Positioning chuck and semiconductor wafer analysis device

Abstract

The present application relates to the field of semiconductor wafer technology, and proposes a positioning chuck and a semiconductor wafer analysis device. The positioning chuck includes a base, a turntable, a sample holder, and a plurality of clamping claw assemblies. The turntable is rotatably mounted on the base, and the sample holder is located on the side of the turntable facing away from the base and fixed on the base; a plurality of clamping claw assemblies are arranged at intervals along the circumference of the turntable, and the clamping claw assembly includes a clamping structure, a support rod, and a slide seat, and the clamping structure is connected to the slide seat through the support rod; a plurality of slide rails extending radially along the turntable are provided on the base, and the slide rails have an outer end and an inner end, and the outer end gradually moves away from the turntable to the inner end, and the slide seat is slidably mounted on the slide rails; a plurality of long holes extending circumferentially along the turntable are provided on the turntable, and the long holes have a first end and a second end, and the first end gradually approaches the center of the turntable to the second end, and the support rod passes through the long holes. The above positioning chuck can both locate the sample and press the sample, and solves the problem that the existing electrostatic adsorption chuck cannot accurately locate the sample.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor wafers, and in particular to a positioning chuck and a semiconductor wafer analysis device. Background Art

[0002] Light elements (LE) mainly refer to elements with atomic numbers between 4 and 20, such as B, C, Al, Si, etc., which are the necessary components for elemental analysis in semiconductor wafers. In the semiconductor wafer manufacturing process, high requirements are placed on the accuracy and speed of light element measurement. In the field of semiconductor wafer technology, the analysis of light elements is of great significance. For example, the precise composition of BPSG (Boro-phospho-silicate Glass) is measured to improve the performance of the first metal pre-dielectric PMD / metal interlayer dielectric AVID; the thickness of HMC (hard mask carbon) is accurately measured to improve the yield of deep silicon etching; the thickness of Al film is accurately measured to analyze the coating process, etc. In a stable vacuum environment, the light element fluorescence is analyzed using a light element X-ray fluorescence (LE-XRF) analysis device, which can effectively reduce the background, improve the peak-to-background ratio, and achieve accurate qualitative and quantitative analysis.

[0003] In addition, semiconductor wafers may be contaminated during the manufacturing process. A total reflection fluorescence X-ray (TXRF) analysis device is usually used to detect the cleanliness of semiconductor wafers in a vacuum environment to ensure product quality.

[0004] Since both of the above two analytical devices perform analytical tests in a vacuum environment, it is impossible to use a vacuum chuck to adsorb and fix the sample, and an electrostatic adsorption chuck is usually used to adsorb and fix the sample. However, the electrostatic adsorption chuck is not only relatively expensive, but also unable to accurately position the sample. Summary of the invention

[0005] In view of this, the embodiments of the present application provide a positioning chuck and a semiconductor wafer analysis device to solve the problem that the existing electrostatic adsorption chuck cannot accurately position the sample.

[0006] 14. The method of claim 13 wherein the plurality of jaw assemblies are arranged at intervals along the circumference of the turntable, the jaw assembly comprising a clamping structure, a support rod and a slide seat, the clamping structure being connected to the slide seat through the support rod, the clamping structure having an inclined clamping surface facing the sample seat; the base is provided with a plurality of slide rails extending radially along the turntable, the slide rails having an outer end and an inner end, the slide rails gradually moving away from the turntable from the outer end to the inner end, and the slide seat being slidably mounted on the slide rails; the turntable is provided with a plurality of long holes extending circumferentially along the turntable, the long holes having a first end and a second end, the long holes gradually approaching the center of the turntable from the first end to the second end, and the support rod passes through the long holes.

[0007] The positioning chuck provided in the embodiment of the present application includes a base, a turntable, a sample holder and a plurality of clamping jaw assemblies, wherein the turntable is located between the base and the sample holder, the support rod of the clamping jaw assembly passes through the long hole on the turntable, and the slide seat of the clamping jaw assembly slides on the slide rail of the base. Since the slide rail extends along the radial direction of the turntable and gradually moves away from the turntable from the outer end to the inner end, and the long hole extends along the circumference of the turntable and gradually approaches the center of the turntable from the first end to the second end; therefore, when the turntable rotates, under the guidance of the long hole to the support rod, the clamping structure of the clamping jaw assembly gradually approaches the sample holder along the radial direction of the turntable, and at the same time, under the guidance of the slide rail to the slide seat, the clamping structure of the clamping jaw assembly gradually approaches the sample holder along the axial direction of the turntable, that is, the clamping structure performs a compound action. In this way, the inclined clamping surface of the clamping structure can not only approach the sample holder along the radial direction of the turntable to position the sample, but also approach the sample holder along the axial direction of the turntable to press the sample, thereby realizing the positioning and pressing of the sample at the same time, solving the problem that the existing electrostatic adsorption chuck cannot accurately position the sample.

[0008] In some embodiments, the clamping structure includes a mounting seat, a clamping head and an elastic member, the mounting seat is connected to the support rod, the clamping head is movably mounted on the mounting seat, the inclined clamping surface is provided on the clamping head, and the elastic member is located between the clamping head and the mounting seat.

[0009] In some embodiments, the clamping structure further comprises a movable rod movably mounted on the mounting seat, the clamping head is hinged on the movable rod, and the clamping head is movably mounted on the mounting seat via the movable rod.

[0010] In some embodiments, the clamping head is ball-jointed on the movable rod.

[0011] In some embodiments, the clamping head includes a clamping body and a flexible pad disposed on the clamping body, and the inclined clamping surface is disposed on the flexible pad.

[0012] In some embodiments, the clamping jaw assembly further includes a rolling sleeve, which is sleeved on the support rod and rolls with the hole wall of the long hole.

[0013] In some embodiments, the slide seat includes a slider and a connecting plate fixed on the slider, the connecting plate having a first side facing the turntable and a second side facing the slider, the first side is parallel to the turntable, and the second side is parallel to the slide rail.

[0014] In some embodiments, three of the clamping jaw assemblies are arranged at intervals along the circumference of the turntable.

[0015] In some embodiments, the turntable is a gear plate, and the positioning chuck further includes a force control motor and a driving gear, the force control motor is fixed on a base, the driving gear is connected to an output shaft of the force control motor, and the driving gear is meshed with the gear plate.

[0016] The second aspect of the present application proposes a semiconductor wafer analysis device, which includes a vacuum chamber, a motion platform and a positioning chuck as described in the first aspect, wherein the motion platform is in the vacuum chamber, and the positioning chuck is in the vacuum chamber and mounted on the motion platform.

[0017] The semiconductor wafer analysis device adopts all the embodiments of the positioning chuck mentioned above, and thus has at least all the beneficial effects of the above embodiments, which will not be described one by one here.

[0018] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or conventional technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0020] Figure 1 is a schematic diagram of the structure of a positioning chuck provided in some embodiments of the present application;

[0021] Figure 2 yes Figure 1 A sectional view of the positioning chuck taken along the line AA shown;

[0022] Figure 3 yes Figure 2 An enlarged view of the positioning chuck at position B is shown;

[0023] Figure 4 yes Figure 2 An enlarged view of the positioning chuck at position C is shown;

[0024] Figure 5 yes Figure 1 The structural schematic diagram of the positioning chuck with the cover plate removed is shown;

[0025] Figure 6 is a schematic diagram of the structure of a base and a clamping jaw assembly provided in some embodiments of the present application;

[0026] Figure 7 is a schematic diagram of the structure of a sample holder provided in some embodiments of the present application;

[0027] Figure 8 is a schematic diagram of the structure of a cover plate provided in some embodiments of the present application;

[0028] Fig. 9 It is a schematic diagram of the structure of a semiconductor wafer analysis device provided in some embodiments of the present application.

[0029] The meanings of the marks in the figure are:

[0030] 1. Semiconductor wafer analysis device;

[0031] 100. Positioning chuck;

[0032] 10. Base; 11. Slide rail; 111. Outer end; 112. Inner end; 12. Fixed column; 13. Fixed plate; 14. Wedge seat;

[0033] 20, turntable; 21, long hole; 211, first end; 212, second end;

[0034] 30. sample holder; 31. support rib; 32. first avoidance groove;

[0035] 40. Clamping jaw assembly; 41. Clamping structure; 411. Mounting seat; 4111. Seat body; 4112. Fixing sleeve; 4113. Screw hole; 4114. Through hole; 4115. Fixing screw; 412. Clamping head; 4121. Snap ring; 4122. Clamping body; 4123. Ball head seat; 4124. Flexible pad; 41241. Inclined clamping surface; 413. Elastic member; 414. Movable rod; 4141. Ball head; 4142. Position-limiting convex portion; 42. Support rod; 43. Rolling sleeve; 44. Sliding seat; 441. Connecting plate; 4411. First side surface; 4412. Second side surface; 442. Sliding block; 45. First bearing;

[0036] 50. Cover plate; 51. Flanged edge; 511. Fixing hole; 52. Second avoidance groove;

[0037] 60. Force control motor;

[0038] 70. Driving gear;

[0039] 80. Second bearing;

[0040] 200. Samples;

[0041] 300, vacuum chamber;

[0042] 400. Sports platform. DETAILED DESCRIPTION

[0043] The following embodiments of the technical solution of the present application are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application, and are therefore only used as examples, and cannot be used to limit the scope of protection of the present application.

[0044] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" in the specification and claims of this application and the above-mentioned figure descriptions and any variations thereof are intended to cover non-exclusive inclusions.

[0045] In the description of the embodiments of the present application, the technical terms "first", "second", etc. are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0046] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0047] In the description of the embodiments of the present application, the term "and / or" is only a description of the association relationship of the associated objects, indicating that there may be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0048] In the description of the embodiments of the present application, the term "multiple" refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0049] In the description of the embodiments of the present application, the orientations or positional relationships indicated by technical terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the embodiments of the present application.

[0050] In the description of the embodiments of the present application, unless otherwise clearly specified and limited, technical terms such as "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0051] The first embodiment of the present application provides a positioning chuck. Figure 1 , Figure 2 , Figure 3 and Figure 5The positioning chuck 100 includes a base 10, a turntable 20, a sample holder 30, and a plurality of clamping jaw assemblies 40. The turntable 20 is rotatably mounted on the base 10, and the sample holder 30 is located on the side of the turntable 20 facing away from the base 10 and is fixed on the base 10; the plurality of clamping jaw assemblies 40 are arranged at intervals along the circumference of the turntable 20, and the clamping jaw assemblies 40 include a clamping structure 41, a support rod 42, and a slide 44. The clamping structure 41 is connected to the slide 44 through the support rod 42, and the clamping structure 41 has an inclined clamping surface 41241 facing the sample holder 30; the base 10 is provided with a plurality of clamping jaw assemblies 40 arranged along the turntable 20. 0 radially extending slide rail 11, the slide rail 11 has an outer end 111 and an inner end 112, the slide rail 11 gradually moves away from the turntable 20 from the outer end 111 to the inner end 112, and the slide seat 44 is slidably mounted on the slide rail 11; the turntable 20 is provided with a plurality of long holes 21 extending along the circumference of the turntable 20, the long holes 21 have a first end 211 and a second end 212, the long holes 21 gradually approach the center of the turntable 20 from the first end 211 to the second end 212, and the support rod 42 passes through the long holes 21.

[0052] The base 10 is used to install the turntable 20, the sample holder 30 and the plurality of clamping jaw assemblies 40. The shape of the base 10 is not limited in this application. For example, the base 10 may be a circular structure, a polygonal structure, etc.

[0053] In this embodiment, the base 10 is provided with a slide rail 11 extending radially along the turntable 20 . It is understood that the slide rail 11 may be a straight slide rail, an arc-shaped slide rail, etc. extending radially along the turntable 20 . The number of the slide rails 11 is arranged according to the number of the clamping jaw assemblies 40 .

[0054] The slide rail 11 gradually moves away from the turntable 20 from the outer end 111 to the inner end 112 , that is, the distance between the outer end 111 of the slide rail 11 and the turntable 20 in the X direction is smaller than the distance between the inner end 112 of the slide rail 11 and the turntable 20 in the X direction.

[0055] The turntable 20 is rotatably mounted on the base 10. It is understood that the turntable 20 can be directly rotatably mounted on the base 10, or the turntable 20 can be rotatably mounted on the base 10 via the second bearing 80. Figure 2 The base 10 is spaced apart from the base 10 in the X direction to form a space for installing the slide rail 11.

[0056] The shape of the turntable 20 is not limited in the present application, for example, the turntable 20 may be a circular disk, a polygonal disk, etc. It is understood that the projection of the turntable 20 in the X direction may be completely within the base 10; or, the projection of the turntable 20 in the X direction may be partially within the base 10 and partially outside the base 10.

[0057] In this embodiment, the rotating disk 20 is provided with a long hole 21 extending along the circumference of the rotating disk 20 . It can be understood that the long hole 21 can be an arc-shaped long hole, a straight long hole, etc. extending along the circumference of the rotating disk 20 . The number of the long holes 21 is arranged according to the number of the clamping jaw assemblies 40 .

[0058] The long hole 21 gradually approaches the center of the turntable 20 from the first end 211 to the second end 212 , that is, the distance between the first end 211 of the long hole 21 and the center of the turntable 20 is greater than the distance between the second end 212 of the long hole 21 and the center of the turntable 20 .

[0059] The long hole 21 is in the thickness direction of the rotating disk 20 (i.e. Figure 2 The long hole 21 is arranged to be through-through in the middle X direction, and the long hole 21 is for the support rod 42 to pass through, and guides the support rod 42 to move in the radial direction of the turntable 20 when the turntable 20 rotates.

[0060] The sample holder 30 is located on the side of the turntable 20 facing away from the base 10, that is, the turntable 20 is located between the base 10 and the sample holder 30; the sample holder 30 is fixed on the base 10, that is, the sample holder 30 is fixed relative to the base 10. The sample holder 30 is used to place a sample 200, such as a wafer.

[0061] Optionally, the sample holder 30 is a plate-shaped structure, for example, the sample holder 30 may be a circular plate or a polygonal plate. It is understood that the projection of the sample holder 30 in the X direction may be completely within the turntable 20; or, the projection of the sample holder 30 in the X direction may be partially within the turntable 20 and partially outside the turntable 20. In this case, an avoidance hole or avoidance notch for avoiding the support rod 42 needs to be provided on the sample holder 30.

[0062] The plurality of gripper assemblies 40 are arranged at intervals along the circumference of the turntable 20 , which means that three or more gripper assemblies 40 may be arranged at intervals along the circumference of the turntable 20 .

[0063] In this embodiment, the clamping structure 41 is connected to the slide 44 through the support rod 42, the support rod 42 passes through the long hole 21 on the turntable 20, and the slide 44 is slidably installed on the slide rail 11, that is, the clamping structure 41 and the slide 44 are respectively located on opposite sides of the turntable 20 in the X direction.

[0064] The inclined clamping surface 41241 has a highest point and a lowest point in the X direction, and the inclined clamping surface 41241 faces the sample holder 30, that is, the distance between the highest point of the inclined clamping surface 41241 and the center of the sample holder 30 is smaller than the distance between the lowest point of the inclined clamping surface 41241 and the center of the sample holder 30. The inclined clamping surface 41241 of the clamping structure 41 is used to clamp the edge of the sample 200 to achieve positioning and clamping of the sample 200.

[0065] The positioning chuck 100 provided in the embodiment of the present application includes a base 10, a turntable 20, a sample holder 30 and a plurality of jaw assemblies 40. The turntable 20 is located between the base 10 and the sample holder 30. The support rod 42 of the jaw assembly 40 passes through the long hole 21 on the turntable 20. The slide seat 44 of the jaw assembly 40 slides on the slide rail 11 of the base 10. Since the slide rail 11 extends along the radial direction of the turntable 20 and the slide rail 11 gradually moves away from the turntable 20 from the outer end 111 to the inner end 112, the long hole 21 extends along the circumference of the turntable 20 and the long hole 21 gradually approaches the center of the turntable 20 from the first end 211 to the second end 212; therefore, when the turntable 20 rotates, under the guidance of the long hole 21 on the support rod 42, the clamping structure 41 of the clamping jaw assembly 40 gradually approaches the sample holder 30 along the radial direction of the turntable 20, and at the same time, under the guidance of the slide rail 11 on the slide holder 44, the clamping structure 41 of the clamping jaw assembly 40 gradually approaches the sample holder 30 along the axial direction of the turntable 20, that is, the clamping structure 41 performs a compound action. In this way, the inclined clamping surface 41241 of the clamping structure 41 can approach the sample holder 30 along the radial direction of the turntable 20 to position the sample 200, and can also approach the sample holder 30 along the axial direction of the turntable 20 to press the sample 200, thereby achieving positioning and pressing of the sample 200 at the same time, solving the problem that the existing electrostatic adsorption chuck cannot accurately position the sample 200.

[0066] Please also refer to Figure 2 and Figure 3 In some embodiments, the clamping structure 41 includes a mounting seat 411, a clamping head 412 and an elastic member 413. The mounting seat 411 is connected to the support rod 42, the clamping head 412 is movably mounted on the mounting seat 411, the inclined clamping surface 41241 is provided on the clamping head 412, and the elastic member 413 is located between the clamping head 412 and the mounting seat 411.

[0067] The structure of the mounting seat 411 is not limited, as long as it can be used to mount the clamping head 412 and the elastic member 413 .

[0068] The mounting seat 411 is connected to the support rod 42. It can be understood that the mounting seat 411 can be fixedly connected to the support rod 42, and the fixed connection method includes but is not limited to fastener connection, clamping, welding, interference connection, etc.; or, the mounting seat 411 can be integrally formed with the support rod 42.

[0069] The clamping head 412 is movably mounted on the mounting seat 411, and the elastic member 413 is located between the clamping head 412 and the mounting seat 411. It can be understood that the clamping head 412 can compress the elastic member 413 to be close to the mounting seat 411, and the clamping head 412 can also move away from the mounting seat 411 under the elastic force of the elastic member 413, but the clamping head 412 will not fall off the mounting seat 411.

[0070] It can be understood that the elastic member 413 can be a spring, rubber, etc.

[0071] The clamping head 412 provided in the embodiment of the present application is movably mounted on the mounting seat 411, and an elastic member 413 is arranged between the clamping head 412 and the mounting seat 411, so that when the jaw assembly 40 quickly positions and presses the sample 200, the inclined clamping surface 41241 on the clamping head 412 slightly presses the sample 200 through the buffering of the elastic member 413, thereby avoiding damage to the sample 200.

[0072] In other embodiments, the clamping structure 41 includes a mounting seat 411 and a clamping head 412, but does not include an elastic member 413. The clamping head 412 can be fixedly connected to the mounting seat 411, and the fixed connection method includes but is not limited to fastener connection, clamping, welding, interference connection, etc.; or, the clamping head 412 can be integrally formed with the mounting seat 411. Of course, in order to prevent the clamping head 412 from over-pressuring the sample 200 and causing damage to the sample 200, a pressure sensor can be provided on the clamping structure 41. When the pressure sensor detects that the pressure is relatively high, a signal can be sent to the driving device to stop the driving device.

[0073] Please refer to Figure 3 In some embodiments, in addition to the mounting seat 411, the clamping head 412 and the elastic member 413, the clamping structure 41 also includes a movable rod 414 movably mounted on the mounting seat 411, the clamping head 412 is hinged on the movable rod 414, and the clamping head 412 is movably mounted on the mounting seat 411 through the movable rod 414.

[0074] Optionally, the mounting seat 411 is provided with a through hole 4114, which extends along the radial direction of the rotating disk 20 and gradually approaches the rotating disk 20 from the outer end to the inner end; the movable rod 414 is movably installed in the through hole 4114, one end of the movable rod 414 is hinged to the clamping head 412, and the other end of the movable rod 414 is provided with a limiting protrusion 4142, which is limitedly matched with the outer side of the mounting seat 411, so that the clamping head 412 will not fall out of the mounting seat 411 under the elastic force of the elastic member 413. The elastic member 413 is in the through hole 4114.

[0075] It can be understood that the limiting protrusion 4142 can be an annular protrusion, a C-shaped protrusion, or the limiting protrusion 4142 can include a plurality of dot-shaped protrusions arranged at intervals along the circumference of the movable rod 414 .

[0076] The clamping head 412 is hinged on the movable rod 414. It can be understood that the clamping head 412 can be hinged on the movable rod 414 through a hinge shaft, and the axial direction of the hinge shaft is parallel to the surface of the sample 200, so that the clamping head 412 can swing relative to the movable rod 414 in the X direction; or, the clamping head 412 can be hinged on the movable rod 414 through a ball head, and the clamping head 412 can swing relative to the movable rod 414 in any direction.

[0077] It should be noted that there should be a certain space between the clamping head 412 and the mounting seat 411 to prevent the mounting seat 411 from affecting the swing of the clamping head 412 .

[0078] In the embodiment of the present application, the clamping head 412 is hinged to the movable rod 414 so that the clamping head 412 can swing to adapt to the edge of the sample 200 , thereby facilitating the positioning and clamping of the sample 200 .

[0079] In other embodiments, the clamping head 412 may not be hinged on the movable rod 414 , but may be directly fixed on the movable rod 414 . In this case, the clamping head 412 can only move along the axial direction of the movable rod 414 but cannot swing relative to the movable rod 414 .

[0080] Please refer to Figure 3 In some embodiments, when the clamping structure 41 includes a movable rod 414, the mounting seat 411 includes a seat body 4111 and a fixing sleeve 4112, the movable rod 414 passes through the fixing sleeve 4112 and is hinged to the clamping head 412, and the limiting protrusion 4142 of the movable rod 414 is limitedly matched with the fixing sleeve 4112. A screw hole 4113 is also provided on the seat body 4111.

[0081] Specifically, the seat body 4111 is fixed to the support rod 42 by a fixing screw 4115 passing through the screw hole 4113, the fixing sleeve 4112 is fixed in the seat body 4111 and passes through the screw hole 4113, one end of the elastic member 413 abuts against the clamping head 412, and the other end of the elastic member 413 abuts against the fixing sleeve 4112.

[0082] This design makes the overall structure of the clamping structure 41 more compact. At the same time, the fixing sleeve 4112 can limit the fixing screw 4115, so that the fixing screw 4115 is not easy to loosen, thereby ensuring the stability of the clamping structure 41 fixed on the support rod 42.

[0083] The fixing sleeve 4112 may be fixed to the seat body 4111 by fastener connection, threaded connection, clamping, welding, interference connection, or the like.

[0084] Please refer to Figure 3In some embodiments, when the clamping structure 41 includes a movable rod 414 , the clamping head 412 is spherically hinged on the movable rod 414 .

[0085] Optionally, the clamping head 412 includes a clamping body 4122, a ball head seat 4123 and a snap ring 4121. A mounting groove is provided on one side of the clamping body 4122. The ball head seat 4123 is installed in the mounting groove and fixed by the snap ring 4121. A ball head 4141 is provided at one end of the movable rod 414. The ball head 4141 cooperates with the ball head seat 4123 to realize the ball hinge of the clamping head 412 on the movable rod 414. One end of the elastic member 413 presses on the ball head seat 4123.

[0086] Of course, the ball head seat 4123 may also be disposed on the movable rod 414 , and the clamping head 412 includes a ball head 4141 disposed on the clamping body 4122 .

[0087] By adopting the above technical solution, the clamping structure 41 can swing arbitrarily relative to the movable rod 414 , which is further conducive to the inclined clamping surface 41241 of the clamping structure 41 to clamp the edge of the sample 200 .

[0088] Please refer to Figure 3 In some embodiments, the clamping head 412 includes a clamping body 4122 and a flexible pad 4124 disposed on the clamping body 4122 , and the inclined clamping surface 41241 is disposed on the flexible pad 4124 .

[0089] It can be understood that the flexible pad 4124 can be directly disposed on the side of the clamping body 4122 facing the sample holder 30; or a groove is provided on the side of the clamping body 4122 facing the sample holder 30, and the flexible pad 4124 is disposed in the groove.

[0090] When the flexible pad 4124 is directly disposed on the side of the clamping body 4122, the flexible pad 4124 can be glued and fixed on the clamping body 4122; when the flexible pad 4124 is disposed in a groove on the side of the clamping body 4122, the flexible pad 4124 can be glued or interference installed in the groove.

[0091] Alternatively, the flexible pad 4124 may be rubber, such as perfluoroether rubber (FFKM).

[0092] Optionally, the clamping body 4122 is a cylindrical structure, and correspondingly, the flexible pad 4124 is a circular pad. Of course, the clamping body 4122 can also be other shapes, such as a prism structure, and correspondingly, the flexible pad 4124 can be a rectangular pad.

[0093] In this embodiment, a flexible pad 4124 is provided on the clamping body 4122 , and the edge of the sample 200 is clamped by the flexible pad 4124 to prevent the sample 200 from being damaged.

[0094] Please refer to Figure 2 and Figure 4 In some embodiments, the clamping jaw assembly 40 further includes a rolling sleeve 43 , which is sleeved on the support rod 42 , and the rolling sleeve 43 is in rolling cooperation with the hole wall of the long hole 21 .

[0095] Optionally, the size of the rolling sleeve 43 in the X direction is larger than the size of the long hole 21 in the X direction, so that when the rolling sleeve 43 moves along the X direction with the support rod 42, the rolling sleeve 43 can always contact the entire hole wall of the long hole 21. Of course, in other embodiments, the size of the rolling sleeve 43 in the X direction can also be equal to or smaller than the size of the long hole 21 in the X direction, but it is necessary to ensure that the rolling sleeve 43 always contacts part of the hole wall of the long hole 21 when the rolling sleeve 43 moves along the X direction with the support rod 42.

[0096] Optionally, a first bearing 45 is provided between the rolling sleeve 43 and the support rod 42, and one, two, three or more first bearings 45 may be provided along the axial direction of the support rod 42. In other embodiments, the first bearing 45 may not be provided, and the rolling sleeve 43 itself is a self-lubricating sleeve, or a self-lubricating sleeve is provided between the rolling sleeve 43 and the support rod 42, for example, the self-lubricating sleeve may be a nylon sleeve, a copper sleeve, etc.

[0097] By adopting the above technical solution, the friction force when the support rod 42 moves relative to the long hole 21 can be reduced, so as to facilitate the movement of the support rod 42 relative to the long hole 21.

[0098] Please also refer to Figure 4 and Figure 6 In some embodiments, the slide seat 44 includes a slider 442 and a connecting plate 441 fixed on the slider 442, the connecting plate 441 has a first side 4411 facing the turntable 20 and a second side 4412 facing the slider 442, the first side 4411 is parallel to the turntable 20, and the second side 4412 is parallel to the slide rail 11.

[0099] The slide seat 44 slides on the slide rail 11 via the slider 442 , and the slide seat 44 is connected to the support rod 42 via the connecting plate 441 .

[0100] It can be understood that the connecting plate 441 can be fixed to the slider 442 by fastener connection, clamping, welding, etc.

[0101] The inclined surface can be transformed into a horizontal surface through the connecting plate 441 , which is beneficial to the fixed connection between the supporting rod 42 and the sliding seat 44 .

[0102] In other embodiments, the connecting plate 441 and the sliding block 442 may also be formed integrally.

[0103] Please refer to Figure 1 and Figure 5 In some embodiments, three clamping jaw assemblies 40 are arranged at intervals along the circumference of the rotating disk 20. Correspondingly, three slide rails 11 are arranged on the base 10 along the circumference of the rotating disk 20, and three long holes 21 are arranged on the rotating disk 20 along its circumference. The three long holes 21 are respectively located above the three slide rails 11.

[0104] Optionally, the three slide rails 11 have the same structure, and the three long holes 21 have the same structure.

[0105] Optionally, three clamping jaw assemblies 40 are evenly spaced apart along the circumference of the rotating disk 20 .

[0106] In this embodiment, the sample 200 is clamped simultaneously by three clamping jaw assemblies 40 , so that three-point positioning can be achieved for automatic centering, thereby ensuring the accuracy of positioning of the sample 200 .

[0107] In other embodiments, four, five, six, etc., clamping jaw assemblies 40 may be arranged at intervals along the circumference of the turntable 20 .

[0108] Please also refer to Figure 5 and Figure 6 In some embodiments, the turntable 20 is a gear plate, and the positioning chuck 100 also includes a force control motor 60 and a driving gear 70. The force control motor 60 is fixed on the base 10, and the driving gear 70 is connected to the output shaft of the force control motor 60, and the driving gear 70 is meshed with the gear plate.

[0109] Optionally, the gear plate and the driving gear 70 are both cylindrical gears. It can be understood that the outer circumferences of the gear plate and the driving gear 70 are both straight teeth or helical teeth. At this time, the driving gear 70 is on the radial side of the gear plate, and the force control motor 60 is arranged vertically.

[0110] Optionally, the gear plate and the driving gear 70 are both bevel gears. It can be understood that the outer peripheral surfaces of the gear plate and the driving gear 70 are both straight teeth or helical teeth. At this time, the driving gear 70 is located on the lower side or upper side of the gear plate, and the force control motor 60 is arranged horizontally.

[0111] Optionally, the force control motor 60 is a servo motor having a force control function to avoid damaging the sample 200 .

[0112] In other embodiments, the positioning chuck 100 does not include the force control motor 60 and the driving gear 70. The positioning chuck 100 includes a telescopic cylinder, a slider and a connecting rod. The slider is connected to the driving end of the telescopic cylinder, one end of the connecting rod is connected to the turntable 20, and the other end is connected to the slider. The telescopic cylinder drives the slider to move in a straight line, and the slider drives the connecting rod to move to drive the turntable 20 to rotate.

[0113] In other embodiments, the positioning chuck 100 includes a force control motor 60 and a belt transmission mechanism, and the force control motor 60 drives the turntable 20 to rotate through the belt transmission mechanism. Of course, the belt transmission mechanism can also be replaced by a chain transmission mechanism.

[0114] like Figure 7 As shown, in some embodiments, the sample holder 30 is provided with supporting ribs 31 , and the sample holder 30 supports the sample 200 via the supporting ribs 31 .

[0115] It can be understood that the support ribs 31 can be annular ribs, arc ribs, straight ribs, etc. The number of the support ribs 31 can be set as needed.

[0116] Optionally, two first avoidance grooves 32 are further provided on the sample holder 30 , and the two first avoidance grooves 32 are used to avoid the insertion arm of the robot; after the insertion arm of the robot places the sample 200 on the sample holder 30 , the insertion arm of the robot moves downward and exits from the first avoidance groove 32 .

[0117] Of course, in other embodiments, the supporting ribs 31 may not be provided on the sample holder 30 , but the sample 200 may be directly placed on the upper surface of the sample holder 30 .

[0118] like Figure 8 As shown, the positioning chuck 100 further includes a cover plate 50, which is fixed on the base 10 for aesthetic purposes. The cover plate 50 is provided with a second avoidance groove 52 for avoiding the support rod 42, and the number of the second avoidance grooves 52 is consistent with the number of the clamping jaw assemblies 40.

[0119] Optionally, the cover plate 50 has a flange 51, and a fixing hole 511 is provided on the flange 51, and the cover plate 50 is fixed to the base 10 by screws. Of course, the cover plate 50 can also be fixed to the base 10 by snapping.

[0120] Please also refer to Figure 2 and Figure 6 In some embodiments, a fixing column 12 is disposed on the base 10, a fixing plate 13 is disposed on the top of the fixing column 12, and the sample holder 30 is fixed on the fixing plate 13. The sample holder 30 can be fixed on the fixing plate 13 by fastener connection, clamping, welding, etc.

[0121] Optionally, a second bearing 80 is sleeved on the fixed column 12, and the turntable 20 is rotatably mounted on the fixed column 12 through the second bearing 80. Among them, one, two, or three or more second bearings 80 can be arranged along the circumference of the fixed column 12.

[0122] In some embodiments, the base 10 has a groove, a wedge seat 14 is provided on the bottom wall of the groove, and the wedge seat 14 has an inclined mounting surface; the slide rail 11 is fixed on the inclined mounting surface of the wedge seat 14, wherein the number of the wedge seats 14 is consistent with the number of the slide rails 11.

[0123] like Fig. 9 As shown, the second aspect of the present application provides a semiconductor wafer analysis device 1. The semiconductor wafer analysis device 1 comprises a positioning chuck 100 as in the first aspect, and the positioning chuck 100 is used to position and clamp a sample 200.

[0124] Specifically, the semiconductor wafer analysis device 1 further includes a vacuum chamber 300 and a motion platform 400 disposed in the vacuum chamber 300. The positioning chuck 100 is in the vacuum chamber 300 and mounted on the motion platform 400. Optionally, the motion platform 400 is a four-axis motion platform.

[0125] The semiconductor wafer analysis device may be an X-ray fluorescence analysis device or a total reflection X-ray fluorescence analysis device.

[0126] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A positioning chuck, characterized in that: The invention comprises a base, a turntable, a sample holder and a plurality of clamping jaw assemblies, wherein the turntable is rotatably mounted on the base, the sample holder is located on a side of the turntable facing away from the base and is fixed on the base, and the sample holder is used to place a wafer; the plurality of clamping jaw assemblies are arranged at intervals along the circumference of the turntable, the clamping jaw assembly comprises a clamping structure, a support rod and a slide seat, the clamping structure is connected to the slide seat through the support rod, and the clamping structure has an inclined clamping surface facing the sample holder; the base is provided with a plurality of slide rails extending radially along the turntable, the slide rails have an outer end and an inner end, and the slide rails gradually move away from the outer end to the inner end The turntable and the slide seat are slidably mounted on the slide rail; the turntable is provided with a plurality of long holes extending along the circumference of the turntable, the long holes having a first end and a second end, the long holes gradually approaching the center of the turntable from the first end to the second end, and the support rod passes through the long holes; when the turntable rotates, under the guidance of the long holes on the support rod, the inclined clamping surface of the clamping structure gradually approaches the sample seat along the radial direction of the turntable to position the wafer, and under the guidance of the slide rail on the slide seat, the inclined clamping surface of the clamping structure gradually approaches the sample seat along the axial direction of the turntable to press the wafer.

2. The positioning chuck according to claim 1, characterized in that: The clamping structure includes a mounting seat, a clamping head and an elastic member, the mounting seat is connected to the support rod, the clamping head is movably mounted on the mounting seat, the inclined clamping surface is arranged on the clamping head, and the elastic member is located between the clamping head and the mounting seat.

3. The positioning chuck according to claim 2, characterized in that: The clamping structure further comprises a movable rod movably mounted on the mounting seat, the clamping head is hinged on the movable rod, and the clamping head is movably mounted on the mounting seat via the movable rod.

4. The positioning chuck according to claim 3, characterized in that: The clamping head ball is hinged on the movable rod.

5. The positioning chuck according to claim 2, characterized in that: The clamping head comprises a clamping body and a flexible pad arranged on the clamping body, and the inclined clamping surface is arranged on the flexible pad.

6. The positioning chuck according to any one of claims 1 to 5, characterized in that: The clamping jaw assembly also includes a rolling sleeve, which is sleeved on the support rod and is in rolling cooperation with the hole wall of the long hole.

7. The positioning chuck according to any one of claims 1 to 5, characterized in that: The slide seat includes a slider and a connecting plate fixed on the slider, the connecting plate has a first side facing the turntable and a second side facing the slider, the first side is parallel to the turntable, and the second side is parallel to the slide rail.

8. The positioning chuck according to any one of claims 1 to 5, characterized in that: Three clamping jaw assemblies are arranged at intervals along the circumference of the rotating disk.

9. The positioning chuck according to any one of claims 1 to 5, characterized in that: The rotating disk is a gear disk, and the positioning chuck further comprises a force control motor and a driving gear. The force control motor is fixed on a base, the driving gear is connected to an output shaft of the force control motor, and the driving gear is meshed with the gear disk.

10. A semiconductor wafer analysis device, characterized in that: It comprises a vacuum chamber, a motion platform and a positioning chuck as claimed in any one of claims 1 to 9, wherein the motion platform is in the vacuum chamber, and the positioning chuck is in the vacuum chamber and mounted on the motion platform.

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