Magnetic sensing device and magnetic sensing method

Abstract

The application provides a magnetic sensing device and a magnetic sensing method. The magnetic sensing device comprises a substrate with a support surface, wherein a first sensing area, a third sensing area and a second sensing area are arranged in series along a movement direction on the support surface. The first sensing area, the second sensing area and the third sensing area have a first center line, a second center line and a third center line in the movement direction respectively, and the first center line and the second center line are symmetrical relative to the third center line. The first sensing area and the second sensing area are used for outputting a first output signal, and the third sensing area is used for outputting a second output signal. The phase difference between the first output signal and the second output signal is 90 degrees, and the first output signal and the second output signal are used for determining the movement distance, the speed or the angle and the movement direction of the relative movement. The magnetic sensing device and the magnetic sensing method can output accurate results under low-intensity measured magnetic field or high-intensity measured magnetic field.

Description

Technical Field

[0001] The present application relates to the field of sensor technology, and in particular to a magnetic sensing device and a magnetic sensing method. Background Art

[0002] Measuring the rotation angle of an object, such as a gear or the axis of a mechanical device, or the position and movement of a moving object, such as the opening and closing stroke of a valve, plays a vital role in industrial, automotive, and even commercial applications. This measurement enables various system monitoring and alarm functions, such as idling slip, various automatic motion feedback controls, such as motion or posture control, and triggering various operations, such as brake slip or seatbelt warnings. In these applications, magnetic sensing is often used for various measurements due to its advantages, such as non-contact measurement, excellent vibration and oil resistance, and sufficient accuracy and response speed. However, researchers have found that existing magnetic sensing devices can accurately output results under relatively low magnetic field strengths, such as below 50G. However, in scenarios with higher magnetic field strengths, such as above 50G, the output becomes erratic, and especially in cases above 700G and 1000G, the output is essentially inaccurate. In real-world applications, magnetic field strengths often exceed 600G, necessitating a sensing device that can also withstand high-intensity magnetic field conditions. Summary of the Invention

[0003] Based on the above-mentioned background technology deficiencies, the purpose of this application is to provide a magnetic sensing device and a magnetic sensing method, which can output results without errors under low-intensity and high-intensity measured magnetic fields.

[0004] To achieve the above-mentioned object, the present application provides a magnetic sensing device that has a relative motion relationship with an object along a motion direction, the object having a measured magnetic field, and is used to sense the motion distance, speed, angle, and motion direction of the relative motion. The magnetic sensing device includes:

[0005] a substrate having a supporting surface parallel to the direction of movement, on which a first sensing area, a third sensing area, and a second sensing area are continuously arranged along the direction of movement, wherein the first sensing area, the second sensing area, and the third sensing area respectively have a first centerline, a second centerline, and a third centerline in the direction of movement, the first centerline, the second centerline, and the third centerline respectively passing through the midpoint of the projection length of the first sensing area, the second sensing area, and the third sensing area in the direction of movement, and are all perpendicular to the direction of movement, and the first centerline and the second centerline are symmetrical with respect to the third centerline;

[0006] The first sensing area and the second sensing area are jointly used to output a first output signal, and the third sensing area is used to output a second output signal. The phase difference between the first output signal and the second output signal is 90 degrees, and they are jointly used to determine the movement distance or speed or angle and movement direction of the relative movement.

[0007] In one embodiment, the first sensing area, the second sensing area, and the third sensing area are all regularly arranged on the supporting surface in regular shapes, the first center line, the second center line, and the third center line are respectively the central axes of the first sensing area, the second sensing area, and the third sensing area, and the first sensing area, the second sensing area, and the third sensing area are respectively symmetrical structures relative to the first center line, the second center line, and the third center line.

[0008] In one embodiment, the first sensing area and the second sensing area both include first sensing units, each of the first sensing units has a center line in the direction of motion, the center line of the first sensing unit in the first sensing area is consistent with the first center line of the first sensing area, and the center line of the first sensing unit in the second sensing area is consistent with the second center line of the second sensing area; the two first sensing units generate equal changes in value and the same direction for the same measured magnetic field, the two first sensing units are connected in series to form a half-bridge structure to constitute a first sensor, the connection point between the two first sensing units outputs a first sensing signal, and the first sensing signal is used to generate the first output signal.

[0009] In one embodiment, the third sensing area includes a first sensing unit and a second sensing unit, the first sensing unit and the second sensing unit both have a center line in the direction of movement, and both are consistent with the third center line of the third sensing area; the first sensing unit and the second sensing unit generate equal and opposite changes in the same measured magnetic field, the first sensing unit and the second sensing unit are connected in series to form a half-bridge structure to constitute a third sensor, and the connection point between the first sensing unit and the second sensing unit outputs a third sensing signal, and the third sensing signal is used to generate the second output signal.

[0010] In one embodiment, the first sensing area and the second sensing area each include a first sensing unit and a second sensing unit. Each of the first sensing unit and the second sensing unit has a center line in the direction of motion. The center line of the first sensing unit in the first sensing area coincides with the center line of the second sensing unit in the first sensing area and the first center line of the first sensing area, and the center line of the first sensing unit in the second sensing area coincides with the second center line of the second sensing area. The changes generated by the two first sensing units for the same measured magnetic field are equal in value and in the same direction, and the changes generated by the two second sensing units for the same measured magnetic field are equal in value and in opposite directions. The first sensing unit and the second sensing unit in the first sensing area are connected in series to form a half-bridge structure to constitute a first sensor, and a connection point between the first sensing unit and the second sensing unit in the first sensing area outputs a first sensing signal. The first sensing unit and the second sensing unit in the second sensing area are connected in series to form a half-bridge structure to constitute a second sensor, and a connection point between the first sensing unit and the second sensing unit in the second sensing area outputs a second sensing signal. The first sensing signal and the second sensing signal are used to generate the first output signal.

[0011] In one embodiment, the third sensing area includes a first sensing unit, a second sensing unit, a third sensing unit, and a fourth sensing unit, wherein the first sensing unit, the second sensing unit, the third sensing unit, and the fourth sensing unit all have a center line in the direction of motion and are consistent with the third center line of the third sensing area; the change values ​​generated by the first sensing unit and the third sensing unit for the same measured magnetic field are equal in value and in the same direction, which is opposite to the change values ​​generated by the second sensing unit and the fourth sensing unit for the same measured magnetic field; the first sensing unit and the second sensing unit are connected in series to form a half-bridge structure, and the connection point between the two outputs a third sensing signal; the third sensing unit and the fourth sensing unit are connected in series to form a half-bridge structure, and the connection point between the two outputs a fourth sensing signal; two of the half-bridge structures are connected to form a full-bridge structure to constitute a third sensor, and the third sensing signal and the fourth sensing signal are used to generate the second output signal; the first sensing unit, the second sensing unit, the third sensing unit, and the fourth sensing unit are arbitrarily arranged on the third center line, and optionally, the first sensing unit, the fourth sensing unit, the third sensing unit, and the second sensing unit are arranged in sequence and continuously on the third center line.

[0012] In one embodiment, the first sensing area and the second sensing area each include a first sensing unit and a second sensing unit. Each of the first sensing unit and the second sensing unit has a center line in the direction of motion. The center line of the first sensing unit in the first sensing area coincides with the center line of the second sensing unit in the first sensing area and the first center line of the first sensing area. The center line of the first sensing unit in the second sensing area coincides with the center line of the second sensing unit in the second sensing area and the second center line of the second sensing area. The changes generated by the two first sensing units for the same measured magnetic field are equal in magnitude and in the same direction, and are equal in magnitude and in the same or opposite directions as the changes generated by the two second sensing units for the same measured magnetic field. The first sensing unit in the first sensing area and the first sensing unit in the second sensing area are connected in series to form a half-bridge structure to constitute a first sensor, and a connection point between the first sensing unit in the first sensing area and the first sensing unit in the second sensing area outputs a first sensing signal. The second sensing unit in the first sensing area and the second sensing unit in the second sensing area are connected in series to form a half-bridge structure to constitute a second sensor, and a connection point between the second sensing unit in the first sensing area and the second sensing unit in the second sensing area outputs a second sensing signal. The first sensing signal and the second sensing signal are used to generate the first output signal.

[0013] In one embodiment, the first sensing area, the second sensing area and / or the third sensing area respectively include a plurality of sensing units, each of which has a center line in the direction of motion; the center line of the sensing units in the first sensing area is consistent with the first center line of the first sensing area, and the sensing units are arranged continuously on the first center line; the center line of the sensing units in the second sensing area is consistent with the second center line of the second sensing area, and the sensing units are arranged continuously on the second center line; some of the sensing units in the first sensing area and the second sensing area are connected in series and / or in parallel, and finally all the sensing units are connected to form a half-bridge structure or a full-bridge structure for generating the first output signal; optionally, the first sensing area and the second sensing area are connected in series and / or in parallel, and finally all the sensing units are connected to form a half-bridge structure or a full-bridge structure for generating the first output signal; optionally, the first sensing area and the second sensing area are connected in parallel. The change values ​​generated by some sensing units in the sensing area for the same measured magnetic field are equal in value and in the same direction, which are equal in value and in opposite direction to the change values ​​generated by other sensing units for the same measured magnetic field, and the sensing units of the two parts are arranged one by one on the first center line and the second center line respectively; the sensing units of the third sensing area are connected in series and / or in parallel, and finally all the sensing units are connected to form a half-bridge structure or a full-bridge structure for generating the second output signal; the change values ​​generated by some sensing units in the third sensing area for the same measured magnetic field are equal in value and in the same direction, which are equal in value and in opposite direction to the change values ​​generated by other sensing units for the same measured magnetic field, and the sensing units of the two parts are arranged one by one on the third center line.

[0014] In one embodiment, the magnetic sensing device further includes a first operational amplifier and a second operational amplifier, the first sensing area and the second sensing area are connected to the first operational amplifier, and the first operational amplifier outputs the first output signal; the third sensing area is connected to the second operational amplifier, and the second operational amplifier outputs the second output signal.

[0015] In one embodiment, the first sensing region, the second sensing region, and the third sensing region are formed by an anisotropic magnetoresistive unit, a giant magnetoresistive sensing unit, a tunneling magnetoresistive unit, or a Hall sensor unit.

[0016] The present application also provides a magnetic sensing method for determining the distance, speed, angle, and direction of relative motion between a magnetic sensing device and an object, wherein the magnetic sensing device and the object have a relative motion relationship along a motion direction, and the object has a magnetic field to be measured. The magnetic sensing device is the magnetic sensing device described above. The magnetic sensing method includes:

[0017] A first output signal is obtained jointly through the first sensing area and the second sensing area, and a second output signal is obtained through the third sensing area. The phase difference between the first output signal and the second output signal is 90 degrees. The movement distance, speed, angle and movement direction of the relative movement are determined jointly based on the first output signal and the second output signal.

[0018] The present application discloses a magnetic sensing device and method. The device comprises a first sensing region, a third sensing region, and a second sensing region arranged continuously along a motion direction on a supporting surface of a substrate. The first sensing region, the second sensing region, and the third sensing region respectively have a first centerline, a second centerline, and a third centerline in the motion direction. The first centerline, the second centerline, and the third centerline respectively pass through the midpoints of the projections of the first sensing region, the second sensing region, and the third sensing region in the motion direction and are all perpendicular to the motion direction. The first centerline and the second centerline are symmetrical with respect to the third centerline. A first output signal is obtained through the first sensing region and the second sensing region, and a second output signal is obtained through the third sensing region. The first output signal and the second output signal have a phase difference of 90 degrees. The distance, speed, angle, and direction of the relative motion are determined based on the first and second output signals. Accurate results can be output regardless of whether the measured magnetic field is low or high. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings described herein are for illustrative purposes only and are not intended to limit the scope of the present application in any way. In addition, the shapes and proportional dimensions of the components in the drawings are only schematic and are used to help understand the present application. They do not specifically limit the shapes and proportional dimensions of the components of the present application. Those skilled in the art can select various possible shapes and proportional dimensions to implement the present application according to the specific circumstances under the guidance of the present application. In the drawings:

[0020] Figure 1 A schematic structural diagram of a first embodiment of a magnetic sensing device provided in the first embodiment of the present application;

[0021] Figure 2 A schematic structural diagram of a second embodiment of a magnetic sensing device provided in the first embodiment of the present application;

[0022] Figure 3 A schematic structural diagram of a third embodiment of a magnetic sensing device provided in the first embodiment of the present application;

[0023] Figure 4 A schematic structural diagram of a fourth embodiment of a magnetic sensing device provided in the first embodiment of the present application;

[0024] Figure 5 A schematic structural diagram of a fifth embodiment of a magnetic sensing device provided in the first embodiment of the present application;

[0025] Figure 6 for Figure 4 Schematic diagram of the waveforms of various signals of the magnetic sensing device shown in FIG. 1 under a magnetic bias field of 100G and a measured magnetic field of 10G;

[0026] Figure 7 for Figure 4 Schematic diagram of the waveforms of various signals of the magnetic sensing device under a magnetic bias field of 100G and a measured magnetic field of 600G;

[0027] Figure 8 for Figure 4 Schematic diagram of waveforms of signals of the magnetic sensing device and the conventional magnetic sensing device under a magnetic bias field of 100G and a measured magnetic field of 3000G. DETAILED DESCRIPTION

[0028] In order to enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of this application.

[0029] See also Figures 1 to 5 As shown, the first embodiment of the present application provides a magnetic sensing device that has a relative motion relationship with an object (not shown) along a motion direction X, and the object has a measured magnetic field. The magnetic sensing device is used to sense the motion distance, speed, angle, and motion direction of the relative motion. The magnetic sensing device includes:

[0030] The substrate 100 has a support surface 101 parallel to the movement direction X. A first sensing region 201, a third sensing region 203, and a second sensing region 202 are sequentially arranged on the support surface along the movement direction X. The first sensing region 201, the second sensing region 202, and the third sensing region 203 respectively have a first centerline 211, a second centerline 212, and a third centerline 213 in the movement direction. The first centerline 211, the second centerline 212, and the third centerline 213 respectively pass through the midpoints of the projections of the first sensing region 201, the second sensing region 202, and the third sensing region 203 in the movement direction X and are perpendicular to the movement direction X. The first centerline 211 and the second centerline 212 are symmetrical with respect to the third centerline 213.

[0031] The first sensing area 201 and the second sensing area 202 are used together to output a first output signal V1, and the third sensing area 203 is used to output a second output signal V2, and the phase difference between the first output signal V1 and the second output signal V2 is 90 degrees, which are used together to determine the movement distance or speed or angle and movement direction of the relative movement.

[0032] The magnetic sensing device has a relative movement relationship with the object along the movement direction X, which can be that the magnetic sensing device is stationary and the object moves, or that the magnetic sensing device moves and the object is stationary, regardless of which case. The relative movement can be a linear movement, which can be a one-way movement or a two-way back-and-forth movement. Thus, the magnetic sensing device described in the present application is used to sense the movement distance or speed and movement direction of the relative movement. The relative movement can also be a rotational movement, which can be a one-way movement or a two-way back-and-forth movement. Thus, the magnetic sensing device described in the present application is used to sense the movement angle or speed (angular velocity) and movement direction of the relative movement. The object has a measured magnetic field thereon, for example, a magnetic encoder is installed on the object, and the magnetic sensing device can sense the magnetic field of the magnetic encoder to determine the movement distance or speed or angle and movement direction of the relative movement.

[0033] The substrate 100 can be a silicon substrate, which further includes related circuits (such as the first operational amplifier A1 and the second operational amplifier A2 to be described later) required for the magnetic sensing device to work together to realize the more complete functions of the magnetic sensing device. Of course, it can also be a substrate that only provides mechanical support, and the related circuits required for the magnetic sensing device to work together are arranged at other positions. Generally, the substrate 100 is in a flat plate shape, and the support surface 101 thereon is a plane. If the relative movement is a linear movement, the movement direction X is a straight line, and correspondingly, the support surface 101 of the substrate 100 can be parallel to the movement direction X. If the relative movement is a rotational movement, the movement direction X is a curve. Because the magnetic sensing device is very small relative to the object, at this time, the support surface 101 of the substrate 100, which is approximately a plane, can also be considered to be parallel to the movement direction X, which is actually a curve. Of course, under specific requirements, the substrate 100 is curved, and the support surface 101 thereon is also a curved surface.

[0034] Please refer to Figure 1As shown, in the first embodiment, the first sensing area 201, the second sensing area 202, and the third sensing area 203 are all regularly shaped and regularly arranged on the supporting surface 101, the first center line 211, the second center line 212, and the third center line 213 are respectively the center axes of the first sensing area 201, the second sensing area 202, and the third sensing area 203, and the first sensing area 201, the second sensing area 202, and the third sensing area 203 are respectively symmetrical structures relative to the first center line 211, the second center line 212, and the third center line 213.

[0035] exist Figure 1 In the first embodiment shown, the first sensing area 201, the second sensing area 202, and the third sensing area 203 are all rectangular in shape, with narrow sides parallel to the movement direction X and long sides perpendicular to the movement direction X, that is, parallel to the longitudinal axis Y in the figure. Thus, the first center line 211, the second center line 212, and the third center line 213 are the central axes of the first sensing area 201, the second sensing area 202, and the third sensing area 203 perpendicular to the narrow sides, respectively. Accordingly, the first sensing area 201, the second sensing area 202, and the third sensing area 203 are symmetrical structures relative to the first center line 211, the second center line 212, and the third center line 213, respectively. In this case, arranging the first center line 211 and the second center line 212 to be symmetrical relative to the third center line 213 can significantly reduce the difficulty from a design and manufacturing perspective. Of course, the first sensing area 201, the second sensing area 202, and the third sensing area 203 may also be squares or other regular shapes, or even irregular shapes, and may be placed regularly or irregularly, that is, arbitrarily, as long as the following conditions are met: the first sensing area 201, the second sensing area 202, and the third sensing area 203 respectively have a first center line 211, a second center line 212, and a third center line 213 in the movement direction X; the first center line 211, the second center line 212, and the third center line 213 respectively pass through the midpoints of the projection lengths of the first sensing area 201, the second sensing area 202, and the third sensing area 203 in the movement direction X, and are all perpendicular to the movement direction X, and the first center line 211 and the second center line 212 are symmetrical with respect to the third center line 213. To facilitate understanding and simplify description, the following text and the accompanying drawings are all displayed in regular shapes and regular placements. Those skilled in the art should easily understand that when configuring in irregular shapes and irregular placements as needed, they can make adaptive adjustments based on the teachings of the above technical content, and this should also be included in the scope of protection sought in this application.

[0036] See also Figure 1As shown, in the first embodiment, the first sensing area 201 and the second sensing area 202 both include first sensing units R11 and R21. Each of the first sensing units R11 and R21 has a center line in the motion direction X. The center line of the first sensing unit R11 in the first sensing area 201 is consistent with the first center line 211 of the first sensing area 201, and the center line of the first sensing unit R21 in the second sensing area 202 is consistent with the second center line 212 of the second sensing area 202. The two first sensing units R11 and R21 generate the same change in value and direction for the same measured magnetic field. The two first sensing units R11 and R21 are connected in series to form a half-bridge structure to constitute a first sensor. The connection point between the two first sensing units R11 and R21 outputs a first sensing signal S1, and the first sensing signal S1 is used to generate the first output signal V1. The two first sensing units R11 and R21 generate the same change in value and direction for the same measured magnetic field. Figure 1 Taking the first embodiment shown, where the first sensing units R11 and R21 are anisotropic magnetoresistive units, for example, the resistance of the two first sensing units R11 and R21 increases or decreases compared to a zero magnetic field under the same measured magnetic field (this can be referred to as having the same characteristics). Thus, the phase of the first sensing signal S1 is essentially the difference between the phase of the sensing signal generated by the first sensing unit R11 in the first sensing region 201 when sensing the same measured magnetic field and the phase of the sensing signal generated by the first sensing unit R21 in the second sensing region 202 when sensing the same measured magnetic field.

[0037] See also Figure 1 As shown, in the first embodiment, the third sensing area 203 includes a first sensing unit R31+ and a second sensing unit R31-. The first sensing unit R31+ and the second sensing unit R31- both have center lines in the direction of movement and are consistent with the third center line 213 of the third sensing area 203. The first sensing unit R31+ and the second sensing unit R31- generate changes in the same measured magnetic field in equal and opposite directions. The first sensing unit R31+ and the second sensing unit R31- are connected in series to form a half-bridge structure to constitute a third sensor. The connection point between the first sensing unit R31+ and the second sensing unit R31- outputs a third sensing signal S3, and the third sensing signal S3 is used to generate the second output signal V2. First of all, it should be noted that the first sensing unit R31+ and the second sensing unit R31- in this paragraph are both in the third sensing area 203, and do not involve the first sensing area 201 and the second sensing area 202. Among them, the first sensing unit R31+ and the second sensing unit R31- generate changes in the same measured magnetic field in equal and opposite directions. Figure 1 In the first embodiment shown, the first sensing unit R31+ and the second sensing unit R31- are anisotropic magnetoresistive units. For example, the resistance of the anisotropic magnetoresistive unit R31+ under a measured magnetic field becomes larger than that at a zero magnetic field, and the resistance of the anisotropic magnetoresistive unit R31- under the same measured magnetic field becomes smaller than that at a zero magnetic field; or the resistance of the anisotropic magnetoresistive unit R31+ under a measured magnetic field becomes smaller than that at a zero magnetic field, and the resistance of the anisotropic magnetoresistive unit R31- under the same measured magnetic field becomes larger than that at a zero magnetic field, that is, the characteristics of the first sensing unit R31+ and the second sensing unit R31- are opposite (wherein the + and - signs are used to indicate opposite). Because the first centerline 211 of the first sensing area 201 and the second centerline 212 of the second sensing area 202 are symmetrical with respect to the third centerline 213 of the third sensing area 203, the phase difference between the first sensing signal S1 jointly generated by the first sensing area 201 and the second sensing area 202 and the third sensing signal S3 generated by the third sensing area 203 is 90 degrees. Subsequently, through calculation, these signals are jointly used to determine the distance, speed, angle, and direction of the relative motion, and accurate results can be obtained regardless of whether the measured magnetic field is low or high.

[0038] See also Figure 1 As shown, in the first embodiment, the magnetic sensing device further includes a first operational amplifier A1 and a second operational amplifier A2. The first sensing area 201 and the second sensing area 202 are connected to the first operational amplifier A1, and the first operational amplifier A1 outputs the first output signal V1; the third sensing area 203 is connected to the second operational amplifier A2, and the second operational amplifier A2 outputs the second output signal V2. Because the first sensing area 201 and the second sensing area 202 jointly generate the first sensing signal S1, and the third sensing area 203 generates the third sensing signal S3, the first operational amplifier A1 and the second operational amplifier A2 only need to perform amplification calculations to output the first output signal V1 and the second output signal V2, respectively. Moreover, Figure 1In the shown first embodiment, taking the anisotropic magnetoresistance unit as an example, the first sensing unit R11 of the first sensing region 201 and the first sensing unit R21 of the second sensing region 202 have the same size, produce the same change value and have the same direction for the same measured magnetic field, and the calculation of the first operational amplifier A1 does not need to consider the size ratio between the first sensing unit R11 of the first sensing region 201 and the first sensing unit R21 of the second sensing region 202; if the first sensing unit R11 of the first sensing region 201 and the first sensing unit R21 of the second sensing region 202 have different sizes, the calculation of the first operational amplifier A1 needs to consider the size ratio between the two first sensing units R11 and R21, and the calculation will be more complex. Similarly, the first sensing unit R31+ of the third sensing region 203 and the second sensing unit R31- of the third sensing region 203 have the same size, produce the same change value and have the opposite direction for the same measured magnetic field, and the calculation of the second operational amplifier A2 does not need to consider the size ratio between the first sensing unit R31+ of the third sensing region 203 and the second sensing unit R31- of the third sensing region 203; if the first sensing unit R31+ of the third sensing region 203 and the second sensing unit R31- of the third sensing region 203 have different sizes, the calculation of the second operational amplifier A2 needs to consider the size ratio between the first sensing unit R31+ of the third sensing region 203 and the second sensing unit R31- of the third sensing region 203, and the calculation will be more complex. In general, the first sensing unit R11 of the first sensing region 201 and the first sensing unit R21 of the second sensing region 202 produce the same change value and have the same direction for the same measured magnetic field, and the sensing degree of the first sensing signal S1 is the highest, which is beneficial to signal acquisition; the first sensing unit R31+ of the third sensing region 203 and the second sensing unit R31- of the third sensing region 203 produce the same change value and have the opposite direction for the same measured magnetic field, and the sensing degree of the third sensing signal S3 is the highest, which is beneficial to signal acquisition. Furthermore, the sizes of the sensing units can all be the same, and the overall structure is relatively simple, which is helpful for design and manufacturing. If the sizes of the sensing units are required to be different in a specific case, corresponding design, manufacturing and calculation can be adjusted accordingly. The subsequent embodiments will be described and explained with the same size of the sensing units.

[0039] Of course, to be more complete, the free ends of each sensing unit in each sensing region must also be connected to the power supply terminal Vdd and the ground terminal Gnd, respectively, to enable the magnetic sensing device to operate. This will not be discussed in detail in subsequent embodiments. The magnetic sensing device of this embodiment can improve sensor impedance and reduce area, achieving lower power consumption and lower cost.

[0040] See also Figure 2 As shown, in the second embodiment, Figure 1 The main difference between the first embodiment shown is that the first sensing area 201 and the second sensing area 202 include first sensing units R11+, R21+, and second sensing units R11-, R21-. Each of the first sensing units R11+, R21+, and the second sensing units R11-, R21- has a center line in the movement direction X. The center line of the first sensing unit R11+ of the first sensing area 201 is consistent with the center line of the second sensing unit R11- of the first sensing area 201 and the first center line 211 of the first sensing area 201. The center line of the first sensing unit R21+ of the second sensing area 202 is consistent with the center line of the second sensing unit R21- of the second sensing area 202 and the second center line 212 of the second sensing area 202. The two first sensing units R11+, R21+ The changes in the values ​​generated for the same measured magnetic field are equal in value and in the same direction, which is opposite to the changes in the values ​​generated by the two second sensing units R11- and R21- for the same measured magnetic field; the first sensing unit R11+ and the second sensing unit R11- of the first sensing area 201 are connected in series to form a half-bridge structure to constitute a first sensor, and the connection point between the first sensing unit R11+ and the second sensing unit R11- of the first sensing area 201 outputs a first sensing signal S1; the first sensing unit R21+ and the second sensing unit R21- of the second sensing area 202 are connected in series to form a half-bridge structure to constitute a second sensor, and the connection point between the first sensing unit R21+ and the second sensing unit R21- of the second sensing area 202 outputs a second sensing signal S2; the first sensing signal S1 and the second sensing signal S2 are used to generate the first output signal V1. In this embodiment, the first sensing area 201 generates the first sensing signal S1, and the second sensing area 202 generates the second sensing signal S2. Accordingly, the first operational amplifier A1 performs addition or subtraction calculations while performing amplification calculations. Figure 2In the second embodiment shown, the two first sensing units R11+ and R21+ generate changes in magnitude equal to and in the same direction for the same measured magnetic field, which are opposite to the changes in magnitude equal to and in the opposite direction for the two second sensing units R11- and R21-. Furthermore, the two first sensing units R11+ and R21+ are symmetrical with respect to the third centerline 213, while the two second sensing units R11- and R21- are symmetrical with respect to the third centerline 213. The first operational amplifier A1 performs both amplification and subtraction. If the positions of the first sensing unit R11+ and the second sensing unit R11- in the first sensing region 201 are swapped, or if the positions of the first sensing unit R21+ and the second sensing unit R21- in the second sensing region 202 are swapped, the first operational amplifier A1 performs both amplification and addition. Furthermore, as previously mentioned, if the sensing units are of different sizes, the calculations of the first operational amplifier A1 must also consider the size ratios between the sensing units. Those skilled in the art, with the guidance of this application, will be able to identify adaptive adjustments. Figure 2 The second embodiment shown is relative to Figure 1 In the first embodiment shown, the acquisition of the first output signal V1 is more stable and accurate.

[0041] See also Figure 3 As shown, in the third embodiment, Figure 1The difference of the first embodiment shown mainly lies in that the third sensing area 203 comprises a first sensing unit R31+, a second sensing unit R32-, a third sensing unit R33+, and a fourth sensing unit R34-, the first sensing unit R31+, the second sensing unit R32-, the third sensing unit R33+, and the fourth sensing unit R34- all have a middle line in the movement direction X and all coincide with the third middle line 213 of the third sensing area 203; the first sensing unit R31+ and the third sensing unit R33+ have equal and same direction change values caused by the same measured magnetic field, and the second sensing unit R32- and the fourth sensing unit R34- have equal and opposite direction change values caused by the same measured magnetic field; the first sensing unit R31+ and the second sensing unit R32- are connected in series to form a half-bridge structure, and the connecting point between the two outputs a third sensing signal S3; the third sensing unit R33+ and the fourth sensing unit R34- are connected in series to form a half-bridge structure, and the connecting point between the two outputs a fourth sensing signal S4; the two half-bridge structures are connected to form a full-bridge structure to constitute a third sensor, and the third sensing signal S3 and the fourth sensing signal S4 are used to generate the second output signal V2; the first sensing unit R31+, the second sensing unit R32-, the third sensing unit R33+, and the fourth sensing unit R34- are arranged at will on the third middle line 213, and optionally, the first sensing unit R31+, the fourth sensing unit R34-, the third sensing unit R33+, and the second sensing unit R32- are arranged in sequence and continuously on the third middle line 213. Correspondingly, the second operational amplifier A2 performs addition calculation while performing amplification calculation. The third sensing area 203 of the present embodiment adopts four sensing units, and the acquisition of the second output signal V2 is more stable and accurate. Moreover, the arrangement of the four sensing units on the third middle line 213 can be configured at will, and of course, the more uniform, the better, because in this way, the sensing is more uniform for the distribution difference of the measured magnetic field on the third middle line 213. Figure 3 In the third embodiment shown, the four sensing units have the same size, and the first sensing unit R31+, the fourth sensing unit R34-, the third sensing unit R33+, and the second sensing unit R32- are arranged in sequence and continuously on the third middle line 213, which is the most uniform distribution and the most uniform sensing of the measured magnetic field, and can be led out through one metal wiring layer, and the structure is also very simple. Of course, it is reminded that, as mentioned above, if the four sensing units have different sizes, the calculation of the second operational amplifier A2 also needs to consider the size ratio relationship between the sensing units.

[0042] Please refer to Figure 4 In the fourth embodiment shown, the first sensing unit R31+ and the second sensing unit R32- are arranged on the third middle line 213, and the third sensing unit R33+ and the fourth sensing unit R34- are arranged on the third middle line 213. Figure 3The third embodiment is mainly different from the first and second embodiments in that the first sensing area 201 and the second sensing area 202 are also formed by a half-bridge structure. Figure 2 In the second embodiment, the first sensing area 201 and the second sensing area 202 are formed by a half-bridge structure. The first sensing area 201 is a first sensor formed by a half-bridge structure, and generates a first sensing signal S1 with a first phase. The second sensing area 202 is a second sensor formed by a half-bridge structure, and generates a second sensing signal S2 with a second phase. The third sensing area 203 is a third sensor formed by a full-bridge structure. The third sensor formed by a full-bridge structure can also be regarded as two sensors formed by a half-bridge structure, for example, a fourth sensor 204 and a fifth sensor 205. In this way, the four sensors are all formed by a half-bridge structure, and keep a certain symmetrical relationship with each other. For example, the fourth sensor 204 and the fifth sensor 205 are located on the central axis (third middle line 213) between the first sensor and the second sensor, and are symmetrical with respect to the central axis (third middle line 213). Figure 4 In the fourth embodiment, all the sensing units are of the same size and are regularly placed. For example, the fourth sensor 204 and the fifth sensor 205 are actually located on the central axis (third middle line 213) between the first sensor and the second sensor, and are symmetrical with respect to the central axis (third middle line 213). Therefore, the fourth sensor 204 generates a third sensing signal S3 with a third phase, which is the midpoint between the first phase and the second phase. The fifth sensor 205 generates a fourth sensing signal S4 with a fourth phase, which is opposite to the third phase. By calculating and processing the first sensing signal S1 output by the first sensor, the second sensing signal S2 output by the second sensor, the third sensing signal S3 output by the fourth sensor 204, and the fourth sensing signal S4 output by the fifth sensor 205, the first output signal V1 and the second output signal V2 with a phase difference of 90 degrees can be obtained, which can output correct results in both low-intensity measured magnetic fields and high-intensity measured magnetic fields.

[0043] Please refer to Figure 6 As shown in FIG. 6, the first sensing area 201, the second sensing area 202, and the third sensing area 203 are formed by a half-bridge structure. Figure 4The following diagram shows waveforms of various signals from the magnetic sensing device of the fourth embodiment under a magnetic bias field of 100G and a measured magnetic field of 10G. The four lines in the upper figure represent the waveforms of the first sensing signal S1, the second sensing signal S2, the third sensing signal S3, and the fourth sensing signal S4. Under a measured magnetic field of ±10G, the outputs of the four sensors all fall within the linear region, causing the first sensing signal S1, the second sensing signal S2, the third sensing signal S3, and the fourth sensing signal S4 to exhibit Sin waveforms. The third sensing signal S3 and the fourth sensing signal S4 have opposite phases and are located midway between the phases of the first sensing signal S1 and the second sensing signal S2. The two lines in the lower figure represent the waveforms of the first output signal V1 and the second output signal V2, respectively. Both exhibit Sin waveforms with a 90-degree phase difference. By counting the number of times the second output signal V2 passes through the zero point, the movement distance, speed or angle of the relative movement can be obtained; and the movement direction information of the relative movement is determined by the direction of the second output signal V2 passing through the zero point, in conjunction with the positive or negative state of the first output signal V1: for example, if the second output signal V2 passes through the zero point from positive to negative, the first output signal V1 is positive, which means that the movement direction of the relative movement is in a certain direction; if the second output signal V2 passes through the zero point from positive to negative, the first output signal V1 is negative, which means that the movement direction of the relative movement is in the opposite direction of a certain direction (note that Figure 6 Only one case is shown in FIG. 1 . In other words, no matter whether the first output signal V1 is in a positive or negative stage, the second output signal V2 should pass through the zero point (from positive to negative or from negative to positive) once and only once.

[0044] See also Figure 7 As shown, Figure 4 The following diagram shows the waveforms of various signals from the magnetic sensing device of the fourth embodiment under a magnetic bias field of 100G and a measured magnetic field of 600G. The four lines in the upper figure represent the waveforms of the first sensing signal S1, the second sensing signal S2, the third sensing signal S3, and the fourth sensing signal S4. Within the measured magnetic field range of + / - 600G, the sensor's output characteristics alternate between linearly increasing and decreasing regions, resulting in a unique waveform. The two lines in the lower figure represent the waveforms of the first output signal V1 and the second output signal V2. It is clearly seen that regardless of whether the first output signal V1 is positive or negative, the second output signal V2 only crosses zero once.

[0045] See also Figure 8 As shown, Figure 4The waveform diagrams of the signals of the magnetic sensing device of the fourth embodiment and the existing magnetic sensing device under a magnetic bias field of 100G and a measured magnetic field of 3000G are shown. The two lines in the upper figure are the waveforms of the first output signal V1 and the second output signal V2 of the magnetic sensing device described in the present application, respectively. It can be clearly seen that no matter whether the first output signal V1 is in a positive or negative stage, the second output signal V2 only passes through the zero point once. The two lines in the lower figure are the waveforms of the first output signal and the second output signal of the existing magnetic sensing device, respectively. It can be clearly seen that the second output signal is severely distorted. No matter whether the first output signal is in a positive or negative stage, the second output signal passes through the zero point multiple times, which affects the accuracy of the sensing result. The distortion of the second output signal V2 of the present application is greatly improved, so the sensing result (relative motion distance, speed or angle) is accurate.

[0046] See also Figure 5 As shown, in the fifth embodiment, Figure 4The main difference of the fourth embodiment is that the first sensing area 201 and the second sensing area 202 both include first sensing units R11, R21, and second sensing units R12, R22. Each of the first sensing units R11, R21, and the second sensing units R12, R22 has a center line in the motion direction X. The center line of the first sensing unit R11 of the first sensing area 201, the center line of the second sensing unit R12 of the first sensing area 201, and the first center line 211 of the first sensing area 201 are consistent. The center line of the first sensing unit R21 of the second sensing area 202, the center line of the second sensing unit R22 of the second sensing area 202, and the second center line 212 of the second sensing area 202 are consistent. The two first sensing units R11 and R21 generate the same change value and the same direction for the same measured magnetic field, which is consistent with the two second sensing units R11 and R21. The two sensing units R12 and R22 generate changes in the same measured magnetic field in equal values ​​and in the same or opposite directions. The first sensing unit R11 of the first sensing area 201 and the first sensing unit R21 of the second sensing area 202 are connected in series to form a half-bridge structure to constitute a first sensor. The connection point between the first sensing unit R11 of the first sensing area 201 and the first sensing unit R21 of the second sensing area 202 outputs a first sensing signal S1. The second sensing unit R12 of the first sensing area 201 and the second sensing unit R22 of the second sensing area 202 are connected in series to form a half-bridge structure to constitute a second sensor. The connection point between the second sensing unit R12 of the first sensing area 201 and the second sensing unit R22 of the second sensing area 202 outputs a second sensing signal S2. The first sensing signal S1 and the second sensing signal S2 are used to generate the first output signal V1. That is, some of the sensing units in the first sensing area 201 and some of the sensing units in the second sensing area 202 together constitute a first sensor, generating a first sensing signal S1; another portion of the sensing units in the first sensing area 201 and another portion of the sensing units in the second sensing area 202 together constitute a second sensor, generating a second sensing signal S2. The distortion of the first output signal V1 calculated using the first sensing signal S1 and the second sensing signal S2 can also be improved under high-intensity measured magnetic fields, thereby avoiding errors in the sensing results of the direction of relative motion and further ensuring the accuracy of the sensing results. It is only necessary that the changes in the values ​​generated by the first sensing area 201 and the second sensing area 202 constituting the first sensor for the same measured magnetic field are equal in value and in the same direction, and that the changes in the values ​​generated by the other portion of the sensing units in the first sensing area 201 and the second sensing area 202 constituting the second sensor for the same measured magnetic field are equal in value and in the same direction.As for, the part sensing units of the first sensing area 201, the second sensing area 202 constituting the first sensor and the other part sensing units of the first sensing area 201, the second sensing area 202 constituting the second sensor, the change values generated by the same measured magnetic field are equal, the same or opposite.

[0047] In general, the first sensing area 201, the second sensing area 202 and / or the third sensing area 203 can each include a plurality of sensing units. For example, the first sensing area 201 and the second sensing area 202 each include a plurality of sensing units, each of the sensing units has a center line in the movement direction X, the center line of the sensing units of the first sensing area 201 coincides with the first center line 211 of the first sensing area 201, and each of the sensing units is arranged continuously on the first center line 211; the center line of the sensing units of the second sensing area 202 coincides with the second center line 212 of the second sensing area 202, and each of the sensing units is arranged continuously on the second center line 212. The sensing units of the first sensing area 201 and the second sensing area 202 can be connected in series, in parallel, or both in series and in parallel, as long as all the sensing units are finally connected into a half-bridge structure or a full-bridge structure to generate the first output signal V1. Alternatively, part of the sensing units of the first sensing area 201 and the second sensing area 202 generate the same change value in the same direction for the same measured magnetic field, and the other part of the sensing units generate the same change value in the opposite direction for the same measured magnetic field, and the two parts of the sensing units are arranged in turn and spaced apart on the first center line 211 and the second center line 212, respectively, that is, the distribution of the two kinds of sensing units with opposite characteristics on the first center line 211 and the second center line 212 is spaced apart one by one, so that the measured magnetic field can be sensed more uniformly. Of course, if the characteristics of each sensing unit are the same, they can be arranged in order one by one. For another example, the third sensing area 203 includes a plurality of sensing units, each of the sensing units has a center line in the movement direction X, and the sensing units of the third sensing area 203 can be connected in series, in parallel, or both in series and in parallel, as long as all the sensing units are finally connected into a half-bridge structure or a full-bridge structure to generate the second output signal V2. Of course, part of the sensing units of the third sensing area 203 and the other part of the sensing units generate the same change value in the opposite direction for the same measured magnetic field, and the two parts of the sensing units can be arranged in any order or in order on the third center line 213, and in general, the more uniform the better, such as one-by-one spaced apart arrangement. However, it should be noted that the more the number of sensing units, the more metal wiring layers are needed to connect them, which increases the difficulty of design and manufacturing, and increases the material cost and process cost. In general, according to the technical content of the whole application, the sensing units of each sensing area are partially the same, consistent, corresponding and symmetrical with each other, and the overall effect is better.

[0048] Finally, it should be noted that the above embodiments are all described by taking the example that the first sensing area 201, the second sensing area 202, and the third sensing area 203 are composed of anisotropic magnetoresistive units. In fact, the first sensing area 201, the second sensing area 202, and the third sensing area 203 can also be composed of giant magnetoresistive sensing units or tunneling magnetoresistive units or Hall sensing units. Adaptive adjustments or replacements that can be easily thought of by those skilled in the art under the guidance of this application should all be included in the scope of protection of this application.

[0049] A second embodiment of the present application provides a magnetic sensing method for determining a distance, speed, angle, and direction of relative motion between a magnetic sensing device and an object. The magnetic sensing device and the object have a relative motion relationship along a motion direction X, and the object has a magnetic field to be measured. The magnetic sensing device is the magnetic sensing device described above. The magnetic sensing method includes:

[0050] A first output signal V1 is obtained jointly through the first sensing area 201 and the second sensing area 202, and a second output signal V2 is obtained through the third sensing area 203. The phase difference between the first output signal V1 and the second output signal V2 is 90 degrees. The movement distance, speed, angle, and movement direction of the relative movement are determined jointly based on the first output signal V1 and the second output signal V2.

[0051] The present application discloses a magnetic sensing device and method. The device comprises a first sensing region, a third sensing region, and a second sensing region arranged continuously along a motion direction on a supporting surface of a substrate. The first sensing region, the second sensing region, and the third sensing region respectively have a first centerline, a second centerline, and a third centerline in the motion direction. The first centerline, the second centerline, and the third centerline respectively pass through the midpoints of the projections of the first sensing region, the second sensing region, and the third sensing region in the motion direction and are all perpendicular to the motion direction. The first centerline and the second centerline are symmetrical with respect to the third centerline. A first output signal is obtained through the first sensing region and the second sensing region, and a second output signal is obtained through the third sensing region. The first output signal and the second output signal have a phase difference of 90 degrees. The distance, speed, angle, and direction of the relative motion are determined based on the first and second output signals. Accurate results can be output regardless of whether the measured magnetic field is low or high. This technology breaks through the measurement limitations of existing magnetic sensing devices, significantly extending the measurement range to over 3000G. It also offers increased tolerance to ambient magnetic fields and signal drift, and supports a wider range of magnetic field signal periods, significantly enhancing the device's application scope and flexibility. Furthermore, it offers improved signal sensitivity. The sensor's output signal is calculated by an operational amplifier as the device's final output, eliminating the need for subsequent calculations. This simplifies the circuit structure and reduces power consumption and cost.

[0052] It should be understood that the above description is for illustrative purposes only and is not intended to be limiting. Many embodiments and many applications beyond the examples provided will be apparent to those skilled in the art upon reading the above description. Therefore, the scope of the present teachings should not be determined with reference to the above description, but rather with reference to the preceding claims and the full scope of equivalents to which such claims are entitled. For the purpose of completeness, all articles and references, including disclosures of patent applications and publications, are incorporated herein by reference. The omission of any aspect of the subject matter disclosed herein from the preceding claims is not intended to be a disclaimer of such subject matter, nor should it be considered that the applicants did not consider such subject matter to be part of the disclosed subject matter.

Claims

1. A magnetic sensing device having a relative motion relationship with an object along a motion direction, wherein the object has a magnetic field to be measured, and the magnetic sensing device is used to sense the distance, speed, angle, and direction of the relative motion, characterized in that: The magnetic sensing device comprises: a substrate having a supporting surface parallel to the direction of movement, on which a first sensing area, a third sensing area, and a second sensing area are continuously arranged along the direction of movement, wherein the first sensing area, the second sensing area, and the third sensing area respectively have a first centerline, a second centerline, and a third centerline in the direction of movement, the first centerline, the second centerline, and the third centerline respectively passing through the midpoint of the projection length of the first sensing area, the second sensing area, and the third sensing area in the direction of movement, and are all perpendicular to the direction of movement, and the first centerline and the second centerline are symmetrical with respect to the third centerline; The first sensing area and the second sensing area are used to output a first output signal, and the third sensing area is used to output a second output signal. The first output signal and the second output signal have a phase difference of 90 degrees and are used to determine the movement distance, speed, angle, and direction of the relative movement. The first sensing area, the second sensing area, and / or the third sensing area respectively include a plurality of sensing units, each of which has a center line in the direction of motion; the center line of the sensing units in the first sensing area is consistent with the first center line of the first sensing area, and the sensing units are arranged continuously on the first center line; the center line of the sensing units in the second sensing area is consistent with the second center line of the second sensing area, and the sensing units are arranged continuously on the second center line; some of the sensing units in the first sensing area and the second sensing area are connected in series and / or in parallel, and ultimately all of the sensing units are connected to form a half-bridge structure or a full-bridge structure for generating the first output signal; some of the sensing units in the third sensing area are connected in series and / or in parallel, and ultimately all of the sensing units are connected to form a half-bridge structure or a full-bridge structure for generating the second output signal; some of the sensing units in the third sensing area generate changes in value equal to or in the same direction for the same measured magnetic field, which are equal to or in opposite directions for the changes in value generated by other parts of the sensing units for the same measured magnetic field, and the sensing units of the two parts are arranged one by one and interspersed with each other on the third center line.

2. The magnetic sensing device according to claim 1, wherein: The first sensing area, the second sensing area, and the third sensing area are all regularly shaped and regularly arranged on the supporting surface. The first center line, the second center line, and the third center line are respectively the center axes of the first sensing area, the second sensing area, and the third sensing area. The first sensing area, the second sensing area, and the third sensing area are respectively symmetrical structures relative to the first center line, the second center line, and the third center line.

3. The magnetic sensing device according to claim 1, wherein: The first sensing area and the second sensing area each include a first sensing unit, each of the first sensing units having a center line in the motion direction, the center line of the first sensing unit in the first sensing area coincides with the first center line of the first sensing area, and the center line of the first sensing unit in the second sensing area coincides with the second center line of the second sensing area; The two first sensing units generate changes in value with the same direction for the same measured magnetic field. The two first sensing units are connected in series to form a half-bridge structure to constitute a first sensor. The connection point between the two first sensing units outputs a first sensing signal, and the first sensing signal is used to generate the first output signal.

4. The magnetic sensing device according to claim 1, wherein: The third sensing area includes a first sensing unit and a second sensing unit. The first sensing unit and the second sensing unit both have a center line in the direction of movement and are consistent with the third center line of the third sensing area. The first sensing unit and the second sensing unit generate equal and opposite changes in the same measured magnetic field. The first sensing unit and the second sensing unit are connected in series to form a half-bridge structure to constitute a third sensor. The connection point between the first sensing unit and the second sensing unit outputs a third sensing signal, and the third sensing signal is used to generate the second output signal.

5. The magnetic sensing device according to claim 1, wherein: The first sensing area and the second sensing area each include a first sensing unit and a second sensing unit, each of the first sensing unit and the second sensing unit having a center line in the motion direction, the center line of the first sensing unit of the first sensing area and the center line of the second sensing unit of the first sensing area coincide with the first center line of the first sensing area, and the center line of the first sensing unit of the second sensing area and the center line of the second sensing unit of the second sensing area coincide with the second center line of the second sensing area; The two first sensing units generate changes in value with respect to the same measured magnetic field in the same direction, which is equal to the changes in value with respect to the two second sensing units in the same measured magnetic field in the opposite direction. The first sensing unit and the second sensing unit in the first sensing area are connected in series to form a half-bridge structure to constitute a first sensor, and a connection point between the first sensing unit and the second sensing unit in the first sensing area outputs a first sensing signal. The first sensing unit and the second sensing unit in the second sensing area are connected in series to form a half-bridge structure to constitute a second sensor, and a connection point between the first sensing unit and the second sensing unit in the second sensing area outputs a second sensing signal. The first sensing signal and the second sensing signal are used to generate the first output signal.

6. The magnetic sensing device according to claim 1, wherein: The third sensing area includes a first sensing unit, a second sensing unit, a third sensing unit, and a fourth sensing unit. The first sensing unit, the second sensing unit, the third sensing unit, and the fourth sensing unit all have a center line in the direction of movement and are consistent with the third center line of the third sensing area. The change values ​​generated by the first sensing unit and the third sensing unit for the same measured magnetic field are equal and in the same direction, which is opposite to the change values ​​generated by the second sensing unit and the fourth sensing unit for the same measured magnetic field. The first sensing unit and the second sensing unit are connected in series to form a half-bridge structure, and the connection point between the two outputs a third sensing signal. The third sensing unit and the fourth sensing unit are connected in series to form a half-bridge structure, and the connection point between the two outputs a fourth sensing signal. Two of the half-bridge structures are connected to a full-bridge structure to constitute a third sensor, and the third sensing signal and the fourth sensing signal are used to generate the second output signal. The first sensing unit, the second sensing unit, the third sensing unit, and the fourth sensing unit are arranged arbitrarily on the third center line. Optionally, the first sensing unit, the fourth sensing unit, the third sensing unit, and the second sensing unit are arranged in sequence and continuously on the third center line.

7. The magnetic sensing device according to claim 1, wherein: The first sensing area and the second sensing area each include a first sensing unit and a second sensing unit, each of the first sensing unit and the second sensing unit having a center line in the motion direction, the center line of the first sensing unit of the first sensing area and the center line of the second sensing unit of the first sensing area coincide with the first center line of the first sensing area, and the center line of the first sensing unit of the second sensing area and the center line of the second sensing unit of the second sensing area coincide with the second center line of the second sensing area; The two first sensing units generate changes in value with respect to the same measured magnetic field in the same direction, which is equal to the changes in value with respect to the two second sensing units in the same measured magnetic field in the same direction or opposite to the changes in value; the first sensing unit of the first sensing area and the first sensing unit of the second sensing area are connected in series to form a half-bridge structure to constitute a first sensor, and a connection point between the first sensing unit of the first sensing area and the first sensing unit of the second sensing area outputs a first sensing signal; the second sensing unit of the first sensing area and the second sensing unit of the second sensing area are connected in series to form a half-bridge structure to constitute a second sensor, and a connection point between the second sensing unit of the first sensing area and the second sensing unit of the second sensing area outputs a second sensing signal; the first sensing signal and the second sensing signal are used to generate the first output signal.

8. The magnetic sensing device according to claim 1, wherein: The changes in the values ​​of the sensing units in the first sensing area and the second sensing area for the same measured magnetic field are equal in value and in the same direction, which are opposite to the changes in the values ​​of the other sensing units for the same measured magnetic field, and the sensing units of the two parts are arranged one by one on the first center line and the second center line respectively; the sensing units in the third sensing area are connected in series and / or in parallel, and finally all the sensing units are connected to form a half-bridge structure or a full-bridge structure to generate the second output signal.

9. The magnetic sensing device according to claim 1, wherein: The magnetic sensing device further includes a first operational amplifier and a second operational amplifier. The first sensing area and the second sensing area are connected to the first operational amplifier, and the first operational amplifier outputs the first output signal. The third sensing area is connected to the second operational amplifier, and the second operational amplifier outputs the second output signal.

10. The magnetic sensing device according to claim 1, wherein: The first sensing region, the second sensing region, and the third sensing region are composed of anisotropic magnetoresistive units, giant magnetoresistive sensing units, tunneling magnetoresistive units, or Hall sensing units.

11. A magnetic sensing method for determining the distance, speed, angle, and direction of relative motion between a magnetic sensing device and an object, wherein the magnetic sensing device and the object have a relative motion relationship along a direction of motion and the object has a magnetic field to be measured, characterized in that: The magnetic sensing device adopts the magnetic sensing device according to any one of claims 1 to 10, and the magnetic sensing method includes: A first output signal is obtained jointly through the first sensing area and the second sensing area, and a second output signal is obtained through the third sensing area. The phase difference between the first output signal and the second output signal is 90 degrees. The movement distance, speed, angle and movement direction of the relative movement are determined jointly based on the first output signal and the second output signal.

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