A method for measuring the wave height of spiral wave-cut metal wire

Abstract

The present invention discloses a method for measuring the wave height of a spiral wave-cut metal wire, comprising: (1) clamping two ends of the metal wire with a clamp to keep the metal wire horizontal; (2) irradiating the metal wire with a light to form a projection directly below the metal wire, photographing the projection pattern until a1=a0, stopping the rotation, reading the wave height value in the projection pattern of the measured metal wire and recording it as the first group of wave heights h1; (3) after the clamp rotates by an angle c, reading the wave height value in the projection pattern of the measured metal wire and recording it as the second group of wave heights h2; (4) repeating step (3) until the nth group of wave heights h1 is read. n After determining the wave height formed by the first set of deformed gears, the wave height formed by other sets of deformed gears can be measured by directly rotating the angle according to the angle between the other sets of deformed gears and the first set of deformed gears. Multiple sets of wave heights can be measured quickly to improve the product stability of the client.

Description

Technical Field

[0001] The invention relates to a method for measuring the wave height of a spiral waveform metal wire, and in particular to a method for measuring the wave height of a spiral waveform cut metal wire. Background Art

[0002] In the electronic field, in the segmentation and slicing process of hard materials such as monocrystalline silicon, polycrystalline silicon, and gallium nitride, the most commonly used products are spiral corrugated metal monofilament products with a certain spatial rotation that are improved on the basis of straight wires. Its wave height will directly affect its ability to carry mortar, and then affect the thickness of the silicon wafer, TTV, BOW, WARP and other parameters. Therefore, the wave height is an important indicator to measure the cutting ability of the spiral corrugated metal monofilament. Since the existing wave height measurement method is mainly based on manual measurement, the measurement accuracy of the profiler is 1um, and human errors in manual measurement cannot be avoided. The slight differences in the position of measuring the wave height, the position of human eye observation, and the rotation angle will lead to large differences in the results.

[0003] The new method solves the following problems:

[0004] The wave height values ​​measured manually have low accuracy and large errors;

[0005] The parameters of silicon wafers are susceptible to fluctuations due to changes in wave height. Summary of the invention

[0006] In view of the problems existing in the prior art, the present invention proposes a method for measuring the wave height of spiral waveform-cut metal wire. The projection image is photographed by a camera and the wave height is read. The measurement method has an accuracy of 0.1um and is more convenient to operate. After determining the wave height formed by the first group of deformed gears, the above-mentioned measurement method can directly rotate the angle according to the angle between the other groups of deformed gears and the first group of deformed gears to measure the wave height formed by the other groups of deformed gears. Multiple groups of wave heights can be quickly measured to improve the product stability of the client.

[0007] The technical solution adopted by the present invention is: a method for measuring the wave height of a spiral wave-cut metal wire,

[0008] (1) Clamp the two ends of the wire with a clamp to keep the wire horizontal. The wire is a spiral wire formed by n sets of deformation gears. The theoretical number of waves formed by the first set of deformation gears is a. 0 , there is an angle between the other groups of deformed gears and the first group of deformed gears;

[0009] (2) Use light to shine directly above the wire to form a projection directly below the wire, and then photograph the projection. If the number of waves in the projection is a 1 The theoretical number of waves a 0If the fixture is different, the camera will be rotated to angle b and the camera will be taken again until the angle a 1 =a 0 , stop the rotation, read the wave height value in the projection graph of the measured metal wire and record it as the first set of wave height h 1 ;

[0010] (3) After the fixture rotates to an angle c, which is the angle between the first set of deformed gears and the second set of deformed gears, read the wave height value in the projection graph of the measured wire and record it as the second set of wave height h 2 ;

[0011] (4) Repeat step (3) until the wave height value in the projection graph of the measured metal wire corresponding to the nth group of deformed gears is read and recorded as the nth group of wave height h n .

[0012] On the basis of the above scheme, as a preference, the clamp includes a fixed shaft, a gear fixed on the fixed shaft and a magnet. The fixed shaft and the gear are coaxially arranged and both have a central through hole. The fixed shaft is made of magnetic material. After the metal wire passes through the central through hole, the magnet is adsorbed on the central through hole of the fixed shaft to fix the metal wire on the clamp.

[0013] On the basis of the above scheme, as a preference, the center through hole includes a first center through hole on the gear and a second center through hole on the fixed shaft, the fixed shaft includes a first section shaft, a second section shaft, and a third section shaft with successively smaller diameters, the second section shaft is rotatably matched with the support plate, the third section shaft is inserted into the first center through hole and fixedly connected to the gear through a locking bolt.

[0014] On the basis of the above scheme, as a preference, the support plate includes a left side plate and a right side plate, and there are two clamps, which are symmetrically installed on the left side plate and the right side plate, and the first section axis and the third section axis of the clamp are respectively located on both sides of the corresponding left side plate and the right side plate.

[0015] On the basis of the above scheme, as a preference, the driving mechanism for driving the gear to rotate includes a motor fixed on the right side plate, an output gear is fixedly mounted on the output shaft of the motor, the output gear meshes with the first intermediate gear, the first intermediate gear is rotatably connected to the right side plate and fixed to the right end of the intermediate shaft, the second intermediate gear is fixedly mounted on the left end of the intermediate shaft, the second intermediate gear is rotatably connected to the left side plate, the first intermediate gear and the second intermediate gear mesh with the corresponding gears on the left side plate and the right side plate.

[0016] On the basis of the above solution, as a preference, a camera is provided directly above the metal wire, and the camera can reciprocate in left and right directions.

[0017] On the basis of the above scheme, as a preference, the driving mechanism that drives the camera to reciprocate in the left and right directions is a screw mechanism, the screw mechanism includes a motor fixed on the left side plate, a screw fixedly connected to the motor output shaft, a slider installed on the screw, and a guide rail fixed on the back plate, the guide rail and the slider slide in cooperation, the back plate is fixedly connected to the left side plate and the right side plate, and the camera is fixedly installed on the slider.

[0018] Based on the above solution, as a preferred embodiment, the lower ends of the left plate and the right plate are fixed on the bottom plate, and the camera captures the projection of the metal wire on the bottom plate.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] By shooting the projected image with a camera and reading the wave height, the measurement method can achieve an accuracy of 0.1um and is more convenient to operate. After determining the wave height formed by the first set of deformed gears, the above measurement method can directly rotate the angle according to the angle between the other sets of deformed gears and the first set of deformed gears to measure the wave height formed by other sets of deformed gears. Multiple sets of wave heights can be measured quickly to improve the product stability of the client.

[0021] The metal wire is fixed by magnetic attraction, and the operation process is convenient and quick. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of the present invention.

[0023] Figure 2 It is a schematic diagram of the coordination between the gear and the fixed shaft. DETAILED DESCRIPTION

[0024] The present invention will be further described below by way of examples, but the scope of the present invention is not limited thereto.

[0025] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0026] like Figure 1-2 A method for measuring the wave height of a spirally cut metal wire is shown in FIG.

[0027] (1) Clamp the two ends of the metal wire 1 with a clamp to keep the metal wire horizontal. The metal wire is a spiral metal wire formed by being deformed by n sets of deforming gears. The theoretical number of waves formed by the first set of deforming gears is a.0 , there is an angle between the other groups of deformed gears and the first group of deformed gears;

[0028] (2) Use light to shine directly above the wire to form a projection directly below the wire, and then photograph the projection. If the number of waves in the projection is a 1 The theoretical number of waves a 0 If the fixture is different, the camera will be rotated to angle b and the camera will be taken again until the angle a 1 =a 0 , stop the rotation, read the wave height value in the projection graph of the measured metal wire and record it as the first set of wave height h 1 ;

[0029] (3) After the fixture rotates to an angle c, which is the angle between the first set of deformed gears and the second set of deformed gears, read the wave height value in the projection graph of the measured wire and record it as the second set of wave height h 2 ;

[0030] (4) Repeat step (3) until the wave height value in the projection graph of the measured metal wire corresponding to the nth group of deformed gears is read and recorded as the nth group of wave height h n .

[0031] By shooting the projected image with a camera and reading the wave height, the measurement method can achieve an accuracy of 0.1um and is more convenient to operate. After determining the wave height formed by the first set of deformed gears, the above measurement method can directly rotate the angle according to the angle between the other sets of deformed gears and the first set of deformed gears to measure the wave height formed by other sets of deformed gears. Multiple sets of wave heights can be measured quickly to improve the product stability of the client.

[0032] Among them, the clamp includes a fixed shaft, a gear 2 fixed on the fixed shaft and a magnet. The fixed shaft and the gear are coaxially arranged and both have a central through hole. The fixed shaft is made of magnetic material. After the metal wire passes through the central through hole, the magnet is adsorbed on the central through hole of the fixed shaft to fix the metal wire on the clamp.

[0033] The metal wire is fixed by magnetic attraction, and the operation process is convenient and quick.

[0034] The center through hole includes a first center through hole on the gear and a second center through hole on the fixed shaft. The fixed shaft includes a first section shaft 3, a second section shaft 4, and a third section shaft 5 with diameters decreasing successively. The second section shaft is rotatably matched with the support plate, and the third section shaft is inserted into the first center through hole and fixedly connected to the gear through a locking bolt.

[0035] The support plate includes a left side plate 6 and a right side plate 7. There are two clamps which are symmetrically mounted on the left side plate and the right side plate. The first section axis and the third section axis of the clamp are respectively located on both sides of the corresponding left side plate and the right side plate.

[0036] The driving mechanism for driving the gear to rotate includes a motor 8 fixed on the right side plate, an output gear 9 is fixedly installed on the output shaft of the motor, the output gear meshes with the first intermediate gear 10, the first intermediate gear is rotatably connected to the right side plate and fixed to the right end of the intermediate shaft 11, the left end of the intermediate shaft is fixedly installed with the second intermediate gear 12, the second intermediate gear is rotatably connected to the left side plate, the first intermediate gear and the second intermediate gear mesh with the corresponding gears on the left side plate and the right side plate.

[0037] The multi-stage gear transmission method is adopted, which makes it easy to control the rotation angle. Through a motor, two intermediate gears and an intermediate shaft, the two fixtures can rotate synchronously, which improves the measurement accuracy and reduces the cost.

[0038] A camera is arranged just above the metal wire, and the camera can reciprocate in the left and right directions.

[0039] The driving mechanism that drives the camera to reciprocate in the left and right directions is a screw mechanism, which includes a driving motor 13 fixed on the left side plate, a screw 14 fixedly connected to the motor output shaft, a slider 15 installed on the screw, and a guide rail 17 fixed on the back plate 16. The guide rail and the slider are slidably matched. The back plate is fixedly connected to the left side plate and the right side plate, and the camera 18 is fixedly installed on the slider.

[0040] The lower ends of the left side plate and the right side plate are fixed on the bottom plate 19, and the camera shoots the projection of the metal wire on the bottom plate.

[0041] It should be noted that the embodiments described above are only used to explain the present invention and do not constitute any limitation to the present invention. The present invention has been described with reference to typical embodiments, but it should be understood that the words used therein are descriptive and explanatory words, rather than restrictive words. The present invention may be modified as specified within the scope of the claims of the present invention, and the present invention may be revised without departing from the scope and spirit of the present invention. Although the present invention described therein relates to specific methods, materials and embodiments, it does not mean that the present invention is limited to the specific examples disclosed therein, on the contrary, the present invention can be extended to all other methods and applications with the same functions.

Claims

1. A method for measuring the wave height of a spirally wave-cut metal wire, characterized in that: (1) Clamping the two ends of the metal wire with a clamp to keep the metal wire horizontal, wherein the metal wire is a spiral metal wire formed by being deformed by n sets of deforming gears, the theoretical number of waves formed by the first set of deforming gears is a0, and there are angles between the other sets of deforming gears and the first set of deforming gears; (2) Use light to illuminate the metal wire directly above to form a projection directly below the metal wire, and take a picture of the projection pattern. If the number of waves a1 in the projection pattern is different from the theoretical number of waves a0, rotate the fixture by an angle b and take another picture until a1=a0. Stop the rotation, read the wave height value in the projection pattern of the metal wire under test and record it as the first set of wave heights h1; (3) After the fixture rotates by an angle c, which is the angle between the first set of deformed gears and the second set of deformed gears, the wave height value in the projection graph of the measured wire is read and recorded as the second set of wave height h2; (4) Repeat step (3) until the wave height value in the projection graph of the measured metal wire corresponding to the nth group of deformed gears is read and recorded as the nth group of wave height h n .

2. The method for measuring the wave height of a spirally corrugated cut metal wire according to claim 1, characterized in that: The fixture includes a fixed shaft, a gear fixed on the fixed shaft, and a magnet. The fixed shaft and the gear are coaxially arranged and both have a central through hole. The fixed shaft is made of magnetic material. After the metal wire passes through the central through hole, the magnet is adsorbed on the central through hole of the fixed shaft to fix the metal wire on the fixture.

3. The method for measuring the wave height of a spirally corrugated cut metal wire according to claim 2, characterized in that: The central through hole includes a first central through hole on the gear and a second central through hole on the fixed shaft. The fixed shaft includes a first section shaft, a second section shaft, and a third section shaft with diameters decreasing successively. The second section shaft is rotatably matched with the support plate, and the third section shaft is inserted into the first central through hole and fixedly connected to the gear through a locking bolt.

4. The method for measuring the wave height of a spirally corrugated cut metal wire according to claim 1, characterized in that: The support plate includes a left side plate and a right side plate. There are two clamps which are symmetrically mounted on the left side plate and the right side plate. The first section axis and the third section axis of the clamp are respectively located on both sides of the corresponding left side plate and the right side plate.

5. The method for measuring the wave height of a spirally corrugated cut metal wire according to claim 4, characterized in that: The driving mechanism for driving the gear to rotate includes a motor fixed on the right side plate, an output gear is fixedly installed on the output shaft of the motor, the output gear meshes with the first intermediate gear, the first intermediate gear is rotatably connected to the right side plate and fixed to the right end of the intermediate shaft, the second intermediate gear is fixedly installed on the left end of the intermediate shaft, the second intermediate gear is rotatably connected to the left side plate, and the first intermediate gear and the second intermediate gear mesh with the corresponding gears on the left side plate and the right side plate.

6. The method for measuring the wave height of a spirally corrugated cut metal wire according to claim 4, characterized in that: A camera is arranged just above the metal wire, and the camera can reciprocate in the left and right directions.

7. The method for measuring the wave height of a spirally corrugated cut metal wire according to claim 6, characterized in that: The driving mechanism that drives the camera to reciprocate in the left and right directions is a screw mechanism, which includes a motor fixed on the left side plate, a screw fixedly connected to the motor output shaft, a slider installed on the screw, and a guide rail fixed on the back plate. The guide rail and the slider are slidably matched, the back plate is fixedly connected to the left side plate and the right side plate, and the camera is fixedly installed on the slider.

8. The method for measuring the wave height of a spirally corrugated cut metal wire according to claim 6, characterized in that: The lower ends of the left plate and the right plate are fixed on the bottom plate, and the camera shoots the projection of the metal wire on the bottom plate.

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