A control method for a light reflection module

Abstract

The present invention relates to the field of optical technology, and in particular to a control method for a light reflection module, comprising: obtaining an initial light beam set list and target attribute data output by a target light source, querying from a preset second target data table to obtain a second target tilt angle set corresponding to the initial light reflection module to control the tilt angle of the initial light reflection module, characterizing the correspondence between the initial simulation light beam set list, the first attribute data corresponding to the second simulation light beam, and the preset tilt angle set through the second target data table, thereby querying from the preset second target data table according to the initial light beam set list and the target attribute data output by the target light source to obtain the second target tilt angle set corresponding to the initial light reflection module, thereby improving the acquisition efficiency and accuracy of the second target tilt angle set, and further improving the control efficiency and accuracy of the light reflection module.

Description

Technical Field

[0001] The present invention relates to the field of optical technology, and in particular to a control method for a light reflection module. Background Art

[0002] By exposing the substrate to a target beam with a periodic intensity distribution for etching, a grating that changes according to the intensity of the target beam can be obtained, which has a wide range of applications in laser diffraction, spectrometers, grating projection and other fields.

[0003] In order to obtain a target light beam with a periodic distribution of light intensity, several initial light beams output by the light source can be reflected and interfered based on the light reflection module, so as to output the target light beam and be used to prepare a grating. Since the property values ​​of different initial light beams are quite different and the demand categories of gratings are diverse, it is difficult to efficiently prepare a grating that meets the demand when the tilt angle of the light reflection module is kept at a fixed value. However, by controlling the tilt angle of the light reflection module, the effect of the initial light beams interfering in the light reflection module can be controlled, and target light beams with different property values ​​can be output, thereby preparing gratings that meet various demands.

[0004] Therefore, how to improve the control efficiency and control accuracy of the light reflection module becomes an issue to be solved urgently. Summary of the invention

[0005] In view of the above technical problems, the technical solution adopted by the present invention is a control method of a light reflection module, and the control method of the light reflection module includes:

[0006] S100, obtaining the initial light beam set list G0={G 01 , G 02 , ..., G 0β , ..., G 0γ}, where G 0β It refers to the βth initial light beam set output by the target light source, β=1, 2, ..., γ, and γ refers to the total number of initial light beam sets output by the target light source.

[0007] S200, obtain target attribute data X 2 1, where X 2 1 refers to the first attribute data of the preset target beam.

[0008] S300, according to G0 and X 2 1. From the preset second target data table H 2 The second target tilt angle set corresponding to the initial light reflection module is obtained by querying.

[0009] S400: controlling the tilt angle of the initial light reflection module according to a second target tilt angle set.

[0010] Compared with the prior art, the present invention has obvious beneficial effects. By means of the above technical solution, the control method of the light reflection module provided by the present invention can achieve considerable technical progress and practicality, and has wide industrial utilization value. It has at least the following beneficial effects: 2 Characterize the correspondence between the initial simulation beam set list, the first attribute data corresponding to the second simulation beam, and the preset tilt angle, so as to obtain the initial beam set list G0 output by the target light source and the target attribute data X 2 1. From the preset second target data table H 2 The second target tilt angle set corresponding to the initial light reflection module is obtained by querying to control the tilt angle of the initial light reflection module, thereby improving the acquisition efficiency and accuracy of the second target tilt angle set and further improving the control efficiency and accuracy of the light reflection module. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0012] Figure 1 A flow chart of a method for controlling a light reflection module provided by an embodiment of the present invention;

[0013] Figure 2 A flowchart of executing a computer program of a control system of a light reflection module provided by an embodiment of the present invention;

[0014] Figure 3 A flow chart of a target grating generation method provided by an embodiment of the present invention;

[0015] Figure 4 A flowchart of executing a computer program of a target grating generation system provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0017] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or server that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0018] Embodiment 1

[0019] This embodiment 1 provides a control method for a light reflection module, such as Figure 1 As shown, the control method of the light reflection module includes:

[0020] S100, obtaining the initial light beam set list G0={G 01 , G 02 , ..., G 0β , ..., G 0γ}, where G 0β It refers to the βth initial light beam set output by the target light source, β=1, 2, ..., γ, and γ refers to the total number of initial light beam sets output by the target light source.

[0021] The target light source can output several initial light beams at the same time, and the initial light beams can interfere with each other to obtain an interfered light beam. Therefore, firstly, an initial light beam set list G0 output by the target light source is obtained, and the initial light beam set list includes γ initial light beam sets, and each initial light beam set includes several initial light beams.

[0022] In a specific embodiment, the initial light beams in the same initial light beam set are coherent light, and the initial light beams in different initial light beam sets are incoherent light, which serves as a basis for interference to obtain corresponding target light beams.

[0023] The γ initial light beam sets output by the target light source are reflected back and forth between multiple mirrors of the initial light reflection module. When different initial light beams in the same initial light beam set are reflected at the same position on the same mirror, interference will occur, thereby obtaining the interfered light beam corresponding to each initial light beam set and forming a spatial strength distribution. When irradiated onto the substrate, the spatial structure in the grating can be formed through processes such as etching.

[0024] Since the effect of the initial light beam when interference occurs depends on the optical path difference of the initial light beam when interference occurs, the interference effect of the initial light beam in the initial light reflection module can be changed by controlling the inclination angle of each mirror in the initial light reflection module, thereby outputting target light beams with different attribute values ​​and achieving different application effects.

[0025] S200, obtain target attribute data X 2 1, where X 2 1 refers to the first attribute data of the preset target beam.

[0026] Among them, the target attribute data X 2 1 refers to the first attribute data of the target interference area and the target light beam transmitted from the target interference area, which are obtained by controlling the tilt angle set corresponding to the initial light reflection module. Further, a target grating that meets the preset application requirements can be generated according to the target light beam.

[0027] In a specific implementation, the first attribute data refers to frequency attribute data.

[0028] Correspondingly, it is hoped that the frequency of the generated target light beam meets the preset frequency requirement. Further, a target grating that meets the preset application requirement can be generated based on the target light beam.

[0029] S300, according to G0 and X 2 1. From the preset second target data table H 2 The second target tilt angle set corresponding to the initial light reflection module is obtained by querying.

[0030] Among them, the preset second target data table H 2 The method comprises a plurality of second target data groups, each of which comprises an initial simulation beam set list, a first attribute data corresponding to a second simulation beam, and a preset tilt angle set. The second simulation beam refers to the simulation beam output by the initial simulation beam set list output by the target simulation light source after being acted upon by the simulation light reflection module.

[0031] Therefore, when the initial beam set list G0 output by the target light source is consistent with the initial simulation beam set list in a second target data group, and the target attribute data X 2 1 is consistent with the first attribute data corresponding to the second simulation beam in the corresponding second target data group, it can be obtained from H 2 G0 and X are found in 21, and as the second target tilt angle set corresponding to the initial light reflection module, to control the tilt degree of the initial light reflection module. Further, the initial light reflection module corresponding to G0 and the second target tilt angle set can obtain the target attribute data X that meets the target attribute data. 2 1 target beam.

[0032] As mentioned above, through the second target data table H 2 Characterize the correspondence between the initial simulation beam set list, the first attribute data corresponding to the second simulation beam, and the preset tilt angle set, so as to output the initial beam set list G0 and the target attribute data X according to the target light source 2 1. From the preset second target data table H 2 The second target tilt angle set corresponding to the initial light reflection module is obtained by querying, thereby improving the acquisition efficiency and accuracy of the second target tilt angle set.

[0033] In a specific embodiment, the initial light reflecting module includes a first initial light reflecting element, a second initial light reflecting element, ..., a Gth initial light reflecting element, wherein G refers to the total number of initial light reflecting elements in the initial light reflecting module.

[0034] Among them, the first initial light reflecting element and the G-th initial light reflecting element can refer to spectroscopes, and the second initial light reflecting element to the G-1-th initial light reflecting element can refer to reflectors. Correspondingly, the light beam can be reflected and transmitted on the first initial light reflecting element and the G-th initial light reflecting element, and reflected on the second initial light reflecting element to the G-1-th initial light reflecting element.

[0035] The relative positions of the first initial light reflecting element, the second initial light reflecting element, ..., the G-th initial light reflecting element can be set by the implementer according to actual conditions, so that the initial light beam in the initial light beam set list can be transmitted on the first initial light reflecting element, and the transmitted light beam can be continuously reflected from the first initial light reflecting element to the G-th initial light reflecting element, and finally interfere on the G-th initial light reflecting element to obtain a corresponding interference area, and make the interfered light beam transmit at the interference area of ​​the G-th initial light reflecting element to obtain a final transmitted light beam, and the transmitted light beam that meets the preset property requirements is used as the preset target light beam.

[0036] In a specific embodiment, the simulated light reflection module includes a first simulated light reflection element, a second simulated light reflection element, ..., a Gth simulated light reflection element, H 2 Obtain it by following the steps below:

[0037] S01, obtain the initial simulation beam set list G corresponding to the target simulation light source in the preset simulator 0 = {G 0 1, G 0 2, ..., G 0 t , ..., G 0 e}, where G 0 t It refers to the tth initial simulation beam set output by the target simulation light source, G 0 t Including α t The initial simulation beam, G 0 t α in t The initial simulation beam is coherent light, 0≤α t ≤u, u refers to the total number of initial simulation light beams output by the target simulation light source, t=1, 2, ..., e, e refers to the total number of initial simulation light beam sets.

[0038] S02, obtaining a preset tilt angle list θ={θ1, θ2, . . . , θ r , ..., θ s}, wherein the rth preset tilt angle set θ of the simulated light reflection module r ={θ r1 ,θ r2 , ..., θ rЖ , ..., θ rГ}, θ rЖ It refers to the rth preset inclination angle corresponding to the Жth simulated light reflecting element in the simulated light reflecting module, where r=1, 2, ..., s, and s refers to the total number of preset inclination angles of the simulated light reflecting module.

[0039] S03, according to θ r Set up the simulation light reflection module and obtain θ r Corresponding candidate light reflection modules.

[0040] S04, according to G 0 and θ, obtain the sixth attribute data list D corresponding to the second simulation beam 0 ={D 0 1, D 0 2, ..., D 0 t , ..., D 0 e}, where D 0 t ={D 0 t1 , D 0t2 , ..., D 0 tr , ..., D 0 ts}, D 0 tr ={D 0 tr1 , D 0 tr2 , ..., D 0 tri , ..., D 0 trm}, D 0 tri G 0 t and θ r The corresponding attribute data corresponding to the i-th type of preset beam attribute of the second simulation beam.

[0041] S05, for D 0 Normalize and obtain the seventh attribute data list D corresponding to the second simulation beam 1 ={D 1 1, D 1 2, ..., D 1 t , ..., D 1 e}, where D 1 t ={D 1 t1 , D 1 t2 , ..., D 1 tr , ..., D 1 ts}, D 1 tr ={D 1 tr1 , D 1 tr2 , ..., D 1 tri , ..., D 1 trm}, D 1 tri Refers to D 0 tri Normalized attribute data.

[0042] S06, according to D 1 All the first attribute data in D 1 Regroup all attribute data in to obtain the first attribute data set list W 1 = {W 11.W 1 2, ..., W 1 p , ..., W 1 q}, where the pth first attribute data set W 1 p = {W 1 p1 , W 1 p2 , ..., W 1 pδ , ..., W 1 pε(p)},W 1 pδ = {W 1 pδ1 , W 1 pδ2 , ..., W 1 pδi , ..., W 1 pδm},W 1 pδ1 ∈D 1 , W 1 p The following conditions must be met:

[0043] W 1 p11 =W 1 p21 =……=W 1 pδ1 =……=W 1 pε(p)1 .

[0044] W 1 The following conditions must be met:

[0045] W 1 111 ≠W 1 211 ≠……≠W 1 p11 ≠……≠W 1 q11 .

[0046] S07, according to W 1 and the third attribute data list E of the preset real light beam = {E1, E2, ..., E x ,……,E y}, get the second attribute similarity list F 2 ={F 2 1, F 2 2, ..., F 2 p, ..., F 2 q}, where the third attribute data set E of the x-th preset real beam x ={E x1 , E x2 ,……,E xi ,……,E xm},W 1 p The corresponding second attribute similarity set F 2 p ={F 2 p1 , F 2 p2 , ..., F 2 pδ , ..., F 2 pε(p)}, F 2 pδ ={F 2 pδ1 , F 2 pδ2 , ..., F 2 pδx , ..., F 2 pδy}, F 2 pδx It means W 1 pδ The property similarity between the corresponding initial simulation beam set and the second simulation beam corresponding to the preset tilt angle and the xth preset real beam, x=1, 2, ..., y, y refers to the total number of preset real beams.

[0047] S08, according to E, obtain the second target tilt angle list θ 2 ={θ 2 1, θ 2 2, ..., θ 2 p , ..., θ 2 q} and the target beam set list Q 2 = {Q 2 1. Q 2 2, ..., Q 2 p , ..., Q 2 q}, where W 1 pδ1 The corresponding second target tilt angle θ 2 p is max(F 2 pδ ) corresponds to the preset tilt angle, W 1pδ1 The corresponding target beam set Q 2 p is max(F 2 pδ ) corresponds to the initial simulation beam set, and max() refers to the maximum value function.

[0048] S09, according to W 1 ,θ 2 and Q 2 , get the second target data table H 2 ={H 2 1, H 2 2, ..., H 2 p , ..., H 2 q}, where H 2 j = {W 1 pδ1 , Q 2 p ,θ 2 p}.

[0049] The target simulated light source is a light source simulated in a preset simulator according to parameter data of the target light source, and can output an initial simulated light beam. The simulated light reflection module is a light reflection module simulated in a preset simulator according to parameter data of the initial light reflection module, and can obtain a target interference area on the simulated light reflection module based on the initial simulated light beam set, and output a corresponding second simulated light beam from the target interference area.

[0050] The parameter data may refer to the data of parameters such as size, shape, and performance.

[0051] According to the limitations of the structure, performance, control accuracy and other factors of the simulated light reflection module, a preset tilt angle list θ corresponding to the simulated light reflection module is obtained, and the simulated light reflection module is set through each preset tilt angle set to obtain the corresponding candidate light reflection module, wherein the preset tilt angle in each specific preset tilt angle set can be obtained by the implementer according to actual conditions.

[0052] The scales of the attribute values ​​corresponding to different preset beam attributes may be different. For the sixth attribute data list D of the second simulated beam, 0 Normalize to get the corresponding seventh attribute data list D 1 , each attribute value is normalized to a uniform scale, for example, each attribute value is normalized within the range of [0, 1], thereby improving the control accuracy of the light reflection module.

[0053] The preset real light beam may refer to a light beam commonly used in preparing a grating. Therefore, it is necessary to make the similarity between the output second simulated light beam and the preset real light beam as close as possible to improve the accuracy of the second target data table, thereby improving the control accuracy of the light reflection module and improving the accuracy of the grating when generating the grating.

[0054] In D 1 Middle, D 1 tri Refers to D 0 tri Normalized attribute data, namely D 0 tri G 0 t and θ r The normalized i-th attribute data of the corresponding second simulation beam, therefore, D 1 tr G 0 t and θ r The normalized seventh attribute data set of the corresponding second simulation light beam, different seventh attribute data sets may have the same first attribute data. In this embodiment, the seventh attribute data sets with the same first attribute data are classified into the same first attribute data set.

[0055] Further, for any first attribute data set corresponding to the first attribute data, the second simulated beam closest to the preset real beam is screened out from all the second simulated beams corresponding to the first attribute data set, and the preset tilt angle set corresponding to the closest second simulated beam is determined as the second target tilt angle set corresponding to the first attribute data, and the initial simulated beam set list corresponding to the closest second simulated beam is determined as the target beam set list corresponding to the first attribute data. By traversing all the first attribute data sets, the second target data table H is obtained. 2 .

[0056] The second target data table H obtained above 2 The corresponding relationship between the initial simulation beam set list, the first attribute data corresponding to the second simulation beam and the preset tilt angle set is represented, and the initial beam set list G0 and the target attribute data X are output according to the target light source. 2 1. From the preset second target data table H 2 The query in the above method obtains the second target tilt angle set corresponding to the initial light reflection module, which provides a data basis, thereby improving the acquisition efficiency and accuracy of the second target tilt angle set.

[0057] In one embodiment, D 1 triMeet the following conditions:

[0058] D 1 tri =1 / (1+e^(S i *D 0 tri )), where S i It refers to the preset normalization coefficient corresponding to the i-th type of preset beam attribute.

[0059] Among them, the scales of attribute values ​​corresponding to different types of preset beam attributes may be different, so the preset normalization coefficient corresponding to each type of preset beam attribute is obtained to complete the normalization of the corresponding attribute data, thereby improving the accuracy of the normalization result.

[0060] The specific value of the normalization coefficient can be set by the implementer according to actual conditions.

[0061] In one embodiment, F 2 pδx Meet the following conditions:

[0062] F 2 pδx =Σ i＝1 m (J i *|K 2 pδi -E xi |), where J i It refers to the preset similarity priority corresponding to the i-th type of preset beam attribute, K 2 pδi It means W 1 pδ The corresponding initial simulation beam set list and the attribute data corresponding to the i-th type of preset beam attribute of the second simulation beam corresponding to the preset tilt angle set, K 2 pδi ∈D 1 .

[0063] The preset similarity priority is used to characterize the importance of the corresponding preset light beam attribute when calculating the attribute similarity. The specific value of the similarity priority can be set by the implementer according to the actual situation.

[0064] In the above, the property similarity between the second simulation light beam and the preset real light beam is calculated based on the preset similarity priority, which improves the accuracy of the property similarity, thereby improving the accuracy of the second target tilt angle set and the control accuracy of the light reflection module.

[0065] In one embodiment, when G0=Q 2 p And X 21=W 1 pδ1 When θ 2 p A second target tilt angle set corresponding to the initial light reflection module is determined.

[0066] S400: controlling the tilt angle of the initial light reflection module according to a second target tilt angle set.

[0067] In a specific embodiment, the second target tilt angle set includes a first second target tilt angle corresponding to a first initial light reflecting element, a second second target tilt angle corresponding to a second initial light reflecting element, ..., a Gth second target tilt angle corresponding to a Gth initial light reflecting element, and S400 includes the following steps:

[0068] According to the Жth second target tilt angle, the tilt angle of the Жth initial light reflecting element is controlled to be equal to the Жth second target tilt angle, wherein Ж=1, 2, ..., Г.

[0069] The rightward direction of the horizontal plane is taken as the positive direction. Correspondingly, the inclination angle corresponding to each initial light reflecting element may refer to the angle between the mirror surface of the initial light reflecting element and the positive direction.

[0070] As mentioned above, through the second target data table H 2 Characterize the correspondence between the initial simulation beam set list, the first attribute data corresponding to the second simulation beam, and the preset tilt angle set, so as to output the initial beam set list G0 and the target attribute data X according to the target light source 2 1. From the preset second target data table H 2 The second target tilt angle set corresponding to the initial light reflection module is obtained by querying to control the tilt angle of the initial light reflection module, thereby improving the acquisition efficiency and accuracy of the second target tilt angle set and further improving the control efficiency and accuracy of the light reflection module.

[0071] Embodiment 2

[0072] Based on the above-mentioned embodiment 1, this embodiment 2 provides a control system of a light reflection module, the control system of the light reflection module includes a target light source, an initial light reflection module, a processor and a memory storing a computer program. When the computer program is executed by the processor, the following steps are implemented, such as: Figure 2 As shown:

[0073] S10, obtaining a fourth attribute data set X corresponding to the initial light beam set output by the target light source 1 Б ={X 1 Б0 , X 1Б 0 , X 1 Б1 , X 1 Б2 , ..., X 1 Бi , ..., X 1 Бm}, X 1 Б0 It refers to the incident angle corresponding to the Bth initial beam in the initial beam set, X 1 Б 0 refers to the incident position corresponding to the Bth initial beam in the initial beam set, X 1 Бi It refers to the attribute data corresponding to the i-th type of preset beam attribute of the B-th initial beam in the initial beam set, B=1, 2, ..., Ё, Ё refers to the total number of initial beams in the initial beam set, i=1, 2, ..., m, m refers to the total number of categories of preset beam attributes.

[0074] S20, obtaining the first target data set X 2 ={X 2 1, X 2 2, ..., X 2 i , ..., X 2 m}, where X 2 i It refers to the attribute data corresponding to the i-th type of preset beam attribute of the preset target beam.

[0075] Among them, the first target data set X 2 The attribute data in the method refers to the attribute data of the target interference area and the target light beam transmitted from the target interference area that are desired to be obtained by controlling the tilt angle set corresponding to the initial light reflection module. Furthermore, a target grating that meets the preset application requirements can be generated based on the target light beam.

[0076] S30, according to X 1 and X 2 , from the preset first target data table H 1 The first target tilt angle set corresponding to the initial light reflection module is obtained by querying.

[0077] Among them, the preset first target data table H 1 The method comprises a plurality of first target data sets, each of which comprises a first attribute data set of an initial simulation light beam, a second attribute data set corresponding to the first simulation light beam set, and a preset tilt angle set.

[0078] Therefore, when the fourth attribute data set X corresponding to the initial light beam set output by the target light source 1 is consistent with the first property data set of the initial simulation beam set in a first target data set, and the first target data set X 2 When the second attribute data set corresponding to the first simulation beam in the corresponding first target data set is consistent, the 1 X is found in 1 and X 2 The preset tilt angle set corresponding to the initial light reflection module is used as the first target tilt angle set corresponding to the initial light reflection module to control the tilt degree of the initial light reflection module. Further, the preset tilt angle set corresponding to the initial light reflection module can be used as the first target tilt angle set corresponding to the initial light reflection module to control the tilt degree of the initial light reflection module. 1 The initial light reflection module corresponding to the first target tilt angle obtains the first target data set X 2 target beam.

[0079] As mentioned above, through the first target data table H 1 The first attribute data set representing the initial simulation beam set, the second attribute data set corresponding to the first simulation beam, and the corresponding relationship between the preset tilt angle set, so as to obtain the fourth attribute data set X corresponding to the initial beam set output by the target light source. 1 and the first target dataset X 2 , from the preset first target data table H 1 The first target tilt angle set corresponding to the initial light reflection module is obtained by querying, thereby improving the acquisition efficiency and accuracy of the first target tilt angle set.

[0080] In a specific embodiment, the control system of the light reflection module further includes a target simulation light source and a simulation light reflection module, the simulation light reflection module includes a first simulation light reflection element, a second simulation light reflection element, ..., a Gth simulation light reflection element, H 1 Obtain it by following the steps below:

[0081] S31, obtaining the first attribute data list A of the initial simulation beam set = {A1, A2, ..., A j , ..., A n}, the second attribute data list A of the first simulation beam 0 ={A 0 1. A 0 2, ..., A 0 j , ..., A 0 n} and the third attribute data list E of the preset real light beam = {E1, E2, ..., E x ,……,E y}, where the first attribute data set A corresponding to the jth initial simulation beam set j ={Aj1 , A j2 , ..., A jБ , ..., A jЁ}, the first attribute data set A corresponding to the Bth initial simulation beam in the jth initial simulation beam set jБ ={A jБ0 , A jБ 0 , A jБ1 , A jБ2 , ..., A jБi , ..., A jБm}, A jБ0 It refers to the simulated incident angle corresponding to the Bth initial simulation beam in the jth initial simulation beam set, A jБ 0 A refers to the simulated incident position corresponding to the Bth initial simulation beam in the jth initial simulation beam set. jБi It refers to the attribute data corresponding to the i-th type of preset beam attribute corresponding to the B-th initial simulation beam in the j-th initial simulation beam set, A 0 j ={A 0 j1 , A 0 j2 , ..., A 0 jr , ..., A 0 js}, A j and the rth preset tilt angle set θ of the simulated light reflection module r The second attribute data set A of the corresponding first simulated beam 0 jr ={A 0 jr1 , A 0 jr2 , ..., A 0 jri , ..., A 0 jrm}, A 0 jri A j and θ r The attribute data corresponding to the i-th type of preset beam attribute of the corresponding first simulation beam, θ r ={θ r1 ,θ r2 , ..., θ rЖ , ..., θ rГ}, θ rЖ It refers to the rth preset tilt angle corresponding to the Жth simulated light reflecting element in the simulated light reflecting module, E x ={E x1 , Ex2 ,……,E xi ,……,E xm}, E xi It refers to the attribute data corresponding to the i-th type of preset beam attribute of the x-th preset real beam, r=1, 2,..., s, s refers to the total number of preset inclination angles of the simulated light reflection module, j=1, 2,..., n, n refers to the total number of initial simulated beams, x=1, 2,..., y, y refers to the total number of preset real beams.

[0082] S32, for A 0 Normalize and obtain the fourth attribute data list A corresponding to the first simulation beam 1 ={A 1 1. A 1 2, ..., A 1 j , ..., A 1 n}.

[0083] S33, according to A 1 and E, obtain the first attribute similarity list F corresponding to the first simulation beam 1 ={F 1 1, F 1 2,……,

[0084] F 1 j , ..., F 1 n}, where F 1 j ={F 1 j1 , F 1 j2 , ..., F 1 jr , ..., F 1 js}, F 1 jr ={F 1 jr1 , F 1 jr2 , ..., F 1 jrx ,……,

[0085] F 1 jry}, F 1 jrx A j and θ r The property similarity between the corresponding first simulated light beam and the x-th preset real light beam.

[0086] S34, according to F 1 , get the first target tilt angle list θ 0 ={θ 0 1, θ 0 2, ..., θ 0 j , ..., θ 0 n} and target data list Q 1 = {Q 1 1. Q 1 2, ..., Q 1 j , ..., Q 1 n}, where A j The corresponding first target tilt angle set θ 0 j is max(F 1 jr ) corresponds to a set of preset tilt angles, A j The corresponding target dataset Q 1 j is max(F 1 jr ) corresponds to the second attribute data set corresponding to the first simulation light beam, and max() refers to the maximum value function.

[0087] S35, according to A, θ 0 and Q 1 , get the first target data table H 1 ={H 1 1, H 1 2, ..., H 1 j , ..., H 1 n}, where H 1 j ={A j , Q 1 j ,θ 0 j}.

[0088] Among them, the scales of the attribute values ​​corresponding to different preset beam attributes may be different. For the second attribute data list A of the first simulated beam 0 Normalization is performed to normalize each attribute value to a uniform scale, for example, each attribute value is normalized within the range of [0, 1], thereby improving the control accuracy of the light reflection module.

[0089] The preset real light beam may refer to a light beam commonly used in preparing a grating. Therefore, it is necessary to make the similarity between the output first simulated light beam and the preset real light beam as close as possible to improve the accuracy of the first target data table, thereby improving the control accuracy of the light reflection module and improving the accuracy of the grating when generating the grating.

[0090] In one embodiment, A 0 Obtain it by following the steps below:

[0091] S311, obtain the first attribute data list A = {A1, A2, ..., A j , ..., A n} and a list of preset tilt angles

[0092] θ={θ1,θ2,……,θ r , ..., θ s}.

[0093] S312, according to θ r Set up the simulation light reflection module and obtain θ r The corresponding candidate light reflection module, wherein the candidate light reflection module includes a first candidate light reflection element, a second candidate light reflection element, ..., a Жth candidate light reflection element, ..., a Гth candidate light reflection element, and the Жth candidate light reflection element is selected according to θ rЖ Obtained by setting the Жth simulation light reflecting element.

[0094] S313, according to the jth initial simulation beam and θ r The corresponding candidate light reflection module is obtained j and θ r The second attribute data set A of the corresponding first simulated beam 0 jr ={A 0 jr1 , A 0 jr2 , ..., A 0 jri , ..., A 0 jrm}.

[0095] S314, traverse A and θ to obtain the second attribute data list A corresponding to A and θ 0 ={A 0 1. A 0 2, ..., A 0 j ,……,

[0096] A 0 n}, where A 0j ={A 0 j1 , A 0 j2 , ..., A 0 jr , ..., A 0 js}, A 0 jr ={A 0 jr1 , A 0 jr2 , ..., A 0 jri , ..., A 0 jrm}.

[0097] According to the simulated incident angle and simulated incident position corresponding to each initial simulation beam in the jth initial simulation beam set, each initial simulation beam is incident to θ r The corresponding candidate light reflection module is obtained r The first simulated interference region on the Gth candidate light reflecting element of the corresponding candidate light reflecting module, and the first simulated light beam transmitted from the first simulated interference region, thereby obtaining A j and θ r The second attribute data set A of the corresponding first simulated beam 0 jr .

[0098] In a specific implementation, the memory also stores a preset normalization coefficient list S={S1, S2, . . . , S i , ..., S m}, where S i It refers to the preset normalization coefficient corresponding to the i-th type of preset beam attribute, A 1 j ={A 1 j1 , A 1 j2 , ..., A 1 jr , ..., A 1 js}, A 1 jr ={A 1 jr1 , A 1 jr2 , ..., A 1 jri , ..., A 1 jrm}, A 1 jriMeet the following conditions:

[0099] A 1 jri =1 / (1+e^(S i *A 0 jri )).

[0100] Among them, the scales of attribute values ​​corresponding to different preset beam attributes may be different, so a preset normalization coefficient corresponding to each preset beam attribute is obtained to complete the normalization of the corresponding preset beam attribute data, thereby improving the accuracy of the normalization result.

[0101] The specific value of the normalization coefficient can be set by the implementer according to actual conditions.

[0102] In a specific implementation manner, the memory further stores a preset similarity priority list J={J1, J2, . . . , J i , ..., J m}, where J i It refers to the preset similarity priority corresponding to the i-th type of preset beam attribute, F 1 jrx Meet the following conditions:

[0103] F 1 jrx =Σ i＝1 m (J i *|A 1 jri -E xi |).

[0104] The preset similarity priority is used to characterize the importance of the corresponding preset light beam attribute when calculating the attribute similarity. The specific value of the similarity priority can be set by the implementer according to the actual situation.

[0105] In the above, the attribute similarity is calculated by combining the fourth attribute data set corresponding to the first simulation beam set, the third attribute data set of the preset real beam and the preset similarity priority, which improves the accuracy of the attribute similarity, thereby improving the accuracy of the first target inclination angle set and the control accuracy of the light reflection module.

[0106] S40: controlling the tilt angle of the initial light reflection module according to the first target tilt angle set.

[0107] In one embodiment, when X 1 =A j And X 2 =Q 1 j When θ 0j A first target tilt angle corresponding to the initial light reflection module is determined.

[0108] In a specific embodiment, the first target tilt angle set includes a first first target tilt angle corresponding to a first initial light reflecting element, a second first target tilt angle corresponding to a second initial light reflecting element, ..., a Gth first target tilt angle corresponding to a Gth initial light reflecting element, and S40 further includes the following steps:

[0109] According to the Жth first target tilt angle, the tilt angle of the Жth initial light reflecting element is controlled to be equal to the Жth first target tilt angle, wherein Ж=1, 2, ..., Г.

[0110] The rightward direction of the horizontal plane is taken as the positive direction. Correspondingly, the inclination angle corresponding to each initial light reflecting element may refer to the angle between the mirror surface of the initial light reflecting element and the positive direction.

[0111] As mentioned above, through the first target data table H 1 The first attribute data set representing the initial simulation beam set, the second attribute data set corresponding to the first simulation beam, and the corresponding relationship between the preset tilt angle set, so as to obtain the fourth attribute data set X corresponding to the initial beam set output by the target light source. 1 and the first target dataset X 2 , from the preset first target data table H 1 The first target tilt angle set corresponding to the initial light reflection module is obtained by querying to control the tilt angle of the initial light reflection module, thereby improving the acquisition efficiency and accuracy of the first target tilt angle set and further improving the control efficiency and accuracy of the light reflection module.

[0112] Embodiment 3

[0113] Based on the above-mentioned embodiments 1 and 2, this embodiment 3 provides a method for generating a target grating, such as Figure 3 As shown, the target raster generation method includes:

[0114] S001, determining the total number of initial light beam sets output by a target light source.

[0115] Among them, the target light source can output several initial light beams at the same time, and the initial light beams can interfere with each other to obtain the interfered light beam and form a spatial intensity distribution. When irradiated onto the substrate, the spatial structure in the grating can be formed through etching and other processes. Therefore, the initial light beams that are mutually coherent light are grouped into an initial light beam set as the basis for interference to obtain the second interference area and the target light beam corresponding to the second interference area.

[0116] Therefore, this embodiment first determines the total number of initial light beam sets corresponding to the initial light beams output by the target light source, which serves as a data basis for selecting a determination method for the second interference region.

[0117] In a specific implementation, S001 further includes the following steps:

[0118] S011, obtaining D initial light beams output by the target light source, as well as the frequency and vibration direction of each initial light beam and the phase difference between any two initial light beams, where D is a positive integer.

[0119] S012, grouping D initial light beams according to the frequency, vibration direction and phase difference between any two initial light beams of each initial light beam, and obtaining I initial light beam sets corresponding to the target light source, wherein 0<I≤D, and the initial light beams in the same initial light beam set are coherent lights.

[0120] Among them, based on the frequency, vibration direction of each initial light beam and the phase difference between any two initial light beams, it is judged whether any two initial light beams are coherent light, and accordingly the D initial light beams are grouped to obtain I initial light beam sets corresponding to the target light source.

[0121] The initial light beams in the same initial light beam set are coherent light, and the initial light beams in different initial light beam sets are incoherent light.

[0122] In a specific implementation, S012 further includes the following steps:

[0123] S0121, for any two initial light beams, if the frequencies of the any two initial light beams are the same, the vibration directions are consistent, and the phase difference is constant, then the any two initial light beams are determined to be corresponding coherent light, and the any two initial light beams are grouped into the same initial light beam set.

[0124] S0122: If the frequencies of any two initial light beams are different, the vibration directions are inconsistent, or the phase difference is not constant, it is determined that the any two initial light beams are not corresponding coherent lights, and the any two initial light beams are grouped into different initial light beam sets.

[0125] S0123, traverse all initial light beams to obtain I initial light beam sets corresponding to the target light source.

[0126] As described above, determining the total number of the initial light beam sets output by the target light source provides a data basis for selecting a determination method for the second interference region.

[0127] S002: when the total number of the initial light beam set is equal to 1, a second interference region is determined using a first method.

[0128] Among them, when the total number of initial light beam sets is equal to 1, several initial light beams output by the target light source are reflected back and forth between multiple mirrors of the initial light reflection module. When different initial light beams are reflected at the same position of the same mirror, interference will occur, thereby obtaining corresponding interfered light beams.

[0129] Since the effect of the initial light beam when interference occurs depends on the optical path difference of the initial light beam when interference occurs, the interference effect of the initial light beam in the initial light reflection module can be changed by controlling the inclination angle of each mirror in the initial light reflection module, thereby obtaining different second interference areas and corresponding target light beams with different output attribute values ​​to achieve different application effects.

[0130] As described above, when the total number of the initial light beam set is equal to 1, the first method is adaptively adopted to determine the second interference region, thereby improving the accuracy of obtaining the second interference region and further improving the accuracy of generating the target grating.

[0131] In a specific embodiment, the initial light reflecting module includes a first initial light reflecting element, a second initial light reflecting element, ..., a Gth initial light reflecting element, wherein G refers to the total number of initial light reflecting elements in the initial light reflecting module, and S002 further includes the following steps:

[0132] S10, obtaining a fourth attribute data set X corresponding to the initial light beam set output by the target light source 1 ={X 1 1, X 1 2, ..., X 1 Б , ..., X 1 Ё}, where X 1 Б ={X 1 Б0 , X 1 Б 0 , X 1 Б1 , X 1 Б2 , ..., X 1 Бi , ..., X 1 Бm}, X 1 Б0 It refers to the incident angle corresponding to the Bth initial beam in the initial beam set, X 1 Б 0 refers to the incident position corresponding to the Bth initial beam in the initial beam set, X 1 БiIt refers to the attribute data corresponding to the i-th type of preset beam attribute of the B-th initial beam in the initial beam set, B=1, 2, ..., Ё, Ё refers to the total number of initial beams in the initial beam set, i=1, 2, ..., m, m refers to the total number of categories of preset beam attributes.

[0133] S20, obtaining the first target data set X 2 ={X 2 1, X 2 2, ..., X 2 i , ..., X 2 m}, where X 2 i It refers to the attribute data corresponding to the i-th type of preset beam attribute of the preset target beam.

[0134] S30, according to X 1 and X 2 , from the preset first target data table H 1 The first target tilt angle set corresponding to the initial light reflection module is obtained by querying.

[0135] S40: controlling the tilt angle of the initial light reflection module according to the first target tilt angle set.

[0136] S50, obtaining a second target light reflection module corresponding to the first target tilt angle set.

[0137] S60: Acquire a second interference area according to the target light source and the second target light reflection module.

[0138] In a specific embodiment, the preset simulator includes a target simulated light source and a simulated light reflection module, and the simulated light reflection module includes a first simulated light reflection element, a second simulated light reflection element, ..., a Gth simulated light reflection element, H 1 Obtain it by following the steps below:

[0139] S31, obtaining the first attribute data list A of the initial simulation beam set = {A1, A2, ..., A j , ..., A n}, the second attribute data list A of the first simulation beam 0 ={A 0 1. A 0 2, ..., A 0 j , ..., A 0 n} and the third attribute data list E of the preset real light beam = {E1, E2, ..., E x ,……,E y}, where the first attribute data set A corresponding to the jth initial simulation beam set j ={A j1 , A j2 , ..., A jБ , ..., A jЁ}, the first attribute data set A corresponding to the Bth initial simulation beam in the jth initial simulation beam set jБ ={A jБ0 , A jБ 0 , A jБ1 , A jБ2 , ..., A jБi , ..., A jБm}, A jБ0 It refers to the simulated incident angle corresponding to the Bth initial simulation beam in the jth initial simulation beam set, A jБ 0 A refers to the simulated incident position corresponding to the Bth initial simulation beam in the jth initial simulation beam set. jБi It refers to the attribute data corresponding to the i-th type of preset beam attribute corresponding to the B-th initial simulation beam in the j-th initial simulation beam set, A 0 j ={A 0 j1 , A 0 j2 , ..., A 0 jr , ..., A 0 js}, A j and the rth preset tilt angle set θ of the simulated light reflection module r The second attribute data set A of the corresponding first simulated beam 0 jr ={A 0 jr1 , A 0 jr2 , ..., A 0 jri , ..., A 0 jrm}, A 0 jri A j and θ r The attribute data corresponding to the i-th type of preset beam attribute of the corresponding first simulation beam, θ r ={θ r1 ,θ r2 , ..., θ rЖ , ..., θ rГ}, θ rЖIt refers to the rth preset tilt angle corresponding to the Жth simulated light reflecting element in the simulated light reflecting module, E x ={E x1 , E x2 ,……,E xi ,……,E xm}, E xi It refers to the attribute data corresponding to the i-th type of preset beam attribute of the x-th preset real beam, r=1, 2,..., s, s refers to the total number of preset inclination angles of the simulated light reflection module, j=1, 2,..., n, n refers to the total number of initial simulated beams, x=1, 2,..., y, y refers to the total number of preset real beams.

[0140] S32, for A 0 Normalize and obtain the fourth attribute data list A corresponding to the first simulation beam 1 ={A 1 1. A 1 2, ..., A 1 j , ..., A 1 n}.

[0141] S33, according to A 1 and E, obtain the first attribute similarity list F corresponding to the first simulation beam 1 ={F 1 1, F 1 2,……,

[0142] F 1 j , ..., F 1 n}, where F 1 j ={F 1 j1 , F 1 j2 , ..., F 1 jr , ..., F 1 js}, F 1 jr ={F 1 jr1 , F 1 jr2 , ..., F 1 jrx ,……,

[0143] F 1 jry}, F 1 jrx A jand θ r The property similarity between the corresponding first simulated light beam and the x-th preset real light beam.

[0144] S34, according to F 1 , get the first target tilt angle list θ 0 ={θ 0 1, θ 0 2, ..., θ 0 j , ..., θ 0 n} and target data list Q 1 = {Q 1 1. Q 1 2, ..., Q 1 j , ..., Q 1 n}, where A j The corresponding first target tilt angle set θ 0 j is max(F 1 jr ) corresponds to a set of preset tilt angles, A j The corresponding target dataset Q 1 j is max(F 1 jr ) corresponds to the second attribute data set corresponding to the first simulation light beam, and max() refers to the maximum value function.

[0145] S35, according to A, θ 0 and Q 1 , get the first target data table H 1 ={H 1 1, H 1 2, ..., H 1 j , ..., H 1 n}, where H 1 j ={A j , Q 1 j ,θ 0 j}.

[0146] In one embodiment, A 0 Obtain it by following the steps below:

[0147] S311, obtain the first attribute data list A = {A1, A2, ..., A j , ..., A n} and a list of preset tilt angles

[0148] θ={θ1,θ2,……,θ r , ..., θ s}.

[0149] S312, according to θ r Set up the simulation light reflection module and obtain θ r The corresponding candidate light reflection module, wherein the candidate light reflection module includes a first candidate light reflection element, a second candidate light reflection element, ..., a Жth candidate light reflection element, ..., a Гth candidate light reflection element, and the Жth candidate light reflection element is selected according to θ rЖ Obtained by setting the Жth simulation light reflecting element.

[0150] S313, according to the jth initial simulation beam set and θ r The corresponding candidate light reflection module is obtained j and θ r The second attribute data set A of the corresponding first simulated beam 0 jr ={A 0 jr1 , A 0 jr2 , ..., A 0 jri , ..., A 0 jrm}.

[0151] S314, traverse A and θ to obtain the second attribute data list A corresponding to A and θ 0 ={A 0 1. A 0 2, ..., A 0 j ,……,

[0152] A 0 n}, where A 0 j ={A 0 j1 , A 0 j2 , ..., A 0 jr , ..., A 0 js}, A 0 jr ={A 0 jr1 , A 0 jr2 , ..., A 0 jri , ..., A 0jrm}.

[0153] In one embodiment, when X 1 =A j And X 2 =Q 1 j When θ 0 j A first target tilt angle set corresponding to the initial light reflection module is determined.

[0154] As mentioned above, through the first target data table H 1 The first attribute data set representing the initial simulation beam set, the second attribute data set corresponding to the first simulation beam, and the corresponding relationship between the preset tilt angle set, so as to obtain the fourth attribute data set X corresponding to the initial beam set output by the target light source. 1 and the first target dataset X 2 , from the preset first target data table H 1 The first target tilt angle set corresponding to the initial light reflection module is obtained by querying to control the tilt angle of the initial light reflection module, thereby improving the acquisition efficiency and accuracy of the first target tilt angle set, and further improving the accuracy of the second interference area.

[0155] S003: when the total number of the initial light beam set is greater than 1, a second interference region is determined using a second method.

[0156] The target light source can output several initial light beam sets simultaneously, the initial light beams in the same initial light beam set are coherent light, and the initial light beams in different initial light beam sets are incoherent light, which serves as the basis for interference to obtain the corresponding target light beam.

[0157] As described above, when the total number of the initial light beam set is greater than 1, the second interference region is determined adaptively using the second method, which improves the accuracy of obtaining the second interference region and further improves the accuracy of generating the target grating.

[0158] In a specific implementation, S003 further includes the following steps:

[0159] S100, obtaining the initial light beam set list G0={G 01 , G 02 , ..., G 0β , ..., G 0γ}, where G 0β It refers to the βth initial light beam set output by the target light source, β=1, 2, ..., γ, and γ refers to the total number of initial light beam sets output by the target light source.

[0160] S200, obtain target attribute data X2 1, where X 2 1 refers to the first attribute data of the preset target beam.

[0161] S300, according to G0 and X 2 1. From the preset second target data table H 2 The second target tilt angle set corresponding to the initial light reflection module is obtained by querying.

[0162] S400: controlling the tilt angle of the initial light reflection module according to a second target tilt angle set.

[0163] S500: Acquire a third target light reflection module corresponding to a second target tilt angle set.

[0164] S600: Acquire a second target light beam according to the target light source and the third target light reflection module.

[0165] In a specific embodiment, the simulated light reflection module includes a first simulated light reflection element, a second simulated light reflection element, ..., a Gth simulated light reflection element, H 2 Obtain it by following the steps below:

[0166] S01, obtain the initial simulation beam set list G corresponding to the target simulation light source in the preset simulator 0 = {G 0 1, G 0 2, ..., G 0 t , ..., G 0 e}, where G 0 t It refers to the tth initial simulation beam set output by the target simulation light source, G 0 t Including α t The initial simulation beam, G 0 t α in t The initial simulation beam is coherent light, 0≤α t ≤u, u refers to the total number of initial simulation light beams output by the target simulation light source, t=1, 2, ..., e, e refers to the total number of initial simulation light beam sets.

[0167] S02, obtaining a preset tilt angle list θ={θ1, θ2, . . . , θ r , ..., θ s}, wherein the rth preset tilt angle set θ of the simulated light reflection module r ={θ r1 ,θ r2, ..., θ rЖ , ..., θ rГ}, θ rЖ It refers to the rth preset inclination angle corresponding to the Жth simulated light reflecting element in the simulated light reflecting module, r=1, 2, ..., s, and s refers to the total number of preset inclination angles of the simulated light reflecting module.

[0168] S03, according to θ r Set up the simulation light reflection module and obtain θ r Corresponding candidate light reflection modules.

[0169] S04, according to G 0 and θ, obtain the sixth attribute data list D corresponding to the second simulation beam 0 ={D 0 1, D 0 2, ..., D 0 t , ..., D 0 e}, where D 0 t ={D 0 t1 , D 0 t2 , ..., D 0 tr , ..., D 0 ts}, D 0 tr ={D 0 tr1 , D 0 tr2 , ..., D 0 tri , ..., D 0 trm}, D 0 tri G 0 t and θ r The corresponding attribute data corresponding to the i-th type of preset beam attribute of the second simulation beam.

[0170] S05, for D 0 Normalize and obtain the seventh attribute data list D corresponding to the second simulation beam 1 ={D 1 1, D 1 2, ..., D 1 t , ..., D 1 e}, where D 1 t ={D1 t1 , D 1 t2 , ..., D 1 tr , ..., D 1 ts}, D 1 tr ={D 1 tr1 , D 1 tr2 , ..., D 1 tri , ..., D 1 trm}, D 1 tri Refers to D 0 tri Normalized attribute data.

[0171] S06, according to D 1 All the first attribute data in D 1 Regroup all attribute data in to obtain the first attribute data set list W 1 = {W 1 1.W 1 2, ..., W 1 p , ..., W 1 q}, where the pth first attribute data set W 1 p = {W 1 p1 , W 1 p2 , ..., W 1 pδ , ..., W 1 pε(p)},W 1 pδ = {W 1 pδ1 , W 1 pδ2 , ..., W 1 pδi , ..., W 1 pδm},W 1 pδ1 ∈D 1 , W 1 p The following conditions must be met:

[0172] W 1 p11 =W 1p21 =……=W 1 pδ1 =……=W 1 pε(p)1 .

[0173] W 1 The following conditions must be met:

[0174] W 1 111 ≠W 1 211 ≠……≠W 1 p11 ≠……≠W 1 q11 .

[0175] S07, according to W 1 and the third attribute data list E of the preset real light beam = {E1, E2, ..., E x ,……,E y}, get the second attribute similarity list F 2 ={F 2 1, F 2 2, ..., F 2 p , ..., F 2 q}, where the third attribute data set E of the x-th preset real beam x ={E x1 , E x2 ,……,E xi ,……,E xm},W 1 p The corresponding second attribute similarity set F 2 p ={F 2 p1 , F 2 p2 , ..., F 2 pδ , ..., F 2 pε(p)}, F 2 pδ ={F 2 pδ1 , F 2 pδ2 , ..., F 2 pδx , ..., F 2 pδy}, F 2 pδx It means W 1 pδThe property similarity between the corresponding initial simulation beam set and the second simulation beam corresponding to the preset tilt angle and the xth preset real beam, x=1, 2, ..., y, y refers to the total number of preset real beams.

[0176] S08, according to E, obtain the second target tilt angle list θ 2 ={θ 2 1, θ 2 2, ..., θ 2 p , ..., θ 2 q} and the target beam set list Q 2 = {Q 2 1. Q 2 2, ..., Q 2 p , ..., Q 2 q}, where W 1 pδ1 The corresponding second target tilt angle θ 2 p is max(F 2 pδ ) corresponds to the preset tilt angle, W 1 pδ1 The corresponding target beam set Q 2 p is max(F 2 pδ ) corresponds to the initial simulation beam set, and max() refers to the maximum value function.

[0177] S09, according to W 1 ,θ 2 and Q 2 , get the second target data table H 2 ={H 2 1, H 2 2, ..., H 2 p , ..., H 2 q}, where H 2 j = {W 1 pδ1 , Q 2 p ,θ 2 p}.

[0178] In one embodiment, when G0=Q 2 p And X 2 1=W 1pδ1 When θ 2 p A second target tilt angle set corresponding to the initial light reflection module is determined.

[0179] As mentioned above, through the second target data table H 2 Characterize the correspondence between the initial simulation beam set list, the first attribute data corresponding to the second simulation beam, and the preset tilt angle set, so as to output the initial beam set list G0 and the target attribute data X according to the target light source 2 1. From the preset second target data table H 2 The second target tilt angle set corresponding to the initial light reflection module is obtained by querying, thereby improving the acquisition efficiency and accuracy of the second target tilt angle set.

[0180] S004, placing a substrate according to the second interference region to generate a second target grating.

[0181] In a specific embodiment, the substrate is arranged parallel to the G-th target light reflecting element, and the substrate is located close to the second interference area on the G-th target light reflecting element, so that the second target light beam transmitted by the second interference area of ​​the G-th target light reflecting element can scan the substrate, thereby generating a second target grating.

[0182] In the above, the total number of initial light beam sets output by the target light source is judged. When the total number of initial light beam sets is equal to 1, the second interference area is determined by the first method. When the total number of initial light beam sets is greater than 1, the second interference area is determined by the second method. The substrate is placed according to the second interference area to generate a second target grating. By adaptively using the first method or the second method to determine the second interference area based on the total number of initial light beams output by the target light source, the accuracy of obtaining the second interference area is improved, thereby improving the accuracy of generating the target grating.

[0183] Embodiment 4

[0184] On the basis of the above-mentioned Embodiments 1, 2 and 3, this Embodiment 4 provides a target grating generation system, which includes a target light source, an initial light reflection module, a substrate, a processor and a memory storing a computer program. When the computer program is executed by the processor, the following steps are implemented: Figure 4 As shown:

[0185] S1, acquiring a target tilt angle set of an initial light reflection module according to an initial light beam set output from a target light source.

[0186] In a specific embodiment, the target grating generation system further includes a preset simulator, the preset simulator includes a target simulated light source and a simulated light reflection module, the simulated light reflection module includes a first simulated light reflection element, a second simulated light reflection element, ..., a Gth simulated light reflection element, S1 further includes the following steps:

[0187] S11, obtaining a first attribute data list A of the initial simulated light beam set output by the target simulated light source = {A1, A2, ..., A j , ..., A n}, where the first attribute data set A corresponding to the jth initial simulation beam set output by the target simulation light source j ={A j1 , A j2 , ..., A jБ , ..., A jЁ}, the first attribute data set A corresponding to the Bth initial simulation beam in the jth initial simulation beam set jБ ={A jБ0 , A jБ 0 , A jБ1 , A jБ2 , ..., A jБi , ..., A jБm}, A jБ0 It refers to the simulated incident angle corresponding to the Bth initial simulation beam in the jth initial simulation beam set, A jБ 0 A refers to the simulated incident position corresponding to the Bth initial simulation beam in the jth initial simulation beam set. jБi It refers to the attribute data corresponding to the i-th type of preset beam attribute corresponding to the B-th initial simulation beam in the j-th initial simulation beam set, B=1, 2,..., Ё, Ё refers to the total number of initial beams in the initial beam set, j=1, 2,..., n, n refers to the total number of initial simulation beams, i=1, 2,..., m, m refers to the total number of attribute data of initial simulation beams.

[0188] S12, obtaining a preset tilt angle list θ of the simulation light reflection module = {θ1, θ2, ..., θ r , ..., θ s}, wherein the rth preset tilt angle set θ of the simulated light reflection module r ={θ r1 ,θ r2 , ..., θ rЖ , ..., θ rГ}, θ rЖIt refers to the rth preset inclination angle corresponding to the Жth simulation light reflection element, Ж=1, 2, ..., Г, r=1, 2, ..., s, s refers to the total number of preset inclination angles of the simulation light reflection module.

[0189] S13, according to θ r Set up the simulation light reflection module and obtain θ r The corresponding candidate light reflection module, wherein the candidate light reflection module includes a first candidate light reflection element, a second candidate light reflection element, ..., a Жth candidate light reflection element, ..., a Гth candidate light reflection element, and the Жth candidate light reflection element is selected according to θ rЖ Obtained by setting the Жth simulation light reflecting element.

[0190] S14, according to the jth initial simulation beam set and θ r The corresponding candidate light reflection module is obtained j and θ r The second attribute data set A of the corresponding first simulated beam 0 jr ={A 0 jr1 , A 0 jr2 , ..., A 0 jri , ..., A 0 jrm}, where A 0 jri A j and θ r The corresponding attribute data corresponding to the i-th type of preset beam attribute of the first simulation beam.

[0191] S15, traverse A and θ, and obtain the second attribute data list A corresponding to A and θ 0 ={A 0 1. A 0 2, ..., A 0 j ,……,

[0192] A 0 n}, where A 0 j ={A 0 j1 , A 0 j2 , ..., A 0 jr , ..., A 0 js}.

[0193] S16, according to A, A 0The preset attribute prediction model is trained with θ to obtain the trained attribute prediction model.

[0194] S17, inputting the initial attribute data set corresponding to the initial light beam set and the preset target attribute data set into the trained attribute prediction model, and outputting the target tilt angle set.

[0195] According to each initial simulation light beam set and the candidate light reflection module corresponding to each preset tilt angle set, each corresponding first simulation light beam and the second attribute data set corresponding to each first simulation light beam can be obtained.

[0196] Then, the first attribute data list of the initial simulation beam set, the corresponding preset tilt angle set and the corresponding second attribute data set can be used as training data to train the preset attribute prediction model, and the trained attribute prediction model can be obtained. Then, the initial attribute data set corresponding to the initial beam set and the preset target attribute data set are input into the trained attribute prediction model, and the target tilt angle set is output.

[0197] Among them, the attribute data in the preset target attribute data set refers to the attribute data of the first interference area and the first target light beam transmitted from the first interference area that are desired to be obtained by controlling the corresponding inclination angle of each initial light reflecting element in the initial light reflecting module. Correspondingly, a first target grating that meets the preset application requirements can be generated based on the first target light beam.

[0198] As described above, in a preset simulator, according to the first attribute data list corresponding to the initial simulation beam set and the preset tilt angle set, the second attribute data set corresponding to the corresponding first simulation beam is simulated, the correspondence between the first attribute data set corresponding to the initial simulation beam set, the second attribute data set corresponding to the first simulation beam and the preset tilt angle set is characterized, and the preset attribute prediction model is used as training data to perform model training, and the trained attribute prediction model is obtained, so as to obtain the corresponding target tilt angle set according to the initial attribute data set corresponding to the initial beam set and the preset target attribute data set, thereby improving the accuracy and acquisition efficiency of the target tilt angle set.

[0199] In a specific implementation, S16 specifically includes the following steps:

[0200] S161, according to A and A 0 , get the input sample data list C corresponding to A = {C1, C2, ..., C j , ..., C n}, where A j The corresponding input sample data set C j ={C j1 , Cj2 , ..., C jr , ..., C js}, A j and θ r The corresponding input sample data C jr ={A j , A 0 jr}.

[0201] S162, according to C and θ, obtain the total model loss L corresponding to the preset attribute prediction model during the training process 0 .

[0202] S163, according to L 0 Update the parameters of the preset attribute prediction model until L 0 Converge and obtain the trained attribute prediction model.

[0203] In the above, each input sample data consisting of the second attribute data set corresponding to each first simulation beam and the first attribute data set corresponding to the initial simulation beam set corresponding to each first simulation beam is used as a training sample, and the preset tilt angle set corresponding to each first simulation beam is used as a training label, the total model loss corresponding to the preset attribute prediction model in the training process is obtained, and the parameters of the preset attribute prediction model are trained according to the total model loss, thereby improving the accuracy of the trained attribute prediction model, thereby improving the accuracy of the target tilt angle set.

[0204] In a specific implementation, S162 specifically includes the following steps:

[0205] S1621, C jr Input into the preset attribute prediction model and output C jr The corresponding predicted tilt angle set θ 0 r ={θ 0 r1 ,θ 0 r2 , ..., θ 0 rЖ , ..., θ 0 rГ}, θ 0 rЖ It refers to the rth predicted tilt angle corresponding to the Жth simulated light reflecting element.

[0206] S1622, according to θ 0 r and θ r , get C jr The corresponding model loss value L jr =Σ Ж＝1Г |θ 0 rЖ -θ rЖ |.

[0207] S1623, traverse C, and obtain the model loss value list L corresponding to C = {L1, L2, ..., L j , ..., L n}, where L j ={L j1 , L j2 , ..., L jr , ..., L js}.

[0208] S1624, based on L, obtain the total model loss L corresponding to the preset attribute prediction model 0 =Σ j＝1 n (Σ r＝ 1 s L jr ).

[0209] In the above, the corresponding model loss value is obtained according to the difference between the predicted tilt angle set corresponding to each input sample data and the corresponding preset tilt angle set to characterize the accuracy of the attribute prediction model, and the sum of all model losses is obtained as the total model loss, thereby improving the training accuracy of the attribute prediction model.

[0210] S2, setting an initial light reflection module according to a target tilt angle, and acquiring a first target light reflection module.

[0211] S3, acquiring a first interference region corresponding to the initial light beam set according to the target light source and the first target light reflection module.

[0212] In a specific implementation, the memory also stores an initial incident angle set and an initial incident position set of the initial light beam set, and S3 further includes the following steps:

[0213] S31, according to the initial incident angle set and the initial incident position set, all initial light beams in the initial light beam set are incident to a first target light reflection module.

[0214] S32, acquiring a first interference region on a first target light reflection module.

[0215] Among them, the initial incident angle set includes the incident angle of each initial light beam when it is input into the first target light reflecting element in the first target light reflecting module, and the initial incident position set includes the incident position of each initial light beam when it is input into the first target light reflecting element in the first target light reflecting module. Then, according to the initial incident angle and the initial incident position corresponding to each initial light beam, each initial light beam is incident into the first target light reflecting module accordingly, and the first interference area on the Gth target light reflecting element of the first target light reflecting module and the first target light beam transmitted from the first interference area are obtained.

[0216] In a specific implementation, the memory also stores a transmission ratio corresponding to the initial light reflection module, and the preset light beam attribute includes light power.

[0217] The proportion of the real optical power in the real attribute target data corresponding to the first target light beam corresponding to the first interference area in the preset optical power in the preset attribute target data set is consistent with the transmission ratio.

[0218] It can be understood that since the Gth initial light reflecting element can refer to a spectroscope, in the attribute data of the first target light beam obtained according to the target light source and the first target light reflecting module, the real light power in the real attribute target data corresponding to the first target light beam accounts for the preset light power in the preset attribute target data set and is consistent with the transmission ratio, that is, this embodiment obtains the first target light beam that meets the preset real attribute requirements by controlling the inclination angles corresponding to each initial light reflecting element in the initial light reflecting module.

[0219] S4, placing a substrate according to the first interference region to generate a first target grating.

[0220] When the substrate is irradiated with laser energy close to its own damage threshold, a stable surface periodic structure will be generated on its surface. Therefore, this embodiment scans the substrate with a first target beam to generate a first target grating to meet the preset application requirements.

[0221] In a specific implementation, S4 further includes the following steps:

[0222] S41, placing the substrate at a position corresponding to the first interference region.

[0223] S42, generating a first target grating according to the first target light beam.

[0224] Among them, the substrate is arranged in parallel with the G-th target light reflecting element, and the substrate is close to the first interference area on the G-th target light reflecting element, so that the first target light beam transmitted by the first interference area of ​​the G-th target light reflecting element can scan the substrate, thereby generating a first target grating.

[0225] In the above, according to the initial light beam output from the target light source, the target tilt angle of the initial light reflection module is obtained, the initial light reflection module is set according to the target tilt angle, and the first target light reflection module is obtained. According to the target light source and the first target light reflection module, the first interference area corresponding to the initial light beam set is obtained, and the substrate is placed according to the first interference area to generate the first target grating. By controlling the tilt angle corresponding to the initial light reflection module, the first interference area and the first target light beam that meet the preset application requirements are obtained, and then the first target grating that meets the preset application requirements is obtained, thereby improving the accuracy and acquisition efficiency of the target tilt angle.

[0226] Although some specific embodiments of the present invention have been described in detail by way of example, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It should also be understood by those skilled in the art that various modifications may be made to the embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A control method for a light reflection module, characterized in that: The control method of the light reflection module includes: S100, obtaining the initial light beam set list G0={G 01 , G 02 , ..., G 0β , ..., G 0γ }, where G 0β refers to the βth initial light beam set output by the target light source, β=1, 2, ..., γ, γ refers to the total number of initial light beam sets output by the target light source; S200, obtain target attribute data X 2 1, where X 2 1 refers to the first attribute data of the preset target beam; S300, according to G0 and X 2 1. From the preset second target data table H 2 , wherein the initial light reflecting module includes a first initial light reflecting element, a second initial light reflecting element, ..., a Gth initial light reflecting element, and the second target inclination angle set includes a first second target inclination angle corresponding to the first initial light reflecting element, a second second target inclination angle corresponding to the second initial light reflecting element, ..., a Gth second target inclination angle corresponding to the Gth initial light reflecting element, and G refers to the total number of initial light reflecting elements in the initial light reflecting module; S400, controlling the tilt angle of the initial light reflection module according to the second target tilt angle set, wherein S400 includes the following steps: According to the Жth second target inclination angle, the inclination angle of the Жth initial light reflecting element is controlled to be equal to the Жth second target inclination angle, wherein Ж=1, 2, ..., Г.

2. The control method of the light reflection module according to claim 1, characterized in that: The simulation light reflection module includes a first simulation light reflection element, a second simulation light reflection element, ..., a Gth simulation light reflection element, H 2 Obtain it by following the steps below: S01, obtain the initial simulation beam set list G corresponding to the target simulation light source in the preset simulator 0 = {G 0 1, G 0 2, ..., G 0 t , ..., G 0 e }, where G 0 t refers to the tth initial simulation light beam set output by the target simulation light source, G 0 t Including α t The initial simulation beam, G 0 t α in t The initial simulation beam is coherent light, 0≤α t ≤u, u refers to the total number of initial simulation light beams output by the target simulation light source, t=1, 2, ..., e, e refers to the total number of initial simulation light beam sets; S02, obtaining a preset tilt angle list θ={θ1, θ2, . . . , θ r , ..., θ s }, wherein the rth preset tilt angle set θ of the simulated light reflection module r ={θ r1 ,θ r2 , ..., θ rЖ , ..., θ rГ }, θ rЖ refers to the rth preset tilt angle corresponding to the Жth simulated light reflecting element in the simulated light reflecting module, r=1, 2, ..., s, s refers to the total number of preset tilt angles of the simulated light reflecting module; S03, according to θ r Set the simulated light reflection module to obtain θ r corresponding candidate light reflection modules; S04, according to G 0 and θ, obtain the sixth attribute data list D corresponding to the second simulation beam 0 ={D 0 1, D 0 2, ..., D 0 t , ..., D 0 e }, where D 0 t ={D 0 t1 , D 0 t2 , ..., D 0 tr , ..., D 0 ts }, D 0 tr ={D 0 tr1 , D 0 tr2 , ..., D 0 tri , ..., D 0 trm }, D 0 tri G 0 t and θ r Attribute data corresponding to the i-th type of preset beam attribute of the corresponding second simulation beam; S05, for D 0 Normalize and obtain the seventh attribute data list D corresponding to the second simulation beam 1 ={D 1 1, D 1 2, ..., D 1 t , ..., D 1 e }, where D 1 t ={D 1 t1 , D 1 t2 , ..., D 1 tr , ..., D 1 ts }, D 1 tr ={D 1 tr1 , D 1 tr2 , ..., D 1 tri , ..., D 1 trm }, D 1 tri Refers to D 0 tri Normalized attribute data; S06, according to D 1 All the first attribute data in D 1 Regroup all attribute data in to obtain the first attribute data set list W 1 = {W 1 1.W 1 2, ..., W 1 p , ..., W 1 q }, where the pth first attribute data set W 1 p = {W 1 p1 , W 1 p2 , ..., W 1 pδ , ..., W 1 pε(p) },W 1 pδ = {W 1 pδ1 , W 1 pδ2 , ..., W 1 pδi , ..., W 1 pδm },W 1 pδ1 ∈D 1 , W 1 p The following conditions must be met: IN 1 p11 =In 1 p21 =……=In 1 pδ1 =……=In 1 pε(p)1 ; W 1 The following conditions must be met: IN 1 111 ≠In 1 211 ≠……≠In 1 p11 ≠……≠In 1 q11 ; S07, according to W 1 and the third attribute data list E of the preset real light beam = {E1, E2, ..., E x ,……,E y }, get the second attribute similarity list F 2 ={F 2 1, F 2 2, ..., F 2 p , ..., F 2 q }, where the third attribute data set E of the x-th preset real beam x ={E x1 , E x2 ,……,E xi ,……,E xm },W 1 p The corresponding second attribute similarity set F 2 p ={F 2 p1 , F 2 p2 , ..., F 2 pδ , ..., F 2 pε(p) }, F 2 pδ ={F 2 pδ1 , F 2 pδ2 , ..., F 2 pδx , ..., F 2 pδy }, F 2 pδx It means W 1 pδ The property similarity between the corresponding initial simulated beam set and the second simulated beam corresponding to the preset tilt angle set and the x-th preset real beam, where x=1, 2, ..., y, and y refers to the total number of preset real beams; S08, according to E, obtain the second target tilt angle list θ 2 ={θ 2 1, θ 2 2, ..., θ 2 p , ..., θ 2 q } and the target beam set list Q 2 = {Q 2 1. Q 2 2, ..., Q 2 p , ..., Q 2 q }, where W 1 pδ1 The corresponding second target tilt angle set θ 2 p is max(F 2 pδ ) corresponds to a preset tilt angle set, W 1 pδ1 The corresponding target beam set Q 2 p is max(F 2 pδ ) corresponds to the initial simulation beam set, max() refers to the maximum value function; S09, according to W 1 ,θ 2 and Q 2 , get the second target data table H 2 ={H 2 1, H 2 2, ..., H 2 p , ..., H 2 q }, where H 2 j = {W 1 pδ1 , Q 2 p ,θ 2 p }.

3. The control method of the light reflection module according to claim 2, characterized in that: When G0=Q 2 p And X 2 1=W 1 pδ1 When θ 2 p A second target tilt angle set corresponding to the initial light reflection module is determined.

4. The control method of the light reflection module according to claim 2, characterized in that: D 1 tri Meet the following conditions: D 1 tri =1 / (1+e^(S i *D 0 tri )), where S i It refers to the preset normalization coefficient corresponding to the i-th type of preset beam attribute.

5. The control method of the light reflection module according to claim 2, characterized in that: F 2 pδx Meet the following conditions: F 2 pδx =Σ i＝1 m (J i *|K 2 pδi -E xi |), where J i It refers to the preset similarity priority corresponding to the i-th type of preset beam attribute, K 2 pδi It means W 1 pδ The corresponding initial simulation beam set list and the attribute data corresponding to the i-th type of preset beam attribute of the second simulation beam corresponding to the preset tilt angle set, K 2 pδi ∈D 1 .

6. The control method of the light reflection module according to claim 1, characterized in that: The first attribute data refers to the frequency attribute data.

7. The control method of the light reflection module according to claim 1, characterized in that: The initial light beams in the same initial light beam set are coherent light, and the initial light beams in different initial light beam sets are incoherent light.

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