A micro heat sink structure processing method, system and tool
Through the plastic forming method, a high aspect ratio structure is formed by using a tool in the micro radiator processing, which solves the problems of low efficiency and high cost in the existing technology and realizes efficient and low-cost micro radiator processing.
Patent Information
- Application Number
- CN202410554104.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-07
- Publication Date
- 2025-10-10
- Estimated Expiration
- 2044-05-07
AI Technical Summary
Existing micro heat sink processing methods have problems of low efficiency and high cost, especially traditional micro milling has low efficiency and high cost of photolithography and laser processing equipment.
The plastic forming method is adopted, in which the main wheel of the tool contacts the surface of the workpiece and causes it to produce plastic deformation, and then the forming cavity of the tool is used for material flow and secondary wheel forming to form a micro radiator structure with a high aspect ratio.
The process improves processing efficiency, reduces material and device costs, realizes equal material manufacturing, and is suitable for the molding of micro heat sink structures of multiple scales and shapes.
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Figure CN118578056B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of micro heat sink processing, in particular to a micro heat sink structure processing method and system and a tool. BACKGROUND
[0002] With the rapid development of communication, energy, medical treatment and transportation, the use of electronic components has been increasing year by year, and this trend has also prompted large enterprises to develop electronic equipment in the direction of miniaturization. Miniaturized electronic equipment improves the specifications of the electronic equipment currently used by people, making it easier to carry. However, the higher heat flux problem caused by miniaturization greatly affects the service life of such electronic equipment, so cooling methods need to be used to solve the problem of heat dissipation.
[0003] Micro heat sinks have been widely recognized as a high-efficiency cooling technology that can solve the high heat dissipation problems in many fields. The key structural components in micro heat sinks are some specific-shaped microstructures on their surfaces. Such structures can be prepared in the shapes of squares, circles, strips, and water droplets, etc. according to the needs of heat dissipation. The existing methods for processing micro heat sinks mainly include photolithography processing, laser processing, and micro-milling processing, etc. For traditional processing methods, micro-milling processing is a method that can form high-aspect-ratio micro heat sinks, but this processing method has low processing efficiency when forming micro heat sinks, and usually requires multiple milling to achieve the preparation of the required micro heat sink, and this processing method involves material removal, which increases the cost of raw materials. Some more advanced processing methods such as photolithography processing and laser processing can arbitrarily customize the shape of the surface structure compared to traditional processing, and can achieve the preparation of high-aspect-ratio structures, but the devices of this processing method are expensive to build and assemble.
[0004] Therefore, the prior art still needs to be improved and developed. SUMMARY
[0005] In view of the above shortcomings of the prior art, the purpose of the present application is to provide a micro heat sink structure processing method and system and a tool to solve the problems of low processing efficiency, high material cost or high processing device cost in the existing micro heat sink architecture processing method.
[0006] The technical scheme of the present application is as follows:
[0007] In a first aspect, the present application provides a micro heat sink structure processing method, which comprises:
[0008] fixing the workpiece to be processed on a heating table;
[0009] heating treatment is performed on the workpiece to be processed;
[0010] Controlling the tool to press down the workpiece at a first constant speed so that the main wheel of the tool contacts the surface of the workpiece and causes the workpiece to undergo plastic deformation and then flow into the forming cavity of the tool to form a preliminary micro heat sink structure;
[0011] The tool is controlled to rotate and roll along the surface of the workpiece at a second constant speed, so that the secondary wheel of the tool shapes the workpiece partially filled in the molding cavity to obtain a molded radiator structure.
[0012] A further configuration of the present invention further includes, before the step of fixing the workpiece on the workbench:
[0013] The surface of the workpiece is cleaned with a chemical solution to remove the oxide layer and surface impurities on the surface of the workpiece.
[0014] A further configuration of the present invention further includes, before the step of fixing the workpiece on the workbench:
[0015] Use sandpaper to polish the surface of the workpiece;
[0016] After grinding is completed, the surface of the workpiece is polished with a polishing cloth.
[0017] According to a further configuration of the present invention, the heat sink after molding has a shape including a strip shape and a T shape.
[0018] According to a further configuration of the present invention, the chemical solution comprises ethanol, acetone and dilute hydrochloric acid.
[0019] According to a further configuration of the present invention, the workpiece is made of a material with high thermal conductivity.
[0020] According to a further configuration of the present invention, the first constant speed is 1-10 mm / s; and the second constant speed is 1000-2000 mm / min.
[0021] In a second aspect, the present invention provides a micro radiator processing system based on the micro radiator structure processing method described above, which comprises: a heating table, a tool and a driving device; wherein,
[0022] The heating platform is used to place the workpiece;
[0023] The tool is mounted on the driving device;
[0024] The driving device is used to control the tool to press the workpiece at a first constant speed, so that the main wheel of the tool contacts the surface of the workpiece and causes the workpiece to flow into the molding cavity of the tool after plastic deformation, and is used to control the tool to rotate and roll along the surface of the workpiece at a second constant speed, so that the secondary wheel of the tool will partially fill the workpiece in the molding cavity to form.
[0025] In the third aspect, the present invention provides a tool for use in the above-mentioned micro-radiator structure processing method, which includes a cylindrical body, main wheels are arranged at intervals on the side of the cylindrical body, a secondary wheel is arranged between two adjacent main wheels, and a molding cavity is provided between the two adjacent main wheels.
[0026] According to a further configuration of the present invention, the main wheel is provided with a chamfer.
[0027] The present invention provides a method, system, and tool for processing a micro radiator structure. The method includes: fixing a workpiece on a heating table; heating the workpiece; controlling the tool to press the workpiece downward at a first constant speed, so that the main wheel of the tool contacts the surface of the workpiece and causes the workpiece to flow into the molding cavity of the tool after plastic deformation to form a preliminary micro radiator structure; controlling the tool to rotate and roll along the surface of the workpiece at a second constant speed, so that the secondary wheel of the tool molds the workpiece partially filled in the molding cavity to obtain a molded radiator structure. The present invention obtains a micro radiator structure with a high aspect ratio by plastic molding the workpiece with a tool, which not only improves work efficiency, but also is manufactured with the same material, does not require material removal, and is less expensive than laser and photolithography processing methods. BRIEF DESCRIPTION OF THE DRAWINGS
[0028] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary personnel in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.
[0029] Figure 1 It is a flow chart of the micro radiator structure processing method of the present invention.
[0030] Figure 2 It is a schematic diagram of the micro radiator structure processing system in the present invention.
[0031] Figure 3 It is an enlarged view of point A in the present invention.
[0032] Figure 4It is a structural schematic diagram of a micro radiator that has been preliminarily processed in one embodiment of the present invention.
[0033] Figure 5 It is a schematic structural diagram of a long strip micro radiator in one embodiment of the present invention.
[0034] Figure 6 Schematic diagram of the structure of a T-shaped micro radiator in one embodiment of the present invention.
[0035] The symbols in the accompanying drawings are: 1, heating table; 2, tool; 21, main wheel; 22, secondary wheel; 23, molding cavity; 3, workpiece. DETAILED DESCRIPTION
[0036] The present invention provides a method, system, and tool for machining a micro-heat sink structure. To clarify the objectives, technical solutions, and effects of the present invention, the present invention is further described below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention.
[0037] In the embodiments and patent claims, unless otherwise specified herein, the words "a," "an," "the," and "the" may include plural forms. If the embodiments of the present invention include descriptions of "first," "second," etc., such descriptions are for descriptive purposes only and should not be understood as indicating or implying their relative importance or implicitly specifying the number of the technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one of such features.
[0038] It should be further understood that the term "comprising" as used in the description of the present invention refers to the presence of the features, integers, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or groups thereof. It should be understood that when an element is said to be "connected" or "coupled" to another element, it can be directly connected or coupled to the other element, or there can be intermediate elements. In addition, "connected" or "coupled" as used herein can include wireless connections or wireless couplings. The term "and / or" as used herein includes all or any units and all combinations of one or more associated listed items.
[0039] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those skilled in the art in the art to which the present invention belongs. It should also be understood that terms such as those defined in common dictionaries should be understood to have meanings consistent with their meanings in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless specifically defined as herein.
[0040] In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the fact that ordinary technicians in this field can implement them. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.
[0041] Please also see Figures 1 to 4 The present invention provides a preferred embodiment of a micro radiator structure processing method.
[0042] In some embodiments, as Figure 1 As shown, the present invention provides a method for processing a micro radiator structure, which includes the following steps:
[0043] S100, fix the workpiece on the heating table;
[0044] S200, heating the workpiece according to a predetermined temperature;
[0045] S300, controlling the tool to press the workpiece downward at a first constant speed, so that the main wheel of the tool contacts the surface of the workpiece, and causes the workpiece to undergo plastic deformation and then flow into the forming cavity of the tool, thereby forming a preliminary micro heat sink structure;
[0046] S400, controlling the tool to rotate and roll along the surface of the workpiece at a second constant speed, so that the secondary wheel of the tool shapes the workpiece partially filled in the molding cavity to obtain a molded heat sink structure.
[0047] Specifically, please combine Figure 2 and Figure 3 The tool 2 can be installed on the rotary spindle of a lathe, and the lathe can control the tool 2 to move downward at a constant speed or move horizontally at a constant speed.
[0048] During specific implementation, the heating table 1 is first installed on the workbench, and then the workpiece 3 is fixed on the heating table 1 using a clamp to prevent the workpiece 3 from sliding during the molding process. Before moving the tool 2, the temperature of the heating table 1 is first adjusted, and the workpiece 3 is heated by the heating table 1 at a constant temperature (a predetermined temperature, the temperature is adjusted according to the material of the workpiece), so that the workpiece 3 is more likely to undergo plastic flow during the molding process. Afterwards, the tool 2 shown can be controlled by a lathe to press down the workpiece 3 at a first constant speed. During the pressing process of the tool 2, the main wheel 21 of the tool 2 first contacts the surface of the workpiece 3. As the tool 2 continues to be pressed in, the main wheel 21 of the tool 2 will force the part of the workpiece 3 that is in contact with it to undergo plastic deformation and flow into the molding cavity 23 of the tool 2 to achieve preliminary processing of the micro radiator structure, as shown in FIG. Figure 4 The depth ratio of the micro heat sink can be adjusted by the pressing depth of the tool 2. In some embodiments, the first constant speed is 1-10 mm / s, for example, 5 mm / s.
[0049] After completing the preliminary processing of the micro radiator structure, the tool 2 is controlled to rotate by the rotary axis of the lathe while being controlled to move forward at a second constant speed, that is, the tool 2 is controlled to move horizontally along the surface of the workpiece 3, so that the tool 2 rolls on the surface of the workpiece 3. During the rolling process of the tool 2, the secondary wheel 22 of the tool 2 can shape the material filled in the forming cavity 23 of the tool 2, thereby obtaining the formed micro radiator structure. The shape of the micro radiator structure is determined by the structure of the secondary wheel 22 of the tool 2. The shape of the radiator after forming includes but is not limited to a long strip and a T-shape, such as Figure 5 and Figure 6 In some embodiments, the second constant speed is 1000-2000 mm / min, for example, 1500 mm / min. The rotation speed of the tool 2 is determined by the specific size of the tool 2 and the magnitude of the second constant speed. For example, if the diameter of the tool 2 is 100 mm and the rotation speed is 1 r / s, the second constant speed should be 314 mm / s.
[0050] In the above-described technical solution, the present invention utilizes the provided tool 2 to plastically form the workpiece 3 to obtain a micro-heat sink structure with a high aspect ratio. This not only improves work efficiency, but also allows for isotropic manufacturing without material removal, resulting in lower costs compared to laser and photolithography processing methods. It should be noted that the micro-heat sink structure processing method provided by the present invention is also applicable to the preparation of functional surfaces such as hydrophobic and optical surfaces.
[0051] In some embodiments, the workpiece 3 is made of a material with good plasticity and high thermal conductivity, such as Cu, Al, etc. Compared with the photolithography technology that requires the use of specific materials, there are more options.
[0052] In some embodiments, before the step of fixing the workpiece on the workbench, the method further includes the following steps:
[0053] S110. Clean the surface of the workpiece with a chemical solution to remove grease and surface impurities on the surface of the workpiece.
[0054] Specifically, before processing the workpiece, a chemical solution (i.e., a cleaning solution) is required to clean the surface of the workpiece to ensure that the oxide layer (e.g., grease) and surface impurities on the workpiece do not affect subsequent processing. In some embodiments, the chemical solution includes but is not limited to ethanol, acetone, and dilute hydrochloric acid.
[0055] A further configuration of the present invention includes the following steps before the step of fixing the workpiece on the workbench:
[0056] S120, grinding the surface of the workpiece with sandpaper;
[0057] S130: After grinding is completed, polish the surface of the workpiece using a polishing cloth.
[0058] Specifically, after cleaning the workpiece with a chemical solution, the workpiece surface is polished sequentially using sandpaper of varying grits, with the sandpaper used progressively from low grit to high grit. After polishing, the workpiece surface is polished with a polishing cloth to achieve a smooth finish. For example, after polishing the workpiece surface with 4000 grit sandpaper, the polishing cloth is used, using a polishing solution with a particle size of 1 μm.
[0059] In some embodiments, as Figure 2 and Figure 3 As shown, the present invention provides a micro-heat sink processing system based on the micro-heat sink structure processing method described above, comprising: a heating platform 1, a tool 2, and a drive device. The heating platform 1 is used to place a workpiece 3; the tool 2 is mounted on the drive device; the drive device is used to control the tool 2 to press down the workpiece 3 at a first constant speed, so that the main wheel 21 of the tool 2 contacts the surface of the workpiece 3, causing the workpiece 3 to undergo plastic deformation and then flow into the forming cavity 23 of the tool 2; and is used to control the tool 2 to roll along the surface of the workpiece 3 at a second constant speed, so that the secondary wheel 22 of the tool 2 forms the workpiece 3 partially filled in the forming cavity 23.
[0060] Specifically, the driving device can be a lathe, and the tool 2 can be installed on the rotating shaft of the lathe, and the lathe can realize the motion control of the tool 2, such as downward movement, translation, and rotation. First, the heating table 1 is installed on the workbench, and then the workpiece 3 is fixed on the heating table 1. Before moving the tool 2, the temperature of the heating table 1 is first adjusted. The workpiece 3 is heated at a constant temperature by the heating table 1, so that the workpiece 3 is more likely to undergo plastic flow during the molding process. Thereafter, the tool 2 can be controlled by the lathe to press the workpiece 3 downward at a first constant speed. During the pressing process of the tool 2, the main wheel 21 of the tool 2 first contacts the surface of the workpiece 3. As the tool 2 continues to be pressed in, the main wheel 21 of the tool 2 will force the part of the workpiece 3 that it contacts to undergo plastic deformation and flow into the molding cavity 23 of the tool 2 to achieve the preliminary processing of the micro radiator structure. After completing the preliminary processing of the micro radiator structure, the tool 2 is controlled to rotate by the rotary axis of the lathe and the tool 2 is controlled to move forward at a second constant speed, that is, the tool 2 is controlled to move horizontally along the surface of the workpiece 3, so that the tool 2 rolls on the surface of the workpiece 3. During the rolling process of the tool 2, the secondary wheel 22 of the tool 2 can shape the material filled in the molding cavity 23 of the tool 2, thereby obtaining the molded micro radiator structure.
[0061] In some embodiments, as Figure 2 and Figure 3 As shown, the present invention provides a tool 2 used in the above-mentioned micro radiator structure processing method, which includes a cylindrical body, main wheels 21 are arranged at intervals on the side of the cylindrical body, a secondary wheel 22 is arranged between two adjacent main wheels 21, and a molding cavity 23 is provided between the two adjacent main wheels 21.
[0062] Specifically, the tool 2 is cylindrical, which facilitates rolling during the machining process, thereby enabling large-scale production of micro-heat sinks. The primary wheel 21 of the tool 2 plastically deforms the portion of the workpiece 3 it contacts, causing the plastic to flow into the forming cavity 23 of the tool 2, while the secondary wheel 22 of the tool 2 shapes the portion of the workpiece 3 located within the forming cavity 23 to obtain the desired micro-heat sink structure.
[0063] In some embodiments, the main wheel 21 is provided with a chamfer to avoid stress concentration in the workpiece 3 during the forming process.
[0064] In summary, the micro radiator structure processing method, system and tool provided by the present invention have the following beneficial effects:
[0065] The use of the plasticity of the material for molding realizes the full utilization of the material. It is a method of manufacturing micro heat sinks with equal materials, which can save material costs and improve processing efficiency.
[0066] By changing specific process parameters, such as the pressing depth, it is possible to form a micro heat sink structure with a high aspect ratio;
[0067] By coordinating the relationship between the size of the primary wheel and the secondary wheel of the cylindrical tool and the pressing depth, multi-scale and multi-morphological microstructures can be designed;
[0068] The tool is cylindrical, which is conducive to the rolling of the tool during the processing, realizing the rapid prototyping of the micro radiator, thereby realizing the processing and production of large-scale micro radiators. The main wheel is provided with a chamfer to avoid stress concentration in the workpiece during the forming process.
[0069] It should be understood that the application of the present invention is not limited to the above examples. For those skilled in the art, improvements or changes can be made based on the above description. All these improvements and changes should fall within the scope of protection of the claims attached to the present invention.
Claims
1. A micro radiator structure processing method, characterized in that: include: Fix the workpiece on the heating table; Heat treatment of the workpiece; The tool is controlled to press the workpiece downward at a first constant speed, so that the main wheel of the tool contacts the surface of the workpiece and causes the workpiece to flow into the forming cavity of the tool after undergoing plastic deformation, thereby forming a preliminary micro-heat sink structure; the tool includes a cylindrical body, main wheels are spaced apart on the side of the cylindrical body, a secondary wheel is disposed between two adjacent main wheels, and a forming cavity is defined between the two adjacent main wheels; The tool is controlled to rotate and roll along the surface of the workpiece at a second constant speed, so that the secondary wheel of the tool shapes the workpiece partially filled in the molding cavity to obtain a molded radiator structure.
2. The micro radiator structure processing method according to claim 1, characterized in that: Before the step of fixing the workpiece on the heating table, the method further includes: The surface of the workpiece is cleaned with a chemical solution to remove the oxide layer and surface impurities on the surface of the workpiece.
3. The micro radiator structure processing method according to claim 2, characterized in that: Before the step of fixing the workpiece on the heating table, the method further includes: Use sandpaper to polish the surface of the workpiece; After grinding is completed, the surface of the workpiece is polished with a polishing cloth.
4. The micro radiator structure processing method according to claim 1, characterized in that: The shape of the heat sink after molding includes a long strip.
5. The micro radiator structure processing method according to claim 2, characterized in that: The chemical solution includes ethanol, acetone and dilute hydrochloric acid.
6. The micro radiator structure processing method according to claim 1, characterized in that: The workpiece is made of a material with high thermal conductivity.
7. The micro radiator structure processing method according to claim 1, characterized in that: The first constant speed is 1-10 mm / s; the second constant speed is 1000-2000 mm / min.
8. The micro heat sink structure processing method according to claim 1, characterized in that: The main wheel is provided with a chamfer.
9. A micro radiator processing system based on the micro radiator structure processing method according to any one of claims 1 to 8, characterized in that: include: Heating table, tool and drive device; wherein, The heating platform is used to place the workpiece; The tool is mounted on the driving device; The driving device is used to control the tool to press the workpiece at a first constant speed, so that the main wheel of the tool contacts the surface of the workpiece and causes the workpiece to flow into the molding cavity of the tool after plastic deformation, and is used to control the tool to rotate and roll along the surface of the workpiece at a second constant speed, so that the secondary wheel of the tool will partially fill the workpiece in the molding cavity to form.
Citation Information
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