Assembly tool and flexible film assembly method

Abstract

The application relates to the technical field of substrate polishing, and discloses an assembling tool and a flexible film assembling method. The assembling tool comprises a base and a cover. The base is provided with a positioning groove and an annular positioning boss. The positioning groove is in a cylindrical shape. The annular positioning boss and the positioning groove are coaxially arranged with the base. The flexible film is adapted to be arranged in the positioning groove. The annular positioning boss is adapted to be inserted into a first mounting groove. The cover is adapted to be connected with the base. The cover is provided with a first positioning hole and a first avoiding groove. A third mounting groove is adapted to provide an avoiding space for pressing an inner sealing edge into the third mounting groove. The first positioning hole is coaxially arranged with the positioning groove. When a connecting shaft is penetrated into the first positioning hole, the first positioning hole is coaxially arranged with the connecting shaft. Through the cover and the base, coaxial connection of the flexible film, a clamp, a clamp cover and a connecting piece is ensured. The pressure of an annular chamber area and an internal chamber area is uniform. The stability of a grinding head is improved. Therefore, the yield of substrate grinding is improved.

Description

Technical Field

[0001] This invention relates to the field of substrate polishing technology, and more specifically to an assembly fixture and a flexible film assembly method. Background Technology

[0002] As critical dimensions shrink and substrate sizes expand during chip manufacturing, chemical mechanical polishing (CMP) has become an important planarization technology applied to substrate grinding and polishing. In substrate polishing, a polishing head is typically used. Different polishing actions are achieved by changing the pressure within the chambers formed by flexible membranes inside the polishing head. The flexible rubber membranes are a crucial component in forming these pressure zones. The pressure from the chambers is output to each flexible rubber membrane, which then ultimately outputs this pressure to the substrate.

[0003] When assembling the grinding head, the flexible membrane is usually installed without tooling. This can easily lead to internal stress and deformation at the sealing edge of the flexible membrane during pressing and installation. This causes the flexible membrane to become misaligned with other parts of the grinding head, resulting in uneven pressure on the substrate in the annular chamber area and the inner chamber area during operation. Consequently, the pressure applied to the substrate by the flexible membrane stack becomes uneven, which in turn causes a change in the relative rotation frequency between the substrate and the grinding head, reduces the stability of the grinding head, reduces the flatness of the substrate during grinding, and lowers the substrate grinding yield. Summary of the Invention

[0004] In view of this, the present invention provides an assembly fixture and a flexible membrane assembly method to solve the problem that the flexible membrane is not concentric with other parts of the grinding head during existing flexible assembly, which leads to a decrease in the stability of the grinding head.

[0005] In a first aspect, the present invention provides an assembly fixture for assembling a grinding head. The grinding head includes a flexible membrane, a clamp, a clamp cover, and a connector. The flexible membrane includes a membrane body, an inner sealing edge, and an outer sealing edge. The clamp is provided with a first mounting groove and a second mounting groove, which are coaxially arranged with the clamp. The outer sealing edge is adapted to be disposed in the second mounting groove. The connector includes a connecting plate and a connecting shaft. The connecting shaft is coaxially connected to one side of the connecting plate. The connecting plate is adapted to be disposed inside the membrane body. The side of the connecting plate connected to the connecting shaft is provided with a third mounting groove, and the inner sealing edge is adapted to be disposed in the third mounting groove. The clamp cover is provided with a connecting hole, including:

[0006] The base is provided with a positioning groove and an annular positioning boss. The positioning groove is cylindrical. Both the annular positioning boss and the positioning groove are coaxially arranged with the base. The flexible membrane is adapted to be disposed in the positioning groove, and the annular positioning boss is adapted to be inserted into the first mounting groove.

[0007] The cover is adapted to be connected to the base. The cover is provided with a first positioning hole and a first clearance groove. The third mounting groove is adapted to provide clearance space for pressing the inner sealing edge into the third mounting groove. The first positioning hole and the positioning groove are coaxially arranged. When the connecting shaft passes through the first positioning hole, the first positioning hole and the connecting shaft are coaxially arranged.

[0008] Beneficial effects: When assembling the grinding head, the annular positioning boss of the base is inserted into the first mounting groove to connect the base and the fixture. Since the annular positioning boss is coaxial with the base and the first mounting groove is coaxial with the fixture, the fixture and the base are coaxial when connected. Since the positioning groove is coaxial with the base, when the flexible membrane is placed in the positioning groove, the flexible membrane and the base are coaxial, thus ensuring the coaxiality of the flexible membrane and the fixture. Since the first positioning hole and the positioning groove are coaxial, and the connecting shaft passes through the first positioning hole, the first positioning hole and the connecting shaft are coaxial. Therefore, the connecting shaft and the positioning groove are coaxial, thus ensuring the coaxiality of the connecting part and the fixture. This ensures the pressure uniformity between the annular cavity area and the internal cavity area, improves the stability of the grinding head, and thus improves the substrate grinding yield.

[0009] In one optional embodiment, the positioning groove is provided with at least four positioning protrusions, which are evenly spaced around the axis of the positioning groove, and the outer surface of the membrane body abuts against the positioning protrusions.

[0010] Beneficial effects: The positioning protrusions can position the flexible membrane and also create a gap between the flexible membrane and the wall of the positioning groove, reducing the friction between the flexible membrane and the wall of the positioning groove, thereby reducing the stress and deformation of the flexible membrane, and facilitating the subsequent assembly and disassembly of the flexible membrane.

[0011] In one alternative embodiment, the side of the positioning protrusion that connects to the membrane body is arc-shaped.

[0012] Beneficial effects: The arc-shaped surface allows the positioning protrusions to better position the flexible membrane, ensuring the coaxiality of the flexible membrane and the positioning groove. At the same time, the arc shape is closer to the surface shape of the flexible membrane, avoiding premature damage to the flexible membrane by the positioning protrusions.

[0013] In one optional embodiment, the side wall of the base is provided with at least two second clearance grooves, the second clearance grooves penetrate the side wall of the base and communicate with the positioning groove, and the bottom surface of the second clearance groove is lower than the bottom surface of the positioning groove.

[0014] Beneficial effects: The second clearance groove allows operators to clearly observe the connection between the bottom surface of the flexible membrane and the bottom surface of the positioning groove, ensuring that the bottom surface of the flexible membrane is completely in contact with the bottom surface of the positioning groove, thereby ensuring the coaxial connection between the flexible membrane and the base. Furthermore, during subsequent disassembly, the second clearance groove allows disassembly tools to be inserted between the positioning groove and the flexible membrane to lift the bottom of the flexible membrane and disassemble it from the base, reducing the difficulty of disassembling the flexible membrane.

[0015] In one alternative embodiment, the second clearance groove is provided in an even number and is evenly spaced around the axis of the positioning groove.

[0016] Beneficial effects: An even number of clearance slots evenly spaced around the axis of the positioning slot allow operators to lift the flexible membrane symmetrically using disassembly tools, reducing the difficulty of disassembling the flexible membrane and preventing deformation or damage to the flexible membrane.

[0017] In one alternative embodiment, the first clearance groove penetrates the side wall of the cover and the top wall of the cover.

[0018] Beneficial effect: The first clearance groove makes it easy for operators to press the inner sealing edge into the third mounting groove of the connecting plate.

[0019] In one alternative embodiment, four first clearance slots are provided, and the four first clearance slots are evenly spaced around the axis of the first positioning hole.

[0020] Beneficial effects: The operator presses the inner sealing edge using two first clearance grooves on the same diameter of the cover, and then presses the inner sealing edge using two more first clearance grooves on the same diameter of the cover. After pressing, the cover is rotated 45° so that the four first clearance grooves are exposed where the inner sealing edge was not pressed into the second installation groove. The above pressing steps are repeated. After pressing, the cover is removed. Once it is confirmed that there are no protrusions on the inner sealing edge, the installation is complete. The first clearance grooves facilitate the operator to accurately perform the two-point installation method and improve the yield of flexible membrane assembly.

[0021] In one optional embodiment, the side wall of the base is provided with a first step, and the side wall of the cover is provided with a second step. The first step and the second step are adapted to each other in shape. When the base is connected to the cover, the first step and the second step are connected.

[0022] Beneficial effects:

[0023] When the base is connected to the cover, the first step connects to the second step. The first step and the second step ensure a precise fit between the base and the cover, ensuring a coaxial connection between the base and the cover, and thus ensuring a coaxial connection between the flexible membrane, clamps, and connectors.

[0024] In one alternative embodiment, both the base and the cover are made of non-metallic materials.

[0025] Beneficial effects: Since the installation of the flexible membrane requires pressing, the base and cover made of non-metallic materials are less likely to cause scratches and wear to the metal, thus protecting the metal surface treatment. In addition, the pressure on the base and cover is relatively small during assembly, and plastic can meet the structural strength requirements of the base and cover.

[0026] Secondly, the present invention also provides a flexible membrane assembly method, which is completed using the above-mentioned assembly fixture, including:

[0027] Connect the base to the clamp so that the annular positioning boss is connected to the first mounting groove;

[0028] The flexible membrane is connected to the base, so that the membrane body is placed in the positioning groove;

[0029] Press the outer sealing edge into the second mounting groove;

[0030] The connector is connected to the flexible membrane, such that the connecting plate is disposed on the inner side of the flexible membrane;

[0031] Connect the cover to the base, and make the connecting shaft pass through the first positioning hole;

[0032] The inner sealing edge is pressed into the third mounting groove by the first clearance groove;

[0033] Remove the cover, connect the clamp cover to the connector, and pass the connecting shaft through the connecting hole;

[0034] Remove the base.

[0035] Beneficial effects:

[0036] This flexible membrane assembly method connects the base and the clamp, ensuring coaxial connection between the base and the clamp by connecting the annular positioning boss with the first mounting groove. The flexible membrane is then connected to the base, positioning the membrane body within the positioning groove to ensure coaxiality with the clamp. The outer sealing edge is then pressed into the second mounting groove to prevent stress and deformation of the flexible membrane, ensuring uniform installation of the outer sealing edge. Next, the connector is connected to the flexible membrane, positioning the connecting plate inside the flexible membrane, completing the initial installation of the connector. Finally, the cover is connected to the base, with the connecting shaft passing through the first mounting groove. The first positioning hole is coaxially connected to the cover and the base, and the connecting shaft passes through the first positioning hole. Therefore, the connector is coaxially connected to the base and the membrane body. At this time, the inner sealing edge is pressed into the third mounting groove through the first clearance groove, ensuring the uniform installation of the outer sealing edge. After removing the cover, the clamp cover is connected to the connector, and the connecting shaft passes through the connecting hole. Then the base is removed, and the concentric assembly of the flexible membrane, clamp, and clamp cover is completed, which greatly reduces the assembly difficulty of the flexible membrane and improves the assembly quality of the flexible membrane and the yield of the grinding head grinding substrate. Attached Figure Description

[0037] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0038] Figure 1 This is a cross-sectional schematic diagram of the connection between a flexible membrane, a clamp, a clamp cover, and a connector according to an embodiment of the present invention;

[0039] Figure 2 This is a cross-sectional schematic diagram of a clamp according to an embodiment of the present invention;

[0040] Figure 3 This is a cross-sectional schematic diagram of a flexible membrane according to an embodiment of the present invention;

[0041] Figure 4 This is a front view schematic diagram of a connector according to an embodiment of the present invention;

[0042] Figure 5 This is a cross-sectional schematic diagram of a clamp cover according to an embodiment of the present invention;

[0043] Figure 6 This is a top view of a base according to an embodiment of the present invention;

[0044] Figure 7 This is a cross-sectional schematic diagram showing the connection between the base, clamp, flexible membrane, and cover in an embodiment of the present invention.

[0045] Figure 8 This is a top view of the cover body according to an embodiment of the present invention;

[0046] Figure 9 This is a schematic diagram of the two-point pressing method according to an embodiment of the present invention;

[0047] Figure 10 This is a comparison chart of the removal rates of a grinding head assembled using an assembly fixture and a grinding head assembled without an assembly fixture, according to an embodiment of the invention.

[0048] Explanation of reference numerals in the attached figures:

[0049] 100. Flexible membrane; 101. Membrane body; 102. Inner sealing edge; 103. Outer sealing edge;

[0050] 200. Fixture; 201. First mounting slot; 202. Second mounting slot;

[0051] 300. Fixture cover; 301. Connecting hole;

[0052] 400. Connector; 401. Connecting plate; 4011. Third mounting slot; 402. Connecting shaft;

[0053] 1. Base; 11. Positioning groove; 12. Annular positioning boss; 13. First reference surface; 14. Second clearance groove; 15. First step; 16. Positioning protrusion;

[0054] 2. Cover; 21. First positioning hole; 22. First clearance groove; 23. Receiving groove; 24. Second reference surface; 26. Second step. Detailed Implementation

[0055] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0056] The following is combined with Figures 1 to 10 This describes embodiments of the assembly tooling and flexible membrane assembly method of the present invention.

[0057] According to an embodiment of the present invention, in one aspect, an assembly fixture is provided for assembling a grinding head. The grinding head includes a flexible membrane 100, a clamp 200, a clamp cover 300, and a connector 400. The flexible membrane 100 includes a membrane body 101, an inner sealing edge 102, and an outer sealing edge 103. The clamp 200 is provided with a first mounting groove 201 and a second mounting groove 202, which are coaxially arranged with the clamp 200. The outer sealing edge 103... Suitable for being installed in the second mounting groove 202, the connector 400 includes a connecting plate 401 and a connecting shaft 402. The connecting shaft 402 is coaxially connected to one side of the connecting plate 401. The connecting plate 401 is suitable for being installed inside the membrane body 101. A third mounting groove 4011 is provided on the side of the connecting plate 401 connected to the connecting shaft 402. The inner sealing edge 102 is suitable for being installed in the third mounting groove 4011. The clamp cover 300 is provided with a connecting hole 301. The assembly fixture includes a base 1 and a cover 2. Specifically, the base 1 is provided with a positioning groove 11 and an annular positioning boss 12. The positioning groove 11 is cylindrical. Both the annular positioning boss 12 and the positioning groove 11 are coaxially arranged with the base 1. The flexible membrane 100 is suitable for being placed in the positioning groove 11. The annular positioning boss 12 is suitable for being inserted into the first mounting groove 201. The cover 2 is suitable for being connected to the base 1. The cover 2 is provided with a first positioning hole 21 and a first clearance groove 22. The third mounting groove 4011 is suitable for providing clearance space for pressing the inner sealing edge 102 into the third mounting groove 4011. The first positioning hole 21 is coaxially arranged with the positioning groove 11. When the connecting shaft 402 passes through the first positioning hole 21, the first positioning hole 21 is coaxially arranged with the connecting shaft 402.

[0058] In this embodiment, when assembling the grinding head, the assembly fixture provides an annular positioning boss 12 of the base 1 is inserted into the first mounting groove 201 to connect the base 1 to the clamp 200. Since the annular positioning boss 12 is coaxial with the base 1, and the first mounting groove 201 is coaxial with the clamp 200, the clamp 200 is coaxial with the base 1 when connected. Similarly, since the positioning groove 11 is coaxial with the base 1, when the flexible membrane 100 is placed in the positioning groove 11, the flexible membrane 100 is coaxial with the base 1. This arrangement ensures the coaxiality of the flexible film 100 and the fixture 200. Since the first positioning hole 21 and the positioning groove 11 are coaxially arranged, and the first positioning hole 21 and the connecting shaft 402 are coaxially arranged when the connecting shaft 402 passes through the first positioning hole 21, the connecting shaft 402 and the positioning groove 11 are coaxial, thus ensuring the coaxial arrangement of the connector 400 and the fixture 200, ensuring the pressure uniformity between the annular cavity area and the internal cavity area, improving the stability of the grinding head, and thus improving the substrate grinding yield.

[0059] The present invention does not limit the materials of the base 1 and the cover 2. In this embodiment, both the base 1 and the cover 2 are made of plastic. In other embodiments, both the base 1 and the cover 2 are made of non-metallic materials. Since the installation of the flexible membrane 100 requires pressing, the base 1 and the cover 2 made of non-metallic materials are less likely to cause scratches and wear to the metal parts, thus protecting the metal surface treatment. In addition, the pressure on the base 1 and the cover 2 during assembly is relatively small. Plastic is sufficient to meet the structural strength requirements of the base 1 and the cover 2.

[0060] Specifically, the base 1 is provided with a first reference surface 13, which is a plane that contacts the bottom surface of the base 1 and the fixture 200. The present invention does not limit the flatness of the first reference surface 13. In this embodiment, the flatness of the first reference surface 13 is 0.1 mm. In other embodiments, it should be set according to the assembly requirements of the flexible membrane 100.

[0061] Furthermore, the inner wall of the first mounting groove 201 and the inner wall of the annular positioning boss 12 cooperate with each other. The present invention does not limit the cooperation gap between the first mounting groove 201 and the annular positioning boss 12. The cooperation gap between the inner wall of the first mounting groove 201 and the inner wall of the annular positioning boss 12 is 0.05mm~0.1mm, which strengthens the positioning effect of the cooperation between the first mounting groove 201 and the annular positioning boss 12, so as to ensure the coaxiality of the base 1 and the clamp 200, and at the same time reduce the difficulty of installing and disassembling the clamp 200 and the base 1.

[0062] The present invention does not limit the diameter of the positioning groove 11. The positioning groove 11 is cylindrical and its diameter should match that of the flexible membrane 100.

[0063] Specifically, the positioning groove 11 is provided with at least four positioning protrusions 16, which are evenly spaced around the axis of the positioning groove 11. The outer surface of the membrane body 101 abuts against the positioning protrusions 16. The positioning protrusions 16 can position the flexible membrane 100, and at the same time, the positioning protrusions 16 can create a gap between the flexible membrane 100 and the groove wall of the positioning groove 11, reducing the friction between the flexible membrane 100 and the groove wall of the positioning groove 11, thereby reducing the stress and deformation of the flexible membrane 100, and facilitating the subsequent assembly and disassembly of the flexible membrane 100.

[0064] The present invention does not limit the specific number of positioning protrusions 16. In this embodiment, six positioning protrusions 16 are provided, which can better position the flexible membrane 100. In other embodiments, it is necessary to ensure that the number of positioning protrusions 16 is greater than or equal to four, so as to provide positioning and support for the membrane body 101.

[0065] Furthermore, the side of the positioning protrusion 16 that connects to the membrane body 101 is arc-shaped. The arc-shaped surface allows the positioning protrusion 16 to better position the flexible membrane 100, ensuring the coaxiality of the flexible membrane 100 and the positioning groove 11. At the same time, the arc shape is closer to the surface shape of the flexible membrane 100, preventing the positioning protrusion 16 from damaging the flexible membrane 100.

[0066] This invention does not limit the size of the positioning protrusion 16. The center of the arc-shaped surface of the positioning protrusion 16 is located on the axis of the positioning groove 11. The angle occupied by the positioning protrusion 16 is calculated using the formula: 360 / (A*2), where A is the number of positioning protrusions 16. In this embodiment, the height of the positioning protrusion 16 is 2mm and the angle occupied by the positioning protrusion 16 is 30°. In other embodiments, the positioning protrusion 16 can also be set according to the specific dimensions of the flexible membrane 100. In this embodiment, the fitting gap between the sidewall of the flexible membrane 100 and the arc-shaped surface of the positioning protrusion 16 is -0.1mm, thereby ensuring the stability of the flexible membrane 100 installed in the positioning groove 11. In other embodiments, the fitting gap should be between -0.5mm and 0.1mm to ensure the coaxiality of the flexible membrane 100 and the positioning groove 11.

[0067] Furthermore, during installation, when the bottom surface of the flexible membrane 100 abuts against the bottom surface of the positioning groove 11, the flexible membrane 100 is positioned by the positioning protrusion 16 and the bottom surface of the positioning groove 11. In this embodiment, the flatness of the bottom surface of the positioning groove 11 is 0.1 mm, and the parallelism between the bottom surface of the positioning groove 11 and the first reference surface 13 is 0.1 mm, ensuring that the flexible membrane 100 and the base 1 are coaxially arranged. In other embodiments, the flatness and parallelism should be set according to the assembly requirements.

[0068] The present invention does not limit the depth of the positioning groove 11. In this embodiment, the distance between the bottom surface of the positioning groove 11 and the first reference surface 13 is 13 cm. When the flexible membrane 100 is placed in the positioning groove 11, this position represents the height difference between the flexible membrane 100 and the clamp 200 when the flexible membrane 100 is under positive pressure. This position of the flexible membrane 100 ensures that the position of the central cavity area formed by the flexible membrane 100 changes little each time positive pressure is applied, thereby increasing the stability of the grinding head grinding the substrate and increasing the flatness and uniformity of the substrate. In other embodiments, the distance between the bottom surface of the positioning groove 11 and the first reference surface 13 can be 12 mm to 15 mm, and the distance between the bottom surface of the positioning groove 11 and the first reference surface 13 can preferably be 14 mm.

[0069] The present invention does not limit the thickness of the bottom of the base 1. In this embodiment, the bottom thickness of the base 1 is 25mm, which can ensure that the base 1 will not deform when it is fitted with the metal part during installation. In other embodiments, the bottom thickness of the base 1 should be greater than or equal to 25mm and less than 40mm to ensure that the base 1 does not deform, reduce production costs, and avoid excessive weight of the base 1. The thickness of the base 1 can also preferably be 26mm, 28mm, 30mm, 32mm, 34mm, 36mm, or 38mm.

[0070] Furthermore, the side wall of the base 1 is provided with at least two second clearance grooves 14. The second clearance grooves 14 penetrate the side wall of the base 1 and communicate with the positioning groove 11. The bottom surface of the second clearance groove 14 is lower than the bottom surface of the positioning groove 11. The setting of the second clearance grooves 14 allows the operator to clearly observe the connection between the bottom surface of the flexible membrane 100 and the bottom surface of the positioning groove 11, ensuring that the bottom surface of the flexible membrane 100 is completely in contact with the bottom surface of the positioning groove 11, thereby ensuring the coaxial connection between the flexible membrane 100 and the base 1. In the subsequent disassembly process, the disassembly tool can be inserted between the positioning groove 11 and the flexible membrane 100 through the second clearance grooves 14 to lift the bottom of the flexible membrane 100 and disassemble the flexible membrane 100 from the base 1, reducing the difficulty of disassembling the flexible membrane 100.

[0071] Specifically, an even number of second clearance grooves 14 are provided and are evenly spaced around the axis of the positioning groove 11. The even number of second clearance grooves 14 evenly spaced around the axis of the positioning groove 11 allows the operator to symmetrically lift the flexible membrane 100 using disassembly tools, reducing the difficulty of disassembling the flexible membrane 100, and at the same time, preventing the flexible membrane 100 from deforming or being damaged.

[0072] The present invention does not limit the specific number of the second clearance grooves 14. In this embodiment, there are 2 second clearance grooves 14. In other embodiments, there may be 4 or 6. Too many second clearance grooves 14 will reduce the structural strength of the base 1, causing the base 1 to deform during the assembly process, reducing the accuracy of the base 1, and reducing the assembly accuracy of the flexible membrane 100.

[0073] Specifically, the cover 2 is provided with a receiving groove 23, the bottom surface of the cover 2 being recessed inward to form the receiving groove 23, which is used to receive the clamp 200, connector 400, etc. In this embodiment, the bottom surface of the receiving groove 23 is 3mm away from the top surface of the membrane body 101, which can prevent changes in the range of motion of the inner sealing edge 102 of the flexible membrane 100 and ensure the accurate installation of the flexible membrane 100.

[0074] Specifically, the cover 2 has a second reference surface 24, which is the plane connecting the cover 2 and the base 1. In this embodiment, the flatness of the second reference surface 24 is 0.1 mm, thereby ensuring the coaxiality of the cover 2 and the base 1.

[0075] Specifically, the perpendicularity between the first positioning hole 21 and the second reference surface 24 is 0.05mm, and the fitting clearance between the first positioning hole 21 and the connecting shaft 402 is 0.05mm~0.15mm, which can ensure the coaxiality between the connecting shaft 402 and the first positioning hole 21, thereby ensuring the coaxiality between the connecting shaft 402 and the base 1 and the flexible membrane 100.

[0076] The present invention does not limit the thickness of the top of the cover 2. In this embodiment, the thickness of the top of the cover 2 is 10mm. In other embodiments, since the cover 2 is hardly affected by external forces when assembling the connecting shaft 402 and the positioning hole, the thickness of the cover 2 should be greater than or equal to 10mm to ensure that the cover 2 does not deform and that the weight of the cover 2 is not too large, making it convenient for operators to operate. The thickness of the cover 2 can preferably be 11mm, 12mm, 13mm, 14mm, or 15mm.

[0077] Furthermore, the side wall of the base 1 is provided with a first step 15, and the side wall of the cover 2 is provided with a second step 26. The first step 15 and the second step 26 are adapted in shape. When the base 1 and the cover 2 are connected, the first step 15 and the second step 26 are connected. The first step 15 and the second step 26 can ensure the precise fit between the base 1 and the cover 2, ensure the coaxial connection between the base 1 and the cover 2, and thus ensure the coaxial connection between the flexible membrane 100, the clamp 200 and the connector 400.

[0078] Furthermore, the first clearance groove 22 penetrates the side wall and the upper wall of the cover 2. The first clearance groove 22 is provided so that the operator can easily press the inner sealing edge 102 into the third mounting groove 4011 of the connecting plate 401.

[0079] Specifically, in this embodiment, four first clearance grooves 22 are provided. The four first clearance grooves 22 are evenly spaced around the axis of the first positioning hole 21. The operator presses the inner sealing edge 102 through two first clearance grooves 22 on the same diameter of the cover body 2, and then presses the inner sealing edge 102 through the other two first clearance grooves 22 on the same diameter of the cover body 2. After pressing, the cover body 2 is rotated 45° so that the four first clearance grooves 22 are exposed at the position where the inner sealing edge 102 is not pressed into the third mounting groove 4011. The pressing steps are repeated to press most of the inner sealing edge 102 into the third mounting groove 4011. After pressing, the cover body 2 is removed. The installation is completed when it is confirmed that there is no protrusion of the inner sealing edge 102. The first clearance grooves 22 facilitate the operator to accurately perform the two-point installation method, improve the yield and efficiency of flexible membrane 100 assembly.

[0080] Furthermore, the width of the first clearance groove 22 should be less than one-third of the outer diameter of the cover 2 and greater than 30mm, so that the operator's fingers can enter the interior of the cover 2 through the first clearance groove 22 to press the inner sealing edge 102 and observe the pressing effect, ensuring the quality of pressing the inner sealing edge 102.

[0081] like Figure 10 As shown, the flexible membrane 100 is assembled using assembly fixtures.

[0082] According to an embodiment of the present invention, in another aspect, a flexible membrane assembly method is also provided, which is completed using the above-described assembly fixture, including:

[0083] Connect the base 1 to the clamp 200 so that the annular positioning boss 12 is connected to the first mounting groove 201;

[0084] Connect the flexible membrane 100 to the base 1 so that the membrane body 101 is placed in the positioning groove 11;

[0085] Press the outer sealing edge 103 into the second mounting groove 202;

[0086] Connect the connector 400 to the flexible membrane 100, so that the connecting plate 401 is disposed on the inner side of the flexible membrane 100;

[0087] Connect the cover 2 to the base 1, and make the connecting shaft 402 pass through the first positioning hole 21;

[0088] The inner sealing edge 102 is pressed into the third mounting groove 4011 by the first clearance groove 22;

[0089] Remove cover 2;

[0090] Connect the clamp cover 300 to the connector 400, and make the connecting shaft 402 pass through the connecting hole 301;

[0091] Remove base 1.

[0092] The flexible membrane assembly method connects the base 1 to the clamp 200, and connects the annular positioning boss 12 to the first mounting groove 201 to ensure the coaxial connection between the base 1 and the clamp 200. Then, the flexible membrane 100 is connected to the base 1, so that the membrane body 101 is placed in the positioning groove 11, allowing the membrane body 101 to be coaxial with the clamp 200. Next, the outer sealing edge 103 is pressed into the second mounting groove 202 to avoid stress and deformation of the flexible membrane 100, ensuring uniform installation of the outer sealing edge 103. Afterwards, the connector 400 is connected to the flexible membrane 100, so that the connecting plate 401 is placed inside the flexible membrane 100, completing the initial installation of the connector 400. Finally, the cover 2 is connected to the base 1, so that the connecting shaft 402 passes through the first mounting groove 201. Positioning hole 21, since cover 2 and base 1 are coaxially connected, first positioning hole 21 is coaxially connected to cover 2, connecting shaft 402 passes through first positioning hole 21, thus connecting member 400 is coaxially connected to base 1 and membrane body 101. At this time, the inner sealing edge 102 is pressed into the third mounting groove 4011 through the first clearance groove 22, ensuring uniform installation of outer sealing edge 103. After removing cover 2, clamp cover 300 is connected to connecting member 400, so that connecting shaft 402 passes through connecting hole 301. Then base 1 is removed, thus completing the concentric assembly of flexible membrane 100 with clamp 200 and clamp cover 300, greatly reducing the assembly difficulty of flexible membrane 100, improving the assembly quality of flexible membrane 100 and the yield of grinding head grinding substrate.

[0093] Specifically, connecting the base 1 to the clamp 200 and connecting the annular positioning boss 12 to the first mounting groove 201 includes: placing the base 1 on the operating platform, aligning the first mounting groove 201 of the clamp 200 with the annular positioning boss 12, and embedding the annular positioning boss 12 into the first mounting groove 201, thereby achieving a coaxial connection between the clamp 200 and the base 1.

[0094] Specifically, connecting the flexible membrane 100 to the base 1, so that the membrane body 101 is positioned in the positioning groove 11, includes:

[0095] Press the membrane body 101 into the positioning groove 11. Observe through the second clearance groove 14 to ensure that there is no gap between the bottom surface of the membrane body 101 and the bottom surface of the positioning groove 11, thus ensuring the fit and achieving the coaxial connection between the flexible membrane 100 and the base 1, thereby achieving the coaxial position of the flexible membrane 100 and the clamp 200.

[0096] Specifically, pressing the outer sealing edge 103 into the second mounting groove 202 includes:

[0097] Gently lift the outer sealing edge 103 of the flexible membrane 100, then release the outer sealing edge 103 so that it falls back under the influence of gravity, so as to eliminate the stress and deformation of the outer sealing edge 103 and put the outer sealing edge 103 in a natural state. Then, press the outer sealing edge 103 into the second mounting groove 202 by the two-point pressing installation method to achieve a precise coaxial connection between the flexible membrane 100 and the clamp 200.

[0098] Specifically, such as Figure 9 As shown, the two-point pressure method includes:

[0099] Take any two points where the diameter of the first mounting groove 201 intersects with the outer sealing edge 103 and press them symmetrically;

[0100] Take two points where another diameter perpendicular to this diameter intersects with the outer sealing edge 103 and press symmetrically;

[0101] Press the four midpoints of the two pressing points on the flexible membrane 100;

[0102] Repeat the above steps until the outer sealing edge 103 is completely pressed into the second mounting groove 202.

[0103] Specifically, connecting the cover 2 to the base 1 and having the connecting shaft 402 pass through the first positioning hole 21 includes:

[0104] After the connecting plate 401 is placed inside the flexible membrane 100, the cover 2 and the base 1 are coaxially connected.

[0105] Pinch the connecting shaft 402 that passes through the positioning hole and lift the connector 400 slightly, and gently shake it on the horizontal plane so that the first step 15 and the second step 26 can fit together tightly.

[0106] Lower the connecting shaft 402 to press the cover 2 against the base 1, and observe whether the first reference surface 13 and the second reference surface 24 are in contact through the first relief groove 22;

[0107] After confirming the fit, press the cover 2 firmly with one hand, and repeatedly lift and shake the connector 400 with the other hand before putting it down to relieve stress.

[0108] Specifically, pressing the inner sealing edge 102 into the third mounting groove 4011 via the first clearance groove 22 includes:

[0109] The inner sealing edge 102 located at the first clearance groove 22 is pressed into the third mounting groove 4011 by a two-point pressing method;

[0110] After confirming that the inner sealing edge 102 located at the first clearance groove 22 is firmly installed, press the connecting shaft 402 downward slightly to prevent the connecting piece 400 from rotating. At the same time, rotate the cover 2 so that the first clearance groove 22 rotates to the position where the inner sealing edge 102 is not pressed. Repeat the above pressing action until the inner sealing edge 102 is pressed into the third mounting groove 4011.

[0111] Furthermore, after removing cover 2, it also includes:

[0112] Continue to press the inner sealing edge 102 evenly so that the inner sealing edge 102 is completely pressed into the third sealing groove.

[0113] Specifically, connecting the clamp cover 300 to the connector 400 and having the connecting shaft 402 pass through the connecting hole 301 includes:

[0114] After the clamp cover 300 is connected to the clamp 200, the connecting shaft 402 passes through the connecting hole 301, and the clamp cover 300 and the connecting piece 400 are connected by two symmetrically arranged screws.

[0115] Tightening the two screws symmetrically ensures that the connector 400 is lifted smoothly without tilting. Due to the friction between the membrane body 101 and the positioning groove 11, the membrane body 101 remains relatively stationary during the lifting of the connector 400. Therefore, only the inner sealing edge 102 will rise with the movement of the connecting plate 401, thereby unfolding the inner sealing edge 102, reducing the movement allowance of the inner sealing edge 102, and preventing the inner sealing edge 102 from being pressed by the clamp cover 300. This ensures the installation quality of the flexible membrane 100 and realizes the anti-misclamping function of the assembly tooling.

[0116] Specifically, removing base 1 includes:

[0117] The friction between the membrane body 101 and the positioning protrusion 16 can be reduced by the second clearance groove 14, and the airtightness can also be reduced. The membrane body 101 can be slowly lifted by the second clearance groove 14 to separate the membrane body 101 from the base 1.

[0118] Furthermore, after removing base 1, it also includes:

[0119] Separate the fixture 200 from the outer sealing edge 103 to complete the assembly process.

[0120] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. An assembly fixture for assembling a grinding head, the grinding head comprising a flexible membrane (100), a clamp (200), a clamp cover (300), and a connector (400), the flexible membrane (100) comprising a membrane body (101), an inner sealing edge (102), and an outer sealing edge (103), the clamp (200) being provided with a first mounting groove (201) and a second mounting groove (202), the first mounting groove (201) and the second mounting groove (202) being coaxially disposed with the clamp (200), and the outer sealing edge (103) being adapted to be disposed on the second... The mounting groove (202), the connector (400) includes a connecting plate (401) and a connecting shaft (402), the connecting shaft (402) is coaxially connected to one side of the connecting plate (401), the connecting plate (401) is adapted to be disposed inside the membrane body (101), the side of the connecting plate (401) connected to the connecting shaft (402) is provided with a third mounting groove (4011), the inner sealing edge (102) is adapted to be disposed in the third mounting groove (4011), the clamp cover (300) is provided with a connecting hole (301), characterized in that, include: The base (1) is provided with a positioning groove (11) and an annular positioning boss (12). The positioning groove (11) is cylindrical. The annular positioning boss (12) and the positioning groove (11) are coaxially arranged with the base (1). The flexible membrane (100) is adapted to be disposed in the positioning groove (11). The annular positioning boss (12) is adapted to be inserted into the first mounting groove (201). The cover (2) is adapted to be connected to the base (1). The cover (2) is provided with a first positioning hole (21) and a first clearance groove (22). The third mounting groove (4011) is adapted to provide clearance space for pressing the inner sealing edge (102) into the third mounting groove (4011). The first positioning hole (21) is coaxially arranged with the positioning groove (11). When the connecting shaft (402) passes through the first positioning hole (21), the first positioning hole (21) is coaxially arranged with the connecting shaft (402). The positioning groove (11) is provided with at least four positioning protrusions (16), and the at least four positioning protrusions (16) are evenly spaced around the axis of the positioning groove (11), and the outer surface of the membrane body (101) abuts against the positioning protrusions (16). The base (1) has a first step (15) on its side wall and the cover (2) has a second step (26) on its side wall. The first step (15) and the second step (26) are adapted to each other. When the base (1) and the cover (2) are connected, the first step (15) and the second step (26) are connected.

2. The assembly fixture according to claim 1, characterized in that, The side of the positioning protrusion (16) that connects to the membrane body (101) is arc-shaped.

3. The assembly fixture according to claim 1, characterized in that, The side wall of the base (1) is provided with at least two second clearance grooves (14). The second clearance grooves (14) penetrate the side wall of the base (1) and communicate with the positioning groove (11). The bottom surface of the second clearance groove (14) is lower than the bottom surface of the positioning groove (11).

4. The assembly fixture according to claim 3, characterized in that, The second clearance groove (14) is provided with an even number of grooves and is evenly spaced around the axis of the positioning groove (11).

5. The assembly fixture according to claim 1, characterized in that, The first clearance groove (22) penetrates the side wall of the cover (2) and the upper wall of the cover (2).

6. The assembly tooling according to any one of claims 1-5, characterized in that, The first clearance groove (22) is provided in four places, and the four first clearance grooves (22) are evenly spaced around the axis of the first positioning hole (21).

7. The assembly tooling according to any one of claims 1-5, characterized in that, Both the base (1) and the cover (2) are made of non-metallic materials.

8. A flexible membrane assembly method, performed using the assembly fixture described in any one of claims 1-7, characterized in that, include: Connect the base (1) to the clamp (200) so that the annular positioning boss (12) is connected to the first mounting groove (201); The flexible membrane (100) is connected to the base (1) so that the membrane body (101) is placed in the positioning groove (11); Press the outer sealing edge (103) into the second mounting groove (202); The connector (400) is connected to the flexible membrane (100), so that the connecting disk (401) is disposed on the inner side of the flexible membrane (100); Connect the cover (2) to the base (1) and make the connecting shaft (402) pass through the first positioning hole (21). The inner sealing edge (102) is pressed into the third mounting groove (4011) by the first clearance groove (22); Remove the cover (2), connect the clamp cover (300) to the connector (400), and make the connecting shaft (402) pass through the connecting hole (301). Remove the base (1).

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