A mask uploading device and method

Abstract

This invention provides a mask loading device and method. The device includes a tray, a positioning component, a first adsorption component, a lifting mechanism, and a second adsorption component. The positioning component is disposed on the tray and is used to fix the mask in a preset position on the tray, allowing the mask to move only upwards. The first adsorption component is disposed on the tray and located below the mask. The lifting mechanism is disposed at the lower end of the first adsorption component to drive the first adsorption component to rise, thereby raising the mask. During the rising of the mask, the first adsorption component adsorbs it. The loading process can be completed without additional tooling, making operation simple and effectively improving efficiency. Furthermore, since the positioning component is fixedly disposed on the tray, neither the positioning component nor the fixing mechanism needs to be removed during repeated loading, enabling high-precision repeated loading. This invention requires no additional tooling, is simple to operate, improves efficiency, and achieves high repeatability in mask loading.

Description

Technical Field

[0001] This invention relates to a mask uploading device and method. Background Technology

[0002] There are two existing methods for loading masks onto proximity lithography machines: one uses an additional mask fixture, and the other involves directly removing the mask holder from the lithography machine to install the mask, which requires inserting and removing the vacuum tube of the holder. Both existing loading methods are cumbersome, inefficient, and the gaps between the movable and disassembly structures of the holder reduce the repeatability accuracy of mask loading. Summary of the Invention

[0003] This invention proposes a mask loading device and method that requires no additional tooling, is simple to operate, improves efficiency, and has high repeatability accuracy in mask loading.

[0004] A photomask loading device is provided for loading a photomask onto a fixing mechanism of a lithography machine. It includes a tray, a positioning component, a first adsorption component, a lifting mechanism, and a second adsorption component. The positioning component is disposed on the tray and is used to fix the photomask at a preset position on the tray, allowing the photomask to move only upwards. The first adsorption component is disposed on the tray and located below the photomask. The lifting mechanism is disposed at the lower end of the first adsorption component to drive the first adsorption component upwards, thereby lifting the photomask. The loading process can be completed without additional tooling, making operation simple and effectively improving efficiency. Furthermore, since the positioning component is fixedly disposed on the tray, neither the positioning component nor the fixing mechanism needs to be removed during repeated loading, enabling high-precision repeated loading.

[0005] Furthermore, the mask is rectangular, and the positioning component includes multiple positioning posts and a clamping mechanism. The multiple positioning posts are spaced apart on the tray to abut against the adjacent two sides of the mask, and the clamping mechanism is set on the tray to clamp the top corners of the mask opposite to the two adjacent sides. The clamping mechanism only applies a horizontal force to the mask. The structure is simple and reasonable, the operation is simple, and the efficiency is improved.

[0006] Furthermore, the first adsorption component includes a suction cup that is movable upward on the tray and an airbag on the suction cup. Before the lifting mechanism is activated, the airbag is inflated to give it an elastic force not greater than the weight of the mask. The lifting mechanism is activated to raise the suction cup until the airbag contacts the mask and then stops, increasing the elastic force of the airbag so that it is greater than the weight of the mask. The lifting mechanism continues to operate until the mask is fitted with the fixing mechanism. Different stages control the airbag to generate different elastic forces to ensure smooth loading.

[0007] Furthermore, the clamping mechanism includes a movable component, a first spring, a horizontal limiting component, and a movable locking component. The lower end of the movable component is provided with a strip groove along its length. The first spring and the horizontal limiting component are disposed on the tray and located within the strip groove. One end of the first spring is fixed to the horizontal limiting component, and the other end contacts the front end of the strip groove. The movable locking component is pressably disposed on the tray. The lower end of the movable component is provided with a slot for the movable locking component to be inserted. The upper end of the movable component has a clamping part that abuts against the mask plate. When not clamped, the first spring is in a compressed state, and the movable locking component is inserted into the slot. The structure is simpler and more reasonable.

[0008] Furthermore, the pressing part is provided on the upper end of the moving part with an upward protrusion, and has an arc groove and two outwardly inclined first slopes connected to the two ends of the arc groove. When pressing, the top corner of the mask is inserted into the arc groove, and the two first slopes respectively abut against the two sides connected to the top corner, thus pressing the mask more effectively.

[0009] Furthermore, the clamping mechanism also includes a Z-direction limiting member, which includes a waist-shaped hole disposed on the moving part and communicating with the strip groove, a screw hole disposed on the tray, and a bolt passing through the waist-shaped hole and locked in the screw hole. The waist-shaped hole extends along the length direction of the moving part, so that the clamping mechanism is more firmly disposed on the tray.

[0010] Furthermore, the movable locking component includes a pressing part, a second spring disposed between the tray and the pressing part, and a locking block connected to the pressing part and insertable into a locking slot. The front end of the locking block has a downwardly inclined second slope, and the rear end of the movable component has a third slope that matches the second slope. When the pressing part is pressed down, the movable component is pushed forward until it abuts against the mask plate. At this time, the first spring is in a compressed state. When the pressing part is released, the second slope of the locking block abuts against the third slope of the movable component. The locking block can both limit the movement and abut against the movable component, making the structure more reasonable.

[0011] Furthermore, the suction cup is provided with an annular groove, and the airbag is an annular strip-shaped airbag set in the annular groove, so that the elastic force on the mask is more uniform and the loading process is guaranteed to proceed smoothly.

[0012] Furthermore, it also includes a wedge-shaped error compensation component installed at the upper end of the lifting mechanism.

[0013] This invention is also achieved through the following technical solutions:

[0014] A method for uploading a mask includes the following steps:

[0015] Step S1: Fix the mask in the preset position on the tray using the positioning component and make the mask move only upwards;

[0016] Step S2: Inflate the air bladder of the first adsorption component so that the air bladder has an elastic force not exceeding the weight of the mask;

[0017] Step S3: The lifting mechanism moves the suction cup up until the airbag contacts the mask plate, then stops moving. The airbag elasticity is increased until it is greater than the weight of the mask plate. The lifting mechanism continues to move until the mask plate is attached to the fixing mechanism. Attached Figure Description

[0018] The present invention will now be described in further detail with reference to the accompanying drawings.

[0019] Figure 1 This is a schematic diagram of the device of the present invention (the mask and the fixing mechanism are in an adsorption state).

[0020] Figure 2 This is a cross-sectional structural diagram of the present invention (initial state).

[0021] Figure 3 for Figure 2 Enlarged view of part A in the middle.

[0022] Figure 4 This is another cross-sectional structural schematic diagram of the present invention (airbag inflation, wedge error compensation component in contact with suction cup).

[0023] Figure 5 for Figure 4 Enlarged view of section B.

[0024] Figure 6 This is another cross-sectional structural schematic diagram of the present invention (airbag inflated, mask plate adsorbed by fixing mechanism).

[0025] Figure 7 for Figure 6 Larger image in section C.

[0026] Figure 8 This is a top view of the device of the present invention (tightened state).

[0027] Figure 9 This is a cross-sectional view of the clamping mechanism of the present invention (clamping state).

[0028] Figure 10 This is a cross-sectional view of the clamping mechanism of the present invention (in the loosened state).

[0029] Figure 11 This is a schematic diagram of the structure of the tray of the present invention.

[0030] Figure 12 This is a schematic diagram of the structure of the movable component of the present invention.

[0031] Figure 13 This is another structural schematic diagram of the moving part of the present invention.

[0032] Figure 14 This is a schematic diagram of the structure of the active card component of the present invention.

[0033] The components include: 1. Fixing mechanism; 2. Tray; 21. Groove; 22. Pad; 23. Handle; 24. Mounting hole; 25. Mounting plate; 26. Positioning pin; 31. Positioning column; 32. Tightening mechanism; 321. Moving part; 3211. Strip groove; 3212. Slot; 3213. Arc groove; 3214. First inclined surface; 3215. Third inclined surface; 322. First spring; 323. Horizontal limiting part; 3241. Pressing part; 3242. Second spring; 3243. Locking block; 3244. Second inclined surface; 3251. Waist-shaped hole; 3252. Screw hole; 3253. Bolt; 4. First adsorption assembly; 41. Suction cup; 411. Annular groove; 412. Positioning groove; 42. Airbag; 5. Lifting mechanism; 6. Wedge-shaped error compensation assembly; 7. Mask plate. Detailed Implementation

[0034] like Figures 1 to 14 As shown, the mask loading device is used to load the mask 7 onto the fixing mechanism 1, including a tray 2, a positioning component, a first adsorption component 4, a lifting mechanism 5, and a wedge error compensation component 6. The fixing mechanism 1 is set on the lithography machine and is provided with a second adsorption component to open the vacuum adsorption of the mask 7 at the appropriate time. The lithography machine has an insertion hole for inserting or removing the tray 2. The tray 2 is equipped with a handle 23 to facilitate insertion or removal. A positioning component is set on the tray 2 to fix the mask 7 in a preset position on the tray 2 and to allow the mask 7 to move only upward. The preset position is above the tray 2 and is spaced apart from the tray 2. A first adsorption component 4 is set on the tray 2 and below the mask 7. A lifting mechanism 5 is set at the lower end of the first adsorption component 4 to drive the first adsorption component 4 to rise, thereby driving the mask 7 to rise. A wedge error compensation component 6 is set at the upper end of the lifting mechanism 5. During the rise of the mask 7, the first adsorption component 4 adsorbs it. When the mask 7 rises to fit with the fixing mechanism 1, the second adsorption component is used to adsorb the mask 7 onto the fixing mechanism 1.

[0035] Among them, the wedge error compensation component 6 and the lifting mechanism 5 are existing technologies. The specific structure of the fixing mechanism 1 is also existing technology. The lifting mechanism 5 can not only realize vertical movement, but also movement in the X, Y, and RZ directions. In this embodiment, it can also be used for loading wafers. When loading wafers, the movement of the lifting mechanism 5 in multiple directions can align the wafers.

[0036] The mask plate 7 is specifically a rectangular plate. The positioning assembly includes three positioning posts 31 and a clamping mechanism 32 disposed on the tray 2. Two positioning posts 31 are spaced apart and positioned at corresponding positions on one side of the rectangular plate, and the third positioning post 31 is positioned at the corresponding position on the adjacent side. These three positioning posts 31 abut against two adjacent sides of the mask plate 7. The clamping mechanism clamps the apex of the mask plate 7 opposite to the two adjacent sides. The clamping mechanism 32 applies a horizontal force only to the mask plate 7, allowing the mask plate 7 to move upward. In this embodiment, the upper end of the positioning post 31 has a positioning rod with a smaller diameter, and the edge of the mask plate 7 is located at the upper end of the positioning post 31 and is abutted by the positioning rod.

[0037] In this embodiment, the tightening mechanism 32 includes a movable component 321, a first spring 322, a horizontal limiting component 323, a Z-direction limiting component, and a movable locking component. The tray 2 is provided with a groove 21 corresponding to the tightening mechanism 32. A pad 22 is provided within the groove 21, with the upper end of the pad 22 on the same plane as the upper surface of the tray 2. Two horizontal limiting components 323 pass vertically through the pad 22 at intervals and downwards into the tray 2. The first spring 322 is disposed on the pad 22, with one end fixed to the horizontal limiting component 323 near the center of the tray 2. The movable component 321 is movably disposed on the pad 22. The lower end of the movable component 321 is provided with a strip groove 3211 along its length. The first spring 322 and the horizontal limiting component 323 are both located within the strip groove 3211, and the other end of the first spring 322 contacts the front end of the strip groove 3211. The Z-direction limiting component includes a waist-shaped hole 3251 disposed on the movable component 321 and communicating with the strip groove 3211, a screw hole 3252 disposed on the tray 2, and a bolt 3253 passing through the waist-shaped hole 3251 and the pad 22 and locked in the screw hole 3252. The waist-shaped hole 3251 extends along the length direction of the movable component 321. The movable clip is pressably disposed on the tray 2. The lower end of the movable component 321 is provided with a slot 3212 for the movable clip to be inserted, and the upper end of the movable component 321 has a clamping part that abuts against the mask plate 7.

[0038] In this embodiment, the pressing part is provided on the upper end of the moving part 321 with an upward protrusion, and has an arc groove 3213 and two outwardly inclined first inclined surfaces 3214 connected to the two ends of the arc groove 3213. The angle between the two first inclined surfaces 3214 is the same as the angle of the top corner of the mask plate 7 being pressed, so that the two first inclined surfaces 3214 can respectively contact and press against the two sides connected to the top corner.

[0039] In this embodiment, the movable locking component includes two pressing parts 3214 located in the groove 21, two second springs 3242 respectively disposed between the tray 2 and the two pressing parts 3214, and a locking block 3243 connected to the pressing parts 3214 and insertable into the locking slot 3212. The front end of the locking block 3243 has a downwardly inclined second slope 3244, and the rear end of the movable component 321 has a third slope 3215 matching the second slope 3244. When the mask plate 7 is not pressed tightly, the first spring 322 is in a compressed state, and the locking block 3243 is inserted into the locking slot 3212. When pressed tightly, the aforementioned apex of the mask plate 7 is inserted into the arc-shaped groove 3213, and the two first slopes 3214 respectively abut against the two sides connected to the apex. The first spring 322 is in a normal state, and the second spring 3242 is in a compressed state. Under the action of the second spring 3242, the second slope 3244 abuts forward against the movable component 321.

[0040] The first adsorption assembly 4 includes a suction cup 41 and an air bladder 42 disposed on the suction cup 41. The tray 2 has a mounting hole 24 for mounting the suction cup 41. An inwardly protruding mounting plate 25 is disposed inside the mounting hole 24. The suction cup 41 is placed within the mounting hole 24 with its lower end positioned on the mounting plate 25. An upwardly extending positioning pin 26 is disposed on the mounting plate 25. A positioning groove 412 for the positioning pin 26 to be inserted is disposed at the lower end of the suction cup 41. An annular groove 411 is disposed at the upper end of the suction cup 41. The air bladder 42 is an annular strip-shaped air bladder 42 disposed within the annular groove 411. The air bladder 42 is connected to a positive pressure air passage on the suction cup 41. To enable the suction cup 41 to open a vacuum, a vacuum passage is also provided on the suction cup 41. The structure and installation structure of the positive pressure air passage and the vacuum passage are existing technologies.

[0041] The mask uploading method based on the above-mentioned mask uploading device includes the following steps:

[0042] Step S1: Pull the tray 2 out of the lithography machine, place the mask 7 on the positioning post 31 with the edges of the two sides abutting the positioning rod with a smaller diameter on the positioning post 31, press down the pressing part 3214 of the movable clamp, and the clamping block 3243 moves down accordingly. The moving part 321 moves forward under the action of the first spring 322. The two first inclined surfaces 3214 of the pressing part abut against the other two sides respectively. Release the pressing part 3214, and the clamping block 3243 moves up accordingly. At this time, the second inclined surface 3244 of the clamping block 3243 abuts against the third inclined surface 3215 at the rear end of the moving part 321, so that the moving part 321 will not move backward, thereby fixing the mask 7 above the suction cup 41. The clamping mechanism only applies a horizontal force to the mask 7. Then insert the tray 2 into the lithography machine. At this time, the mask 7 is located below the fixing mechanism 1.

[0043] Step S2: Inflate the airbag 42 of the first adsorption component 4 so that the airbag 42 has an elastic force not greater than the weight of the mask plate 7.

[0044] Step S3: Set the wedge error compensation component 6 to the locked state. The lifting mechanism 5 rises to make the wedge error compensation component 6 contact the lower end of the suction cup 41. The lifting mechanism 5 continues to move to make the suction cup 41 rise until the airbag 42 contacts the mask plate 7 and then stops. The suction cup 41 opens the vacuum and at the same time adjusts the internal pressure of the airbag 42 so that the elasticity of the airbag 42 is equal to the sum of the weight of the mask plate 7 and the suction force generated by the vacuum on the mask plate 7.

[0045] Step S4: The lifting mechanism 5 continues to operate. When the distance between the mask plate 7 and the fixing mechanism 1 is the preset value, the wedge error compensation component 6 is set to the adaptive adjustment state. The lifting mechanism 5 continues to operate until the mask plate 7 is attached to the fixing mechanism 1. The fixing mechanism 1 adsorbs the mask plate 7 through the second adsorption component. At this time, the suction cup 41 breaks the vacuum. The lifting mechanism 5 operates to make the suction cup 41 descend onto the tray 2. The lifting mechanism 5 continues to operate to make both the wedge error compensation component 6 and the lifting mechanism 5 return to the initial height. The preset value can be adjusted by software.

[0046] The above description is merely a preferred embodiment of the present invention and should not be construed as limiting the scope of the present invention. All equivalent changes and modifications made in accordance with the scope of the patent application and the contents of the specification of the present invention should still fall within the scope of the patent of the present invention.

Claims

1. A photomask loading device for loading a photomask onto a fixing mechanism of a lithography machine, characterized in that: The device includes a tray, a positioning component, a first adsorption component, and a lifting mechanism. The positioning component is mounted on the tray and is used to fix the mask in a preset position on the tray, allowing the mask to move only upwards. The first adsorption component is mounted on the tray and located below the mask. The lifting mechanism is located at the lower end of the first adsorption component to drive the first adsorption component upwards, thereby raising the mask. The positioning component includes multiple positioning posts and a clamping mechanism. The clamping mechanism includes a moving part, a first spring, a horizontal limiting part, and a movable locking part. The lower end of the moving part has a strip groove along its length. The first spring and the horizontal limiting part are mounted on the tray and located within the strip groove. One end of the first spring is fixed to the horizontal limiting part, and the other end contacts the front end of the strip groove. The movable locking part is pressably mounted on the tray. The lower end of the moving part has a slot for the movable locking part to be inserted into. The upper end of the moving part has a clamping part that abuts against the mask. When not clamped, the first spring is in a compressed state, and the movable locking part is inserted into the slot. The clamping mechanism also includes a Z-axis limiting part, which includes a part mounted on the moving part. The moving part has a waist-shaped hole that communicates with the strip groove, a screw hole on the tray, and a bolt that passes through the waist-shaped hole and locks into the screw hole. The waist-shaped hole extends along the length of the moving part. The movable locking part includes a pressing part, a second spring disposed between the tray and the pressing part, and a locking block connected to the pressing part and insertable into a locking slot. The front end of the locking block has a downwardly inclined second slope, and the rear end of the moving part has a third slope that matches the second slope. When the pressing part is pressed down, the moving part is pushed forward until it abuts against the mask. At this time, the first spring is in a compressed state. When the pressing part is released, the second slope of the locking block abuts against the third slope of the moving part. The first adsorption assembly includes a suction cup that can be moved upward on the tray and an airbag disposed on the suction cup. Before the lifting mechanism is activated, the airbag is inflated so that the airbag has an elastic force not greater than the weight of the mask. When the lifting mechanism is activated, the suction cup is raised until the airbag contacts the mask and then stops. The elastic force of the airbag is increased so that the elastic force of the airbag is greater than the weight of the mask. The lifting mechanism continues to operate until the mask is attached to the fixing mechanism.

2. The mask loading device according to claim 1, characterized in that: The mask is rectangular, and the positioning assembly includes multiple positioning posts and a clamping mechanism. The multiple positioning posts are spaced apart on the tray to abut against the adjacent two sides of the mask, and the clamping mechanism is set on the tray to clamp the top corners of the mask opposite to the two adjacent sides. The clamping mechanism only applies a horizontal force to the mask.

3. The mask loading device according to claim 2, characterized in that: The abutting part is provided on the upper end of the moving part with an upward protrusion. It has an arc-shaped groove and two outwardly inclined first slopes connected to the two ends of the arc-shaped groove. When abutting, the top corner of the mask plate is inserted into the arc-shaped groove, and the two first slopes respectively abut against the two sides connected to the top corner.

4. The mask loading device according to claim 1, characterized in that: The suction cup is provided with an annular groove, and the airbag is an annular strip-shaped airbag disposed in the annular groove.

5. A mask loading device according to claim 1, 2, 3, or 4, characterized in that: It also includes a wedge-shaped error compensation component installed at the upper end of the lifting mechanism.

6. A mask loading method based on the mask loading device according to any one of claims 1 to 5, characterized in that: The process includes the following steps: Step S1, fixing the mask plate to a preset position on the tray using the positioning component and allowing the mask plate to move only upwards; Step S2, inflating the airbag of the first adsorption component so that the airbag has an elastic force not greater than the weight of the mask plate; Step S3, the lifting mechanism moves to raise the suction cup until the airbag contacts the mask plate and then stops, increasing the elastic force of the airbag so that the elastic force of the airbag is greater than the weight of the mask plate, and the lifting mechanism continues to move until the mask plate is attached to the fixing mechanism.

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