Gull-wing aspheric plano-convex lens reverse hybrid compensation interference detection method

Abstract

The application discloses a gull-wing aspheric plane-convex lens reverse and divergence hybrid compensation interference detection method, which comprises the following steps: S1, determining the position of an auxiliary spherical mirror; S2, determining the position of a CGH compensator; S3, determining the position of a laser spherical wave interferometer; S4, inserting a plane-convex lens and determining the angle of the plane-convex lens relative to the CGH compensator; and S5, error detection. The gull-wing aspheric plane-convex lens reverse and divergence hybrid compensation interference detection method has the advantages that the positions of the laser spherical wave interferometer, the CGH compensator and the auxiliary spherical mirror are determined in sequence, the error detection of the plane-convex lens is prepared, the problems of intersection of measuring light and failure of analysis of a stripe caused by the curvature reversal of the gull-wing aspheric surface are avoided, and the method can be applied to the detection of a large-diameter aspheric plane-convex lens.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of optical detection technology, and in particular to a gull-wing aspheric plano-convex lens retro-reflection hybrid compensation interferometric detection method. BACKGROUND

[0002] With the further development of science and technology, especially the development of deep space exploration and other fields, the requirements of scientific research on the imaging resolution and imaging quality of optical systems are becoming higher and higher, and the requirements on the field of view are also becoming larger and larger. Accordingly, the aperture of optical systems such as telescopes and space cameras is increasing, and the weight of the optical system is also increasing. Aspheric optical elements have been widely used in current off-axis optical system design due to their advantages of simplifying the structure of optical systems, optimizing system aberrations, and improving system imaging quality.

[0003] The measurement methods of aspheric surface error generally include three-coordinate measurement, ring sub-aperture method, and CGH compensator reflection light path measurement. However, the measurement accuracy of the three-coordinate measurement method is in the order of microns, which cannot meet the nanometer-level surface accuracy requirement. The ring sub-aperture method and the CGH (Computer Generated Hologram) compensator reflection light path measurement are suitable for the measurement of ordinary aspheric mirrors. The gull-wing aspheric surface is a special kind of high-order aspheric surface with rotational symmetry. The curvature direction of the generatrix of the gull-wing aspheric surface will reverse, that is, there is an inflection point where the concave and convex change, like a gull wing. Because the surface equation of this kind of element is special, the traditional zero-position interferometric detection light path will cause the light rays to intersect and overlap, resulting in that the fringes cannot be analyzed. Therefore, there is currently few measurement methods that can meet the demand of full-aperture high-precision measurement. A white light interferometric stitching measurement method for gull-wing aspheric elements is proposed by National University of Defense Technology [DOI: 10.3788 / AOS202242.0912001]. Limited by the measurement aperture of the white light interferometer and the stitching efficiency, this method is only suitable for the measurement of gull-wing aspheric surfaces with an aperture of about 10 mm. The traditional aspheric direct reflection zero-position measurement cannot avoid the problem that the measurement light rays intersect due to the curvature reversal of the gull-wing aspheric surface, and the fringes cannot be analyzed. Moreover, it is difficult to be applied to the detection of large-aperture (hundreds of millimeters) aspheric plano-convex lenses. SUMMARY

[0004] The technical problem to be solved by the present application is to overcome the shortcomings of the prior art and provide a gull-wing aspheric plano-convex lens retro-reflection hybrid compensation interferometric detection method, which determines the positions of a laser spherical wave interferometer, a CGH compensator and an auxiliary spherical mirror in sequence, prepares for the subsequent error detection of the plano-convex lens, avoids the problem that the measurement light rays intersect due to the curvature reversal of the gull-wing aspheric surface and the fringes cannot be analyzed, and can be applied to the detection of large-aperture aspheric plano-convex lenses.

[0005] To solve the above technical problems, the present application adopts the following technical solutions:

[0006] A gull-wing type aspheric plano-convex lens reverse-diffraction hybrid compensation interference detection method, comprising the following steps:

[0007] S1, determining the position of the auxiliary spherical mirror: the laser spherical wave interferometer emits a test beam to the auxiliary spherical mirror, the test beam is reflected back to the laser spherical wave interferometer after irradiating the auxiliary spherical mirror, and interferes with the reference beam in the laser spherical wave interferometer to form an interference fringe pattern, the relative position of the auxiliary spherical mirror and the laser spherical wave interferometer is adjusted to make the spherical center of the auxiliary spherical mirror coincide with the spherical wave focal point of the laser spherical wave interferometer;

[0008] S2, determining the position of the CGH compensator: inserting the CGH compensator between the laser spherical wave interferometer and the auxiliary spherical mirror, the laser spherical wave interferometer emits a test beam to the first alignment hologram of the CGH compensator, the test beam is reflected back to the laser spherical wave interferometer after irradiating the first alignment hologram, and interferes with the reference beam in the laser spherical wave interferometer to form an interference fringe pattern, the position of the CGH compensator is adjusted to make the interference fringe pattern formed in the laser spherical wave interferometer be zero fringe state;

[0009] S3, determining the position of the laser spherical wave interferometer: moving the position of the laser spherical wave interferometer, so that the test beam emitted by the laser spherical wave interferometer to the second alignment hologram of the CGH compensator, the test beam is reflected back to the laser spherical wave interferometer after irradiating the second alignment hologram, and interferes with the reference beam in the laser spherical wave interferometer to form an interference fringe pattern, the position of the laser spherical wave interferometer is adjusted to make the interference fringe pattern formed in the laser spherical wave interferometer be zero fringe state;

[0010] S4, inserting plano-convex lens and determining the angle of plano-convex lens relative to CGH compensator: inserting the plano-convex lens between the CGH compensator and the auxiliary spherical mirror, the test beam emitted by the laser spherical wave interferometer becomes parallel light after the diffraction of the auxiliary hologram of the CGH compensator, irradiates the plano-convex lens plane side, and then returns to the laser spherical wave interferometer along the original light path, and interferes with the reference beam in the laser spherical wave interferometer to form an interference fringe pattern, the angle of the plano-convex lens relative to the CGH compensator is adjusted to make the interference fringe pattern formed in the laser spherical wave interferometer be zero fringe state;

[0011] S5, error detection: the laser spherical wave interferometer sends a test beam to the test hologram of the CGH compensator, after the diffraction of the test hologram, the test beam is irradiated to the auxiliary spherical mirror through the plano-convex lens, and returns to the laser spherical wave interferometer along the original light path to interfere with the reference beam in the laser spherical wave interferometer to form an interference fringe pattern; the plano-convex lens is moved horizontally, so that the interference fringe pattern formed in the laser spherical wave interferometer is in a zero fringe state, at this time the surface error of the plano-convex lens detected by the laser spherical wave interferometer is the final measurement value.

[0012] As a further improvement of the above technical solution:

[0013] The first alignment hologram and the second alignment hologram are located at the periphery of the auxiliary hologram, and the test hologram is located in the middle of the auxiliary hologram.

[0014] The auxiliary hologram is annular.

[0015] The test hologram is circular.

[0016] The first alignment hologram and the second alignment hologram are arc-shaped and symmetrically arranged with the center of the auxiliary hologram.

[0017] The first alignment hologram and the second alignment hologram are both attached to the outer periphery of the auxiliary hologram.

[0018] The test hologram is attached to the inner periphery of the auxiliary hologram.

[0019] There is a gap between the two ends of the first alignment hologram and the second alignment hologram.

[0020] One side of the plano-convex lens is a plane, and the other side is a curved surface with positive and negative mutations in curvature.

[0021] In S1 and S2, the position of the laser spherical wave interferometer is fixed.

[0022] In S4, the distance between the plano-convex lens and the auxiliary hologram is controlled by a gap instrument or a standard length rod.

[0023] Compared with the prior art, the advantages of the present application are:

[0024] The gull-wing aspheric plano-convex lens anti-diffractive hybrid compensation interference detection method of the present invention, on the one hand, first confirms the positions of the auxiliary spherical reflector and the CGH compensator relative to the auxiliary spherical reflector in sequence, and then determines the position of the laser spherical wave interferometer, thereby realizing the determination of the relative positions of the laser spherical wave interferometer, the CGH compensator and the auxiliary spherical reflector, preparing for the subsequent error detection of the plano-convex lens. The preparation steps are reasonably designed, providing good preliminary conditions for the subsequent accurate detection of errors. On the other hand, the error detection process realizes the zero-position detection of the plano-convex lens through the diffraction of the CGH compensator and the reflection of the auxiliary spherical reflector (detection is performed when the interference fringe pattern formed by the plano-convex lens in the laser spherical wave interferometer is in the zero-fringe state). Specifically, the test beam emitted by the laser spherical wave interferometer is diffracted by the CGH compensator, passes through the plano-convex lens, and is converted into a spherical wavefront that matches the auxiliary spherical reflector. After passing through the auxiliary spherical reflector, it returns along the original path and finally interferes with the reference beam of the laser spherical wave interferometer, thereby realizing interference detection. It avoids the problem of intersection of measuring light and unresolvable fringes caused by the inversion of curvature of gull-wing aspheric surfaces. In addition, since a divergent optical path is adopted (the test beam is a divergent optical path after being emitted through the CGH compensator), it can be applied to the detection of large-aperture (on the order of hundreds of millimeters) aspheric plano-convex lenses. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a structural state diagram of the auxiliary spherical reflector when determining the position of the gull-wing aspheric plano-convex lens anti-diffractive hybrid compensation interference detection method of the present invention.

[0026] Figure 2 This is a structural state diagram of the CGH compensator in the anti-diffractive hybrid compensation interference detection method of the gull-wing aspheric plano-convex lens of the present invention when determining the position.

[0027] Figure 3 This is a structural state diagram of the plano-convex lens in the anti-diffractive hybrid compensation interference detection method of the gull-wing aspheric plano-convex lens of the present invention when determining the angle relative to the CGH compensator (the auxiliary spherical reflector is not shown).

[0028] Figure 4 This is a structural state diagram of the error detection of the anti-diffractive hybrid compensation interference detection method of the gull-wing aspheric plano-convex lens of the present invention.

[0029] Figure 5 It is a structural schematic diagram of the CGH compensator of the gull-wing aspheric plano-convex lens anti-diffractive hybrid compensation interference detection method of the present invention.

[0030] The numbers in the figure represent:

[0031] 1, laser spherical wave interferometer; 2, CGH compensator; 21, first alignment hologram; 22, second alignment hologram; 23, auxiliary hologram; 24, test hologram; 3, plano-convex lens; 4, auxiliary spherical mirror; 5, spherical wave focal point. DETAILED DESCRIPTION

[0032] The application will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0033] In the description of the present application, it should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0034] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0035] In the present application, unless otherwise explicitly specified and limited, the terms "assembly", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0036] Figures 1 to 5 An embodiment of the gull-wing aspheric plano-convex lens reverse and hybrid compensation interference detection method of the present application is shown, the gull-wing aspheric plano-convex lens reverse and hybrid compensation interference detection method of the present embodiment comprises the following steps:

[0037] S1, determining the position of the auxiliary spherical mirror 4: the laser spherical wave interferometer 1 emits a test beam to the auxiliary spherical mirror 4, the test beam is reflected back to the laser spherical wave interferometer 1 after irradiating the auxiliary spherical mirror 4, and interferes with the reference beam in the laser spherical wave interferometer 1 to form an interference fringe pattern, the relative position of the auxiliary spherical mirror 4 and the laser spherical wave interferometer 1 is adjusted, so that the spherical center of the auxiliary spherical mirror 4 and the spherical wave focal point 5 of the laser spherical wave interferometer 1 coincide; at this time, the interference fringe pattern formed in the laser spherical wave interferometer 1 is the most sparse, which is the zero fringe state, and is simply referred to as zero position. At this time, the position of the auxiliary spherical mirror 4 is the determined position as shown in Figure 1 .

[0038] S2, determining the position of the CGH compensator 2: the CGH compensator 2 is inserted between the laser spherical wave interferometer 1 and the auxiliary spherical mirror 4, the laser spherical wave interferometer 1 emits a test beam to the first alignment hologram 21 of the CGH compensator 2, the test beam is reflected back to the laser spherical wave interferometer 1 after irradiating the first alignment hologram 21, and interferes with the reference beam in the laser spherical wave interferometer 1 to form an interference fringe pattern, the position of the CGH compensator 2 is adjusted, so that the interference fringe pattern formed in the laser spherical wave interferometer 1 is in the zero fringe state; at this time, the position of the CGH compensator 2 is the determined position as shown in Figure 2 .

[0039] S3, determining the position of the laser spherical wave interferometer 1: the position of the laser spherical wave interferometer 1 is moved, so that the test beam emitted by the laser spherical wave interferometer 1 to the second alignment hologram 22 of the CGH compensator 2, the test beam is reflected back to the laser spherical wave interferometer 1 after irradiating the second alignment hologram 22, and interferes with the reference beam in the laser spherical wave interferometer 1 to form an interference fringe pattern, the pose of the laser spherical wave interferometer 1 is adjusted, so that the interference fringe pattern formed in the laser spherical wave interferometer 1 is in the zero fringe state;

[0040] S4, inserting the plano-convex lens 3 and determining the angle of the plano-convex lens 3 relative to the CGH compensator 2: the plano-convex lens 3 is inserted between the CGH compensator 2 and the auxiliary spherical mirror 4, the test beam emitted by the laser spherical wave interferometer 1 becomes a parallel beam after the diffraction of the auxiliary hologram 23 of the CGH compensator 2, and then irradiates the plano-convex lens 3 on one side of the plane, and then returns to the laser spherical wave interferometer 1 along the original light path, and interferes with the reference beam in the laser spherical wave interferometer 1 to form an interference fringe pattern, the angle of the plano-convex lens 3 relative to the CGH compensator 2 is adjusted, so that the interference fringe pattern formed in the laser spherical wave interferometer 1 is in the zero fringe state; at this time, the position of the plano-convex lens 3 is the determined position as shown in Figure 3 .

[0041] S5, error detection: as shown in Figure 4As shown, the laser spherical wave interferometer 1 emits a test beam to the test hologram 24 of the CGH compensator 2, after the diffraction of the test hologram 24, the test beam is irradiated to the auxiliary spherical mirror 4 through the plano-convex lens 3, and returns to the laser spherical wave interferometer 1 along the original light path, and interferes with the reference beam in the laser spherical wave interferometer 1 to form an interference fringe pattern; the plano-convex lens 3 is moved horizontally, so that the interference fringe pattern formed in the laser spherical wave interferometer 1 is in a zero fringe state, and at this time the surface shape error of the plano-convex lens 3 detected by the laser spherical wave interferometer 1 is the final measurement value.

[0042] The gull-wing type aspheric plano-convex lens reverse diffraction hybrid compensation interference detection method, on the one hand, first confirms the positions of the auxiliary spherical mirror 4 and the CGH compensator 2 relative to the auxiliary spherical mirror 4, and then determines the position of the laser spherical wave interferometer 1, so as to realize the determination of the relative positions of the laser spherical wave interferometer 1, the CGH compensator 2 and the auxiliary spherical mirror 4, and prepare for the error detection of the plano-convex lens 3, and the preparation step is reasonable, which provides a good preliminary condition for the accurate detection of the subsequent error. On the other hand, in the error detection process, the zero detection of the plano-convex lens 3 is realized through the diffraction of the CGH compensator 2 and the reflection of the auxiliary spherical mirror 4 (the detection when the interference fringe pattern formed by the plano-convex lens 3 in the laser spherical wave interferometer 1 is in a zero fringe state), specifically, the test beam (spherical beam emitted from the focal point of the laser spherical wave interferometer 1) emitted by the laser spherical wave interferometer 1 is diffracted by the CGH compensator 2, then passes through the plano-convex lens 3, is converted into a spherical wave front matched with the auxiliary spherical mirror 4, then returns along the original path after passing through the auxiliary spherical mirror 4, and finally interferes with the reference beam of the laser spherical wave interferometer 1, so as to realize the interference detection, avoid the problem that the measurement light intersects and the fringe cannot be resolved due to the curvature reversal of the gull-wing type aspheric surface, and since the divergent light path (the test beam is a divergent light path after passing through the CGH compensator 2) is adopted, the detection of the aspheric plano-convex lens 3 with a large aperture (hundreds of millimeters) can be realized.

[0043] Further, in the embodiment, as shown in Figure 5 The first alignment hologram 21 and the second alignment hologram 22 are located at the periphery of the auxiliary hologram 23, and the test hologram 24 is located in the middle of the auxiliary hologram 23.

[0044] Further, in the embodiment, the auxiliary hologram 23 is annular.

[0045] Further, in the embodiment, the test hologram 24 is circular.

[0046] Further, in the embodiment, the first alignment hologram 21 and the second alignment hologram 22 are arc-shaped and symmetrically arranged with the center of the auxiliary hologram 23.

[0047] Further, in the embodiment, the first alignment hologram 21 and the second alignment hologram 22 are both attached to the outer circumferential side of the auxiliary hologram 23.

[0048] Further, in the embodiment, the test hologram 24 is attached to the inner circumferential side of the auxiliary hologram 23.

[0049] Further, in the embodiment, there is a gap between the two ends of the first alignment hologram 21 and the second alignment hologram 22.

[0050] The structure of the CGH compensator 2, the sequence of the positions of the spherical mirror 4, the CGH compensator 2 and the laser spherical wave interferometer 1, and the error detection requirement of the plano-convex lens 3.

[0051] Further, in the embodiment, one side of the plano-convex lens 3 is a plane, and the other side is a curved surface with positive and negative mutations of curvature.

[0052] Further, in the embodiment, the position of the laser spherical wave interferometer 1 is fixed in S1 and S2.

[0053] Further, in the embodiment, the distance between the plano-convex lens 3 and the auxiliary hologram 23 is controlled by a gap gauge or a standard length rod in S4.

[0054] The curved surface (aspheric surface) parameters of the plano-convex lens 3 can be: R=721mm, quadratic constant k=0, aspheric surface coefficients A4=6.034e-9; A6=1.135e-13; A8=7.135e-19; A10=4.465e-23. The aperture of the plano-convex lens 3 is φ300mm, and the center thickness is 40mm. Since the curvature of the curved surface of the plano-convex lens 3 has positive and negative mutations, it is called a gull-wing aspheric surface. The laser spherical wave interferometer 1 is configured with a spherical lens to emit a spherical wave test beam. The light emitted by the laser spherical wave interferometer 1 is diffracted through the test hologram 24 and then passes through the plano-convex lens 3 under test, and is converted into a spherical wave front matching the auxiliary spherical mirror 4, and is incident on the auxiliary spherical mirror 4, and then is reflected along the original path to the laser spherical wave interferometer 1, forming an interference fringe pattern, and the curved surface surface error of the plano-convex lens 3 is analyzed and obtained. During measurement, the spherical lens (standard reference mirror) of the laser spherical wave interferometer 1 is placed between the laser spherical wave interferometer 1 and the CGH compensator 2, the measured plano-convex lens 3 is placed on the other side of the CGH compensator 2 relative to the laser spherical wave interferometer 1, and the auxiliary spherical mirror 4 is placed at the end of the optical path. The distance between the CGH compensator 2 and the plane of the plano-convex lens 3 is controlled by a gap gauge or a standard length rod, and zero detection is realized by the diffraction of the CGH compensator 2 and the reflection of the auxiliary spherical mirror 4.

[0055] CGH compensator 2 is composed of alignment holograms (first alignment hologram 21 and second alignment hologram 22), auxiliary hologram 23 and test hologram 24 from outside to inside. Among them, the first alignment hologram 21 and the second alignment hologram 22 are located in the outer ring band area of the CGH compensator 2, the first alignment hologram 21 is used for the pose relationship determination of the auxiliary spherical mirror 4 and the CGH compensator 2, and the second alignment hologram 22 is used for the pose relationship determination of the CGH compensator 2 and the laser spherical wave interferometer 1, the auxiliary hologram 23 is located in the middle ring band area of the CGH compensator 2, and is used to limit the specific angle between the plane side of the plano-convex lens 3 and the CGH compensator 2. The test hologram 24 is located in the central circular area of the CGH compensator 2, and is used to test the surface error of the plano-convex lens 3.

[0056] As shown in Figure 1 and Figure 2 , the first alignment hologram 21 and the second alignment hologram 22 are used to determine the position light system of the laser spherical wave interferometer 1, the CGH compensator 2 and the auxiliary spherical mirror 4 in the detection light path (the light path formed by the test beam) under different positions of the laser spherical wave interferometer 1. First, the laser spherical wave interferometer 1 is used to measure the auxiliary spherical mirror 4, so that the spherical wave focal point 5 coincides with the spherical center of the auxiliary spherical mirror 4, so as to achieve zero position measurement. On the basis of the above light path, the CGH compensator 2 is inserted, and the CGH compensator 2 is adjusted so that the laser spherical wave interferometer 1 tests the first alignment hologram 21 at zero position (the interference fringe pattern formed in the laser spherical wave interferometer 1 is in zero fringe state), so that the position of the CGH compensator 2 and the auxiliary spherical mirror 4 can be fixed, and the first alignment hologram 21 is a reflective hologram; the laser spherical wave interferometer 1 is moved, and the pose of the laser spherical wave interferometer 1 is adjusted, so that the test beam emitted by the laser spherical wave interferometer 1 to the second alignment hologram 22 of the CGH compensator 2 is reflected, so as to return to the laser spherical wave interferometer 1 along the original path, and form an alignment holographic interference fringe pattern. In this way, the position of the CGH compensator 2 and the laser spherical wave interferometer 1 can be fixed.

[0057] As shown in Figure 3 , the auxiliary hologram 23 is used to limit the angle relationship between the plano-convex lens 3 and the CGH compensator 2. The auxiliary hologram 23 is a transmission type hologram, which is used to change the light beam emitted by the laser spherical wave interferometer 1 into a parallel light beam through the auxiliary hologram 23, and then the light beam is incident to the plane side of the plano-convex lens 3, and then reflected to return to the laser spherical wave interferometer 1 along the original path, and form an interference fringe pattern. In this way, the angle relationship between the plano-convex lens 3 and the CGH compensator 2 can be limited.

[0058] The CGH compensator 2 diffracts the light emitted by the laser spherical wave interferometer 1, and then transmits the light through the plano-convex lens 3 to be tested, and then the light is incident to the auxiliary spherical mirror 4, and then the light is reflected along the original path to the laser spherical wave interferometer 1, and an interference fringe pattern is formed, and the aspherical surface shape error of the plano-convex lens 3 is analyzed. Preferably, the test hologram 24 is a transmission type hologram.

[0059] Although the present application has been disclosed in the above preferred embodiments, it is not intended to limit the present application. Any person skilled in the art can make many possible changes and modifications to the technical solutions of the present application, or modify equivalent embodiments with equivalent changes, without departing from the scope of the technical solutions of the present application, by using the technical contents disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present application, without departing from the content of the technical solutions of the present application, shall fall within the scope of protection of the technical solutions of the present application.

Claims

1. A gull-wing aspherical plano-convex lens reverse hybrid compensation interferometric testing method, characterized in that, The method comprises the following steps: S1, determining the position of the auxiliary spherical mirror (4): the laser spherical wave interferometer (1) emits a test beam to the auxiliary spherical mirror (4), the test beam is reflected back to the laser spherical wave interferometer (1) after irradiating the auxiliary spherical mirror (4), and interference occurs between the test beam and a reference beam in the laser spherical wave interferometer (1), thereby forming an interference fringe pattern, the relative position of the auxiliary spherical mirror (4) and the laser spherical wave interferometer (1) is adjusted, so that the spherical center of the auxiliary spherical mirror (4) coincides with the spherical wave focal point (5) of the laser spherical wave interferometer (1); S2, determining the position of the CGH compensator (2): the CGH compensator (2) is inserted between the laser spherical wave interferometer (1) and the auxiliary spherical mirror (4), the laser spherical wave interferometer (1) emits a test beam to the first alignment hologram (21) of the CGH compensator (2), the test beam is reflected back to the laser spherical wave interferometer (1) after irradiating the first alignment hologram (21), and interference occurs between the test beam and a reference beam in the laser spherical wave interferometer (1), thereby forming an interference fringe pattern, the position of the CGH compensator (2) is adjusted, so that the interference fringe pattern formed in the laser spherical wave interferometer (1) is in a zero fringe state; S3, determining the position of the laser spherical wave interferometer (1): the position of the laser spherical wave interferometer (1) is moved, so that the test beam emitted by the laser spherical wave interferometer (1) to the second alignment hologram (22) of the CGH compensator (2) is reflected back to the laser spherical wave interferometer (1) after irradiating the second alignment hologram (22), and interference occurs between the test beam and a reference beam in the laser spherical wave interferometer (1), thereby forming an interference fringe pattern, the pose of the laser spherical wave interferometer (1) is adjusted, so that the interference fringe pattern formed in the laser spherical wave interferometer (1) is in a zero fringe state; S4, inserting the plano-convex lens (3) and determining the angle of the plano-convex lens (3) relative to the CGH compensator (2): the plano-convex lens (3) is inserted between the CGH compensator (2) and the auxiliary spherical mirror (4), the test beam emitted by the laser spherical wave interferometer (1) becomes a parallel beam after the diffraction action of the auxiliary hologram (23) of the CGH compensator (2), irradiates the plano-convex lens (3) on the plane side, and then returns to the laser spherical wave interferometer (1) along the original light path, and interference occurs between the test beam and a reference beam in the laser spherical wave interferometer (1), thereby forming an interference fringe pattern, the angle of the plano-convex lens (3) relative to the CGH compensator (2) is adjusted, so that the interference fringe pattern formed in the laser spherical wave interferometer (1) is in a zero fringe state; S5, error detection: the laser spherical wave interferometer (1) sends a test beam to the test hologram (24) of the CGH compensator (2), the test beam is diffracted by the test hologram (24), then is irradiated to the auxiliary spherical mirror (4) through the plano-convex lens (3), and returns to the laser spherical wave interferometer (1) along the original light path to interfere with the reference beam in the laser spherical wave interferometer (1) to form an interference fringe pattern; the plano-convex lens (3) is moved horizontally, so that the interference fringe pattern formed in the laser spherical wave interferometer (1) is in a zero fringe state, at this time the surface error of the plano-convex lens (3) detected by the laser spherical wave interferometer (1) is the final measurement value; The first alignment hologram (21) and the second alignment hologram (22) are located at the periphery of the auxiliary hologram (23), and the test hologram (24) is located in the middle of the auxiliary hologram (23); the auxiliary hologram (23) is annular; the test hologram (24) is circular; the first alignment hologram (21) and the second alignment hologram (22) are arc-shaped and symmetrically arranged with the center of the auxiliary hologram (23) as the center; the first alignment hologram (21) and the second alignment hologram (22) are attached to the outer peripheral side of the auxiliary hologram (23), and the peripheral side of the test hologram (24) is attached to the inner peripheral side of the auxiliary hologram (23).

2. The gull-wing aspheric plano-convex lens reverse hybrid compensation interferometric testing method according to claim 1, characterized in that: The first alignment hologram (21) and the second alignment hologram (22) are both spaced apart from each other.

3. The gull-wing aspheric plano-convex lens reverse hybrid compensation interferometric testing method according to claim 1 or 2, characterized in that: One side of the plano-convex lens (3) is a plane, and the other side is a curved surface with positive and negative mutations in curvature.

4. The gull-wing aspheric plano-convex lens reverse hybrid compensation interferometric testing method according to claim 1 or 2, characterized in that: In the S1 and S2, the position of the laser spherical wave interferometer (1) is fixed.

5. The gull-wing aspheric plano-convex lens reverse hybrid compensation interferometric testing method according to claim 1 or 2, characterized in that: In the S4, the distance between the plano-convex lens (3) and the auxiliary hologram (23) is controlled by a gap instrument or a standard length rod.

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