenses with a diameter of less than 100 μm.

[0032] This invention provides a method for fabricating a self-focusing lens array 100, such as... Figure 1 As shown, it includes:

[0033] S110: As Figure 5As shown, a substrate 110 is provided;

[0034] S120: As Figure 6 As shown, a template 120 with multiple through holes 121 arranged in a photolithography process is formed by etching a substrate 110. Two adjacent through holes 121 are tangentially connected.

[0035] S130: Molten glass substrate is injected into the through hole 121, and the glass substrate completely fills the through hole 121;

[0036] S140: After the glass substrate is cooled and cured, it is demolded through the through hole 121 to form a glass array;

[0037] S150: As Figure 7 As shown, the refractive index of each glass column in the glass array is gradientd to form a self-focusing lens array 100.

[0038] The substrate 110 is made of a high-temperature resistant hard material because molten glass substrate needs to be injected into the through hole 121. The molten glass substrate has a high temperature and is in contact with the material of the side wall of the through hole 121. It cannot be melted by the high-temperature molten glass substrate. Therefore, the substrate 110 needs to be made of a high-temperature resistant material. During the cooling and solidification process of the glass substrate, the side wall of the through hole 121 needs to provide support to form a glass array that matches the shape of the through hole 121. Therefore, a hard material is required.

[0039] The specific arrangement of the multiple through holes 121 is not limited in this invention. Those skilled in the art can set it according to actual needs. It can be arranged in a row and column manner, or it can be arranged in a staggered manner with gaps. The specific structure of the through holes 121 is also not limited in this invention. It can be a cylinder, a square prism, a pentagonal prism, etc.

[0040] The present invention does not limit the method of refractive index gradient for each glass column in the glass array; it can be a process such as thermal diffusion or ion exchange.

[0041] It should be noted that the present invention can be applied not only to the fabrication of a self-focusing lens array 100, but also to the fabrication of a single self-focusing lens 101. When the fabrication method of the self-focusing lens array 100 of the present invention is applied to the fabrication of a single self-focusing lens 101, multiple through holes 121 can be spaced apart from each other to complete the fabrication of multiple self-focusing lenses 101 at one time.

[0042] The method for fabricating a self-focusing lens array 100 provided by the present invention includes providing a substrate 110; etching the substrate 110 using photolithography to form a template 120 having a plurality of through holes 121 arranged thereon, the plurality of through holes 121 being mutually tangent; because photolithography is a micro-nano level processing technology, it can fabricate micron-level through holes 121; injecting molten glass substrate into the through holes 121, the glass substrate completely filling the through holes 121; after cooling and solidifying the glass substrate, demolding it from the through holes 121 to form a glass array; wherein, the glass pillars in the glass array match the shape of the through holes 121, so that the diameter of the glass pillars is also at the micron level, thus making the glass pillars small in size, and because the shape of the glass pillars matches the through holes 121, the geometric dimensions of the glass pillars are relatively uniform; finally, the refractive index of each glass pillar in the glass array is gradientd to form a self-focusing lens array 100, so that the geometric dimensions of each self-focusing lens 101 in the self-focusing lens array 100 are uniform, thereby improving the processing yield and processing accuracy of the self-focusing lens array 100.

[0043] In addition, because two adjacent through holes 121 are tangentially connected, multiple self-focusing lenses 101 in the self-focusing lens array 100 are connected as one unit. Compared with the prior art, where multiple self-focusing lenses 101 are physically fixed, the number of fixing parts is reduced, thereby reducing the number of steps in the fabrication of the self-focusing lens array 100 and reducing the space occupied by the self-focusing lens array 100, thus utilizing the miniaturization of optical elements.

[0044] Optional, such as Figure 2 As shown, a template 120 with a plurality of through holes 121 arranged in a photolithography process is formed by etching a substrate 110. The tangential connection between two adjacent through holes 121 includes:

[0045] S121: Coat the surface of substrate 110 with photoresist;

[0046] S122: A photoresist is covered with a mask and a pattern is formed on the photoresist by laser irradiation; wherein the mask is cross-sectionally matched with the self-focusing lens array 100.

[0047] S123: Remove uncured photoresist to expose the surface of substrate 110;

[0048] S124: Starting from the exposed surface of the substrate 110, the substrate 110 is etched to form a through hole 121;

[0049] S125: Remove the cured photoresist to form template 120.

[0050] It should be noted that this invention does not limit the specific implementation of the photolithography process; the photoresist can be either positive or negative. When etching the substrate 110 to form the via 121, either physical etching or chemical etching can be used.

[0051] In one possible implementation of this invention, such as Figure 3 As shown, the refractive index gradient of each glass pillar in the glass array to form a self-focusing lens array 100 includes:

[0052] S151: Coat the surface of each glass column in the glass array with an exchange salt layer;

[0053] S152: A thermal diffusion process is used to allow the glass array to stand for a first preset time at a first preset temperature environment, so as to allow thermal diffusion between the exchange salt layer and the glass column, thereby achieving the gradient of the glass array.

[0054] The exchange salt layer uses monovalent ions different from those in the glass substrate. When an exchange salt layer is deposited on the surface of the glass column, the concentration of exchange salt ions on the surface of the glass column is relatively high. The first preset temperature is a relatively high temperature, for example, 500 degrees Celsius. Due to the high concentration of exchange salt ions, while there are no exchange salt ions inside the glass column, a concentration difference of exchange salt ions is formed between the inside and surface of the glass column. In a high-temperature environment, according to the thermal diffusion theory, exchange salt ions diffuse from the surface to the inside of the glass column. A concentration difference also exists between the monovalent ions inside and on the surface of the glass column. According to the thermal diffusion theory, the monovalent ions inside the glass column diffuse to the surface of the glass substrate, thereby replacing the monovalent ions inside the glass column with exchange salt ions. This results in a regular distribution of monovalent ions within the glass column, and consequently, the refractive index of the glass column exhibits radial characteristics typical of cylindrical materials. distributed.

[0055] The method of coating the exchange salt is not limited in this invention. It can be magnetron sputtering, vapor deposition, or other methods, as long as the exchange salt can be uniformly coated on the surface of the glass column. The specific material of the exchange salt is also not limited in this invention. It can be potassium oxide, sodium oxide, etc., as long as it can diffuse into the glass column to replace the monovalent cations in the glass substrate.

[0056] Optional, such as Figure 4 As shown, the refractive index gradient of each glass pillar in the glass array to form a self-focusing lens array 100 includes:

[0057] S151': Heat the exchange furnace containing bath salts to a second preset temperature; place the glass array in the exchange furnace at the second preset temperature;

[0058] S152': Heat to a third preset temperature at a preset rate and hold for a second preset time to allow ion exchange between each glass column in the glass array and the bath salt, thereby achieving gradient of the glass array;

[0059] S153': Remove the glass array that has been gradient-processed.

[0060] Ion exchange utilizes the characteristics of the relatively weak chemical bonds, low migration activation energy, and free movement of monovalent metal ions (modifying oxides) in the interstices of the basic framework of the self-focusing lens array 100 glass pillars. These ions can exchange with monovalent metal ions in the bath salts, resulting in a regular distribution of the modifying oxide components within the glass pillars. Consequently, the refractive index of the glass pillars exhibits radial characteristics typical of cylindrical materials. Distribution. The specific materials used for the bath salts are not limited in this invention, as long as they contain monovalent metal ions; examples include potassium oxide, sodium oxide, etc.

[0061] The second preset temperature is lower than the glass transition temperature of the glass array, for example, between 350-490℃. The preset heating rate is a relatively fast heating rate, for example, 100-200℃ per hour. The third preset temperature is higher than the softening point of the glass array, for example, between 550℃-570℃. The second preset time is 50-80 hours. The glass material is placed in a bath salt at a temperature lower than the glass transition temperature, and then heated at a relatively fast heating rate to a higher temperature above the softening point to soften the glass array, thereby shortening the duration of the low-temperature section. Ion exchange is then carried out at a constant high temperature, which can shorten the ion exchange process time, improve production efficiency, and reduce energy consumption.

[0062] In one possible implementation of this invention, molten glass substrate is injected into the through-hole 121, and the glass substrate completely fills the through-hole 121, including:

[0063] S131: Heat the glass substrate to 700-900℃ to reach a molten state;

[0064] S132: Place template 120 on baffle, with the surface of baffle perpendicular to through hole 121 and block one end of through hole 121;

[0065] S133: Molten glass substrate is injected into the through hole 121 from the other end of the through hole 121, and the injected glass substrate is flush with the port surface of the through hole 121.

[0066] By using a baffle to block one end of the through hole 121, and injecting the molten glass substrate into the through hole 121 from the other end, the flatness of the rear end face of the molten glass substrate injected into the through hole 121 can be improved.

[0067] Optionally, the components in the glass substrate, by weight percentage, are: 60%-65% silicon dioxide; 7%-13% lithium oxide; 4%-8% boron oxide; 2%-3% titanium dioxide; 9%-18% sodium oxide; and 4%-5% zinc oxide.

[0068] In one possible embodiment of the present invention, before the refractive index of each glass pillar in the glass array is gradientd to form the self-focusing lens array 100, the method for fabricating the self-focusing lens array 100 further includes:

[0069] S161: Polish and grind the two end faces of each glass pillar in the glass array so that the surface roughness of the glass pillar is less than 0.5um;

[0070] S162: Clean the polished glass array;

[0071] S163: Air dry the cleaned glass array.

[0072] When the molten glass substrate completely fills the through hole 121, due to the surface tension of the molten glass substrate, after cooling and solidification to form a glass array, there is unevenness at the injection end of the glass array and at the end in contact with the baffle, which affects the effect of subsequent refractive index gradient. In order to avoid the unevenness of the two end faces of the glass column affecting the effect of refractive index gradient, the two end faces of the glass column are polished before the glass column is gradientd, so that the roughness of the two end faces of the glass column is less than 0.5um, thereby improving the flatness of the two end faces of the glass column.

[0073] In addition, fine particles may adhere to the surface of the glass column during polishing and grinding, affecting the gradient effect. On the other hand, dirt may also adhere to the surface of the glass column during the transportation and production of the glass array, affecting the gradient effect. Therefore, the glass column needs to be cleaned before gradient treatment.

[0074] Optionally, after providing the substrate 110, the method for fabricating the self-focusing lens array 100 further includes:

[0075] S111: The substrate 110 is cleaned multiple times with a solvent, wherein the polarity of the solvent increases sequentially with the cleaning order.

[0076] During the manufacturing process, it is unavoidable that oil and other contaminants will remain on the surface of substrate 110. The presence of oil and other contaminants can lead to uneven photoresist coating and affect the photolithography effect. To remove the oil, substrate 110 needs to be cleaned. Since oil has low polarity, according to the principle of like dissolves like, a solvent with low polarity is required for cleaning. Therefore, this embodiment of the invention employs multiple cleaning processes, with the polarity of the solvents increasing sequentially according to the cleaning order. For example, three cleaning processes are used: acetone, anhydrous ethanol, and deionized water. Acetone is an organic compound, and since oil is also an organic compound, acetone can effectively dissolve the oil and remove it from substrate 110. Similarly, anhydrous ethanol can remove acetone from substrate 110, and deionized water can remove acetone from substrate 110, thereby cleaning substrate 110.

[0077] In one possible embodiment of the present invention, before the glass substrate completely fills the through hole 121, the method for preparing the self-focusing lens array 100 further includes: preheating the template 120 to 100-200°C.

[0078] The temperature of the molten glass substrate is as high as 700-900℃. When the molten glass substrate is injected into the through hole 121 at room temperature, the temperature difference between the molten glass substrate and the side wall of the through hole 121 is too large, which may cause sudden solidification and blockage of the port. As a result, the molten glass substrate cannot completely fill the through hole 121. Therefore, before injecting the molten glass substrate into the through hole 121, the template 120 is heated to 100-200℃, which can reduce the temperature difference between the molten glass substrate and the template 120 and avoid the above situation.

[0079] Another aspect of the present invention provides a self-focusing lens array 100, which is fabricated using the above-described method for fabricating the self-focusing lens array 100. It includes a plurality of self-focusing lenses 101 arranged radially, with adjacent self-focusing lenses 101 being tangentially connected. The diameter of the self-focusing lens 101 is less than 100 μm.

[0080] The self-focusing lens array 100 provided in this embodiment of the invention can improve the uniformity of the geometric dimensions of each self-focusing lens 101 in the self-focusing lens array 100 with a small size (diameter less than 100um). Moreover, the two adjacent self-focusing lenses 101 are tangentially connected, which does not require additional fixing parts and also reduces the space occupied by the self-focusing lens array 100, thus utilizing the miniaturization of optical elements.

[0081] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A method for fabricating a self-focusing lens array, characterized in that, include: Provide substrate; The substrate is etched using photolithography to form a template with multiple through holes arranged in a row, and two adjacent through holes are tangentially connected. Molten glass substrate is injected into the through hole, and the glass substrate completely fills the through hole; After the glass substrate is cooled and cured, it is demolded through the through holes to form a glass array; The refractive index of each glass column in the glass array is gradient-graded to form a self-focusing lens array.

2. The method for fabricating a self-focusing lens array according to claim 1, characterized in that, The step of etching the substrate using photolithography to form a template with multiple through holes arranged in a row, wherein the tangential connection between two adjacent through holes includes: Photoresist is coated onto the surface of the substrate; The photoresist is covered with a mask and the pattern of the mask is formed by irradiating the photoresist with a laser. Remove the uncured photoresist to expose the substrate surface; The substrate is etched from the exposed surface of the substrate to form through holes; Remove the cured photoresist to form a template.

3. The method for fabricating a self-focusing lens array according to claim 1, characterized in that, The refractive index gradient of each glass pillar in the glass array to form a self-focusing lens array includes: A salt exchange layer is deposited on the surface of the glass array; A thermal diffusion process is used to allow the salt exchange layer to stand at a first preset temperature for a first preset time, so that thermal diffusion can occur between the salt exchange layer and the glass column, thereby achieving gradient processing.

4. The method for fabricating a self-focusing lens array according to claim 1, characterized in that, The refractive index gradient of each glass pillar in the glass array to form a self-focusing lens array includes: The exchange furnace containing bath salts is heated to the second preset temperature; The glass array is placed in an exchange furnace at a second preset temperature; The temperature is increased to a third preset temperature at a preset rate and held for a second preset time to allow ion exchange between each glass column in the glass array and the bath salt, thus gradienting the glass array. Remove the gradient-processed glass array.

5. The method for fabricating a self-focusing lens array according to claim 1, characterized in that, The step of injecting molten glass substrate into the through hole, wherein the glass substrate completely fills the through hole, includes: The glass substrate is heated to 700-900℃ to reach a molten state; The template is placed on the baffle, with the surface of the baffle perpendicular to the through hole to block one end of the through hole; Molten glass substrate is injected into the through hole from the other end of the through hole, and the injected glass substrate is flush with the port surface of the through hole.

6. The method for fabricating a self-focusing lens array according to claim 5, characterized in that, The components of the glass substrate, by weight percentage, are: silicon dioxide 60%-65%; lithium oxide 7%-13%; boron oxide 4%-8%; titanium dioxide 2%-3%; sodium oxide 9%-18%; and zinc oxide 4%-5%.

7. The method for fabricating a self-focusing lens array according to claim 1, characterized in that, Before the refractive index gradient of each glass pillar in the glass array is performed to form a self-focusing lens array, the method further includes: The two end faces of each glass pillar in the glass array are polished and ground to make the roughness of the end face of the glass pillar less than 0.5 μm; Clean the polished glass array; Air dry the cleaned glass array.

8. The method for fabricating a self-focusing lens array according to claim 1, characterized in that, After providing the substrate, the method further includes: The substrate is cleaned multiple times with a solvent, wherein the polarity of the solvent increases sequentially with the cleaning order.

9. The method for fabricating a self-focusing lens array according to claim 1, characterized in that, Before the molten glass substrate is injected into the through-hole and the glass substrate completely fills the through-hole, the method further includes: The template is preheated to 100-200℃.

10. A self-focusing lens array, characterized in that, The array is prepared by the method of any one of claims 1-9, comprising a plurality of self-focusing lenses arranged radially, with adjacent self-focusing lenses tangentially connected, and the diameter of the self-focusing lens is less than 100 μm.

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