A full-symmetry MEMS resonator phase demodulation error identification and compensation method, system, medium and device

Abstract

The application discloses a kind of full symmetry MEMS resonator phase demodulation error identification and compensation method, system, medium and equipment in the technical field of circuit error, to solve the problem that prior art cannot meet actual demand.The detection modal output signal, demodulation reference signal and modulation signal are obtained;The detection modal output signal and the demodulation reference signal are in-phase demodulated and quadrature demodulated, and high-frequency components are filtered out using a low-pass filter to obtain in-phase demodulated signals and quadrature demodulated signals;The phase of the detection modal output signal is left-shifted by 22.5°, and the phase of the demodulation reference signal is right-shifted by 22.5°;The demodulation reference signal after phase shift is multiplied with the detection modal output signal after phase shift to obtain new in-phase demodulated signals and quadrature demodulated signals;The amplitude of the in-phase demodulated signals and the quadrature demodulated signals is compared with that of the new in-phase demodulated signals and the quadrature demodulated signals, and the phase error is obtained by fitting a curve equation and phase correction is performed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of circuit error, in particular to a full-symmetry MEMS resonator phase demodulation error identification and compensation method, system, medium and equipment. BACKGROUND

[0002] Due to the better performance characteristics of the full-symmetry MEMS resonator, the full-symmetry form is often used in design, but after actual processing, the structure is not completely symmetrical in the ideal state due to process errors, so it will cause damping coupling and stiffness coupling, the phase of the stiffness coupling signal is 90 degrees different from the phase of the Coriolis force response output, therefore, in the measurement and control circuit, the in-phase demodulation and quadrature demodulation methods are used to separate the Coriolis force signal and the quadrature force signal, but due to the phase error between the reference signal and the to-be-demodulated signal in the actual circuit, the demodulation is not complete, thereby producing demodulation error, which causes the quadrature error signal demodulation component to be coupled to the force balance loop, and when there is an angular rate input, it will affect the stability of the quadrature closed-loop system. The current compensation phase demodulation error techniques include phase estimation method, direct measurement method, modified double sideband method and feedback measurement method.

[0003] The phase estimation method obtains the size of the phase error through a phase estimator, and then corrects the phase error through a phase rotator, which greatly increases the complexity of the system, and the compensation accuracy and real-time performance cannot be guaranteed. The direct measurement method measures the phase difference between the output signal of the driving mode and the quadrature error signal of the detection mode, adjusts the reference phase based on the phase difference to achieve closed-loop compensation, so it is only suitable for MEMS resonators with good driving nonlinearity. The feedback measurement method is only suitable for occasions where the quadrature error is suppressed by the quadrature force, but the input of the quadrature force feedback signal is easy to introduce redundant noise, which causes the performance of the MEMS resonator output to deteriorate. SUMMARY

[0004] The present application aims to overcome the deficiencies in the prior art, and provides a full-symmetry MEMS resonator phase demodulation error identification and compensation method, system, medium and equipment, which is simple and reliable, easy to implement, does not need to introduce too many control units to achieve compensation effect, and the higher the resolution of the voltage signal, the better the final compensation effect.

[0005] To solve the above technical problems, the present application is implemented by using the following technical solutions:

[0006] On the one hand, the present application provides a full-symmetry MEMS resonator phase demodulation error identification and compensation method, comprising:

[0007] obtaining a detection mode output signal, a demodulation reference signal and a modulation signal;

[0008] The detection mode output signal and the demodulation reference signal are in-phase demodulated and quadrature demodulated, and high-frequency components are filtered out by a low-pass filter to obtain in-phase demodulation signals and quadrature demodulation signals;

[0009] The phase of the detection mode output signal is left shifted by 22.5° to obtain a phase-shifted detection mode output signal;

[0010] The phase of the demodulation reference signal is right shifted by 22.5° to obtain a phase-shifted demodulation reference signal;

[0011] The phase-shifted demodulation reference signal and the phase-shifted detection mode output signal are multiplied to obtain new in-phase demodulation signals and quadrature demodulation signals;

[0012] The in-phase demodulation signals and the quadrature demodulation signals are compared with the new in-phase demodulation signals and the quadrature demodulation signals in amplitude, and a phase error is obtained by fitting a curve equation;

[0013] The phase of the modulation signal is corrected according to the phase error to compensate for the phase error.

[0014] Optionally, the detection mode output signal is obtained by formula (1):

[0015] (1)

[0016] wherein, represents the detection mode output signal of the full-symmetry MEMS resonator at time t, represents the in-phase displacement amplitude, represents the quadrature displacement amplitude, represents the analog front-end amplification gain coefficient, represents the resonant frequency of the resonator, represents the total phase shift of the signal, represents the phase shift of the front-end amplification circuit, represents the phase shift of the ADC conversion, represents the phase shift of the driving mode, represents the phase shift of the detection mode, represents the phase shift of the DAC conversion, represents the phase shift of the modulation signal.

[0017] The demodulation reference signal is obtained by a phase-locked loop, including and wherein, represents the resonant frequency of the resonator, represents the phase of the demodulation reference signal.

[0018] ​Optionally, the expression of the in-phase demodulation signal is shown as formula (2):

[0019] (2)

[0020] The expression of the quadrature demodulation signal is shown as formula (3):

[0021] (3).

[0022] Optionally, the expression of the phase-shifted detection mode output signal is shown as formula (4):

[0023] (4)

[0024] The phase-shifted demodulation reference signal includes and .

[0025] Optionally, the expression of the new in-phase demodulation signal is shown as formula (5):

[0026] (5)

[0027] The expression of the new quadrature demodulation signal is shown as formula (6):

[0028] (6).

[0029] Optionally, the fitting process of the fitting curve equation includes the following steps:

[0030] The relationship between the phase error and the phase shift of the drive mode is shown as formula (7):

[0031] (7)

[0032] wherein, φ represents the phase shift of the drive mode, φ represents the phase error, φ represents the phase of the demodulation reference signal;

[0033] According to the above formula (7), , the following equation is satisfied:

[0034] (8)

[0035] (9)

[0036] According to the difference between the left and right sides of the above equations (8) and (9), the phase error is fitted to obtain the fitting curve equation.

[0037] In a second aspect, the present application provides a full-symmetry MEMS resonator phase demodulation error identification and compensation system, comprising:

[0038] a signal acquisition module, configured to acquire a detection modal output signal and a demodulation reference signal;

[0039] a signal phase shift module, configured to left shift the phase of the detection modal output signal by 22.5° to obtain a phase-shifted detection modal output signal, and right shift the phase of the demodulation reference signal by 22.5° to obtain a phase-shifted demodulation reference signal;

[0040] a signal demodulation module, configured to perform in-phase demodulation and quadrature demodulation on the detection modal output signal and the demodulation reference signal, and filter high-frequency components by using a low-pass filter to obtain in-phase demodulation signals and quadrature demodulation signals, and perform multiplication demodulation on the phase-shifted detection modal output signal and the phase-shifted demodulation reference signal to obtain new in-phase demodulation signals and quadrature demodulation signals;

[0041] an amplitude comparison module, configured to compare the in-phase demodulation signals and the quadrature demodulation signals with the new in-phase demodulation signals and the quadrature demodulation signals in amplitude, and obtain a phase error by fitting a curve equation;

[0042] a phase compensation module, configured to correct the phase of a modulation signal according to the phase error to realize compensation of the phase error.

[0043] In a third aspect, the present application provides a computer readable storage medium having a computer program / instruction stored thereon, wherein the computer program / instruction is executed by a processor to implement the steps of the full-symmetry MEMS resonator phase demodulation error identification and compensation method according to any one of the first aspect.

[0044] In a fourth aspect, the present application provides a computer device / equipment / system, comprising:

[0045] a memory, configured to store a computer program / instruction;

[0046] a processor, configured to execute the computer program / instruction to implement the steps of the full-symmetry MEMS resonator phase demodulation error identification and compensation method according to any one of the first aspect.

[0047] In a fifth aspect, the present application provides a computer program product, comprising a computer program / instruction, wherein the computer program / instruction is executed by a processor to implement the steps of the full-symmetry MEMS resonator phase demodulation error identification and compensation method according to any one of the first aspect.

[0048] Compared with the prior art, the present application has the following beneficial effects:

[0049] 1.The full-symmetry MEMS resonator phase demodulation error identification and compensation method provided by the present application, by comparing the amplitude of the operation processed demodulation signal with the original demodulation signal, the phase error information is obtained, and the phase error is compensated by correcting the phase of the modulation signal, the scheme is simple and reliable, and easy to implement, without introducing too many control units to achieve compensation effect, and the higher the resolution of the voltage signal, the better the final compensation effect;

[0050] 2.The full-symmetry MEMS resonator phase demodulation error identification and compensation system provided by the present application, by setting the signal acquisition module, signal phase shift module, signal demodulation module, amplitude comparison module and phase compensation module, the phase demodulation error identification and compensation for the full-symmetry MEMS resonator are realized, which has practical significance and good application prospect;

[0051] 3.The computer readable storage medium, computer device / system and computer program product provided by the present application can execute the steps of the full-symmetry MEMS resonator phase demodulation error identification and compensation method provided by the present application. BRIEF DESCRIPTION OF DRAWINGS

[0052] Figure 1 The working flow chart of the full-symmetry MEMS resonator phase demodulation error identification and compensation method provided by the present application is provided.

[0053] Figure 2 The amplitude curve comparison diagram of the in-phase demodulation loop and the reference demodulation loop output provided by the present application is provided.

[0054] Figure 3 The fitting curve diagram of the phase error and the amplitude error polynomial relationship provided by the present application is provided.

[0055] Figure 4 The voltage output curve diagram of the amplitude comparison module under different phase errors provided by the present application is provided.

[0056] Figure 5 The effect diagram of eliminating the influence of phase error on the quadrature suppression voltage stability provided by the present application is provided. DETAILED DESCRIPTION

[0057] The technical scheme of the present application will be described in detail below by means of the drawings and specific embodiments, and it should be understood that the specific features in the embodiments and the embodiments of the present application are detailed description of the technical scheme of the present application, and not the limitation of the technical scheme of the present application, and the technical features in the embodiments and the embodiments of the present application can be combined with each other without conflict.

[0058] It should be noted that the term "and / or" in this article is only to describe the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B, which can represent the existence of A alone, the existence of A and B together, and the existence of B alone. In addition, the character " / " in this article generally represents that the associated objects before and after are in an "or" relationship.

[0059] Embodiment one:

[0060] The embodiment of the application discloses a full-symmetry MEMS resonator phase demodulation error identification and compensation method, as shown in the reference Figure 1 The specific steps include the following steps:

[0061] S1, obtaining a detection mode output signal, a demodulation reference signal and a modulation signal;

[0062] S2, in-phase demodulation and quadrature demodulation are performed on the detection mode output signal and the demodulation reference signal, and a low-pass filter is used to filter out high-frequency components to obtain in-phase demodulation signals and quadrature demodulation signals;

[0063] S3, the phase of the detection mode output signal is left shifted by 22.5° to obtain a detection mode output signal after phase shift;

[0064] S4, the phase of the demodulation reference signal is right shifted by 22.5° to obtain a demodulation reference signal after phase shift;

[0065] S5, the demodulation reference signal after phase shift and the detection mode output signal after phase shift are multiplied to obtain new in-phase demodulation signals and quadrature demodulation signals;

[0066] S6, the in-phase demodulation signals and the quadrature demodulation signals are compared with the new in-phase demodulation signals and the quadrature demodulation signals in amplitude, and a phase error is obtained by fitting a curve equation;

[0067] S7, according to the phase error, the phase of the modulation signal is corrected to realize compensation of the phase error.

[0068] Specifically, in step S1, according to the characteristics of the full-symmetry MEMS resonator, the output signal of the detection mode thereof can be expressed as:

[0069] (1)

[0070] wherein, represents the detection mode output signal of the full-symmetry MEMS resonator at time, represents the in-phase displacement amplitude, represents the quadrature displacement amplitude, represents the analog front-end amplification gain coefficient, denotes the resonance frequency of the resonator, denotes the total phase shift of the signal, denotes the phase shift of the preamplifier circuit, denotes the phase shift of the ADC conversion, denotes the phase shift of the driving mode, denotes the phase shift of the detection mode, denotes the phase shift of the DAC conversion, denotes the phase shift of the modulation signal;

[0071] The demodulation reference signal is obtained by a phase-locked loop, comprising and wherein denotes the resonance frequency of the resonator, denotes the phase of the demodulation reference signal.

[0072] The modulation signal and the demodulation reference signal belong to the same frequency signal generated by the phase-locked loop, comprising and .

[0073] In step S2, the expression of the in-phase demodulation signal is shown in formula (2):

[0074] (2)

[0075] The expression of the quadrature demodulation signal is shown in formula (3):

[0076] (3).

[0077] From the above formula, the phase-sensitive demodulation error in the circuit is derived from the difference between the phase shift of the to-be-demodulated signal output by the detection mode and the phase of the demodulation reference signal generated by the phase-locked loop , and in the ideal case , at this time, the in-phase demodulation signal and the quadrature demodulation signal are completely decoupled.

[0078] In steps S3 and S4, the resonator detection mode output signal is processed by phase shift to generate a signal with a phase left shift of 22.5°, and the expression is:

[0079] (4)

[0080] At the same time, by adjusting the phase control word of the voltage-controlled oscillator (NCO1), the demodulation reference signal is also right shifted by 22.5°, and the new in-phase demodulation signal and the quadrature demodulation signal are respectively and .

[0081] In step S5, the expression of the new in-phase demodulation signal is shown as formula (5):

[0082] (5)

[0083] The expression of the new quadrature demodulation signal is shown as formula (6):

[0084] (6).

[0085] In step S6, the fitting process of the fitting curve equation includes the following steps:

[0086] Since the frequency information and the phase information of the demodulation reference signal output through the PLL loop are consistent with the input signal, the relationship between the phase error and the phase shift of the driving mode is shown as formula (7):

[0087] (7)

[0088] wherein, represents the phase shift of the driving mode, represents the phase error, represents the phase of the demodulation reference signal;

[0089] According to the above formula (7), when and only when , i.e. , the following equation is satisfied:

[0090] (8)

[0091] (9)

[0092] Therefore, analyzing whether there is a phase error in the measurement and control circuit can be converted into judging whether the above equations (8) and (9) are established. When and only when the equations are established, the phase error of the system is zero, which is specifically manifested as the point of Figure 2 . In this embodiment, according to actual needs, according to the difference between the left and right sides of the above equations (8) and (9), the amplitude or is selected, and then the amplitude is fitted with the phase error to obtain the fitting curve equation.

[0093] When the above equations (8) and (9) are not established, the fitting curve equation of the difference between the phase error and the left and right sides is determined. When the parameters of the resonator are determined, the relationship between the two is shown as Figure 3 . Figure 4 ​The output voltage of the amplitude comparison module corresponding to different phase error inputs is shown, and it can be seen from the figure that the phase error can be obtained according to the amplitude of the output signal of the amplitude comparison module Figure 4 . The phase error is compensated by phase shift processing of the modulation signals and , and the phase-compensated modulation signals and are finally output. Figure 5 The influence of the phase error on the quadrature rejection voltage output when the external angular rate input changes before and after the phase error compensation is shown. It can be seen from the figure that the output of the quadrature rejection voltage is stable after the phase error is eliminated.

[0094] Embodiment Two

[0095] Based on the same inventive concept as Embodiment One, the present embodiment discloses a full-symmetry MEMS resonator phase demodulation error identification and compensation system, which specifically comprises:

[0096] a signal acquisition module, configured to acquire a detection modal output signal and a demodulation reference signal;

[0097] a signal phase shift module, configured to left shift the phase of the detection modal output signal by 22.5° to obtain a phase-shifted detection modal output signal, and right shift the phase of the demodulation reference signal by 22.5° to obtain a phase-shifted demodulation reference signal;

[0098] a signal demodulation module, configured to perform in-phase demodulation and quadrature demodulation on the detection modal output signal and the demodulation reference signal, and filter out high-frequency components by using a low-pass filter to obtain an in-phase demodulation signal and a quadrature demodulation signal; and perform multiplication demodulation on the phase-shifted detection modal output signal and the phase-shifted demodulation reference signal to obtain new in-phase demodulation signals and quadrature demodulation signals;

[0099] an amplitude comparison module, configured to compare the amplitudes of the in-phase demodulation signal and the quadrature demodulation signal with the new in-phase demodulation signals and the quadrature demodulation signals, and obtain a phase error by fitting a curve equation;

[0100] a phase compensation module, configured to correct the phase of a modulation signal according to the phase error to realize compensation of the phase error.

[0101] The specific functions of the above modules are referred to the related contents in the method of Embodiment One, and will not be described here.

[0102] Embodiment Three

[0103] The embodiment provides a computer readable storage medium, which stores computer programs / instructions, and the computer programs / instructions are executed by a processor to realize steps of the full-symmetry MEMS resonator phase demodulation error identification and compensation method in any one of the embodiment one.

[0104] Embodiment four:

[0105] The embodiment provides a computer device / system, which refers to FIG. 1 and comprises the following components. Figure 3

[0106] a memory for storing computer programs / instructions;

[0107] a processor for executing the computer programs / instructions to realize steps of the full-symmetry MEMS resonator phase demodulation error identification and compensation method in any one of the embodiment one.

[0108] Embodiment five:

[0109] The embodiment provides a computer program product, which comprises computer programs / instructions, and the computer programs / instructions are executed by a processor to realize steps of the full-symmetry MEMS resonator phase demodulation error identification and compensation method in any one of the embodiment one.

[0110] Those skilled in the art should understand that the embodiments of the present application can be provided as a method, a system, or a computer program product. Therefore, the present application can take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Moreover, the present application can take the form of a computer program product implemented on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROMs, optical storage devices, etc.) containing computer-usable program code.

[0111] The present application is described with reference to flowcharts and / or block diagrams of the method, device (system), and computer program product according to the embodiments of the present application. It should be understood that each flow and / or block in the flowcharts and / or block diagrams, and the combination of the flows and / or blocks in the flowcharts and / or block diagrams can be realized by computer program instructions. These computer program instructions can be provided to a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing devices to produce a machine, so that the instructions executed by the computer or other programmable data processing devices produce a device that implements the functions specified in the flowcharts and / or block diagrams. Figure 1 The device that realizes the functions specified in one flow or multiple flows and / or one block or multiple blocks. Figure 1 The device that realizes the functions specified in one flow or multiple flows and / or one block or multiple blocks.

[0112] ​These computer program instructions can also be stored in a computer readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer readable memory produce an article of manufacture including instructions which implement the flow Figure 1 The flow or flows and / or blocks Figure 1 The flow or flows and / or blocks

[0113] These computer program instructions can also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions that are executed on the computer or other programmable apparatus provide steps for implementing the flow Figure 1 The flow or flows and / or blocks Figure 1 The flow or flows and / or blocks

[0114] The embodiments of the present application described above are merely intended to illustrate the present application, but are not intended to limit the present application. The above-described embodiments are merely illustrative, and are not intended to limit the present application, and any person skilled in the art can make various modifications without departing from the spirit and scope of the present application, and these are intended to be within the scope of the present application.

Claims

1. An all-symmetric MEMS resonator phase demodulation error identification and compensation method, characterized in that, The method comprises the following steps: acquiring a detection mode output signal, a demodulation reference signal and a modulation signal; performing in-phase demodulation and quadrature demodulation on the detection mode output signal and the demodulation reference signal, and filtering high-frequency components by using a low-pass filter to obtain an in-phase demodulation signal and a quadrature demodulation signal; left-shifting the phase of the detection mode output signal by 22.5° to obtain a phase-shifted detection mode output signal; right-shifting the phase of the demodulation reference signal by 22.5° to obtain a phase-shifted demodulation reference signal; performing multiplication demodulation on the phase-shifted demodulation reference signal and the phase-shifted detection mode output signal to obtain new in-phase demodulation signals and quadrature demodulation signals; performing amplitude comparison on the in-phase demodulation signal and the quadrature demodulation signal and the new in-phase demodulation signal and the quadrature demodulation signal, and obtaining a phase error by fitting a curve equation; correcting the phase of the modulation signal according to the phase error to compensate for the phase error.

2. The all-symmetric MEMS resonator phase demodulation error identification and compensation method of claim 1, wherein, The detection mode output signal is obtained by formula (1): （1） wherein represents the full symmetric MEMS resonator at the detection modal output signal at the time instant represents the in-phase displacement amplitude, represents the quadrature displacement amplitude, represents the analog front-end amplification gain coefficient, represents the resonator's resonance frequency, represents the total phase shift of the signal, represents the phase shift of the front-end amplification circuit, represents the phase shift of the ADC conversion, represents the phase shift of the driving modal, represents the phase shift of the detection modal, represents the phase shift of the DAC conversion, represents the phase shift of the modulation signal; The demodulation reference signal is obtained by a phase-locked loop, comprising and wherein, denotes the resonance frequency of the resonator, denotes the phase of the demodulation reference signal.

3. The all-symmetric MEMS resonator phase demodulation error identification and compensation method of claim 2, wherein, The in-phase demodulation signal is represented by formula (2): （2） The quadrature demodulation signal is represented by formula (3): （3）。 4. The all-symmetric MEMS resonator phase demodulation error identification and compensation method of claim 2, wherein, The phase-shifted detection mode output signal is represented by formula (4): （4） The generating the phase-shifted demodulation reference signal includes and .

5. The all-symmetric MEMS resonator phase demodulation error identification and compensation method of claim 4, wherein, The new in-phase demodulation signal is represented by formula (5): （5） The new quadrature demodulation signal is represented by formula (6): （6）。 6. The all-symmetric MEMS resonator phase demodulation error identification and compensation method of claim 5, wherein, The fitting process of the curve equation comprises the following steps: The relationship between the phase error and the phase shift of the driving mode is represented by formula (7): （7） wherein, denotes a phase shift of the drive modality, denotes a phase error, denotes a phase of the demodulation reference signal; According to the above equation (7), At this time, the following equation is satisfied: （8） （9） The difference between the left and right sides of the above equations (8) and (9) is fitted with the phase error to obtain the curve equation.

7. An all-symmetric MEMS resonator phase demodulation error identification and compensation system, characterized in that, The method comprises the following steps: The signal acquisition module is configured to acquire a detection mode output signal and a demodulation reference signal; The signal phase-shifting module is configured to left-shift the phase of the detection mode output signal by 22.5° to obtain a phase-shifted detection mode output signal, and right-shift the phase of the demodulation reference signal by 22.5° to obtain a phase-shifted demodulation reference signal; The signal demodulation module is configured to perform in-phase demodulation and quadrature demodulation on the detection mode output signal and the demodulation reference signal, and filter high-frequency components by using a low-pass filter to obtain an in-phase demodulation signal and a quadrature demodulation signal, and perform multiplication demodulation on the phase-shifted demodulation reference signal and the phase-shifted detection mode output signal to obtain new in-phase demodulation signals and quadrature demodulation signals; The amplitude comparison module is configured to perform amplitude comparison on the in-phase demodulation signal and the quadrature demodulation signal and the new in-phase demodulation signal and the quadrature demodulation signal, and obtain a phase error by fitting a curve equation; The phase compensation module is configured to correct the phase of the modulation signal according to the phase error to compensate for the phase error.

8. A computer readable storage medium having stored thereon computer programs / instructions, characterized in that, The computer program / instructions are executed by the processor to implement the steps of the full-symmetry MEMS resonator phase demodulation error identification and compensation method in any one of claims 1-6.

9. A computer apparatus / device / system, characterized by, The method comprises the following steps: The memory is configured to store computer programs / instructions; A processor for executing the computer program / instructions to implement the steps of the all-symmetric MEMS resonator phase demodulation error identification and compensation method of any one of claims 1-6.

10. A computer program product comprising computer programs / instructions, characterized in that, The computer program / instructions, when executed by the processor, implement the steps of the all-symmetric MEMS resonator phase demodulation error identification and compensation method of any one of claims 1-6.

Images