An ultraviolet lamp tube with a supplementary structure and an ultraviolet lamp chamber

Abstract

The present invention discloses a supplementary structure for an ultraviolet lamp tube and an ultraviolet lamp chamber. The supplementary structure for the ultraviolet lamp tube includes: a supplementary part located at the tail ends on both sides of the lamp tube body for providing supplementary ultraviolet light; and a limiting part provided at the tail end of the supplementary part for detachably clamping and fixing the lamp tube body. Through the above-mentioned supplementary structure for the ultraviolet lamp tube, the edge light intensity of the ultraviolet lamp tube can be enhanced, thereby improving the overall illumination uniformity of the ultraviolet lamp tube, which is beneficial to improving the uniformity of the process effect.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing, and particularly relates to an ultraviolet lamp tube with a supplementary structure and an ultraviolet lamp chamber. Background Art

[0002] At present, the ultraviolet (UV) lamp tubes used in the semiconductor industry have the problem of uneven light intensity distribution. After the ultraviolet lamp tube is manufactured, generally, the light intensity in the middle of the lamp tube is stronger, while the light intensity at the edge is weaker, which will result in uneven overall light intensity distribution in the illuminated area. Even if the lamp tube is rotated around its center, there is still a situation where the light intensity in the middle of the illuminated area after rotational irradiation is stronger and the light intensity at the edge is weaker. This will lead to the defect that the process effect achieved by ultraviolet light irradiation has a weak edge process effect and a strong middle process effect, that is, the overall uniformity of the process is poor.

[0003] In order to solve the above problems existing in the prior art, there is an urgent need in the art for an improved ultraviolet lamp tube structure that can enhance the edge light intensity of the ultraviolet lamp tube, thereby improving the overall light illumination uniformity of the ultraviolet lamp tube and being beneficial to improving the uniformity of the process effect. Summary of the Invention

[0004] The following presents a brief overview of one or more aspects to provide a basic understanding of these aspects. This overview is not an exhaustive survey of all contemplated aspects, and is neither intended to identify key or decisive elements of all aspects nor to define the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed description that follows.

[0005] In order to overcome the above defects existing in the prior art, the present invention provides an ultraviolet lamp tube with a supplementary structure and an ultraviolet lamp chamber, which can enhance the edge light intensity of the ultraviolet lamp tube, thereby improving the overall light illumination uniformity of the ultraviolet lamp tube and being beneficial to improving the uniformity of the process effect.

[0006] Specifically, the above-mentioned ultraviolet lamp tube with a supplementary structure provided according to the first aspect of the present invention is used for process treatment in semiconductor manufacturing. The ultraviolet lamp tube includes: a lamp tube body and a supplementary structure. The lamp tube body is a multi-segment structure, including at least three waist-reducing structures. The first waist-reducing structure is located in the middle of the lamp tube body, and the second waist-reducing structure and the third waist-reducing structure are symmetrically distributed on both sides of the first waist-reducing structure. The waist-reducing diameters of the second waist-reducing structure and the third waist-reducing structure are the same and greater than the waist-reducing diameter of the first waist-reducing structure. The supplementary structure includes a supplementary part located at the tail ends on both sides of the lamp tube body for providing supplementary ultraviolet light, and the supplementary part includes increasing the tail ends on both sides of the lamp tube body to a first diameter distance; and a limiting part provided at the tail end of the supplementary part for detachably clamping and fixing the lamp tube body, wherein the diameter of the supplementary part is the largest.

[0007] Further, in some embodiments of the present invention, the first diameter distance is in the range of 16 mm to 17 mm.

[0008] Further, in some embodiments of the present invention, the waist-reducing size between the second waist-reducing structure and the third waist-reducing structure increases to a second size length, wherein the second size length is 150 mm.

[0009] Further, in some embodiments of the present invention, the waist-reducing arc between the first waist-reducing structure and the second waist-reducing structure / the third waist-reducing structure increases to a third waist-reducing arc, wherein the third waist-reducing arc is more than 5°.

[0010] Further, in some embodiments of the present invention, the tail end of the supplementary part extends a preset length, and the extended limiting part is used for detachably clamping into a corresponding slot.

[0011] Further, in some embodiments of the present invention, the supplementary structure further includes: a rotating mechanism connected to the lamp tube body to enable the lamp tube body to perform a rotational movement around its center point.

[0012] Further, in some embodiments of the present invention, the filling in the lamp tube body at least includes mercury vapor.

[0013] In addition, the above-mentioned ultraviolet lamp chamber provided according to the second aspect of the present invention includes a plurality of the above-mentioned ultraviolet lamp tubes provided according to the first aspect of the present invention. Each of the ultraviolet lamp tubes includes a lamp tube body for providing ultraviolet light and a supplementary structure of the ultraviolet lamp tube for providing supplementary ultraviolet light. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] After reading the detailed description of the embodiments of the present disclosure in conjunction with the following drawings, the above features and advantages of the present invention can be better understood. In the drawings, the components are not necessarily drawn to scale, and components having similar relevant characteristics or features may have the same or similar reference numerals.

[0015] Figure 1 The structural schematic diagram of an ultraviolet lamp chamber provided according to some embodiments of the present invention is shown;

[0016] Figure 2 is Figure 1 The cross-sectional view of the ultraviolet lamp chamber shown;

[0017] Figure 3 The structural schematic diagram of a supplementary structure of an ultraviolet lamp tube provided according to some embodiments of the present invention is shown;

[0018] Figure 4 The partial schematic diagram of the waist size of the supplementary structure of the ultraviolet lamp tube provided according to some embodiments of the present invention is shown;

[0019] Figure 5 The partial schematic diagram of the waist arc of the supplementary structure of the ultraviolet lamp tube provided according to some embodiments of the present invention is shown;

[0020] Figure 6 The partial schematic diagram of the limiting part of the supplementary structure of the ultraviolet lamp tube provided according to some embodiments of the present invention is shown; and

[0021] Figure 7 is Figure 6 The clamping schematic diagram of the limiting part shown.

[0022] Reference numerals:

[0023] 100 Ultraviolet lamp chamber;

[0024] 110 Ultraviolet lamp tube;

[0025] 111 Tube body;

[0026] 120 Primary reflector;

[0027] 130 Secondary reflector;

[0028] 140 Fixed sheet metal;

[0029] 141 Pressing piece;

[0030] 300 Supplementary structure of the ultraviolet lamp tube;

[0031] 310 Supplementary part;

[0032] 320 Limiting part;

[0033] 321 extension section;

[0034] 322 fixed section;

[0035] 331 first waist - shrinking structure;

[0036] 332 second waist - shrinking structure;

[0037] 333 third waist - shrinking structure;

[0038] R1 first diameter distance;

[0039] r1, r2, r3 waist - shrinking diameters;

[0040] L2 second dimensional length; and

[0041] α third waist - shrinking radian. Detailed implementation manners

[0042] The following specific embodiments illustrate the implementation manners of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. Although the description of the present invention will be introduced in conjunction with preferred embodiments, this does not mean that the features of this invention are limited to this implementation manner. On the contrary, the purpose of introducing the invention in conjunction with the implementation manner is to cover other alternatives or modifications that may be extended based on the claims of the present invention. In order to provide a deep understanding of the present invention, many specific details will be included in the following description. The present invention can also be implemented without using these details. In addition, in order to avoid confusing or obscuring the key points of the present invention, some specific details will be omitted in the description.

[0043] In the description of the present invention, it should be noted that, unless otherwise clearly specified and defined, the terms "mounted", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0044] In addition, the "upper", "lower", "left", "right", "top", "bottom", "horizontal", and "vertical" used in the following description should be understood as the orientations shown in this section and the related drawings. This relative term is only for convenience of description, and it does not mean that the device described needs to be manufactured or operated in a specific orientation, so it should not be construed as a limitation to the present invention.

[0045] It is understood that although terms such as "first", "second", "third", etc. may be used herein to describe various components, regions, layers, and / or parts, these components, regions, layers, and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, regions, layers, and / or parts. Therefore, the first component, region, layer, and / or part discussed below may be referred to as the second component, region, layer, and / or part without departing from some embodiments of the present invention.

[0046] As described above, currently, in the semiconductor industry, the ultraviolet (UV) lamp tubes used have the problem of uneven light intensity distribution. After the UV lamp tubes are manufactured, generally, the light intensity in the middle of the lamp tube is stronger, while the light intensity at the edge is weaker, which will result in uneven overall light intensity distribution in the illuminated area. Even if the lamp tube is rotated around its center, after the rotation irradiation, the illuminated area still has a situation where the light intensity in the middle is stronger and the light intensity at the edge is weaker. This will lead to the defect that the process effect achieved by the ultraviolet light irradiation has a weak edge process effect and a strong middle process effect, that is, the overall uniformity of the process is poor.

[0047] To solve the above problems existing in the prior art, the present invention provides an ultraviolet lamp tube with a supplementary structure and an ultraviolet lamp chamber, which can enhance the edge light intensity of the ultraviolet lamp tube, thereby improving the overall illumination uniformity of the ultraviolet lamp tube and being beneficial to improving the uniformity of the process effect.

[0048] In some non-limiting embodiments, the above-mentioned ultraviolet lamp tube with a supplementary structure provided by the first aspect of the present invention can be configured in the above-mentioned ultraviolet lamp chamber provided by the second aspect of the present invention.

[0049] The working principle of the above-mentioned ultraviolet lamp chamber will be described below in conjunction with some embodiments of the ultraviolet lamp tube with a supplementary structure. Those skilled in the art can understand that these embodiments of the ultraviolet lamp tube with a supplementary structure are only some non-limiting implementation manners provided by the present invention, aiming to clearly show the main concept of the present invention and provide some specific solutions convenient for the public to implement, rather than being used to limit all working modes or all functions of the ultraviolet lamp chamber. Similarly, the ultraviolet lamp chamber is also only a non-limiting implementation manner provided by the present invention and does not limit the configuration main body of these ultraviolet lamp tubes with a supplementary structure.

[0050] Please refer to Figure 1 and Figure 2 , Figure 1 which shows a schematic structural diagram of an ultraviolet lamp chamber provided according to some embodiments of the present invention, Figure 2 is Figure 1 a cross-sectional view of the ultraviolet lamp chamber shown.

[0051] As shown in Figure 1 and Figure 2As shown, in some embodiments of the present invention, the ultraviolet lamp chamber 100 may include a plurality of ultraviolet lamp tubes 110. Each ultraviolet lamp tube 110 includes a lamp tube body 111 for providing ultraviolet light, and a supplementary structure 300 of the ultraviolet lamp tube for providing supplementary ultraviolet light. Specifically, both ends of the lamp tube body 111 can be fixed by fixing sheet metal 140. On the outer periphery of the lamp tube body 111, a primary reflector 120 and a secondary reflector 130 may also be included to jointly reflect the ultraviolet light emitted by the lamp tube body 111 to reflect the ultraviolet light to the target irradiation area and improve the utilization rate of the ultraviolet light.

[0052] The interior of the lamp tube body 111 may be filled with a filler for exciting ultraviolet light. For example, it may include metallic mercury vapor and other elemental additive gases. By exciting mercury, the lamp tube body 111 can emit ultraviolet light for process treatment in semiconductor manufacturing processes.

[0053] Next, please refer to Figure 3 , Figure 3 which shows a schematic structural diagram of a supplementary structure of an ultraviolet lamp tube provided according to some embodiments of the present invention.

[0054] As Figure 3 shown, in some embodiments of the present invention, the supplementary structure 300 of the ultraviolet lamp tube may include a supplementary portion 310 and a limiting portion 320. The supplementary portion 310 may be located at the tail ends on both sides of the lamp tube body 111 for providing supplementary ultraviolet light. The limiting portion 320 may be provided at the tail end of the supplementary portion 310 for detachably clamping and fixing the lamp tube body 111.

[0055] Specifically, in some alternative embodiments, the supplementary portion 310 may include thickening the tail ends on both sides of the lamp tube body 111 to enhance the light intensity emitted from the tail ends on both sides of the lamp tube body 111. Optionally, the tail ends on both sides of the lamp tube body 111 may be increased to a first diameter distance R1. In the prior art, the diameter of the tail ends on both sides of the lamp tube body 111 is generally 15 mm. In the embodiments of the present invention, the first diameter distance R1 may be in the range of 16 mm to 17 mm, so that the thickened tail ends on both sides of the lamp tube body 111 can accommodate more filling gases, and thus the content of mercury vapor for ultraviolet light excitation is higher, and the emitted ultraviolet light is stronger.

[0056] Furthermore, in some preferred embodiments, the lamp tube body 111 may be a multi-section structure. As Figure 3 shown, the multi-section structure may include at least three waist-reducing structures. The first waist-reducing structure 331 may be located in the middle of the lamp tube body 111, and the second waist-reducing structure 332 and the third waist-reducing structure 333 may be symmetrically distributed on both sides of the first waist-reducing structure 331, so that the light intensity emitted from both ends of the lamp tube body 111 is symmetric and uniform.

[0057] Optionally, the waist diameter r2 of the second waist structure 332 and the waist diameter r3 of the third waist structure 333 may be the same and both greater than the waist diameter r1 of the first waist structure 331, so that the light intensity emitted by the lamp tube body 111 can be divided into at least three regions: weak, medium, and strong.

[0058] For example, the waist diameter of the first waist structure 331 may be 10.40 mm, and the waist diameters of the second waist structure 332 and the third waist structure 333 may be about 13 mm to 15 mm. Therefore, the filling capacity of the region inside the lamp tube corresponding to the first waist structure 331 is the least, and thus the light intensity of the ultraviolet light excited is the weakest. The filling in the regions inside the lamp tube corresponding to the second waist structure 332 and the third waist structure 333 is relatively more, and thus the light intensity of the ultraviolet light excited is moderate. The diameters of the supplementary parts 310 at the two ends on both sides of the lamp tube body 111 are the largest (in the range of 16 mm to 17 mm), so the filling capacity of the region inside the lamp tube corresponding to it is the most, and the light intensity of the ultraviolet light excited is the strongest. In this embodiment, since the waist structure becomes thinner, the filling inside the corresponding lamp tube becomes less, so the number of excited atoms becomes less, and the emitted ultraviolet light becomes weaker. Thus, by setting multiple waist structures, the entire light region distribution of the lamp tube body 111 can be adjusted. The supplementary structure 300 of the ultraviolet lamp tube can supplement the light intensity in the weak light region at the edge, so that the light emitted by the ultraviolet lamp tube is evenly distributed.

[0059] Further, please refer to Figure 4 , Figure 4 which shows a partial schematic view of the waist structure of the supplementary structure of the ultraviolet lamp tube provided according to some embodiments of the present invention.

[0060] As Figure 4 shown, in some preferred embodiments, the waist size between the second waist structure 332 and the third waist structure 333 can be increased to the second dimension length L2, where the second dimension length L2 can be 150 mm. Compared with the current waist size of 110 mm on the ultraviolet lamp tube, in this embodiment, by increasing the waist size, the central weak light region is widened, so that the light intensity in the central region and the edge region of the lamp tube body 111 can be made uniform.

[0061] Even further, please refer to Figure 5 , Figure 5 which shows a partial schematic view of the waist curvature of the supplementary structure of the ultraviolet lamp tube provided according to some embodiments of the present invention.

[0062] As Figure 5As shown, in some preferred embodiments, the waist-in arc between the first waist-in structure 331 and the second waist-in structure 332 / the third waist-in structure 333 can be increased to the third waist-in arc α, where the third waist-in arc α can be increased to more than 5°, for example, 5.01°. Compared with the 2.61° waist-in arc on the current ultraviolet lamp tube, in this embodiment, by adjusting the waist-in arc, the transition distribution effect of the strong and weak light areas can be adjusted. In particular, by increasing the waist-in arc, the transition between the weak light intensity in the central region of the lamp tube body 111 and the strong light intensity in the edge region can be made more natural.

[0063] Those skilled in the art can understand that the first diameter distance R1 at the two ends on both sides of the lamp tube body 111 listed in the above embodiments, as well as the diameter, size, arc and other parameters of each waist-in structure, are only a non-limiting implementation manner provided by the present invention, aiming to clearly show the main concept of the present invention and provide a specific scheme convenient for the public to implement, rather than limiting the protection scope of the present invention. Optionally, in some other embodiments, those skilled in the art can also make different adjustments based on the concept of the present invention according to different process light requirements to achieve the same technical effect.

[0064] Next, please refer to Figure 6 and Figure 7 , Figure 6 which shows a partial schematic view of the limiting part of the supplementary structure of the ultraviolet lamp tube provided according to some embodiments of the present invention. Figure 7 is Figure 6 a clamping schematic view of the limiting part shown in

[0065] As Figure 6 shown, in some embodiments, the two ends of the supplementary part 310 of the supplementary structure 300 of the ultraviolet lamp tube can extend a preset length, and the extended limiting part 320 can be detachably clamped into the corresponding slot. Specifically, optionally, the end of the limiting part 320 can be provided with a fixing section 322 perpendicular to the extending section 321. As Figure 7 shown, the extending section 321 at the end of the limiting part 320 can extend into the slot of the fixing sheet metal 140, and the limiting part 320 can be exactly clamped in the slot of the fixing sheet metal 140 through the fixing section 322. Optionally, a pressure in the direction opposite to the extending direction of the limiting part 320 can also be provided to the limiting part 320 through the pressing piece 141 to limit and fix the lamp tube body 111 to prevent it from displacing. Compared with the prior art where the lamp tube body has no limiting part 320 to limit it and only a fixing structure of clamping at both ends can be used, the fixing and limiting effect in this embodiment is better.

[0066] Those skilled in the art can understand that the specific structure of the limiting part 320 shown in the above embodiments is only a non-limiting implementation manner provided by the present invention, aiming to clearly show the main concept of the present invention and provide a specific solution convenient for the public to implement, rather than being used to limit the protection scope of the present invention. Optionally, in some other embodiments, those skilled in the art can also adopt different structures of the limiting part 320 based on the concept of the present invention to achieve the same technical effect.

[0067] Further, in some optional embodiments, the supplementary structure 300 of the ultraviolet lamp tube may further include a rotating mechanism (not shown in the drawings). The rotating mechanism can be connected to the lamp tube body 111, and the lamp tube body 111 can be rotated around its center point through the rotating mechanism.

[0068] Specifically, in combination with Figure 1 and Figure 2 , each ultraviolet lamp chamber 100 may include two ultraviolet lamp tubes 110, and the two ultraviolet lamp tubes 110 are arranged in parallel. Each lamp tube body 111 (i.e., the ultraviolet lamp tube 110) can perform a reciprocating rotational movement around its respective center point, and the rotation angle can be 0 to 180°. After rotation, a circular uniform light area can be formed. Compared with the current situation where, after the rotation of the ultraviolet lamp tube, there is still a problem that the light intensity in the middle is stronger and the light intensity at the edge is weaker in the illuminated area after rotational irradiation, the light intensity at the edge of each ultraviolet lamp tube 110 in this embodiment is significantly enhanced after rotation. Therefore, the overall illumination uniformity of the ultraviolet lamp tube 110 is significantly improved.

[0069] In summary, the present invention provides an ultraviolet lamp tube with a supplementary structure and an ultraviolet lamp chamber, which can enhance the edge light intensity of the ultraviolet lamp tube, thereby improving the overall illumination uniformity of the ultraviolet lamp tube, and is beneficial to improving the uniformity of the process effect.

[0070] The foregoing description of the disclosure has been provided to enable any person skilled in the art to make or use the disclosure. Various modifications to the disclosure will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other variations without departing from the spirit or scope of the disclosure. Thus, the disclosure is not intended to be limited to the examples and designs described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An ultraviolet lamp tube with a supplementary structure for process treatment in semiconductor manufacturing processes, characterized in that, the ultraviolet lamp tube includes: a lamp tube body and a supplementary structure, the lamp tube body is a multi-segment structure, including at least three waist constriction structures. The first waist constriction structure is located in the middle of the lamp tube body, and the second and third waist constriction structures are symmetrically distributed on both sides of the first waist constriction structure. The waist constriction diameters of the second and third waist constriction structures are the same and larger than the waist constriction diameter of the first waist constriction structure. The supplementary structure includes a supplementary part located at the tail ends on both sides of the lamp tube body for providing supplementary ultraviolet light. The supplementary part includes increasing the tail ends on both sides of the lamp tube body to a first diameter distance, and a limiting part provided at the tail end of the supplementary part for detachably clamping and fixing the lamp tube body. Among them, the diameter of the supplementary part is the largest.

2. The ultraviolet lamp tube according to claim 1, characterized in that, the first diameter distance is in the range of 16 mm to 17 mm.

3. The ultraviolet lamp tube according to claim 1, characterized in that, the waist constriction size between the second and third waist constriction structures increases to a second size length, where the second size length is 150 mm.

4. The ultraviolet lamp tube according to claim 1, characterized in that, the waist constriction arc between the first waist constriction structure and the second / third waist constriction structure increases to a third waist constriction arc, where the third waist constriction arc is more than 5°.

5. The ultraviolet lamp tube according to claim 1, characterized in that, the tail end of the supplementary part extends a preset length, and the extended limiting part is used for detachably clamping into the corresponding slot.

6. The ultraviolet lamp tube according to claim 1, characterized in that, further includes: a rotating mechanism connected to the lamp tube body to make the lamp tube body perform a rotational movement around its center point.

7. The ultraviolet lamp tube according to claim 1, characterized in that, the filling in the lamp tube body at least includes mercury vapor.

8. An ultraviolet lamp chamber, characterized in that, includes: several ultraviolet lamp tubes according to any one of claims 1 to 7. Each ultraviolet lamp tube includes a lamp tube body for providing ultraviolet light and a supplementary structure of the ultraviolet lamp tube for providing supplementary ultraviolet light.

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