Large-size graphene film preparation device and preparation method

Abstract

The present application relates to the technical field of graphene film preparation, and discloses a large-size graphene film preparation device and a preparation method, which comprise a reference shaft, a plurality of support connecting parts are detachably connected to the outer wall of the reference shaft, all the support connecting parts are divided into a plurality of support groups, the plurality of support connecting parts in each support group are arranged along the circumference of the reference shaft, the plurality of support groups are arranged along the radial direction of the reference shaft in sequence, the support connecting parts between adjacent support groups are one-to-one corresponding and detachably connected, and the plurality of support connecting parts in the same support group enclose a circumferential support space for supporting a metal substrate along the circumferential direction of the reference shaft. The present application solves the problem that the existing technology cannot simultaneously consider the convenience of disassembly and assembly and the forming efficiency when preparing a large-size graphene film.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of graphene film preparation, and particularly relates to a large-size graphene film preparation device and a preparation method. BACKGROUND

[0002] Graphene is a two-dimensional crystal with a honeycomb structure formed by a single layer of carbon atoms arranged closely together. Graphene has excellent optical, electrical and mechanical properties and has important application prospects in material science, micro-nano processing, energy, biomedicine and drug delivery, and is considered a revolutionary material for the future. At present, the main method for producing graphene films is vapor deposition (i.e., CVD method). In the preparation process, a metal substrate such as copper or silicon carbide is placed in a high-temperature environment, and carbon source gas is decomposed by chemical reaction to grow graphene on the metal substrate. The distribution of crystal domains and grain boundaries in graphene is one of the key factors affecting the performance of graphene films, so expanding the size of the crystal domain is one of the effective means to reduce grain boundaries and improve the performance of graphene films.

[0003] At present, in order to effectively and conveniently prepare large-area graphene films, various improvements have been made to the preparation equipment in the prior art. For example, the invention patent with publication number CN104480451A discloses a device for growing large-area graphene. The gas passage is set as a spiral columnar structure, and then the metal substrate is spirally wound along the inner surface of the gas passage, so that the metal substrate matches the spiral shape of the gas passage. When preparing the graphene film, the carbon source gas is blown from the gas outlet hole arranged on the inner surface of the gas passage to the metal substrate, thereby growing a large-area graphene film. Although this device can grow a large-area graphene film, it still has problems such as difficulty in installing and winding the metal substrate, wrinkles on the metal substrate, and difficulty in taking out the graphene film due to the small space. In order to overcome the above problems, the invention patent with publication number CN115215331A discloses a graphene film preparation device with large crystal domain size, which comprises a growth furnace, a substrate fixing component and a driving component, etc. Two groups of mandrels are arranged in the substrate fixing component, and pressing tablets for fixing the metal substrate are arranged on the mandrels. When in use, the two ends of the substrate are fixed on the two pressing tablets of the two groups of mandrels, respectively, and then the mandrels are rotated to make the metal substrate in a taut state, and finally the graphene film is prepared.

[0004] The above patent can also prepare a large crystal domain size graphene film, but in the actual preparation process, on the one hand, two groups of mandrels need to be arranged in the growth furnace, and the metal substrate is tightly arranged between the two groups of mandrels. The two groups of mandrels occupy a large space, which not only increases the cost of the preparation device, but also reduces the preparation space of the graphene film due to the large space occupied by the two groups of mandrels, and the efficiency of the graphene film preparation is relatively low. On the other hand, when the device of the above patent is used to fix the metal substrate, only one metal substrate can be tightly arranged on one side of the two groups of mandrels, and the remaining space is wasted, which further wastes space and reduces the efficiency of the graphene film preparation. It can be seen that the existing preparation device cannot simultaneously consider the convenience of disassembly and the high efficiency of forming during the preparation of large-size graphene film. SUMMARY

[0005] The present application aims to provide a large-size graphene film preparation device and a preparation method to solve the problem that the existing technology cannot simultaneously consider the convenience of disassembly and the high efficiency of forming during the preparation of large-size graphene film.

[0006] To solve the problems in the prior art, the present application adopts the following technical scheme: a large-size graphene film preparation device, comprising a reference shaft, a plurality of support connecting parts are detachably connected to the outer wall of the reference shaft, all the support connecting parts are divided into a plurality of support groups, the plurality of support connecting parts in each support group are arranged along the circumferential direction of the reference shaft, the plurality of support groups are arranged along the radial direction of the reference shaft in sequence, the support connecting parts between adjacent support groups are one-to-one corresponding and detachably connected, and the plurality of support connecting parts in the same support group enclose a circumferential support space for supporting the metal substrate along the circumferential direction of the reference shaft.

[0007] The principle of the present application is that the support connecting part can be connected to the reference shaft or connected to other support connecting parts. Therefore, when it is necessary to install and fix the metal substrate, the support connecting part is first connected to the outer side of the reference shaft, and then the metal substrate is wound through the support connecting part. The support connecting part plays a supporting role for the metal substrate. When all the support connecting parts in a group of support groups are connected, the plurality of support connecting parts in the same group of support groups enclose a circumferential support space along the circumferential direction of the reference shaft, so that the metal substrate is stably supported by the plurality of support connecting parts in the same group of support groups. When a group of support groups is connected, the plurality of support connecting parts in the next group of support groups are connected to the support connecting parts that have been connected to the reference shaft, so that the metal substrate is wound onto the circumferential support space enclosed by the next group of support groups. The metal substrate in the adjacent two circumferential support spaces will not be adhered together. After the metal substrate of a predetermined length is fixed, the fixing of the metal substrate is completed. Then, the metal substrate is placed in the growth furnace to grow graphene, and the graphene film is obtained.

[0008] The beneficial effects of the present scheme are:

[0009] 1. The formed large-area graphene film can be conveniently prepared: compared with the complex structure for fixing the metal substrate in the prior art, the installation of the metal substrate is very inconvenient. In the present application, the support connecting parts in each support group are connected in sequence, and the metal substrate is gradually installed during the connection process. The entire installation process is relatively simple and convenient, and the metal substrate can be stably installed and fixed.

[0010] 2. The graphene film can be more efficiently prepared: compared with the complex structure of the fixing device for fixing the metal substrate in the prior art, and the fixing device occupies a large space, so that the size of the metal substrate that can be fixed for growing graphene is limited, which affects the preparation efficiency of the graphene film. In the present application, the metal substrate is annular and is wound along the outer circumference of the reference axis. There is a gap between adjacent circumferences due to the presence of the support connecting part. The metal substrate of appropriate length can be fixed according to actual needs. The length of the metal substrate is not limited, and a large-size metal substrate can be conveniently fixed to prepare a large-size graphene film. Moreover, the metal substrate is wound around the outer circumference of the reference axis, and only one reference axis is used to complete the installation of the metal substrate, effectively simplifying the structure of the entire device, thereby leaving more space for installing the metal substrate. More metal substrates can be placed at one time to prepare a larger-area graphene film, and more efficient preparation of large-size graphene films is achieved.

[0011] 3. Easy to disassemble and assemble: in the present application, since the support connecting parts are detachably connected to the reference axis, and the support connecting parts are also detachably connected, the metal substrate can be easily disassembled and assembled from the reference axis after the installation and fixation of the metal substrate and the growth of graphene on the metal substrate. The operation is very convenient.

[0012] Preferably, as an improvement, the support connecting part comprises a support seat and a support column fixedly connected to both ends of the support seat, and the support column is connected with a detachable connecting part detachably connected with the reference axis or the support column in the adjacent support group.

[0013] In the present scheme, the support seat is used to provide support for the metal substrate, and the support column is connected with a detachable connecting part. The support column is connected with the reference axis or other support columns by using the detachable connecting part, so that the support column and the reference axis or the adjacent support column can be easily disassembled and assembled, thereby quickly and stably completing the installation of the metal substrate.

[0014] Preferably, as an improvement, the detachable connecting part comprises a connecting column fixedly connected to the supporting column, the connecting column is provided with a deformation hole, a connecting groove in communication with the deformation hole is formed in the sidewall of the connecting column, an elastic sheet is fixedly connected in the connecting groove, one end of the elastic sheet is fixedly connected to the inner wall of the connecting groove and the other end is suspended, a clamping protrusion protruding out of the outer wall of the connecting column is arranged on the outer wall of the elastic sheet, the reference shaft is provided with a mounting hole matched with the connecting column and clamped with the clamping protrusion, and the supporting column is provided with a connecting hole matched with the connecting column and clamped with the clamping protrusion.

[0015] In the scheme, when the supporting column needs to be connected with the reference shaft or other supporting columns, the connecting column is only needed to be inserted into the mounting hole or the connecting hole, in the process of insertion, the clamping protrusion of the elastic sheet on the outer wall of the connecting column is pressed and elastically deformed into the connecting groove, and when the connecting column is inserted into the mounting hole or the connecting hole, the clamping protrusion is automatically clamped with the mounting hole or the connecting hole, so that the supporting column is connected with the reference shaft or the adjacent supporting column; when the supporting column needs to be disassembled, the supporting column is only needed to be pulled outward, so that the clamping protrusion is pressed and deformed and pressed into the connecting groove, at this time, the connecting column can be conveniently pulled out, disassembly is realized, and therefore the disassembly process of the supporting column is very convenient.

[0016] Preferably, as an improvement, the top surface of the supporting seat is provided with a matching groove matched with the metal base, and the two sides of the matching groove are provided with round corners.

[0017] In the scheme, the metal base is limited by the matching groove, so that the metal base can stably and accurately contact with the supporting seat, and the supporting seat can stably support the metal base; meanwhile, the round corners are arranged on the two sides of the matching groove, the metal base contacts with the arc of the round corners, the edges on the two sides of the matching groove are avoided, and the metal base is protected.

[0018] Preferably, as an improvement, the number of the supporting connecting parts in the same supporting group is 6-12, and the number of the supporting groups is 3-5.

[0019] In the scheme, the number of the supporting connecting parts in the same supporting group is 6-12, and all the supporting connecting parts are uniformly arranged along the circumference of the reference shaft, so that the metal base can be supported by at least 6 supporting connecting parts when the metal base surrounds the reference shaft for one circle, and the metal base in one circumferential supporting space forms a regular hexagonal structure and is stably supported; meanwhile, the number of the supporting groups is 3-5, the number of the supporting connecting parts connected with each other along the radial direction of the reference shaft is 3-5 under the condition of ensuring that the metal base with a proper length can be installed and fixed, the number of the supporting connecting parts is moderate, and the situation of unstable connection caused by too many supporting connecting parts which can be detachably connected with each other is avoided.

[0020] Preferably, as an improvement, the reference shaft is provided with a gas supply groove, and the mounting hole is in communication with the gas supply groove; the bottom surface of the support base is provided with a plurality of exhaust holes in communication with each other, and the connecting hole is in communication with the adapter hole.

[0021] In this scheme, by introducing a carbon source gas for growing graphene on the metal substrate into the gas supply groove, the carbon source gas can enter the exhaust hole through the mounting hole and the adapter hole from the gas supply groove, and finally be blown to the metal substrate between the two adjacent circumferential support spaces through the exhaust hole, facilitating the metal substrate to quickly and fully contact with the carbon source gas, thereby efficiently growing graphene on the metal substrate.

[0022] Preferably, as an improvement, the outer wall of the reference shaft is fixedly connected with a plurality of fan-shaped end plates, and the plurality of fan-shaped end plates are located in the same plane along the circumferential direction of the reference shaft, and the adjacent fan-shaped end plates form a limiting space for limiting the installation of the support connecting part.

[0023] In this scheme, the space between the adjacent fan-shaped end plates plays an auxiliary supporting and guiding role for the support columns at both ends of the support base, which not only facilitates the quick and accurate installation of the support connecting part, but also limits the support connecting part after installation, so that all the support connecting parts can better support and limit the metal substrate, ensuring that the metal substrate can more stably prepare the graphene film.

[0024] Preferably, as an improvement, the side of the fan-shaped end plate facing the limiting space is provided with a guide groove arranged along the radial direction of the reference shaft.

[0025] In this scheme, by arranging the guide groove on the side of the fan-shaped end plate facing the limiting space, when the support connecting part is installed and connected, the support columns at both ends of the support base can slide downward along the guide groove to be connected with the reference shaft or the already connected support connecting part, further improving the precision and convenience of the connection of the support connecting part.

[0026] Preferably, as an improvement, the reference shaft is provided with a mounting groove matched with the end of the metal substrate, and a pressing plate is detachably connected in the mounting groove.

[0027] In this scheme, before installing the metal substrate, the first end of the metal substrate is inserted into the mounting groove, and then the pressing plate is fixed in the mounting groove, so that the end of the metal substrate can be fixed by the pressing plate, which is simple in structure and convenient to fix.

[0028] The method for preparing a large-size graphene film uses the large-size graphene film preparation device to prepare a large-size graphene film, and the preparation steps are as follows:

[0029] Step 1: Install the metal base. First, fix the end of the metal base in the mounting groove. Then, gradually connect the support connection to the reference shaft. While connecting the support connection, rotate the reference shaft so that the metal base passes around the support connection that has already been installed on the reference shaft. After all the support connections in a support group are connected, connect the support connections in the next support group to the support connection that has already been connected to the reference shaft. Install and connect all the support connections in sequence until all support groups are connected and the metal base is sequentially connected around the circumferential support space formed by multiple support groups. Then, fix the tail end of the metal base to the last support connection to complete the installation of the metal base.

[0030] Step 2: Grow graphene film. Transfer the metal substrate installed in Step 1 to the growth furnace so that graphene can grow on the metal substrate.

[0031] In this scheme, a large-size graphene film preparation device can be used to quickly and conveniently install and fix large-size metal substrates, thereby efficiently and conveniently preparing large-size graphene films. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of Embodiment 1 of the present invention.

[0033] Figure 2 This is a schematic diagram of the metal substrate hidden in Embodiment 1 of the present invention.

[0034] Figure 3 for Figure 2 Sectional view along the middle AA.

[0035] Figure 4 for Figure 2 A cross-sectional view along the middle BB.

[0036] Figure 5 This is a partial schematic diagram of the support connection portion in Embodiment 1 of the present invention.

[0037] Figure 6 for Figure 5 A cross-sectional view along the central axis of the support column.

[0038] Figure 7 This is a schematic diagram of Embodiment 2 of the present invention.

[0039] Figure 8 This is a schematic diagram of the fan-shaped end plate in Embodiment 2 of the present invention. Detailed Implementation

[0040] The following detailed description illustrates the specific implementation method:

[0041] The reference numerals in the accompanying drawings include: reference shaft 1, mounting hole 101, air supply groove 102, metal base 2, support seat 3, mating groove 301, fillet 302, exhaust hole 303, transition hole 304, support column 4, connecting hole 401, connecting column 5, deformation hole 501, connecting groove 502, elastic sheet 6, locking protrusion 601, metal plug 7, pressure plate 8, fan-shaped end 9, guide groove 901.

[0042] Example 1

[0043] This embodiment is as shown in the attached figure. Figure 1 As shown: A large-size graphene film fabrication apparatus includes a reference shaft 1. Multiple support connections are detachably connected to the outer wall of the reference shaft 1. All support connections are divided into multiple support groups, combined with... Figure 2 The number of support groups is 3-5 groups, and the number of support connections in each support group is 6-12. In this embodiment, the number of support groups is preferably 3 groups, and the number of support connections in each support group is 8. The 8 support connections in the same support group are evenly arranged along the circumference of the reference axis 1, and the 3 support groups are equally spaced along the radial direction of the reference axis 1. The support connections between adjacent support groups correspond one-to-one and are detachably connected. The 8 support connections in the same support group form a circumferential support space for supporting the metal substrate 2 along the circumferential direction of the reference axis 1.

[0044] Combination Figure 2 and Figure 5 In this embodiment, the support connection includes a support base 3 and support columns 4 fixedly connected to both ends of the support base 3 by screws. A detachable connection is connected to the support column 4, allowing for detachable connection with the reference shaft 1 or other support columns 4 in the support connection. Specifically, the detachable connection is a connecting column 5 integrally formed on the support column 4 at the end furthest from the support base 3, combined with... Figure 3 and Figure 6The bottom end of the connecting column 5 is provided with an upwardly arranged deformation hole 501, and a connecting groove 502 communicating with the deformation hole 501 is arranged on the sidewall of the connecting column 5. The elastic sheet 6 is fixedly connected in the connecting groove 502, the top end of the elastic sheet 6 is welded to the inner wall of the connecting groove 502, the outer wall of the elastic sheet 6 is integrally formed with a clamping protrusion 601 curved to the outside of the elastic sheet 6, and when the elastic sheet 6 is not subjected to external force, the clamping protrusion 601 protrudes out of the outer wall of the connecting column 5. When the clamping protrusion 601 is subjected to external force, the elastic sheet 6 will be elastically deformed to make the clamping protrusion 601 be pressed into the connecting groove 502. Correspondingly, the reference shaft 1 is provided with a mounting hole 101 matched with the connecting column 5 and capable of being clamped with the clamping protrusion 601, and the top of the supporting column 4 is provided with a connecting hole 401 matched with the connecting column 5 and capable of being clamped with the clamping protrusion 601. Meanwhile, in order to improve the stability of the connection between the connecting column 5 and the reference shaft 1 or the supporting column 4, the number of elastic sheets 6 is four in the embodiment, and the four elastic sheets 6 are uniformly arranged along the circumference of the connecting column 5.

[0045] In combination with Figure 3 , Figure 4 and Figure 5 , the top surface of the supporting seat 3 is provided with a matching groove 301 with a width equal to the width of the metal substrate 2, and a round corner 302 is arranged on each of the two sidewalls of the matching groove 301 along the length direction of the supporting seat 3, so that the two sides of the matching groove 301 are in a circular arc shape, so that the metal substrate 2 will not be scratched when passing through the matching groove 301 on the supporting seat 3.

[0046] As shown in Figure 4 , the reference shaft 1 is provided with a gas supply groove 102 along the axial direction, the mounting hole 101 arranged on the outer wall of the reference shaft 1 is in communication with the gas supply groove 102, and the side of the supporting seat 3 facing the inside of the reference shaft 1 is provided with a plurality of exhaust holes 303 in communication with each other, and the plurality of exhaust holes 303 are arranged at equal distances along the length direction of the supporting seat 3. In combination with Figure 6 , the exhaust hole 303 and the connecting hole 401 on the supporting column 4 are in communication with an adapter hole 304, so that the gas in the gas supply groove 102 can flow through the mounting hole 101, the connecting hole 401 and the adapter hole 304 in sequence to the exhaust hole 303, and then be blown to the metal substrate 2 by the exhaust hole 303. Meanwhile, in order to avoid the carbon source gas flowing out of the connecting hole 401 at the top of the outermost supporting column 4 and causing the carbon source gas to be unable to efficiently enter the adapter hole 304, a metal plug 7 is clamped in the connecting hole 401 at the top of the outermost supporting column 4 in the embodiment.

[0047] In combination with Figure 1 and Figure 4The outer wall of the reference shaft 1 is provided with a mounting groove matched with the end of the metal base 2, the mounting groove is arranged along the length direction of the reference shaft 1, the length of the mounting groove is equal to the width of the metal base 2, and the pressing plate 8 is detachably connected in the mounting groove, the length of the pressing plate 8 is equal to the length of the mounting groove, and the pressing plate 8 is detachably connected with the reference shaft 1 in a screwing or clamping mode; meanwhile, in order to facilitate the fixation of the tail end of the metal base 2 on the support seat 3, a pressing and fixing structure similar to the pressing plate 8 can be arranged on the support seat 3, which will not be described herein.

[0048] The large-size graphene film is prepared by using the large-size graphene film preparation device, and the preparation steps are as follows:

[0049] In the process of installing the metal base 2, the reference shaft 1 needs to be rotated, so the reference shaft 1 can be first installed on the rotating frame in the prior art, and the reference shaft 1 is driven to rotate by using a motor or the like; meanwhile, before driving the reference shaft 1 to rotate, the head end of the metal base 2 is placed in the mounting groove, and then the pressing plate 8 is fixed in the mounting groove, and the head end of the metal base 2 is pressed and fixed in the mounting groove by using the pressing plate 8.

[0050] Then the support connecting parts in the first group of support groups are connected to the reference shaft 1 in sequence, specifically, the support columns 4 at both ends of the support seat 3 are inserted into the mounting holes 101, the clamping convexes 601 on the bottom ends of the support columns 4 are inserted into the mounting holes 101 to form a clamping relationship with the mounting holes 101, so that the entire support connecting part is installed on the outer wall of the reference shaft 1, when one support connecting part is installed, the reference shaft 1 is rotated, and the next support connecting part is installed on the outer wall of the reference shaft 1, and in the process of rotating the reference shaft 1, the metal base 2 passes through the first support connecting part, and the metal base 2 falls into the matching groove 301 on the support seat 3, the support seat 3 supports the metal base 2, and the matching groove 301 limits the metal base 2, so that the metal base 2 can stably and accurately pass through the support connecting part. When all the support connecting parts in the same group of support groups are connected, all the support connecting parts in the first group of support groups enclose a circumferential support space for supporting the metal base 2, at this time, the metal base 2 passes through a circle along the outer wall of the reference shaft 1.

[0051] Then, all the support connections in the second support group are connected to the support connections in the first support group in sequence. The connection sequence is the same as that of the support connections in the first support group. The metal base 2 is then surrounded by the circular support space formed by the first support group and passes through the support connections in the second support group. When all the support connections in the second support group are connected, the metal base 2 surrounds the reference axis 1 twice along the outside of the reference axis 1. Since the support column 4 has a certain height, there is a certain gap between the two metal bases 2, which can prevent the two metal bases 2 from sticking together.

[0052] After all the support connections in the second support group are connected, all the support connections in the third support group are connected to all the support connections in the second support group in sequence. During this process, the reference axis 1 is rotated continuously so that the metal base 2 is wrapped around the circumferential support space formed by the third support group. Finally, the tail end of the metal base 2 is fixed in the mounting groove on the last support connection in the third support group. At this time, the metal base 2 is completely fixed.

[0053] Step 2: Graphene film growth. After fixing the metal substrate 2 to the outside of the reference shaft 1 in Step 1, the reference shaft 1, along with the fixed metal substrate 2, is transferred to a growth furnace in the prior art, allowing graphene to grow on the metal substrate 2 to obtain a large-size graphene film. It is worth noting that in this embodiment, before the graphene grows on the metal substrate 2, carbon source gas can be supplied to the gas supply groove 102 inside the reference shaft 1. The carbon source gas passes sequentially through the mounting hole 101, deformation hole 501, transition hole 304, and connection hole 401 before entering the exhaust hole 303, and finally exits through the exhaust hole 303 into the space enclosed by the two adjacent support groups. This allows the carbon source gas to quickly fill the circumferential gaps enclosed by the metal substrate 2, ensuring that the metal substrate 2 can fully contact the carbon source gas during subsequent graphene growth, thus efficiently growing graphene and effectively improving the graphene film preparation efficiency.

[0054] Example 2

[0055] The difference between Example 2 and Example 1 is as follows: Figure 7 As shown, in this embodiment, multiple sector-shaped end plates 9 are welded to the outer wall of the reference shaft 1. These sector-shaped end plates 9 are divided into left and right groups located at the left and right ends of the reference shaft 1. Each group contains eight sector-shaped end plates 9. These eight sector-shaped end plates 9 are located in the same plane along the circumference of the reference shaft 1, and adjacent sector-shaped end plates 9 form a limiting space for the installation of the support column 4. That is, the width between adjacent sector-shaped end plates 9 is equal to the width of the support column 4. Simultaneously, combined with… Figure 8In order to make the dismounting of the support column 4 more convenient and smooth, the fan-shaped end 9 plate is provided with a guide groove 901 along the radial direction of the reference axis 1 on the side wall facing the limiting space in the embodiment, and the support column 4 is in sliding fit with the guide groove 901.

[0056] The above is only the embodiment of the present application, and the specific technical solutions and / or common knowledge of the scheme are not described in detail. It should be pointed out that for those skilled in the art, without departing from the technical solutions of the present application, a number of modifications and improvements can be made, which should also be considered as the protection scope of the present application, and these will not affect the effect and practicality of the present application. The protection scope claimed in the present application should be subject to the content of its claims, and the specific implementation mode and the like recorded in the specification can be used to explain the content of the claims.

Claims

1. A large-size graphene film preparation apparatus, characterized in that: The system includes a reference shaft, on the outer wall of which multiple support connections are detachably connected. All support connections are divided into multiple support groups. The multiple support connections within each support group are arranged circumferentially along the reference shaft. The multiple support groups are arranged radially along the reference shaft, and the support connections between adjacent support groups correspond one-to-one and are detachably connected. The multiple support connections within the same support group form a circumferential support space for supporting the metal substrate along the circumferential direction of the reference shaft. Each support connection includes a support base and support columns fixedly connected to both ends of the support base. Each support column is connected to a detachable connection that is detachably connected to the reference shaft or to a support column in an adjacent support group. The detachable connection includes a connecting column fixedly connected to a support column. The connecting column has a deformation hole inside, and a connecting groove communicating with the deformation hole is opened on the side wall of the connecting column. An elastic sheet is fixedly connected inside the connecting groove. One end of the elastic sheet is fixedly connected to the inner wall of the connecting groove, and the other end is suspended. A locking protrusion protruding beyond the outer wall of the connecting column is provided on the outer wall of the elastic sheet. The reference shaft has an installation hole that mates with the connecting column and engages with the locking protrusion. The support column has a connecting hole that mates with the connecting column and engages with the locking protrusion. An air supply groove is provided inside the reference shaft, and the installation hole communicates with the air supply groove. Multiple interconnected exhaust holes are opened on the bottom surface of the support base, and a transition hole connects the exhaust holes to the connecting holes.

2. The large-size graphene film preparation apparatus according to claim 1, characterized in that: The top surface of the support base has a mating groove that mates with the metal base, and the two sides of the mating groove are rounded.

3. The large-size graphene film preparation apparatus according to claim 1, characterized in that: The number of support connections within the same support group is 6-12, and the number of support groups is 3-5.

4. The large-size graphene film preparation apparatus according to claim 1, characterized in that: Multiple sector-shaped end plates are fixedly connected to the outer wall of the reference shaft. The multiple sector-shaped end plates are located in the same plane along the circumference of the reference shaft, and adjacent sector-shaped end plates form a limiting space for limiting the installation of the support connection part.

5. The large-size graphene film preparation apparatus according to claim 4, characterized in that: The fan-shaped end plate is provided with a guide groove on the side facing the limiting space, which is arranged radially along the reference axis.

6. The large-size graphene film preparation apparatus according to any one of claims 1-5, characterized in that: The reference shaft has a mounting groove that mates with the end of the metal base, and a pressure plate is detachably connected inside the mounting groove.

7. A method for preparing large-size graphene films, characterized in that: The large-size graphene film is prepared using the large-size graphene film preparation apparatus as described in claim 6, and the preparation steps are as follows: Step 1: Install the metal base. First, fix the end of the metal base in the mounting groove. Then, gradually connect the support connection to the reference shaft. While connecting the support connection, rotate the reference shaft so that the metal base passes around the support connection that has already been installed on the reference shaft. After all the support connections in a support group are connected, connect the support connections in the next support group to the support connection that has already been connected to the reference shaft. Install and connect all the support connections in sequence until all support groups are connected and the metal base is sequentially connected around the circumferential support space formed by multiple support groups. Then, fix the tail end of the metal base to the last support connection to complete the installation of the metal base. Step 2: Grow graphene film. Transfer the metal substrate installed in Step 1 to the growth furnace so that graphene can be grown on the metal substrate.

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