Drying apparatus and method for drying a substrate using supercritical fluid

Abstract

The application discloses a drying device and method for drying a substrate using a supercritical fluid. The drying device comprises an upper cavity, a lower cavity, a substrate tray, a lifting mechanism, a connecting assembly and a locking mechanism. The lower cavity is arranged below the upper cavity. The substrate tray is arranged in the lower cavity and used for carrying the substrate. The lifting mechanism is arranged below the lower cavity and used for driving the lower cavity to move along a vertical direction so that the lower cavity is in full contact with the upper cavity. The connecting assembly connects the upper cavity and the lower cavity. The locking mechanism is used for locking or releasing the connecting assembly when the lower cavity is in full contact with the upper cavity. When the locking mechanism locks the connecting assembly and the lifting mechanism is removed from the lower cavity, the locking mechanism and the connecting assembly are automatically contacted upward and downward due to the gravity of the cavities. The upper cavity and the lower cavity are closed to form a sealed cavity. The application has the advantage of enhancing the pressure resistance of the sealed cavity.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a drying apparatus and method for drying a substrate using a supercritical fluid. Background Technology

[0002] In integrated circuit manufacturing, wet etching processes on substrates such as wafers are crucial for product yield. Current wet etching processes typically involve fixing the wafer, which is to be wet-etched or cleaned, onto a wafer chuck, allowing the wafer to rotate under the chuck's influence. Wet etching solutions are then sprayed onto the wafer surface to perform the process. After the wet etching or cleaning process is complete, the substrate needs to be dried.

[0003] It is known that supercritical fluids with zero surface tension can be used to dry substrates. For example, a substrate covered with isopropanol (IPA) is transferred from a cleaning chamber to a drying chamber, and the upper and lower chambers of the drying chamber are closed to form a sealed chamber. Then, supercritical fluid is supplied to the sealed chamber, causing the IPA on the substrate surface to dissolve into the supercritical fluid and be removed from the substrate. The supercritical fluid is then vaporized and discharged. After the pressure inside the sealed chamber returns to atmospheric pressure, the sealed chamber is opened, and finally the dried substrate is removed.

[0004] The aforementioned substrate drying process requires a high-pressure, high-temperature environment, necessitating the pressure resistance of the sealed chamber. Currently, the drying chamber typically uses a pin that passes laterally through the side wall of the upper chamber and engages with the side wall of the lower chamber to lock the sealed chamber. However, this pin is susceptible to breakage due to vertical shear forces. Consequently, the pressure resistance of the sealed chamber formed by the current drying chamber is relatively low. Summary of the Invention

[0005] The purpose of this invention is to solve the problem of low pressure resistance of the sealed chamber in the prior art. Therefore, this invention provides a drying apparatus and method for drying substrates using supercritical fluid, which has the advantage of enhancing the pressure resistance of the sealed chamber.

[0006] To address the aforementioned problems, embodiments of the present invention provide a drying apparatus for drying a substrate using a supercritical fluid, comprising:

[0007] The upper cavity and the lower cavity are located below the upper cavity;

[0008] A substrate tray, located in the lower cavity, is used to support the substrate;

[0009] The lifting mechanism, located below the lower cavity, is used to drive the lower cavity to move vertically.

[0010] The connecting assembly connects the upper cavity and the lower cavity, and the locking mechanism is used for locking or releasing the connecting assembly;

[0011] When the jacking mechanism lifts the lower cavity to move upward, the locking mechanism locks the connecting assembly in the horizontal direction, and a gap is formed between the locking mechanism and the connecting assembly in the vertical direction.

[0012] When the closed cavity is opened, the jacking mechanism first lifts the lower cavity to move upward, a gap is formed between the locking mechanism and the connecting assembly in the vertical direction, and the locking mechanism releases the connecting assembly in the horizontal direction.

[0013] Another embodiment of the present application provides a drying device for drying a substrate using a supercritical fluid, comprising:

[0014] The upper cavity and the lower cavity are arranged in a vertical direction, and the lower cavity is arranged below the upper cavity.

[0015] The substrate tray is arranged in the lower cavity and used for carrying the substrate.

[0016] The uniform flow assembly is arranged in the interior of the upper cavity, and the uniform flow assembly comprises a ring-shaped air guide plate and a porous plate.

[0017] Another embodiment of the present application provides an assembly tool for assembling the connecting assembly of the drying device.

[0018] The tool body is used for being fixed to the upper cavity and is provided with an assembly opening.

[0019] The positioning part is movably arranged in the tool body.

[0020] When the connecting part penetrates the upper cavity and the lower cavity through the assembly opening and the through hole, the positioning part is matched with the mark part of the connecting part by moving the positioning part, so that the axis of the connecting part coincides with the axis of the through hole.

[0021] Another embodiment of the present application provides a method for drying a substrate using a supercritical fluid, comprising the following steps:

[0022] Step S1: placing the substrate to be dried on the substrate tray, moving the lower cavity and the upper cavity in the vertical direction to close the pressure-resistant sealed cavity;

[0023] Step S2: supplying the supercritical fluid from the first fluid inlet on the top of the sealed cavity through the first fluid supply pipe, and the fluid reaches the upper surface of the substrate from the side of the substrate after bypassing the spoiler below the first fluid inlet, and stops supplying the supercritical fluid from the top of the sealed cavity after the pressure value inside the sealed cavity reaches the set pressure value;

[0024] Step S3: supplying the supercritical fluid from the second fluid inlet of the first side wall of the sealed cavity through the second fluid supply pipe, drying the substrate, and discharging the treated supercritical fluid through the fluid discharge port of the second side wall of the sealed cavity;

[0025] Step S4: after the drying process is completed, the second fluid inlet and the fluid discharge port are closed, the internal pressure of the sealed cavity is reduced, and the supercritical fluid is changed into gas and discharged from the top of the sealed cavity through the first fluid inlet at a predetermined speed after bypassing the spoiler;

[0026] Step S5: when the internal pressure of the sealed cavity reaches the atmospheric pressure state, the sealed cavity is opened and the substrate is taken out.

[0027] As described above, the present application has the following advantages:

[0028] The drying device for drying the substrate using the supercritical fluid of the present application connects the upper cavity and the lower cavity in the vertical direction by using the connecting assembly, and when the lower cavity is in full contact with the upper cavity in the vertical direction, the locking mechanism is used to lock the connecting assembly in the horizontal direction. After the jacking mechanism is removed from the lower cavity, the locking mechanism and the connecting assembly are automatically in contact in the vertical direction, and the locking mechanism is also in full contact with the upper cavity. During the substrate drying process, the locking mechanism and the connecting assembly are not easily broken by vertical shear force, thereby enhancing the strength and pressure resistance of the sealed cavity.

[0029] The drying device for drying the substrate using the supercritical fluid of the present application is provided with a flow uniformizing assembly in the interior of the upper cavity, which includes a multi-hole plate for the supercritical fluid to pass through, so that the fluid distribution in the supercritical fluid inlet area is more uniform.

[0030] The assembling tool of the present application comprises a tool body and a positioning part, and is used for assembling a connecting assembly of a drying device, wherein the connecting assembly comprises a connecting piece and a fixing piece, the tool body is used for being fixed to an upper cavity of the drying device and is provided with an assembling opening, after the connecting piece penetrates through the upper cavity and a lower cavity of the drying device through the assembling opening, the positioning part is aligned with the connecting piece to realize accurate positioning of the connecting piece, so that the fixing piece and the lower cavity bottom are aligned, and after the fixing piece is clamped with the connecting piece, the fixing piece can be accurately fixed at the corresponding position of the lower cavity bottom.

[0031] The method for drying a substrate using a supercritical fluid of the present application changes the method that the supercritical fluid is discharged from a fluid discharge port after becoming a gas in the prior art, and after the substrate drying process is completed, the gas bypasses the spoiler and is discharged from the top of the closed chamber through the first fluid inlet at a predetermined speed, so that the pattern structure on the substrate, especially the pattern structure at the edge position of the substrate, can be prevented from being pulled down by the high-speed airflow.

[0032] Other features and corresponding advantages of the present application are described in the latter part of the specification, and it should be understood that at least part of the advantages become apparent from the description of the present application in the specification. BRIEF DESCRIPTION OF DRAWINGS

[0033] Figure 1 A schematic diagram of the three-dimensional structure of the drying device for drying a substrate using a supercritical fluid provided in embodiment 1 of the present application is shown;

[0034] Figure 2 A schematic diagram of the three-dimensional structure of the jacking mechanism and the support provided in embodiment 1 of the present application is shown;

[0035] Figure 3 A schematic diagram of the structure of the lower cavity fixed to the six-degree-of-freedom robot platform provided in embodiment 1 of the present application is shown;

[0036] Figure 4a A schematic diagram of the structure of the gear and lead screw transmission mechanism provided in embodiment 1 of the present application is shown;

[0037] Figure 4b Another perspective view of the schematic diagram of the structure of the gear and lead screw transmission mechanism provided in embodiment 1 of the present application is shown;

[0038] Figure 5a A schematic diagram of the three-dimensional structure of the upper cavity and the lower cavity of the drying device for drying a substrate using a supercritical fluid provided in embodiment 1 of the present application is shown;

[0039] Figure 5b A schematic diagram of the three-dimensional structure of the first end of the connecting piece fixed to the lower cavity provided in embodiment 1 of the present application is shown;

[0040] Figure 5cA perspective view of the connector provided in Embodiment 1 of the present application;

[0041] Figure 5d A perspective view of the connector, the first lock block, the second lock block and the U-shaped clamp provided in Embodiment 1 of the present application;

[0042] Figure 6 A front view of the upper cavity and the lower cavity of the drying device for drying substrates using supercritical fluid provided in Embodiment 1 of the present application when the upper cavity and the lower cavity are opened;

[0043] Figure 7 A perspective view of the upper cavity and the lower cavity of the drying device for drying substrates using supercritical fluid provided in Embodiment 1 of the present application when the upper cavity and the lower cavity are completely contacted and the locking mechanism does not lock the connecting assembly;

[0044] Figure 8a A perspective view of the upper cavity and the lower cavity of the drying device based on supercritical fluid provided in Embodiment 1 of the present application when the upper cavity and the lower cavity are completely contacted and the locking mechanism locks the connecting assembly;

[0045] Figure 8b A perspective view of the eddy current displacement sensor provided in Embodiment 1 of the present application;

[0046] Figure 8c A side view of the eddy current displacement sensor provided in Embodiment 1 of the present application when the eddy current displacement sensor is arranged in the drying device; Figure 9 A front view of the upper cavity and the lower cavity of the drying device for drying substrates using supercritical fluid provided in Embodiment 1 of the present application when the upper cavity and the lower cavity are completely contacted and the locking mechanism locks the connecting assembly;

[0047] Figure 10 A front view of the upper cavity and the lower cavity of the drying device for drying substrates using supercritical fluid provided in Embodiment 1 of the present application when the upper cavity and the lower cavity are completely contacted and the locking mechanism locks the connecting assembly;

[0048] Figure 11 A cross-sectional view of the upper cavity and the lower cavity of the drying device for drying substrates using supercritical fluid provided in Embodiment 1 of the present application when the upper cavity and the lower cavity are closed to form a sealed cavity;

[0049] Figure 12 A perspective view of the upper cavity and the lower cavity of the drying device for drying substrates using supercritical fluid provided in Embodiment 1 of the present application when the upper cavity and the lower cavity are completely contacted and the locking mechanism locks the connecting assembly; Figure 11 A partial enlarged view of part A in FIG. 1;

[0050] Figure 13 A partial enlarged view of part B in FIG. 1; Figure 12 A partial enlarged view of part B in FIG. 1;

[0051] Figure 14A schematic diagram of the upper cavity and the lower cavity of the drying device for drying the substrate using the supercritical fluid provided in Embodiment 1 of the present application when closed to form a sealed chamber;

[0052] Figure 15 A schematic diagram of the upper cavity and the lower cavity of the drying device for drying the substrate using the supercritical fluid provided in Embodiment 1 of the present application when closed to form a sealed chamber;

[0053] Figure 16 A schematic diagram of the working principle of the analysis device for detecting the concentration of the target substance discharged from the sealed chamber provided in Embodiments 1 and 3 of the present application;

[0054] Figure 17 A schematic diagram of the upper cavity provided in Embodiment 1 of the present application;

[0055] Figure 18 A schematic diagram of the upper cavity provided in Embodiment 1 of the present application; Figure 17 A partial enlarged view of Part C in FIG. 8;

[0056] Figure 19 A schematic diagram of the uniform flow assembly and the wedge-shaped block provided in Embodiment 1 of the present application;

[0057] Figure 20a A schematic diagram of the uniform flow assembly and the wedge-shaped block provided in Embodiment 1 of the present application; Figure 20b A schematic diagram of the uniform flow assembly and the wedge-shaped block provided in Embodiment 1 of the present application;

[0058] Figure 21 A schematic diagram of the annular air guide plate and the porous plate provided in Embodiment 1 of the present application;

[0059] Figure 22 A partial enlarged view of the sintered mesh provided in Embodiment 1 of the present application;

[0060] Figure 23 A partial enlarged view of Part D in FIG. 8; Figure 22 A partial enlarged view of Part D in FIG. 8;

[0061] Figure 24 A partial enlarged view of the porous structure of the porous plate provided in Embodiment 1 of the present application;

[0062] Figure 25 A schematic diagram of the sealing strip provided in Embodiment 1 of the present application;

[0063] Figure 26 A schematic diagram of the internal structure of the upper cavity provided in Embodiment 1 of the present application;

[0064] Figure 27 A schematic diagram of the internal structure of the upper cavity provided in Embodiment 1 of the present application; Figure 26 A schematic diagram of the internal structure of the upper cavity provided in Embodiment 1 of the present application;

[0065] Figure 28 for Figure 27 a partial enlarged view of the F portion in the middle;

[0066] Figure 29 a cross-sectional structure schematic diagram of the first body of the upper cavity and the lower cavity nested in the second body for one embodiment in the embodiment 1 of the present application;

[0067] Figure 30 a three-dimensional structure schematic diagram of the first body of the upper cavity for one embodiment in the embodiment 1 of the present application;

[0068] Figure 31 a three-dimensional structure schematic diagram of the second body of the upper cavity for one embodiment in the embodiment 1 of the present application;

[0069] Figure 32 a three-dimensional structure schematic diagram of the first body of the lower cavity for one embodiment in the embodiment 1 of the present application;

[0070] Figure 33 a three-dimensional structure schematic diagram of the second body of the lower cavity for one embodiment in the embodiment 1 of the present application;

[0071] Figure 34 a bottom view structure schematic diagram of the first body of the upper cavity nested in the second body of the upper cavity for another embodiment in the embodiment 1 of the present application;

[0072] Figure 35 a top view structure schematic diagram of the first body of the lower cavity nested in the second body of the upper cavity for another embodiment in the embodiment 1 of the present application;

[0073] Figure 36 a front view structure schematic diagram of the first body and the second body of the upper cavity and the lower cavity being integrally formed for the embodiment 1 of the present application;

[0074] Figure 37 a three-dimensional structure schematic diagram of the upper cavity and the lower cavity of the drying device for drying the substrate using the supercritical fluid when being opened for the embodiment 2 of the present application;

[0075] Figure 38 a three-dimensional structure schematic diagram of the upper cavity and the lower cavity of the drying device for drying the substrate using the supercritical fluid when being completely contacted, the locking mechanism not locking the connecting assembly for the embodiment 2 of the present application;

[0076] Figure 39 a three-dimensional structure schematic diagram of the upper cavity and the lower cavity of the drying device for drying the substrate using the supercritical fluid when being completely contacted, the locking mechanism locking the connecting assembly for the embodiment 2 of the present application;

[0077] Figure 40 This is a three-dimensional structural diagram of the connector provided in Embodiment 2 of the present invention when the first end is fixed to the lower cavity;

[0078] Figure 41 This is a three-dimensional structural diagram of the drying apparatus for drying a substrate using supercritical fluid, provided in Embodiment 3 of the present invention, when the upper and lower cavities are closed to form a sealed chamber.

[0079] Figure 42 This is a schematic cross-sectional view of the drying apparatus for drying a substrate using supercritical fluid provided in Embodiment 3 of the present invention when the upper and lower cavities are closed to form a sealed chamber.

[0080] Figure 43 for Figure 42 A magnified view of part G in the middle;

[0081] Figure 44 This is a flowchart of the oxygen concentration detection process in the method for drying a substrate using supercritical fluid provided in Embodiment 3 of the present invention;

[0082] Figure 45 and Figure 46 This is a flowchart of the method for drying a substrate using supercritical fluid provided in Embodiment 3 of the present invention for detecting the concentration of isopropanol;

[0083] Figure 47a and Figure 47b This is a view showing the pressure change over time within a sealed cavity provided in Embodiment 3 of the present invention;

[0084] Figure 48 This is a three-dimensional structural diagram of the assembly fixture provided in Embodiment 5 of the present invention when it is fixed to the upper cavity;

[0085] Figure 49 This is a partial enlarged view of the positioning part of the assembly fixture provided in Embodiment 5 of the present invention before it is aligned with the connecting part;

[0086] Figure 50 This is a partial enlarged view of the positioning part of the assembly fixture provided in Embodiment 5 of the present invention after it is aligned with the connecting member;

[0087] Figure 51 This is a three-dimensional structural diagram from another perspective when the assembly fixture provided in Embodiment 5 of the present invention is fixed to the upper cavity;

[0088] Figure 52 This is a top view of the assembly tooling positioning connector provided in Embodiment 5 of the present invention; and

[0089] Figure 53This is a top view of the assembly tooling positioning connector provided in Embodiment 5 of the present invention. Detailed Implementation

[0090] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. Although the description of the present invention is presented in conjunction with preferred embodiments, this does not mean that the features of the invention are limited to these embodiments. On the contrary, the purpose of describing the invention in conjunction with embodiments is to cover other options or modifications that may be derived based on the claims of the present invention. To provide a deep understanding of the invention, many specific details will be included in the following description. The invention may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of the invention, some specific details will be omitted in the description. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of the present invention can be combined with each other.

[0091] It should be noted that in this specification, similar reference numerals and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0092] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0093] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0094] In the description of the present application, it should be noted that unless specifically defined and limited otherwise, the terms "mounting", "connected", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, or internal communication of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0095] In order to make the purpose, technical scheme and advantages of the present application clearer, the embodiments of the present application will be further described in detail below with reference to the drawings.

[0096] Embodiment 1:

[0097] Referring to Figure 1 , the present application provides a drying device for drying a substrate using supercritical fluid, which comprises an upper cavity 100, a lower cavity 200, a lifting mechanism 300, a substrate tray 230 (please refer to the substrate tray 230 in Figure 3 ), a connecting assembly and a locking mechanism 123. The lower cavity 200 is arranged below the upper cavity 100, the lifting mechanism 300 is arranged below the lower cavity 200 and is used to drive the lower cavity 200 to move along the vertical direction H, the substrate tray 230 is arranged in the lower cavity 200 and is used to carry the substrate, the connecting assembly connects the upper cavity 100 and the lower cavity 200, and the locking mechanism 123 is used to lock or release the connecting assembly.

[0098] When the lifting mechanism 300 lifts the lower cavity 200 to move upward, the lower cavity 200 is in full contact with the upper cavity 100, the locking mechanism 123 locks the connecting assembly in the horizontal direction L, and a gap is formed between the locking mechanism 123 and the connecting assembly in the vertical direction H. When the lifting mechanism 300 withdraws the lower cavity 200, the locking mechanism 123 and the connecting assembly automatically contact each other without gap in the vertical direction H, and the upper cavity 100 and the lower cavity 200 are closed to form a sealed cavity 120 (please refer to the sealed cavity 120 in Figure 12 ).

[0099] When it is necessary to open the sealed cavity 120, the lifting mechanism 300 first lifts the lower cavity 200 to move upward, the gap is formed again between the locking mechanism 123 and the connecting assembly in the vertical direction H, the locking mechanism 123 slides in the horizontal direction L to release the connecting assembly, and then the lifting mechanism 300 lifts the lower cavity 200 to move downward.

[0100] Referring to Figure 2The jacking mechanism 300 includes a jacking platform 310, a transmission device, and a driving device 320. The jacking platform 310 is arranged below the lower cavity 200 and is used to lift the lower cavity 200. The lower cavity 200 is provided with a guide shaft 240 (see the guide shaft 240 in Figure 51 The jacking platform 310 is provided with a flexible pad 311 and a linear bearing 312. The linear bearing 312 cooperates with the guide shaft 240, so that the position of the lower cavity 200 will not deviate during the lifting movement of the jacking mechanism 300. The flexible pad 311 can be made of PTFE material and is in contact with the lower cavity 200, and is used to fine-tune the parallelism of the lower cavity 200 when the lower cavity 200 and the upper cavity 100 are closed. In other embodiments, the flexible pad 311 can be replaced by a universal shaft. The transmission device includes a lead screw 330, a synchronous pulley, and a synchronous belt 340, and the driving device 320 can be a servo motor. Specifically, the output end of the servo motor is connected to the synchronous pulley, and the synchronous belt 340 is connected to the synchronous pulley at one end of the lead screw 330. The servo motor drives the lead screw 330 to move linearly through the synchronous pulley and the synchronous belt 340, and the linear guide rail 350 is used as a guide to realize the lifting of the jacking platform 310.

[0101] In some embodiments, the jacking mechanism 300 includes a six-degree-of-freedom robot platform, a gear lead screw transmission mechanism, a servo hydraulic system, an electric cylinder, or an air cylinder.

[0102] Referring to Figure 3 The jacking mechanism 300 is, for example, a six-degree-of-freedom robot platform, which includes an upper platform 361, a lower platform 362, telescopic cylinders 363, and a hooke joint 364. The lower cavity 200 is arranged on the upper platform 361 of the six-degree-of-freedom robot platform, and the lower cavity 200 can be provided with a guide shaft 240. The upper platform 361 can be provided with a linear bearing (not shown in the figure) that cooperates with the guide shaft 240. The upper platform 361 and the lower platform 362 are connected through the six telescopic cylinders 363 and the hooke joint 364. The hooke joint 364 is located at the connection between the upper platform 361 and the lower platform 362 connected by the telescopic cylinders 363. Through the coordinated action of the six telescopic cylinders 363, the lifting of the lower cavity 200 in the vertical direction is realized. During the lifting of the lower cavity 200 by the six-degree-of-freedom robot platform, the coordinated action of the six telescopic cylinders 363 can ensure the parallelism of the upper platform 361 and the lower platform 362, and thus ensure the parallelism of the lower cavity 200.

[0103] In combination with Figure 4a and 4bThe lifting mechanism 300 is, for example, a gear screw drive mechanism, which includes a lifting platform 371, a driving motor 372, a driving wheel 373, a driven wheel 374, a screw rod 375, a nut 376, an outer support ring 377, and a base 378. The working principle of the gear screw drive mechanism for lifting the lower cavity 200 is as follows: the lower cavity 200 is arranged on the lifting platform 371, the lifting platform 371 is provided with a flexible pad 379 for contacting the lower cavity 200, the flexible pad 379 can be made of PTFE material, the lower cavity 200 is provided with a guide shaft 240 at the bottom, and a linear bearing (not shown in the figure) matched with the guide shaft 240 is arranged on the lifting platform 371, the driving motor 372 drives the driving wheel 373 to rotate, the driving wheel 373 drives the driven wheel 374 to rotate through meshing, the linkage screw rod 375 rotates, the nut 376 converts the rotation of the screw rod 375 into linear motion, the lifting platform 371 is connected with the nut 376 through the outer support ring 377 to realize corresponding linear motion, and the lower cavity 200 moves linearly together with the lifting platform 371.

[0104] Reference Figure 2 The drying device further includes a support member 500 for supporting the substrate w (see the substrate w in Figure 12 , and loading or unloading the substrate w on or from the substrate tray 230.

[0105] In combination Figure 5a to Figure 5d The connecting assembly includes a connecting member 111 and a fixing member, the upper cavity 100 is provided with a through hole 1001, the lower cavity 200 is provided with a through hole 2001, the connecting member 111 penetrates through the upper cavity 100 and the lower cavity 200 through the through hole 1001 of the upper cavity 100 and the through hole 2001 of the lower cavity 200, the first end 1101 of the connecting member 111 is fixed to the lower cavity 200 through the fixing member, and the second end 1102 of the connecting member 111 is in automatic contact or forms a gap with the locking mechanism 123 in the vertical direction H.

[0106] The locking mechanism 123 is arranged on the upper cavity 100, and the locking mechanism 123 includes a first driving part 121, a first locking block 131, a second driving part 122, and a second locking block 132 located on both sides of the connecting member 111, the first driving part 121 drives the first locking block 131, the second driving part 122 drives the second locking block 132, and the first locking block 131 and the second locking block 132 are relatively moved or moved away from each other along the horizontal direction L1 to lock or release the connecting assembly. In the embodiment, the first locking block 131 and the second locking block 132 have the same structure, the first locking block 131 has a self-locking surface 1303, and the second locking block 132 has a self-locking surface 1304. The first driving part 121 and the second driving part 122 can both be air cylinders.

[0107] Specifically, the connecting piece 111 is a screw rod, a fixing piece is clamped with the first end 1101 of the screw rod and is fixed to the bottom of the lower cavity 200. Specifically, the fixing piece includes a U-shaped clamp 112 and a screw 113. The first end 1101 of the screw rod is provided with two opposite clamping grooves 1111. After the first end 1101 of the screw rod passes through the bottom of the lower cavity 200, the U-shaped clamp 112 is clamped in the two clamping grooves 1111, and the opening of the U-shaped clamp 112 faces outward. The U-shaped clamp 112 has a threaded hole, and the screw 113 passes through the threaded hole to fix the U-shaped clamp 112 to the bottom of the lower cavity 200. The first end 1101 of the screw rod is fixed to the lower cavity 200 through the U-shaped clamp 112 and the screw 113. This connection mode of fixing the screw rod to the lower cavity 200 is reliable in structure, and the first end 1101 of the screw rod can withstand a large local stress, so that the fatigue life of the screw rod is long. The second end 1102 of the screw rod is a screw cap, and the bottom of the screw cap is provided with a self-locking surface 1103. When the upper cavity 100 and the lower cavity 200 are closed to form the sealed cavity 120, the self-locking surface 1103 of the screw rod is in complete contact with the self-locking surfaces (1303, 1304) of the first lock block 131 and the second lock block 132 in the vertical direction H without any gap.

[0108] In the embodiment, four connecting assemblies are arranged, which are respectively located at four corners of the upper cavity 100 and the lower cavity 200. In other embodiments, the connecting assemblies can also be six, and the number of the connecting assemblies is not limited in the application.

[0109] Specifically, in combination with Figure 5a to Figure 10 After the substrate w is placed on the support 500 in the I direction and then placed on the substrate tray 230, the lower cavity 200 is withdrawn, the upper cavity 100 is fixed on the frame 400 and does not move, the driving device 320 drives the lifting platform 310 to lift the lower cavity 200 upward, so that the lower cavity 200 moves upward along the vertical direction H until the lower cavity 200 is in complete contact with the upper cavity 100 (as shown in Figure 7 Then, the first driving part 121 and the second driving part 122 on both sides of the screw rod drive the first lock block 131 and the second lock block 132 to move relatively along the horizontal direction L1 on the top wall surface of the upper cavity 100, so as to lock the screw rod (as shown in Figure 8a and Figure 9 At this time, gaps are formed between the self-locking surfaces (1303, 1304) of the first lock block 131 and the second lock block 132 and the self-locking surface 1103 of the screw rod. After the lifting platform 310 is lowered away from the bottom 201 of the lower cavity 200 (as shown in Figure 10As shown, due to the downward deformation of the lower cavity 200 or its own gravity, and the effect of the elastic seal between the upper cavity 100 and the lower cavity 200, the upper cavity 100 and the lower cavity 200 rebound. The self-locking surfaces (1303, 1304) of the first locking block 131 and the second locking block 132 are in complete contact with the self-locking surface 1103 of the screw without any gap (that is, the locking mechanism 123 and the connecting assembly automatically contact each other in the vertical direction). The upper cavity 100 and the lower cavity 200 close to form a sealed chamber 120. At this time, the first locking block 131 and the second locking block 132 are tightly engaged with the screw, ensuring the pressure resistance and sealing performance of the sealed chamber 120.

[0110] Similarly, when the sealed chamber 120 is to be opened, the drive device 320 drives the lifting platform 310 to move upward. When the lifting platform 310 contacts the lower cavity 200 and lifts the lower cavity 200 upward, so that the lower cavity 200 and the upper cavity 100 are in complete contact again, the self-locking surfaces (1303, 1304) of the first locking block 131 and the second locking block 132 and the self-locking surface 1103 of the screw are separated again, so that the first locking block 131 and the second locking block 132 can slide out smoothly. Then, the first drive unit 121 and the second drive unit 122 respectively drive the first locking block 131 and the second locking block 132 to move away from the screw in the horizontal direction L1 on the top wall of the upper cavity 100 to release the screw. Then, the drive device 320 drives the lifting platform 310 to lift the lower cavity 200 downward, and the sealed chamber 120 is opened.

[0111] In this embodiment, the horizontal direction L1 of the locking screws of the first locking block 131 and the second locking block 132 is parallel to the longitudinal direction L2 of the two slots 1111. In other alternative embodiments, the horizontal direction L1 of the locking screws of the first locking block 131 and the second locking block 132 is perpendicular to the longitudinal direction L2 of the two slots 1111. For both embodiments, when the substrate is dried in the drying device, the stress magnitude at the position corresponding to the first locking block 131 and the second locking block 132 on the screw is basically the same as the stress magnitude at the position corresponding to the U-shaped clamp 112.

[0112] In this embodiment, the horizontal direction L1 is the length direction of the upper cavity 100, and the horizontal direction of the locking screws of the first locking block 131 and the second locking block 132 is the same as the length direction of the upper cavity 100. In other alternative embodiments, the horizontal direction of the locking screws of the first locking block 131 and the second locking block 132 can also be the diagonal direction of the upper cavity 100. For example, the first driving part 121 and the second driving part 122 on both sides of the screw respectively drive the first locking block 131 and the second locking block 132 to move relative to each other or backwards along the diagonal direction of the upper cavity 100 on the top wall of the upper cavity 100 to lock or loosen the screw. Correspondingly, the length direction L2 of the two slots 1111 can be adjusted adaptively.

[0113] As Figure 8a to Figure 9 , the drying device further comprises a sensor 290 configured to determine whether the upper cavity 100 and the lower cavity 200 are closed (completely contacted) by detecting the distance between the upper cavity 100 and the lower cavity 200. As Figure 8b shown, in the present embodiment, the sensor 290 is an eddy current displacement sensor, which comprises a probe 291 and a measured body 292. The measured body 292 is a metal conductor. The probe 291 is fixed to one of the side walls of the lower cavity 200, and the measured body 292 is fixed to one of the side walls of the upper cavity 100. The measured body 292 corresponds to the probe 291 vertically. During the process of driving the lifting platform 310 to lift the lower cavity 200 upward by the driving device 320, the eddy current displacement sensor accurately measures the distance between the measured body 292 and the end face of the probe 291 by the principle of eddy current effect, so as to obtain the distance between the upper cavity 100 and the lower cavity 200, and further determine whether the elastic sealing member (for example, the inner sealing ring 210 in Figure 11 ) between the upper cavity 100 and the lower cavity 200 is compressed. If yes, it indicates that the upper cavity 100 and the lower cavity 200 are closed (completely contacted), and then the first driving part 121 and the second driving part 122 drive the first locking block 131 and the second locking block 132 to lock the connecting part 111, respectively. If not, it indicates that the upper cavity 100 and the lower cavity 200 are not closed, and the driving device 320 drives the lifting platform 310 to continue to lift the lower cavity 200 upward.

[0114] In combination Figure 11 to Figure 13 , the above-mentioned elastic sealing member is specifically the inner sealing ring 210 and the outer sealing ring 220. The inner sealing ring 210 and the outer sealing ring 220 are arranged around the base plate tray 230 in sequence, and are used to seal the sealed cavity 120 when the lower cavity 200 and the upper cavity 100 are relatively moved to be closed into the sealed cavity 120.

[0115] The longitudinal section of the inner sealing ring 210 is in the shape of U, and the inner sealing ring 210 is internally provided with a spring 211. When the upper cavity 100 and the lower cavity 200 are closed, the inner sealing ring 210 is tightly attached to the upper cavity 100 and the lower cavity 200 by the internal spring 211, achieving preliminary sealing. When the sealed cavity 120 is detected to have no leakage, the supercritical fluid is introduced, and the high-pressure gas in the sealed cavity 120 enters and presses the inside of the U-shaped opening of the inner sealing ring 210, so that the upper and lower ends of the U-shaped opening of the inner sealing ring 210 are deformed and pressed toward at least one of the upper cavity 100 and the lower cavity 200, and the inner sealing ring 210 is further attached to the upper cavity 100 and the lower cavity 200. Even if the upper cavity 100 and the lower cavity 200 are slightly deformed, the elastic inner sealing ring 210 and the outer sealing ring 220 can ensure good sealing of the sealed cavity 120.

[0116] As shown in Figure 13 , the inner sealing ring 210 includes a front part 2101 and a rear part 2102, the front part 2101 of the inner sealing ring 210 is made of PTFE material, and the rear part 2102 of the inner sealing ring 210 is made of PEEK material, which has higher hardness and can resist greater pressure.

[0117] As shown in Figure 11 , when the upper cavity 100 and the lower cavity 200 are closed to form the sealed cavity 120, a cavity (not shown in the figure) is formed between the inner sealing ring 210 and the outer sealing ring 220. The vacuum pipeline 140 is communicated with the cavity through the vacuum inlet 104 provided on the top wall of the upper cavity 100 to vacuumize the cavity. The pressure detection piece 141 is provided on the vacuum pipeline 140, which is a pressure sensor for example. When the pressure detected by the pressure sensor reaches the target pressure, it means that the sealing is completed, at which time the supercritical fluid can be provided into the sealed cavity 120.

[0118] The pressure sensor is in communication connection with the upper computer (not shown in the figure) to transmit the pressure signal of the cavity between the inner sealing ring 210 and the outer sealing ring 220 detected by the pressure sensor to the upper computer. During the use of the pressure sensor, when the pressure sensor pressure received by the upper computer has a significant change, the vacuumization is stopped. After the vacuumization is stopped, if the pressure sensor pressure received by the upper computer slightly rises and is less than or equal to the atmospheric pressure, the upper computer judges that the sealing performance of the outer sealing ring 220 is invalid, at which time it does not affect the drying process in the sealed cavity 120, and the outer sealing ring 220 can be maintained after the current drying process is completed.

[0119] After the vacuumization is stopped, if the pressure sensor pressure received by the upper computer is greater than the atmospheric pressure, the upper computer judges that the inner sealing ring 210 is invalid. The leaked supercritical fluid is discharged from the one-way pipeline 150 provided with the one-way valve 151 and the fluid discharge pipe 163 (please refer to the fluid discharge pipe 163 in Figure 14 ). At this time, the drying process is stopped, and when the pressure in the sealed cavity 120 reaches the atmospheric pressure state, the inner sealing ring 210 can be checked and replaced. The one-way pipeline 150 is communicated with the vacuum inlet 104 and is in parallel connection with the vacuum pipeline 140. In the embodiment, the outlet of the one-way pipeline 150 is combined with the outlet of the fluid discharge pipe 163, and under normal circumstances, the one-way valve 151 of the one-way pipeline 150 can prevent the gas of other discharge pipes, such as the fluid discharge pipe 163, from entering the vacuum pipeline 140.

[0120] After stopping the vacuumizing, if the pressure received by the host computer is greater than the working pressure of the pressure sensor in the safe range, it means that the leakage of supercritical fluid is large. The host computer controls the pneumatic valve 142 on the vacuumizing pipeline 140 to close to protect the pressure sensor. At this time, the drying process stops, and when the pressure in the sealed chamber 120 reaches atmospheric pressure, the inner sealing ring 210 can be checked and replaced.

[0121] In combination with Figure 11 , Figure 14 and Figure 15 , the drying device further comprises a first fluid supply pipe 161, a second fluid supply pipe 162 and a fluid discharge pipe 163.

[0122] The first fluid supply pipe 161 is in communication with the first fluid inlet 101 arranged on the top wall of the upper cavity 100, for supplying supercritical fluid into the sealed chamber 120. The continuous addition of supercritical fluid causes the internal pressure of the sealed chamber 120 to continuously rise, until the sealed chamber 120 is pressurized to above the critical pressure of the supercritical fluid to reach the supercritical state.

[0123] In combination with Figure 11 , Figure 12 and Figure 14 , the spoiler 170 is arranged below the first fluid inlet 101 and between the first fluid inlet 101 and the substrate w, so that the supercritical fluid entering from the first fluid supply pipe 161 and the first fluid inlet 101 reaches the upper surface of the substrate w from the side of the substrate w after bypassing the spoiler 170, effectively buffering the impact force of the supercritical fluid, and avoiding that the supercritical fluid with too large flow rate is directly sprayed onto the upper surface of the substrate w to blow off the IPA on the surface of the substrate w.

[0124] The second fluid supply pipe 162 is in communication with the second fluid inlet 102 arranged on the first side wall of the upper cavity 100 (please refer to the second fluid inlet 102 in Figure 26 ).

[0125] The fluid discharge pipe 163 is in communication with the fluid discharge outlet 103 arranged on the second side wall of the upper cavity 100 (please refer to the fluid discharge outlet 103 in Figure 26 ).

[0126] Wherein, when the first fluid supply pipe 161 is opened, the air inside the closed chamber 120 and the fluid are discharged from the closed chamber 120 through the fluid discharge pipe 163 as the supercritical fluid is supplied, so that the air inside the closed chamber 120 is completely replaced by the fluid. And the amount of supercritical fluid supply is continuously increased, so that the pressure inside the closed chamber 120 rises above the critical pressure. After the closed chamber 120 reaches the supercritical state, the first fluid supply pipe 161 is closed, and the supply of supercritical fluid from above the closed chamber 120 is stopped.

[0127] When the second fluid supply pipe 162 is opened, the supercritical fluid performs drying treatment on the substrate w inside the closed chamber 120, at this time, the fluid discharged by the fluid discharge pipe 163 is supercritical fluid.

[0128] After the drying treatment is completed, the second fluid supply pipe 162 can be closed, and the fluid inside the closed chamber 120 is continuously discharged through the fluid discharge pipe 163, which reduces the internal pressure of the closed chamber 120, so that the supercritical fluid inside the closed chamber 120 becomes gas and is discharged from the closed chamber 120 through the fluid discharge pipe 163 from the fluid discharge outlet 103.

[0129] In combination Figure 14 to Figure 16 , the drying device further comprises a residual gas sampling pipe 164, an analysis device 630 and a controller, the residual gas sampling pipe 164 and the fluid discharge pipe 163 are connected to the fluid discharge outlet 103 through a three-way valve, the analysis device 630 is connected to the residual gas sampling pipe 164, and is used to detect the concentration of the target substance discharged from the closed chamber 120 in real time. The controller is used to control the process parameters of the drying device according to the concentration of the target substance detected by the analysis device 630, and the target substance is oxygen or isopropyl alcohol (IPA).

[0130] Specifically, the analysis device 630 is a residual gas analyzer (RGA), and the controller includes a processing command system 640 and a process control system 650. The supercritical fluid in the residual gas sampling tube 164 enters the vacuum chamber 620 via the sampling system 610. The temperature control system 611 controls the temperature of the sampling system 610 to keep the supercritical fluid in the sampling system 610 in a gaseous state to prevent liquefaction and condensation. Then, the vacuum system 622 evacuates the vacuum chamber 620 to maintain the set vacuum level. The vacuum chamber 620 can be heated, and the temperature control system 621 controls the temperature of the vacuum chamber 620 to keep the supercritical fluid in the vacuum chamber 620 in a gaseous state to prevent liquefaction and condensation. Next, the analysis device 630 performs qualitative and quantitative analysis on the components of the supercritical fluid sample in the vacuum chamber 620 to obtain the concentration of the target substance. The analysis device 630 feeds back the analysis results to the processing command system 640. The processing command system 640 instructs the process control system 650 to adjust the process parameters of the drying device in a timely manner. For example, the process control system 650 maintains, reduces, or increases the pressure inside the sealed chamber 120 by controlling the supply or discharge of supercritical fluid.

[0131] Combination Figure 17 to Figure 20b The drying device also includes a flow equalization component 700, which is disposed inside the upper cavity 100. Wedge blocks 800 are respectively provided at both ends of the flow equalization component 700. The wedge blocks 800 are fixed inside the upper cavity 100 by screws 810. The surfaces of the wedge blocks 800 and the flow equalization component 700 that contact each other are inclined surfaces, and the inclined surfaces 801 of the wedge blocks 800 and 801 of the flow equalization component 700 cooperate with each other, so that the flow equalization component 700 is engaged inside the upper cavity 100 by the wedge blocks 800.

[0132] See Figure 21 The flow equalization assembly 700 includes an annular air guide plate 710 and a perforated plate 720. The annular air guide plate 710 has opposing first side surfaces 701 and second side surfaces 702, and an air guide groove 712 penetrating the first side surface 701 and the second side surface 702. The distance d between the two ends of the air guide groove 712 is greater than the diameter w of the substrate. The perforated plate 720 is welded to the first side surface 701 of the annular air guide plate 710. The perforated plate 720 includes a perforated structure 721, the center of which coincides with the center of the air guide groove 712 of the annular air guide plate 710. The inclined surface 801 of the wedge block 800 cooperates with the inclined surface of the annular air guide plate 710 of the flow equalization assembly 700.

[0133] The perforated plate 720 can be welded together from the body of the perforated plate 720 and a sintered mesh (i.e., the perforated structure 721). The body of the perforated plate 720 can be a stainless steel plate, and the local structure of the sintered mesh is as follows: Figure 22 and Figure 23The sintering net adopts the existing five-layer sintering net, which is generally a five-layer structure and is divided into five parts, i.e., a protective layer, a filtration control layer, a dispersion layer, a support skeleton layer and a skeleton layer, and has uniform and stable filtration precision and high strength and rigidity.

[0134] The porous plate 720 can also be integrally machined, i.e., the body of the porous plate 720 and the porous structure 721 are integrally formed. The body of the porous plate 720 can be made of stainless steel material. A partial enlarged view of the porous structure 721 is shown in FIG. 7B. Figure 24

[0135] The use of the porous plate 720 can improve the uniformity of the supercritical fluid flow rate, reduce the fluid turbulence inside the closed chamber 120, and achieve the purpose of uniform and uniform flow of the supercritical fluid over the upper surface of the substrate w. Therefore, the uniform flow assembly 700 is arranged in the upper cavity 100, which can make the supercritical fluid distribution more uniform.

[0136] In combination with Figure 21 and Figure 25 , the uniform flow assembly 700 further includes a sealing strip 730 arranged on the second side surface 702 of the annular air guide plate 710 to seal between the annular air guide plate 710 and the inner side wall of the upper cavity 100. More specifically, the sealing strip 730 is arranged in the annular groove 713 of the second side surface 702 of the annular air guide plate 710. The sealing strip 730 is provided with an annular opening 731 for the supercritical fluid to pass through, and the annular opening 731 extends along the length direction of the sealing strip 730. The use of the sealing strip 730 can improve the fit between the annular air guide plate 710 and the inner side wall of the upper cavity 100, achieving a sealing effect. The material of the sealing strip 730 is PTFE material.

[0137] In combination with Figure 26 to Figure 28 , the supercritical fluid enters from the second fluid inlet 102 and is uniformly distributed on the upper surface of the substrate w in sequence through the plurality of flow supply holes 180 and the uniform flow assembly 700. After the supercritical fluid uniformly flows over the upper surface of the substrate w, it continues to flow out of the closed chamber 120 through the plurality of discharge holes 190 and the fluid discharge outlet 103.

[0138] When the supercritical fluid passes through the uniform flow assembly 700, it passes through the sealing strip 730, the annular air guide plate 710 and the porous plate 720 in sequence, and then is uniformly distributed on the upper surface of the substrate w.

[0139] ​A plurality of flow supply holes 180 are arranged in the upper cavity 100 and are horizontally distributed. Each flow supply hole 180 includes an air inlet and an air outlet. The air inlets of the flow supply holes 180 are communicated with the second fluid inlet 102, and the air outlets of the flow supply holes 180 are communicated with the flow uniformizing assembly 700. The second fluid inlet 102 is located at the middle of the first side wall of the upper cavity 100. The flow rate of the supercritical fluid at the position of the second fluid inlet 102 is the largest. In order to make the flow rate of the supercritical fluid in the closed chamber 120 uniform, the plurality of flow supply holes 180 are arranged away from the center line of the first side wall, that is, the distance d1 between two adjacent flow supply holes 180 close to the second fluid inlet 102 is greater than the distance d2 between a flow supply hole 180 far from the second fluid inlet 102 and a flow supply hole 180 adjacent to the flow supply hole 180 far from the second fluid inlet 102, so that the supercritical fluid can enter the closed chamber 120 at a uniform speed. The cross-sectional area of the air inlet of each flow supply hole 180 is greater than or equal to the cross-sectional area of the air outlet. In the embodiment, the number of flow supply holes 180 is four. In actual demand design, the diameter of the flow supply hole 180 can be reduced as much as possible, and the number of flow supply holes 180 can be increased.

[0140] At present, the upper cavity and the lower cavity generally only use nickel-based materials. In the embodiment, the part of the upper cavity and the lower cavity that is closed to form the closed chamber uses a stainless steel material, and the part using the stainless steel material is subjected to electrochemical polishing treatment. The stainless steel material is more conducive to electrochemical polishing treatment than the nickel-based material.

[0141] In one embodiment, in combination with Figure 29 to Figure 33 The upper cavity 100A and the lower cavity 200A respectively include a first body (1010A, 2010A) and a second body (1020A, 2020A). When the upper cavity 100A and the lower cavity 200A are closed, the first body 1010A of the upper cavity 100A and the first body 2010A of the lower cavity 200A form a closed chamber 120A. The first body (1010A, 2010A) is nested in the second body (1020A, 2020A). The first body (1010A, 2010A) uses a stainless steel material, and the second body (1020A, 2020A) uses a nickel-based material.

[0142] As Figure 30 The first body 1010A of the upper cavity 100A includes a plurality of flow supply holes, a plurality of exhaust holes, a first fluid inlet 101A, and a vacuumizing inlet 104A. As Figure 31The second body 1020A of the upper cavity 100A is provided with an upper cavity accommodating groove 1023A for accommodating the first body 1010A, a passage 1024A for the first fluid inlet 101A to pass through, and a passage 1025A for the vacuumizing inlet 104A to pass through. The first body 1010A of the upper cavity 100A can be fixed to the second body 1020A by fasteners 1011A. The first body 1010A can include four fixing portions 1014A, each of which is provided with at least one first fixing hole 1012A. The second body 1020A is provided with at least one second fixing hole 1022A corresponding to the positions of the four fixing portions 1014A. The fasteners 1011A fix the first body 1010A to the second body 1020A through the first fixing holes 1012A and the second fixing holes 1022A. The first body 1010A of the upper cavity 100A can also be fixed to the second body 1020A by welding.

[0143] As shown in Figure 32 , the first body 2010A of the lower cavity 200A includes a substrate tray 230A, an inner annular groove 2014A and an outer annular groove 2015A for placing an inner sealing ring and an outer sealing ring (see the inner sealing ring 210 and the outer sealing ring 220 in Figure 11 As shown in Figure 33 , the second body 2020A of the lower cavity 200A is provided with a lower cavity accommodating groove 2023A for accommodating the first body 2010A. The fixing manner between the first body 2010A and the second body 2020A of the lower cavity 200A is the same as that of the upper cavity 100A, wherein the first body 2010A of the lower cavity 200A can include two oppositely arranged fixing portions 2012A.

[0144] In combination with Figure 34 and Figure 35 , another embodiment of the first body (1010B, 2010B) of the upper cavity 100B and the lower cavity 200B nested in the second body (1020B, 2020B) is provided. In this embodiment, the middle part of the upper cavity 100B and the lower cavity 200B, which is basically the part in contact with the supercritical fluid, is replaced with stainless steel material. The middle part of the upper cavity 100B is the first body 1010B, and the middle part of the lower cavity 200B is the first body 2010B. The first body (1010B, 2010B) is made of stainless steel material, and the second body (1020B, 2020B) is made of nickel-based material.

[0145] As shown in Figure 34 , the shaded part represents the first body 1010B of the upper cavity 100B. As shown in Figure 35 , the shaded part represents the first body 2010B of the lower cavity 200B.

[0146] Referring to Figure 36 , an embodiment is provided in which the first body (1010C, 2010C) and the second body (1020C, 2020C) of the upper cavity 100C and the lower cavity 200C are integrally formed. In this embodiment, the upper cavity 100C and the lower cavity 200C each have two layers, the first body (1010C, 2010C) is a stainless steel layer, and the second body (1020C, 2020C) is a nickel-based layer. The first body (1010C, 2010C) and the second body (1020C, 2020C) are integrally formed by atomic combination of the nickel-based layer and the stainless steel layer through explosive integration material composite technology.

[0147] It is understood by those skilled in the art that, in other alternative embodiments, the first body and the second body of the upper cavity and the lower cavity can be made of the same material under the condition of ensuring the strength of the upper cavity and the lower cavity.

[0148] Example 2

[0149] Referring to Figure 37 to Figure 40 , this embodiment 2 also provides a drying device for drying a substrate using a supercritical fluid. The difference between this embodiment 2 and the embodiment 1 is that:

[0150] The connecting piece 111' of the connecting assembly is a bolt, which has threads (not shown in the figure) itself. The fixing piece of the connecting assembly includes a nut 112'. The first end of the bolt is threadedly connected with the lower cavity 200 and penetrates through the bottom of the lower cavity 200. The nut 112' is threadedly connected with the first end of the bolt at the bottom of the lower cavity 200.

[0151] The other settings of this embodiment and the connection mode thereof are the same as those of the embodiment 1, and thus will not be described herein again.

[0152] Example 3

[0153] In combination Figure 41 to Figure 43 , this embodiment 3 also provides another drying device for drying a substrate using a supercritical fluid. The difference between this embodiment 3 and the embodiment 1 or the embodiment 2 is that:

[0154] The drying device further includes a gas discharge pipe 165 and a flow meter 167. The gas discharge pipe 165 and the first fluid supply pipe 161 are respectively and independently communicated with the first fluid inlet 101 of the top wall of the upper cavity 100. The flow meter 167 is arranged in the gas discharge pipe 165 and is used to detect the flow rate of the gas in the gas discharge pipe 165.

[0155] In combination Figure 16 , Figure 41 to Figure 47b, based on the above drying apparatus, the present embodiment 3 provides a method for drying a substrate using supercritical fluid, the drying method comprising the following steps:

[0156] Step S1: placing the substrate w to be dried on the substrate tray 230, and moving the lower cavity 200 and the upper cavity 100 in the vertical direction to close the pressure-resistant sealed cavity 120;

[0157] Step S2: supplying supercritical fluid from the first fluid inlet 101 above the sealed cavity 120 through the first fluid supply pipe 161, and the fluid reaches the upper surface of the substrate w from the side of the substrate w after bypassing the spoiler 170 below the first fluid inlet 101, and stops supplying supercritical fluid from above the sealed cavity 120 after the pressure value inside the sealed cavity 120 reaches the set pressure value; the pressure value inside the sealed cavity 120 reaching the set pressure value represents that the sealed cavity 120 is pressurized to above the critical pressure of the supercritical fluid to reach the supercritical state.

[0158] Step S3: supplying supercritical fluid from the second fluid inlet 102 of the first side wall of the sealed cavity 120 through the second fluid supply pipe 162, so that the supercritical fluid replaces the isopropyl alcohol (IPA) covering the surface of the substrate w, and the surface of the substrate w inside the sealed cavity 120 is subjected to drying treatment, and the treated supercritical fluid is discharged through the fluid discharge outlet 103 of the second side wall of the sealed cavity.

[0159] Step S4: after the drying treatment is completed, the second fluid inlet 102 and the fluid discharge outlet 103 are closed, the internal pressure of the sealed cavity 120 is reduced, and the supercritical fluid is changed into gas and uniformly discharged from the sealed cavity 120 at a predetermined speed through the first fluid inlet 101 above the sealed cavity 120 by bypassing the spoiler 170, the first fluid inlet 101 is connected with the gas discharge pipe 165, so that the gas is discharged from the gas discharge pipe 165. Figure 43 In the present embodiment, the dashed arrow represents the discharge direction of the supercritical fluid changed into gas in the sealed cavity 120.

[0160] For the discharge mode of the supercritical fluid changed into gas, it is usually discharged from the fluid discharge outlet 103 of the second side wall of the upper cavity 100 through the fluid discharge pipe 163 to discharge the sealed cavity 120, but when the gas passes through the surface of the substrate w towards the fluid discharge outlet 103 to discharge horizontally, the high-speed airflow is easy to pull down the pattern structure at the edge of the substrate w.

[0161] Therefore, in the embodiment, the discharging manner of the gas is changed so that the supercritical fluid becomes gas and is discharged uniformly at a predetermined speed upward from the first fluid inlet 101 of the top wall of the upper cavity 100 and the gas discharging pipe 165 to bypass the edge of the spoiler 170, and the pattern structure at the edge of the substrate w can be prevented from being pulled down by the high-speed horizontal gas flow to a certain extent because the discharging direction of the high-speed gas flow changes from horizontal to upward when reaching the edge of the substrate w.

[0162] Step S5: When the internal pressure of the sealed cavity 120 reaches the atmospheric pressure state, the sealed cavity 120 is opened and the substrate w is taken out.

[0163] In the embodiment, the supercritical fluid is supercritical carbon dioxide.

[0164] As Figure 44 Before step S2, the following steps are further included:

[0165] S201: Remove oxygen in the sealed cavity 120;

[0166] S202: The analysis device 630 detects the oxygen concentration in the sealed cavity 120 in real time through the residual gas sampling pipe 164 from the fluid discharge outlet 103 of the second side wall of the sealed cavity 120;

[0167] S203: Determine whether the oxygen concentration is lower than the set value of the oxygen concentration;

[0168] If yes, go to step S2, that is, the process command system 640 instructs the process control system 650 to control the first fluid supply pipe 161 to supply the supercritical fluid to the inside of the sealed cavity 120;

[0169] If no, return to step S201.

[0170] By controlling the oxygen concentration before the drying process, the substrate w can be prevented from being corroded in the subsequent process.

[0171] In step S3, the concentration of isopropyl alcohol (IPA) is detected in real time to understand the drying condition in the sealed cavity 120 in real time. Therefore, step S3 further includes: adjusting the pressure in the sealed cavity 120 according to the concentration of isopropyl alcohol detected by the analysis device 630 from the fluid discharge outlet 103 of the second side wall of the sealed cavity 120 in real time, so that the pressure difference between the highest pressure value and the lowest pressure value of the pressure in the sealed cavity 120 is constant or gradually increases.

[0172] As Figure 45When the pressure reaches the set pressure value P1, the flow drying process is kept at the set pressure value P1, the analyzer 630 detects the isopropyl alcohol (IPA) concentration in real time, and the drying process ends when the IPA concentration is less than the final set value Ax%. The process command system 640 commands the process control system 650 to timely adjust the process parameters of the drying device, for example, to enter step S4 to reduce the internal pressure of the closed chamber 120 and perform pressure relief processing.

[0173] Alternatively, as Figure 46 When the isopropyl alcohol (IPA) concentration detected by the analyzer 630 is less than the initial concentration set value A1%, the internal pressure of the closed chamber 120 is reduced to the set pressure value P2. When the IPA concentration detected by the analyzer 630 is less than the concentration set value A2%, the internal pressure of the closed chamber 120 is increased to the set pressure value P1. When the IPA concentration detected by the analyzer 630 is less than the concentration set value A3%, the internal pressure of the closed chamber 120 is reduced to the set pressure value P3. When the IPA concentration detected by the analyzer 630 is less than the concentration set value A4%, the internal pressure of the closed chamber 120 is increased to the set pressure value P1. When the IPA concentration detected by the analyzer 630 is less than the concentration set value A5%, the internal pressure of the closed chamber 120 is reduced to the set pressure value P4. This cycle continues until the IPA concentration detected by the analyzer 630 is less than the final set value Ax%, and the drying process ends. The process command system 640 commands the process control system 650 to timely adjust the process parameters of the drying device, for example, to enter step S4 to reduce the internal pressure of the closed chamber 120 and perform pressure relief processing.

[0174] Among them, as Figure 47a , the set pressure value P2 = the set pressure value P3 = the set pressure value P4 = … = the set pressure value Px, that is, the pressure difference between the highest pressure value and the lowest pressure value in the closed chamber 120 is the same. As Figure 47b , the set pressure value P2 > the set pressure value P3 > the set pressure value P4 > … > the set pressure value Px, that is, the pressure difference between the highest pressure value and the lowest pressure value in the closed chamber 120 gradually increases. The set pressure value Px, that is, the lowest pressure value, is not lower than the supercritical pressure of the supercritical fluid, and P1, P2, …, Px are not lower than the supercritical pressure of the supercritical CO2 and IPA mixture under the measurement conditions. The supercritical pressure of the supercritical CO2 and IPA mixture is different from the supercritical pressure of the supercritical CO2 or the supercritical pressure of IPA.

[0175] By adjusting the internal pressure of the closed chamber 120 through the above steps, the pressure during the drying process is fluctuating, which can efficiently promote the displacement between IPA and the supercritical fluid and improve the process efficiency of the drying process of the substrate w.

[0176] Embodiment 4:

[0177] Referring to Figure 42 and Figure 43 , this embodiment 4 provides another method for drying the substrate using supercritical fluid, the difference between this embodiment 4 and embodiment 3 is that:

[0178] In step S4: After the drying process is completed, in the process of changing the supercritical fluid into gas, the flow rate of the gas in the gas discharge pipe 165 is detected by using the flowmeter 167, so that the gas is first discharged from the closed chamber 120 at a first speed, and after a first predetermined time, the surface of the supercritical fluid reaches the lower surface of the spoiler 170, at this time, in order to avoid the high-speed gas flow from pulling down the pattern structure at the edge position of the substrate w, the discharge speed of the gas is slowed down, so that the gas is discharged from the closed chamber 120 at a second speed, and after a second predetermined time, the surface of the supercritical fluid is lower than the upper surface of the pattern structure of the substrate w, at this time, because the high-speed gas flow is no longer easy to pull down the pattern structure of the substrate w, the discharge speed of the gas can be increased, so that the gas is discharged from the closed chamber 120 at a third speed, and after a third predetermined time, the internal pressure of the closed chamber 120 reaches the atmospheric pressure state, and the gas discharge process is completed.

[0179] In this embodiment, the first speed is greater than the second speed, and the third speed is greater than the second speed, and the first speed and the third speed can be the same or different. According to the position of the surface of the supercritical fluid, different exhaust speeds are set, which can not only avoid the high-speed gas flow from pulling down the pattern structure at the edge position of the substrate w, but also ensure the exhaust efficiency.

[0180] Embodiment 5:

[0181] In combination with Figure 48 to Figure 51 , this embodiment 5 provides an assembly tool for assembling the connecting assembly of the drying device in embodiment 1.

[0182] The assembly tool includes a tool body 910 and a positioning part 920. The tool body 910 is used to be fixed on the upper cavity 100, and the tool body 910 is provided with assembly openings 914, which correspond to the through holes 1001 of the upper cavity 100 and the through holes (the through holes 2001 in embodiment 1 Figure 5a ) of the lower cavity 200 in up and down directions, and the positioning part 920 is movably arranged on the tool body 910. The number of assembly openings 914 is four, which is the same as the number of connecting pieces 111 in the connecting assembly, and the size of the assembly openings 914 is suitable for the connecting pieces 111 to pass through. The number of positioning parts 920 is the same as the number of assembly openings 914.

[0183] When the connecting member 111 is penetrated through the upper cavity 100 and the lower cavity 200 through the assembly opening 914 and the through holes (1001, 2001), the positioning portion 920 is aligned with the mark portion 1112 of the connecting member 111 by moving the positioning portion 920. The positioning portion 920 cooperates with the mark portion 1112, so that the axis of the connecting member 111 coincides with the axis of the through holes of the upper cavity 100 and the lower cavity 200, to achieve accurate positioning of the connecting member 111, facilitate the fixation of the fixing members of the connecting assembly, such as the U-shaped clamp 112 and the screw 113, and also correspond to the parallel direction of the normal direction of the first locking block and the second locking block (the first locking block 131 and the second locking block 132 in the embodiment 1 Figure 8a ) of the locking mechanism, so that the first locking block and the second locking block are relatively moved between the top wall surface of the upper cavity 100 and the self-locking surface (the self-locking surface 1103 of the connecting member 111 in the embodiment 1 Figure 5c ) of the connecting member 111, thereby locking the connecting member 111.

[0184] The assembly tool also includes a guide rail 930, a sliding mounting block 940 and a limiting member 950. The guide rail 930 is arranged on the tool body 910, and the guide rail 930 extends towards the assembly opening 914. In the embodiment, the guide rail 930 has two straight guide rails, and the tool body 910 is provided with a straight recess 931 for mounting the guide rail 930. The two ends of each guide rail 930 extend towards the assembly opening 914 along the width direction L3 of the upper cavity 100, and two positioning portions 920, two sliding mounting blocks 940 and two limiting members 950 are arranged on each guide rail 930. Each positioning portion 920, sliding mounting block 940 and limiting member 950 correspond to one assembly opening 914.

[0185] The sliding mounting block 940 and the limiting member 950 are arranged on the guide rail 930, and the positioning portion 920 is rotatably mounted on the sliding mounting block 940 through a pin shaft 921. The sliding mounting block 940 drives the positioning portion 920 to slide on the guide rail 930. The limiting member 950 is located at a predetermined position between the sliding mounting block 940 and the assembly opening 914. Specifically, the end of the guide rail 930 is set as the predetermined position, and the limiting member 950 is fixed to the end of the guide rail 930. When the sliding mounting block 940 slides to the position of the limiting member 950, the limiting member 950 and the sliding mounting block 940 abut each other, so that the positioning portion 920 is matched with the mark portion 1112 of the connecting member 111. The predetermined position can be set according to actual process requirements, and the limiting member 950 can be a polyurethane limiting block.

[0186] In other alternative embodiments, the module holes can also be arranged at positions corresponding to the predetermined positions on the guide rail 930, and the protrusions corresponding to the module holes are arranged on the sliding mounting block 940. When the sliding mounting block 940 slides to the predetermined position on the guide rail 930, the protrusions match the module holes, so that the positioning portion 920 matches the mark portion 1112 of the connecting piece 111.

[0187] As Figure 48 , the tool body 910 includes a top plate 911, a vertical plate 912 and a bottom plate 913, the vertical plate 912 connects the top plate 911 and the bottom plate 913, wherein the top plate 911 and the bottom plate 913 are perpendicular to the vertical plate 912 respectively and parallel to each other, and the bottom plate 913 is used to be fixed to the upper cavity 100, the assembly opening 914 and the positioning portion 920 are arranged on the top plate 911. In the embodiment, the bottom plate 913 is provided with a pin hole 9131, and correspondingly, the upper cavity 100 is also provided with a pin hole, and the fastener passes through the pin hole 9131 of the bottom plate 913 and the pin hole of the upper cavity 100 to fix the bottom plate 913 on the top wall of the upper cavity 100. The bottom plate 913 is also provided with a avoiding space 9132 to avoid the first fluid supply pipe 161 and the vacuum pipe 140 and other pipes arranged on the top wall of the upper cavity 100, in addition, the vertical plate 912 is arranged at a height higher than the top plate 911, which not only provides an avoiding space for the first fluid supply pipe 161 and the vacuum pipe 140 and other pipes on the top wall of the upper cavity 100, but also makes the height of the positioning portion 920 on the top plate 911 adapt to the height of the mark portion 1112 on the connecting piece 111.

[0188] In addition, the top plate 911 of the tool body 910 is also provided with a handle 960 for convenient carrying. In the embodiment, the handle 960 has two and is symmetrically arranged.

[0189] The following takes the connecting piece 111 of the connecting assembly as a screw rod, and the fixing piece of the connecting assembly as a U-shaped clamp 112 and a screw 113 as an example to illustrate the assembly process of the assembly tool provided in the embodiment:

[0190] The mark portion 1112 is arranged on the nut of the screw rod in advance. The mark portion 1112 can be a positioning groove, and the positioning portion 920 of the assembly tool can be a pointer, the shape of the front end 9201 of the positioning portion 920 matches the shape of the positioning groove, and the rear end 9202 of the positioning portion 920 is rotatably installed on the sliding mounting block 940.

[0191] First, the assembly tool is fixed on the top wall of the upper cavity 100 through the bottom plate 913. It should be noted that before the assembly tool is fixed, the locking mechanism (refer to the locking mechanism 123 of the embodiment 1 Figure 1 ) can be installed on the top wall of the upper cavity 100.

[0192] Then, the screw is assembled into the upper cavity 100 and the lower cavity 200 through the assembly opening 914, the through hole of the upper cavity 100 and the through hole of the lower cavity 200 from above the top plate 911. Before the assembly tool positions the screw, as shown in Figure 52

[0193] Then, the sliding mounting block 940 is pushed to the position of the limiting member 950, and the pointer can be rotated if necessary to ensure that the lower surface of the front end of the pointer overlaps with the bottom surface of the positioning groove of the screw, so that the pointer matches the positioning groove of the screw, i.e., the alignment between the pointer and the positioning groove is completed. At this time, not only the axis of the screw coincides with the axes of the through holes of the upper cavity 100 and the lower cavity 200, but also the normal direction of the screw is parallel to the normal directions of the first locking block and the second locking block of the locking mechanism, so that the screw is accurately positioned, which not only facilitates the accurate fixation of the screw 113 in the corresponding position on the bottom of the lower cavity 200 through the screw hole of the U-shaped clamp 112, but also facilitates the relative movement of the first locking block and the second locking block between the top wall surface of the upper cavity 100 and the self-locking surface of the screw to lock the screw. After the assembly tool positions the screw, as shown in Figure 53

[0194] After the alignment of the pointer and the positioning groove of the screw, the U-shaped clamp is clamped in the clamping groove of the screw, and the screw is fixed in the lower cavity 200 by accurately passing the screw 113 through the screw hole of the U-shaped clamp 112 and the corresponding screw hole on the bottom of the lower cavity 200, and the screw assembly is completed.

[0195] After the screw is accurately fixed in the lower cavity 200, the pointer can be lifted to rotate around the pin shaft 921 to leave the positioning groove, or the sliding mounting block 940 can be pulled to make the pointer exit the positioning groove.

[0196] Finally, the assembly tool that has completed the assembly work is detached from the top wall of the upper cavity 100, and the assembly tool is moved away from the upper cavity 100 by using the handle 960.

[0197] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not limited thereto; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical solutions recorded in the foregoing embodiments can still be modified, or some or all of the technical features can be replaced by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.​​

Claims

1. A drying apparatus for drying a substrate using a supercritical fluid, characterized by, The utility model relates to a vacuum chamber, comprising: an upper cavity and a lower cavity, the lower cavity is arranged below the upper cavity; a substrate tray arranged in the lower cavity for carrying a substrate; a jacking mechanism arranged below the lower cavity for moving the lower cavity in a vertical direction; a connecting assembly connecting the upper cavity and the lower cavity, and a locking mechanism for locking or releasing the connecting assembly; when the jacking mechanism lifts the lower cavity to move upward, the lower cavity is in full contact with the upper cavity, the locking mechanism locks the connecting assembly in a horizontal direction, and a gap is formed between the locking mechanism and the connecting assembly in the vertical direction, after the jacking mechanism is removed from the lower cavity, the locking mechanism and the connecting assembly are in automatic contact in the vertical direction, and the upper cavity and the lower cavity are closed to form a sealed chamber; when the sealed chamber is opened, the jacking mechanism first lifts the lower cavity to move upward, a gap is formed between the locking mechanism and the connecting assembly in the vertical direction, and the locking mechanism releases the connecting assembly in the horizontal direction, and then the jacking mechanism lifts the lower cavity to move downward.

2. The drying apparatus of claim 1, wherein The connecting assembly comprises a connecting piece and a fixing piece, the upper cavity and the lower cavity are respectively provided with through holes, the connecting piece penetrates through the upper cavity and the lower cavity through the through holes, and the first end of the connecting piece is fixed to the lower cavity through the fixing piece; the locking mechanism is arranged in the upper cavity, and the locking mechanism comprises first driving parts, first lock blocks and second driving parts, second lock blocks on both sides of the connecting piece, the first driving parts drive the first lock blocks, the second driving parts drive the second lock blocks, and the first lock blocks and the second lock blocks move relatively or oppositely in the horizontal direction on the upper cavity to lock or release the connecting piece.

3. The drying apparatus of claim 2, wherein The connecting piece is a bolt, and the first end of the bolt is threadedly connected with the lower cavity. The fixing piece is threadedly connected with the first end of the bolt at the bottom of the lower cavity.

4. The drying apparatus of claim 2, wherein The connecting piece is a screw rod. The fixing piece is clamped with the first end of the screw rod and fixed to the bottom of the lower cavity.

5. The drying apparatus of claim 1, wherein The jacking mechanism comprises: a jacking platform arranged below the lower cavity for lifting the lower cavity; a driving device and a transmission device, the driving device drives the jacking platform to move upward or downward through the transmission device.

6. The drying apparatus of claim 5, wherein The driving device is a servo motor.

7. The drying apparatus of claim 1, wherein The jacking mechanism comprises a six-degree-of-freedom robot platform, a gear and screw transmission mechanism, a servo hydraulic system, an electric cylinder or a gas cylinder.

8. The drying apparatus of claim 1, wherein Further comprising: a sensor configured to determine whether the upper cavity and the lower cavity are closed by detecting the distance between the upper cavity and the lower cavity.

9. The drying apparatus of claim 1, wherein Further comprising: an inner sealing ring and an outer sealing ring arranged around the substrate tray in sequence, and a cavity is formed between the inner sealing ring and the outer sealing ring when the lower cavity and the upper cavity move relatively to be closed into the sealed chamber; wherein, The inner sealing ring is in U-shaped in longitudinal section, and is internally provided with a spring for making the lower cavity and the upper cavity adhere to the inner sealing ring.

10. The drying apparatus of claim 9, wherein Further comprising: A vacuum pipeline is communicated with the cavity through a vacuum inlet arranged on a top wall of the upper cavity to vacuumize the cavity, and a pressure detecting member is arranged on the vacuum pipeline to detect the pressure of the cavity; A host computer is used to receive the pressure signal detected by the pressure detecting member to determine whether the inner sealing ring and the outer sealing ring are invalid; when the vacuum pipeline stops vacuumizing the cavity, if the pressure of the pressure detecting member received by the host computer rises and is less than or equal to the atmospheric pressure, the host computer determines that the outer sealing ring is invalid; If the pressure of the pressure detecting member received by the host computer rises and is greater than the atmospheric pressure, the host computer determines that the inner sealing ring is invalid; If the pressure of the pressure detecting member received by the host computer is greater than the working pressure of the pressure detecting member, the host computer controls the vacuum pipeline to stop vacuumizing.

11. The drying apparatus of claim 1, wherein Further comprising: A first fluid supply pipeline is communicated with a first fluid inlet arranged on a top wall of the upper cavity to supply supercritical fluid into the sealed chamber to make the sealed chamber change from the atmospheric pressure state to the supercritical state; A second fluid supply pipeline is communicated with a second fluid inlet arranged on a first side wall of the upper cavity to supply supercritical fluid into the sealed chamber in the supercritical state to dry the substrate in the sealed chamber; A fluid discharge pipeline and a residual gas sampling pipeline are both communicated with a fluid discharge outlet arranged on a second side wall of the upper cavity; An analysis device is connected with the residual gas sampling pipeline to detect the concentration of the target substance discharged from the sealed chamber in real time; A controller is used to control the process parameters of the drying device according to the concentration of the target substance detected by the analysis device.

12. The drying apparatus of claim 11, wherein, The target substance is oxygen or isopropyl alcohol.

13. The drying apparatus of claim 11, wherein, Further comprising: A gas discharge pipeline is communicated with the first fluid inlet arranged on the top wall of the upper cavity to discharge the supercritical fluid changed into gas; A flowmeter is arranged on the gas discharge pipeline to detect the flow rate of the gas in the gas discharge pipeline.

14. The drying apparatus of claim 11, wherein, Further comprising: A flow uniformization assembly is arranged in the interior of the upper cavity, and the flow uniformization assembly comprises an annular air guide plate and a porous plate, the annular air guide plate has opposite first and second side surfaces and an air guide groove penetrating through the first and second side surfaces, and the porous plate is fixed on the first side surface of the annular air guide plate and comprises a porous structure; After the second fluid supply pipeline supplies supercritical fluid into the sealed chamber, the supercritical fluid is distributed on the upper surface of the substrate in sequence through the air guide groove and the porous plate.

15. The drying apparatus of claim 14, wherein, The porous plate further comprises a body, and the body of the porous plate is spliced with the porous structure or integrally formed with the porous structure.

16. The drying apparatus of claim 14, wherein The flow uniformization assembly further comprises: A sealing strip is arranged on the second side of the annular air guide plate to seal between the annular air guide plate and the inner side wall of the upper cavity, and the sealing strip is provided with an annular opening for supercritical fluid to pass through, and the annular opening extends along the length direction of the sealing strip.

17. The drying apparatus of any one of claims 14 to 16, wherein, The annular flow assembly is provided with wedge-shaped blocks at two ends respectively, the wedge-shaped blocks are fixed in the upper cavity, and the annular flow assembly is clamped in the interior of the upper cavity through the wedge-shaped blocks.

18. The drying apparatus according to claim 11 or 14, characterized by The upper cavity is also provided with a plurality of flow supply holes horizontally distributed, each flow supply hole comprises an air inlet and an air outlet, the air inlets of the flow supply holes are communicated with the second fluid inlet, and the air outlets of the flow supply holes are communicated with the annular flow assembly; wherein, Among the plurality of flow supply holes, the distance between two adjacent flow supply holes close to the second fluid inlet is greater than the distance between a flow supply hole far away from the second fluid inlet and an adjacent flow supply hole thereof.

19. The drying apparatus of claim 18, wherein, The cross-sectional area of the air inlet of each flow supply hole is greater than or equal to the cross-sectional area of the air outlet.

20. The drying apparatus of claim 1, wherein, The upper cavity and the lower cavity respectively comprise a first body and a second body, when the upper cavity and the lower cavity are closed, the first body of the upper cavity and the first body of the lower cavity form the sealed chamber; Wherein, the first bodies of the upper cavity and the lower cavity are nested in the second bodies, or the first bodies and the second bodies are integrally formed.

21. The drying apparatus of claim 20, wherein, The first body is made of stainless steel material, and the second body is made of nickel-based material.

22. An assembly tool characterized by, The assembly tool is used for assembling the connecting assembly of the drying device, the connecting member of the connecting assembly is provided with a mark part in advance, and the assembly tool comprises: A tool body is used for being fixed to the upper cavity and is provided with an assembly opening corresponding to the through hole of the upper cavity and the lower cavity in an up-down manner; A positioning part is movably arranged on the tool body; When the connecting member penetrates through the upper cavity and the lower cavity through the assembly opening and the through hole, the positioning part is matched with the mark part of the connecting member by moving the positioning part, so that the axis of the connecting member coincides with the axis of the through hole.

23. The assembly fixture of claim 22, wherein, Further comprising: A guide rail is arranged on the tool body and extends towards the assembly opening; A sliding mounting block is arranged on the guide rail, and the positioning part is rotatably mounted on the sliding mounting block, and the sliding mounting block drives the positioning part to slide on the guide rail.

24. The assembly fixture of claim 23, wherein, Further comprising: A limiting part is arranged on the guide rail and located at a predetermined position between the sliding mounting block and the assembly opening.

25. The assembly fixture of claim 22, wherein, The tool body comprises a top plate, a vertical plate and a bottom plate, the vertical plate connects the top plate and the bottom plate, the top plate and the bottom plate are perpendicular to the vertical plate and parallel to each other, the bottom plate is used for being fixed to the upper cavity, and the assembly opening and the positioning part are arranged on the top plate.

26. The assembly fixture of claim 25, wherein, The assembly tool further comprises: A handle is fixed to the top plate of the tool body.

Images