A UV curing machine, control method and storage medium

Abstract

This invention provides an ultraviolet (UV) curing machine, a control method, and a storage medium. The UV curing machine includes: a process chamber comprising a quartz window, a temperature control module, and a pressure control module; wherein the quartz window is used to seal the process chamber and allow UV light to pass through the quartz window to irradiate the sample inside the process chamber for UV curing; the temperature control module and the pressure control module are used to provide a corresponding first temperature and first pressure process environment during the UV curing process of the sample, and to provide a corresponding second temperature and second pressure process environment during the hydrogen permeation process of the quartz window; and a hydrogen pipeline connected to the process chamber for supplying hydrogen to the process chamber during the hydrogen permeation process of the quartz window.

Description

Technical Field

[0001] This invention relates to the field of thin film deposition technology, and in particular to an ultraviolet curing machine, a control method for the ultraviolet curing machine, and a computer-readable storage medium. Background Technology

[0002] In the field of semiconductor thin film deposition, ultraviolet (UV) curing equipment utilizes UV irradiation to effectively improve film performance. However, prolonged UV irradiation can easily lead to the formation of E′ core (≡Si·) defects in the quartz window of the optical lens within the process chamber. Unpaired electrons within these E′ cores can absorb photons of a specific wavelength and transition to the conduction band, generating an absorption band centered at a wavelength of 200–300 nm (e.g., 215 nm). This results in a significant decrease in the UV transmittance of the quartz window. Therefore, existing UV curing equipment generally requires periodic disassembly and replacement of the quartz window to ensure normal equipment operation.

[0003] In order to overcome the above-mentioned defects in the existing technology, there is an urgent need in the field for a UV curing machine technology to perform in-situ hydrogen permeation treatment on the quartz window of the UV curing machine without disassembly, thereby extending the service life of the quartz window, improving the working efficiency of the machine, and enhancing the working quality of the machine. Summary of the Invention

[0004] The following provides a brief overview of one or more aspects to offer a basic understanding of them. This overview is not an exhaustive summary of all conceived aspects, nor is it intended to identify key or decisive elements of all aspects, nor to define the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed descriptions that follow.

[0005] To overcome the aforementioned deficiencies in the existing technology, this invention provides an ultraviolet curing machine, a control method for the ultraviolet curing machine, and a computer-readable storage medium. This allows for in-situ hydrogen permeation treatment of the quartz window without disassembly, utilizing the existing temperature and pressure control modules of the ultraviolet curing machine. This extends the service life of the quartz window, improves the machine's efficiency, and enhances its working quality.

[0006] Specifically, the ultraviolet curing apparatus provided according to the first aspect of the present invention includes: a process chamber comprising a quartz window, a temperature control module, and a pressure control module, wherein the quartz window is used to seal the process chamber and allow ultraviolet light to pass through the quartz window to irradiate the sample inside the process chamber for ultraviolet curing; the temperature control module and the pressure control module are used to provide a corresponding first temperature and first pressure process environment in the ultraviolet curing process of the sample, and to provide a corresponding second temperature and second pressure process environment in the hydrogen permeation process of the quartz window; and a hydrogen pipeline connected to the process chamber for supplying hydrogen to the process chamber in the hydrogen permeation process of the quartz window.

[0007] Furthermore, in some embodiments of the present invention, the temperature control module includes: a heating plate disposed inside the process chamber for carrying and heating the sample to perform the ultraviolet curing process; and / or a heating sleeve disposed before the process chamber and surrounding the hydrogen pipeline for preheating the hydrogen introduced into the process chamber to perform the hydrogen permeation process on the quartz window.

[0008] Furthermore, in some embodiments of the present invention, the hydrogen pipeline includes: a manual valve for closing the hydrogen pipeline during the ultraviolet curing process and opening the hydrogen pipeline during the hydrogen permeation process; and / or a filter for pre-treating the hydrogen gas introduced into the process chamber to prevent impurities from contaminating the process chamber.

[0009] Furthermore, in some embodiments of the present invention, the hydrogen pipeline further includes a diaphragm valve, a pressure gauge, a pressure regulator, and a mass flow controller, for adjusting the pressure and flow rate of the hydrogen introduced into the process chamber to meet the requirements of the hydrogen permeation process.

[0010] Furthermore, in some embodiments of the present invention, in the first stage of the hydrogen permeation process, the hydrogen pipeline supplies hydrogen to the process chamber at a preset first flow rate. The pressure control device controls the gas pressure in the process chamber at a second pressure. The temperature control device controls the temperature in the process chamber at a second temperature. In response to the first stage lasting for a preset first duration, the hydrogen permeation process enters a second stage, whereby the hydrogen pipeline reduces the hydrogen flow rate into the process chamber to a preset second flow rate, and the pressure control device reduces the gas pressure in the process chamber to a preset third pressure and maintains it for a second duration to complete the hydrogen permeation process on the quartz window.

[0011] Furthermore, in some embodiments of the present invention, the curing machine further includes: a counter for counting the number of times the ultraviolet curing process is performed, and triggering the hydrogen permeation process when the number of times reaches a preset threshold; and / or a timer for counting the time elapsed since the last hydrogen permeation process, and triggering the hydrogen permeation process when the time elapsed reaches a preset time threshold; and / or a sensor for monitoring the transmittance of the quartz window, and triggering the hydrogen permeation process when the transmittance of the quartz window is lower than a preset transmittance threshold.

[0012] Furthermore, in some embodiments of the present invention, the process chamber further includes: an ultraviolet light source for providing first ultraviolet light to the sample to cure the film deposited thereon; and a reflection device for reflecting second ultraviolet light emitted from the ultraviolet light source back to the sample to cure the film deposited thereon.

[0013] Furthermore, the control method for an ultraviolet curing machine provided according to a second aspect of the present invention includes the following steps: providing a process environment of a first temperature and a first pressure to a sample in a process chamber via a temperature control module and a pressure control module to perform an ultraviolet curing process on a thin film deposited on the sample; and providing a process environment of a second temperature and a second pressure to a quartz window in the process chamber via the temperature control module and the pressure control module, and providing hydrogen to the process chamber via a hydrogen pipeline to perform a hydrogen permeation process on the quartz window.

[0014] Further, in some embodiments of the present invention, the step of providing a process environment of a second temperature and a second pressure to the quartz window in the process chamber via the temperature control module and the pressure control module, and supplying hydrogen to the process chamber via a hydrogen pipeline to perform a hydrogen permeation process on the quartz window includes: in the first stage of the hydrogen permeation process, controlling the hydrogen pipeline to supply hydrogen to the process chamber at a preset first flow rate, controlling the pressure control device to control the gas pressure in the process chamber at the second pressure, and controlling the temperature control device to control the temperature in the process chamber at the second temperature; in response to the duration of the first stage reaching a preset first duration, determining that the hydrogen permeation process has entered the second stage, thereby controlling the hydrogen pipeline to reduce the flow rate of hydrogen entering the process chamber to a preset second flow rate, and controlling the pressure control device to reduce the gas pressure in the process chamber to a preset third pressure; and in response to the duration of the second stage reaching a preset second duration, determining that the hydrogen permeation process on the quartz window is completed.

[0015] Furthermore, in some embodiments of the present invention, before providing a second temperature and a second pressure process environment to the quartz window in the process chamber via the temperature control module and the pressure control module, and supplying hydrogen to the process chamber via a hydrogen pipeline to perform a hydrogen permeation process on the quartz window, the control method of the ultraviolet curing machine includes the following steps: counting the number of times the ultraviolet curing process is implemented, and triggering the hydrogen permeation process when the number of implementations reaches a preset threshold; and / or counting the time elapsed since the last implementation of the hydrogen permeation process, and triggering the hydrogen permeation process when the time elapsed reaches a preset time threshold; and / or monitoring the transmittance of the quartz window, and triggering the hydrogen permeation process when the transmittance of the quartz window is lower than a preset transmittance threshold.

[0016] Furthermore, according to the third aspect of the present invention, a computer-readable storage medium is provided thereon storing computer instructions. When the computer instructions are executed by a processor, the control method for the ultraviolet curing machine as described in the second aspect of the present invention is implemented. Attached Figure Description

[0017] The above-described features and advantages of the present invention will be better understood after reading the following detailed description of embodiments of the present disclosure in conjunction with the accompanying drawings. In the drawings, components are not necessarily drawn to scale, and components having similar related characteristics or features may have the same or similar reference numerals.

[0018] Figure 1 A schematic diagram of the structure of a UV curing machine provided according to some embodiments of the present invention is shown.

[0019] Figure 2 A schematic diagram of a hydrogen pipeline provided according to some embodiments of the present invention is shown.

[0020] Figure 3 A control method for a UV curing machine according to some embodiments of the present invention is shown.

[0021] Figure label:

[0022] 10 Process Chambers

[0023] 101 Quartz Window

[0024] 102 Pressure Control Module

[0025] 1031 Heating Plate

[0026] 1032 Heating jacket

[0027] 104 Ultraviolet Light Source

[0028] 105 Reflecting Device

[0029] 20 Hydrogen pipelines

[0030] 201 Manual Valve

[0031] 202 Filter

[0032] 203 Diaphragm Valve

[0033] 204 pressure gauge

[0034] 205 Voltage Regulator

[0035] 206 Mass Flow Controller

[0036] 30 Gas Source Detailed Implementation

[0037] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. Although the description of the present invention is presented in conjunction with preferred embodiments, this does not mean that the features of the invention are limited to these embodiments. On the contrary, the purpose of describing the invention in conjunction with embodiments is to cover other options or modifications that may be derived based on the claims of the present invention. To provide a thorough understanding of the invention, many specific details will be included in the following description. The invention may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of the invention, some specific details will be omitted in the description.

[0038] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0039] Furthermore, the terms "upper," "lower," "left," "right," "top," "bottom," "horizontal," and "vertical" used in the following description should be understood as the orientations shown in the relevant paragraphs and accompanying drawings. These relative terms are for illustrative purposes only and do not imply that the described apparatus must be manufactured or operated in a specific orientation, and therefore should not be construed as limiting the invention.

[0040] It is understood that although terms such as "first," "second," and "third" may be used herein to describe various components, regions, layers, and / or parts, these components, regions, layers, and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, regions, layers, and / or parts. Therefore, the first components, regions, layers, and / or parts discussed below may be referred to as second components, regions, layers, and / or parts without departing from some embodiments of the present invention.

[0041] As mentioned above, existing UV curing machines generally require regular disassembly and replacement of the quartz window to ensure normal operation of the equipment. As a result, they have the drawbacks of complex processes and long maintenance cycles, and are prone to external contamination entering the process chamber.

[0042] To overcome the aforementioned deficiencies in the existing technology, this invention provides an ultraviolet curing machine, a control method for the ultraviolet curing machine, and a computer-readable storage medium. This allows for in-situ hydrogen permeation treatment of the quartz window without disassembly, utilizing the existing temperature and pressure control modules of the ultraviolet curing machine. This extends the service life of the quartz window, improves the machine's efficiency, and enhances its working quality.

[0043] In some non-limiting embodiments, the control method for the ultraviolet curing machine provided in the second aspect of the present invention can be implemented based on the ultraviolet curing machine provided in the first aspect of the present invention. Specifically, the ultraviolet curing machine may be equipped with a memory and a processor. The memory includes, but is not limited to, the computer-readable storage medium provided in the third aspect of the present invention, on which computer instructions are stored. The processor is connected to the memory and configured to execute the computer instructions stored in the memory to implement the control method for the ultraviolet curing machine of the second aspect of the present invention.

[0044] Please refer to the details. Figure 1 and Figure 2 . Figure 1 A schematic diagram of the structure of a UV curing machine provided according to some embodiments of the present invention is shown. Figure 2 A schematic diagram of a hydrogen pipeline provided according to some embodiments of the present invention is shown.

[0045] like Figure 1 and Figure 2As shown, the UV curing machine includes a process chamber 10 and a hydrogen pipeline 20. The process chamber 10 includes a quartz window 101, a pressure control module 102, a temperature control module, a UV light source 104, and a reflector 105. The quartz window 101 encloses the upper space of the process chamber 10 and allows UV light provided by the upper UV light source 104 and / or reflector 105 to pass through the quartz window 101 and irradiate the sample inside the process chamber 10 for UV curing. The temperature control module and pressure control module 102 provide a corresponding first temperature and first pressure process environment during the UV curing process of the sample, and a corresponding second temperature and second pressure process environment during the hydrogen permeation process of the quartz window 101. The UV light source 104 is positioned above the quartz window 101 and provides first UV light to the sample in the process chamber 10 for UV curing of the deposited film. The reflector 105 surrounds the upper part of the ultraviolet light source 104 and is used to reflect the second ultraviolet light emitted by the ultraviolet light source 104 toward the sample for ultraviolet curing of the film deposited on it. The first end of the hydrogen conduit 20 is connected to the hydrogen source 30, and the second end is connected to the process chamber 10, for supplying hydrogen to the process chamber 10 during the hydrogen permeation process of the quartz window 101.

[0046] Furthermore, in some embodiments, the temperature control module includes a heating plate 1031 and a heating jacket 1032. The heating plate 1031 is located inside the process chamber 10 and is used to hold and heat the sample for ultraviolet curing. The heating jacket 1032 is located before the process chamber 10 and surrounds the hydrogen pipeline 20 for preheating the hydrogen introduced into the process chamber 10 for hydrogen permeation of the quartz window 101.

[0047] In addition, such as Figure 2 As shown, the hydrogen pipeline 20 may include a manual valve 201 and a filter 202. The manual valve 201 is used to close the hydrogen pipeline 20 during the UV curing process and to open the hydrogen pipeline 20 during the hydrogen permeation process. The filter 202 is used to pre-treat the hydrogen entering the process chamber 10 to prevent impurities from contaminating the process chamber 10.

[0048] Furthermore, in some embodiments, the hydrogen pipeline 20 may preferably include a diaphragm valve 203, a pressure gauge 204, a pressure regulator 205, and a mass flow controller 206, for adjusting the pressure and flow rate of the hydrogen entering the process chamber 10 to meet the requirements of the hydrogen permeation process.

[0049] Furthermore, in some embodiments, the curing machine may also include a counter, a timer, and / or a sensor. Here, the counter is used to count the number of times the UV curing process is performed, and triggers the hydrogen permeation process when the number reaches a preset threshold (e.g., 5 to 100 times). The timer is used to count the time elapsed since the last hydrogen permeation process, and triggers the hydrogen permeation process when it reaches a preset time threshold (e.g., 300 to 500 hours). The sensor is used to monitor the transmittance of the quartz window 101, and triggers the hydrogen permeation process when the transmittance of the quartz window 101 is lower than a preset transmittance threshold (e.g., 70% to 80%).

[0050] The working principle of the aforementioned UV curing machine will be described below with reference to some embodiments of wafer position detection methods. Those skilled in the art will understand that these embodiments of the UV curing machine control methods are merely non-limiting implementations provided by the present invention, intended to clearly demonstrate the main concepts of the invention and provide specific solutions convenient for public implementation, rather than limiting all functions or operating modes of the UV curing machine. Similarly, the control methods of this UV curing machine are also merely non-limiting implementations provided by the present invention, and do not constitute a limitation on the executing entity or execution order of each step in these UV curing machine control methods.

[0051] Please refer to the reference. Figures 1-3 , Figure 3 A control method for a UV curing machine according to some embodiments of the present invention is shown.

[0052] like Figures 1-3 As shown, during the operation of the UV curing machine, the UV curing machine can first provide a first temperature and first pressure process environment to the sample in the process chamber 10 through its temperature control module (e.g., heating plate 1031) and pressure control module 102, and provide ultraviolet light to it through the ultraviolet light source 104 and the reflection device 105 to perform ultraviolet curing process on the film deposited on the sample.

[0053] Meanwhile, in some embodiments, the UV curing machine can preferably use the counters, timers and / or sensors configured therein to monitor the state of the quartz window 101 in real time and determine the timing of triggering the hydrogen permeation process based on the trigger signals provided therein.

[0054] For example, a UV curing machine can use a counter to count the number of times the UV curing process is performed, and trigger a hydrogen permeation process when the number of times reaches a preset threshold (e.g., 5 to 100 times).

[0055] For example, a UV curing machine can use a timer to count the time elapsed since the last hydrogen permeation process, and trigger the hydrogen permeation process when it reaches a preset time threshold (e.g., 300-500 hours).

[0056] For example, the UV curing machine can monitor the transmittance of the quartz window 101 via a sensor, and trigger the hydrogen permeation process when the transmittance of the quartz window 101 is lower than a preset transmittance threshold (e.g., 70% to 80%).

[0057] Subsequently, in response to the trigger signals provided by the aforementioned counters, timers, and sensors, and / or the trigger commands provided by the user, the UV curing machine can remove the sample from the process chamber and switch the process mode. It provides a second temperature and a second pressure process environment to the quartz window 101 in the process chamber 10 via the temperature control module (e.g., heating plate 1031) and the pressure control module 102, and provides hydrogen at the corresponding temperature to the process chamber 10 via the temperature control module (e.g., heating jacket 1032) and the hydrogen pipeline 20 to perform an in-situ hydrogen permeation process on the quartz window 101 without disassembly.

[0058] Specifically, in the first stage of the hydrogen permeation process, the UV curing machine can first control the hydrogen pipeline 20 to supply hydrogen to the process chamber 10 at a preset first flow rate (e.g., 400-6000 sccm), control the pressure control device 102 to control the gas pressure in the process chamber 10 to a second pressure (e.g., 5 atm), and control the temperature control device to control the temperature in the process chamber 10 to a second temperature (e.g., 200-500°C).

[0059] Subsequently, in response to the first stage lasting for a preset first duration (e.g., 80–120 hours), the UV curing machine can determine that the first stage of the hydrogen permeation process has been completed and begin the second stage of the hydrogen permeation process. Then, in the second stage of the hydrogen permeation process, the UV curing machine can control the hydrogen pipeline 20 to reduce the hydrogen flow rate into the process chamber 10 to a preset second flow rate (e.g., 300–2000 sccm), and control the pressure control device 102 to reduce the gas pressure in the process chamber 10 to a preset third pressure (e.g., 3 atm).

[0060] Subsequently, in response to the second stage lasting for a preset second duration (e.g., 400-800 hours), the UV curing machine can determine that the hydrogen permeation process on the quartz window 101 has been completed.

[0061] Therefore, compared to existing technologies that require disassembling the quartz window 101 and then using specialized equipment for hydrogen permeation, this invention utilizes the hydrogen pipeline 20 added to the UV curing machine to introduce hydrogen into the process chamber 10. By using the existing pressure control module 102 and temperature control module of the UV curing machine, the pressure and temperature of the gas within the chamber are precisely controlled, allowing for direct, in-situ hydrogen permeation of the quartz window 101 without disassembly. This increases the hydrogen molecule content in the quartz window 101 glass to 3 × 10⁻⁶. 18 molecules / cm 3 It restores the transmittance of the quartz window 101, which has decreased transmittance, to more than 86% at wavelengths of 200–300 nm (e.g., 215 nm).

[0062] In summary, the present invention provides an ultraviolet curing machine, a control method for the ultraviolet curing machine, and a computer-readable storage medium, all of which can utilize the existing temperature control module and pressure control module of the ultraviolet curing machine to perform hydrogen permeation treatment on its quartz window 101 without disassembly, thereby extending the service life of the quartz window, improving the working efficiency of the machine, and enhancing the working quality of the machine.

[0063] Although the methods described above are illustrated and depicted as a series of actions for the sake of simplicity, it should be understood and appreciated that these methods are not limited by the order of the actions, as some actions may occur in a different order and / or concurrently with other actions from the illustrations and descriptions herein or not illustrated and described herein but which may be understood by those skilled in the art, according to one or more embodiments.

[0064] The prior description of this disclosure is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to this disclosure will be apparent to those skilled in the art, and the general principles defined herein may be applied to other variations without departing from the spirit or scope of this disclosure. Therefore, this disclosure is not intended to be limited to the examples and designs described herein, but should be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A UV curing machine, characterized in that, include: A process chamber includes a quartz window, a temperature control module, and a pressure control module. The quartz window seals the process chamber while allowing ultraviolet light to pass through and irradiate the sample within for ultraviolet curing. The temperature control module and the pressure control module provide a first temperature and a first pressure environment for the ultraviolet curing process of the sample, and a second temperature and a second pressure environment for the hydrogen permeation process of the quartz window. A hydrogen pipeline, connected to the process chamber, is used to supply hydrogen to the process chamber during the hydrogen permeation process of the quartz window. In the first stage of the hydrogen permeation process, the hydrogen pipeline supplies hydrogen to the process chamber at a preset first flow rate. The pressure control module controls the gas pressure in the process chamber at a second pressure, and the temperature control module controls the temperature in the process chamber at a second temperature. In response to the first stage lasting for a preset first duration, the hydrogen permeation process enters the second stage. The hydrogen pipeline reduces the hydrogen flow rate into the process chamber to a preset second flow rate, and the pressure control module reduces the gas pressure in the process chamber to a preset third pressure and maintains it for a second duration to complete the hydrogen permeation process of the quartz window.

2. The ultraviolet curing machine as described in claim 1, characterized in that, The temperature control module includes: A heating plate, located inside the process chamber, is used to hold and heat the sample for the UV curing process; and / or A heating jacket, located before the process chamber and surrounding the hydrogen pipeline, is used to preheat the hydrogen gas introduced into the process chamber for the hydrogen permeation process on the quartz window.

3. The ultraviolet curing machine as described in claim 1, characterized in that, The hydrogen pipeline includes: A manual valve is used to close the hydrogen pipeline during the UV curing process and open the hydrogen pipeline during the hydrogen permeation process; and / or A filter is used to pre-treat the hydrogen gas introduced into the process chamber to prevent impurities from contaminating the process chamber.

4. The ultraviolet curing machine as described in claim 3, characterized in that, The hydrogen pipeline also includes a diaphragm valve, a pressure gauge, a pressure regulator, and a mass flow controller, used to regulate the pressure and flow rate of the hydrogen entering the process chamber to meet the requirements of the hydrogen permeation process.

5. The ultraviolet curing machine as described in claim 1, characterized in that, Also includes A counter is used to count the number of times the ultraviolet curing process is performed, and to trigger the hydrogen permeation process when the number of times reaches a preset threshold; and / or A timer is used to count the time elapsed since the last hydrogen permeation process, and to trigger the hydrogen permeation process when the time reaches a preset time threshold; and / or A sensor is used to monitor the transmittance of the quartz window and trigger the hydrogen permeation process when the transmittance of the quartz window is lower than a preset transmittance threshold.

6. The ultraviolet curing machine as described in claim 1, characterized in that, The process chamber also includes: An ultraviolet light source is used to provide first ultraviolet light to the sample for ultraviolet curing of the film deposited thereon; and A reflective device is used to reflect the second ultraviolet light emitted from the ultraviolet light source toward the sample to cure the film deposited on it with ultraviolet light.

7. A control method for an ultraviolet curing machine, characterized in that, Includes the following steps: The temperature control module and pressure control module of the UV curing machine as described in any one of claims 1 to 6 provide a process environment of first temperature and first pressure to the sample in the process chamber to perform UV curing process on the film deposited on the sample. In the first stage of the hydrogen permeation process, the hydrogen pipeline is controlled to supply hydrogen to the process chamber at a preset first flow rate, the pressure control module is controlled to control the gas pressure in the process chamber at the second pressure, and the temperature control module is controlled to control the temperature in the process chamber at the second temperature. In response to the first stage lasting for a preset first duration, the hydrogen permeation process is determined to enter the second stage, thereby controlling the hydrogen pipeline to reduce the hydrogen flow rate into the process chamber to a preset second flow rate, and controlling the pressure control module to reduce the gas pressure in the process chamber to a preset third pressure. as well as In response to the second stage lasting for a preset second duration, the hydrogen permeation process on the quartz window is determined to be complete.

8. The control method for the ultraviolet curing machine as described in claim 7, characterized in that, The steps of the control method for the UV curing machine before providing a second temperature and second pressure process environment to the quartz window in the process chamber via the temperature control module and the pressure control module, and supplying hydrogen to the process chamber via a hydrogen pipeline to perform a hydrogen permeation process on the quartz window, include: The number of times the ultraviolet curing process is performed is counted, and the hydrogen permeation process is triggered when the number of times reaches a preset threshold; and / or The time elapsed since the last hydrogen permeation process is recorded, and the hydrogen permeation process is triggered when it reaches a preset time threshold; and / or The transmittance of the quartz window is monitored, and the hydrogen permeation process is triggered when the transmittance of the quartz window is lower than a preset transmittance threshold.

9. A computer-readable storage medium storing computer instructions thereon, characterized in that, When the computer instructions are executed by the processor, the control method for the ultraviolet curing machine as described in claim 7 or 8 is implemented.

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