A vacuum degree detection system based on a fully encapsulated cold cathode vacuum device, its detection method and application

Abstract

The present invention discloses a vacuum degree detection system based on a fully encapsulated cold cathode vacuum device. The vacuum degree detection system includes: a light source assembly, a fully encapsulated cold cathode vacuum device, and a fluorescence spectrum analysis assembly. The light source assembly includes a light source and a reflection and beam expansion assembly; the fully encapsulated cold cathode vacuum device includes a housing, a cavity is arranged inside the housing, a through hole communicating with the cavity is arranged on the surface of the housing, a light-transmitting substrate is hermetically arranged on the surface of the through hole, and a luminescent material is arranged on one side of the light-transmitting substrate facing the through hole; a cold cathode thin film and an anode thin film are arranged in the cavity; the light source is expanded by the reflection and beam expansion assembly and then irradiated onto the luminescent material of the light-transmitting substrate and enters the cavity; the fluorescence spectrum analysis assembly is used to test the photoluminescence intensity of the luminescent material in the fully encapsulated cold cathode vacuum device. The present invention tests the change of the fluorescence intensity of the luminescent material through the fluorescence spectrum analysis assembly, and further realizes the rapid non-destructive test and characterization of the change of the internal vacuum degree of the fully encapsulated cold cathode vacuum device.

Description

Technical Field

[0001] The present invention belongs to the technical field of cold cathode vacuum electronic devices, and more specifically, relates to a vacuum degree detection system based on a fully encapsulated cold cathode vacuum device, and a detection method and application thereof. Background Art

[0002] A vacuum electronic device refers to a device that converts one form of electromagnetic energy into another form of electromagnetic energy by means of the interaction between electrons and electromagnetic fields in a vacuum or gas. It has a vacuum-sealed tube shell and several electrodes, and the inside of the tube is evacuated to a residual gas pressure of 10 -4 ~10 -8 Pa. It is widely used in fields such as broadcasting, communication, television, radar, navigation, automatic control, electronic countermeasure, computer terminal display, medical diagnosis and treatment, etc.

[0003] The vacuum degree is an important index of vacuum devices, especially high-vacuum electronic devices. During the operation of vacuum devices, processes such as power-on and heating are often involved, which causes adsorbed gases to be released from the electrode surface, and gas ionization discharge occurs, thereby reducing the performance of vacuum devices and shortening the service life of the devices. Therefore, detecting the vacuum degree and its change in vacuum devices and judging whether there is adsorbed gas overflow can effectively alleviate the performance degradation and life shortening of vacuum devices.

[0004] The traditional method for vacuum detection is to externally connect a vacuum gauge tube to the vacuum device. However, the vacuum gauge tube is large in volume, which is not conducive to the miniaturization and integration of the device. At the same time, the externally connected vacuum gauge tube still needs to be powered on and heated during operation, and the gas released from the surface of the vacuum gauge tube during the heating process will in turn damage the vacuum degree of the vacuum device. Therefore, how to explore more efficient devices and methods for detecting the vacuum degree of vacuum devices has become a technical problem that needs to be solved urgently. Summary of the Invention

[0005] Aiming at the above-mentioned existing technical problems, the purpose of the present invention is to provide a vacuum degree detection system based on a fully encapsulated cold cathode vacuum device, which can realize real-time, rapid, non-destructive testing and characterization of the internal vacuum degree and its change of the fully encapsulated vacuum device.

[0006] The second purpose of the present invention is to provide an application of the vacuum degree detection system based on the fully encapsulated cold cathode vacuum device in detecting the vacuum degree of vacuum devices.

[0007] The third purpose of the present invention is to provide a method for detecting the vacuum degree by using the vacuum degree detection system based on the above-mentioned fully encapsulated cold cathode vacuum device.

[0008] In order to achieve the above purposes, the present invention is realized through the following technical solutions:

[0009] A vacuum degree detection system based on a fully encapsulated cold cathode vacuum device, comprising: a light source assembly, a fully encapsulated cold cathode vacuum device, and a fluorescence spectrum analysis assembly. The light source assembly includes a light source and a reflection and beam expansion assembly; the fully encapsulated cold cathode vacuum device includes a housing, a cavity is arranged inside the housing, a through hole communicating with the cavity is arranged on the surface of the housing, a light-transmitting substrate is hermetically arranged on the surface of the through hole, and a luminescent material is arranged on one side of the light-transmitting substrate facing the through hole; a cold cathode thin film and an anode thin film are arranged in the cavity; the light source is expanded by the reflection and beam expansion assembly and then irradiated onto the luminescent material of the light-transmitting substrate and enters the cavity; the luminescent material is selected from one or more of semiconductor quantum dots, two-dimensional luminescent materials, semiconductor luminescent nanowires, and organic luminescent materials; the fluorescence spectrum analysis assembly is used to test the photoluminescence intensity of the luminescent material in the fully encapsulated cold cathode vacuum device.

[0010] The present invention proposes a vacuum degree detection system based on a fully encapsulated cold cathode vacuum device, selects a luminescent material with a light emission spectrum and intensity sensitive to the atmosphere as the luminescent medium. The surface of this type of luminescent material has abundant unsaturated dangling bonds. When oxygen or water vapor exists in the environment, oxygen molecules and water molecules will form bonds with the unsaturated dangling bonds on the surface of the luminescent material. This bonding effect can change the internal electronic structure of the luminescent material, thereby affecting its photoluminescence characteristics. The change in the luminescence characteristics is positively correlated with the gas molecules adsorbed by the luminescent material, and the gas molecules generated in the environment are negatively correlated with the vacuum degree in the environment. Based on this, the present invention establishes the correlation between the luminescence characteristics of the luminescent material and the vacuum degree.

[0011] The present invention adopts the above working principle, coats this type of luminescent medium on the light-transmitting substrate, and designs and integrates the light-transmitting substrate coated with the luminescent material into the fully encapsulated cold cathode vacuum device, and can be in-situ encapsulated into a fully encapsulated vacuum device. Through the designed fully encapsulated cold cathode vacuum device, the luminescent material can directly contact the atmosphere inside the cold cathode vacuum device. When the atmosphere inside the cold cathode vacuum device changes, the fluorescence intensity change of the luminescent material is tested by the fluorescence spectrum analysis assembly, and then the change in the vacuum degree inside the fully encapsulated cold cathode vacuum device is quickly and non-destructively tested and characterized.

[0012] Preferably, the thickness of the light-transmitting substrate is 0.01 - 2 mm. Further preferably, the thickness of the light-transmitting substrate is 0.01 - 1 mm. The smaller the thickness of the light-transmitting substrate, the better it can reduce the optical path loss of the light source, improve the photoluminescence efficiency and test sensitivity.

[0013] Preferably, the light-transmitting substrate is one or more of glass, quartz, and sapphire.

[0014] Preferably, the luminescent material can be selected as a substance whose photoluminescence intensity is sensitive to the changes in the concentrations of oxygen, water vapor, and special gases (such as carbon monoxide, hydrogen sulfide, carbon dioxide, etc.). More specifically, the semiconductor quantum dots are selected from one or more of silicon quantum dots, germanium quantum dots, cadmium sulfide quantum dots, cadmium selenide quantum dots, cadmium telluride quantum dots, zinc selenide quantum dots, lead sulfide quantum dots, lead selenide quantum dots, indium phosphide quantum dots, and indium arsenide quantum dots. The two-dimensional luminescent material is selected from one or more of WS 2 、WTe 2 、MoS 2 . The semiconductor luminescent nanowires are selected from one or more of ZnO, CdS, and ZnS. The organic luminescent material is an organic-inorganic hybrid perovskite, such as (C 4 H 9 NH 3 ) 2 PbBr 4 etc.

[0015] Preferably, the luminescent material can be prepared on a light-transmitting substrate by conventional preparation methods in the art, and the preparation methods include but are not limited to spin coating, self-assembly deposition, or polymer-supported transfer, etc.

[0016] Preferably, the material of the housing can be glass, ceramic, metal, etc.

[0017] Preferably, the light-transmitting substrate can seal the through hole by conventional sealing methods in the art, and the sealing methods include but are not limited to glass powder sintering sealing, thermal fusion sealing, or indium sealing, etc.

[0018] Preferably, the through hole can be circular, triangular, square, polygonal, etc.

[0019] Preferably, the aperture range of the through hole is 0.1 - 15 mm. Preferably, the aperture range of the through hole is 3 - 6 mm.

[0020] Preferably, the reflection and beam expansion assembly includes a reflective sheet and a microscope. The light source is reflected by the reflective sheet in sequence, expanded by the microscope, irradiated onto the luminescent material of the light-transmitting substrate, and then enters the cavity.

[0021] Preferably, the beam expansion multiple of the microscope is 1 - 1000 times.

[0022] Preferably, an exhaust pipe communicating with the inner cavity is further provided on the surface of the fully encapsulated cold cathode vacuum device, and a getter is arranged in the exhaust pipe.

[0023] Preferably, the exhaust pipe can be sealed by conventional sealing methods in the art, including but not limited to electrothermal sealing, hot melting by a burner head, cold pressing and clamping sealing by a sealing pliers, or indium sealing.

[0024] Preferably, the cold cathode thin film is a carbon nanotube, and the anode thin film is indium tin oxide.

[0025] Preferably, the fluorescence spectrum analysis component can be a device or instrument commonly used in the art for detecting the intensity of photoluminescence, such as a fluorescence spectrometer, etc.

[0026] Furthermore, the present invention claims the application of a vacuum degree detection system based on a fully encapsulated cold cathode vacuum device in detecting the vacuum degree of a vacuum device.

[0027] Furthermore, the present invention claims a method for detecting the vacuum degree by the above vacuum degree detection system, comprising the following steps:

[0028] (1) Turn on the light source, let the light source enter the inner cavity of the cold cathode vacuum device, use the fluorescence spectrum analysis component to test the photoluminescence intensity of the luminescent material on the light-transmitting substrate, and test the vacuum degree during the exhaust process of the cold cathode vacuum device to obtain a calibration curve between the vacuum degree and the photoluminescence intensity;

[0029] (2) After the vacuum device is fully encapsulated, perform the test according to the test method in step (1) to obtain the photoluminescence intensity of the luminescent material after full encapsulation, and obtain the vacuum degree inside the fully encapsulated cold cathode vacuum device through the corresponding relationship in the calibration curve.

[0030] Preferably, the spectral wavelength range collected by the fluorescence spectrum analysis component is 350 - 1200 nm.

[0031] Compared with the prior art, the present invention has the following beneficial effects:

[0032] (1) The vacuum degree detection system based on a fully encapsulated cold cathode vacuum device provided by the present invention coats the luminescent material on the light-transmitting substrate, and designs and integrates the light-transmitting substrate coated with the luminescent material into the fully encapsulated cold cathode vacuum device, and can be in-situ encapsulated into a fully encapsulated vacuum device. Through the designed fully encapsulated cold cathode vacuum device, the luminescent material can directly contact the atmosphere inside the cold cathode vacuum device. When the atmosphere inside the cold cathode vacuum device changes, the change in the fluorescence intensity of the luminescent material is tested by the fluorescence spectrum analysis component, thereby realizing rapid non-destructive test characterization of the change in the internal vacuum degree of the fully encapsulated device.

[0033] (2) The light-transmitting substrate containing a luminescent material used in the present invention is compatible with the packaging process of cold cathode vacuum devices, enabling the integrated fabrication of the light-transmitting substrate and the fully packaged cold cathode vacuum device. Using the testing method and structure of the present invention, the light-transmitting substrate is small in volume and easy to integrate, which can reduce the optical path loss, improve the photoluminescence efficiency and testing sensitivity, and can perform real-time, rapid, and non-destructive testing on the internal vacuum degree of the device. Description of the Drawings

[0034] Figure 1 It is a schematic structural diagram of a fully packaged cold cathode vacuum device.

[0035] Figure 2 It is a schematic structural diagram of a vacuum degree detection system based on a fully packaged cold cathode vacuum device.

[0036] Figure 3 It is a schematic diagram of the method for detecting the vacuum degree of a vacuum degree detection system of a fully packaged cold cathode vacuum device.

[0037] Figure 4 It is a relationship curve of photoluminescence intensity and spectral wavelength under different vacuum degrees. Among them, Figure 4 (a) in it is the photoluminescence intensity of the sealed cold cathode vacuum device in the atmospheric environment (1×10 5 Pa); Figure 4 (b) in it is the photoluminescence intensity when the cold cathode vacuum device is evacuated to 1×10 -5 Pa.

[0038] Figure 5 It is a calibration curve diagram of the relationship between the internal air pressure P and the peak value I of the photoluminescence intensity of a fully packaged cold cathode vacuum device during the exhaust process.

[0039] In the figure: 1 - light source, 2 - movable baking device, 3 - fully packaged cold cathode vacuum device, 31 - light-transmitting substrate, 32 - luminescent material, 33 - through hole, 34, 35 - sealing medium, 36 - isolator, 371 - cathode substrate, 372 - cold cathode thin film, 381 - anode substrate, 382 - anode thin film, 4 - high vacuum exhaust system, 41 - exhaust pipe, 42 - getter, 5 - fluorescence spectrum analysis component, 6 - reflector, 7 - microscope, 8 - electric heat sealing disc. Detailed Embodiments

[0040] The following further illustrates the present invention in conjunction with the accompanying drawings of the specification and specific embodiments, but the embodiments do not impose any form of limitation on the present invention. Unless otherwise specified, the reagents, methods, and equipment used in the present invention are conventional reagents, methods, and equipment in the technical field.

[0041] Embodiment 1 A Vacuum Degree Detection System Based on a Fully Packaged Cold Cathode Vacuum Device

[0042] As Figure 1 and Figure 2 shown, a vacuum degree detection system based on a fully encapsulated cold cathode vacuum device includes: a light source assembly, a fully encapsulated cold cathode vacuum device 3, and a fluorescence spectrum analysis assembly 5.

[0043] Among them, the light source assembly includes a light source 1 and a reflection and beam expansion assembly; the fully encapsulated cold cathode vacuum device 3 includes a housing, a cavity is arranged inside the housing, a through hole 33 communicating with the cavity is arranged on the surface of the housing, a light-transmitting substrate 31 is hermetically arranged on the surface of the through hole 33, and a luminescent material 32 is arranged on one side of the light-transmitting substrate 31 facing the through hole 33; a cold cathode thin film 372 and an anode thin film 382 are arranged in the cavity; the light source 1 is expanded by the reflection and beam expansion assembly, and then irradiated onto the luminescent material 32 of the light-transmitting substrate 31 and enters the cavity; the fluorescence spectrum analysis assembly 5 is used to test the photoluminescence intensity of the luminescent material 32 in the fully encapsulated cold cathode vacuum device 3.

[0044] In this embodiment, the reflection and beam expansion assembly includes a reflecting sheet 6 and a microscope 7. The light source 1 is reflected by the reflecting sheet 6 in sequence and expanded by the microscope 7, and after irradiating onto the luminescent material 32 of the light-transmitting substrate 31, it enters the cavity.

[0045] In this embodiment, the housing includes a cathode substrate 371 and an anode substrate 381. The cathode substrate 371 and the anode substrate 381 are sealed by a sealing medium 35, and an isolator 36 is further arranged between the cathode substrate 371 and the anode substrate 381. The isolator 36 is a ceramic sheet, and the isolator 36 is used for insulation and fixing the distance between the cathode substrate 371 and the anode substrate 381.

[0046] In this embodiment, the through hole 33 is arranged on the surface of the anode substrate 381, and the light-transmitting substrate 31 is hermetically connected to the through hole 33 through a sealing medium 34.

[0047] In this embodiment, the anode thin film 382 is arranged on the anode substrate 381, and the cold cathode thin film 372 is arranged on the cathode substrate 371.

[0048] In this embodiment, the light-transmitting substrate 31 is a square thin glass sheet with an area of 30mm×30mm and a thickness of 0.22mm.

[0049] In this embodiment, the diameter of the through hole 33 is 6mm.

[0050] In this embodiment, the luminescent material 32 is CdTe cadmium telluride quantum dots.

[0051] In this embodiment, an exhaust pipe 41 communicating with the inner cavity is further opened on the surface of the fully encapsulated cold cathode vacuum device 3, and a getter 42 is arranged in the exhaust pipe 41.

[0052] In this embodiment, the fluorescence spectrum analysis component 5 is a fluorescence spectrometer.

[0053] In this embodiment, the cold cathode thin film 372 is a carbon nanotube, and the anode thin film 382 is indium tin oxide (ITO).

[0054] In this embodiment, as Figure 3 shown, the fully encapsulated cold cathode vacuum device 3 is prepared or assembled in the following manner:

[0055] (1) Spin-coat CdTe cadmium telluride quantum dots on a square thin glass sheet. Drill a through-hole 33 with a diameter of 6 mm on the anode substrate 381 of the cold cathode vacuum device, and prepare an indium tin oxide (ITO) thin film on the anode substrate 381. Install the square thin glass sheet on the anode substrate 381, and align the area coated with CdTe cadmium telluride quantum dots with the through-hole 33 and face the inside of the vacuum device. Through the through-hole 33, the area coated with CdTe cadmium telluride quantum dots is in direct contact with the internal atmosphere of the vacuum device cavity.

[0056] (2) Prepare a carbon nanotube cold cathode thin film 372 on the cathode substrate 371 by chemical vapor deposition (CVD). The cathode substrate 371 and the anode substrate 381 are fixed by an isolator 36, and the connection part is coated and bonded with a low-temperature glass powder paste. Coat a low-temperature glass powder paste on the edge of the square thin glass sheet. Fix the vacuum device coated with the sealing paste with a clamp and place it in an oven to be heated to 430 °C for sintering and curing.

[0057] (3) Connect the sealed cold cathode vacuum device to a high-vacuum exhaust system 4 through an exhaust pipe 41 for vacuum exhaust. During the exhaust process, perform a calibration curve test, perform baking and degassing through a movable baking device 2, heat an electric heat sealing disc 8 for sealing off, and activate a getter 42 to complete the full encapsulation of the cold cathode vacuum device. Example 2 A vacuum degree detection system based on a fully encapsulated cold cathode vacuum device

[0058] The difference between this embodiment and Embodiment 1 is that: the diameter of the through-hole is 5 mm; the thickness of the light-transmitting substrate is 1 mm; the luminescent material is selected from two-dimensional luminescent materials, specifically WS 2 .

[0059] Example 3 A vacuum degree detection system based on a fully encapsulated cold cathode vacuum device

[0060] The difference between this embodiment and Embodiment 1 is that: the diameter of the through-hole is 3 mm; the thickness of the light-transmitting substrate is 0.13 mm; the luminescent material is selected from semiconductor luminescent nanowires, specifically ZnO.

[0061] Example 4 A vacuum degree detection system based on a fully encapsulated cold cathode vacuum device

[0062] The differences between this embodiment and Embodiment 1 are as follows: the diameter of the through hole is 4 mm; the thickness of the light-transmitting substrate is 0.35 mm; the luminescent material is selected from organic-inorganic hybrid perovskites, specifically (C 4 H 9 NH 3 ) 2 PbBr 4 .

[0063] Test Example 1

[0064] In Embodiment 1, the cold cathode vacuum device after sealing is connected to a high-vacuum exhaust system through an exhaust pipe for evacuation. A 532-nm laser light source is used to excite the semiconductor quantum dots on the transparent substrate, and the diameter of the excitation spot is 2 μm.

[0065] Figure 4 is the relationship curve between the photoluminescence intensity and the spectral wavelength at different vacuum degrees. The peak value of the photoluminescence intensity measured when the cold cathode vacuum device is in the atmospheric environment is 18350 a.u., as shown in (a) of Figure 4 . When the vacuum degree is pumped to 1.0×10 -5 Pa during the evacuation process, the peak value of the photoluminescence intensity measured is 4950 a.u., as shown in (b) of Figure 4 .

[0066] It can be seen that the photoluminescence intensity of the semiconductor quantum dots in this embodiment decreases with the decrease of the air pressure. The photoluminescence intensity of the semiconductor quantum dots at different vacuum degrees pumped during the evacuation process of the device is measured with a fluorescence spectrometer (1×10 5 Pa, 18350 a.u.; 10 Pa, 9018 a.u.; 1×10 -1 Pa, 6945 a.u.; 1×10 -3 Pa, 5855 a.u.; 1×10 -4 Pa, 5286 a.u.; 1.0×10 -5 Pa, 4950 a.u.), and the calibration curve is fitted based on the vacuum degree and the peak value of the photoluminescence intensity in the above photoluminescence intensity measurement. The calibration curve is as shown in Figure 5 , and the relational expression is as shown in the following formula (I).

[0067] lgP = αI + β(I)

[0068] where P is the internal air pressure of the cold cathode vacuum device, I is the peak value of the photoluminescence intensity of the luminescent material, and α and β are undetermined coefficients related to the characteristics of the luminescent material and the photoluminescence measurement conditions. The α and β parameters are obtained by fitting the curve fitting, α is 0.002976, and β is -19.73214.

[0069] The hermetically sealed cold cathode vacuum device in Example 1 was sealed and activated and then made into a fully encapsulated cold cathode vacuum device. A semiconductor quantum dot on a transparent substrate was excited by a laser light source with a wavelength of 532 nm, the diameter of the excitation spot was 2 μm, and the photoluminescence intensity was measured with a fluorescence spectrometer. The peak intensity was 4953 a.u. According to the conversion of relation (I), the vacuum degree was 1.02×10 - 5 Pa.

[0070] The cathode of the fully encapsulated cold cathode vacuum device in Example 1 was grounded, 300 V was applied to the anode, and the device was operated for 30 minutes. Using the above method, the peak intensity of the photoluminescence of the transparent substrate coated with the luminescent material was measured to be 4991 a.u. According to the conversion of relation (I), its vacuum degree was 1.32×10 -5 Pa. It can be seen that after the power-on test, the internal vacuum degree of the fully encapsulated cold cathode vacuum device has increased, but it is still much better than the theoretical lower limit pressure of 1.0×10 -4 Pa for the device to work. The internal vacuum degree of the fully encapsulated cold cathode vacuum device can be obtained quickly in situ by this method.

[0071] Obviously, the above embodiments of the present invention are only examples for clearly explaining the present invention, rather than limitations on the implementation manners of the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A vacuum degree detection system based on a fully encapsulated cold cathode vacuum device, characterized in that: include: A light source assembly, the light source assembly comprising a light source (1) and a reflective beam expansion assembly; A fully encapsulated cold cathode vacuum device (3), the fully encapsulated cold cathode vacuum device (3) comprising a shell, a cavity being arranged in the shell, a through hole (33) being arranged on the surface of the shell and communicating with the cavity, a light-transmitting substrate (31) being arranged on the surface of the through hole (33) in a sealed manner, a light-emitting material (32) being arranged on the side of the light-transmitting substrate (31) facing the through hole (33); a cold cathode film (372) and an anode film (382) being arranged in the cavity; the light source (1) is expanded by a reflective expansion component, and then irradiated onto the light-emitting material (32) of the light-transmitting substrate (31) and enters the cavity; the light-emitting material (32) is selected from one or more of semiconductor quantum dots, two-dimensional light-emitting materials, semiconductor light-emitting nanowires, and organic light-emitting materials; A fluorescence spectrum analysis component (5) for testing the photoluminescence intensity of a luminescent material (32) in a fully encapsulated cold cathode vacuum device (3); The semiconductor quantum dots are selected from one or more of silicon quantum dots, germanium quantum dots, cadmium sulfide quantum dots, cadmium selenide quantum dots, cadmium telluride quantum dots, zinc selenide quantum dots, lead sulfide quantum dots, lead selenide quantum dots, indium phosphide quantum dots and indium arsenide quantum dots; the two-dimensional luminescent material is selected from one or more of WS2, WTe2, MoS2; the semiconductor light-emitting nanowires are selected from one or more of ZnO, CdS, ZnS; the organic light-emitting material is an organic-inorganic hybrid perovskite.

2. The vacuum degree detection system according to claim 1, characterized in that: The thickness of the light-transmitting substrate (31) is 0.01 to 2 mm.

3. The vacuum degree detection system according to claim 1 or 2, characterized in that: The light-transmitting substrate (31) is one or more of glass, quartz and sapphire.

4. The vacuum degree detection system according to claim 1, characterized in that: The reflective beam expansion assembly comprises a reflective sheet (6) and a microscope (7), wherein the light source (1) is reflected by the reflective sheet (6) and beam expanded by the microscope (7) to irradiate the luminescent material (32) of the light-transmitting substrate (31) and then enter the cavity.

5. The vacuum degree detection system according to claim 1, characterized in that: An exhaust pipe (41) communicating with the cavity is also provided on the surface of the fully encapsulated cold cathode vacuum device (3), and a getter (42) is provided in the exhaust pipe (41).

6. The vacuum degree detection system according to claim 1, characterized in that: The cold cathode film (372) is a carbon nanotube, and the anode film (382) is indium tin oxide.

7. Application of the vacuum degree detection system based on the fully encapsulated cold cathode vacuum device according to any one of claims 1 to 6 in detecting the vacuum degree of a vacuum device.

8. A method for detecting vacuum degree based on the vacuum degree detection system according to any one of claims 1 to 6, characterized in that: The following steps are involved: (1) Turn on the light source and allow it to pass into the cavity of the cold cathode vacuum device. Use a fluorescence spectrum analysis component to test the photoluminescence intensity of the luminescent material on the light-transmitting substrate. Test the vacuum degree during the exhaust process of the cold cathode vacuum device to obtain a calibration curve between the vacuum degree and the photoluminescence intensity. (2) After the vacuum device is fully encapsulated, the test is performed according to the test method of step (1) to obtain the photoluminescence intensity of the luminescent material after full encapsulation, and the vacuum degree inside the fully encapsulated cold cathode vacuum device is obtained through the corresponding relationship in the calibration curve.

9. The method according to claim 8, characterized in that: The spectrum wavelength range collected by the fluorescence spectrum analysis component is 350nm to 1200nm.

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