Jig and coating apparatus

Abstract

The present application discloses a jig and a coating equipment, wherein the jig comprises a base, a top cover and a heating device. The base comprises a substrate and a support connected to the substrate, the support is used for supporting a workpiece, and the substrate is provided with an air outlet. The top cover is a heat-conducting structure and is connected to the substrate. A reaction cavity is defined between the top cover and the substrate. The air outlet is in communication with the reaction cavity. The support is located in the reaction cavity. The top cover is provided with an air inlet in communication with the reaction cavity. The air inlet faces the support and is used for allowing reaction gas to enter the reaction cavity. The heating device is connected to the substrate. When the jig is used for loading the workpiece for coating, the side of the workpiece away from the heating device can be heated by the reaction gas, thereby reducing the temperature difference of the workpiece, making the temperature of the workpiece more uniform, and further improving the uniformity of the coating layer on the surface of the workpiece.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of coating, in particular to a jig and a coating equipment. BACKGROUND

[0002] In order to meet the more uniform and more dense deposition on the three-dimensional structure components, the vacuum coating process of atomic layer deposition is often used. In some technologies, a heating device is arranged on the workpiece support table, and the heat of the heating device can be directly transmitted to the workpiece through the support table to make the coating surface of the workpiece reach the set temperature for coating. However, for some poor heat conduction workpieces, the temperature of the side of the workpiece in contact with the support table will be higher than that of the side of the workpiece away from the support, thereby reducing the uniformity of the coating layer on the surface of the workpiece. SUMMARY

[0003] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides a jig which can be used to carry a workpiece to be coated to improve the uniformity of the coating layer of the workpiece.

[0004] The present application also provides a coating equipment having the above-mentioned jig.

[0005] The base, the top cover and the heating device according to the first aspect of the present application.

[0006] The base includes a substrate and a support connected to the substrate, the support is used to support the workpiece, the substrate has a gas outlet hole, the top cover is a heat-conducting structure, the top cover is connected to the substrate, and the top cover and the substrate define a reaction cavity therebetween, the gas outlet hole is in communication with the reaction cavity, the support is located in the reaction cavity, the top cover has a gas inlet hole in communication with the reaction cavity, the gas inlet hole faces the support, the gas inlet hole is used for the reaction gas to enter the reaction cavity, and the heating device is connected to the substrate and located on the side of the support away from the gas inlet hole.

[0007] The jig according to the present application has at least the following beneficial effects:

[0008] In the present embodiment, the heating device is connected to the base, and the top cover is a heat-conducting structure, so that the heat generated by the heating device can be transmitted to the top cover through the base. Therefore, when the jig of the present embodiment is used in the coating equipment, the reaction gas will be heated by the top cover during the process of entering the reaction cavity through the gas inlet hole, and after the reaction gas enters the reaction cavity, it will first contact the side of the workpiece away from the support to heat the side of the workpiece. Therefore, compared with the conventional technology, when the jig of the present embodiment is used to load the workpiece for coating, the side of the workpiece away from the support can be heated by the reaction gas, thereby reducing the temperature difference of the workpiece, making the temperature of the workpiece more uniform, and further improving the uniformity of the coating layer on the surface of the workpiece.

[0009] According to some embodiments of the present application, the base and the cover are heat-conductive structures, and the heating device is connected to the base.

[0010] According to some embodiments of the present application, the base comprises a plurality of the supports, and each two of the supports are arranged at intervals to form a support group, and the two supports of the support group are used to support the same workpiece, and the two supports of the support group are provided with the air outlet holes.

[0011] According to some embodiments of the present application, the jig further comprises a locking device movably connected to the base, and the locking device is used to lock the position of the workpiece.

[0012] According to some embodiments of the present application, the locking device comprises a connecting member and a locking member, the connecting member is movably connected to the base, the connecting member is provided with an avoiding hole used to avoid the workpiece, and the locking member is arranged at the avoiding hole and used to press the workpiece.

[0013] According to some embodiments of the present application, the locking member comprises an abutting portion, and the abutting portion is in point contact or line contact with the workpiece to press the workpiece.

[0014] According to some embodiments of the present application, the support is provided with an avoiding groove penetrating through the support along a set direction, the avoiding groove is provided with an upward third slot, and the rim of the third slot is used to support the workpiece and make the bottom of the workpiece have a gap with the bottom of the avoiding groove.

[0015] According to some embodiments of the present application, the support is provided with the air outlet hole along the set direction.

[0016] According to some embodiments of the present application, the support is detachably connected to the base.

[0017] According to some embodiments of the present application, the base comprises a supporting plate and a plurality of supports, the supporting plate and the plurality of supports are connected as an integrated structure, the base is detachably connected to the supporting plate, the supporting plate is provided with a ventilation hole, and the ventilation hole is communicated with the air outlet hole.

[0018] According to some embodiments of the present application, the diameter of the air outlet hole is greater than the diameter of the ventilation hole; or,

[0019] The diameter of the air outlet hole is less than the diameter of the ventilation hole.

[0020] The coating equipment according to the second aspect of the embodiments of the present application comprises the jig according to the first aspect of the embodiments of the present application.

[0021] The coating apparatus according to embodiments of the present invention has at least the following beneficial effects:

[0022] The fixture using the first embodiment includes a heating device connected to a base. The top cover is a heat-conducting structure, allowing heat generated by the heating device to be transferred to the top cover via the base. Therefore, when coating a workpiece using this embodiment, the reactive gas is heated by the top cover as it enters the reaction chamber through the inlet. After entering the reaction chamber, the reactive gas first contacts the side of the workpiece facing away from the support, thus heating that side. Therefore, compared to conventional techniques, when the fixture of this embodiment is used to load a workpiece for coating, the side of the workpiece facing away from the support can be heated by the reactive gas, thereby reducing the temperature difference of the workpiece, making the workpiece temperature more uniform, and further improving the uniformity of the coating layer on the workpiece surface. Attached Figure Description

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0024] Figure 1 This is a schematic diagram of the structure of a fixture according to a first aspect embodiment of the present invention;

[0025] Figure 2 for Figure 1 A sectional view;

[0026] Figure 3 for Figure 1 Exploded view;

[0027] Figure 4 for Figure 3 Enlarged view of region A in the middle;

[0028] Figure 5 for Figure 3 Schematic diagram of the locking device;

[0029] Figure 6 This is a cross-sectional view of another fixture according to the first aspect of the present invention;

[0030] Figure 7 for Figure 6 Schematic diagram of the middle base;

[0031] Figure 8 for Figure 7 Exploded view;

[0032] Figure 9 for Figure 6 A magnified view of region B in the middle.

[0033] Figure label:

[0034] Workpiece 1000;

[0035] Base 100, base 110, air outlet hole 111, first step structure 112, support 120, avoidance groove 121, third slot 122, supporting plate 130, air hole 131;

[0036] Top cover 200, air inlet hole 210, second accommodating groove 220, second step structure 230;

[0037] Heating device 300, reaction cavity 400;

[0038] Locking device 500, connecting piece 510, avoidance hole 511, locking piece 520. DETAILED DESCRIPTION

[0039] The embodiments of the present application are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference signs represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as a limitation of the present application.

[0040] In the description of the present application, it should be understood that the orientation description, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as a limitation of the present application. The device or element indicated is not required to have a particular orientation, to be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0041] In the description of the present application, if the meaning of several is more than one, the meaning of multiple is more than two, greater than, less than, more than, etc. are understood as not including the number, above, below, etc. are understood as including the number. If it is described as first, second, it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the order of indicated technical features.

[0042] In the description of the present application, unless otherwise explicitly limited, the words such as setting, installing, connecting, etc. should be broadly understood, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.

[0043] In the description of the application, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the application. In the description, the exemplary description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any suitable manner in one or more embodiments or examples.

[0044] In order to meet more uniform and denser deposition on the three-dimensional structure components, it is often necessary to use the vacuum coating process of atomic layer deposition. In some technologies, a heating device is arranged on the workpiece support table, and the heat of the heating device can be directly transmitted to the workpiece through the support table to make the coating surface of the workpiece reach the set temperature for coating. However, for some poor heat conduction workpieces, the temperature of the side of the workpiece in contact with the support table will be higher than the temperature of the side of the workpiece away from the support, that is, the temperature difference between the upper and lower surfaces of the workpiece is large, thereby reducing the uniformity of the coating layer on the surface of the workpiece.

[0045] Based on the above problems, the first aspect of the present application provides a jig for carrying a workpiece 1000 to be coated, Figure 1 A structural schematic diagram of a jig according to the first aspect of the present application, Figure 2 A sectional view of Figure 1 An exploded view of Figure 3 A sectional view of Figure 1 The base 100, the top cover 200 and the heating device 300 of the present embodiment.

[0046] The base 100 and the top cover 200 are both heat-conducting structures, such as aluminum alloy, graphite and the like. The base 100 includes a base 110 and a support 120, and the support 120 is connected to the base 110. The support 120 is used to support the workpiece 1000. The base 110 has a gas outlet hole 111. The top cover 200 is connected to the base 110, and the top cover 200 and the base 110 define a reaction chamber 400 (as shown in Figure 2 The gas outlet hole 111 communicates with the reaction chamber 400. The support 120 is located in the reaction chamber 400. The top cover 200 has a gas inlet hole 210 which communicates with the reaction chamber 400 and faces the support 120. The gas inlet hole 210 is used for the reaction gas to enter the reaction chamber 400. The heating device 300 is, for example, a heating rod, a heating sheet or a heating wire. The heating device 300 is connected to the base 110.

[0047] Specifically, for example, the base 110 has a first accommodating groove and a first slot communicating with the first accommodating groove, and the cover 200 is connected to the first accommodating groove and covers the first slot to define the reaction cavity 400, or the cover 200 has a second accommodating groove 220 and a second slot communicating with the second accommodating groove 220, and the cover 200 is connected to the base 110 and covers the second slot of the base 110 to define the reaction cavity 400. Preferably, the base 110 is provided in a plate structure, and the cover 200 has the second accommodating groove 220, so that the workpiece 1000 is more easily placed on the support 120 connected to the base 110. Further, the base 110 has a first limiting portion, and the cover 200 has a second limiting portion, and the base 110 and the cover 200 are positioned by cooperation between the first limiting portion and the second limiting portion. For example, the base 110 has a first step structure 112, and the second slot of the cover 200 is provided with a second step structure 230, and the first step structure 112 and the second step structure 230 cooperate to position the cover 200 and the base 110.

[0048] Specifically, it can be understood that, since the heating device 300 is arranged on the base 100 in the conventional technology, the workpiece 1000 is in point contact with the base support structure, the heat conduction is poor, and the side close to the base 110 is higher in temperature than the side away from the base 110, thereby resulting in poor uniformity of the film layer. The jig of the present embodiment can effectively improve this problem. The jig of the present embodiment is further provided with the cover 200, and the cover 200 is a heat conduction structure, so that the heat of the base 100 is conducted to the cover 200. Therefore, when the jig of the present embodiment is used in a film coating device, the reaction gas is heated by the cover 200 during entering the reaction cavity 400 through the gas inlet hole 210, and the reaction gas enters the reaction cavity 400 from the gas inlet hole 210 and first contacts the side of the workpiece 1000 away from the base 110, thereby heating the side of the workpiece 1000 away from the support 120. Thus, the temperature difference of the workpiece 1000 is reduced, the temperature of the workpiece 1000 is more uniform, and the uniformity of the film layer on the surface of the workpiece 1000 is improved.

[0049] In addition, it should be noted that, in the present embodiment, only one heating device 300 is used to heat the base 100 and the cover 200 without using multiple heating devices 300, thereby saving the manufacturing cost of the jig itself.

[0050] Referring to Figure 3 and Figure 4 , Figure 3 for Figure 1 the exploded view, Figure 4 for Figure 1The enlarged view of the middle A area. In some embodiments, the base 100 comprises a plurality of supports 120. Each two supports 120 are arranged at intervals to form a support group. The two supports 120 of the support group are used to support the same workpiece 1000. The two supports 120 of the support group are provided with the gas outlet hole 111. Specifically, during the coating process, the two ends of the workpiece 1000 are respectively placed on the two supports 120, so that the gas outlet hole 111 is located directly below the workpiece 1000. Thus, when the gas is discharged through the gas outlet hole 111, it will pass through the bottom of the workpiece 1000, thereby ensuring the coating effect of the bottom of the workpiece 1000, so as to improve the uniformity of the coating layer on the surface of the workpiece 1000 in each direction.

[0051] In addition, when the base 100 comprises a plurality of supports 120 for carrying a plurality of workpieces 1000 to perform coating at the same time, the consistency of each workpiece 1000 can also be improved. Specifically, in some conventional technologies, the gas outlet hole 111 is arranged on the side edge of the base 110 to discharge the reaction gas. Therefore, when the reaction gas is discharged from the reaction chamber 400, the flow rate of the reaction gas near the side edge of the reaction chamber 400 will be obviously greater than that of the central area, thereby resulting in poor uniformity of the gas in the reaction chamber 400, which leads to poor uniformity of the coating layer of the workpiece 1000, and thus poor consistency of each workpiece 1000. The embodiment of the application provides the gas outlet hole 111 at the bottom of the workpiece 1000, thereby ensuring that the flow rate of the gas flowing through the bottom of each workpiece 1000 is the same, thereby improving the consistency of the coating effect of each workpiece 1000.

[0052] Reference Figure 4 In some embodiments, the support 120 of the support group has an avoidance slot 121 which penetrates the support 120 in the horizontal direction. The avoidance slot 121 has an upward third slot opening 122. The edge of the third slot opening 122 is used to support the workpiece 1000, and the gap between the bottom of the workpiece 1000 and the bottom of the avoidance slot 121 is formed. Therefore, during the coating process, the reaction gas can enter the gap to coat the area of the workpiece 1000 facing the bottom wall of the avoidance slot 121, thereby improving the coating effect of the workpiece 1000.

[0053] In addition, it can be understood that when the same workpiece 1000 is supported by two supports 120, i.e., the two supports 120 form a support group, in order to support the workpiece 1000 by the mouth edges of the third notches 122 of the two avoiding grooves 121, the avoiding grooves 121 of the supports 120 penetrate the supports 120 in the direction in which the two supports 120 face each other. At the same time, the two supports 120 have the gas outlet holes 111 between them, i.e., the gas outlet holes 111 are located on the side of the avoiding grooves 121 penetrating the supports 120, so that when the reaction gas is discharged through the gas outlet holes 111, the flow of the reaction gas in the gap can be driven to a greater extent, thereby increasing the gas flow through the gap and further improving the uniformity of the film layer of the workpiece 1000.

[0054] In addition, it should be noted that the reason for supporting the workpiece 1000 by the mouth edges of the third notches 122 is to reduce the contact area between the support 120 and the workpiece 1000. Specifically, supporting the workpiece 1000 by the mouth edges of the third notches 122 can achieve line contact between the support 120 and the workpiece 1000, thereby reducing the contact area between the workpiece 1000 and the support 120 and further improving the film quality of the workpiece 1000.

[0055] In addition, the mouth edges of the third notches 122 can also be provided with two facing receiving portions for jointly supporting the workpiece 1000. The receiving portions are in a conical structure, thereby achieving point contact with the workpiece 1000 and further reducing the contact area between the support 120 and the workpiece 1000.

[0056] Referring to Figure 2 and Figure 5 , Figure 5 for Figure 3 In some embodiments, the jig further comprises a locking device 500 movably connected to the base 100 in a rotating connection, a moving connection or a detachable connection, etc. The locking device 500 is used to lock the position of the workpiece 1000 and improve the stability of the workpiece 1000, so as to prevent the workpiece 1000 from being disturbed when the reaction gas enters the reaction chamber 400, thereby improving the film quality of the workpiece 1000. Specifically, for example, the locking device 500 comprises two clamping members, at least one of which can move relative to the base 100 to adjust the distance between the two clamping members, and the workpiece 1000 is clamped between the two clamping members to fix the workpiece 1000. Alternatively, in some embodiments, the locking member 520 abuts against the top of the workpiece 1000 to press the workpiece 1000 against the support 120, for example, the locking device 500 comprises a connecting member 510 and a locking member 520 (as shown in FIG. 6B). Figure 5As shown), the connector 510 is detachably connected to the base 100. The connector 510 has a clearance hole 511, which is used to avoid the side of the workpiece 1000 facing the air inlet (e.g., Figure 2 As shown, the locking member 520 is disposed at the clearance hole 511 to clamp the workpiece 1000. In use, after the workpiece 1000 is placed on the support member 120, the connecting member 510 is installed on the base 100 so that the locking member 520 is pressed against the top of the workpiece 1000, thereby fixing the position of the workpiece 1000. It can be understood that, compared with the above embodiment, which uses two clamping members to clamp the workpiece 1000, this embodiment can use the clamping member to directly press against the top of the workpiece 1000 to fix the position of the workpiece 1000, making the structure of the locking device 500 simpler. It does not require manipulating the movement of the clamping members during use, making the fixture of this embodiment simpler to use.

[0057] It should be noted that the connector 510 in this embodiment is not limited to being detachably connected to the base 100; it can also be rotatably connected to the base 100, as long as it can achieve locking and releasing of the clamping member on the workpiece 1000.

[0058] In addition, the reason for setting the clearance hole 511 is to ensure that the high-temperature reaction gas entering the reaction chamber 400 can directly contact the workpiece 1000 through the clearance hole 511, thereby increasing the temperature on that side of the workpiece 1000 and reducing the temperature difference of the workpiece 1000.

[0059] Based on the above embodiments, the bottom of the locking member 520 is a supporting portion. When the locking member 520 abuts against the workpiece 1000, the cross-section of the supporting portion gradually decreases in the vertically downward direction, so that the supporting portion makes point contact or line contact with the workpiece 1000, thereby reducing the contact area between the locking member 520 and the workpiece 1000, and thus improving the coating quality of the workpiece 1000. Specifically, for example, the supporting portion is a conical structure, and the tip of the cone is used to contact the workpiece 1000 to achieve point contact between the workpiece 1000 and the locking member 520, thereby reducing the contact area between the locking member 520 and the workpiece 1000. Alternatively, the locking member 520 is a circular wire such as carbon fiber or copper wire. When the locking member 520 abuts against the workpiece 1000, the lower half of the wire serves as the supporting portion to contact the workpiece 1000, thereby achieving line contact or point contact between the workpiece 1000 and the locking member 520. Specifically, for example, if the workpiece 1000 is configured as a cylindrical structure with its axial direction extending horizontally, when the locking member 520 presses against the workpiece 1000, the axial direction of the locking member 520 is perpendicular to the axial direction of the workpiece 1000, thereby achieving point contact between the locking member 520 and the workpiece 1000. When the workpiece 1000 is as follows... Figure 2The quadrangular prism shown has one edge facing upwards so that the locking member 520 abuts against that edge, achieving point contact between the locking member 520 and the workpiece 1000. When one side of the workpiece 1000 faces upwards, line contact is achieved with that side.

[0060] In some embodiments, the support member 120 is detachably connected to the substrate 110. When different workpieces 1000 need to be coated, only the different support members 120 need to be replaced accordingly, without replacing the entire fixture, thereby reducing processing costs.

[0061] Reference Figures 6 to 8 , Figure 6 This is a cross-sectional view of another fixture according to the first aspect of the present invention. Figure 7 for Figure 6 A schematic diagram of the structure of the middle base. Figure 8 for Figure 7 An exploded view shows that in some embodiments, the base 100 includes a support plate 130 and a plurality of support members 120, with a base 110 detachably connected to the support plate 130. The support plate 130 and the plurality of support members 120 are connected as an integral structure (e.g., Figure 8 As shown), for example, the support plate 130 and the support member 120 are integrally processed or connected by screws, welding or other means to form an integral structure. Therefore, when replacing the support member 120, multiple support members 120 can be replaced at the same time using the support plate 130, making the replacement of the support member 120 simpler and more convenient. The support plate 130 has a vent hole 131, which is connected to the air outlet hole 111 for discharging reaction gas from the reaction chamber 400.

[0062] Reference Figure 9 , Figure 9 for Figure 6The enlarged schematic view of the middle B area. On the basis of the above embodiment, the diameter of the gas outlet hole 111 is larger than the diameter of the vent hole 131. Specifically, as known from the above embodiment, in order to improve the consistency of each workpiece 1000 after coating, it is necessary to ensure that the gas flow through the bottom of each workpiece 1000 is the same as far as possible. Therefore, if the diameters of the gas outlet hole 111 and the gas inlet hole 210 are the same, it is necessary to ensure that the support plate 130 and the base 110 have high installation precision to align the gas outlet hole 111 and the gas inlet hole 210. Because, if the gas outlet hole 111 and the vent hole 131 are misaligned, it will cause the flow of each gas outlet hole 111 to be different. The present embodiment can effectively solve this problem. The diameter of the gas outlet hole 111 of the present embodiment is larger than the diameter of the vent hole 131. Therefore, during installation, the vent hole 131 can be located within the range of the gas outlet hole 111, so that the gas output of the gas outlet hole 111 is only determined by the size of the vent hole 131, thereby improving the consistency of the gas flow of each gas outlet hole 111, and further improving the consistency of the coating effect of each workpiece 1000. And it can reduce the installation precision of the support plate 130 and the base 110, so that the jig of the present embodiment is easier to use.

[0063] Similarly, in some embodiments, the diameter of the gas outlet hole 111 is smaller than the diameter of the vent hole 131. Thus, during installation, the gas outlet hole 111 can be located within the range of the gas outlet hole 111. At this time, the gas flow of the gas outlet hole 111 is only determined by the size of the gas outlet hole 111.

[0064] The coating equipment of the second aspect embodiment comprises the jig of the first aspect embodiment. The jig comprises a heating device 300 connected to the base 100, and the top cover 200 is a heat-conducting structure, so that the heat generated by the heating device 300 can be transmitted to the top cover 200 through the base 100. Therefore, when the workpiece 1000 is coated by using the present embodiment, the reaction gas will be heated by the top cover 200 during the process of entering the reaction chamber 400 through the gas inlet hole 210. The gas inlet hole 210 is located on the side of the support 120 away from the heating device 300, i.e. the gas inlet hole 210 is located on the side of the workpiece 1000 away from the base 110. Therefore, the reaction gas will be heated by the top cover 200 during the process of entering the reaction chamber 400 through the gas inlet hole 210. After the reaction gas enters the reaction chamber 400 from the gas inlet hole 210, it first contacts the side of the workpiece 1000 away from the base 110, thereby heating the side of the workpiece 1000 away from the support 120. Thus, the temperature difference of the workpiece 1000 is reduced, the temperature of the workpiece 1000 is more uniform, and the uniformity of the coating layer on the surface of the workpiece 1000 is improved.

[0065] It should be noted that the present embodiment adopts all the technical features of the jig of the first aspect embodiment, and therefore has all the beneficial effects brought by the first aspect embodiment, which will not be described here again.

[0066] The embodiments of the present application are described in detail above with reference to the accompanying drawings, but the present application is not limited to the above-described embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the spirit of the present application. Furthermore, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A fixture, characterized in that, include: A base includes a base and a support member, the support member being connected to the base and used to support a workpiece, the base having vent holes; The top cover is a heat-conducting structure. The top cover is connected to the base and defines a reaction chamber between the top cover and the base. The vent is connected to the reaction chamber. The support member is located inside the reaction chamber. The top cover has an inlet that is connected to the reaction chamber. The inlet faces the support member and is used to allow reaction gas to enter the reaction chamber. A heating device is connected to the substrate; The base includes a plurality of support members, and every two support members spaced apart form a support group. The two support members of the support group are used to support the same workpiece, and the air vent is provided between the two support members of the support group. The support members all have clearance grooves that extend horizontally through the support members. The clearance grooves have an upward-facing third opening, the edge of which is used to support the workpiece and to create a gap between the bottom of the workpiece and the bottom of the clearance groove. The base includes a support plate and a plurality of the support members. The support plate has vent holes that are connected to the air outlet.

2. The fixture according to claim 1, characterized in that, The fixture also includes a locking device movably connected to the base, which is used to lock the position of the workpiece.

3. The fixture according to claim 2, characterized in that, The locking device includes a connector and a locking member. The connector is movably connected to the base. The connector has a clearance hole for avoiding the top of the workpiece. The locking member is disposed at the clearance hole for pressing the workpiece.

4. The fixture according to claim 3, characterized in that, The locking member includes a supporting portion, which makes point contact or line contact with the workpiece to press the workpiece tightly.

5. The fixture according to claim 1, characterized in that, The support member is detachably connected to the base.

6. The fixture according to claim 5, characterized in that, The base includes a support plate and multiple support components. The support plate and the multiple support components are connected to form an integral structure. The base is detachably connected to the support plate.

7. The fixture according to claim 6, characterized in that, The diameter of the air outlet is larger than the diameter of the air vent. Alternatively, the diameter of the vent hole is smaller than the diameter of the air inlet.

8. A coating equipment, characterized in that, Includes the jig as described in any one of claims 1 to 7.

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