A large-stroke nanometer parallel adjustment platform

Abstract

The present invention relates to the technical field of precision machinery, and specifically provides a large-stroke nanometer-level parallel adjustment platform, which includes: an upper platform, a plurality of support rod assemblies and a lower platform; the support rod assembly includes two support rod groups and two driving devices, and the driving device connects the support rod group; the support rod group includes an upper flexible hinge, a lower flexible hinge and a support rod; the upper flexible hinge and the lower flexible hinge are asymmetric conic curve flexible hinges, both ends are cylindrical connecting ends, the middle part is an arc formed by a combination of a hyperbola and an elliptical curve, and the curves are tangent at the central axis. Therefore, by using an asymmetric flexible hinge formed by a combination of a hyperbola and an elliptical curve as a kinematic pair, combined with a driving device, on the one hand, the problem of low precision caused by the rigid hinge of the parallel mechanism is solved, and on the other hand, the problem of the contradiction between the large motion range and high motion precision of the traditional flexible hinge is solved; it is achieved that nanometer-level motion precision is met while moving in a large range.

Description

Technical Field

[0001] The invention relates to the technical field of precision machinery, and specifically provides a large-stroke nanometer-level parallel adjustment platform. Background Art

[0002] The parallel platform has good stability and carrying capacity. It is widely used in many fields, such as adaptive positioning, micro-manipulation robotics and medical engineering. With the development of sparse aperture imaging technology, the key to achieving high-resolution imaging in sparse aperture imaging systems is to achieve coherent imaging on the image plane through the light beams of each sub-aperture. Therefore, the correction of the phase difference between each sub-aperture depends on the parallel platform. However, the parallel platform with rigid hinges and the common flexible parallel platform can only achieve millimeter and micron level accuracy, and cannot achieve the required nanometer level accuracy. Therefore, how to realize a flexible parallel robot with millimeter-level large travel and nanometer-level accuracy is a huge challenge.

[0003] When using a flexible hinge to adjust the platform in parallel, its range of motion almost depends on the deformation of the flexible hinge. The deformation of the flexible hinge is the movement caused by the elastic deformation of its weak part after being acted upon by an external force, so its range of motion is very small, which will inevitably lead to a very small working space for the parallel platform. For common symmetrical flexible hinges, such as elliptical, circular, parabolic and other types of flexible hinges, there is often a contradiction between the range of motion and the accuracy of motion during transmission, that is, a large range of motion is prone to center drift, resulting in a large rotation error, resulting in a reduction in motion accuracy, but a small rotation error, resulting in a reduction in the range of motion. Therefore, it is necessary to provide a flexible hinge that has both a large range of motion and good motion accuracy. Summary of the invention

[0004] In order to solve the above problems, the present invention provides a large-stroke nanometer-level parallel adjustment platform, which specifically comprises: an upper platform, a plurality of support rod assemblies and a lower platform; each of the support rod assemblies comprises two support rod groups and two driving devices, and each of the driving devices is connected to one of the support rod groups; two of the driving devices are installed side by side on the lower platform, and each of the driving devices adjusts the spatial position of the support rod group connected thereto to adjust the angle between the upper platform and the lower platform; each of the support rod groups comprises an upper flexible hinge, a lower flexible hinge and a support rod, one end of the support rod is connected to the upper platform via one of the upper flexible hinges, and the other end of the support rod is connected to the driving device via another of the lower flexible hinges;

[0005] The top views of the upper flexible hinge and the lower flexible hinge are both circular;

[0006] The upper flexible hinge and the lower flexible hinge are both asymmetric conic flexible hinges, both ends of which are cylindrical connecting ends, and the middle part is an arc formed by a combination of a hyperbola and an elliptical curve, and the curves are tangent at the central axis.

[0007] The driving device comprises a first driving device and a second driving device, the first driving device comprises a first guide rail and a first inclined block which moves linearly along the direction of the first guide rail, the first guide rail is mounted on the lower platform, and the first inclined block is connected to the lower flexible hinge;

[0008] The second driving device comprises a second guide rail and a second inclined block which moves linearly along the direction of the second guide rail, the second guide rail is mounted on the lower platform, and the second inclined block is connected to the lower flexible hinge;

[0009] The first inclined block and the second inclined block are mounted on the lower platform in a mirror-symmetrical manner.

[0010] The first driving device also includes a first slider, a first grating ruler, a first grating ruler reading head, a first piezoelectric motor and a first motor seat;

[0011] The first inclined block is mounted on the first guide rail through the first slider, the first piezoelectric motor drives the first slider to move along the first guide rail, the first grating ruler is mounted on one side of the inclined block, the first grating ruler reader is used to read the position value of the grating ruler, and the first piezoelectric motor is mounted on the first motor seat;

[0012] The second driving device also includes a second slider, a second grating ruler, a second grating ruler reading head, a second piezoelectric motor and a second motor seat;

[0013] The second inclined block is installed on the second guide rail through the second slider, the second piezoelectric motor drives the second slider to move along the second guide rail, the second grating scale is installed on one side of the inclined block, the second grating scale reader is used to read the position value of the grating scale, and the second piezoelectric motor is installed on the second motor seat.

[0014] Preferably, there are three support rod assemblies.

[0015] Preferably, the upper flexible hinge and the lower flexible hinge are both connected to the support rod via a cylindrical connecting end close to the elliptical curve, and both ends of the support rod are provided with a receiving cavity for accommodating and installing the cylindrical connecting end.

[0016] Preferably, mounting holes are provided on the cylindrical connecting ends of the upper flexible hinge and the lower flexible hinge.

[0017] Preferably, the upper platform is provided with an upper platform mounting surface for mounting the upper flexible hinge, and the upper platform mounting surface is inclined with respect to the table top of the upper platform.

[0018] Preferably, the shapes of the upper platform and the lower platform are both circular, elliptical or polygonal, and the circumference of the upper platform is smaller than the circumference of the lower platform.

[0019] Compared with the prior art, the present invention can achieve the following beneficial effects: a large-stroke nanometer-level parallel adjustment platform proposed in the present invention specifically comprises: an upper platform, a plurality of support rod assemblies and a lower platform; each of the support rod assemblies comprises two support rod groups and two driving devices, and each of the driving devices is connected to one of the support rod groups; two of the driving devices are installed side by side on the lower platform, and each of the driving devices adjusts the spatial position of the support rod group connected thereto to adjust the angle between the upper platform and the lower platform; each of the support rod groups comprises an upper flexible hinge, a lower flexible hinge and a support rod, one end of the support rod is connected to the upper platform through an upper flexible hinge, and the other end of the support rod is connected to the driving device through another lower flexible hinge; the top views of the upper flexible hinge and the lower flexible hinge are both circular; the upper flexible hinge and the lower flexible hinge are both asymmetric conic curve flexible hinges, both ends are cylindrical connecting ends, the middle part is an arc formed by a combination of a hyperbola and an elliptical curve, and the curves are tangent at the central axis. The driving device includes a first driving device and a second driving device. The first driving device includes a first guide rail and a first inclined block that moves linearly along the direction of the first guide rail. The first guide rail is installed on the lower platform, and the first inclined block is connected to the lower flexible hinge. The second driving device includes a second guide rail and a second inclined block that moves linearly along the direction of the second guide rail. The second guide rail is installed on the lower platform, and the second inclined block is connected to the lower flexible hinge. The first inclined block and the second inclined block are installed on the lower platform in a mirror-symmetrical manner. The first driving device also includes a first slider, a first grating scale, a first grating scale reading head, a first piezoelectric motor and a first motor seat; the first inclined block is installed on the first guide rail through the first slider, and the first piezoelectric motor drives the first slider to move along the first guide rail, the first grating scale is installed on one side of the inclined block, the first grating scale reading head is used to read the position value of the grating scale, and the first piezoelectric motor is installed on the first motor seat; the second driving device also includes a second slider, a second grating scale, a second grating scale reading head, a second piezoelectric motor and a second motor seat; the second inclined block is installed on the second guide rail through the second slider, and the second piezoelectric motor drives the second slider to move along the second guide rail, the second grating scale is installed on one side of the inclined block, the second grating scale reading head is used to read the position value of the grating scale, and the second piezoelectric motor is installed on the second motor seat.

[0020] Therefore, the large-stroke nanoscale parallel adjustment platform of the present invention uses an asymmetric flexible hinge composed of a hyperbola and an elliptical curve as a kinematic pair, combined with a driving device as a driving unit that directly drives the upper flexible hinge and the lower flexible hinge. On the one hand, it solves the problem of low precision of the traditional parallel mechanism due to friction, wear and assembly errors of the rigid hinges; on the other hand, it solves the contradiction between the large motion range and high motion accuracy of the traditional flexible hinges, and achieves nanoscale motion accuracy under the condition of large range of motion. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic structural diagram of a large-stroke nanoscale parallel adjustment platform provided according to Embodiment 1 or 2 of the present invention;

[0022] Figure 2 is a top view of a large-stroke nanoscale parallel adjustment platform provided according to Embodiment 1 of the present invention;

[0023] Figure 3 2 is a schematic diagram of the structure of a first driving device of a large-stroke nanoscale parallel adjustment platform provided according to Embodiment 1 of the present invention;

[0024] Figure 4 2 is a schematic diagram of the structure of a second driving device of a large-stroke nanometer-level parallel adjustment platform provided according to Embodiment 1 of the present invention;

[0025] Figure 5 is a schematic structural diagram of a first inclined block and a second inclined block provided according to Embodiment 1 of the present invention;

[0026] Figure 6 is a schematic structural diagram of a first guide rail provided according to Embodiment 1 of the present invention;

[0027] Figure 7 is a schematic structural diagram of a first sliding block provided according to Embodiment 1 of the present invention;

[0028] Figure 8 is a schematic structural diagram of a support rod provided according to Embodiment 1 of the present invention;

[0029] Fig. 9 is a schematic structural diagram of an upper flexible hinge and a lower flexible hinge provided according to Embodiment 1 of the present invention;

[0030] Fig.10 is a front view of an upper flexible hinge provided according to Embodiment 1 of the present invention;

[0031] Fig.11 is a top view of an upper platform provided according to Embodiment 2 of the present invention;

[0032] Fig.12 3 is a top view of the lower platform provided according to Example 2 of the present invention.

[0033] Reference numerals include:

[0034] 1-upper platform; 11-upper platform mounting surface; 12-third connecting through hole; 2-support rod assembly;

[0035] 21- support rod group; 211- upper flexible hinge; 2111- hyperbola; 2112- elliptical curve;

[0036] 212-support rod; 2121-first connecting through hole; 2122-accommodating cavity;

[0037] 213 - lower flexible hinge; 214 - cylindrical connecting end; 2141 - mounting hole;

[0038] 22-first driving device; 221-first inclined block; 2211-second connecting through hole; 2212-circular mounting position;

[0039] 222-first guide rail; 223-first slider; 224-first grating ruler; 225-first grating ruler reading head; 226-first piezoelectric motor; 227-first motor seat;

[0040] 23-second driving device; 231-second inclined block; 232-second guide rail; 233-second slider; 234-second grating ruler; 235-second grating ruler reading head; 236-second piezoelectric motor; 237-second motor seat;

[0041] 3- Go down to the platform. DETAILED DESCRIPTION

[0042] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, the same modules are represented by the same reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, the detailed description thereof will not be repeated.

[0043] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation of the present invention.

[0044] Embodiment 1

[0045] A large-stroke nanometer parallel adjustment platform Figure 1 , Figure 2 , Figures 9 and 10 , which comprises: an upper platform 1, a plurality of support rod assemblies 2 and a lower platform 3;

[0046] Each of the support rod assemblies 2 includes two support rod groups 21 and two driving devices, and each of the driving devices is connected to one of the support rod groups 21;

[0047] The two driving devices are installed side by side on the lower platform 3, and each driving device adjusts the spatial position of the support rod group 21 connected thereto to adjust the angle between the upper platform 1 and the lower platform 3;

[0048] Each of the support rod groups 21 includes an upper flexible hinge 211, a lower flexible hinge 213 and a support rod 212, one end of the support rod 212 is connected to the upper platform 1 through an upper flexible hinge 211, and the other end of the support rod 212 is connected to the driving device through another lower flexible hinge 213;

[0049] The top views of the upper flexible hinge 211 and the lower flexible hinge 213 are both circular;

[0050] The upper flexible hinge 211 and the lower flexible hinge 213 are both asymmetric conic flexible hinges, both ends of which are cylindrical connecting ends 214, and the middle part is an arc formed by a combination of a hyperbola 2111 and an elliptical curve 2112, and the curves are tangent at the central axis.

[0051] The above means that the large-stroke nano-level parallel adjustment platform includes an upper platform 1, a plurality of support rod assemblies 2 and a lower platform 3, and the upper platform 1 and the lower platform 3 are connected and adjusted by a plurality of support rod assemblies 2. Specifically, each support rod assembly 2 includes two support rod groups 21 and two driving devices. It can be understood that the support rod group 21 and the driving device are in a one-to-one correspondence, that is, each driving device is connected to drive a support rod group 21, and the two driving devices of each support rod assembly 2 are installed side by side on the lower platform 3.

[0052] Furthermore, each support rod group 21 also includes an upper flexible hinge 211, a lower flexible hinge 213 and a support rod 212, and the upper flexible hinge 211 and the lower flexible hinge 213 are respectively installed at the two ends of the support rod 212. Specifically, one end of the support rod 212 is installed on the upper platform 1 through the upper flexible hinge 211 in the same support rod group 21, and the other end of the support rod 212 is installed on a corresponding driving device through the lower flexible hinge 213 in the same support rod group 21. Therefore, the driving device installed on the lower platform 3 can directly drive the lower flexible hinge 213 of the support rod group 21 corresponding to it to move, thereby driving the support rod 212 to move, and then driving the upper flexible hinge 211 corresponding to the support rod 212 to move, and finally adjusting the position of the upper platform 1 connected to the upper flexible hinge 211 to adjust the angle and position relationship between the upper platform 1 and the lower platform 3. Thus, by using the upper flexible hinge 211 and the lower flexible hinge 213 as the kinematic pair, the advantages of the flexible mechanism and the parallel mechanism are combined. On the one hand, the adjustment platform based on the upper flexible hinge 211 and the lower flexible hinge 213 has a series of advantages such as compact structure, high rigidity, strong load-bearing capacity, high precision, and easy assembly; on the other hand, it also solves the problem of low precision of the traditional parallel mechanism caused by friction, wear and assembly errors of the rigid hinges. Furthermore, since the traditional flexible hinges are all symmetrical structures, which limits the problem that their large travel range and high motion precision cannot coexist, the upper flexible hinge 211 and the lower flexible hinge 213 of this embodiment both adopt an asymmetric arc structure composed of a hyperbola 2111 and an elliptical curve 2112, which increases their motion range and achieves nanometer-level motion precision under the condition of large-range motion.

[0053] Compared with the traditional rigid hinges, the upper flexible hinge 211 and the lower flexible hinge 213 used in the large-stroke nanoscale parallel adjustment platform of this embodiment have the advantages of integral manufacturing, no friction, zero gap and no lubrication.

[0054] The top projections of the upper flexible hinge 211 and the lower flexible hinge 213 are both circular, see Figures 9 and 10 Both ends of the upper flexible hinge 211 and the lower flexible hinge 213 are provided with cylindrical connecting ends 214, and the middle part is an arc shape composed of a hyperbola 2111 and an elliptical curve 2112. In this embodiment, the upper flexible hinge 211 and the lower flexible hinge 213 are exactly the same in shape and size, and the upper flexible hinge 211 and the lower flexible hinge 213 belonging to the same support rod group 21 are mirror-symmetrical relative to the support rod 212.

[0055] Furthermore, the arc shape in the middle of the upper flexible hinge 211 and the lower flexible hinge 213 is composed of a hyperbola 2111 and an elliptical curve 2112, which has both the high precision of the hyperbola 2111 and the high flexibility of the elliptical curve 2112, and has both high flexibility and high rotation precision. The upper flexible hinge 211 and the lower flexible hinge 213 both adopt an all-round cutout and a large aspect ratio structure, and can be regarded as a slender space beam structure rotating around three axes. The number of hinges required in the structural design can be reduced, saving manufacturing costs.

[0056] The upper flexible hinge 211 and the lower flexible hinge 213 are both formed by cutting out cuts on the material through CNC machining to form an obvious weak part (an arc formed by the combination of the hyperbola 2111 and the elliptical curve 2112), and the movement is generated by utilizing the easy deformation characteristics of the weak part of the material and the reversible elastic deformation of the material itself. Compared with traditional kinematic pairs, the upper flexible hinge 211 and the lower flexible hinge 213 have the characteristics of simple structure, no motion gap and friction.

[0057] The upper flexible hinge 211 and the lower flexible hinge 213 used in this embodiment are all flexible ball joints, which can realize rotation in three directions. A flexible ball joint has three rotational degrees of freedom, which can reduce the number of flexible hinges required in the overall structure, making the structure more compact and reducing manufacturing costs. At the same time, it also has the characteristics of high precision and high resolution, and is suitable for micro-operations in many specific environments.

[0058] It is worth mentioning that for the flexible hinge, in order to improve the motion range and motion accuracy of the flexible hinge, it is necessary to first break the traditional design concept of symmetrical design of the flexible hinge, because the common symmetrical design will limit the improvement of the motion range and motion accuracy of the flexible hinge. Therefore, this embodiment is based on the design concept of asymmetric flexible hinges to design a high-flexibility and high-precision flexible hinge, namely the upper flexible hinge 211 and the lower flexible hinge 213.

[0059] In this example, see Figure 3 Figure 4 The driving device includes a first driving device 22 and a second driving device 23. The first driving device 22 includes a first guide rail 222 and a first inclined block 221 that moves linearly along the first guide rail 222. The first guide rail 222 is installed on the lower platform 3. The first inclined block 221 is connected to the lower flexible hinge 213.

[0060] The second driving device 23 includes a second guide rail 232 and a second inclined block 231 that moves linearly along the second guide rail 232, the second guide rail 232 is installed on the lower platform 3, and the second inclined block 231 is connected to the lower flexible hinge 213;

[0061] The first inclined block 221 and the second inclined block 231 are mounted on the lower platform 3 in a mirror-symmetrical manner.

[0062] It is necessary to further explain that the first inclined block 221 is connected to the lower flexible hinge 213, which means that the first inclined block 221 is connected to the lower flexible hinge 213 on the branch rod group 21 corresponding to the first driving device 22 to which it belongs, and the first inclined block 221 is provided with a circular mounting position 2212 for accommodating a cylindrical connecting end 214 of the lower flexible hinge 213, and the side of the circular mounting position 2212 is provided with a second connecting through hole 2211 corresponding to the mounting hole 2141 on the lower flexible hinge 213. It can be understood that the cylindrical connecting end 214 of the lower flexible hinge 213 close to the hyperbola 2111 is inserted into the circular mounting position 2212 of the first inclined block 221, and a screw or bolt is inserted into the corresponding mounting hole 2141 after passing through the second connecting through hole 2211 and locked. The second inclined block 231 is also the same, which will not be repeated here.

[0063] The first inclined block 221 and the second inclined block 231 are installed side by side on the lower platform 3 through the first guide rail 222 and the second guide rail 232 respectively. A plane is set perpendicular to the lower platform 3, and the plane is perpendicular to the connection line of the first inclined block 221 and the second inclined block 231. The installation positions of the first inclined block 221 and the second inclined block 231 are mirror-symmetrical with respect to the plane.

[0064] In this embodiment, the first driving device 22 further includes a first slider 223, a first grating ruler 224, a first grating ruler reading head 225, a first piezoelectric motor 226 and a first motor seat 227;

[0065] The first inclined block 221 is mounted on the first guide rail 222 through the first slider 223, the first piezoelectric motor 226 drives the first slider 223 to move along the first guide rail 222, the first grating ruler 224 is mounted on one side of the inclined block, the reader of the first grating ruler 224 is used to read the position value of the grating ruler, and the first piezoelectric motor 226 is mounted on the first motor seat 227;

[0066] The second driving device 23 further includes a second slider 233, a second grating ruler 234, a second grating ruler reading head 235, a second piezoelectric motor 236 and a second motor base 237;

[0067] The second inclined block 231 is installed on the second guide rail 232 through the second slider 233, the second piezoelectric motor 236 drives the second slider 233 to move along the second guide rail 232, the second grating scale 234 is installed on one side of the inclined block, the second grating scale 234 reader is used to read the position value of the grating scale, and the second piezoelectric motor 236 is installed on the second motor seat 237.

[0068] Please continue to read the above Figures 3 to 7 The first piezoelectric motor 226 and the second piezoelectric motor 236 of the large-stroke nano-level parallel adjustment platform of this embodiment can be nano-resolution piezoelectric motors. For example, the first piezoelectric motor 226 drives the first slider 223 to move linearly along the first guide rail 222, thereby driving the first inclined block 221 and the lower flexible hinge 213 connected and mounted on the first inclined block 221, the support rod 212 connected to the lower flexible hinge 213, and the upper flexible hinge 211 connected to the support rod 212, thereby providing relative rotation between adjacent rigid components (upper platform 1 and lower platform 3) through flexion instead of traditional rotary joints. The problem of the contradiction between the large working stroke and high motion accuracy of the traditional parallel platform is solved, and nano-level motion accuracy is achieved under the condition of large-scale rapid motion.

[0069] In this embodiment, there are three support rod assemblies 2.

[0070] As mentioned above, there are three support rod assemblies 2, that is, there are six support rod groups 21, and there are also six driving devices, and the support rod groups 21 correspond to the driving devices one by one. In this embodiment, the orthographic projections of two support rod groups 21 belonging to the same support rod assembly 2 on the plane formed by the corresponding two driving devices and the connection point position of one of the support rod groups 21 on the upper platform 1 do not intersect.

[0071] In this embodiment, the upper flexible hinge 211 and the lower flexible hinge 213 are connected to the support rod 212 via a cylindrical connecting end 214 close to the elliptical curve 2112 , and both ends of the support rod 212 are provided with a receiving cavity 2122 for accommodating and installing the cylindrical connecting end 214 .

[0072] The above means that each of the upper flexible hinge 211 and the lower flexible hinge 213 has a cylindrical connecting end 214 at both ends. One cylindrical connecting end 214 of the upper flexible hinge 211 is close to the hyperbola 2111, and the other cylindrical connecting end 214 is close to the elliptical curve 2112; the same is true for the lower flexible hinge 213, which will not be repeated here. Furthermore, the upper flexible hinge 211 and the lower flexible hinge 213 are connected to the support rod 212 through the cylindrical connecting end 214 close to the elliptical curve 2112, that is, the upper flexible hinge 211 and the lower flexible hinge 213 are installed on the support rod 212 in a mirror-symmetrical manner.

[0073] In addition, two ends of the support rod 212 are provided with accommodating cavities 2122 for accommodating and connecting the cylindrical connecting ends 214 of the upper flexible hinge 211 and the lower flexible hinge 213 close to the elliptical curve 2112 .

[0074] In this embodiment, mounting holes 2141 are provided on the cylindrical connecting ends 214 of the upper flexible hinge 211 and the lower flexible hinge 213 .

[0075] See above. Figure 8 , Fig. 9 , a mounting hole 2141 is provided on the side of each cylindrical connecting end 214 of the upper flexible hinge 211 and the lower flexible hinge 213. It should be further explained that the sides of both ends of the support rod 212 are provided with first connecting through holes 2121 for connecting the mounting holes 2141. Specifically, the upper flexible hinge 211 and the lower flexible hinge 213 are connected to the support rod 212 in such a way that the cylindrical connecting ends 214 close to the ends of the elliptical curve 2112 are respectively inserted into the accommodating cavities 2122 at both ends of the support rod 212, and then bolts are passed through the first connecting through holes 2121 and the mounting holes 2141 in sequence, and locked and connected.

[0076] It should be further explained that two mounting holes 2141 are provided on the side of each cylindrical connecting end 214 , and two first connecting through holes 2121 are provided on the side of each end (accommodating cavity 2122 ) of the support rod 212 , and each first connecting through hole 2121 corresponds to a mounting hole 2141 .

[0077] In this example, see Fig.10 , the degree of freedom of the adjustment platform is determined by the following function:

[0078]

[0079] In the formula: F represents the number of degrees of freedom of motion; n represents the total number of components; g represents the total number of kinematic pairs; represents the number of degrees of freedom of the i-th kinematic pair; μ represents the number of all overconstraints. For example: taking the center point of the upper flexible hinge 211 or the lower flexible hinge 213 as the origin, the center axis of the upper flexible hinge 211 or the lower flexible hinge 213 as the X-axis, and the axis passing through the origin and perpendicular to the X-axis as the Y-axis, a plane coordinate system XOY is constructed;

[0080] With the slider as a moving pair and the upper flexible hinge 211 or the lower flexible hinge 213 corresponding to the coordinate system XOY as a spherical pair, the degree of freedom of the adjustment platform is determined by the above function.

[0081] As mentioned above, the upper flexible hinge 211 and the lower flexible hinge 213 are both made of QBe2.0 beryllium bronze, which has great elasticity and can achieve large stroke displacement. The size of the arc formed by the hyperbola 2111 and the elliptical curve 2112 in the middle of the upper flexible hinge 211 and the lower flexible hinge 213 can be designed according to the structural requirements and in combination with the above function.

[0082] Fig.10 The notch type of the upper flexible hinge 211 provided in this embodiment is shown, wherein the equations of the notch type hyperbola 2111 and the elliptic curve 2112 are as follows:

[0083] Hyperbola 2111: ;

[0084] Elliptic Curve 2112: ;

[0085] Wherein, t represents the diameter of the intersection of the hyperbola 2111 and the elliptic curve 2112 , d represents the diameter of the cylindrical connecting end 214 , and l represents the distance from the origin to the cylindrical connecting end 214 .

[0086] The equations of the hyperbola 2111 and the elliptic curve 2112 of the lower flexible hinge 213 are consistent with the equations of the upper flexible hinge 211 and are not described again.

[0087] Example 2

[0088] A large-stroke nanometer-level parallel adjustment platform, comprising: an upper platform 1, a plurality of support rod assemblies 2 and a lower platform 3;

[0089] Each of the support rod assemblies 2 includes two support rod groups 21 and two driving devices, and each of the driving devices is connected to one of the support rod groups 21;

[0090] The two driving devices are installed side by side on the lower platform 3, and each driving device adjusts the spatial position of the support rod group 21 connected thereto to adjust the angle between the upper platform 1 and the lower platform 3;

[0091] Each of the support rod groups 21 includes an upper flexible hinge 211, a lower flexible hinge 213 and a support rod 212, one end of the support rod 212 is connected to the upper platform 1 through an upper flexible hinge 211, and the other end of the support rod 212 is connected to the driving device through another lower flexible hinge 213;

[0092] The top views of the upper flexible hinge 211 and the lower flexible hinge 213 are both circular;

[0093] The upper flexible hinge 211 and the lower flexible hinge 213 are both asymmetric conic flexible hinges, both ends of which are cylindrical connecting ends 214, and the middle part is an arc formed by a combination of a hyperbola 2111 and an elliptical curve 2112, and the curves are tangent at the central axis;

[0094] The driving device includes a first driving device 22 and a second driving device 23. The first driving device 22 includes a first guide rail 222 and a first inclined block 221 that moves linearly along the first guide rail 222. The first guide rail 222 is installed on the lower platform 3. The first inclined block 221 is connected to the lower flexible hinge 213.

[0095] The second driving device 23 includes a second guide rail 232 and a second inclined block 231 that moves linearly along the second guide rail 232, the second guide rail 232 is installed on the lower platform 3, and the second inclined block 231 is connected to the lower flexible hinge 213;

[0096] The first inclined block 221 and the second inclined block 231 are mounted on the lower platform 3 in a mirror-symmetrical manner.

[0097] The first driving device 22 further includes a first slider 223, a first grating ruler 224, a first grating ruler reading head 225, a first piezoelectric motor 226 and a first motor seat 227;

[0098] The first inclined block 221 is mounted on the first guide rail 222 through the first slider 223, the first piezoelectric motor 226 drives the first slider 223 to move along the first guide rail 222, the first grating ruler 224 is mounted on one side of the inclined block, the reader of the first grating ruler 224 is used to read the position value of the grating ruler, and the first piezoelectric motor 226 is mounted on the first motor seat 227;

[0099] The second driving device 23 further includes a second slider 233, a second grating ruler 234, a second grating ruler reading head 235, a second piezoelectric motor 236 and a second motor base 237;

[0100] The second inclined block 231 is installed on the second guide rail 232 through the second slider 233, the second piezoelectric motor 236 drives the second slider 233 to move along the second guide rail 232, the second grating scale 234 is installed on one side of the inclined block, the second grating scale 234 reader is used to read the position value of the grating scale, and the second piezoelectric motor 236 is installed on the second motor seat 237.

[0101] In this embodiment, the upper platform 1 is provided with an upper platform installation surface 11 for installing the upper flexible hinge 211 , and the upper platform installation surface 11 is inclined with respect to the table surface of the upper platform 1 .

[0102] See above. Figure 1 , Figure 2 , Fig.11 and Fig.12 , the upper platform 1 may have a notched shape, the purpose is to reduce its weight. An upper platform mounting surface 11 for connecting with the upper flexible hinge 211 is provided on the side of the upper platform 1. There is a certain angle between the upper platform mounting surface 11 and the table top of the upper platform 1, the purpose is to facilitate the support rod 212 to be connected to the upper platform 1 through the upper flexible hinge 211, and a third connecting through hole 12 (mounting position) for mutual cooperation and connection with the upper flexible hinge 211 is provided on the upper platform mounting surface 11, that is, one end of the upper flexible hinge 211 is inserted into the third connecting through hole 12 of the upper platform mounting surface 11, and the screw is locked into the mounting hole 2141 of the upper flexible hinge 211 through the side of the third connecting through hole 12, so that the upper flexible hinge 211 is installed on the upper platform mounting surface 11.

[0103] In this embodiment, the shapes of the upper platform 1 and the lower platform 3 are both circular, elliptical or polygonal, and the circumference of the upper platform 1 is smaller than the circumference of the lower platform 3 .

[0104] As mentioned above, the lower platform 3 may also be in a shape with a notch in order to reduce its weight. The shape of the upper platform 1 may be consistent with that of the lower platform 3 , but the circumference of the lower platform 3 is greater than that of the upper platform 1 .

[0105] Although the embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and cannot be understood as limiting the present invention. Those skilled in the art may change, modify, replace and modify the above embodiments within the scope of the present invention.

[0106] The above specific implementations of the present invention do not constitute a limitation on the protection scope of the present invention. Any other corresponding changes and modifications made based on the technical concept of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A large-stroke nanoscale parallel adjustment platform, characterized in that: include: an upper platform, a plurality of strut assemblies and a lower platform; Each of the support rod assemblies comprises two support rod groups and two driving devices, and each of the driving devices is connected to one of the support rod groups; Two driving devices are installed side by side on the lower platform, and each driving device adjusts the spatial position of the support rod group connected thereto to adjust the angle between the upper platform and the lower platform; Each of the support rod groups includes an upper flexible hinge, a lower flexible hinge and a support rod, one end of the support rod is connected to the upper platform through an upper flexible hinge, and the other end of the support rod is connected to the driving device through another lower flexible hinge; The top views of the upper flexible hinge and the lower flexible hinge are both circular; The upper flexible hinge and the lower flexible hinge are both asymmetric conic flexible hinges, both ends of which are cylindrical connecting ends, and the middle part is an arc formed by a combination of a hyperbola and an elliptical curve, and the curves are tangent at the central axis; The equation of the hyperbola is given by: ； The equation of the elliptic curve is as follows: ； Where t represents the diameter of the intersection of the hyperbola and the elliptic curve, d represents the diameter of the cylindrical connection end, l Represents the distance from the origin to the cylindrical connection end; The driving device comprises a first driving device and a second driving device, the first driving device comprises a first guide rail and a first inclined block which moves linearly along the direction of the first guide rail, the first guide rail is mounted on the lower platform, and the first inclined block is connected to the lower flexible hinge; The second driving device comprises a second guide rail and a second inclined block which moves linearly along the direction of the second guide rail, the second guide rail is mounted on the lower platform, and the second inclined block is connected to the lower flexible hinge; The first inclined block and the second inclined block are mounted on the lower platform in a mirror-symmetrical manner; The first driving device also includes a first slider, a first grating ruler, a first grating ruler reading head, a first piezoelectric motor and a first motor seat; The first inclined block is mounted on the first guide rail through the first slider, the first piezoelectric motor drives the first slider to move along the first guide rail, the first grating ruler is mounted on one side of the inclined block, the first grating ruler reader is used to read the position value of the grating ruler, and the first piezoelectric motor is mounted on the first motor seat; The second driving device also includes a second slider, a second grating ruler, a second grating ruler reading head, a second piezoelectric motor and a second motor seat; The second inclined block is installed on the second guide rail through the second slider, the second piezoelectric motor drives the second slider to move along the second guide rail, the second grating scale is installed on one side of the inclined block, the second grating scale reader is used to read the position value of the grating scale, and the second piezoelectric motor is installed on the second motor seat.

2. The long-stroke nanoscale parallel adjustment platform according to claim 1, characterized in that: There are three support rod assemblies.

3. The large-stroke nanoscale parallel adjustment platform according to claim 1, characterized in that: The upper flexible hinge and the lower flexible hinge are both connected to the support rod via a cylindrical connecting end close to the elliptical curve, and both ends of the support rod are provided with accommodating cavities for accommodating and installing the cylindrical connecting ends.

4. The large-stroke nanoscale parallel adjustment platform according to claim 1, characterized in that: The cylindrical connecting ends of the upper flexible hinge and the lower flexible hinge are both provided with mounting holes.

5. The long-stroke nanoscale parallel adjustment platform according to claim 1, characterized in that: The upper platform is provided with an upper platform mounting surface for mounting the upper flexible hinge, and the upper platform mounting surface is inclined with respect to the table surface of the upper platform.

6. The large-stroke nanoscale parallel adjustment platform according to claim 1, characterized in that: The shapes of the upper platform and the lower platform are both circular, elliptical or polygonal, and the circumference of the upper platform is smaller than the circumference of the lower platform.

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