Tuning fork type piezoelectric vibration piece and oscillator

Abstract

The embodiments of the present application relate to a tuning fork-type piezoelectric vibrating piece and an oscillator for improving the Q value. The tuning fork-type piezoelectric vibrating piece comprises: a base, two vibrating arms extending from one end of the base, and a plurality of intermediate islands, wherein: drive electrodes are provided on the two vibrating arms, and the drive electrodes at corresponding positions of the two vibrating arms have opposite polarities; the plurality of intermediate islands are located between the two vibrating arms, and each intermediate island is provided with a vibration constraint point; at least two of the plurality of intermediate islands are provided with drive electrodes, and the drive electrodes on at least two intermediate islands have different polarities.

Description

Technical Field

[0001] The present application relates to the field of piezoelectric vibration elements, and in particular to a tuning fork-type piezoelectric vibration piece and an oscillator. Background Art

[0002] Tuning fork-type piezoelectric resonators have excellent frequency-temperature characteristics and are widely used as frequency references in various electronic devices. However, as devices become smaller, the temperature differences generated by the bending vibration of tuning fork-type piezoelectric resonators are difficult to eliminate, resulting in a significant decrease in Q. Summary of the Invention

[0003] The embodiments of the present application provide a tuning fork-type piezoelectric vibrating piece and an oscillator for improving the Q value.

[0004] In a first aspect, an embodiment of the present application provides a tuning fork-type piezoelectric vibration piece, comprising a base, two vibration arms extending from one end of the base, and a plurality of intermediate islands, wherein:

[0005] The two vibration arms are provided with driving electrodes, and the driving electrodes at corresponding positions of the two vibration arms have opposite polarities;

[0006] The plurality of intermediate island portions are located between the two vibration arm portions, and a vibration constraint point is provided on each intermediate island portion;

[0007] At least two of the plurality of intermediate islands are provided with driving electrodes, and the driving electrodes on the at least two intermediate islands have different polarities.

[0008] In one possible embodiment, a through hole is provided on the tuning fork-type piezoelectric vibration piece, and a connecting electrode is provided on the inner wall of the through hole for connecting electrodes of the same polarity on the first main surface and the second main surface of the tuning fork-type piezoelectric vibration piece, wherein the first main surface and the second main surface are two opposite surfaces.

[0009] In a possible implementation manner, the through hole is provided at an end of the middle island portion where the driving electrode is provided.

[0010] In a possible implementation manner, for the middle island portion provided with a through hole, the position of the vibration restraint point is the same as the position of the through hole.

[0011] In a possible implementation manner, when the number of the plurality of intermediate island portions is greater than or equal to three:

[0012] Along the length direction of the plurality of intermediate islands, the vibration restraint points of any two adjacent intermediate islands among the plurality of intermediate islands are staggered; and / or

[0013] Driving electrodes are provided on the middle island portions at both sides of the plurality of middle island portions.

[0014] In a second aspect, an embodiment of the present application provides a tuning fork-type piezoelectric vibration piece, comprising a base, two vibration arms extending from one end of the base, and an intermediate island, wherein:

[0015] The two vibration arms are provided with driving electrodes, and the driving electrodes at corresponding positions of the two vibration arms have opposite polarities;

[0016] The middle island portion is located between the two vibration arm portions, and a vibration constraint point is provided on the middle island portion;

[0017] Two types of driving electrodes with opposite polarities are simultaneously arranged on the middle island portion.

[0018] In one possible embodiment, a through hole is provided on the tuning fork-type piezoelectric vibration piece, and a connecting electrode is provided on the inner wall of the through hole for connecting electrodes of the same polarity on the first main surface and the second main surface of the tuning fork-type piezoelectric vibration piece, wherein the first main surface and the second main surface are two opposite surfaces.

[0019] In a possible embodiment, a widened portion is provided at the end or in the middle of the middle island portion, and the length direction of the widened portion is perpendicular to the length direction of the middle island portion;

[0020] The through holes are provided at both ends of the widened portion.

[0021] In a possible implementation manner, two vibration restraint points are provided on the middle island portion, and positions of the vibration restraint points are the same as positions of the through holes.

[0022] In a third aspect, an embodiment of the present application provides an oscillator, comprising the tuning fork-type piezoelectric vibration piece described in the first aspect.

[0023] The tuning fork-type piezoelectric vibrating piece provided in the embodiment of the present application is provided with an intermediate island portion for fixing the piezoelectric vibrator. Since the intermediate island portion provides constraints in the width direction, it can effectively suppress energy leakage caused by vibration, thereby improving the Q value.

[0024] Other features and advantages of the present application will be described in the following description, and in part will become apparent from the description, or will be understood by practicing the present application. The purposes and other advantages of the present application can be realized and obtained by the structures particularly pointed out in the written description, claims, and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A three-dimensional schematic diagram of the tuning fork-type piezoelectric vibrating piece provided in Example 1 of the present application;

[0026] Figure 2 Schematic diagram of the first main surface electrode of the tuning fork type piezoelectric vibration piece provided in Example 1 of the present application;

[0027] Figure 3 Schematic diagram of the second main surface electrode of the tuning fork type piezoelectric vibration piece provided in Example 1 of the present application;

[0028] Figure 4 A schematic cross-sectional view of the tuning fork-type piezoelectric vibrating piece provided in Example 1 of the present application;

[0029] Figure 5 A schematic structural diagram of a tuning fork-type piezoelectric vibrating piece provided in Example 2 of the present application;

[0030] Figure 6 This is a schematic diagram of the first main surface electrode of the tuning fork type piezoelectric vibration piece provided in Example 2 of the present application;

[0031] Figure 7 This is a second schematic diagram of the first main surface electrode of the tuning fork-type piezoelectric vibration piece provided in Example 2 of the present application;

[0032] Figure 8 A schematic structural diagram of a tuning fork-type piezoelectric vibrating piece provided in Example 3 of the present application;

[0033] Figure 9 Schematic diagram of the first main surface electrode of the tuning fork-type piezoelectric vibration piece provided in Example 3 of the present application;

[0034] Figure 10 A schematic structural diagram of a tuning fork-type piezoelectric vibrating piece provided in Example 4 of the present application;

[0035] Figure 11 Schematic diagram of the first main surface electrode of the tuning fork-type piezoelectric vibration piece provided in Example 4 of the present application;

[0036] Figure 12 A cross-sectional schematic diagram of the packaging of a tuning fork-type piezoelectric vibrating piece provided in an embodiment of the present application;

[0037] Figure ID:

[0038] 10: base;

[0039] 35a, 35b, 36a, 36b: planar driving electrodes; 43, 44: electrode patterns;

[0040] 11, 12: Vibrating arm;

[0041] 11a, 11b, 12a, 12b: side walls of the vibration arm; 23a, 24a: first driving groove; 23b, 24b: second driving groove;

[0042] 31a, 31b, 32a, 32b: sidewall driving electrodes; 33a, 34a: inner wall driving electrodes of the first driving groove; 33b, 34b: inner wall driving electrodes of the second driving groove;

[0043] 21, 22, 23: middle island; 40a, 40b: through holes;

[0044] 41, 42: driving electrodes of the middle island;

[0045] 110, 120: weight-bearing part;

[0046] 220: upper cover; 221: upper cover adhesive; 222: side packaging body; 223: lower packaging body; 224: lower cover;

[0047] 210a, 210b: Vibration restraint point adhesive; 211a, 211b: Base pad. DETAILED DESCRIPTION

[0048] To make the purpose, technical solutions, and advantages of the embodiments of this application more clear, the technical solutions of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are part of the embodiments of the technical solutions of this application, but not all of them. Based on the embodiments described in this application document, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the technical solutions of this application.

[0049] The embodiment of the present application provides a tuning fork type piezoelectric vibrating piece, such as Figure 1-7 As shown, it includes a base, two vibrating arms extending from one end of the base, and a plurality of intermediate islands, wherein:

[0050] Driving electrodes are provided on the two vibration arms, and the driving electrodes at corresponding positions of the two vibration arms have opposite polarities;

[0051] A plurality of intermediate islands are located between the two vibration arms, arranged in parallel and at a certain distance, and a vibration constraint point is provided on each intermediate island;

[0052] At least two of the plurality of intermediate islands are provided with driving electrodes, and the driving electrodes on at least the two intermediate islands have different polarities.

[0053] By using the tuning fork-type piezoelectric vibration piece provided in the embodiment of the present application and providing a plurality of intermediate island portions to provide vibration constraints, the Q value can be increased, thereby improving device performance.

[0054] The preferred embodiments of the present application are described below in conjunction with the drawings in the specification. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present application and are not used to limit the present application. In addition, the embodiments and features in the embodiments of the present application can be combined with each other if there is no conflict.

[0055] Example 1:

[0056] The tuning fork type piezoelectric vibration piece provided in Example 1 of the present application is as follows Figure 1-4 shown.

[0057] In this embodiment, Figure 1 As shown, the tuning fork type piezoelectric vibration piece includes a base, two vibration arms extending from one end of the base, and two intermediate islands, wherein:

[0058] Driving electrodes are provided on the two vibration arms, and the driving electrodes at corresponding positions of the two vibration arms have opposite polarities;

[0059] The two middle islands are located between the two vibration arms, and vibration constraint points are provided on the two middle islands;

[0060] Driving electrodes are provided on the two middle islands, and the driving electrodes on the two middle islands have opposite polarities.

[0061] In this embodiment, Figure 2 、 Figure 3 As shown, the two middle islands are of exactly the same shape, symmetrically arranged, and arranged in parallel and spaced apart. That is, along the width direction of the middle island, the tuning fork-type piezoelectric vibrating piece has a symmetrical constraint structure.

[0062] By setting up a symmetrical constraint structure, the energy leakage caused by vibration can be further reduced. At the same time, the displacement in other directions caused by vibration can also be effectively suppressed, thus ensuring further improvement of the Q value.

[0063] Preferably, the vibration restraint point is arranged at the end of the middle island portion.

[0064] In actual implementation, through holes are provided on the two middle island portions, and driving electrodes with the same polarity are provided on the first main surface and the second main surface of the middle island portion. A connecting electrode is provided on the inner wall of the through hole for connecting the electrodes of the same polarity on the first main surface and the second main surface.

[0065] By providing the through hole, the driving electrode on the side wall of the middle island portion can be omitted, thereby simplifying the production process.

[0066] Preferably, the through hole is also provided at the end of the middle island portion, at the same position as the vibration restraint point.

[0067] It should be noted that the through hole can also be set at other positions of the tuning fork type piezoelectric vibration piece, such as on the base. As long as it can connect the electrodes of the same polarity on the first main surface and the second main surface, the application does not limit the specific position of the through hole.

[0068] In this embodiment, Figure 2 、 Figure 3 As shown, the two vibration arms have exactly the same shape and are symmetrically arranged, and the driving electrodes at corresponding positions have opposite polarities, so the electric field driving forces generated are in opposite directions, and the two vibration arms repeatedly approach or move away.

[0069] Each vibrating arm can be implemented in the following forms:

[0070] The first main surface of the vibration arm is provided with a first driving groove, and the second main surface of the vibration arm is provided with a second driving groove at a position corresponding to the first driving groove; wherein the first main surface and the second main surface are two opposite surfaces.

[0071] In actual implementation, the length of the first driving groove and the length of the second driving groove account for 60%-80% of the length of the vibration arm.

[0072] Preferably, the length, width and depth of the first driving groove are exactly the same as those of the second driving groove.

[0073] like Figure 2 、 Figure 3 As shown, the inner wall of the first driving groove is provided with an inner wall driving electrode, and the inner wall of the second driving groove is provided with an inner wall driving electrode; the side wall of the vibration arm is provided with a side wall driving electrode; the polarity of the inner wall driving electrode of the first driving groove is the same as the polarity of the inner wall driving electrode of the second driving groove, and opposite to the polarity of the side wall driving electrode.

[0074] At this time, the cross section of the tuning fork type piezoelectric vibrating piece at the through hole is as follows Figure 4 As shown, the cross section of the vibration arm is "H" shaped.

[0075] In this way, a sufficiently large electric field driving force can be generated to drive the vibration arm to perform alternating bending vibrations, while preventing the crystal impedance value from being too large and affecting the device performance.

[0076] It should be noted that, in other embodiments of the present application, the vibration arm portion may also be implemented in other forms, and the present application does not make any specific limitation on this.

[0077] In this embodiment, Figure 1 As shown, the tuning fork type piezoelectric vibration piece further includes two weight portions located at the ends of the two vibration arms. The two weight portions have exactly the same shape and are symmetrically arranged, and the driving electrodes at corresponding positions have opposite polarities.

[0078] In actual implementation, the width of the weight-applying portion is slightly larger than the width of the vibration arm portion, and a width transition region is provided near the vibration arm portion at the weight-applying portion, and the width transition region is in the shape of a straight line connection.

[0079] By providing the weight portion, the resonance frequency of the vibration plate can be effectively lowered, and a coarse adjustment of the resonance frequency can be achieved.

[0080] Preferably, the end of the weight-applying portion is provided with a metal of a preset thickness, so as to achieve fine-tuning of the resonant frequency.

[0081] like Figure 2 、 Figure 3 As shown, the first main surface and the second main surface of the weight-applying part are both provided with driving electrodes, and the polarity of the driving electrode of the weight-applying part is opposite to the polarity of the inner wall driving electrode of the first driving groove of the first main surface of the corresponding vibrating arm part and the polarity of the inner wall driving electrode of the second driving groove of the second main surface.

[0082] In this embodiment, Figure 1 As shown, the tail end of the base is in an arc shape, that is, the rear side surface between the first main surface and the second main surface is in a curved shape.

[0083] By setting the arc-shaped base tail end, the energy circle formed by the vibration can be completely confined to the coverage range of the base shape, so that the displacement change caused by the vibration is difficult to be transmitted from the vibration arm to the base, thereby effectively reducing the vibration leakage from the vibration arm to the base, thereby further improving the Q value.

[0084] It should be noted that in other embodiments of the present application, the tail end of the base may also be in other shapes, and the present application does not make any specific limitation on this.

[0085] In actual implementation, a planar driving electrode may be provided on the base to achieve electrode connection between the vibration arm portion and the middle island portion.

[0086] In this embodiment, each driving electrode may be made of metal with good conductive properties, and the electrode is adhered to the piezoelectric vibrating piece by sputtering, and the thickness is usually 50nm-200nm.

[0087] The electrode polarity of the first main surface of the tuning fork type piezoelectric vibrating piece provided in Example 1 of the present application is as follows Figure 2 As shown, the electrode polarity of the second main surface is as follows Figure 3 As shown, different gray levels represent different electrode polarities.

[0088] For the first polarity, such as Figure 2 As shown, the driving electrode 41 on the first main surface of the middle island portion 21 is connected to the planar driving electrode 35a and the inner wall driving electrode 33a of the first driving groove 23a of the vibration arm portion 11 through the electrode pattern; Figure 3As shown, the driving electrode 41 on the second main surface of the middle island portion 21 is connected to the side wall driving electrode 32b of the vibration arm portion 12, the driving electrode of the weight portion 120, and the side wall driving electrode 32a of the vibration arm portion 12 through the electrode pattern 44. At the same time, the driving electrode 41 on the second main surface of the middle island portion 21 is connected to the planar driving electrode 36a and the inner wall driving electrode 33b of the second driving groove 23b of the vibration arm portion 11 through the electrode pattern; the driving electrodes 41 on the first main surface and the second main surface of the middle island portion 21 are connected through the connecting electrode on the inner wall of the through hole 40a, thereby realizing the connection of the first polarity electrodes on the two main surfaces of the tuning fork type piezoelectric vibration piece.

[0089] Correspondingly, for the second polarity, such as Figure 2 As shown, the driving electrode 42 on the first main surface of the intermediate island portion 22 is connected to the side wall driving electrode 31a of the vibration arm portion 11, the driving electrode of the weight portion 110, and the side wall driving electrode 31b of the vibration arm portion 11 through the electrode pattern 43. At the same time, the driving electrode 42 on the first main surface of the intermediate island portion 22 is connected to the planar driving electrode 35b and the inner wall driving electrode 34a of the first driving groove 24a of the vibration arm portion 12 through the electrode pattern; Figure 3 As shown, the driving electrode 42 on the second main surface of the middle island portion 22 is connected to the planar driving electrode 36b and the inner wall driving electrode 34b of the second driving groove 24b of the vibration arm portion 12 through the electrode pattern; the driving electrodes 42 on the first main surface and the second main surface of the middle island portion 22 are connected through the connecting electrode on the inner wall of the through hole 40b, thereby realizing the connection of the second polarity electrodes on the two main surfaces of the tuning fork type piezoelectric vibration piece.

[0090] Example 2:

[0091] The tuning fork type piezoelectric vibration piece provided in Example 2 of the present application is as follows Figure 5-7 shown.

[0092] In this embodiment, Figure 5 As shown, the tuning fork type piezoelectric vibration piece includes a base, two vibration arms extending from one end of the base, and three intermediate islands, wherein:

[0093] Driving electrodes are provided on the two vibration arms, and the driving electrodes at corresponding positions of the two vibration arms have opposite polarities;

[0094] The three middle islands are located between the two vibration arms, and vibration constraint points are provided on the three middle islands;

[0095] At least two of the three middle islands are provided with driving electrodes, and the driving electrodes on the at least two middle islands have different polarities.

[0096] That is to say, the tuning fork-type piezoelectric vibration piece provided in Example 2 of the present application has the following two specific implementation methods:

[0097] Method 1: If Figure 6 As shown, when driving electrodes are provided on two of the three middle islands, the driving electrodes on the two middle islands have opposite polarities.

[0098] In actual implementation, the middle island portions on both sides may be selected from the three middle island portions to be provided with driving electrodes.

[0099] In this case, through holes may be provided in the two intermediate island portions where the driving electrodes are provided.

[0100] Method 2: If Figure 7 As shown, driving electrodes are provided on the three middle islands, wherein the driving electrodes on two middle islands have the same polarity and are opposite to the driving electrodes on the other middle island.

[0101] In this case, a through hole may be provided in at least one of the two intermediate islands having the same driving electrode polarity, and a through hole may be provided in the other intermediate island having the opposite driving electrode polarity.

[0102] Preferably, for the middle island portion provided with the through hole, the position of the through hole is the same as the position of the vibration restraint point, both being located at the end of the middle island portion.

[0103] The specific implementation of other parts of the tuning fork-type piezoelectric vibration piece provided in Example 2 of the present application can be referred to the aforementioned Example 1, and will not be repeated here.

[0104] In other embodiments of the present application, the number of the intermediate island portions included in the tuning fork-type piezoelectric vibration piece may also be four, five, or other numbers, which will not be described in detail here.

[0105] It should be noted that adhesive is usually used to fix the middle islands at the vibration restraint points to prevent vibration. When there are a large number of middle islands, to avoid the problem of electrode polarity overlap caused by the smaller spacing between the middle islands, at least one of the following two methods can be used:

[0106] Method 1: Along the length direction of the multiple intermediate islands, the vibration restraint points of any two adjacent intermediate islands are staggered to avoid short circuiting due to adhesive flow;

[0107] Method 2: Driving electrodes are provided on the middle island portions on both sides, and no driving electrodes are provided on the other middle island portions.

[0108] The present application also provides a tuning fork type piezoelectric vibration piece, such as Figure 8-11 As shown, it includes a base, two vibrating arms extending from one end of the base, and a middle island, wherein:

[0109] Driving electrodes are provided on the two vibration arms, and the driving electrodes at corresponding positions of the two vibration arms have opposite polarities;

[0110] The middle island portion is located between the two vibration arms, and a vibration constraint point is provided on the middle island portion;

[0111] Two types of driving electrodes with opposite polarities are arranged on the middle island.

[0112] By using the tuning fork-type piezoelectric vibration piece provided in the embodiment of the present application and providing a middle island portion to provide vibration constraint, the Q value can be increased, thereby improving the device performance.

[0113] Moreover, the strength of the middle island portion can be effectively enhanced to prevent rupture due to excessive stress.

[0114] The preferred embodiments of the present application are described below in conjunction with the drawings in the specification. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present application and are not used to limit the present application. In addition, the embodiments and features in the embodiments of the present application can be combined with each other if there is no conflict.

[0115] Example 3:

[0116] The tuning fork type piezoelectric vibration piece provided in Example 3 of the present application is as follows Figure 8-9 shown.

[0117] In this embodiment, Figure 8 As shown, the tuning fork type piezoelectric vibration piece includes a base, two vibration arms extending from one end of the base, and an intermediate island, wherein:

[0118] Driving electrodes are provided on the two vibration arms, and the driving electrodes at corresponding positions of the two vibration arms have opposite polarities;

[0119] The middle island portion is located between the two vibration arm portions, a widening portion is provided at the end of the middle island portion, and vibration restraint points are provided at both ends of the widening portion;

[0120] like Figure 9 As shown, two driving electrodes with opposite polarities are provided on the middle island portion.

[0121] Among them, the length direction of the widened portion is perpendicular to the length direction of the middle island portion. That is to say, in Example 3 of the present application, the middle island portion is "T"-shaped as a whole and is symmetrical about the length direction.

[0122] By providing a "T"-shaped middle island, the spacing in the width direction can be widened, thereby better preventing displacement in other directions and effectively improving the Q value.

[0123] At this time, two through holes may be provided on the middle island portion. Preferably, the positions of the through holes are the same as the positions of the vibration restraint points, both being located at the two ends of the widened portion.

[0124] The specific implementation of other parts of the tuning fork-type piezoelectric vibration piece provided in Example 3 of the present application can be referred to the aforementioned Example 1, and will not be repeated here.

[0125] Example 4:

[0126] The tuning fork type piezoelectric vibration piece provided in Example 4 of the present application is as follows Figure 10-11 shown.

[0127] In this embodiment, Figure 10 As shown, the tuning fork type piezoelectric vibration piece includes a base, two vibration arms extending from one end of the base, and an intermediate island, wherein:

[0128] Driving electrodes are provided on the two vibration arms, and the driving electrodes at corresponding positions of the two vibration arms have opposite polarities;

[0129] The middle island portion is located between the two vibration arm portions, a widening portion is provided in the middle of the middle island portion, and vibration restraint points are provided at both ends of the widening portion;

[0130] like Figure 11 As shown, two driving electrodes with opposite polarities are provided on the middle island portion.

[0131] Among them, the length direction of the widened part is perpendicular to the length direction of the middle island part. That is to say, in Example 4 of the present application, the middle island part is in a "cross" shape as a whole and is symmetrical about the length direction.

[0132] By setting a "X"-shaped middle island portion, the spacing in the width direction can also be widened, thereby better preventing displacement in other directions and effectively improving the Q value.

[0133] At this time, two through holes may be provided on the middle island portion. Preferably, the positions of the through holes are the same as the positions of the vibration restraint points, both being located at the two ends of the widened portion.

[0134] The specific implementation of other parts of the tuning fork-type piezoelectric vibration piece provided in Example 4 of the present application can be referred to the aforementioned Example 1 and will not be repeated here.

[0135] In other embodiments of the present application, the middle island portion of the tuning fork-type piezoelectric vibration piece may also have other shapes, which will not be described in detail here.

[0136] An embodiment of the present application further provides an oscillator, comprising the tuning fork-type piezoelectric vibration piece provided in the aforementioned embodiment. The piezoelectric vibration piece is housed in the internal space of a package and vacuum-packaged, and has a certain degree of airtightness.

[0137] The package cross-sectional diagram provided in the embodiment of the present application is as follows Figure 12 As shown, the package structure includes an upper cover, side package bodies, a lower package body, and a lower cover. The side package bodies and lower package body are integrated into a single structure. The upper cover and side package bodies are connected using adhesive. This is applied all around to ensure a tight package and maximize the internal vacuum environment.

[0138] In this embodiment, a power feeding point of the tuning-fork type piezoelectric vibrating piece is provided on the middle island portion where the driving electrode is provided.

[0139] In actual implementation, two vibration constraint points with opposite electrode polarities can be selected, and conductive particles can be added to the corresponding adhesive so that the two vibration constraint points with opposite electrode polarities can serve as power supply points for the tuning fork type piezoelectric vibration piece, which can simplify the production process.

[0140] Taking the tuning fork type piezoelectric vibrating piece provided in Example 1 of the present application as an example, Figure 12 As shown, inside the package, the vibration restraint points of the two middle islands are fixed to the base pad of the lower package body by adhesive. The driving electrodes of the two middle islands have opposite polarities. Therefore, conductive particles can be added to the adhesive of the vibration restraint points of the two middle islands to input power from the vibration restraint points to the electrodes of the tuning fork-type piezoelectric vibrating piece. The power supply circuit is also housed in the internal space of the package. Figure 12 Not shown in the figure.

[0141] Although the preferred embodiments of the present application have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present application.

[0142] Obviously, those skilled in the art may make various changes and modifications to this application without departing from the spirit and scope of this application. Thus, if these modifications and variations of this application fall within the scope of the claims of this application and their equivalents, this application is intended to include these modifications and variations.

Claims

1. A tuning fork type piezoelectric vibrating piece, characterized in that: It comprises a base, two vibrating arms extending from one end of the base, and a plurality of intermediate islands, wherein: The two vibration arms are provided with driving electrodes, and the driving electrodes at corresponding positions of the two vibration arms have opposite polarities; The plurality of intermediate islands are located between the two vibrating arm portions, and each intermediate island is provided with a vibration restraint point; the vibration restraint points are located on the same main surface, and at the vibration restraint points, an adhesive is used to fix the corresponding intermediate island to prevent vibration; At least two of the plurality of intermediate island portions are provided with driving electrodes on their main surfaces, and the polarities of the driving electrodes on the at least two intermediate island portions are not completely the same; wherein, two vibration constraint points are provided with two driving electrodes with opposite polarities, and conductive particles are added to the corresponding adhesives, so that the two vibration constraint points serve as power supply points for the tuning fork-type piezoelectric vibration piece.

2. The tuning fork type piezoelectric vibrating piece according to claim 1, wherein: The tuning fork-type piezoelectric vibration piece is provided with a through hole, and the inner wall of the through hole is provided with a connecting electrode for connecting the same polarity electrodes on the first main surface and the second main surface of the tuning fork-type piezoelectric vibration piece, wherein the first main surface and the second main surface are two opposite surfaces.

3. The tuning fork type piezoelectric vibrating piece according to claim 2, wherein: The through hole is provided at the end of the middle island portion where the driving electrode is provided.

4. The tuning fork type piezoelectric vibrating piece according to claim 3, wherein: For the middle island portion provided with the through hole, the position of the vibration restraining point is the same as the position of the through hole.

5. The tuning fork type piezoelectric vibrating piece according to any one of claims 1 to 4, characterized in that: When the number of the plurality of intermediate island portions is greater than or equal to three: Along the length direction of the plurality of intermediate islands, the vibration restraint points of any two adjacent intermediate islands among the plurality of intermediate islands are staggered; and / or Driving electrodes are provided on the middle island portions at both sides of the plurality of middle island portions.

6. An oscillator, characterized in that: The invention comprises the tuning fork type piezoelectric vibration piece according to any one of claims 1 to 5.

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